TWI358329B - Liquid material applying apparatus - Google Patents

Description

1358329 IX. Description of the Invention: TECHNICAL FIELD OF THE INVENTION The present invention relates to a coating apparatus for coating a fluid material on a substrate. [Prior Art] Conventionally, a device for applying a fluid material such as a resist (reS1St) liquid to a semiconductor substrate (hereinafter referred to simply as "substrate") is disclosed in Japanese Patent No. 3-174-2 (Patent Literature). In Japanese Patent Application Laid-Open (Patent Document 2), a nozzle that continuously discharges a fluid material is scanned on a substrate, and a plurality of parallel linear flows are applied to the entire main surface of the substrate. Sex materials, such coating devices are known. This coating apparatus has been proposed with various techniques for improving the uniformity of the film thickness of the fluid material. For example, the patent document discloses a technique of coating a substrate coated with a coating liquid by a resist coating device, and exposing it to a coating solvent in a solvent atmosphere device additionally provided with the resist coating device. The solvent of the cloth liquid is in the ambient gas, and the solvent is attached to the surface of the coating liquid and the viscosity of the surface of the coating liquid is lowered, and then the gas container is formed in the container for accommodating the substrate, and the coating liquid is formed by the gas flow. The surface is flattened. Further, Patent Document 1 discloses a technique for suppressing volatilization of a coating liquid by pressurizing a container in which a substrate coated with a coating liquid is accommodated. The coating film forming apparatus of Patent Document 2 is provided with a drying prevention plate that covers substantially all of the substrate at a position within 2 mm above the substrate, and is capable of being discharged in a linear gap formed in the drying prevention plate. The nozzle of the coating liquid for the insulating film scans the substrate, and the coating 97107798 is applied 329 on the substrate, and a high concentration of the solution can be formed between the substrate and the drying prevention plate: coated on the substrate The coating liquid is dried. Further, the coating film forming apparatus of the yarn is provided with a penetration-in member on the drying prevention plate, and the solvent vapor evaporated from the sea-binding member is supplied to the substrate from the supply hole of the inter-shaped 'V prevention plate, and the drying prevention is prevented. The plate thus has a higher solvent concentration between the substrate and the drying prevention plate. The coating device for scanning the nozzle of the fluid material to apply the flow r' on the substrate is also used as a base material for a flat display device, and the cloth contains a fluid material of a pixel forming material. The apparatus, the example, D' is scanned by a plurality of nozzles repeatedly arranged at a predetermined interval, = stepwise shifting of the substrate in the scanning direction toward the vertical direction = then fluidity (four) can be limbed (Price ipe) is applied to a plurality of grooves between the partition walls formed on the soil plate. The pixel forming material is formed on the substrate by the solvent component 2 of the line (1) of the self-flowing material, and the pixel forming material is fixed on the substrate to form a film of the pixel forming material = between the solvent evaporation, because the pixel forming material The film is sufficiently dispersed in each line of the movable material, so that the film thickness of the pixel forming material can be made uniform. However, when the fluid material is coated by a plurality of nozzles, since the fluid material is not coated on the side after the stepwise movement direction of the substrate, it is located at the last side in the stepwise moving direction in the complex nozzle. The concentration of the solvent component in the ambient gas around the line of the fluid material coated by the nozzle is lower than the line around the line of the fluid material coated by the other nozzle. Therefore, the line of the fluid material coated by the nozzle on the last side is dried earlier than the line of 97107798 7 1358329 ίί Π::::: fluid material, and uneven coating occurs in the body. However, when the product is finished, the display quality of the invention IS device is reduced. The present invention is applicable to a substrate which is coated on a substrate, and