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TWI351066B - Method of forming a micromechanical device with microfluidic lubricant channel - Google Patents

Method of forming a micromechanical device with microfluidic lubricant channel

Info

Publication number
TWI351066B
TWI351066B TW096135957A TW96135957A TWI351066B TW I351066 B TWI351066 B TW I351066B TW 096135957 A TW096135957 A TW 096135957A TW 96135957 A TW96135957 A TW 96135957A TW I351066 B TWI351066 B TW I351066B
Authority
TW
Taiwan
Prior art keywords
microfluidic
forming
micromechanical device
lubricant channel
lubricant
Prior art date
Application number
TW096135957A
Other languages
Chinese (zh)
Other versions
TW200834757A (en
Inventor
Chen Dongmin
Spencer Worley William
Chen Hung-Nan
Original Assignee
Miradia Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Miradia Inc filed Critical Miradia Inc
Publication of TW200834757A publication Critical patent/TW200834757A/en
Application granted granted Critical
Publication of TWI351066B publication Critical patent/TWI351066B/en

Links

Classifications

    • H10W70/60—
TW096135957A 2006-09-27 2007-09-27 Method of forming a micromechanical device with microfluidic lubricant channel TWI351066B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US84783106P 2006-09-27 2006-09-27

Publications (2)

Publication Number Publication Date
TW200834757A TW200834757A (en) 2008-08-16
TWI351066B true TWI351066B (en) 2011-10-21

Family

ID=44819544

Family Applications (1)

Application Number Title Priority Date Filing Date
TW096135957A TWI351066B (en) 2006-09-27 2007-09-27 Method of forming a micromechanical device with microfluidic lubricant channel

Country Status (1)

Country Link
TW (1) TWI351066B (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9122047B2 (en) * 2012-12-31 2015-09-01 Pixtronix, Inc. Preventing glass particle injection during the oil fill process
DE102015224506A1 (en) * 2015-12-08 2017-06-08 Robert Bosch Gmbh Sensor element with laser activated getter material

Also Published As

Publication number Publication date
TW200834757A (en) 2008-08-16

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees