TW200815148A - Transfer mechanism, transfer apparatus and vacuum processing apparatus - Google Patents

Abstract

This invention is to provide a carrying device capable of carrying a to-be-carried article to a correct position while preventing the article from being contaminated by dust. The carrying device comprises a first and a second parallelogram linkages (13, 14). The second parallelogram linkage (14) is formed by using the ring (10) of the first parallelogram linkage (13). The second linkage (14) has four sides of equal length, and linearly extends and retracts along a linear guide (12a). The rings (7a, 9a) of the first parallelogram linkage (13) and the rings (7b, 9b) of the second parallelogram linkage (14) are rotated, in a restrained state at 90 DEG, around pivots (7c, 9c) at both ends of the ring (10) common to the first and second parallelogram linkages (13, 14). An arm (8a) formed to be rotated in a restrained state at 90 DEG relative to a ring (8b) is fitted to a pivot (2) at the end of the ring (8b) facing the link (10) of the first parallelogram linkage (13).

Description

[Technical Field] The present invention relates to a conveying device for transporting a substrate to be processed such as a semiconductor wafer, for example, in particular, one or a plurality of substrates having various processed substrates to be processed. In the substrate processing apparatus of the process chamber, a transfer device suitable for moving in and out of the substrate to be processed is suitable. [Prior Art] Conventionally, in a substrate processing apparatus such as a semiconductor manufacturing apparatus, a transport apparatus for moving in and out of a substrate in a process chamber for performing various processing operations has been proposed. In the past, as such a handling device, for example, those disclosed in Japanese Patent No. 253 1 26 1 are known. 3''''''''''''''''' People, 508. The first parallel ring mechanism 5 0 A is constituted by rings 5 1 , 5 2 , 5 3 , and 5 4 , and the second parallel ring mechanism is constituted by rings 5 1 , 5 5 , 5 6 , and 5 7 . Here, the effective lengths of the rings 51, 52, 55 are the same, and the effective lengths of the rings 53, 54, 56, 57 are also the same. The both end portions of the respective rings 53, 54, 56, 57 are coupled in a rotatable state. Further, the gear 6 3 is fixed to one end of the ring 51 side of the ring 53, and the gear 64 is fixed to one end of the ring 57 on the side of the ring 51. The gear 63 and the -5-200815148 (2) gear 64 are of the same diameter, and Engage each other. In the conventional conveying device 50 having such a configuration, when the drive shaft 62 of the motor 61 fixed to the ring 53 is rotated, the ring 53 is rotated, and the gear 63 is rotated together with the ring 53. At this time, since the parallel state of the ring 51 and the «ring 52 is maintained by the first parallel ring mechanism 50A, the gear 63 rotates relative to the ring 5 1 at an angular velocity of the same magnitude as the drive shaft 62. Then, when the gear 63 is rotated, the gear 64 engaged with it rotates at the same angular velocity in the opposite direction, and therefore the ring 57 belonging to the second parallel ring mechanism 50B also rotates together. As a result, the transfer table 58 fixed to the ring 55 belonging to the second parallel ring mechanism 50B advances back and forth. However, in the prior art, the gear 63 fixed to one end of the ring 53 on the side of the ring 53 and the gear 64 fixed to the end of the ring 57 on the side of the ring 57 are formed to be engaged with each other. Therefore, when the nip portions of the gear 63 and the gear '64 rub against each other, ash of metal or the like is generated. Then, the dust contaminates the object to be transported (not shown) placed on the semiconductor wafer or the like of the transfer table 58. Further, in the prior art, the nip portions of the gear 63 and the gear 64 rub against each other, and the portion of the worn gear causes the backlash of the nip portion to become large, and as a result, the first parallel ring mechanism cannot be made. The power of the 50A is correctly transmitted to the second parallel ring mechanism 50B, and the object to be transported cannot be transported to the correct position. [Patent Document 1] Japanese Patent No. 253 1 261, 200815148 (3) [Problems to be Solved by the Invention] The present invention has been made in order to solve the problems of the prior art, and an object thereof is to provide a A conveying device that can prevent contamination of a moving object such as a semiconductor wafer supported by a carrier without causing dust such as metal, and another object of the present invention is to provide a sliding portion that does not wear and slip. The power of the first parallel ring mechanism can be accurately transmitted to the second parallel ring mechanism, and the object to be transported can be transported to the transport device at the correct position. [Means for Solving the Problem] The present invention has been made in order to solve the above problems, and is a transport mechanism having an i-th ring mechanism formed by a stroke quadrilateral ring mechanism, and sharing the specificity of the first ring mechanism a common ring of the ring and a ring having the same length as the shared ring, and the second ring mechanism φ linearly expandable and contractible in a specific direction, and the fulcrum of at least one end portion of the shared ring constitutes the first ring mechanism The first restraint ring and the second lock ring that constitutes the second ring mechanism are configured to rotate in a state of being restrained at a specific angle, and the first ring mechanism is opposed to the shared ring. The fulcrum of the specific end of the opposing ring is provided with a transporting wrist member configured to rotate in a state in which the opposing ring is restrained at a specific angle. The first invention of the present application is a transport mechanism comprising: a first parallelogram ring mechanism; and a specific ring of the first parallelogram 'ring mechanism; the lengths of the four sides are equal, and the straight line can be oriented in a specific direction. (4) a second parallelogram ring mechanism that expands and contracts, and constitutes a first restraint ring of the first parallelogram ring mechanism at a fulcrum that supports both ends of the shared ring of the first and second parallelogram rings, and constitutes the first The second restraint ring of the parallelogram ring mechanism is configured to rotate in a state of being restrained at a specific angle, and the first parallelogram ring mechanism is opposed to the shared ring. The fulcrum of the specific end of the ring is provided with a transporting wrist member that is configured to be rotated in a state in which the opposing ring is rotated at a specific angle. The second invention of the present application is a transport mechanism having a parallel a first ring mechanism constituted by a quadrangular ring mechanism; and a second ring mechanism having a shared ring sharing a specific ring of the first ring mechanism; and The second restraint ring having the same length of the ring and the first restraint ring of the first ring mechanism and the first restraint ring of the first ring. In the above-mentioned ring mechanism, at a change point of a specific end portion of the opposite ring opposite to the aforementioned shared ring, - - - - - - is provided to rotate in a state in which the opposite ring is restrained at a specific angle A wrist member for transportation that is configured as a method. In the invention, in the invention, the length of the first restraint ring and the length of the transporting wrist member are also equal. In the above invention, in the invention, the length of the first restraint ring and the angle formed by the second restraint ring are angles other than 90°. In the above invention, the third parallelogram ring mechanism is configured to use the first restraint ring, and the fulcrum at both ends of the first restraint ring is restrained at a specific angle. A first wrist member configured to rotate in a state in which the ring 8 - 200815148 (5) is rotated; and a second wrist member configured to rotate in a state in which the opposing ring is locked at a specific angle. Further, the present invention is a transport mechanism comprising: a first ring mechanism composed of a parallel four-ring ring mechanism; a shared ring sharing a specific ring of the first ring mechanism; and a length of the shared ring a second ring mechanism that can be linearly extended and contracted in a specific direction, and a first restraint ring that constitutes the first ring mechanism and a second ring mechanism that constitutes the second ring mechanism at a fulcrum of at least one end of the shared ring The second restraint ring is configured to rotate in a state of being restrained at a specific angle, and the first ring mechanism is provided at a fulcrum of a specific end portion of the opposing ring facing the shared ring. a transporting wrist member configured to rotate in a state of being rotated relative to a specific angle; a parallel loop arm mechanism configured to use the transporting wrist member; and being driven by the parallel loop arm mechanism , Supports the transport part of the object to be transported. Further, the present invention has a plurality of processing chambers connected to a vacuum exhaust system, and is characterized in that the transporting chamber includes a transporting device, and the transporting device has a transporting mechanism having a parallelogram ring. a first ring mechanism composed of a mechanism; a second ring mechanism that is composed of a common ring that shares a specific ring of the first ring mechanism and a ring that has the same length as the shared ring, and that can linearly expand and contract in a specific direction; At a fulcrum of at least one end portion of the common ring, the first restraint ring that constitutes the first ring mechanism and the second restraint ring that constitutes the second ring mechanism are configured to rotate in a state of being restrained at a specific angle. In the ninth ring mechanism, a fulcrum of a specific end portion of the opposing ring that faces the ring is provided with a method of restraining rotation in a state of the opposite ring at a specific angle. a transporting wrist member; a parallel loop arm mechanism configured by using the transporting wrist member; and being driven by the parallel loop arm mechanism to support the transporting object a transport unit; and a vacuum processing chamber configured to receive the object to be processed by using the transport device in communication with the transport chamber. Hereinafter, the principle of operation of the present invention will be described with reference to the drawings. Further, the first and second inventions described below are included in the above-described invention. Fig. 1 is a schematic diagram showing the principle of operation of the transport mechanism of the first invention (1), and the first parallelogram ring mechanism is attached to the rotary shaft (point). In the transport mechanism shown in Fig. 1, the first parallelogram ring mechanism is constituted by the rings Lad, Led, Leo, and Lao, and the second parallelogram ring mechanism is constituted by the loops Lb ο, Lb e, Lee, and Leo. Here, in relation to the present invention, it is equivalent to: a ring Lc〇...a shared ring Lad... a facing ring Lao, a Led... a first restraining ring Lbo, a Lee... a second restraining ring Laf... Further, by using the wrist member, a linear guide (indicated by a dot lock line in the figure) is provided on a straight line passing through the point of the second parallelogram ring mechanism and the point E. In Fig. 1, when the rotation angle of the ring Lao with the X axis as a reference is θα, the fixed angle of the ring Lee and the ring Led is θι ', and the ring Lbo • 10 - 200815148 (7) and the ring Lao The fixed angle is set to θ2, and the @ degree of the ring Lad and the ring Laf is set to θ3, and a straight line (indicated by a two-point lock line) connecting the rotation axis (point 0) and the front end 咅| F of the ring Laf and the X-axis The angle is set such that the angle of the linear guide and the X-axis is set to 0e, and the coordinate of the point F (Xf) is expressed by the following equations (1) and (' when the following condition A is satisfied.

