九、發明說明： 【發明所屬之技術領域】 ’ 其是二ί明係有關於一種光學感測之接觸式量測探頭，尤 其成本、高靈敏度之接觸式之光學感測探頭， 儀，藉m月密機械量測領域，如表面輪廓儀與表面粗度 造成往j到精確量測待測物之表面輪廓及粗度，且不致 k成待測物表面㈣損之目的者。 不致 【先前技術】 顧工業中尺寸的精密與否直接景多響到產品品質 的良筹’因此利用㈣機具進行玉件輪㈣尺寸的量測以 確保工件尺寸的精密為卫#界普遍做為產品品質管制的 方式之一。 凊參我國第86208214號「多功能光學接觸式量測儀」 專利案，其係利用雷射光原理作量測，該量測儀具有兩組 不同用途之測桿，兩組測桿之位移量均由同一組光學系統 以雷射光所測得，其中一組測桿可作單向高精度之位移， 用以作標準件，如塊規、塞規之比較校正；另一組測桿可 作雙向位移，可更換探針，且具有一移動台可在χ_γ平面 上移動’可作圓滑曲面輪廓、尺寸階高量測、線性變位感 測器（LVDT)及指針量錶等之校正。兩組測桿均具有可調整 量測力之裝置’以避免測量時對被測件之表面造成損傷。 然而，其因為是使用雷射干涉儀做為進行量測測桿位移量 的機具，而該雷射干涉儀之設備價格昂貴，因此相對增加 量測的相關費用° 再參我國第84217532號「非球面輪廓量測儀」專利 案，該量測儀係用以量測非球面光學鏡片及非球面塑踢鏡 的特徵參數。I測儀以兩片標準平面玻璃構成的V 導㈣動槓桿式探針，槓桿—端為平衡子，另一端 廓:工寶石探頭和反射鏡。紅寶石探頭接觸非球面鏡片輪 目位法千涉儀分別量測滑座橫向移動距離和探頭 °阿度變化度，最後將兩組位移量以數學模組最佳化方 古’求出非球面參數和形狀誤差。 然而上述結構卻存在著如下所列之缺失： L其雖利用數學模組的方式補正量測誤差，但還是存在著 極大的誤差。 •貝桿式探針的設計，在量測其位移變化量時，會有阿貝 誤差的現象產生。 【發明内容】 今，發明人即是鑒於上述現有結構在實際實施上所具 之缺失，於是乃一本孜孜不倦之精神，並藉由其豐富之專 業知識及多年之實務經驗所輔佐，而加以改善’並據此研 創出本發明。 本發明光學感測之接觸式量測探頭的主要目的，係在 提供種低成本、高靈敏度之接觸式之光學感測探頭，使 i町運用於如表面輪廓儀與表面粗度儀等精密機械量測 領威’藉以達到精確量測待測物之表面輪廓及粗度且不 硖造成待測物表面的磨損之目的者。 本發明光學感測之接觸式量測探頭的目的與功效係 由以下之技術所實現： ' /、係〇括〜基座、一固定於基座上的光·學感測裝置、 難系裝置與执持該懸吊裝置之導桿的挾持裝置；俾經由該 挾捋裝置呈二點點接觸挾持懸吊裝置之導桿的設計.，使該 懸吊裝置只具有-維自由度；繼透職光學感測裝置量測 該懸吊裝置的位移變化量並據此得到一聚焦誤差訊號利 用此聚焦誤差訊號可得到懸吊裝置相對於基座的位移 量，進而求得待測物之表面輪廓與粗度。 【實施方式】 為令本發明所運用之技術内容、發明目的及其達成之 功效有更完整且清楚的揭露，茲於下詳細說明之，並請一 併參閱所揭之圖式及圖號： 首先’請參閱第-、二、三、四圖，本發明光學感 測之接觸式量測探頭包括有： 基座（1) ’其係設有第一固定面，而相距於第 :固定面（11)適當之距離處，設有往上延伸之第二固 定面（12)及往下延伸之第三固定面（13)，另於該第三 固定面（13)的相對處則設有第四固定面（14);該第一 固定面（11)上設有螺孔（15a〜15d)。 光學感測裝置（2)，其係固定於基座（1)之第二固 定面（12)上，該光學感測裝置（2)設有一位移量測探頭 (21 )，以下凊再併參第五圖所示，該位移量測探頭（Μ) 之内部係分別設有雷射二極體（22)、分光鏡（23)、反 射鏡（24)準直鏡（25)、物鏡（26)及四象限光感測器 (27) [four-quadrant photo detector)0 懸吊裝置（3)，其係固定於基座（丨）之第一固定面 (11)上，該懸吊裝置（3)係設有十字型懸吊件（31)與四 根微細樑（32a~32d)，該四根微細樑（32a〜32d)係分別 組設在十字型懸吊件（31)的各桿體末端處且該十字 型懸吊件（31)與微細樑（32a〜32d)係配置於基座（1)之 第一固定面（11)上，並以螺絲（33a〜33d)穿過墊片 (34a〜34d)鎖固於基座（1)第一固定面（11)之螺孔 (15a〜15d)内，又於十字型懸吊件（31)上表面固定有反 射鏡（35)，藉以使光學感測裝置（2)之聚焦光源可以直 接投射至十字型懸吊件（31)表面之反射鏡（35)上，又 於十字型懸吊件（31)的下表面設一圓柱形導桿（36)， 導桿（36)末端具設探針（37)，以當有探針（37)與待測 物（5)之表面接觸時，該懸吊裝置（3)將會產生位移變 化量，並藉光學感測裝置（2)偵測反射鏡（35)上之反射 光’做光束聚焦訊號處理。 挾持裝置（4) ’係由一活動滾柱（41)及二萬向滚珠（42) 構成，該活動滾柱（41)被固定在基座（丨）的第三固定面（13) 上，而該二萬向滾珠（42)則被固定在於基座（丨）之第四固 定面（14)上所具之V形缺槽（141)的二端面上，且該活動滾 柱（41)與一萬向滾珠（42)恰與前述之圓柱形導桿（36)之 周壁相抵，以限制導桿（36)僅能作上下方位的位移動作。 本發明之實施使用時，請再一併參第一、二、三、 四、五圖，該懸吊裝置（3)係固定於基座（1；)的第一固 定面（11)上，而光學感測裝置（2)則固定在基座的 第二固定（12)上，並位於相對懸吊裝置（3)的上方處， 挾持裝置（4)得:固定在基座（1)之第三及第四固定面 (13 )、（ 14 )間，光學感測裝置（2)之位移量測探頭（21) 可投射雷射聚焦光束至固定於十字型懸吊件（Μ)上方 的反射鏡（35)表面上，而反射鏡（35)之反射光再投射 於光學感測裝置（2 )之四象限光感測器（27 )，當導桿. (3 6 )末端上之探針（3 7 )接觸待測物（5 )表面時，將會'帶 動導桿（36)產生相對待測物（5)表面凹凸狀態之上下 運動’而因導桿（36)與十字型懸吊件（3〇連設，且十 字型懸吊件（31)受制於四根微細樑（32a〜32d)，使十字 型懸吊件（31)產生微小的位移變化量，此微小的位移 變化量是經由四象限光感測器（27)量測到的聚焦誤差 訊號〔即四象限之（I +π)-(Π+ιν)〕，經聚焦誤差處 理電路後求得。 其中位移量測探頭（21)之投射光束係由雷射二極 體（22)射向分光鏡（23)，雷射光束在通過分光鏡（23) 後，經過一反射鏡（24)、準直鏡（25)後成平行光束， 再經由物鏡（26)聚焦在反射鏡（35)上，而反射光束則 循原路徑經物鏡（26)、準直鏡（25)、反射鏡（24)、分 光鏡（23)後而投射至四象限光感測器（27)上。 本發明於光學感測裝置（2)的光學聚焦之原理，係 利用聚焦量測方法中之像散法，所謂像散法是指成像 時橫向與縱向的成像位置不同，因此造成像點的失 真，利用此一像散特性做為量測的依據，所以當反射 鏡（35)表面的位置在物鏡（26)的聚焦平面上，反射光 經由準直鏡（25)、反射鏡（24)與分光鏡（23)會在四象 限光感測器（27)上形成一個圓形區域；若反射鏡（35) 表面位於物鏡（26)的非聚焦區域，則經準直鏡（25)、 反射鏡（24)與分光鏡⑵）的反射光在四象限光感測器 (27)上形成的形狀則為橢圓形。 即每反射鏡（35)位於如第五圖Α所示的非聚隹{ 置時，經準直鏡（25)、反射鏡（24)與分光鏡⑽後白 反射光細象限光❹彳器（27)會形心直橢圓形光.害 1359258 以下併參第六圖】’·四象限光感測器（27)訊號經由聚 焦誤差處理電路處理後為正電壓輸出【以下併參第^ • 圖】；當反射鏡（35)位於第五圖B所示的聚焦位置時， ·. ㈣光在四象限光感測器⑼上形成正圓形光點，四 =光感《⑽訊號經聚焦誤差處理電路後為零電 壓輸出，當反射鏡（35)位於第五目c的非聚焦位置時， 反射光在四象限光感測器（27)上形成水平橢圓光點， 四象限光感測器（27)訊號經聚焦誤差訊號處理電路的 • 處理後為負電壓輸出；因此第五圖中A、B與C之區域 分別對應第六圖之A、B與C三個訊號處理圖形，此三 個訊號處理圖形的電壓輸出構成第七圖之聚焦誤差: 線〔橫軸為聚焦位置，縱軸為聚焦誤差電壓訊號'〕，此 聚焦誤差曲、線即為光學量測〉去中最重要的s曲線而 此S曲線中的線性區域可作為位移量測之用。 因此本發明乃利用此光學感測裝置（2)之特性，將 其應用於量測懸吊裝置（3)之位移運動量，將光學感測 • 裝置（2)之位移量測探頭（21)與懸吊裝置（3)上方反射 鏡（35)表面的距離恰好切入s曲線的線性區域内，當 懸吊裝置（3)移動時，根據聚焦誤差的輪出電壓，便可 得到懸吊裝置（3 )的位移變化量。 而懸吊裝置（3)之設計原理【參第一、二、三、四 圖】，係採對稱式的結構設計，此裝置原本具有六個自 由度，但因四根微細樑（32a〜32d)固定，故可溢止懸吊 裝置（3)夺X、γ軸方向的位移以及z軸方向的旋轉， 再加上挾持裝置（4)之活動滾柱（41)與二萬向滾珠（42) 恰與懸吊裝置（3)之圓柱形導桿（36)之周壁相抵，限制了 10 導桿（36)僅能作上下方位的位移 僅具上下移位的單-自由度：而懸吊裝置 一個上下位移運動自由度的運動量罝(3)所剩餘的 置（2)量得。即為使懸吊裝置（3)且:由光學感測裳 特性，懸吊農置⑶是採用十字型懸3=由度的 計四根微細樑（32a~32d)的長、寬.、屋译）搭配所設 (32a〜32d)於各軸向上剛性的差異二利用微細樑 由度的效果，此種對稱式結構設計方式，：：固定自 =於組裝上的誤差降低’避免不對稱設 ：：： 統誤差’更由於結構設計簡單，使得製造力 系 降低生產成本。 4易’ 在量測時，首重光學感測之接觸式量測探 ，aCkability) ’即指探針⑽在一定的量測速度= 探針（37)保持接觸待測物（5)表面的能力。 广 :⑷在設計上’因探針⑽沿著待測物⑸表面垂直 時，會有摩擦力效應產生【如第八圖所示】，故兩有一 小彈力克服摩擦力，因此可將運動方程式表示如下：： 滅=Fs - Fv. 土 μΜ + mg 其中w為探針（37)結構質量；s為加速度；Fs (1). 