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TWI367146B - Transfer mechanism, transfer apparatus and vacuum processing apparatus - Google Patents

Transfer mechanism, transfer apparatus and vacuum processing apparatus

Info

Publication number
TWI367146B
TWI367146B TW095134983A TW95134983A TWI367146B TW I367146 B TWI367146 B TW I367146B TW 095134983 A TW095134983 A TW 095134983A TW 95134983 A TW95134983 A TW 95134983A TW I367146 B TWI367146 B TW I367146B
Authority
TW
Taiwan
Prior art keywords
transfer
vacuum processing
processing apparatus
transfer mechanism
transfer apparatus
Prior art date
Application number
TW095134983A
Other languages
English (en)
Other versions
TW200815148A (en
Inventor
Hirofumi Minami
Kazuhiro Fujimura
Original Assignee
Ulvac Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ulvac Inc filed Critical Ulvac Inc
Priority to TW095134983A priority Critical patent/TWI367146B/zh
Publication of TW200815148A publication Critical patent/TW200815148A/zh
Application granted granted Critical
Publication of TWI367146B publication Critical patent/TWI367146B/zh

Links

TW095134983A 2006-09-21 2006-09-21 Transfer mechanism, transfer apparatus and vacuum processing apparatus TWI367146B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW095134983A TWI367146B (en) 2006-09-21 2006-09-21 Transfer mechanism, transfer apparatus and vacuum processing apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW095134983A TWI367146B (en) 2006-09-21 2006-09-21 Transfer mechanism, transfer apparatus and vacuum processing apparatus

Publications (2)

Publication Number Publication Date
TW200815148A TW200815148A (en) 2008-04-01
TWI367146B true TWI367146B (en) 2012-07-01

Family

ID=44768738

Family Applications (1)

Application Number Title Priority Date Filing Date
TW095134983A TWI367146B (en) 2006-09-21 2006-09-21 Transfer mechanism, transfer apparatus and vacuum processing apparatus

Country Status (1)

Country Link
TW (1) TWI367146B (zh)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112975910A (zh) * 2021-03-03 2021-06-18 无锡邑文电子科技有限公司 一种去胶机用晶圆传送手臂

Also Published As

Publication number Publication date
TW200815148A (en) 2008-04-01

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