which is intended to improve the uniformity of the drying speed of the re-material of the self-coating device. The flow plate discharged from the soil outlet is provided with a substrate holding portion capable of holding the substrate. And a plurality of spouts are arranged in the sub-exit scanning direction in the direction of the sub-scanning direction, and are perpendicular to the coating area on the main surface of the substrate: a mechanism for moving the ejection mechanism in the sub-scanning direction The main scanning direction parallel to the surface is opposite to the substrate: the same: when moving in the main scanning direction, the base: the ejection mechanism is relatively moved in the sub-scanning direction in the sub-scanning direction The main surface of the substrate on the rear side from the relative movement direction of the substrate in the relative movement direction is formed by forming a substantially parallel gas flow between the gas mechanism and the substrate. P. According to the present invention, the flow discharged from the plurality of discharge ports is one of the fluid materials discharged from the plurality of discharge ports by increasing the drying speed of the concentration of the solvent component in the ambient gas. In a preferred embodiment, the discharge mechanism of the airflow forming portion is fixed to the relative position of the scanning direction. According to another preferred embodiment of the present invention, the airflow forming unit has a delivery port for sending the gas, and more preferably, the plurality of discharge ports of the delivery port are disposed at the plurality of discharge ports of the discharge mechanism. The gas is fed to the front surface of the substrate from the delivery port in a substantially parallel manner from the front side in the relative movement direction of the substrate. In still another embodiment of the present invention, the coating device further includes a gas heating unit that can heat the gas facing the discharge mechanism. The above and other objects, features, aspects and advantages of the present invention will become more apparent from the accompanying drawings. [Embodiment] FIG. 1 is a front view showing a plan view coating apparatus 1 of a coating device i according to a first embodiment of the present invention. The coating device 1 is applied to a glass substrate 9 (hereinafter simply referred to as "substrate 9") which is a flat surface, and is coated with a fluid material of a pixel forming material for a flat display device. In the embodiment of the present invention, the coating apparatus 1 is coated with a volatile solvent (in the organic solvent of the present embodiment) on the dynamic matrix (the active mode is organically applied to the Eiectr® Lu_(10) display 2 substrate 9). a 4-f-anisole (4 anisole) and a fluid material (hereinafter referred to as "organic rainbow") imparted to the organic EL material on the substrate 9 r , ^ ^ . 。. 2 thousand, the eyepiece portion 1 is as shown in Fig. 2 and the main surface of the substrate holding substrate 9 of the right holding substrate 9 is parallel to have the substrate holding portion 11 in the opposite direction (i. The Y direction in 1 is referred to as "sub-scanning direction (ie, z-direction / J) horizontally moving at the same time as 97107798 9 (S)] while rotating toward the vertical axis as shown in Fig. 2 The moving mechanism 12. The nine-twisted two-plate holding portion 11 has a substrate heating unit that can be used to lower the substrate from the lower side, and the user is immersed in the substrate heating device, and the α σ 111 coating device 1 is further And the icon is shown in the figure: the alignment mark formed on the substrate 9 (the substrate is held: X = the mark detecting portion 13; Hereinafter referred to as "above 9:) Γ of: ^ encircled line) f cloth discharge Mody domain 91 (in the head 1 in the coating head discharging mechanism of the liquid coating virtual head 14; make

The coating head moving mechanism 15 in which the upper surface 90 of the square plate 9 is parallel and the vertical direction of the accessory drawing direction is the same (that is, the γ γ soil I level in the Fig. 1; Jiang Xixi; hereinafter referred to as "main scanning direction") That is, "direction" is set in the substrate supporting movement direction from the right side of the coating head 14. "1 on both sides", at the same time, the fluid material has (four) liquid to control:: Γ and as shown in Figure 1. And the control head 14 has a plurality of organic EL liquids which can be continuously discharged in the same manner (in the present embodiment, (4) is a type of three nozzles, and is substantially linear. Ground cover) nozzle Π. :)), at the same time, in the y direction (that is, the sub-scan:: (ie, the main scan is deviated. The discharge port U of the three nozzles 17 is set to a slight direction, and the second pair between the adjacent two nozzles 17 The scanning system is dedicated to the coating distance of the substrate 9 in advance, and the main scanning side of the flying 117 is 97107798 I358329. The distance between the extending partitions is f& Γ _ when on the coating area 9 of the substrate 9: cloth:= 3 times. The mouth mouth 17 discharges the organic EL liquid formed between the partition walls, 聋, 3 。. The coating device 1 applies the two grooves of the organic EL liquid, and the other coating device is coated. The coating is applied to the main scanning unit 12 in the coating device 1, the coating head moving mechanism i, and the coating head 14 in the main scanning mechanism 12 with respect to the substrate 9. At the same time, the substrate 9 is moved relative to the coating head u: the second moving pair, moving mechanism. As will be described later, when the coating direction is relatively moved: the organic EL liquid, the substrate 9 and the substrate holding portion 1 are: The middle side of the (+) side is shifted from the (-" side toward the (+γ) side in Fig. 1 in the sub-scanning direction: Ρ 'Fig.: the front side, and the (-Υ) side Scanning direction; 丄:: the rear side of the moving direction of movement. In other words, the figure is the downstream side of the substrate 9 moving in the sub-scanning direction, and the (Υ) side is on the upstream side of the substrate 9.) The movement of the side substrate 9 1 and 2, the discharge port of the nozzle 17 is applied (the second is placed in the relative moving plate moving mechanism of the plurality of plates 9 of the coating head), and the substrate holding portion 11 and the base are simultaneously Gas is sent to form a gas flow from the (+γ) side to the (+γ) side, that is, from the side of the (-γ) side, that is, in the sub-sweeping direction from the substrate q 2 to the (~γ) side (also relative to the moving side) Starting from 97107798, the rolling flow forming portion 19 is fixed by the initial portion 19 to the coating head 14 by the substrate moving mechanism 12 and the coating head moving mechanism 15, and therefore, the air flow shape The relative position of the sub-scanning direction of the present invention is fixed. The airflow forming portion 1 q, M μ + 4 is set to be close to the plurality of nozzles of the coating head 14 in the smear direction 7 7 β _ angle w' and the distance between the rolling flow forming portion 19 and the plurality of nozzles π in the sub-scanning direction is several cm. 9 is broken and disposed on the upper side of the substrate 9 and is close to the upper surface 9 of the substrate 9. Fig. 1 is a longitudinal sectional view showing the vicinity of the airflow forming portion 19. Fig. 2 and Fig. 2 The nozzles 17 having the gas to be supplied to the coating head 相对 are opposite to the (~γ) side of the delivery port 191, and the delivery port 191:, 'the total length of the scanning direction is larger than the coating area 91 of the substrate 9 ( Referring to Fig. 1), the entire length of the main scanning direction is longer and longer. In the coating device 1, the 'airflow forming portion 19 is connected to a compressor (not shown), and the air is supplied from the compressor. Dry air rolling of lower humidity) to the airflow forming portion 19, and a plurality of nozzles j? to the coating head 14, from the (+Y) side (that is, the front side of the relative movement direction of the substrate 9), and the arranged object 19&quot The moon sends air in parallel to the (_γ) side of the upper surface 9 of the substrate 9. Thereby, a parallel air flow is formed between the front end of the plurality of nozzles 17 (i.e., the discharge port) and the substrate 9 on the upper surface 9 of the substrate 9. In the air flow forming portion 19, since the delivery port 19 is provided along the entire length of the main scanning direction of the application region 91 of the substrate 9, the air flow is formed along the entire length of the application region 91 in the main scanning direction. The air flow velocity (that is, the flow velocity) formed by the airflow forming portion 19 is between the nozzle 17 and the substrate 9, so that the second speed is 〇15 m or more, 〇. 35 m.

