1247095 玖、發明說明： 【發明所屬之技術領域】 差量測裝置，特別指一種 測旋轉輛誤差的大小，並 誤差量測裝置。 本發明為一種光學式旋轉軸誤 可以用簡易的架設方式，來達到量 且具可量測多自由度光學式旋轉軸 【先前技術】 近年來隨工具機、各種產業機械、曰 ^ «測儀器的高精度 化’加上超精密加工機、半導體製程萝 衣置、電子資訊機器、 原子力顯微鏡等的需要高精密定位技術如 Γ儀為的發展，不論是 在精密機械、半導體產業、微（奈）乎 _ ^木科技皆朝微小化、精 松化與奈米級的方向前進，因此 在和松機械領域之量測設 備 '製造技術、整合技術的發展，微 械不未定位平台與精密定 位檢測技術的相關研究是不容克緩。 …數控工具機是國内製造業最普遍的應用機具，然而在最 近k裡年產業界和學術界相繼投人研究下，數值卫具機的發 展已經有了很大的突破’因愈來愈講求的精密度，已經從基 本的陽春型轉為精密導向的機型，而控制器的發展也愈來愈 進/巾現在產業的趨勢為三維方向及奈米技術，故數控工 具機除了功能之外，相對的生 不了的知確度的優劣也是決定工具機好 壞的重要指標。 1247095 而在檢測旋轉軸物器上’大部分的量測儀器 等’皆為接觸式量測’對待測物產生較大的干擾，因此㈣ 多較不精確；而非接觸的罢 ' 的儀益如雷射干涉儀、三角雷射、、属 電流及電容式移位計等，就需多組探頭量測才可量出旋料 的旋轉位置和傾斜角度，不能《較簡單的架構來量測旋轉 軸。而且多組設備誤差就越多，成本越高。再者，使用上述 儀器，-定要用標準圓棒（球）之配合使用，而這些標準圓 棒（球）之不確定度（峨ertainty)有1的極限，且難 以持續保養，難以架設。 因此’若能發展-套使用較少設備、低成本高精度且多 自由度的旋轉軸量測系統，將有助於精密量測之發展，以達 到精確控制要求。 本發明的測量方法，可以用簡易的架設方式，來達到量 測旋轉軸誤差的大小，並且具可量測多自由度，不拘限於只 能量測一種旋轉軸誤差。 【發明内容】 本發明的目的在於提供一種光學式旋轉軸誤差量測裝 置’其所採用的器材比先前技藝節省更多的成本，而且所架 設的器材越少，在擺設誤差跟人為誤差方面也相對會減少許 多0 可達成上述發明目的之一種光學式旋轉軸誤差量測裝 1247095 貼於標準棒3上面的反射鏡4也相對的運動，而架於工具機 9旋轉軸上的標準棒3可能會產生如前述之水平的位移誤 差’與傾斜角度誤差。 能產生一反射光照 反射光，請參閱圖 當雷射光束入射至第一分光鏡2後， 射在彳示準棒3上面的反射鏡4以再產生一 、圖二的示意圖，本發明之測量方法係由待測工具機的旋 轉輛上裝置一標準棒3，當該標準棒3與工具機的旋轉軸同 時在旋轉時，其標準棒3必然與旋轉軸中心產生水平的位移 决差’與傾斜角度誤差，然後再測量由標準棒3上面的反射 鏡4所反射之反射雷射光束，其反射雷射光束包括無傾斜之 雷射光束A、傾斜α角度後之雷射光束β，如此，除了能夠 里’則石著X軸的水平位移誤差5 X ( 0 )與沿著Y軸的水平 位移决差5 y ( 0 )外，其可再利用三角函數去推算反射雷 射光束的沿著Z軸的傾斜角度ε z ( 0 )、沿著χ軸的傾斜角 度ε X ( 0 )、沿著γ軸的傾斜角度^ 丫（ 0 )。 因此，本發明不拘限於只能量測一種旋轉軸誤差，除了 施夠量測旋轉軸的位置誤差沿著X軸的水平位移誤差5 χ (Θ )與沿著γ軸的水平位移誤差5 y ( 0 )外，還能量、則 的到其傾斜角度誤差沿著Z軸的傾斜角度ε ζ ( θ )、沿著'' 軸的傾斜角度£ Χ ( Θ )、沿| Υ軸的傾斜角度ε y ( g))。 如圖二所示’我們以X軸的角度誤差為範例，在目前的 1247095 技術中，可以由第二分光鏡5的反射光照射到第一感測器 (PSD)7上，藉由光線反射時之入射角等於反射角原理，我們 分別以無傾斜之雷射光束A與傾斜α角度後之雷射光束β照 射在第.一分光鏡5上產生反射光，然後以第一感測器γ進行 ϊ測，其中第一感測器7前面有放一個雙凸透鏡6，而第_ 感測器7位在此雙凸透鏡6的焦距上，目的是要讓它的光點 達到最小，以提高第一感測器7的精確度，之後我們量測反 射光的位置偏移量L1，即可以利用三角函數公式計算出在工 具機上的雷射光束傾斜多少角度。 又如圖四所示，而第二分光鏡5之穿透光打在第二感測 器8上，上面所讀取到的值包含工具機上未水平偏移的雷射 光束C，以及因傾斜的角度造成的一個光槓桿的位移放大所 水平偏移後的雷射光束D，還有工具機上的雷射光束在傾斜 時造成的一個光的出射頭的位置有細微的改變等因素，只要 求出雷射光束傾斜角度，藉由三角函數公式，就能得到雷射 水平位移的值L2。 將前述標準棒3固定在工具機上，當它旋轉的時候，一 定會造成一個傾斜誤差跟水平移動的誤差，則可以利用第一 感測器7與第二感測器8去檢測這兩個誤差值。當標準棒3 上面的反射鏡的反射光垂直打在第二分光鏡5上，會有一道 反射光和-道透射光。反射光打在一個雙凸透鏡6上面，而 1247095 第一感測器7位在雙凸透鏡6的焦距上，入射光打在第二分 光鏡5上’同樣也會得到相同角度的反射角，配合第一感測 器7上面讀到的位移量，可以用三角函數公式計算出工具機 9上的雷射光束傾斜角度，在X軸與Y轴分別得到一個角度。 從第二分光鏡5的透射光，主要是量測工具機9上的雷 射光束的水平分量，然而第二感測器8上讀到得值，不是只 有水平分量的數值，還有雷射光束在傾斜角時所造成的光槓 桿位移放大，但只要雷射光束的傾斜角算出來，代入公式， 就可以得到雷射光束的水平分量。 本發明的實際操作步驟，係將準直雷射丨產生之光束入 射至第一分光鏡2產生反射光，該反射光照射在標準棒3上 面的反射鏡4產生反射光並照射在第二分光鏡5上，再由第 二分光鏡5上產生反射光和穿透光，第二分光鏡5上產生反 射光經由雙凸透鏡6到第一感測器7上，第二分光鏡5上產 生穿透光打在第二感測器8上。 三角函數公式求出工具機9上的雷射 斜角度誤差，進而再算出雷射光束相 差。 該反射鏡4上面的反射光，照射在第二分光鏡5上，可 以從第二分光鏡5的反射光照射在第_感測器7上，而後由 光束在X軸與γ軸的傾 對於Z軸的傾斜角度誤 1247095 而第二分光鏡5的穿透光，主要^测工具機9上的雷 射光束沿著X軸的水平位移誤差&( Θ )與沿著γ軸的水 平位移誤差…Θ )，可是第二感測器8上讀取到的值，不 止有水平位移的值L2，還有他傾斜角度所造成的—個光横桿 放大誤差’因為在第-感測器7可以求出雷射傾斜角度，所 以將X軸與Y軸傾斜角度代入公式，就能得到工具機9上的 標準棒3的沿著χ軸的水平位移誤差⑴Θ )與沿著γ軸 的水平位移誤差6 y ( Θ )。 本發明需使用各項光學組件，現就各項組件加以說明： 準直雷射1 :其光波具有高度的指向性與同調性，但是卻 具有更小的體積與更大的效率。 分光鏡··將入射的光源分成兩道光，一道反射，一道穿 透光。 3、 標準棒3 ··固定在工具機旋轉軸上，體積與重量方面越輕 越小較佳，可以簡少許多幾何上與運動上的誤差。 4、 反射鏡4 :將光源反射到分光鏡上。 5、 雙凸透鏡6 ·提供把光源聚焦於感測器上一點，減少感測 器的量測誤差。 6、 感測器·接收光的位置變化，產生電壓改變量，藉類比/ 數位卡轉成數位訊號傳至電腦，藉此獲得位置變化。 