Fixed angle (point, Yf)) Equation 1. The long side of the first parallelogram ring mechanism is the same length (Lcd = Lao = Laf = Lb) 2. The four sides of the second parallelogram ring mechanism are the same length (Lbo = Lbe=Lce=Lco=Ls)

Lao 3. The fixed angle of the ring Lee and the ring Led is the same as the fixed angle of the ring Lbo and .· , · * / ·· (θ 1 = Θ 2 3 θ I 2 )

<Description of the formula>

Xf = OF · cosy x Yf = OF · siny---(1)

Yf = tany · Xf---( 2 ) In 〇, where OF = 2Lb · cosp, γ = 0e - π - ( Θ i2 - θ3 ) /2 β = π - ( θ12 + θ3 ) / 2 The relationship between α and a = 0e - θι2-θα is understood from the above relational expression. Since θβ, θ12, and θ3 do not depend on a certain angle, γ becomes a constant 不 which does not depend on 9a. When this is described by the formula (2), the point F is located on a straight line crossing the X-axis at a certain angle γ through the point -11-200815148 (8). Further, since the length of the straight line OF is a linear function of only Θ a, when the rotation angle 0a of the ring Lao changes, the point F moves on the straight line described by the equation (2). • When the length of the ring Laf is different from the length of the ring Lao, the point ρ ^ is moved on the curve shown in Fig. 3. Fig. 3 is calculated by the same method as described in the above equation to calculate 01 = 02 = 30 and 03 = 90. , 0e=15〇. , Lbc^Lco^Lce^Lbe: 30mm, Lao = Lcd=120mm, the point of the point F. As can be clearly understood from Fig. 3, when Laf = 120 mm, that is, when the length of the ring Laf is the same as the length of ig Lao, the point F moves on a straight line expressed by the equation (2). However, when Laf=100mm or Laf=140mm, that is, when the length of the ring Laf and the length of the ring Lao are different, the trajectory of the point F will show a curve change, and will not be in the equation (2). Move on the indicated line. Fig. 2 is a schematic cross-sectional view showing the principle of operation of the transport mechanism of the present invention (2), and the first parallelogram ring mechanism is attached to the fulcrum moving mechanism (point E). In the mechanism shown in Fig. 2, the first parallelogram ring mechanism is constituted by the rings Lad, Led, Lee, and Lae, and the second parallelogram ring mechanism is constituted by the rings Lbo, Lbe, Lee, and Leo. Here, the relationship with the present invention is equivalent to: Ring Lee...common ring Lad...opposite ring-12- 200815148 (9) Ring Lae, Led... first restrained ring Leo, Lb e... second restrained ring In the Laf... transporting wrist member, a linear guide is provided on the straight line passing through the point of the second parallelogram ring mechanism and the point E (indicated by a point of the lock line in the figure). In Fig. 2, when the rotation angle of the ring Lbo with the X axis as the reference is eb, the fixed angle of the ring Leo and the ring Led is Θ!, and the fixed angle of the ring Lbe and the ring Lae is set to Θ2, the fixed angle of the ring Lad and the ring Laf is θ3, and the straight line connecting the rotating shaft (point Ο) and the front end portion of the ring Laf (point F) (indicated by the two-point lock line) and the angle of the X-axis are set. When γ is used and the angle of the linear guide and the X-axis is 0e, the coordinates (Xf, Yf) of the point F are expressed by the following equations (3) and (4) when the following condition B is satisfied. - * - :, - <Condition B> :. should be 1 · The long side of the first parallelogram ring mechanism is the same length: (Lcd = Lae = LafELb) 2 · The 4 sides of the 2nd parallelogram ring mechanism are the same length (Lbo=Lbe=Lce=Lco3 Ls) • 3· The fixed angle of the ring Leo and the ring Led, and the fixed angle of the ring Lbe and the ring Lae are the same (θ^θθθ^) 4. The fixed angle of the ring Leo and the ring Led Θι, and the relationship between the fixed angle Θ 3 of the ring Lad and the ring Laf are the same size and are the same phase or the opposite phase (θ 1 = ± Θ 3 ) -13 - 200815148 (10) < Description of the formula >

Xf = OF · cosy ' Yf = OF · siny---( 3 )

Yf = taiiy · Xf---( 4 ) Here, when 0!= θ3, OF = 2A · cosa, Y = 0e-cos]{(Ls2 + A2-Lb2)/(2Ls · A)} has A2 = Lb2 + Ls2-2Lb · Ls· cos02, (x = 0e-0b). Also, when θ1 = -θ3, have OF = 2Ls · cosa-2Lb · cos ( a + θ 12 ) ' Y = 〇 The relationship between e and a = 0e-0b. It can be understood from the above relationship that when θ1 = θ3, Lb, Ls, and θ2 are not dependent on the rotation angle 0b of Lbo, so Α becomes constant. θ. .6 does not depend on the rotation angle eb. Therefore, γ becomes a constant 不 that does not depend on eb. Furthermore, when -θ3, Y = ee (=-determination). -·.-·~:. - As described in (4), when θ1 == ±θ3, the point F is on the straight line that intersects the X-axis at a certain angle γ at the point 。. Also, the length of the straight line OF is only The linear function of 0b, so when the rotation angle 0b of the ring Lao changes, the point moves on the straight line described in the equation (4). Further, when the length of the ring Laf is different from the length of the ring Lao, the point F becomes Move on the curve shown in Figure 4. Figure 4 is The above equations describe the same considerations to calculate θι = θ2 = 30ο, 03 = 90°, 0e = 15〇o, Lbo = Lco = Lce = Lbe = -14- 200815148 (11) 30mm, Lao = Lcd= The trajectory of point F at 120 mm. As can be clearly understood from Fig. 4, when Laf = 120 mm, that is, when the length of the ring Laf is the same as the length of the ring Lao, the point F is on the straight line represented by the equation (4). Move. However, when Laf=100mm, or Laf=140mm, that is, when the length of the ring Laf is different from the length of the ring Lae, the trajectory of the point ρ will show a curve change, not in (4) The principle of the second invention is described with reference to the drawings. Fig. 5 to Fig. 1 1 are schematic diagrams showing the principle of operation of the transport mechanism according to the second aspect of the invention. The conditions are as follows: • · ·····-.'·'· . . . · <Constituent condition [T]> Refer to Fig. 5 and Fig. 6; - - (1) Ring 1 〇 i, ring 1 〇 2a, ring 1 〇 3a, ring 103b, ring 104 are rotatably connected around the fulcrum (axis) Ο, A, B, C, D. Here, the four-ring mechanism (first ring mechanism) is constituted by the ring 101, the ring 02a, the ring 1〇3a, and the ring 1〇4. (2) The ring l〇3b is restrained and fixed to the ring l〇3a at an arbitrary angle (η=ZBCD) on the fulcrum c, and the L-shaped arm 1〇3 is formed by the ring 1〇3a and the ring i〇3b (the first and The second restraint ring). (3) The fulcrum 〇, A, B, c, and D are perpendicular to the horizontal plane (the paper surface of the figure). (4) The fulcrum 〇 and the fulcrum D are relative movements on the -15-200815148 (12) line connecting only the fulcrum 支 and the fulcrum ( (the restraint condition between the fulcrum 〇 and the fulcrum D). In addition, other fulcrum movements are not restricted. When the right condition is satisfied [1], then any one of the ring 1 〇 〗, the ring 1 0 2 a, the ring 丨 0 3 a , the ring l 〇 3b, and the ring 104 is rotated around the fulcrum of the direct connection. When the constraint condition of the fulcrum Ο and the fulcrum D (the above condition (4)) exists, the position of each fulcrum is determined relative to the rotation angle (if the constraint condition of the fulcrum Ο and the fulcrum D does not exist, the fulcrum 〇, a, The position of B, C, and D becomes uncertain). However, since the length relationship of these rings has a region in which the rings are not protruded from each other, there is a limitation of "in the movable range of each ring". <Structural bar member [2]> Referring to Fig. 5, Fig. 6, Fig. 6 ring 101 and ring 103a are of equal length (〇A = CB), rings 102a and l3b, and ring 104 are of equal length ( AB = OC = CD ). Here, in the relationship with the present invention, the ring 103b and the ring 1〇4_: correspond to the second ring mechanism, and the ring 104 corresponds to the shared ring. When the constituting condition [2] is added to the constitution condition [1], any one of the ring 101, the ring 102a, the ring 103a, the ring 103b, and the ring 104 is rotated at an angle Θ around the axis directly connecting the ring, and the quadrilateral O ABC Each internal angle is 2 Θ change. This operation will be described using FIG. 5 and FIG. With the above constitution condition [2], the quadrangular OABC becomes a parallelogram, and the triangle OCD becomes a equilateral triangle. -16- 200815148 (13) Fig. 5 and Fig. 6 show the case where the ring is rotated around the fulcrum ,, and in Fig. 5, the angle (Θ) constituting the Υ axis and the ring 1〇1, and the ring 102a and Between the angles (γ = ZOAB) formed by the ring 101, γ = -2θ + η, between the constituent angles of the ring l〇2a and the ring l〇3a (β = Z ABC ), β = 2θ + ( π - η ) The ring 104 and the ring l〇3b form an angle of the X-axis (υ = Z COD = Z CDO ), respectively, and υ = θ + ( π/2 - η ) holds.

