九、發明說明： 【韻^明戶斤屬之^技_相牙冷貝超^】 發明領域 本發明係有關一種用以搬送於處理部中以處理液進行 處理之基板的搬送裝置及搬送方法。IX. Description of the Invention: [Technical Field] The present invention relates to a conveying apparatus and a conveying method for a substrate to be processed by a processing liquid for processing in a processing unit .
L· ^tT J 發明背景 液晶顯示裝置所用之玻璃製基板上形成有電路圖案 (patten)。在基板上形成電路圖案時係利用微影製程 (lithography process)。微影製程係如眾所周知般，即，在前 述基板上塗布抗蝕劑(resist)，並在該抗蝕劑上隔著形成有 電路圖案的遮光罩（mask)照射光。 接著，去除抗蝕劑中未照射到光之部分或照射到光的 部分，並對基板上業已去除抗蝕劑的部分進行蝕刻，蝕刻 後藉由反覆進行數次用以去除抗蝕劑等之一連串製程而在 前述基板上形成電路圖案。 此種微影製程中，需進行以作為顯像液、蝕刻液或蝕 刻後用以去除抗钱劑之剝離液等處理液，即藥液而對基板 進行處理之製程，進而以藥液進行處理後，並有以作為處 理液之洗淨液來進行洗淨之製程等，且洗淨後需進行用以 去除附著殘留於基板上之洗淨液的乾燥製程。 對基板進行前述一連串之處理時，前述基板係藉由讓 軸線成水平而加以配置之搬送滾輪(r〇ller)，以水平狀態搬 送至處理部’並於該處以處理液進行處理。 然而，近年來，液晶顯示裝置所用之玻璃製基板有大 型化及薄型化傾向。故，若水平地搬送基板，由於搬送滾 輪間之基板變形增大，因而產生有於各處理室所進行之處 理將無法均勻地施行在基板之整個板面上的問題。再者， 由於係在基板的上面殘留有多量之處理液的狀態下，將基 板由處理部搬出，故回收處理液而加以再利用時，處理液 的消耗量增多’而此情形並成為導致運行成本(runningcost) 上升的原因之一。 因此’最近係利用讓基板傾斜預定角度再加以搬送方 式’俾讓供給於基板之板面上的處理液可順暢地流動。藉 此，隨同基板而由處理部帶出的處理液量變少，且可均勻 地對基板之整個板面進行處理。 於處理部中，讓基板傾斜而邊加以搬送再邊對其進行 處理時，係讓以水平狀態搬送而至之基板傾斜預定之傾斜 角度，再將之供給至處理部。又，若基板業已在處理部中 進行過處理，便由傾斜狀態回復成水平並運送至次一製程。 歷來，為讓基板傾斜，並讓業已傾斜之基板回復水平， 係以車乂基板之長度為長之尺寸大小，而將可調整傾斜角度 之輸送帶-個個分職置在前述處理部之搬人側及搬出 側。再者’搬入側中，絲板係供給至水平狀態之搬入輸 送帶’則在讓諭讀送帶麟錢崎輸送帶的傾斜角 f為相同的肖度後，才將絲運送域理部，該搬送輸送 帶係以預定之傾斜角度而設置於處理部内者。 另一方面，於搬出側，係先讓搬出輸送帶在預定的傾 斜角度下待機’至該搬出輸送帶接收由處理部搬出之基板 後’藉由傾倒成水平而將基板運送至次一製程。 【明内^^ J 發明概要 發明欲解決之課題 然而，搬入側及搬出側中，若各自以一個輸送帶而讓 基板傾斜預定角度並將之運送至處理部，再接收業經處理 部處理過之基板並將之回復水平，則搬入側中，直到至少 基板長度大小的二分之一以上運送至處理部的搬送輸送帶 月並無法讓搬入側之搬入輸送帶傾倒成水平並接收次一 基板。因此，產生如下之問題，即，直至搬入輸送帶可接 收-人基板止所需之製程時間（tact time)變長，也就是運送 所需的製程時間變長。 再者，搬出側中，搬出輸送帶由處理部的搬送輸送帶 接收基板並_成水傾，由於直至整健板由搬出輸送 帶送出前’並無法讓該搬出輪送帶傾斜預定的傾斜角度並L·^tT J BACKGROUND OF THE INVENTION A circuit pattern is formed on a glass substrate used in a liquid crystal display device. A lithography process is utilized when forming a circuit pattern on a substrate. The lithography process is known as coating a resist on a substrate, and irradiating light on the resist via a mask in which a circuit pattern is formed. Then, the portion of the resist that is not irradiated with light or the portion that is irradiated with light is removed, and the portion of the substrate from which the resist has been removed is etched, and after etching, the resist is removed several times to remove the resist or the like. A series of processes are performed to form a circuit pattern on the substrate. In the lithography process, a process such as a developing solution, an etching solution, or a stripping solution for removing an anti-money agent after etching, that is, a chemical solution, is used to process the substrate, and then processed by a chemical solution. Then, there is a process of washing with a washing liquid as a treatment liquid, and after the washing, a drying process for removing the washing liquid remaining on the substrate is performed. When the substrate is subjected to the above-described series of processes, the substrate is conveyed in a horizontal state to the processing unit by a transfer roller that is disposed such that the axis is horizontal, and is processed by the processing liquid. However, in recent years, a glass substrate used in a liquid crystal display device has a tendency to be large and thin. Therefore, if the substrate is conveyed horizontally, the deformation of the substrate between the transfer rollers is increased, so that the problems in the respective processing chambers cannot be uniformly applied to the entire surface of the substrate. In addition, since the substrate is carried out by the processing unit in a state in which a large amount of the processing liquid remains on the upper surface of the substrate, the amount of the processing liquid is increased when the processing liquid is recovered and reused, and this operation is caused by the operation. One of the reasons for the increase in the cost of running costs. Therefore, the processing liquid supplied to the surface of the substrate can be smoothly flowed by the fact that the substrate is tilted by a predetermined angle and then transferred. As a result, the amount of the processing liquid carried by the processing unit with the substrate is reduced, and the entire surface of the substrate can be uniformly processed. In the processing unit, when the substrate is tilted and transported while being processed, the substrate is conveyed in a horizontal state and tilted to a predetermined inclination angle, and then supplied to the processing unit. Further, if the substrate has been processed in the processing unit, it is returned to the horizontal state by the tilted state and transported to the next process. In order to tilt the substrate and restore the level of the tilted substrate, the length of the ruthenium substrate is long, and the conveyor belt with adjustable