7、 反射（ref lection) ··當光（波或粒子）從入射面反回， 12 1247095 且入射角等於反射角，會與原來的光波形相同，此現象 直稱為反射1247095 玖, invention description: [Technical field to which the invention pertains] A differential measuring device, in particular, a measuring error of a rotating vehicle and an error measuring device. The invention relates to an optical rotating shaft error which can be realized by a simple erection method, and has a measurable multi-degree-of-freedom optical rotating shaft. [Prior Art] In recent years, with machine tools, various industrial machines, «^« The high-precision technology, the ultra-precision processing machine, the semiconductor manufacturing process, the electronic information machine, the atomic force microscope, etc. require high-precision positioning technology such as the development of the instrument, whether in the precision machinery, semiconductor industry, micro (Nai ) _ ^ Wood technology is moving toward miniaturization, finening and nano-level, so the measurement equipment in the field of Hesong machinery 'manufacturing technology, integration technology development, micro-mechanical not positioning platform and precision positioning Research related to detection technology is not to be allowed. ...CNC machine tool is the most common application tool in domestic manufacturing industry. However, under the recent investment in industry and academia, the development of numerical aid machine has made a big breakthrough. The precision of the emphasis has shifted from the basic Yangchun type to the precision-oriented model, and the development of the controller is getting more and more. The current trend of the industry is the three-dimensional direction and nanotechnology, so the CNC machine tool has the function. In addition, the relative pros and cons of the degree of accuracy is also an important indicator to determine the quality of the machine. 1247095 On the detection of rotating shaft objects, 'most of the measuring instruments, etc.' are contact measurement, which causes a large disturbance to the object to be measured, so (4) is more inaccurate; Laser interferometers, triangular lasers, current and capacitive shift meters, etc., require multiple sets of probe measurements to measure the rotational position and tilt angle of the spinner. It is not possible to measure the rotation with a simpler architecture. axis. Moreover, the more errors of multiple sets of equipment, the higher the cost. Furthermore, using the above-mentioned instruments, it is necessary to use a combination of standard round bars (balls), and the uncertainty of these standard round bars (balls) has a limit of 1, and it is difficult to maintain and it is difficult to set up. Therefore, if it can be developed, the rotating shaft measuring system with less equipment, low cost and high precision and multi-degree of freedom will help the development of precision measurement to achieve precise control requirements. The measuring method of the invention can be used to measure the error of the rotating shaft with a simple erection method, and has a plurality of degrees of freedom that can be measured, and is not limited to measuring only one rotating shaft error. SUMMARY OF THE INVENTION An object of the present invention is to provide an optical rotary axis error measuring device that uses more equipment than prior art, and the less equipment is installed, in terms of display error and human error. The optical rotating shaft error measuring device 1247095 which can achieve the above object is relatively moved, and the mirror 4 attached to the standard rod 3 also moves relative to each other, and the standard rod 3 mounted on the rotating shaft of the machine tool 9 may A displacement error 'and a tilt angle error as described above will be produced. A reflective light can be generated, please refer to the figure when the laser beam is incident on the first beam splitter 2, and then the mirror 4 is displayed on the indicator rod 3 to generate a schematic diagram of FIG. 2, the measuring method of the invention A standard rod 3 is mounted on the rotating machine of the machine tool to be tested. When the standard rod 3 and the rotating shaft of the machine tool are rotating at the same time, the standard rod 3 must have a horizontal displacement difference with the center of the rotating shaft. Angle error, and then measuring the reflected laser beam reflected by the mirror 4 above the standard rod 3, the reflected laser beam including the un-tilted laser beam A, the laser beam β after the tilt angle α, thus, except In addition to the fact that the horizontal displacement error of the X-axis is 5 X ( 0 ) and the horizontal displacement along the Y-axis is 5 y ( 0 ), the trigonometric function can be used to estimate the along the reflected laser beam. The inclination angle ε z ( 0 ) of the shaft, the inclination angle ε X ( 0 ) along the χ axis, and the inclination angle 丫 ( 0 ) along the γ axis. Therefore, the present invention is not limited to measuring only one rotation axis error, except that the positional error of the rotation axis is measured along the X-axis horizontal displacement error 5 χ (Θ ) and the horizontal displacement error along the γ-axis is 5 y ( 0) In addition, the energy, then the inclination angle ε ( θ ) to the inclination angle error along the Z axis, the inclination angle Χ ( Θ ) along the '' axis, and the inclination angle ε y along the | Υ axis (g)). As shown in Figure 2, we take the angular error of the X-axis as an example. In the current 1274095 technology, the reflected light from the second beam splitter 5 can be irradiated onto the first sensor (PSD) 7 by light reflection. When the incident angle is equal to the principle of the reflection angle, we respectively irradiate the laser beam A without tilting and the laser beam β after the tilt α angle to generate the reflected light on the first beam splitter 5, and then use the first sensor γ. A speculative test is performed in which a lenticular lens 6 is placed in front of the first sensor 7, and the first sensor 7 is positioned on the focal length of the lenticular lens 6 in order to minimize its spot. The accuracy of a sensor 7, after which we measure the positional offset L1 of the reflected light, that is, the trigonometric function formula can be used to calculate the angle at which the laser beam on the machine tool is tilted. As shown in FIG. 4, the transmitted light of the second beam splitter 5 is struck on the second sensor 8. The value read above includes the laser beam C that is not horizontally offset on the machine tool, and The displacement of an optical lever