卜為探針（37)接觸於待測物⑸表面所產生的垂直’ (Vertical reacti〇n force) ; 為摩擦力，其中 ％、 圓、，(36)與鉻鋼萬向滾珠 :質=重：值約為正向挾持力、為結 當探針（37)接觸待測物⑸表面以進行量測時，探 C )無論是向上或向下移動，皆會有摩擦效應的產生，為 1359258 避免過大的摩檫力影響探針回復至原本的平衡位 置’需有一最小臨界彈力（Fsain)克服摩擦力’其方程式可 表不為·· ，其中Zl為設定克服摩擦力的 最小臨界彈力的探針（37)位置。過大的接觸力將會直接破 壞待測物（5)表面，可表示成方程式尽=(A：XZ2)+/^，其中& 為探針（37)¾表面最大反應力的位置。 其中一根微細樑（32a〜32d)的彈性係數計算方式為： k/4=24EI/L3 、i=bh3/12 ’ 其中 L、b、h 分別為微細樑 (32a〜32d)的長、寬、高。 假5又探針（37)沿著簡易正弦表面（si nuso i da 11 y surf ace)前進’藉由參考自由振動位移響慮，可以求得探 針（37)的垂直位移，其之方程式（2)為： z(t) = ^isin(iy/) (2) 其中j :正弦表面的振幅；6):探針（37)沿著待測物 (5 )表面量測時所產生的振動頻率，此振動頻率可藉由正 弦表面的空間波長（spatial wavelength)，與進給速度 (traverse speed)求得，如方程式（3)所示： 2τη> ω = 丁 (3) 將方程式（2)、（3)代入方程式（1)。當探針（37)將要 離開将測物（5)表面時的瞬間，探針（37)是呈向下移動， 可表示為方程式（4):Nine, invention description: [Technical field to which the invention belongs] 'It is a contact measuring probe for optical sensing, especially a cost-sensitive, high-sensitivity contact optical sensing probe, instrument, m In the field of monthly mechanical measurement, such as the surface profiler and the surface roughness, the surface profile and thickness of the object to be tested are accurately measured, and the surface of the object to be tested (4) is not damaged. Not [previous technology] The precision of the size of the industry is directly reflected in the quality of the product. Therefore, the size of the jade wheel (4) is measured by the (4) machine to ensure the precision of the workpiece size. One of the ways of product quality control.凊 我国 China's No. 86208214 "Multi-function optical contact measuring instrument" patent case, which uses the principle of laser light for measurement, the measuring instrument has two sets of measuring rods for different purposes, the displacement of the two sets of measuring rods are It is measured by laser light from the same optical system. One set of rods can be used for one-way high-precision displacement for standard parts, such as block gauge and plug gauge comparison; another set of rods can be used for bidirectional displacement. The replaceable probe has a mobile station that can be moved on the χγ plane to correct for rounded surface contours, dimensional step height measurement, linear displacement sensor (LVDT) and pointer scale. Both sets of measuring rods have a device that can adjust the measuring force to avoid damage to the surface of the device under test. However, because it uses a laser interferometer as a tool for measuring the displacement of the measuring rod, and the equipment of the laser interferometer is expensive, the relative cost of the relative measurement is increased. ° Refer to China No. 84211532 The spherical profile measuring instrument patent case is used to measure the characteristic parameters of the aspherical optical lens and the aspherical plastic kicking mirror. The I tester consists of two V-guided (four) moving lever probes with standard flat glass. The lever-end is the balance and the other end is the gemstone probe and mirror. The ruby probe contacts the aspherical lens wheel position method to measure the lateral movement distance of the sliding seat and the degree of change of the probe degree, and finally the two sets of displacements are optimized by the mathematical module to find the aspherical parameter. And shape error. However, the above structure has the following shortcomings: L Although it uses the mathematical module to correct the measurement error, there is still a great error. • The design of the Bayer probe has an Abbe error when measuring the amount of displacement. SUMMARY OF THE INVENTION Nowadays, the inventor is in view of the lack of practical implementation of the above-mentioned existing structure, and thus is a tireless spirit, and is improved by its rich professional knowledge and years of practical experience. 