97107798 12 <S 1358329 It is better to squat (second speed is more than 2m, 〇. 3m or less is better), and in the basic mode, the second speed is 21.21m. Further, the air flow by the air flow forming portion i may be substantially parallel to the upper surface 90 of the substrate 9, but may be slightly inclined to the upper surface 90. Next, the case where the organic EL liquid is applied by the coating device 1 will be described. Figure 4 shows = there is: coating process of EL liquid. When the organic liquid τ is applied by the coating device i, first, the substrate 9 is placed and held by the substrate holding portion u, and the substrate moving mechanism _ drives the soil plate 9 to move and rotate in accordance with the output of the = mark detecting portion 13. 'The coating is shown by the solid line in Fig. j (step S11). In other words, the coating head 14 is located at the beginning of the relative movement of the second substrate: the drawing direction. Moreover, the coating head U is in the main sweep direction, and is located in advance! And the standby position shown by the solid line in Fig. 2, that is, above the liquid receiving portion j 6 on the (-X) side in Fig. 1). Next, the airflow forming portion 19 of the control unit 2 is controlled to output air from the outlet i9i, and the air 9 is formed on the upper surface 9() of the substrate 9 (step (10). The cloth head spits out the organic _ (the step is called again, and the coating head (that is, the movement from the figure in the main scanning direction) starts in the (-χ) side direction (+ Ό side movement). When the main scanning direction of the head 14 is relatively moved, the organic layer is continuously ejected toward the substrate 9, and the organic layer is applied to the three groove portions of the coating region 91 of the substrate 9.) +Χ) The non-coated area on the side and (_χ) side is covered by a mask (mask) that is omitted (97107798 13 1358329), so it will not be coated with organic EL liquid. The head 14 moves to the figure! and in Fig. 2, above the liquid receiving portion 16 on the machine position (i.e., (4)) side = the moving mechanism 12 is driven, and the base & 'substrate #Y) is too ar + _ soil The pole 9 and the substrate holding portion 11 together move only the distance equal to PI) 劈η sp μ 9 times (屮° ', ie, the sub-scanning direction) (the step is called at this time, the coating head 14 is from the distance The organic EL liquid is continuously discharged to the liquid receiving portion 16. The solvent of the quick-drying organic red liquid is used, and the substrate 9 is applied to the coating region 91 by the nozzle π. = heat: Immediately after the application, the machine & liquid is moved in the sub-scanning direction of the dry-welded substrate 9 in the step S15 (i.e., the solvent remains in the semi-dry state from the organic EL material and the organic film is left. The organic EL material is formed on the earth plate 9 in the sub-scanning direction. When the substrate 9 > can be confirmed, the 妒〇 1 s # 1 町 moves, s 捋, the wrong control unit 2 „9 and the substrate holding portion U Whether the end of the coating indicated by the shift chain is in the middle of the coating, and the movement is to the end of the coating, then return to the step si to move a nozzle. When the organic EL liquid is discharged, the pressure is shifted to the (-X) direction (that is, the groove portion of the (+X) side coating region 91 of the reverse 9 is coated: the field is placed on the substrate 9 (the step is confirmed). Whether to move to the end of coating

In the coating apparatus 1, the substrate holding portion u A; Q p ] and the substrate 9 are moved in the main scanning direction and the substrate 9 is on the (+Y) side at the position of the coating end 97107798 1358329. The step movement is repeated (that is, when the coating head 14 moves relative to the substrate 9 in the main scanning direction, the substrate 9 is relatively moved to the coating head 14 = scanning direction), whereby the substrate 9 is coated. The cloth region 'organic EL liquid is applied at a distance equal to three times the distance between the partition walls (steps S14 to S16). In the coating device, the direction of the coating of the organic EL liquid on the substrate 9 is also applied (the relative movement of the substrate 14 is also applied to 19 ^ ^ ^ . T seconds), and the substrate is moved. The direction of movement of the substrate 9 of the mechanism 12 is in the opposite direction. When the substrate 9 is moved to the coating end position, the three nozzles 17 are separated from the organic EL liquid (step S17), and the air is stopped (step S18)', and the coating device 22 is applied. "9 The coating of the EL liquid is finished. Coating: 9 of the soil boards 9 are transported to other coatings, etc., and the substrate is coated with an organic EL liquid after the end of the cloth = (4) (4) The cloth device 1 is actually continuously connected to the plurality of substrates 9 In the case of the coating and coating apparatus 1, in the step Si8, the airflow forming portion = ° is sent out, and the plurality of substrates 9 are coated with (four) two gases: the air is continuously supplied from the airflow forming portion 19. As described above, the coating device 丨 moves in the direction, and is ejected from the three nozzles 17 (3), and the cloth head 14 is applied to the coating region 91 of the substrate 9 in the main scanning, and is striped in the center. The nozzle η is (4) organic ° b,: by the nozzles 17 of the three nozzles π, the mouth of the mouth 17 is parallel coated with the sputum liquid line 'to borrow (+ Y) side and the organic sputum line of the cloth While borrowing 97107798 1358329 two V:: the organic liquid line coated by the mouth 17 is borrowed from the middle (four) ^ 7 thousand 仃 coated money _ line and has =

= line group folder. Therefore, the concentration of the solvent component of purple around the center and the organic EL liquid line coated with ( + y) H 17 becomes high. , organic EL liquid in ...;,! : The device 1 is on the substrate 9 formed by the air flow forming portion 19

The air flow of the two parallel (+Υ) sides toward the (-Y) direction, the ambient gas of the organic enclosure coated by the (+Υ) side and the central nozzle 17 is oriented toward (-Υ). By the way, the concentration of the solvent component of the organic sputum in the ambient gas is also increased around the organic EL liquid line coated by the 一(1)) side, and is applied to the nozzles 17 Cloth ^ 3 organic lines around, to improve the uniformity of ambient gas concentration. w wind blade here, for example, a coating device not provided with a gas flow forming portion as a comparative example day in the coating device of the comparative example on the borrowing (+γ) side (that is, the relative of the substrate in the sub-scanning direction) In the same manner as described above, the concentration of the solvent component of the organic EL liquid in the ambient gas is also increased around the nozzle of the front side of the moving direction and the organic EL liquid line applied by the center nozzle. However, on the (-γ) side of the (_γ) side (that is, the back side of the relative movement direction of the substrate in the sub-scanning direction), the other organic EL liquid lines are on the (-γ) side of the organic EL liquid line coated by the sneezing. It is not coated, and therefore, the organic EL liquid line which is disposed in parallel on the (+γ) side by the central nozzle is applied. Therefore, the area around the organic EL liquid line coated by the nozzle on the (-Υ) side is compared with the organic sputum line coated by the nozzle on the (+ Y) side and the center of the center, < 97107798 16 1358329 The concentration of the solvent component of the organic EL liquid becomes low, and the drying speed of the organic EL liquid line on the (_γ) side becomes larger than the two organic el liquid lines on the (+γ) side. Further, around the organic sputum line on the (-Y) side, the concentration of the solvent component of the organic EL liquid in the ambient gas on the (-Y) side of the line becomes lower than the concentration on the (+Y) side of the line. The portion on the side of the line (_γ) becomes dry earlier than the portion on the (+ Υ) side. Fig. 5A shows three films 93a of an organic EL material formed on the coated regions 91 & on the substrate 9a by the organic EL liquid applied from the three nozzles by the coating apparatus of the comparative example. Sectional view. 5, in order to make the drawing inconvenient, the height of the π '又' 4 film 93a of the coating region 91 & formed in the substrate 9a has been omitted to be larger than the actual height (Fig. 5B The same). As described above, in the coating apparatus of the comparative example, since the (I) side portion of the (I) side of the organic rainbow and the spring is dried earlier than the (+ γ) side, as shown in FIG. 5A, In the film coffee on the side of _γ), the film thickness ratio of the portion on the side of (a) is larger (the film thickness of the portion is larger. Further, the thickness 且 93a of the organic EL material having a thickness and a partial thickness is in the coating region. In the case of the product, the film is unevenly formed, and the display quality is lowered in the product < On the contrary, the coating of the nozzle of the present embodiment is applied to the periphery of the organic sputum line of the sputum, which can improve the uniformity of the concentration of the environmental agent component. Further, in the (+Y) side of the organic EL liquid line coated by the nozzles 17 on the side of the three nozzles 17 and the nozzles on the -η side, the solvent component 97107798 17 1358329 of the organic EL liquid in the ambient gas can be made. The difference in degrees becomes smaller. Thereby, the uniformity of the drying speed of the spitting liquid from the discharge ports of the three nozzles 17 can be improved, and the organic liquid is discharged from the discharge port of the substrate 9 in the sub-scanning direction. The drying speed is in the sub-scanning:: roughly equal. As a result, as shown in Fig. 5β, it can be made. The cross section of the three films 93 of the bismuth material is formed into a substantially the same shape, and the occurrence of uneven coating can be prevented in the coating region 91 on the plate 9. In the base motion: after the flow of the material having the pixel forming material is completed, i has a plane problem--# when the coating unevenness occurs, the above, in the coating device of the embodiment, the 虞 = uniform 癸 wow U.S. s. J prevents application unevenness, and the cloth device 1 is particularly suitable for application of a fluid material containing a pixel forming material to a flat display device. The device field = cloth A is placed on the upper surface 90 of the substrate 9 along the coating area U: the total length of the organic EL liquid line, from the coating of the organic EL liquid, the air The flow can be maintained. Therefore, along the uniformity of the drying speed of the coating bar = 7 liquid on the organic (four) 9 on the right side of the main coating, and the substrate can be more reliably prevented in the middle of the substrate, if it is too small, then The environment 3 is expanded by the flow rate of the air from the milk flow forming portion 19, and the solvent component in the (-γ) side is not sufficient for the month. When the flow rate is too large, the solvent component will diffuse to a wide range and <s 97107798 18 Ϊ358329 is low in its concentration. Therefore, at the position of the sub-nozzle 17 (that is, the amount of air sent by the coating 14 is determined as the self-flow. In the forming portion 19, the air is formed in the airflow forming portion and the coating head, and the air is sent from the airflow forming portion. In contrast, the position is changed, so the second scanning direction is set. As a result, the air is sent to the airflow forming unit 19, and the structure of the apparatus of the coating apparatus 1 is simplified. The air forming unit 19 sends air by the outlet 191. The Γ forms a parallel air flow', and it can be easily formed by the suction of the air: or it can be formed into a flow with the air, and the air flow of the machine can be easily formed. The photographing device 1 is simplified. Further, as a plurality of nozzles 17 disposed on the coating head 14

On the other hand, the air supply port 191 on the side of the + Υ) sends air to the upper surface 90' of the substrate 9 in parallel, so that the air flow can be formed more easily, and the structure of the first can be simplified. I corpse is formed in the airflow #19 by using air as a gas for forming a gas flow on the substrate 9, and since it is not required to provide a gas-tight structure around the substrate holding portion u or the coating device f, The construction of the coating device 1 is simpler. Further, it is also possible to easily supply the gas to the air flow forming portion 19 by using an original device such as a factory in which the coating device is installed. In the coating device 1, the drying rate of the organic EL liquid in the coating region 91 of the 97107798 19 13 8 8 plate 9 is increased by the heater in which the substrate 9 is heated, so that the discharge ports from the three nozzles 17 are increased. The difference of 1 = in the organic EL liquid spit out becomes smaller. As a result, the uniformity of the drying speed of the organic EL liquid from the three nozzles can be further improved, and in the substrate 9 and the coating region 91, the unevenness of coating can be more surely prevented. λ A coating apparatus according to a second embodiment of the present invention will be described. Fig. 6 shows a longitudinal section 2 in the vicinity of the airflow forming portion 19 of the coating device of the λ-form: as shown in Fig. 6, the coating device of the embodiment of the 帛2 is provided inside the airflow shape so as to be oriented toward the coating head. 14 air heated gas plus ... Ρ 192. In the present embodiment, the gas heating unit 192 uses a rod-shaped heater extending in the direction. Other constructions are shown in Figure i to Figure: No coating device! The same 'is attached to the same symbols in the following description. In the coating apparatus of the second embodiment, the air flow in the (-Y) direction from the parallel (+ y) side to the upper surface 9 of the substrate 9 of the air flow forming portion 19 is formed in the same manner as the 实施ι embodiment. Around the three organic EL liquid lines coated by the three nozzles 17, it is possible to improve the uniformity of the environmental gas. As a result, it is possible to improve the uniformity of the drying speed of the organic EL liquid discharged from the three discharge nozzles of the coating head 14 and the coating area 91 on the substrate 9 (refer to the figure). In the coating apparatus of the second embodiment, in particular, the air heated by the gas heating unit 192 forms a parallel gas 97107798 20 (1358329 flow) on the upper surface 9 of the substrate 9, so that it can be The drying rate of the organic EL liquid applied to the application region 91 of the substrate 9 is increased, whereby the difference