caused by the tilting angle amplifies the horizontally deflected laser beam D, and the laser beam on the machine tool has a slight change in the position of the exiting head of a light caused by the tilting of the laser beam. As long as the tilt angle of the laser beam is obtained, the value L2 of the horizontal displacement of the laser can be obtained by the trigonometric function formula. Fixing the aforementioned standard rod 3 on the machine tool, when it rotates, it will definitely cause an error of tilt error and horizontal movement, and then the first sensor 7 and the second sensor 8 can be used to detect the two. difference. When the reflected light from the mirror above the standard rod 3 is perpendicularly hit on the second beam splitter 5, there is a reflected light and a transmitted light. The reflected light is struck on a lenticular lens 6, and the 1247095 first sensor 7 is located at the focal length of the lenticular lens 6, and the incident light is struck on the second beam splitter 5', and the same angle of reflection is also obtained. The displacement amount read on the sensor 7 can be calculated by the trigonometric function formula to determine the tilt angle of the laser beam on the power tool 9, and obtain an angle between the X axis and the Y axis, respectively. The transmitted light from the second dichroic mirror 5 mainly measures the horizontal component of the laser beam on the power tool 9, but the second sensor 8 reads the value, not only the value of the horizontal component, but also the laser. The displacement of the optical lever caused by the beam at the tilt angle is amplified, but as long as the tilt angle of the laser beam is calculated and substituted into the formula, the horizontal component of the laser beam can be obtained. In the actual operation step of the present invention, the light beam generated by the collimated laser beam is incident on the first beam splitter 2 to generate reflected light, and the reflected light irradiated on the standard rod 3 reflects the reflected light and is irradiated on the second split light. On the mirror 5, reflected light and transmitted light are generated by the second beam splitter 5, and the reflected light is generated on the second beam splitter 5 via the lenticular lens 6 to the first sensor 7, and the second beam splitter 5 is worn. The light is struck on the second sensor 8. The trigonometric function formula determines the laser oblique angle error on the machine tool 9, and then calculates the laser beam phase difference. The reflected light on the mirror 4 is irradiated onto the second dichroic mirror 5, and the reflected light from the second dichroic mirror 5 is irradiated onto the first sensor 7, and then the beam is tilted on the X-axis and the γ-axis. The tilt angle of the Z-axis is 1247095 and the transmitted light of the second beam splitter 5 mainly measures the horizontal displacement error &( Θ ) of the laser beam on the power tool 9 along the X-axis and the horizontal displacement along the γ-axis. The error...