'And based on this research and development of the present invention. The main purpose of the optical sensing contact measuring probe of the present invention is to provide a low-cost, high-sensitivity contact optical sensing probe for use in precision machinery such as surface profiler and surface roughness meter. Measured by the leader to achieve accurate measurement of the surface contour and thickness of the object to be tested and does not cause the wear of the surface of the object to be tested. The purpose and function of the optical sensing contact measuring probe of the present invention are achieved by the following techniques: ' /, the system includes a base, a light-sensing device fixed to the base, and a difficult device And a holding device for holding the guiding rod of the hanging device; the design of the guiding rod of the holding device is controlled by the two-point contact device through the device, so that the hanging device only has a -dimensional degree of freedom; The optical sensing device measures the displacement variation of the suspension device and obtains a focus error signal according to the reference signal. The focus error signal can be used to obtain the displacement of the suspension device relative to the base, thereby obtaining the surface contour of the object to be tested. With roughness. [Embodiment] For a more complete and clear disclosure of the technical content, the purpose of the invention and the effects thereof achieved by the present invention, the following is a detailed description, and please refer to the drawings and drawings: First, please refer to the first, second, third and fourth figures. The contact measuring probe for optical sensing of the present invention comprises: a base (1) 'having a first fixed surface and a distance from the first fixed surface (11) At a suitable distance, there is a second fixing surface (12) extending upward and a third fixing surface (13) extending downward, and at the opposite side of the third fixing surface (13) a fourth fixing surface (14); the first fixing surface (11) is provided with screw holes (15a to 15d). The optical sensing device (2) is fixed on the second fixing surface (12) of the base (1), and the optical sensing device (2) is provided with a displacement measuring probe (21). As shown in the fifth figure, the internal components of the displacement measuring probe (Μ) are respectively provided with a laser diode (22), a beam splitter (23), a mirror (24) collimating mirror (25), and an objective lens (26). And four-quadrant photo detector (27) [four-quadrant photo detector] 0 suspension device (3), which is fixed on the first fixing surface (11) of the base (丨), the suspension device ( 3) A cross type suspension member (31) and four micro beams (32a to 32d) are provided, and the four fine beams (32a to 32d) are respectively set on the respective rods of the cross type suspension member (31). The cross-shaped suspension member (31) and the micro-beams (32a to 32d) are disposed on the first fixing surface (11) of the base (1) and pass through the pad with screws (33a to 33d). The pieces (34a to 34d) are locked in the screw holes (15a to 15d) of the first fixing surface (11) of the base (1), and the mirror (35) is fixed on the upper surface of the cross type suspension member (31). So that the focusing light source of the optical sensing device (2) can be directly cast The mirror (35) is mounted on the surface of the cross-type suspension (31), and a cylindrical guide rod (36) is disposed on the lower surface of the cross-type suspension (31). The end of the guide rod (36) is provided. The probe (37), when the probe (37) is in contact with the surface of the object to be tested (5), the suspension device (3) will generate a displacement change amount, and the optical sensing device (2) detects The reflected light on the mirror (35) is processed by the beam focusing signal. The holding device (4) is composed of a movable roller (41) and a 20,000-way ball (42), and the movable roller (41) is fixed on a third fixing surface (13) of the base (丨). The omnidirectional ball (42) is fixed on the two end faces of the V-shaped notch (141) on the fourth fixing surface (14) of the base, and the movable roller (41) The universal ball (42) is abutted against the peripheral wall of the cylindrical guide rod (36) to limit the displacement of the guide rod (36) only in the up and down direction. When the invention is used, please refer to the first, second, third, fourth and fifth figures together, and the suspension device (3) is fixed on the first fixing surface (11) of the base (1;). The optical sensing device (2) is fixed on the second fixing (12) of the base and located above the opposite suspension device (3). The holding device (4) is: fixed to the base (1) Between