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TWI366244B - Container transport system and measurement container - Google Patents

Container transport system and measurement container

Info

Publication number
TWI366244B
TWI366244B TW096149166A TW96149166A TWI366244B TW I366244 B TWI366244 B TW I366244B TW 096149166 A TW096149166 A TW 096149166A TW 96149166 A TW96149166 A TW 96149166A TW I366244 B TWI366244 B TW I366244B
Authority
TW
Taiwan
Prior art keywords
container
transport system
measurement
container transport
measurement container
Prior art date
Application number
TW096149166A
Other languages
English (en)
Other versions
TW200836288A (en
Inventor
Murata Masanao
Maetaki Susumu
Original Assignee
Muratec Automation Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Muratec Automation Co Ltd filed Critical Muratec Automation Co Ltd
Publication of TW200836288A publication Critical patent/TW200836288A/zh
Application granted granted Critical
Publication of TWI366244B publication Critical patent/TWI366244B/zh

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F15/00—Details of, or accessories for, apparatus of groups G01F1/00 - G01F13/00 insofar as such details or appliances are not adapted to particular types of such apparatus
    • G01F15/06—Indicating or recording devices
    • G01F15/061—Indicating or recording devices for remote indication
    • G01F15/063—Indicating or recording devices for remote indication using electrical means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D21/00—Measuring or testing not otherwise provided for
    • H10P72/1924—
    • H10P72/3404—

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Warehouses Or Storage Devices (AREA)
TW096149166A 2006-12-22 2007-12-21 Container transport system and measurement container TWI366244B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006345409A JP4670808B2 (ja) 2006-12-22 2006-12-22 コンテナの搬送システム及び測定用コンテナ

Publications (2)

Publication Number Publication Date
TW200836288A TW200836288A (en) 2008-09-01
TWI366244B true TWI366244B (en) 2012-06-11

Family

ID=39567125

Family Applications (1)

Application Number Title Priority Date Filing Date
TW096149166A TWI366244B (en) 2006-12-22 2007-12-21 Container transport system and measurement container

Country Status (4)

Country Link
US (1) US7918122B2 (zh)
JP (1) JP4670808B2 (zh)
CN (1) CN101207059B (zh)
TW (1) TWI366244B (zh)

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JP7294543B2 (ja) * 2020-10-05 2023-06-20 村田機械株式会社 流量測定装置
KR102808258B1 (ko) * 2021-03-11 2025-05-14 세메스 주식회사 자재 보관 장치 및 이를 포함하는 물류 관리 설비
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CN114963234B (zh) * 2022-06-29 2024-05-17 北京北方华创微电子装备有限公司 半导体工艺设备的点火装置及半导体工艺设备
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Also Published As

Publication number Publication date
US7918122B2 (en) 2011-04-05
JP2008159734A (ja) 2008-07-10
US20080156069A1 (en) 2008-07-03
CN101207059B (zh) 2012-11-21
JP4670808B2 (ja) 2011-04-13
CN101207059A (zh) 2008-06-25
TW200836288A (en) 2008-09-01

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