tilt angle is placed in the processing unit. The side of the person and the side of the move out. In addition, the 'moving into the side, the silk plate is supplied to the horizontal loading conveyor', the wire is transported to the domain after the inclination angle f of the 麟 reading and delivery belt is the same. The conveyance conveyor is provided in the processing unit at a predetermined inclination angle. On the other hand, on the carry-out side, the carry-out conveyor is placed in standby at a predetermined tilt angle until the unloading conveyor receives the substrate carried out by the processing unit, and the substrate is transported to the next process by dumping horizontally. [Announcement of the Invention] SUMMARY OF THE INVENTION PROBLEMS TO BE SOLVED BY THE INVENTION However, in the carry-in side and the carry-out side, the substrate is tilted by a predetermined angle by a single conveyor belt and transported to the processing unit, and then received by the processing unit. When the substrate is returned to the horizontal level, the loading side is carried out until at least one-half of the length of the substrate is transported to the transporting belt of the processing unit. The loading conveyor on the loading side cannot be tilted horizontally and receives the next substrate. Therefore, there arises a problem that the tact time required to carry out the transfer of the conveyor belt to the human substrate becomes long, that is, the processing time required for transportation becomes long. Further, in the carry-out side, the carry-out conveyor receives the substrate from the transport conveyance belt of the processing unit, and the water is tilted, and the tilting angle of the carry-out belt is not tilted until the transfer panel is sent out by the carry-out conveyor. and
接收次-基板’因此與搬人側相同地，都產生有運送基板 所需的製程時間變長之問題β A 本發明係提供-種基板之搬送裝置及搬送方法，該装 置及方法係可縮短於處3$部巾，縣板傾斜預定角度並加 以搬送時，運送基板所需的製程時間。 用以解決課題之手段 本發明係一種基板之搬送裝置，係用以搬送於處理部 進行處理之基板者，包含有： 1359472 者，設有以多數輸送帶而構成之角度變換機構，故，於搬 入運送部中，讓基板傾斜並將之運送至處理部之同時，可 以水平狀態接收新基板，再者，搬出運送部中，以水平狀 態搬出業已由處理部搬出之基板的同時，可以傾斜狀態接 5 收業經處理部處理過之基板。因此，可縮短將基板搬入處 理部或將之由處理部搬出等運送所需之製程時間。 圖式簡單說明 第1圖係例示本發明一實施態樣之處理裝置的概略說 明圖。 10 第2圖係處理室之縱剖面圖。 第3圖係設於搬入側及搬出側之輸送帶的平面圖。 第4圖係由第3圖所示之輸送帶的寬度方向其中一側視 之的側面圖。 第5A圖〜第5C圖係於搬入運送部中運送基板的說-明 15 圖。 第6A圖〜第6C圖係於搬出運送部中運送基板的說明 圖。Since the receiving sub-substrate is the same as the moving side, the process time required to transport the substrate becomes long. β A The present invention provides a substrate transfer device and a transfer method, and the device and method can be shortened. The processing time required to transport the substrate when the county board is tilted at a predetermined angle and transported. Means for Solving the Problems The present invention relates to a substrate transfer apparatus which is used for transporting a substrate to be processed by a processing unit, and includes: 1359472, and an angle conversion mechanism including a plurality of conveyor belts is provided. The substrate is carried into the transport unit, and the substrate is tilted and transported to the processing unit, and the new substrate can be received in a horizontal state. Further, the transport unit can be carried out to carry out the substrate that has been carried out by the processing unit in a horizontal state, and can be tilted. Connected to the substrate processed by the processing unit. Therefore, it is possible to shorten the processing time required for carrying the substrate into the processing unit or carrying it out of the processing unit. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a schematic view showing a processing apparatus according to an embodiment of the present invention. 10 Figure 2 is a longitudinal section of the processing chamber. Fig. 3 is a plan view of a conveyor belt provided on the carry-in side and the carry-out side. Fig. 4 is a side view showing one side of the width direction of the conveyor belt shown in Fig. 3. Fig. 5A to Fig. 5C are diagrams showing the transport of the substrate in the transport unit. 6A to 6C are explanatory views of the substrate transported in the carry-out transport unit.
L實方方式J 較佳實施例之詳細說明 20 以下，參照圖面說明本發明之實施態樣。 第1圖係例示基板W的處理裝置1之概略構造，該處理 裝置1係使用本發明之搬送裝置2。搬送裝置2係以搬入運送 部3、傾斜搬送部4及搬出運送部5構成，且前述傾斜搬送部 4設於作為處理部的處理室6内，該處理部係譬如以蝕刻液 9 1359472 等處理液對基板W進行處理者。 5 第2圖係前述處理室6的縱剖面圖。該處理室6形成有搬 入口 7，該搬入口 7係沿基板W之搬送方向的其中一端面上 以點虛線所示者，再者，處理室6的另一端面上形成有搬出 口（未予圖式）。處理室6内’在與基板W之搬送方向相交又 的寬度方向的兩端部上，分別設有支承件前述傾斜搬送 部4係相對於前述寬度方向傾斜預定之角度，譬如傾斜$〜 15度的角度而設置於該等支承件8上。 10 則述傾斜搬送部4具有框體丨丨，該框體1](係寬度方向的 兩端部支推於前述支承件8者。該框體11的寬度方向其中一 端部係直接支撲於前述支承件8，而寬度方向的另—端部則 隔角度調整構件10而支樓於前述支承件8。藉此，前述框體 ::係相對於前述寬度方向傾斜預定角度，譬如傾斜5〜15度 範圍内的角度。再者’框體u的傾斜角度並不限於5〜⑽ 的範圍内，為該範圍以下或該範圍以上皆可。 刚述框體11中，細線與框體11的寬度方向-致之多數 搬送軸1·式巾僅例示其中-條），係沿著與寬度方向相交 又的基板W的搬送方向’而以預定間隔且可旋轉地加以設 20 置搬送轴12上，以預定間隔而設有多數用以支樓基板w 的下面之搬运滾輪13。因此，下面支餅搬送滾輪13之基 _’係以與框體11相同之角度傾斜搬送。 位於刖述框體11之傾斜方向上端側之寬度方向其中一 側的外面’傳輸軸14係雜線與基板w的搬送方向一致而 可紅轉地加以架^該傳輪軸14之中間部設有從動齒輪 10 15。玄伙動fej輪15上咬合有驅動齒輪16 ^該驅動齒輪祕 嵌著於設在處理室6外部__'17之輸出軸18上。 雖未予詳細圖示’位於前述搬送轴I2之傳輸軸Η側的 ”中端°ρ "又有第1伞形齒輪。第1傘形齒輪係與設在前 述搬送轴12上之第2傘形齒輪相咬合。因此，若前述驅動源 π產生作動’讀由前述驅動齒輪16及從動錄15而旋轉 刖述傳輸軸14 Bp經由前述第j '第2傘形齒輪而旋轉驅動 前述搬送㈣。藉此’可搬送支料搬送雜13之基板w。 又，框體11内，與搬送軸12之傾斜方向下端部對應之 位置上，S又有徑向滾輪19，該徑向滾輪19係用以支撐基板 W的傾斜方向下端面，即用以支撐與搬送方向交叉之寬度 方向其中一側面者。 於處理室6内進行搬送之基板w的上方，沿基板w的寬 度方向之多數喷水管21(圖中僅例示一個），係相對基板…的 搬送方向而以預定間隔加以配置。各喷水管21上，以預定 間隔設有多數喷嘴22。前述喷水管21係隔連通管24而連接 於集管23。該集管23係連通於蝕刻液等處理液之供給源（未 予圖式）。藉此，於處理室6内進行搬送之基板W的上面，係 由前述噴嘴22而喷射有處理液。 前述處理室6之搬入側設有前述搬入運送部3，搬出側 則設有前述搬出運送部5。如第1圖所示，搬入運送部3係以 沿基板W之搬送方向依次並列設置之第1搬入輸送帶31、以 及第2搬入輸送帶32而構成，搬出運送部5係由沿基板W之 搬送方向依次並列設置之第1搬出輸送帶33、以及第2搬出 輸送帶34而構成。 如述搬入運送部3之上游側設有搬入水平輸送帶％，前 述搬出運送部5之下遊侧設有搬出水平輸送帶5a。 又，第1搬入輸送帶3卜第2搬入輸送帶32，及第】搬出 輸送帶33、第2搬出輸送帶34 ,分別構成用以變換基板…之 傾斜角度的角度變換機構。 前述各輸送帶31〜34僅配置位置不同，其構造都相 Π以下，參照第3圖及第4圖加以說明。即’前述輸送帶 31〜34具有矩形框狀之框體36。該框體36係設定成與設於 前述處理室6内之傾斜搬送部4之框體11具相同的寬度大 J且其框體内之寬度方向兩端部上，支撑板37係沿著與 寬度方向正交之方向而加以架設。再者，此一實施態樣中， 各輸送帶31〜34之框體36中，沿基板W之搬送方向的長度 尺寸係較β玄基板W之長度為小，且設定成大於約基板w 長度大小的一半》 兩端部藉由軸承38而可旋轉地支撐於一對支樓板37上 之搬送軸39 ’係隔預定間隔而加以架設。各搬送軸39上， 於軸方向上以預定間隔而設有多數搬送滾輪41。突出於其 中一側之支撐板37的各搬送軸39其中一端部上，設有第1傘 形齒輪42 ^ 傳輸軸4 3係沿搬送軸3 9的配置方向而可旋轉地支撑於 前述框體36之搬送軸39的一端部側上。該傳輸軸43上設有 與前述第1傘形齒輪42相咬合之第2伞形齒輪44。 前述傳輸軸43之軸方向中間部上設有從動帶輪45。於 前述框體36的外側面，在與前述從動帶輪45相對應之部位 上，设有驅動源46。該驅動源46之輸出軸47上，設有驅動 帶輪48，且該驅動帶輪48與前述從動帶輪45間，設有第3圖 中以虛線所示之線路49。 因此，若前述驅動源46產生作動，由於透過設於驅動 帶輪48與從動帶輪45間之線路49,前述傳輸轴43便會旋轉 驅動，故，透過設於該傳輸軸43上之第2傘形齒輪44、以及 ”。玄第2傘形齒輪44相咬合之第i伞形齒輪42，搬送軸於即 會朝預疋方向旋轉驅動。藉此，藉由設在各搬送轴39上之 搬送滾輪41而加以支撐之基板w可朝預定方向進行搬送。 如第4圖所示，前述框體36之下面側，與該框體36具大 勺相同大小的下部框體51，係藉由連結構件52而以預定間 隔平行相隔且加以連結。 在與設於前述框體36之搬送軸39的軸方向一端部相對 應處，即在下部框體51之寬度方向一端部上，與該寬度方 向相交叉之方向的兩端部上，分別設有支㈣(圖中僅例示 其中一者），前述支軸53係讓軸線與搬送軸39之軸線正交而 加以設置。 用以構成前述搬入運送部3及搬出運送部5之架台54， 其上面的寬度方向-端部上’直立設置有支擇構件55。前 述支軸53係可旋轉地支撐於該支撐構件55上。藉此，前述 忙胆36在架台54之上面’係可沿下部框體51以及搬送轴39 之軸方向，即基板W的寬度方向而加以搖動。 於前述架台54，在與前述下部框體51之寬度方向另一 1359472 端部對應之部位上，用以構成搖動機構之驅動氣缸56 ’係 讓軸線垂直地而加以設置。該驅動氣缸56之驅動軸57的前 端部上，長形安裝板58係沿與框體36之寬度方向相交叉的 方向而加以設置。該安裝板58的兩端部上，分別設有滾輪 5 59(圖中僅例示其中一者）。一對滾輪59在下部框體51之寬度 方向另一端部上，係與抵接板61相抵接，該抵接板61係設 於與該寬度方向相交叉之方向的兩端部上。 故，若前述驅動源56產生作動且該驅動軸57朝突出方 向驅動，滾輪59即經由抵接板61而頂壓下部框體51之寬度 10 方向另一端部，該下部框體51以及設有搬送滾輪41之框體 36的寬度方向另一端部因而上昇。 即，框體36因驅動氣缸56而以寬度方向其中一端部為 支點，朝寬度方向另一端部較前述一端部更高之方向傾斜 移動。框體36之傾斜移動角度’係設定成與設於前述處理 15 室6内之傾斜搬送部4的框體11相同的傾斜角度。 其次，有關藉由使用具前述構造之搬送裝置2的處理裝 置1而對基板W進行處理之場合，邊參照第5A圖〜第5C圖以 及第6A圖〜第6C圖邊加以說明。 未經處理或以前述製程而業已施予預定處理之基板 20 W，係如第5A圖所示，藉由搬入水平輸送帶3a而以水平狀 態供給至搬入運送部3之第1搬入輸送帶31上。此時，搬入 運送部3之第1搬入輸送帶31及第2搬入輸送帶32係以水平 狀態接收基板W。 基板W係藉由第1搬入輸送帶31而朝第2搬入輸送帶32 14 1359472 之方向搬送。如第5B圖所示，一旦沿基板w的搬送方向中 長向方向的前端部載置於第2搬入輸送帶32上，第1搬入輸 送帶31及第2搬入輸送帶32即藉由驅動氣缸56而朝傾斜方 向驅動，俾與處理室6内之傾斜搬送部4具相同的傾斜角度。 5 此時，第1、第2搬入輸送帶31、32邊搬送基板W邊傾 斜。又，此時，基板w的後端部雖在水平搬入輸送帶知上， 但由於基板W長度中二分之一以上係在第1、第2搬入輸送 帶31、32上之故’基板W因該等輸送帶31、32而傾斜。 如第5C圖所示，基板w在業已傾斜之狀態下搬送至第2 10搬入輸送帶32上，且若留在第丨搬入輸送帶31上之基板评長 度尺寸為全長的二分之一以下，即驅動第丨搬入輸送帶31而 由傾斜狀態回復成水平狀態。 此時，由於留在第1搬入輸送帶31上之基板w長度尺寸 約為全長的二分之一以下，故基板…係藉由第2搬入輸送帶 15 32而穩固地加以支擇。因此，基板w可確實地運送至業已 傾斜成與第2搬入輸送帶32為相同角度之傾斜搬送部4。 即，縱或在基板W的一部分留在第丨搬入輸送帶31上之 狀態下而讓第1搬入輸送帶31傾倒成水平，基板w也不會由 第2搬入輸送帶32落下，而可搬送至傾斜搬送部4。 20 一旦第1搬入輸送帶31傾倒成水平，次一基板w即藉搬 入水平輸送帶3a而以水平狀態供給至第丨搬入輸送帶31，並 藉由該第1搬入輸送帶31而搬送第二片之基板w。與此動作 大約同時，第一片基板W係由第2搬入輸送帶32運送至傾斜 搬送部4之搬送滾輪13，且該第2搬入輸送帶32由傾斜狀態 15 驅動成水平狀態。 一旦第2搬入輸送帶32成水平狀，其便與第！搬入輸送 帶31同時接收藉第1搬入輸送帶31而以水平狀態搬送之第 二片基板"W。且該等撤入輸送帶31、32由水平狀態驅動成 傾斜狀態，並將第二片基板W搬送至處理室6内，同時，若 留在第1搬入輸送帶32上之第二片基板w長度尺寸為二分 之一以下，該第1搬入輸送帶31即傾倒成水平，並將第三片 基板W供給至前述輸送帶31 ’且反覆進行前述動作。 如此’藉由可調整水平狀態及傾斜狀態之角度的第工 搬入輸送帶31及第2搬入輸送帶32構成搬入運送部3。因 此，基板W係供給至傾倒成水平之第卜第2搬入輸送帶31、 32上並加以搬送，且若該基板w中留在第丨搬入輸送帶31上 之長度尺寸為二分之一以下時，在藉由第2搬入輸送帶32搬 送業已成傾斜狀態之基板W的期間，即可讓第丨搬入輸送帶 31傾倒成水平，並以水平狀態接收次一基板。 即，搬入運送部3中，由於其第1搬入輸送帶31可邊由 搬入水平輪送帶3a以水平狀態接收基板w，且邊以第2搬入 輸送帶32將該基板W運送至處理室6内之傾斜搬送部4，故 相杈於分別進行基板w之接收及運送動作之場合，本發明 可縮短製程時間。 運送至處理室6内之傾斜搬送部4之基板w，其上面由 贺嘴22而噴射供給有處理液。由於基板W係以預定角度傾 斜而加以搬送，故供給於基板W上面之處理液，可由寬度 方向之上端朝下端而以預定速度順暢地流動。因此，不但 基板W的上面不易殘留有處理液，且由於處理液係沿預定 方向流動，故可提高處理速度，且處理之均一性亦提升。 如此’於處理室6内進行處理且以傾斜搬送部4加以搬 送之基板W，係運送至搬出運送部5俾搬送至次一製程。將 基板W由傾斜搬送部4運送至搬出運送部5係以如下方式進 行。即，搬出運送部5之第1搬出輸送帶33及第2搬出輸送帶 34，係以與傾斜搬送部4相同之傾斜角度而加以傾斜，並等 待將業已於處理室6内進行過處理之基板w搬出。 經處理室6内處理過之基板…，係以如第6A圖所示之傾 斜狀態而運送至第1搬出輸送帶33，且由該第1輸出搬送帶 33搬送至第2搬出輸送帶34。如第6B圖所示，一旦基板~由 傾斜搬出部4搬出，並運送至第j、第2搬出輸送帶33、34上， β玄等第1、第2搬出輸送帶33、34即由傾斜狀態驅動成水平 狀態。再者，基板W係在水平狀態下在第丨、第2搬出輸送 帶33、34上進行搬送。 如第6C圖所示，一旦基板w之後端脫離第1搬出輸送帶 33，該第1搬出輸送帶33即由水平狀態驅動成傾斜狀態。且 接收藉由前述傾斜搬送部4而由處理室㈣預定傾斜角度搬 出之次一基板W。 第1搬出輸送帶33接收次一基板w期間，基板w係由第 2搬出輪送帶34運送至搬出水平輪送帶&而搬出。—旦基板 W運达至搬出水平輸送帶Sa，第2搬出輸送帶μ即由水平狀 態驅動成與第1搬出輸送帶33為相同之傾斜角度。 藉此，由傾斜搬送部4搬出之次一基板w，係藉由以 1359472 搬出輸送帶33及第2搬出輸送帶34而以預定傾斜角度傾斜 並加以搬出，且一旦後端脫離傾斜搬送部4，該等搬出輪送 帶33、34便由傾斜狀態傾隹;j成水平狀態。 再者，一旦基板W之後端脫離第丨搬出輸送帶33，該第 5 1搬出輸送帶33即由水平狀態驅動成傾斜狀態，並接收由處 理室6搬出而至之基板…，且反覆進行前述動作。 如此，藉由以第1搬出輸送帶33及第2搬出輸送帶34構 成搬出運送部5，在第2搬出輸送帶34業已傾倒成水平之狀 態下，將基板W運送至搬出水平輸送帶53之期間，即可讓 10第1搬出輸送帶33傾斜，並接收以處理室6之傾斜搬送部4而 搬出之基板W。 