in the drying speed of the organic EL liquid discharged from the discharge ports of the three nozzles i7 can be made smaller. As a result, the uniformity of the dryness of the organic sputum discharged from the three nozzles π can be further improved. The embodiment of the present invention has been described above, but the present invention is not limited to the above embodiment, and Further, in the coating device of the second embodiment (4), the gas heating portion 192 is not required to be provided inside the airflow forming portion 19, and may be provided in the airflow forming portion 9 (-γ). ) side, and on the (+ γ) side of the nozzle η of the coating head 14 and gas The flow forming portion 19 may be provided independently. In this case, the air which is formed by the air flow forming enthalpy 19 is heated by passing near the gas heating portion 丨92, and is heated by the air on the upper surface of the substrate 9 In the coating of the above embodiment, in the position of the nozzle 17 of the coating 14 in the sub-scanning direction, the flow velocity of the air is not limited to the above range, which may be dependent on the type or evaporation of the solvent of the organic EL liquid. The speed of the airflow forming portion 19 is not required to extend along the entire length of the application scanning region 9 to form a slit (1) (1), for example, as shown in the airflow forming portion 19. A plurality of delivery ports arranged along the entire length of the main scanning direction of the coating region 91 may be used. Further, the outlet 19 of the airflow forming portion does not need to be set to be along the main scanning direction of the coating region 91. For example, the airflow forming portion of the only one of the outlets, which has the width of the main scanning direction and the coating head Μ 97107798 21, can be movably provided on the (+Υ) side of the plurality of nozzles 17 Main scan;: on, The coating of the organic liquid is synchronously moved between the main sweeping direction and/or the air-surface and the coating head, and is on the top of the coating head 14 and the substrate 9 at 1 = plate 9. The parallel air flow of 90 is also possible. The delivery port 191 of the portion 19 is parallel two: f does not necessarily have to form the air from the air flow to the upper surface 9 of the substrate 9, which can be self-disposed to the coating head 19, for example. (i.e., the main surface 9G of the airflow forming portion 9 on the side of the (-z) two (1)) or the other surface of the base substrate 9 of the substrate substrate 9 is formed into a parallel flow, so that the gas flow m flow forming portion 19 The gas to be sent is not limited to empty: the second is an inert gas such as nitrogen (N2). Further, if the micro-face 90 is formed to form a parallel old, the 皮: the skin is sent out and the substrate 9 is placed on the air "IL This is also possible. In the coating device, the airflow forming portion 19 of the body may be replaced by the airflow forming portion 19 of the body. In addition, the airflow of the airflow is formed by the airflow of the airflow, and the U-shaped portion is provided from the side of the (+ γ) side of the coating head 14 and is disposed from the side of the (one side), so that the body is formed. The airflow is formed on the substrate 9, and the coating and the squeezing of the above-described embodiment 12 allows the substrate 9 and the substrate holding portion u to be moved by the substrate moving mechanism, and the coating head 14 is moved by the substrate. 'It is also possible to relatively move the coating head 97107798 22 < S ) 1358329 2 of the substrate 9 in the sub-scanning direction. Further, if the movement of the coating head 14 is replaced, and m is also moved in the sweeping direction of the item moving mechanism 15, the substrate 14 f + 萁 is applied in the direction in which the substrate holding portion η is drawn in the main iB portion. This η moves relatively, so too. The coating device for the substrate 9 can also be discharged and coated 9 from the coating head 14 and the red (1), green (G), and blue (ΒΠ: organic acids (4). Next, in the coating head 14, in the adjacent 2, the distance in the direction of 4 = j sweep is equal to the distance between the partition walls. It is set at three, and the spray on the coating head 14 is not limited to 17 Further,...1: or 4 or more nozzles are provided with an organic liquid which is discharged from the partition U7, and may be applied in a stripe shape on the coating area 91 which is not yet walled. Since the organic EL EL liquid line 'in the machine sputum discharged on the substrate 9 is present, the drying time is relatively easy to move, and the film thickness of the hole pattern is likely to be different. Cloth hook \ raw, ^, because it can improve the drying time of organic rainbow liquid. This is especially suitable for continuous discharge of organic alpha liquid in the basic material in the 2 set 'but it is also suitable for intermittent ink The device that sprays the flow/·the material on the substrate. The above-mentioned application form is coated with Mengjin, 1 broken; a turbulent material is coated on The plate=set two material containing the hole transport material is formed by the material of the hole transport layer of the organic EL display device. The electric 97107798 23 (S) 1358329 hole transport layer not only refers to the organic material. The meaning of the narrow hole transport layer also includes the hole injection layer for the motor = layer input. 