Θ), but the value read on the second sensor 8, not only the value of the horizontal displacement L2, but also the tilting angle caused by his tilt angle 'because the first sensor 7 can find the laser tilt angle, so the X-axis and Y-axis tilt angles are substituted into the formula, and the horizontal displacement error (1) 标准 of the standard rod 3 along the χ axis on the machine tool 9 and the level along the γ axis can be obtained. The displacement error is 6 y ( Θ ). The present invention requires the use of various optical components, and the components are now described: Collimated Laser 1: The light wave has a high degree of directivity and homology, but has a smaller volume and greater efficiency. The beam splitter··divides the incident light source into two lights, one reflection, and one light transmission. 3, the standard rod 3 · · fixed on the rotating shaft of the machine tool, the lighter and smaller the volume and weight is better, can reduce a lot of geometric and motion errors. 4. Mirror 4: Reflects the light source onto the beam splitter. 5. Double convex lens 6 • Provides a focus on the sensor to reduce the measurement error of the sensor. 6. The position of the sensor and the received light changes, and the amount of voltage change is generated. The analog/digital card is converted into a digital signal and transmitted to the computer, thereby obtaining a position change. 7. Reflection (ref lection) · When the light (wave or particle) returns from the incident surface, 12 1247095 and the incident angle is equal to the reflection angle, it will be the same as the original light waveform. This phenomenon is called reflection.
【圖式簡單說明；I 圖一為本發明所量測之傾斜角度沿著Z軸的傾斜角 度、沿著X軸的傾斜角度、沿著Y軸的傾斜角度 示意圖；BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a schematic view showing the inclination angle of the inclination angle along the Z axis, the inclination angle along the X axis, and the inclination angle along the Y axis measured by the present invention;
圖二為本發明所量測之沿著x軸的水平位移誤差與沿 著Y軸的水平位移誤差示意圖； 量測示意圖； 移量測示意圖；以 圖二為本發明以X軸為例的角誤差 圖四為本發明以X軸為例的水平偏 及 圖五為本發明的系統架構圖。 【主要元件符號說明】 1準直雷射 2第一分光鏡 3標準棒 4反射鏡 5第二分光鏡 6雙凸透鏡 7第一感測器 8第二感測器 9工具機 A無傾斜之雷射光束 13 1247095 B傾斜α角度後之雷射光束 C未水平偏移的雷射光束 D水平偏移後的雷射光束 L1位置偏移量 L2水平位移的值 5 X ( 0 )沿著X軸的水平位移誤差 5 y ( 0 )沿著Υ軸的水平位移誤差 ε X ( 0 )沿著X轴的傾斜角度 ε γ( Θ )沿著Υ轴的傾斜角度 ε ζ( Θ )沿著Ζ軸的傾斜角度2 is a schematic diagram of the horizontal displacement error along the x-axis and the horizontal displacement error along the Y-axis measured by the present invention; a measurement schematic diagram; a shift measurement schematic diagram; and FIG. 2 is an angle of the invention using the X-axis as an example. The error diagram 4 is the horizontal offset of the present invention taking the X-axis as an example, and FIG. 5 is a system architecture diagram of the present invention. [Main component symbol description] 1 Collimation laser 2 First beam splitter 3 Standard rod 4 Mirror 5 Second beam splitter 6 Double convex lens 7 First sensor 8 Second sensor 9 Tool machine A No tilting thunder Beam 13 1247095 B Laser beam C after tilting α angle Laser beam D not horizontally offset Laser beam L1 position offset L2 Horizontal displacement value 5 X ( 0 ) along the X axis Horizontal displacement error 5 y ( 0 ) horizontal displacement error along the x-axis ε X ( 0 ) inclination angle ε γ ( Θ ) along the x-axis inclination angle ε ζ ( Θ ) along the Ζ axis Tilt angle
1414