the third and fourth fixed faces (13) and (14), the displacement measuring probe (21) of the optical sensing device (2) can project the laser focused beam to be fixed above the cross type suspension (Μ). On the surface of the mirror (35), the reflected light from the mirror (35) is projected onto the four-quadrant light sensor (27) of the optical sensing device (2), as the probe on the end of the guide rod (36) When the needle (3 7 ) touches the surface of the object to be tested (5), it will 'drive the guide rod (36) to produce a motion corresponding to the surface of the object to be tested (5). The guide rod (36) and the cross-shaped suspension The hanging piece (3〇 is connected, and the cross type suspension piece (31) is subject to four micro beams (32a~32d), so that the cross type suspension piece (31) produces a slight displacement change, and this minute displacement change the amount The focus error signal (ie, four quadrants (I + π) - (Π + ιν)) measured by the four-quadrant photo sensor (27) is obtained by the focus error processing circuit. 21) The projection beam is directed by the laser diode (22) to the beam splitter (23). After passing through the beam splitter (23), the laser beam passes through a mirror (24) and a collimating mirror (25). The parallel beam is focused on the mirror (35) via the objective lens (26), and the reflected beam follows the original path through the objective lens (26), the collimating mirror (25), the mirror (24), and the beam splitter (23). Then, it is projected onto the four-quadrant light sensor (27). The principle of optical focusing of the optical sensing device (2) of the present invention utilizes the astigmatism method in the focusing measurement method, and the so-called astigmatism method refers to imaging. When the horizontal and vertical imaging positions are different, thus causing distortion of the image point, the astigmatism characteristic is used as the basis for measurement, so when the position of the surface of the mirror (35) is on the focal plane of the objective lens (26), the reflection Light is formed on the four-quadrant light sensor (27) via the collimating mirror (25), the mirror (24) and the beam splitter (23). a circular area; if the surface of the mirror (35) is in the unfocused area of the objective lens (26), the reflected light from the collimating mirror (25), the mirror (24) and the beam splitter (2) is sensed in four-quadrant light. The shape formed on the device (27) is elliptical. That is, each mirror (35) is located in the non-concentration as shown in Fig. 5, and the collimator (25), the mirror (24) and the beam splitter (10) are white reflected light fine quadrants. (27) The shape of the heart is straight and elliptical. The damage is 1359258. The following is the sixth figure. '· The four-quadrant light sensor (27) signal is processed by the focus error processing circuit and is positive voltage output. When the mirror (35) is in the focus position shown in Figure B, (4) Light forms a perfect circular spot on the four-quadrant light sensor (9), and four = light perception "(10) signal is focused The error processing circuit is zero voltage output. When the mirror (35) is in the unfocused position of the fifth object c, the reflected light forms a horizontal elliptical spot on the four-quadrant light sensor (27), four-quadrant light sensing. The signal of the (27) signal is processed by the focus error signal processing circuit and is negative voltage output; therefore, the areas of A, B and C in the fifth figure correspond to the three signal processing patterns of A, B and C of the sixth figure, respectively. The voltage output of the three signal processing patterns constitutes the focus error of the seventh figure: the line [the horizontal axis is the focus position and the vertical axis is Focus error voltage signal '], this focus error curve, is the optical measurement line> s most important to the curve in this linear region of the S curve as measured by the displacement. Therefore, the present invention utilizes the characteristics of the optical sensing device (2) and applies it to the displacement movement amount of the measuring suspension device (3), and the displacement measuring probe (21) of the optical sensing device (2) is The distance of the surface of the mirror (35) above the suspension device (3) is cut into the linear region of the s-curve. When the suspension device (3) moves, the suspension device can be obtained according to the voltage of the focus error (3). The amount of displacement change. The design principle of the suspension device (3) [see the first, second, third and fourth figures] is a symmetrical structural design. The device originally has six degrees of freedom, but because of the four micro-beams (32a~32d) ) Fixed, so that the suspension device (3) can take the displacement in the X and γ axis directions and the rotation in the z-axis direction, plus the movable roller (41) and the omnidirectional ball (42) of the holding device (4) ) just offsets the peripheral wall of the cylindrical guide rod (36) of the suspension device (3), limiting the displacement of the 10 guide rods (36) only in the up and down direction, only the single-degree of freedom of up and down displacement: and hanging The amount of motion (罝) remaining in the upper and lower displacement motion degrees of the device is measured by the amount of (2) remaining. That is to make the suspension device (3) and: by the optical sensing characteristics, the hanging agricultural (3) is the length and width of the four micro-beams (32a ~ 32d) using the cross-type suspension 3 = degree. The difference between the rigidities in the axial direction of the set (32a~32d) is the effect of the micro-beams. The design of the symmetrical structure:: Fixed the error of the assembly = reduce the asymmetry ::: The system error is more due to the simple structural design, which makes the manufacturing force reduce the production cost. 4 easy 'in measurement, the first optical sensing contact measurement, aCkability) 'refers to the probe (10) at a certain measurement speed = probe (37) keeps in contact with the surface of the object to be tested (5) ability. Wide: (4) In the design, when the probe (10) is perpendicular to the surface of the object to be tested (5), there will be a frictional effect [as shown in the eighth figure], so the two have a small elastic force to overcome the friction, so the equation of motion can be It is expressed as follows:: ext = Fs - Fv. soil μΜ + mg where w is the structural mass of the probe (37); s is the acceleration; Fs (1). Bu is the probe (37) produced by contacting the surface of the object to be tested (5) Vertical react' (Vertical reacti〇n force); for friction, where %, circle, (36) and chrome steel universal ball: mass = weight: value is approximately positive holding force, for the junction probe (37 When contacting the surface of the object to be tested (5) for measurement, C) Whether there is moving up or down, there will be a frictional effect, which is 1359258. Avoid excessive friction force and affect the probe to return to the original equilibrium position. It is necessary to have a minimum critical elastic force (Fsain) to overcome the frictional force 'the equation can be expressed as ..., where Zl is the position of the probe (37) that sets the minimum critical elastic force to overcome the frictional force. Excessive contact force will directly damage the surface of the object to be tested (5), which can be expressed as an equation = (A: XZ2) + / ^, where & is the position of the maximum reaction force of the probe (37) 3⁄4 surface. The elastic modulus of one of the micro-beams (32a to 32d) is calculated as: k/4=24EI/L3, i=bh3/12' where L, b, and h are the length and width of the micro-beams (32a to 32d), respectively. ,high. False 5 and probe (37) proceed along the simple sinusoidal surface (si nuso i da 11 y surf ace). By reference to the free vibration displacement response, the vertical displacement of the probe (37) can be obtained, and the equation ( 2) is: z(t) = ^isin(iy/) (2) where j is the amplitude of the sinusoidal surface; 6): the vibration produced by the probe (37) as measured along the surface of the object to be tested (5) Frequency, this vibration frequency can be obtained by the spatial wavelength of the sinusoidal surface and the traverse speed, as shown in equation (3): 2τη> ω = D (3) Equation (2) (3) Substituting equation (1). When the probe (37) is about to leave the surface of the object (5), the probe (37) is moved downwards and can be expressed as equation (4):
Λ Fs-^ + mS (-T)A = —;— (4) 經由上述所推導的動癌方程式’可先設計好释吊裝置 (3)之質量及量測接觸力，再決定欲設計的進給速度v與空 間波長a ’而最小的空間波長可由使用的探針（37)半徑得 12 1359258 知 :將進給速度v、空間波長;t代入方程式（3)求得量測的 最大振動頻率’此振動頻率須小於或等於懸吊裝置（3)的 第一自然頻率’原因在於避免發生共振的現象而破壞待測 物（5)表面與探針（37) ’如此即可設計出四根微細樑 (32a〜32d)的彈性係數。Λ Fs-^ + mS (-T)A = —;— (4) The quality of the release device (3) and the contact force can be measured by the above-mentioned deduced tumor equation, and then the design is determined. The feed velocity v and the spatial wavelength a' and the smallest spatial wavelength can be obtained by using the probe (37) radius 12 1359258. The feed velocity v, the spatial wavelength; t is substituted into equation (3) to obtain the maximum vibration measured. The frequency 'this vibration frequency must be less than or equal to the first natural frequency of the suspension device (3)' is due to avoiding the phenomenon of resonance and destroying the surface of the object to be tested (5) and the probe (37). The elastic modulus of the root micro-beams (32a to 32d).
利用ANSYS有限元素軟體來分析光學感測之接觸式量 測探頭適當的挾持位置，使探針（37)的 X、Y方向位移小 至不影響量測精度。所分析的懸书裝置（3)包括微細樑 (32a〜32d)、十字型懸吊件（31)、導桿（36)、探針（37)， 皆使用10節點92四面元素’分析所設定的參數都和表卜4 樣模擬的接觸力分別設為1 _和〇 5mj\j，另藉由ANSYS 摒除X、Y方向的位移來假設三點挾持的位置。如第九圖 所示，分別施予1mN和〇.5_的接觸力在θ=『~9〇。和 ，：看十字型懸吊件(31)中心與探物)底端 的一方向位移，表i為微細樑(32a〜32d)、表 懸吊件（31)及導桿（36)，其中wf是連結微⑶The ANSYS finite element software is used to analyze the proper holding position of the optical sensing contact probe, so that the displacement of the probe (37) in the X and Y directions is small enough to not affect the measurement accuracy. The suspended book device (3) analyzed includes micro-beams (32a to 32d), cross-type suspensions (31), guide rods (36), and probes (37), all of which are set using the 10-node 92 four-sided element 'analysis'. The contact force of each of the parameters is set to 1 _ and 〇5mj\j, respectively, and the position of the three points is assumed by the displacement of the X and Y directions by ANSYS. As shown in the ninth figure, the contact force of 1 mN and 〇.5_, respectively, is θ = 『~9 〇. And, see: one direction displacement of the bottom end of the cross type suspension (31) and the probe), the table i is the micro beam (32a~32d), the table suspension (31) and the guide rod (36), wherein wf Is the link micro (3)
的十字型懸吊件⑻的寬;，是探針⑽的中 的距離、表3及表4分別為接觸 頭的導細)和探針(37)的尖端材料參數。表二：=: 接觸力1聊實際分析的結果，表 和表6為 實際分析的結果。 為接觸力〇.5遞 當挾持位置為距離十字型懸吊件（3 時’表5和表6叙了懸吊裝置⑶搭配抉=12. 5mm 了其餘方向的位移，其χ軸方向和^由寺農置⑷避免 l〇nm，此外，使用接觸力lmN在垂直9〇 °最大位移只有 位移為5.91ym。 f ’探針（37)的 13 1359258 — 請參第十圖，其為光學感測之接觸式量測探頭（A)的 實驗架設示意圖，光學感測裝置（2)是置於懸吊裝置（3)之 上’利用調動精密平台（B)由微力感測器【standard deviation 5/zm，i.e. 12. 5mV/2.5mV Mn-1】（C)給予探 針（37) —力lmN，觀察光學感測之接觸式量測探頭（A)的光 學感測裝置（2)與微力感測器（C)輸出的失焦訊號（E)，經 過訊號掏取卡【National Instruments PCI-6013 16bit DAQ-Card】（D)擷取，並用電腦（F)不斷的即時紀錄，實驗 φ 的過程為重複操作9次，可得到如第十一圖所示接觸力與 探針（37)位移的線性關係圖。 為了求得光學感測之接觸式量測探頭（A)的共振頻 率，實驗架設如第十二圖所示’使用頻譜分析儀（G)輸出 掃瞎式正弦波訊號，經功率放大器（H)將訊號放大後驅動 奈求定位平台（0運動，激振光學感測之接觸式量測探頭 (A)的垂直軸’並將光學感測裝置（2)的失焦訊號（E)輸入 頻譜分析儀（G)，由頻譜分析儀（G)每隔0· 25Hz記錄下探 φ 針（37)的振幅比，繪製成第十三圖。由圖中可得出系統之 第一自然共振頻率約在206Hz，自然共振頻率的理論值約 為210 Hz ’實驗值跟理論值做比較相差丨.9%。 光學感測之接觸式量測探頭（A)移量測實驗架設如第 圖所示’在實驗中，光學感測之接觸式量測探頭（A) 是=設，三軸奈米定位平台（I)，且奈米定位平台（I)的位 移里測是直接經由每軸内部的線性變位量測計（LinearThe width of the cross-shaped suspension (8); the distance in the probe (10), the guides of Table 3 and Table 4, respectively, and the tip material parameters of the probe (37). Table 2: =: Contact force 1 The actual analysis results, Table and Table 6 are the results of the actual analysis. For the contact force 〇.5 hand when the holding position is the distance cross type suspension (3 when 'Table 5 and Table 6 stipulate the suspension device (3) with 抉 = 12. 5mm the displacement of the remaining direction, its χ axis direction and ^ By the temple farming (4) to avoid l 〇 nm, in addition, the use of contact force lmN in the vertical 9 〇 ° maximum displacement only displacement of 5.91 ym. f 'probe (37) 13 1359258 - see the tenth figure, which is optical sense The experimental erection diagram of the contact type measuring probe (A) is measured, and the optical sensing device (2) is placed on the suspension device (3) 'Using the transfer precision platform (B) by the micro force sensor [standard deviation 5 /zm,ie 12. 5mV/2.5mV Mn-1] (C) give probe (37) - force lmN, observe optical sensing contact measuring probe (A) optical sensing device (2) and micro force The out-of-focus signal (E) output from the sensor (C) is captured by the signal acquisition card [National Instruments PCI-6013 16bit DAQ-Card] (D), and the computer (F) continuously records instantly, experimenting with φ The process is repeated 9 times, and a linear relationship diagram between the contact force and the displacement of the probe (37) as shown in Fig. 11 can be obtained. Learn to sense the resonant frequency of the contact measuring probe (A). The experimental setup is as shown in Figure 12. 'Use the spectrum analyzer (G) to output the sweep sine wave signal, and the signal amplifier (H) to amplify the signal. The rear drive seeks the positioning platform (0 motion, the vertical axis of the contact measuring probe (A) that excites the optical sensing' and inputs the out-of-focus signal (E) of the optical sensing device (2) into the spectrum analyzer (G) ), the amplitude ratio of the φ pin (37) is recorded by the spectrum analyzer (G) every 0 · 25 Hz, and is plotted as the thirteenth picture. It can be concluded from the figure that the first natural resonance frequency of the system is about 206 Hz. The theoretical value of the natural resonance frequency is about 210 Hz. 'The experimental value is compared with the theoretical value by 丨.9%. The optical sensing contact measurement probe (A) is measured and set up as shown in the figure. The optical sensing contact measuring probe (A) is a set, three-axis nano positioning platform (I), and the displacement measurement of the nano positioning platform (I) is directly through the linear displacement amount inside each axis. Measure (Linear
VariaMe Differential Transducers，LVDT)所量測，LVDT 之量測解析度小於lnm。 14 利用函數產生器（J)產生一 pulse函數，直接驅動奈 米定位平台（I)的Z轴向，並用電腦（F)即時儲存光學感測 之接觸式量測探頭（A)的失焦訊號（E)和奈米定位平台（I) 的LVDT訊號，重複量測九次，第十五圖為重複量測9次 的實驗結果，橫軸為奈米定位平台（I)的位移，縱軸為光 學感測之接觸式量測探頭（A)的位移，經由：9次的量測結 果可得光學感測之接觸式量測探頭（A)的量測誤差為 53. lnm，非線性誤差約為0. 9°/〇。 經由以上的實施說明，可知本發明之「光學感測之接 觸式量測探頭」至少具有如下所列之各項優點： 1. 本發明係藉由懸吊裝置與挾持裝置的組合達成一自由 度的結構設計，其中懸吊裝置之十字型懸吊件摒除X轴 向、Y轴向的位移自由度和Z軸向的旋轉自由度，挾持 裝置則摒除X軸向、Y軸向的偏擺自由度，據此以利於 進行待測物之表面輪廓的量測。 2. 本發明係利用一自由度光學感測之接觸式量測探頭，其 光學聚焦量測方式具有極高位的移解析度，且擁有不易 受到環境因素影響〔例如：容電雜訊（triboelectric noise)、電磁干擾、濕度、溫度變化…等〕之光學量測 特性，故可綠實量測出探針的垂直位移。 3. 本發明之光學感測之接觸式量測探頭係由光學量測裝 置、懸吊裝置及挾持裝置配合基座設置而成，其具有成 本低與高量測精度之特色。 綜上所述，本發明實施例確能達到所預期之使用功 效，又其所揭露之具體構造，不僅未曾見諸於同類產品 中，亦未曾公開於申請前，誠已完全符合專利法之規定與 15 1359258 要求，爰依法提出發明專利之申請，懇請惠予審查，並賜 准專利，則實感德便。Measured by VariaMe Differential Transducers (LVDT), the measurement resolution of LVDT is less than 1 nm. 14 Use the function generator (J) to generate a pulse function, directly drive the Z axis of the nano positioning platform (I), and use the computer (F) to instantly store the out-of-focus signal of the optical sensing contact measuring probe (A). (E) and the LVDT signal of the nanopositioning platform (I), repeated measurement nine times, the fifteenth figure is the experimental result of repeated measurement 9 times, the horizontal axis is the displacement of the nano positioning platform (I), the vertical axis The measurement error of the contact measuring probe (A) of the optical sensing is 53. lnm, nonlinear error, the displacement of the contact measuring probe (A) of the optical sensing is obtained. It is about 0. 9 ° / 〇. Through the above description, it can be seen that the "optical sensing contact measuring probe" of the present invention has at least the following advantages: 1. The present invention achieves a degree of freedom by the combination of the suspension device and the holding device. The structural design, in which the cross-type suspension of the suspension device eliminates the X-axis, the Y-axis displacement degree of freedom and the Z-axis rotation degree of freedom, and the holding device eliminates the X-axis and Y-axis yaw freedom. Degree, according to which to facilitate the measurement of the surface profile of the object to be tested. 2. The present invention utilizes a one-degree-of-freedom optical sensing contact measuring probe whose optical focusing measurement method has a very high degree of shift resolution and is not susceptible to environmental factors (eg, triboelectric noise). ), electromagnetic interference characteristics of electromagnetic interference, humidity, temperature change, etc., so the vertical displacement of the probe can be measured by the green amount. 3. The optical sensing contact measuring probe of the present invention is formed by an optical measuring device, a suspension device and a holding device with a base, and has the characteristics of low cost and high measuring accuracy. In summary, the embodiments of the present invention can achieve the expected use efficiency, and the specific structure disclosed therein has not been seen in similar products, nor has it been disclosed before the application, and has completely complied with the provisions of the Patent Law. With the request of 15 1359258, if you apply for an invention patent in accordance with the law, you are welcome to review it and grant a patent.
16 1359258 【圖式簡單說明】 第一圖：本發明光學感測之接觸式量測探頭的組合側視示 意圖 . 第二圖：本發明光學感測之接觸式量測探頭的局部立體分 解圖 第三圖：本發明光學感測之接觸式量測探頭的局部立體組 合圖 第四圖：本發明光學感測之接觸式量測探頭的局部組合俯 視圖 第五圖：本發明之光學量測裝置示意圖 第六圖：本發明之光學量測裝置之四象限感測器的訊號處 理不意圖 第七圖：本發明之光學量測裝置之四象限感測器的S-曲線 第八圖：本發明光學感測之接觸式量測探頭的運動示意圖 第九圖：本發明之光學量測裝置和懸吊裝置之自由體圖 第十圖：本發明光學感測之接觸式量測探頭的實驗架設示 意圖 第十一圖：本發明光學感測之接觸式量測探頭其接觸力與 探針位移的線性關係圖 第十二圖：本發明光學感測之接觸式量測探頭動態量測的 貫驗架設不意圖 第十三圖：本發明光學感測之接觸式量測探頭的自然頻率 響應圖 第十四圖：本發明光學感測之接觸式量測探頭位移量測實 驗架設不意圖 第十五圖··本發明光學感測之接觸式量測探頭位移量測結 17 1359258 果曲線圖 【主要元件符號說明】16 1359258 [Simplified description of the drawings] The first figure: a schematic side view of the combination of the optical sensing contact measuring probe of the present invention. The second drawing: a partial exploded view of the optical sensing contact measuring probe of the present invention FIG. 3 is a partial perspective view of a contact measuring probe of the optical sensing of the present invention. FIG. 4 is a partial combined top view of the optical sensing contact measuring probe of the present invention. FIG. 5 is a schematic view of the optical measuring device of the present invention. Figure 6: Signal processing of the four-quadrant sensor of the optical measuring device of the present invention is not intended to be the seventh drawing: S-curve of the four-quadrant sensor of the optical measuring device of the present invention. FIG. FIG. 9 is a schematic diagram showing the movement of the contact measuring probe of the present invention. FIG. 10 is a diagram showing the experimental setup of the optical measuring contact measuring probe of the present invention. 11: Linear relationship between contact force and probe displacement of the optical sensing contact probe of the present invention. Twelfth view: dynamic measurement of the contact measuring probe of the optical sensing of the present invention The erecting erection is not intended to be the thirteenth figure: the natural frequency response diagram of the optical sensing contact measuring probe of the present invention. Figure 14: The optical sensing of the contact measuring probe of the present invention is not intended to be erected. Fifteen Figure · The optical measurement of the contact measurement probe displacement measurement of the invention 17 1359258 fruit curve [main component symbol description]
(1) 基座 (11) 第一固定面 (12) 第二固定面 (13) 第三固定面 (14) 第四固定面 (141) V形缺槽 (15a~15d)螺孔 (2) 光學感測裝置 (21) 位移量測探頭' (22) 雷射二極體 (23) 分光鏡 (24) 反射鏡 (25) 準直鏡 (26) 物鏡 (27) 四象限光感測器 (3) 懸吊裝置 (31) 十字型懸吊件 (32a〜32d) 微細樑 (33a〜33d) 螺絲 (34a〜34d) 墊片 (35) 反射鏡 (36) 導桿 (37) 探針 (4) 挾持裝置 (41) 活動滾柱 (42) 萬向滾珠 (5) 待測物 (B) 調動精密平台 (A) 光學感測之接觸式量測探頭 (C) 微力感測器 (D) 訊號擷取卡 (E) 失焦訊號 (F) 電腦 (G) 頻譜分析儀 (H) 功率放大器 (I) 奈米定位平台 (J) 函數產生器 18(1) Base (11) First fixing surface (12) Second fixing surface (13) Third fixing surface (14) Fourth fixing surface (141) V-shaped notch (15a~15d) screw hole (2) Optical sensing device (21) Displacement measuring probe ' (22) Laser diode (23) Beam splitter (24) Mirror (25) Collimating mirror (26) Objective lens (27) Four-quadrant light sensor ( 3) Suspension device (31) Cross suspension (32a to 32d) Micro-beam (33a to 33d) Screw (34a to 34d) Gasket (35) Mirror (36) Guide rod (37) Probe (4 ) Holding device (41) Moving roller (42) Universal ball (5) DUT (B) Transfer precision platform (A) Optical sensing contact measuring probe (C) Micro force sensor (D) Signal Capture Card (E) Defocus Signal (F) Computer (G) Spectrum Analyzer (H) Power Amplifier (I) Nano Positioning Platform (J) Function Generator 18