即，由於搬出運送部5可邊以第1搬出輸送帶33接收由 處理至6搬出之基板W，且邊以第2搬出輸送帶34而將基板 W運达至水平搬出輸送帶&，故相較於分別進行接收來自 15傾斜搬送部4之基板W，以及將基板W運送至搬出水平輸送 帶34之場合’本發明可縮短製程時間。 又’雖前述一實施態樣中處理室6之搬入側及搬出側 上刀別並列設置有二個可做成水平狀態及立起成預定傾 斜角度之輸送帶，但亦可僅在搬入側及搬出側其中-者設 20 ϋ輪送帶。縱或如此，於處理室内讓基板傾斜並進行 處理時，還是可縮短運送基板所需之製程時間。 再者’用以構成搬入運送部及搬出運送部之輸送帶的 數目並不限於二個，三個或其以上皆可。 又’雖搬入運送部之上游側及搬出運送部之下游側設 18 1359472 有水平輸送帶，並進行基板之運送動作，但亦可以自動裝 置取代水平輸送帶。 【圖式簡單說明】 第1圖係例示本發明一實施態樣之處理裝置的概略說 5 明圖。 第2圖係處理室之縱剖面圖。 第3圖係設於搬入側及搬出側之輸送帶的平面圖。 第4圖係由第3圖所示之輸送帶的寬度方向其中一側視 之的側面圖。 10 第5A圖〜第5C圖係於搬入運送部中運送基板的說明 圖。 第6A圖〜第6C圖係於搬出運送部中運送基板的說明圖。 【主要元件符號說明】 1...處理裝置 11...框體 2...搬送裝置 12...搬送軸 3...搬入運送部 13...搬送滾輪 3a...搬入水平輸送帶 14...傳輸軸 4...傾斜搬送部 15...從動齒輪 5...搬出運送部 16...驅動齒輪 5a...搬出水平輸送帶 17...驅動源 6...處理室 18...輸出軸 7…搬入口 19...徑向滾輪 8...支承件 21...噴水管 10...角度調整構件 22…噴嘴 19 1359472 23...集管 45...從動帶輪 31...第1搬入輸送帶 46...驅動源 32...第2搬入輸送帶 48...驅動帶輪 33...第1搬出輸送帶 49...線路 34...第2搬出輸送帶 51...下部框體 36...框體 54...架台 37...支撐板 55...支撐構件 38...軸承 56...驅動氣缸 39...搬送軸 57...驅動軸 41...搬送滾輪 58...安裝板 42...第1傘形齒輪 59...滾輪 43...傳輸軸 W...基板 44...第2傘形齒輪 20DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS OF THE PREFERRED EMBODIMENTS Hereinafter, embodiments of the present invention will be described with reference to the drawings. Fig. 1 is a schematic view showing a schematic configuration of a processing apparatus 1 for a substrate W, and the processing apparatus 1 uses the conveying apparatus 2 of the present invention. The transporting device 2 is configured by the transporting and transporting unit 3, the inclined transporting unit 4, and the transporting and transporting unit 5, and the inclined transporting unit 4 is provided in the processing chamber 6 as a processing unit, and the processing unit is treated with an etching liquid such as 9 1359472 or the like. The liquid is processed on the substrate W. 5 Fig. 2 is a longitudinal sectional view of the processing chamber 6. The processing chamber 6 is formed with a carry-in port 7 which is indicated by a dotted line on one end surface of the substrate W in the transport direction, and a transfer port is formed on the other end surface of the processing chamber 6 (not To the picture). In the processing chamber 6, a support member is provided at both end portions in the width direction intersecting the transport direction of the substrate W, and the inclined transport portion 4 is inclined at a predetermined angle with respect to the width direction, for example, by tilting by a length of 15 to 15 degrees. The angle is provided on the support members 8. 10, the inclined conveyance unit 4 has a frame body 丨丨, and the frame body 1] (the both ends in the width direction are supported by the support member 8. The one end portion of the frame body 11 in the width direction is directly branched The support member 8 and the other end portion in the width direction are supported by the support member 8 via the angle adjusting member 10. Thereby, the frame body is inclined at a predetermined angle with respect to the width direction, for example, inclined 5~ The angle in the range of 15 degrees. Further, the angle of inclination of the frame u is not limited to the range of 5 to 10, and may be below the range or above the range. In the frame 11, the thin line and the frame 11 are In the width direction, a plurality of the transport shafts 1 are only exemplified as the strips, and are disposed on the transport shaft 12 at a predetermined interval and rotatably at a predetermined interval along the transport direction ' of the substrate W intersecting the width direction. A plurality of conveyance rollers 13 for the underside of the support base w are provided at predetermined intervals. Therefore, the base _' of the lower cake conveying roller 13 is inclinedly conveyed at the same angle as the casing 11. The outer surface of the transmission shaft 14 in the width direction of the upper end side in the oblique direction of the description frame 11 is aligned with the conveyance direction of the substrate w, and is rotatably mounted. The intermediate portion of the transmission shaft 14 is provided. Driven gear 10 15 . The telescopic gear wheel 15 is engaged with a drive gear 16 which is embedded in the output shaft 18 provided outside the processing chamber 6 __'17. Although not shown in detail, the middle end ρ " located on the transmission axis side of the transport shaft I2 has a first bevel gear. The first bevel gear train and the second bevel gear 12 are provided on the transport shaft 12 The bevel gear is engaged with each other. Therefore, when the drive source π is activated, the read drive shaft 16 and the driven record 15 are rotated, and the transfer transmission shaft 14 Bp is rotated to drive the transfer via the j 'second bevel gear. (4) By this, the substrate w of the miscellaneous material 13 can be transported. Further, in the frame body 11, at a position corresponding to the lower end portion of the transport shaft 12 in the oblique direction, S has a radial roller 19, and the radial roller 19 The lower end surface in the oblique direction for supporting the substrate W, that is, one of the side faces in the width direction intersecting the transport direction. The upper portion of the substrate w that is transported in the processing chamber 6 is sprayed along the width direction of the substrate w. The water tubes 21 (only one of which is illustrated in the drawings) are disposed at predetermined intervals with respect to the conveyance direction of the substrates. Each of the water spout pipes 21 is provided with a plurality of nozzles 22 at predetermined intervals. The sprinkler pipes 21 are separated by a communication pipe. 24 is connected to the header 23. The header 23 is connected A supply source of the treatment liquid such as an etching solution (not shown), whereby the processing liquid is sprayed from the nozzle 22 on the upper surface of the substrate W conveyed in the processing chamber 6. The processing chamber 6 is placed on the loading side. The carry-in/transport unit 3 is provided, and the carry-out transport unit 5 is provided on the carry-out side. As shown in Fig. 1, the carry-in transport unit 3 is a first transport conveyance belt 31 and a plurality of the transport transport units 3 arranged in parallel in the transport direction of the substrate W. (2) The loading and unloading conveyance unit (33) is configured to be carried by the conveyance belt (32), and the first conveyance conveyance belt (33) and the second conveyance conveyance belt (34) are arranged in parallel in the conveyance direction of the substrate W. The loading horizontal conveyor belt is provided, and the unloading horizontal conveyor belt 5a is provided on the downstream side of the unloading and transporting unit 5. Further, the first loading conveyor belt 3, the second loading conveyor belt 32, and the first loading conveyor belt 33, (2) The conveyance belts 34 are respectively configured to constitute an angle conversion mechanism for changing the inclination angle of the substrate. The conveyor belts 31 to 34 are disposed at different positions, and their structures are the same as described below, and will be described with reference to FIGS. 3 and 4 That is, the aforementioned conveyor belt 31 to 34 have a rectangular frame-shaped frame body 36. The frame body 36 is set to have the same width J and a width direction in the frame as the frame body 11 of the inclined conveyance unit 4 provided in the processing chamber 6. At both end portions, the support plate 37 is erected in a direction orthogonal to the width direction. Further, in this embodiment, the transport direction of the substrate 36 of each of the transport belts 31 to 34 is along the substrate W. The length dimension is smaller than the length of the β-shaped substrate W, and is set to be larger than about half the length of the substrate w. The transport shaft 39' rotatably supported on the pair of floor slabs 37 by the bearings 38 at both ends The transport shaft 39 is provided with a plurality of transport rollers 41 at predetermined intervals in the axial direction. One end of each of the transport shafts 39 projecting from one of the support plates 37 is provided with a first bevel gear 42. The transmission shaft 43 is rotatably supported by the frame along the direction in which the transport shaft 39 is disposed. The one end side of the conveyance shaft 39 of 36 is on the side. The transmission shaft 43 is provided with a second bevel gear 44 that meshes with the first bevel gear 42. A driven pulley 45 is provided at an intermediate portion of the transmission shaft 43 in the axial direction. A drive source 46 is provided on a portion of the outer surface of the frame 36 corresponding to the driven pulley 45. A drive pulley 48 is provided on the output shaft 47 of the drive source 46, and a line 49 indicated by a broken line in Fig. 3 is provided between the drive pulley 48 and the driven pulley 45. Therefore, if the driving source 46 is actuated, the transmission shaft 43 is rotationally driven by the transmission line 49 provided between the driving pulley 48 and the driven pulley 45. Therefore, the transmission shaft 43 is transmitted through the transmission shaft 43. The bevel gear 44 and the i-th bevel gear 42 in which the second bevel gear 44 is engaged with each other, the transport shaft is rotationally driven in the pre-twist direction, thereby being provided on each of the transport shafts 39. The substrate w supported by the transport roller 41 can be transported in a predetermined direction. As shown in Fig. 4, the lower frame side of the frame body 36 has a lower frame 51 of the same size as the frame 