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TWI348398B - A spreading device and a method for cleaning a spreading device - Google Patents

A spreading device and a method for cleaning a spreading device

Info

Publication number
TWI348398B
TWI348398B TW097131004A TW97131004A TWI348398B TW I348398 B TWI348398 B TW I348398B TW 097131004 A TW097131004 A TW 097131004A TW 97131004 A TW97131004 A TW 97131004A TW I348398 B TWI348398 B TW I348398B
Authority
TW
Taiwan
Prior art keywords
spreading device
cleaning
spreading
Prior art date
Application number
TW097131004A
Other languages
Chinese (zh)
Other versions
TW200922697A (en
Inventor
Yoshiaki Masu
Akihiro Shimizu
Shigeru Kato
Original Assignee
Tokyo Ohka Kogyo Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Ohka Kogyo Co Ltd filed Critical Tokyo Ohka Kogyo Co Ltd
Publication of TW200922697A publication Critical patent/TW200922697A/en
Application granted granted Critical
Publication of TWI348398B publication Critical patent/TWI348398B/en

Links

Classifications

    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1303Apparatus specially adapted to the manufacture of LCDs
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05BSPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B15/00Details of spraying plant or spraying apparatus not otherwise provided for; Accessories
    • B05B15/50Arrangements for cleaning; Arrangements for preventing deposits, drying-out or blockage; Arrangements for detecting improper discharge caused by the presence of foreign matter
    • B05B15/55Arrangements for cleaning; Arrangements for preventing deposits, drying-out or blockage; Arrangements for detecting improper discharge caused by the presence of foreign matter using cleaning fluids
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05CAPPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C11/00Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05CAPPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C5/00Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
    • B05C5/02Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work
    • B05C5/0208Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work for applying liquid or other fluent material to separate articles
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05CAPPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C5/00Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
    • B05C5/02Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work
    • B05C5/0225Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work characterised by flow controlling means, e.g. valves, located proximate the outlet
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05DPROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D3/00Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials
    • B05D3/02Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials by baking
    • B05D3/0254After-treatment
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G51/00Conveying articles through pipes or tubes by fluid flow or pressure; Conveying articles over a flat surface, e.g. the base of a trough, by jets located in the surface
    • B65G51/02Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases
    • B65G51/03Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases over a flat surface or in troughs

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Nonlinear Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical & Material Sciences (AREA)
  • Mechanical Engineering (AREA)
  • Fluid Mechanics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Coating Apparatus (AREA)
  • Cleaning In General (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
TW097131004A 2007-09-06 2008-08-14 A spreading device and a method for cleaning a spreading device TWI348398B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007231534A JP5186161B2 (en) 2007-09-06 2007-09-06 Coating device and cleaning method for coating device

Publications (2)

Publication Number Publication Date
TW200922697A TW200922697A (en) 2009-06-01
TWI348398B true TWI348398B (en) 2011-09-11

Family

ID=40557111

Family Applications (1)

Application Number Title Priority Date Filing Date
TW097131004A TWI348398B (en) 2007-09-06 2008-08-14 A spreading device and a method for cleaning a spreading device

Country Status (3)

Country Link
JP (1) JP5186161B2 (en)
KR (1) KR101004983B1 (en)
TW (1) TWI348398B (en)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6321912B2 (en) * 2013-03-29 2018-05-09 芝浦メカトロニクス株式会社 Substrate cleaning processing apparatus and cleaning processing method
TW201509544A (en) * 2013-09-05 2015-03-16 Rich Chen Automatically Controlled Co Ltd Substrate coating device and coating method
JP6576146B2 (en) * 2015-07-31 2019-09-18 株式会社Screenホールディングス Coating apparatus and coating method
KR102140869B1 (en) * 2018-09-14 2020-08-03 양승현 PCB board conveying device
CN113426632A (en) * 2021-07-30 2021-09-24 深圳市飞创科技有限公司 Adhesive dispensing device for COB die bonding
CN114700226B (en) * 2022-04-14 2023-08-04 苏州希盟科技股份有限公司 Dispensing valve detection compensation system, dispensing machine and dispensing valve detection compensation method
CN120394254B (en) * 2025-07-04 2025-09-05 太仓展新胶粘材料股份有限公司 A spraying device for producing flexible cover plates

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0659921B2 (en) * 1990-03-05 1994-08-10 新明和工業株式会社 Method and apparatus for detecting the full amount of dust in a dust suction truck
JP3265237B2 (en) 1997-08-01 2002-03-11 東京エレクトロン株式会社 Substrate edge thin film removal equipment
JP3844670B2 (en) 2001-09-14 2006-11-15 東京エレクトロン株式会社 Coating film forming device
JP2004231331A (en) * 2003-01-29 2004-08-19 Dainippon Printing Co Ltd Substrate transfer method and substrate transfer device
JP4398786B2 (en) * 2003-07-23 2010-01-13 東京エレクトロン株式会社 Coating method and coating apparatus
JP4040025B2 (en) * 2004-02-20 2008-01-30 東京エレクトロン株式会社 Coating film forming device
JP4570545B2 (en) * 2005-09-22 2010-10-27 東京エレクトロン株式会社 Substrate processing apparatus and substrate processing method

Also Published As

Publication number Publication date
KR101004983B1 (en) 2011-01-04
JP5186161B2 (en) 2013-04-17
TW200922697A (en) 2009-06-01
JP2009062146A (en) 2009-03-26
KR20090026076A (en) 2009-03-11

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