7 hole injection coating: the display can also be used to make the display device from the two substrates (ie 'Plate, (4) Can Qing (1). Further, the organic cloth device can be used not only for coating of a fluid material including an organic π material or a hole transporting material for an organic EL display device, for example,

It is used for applying a liquid material including a coloring material, a camping material, or the like to a substrate for a liquid crystal display device, a plasma display device, or the like. As described above, the coating device prevents the occurrence of coating unevenness due to the coating region 9 on the substrate 9. Therefore, although it is particularly suitable for the display quality degradation when the dream product is completed, the coating is easily felt. Non-uniform household: application of a flow material including a pixel forming material (an organic EL material for an organic EU page device in the above-described embodiment) for use in a flat display device, but the above coating device is utilized It is also possible to apply a (four) type of fluid material to various substrates such as a substrate for display of a flat display or a semiconductor substrate. The invention has been described in detail above, but is not intended to limit the invention. Therefore, various modifications or aspects can be made without departing from the scope of the invention. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a plan view showing a coating apparatus according to a first embodiment. Fig. 2 is a front view of a coating apparatus. 97107798 24 1358329 Figure Longitudinal section showing the vicinity of the airflow forming section

Fig. 4 shows a coating flow of an organic EL liquid. Fig. 5A is a cross-sectional view showing a film of an EL material by a coating apparatus of a comparative example. Fig. 5B is a cross-sectional view showing a film of an organic EL material on a substrate by the coating apparatus of the embodiment.

Fig. 6 is a longitudinal sectional view showing the flow of the coating apparatus of the second embodiment. [Main component symbol description] 1 Coating device 2 Control unit 9 ^ 9a Substrate 11 Substrate holding portion 12 Substrate moving mechanism 13 Alignment mark detecting portion 14 Coating head 15 Coating head moving mechanism 16 Liquid receiving portion 17 Nozzle 18 Flowable material supply portion 19 Air flow forming portion 90 Main surface (upper surface) 91, 91a Coating region 93, 93a Film 111 Heater 97107798 25 1358329 191 Feed port 192 Gas heating portion

97107798 26

Claims (1)

AUG 1 2 2011 - f 1 change ten, apply for patent g • 1 甘 种 Μ Μ 'coating a fluid material on the substrate; it is provided with: a substrate holding portion for holding the substrate; The plurality of 侗 配 侗 侗 侗 侗 山 山 山 山 山 山 山 山 山 山 山 山 山 山 山 山 山 山 知 知 知 知 知 知 知 知 知 知 知 知 知 知 知 知 知 知 知 知 知 知 知 知 知 知 知槿 The main parallel face of the main surface is perpendicular to the sub-sweeping direction and moves relative to the substrate relative to the substrate. The substrate is relatively moved in the upper sweeping direction; and::: the forming portion is formed in: in the sub-scanning direction, the front side of the moving direction is opposite to the rear side of the relative moving direction, and the main surface is Forming between the substrates; the gas flow of the crucible has a delivery port for sending the gas to the discharge mechanism and the air flow forming portion, and the mouth is relatively moved relative to the plurality of discharge bodies of the discharge mechanism On the front side of the direction, the gas = the delivery port is sent out substantially parallel to the main surface of the substrate. 2. The coating apparatus according to claim 1, wherein the upper airflow forming portion is formed on the upper side of the upper coating area in the main drawing direction by the air flow forming portion. 3. The coating device of claim 1, wherein: 97107798 27 1358329 ΙΑ 1 ' - - - - _ ^ daily repair (more) is replacing the page structure, the above-mentioned sub-scanning side is opposite to the above-mentioned airflow forming portion The relative position of the spout machine is fixed. 4. The coating device of claim </RTI> wherein the gas is air. 5. The coating apparatus according to claim 2, wherein the substrate holding portion has a substrate heating portion that heats the substrate. The coating device according to claim 1, wherein the fluid material comprises a pixel forming material for a flat display device. The coating device according to any one of items 1 to 6, wherein the body heats the gas which is heated by the gas from the discharge mechanism (4).