Similarly, in the ring mechanism shown in Fig. 6, γ = 2θ + ( π - η ), β = -2θ + η, and υ = -θ - (π/2 - η ) are established. Here, in the case of Fig. 5 and Fig. 6, although the expressions indicating γ, β, and υ are different, the methods of taking the respective angles in the figure are different, and are essentially the same. Then, as described above, the ring 103b is fixed to the ring 103 & (1! = - fixed angle). Therefore, when the ring 101 is rotated around the fulcrum Ο, the amount of change in the angle constituting the ring 102a and the ring 101 (Λγ), and the amount of change in the angle constituting the ring 10a and the ring i〇3a (^β) It is a change amount (2 Δ Θ ) which is twice the angle change (Δ Θ ) of the ring 101. Further, "because of ΛΘ, when the ring 104 is rotated by ΔΘ around the fulcrum Θ, the amount of change (Λγ) of the angle constituting the ring i〇2a and the ring 101 is 2 as the rotation angle (ΛΘ) of the ring 104. The amount of change (2ΛΘ) or more is the case where the ring is rotated by ΔΘ around the fulcrum, but since the quadrilateral OABC is a parallelogram and the triangle OCD is a equilateral triangle, all the rings are around the fulcrum of the direct connection. , relative rotation △ Θ. Thereby, when each of the ring 101, the ring 102a, the ring 103a, the ring 10B, and the ring 104 -17-200815148 (14) is rotated by Δθ around the fulcrum directly connected to the ring, the inner angles of the quadrilateral OABC The system changes to 2ΛΘ. Constitutional conditions [3]··. Refer to Fig. 7 to Fig. 9 (1) ring 101, ring l〇2a, ring l〇3a, ring i〇3b, ring 104, or any one of the L-shaped arms 103 (hereinafter referred to as "ring" In the u"), the arm 1 〇 2b (transport wrist member) is rotatably connected around one fulcrum of the ring U (hereinafter referred to as "fulcrum s"). (2) The length of the arm 102b is equal to the length between the fulcrums of the ring U. (3) The arm 102b is opposed to the other ring connected to the fulcrum S of the ring U, and is restrained and fixed at an arbitrary angle (ξ). Hereinafter, the constitution condition [3] will be described using Figs. 7 to 9 . Figure 7 or Figure 8, The combination of the ring mechanism shown in Fig. 5 or Fig. 6 constitutes the condition [3], and can be rotated around the fulcrum 而 to connect the arm l〇2b, the length of the arm l〇2b—and the ring 101, And the length of the ring 103a is equal (OA = AE), the arm l〇2b and the ring l〇2a ancestor, with any 1 - -- fish degree to restrain the fixed (ξ = ΖΒΑΕ), with the ring l 〇 2a and the arm i The 〇 2b constitutes the L-shaped arm 102. The other configurations are the same as those shown in Figs. 5 and 6. When the constituting conditions [2] and [3] are added to the configuration condition [1], the arm 102b is rotated around the fulcrum A with the ring 〇2a, and as a result, it can be understood from the above description of the constituting condition [2]. When making a ring around the fulcrum! 〇! Rotate ΔΘ, or rotate the ring 104 around the fulcrum ΛΘ, or rotate the ring l〇3b by ΔΘ around the fulcrum D, the arm 102b and the ring 〇1 -18 - 200815148 (15) form an angle ( Ζ Ο AE ), the angle (2ΛΘ) of the rotation angle (ΛΘ) of the ring 1 〇1 is rotated around the fulcrum A. Also, the triangle ΟΑΕ is a equilateral triangle, zaOE = ΖΑΕΟ. When the angle of formation (ζ 〇αε ) of 'arm 1 02b' and ring 1 〇 1 is increased by 2ΛΘ, ZAOE and ZAEO decrease ΛΘ, respectively. Thus, when the ring 101 or the ring 104 is rotated around the fulcrum, or the ring 103b is rotated around the fulcrum D, the front end (ug) of the arm 102b is attached to the front end (E) of the arm 1 〇 2b, and the fulcrum Move on the straight line (L) of the 〇. In addition, the ninth figure is an example of the case where the ring 103b is rotated around the fulcrum 在 in the configuration shown in Fig. 8, but here, the rotatable connection around the fulcrum b and the fulcrum D and the fulcrum B Arms of equal length 10 2b ( BD = BE ): The arm l〇2b is opposite to the ring 102a and is fixed at any angle (ξ= Ζ ABE ) to the thumb bundle, and the ring 1 〇 2a and the arm 1 〇 21) to form L ·Type arm 102 〇TM ·* · · : In the case of this example, the rotation ring 1〇1 or ring 1〇4 around the fulcrum ,, or the rotation ring l〇3b at the fulcrum of the fulcrum D, the arm i〇 The front end (E) of 2b moves on the straight line (L) connecting the front end (E) of the arm 102b and the fulcrum D. [Construction conditions] [4], and the ring 105 and the ring 107 are rotatably connected around the fulcrum A and the fulcrum 两端 at both ends of the ring 101 of the first ring mechanism, with reference to Fig. 10 and Fig. 11 (1). Around the fulcrum F at the end of the ring 〇5 and the fulcrum G of the extremity of the ring 1 〇7, the connecting ring 106 of the -19-200815148 (16) can be rotated to form a four-section mechanism. (The third ring mechanism). (2) The fulcrum F and the fulcrum G are perpendicular to the horizontal plane (the paper surface of the figure). (3) The ring 105 is opposite to the ring 102a and is fixed at a certain angle (ZBAF). The ring 107 is opposite to the ring 104 at a certain angle (ZCOG.  ) to be restrained and fixed. Further, the configuration angle (ZBAF) of the ring 1〇5 and the ring 10〇2a, and the configuration angle (z COG) of the ring 107 and the ring 104 are equal to 0. And any angle other than 180° (R=ZBAF=ZCOG, p#〇 0, 180.). (4) Ring 105 and ring 107 are of equal length (AF = 0G), and ring 106 is equal in length to ring 101 (GF = OA). Hereinafter, the constitutional condition [4] will be described using FIG. 1 and FIG. Fig. 10: Fig. 1 is a configuration of the transport mechanism assembly condition [4] shown in Fig. 5 and Fig. 6, and the other sweeps are the same as those of Figs. 5 and 6. _ — - . . . . .  When the constitution conditions [1] are added to the constituent conditions [2] and [4], the first ring mechanism composed of the rings 101, 102a, 103a, and 104 is. Even when it is in a dead state (straight line state), the angle of the ring 102a and the ring 101' (γ = ΖΟΑΒ) is constituted by the operation of the parallelogram ring mechanism composed of the rings 1, 1 , 105, 106, and 107. The angle is changed to 2 times (2 Θ ) of the rotation angle (Θ) of the ring 101, the ring 104, and the ring 10〇3b. Further, when the third ring mechanism constituted by the rings 101, 156, 106, and 107 is in a dead state, the operation of the first ring mechanism constituted by the rings 101, 10a, 103a, and 104 is performed. , become the same action state. -20- 200815148 (17) According to the present invention described above, since the sliding portion is not present due to the engagement of the gear of the prior art, the combination of the ring mechanisms transmits the power and carries it. Therefore, dust such as metal is not generated, and contamination of the semiconductor wafer or the like of the object to be transported can be prevented. Further, since there is no problem of backlash due to abrasion of the sliding portion, etc., the object to be transported can be transported at the correct position. In particular, according to the first aspect of the invention, since the second parallelogram ring mechanism is configured by four rings, for example, the point E shown in Fig. 1 can be accurately moved straight, and the handling with good conveyance can be obtained. mechanism. Further, according to the second aspect of the invention, the transport mechanism having a smaller number of loops and a simpler configuration can be obtained. Then, in the present invention, when the length of the first restraint ring and the length of the transport wrist member are equal, the transport can be linearly moved. In the front end portion α of the wrist member, the angle of formation of the opposing ring and the arm member is 90°, and the angle of formation of the first restraint ring and the second restraint ring is 90°. The front end portion of the transporting wrist member can be moved to the telescopic direction of the second ring mechanism. Further, in the first aspect of the invention, when the angle of the configuration of the first restraint ring and the second restraint ring is 90° or more, the second parallelogram is formed at a position where the transport wrist member overlaps the first restraint ring. Since the ring mechanism does not have a straight line shape and forms a parallelogram, the carrier member for transportation can be stably rotated. Furthermore, in the present invention, the first restraint ring is used, and the fulcrum at both ends of the first restraint ring is rotated in a state in which it is restrained at a specific angle of -21 to 15 15148 (18) with respect to the shared ring. The first parallel member of the first wrist member and the third parallelogram ring mechanism of the second wrist member that is rotated in a state of being restrained at a specific angle with respect to the opposing ring, the first parallelogram ring mechanism and the third parallel Since the quadrangular ring mechanism is located at the fixed point position at the same time, the rotation direction is not unstable at the individual fixed point positions, and the rotation-transporting wrist member can be stably rotated. According to the present invention, there is provided a vacuum processing apparatus which is capable of preventing contamination of a semiconductor wafer to be transported and the like, and transporting the object to be transported to a proper position, thereby contributing to an improvement in productivity. [Effects of the Invention] According to the present invention, it is possible to convey the object to be transported to a correct position with higher accuracy without contaminating the object to be transported such as a semiconductor wafer. BEST MODE FOR CARRYING OUT THE INVENTION Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the drawings. Fig. 1 is a view showing a basic configuration of an embodiment of the transport mechanism according to the first aspect of the invention, and Fig. 13 (a) to (d) are explanatory views showing the operation of the transport mechanism. As shown in Fig. 12, the transport mechanism 15' of the present embodiment has a first parallelogram ring mechanism because the first parallelogram ring mechanism is attached to the rotating shaft (point 0) described in Fig. 1 (first) a parallelogram ring mechanism 13 3 and a second parallelogram link (first parallelogram ring mechanism) 14 . -22- 200815148 (19) The first parallelogram link 13 is constituted by an arm (ring) 7a, a ring 8b, a ring 9a, and a ring 1〇. In the case of a % of the shape, the arm 7a and the ring 9a use a member longer than the ring 8b and the ring 10 . The outer parallel 'first parallelogram link 14 is: a ring 7 (b) which is the same as the ring of the first parallel four-sided link 13 (common ring), and a ring 7 b, ring 1 respectively. 1. The ring 9 b is composed. φ ring 1 〇 is a ring (opposite ring) 8b that is mounted to be rotated about the fulcrum 1 and the fulcrum 4 at both ends, and is opposite to the ring 10, with the fulcrum 2 and the fulcrum 3 of the two as the center , while the rotatable is installed. In the case of this embodiment, 90 is provided on the fulcrum 7c at one end of the ring 10 sharing the first and second parallelogram links I3, I4. In the angle (Θ2), the arm 7a (the first restraint ring) constituting the first parallelogram link 13 and the ring 7b (the second restraint ring) constituting the second parallelogram link 14 are rotated and closed. Composition. . That is, the arm 7a and the arm 7b are contracted to constitute the L-shaped arm 7, and the constricted portion 7c of the arm 7a and the arm 7b is rotatably mounted around the fulcrum 1, and the constricted portion 7c of the arm 7a and the end portion on the opposite side are attached. The fulcrum is mounted to the fulcrum 2, and the end portion 7c of the ring 7b and the opposite end are rotatably mounted to the fulcrum 5. Then, a motor driving force (not shown) is supplied to the L-shaped arm 7 to construct it. Further, the fulcrum 9c at the other end of the ring 10 of the first and first parallelogram links 13, 14 is at 90. The angle (θ2) is restrained. -23- 200815148 (20) The arm 9a of the first parallelogram link 13 (the first restraint ring) and the ring 9b (the second restraint ring) constituting the second parallelogram link 14 The state is rotated down to form. That is, the arm 9a and the arm 9b are contracted to constitute the l-shaped arm 9, and the constricted portion 7c of the arm 9a and the arm 9b is rotatably mounted around the fulcrum*, and the concluding portion 9c of the arm 9a and the opposite side are The end portion is rotatably mounted on the fulcrum 3, and the end portion of the ring 9b and the end portion on the opposite side are rotatably attached to the fulcrum 6. Here, the second parallelogram link 14 has a different height between the fulcrum 4 and the fulcrum 5. When the L-shaped arm 7 is rotated, for example, the fulcrum 5 is configured to pass the lower side of the fulcrum 4. Further, in the present embodiment, the fulcrum 2 at the end portion of the ring 8b facing the ring 10 of the first parallelogram link 13 is opposed to the ring 8b, for example, at an angle of 90° ( Θ3) The arm 8a (transport wrist member) that is rotated in a restrained state. _.  That is, the arm 8a and the ring 8b are contracted to constitute the L-shaped arm 8, and the engagement portion 8c of the arm 8a and the ring 8b is rotatably mounted around the fulcrum 2, and the concluding portion 8c_ of the ring 8b and the end portion on the opposite side are attached. Rotatablely attached to the fulcrum 3 in the present embodiment, the arm 8a is configured such that the lengths of the arm 7a and the ring 9a are equal, whereby the front end portion 80 of the arm 8a passes through the fulcrum 1 and On the straight line (handling line) of the fulcrum 6. Further, in the present embodiment, the fulcrum 1 is provided at one end portion of the elongated substrate 29. -24-200815148 (21) The substrate 29 extends in the longitudinal direction thereof, and is provided with a linear guide (guide portion) 12a which is formed to have a change in relative positional relationship with the fulcrum 1. Then, the fulcrum 6 of the second parallelogram link 14 is provided with a fulcrum moving mechanism 12 which is configured to move along the linear guide 12a, whereby the second parallelogram link 14 is along the line guide Guided by 12a and linearly stretched, the fulcrum 6 is moved along a point of the lock line passing through the fulcrum 1 in the figure. 0 (a) to (d) are explanatory views showing the principle of operation of the embodiment of the present embodiment. Fig. 13 (a) is set to an initial state. This state is the same as the state shown in 12. Now, when the L-arm 7 is rotated by an angle Θ in the CW (clockwise) direction with the fulcrum 1 as the center, the arm 7b and the arm 7a are rotated together, and the angle θ is rotated toward the CW direction around the fulcrum 1. At this time, the fulcrum 6 is moved by the fulcrum, and the mechanism 1 2 is synchronized with the movement of the ring 7 b and the ring 1 1 _, and moves linearly along the direction in which the linear guide Ka is separated toward the gas fulcrum i: The parallelogram link 14 has a shape in which a parallelogram is maintained while changing the form. The ring 10 is rotated at an angle Θ toward the CCW (counterclockwise rotation) centering on the fulcrum 1. In the present embodiment, the first parallelogram link 13 is constituted by the ring 7a, the ring 8b, the ring 9a, and the ring i ,. Therefore, when the ring i 〇 is rotated at an angle θ toward the ccw direction centering on the fulcrum 1 At this time, the ring 8b is rotated by the angle Θ in the CCW direction around the fulcrum 2, whereby the 'arm 8a and the ring 8b are simultaneously -25-200815148 (22), and the angle θ is rotated toward the ccw direction centering on the fulcrum 2. When such a series of operations are considered on the basis of the fulcrum 2, since the arm 7a is rotated by an angle Θ toward the CW direction around the fulcrum 2, and the arm 8a is rotated at an angle Θ toward the Ccw direction with the fulcrum 2 as the center, the arm 8a and the arm 7a is opposite to each other, and the angle θ is rotated toward the ccw direction centering on the fulcrum 2 (as shown in Fig. 13(b)). In the present embodiment, the length of the arm 8a is the same as the length of the arm 7a. Therefore, the distal end portion 80 moves toward the fulcrum 1' on the linear guide 12a (the transport line) by the rotation of the arm 8a. Further, in the present embodiment, since the heights of the fulcrum 4 and the fulcrum 5 are different, when the L-shaped arm 7 is rotated in the CW direction, the fulcrum 5 passes through the lower side of the fulcrum 4 as shown in Fig. 3 (c). The positional relationship between the fulcrum 4 and the fulcrum 5 becomes the opposite state. Here, in the present embodiment, since the length of the arm 8a is equal to the length of the arm 7a, the front end portion 80 of the arm 8a moves along the conveyance line and passes through the fulcrum 1'. Then, when the L-shaped arm 7 is used When rotating in the CW direction, as shown in Fig. 3(d), the distal end portion 80 of the arm 8a moves in a direction separating from the fulcrum 1. Returning to the state of Fig. 13(a) from the state of Fig. 13(d), the L-arm 7 is rotated in the opposite direction (CCW) from the above-described operation. In this manner, the rotational power of the L-shaped arm 7 is transmitted to the L-arm 8, and the L-arm 8 is rotated only by the angle ' twice the rotation angle of the L-arm 7' to control the operation. Fig. 14 is a schematic view showing a configuration of an embodiment of the transporting device of the first aspect of the invention, which is carried out by a parallel ring type arm mechanism. As shown in Fig. 14, the transporting device 60a of the present embodiment has a parallel loop arm mechanism 26 because it uses the transport mechanism 5a having the same configuration as the transport mechanism 15 described above. Hereinafter, the detailed description of the portions corresponding to the above-described embodiments will be omitted. The parallel ring-shaped arm mechanism 26 is an upper wrist link 27 composed of upper arms 17a, 17b and rings 23, 24 which are respectively opposed in parallel; and a lower arm 18a, 18b, ring 24 which are respectively opposed in parallel The lower wrist link 28 formed by the transport table (transporting unit) 16. The upper arm 17a of the upper wrist link 27 is connected to the arm 7a, and is rotatably attached to the fulcrums 1, 2 at both end portions thereof, and the rings 23, 24 are attached, and further, at the fulcrums of the rings 23, 24 2. The fulcrums 22, 19 on the opposite side are rotatably mounted with a ring 17b. Here, the fulcrum 22 is an extension line of the linear guide 12a provided on the substrate 29. Further, since the lower arm 18a of the lower wrist link 28 corresponds to the arm 8a, the L-shaped arm 18 is formed to be connected to the ring 8b, and the contracting portion is rotatably attached to the fulcrum 2. * Then, the lower arm 18b opposed to the lower arm 18a is a fulcrum 19 that is rotatably attached to the upper wrist link 27, and the lower arms 18a, 18b are rotatably mounted on the transport table. The fulcrum of 20 is 20, 2 1. In the case of this embodiment, the lengths of the rings 23 and 24 (the distance between the fulcrums) and the distance between the fulcrums of the transport table 16 (the length between the fulcrums 20 and 21 -27 - 200815148 (24)) are the same. And constitute. Further, the lengths (distance between the fulcrums) of the upper arms 17a and 17b and the lower arms 18a and 18b are also the same. An end effector 25 for mounting an object to be transported (not shown) such as a wafer is attached to the front end portion of one of the transfer tables 16 . .  In the case of the conveying device 60a of the present embodiment, since the linear guide 12a, the fulcrum 1, the ring 23, and the fulcrum 22 are attached to the common substrate 29, the linear guide 12a is formed during the expansion and contraction operation and the rotation operation. The relative positional relationship of the fulcrum 1, the ring 23, and the fulcrum 22 does not change. Further, in the conveying device 60a of the present embodiment, the fulcrum 1 and the fulcrum 22 are connected by the ring 23, but the fulcrum 1 and the fulcrum 22 may be directly provided on the common substrate 29. At this time, although the ring 23 is not required, the telescopic operation and the rotational operation of the transporting device are the same as those of the transporting device ό 0 a of the present embodiment. Fig. 15 (a) to (d) are explanatory views showing the expansion and contraction operation of the conveying device _ of the embodiment, and Fig. 15 (a) shows the state of shortening in the initial state. In the case of the present embodiment, since the upper arm 17a, 17b, and the rings 23 and 24 constitute the parallelogram upper arm link 27, when the upper arm 17a is rotated by the angle Θ in the CCW direction around the fulcrum i, The upper arm 17b is also centered on the fulcrum 22, and is rotated in the direction of (: €\¥ direction, whereby the ring 24 is moved in parallel with the ring 23. At the same time, the operation principle of Fig. 3 is explained. By the operation of the transport mechanism 15a, the lower arm 18a is rotated by an angle of 2 朝向 in the CCW direction with the lower arm 18a being centered on the branch -28-200815148 (25) point 2. Thus, the upper arm 17a is centered on the fulcrum 1 and is oriented When the CCW direction is rotated by Θ, the position of the lower arm 18a and the ring 24 is determined. Since the shape of the parallelogram of the lower wrist link 28 can be collectively determined, the conveying device is as shown in Fig. 15(b) - Fig. 15(c) - As shown in Fig. 15(d), the extension operation is performed, whereby the end operator 25 moves on the extension line (the conveyance line) of the linear guide 12a from the fulcrum 1 toward the fulcrum 22 (the right direction in the drawing). ® extends from Figure 15 (d) When the state returns to the shortened state shown in Fig. 15(a), the upper arm 17a is rotated in the opposite direction (CCW direction) from the above-described operation. Thus, by rotating the upper arm 17a, the telescopic operation of the transport device is performed. The transport table can be moved in parallel on the transport line: 16 and the end effector 25, as described above. In the transport device 60a of the present embodiment, the ring 10 which constitutes the first parallelogram link 13 is shared. The second parallelogram link 14 is formed, and the fulcrum 6 of the second parallelogram link 14 is moved in parallel by the fulcrum moving mechanism 12. Thereby, the rotational motion of the upper arm 17a is transmitted to the lower arm 18a, and Since the lower arm 18a is rotated only by twice the angle of rotation of the arm 17a, the operation of the upper wrist link 27 is correctly transmitted to the lower wrist link 28. Thus, according to the present embodiment, there is no gear by the prior art. The sliding part of the occlusal is transmitted by the combination of the ring mechanism and transported. -29- 200815148 (26) Therefore, it is possible to prevent the conveyance of objects and semiconductor wafers without causing ash such as metal. Sewage In addition, according to the present embodiment, there is no problem of backlash due to abrasion of the sliding portion, and the power is transmitted correctly between the upper wrist link 27 and the lower wrist link 28, and the object to be transported is transported. In the above-described embodiment, the case where the upper arm 17a is rotated about the fulcrum 1 is described as an example 0 with respect to the expansion and contraction operation of the conveying device 60a, but the fulcrum 22 is centered on When the upper arm 17b is rotated, the telescopic operation can also be performed. This operation is the same as the case where the upper arm is rotated 1 h, and thus detailed description thereof will be omitted. Further, in the above-described embodiment, the case where the upper arm 17a is rotated about the fulcrum 1 is described as an example of the expansion and contraction operation of the transport device 60a. However, the drive shaft 32 is provided at the fulcrum 1, and the drive shaft 3 is provided on the drive shaft 3 2 Install the upper arm l7a. , The drive shaft 32 is rotated, and around the fulcrum 1: the upper arm 17a is rotated. φ In addition, When the conveying device 60a of the present embodiment is rotated, the parallel ring type arm mechanism 26 does not change the relative position of the substrate 29 and the upper arm 17a in the shortened state shown in Fig. 15(a), but is surrounded by the fulcrum i Rotating the substrate 2 is performed. Alternatively, in the same shortened state, the substrate 29 and the drive shaft 3 2 are simultaneously oriented in the same direction, and only the same angle is rotated. Further, in the above-described conveying device 60a, although the backlash 25 is attached only to one side of the transfer table 16, However, the present invention is not limited thereto. For example, as shown in the sixth embodiment, the end effectors 25a and -30 - 200815148 (27) 25b may be attached to both sides of the transfer table 16. According to the seed dressing structure, the handling efficiency of the object to be transported can be improved. Since the telescopic operation of the transporting apparatus is basically the same as that of the transporting apparatus 60a shown in Figs. 15(a) to (d), the description thereof will be omitted. However, in the substrate processing apparatus including the transport apparatus of the present invention, there is a demand for holding an object to be transported such as two wafers at the same time, or a request for reducing the radius of rotation of the transport device. In order to meet the appropriate requirements, the lower wrist link 28 of the conveying device 60a shown in Fig. 14 is required to move beyond the position overlapping the upper wrist link 27. Fig. 17(a) is an explanatory view showing a state in which the conveying device of the embodiment is at an overlapping position, and Fig. 17(b) is a view showing a state of the conveying mechanism at this time. As can be understood from Fig. 17 (a) and (b)', the ring 7b, the ring, the ring 9b, and the ring 10 constituting the second parallelogram link 14 are linear. (In Fig. 17 (13), it can be seen from the positional relationship of the hovering; it is indicated by the two subdivision fulcrums 1, 2, and 6). As shown in Fig. 17 (b), when the upper arm 17a is rotated in the CW direction with the fulcrum 1 as the center in this state, the ring 1 〇 is fulcrum because the rotation direction of the ring 1 无法 cannot be forcibly determined. 1 is the center, and it is not determined to rotate in either of the CW direction and the CCW direction. As a result, since the rotation direction of the ring 8b constituting the first parallelogram link 13 cannot be determined, the rotation direction of the lower arm 18a cannot be determined, and the lower wrist link 28 cannot move beyond the overlapping position - 31 - 200815148 (28) . In this way, the actions of the respective links that cause the overlapping positions become unstable. Fig. 18 (a) to (c) are schematic diagrams showing the configuration of another embodiment of the transport mechanism according to the first aspect of the invention and the expansion and contraction operation thereof for solving the above problems. Figs. 18(a) to (c) are particularly shown in Fig. 8(b), in the transport mechanism 15b of the present embodiment, the mounting angle θ2 of the ring 7b opposed to the arm 7a, and the ring 9a. The attachment angle of the ring 9b is equal to an angle other than _90°, and is configured to be equal (in Fig. 18(b), it can be seen from the positional relationship of the ring that the fulcrum 2 and the fulcrum 2 are divided). Then, with this, the attachment angle θ4 of the linear guide l2a opposed to the conveyance line (X-axis direction) is not an angle of 0°, and particularly in the present embodiment, the ring 7b opposed to the arm 7a The mounting angle θ2 (=the mounting angle Θ! of the ring 9b opposed to the ring 9a) is equal to and constitutes 〇. Then, with this configuration, the front end portion 80 of the ring 8 b and the point moving machine •, * ' - φ The structure I2 (the fulcrum 6) can be moved relative to an angle other than 〇~. In the case of the present invention, the mounting angle Θ2 of the ring 7b opposed to the arm 7a, the mounting angle Θϊ of the ring 9b opposite to the ring 9a, and the mounting angle θ4 of the linear guide 12a opposed to the conveying line are If Θ ! = θ2 is satisfied, it is not particularly limited, and an optimum angle may be set in accordance with the requirements of each device configuration or movable range. Fig. 18(a) is a shortened state of the initial state of the embodiment, and in this state, when the arm 7a is rotated by an angle Θ in the CW direction around the fulcrum, the description is made based on Fig. 3 The principle is that the arm 32 - 200815148 (29) 8a is opposed to the arm 7a, with the fulcrum 2 as the center, and the fulcrum is rotated by an angle of 2 朝向 toward the CCW direction. Then, as shown in Fig. 18(b), the arm 8a reaches directly above the arm 7a. - In this manner, although the arm 8a and the arm 7a are located at the overlapping positions, in the case of the present embodiment, the attachment angle Θ2 of the ring 7b opposed to the arm 7a and the attachment angle 环2 of the ring 9b opposed to the ring 9a are 90. The outer angle thus constitutes the ring 7b, the ring 1 1 , the ring 9b, the ring 10 of the second parallelogram link 14, and the first! In the case of the transport mechanism 15 shown in Fig. 3, the parallelogram cannot be formed in a straight line shape. As a result, when the arm 7a is rotated in the CW direction around the fulcrum 1, the ring 7b rotates in the CW direction around the fulcrum 1, and the ring 10 rotates in the CCW direction around the fulcrum 1, so that the arm 8a passes. Immediately above the arm 7a, as shown in Fig. 18 (c), the arm 8a reaches a position separated from the fulcrum 1: When the state shown in Fig. 18(c) is returned to the state shown in Fig. 18(a), the arm 7a is rotated in the opposite direction (CCW) from the above-described operation. By this action, the arm 8a is rotated at the overlapping position. * The direction is not indefinite, and it can stably pass right above the arm 7a. - Fig. 19 is a schematic structural view showing another embodiment of the conveying device according to the first aspect of the invention, and the conveying device that is conveyed by the parallel ring type arm mechanism, as shown in Fig. 9, the conveying device 6 of the present embodiment Ob uses the above-described transport mechanism 15b, and therefore has a parallel loop arm mechanism 26. -33- 200815148 (30) Here, the parallel ring type arm mechanism 26 is the same as the conveying device 60a shown in Fig. 14, and uses the upper wrist link 27, the lower wrist link 28, the transfer table 16, and the end effector 25 The detailed description is omitted. Further, the transport mechanism 15b is configured such that the arm 7a described in Fig. 16 corresponds to the upper arm 17a, and the arm 8a is configured to correspond to the lower arm 18a. Further, the configuration of the other portions of the transport mechanism 15b is the same as that of the description of Fig. 16, and therefore will be omitted. The operation of the conveying device 60b of the present embodiment is the same as the conveying device 60a shown in Fig. 14 except for the operation of the conveying mechanism 15b, and the operation of a part of the conveying mechanism 15b is as shown in Fig. 18. (a) to (c). Thereby, the detailed description of the expansion and contraction operation and the rotation operation of the present embodiment will be omitted. As described above, in the conveying device 60b of the present embodiment, the ring 10 constituting the first parallelogram link 13 is shared to constitute the second parallel/quadrilateral link 14, and the fulcrum 6 of the second parallelogram link 14 Yes _ moves in parallel by the fulcrum moving mechanism 12. Thereby, the rotational motion of the upper arm 17a is transmitted to the lower arm 18a, and only the angle of the rotation of the upper arm 17a is doubled to rotate the lower arm 18a, so that the movement of the upper wrist link 27 is correctly transmitted to the lower wrist link. 28. According to the present embodiment, as in the above-described embodiment, dust such as metal is generated in the sliding portion, and contamination of the semiconductor wafer or the like of the object to be transported can be prevented, and power can be accurately transmitted to the upper wrist link. 27 and the lower wrist link 28' can transport the object to the correct position. -34- 200815148 (31) Further, in the present embodiment, the attachment angle of the ring 7b opposed to the upper arm 17a and the attachment angle of the ring 9b opposed to the ring 9a are not equal to 90 degrees. And the fulcrum moving mechanism 12 is attached to the telescopic movement direction (transport line) of the conveyance table 16 so as to move at an angle other than 0°, so that the rotation direction does not become indefinite at the repeated position, and the The arm 18a is stably passed directly above the upper arm 17a, whereby the lower wrist position 28 can be stably moved beyond the repeated position. In addition, in the substrate processing apparatus including the transport apparatus of the present invention, there is a demand for transporting a transfer object such as a wafer to a further place. With respect to this requirement, as shown in Fig. 20(a), the angle of the lower wrist link 28 and the upper wrist link 27 constituting the parallel ring type arm mechanism 26 is increased as much as possible, and the upper arm 17a is rotated toward the CW direction. As shown in Fig. 20(c), the arrival distance of the end operator 25 is lengthened. In this operation, the parallel ring arm of the conveying device is in the middle of the state from the second figure (a) to the state of the second figure (c), as shown in Fig. 2 (b _ ), the upper arm 17 a: The ring 1 〇, the ring 9 a, and the ring 8 b are in a straight line state (hereinafter, this position is referred to as a "fixed point position"). Fig. 21 is a view showing the state of the transport mechanism 15a at the fixed point position (in the case of Fig. 2, the positional relationship of the loops is shown by the two divided fulcrums 2, 4). In Fig. 21, when the upper arm 17& is rotated in the CW direction with the fulcrum 1 as the center, the ring is moved by the fulcrum moving machine 1 2! Although the 〇 is rotated in the CCW direction, the rotation direction of the ring 8 cannot be forcibly determined in this state. Therefore, the ring 8b is centered on the fulcrum 2, and it is not determined that the -35-200815148 (32) is oriented in the CW direction and the CCW direction. Rotate in one direction. As a result, since the rotation direction of the ring 8b constituting the first parallelogram link 13 cannot be determined, the rotation direction of the lower arm 18a cannot be determined, and the lower wrist link 28 cannot move beyond the overlapping position. In this way, the actions of the respective links that cause the overlapping positions become unstable. Fig. 22 is a schematic block diagram showing another embodiment of the transport mechanism of the first invention, for solving the above problems. In the transporting mechanism 15c of the present embodiment, the connecting portion 8c of the L-shaped arm 8 is integrated with the ring 8b around the fulcrum 2, and the rotatable ring 8d is attached, and the fulcrum 1 is centered on the ring. The 1〇 is integrated and the rotatable ring 30 is mounted. Here, the mounting angle of the ring 30 opposite to the ring 10 and the mounting angle of the ring 8d opposite to the ring 8b. The same size is used to form (05). Further, the fulcrum 2 of the ring 8d and the end portion 33 on the opposite side, the branch point φ1 of the ring 30, and the end portion 34 on the opposite side are respectively rotatably mounted with a ring. 9d. The length of the ring 9d is the same as the length of the arm 7a (the distance between the fulcrums is the same) 〇 Then, the third parallelogram link 3 1 is constituted by the ring 8d, the ring 9d, the ring 30, and the arm 7a. Since the configuration other than this is the same as that of the transport mechanism 15 shown in Fig. 2, the description thereof is omitted. In the case of the present invention, the mounting angle Θ2 of the ring 7b opposed to the arm 7a, the mounting angle θι of the ring 9b opposed to the ring 9a, and the mounting angle θ4 of the linear guide 12a opposed to the conveying line are If it is -36-200815148 (33), it is not particularly limited, and an optimum angle may be set in accordance with the requirements of each device configuration or movable range. In particular, when the mounting angle θ5 of the ring 3 〇 opposite to the ring 1 、 and the mounting angle θ 5 of the ring 8 d opposite to the ring 8 b are small, since the first parallelogram link 13 and the third parallelogram are connected Since the fixed point positions of the rods 3 1 are close to each other and the fixed point position is stable and cannot pass, from this point of view, the mounting angle Θ 5 is set to about 30. To 60. Preferably, the principle of operation of the transport mechanism 15c of the present embodiment will be described using Fig. 22 . In the same manner as shown in Fig. 21, the arm 7a, the ring 10, the ring 9a, and the ring 8b are in a straight line state (in FIG. 22, the positional relationship of the ring is known, and the fulcrum 2 is known. , 4 is divided into 2 to the table • Two: - Show) -. In Figure 22, take the fulcrum! When the arm 7a is rotated in the CW direction as the center, the same as the case of the transport mechanism 5a shown in Fig. 2, "by the operation of the fulcrum moving machine 12, the ring 1 turns in the CCW direction" but due to Since the rotation direction of the ring 8b cannot be forcibly determined, the ring 8b is centered on the fulcrum 2, and is not determined to rotate in either of the CW direction and the CCW direction. However, in the case of the present embodiment, the operation of the ring 10 is integrated. Since the ring 30 is rotated in the CCW direction around the fulcrum 1, the ring 8d constituting the third parallelogram link 3 1 is The fulcrum 2 is centered and rotates in the CCW direction. -37- 200815148 (34) As a result, the ring 8b and the ring 8d are integrally rotated around the fulcrum 2 toward the C C W direction, so that they can be separated from the fixed point position. Similarly, when the ring 8d, the ring 9d, the ring 30, and the arm 7a constituting the third parallelogram link 31 are in a straight line shape (the fixed point position), the ring 8b and the ring 9a constituting the first parallelogram link 13 are The action of the ring 10, the arm, and the 7a allows the ring 8d to be removed from the fixed point position. As described above, according to the present embodiment, the direction in which the arm 8a rotates at the fixed point position does not become indefinite, and the arm 8a can be stably rotated around the fulcrum 2. Fig. 23 is a schematic block diagram showing another embodiment of the conveying device according to the first aspect of the invention, and the conveying device that is conveyed by the parallel ring type arm mechanism, as shown in Fig. 23, the conveying device 60b of the present embodiment It is the use of _ , the above-described transport mechanism 15 c, and therefore has the parallel loop arm mechanism 26 described above.  Oh.  . . . .  . . . . . .  Here, the upper wrist link 27, the lower wrist link 28, and the transfer table 16 of the parallel ring type arm mechanism 26. The structure of the end effector 25, the system and the 14th figure.  The conveying device 60a shown is the same, and a detailed description thereof will be omitted. Further, the transport mechanism 15c is configured such that the arm 7a described in Fig. 22 corresponds to the upper arm 17a, and the arm 8a is configured to correspond to the lower arm 18a. Further, the configuration of the other portions of the transport mechanism 15c is the same as that described in Fig. 22, and therefore will not be described. The operation of the conveying device 60c of the present embodiment is the same as the conveying device shown in Fig. 14 except for the operation of the conveying mechanism 15c, and the operation of a part of the conveying mechanism 15c is as shown in Fig. 22. . -38-200815148 (35) In the above, the detailed description of the expansion and contraction operation and the rotation operation of the present embodiment will be omitted. As described above, the conveyance device 60c according to the present embodiment has the same rotational motion of the upper arm 17a as in the above embodiment. It is transmitted to the lower arm 18a, and only the lower arm 18a is rotated by twice the angle of rotation of the upper arm 17a. Therefore, the operation of the upper wrist link 27 is correctly transmitted to the lower wrist link 28°. According to the present embodiment, In the same embodiment, dust such as metal is generated in the sliding portion, and contamination of the semiconductor wafer or the like of the object to be transported can be prevented, and power can be smoothly transmitted between the upper wrist link 27 and the lower wrist link 28. The handling object can be transported to the correct position. Further, in the present embodiment, since the upper arm 17a constituting the first parallelogram link 13 is shared and the third parallelogram link 3 is formed, the lower arm 8a is rotated at the fixed position. Indefinite and stable, I rotates around the fulcrum 2, and as a result, the lower wrist link 28 can move stably beyond the fixed point position. Further, in the transport mechanism 1 5 c of the present embodiment, the arrangement of the fulcrum moving mechanism 1 2 is the same as that of the fulcrum moving mechanism 1 2 described in FIG. 2, and 'the direction of the expansion and contraction of the transport table 16 is relatively small. Although it is attached at an angle of °, it may be attached to the telescopic direction of the transport table 6 and an angle other than 〇°, similarly to the embodiment shown in Fig. 18. In this case, there is no problem in the movement of the arm 8a or the lower arm 18a at the fixed point position. Next, an embodiment of the second invention will be described with reference to the drawings. Further, in the case of -39-200815148 (36), the description of the parts overlapping with the above description will be omitted if it is not particularly necessary. Fig. 24 and Fig. 25 are schematic diagrams showing the basic configuration of an embodiment of the transport mechanism of the second invention. The transport mechanism 200A of the present embodiment takes all of the above-described basic configurations [1] to [4], for example, the configuration shown in Fig. 7 or Fig. 8, and the third loop mechanism is added. Here, around the fulcrums A, A, B, and C, the first ring machine constituting the parallelogram ring mechanism is rotatably coupled with the ring 101, the ring 10〇2a, the ring l〇3a, and the ring 1〇4. Carry 201. Then, in the ring 103b of the second restraint ring, the ring 〇3a of the first restraint ring is opposed to the ring l〇3a of the first restraint ring, and is fixed at an arbitrary angle (η=ζΒ CD), and the ring l〇3a and the ring are fixed. 103b is integrated around the fulcrum C, and is rotated as an L-shaped arm 103. The ring 103b is a link that is equal in length to the ring 104 of the shared ring and rotatable around the fulcrum D^, thereby forming the second ring mechanism 202 by means of the 〇3b and the ring 104. Further, the arm 102b of the transport wrist member having the same length as the length of the ring 101 is restrained and fixed to the ring 102a at an arbitrary angle (ξ) on the fulcrum A, and the ring 102a and the arm 102b become around the fulcrum A. One body is rotated as an L-shaped arm 102. Further, a ring 105 and a ring 1〇7 are rotatably connected around the fulcrum A and the fulcrum of both ends of the ring 1〇1 of the first ring mechanism 201, and the fulcrum F of the end of the ring 105 and A ring 106 is rotatably coupled around the fulcrum G at the end of the ring 107, and a ring-shaped ring mechanism is formed by a ring of the same length as the first ring mechanism 201, that is, a third ring. Agency 203. Here, the ring 105 is opposed to the ring 102a, restrained and fixed at a constant angle (ZBAF), and the ring 107 is opposed to the ring 104 and restrained at a constant angle (ZCOG). Further, the angle of formation of the ring 105 and the ring 102a (ZBAF) is equal to the angle of formation of the ring 107 and the ring 104 (ZCOG), and is an angle other than 〇° and 18 0° (p=ZBAF=ZCOG, μ parameter 0, 180〇) 〇® In addition, for the angle μ, it is desirable to set the optimum mounting angle by the device configuration, the movable range, etc., but when the angle μ is too small, the first ring mechanism 201 and the third ring mechanism 203 Since the fixed point positions are close to each other and cannot pass through the fixed point position stably, it is preferable from the viewpoint that the angle μ is set to 30° to 60°. In the transport mechanism 200A of the present embodiment, when the ring 101 or the ring 104 is rotated around the fulcrum 、 or the ring 10〇3b is rotated around the fulcrum D, the distal end (E) of the arm 10b is connected to the arm 1 Move the front end (E) of the 〇2b and the straight line (L) of the fulcrum 〇. According to the present embodiment, the third ring mechanism 203 is provided. As in the case described in the embodiments shown in Figs. 2 and 22, the arm 102b is not moved because the position of the fixed point can be removed. At the point position, the direction of rotation does not become indefinite, but it can be stably rotated around the fulcrum A. Figs. 26 to 28 are schematic structural views showing an embodiment of the conveying device according to the second aspect of the invention, and are a conveying device for the ring type arm mechanism using the above-described conveying mechanism 200A and peace 200815148 (38). Here, the conveying devices 3A, 3BB' shown in Figs. 26 and 27, for example, in the conveying mechanism 2A shown in Fig. 24, η = 90. , μ = 60°, ξ = 90°. The following is a description of the handling device 30A shown in Fig. 26 as an example.  The carrier device 300 has the same parallel ring arm mechanism 1 26 as the parallel ring arm mechanism 26 shown in Fig. 14. The sleek parallel ring type arm mechanism 126 is an upper wrist link 127 composed of an upper arm and a ring which are respectively opposed in parallel, and a lower wrist link 128 which is formed by a lower arm, a ring and a transfer table which are respectively opposed in parallel. Composition. The upper arm of the upper wrist link 1 2 7 corresponds to the ring 1 〇, and the fulcrums A and A at both ends thereof are rotatably mounted with rings 1 2 3 and 丨 2 4 , respectively. Further, a ring 117 is rotatably mounted on the fulcrum 〇, a of the ring 1 2 3, 1 2 4 and the fulcrum 1 2 2, 1 1 9 on the opposite side. Here, the fulcrum 1 22 is an extension line provided on a straight line (X axis) connecting the fulcrum 〇 and the fulcrum 〇.

W, the lower arm of the lower wrist link 128 is associated with the arm iq 2b, and is connected to the ring 102a, and the connection portion is rotatably attached to the fulcrum A 〇 and then opposite to the arm 102b. The arm 118 is rotatably mounted on a fulcrum 119 of the upper wrist link 127, and the arms 102b, 118 are rotatably attached to the fulcrums 1 2 〇, 1 2 1 coupled to the transport table 1 16 . In the case of the present embodiment, the length between the rings 123, 124 (the distance between the fulcrums) and the distance between the fulcrums of the transport table 1 16 (the fulcrum 2 〇 and the length between 1 2 1 - 42 - 200815148 (39) ), they are made up of the same. Further, the lengths of the ring 10, the arm 102b, and the arm 118 (distance between the fulcrums) are also formed separately. The operations of the transport devices 300A and 300B of the present embodiment are the same as those of the transport device 60c shown in FIG. 23 except for the operations of the transport mechanisms 200A and 200B described above, and the operations of the transport mechanism 200A are as described above. Said. Further, the difference between the configurations of the conveying devices 300A and 300B shown in Figs. 26 and 27 is that only the ring 101 of the mechanism shown in Fig. 26 and the arm 102b are attached to the ring of the upper wrist link 127 of 126. The end of either side of 124, 123. Therefore, the expansion and contraction operation of the parallel ring type arm mechanism 1 26 that rotates the ring 1 0 1 around the fulcrum 也 is also the same. In addition, Fig. 28 is a schematic block diagram showing another embodiment of the conveying device according to the second aspect of the invention. The conveying device 3 00C shown in Fig. 28 changes the mounting position of the third ring mechanism described in the above-mentioned constituent article winning piece [4]. In other words, in the conveying device 300C, unlike the configuration shown in Fig. 26, the end portions (the fulcrums 1 19 and 122) on the opposite sides of the rings 124 and 123 of the upper wrist link 127 of the parallel ring type arm mechanism 126 are different. A third ring mechanism 203 composed of rings 105, 106, 107, and 117 is attached. Further, in this example, the ring 107 and the ring 151 are restrained and fixed around the fulcrum 122 by an angle μ, and the ends of the ring 152 are rotatably attached to the fulcrum C and the fulcrum 1 respectively. Further, the ring 15 1 One end portion is rotatably mounted to the fulcrum 153. -43- 200815148 (40) Even in this example, the expansion and contraction operation of the parallel ring type arm mechanism 1 26 when the ring 110 is rotated around the fulcrum 也 is the same. Figs. 29 to 31 are schematic structural views showing another embodiment of the conveying device according to the second aspect of the invention, and the above-described conveying device 200 Β and the ring type arm mechanism 126 are used. Here, the transporting devices 30 0D and 300 Ε shown in Figs. 29 and 30 are, for example, in the transport mechanism 200A shown in Fig. 25, η = 210°, μ = 60°, ξ = 10°. In the case of the configuration, the operation of the transport mechanism 2000 is as described above. Further, the difference between the configurations of the transporting devices 3 00D and 300 Ε shown in Figs. 29 and 30 is that only the transport mechanism 200 is attached to the flat type. The ring arm mechanism 126 is the ring 124 of the upper wrist link 127. The end of either side of 123. Therefore, the expansion and contraction operation of the flat ring arm mechanism 126 when the ring 101 is rotated around the fulcrum , is the same as that of the above embodiment. The conveyance device of FIG. 3 is assuming that the attachment position of the third ring mechanism described above is changed in the above-described configuration condition 0 [4]. That is, in the conveyance device 3 00F, In the configuration shown in Fig. 29, the third ring mechanism 203 composed of the rings 105, 106, 107, and 117 is attached to the opposite side of the rings 124 and 123 of the upper wrist link 127 of the flat ring type arm mechanism 126. Ends (fulcrums 119, 122). Further, in this example, the ring 107 and the ring 151 are restrained and fixed around the fulcrum 122 by an angle μ, and the ends of the ring 152 are rotatably mounted to the fulcrum C and the fulcrum, respectively. 153. Further, one end of the ring 151 is rotatably attached to the fulcrum 153. • 44- 200815148 (41) Even in this example, the parallel ring arm mechanism 126 when the ring 101 is rotated around the fulcrum Ο In the above embodiment, the ring 102a, the ring 10 2b, the ring 104, the ring 105, and the ring 107 are used as separate members. However, in the present invention, for example, as shown in FIG. In the transport device 3 00D, the ring 104 and the ring 107 are made of the same member, and the ring 102a and the ring 105 may be set as phases. The same component.

φ Here, when η=180°, μ = 30°, ξ = 0°, the fulcrum B is placed on the ring 10〇2b, and the ring 102b can be made the same member. As described above, according to the embodiment of the second aspect of the invention, dust such as metal is generated in the sliding portion, and contamination of the semiconductor wafer or the like of the object to be transported can be prevented, and the upper wrist link 1 27 and the lower portion are simultaneously Between the wrist links 1 28, the power is correctly transmitted: and the object to be transported is transported to the correct position. _________________________________________________________________________________________________________________________________________________________________________________________________________________________________________________________________________ As shown in Fig. 3, the vacuum processing apparatus 4 1 of the present embodiment is a processing chamber P 1 and P 2 which can be processed in parallel in the vicinity of the transport chamber T1 having the transport device 42 of the present invention. P3 is configured to carry in the loading chambers C1 for loading the wafers 43 (43a, .4 3b) and the carrying-out chamber C2 for carrying out the wafers 43. The process chambers P1 to P2, the carry-in chamber C1, and the carry-out chamber C2 are connected to a vacuum exhaust system (not shown), and between each of the transfer chambers T1, gate valves G1 to G5 that are switched when the wafer 43 is switched are provided. . Further, the loading chamber C1 is provided with a gate valve G6 that is closed when the wafer 43 is loaded from the outside of the apparatus, and a gate valve G7 that is opened when the wafer is carried out to the outside of the apparatus is provided in the carrying-out chamber C2. In the vacuum processing apparatus 41 having such a configuration, the unprocessed wafer 43a accommodated in the carry-in chamber C1 is taken out by the transporting device 41, and transported to, for example, the process chamber P1. At this time, the conveyance device 41 receives the processed wafer 43b from the process chamber P1 by performing the above operation, and carries it to the other process chambers P2, P3. Similarly, in the same manner, the conveyance device 41 is used to receive and receive the unprocessed wafer 43a and the process-finished wafer 43b between the process chambers P1 to P3 and the carry-in chamber C1 and the carry-out chamber C2. According to the present embodiment having such a configuration, it is possible to provide a vacuum processing apparatus which can prevent the contamination of the γ-transported object and transport the object to be transported to the correct position to improve the productivity. Further, the present invention is not limited to the above embodiment, and various modifications can be made. For example, in the embodiment of the first aspect of the invention, the length of the arm 8a for transporting the wrist member is the same as the length of the ring 7a of the first restraint ring, but the present invention is not limited thereto. The length of 8a and ring 7a can also be different. However, in order to linearly move the distal end portion 80 of the arm 8a, it is preferable to adopt a configuration as described above. Further, even if the angle of formation of the arm 8a and the ring 8b is set to be an angle other than -46 - 200815148 (43) 90°. In the above embodiment, an example of a transport mechanism in which a first parallelogram link is attached to a rotating shaft (point) shown in Fig. 1 is described. However, the present invention is not limited thereto, and may be As shown in Fig. 2, a transport mechanism in which a first parallelogram link is attached to a fulcrum moving mechanism (point E) is used. At this time, the conditions described in the transport mechanism shown in Fig. 2 are used. Further, in the embodiment of the first invention, as shown in Figs. 1 and 2, the conveyance of the linear guide is provided on the straight line passing through the point 〇 and the point E of the second parallelogram mechanism. Although the mechanism is described as an example, the present invention is not limited to the use of such a linear guide, and it is clear from the above-described principle of operation that any one of the mechanisms for linearly moving toward the point 在 at the point E may be used. Even in this case, since the point E moves toward the point line, the operation principle and the operation method of the transport mechanism are based on the conditions described in the above embodiments. ^ In this point, even in the second invention, any mechanism for moving the point D linearly toward the point 亦可 can be used. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a schematic diagram showing the principle of operation of the transport mechanism of the first invention (1). Fig. 2 is a schematic diagram showing the principle of operation of the transport mechanism of the first invention (2). Fig. 3 is a graph showing the locus of the point F of the transport mechanism of Fig. 1. -47- 200815148 (44) Fig. 4 is a graph showing the trajectory of point F of the transport mechanism of Fig. 2. Fig. 5 is a schematic diagram showing the principle of operation of the transport mechanism of the second invention (constitution condition [1] [2]). Fig. 6 is a schematic diagram showing the principle of operation of the transport mechanism of the second invention (constitution condition [1] [2]). Fig. 7 is a schematic diagram showing the principle of operation of the transport mechanism of the second invention (constitution condition [3]). Fig. 8 is a schematic diagram showing the principle of operation of the transport mechanism of the second invention (constitution condition [3]). Fig. 9 is a schematic diagram showing the principle of operation of the transport mechanism of the second invention (constitution condition [3]). Fig. 10 is a schematic structural view (constitution condition [4]) of the operation principle of the transport mechanism of the second invention. Fig. 1 is a schematic diagram showing the principle of operation of the transport mechanism of the second invention (constitution condition [4]). Fig. 12 is a schematic diagram showing the basic configuration of the embodiment of the transport mechanism of the first invention. Fig. 13 (a) to (d) are explanatory views showing the operation of the transport mechanism. Fig. 14 is a schematic view showing an embodiment of a conveying device using the conveying mechanism of the first invention. Fig. 15 (a) to (d) are explanatory views showing the expansion and contraction operation of the transport mechanism of the embodiment. Fig. 16 is a schematic block diagram showing a modification of the conveying device. -48 - 200815148 (45) Fig. 17 (a) is an explanatory view showing a state in which the conveying device of the embodiment is in an overlapping position, and (b) is an explanatory view showing a state of the conveying mechanism at this time. Fig. 18 (a) to (c) are diagrams showing the configuration of the other embodiment of the transport mechanism according to the first aspect of the invention and the outline of the expansion and contraction operation. Fig. 19 is a schematic structural view showing another embodiment of the transport mechanism of the present invention. Fig. 20 (a) to (c) are diagrams for explaining the problem of the present invention. Fig. 21 is an explanatory view showing a state of the transport mechanism at the fixed point position. Fig. 22 is a schematic block diagram showing another embodiment of the transport mechanism of the first invention. Fig. 23 is a schematic structural view showing another embodiment of the conveying device of the first invention. - Fig. 24 is a schematic diagram showing the basic configuration of an embodiment of the transport mechanism of the second invention. The Fig. 25 is a schematic diagram showing the basic configuration of an embodiment of the transport mechanism of the second invention. Fig. 26 is a schematic view showing the embodiment of the conveying device of the second invention. Fig. 27 is a schematic structural view showing an embodiment of the conveying device of the second invention. Fig. 28 is a schematic structural view showing an embodiment of the conveying device of the second invention. -49-200815148 (46) Fig. 29 is a schematic configuration diagram of another embodiment of the conveying device according to the second invention. The third drawing is a schematic configuration diagram of another embodiment of the conveying device according to the second invention. Figure 3 1 is the second

Slightly composed. 32nd

A plan view showing the configuration of an embodiment of the device. Figure 33 of the empty space is a plan view of the conventional handling device. The plan of the main components [Description of the main components] 1, 2, 3, 4, 5, 6: fulcrum 7: L-arm; 7a: arm (first (1) restraint ring) - 7b: ring (2nd restraint ring) 8. : L-arm _ 8a : Arm (arming member for transport) 8b : Ring 9 : L-arm 9 a : Ring (first restraint ring) 9b : Ring (second restraint ring) 1 2 : fulcrum moving mechanism 12a: linear guide (guide portion) parallelogram ring mechanism) 13 ··1st parallelogram link (No. -50 - 200815148 (47) 1 4 : 2 parallelogram link (2nd parallelogram ring mechanism) 15, 15a, 15b, 15c: transport mechanism 1 6 : transport table (transportation unit) 26 : parallel ring arm mechanism, 27 : upper wrist link. 28 : lower wrist Connecting rod 4 1 : Vacuum processing apparatuses 60a, 60b, 60c: conveying apparatuses 101, 102a, 104: stomach 102b: arm (arming member for transportation) 1 02 : L-arm 103: L-shaped arm l〇3a: ring (No. 1 restraint ring) l〇3b : ring (2nd restraint ring) 200A, 200B : carrier / structure _ 3Ό0Α to 3 00F : handling device -51 -

Claims (1)

200815148 (1) X. Patent application scope 1. A transport mechanism characterized by comprising: a first ring mechanism composed of a parallelogram ring mechanism; a shared ring sharing a specific ring of the first ring mechanism; a second ring mechanism having a ring having an equal length and extending linearly in a specific direction, forming a first restraint ring of the first ring mechanism at a fulcrum of at least one end portion of the shared ring, and constituting the aforementioned The second restraint ring of the second ring mechanism is configured to rotate in a state of being restrained at a specific angle, and the fulcrum of the specific end portion of the opposing ring facing the shared ring in the first ring mechanism In the above, a transporting wrist member configured to rotate in a state in which the opposing ring is restrained at a specific angle is provided. - 2. - Type of transport collapse, characterized by having: a first parallelogram ring mechanism; configured by using a specific ring of the first parallelogram ring mechanism, 0 has the same length and can be linearly stretched in a specific direction a second parallelogram ring mechanism that constitutes a first cuff ring of the first parallelogram ring mechanism at a fulcrum that supports both ends of the common ring of the first and second parallelogram ring mechanisms, and constitutes the second The second restraint ring of the parallelogram ring mechanism is configured to rotate in a state of being restrained at a specific angle, and the first parallelogram ring mechanism is specific to the opposing ring that faces the shared ring. The fulcrum of the end portion is provided with a transporting wrist structure-52-200815148 (2) which is configured to be restrained in a state in which the opposing ring is rotated at a specific angle. a transport mechanism comprising: a first ring mechanism composed of a parallelogram ring mechanism; and a second ring mechanism having a common ring sharing a specific ring of the first ring mechanism; The second restraint ring having the same length of the ring and the first restraint ring of the first ring mechanism and the first restraint ring of the first ring mechanism is rotated in a state of being restrained at a specific angle. In the one-ring mechanism, a transporting wrist member configured to rotate in a state in which the opposing ring is restrained at a specific angle is provided at a fulcrum of a specific end portion of the opposing ring that faces the shared ring. 4. The transport mechanism according to any one of claims 1 to 3, wherein the length of the first restraint ring is equal to the length of the transporting wrist member. The transport mechanism according to any one of claims 1 to 3, wherein the angle formed by the first constraint ring and the second restraint ring is an angle other than 90°. 6. The transport mechanism according to any one of the first to third aspects of the present invention, wherein the third parallelogram ring mechanism is configured to use the first restraint ring, and the first restraint ring is configured The first wrist member that is configured to rotate in a state in which the shared ring is rotated at a specific angle on the fulcrum at both ends, and a second wrist member that is configured to rotate in a state in which the opposing ring is locked at a specific angle. A transport device comprising: a transport mechanism, comprising: -53- 200815148 (3) a first ring mechanism composed of a parallelogram ring mechanism; and a specific ring of the first ring mechanism The common ring and the ring having the same length as the shared ring, and the second ring mechanism that can linearly expand and contract in a specific direction constitutes the first ring of the first ring mechanism at a fulcrum of at least one end of the shared ring The restraining ring and the second restraint ring constituting the second ring mechanism are configured to rotate in a state of being restrained at a specific angle, and the first ring mechanism is opposed to the shared ring. a fulcrum of a specific end portion is provided with a transporting wrist member configured to rotate in a state in which the opposing ring is restrained at a specific angle; a parallel ring-shaped arm mechanism configured by using the transporting wrist member; and The parallel ring arm mechanism is driven to support the transporting portion of the object to be transported. 8. The vacuum processing apparatus is provided with a plurality of processing chambers connected to the vacuum exhaust system ▲, and is characterized in that: the transporting chamber includes a transporting device, and the transporting device includes: a transporting mechanism; A first ring mechanism composed of a parallelogram ring mechanism; a common ring sharing a specific ring of the first ring mechanism; and a ring having the same length as the shared ring, and capable of linearly expanding and contracting in a specific direction. The second ring mechanism is a state in which the first restraint ring of the first ring mechanism and the second restraint ring that constitutes the second ring mechanism are restrained at a specific angle at a fulcrum of at least one end of the shared ring. In the first ring mechanism, the first ring mechanism is disposed at a specific angle of the -54-200815148 (4) opposite to the common ring, and is restrained at a specific angle. a transporting wrist member configured to rotate in a ring state; a parallel loop arm mechanism configured by using the transporting wrist member; and driven by the parallel loop arm mechanism A transport unit that supports the object to be transported; ' and * a vacuum processing chamber that communicates with the transport chamber and receives the object by using the transport device.