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TWI368035B - Probe device and inspection apparatus - Google Patents

Probe device and inspection apparatus

Info

Publication number
TWI368035B
TWI368035B TW097110604A TW97110604A TWI368035B TW I368035 B TWI368035 B TW I368035B TW 097110604 A TW097110604 A TW 097110604A TW 97110604 A TW97110604 A TW 97110604A TW I368035 B TWI368035 B TW I368035B
Authority
TW
Taiwan
Prior art keywords
inspection apparatus
probe device
probe
inspection
Prior art date
Application number
TW097110604A
Other languages
English (en)
Other versions
TW200848750A (en
Inventor
Takao Yasuta
Tomoaki Kuga
Original Assignee
Nihon Micronics Kk
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nihon Micronics Kk filed Critical Nihon Micronics Kk
Publication of TW200848750A publication Critical patent/TW200848750A/zh
Application granted granted Critical
Publication of TWI368035B publication Critical patent/TWI368035B/zh

Links

TW097110604A 2007-04-27 2008-03-25 Probe device and inspection apparatus TWI368035B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007118128A JP2008275406A (ja) 2007-04-27 2007-04-27 プローブ装置及び検査装置

Publications (2)

Publication Number Publication Date
TW200848750A TW200848750A (en) 2008-12-16
TWI368035B true TWI368035B (en) 2012-07-11

Family

ID=40053539

Family Applications (1)

Application Number Title Priority Date Filing Date
TW097110604A TWI368035B (en) 2007-04-27 2008-03-25 Probe device and inspection apparatus

Country Status (3)

Country Link
JP (1) JP2008275406A (zh)
CN (1) CN101294984B (zh)
TW (1) TWI368035B (zh)

Families Citing this family (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101000418B1 (ko) * 2009-02-05 2010-12-13 (주)유비프리시젼 블레이드 타입의 프로브 블록
JP2011149938A (ja) * 2010-01-22 2011-08-04 Kodi-S Co Ltd フィルムタイプのプローブユニット及びその製造方法
KR101152182B1 (ko) * 2010-05-04 2012-06-15 주식회사디아이 프로브 블록용 프로브 필름 및 이의 제조 방법
KR101152181B1 (ko) * 2010-05-06 2012-06-15 주식회사디아이 디스플레이 패널 검사용 프로브 블록 및 프로브 유닛
KR101177511B1 (ko) * 2010-11-26 2012-08-27 주식회사 코디에스 Ｃｏｇ패널 검사용 프로브유닛
KR101177514B1 (ko) * 2010-11-26 2012-08-27 주식회사 코디에스 Ｃｏｇ패널 검사용 프로브유닛
KR101177513B1 (ko) * 2010-11-26 2012-08-27 주식회사 코디에스 Ｃｏｇ패널 검사용 프로브유닛
KR101177515B1 (ko) * 2010-11-26 2012-08-27 주식회사 코디에스 Ｃｏｇ패널 검사용 프로브유닛
KR101177510B1 (ko) * 2010-11-26 2012-08-27 주식회사 코디에스 Ｃｏｇ패널 검사용 프로브유닛
KR101177512B1 (ko) * 2010-11-26 2012-08-27 주식회사 코디에스 Ｃｏｇ패널 검사용 프로브유닛
JP2013200256A (ja) * 2012-03-26 2013-10-03 Micronics Japan Co Ltd プローブ装置
CN102692530A (zh) * 2012-06-26 2012-09-26 日月光半导体制造股份有限公司 探针结构与薄膜式探针的制造方法
CN104422800B (zh) * 2013-09-09 2017-11-21 宇德曼斯有限公司 用于测试具有微间距阵列的面板的探针单元
KR101541861B1 (ko) * 2014-04-04 2015-08-06 (주)에이티테크놀러지 전도성 필름 전기 검사 장치
KR20160012764A (ko) * 2014-07-25 2016-02-03 주식회사 코디에스 표시판 검사 장치 및 이를 이용한 표시판 검사 방법
CN104464583B (zh) 2014-12-09 2018-05-25 合肥鑫晟光电科技有限公司 一种点灯检测装置以及方法
CN105527040A (zh) * 2016-01-25 2016-04-27 京东方科技集团股份有限公司 一种电路检测装置
CN105842557A (zh) * 2016-03-21 2016-08-10 深圳市小智勇机器人有限公司 一种具有检测功能的点亮治具
CN106483690A (zh) * 2016-12-06 2017-03-08 无锡市创恒机械有限公司 一种ito压屏装置
US11733268B2 (en) * 2018-12-17 2023-08-22 Kabushiki Kaisha Toshiba Probe pin inspection mechanism and inspection apparatus
JP7421990B2 (ja) * 2020-04-08 2024-01-25 株式会社日本マイクロニクス 電気的接続装置および検査方法
CN111896782B (zh) * 2020-08-04 2021-10-26 河南大学 一种无损测量薄膜的探针和测量仪器
KR102458162B1 (ko) * 2020-09-16 2022-10-25 일본전산리드코리아 주식회사 Pcb 검사용 지그

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0797114B2 (ja) * 1993-07-30 1995-10-18 日本アビオニクス株式会社 プローブ
JPH1019991A (ja) * 1996-07-09 1998-01-23 Yokowo Co Ltd 回路基板検査装置のテストヘッド
JP3365612B2 (ja) * 1998-01-30 2003-01-14 富士通株式会社 電子装置用試験装置
JP3958875B2 (ja) * 1998-07-24 2007-08-15 株式会社日本マイクロニクス プローバ及びプローブ針接触方法
JP2003098189A (ja) * 2001-09-26 2003-04-03 Micronics Japan Co Ltd プローブシート及びプローブ装置
JP4634159B2 (ja) * 2004-02-13 2011-02-16 山一電機株式会社 プローブユニット
CN1621848A (zh) * 2004-12-17 2005-06-01 胜华科技股份有限公司 一种接触式薄膜探针

Also Published As

Publication number Publication date
CN101294984B (zh) 2011-07-20
JP2008275406A (ja) 2008-11-13
TW200848750A (en) 2008-12-16
CN101294984A (zh) 2008-10-29

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Legal Events

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MM4A Annulment or lapse of patent due to non-payment of fees