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TWI368283B - A wafer packaging method - Google Patents

A wafer packaging method

Info

Publication number
TWI368283B
TWI368283B TW096148814A TW96148814A TWI368283B TW I368283 B TWI368283 B TW I368283B TW 096148814 A TW096148814 A TW 096148814A TW 96148814 A TW96148814 A TW 96148814A TW I368283 B TWI368283 B TW I368283B
Authority
TW
Taiwan
Prior art keywords
packaging method
wafer packaging
wafer
packaging
Prior art date
Application number
TW096148814A
Other languages
English (en)
Other versions
TW200915444A (en
Inventor
Soon-Jin Cho
Jin-Won Choi
Seung-Hyun Cho
Chung-Woo Cho
Dong-Gyu Lee
Seok-Hwan Anh
Original Assignee
Samsung Electro Mech
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Samsung Electro Mech filed Critical Samsung Electro Mech
Publication of TW200915444A publication Critical patent/TW200915444A/zh
Application granted granted Critical
Publication of TWI368283B publication Critical patent/TWI368283B/zh

Links

Classifications

    • H10W72/012—
    • H10W74/00—
    • H10W72/00—
    • H10W72/019—
    • H10W72/07251—
    • H10W72/20—
    • H10W72/251—
    • H10W72/90—
    • H10W72/9223—
    • H10W72/923—
    • H10W72/9415—
    • H10W72/942—
    • H10W72/952—
TW096148814A 2007-09-28 2007-12-19 A wafer packaging method TWI368283B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020070098379A KR100941984B1 (ko) 2007-09-28 2007-09-28 웨이퍼를 패키징하는 방법

Publications (2)

Publication Number Publication Date
TW200915444A TW200915444A (en) 2009-04-01
TWI368283B true TWI368283B (en) 2012-07-11

Family

ID=40508839

Family Applications (1)

Application Number Title Priority Date Filing Date
TW096148814A TWI368283B (en) 2007-09-28 2007-12-19 A wafer packaging method

Country Status (4)

Country Link
US (1) US7736952B2 (zh)
JP (1) JP5114239B2 (zh)
KR (1) KR100941984B1 (zh)
TW (1) TWI368283B (zh)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101047721B1 (ko) * 2010-03-09 2011-07-08 엘지이노텍 주식회사 발광 소자, 발광 소자 제조방법 및 발광 소자 패키지
JP2022542800A (ja) 2019-07-15 2022-10-07 ダウ グローバル テクノロジーズ エルエルシー イソシアネート不含ラミネート用接着剤
EP4539232A1 (en) * 2022-07-19 2025-04-16 LG Energy Solution, Ltd. Battery, and battery pack and vehicle comprising same

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11307624A (ja) * 1998-04-24 1999-11-05 Fujitsu Ltd 半導体装置用キャリア及びその製造方法
JP3439144B2 (ja) * 1998-12-22 2003-08-25 三洋電機株式会社 半導体装置およびその製造方法
JP3629178B2 (ja) * 2000-02-21 2005-03-16 Ｎｅｃエレクトロニクス株式会社 フリップチップ型半導体装置及びその製造方法
US6528393B2 (en) * 2000-06-13 2003-03-04 Advanced Semiconductor Engineering, Inc. Method of making a semiconductor package by dicing a wafer from the backside surface thereof
JP2002064162A (ja) * 2000-08-21 2002-02-28 Ibiden Co Ltd 半導体チップ
US20030114016A1 (en) * 2001-12-18 2003-06-19 Tischler Michael A. Wafer carrier for semiconductor process tool
JP3639265B2 (ja) * 2002-05-28 2005-04-20 松下電器産業株式会社 半導体装置及びその製造方法
JP2004179345A (ja) * 2002-11-26 2004-06-24 Fujitsu Ltd 半導体用基板シート材及びその製造方法、及び基板シート材を用いたモールド方法及び半導体装置の製造方法
KR100618543B1 (ko) * 2004-06-15 2006-08-31 삼성전자주식회사 웨이퍼 레벨 적층 패키지용 칩 스케일 패키지 제조 방법
KR100605314B1 (ko) * 2004-07-22 2006-07-28 삼성전자주식회사 재배선 보호 피막을 가지는 웨이퍼 레벨 패키지의 제조 방법
TWI238483B (en) * 2004-09-01 2005-08-21 Phoenix Prec Technology Corp Semiconductor electrical connecting structure and method for fabricating the same
JP2006151398A (ja) 2004-11-25 2006-06-15 Yamaha Corp 半導体集積回路用梱包テープキャリア
JP4676247B2 (ja) * 2005-05-19 2011-04-27 株式会社ディスコ テープ貼り機
JP2007073681A (ja) * 2005-09-06 2007-03-22 Renesas Technology Corp 半導体装置およびその製造方法
KR100746373B1 (ko) * 2005-12-13 2007-08-03 주식회사 실트론 양면 연마장치의 캐리어 플레이트 구조
JP2006203215A (ja) * 2006-01-23 2006-08-03 Renesas Technology Corp 半導体集積回路装置およびその製造方法
US20080048310A1 (en) * 2006-08-25 2008-02-28 Phoenix Precision Technology Corporation Carrier Board Structure Embedded with Semiconductor Component and Method for Fabricating the Carrier Board Structure

Also Published As

Publication number Publication date
KR20090032831A (ko) 2009-04-01
JP2009088467A (ja) 2009-04-23
TW200915444A (en) 2009-04-01
KR100941984B1 (ko) 2010-02-11
JP5114239B2 (ja) 2013-01-09
US7736952B2 (en) 2010-06-15
US20090087950A1 (en) 2009-04-02

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees