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TWI368035B - Probe device and inspection apparatus - Google Patents

Probe device and inspection apparatus

Info

Publication number
TWI368035B
TWI368035B TW097110604A TW97110604A TWI368035B TW I368035 B TWI368035 B TW I368035B TW 097110604 A TW097110604 A TW 097110604A TW 97110604 A TW97110604 A TW 97110604A TW I368035 B TWI368035 B TW I368035B
Authority
TW
Taiwan
Prior art keywords
inspection apparatus
probe device
probe
inspection
Prior art date
Application number
TW097110604A
Other languages
Chinese (zh)
Other versions
TW200848750A (en
Inventor
Takao Yasuta
Tomoaki Kuga
Original Assignee
Nihon Micronics Kk
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nihon Micronics Kk filed Critical Nihon Micronics Kk
Publication of TW200848750A publication Critical patent/TW200848750A/en
Application granted granted Critical
Publication of TWI368035B publication Critical patent/TWI368035B/en

Links

TW097110604A 2007-04-27 2008-03-25 Probe device and inspection apparatus TWI368035B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007118128A JP2008275406A (en) 2007-04-27 2007-04-27 Probe device and inspection device

Publications (2)

Publication Number Publication Date
TW200848750A TW200848750A (en) 2008-12-16
TWI368035B true TWI368035B (en) 2012-07-11

Family

ID=40053539

Family Applications (1)

Application Number Title Priority Date Filing Date
TW097110604A TWI368035B (en) 2007-04-27 2008-03-25 Probe device and inspection apparatus

Country Status (3)

Country Link
JP (1) JP2008275406A (en)
CN (1) CN101294984B (en)
TW (1) TWI368035B (en)

Families Citing this family (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101000418B1 (en) * 2009-02-05 2010-12-13 (주)유비프리시젼 Blade type probe block
JP2011149938A (en) * 2010-01-22 2011-08-04 Kodi-S Co Ltd Film type probe unit, and method of manufacturing the same
KR101152182B1 (en) * 2010-05-04 2012-06-15 주식회사디아이 Probe film used probe block and method for manufacturing thereof
KR101152181B1 (en) * 2010-05-06 2012-06-15 주식회사디아이 Probe block for examining display panel and probe unit including thereor
KR101177511B1 (en) * 2010-11-26 2012-08-27 주식회사 코디에스 Probe unit for testing chip on glass panel
KR101177514B1 (en) * 2010-11-26 2012-08-27 주식회사 코디에스 Probe unit for testing chip on glass panel
KR101177513B1 (en) * 2010-11-26 2012-08-27 주식회사 코디에스 Probe unit for testing chip on glass panel
KR101177515B1 (en) * 2010-11-26 2012-08-27 주식회사 코디에스 Probe unit for testing chip on glass panel
KR101177510B1 (en) * 2010-11-26 2012-08-27 주식회사 코디에스 Probe unit for testing chip on glass panel
KR101177512B1 (en) * 2010-11-26 2012-08-27 주식회사 코디에스 Probe unit for testing chip on glass panel
JP2013200256A (en) * 2012-03-26 2013-10-03 Micronics Japan Co Ltd Probe device
CN102692530A (en) * 2012-06-26 2012-09-26 日月光半导体制造股份有限公司 Probe structure and method for manufacturing film probe
CN104422800B (en) * 2013-09-09 2017-11-21 宇德曼斯有限公司 Probe unit for testing panel having micro-pitch array
KR101541861B1 (en) * 2014-04-04 2015-08-06 (주)에이티테크놀러지 Electric Inspection Apparatus for Conductive Film
KR20160012764A (en) * 2014-07-25 2016-02-03 주식회사 코디에스 Device and method for testing display panel
CN104464583B (en) 2014-12-09 2018-05-25 合肥鑫晟光电科技有限公司 A kind of lighting detection device and method
CN105527040A (en) * 2016-01-25 2016-04-27 京东方科技集团股份有限公司 Circuit detection device
CN105842557A (en) * 2016-03-21 2016-08-10 深圳市小智勇机器人有限公司 Illumination tool having detection function
CN106483690A (en) * 2016-12-06 2017-03-08 无锡市创恒机械有限公司 A kind of ITO presses screen device
US11733268B2 (en) * 2018-12-17 2023-08-22 Kabushiki Kaisha Toshiba Probe pin inspection mechanism and inspection apparatus
JP7421990B2 (en) * 2020-04-08 2024-01-25 株式会社日本マイクロニクス Electrical connection device and inspection method
CN111896782B (en) * 2020-08-04 2021-10-26 河南大学 Probe and measuring instrument for nondestructive measurement of thin film
KR102458162B1 (en) * 2020-09-16 2022-10-25 일본전산리드코리아 주식회사 Jig for PCB inspection

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0797114B2 (en) * 1993-07-30 1995-10-18 日本アビオニクス株式会社 probe
JPH1019991A (en) * 1996-07-09 1998-01-23 Yokowo Co Ltd Test head for circuit board tester
JP3365612B2 (en) * 1998-01-30 2003-01-14 富士通株式会社 Test equipment for electronic equipment
JP3958875B2 (en) * 1998-07-24 2007-08-15 株式会社日本マイクロニクス Prober and probe needle contact method
JP2003098189A (en) * 2001-09-26 2003-04-03 Micronics Japan Co Ltd Probe sheet and probe device
JP4634159B2 (en) * 2004-02-13 2011-02-16 山一電機株式会社 Probe unit
CN1621848A (en) * 2004-12-17 2005-06-01 胜华科技股份有限公司 Contact type thin film probe

Also Published As

Publication number Publication date
CN101294984B (en) 2011-07-20
JP2008275406A (en) 2008-11-13
TW200848750A (en) 2008-12-16
CN101294984A (en) 2008-10-29

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Legal Events

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MM4A Annulment or lapse of patent due to non-payment of fees