36, and is borrowed. The connecting members 52 are parallel to each other at a predetermined interval and are connected to each other. The one end portion corresponding to the one end portion of the transport shaft 39 provided in the frame body 36 in the axial direction, that is, the one end portion in the width direction of the lower casing 51 is Branches (four) are provided on both end portions in the direction in which the width directions intersect each other (only one of them is illustrated in the drawing), and the support shaft 53 is disposed such that the axis is orthogonal to the axis of the transport shaft 39. Moving into the transport unit 3 and the gantry 54 of the transport unit 5, on which The width direction-end portion is 'uprightly provided with a support member 55. The aforementioned support shaft 53 is rotatably supported on the support member 55. Thereby, the aforementioned busy tube 36 is on the upper surface of the gantry 54 The axial direction of the body 51 and the transport shaft 39, that is, the width direction of the substrate W, is shaken. The gantry 54 is configured to constitute a rocking mechanism at a portion corresponding to the end portion of the lower frame 51 in the width direction of the other 1459472. The drive cylinder 56' is disposed such that the axis is vertically disposed. The front end portion of the drive shaft 57 of the drive cylinder 56 is disposed in a direction crossing the width direction of the frame 36. Rollers 5 59 (only one of which is illustrated) are provided on both ends of the mounting plate 58. The pair of rollers 59 are abutted against the abutting plate 61 at the other end portion of the lower frame 51 in the width direction. The abutting plate 61 is provided at both end portions in a direction intersecting the width direction. Therefore, when the driving source 56 is actuated and the driving shaft 57 is driven in the protruding direction, the roller 59 passes through the abutment plate 61. And pressing the width of the lower frame 51 10 In the other end portion of the direction, the lower end portion 51 and the other end portion in the width direction of the frame body 36 on which the transport roller 41 is provided are raised. That is, the frame body 36 is driven by the air cylinder 56 with one end portion in the width direction as a fulcrum, toward the width. The other end portion of the direction is inclined to move in a direction higher than the one end portion. The tilting movement angle ' of the frame body 36 is set to be the same inclination angle as that of the frame body 11 of the inclined conveying portion 4 provided in the chamber 15 of the processing 15. The case where the substrate W is processed by the processing device 1 using the transfer device 2 having the above-described structure will be described with reference to FIGS. 5A to 5C and FIGS. 6A to 6C. The substrate 20 W which has been subjected to the predetermined process in the above-described process is supplied to the first carry-in belt 31 of the carry-in/transport unit 3 in a horizontal state by being carried into the horizontal transport belt 3a as shown in FIG. 5A. At this time, the first carry-in belt 31 and the second carry-in belt 32 that are carried into the transport unit 3 receive the substrate W in a horizontal state. The substrate W is transported in the direction of the second carry-in conveyor 32 14 1359472 by the first carry-in conveyor 31. As shown in FIG. 5B, when the distal end portion in the longitudinal direction of the substrate w is placed on the second loading conveyor 32, the first loading conveyor 31 and the second loading conveyor 32 are driven by the cylinder. 56 is driven in the oblique direction, and has the same inclination angle as the inclined conveyance unit 4 in the processing chamber 6. (5) At this time, the first and second carry-in belts 31 and 32 are inclined while transporting the substrate W. Further, at this time, the rear end portion of the substrate w is horizontally carried into the conveyance belt, but one or more of the lengths of the substrate W are on the first and second loading conveyance belts 31 and 32. It is inclined by the conveyor belts 31, 32. As shown in Fig. 5C, the substrate w is conveyed to the second loading conveyance belt 32 while being tilted, and the substrate length dimension remaining on the second loading conveyor 31 is less than one-half of the total length. That is, the driving unit 13 is driven into the conveyor belt 31 and returned to the horizontal state from the inclined state. At this time, since the length of the substrate w remaining on the first loading conveyor 31 is about one-half or less of the total length, the substrate is firmly fixed by the second loading conveyor 15 32 . Therefore, the substrate w can be surely transported to the inclined conveyance unit 4 which is inclined at the same angle as the second carry-in conveyor 32. In other words, the first loading conveyance belt 31 is tilted horizontally while the portion of the substrate W is placed on the second loading conveyor 31, and the substrate w is not dropped by the second loading conveyor 32, and can be transported. To the inclined transport unit 4. When the first loading conveyor 31 is tilted horizontally, the next substrate w is loaded into the horizontal conveyor 3a and supplied to the second loading conveyor 31 in a horizontal state, and the second loading conveyor 31 carries the second conveyor. The substrate of the sheet w. At about the same time, the first substrate W is transported by the second carry-in belt 32 to the transport roller 13 of the inclined transport unit 4, and the second carry-in belt 32 is driven to the horizontal state by the tilted state 15. Once the second loading conveyor 32 is horizontal, it will be the same! The loading conveyance belt 31 simultaneously receives the second substrate "W conveyed in a horizontal state by the first loading conveyor 31. The evacuation conveyor belts 31, 32 are driven in a tilted state by the horizontal state, and the second substrate W is transported into the processing chamber 6, and at the same time, the second substrate w remains on the first loading conveyor 32. When the length dimension is one-half or less, the first loading conveyor 31 is tilted horizontally, and the third substrate W is supplied to the conveyor belt 31' and the above operation is repeated. Thus, the first transporting conveyance belt 31 and the second loading conveyance belt 32, which can adjust the horizontal state and the inclined state, constitute the carry-in transport section 3. Therefore, the substrate W is supplied to and transported on the second loading conveyors 31 and 32 that are dumped horizontally, and the length of the substrate w remaining on the second loading conveyor 31 is one-half or less. At the time of transporting the substrate W which has been tilted by the second loading conveyor 32, the second loading conveyance belt 31 can be tilted horizontally and the next substrate can be received in a horizontal state. In other words, in the loading/unloading unit 3, the first loading conveyor 31 can receive the substrate w in a horizontal state by the loading horizontal belt 3a, and transport the substrate W to the processing chamber 6 by the second loading conveyor 32. Since the inside of the inclined transport unit 4 is performed, the present invention can shorten the processing time in the case where the substrate w is received and transported separately. The substrate w conveyed to the inclined conveyance unit 4 in the processing chamber 6 is sprayed with the processing liquid on the upper surface thereof by the mouthpiece 22. Since the substrate W is conveyed at a predetermined angle, the processing liquid supplied onto the upper surface of the substrate W can smoothly flow at a predetermined speed from the upper end toward the lower end in the width direction. Therefore, not only the processing liquid is hard to remain on the upper surface of the substrate W, but also the processing liquid flows in a predetermined direction, so that the processing speed can be increased and the uniformity of processing can be improved. The substrate W processed in the processing chamber 6 and transported by the inclined transport unit 4 is transported to the carry-out transport unit 5 and transported to the next process. The transport of the substrate W from the inclined transport unit 4 to the carry-out transport unit 5 is carried out as follows. In other words, the first carry-out conveyor belt 33 and the second carry-out conveyor belt 34 of the carry-out/transport unit 5 are inclined at the same inclination angle as the inclined transport unit 4, and wait for the substrate that has been processed in the processing chamber 6 w move out. The substrate processed in the processing chamber 6 is transported to the first carry-out belt 33 in a tilted state as shown in Fig. 6A, and is transported to the second carry-out belt 34 by the first output conveyor belt 33. As shown in Fig. 6B, when the substrate is carried out by the inclined carry-out unit 4 and transported to the jth and second carry-out conveyors 33 and 34, the first and second carry-out belts 33 and 34 such as β-Xuan are inclined. The state is driven to a horizontal state. Further, the substrate W is transported on the second and second carry-out conveyors 33 and 34 in a horizontal state. As shown in Fig. 6C, when the rear end of the substrate w is separated from the first carry-out conveyor 33, the first carry-out conveyor 33 is driven in a horizontal state to be inclined. And receiving the next substrate W which is carried out by the processing chamber (4) at a predetermined inclination angle by the inclined transport unit 4. While the first carry-out conveyor 33 receives the next substrate w, the substrate w is transported by the second carry-out belt 34 to the carry-out horizontal transfer belt & When the substrate W is transported to the carry-out horizontal transport belt Sa, the second carry-out transport belt μ is driven in the horizontal state to have the same inclination angle as the first carry-out transport belt 33. By this, the next substrate w carried out by the inclined conveyance unit 4 is carried out by ejecting the conveyance belt 33 and the second unloading conveyance belt 34 at 1359472, and is carried out at a predetermined inclination angle, and is carried out once, and the rear end is separated from the inclined conveyance unit 4 The carry-out belts 33, 34 are tilted from the tilted state; j is in a horizontal state. When the rear end of the substrate W is separated from the second transport conveyance belt 33, the fifth transport conveyance belt 33 is driven in a horizontal state to be inclined, and receives the substrate which is carried out by the processing chamber 6, and repeats the above. action. In this way, the first carry-out conveyor 33 and the second carry-out belt 34 constitute the carry-out transport unit 5, and the second transport conveyor 34 is dumped horizontally, and the substrate W is transported to the carry-out horizontal transport belt 53. During this period, the 10 first carry-out conveyor 33 can be tilted, and the substrate W carried out by the inclined transport unit 4 of the processing chamber 6 can be received. In other words, the carry-out/transporting unit 5 can receive the substrate W that has been transported out of the process by the first carry-out conveyor 33, and transport the substrate W to the horizontal carry-out conveyor & The present invention can shorten the process time as compared with the case where the substrate W from the 15 inclined transport unit 4 is separately received and the substrate W is transported to the carry-out horizontal transport belt 34. Further, in the above-described embodiment, the transfer side and the carry-out side of the processing chamber 6 are provided in parallel with two transport belts which can be horizontally and erected at a predetermined inclination angle, but may be only on the carry-in side and Move out the side of the - set 20 ϋ round belt. In this way, when the substrate is tilted and processed in the processing chamber, the processing time required to transport the substrate can be shortened. Further, the number of the transport belts constituting the carry-in transport unit and the carry-out transport unit is not limited to two, three or more. Further, although the horizontal conveyance belt is provided on the upstream side of the loading and unloading portion and the downstream side of the unloading and conveying portion, and the substrate conveyance operation is performed, the automatic conveyance belt may be replaced by an automatic device. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a schematic view showing an outline of a processing apparatus according to an embodiment of the present invention. Figure 2 is a longitudinal section of the processing chamber. Fig. 3 is a plan view of a conveyor belt provided on the carry-in side and the carry-out side. Fig. 4 is a side view showing one side of the width direction of the conveyor belt shown in Fig. 3. 10 FIGS. 5A to 5C are explanatory views of the substrate transported in the loading and transporting unit. 6A to 6C are explanatory views of the substrate transported in the carry-out transport unit. [Description of main component symbols] 1...Processing device 11:Frame 2...Transporting device 12...Transport shaft 3...Loading transport unit 13...Transport roller 3a...Loading horizontal transport Belt 14...transport shaft 4...inclined transport unit 15...driven gear 5... carry-out transport unit 16... drive gear 5a... carry out horizontal conveyor belt 17... drive source 6. .. processing chamber 18...output shaft 7...transport 19...radial roller 8...support 21...sprinkler 10...angle adjustment member 22...nozzle 19 1359472 23...set Tube 45... driven pulley 31... first loading conveyor 46... driving source 32... second loading conveyor 48... driving pulley 33... first carrying conveyor 49 ... line 34... second carry-out conveyor 51... lower frame 36... frame 54... gantry 37... support plate 55... support member 38... bearing 56. .. drive cylinder 39...transport shaft 57...drive shaft 41...transport roller 58...mounting plate 42...first bevel gear 59...roller 43...transfer shaft W. .. substrate 44... second bevel gear 20