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TWI358759B - Apparatus for fabricating thin film pattern and me - Google Patents

Apparatus for fabricating thin film pattern and me

Info

Publication number
TWI358759B
TWI358759B TW096144204A TW96144204A TWI358759B TW I358759 B TWI358759 B TW I358759B TW 096144204 A TW096144204 A TW 096144204A TW 96144204 A TW96144204 A TW 96144204A TW I358759 B TWI358759 B TW I358759B
Authority
TW
Taiwan
Prior art keywords
thin film
film pattern
fabricating thin
fabricating
pattern
Prior art date
Application number
TW096144204A
Other languages
English (en)
Other versions
TW200823981A (en
Inventor
Yeon Heui Nam
Jin Wuk Kim
Original Assignee
Lg Display Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Lg Display Co Ltd filed Critical Lg Display Co Ltd
Publication of TW200823981A publication Critical patent/TW200823981A/zh
Application granted granted Critical
Publication of TWI358759B publication Critical patent/TWI358759B/zh

Links

Classifications

    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333Constructional arrangements; Manufacturing methods
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B82NANOTECHNOLOGY
    • B82YSPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y10/00Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B82NANOTECHNOLOGY
    • B82YSPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y40/00Manufacture or treatment of nanostructures
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/0002Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/0005Production of optical devices or components in so far as characterised by the lithographic processes or materials used therefor
    • G03F7/0007Filters, e.g. additive colour filters; Components for display devices
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10STECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00Nanotechnology
    • Y10S977/84Manufacture, treatment, or detection of nanostructure
    • Y10S977/887Nanoimprint lithography, i.e. nanostamp

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Nanotechnology (AREA)
  • General Physics & Mathematics (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Mathematical Physics (AREA)
  • Nonlinear Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Theoretical Computer Science (AREA)
  • Optics & Photonics (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • ing And Chemical Polishing (AREA)
TW096144204A 2006-11-29 2007-11-21 Apparatus for fabricating thin film pattern and me TWI358759B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020060119041A KR101308441B1 (ko) 2006-11-29 2006-11-29 박막 패턴의 제조장치 및 이를 이용한 박막 패턴의제조방법

Publications (2)

Publication Number Publication Date
TW200823981A TW200823981A (en) 2008-06-01
TWI358759B true TWI358759B (en) 2012-02-21

Family

ID=39462569

Family Applications (1)

Application Number Title Priority Date Filing Date
TW096144204A TWI358759B (en) 2006-11-29 2007-11-21 Apparatus for fabricating thin film pattern and me

Country Status (4)

Country Link
US (1) US7989271B2 (zh)
KR (1) KR101308441B1 (zh)
CN (1) CN101221357B (zh)
TW (1) TWI358759B (zh)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8101519B2 (en) * 2008-08-14 2012-01-24 Samsung Electronics Co., Ltd. Mold, manufacturing method of mold, method for forming patterns using mold, and display substrate and display device manufactured by using method for forming patterns
US20100095862A1 (en) * 2008-10-22 2010-04-22 Molecular Imprints, Inc. Double Sidewall Angle Nano-Imprint Template
US20110148008A1 (en) * 2009-12-23 2011-06-23 National Cheng Kung University Micro-nano imprint mould and imprinting process
KR101726625B1 (ko) 2010-08-13 2017-04-14 엘지디스플레이 주식회사 롤 몰드, 그 제조 방법 및 장치와 그를 이용한 박막 패턴의 제조 방법
KR102164961B1 (ko) * 2014-05-20 2020-10-14 삼성디스플레이 주식회사 액정 표시패널 제조방법
JP6482377B2 (ja) * 2015-05-15 2019-03-13 アルプスアルパイン株式会社 可溶性材料層の溶解除去方法、部材の製造方法、電子部品用ソケット、および電気・電子機器
KR102494859B1 (ko) * 2016-05-26 2023-02-02 삼성디스플레이 주식회사 표시 장치 및 그 제조방법
CN108255340A (zh) * 2018-01-16 2018-07-06 晟光科技股份有限公司 一种提高抗腐蚀性的金属触控层制作方法
CN108556501A (zh) * 2018-04-24 2018-09-21 河海大学常州校区 一种减小弹性印章变形的压印方法
KR102882376B1 (ko) * 2021-08-11 2025-11-05 전남대학교산학협력단 나노패턴화된 몰드의 패턴 변형 방법

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02136056A (ja) * 1988-11-14 1990-05-24 Gunma Nippon Denki Kk リニアパルスモータの鉄心磁極歯形成金型
US6334960B1 (en) * 1999-03-11 2002-01-01 Board Of Regents, The University Of Texas System Step and flash imprint lithography
JP3859473B2 (ja) 2001-08-30 2006-12-20 シャープ株式会社 スタンパの製造方法
KR101010476B1 (ko) * 2003-12-27 2011-01-21 엘지디스플레이 주식회사 평판표시소자의 제조방법 및 장치
KR100940987B1 (ko) 2003-12-29 2010-02-05 엘지디스플레이 주식회사 액정표시장치
KR100555598B1 (ko) 2003-12-30 2006-03-03 엘지.필립스 엘시디 주식회사 유기전계 발광소자와 그 제조방법
JP4393244B2 (ja) * 2004-03-29 2010-01-06 キヤノン株式会社 インプリント装置
KR101031693B1 (ko) * 2004-06-18 2011-04-29 엘지디스플레이 주식회사 패턴형성용 레지스트 및 이를 이용한 패턴형성방법
TWI280159B (en) * 2005-03-29 2007-05-01 Li Bing Huan Method for fabricating nano-adhesive
KR100688866B1 (ko) * 2005-04-07 2007-03-02 삼성전기주식회사 임프린트 장치, 시스템 및 방법

Also Published As

Publication number Publication date
CN101221357B (zh) 2011-06-15
CN101221357A (zh) 2008-07-16
US7989271B2 (en) 2011-08-02
KR20080048713A (ko) 2008-06-03
TW200823981A (en) 2008-06-01
KR101308441B1 (ko) 2013-09-16
US20080121612A1 (en) 2008-05-29

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees