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TWI368542B - Nozzle cleaning device and cleaning method - Google Patents

Nozzle cleaning device and cleaning method

Info

Publication number
TWI368542B
TWI368542B TW097130366A TW97130366A TWI368542B TW I368542 B TWI368542 B TW I368542B TW 097130366 A TW097130366 A TW 097130366A TW 97130366 A TW97130366 A TW 97130366A TW I368542 B TWI368542 B TW I368542B
Authority
TW
Taiwan
Prior art keywords
cleaning
nozzle
cleaning device
cleaning method
nozzle cleaning
Prior art date
Application number
TW097130366A
Other languages
Chinese (zh)
Other versions
TW200914155A (en
Inventor
Kangil Cho
Original Assignee
K C Tech Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by K C Tech Co Ltd filed Critical K C Tech Co Ltd
Publication of TW200914155A publication Critical patent/TW200914155A/en
Application granted granted Critical
Publication of TWI368542B publication Critical patent/TWI368542B/en

Links

Classifications

    • H10P72/0414—
    • H10P70/15—
TW097130366A 2007-08-10 2008-08-08 Nozzle cleaning device and cleaning method TWI368542B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020070080381A KR100893670B1 (en) 2007-08-10 2007-08-10 Nozzle cleaning device and cleaning method

Publications (2)

Publication Number Publication Date
TW200914155A TW200914155A (en) 2009-04-01
TWI368542B true TWI368542B (en) 2012-07-21

Family

ID=40388833

Family Applications (1)

Application Number Title Priority Date Filing Date
TW097130366A TWI368542B (en) 2007-08-10 2008-08-08 Nozzle cleaning device and cleaning method

Country Status (3)

Country Link
KR (1) KR100893670B1 (en)
CN (1) CN101362123B (en)
TW (1) TWI368542B (en)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN202087472U (en) * 2011-05-10 2011-12-28 深圳市华星光电技术有限公司 Cleaning device for spray nozzle of slit coating machine
JP2013094685A (en) * 2011-10-28 2013-05-20 Tokyo Electron Ltd Nozzle maintenance apparatus and coating treatment apparatus using the same
KR101578368B1 (en) * 2014-12-04 2015-12-18 주식회사 디엠에스 Apparatus for cleaning nozzle lip and Slit coater using the same
KR102324882B1 (en) * 2014-12-08 2021-11-12 주식회사 디엠에스 Unit for cleaning nozzle lip cleaner
US10086543B2 (en) * 2016-08-09 2018-10-02 Rohm And Haas Electronic Materials Cmp Holdings, Inc. Auto catch apparatus and method of use in making chemical mechanical polishing pads
CN106076744B (en) * 2016-08-26 2018-11-23 武汉华星光电技术有限公司 Light blockage coating equipment and coating apparatus nozzle
CN106733440B (en) * 2016-12-02 2019-06-07 信利（惠州）智能显示有限公司 A kind of gluing head cleaning device
CN106733463A (en) * 2016-12-29 2017-05-31 成都国珈星际固态锂电科技有限公司 Coating die head Wiping mechanism and coating machine and the method for wiping coating die head
JP6860414B2 (en) * 2017-05-11 2021-04-14 株式会社Ｓｃｒｅｅｎホールディングス Nozzle cleaning device, coating device and nozzle cleaning method
CN107413747A (en) * 2017-09-22 2017-12-01 武汉华星光电技术有限公司 A kind of cleaning device and clean method
CN107716170B (en) * 2017-11-29 2019-12-17 南通贝思特机械工程有限公司 A self-drying spraying device
CN110237971B (en) * 2019-05-31 2024-09-27 江苏嘉拓新能源智能装备股份有限公司 Online full-automatic cleaning device and method for slit extrusion type coating die head of lithium battery
CN113492080B (en) * 2020-04-01 2022-11-18 阳程科技股份有限公司 Coating machine capable of slowing down solvent backflow into coating head and soaking method

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4451175B2 (en) * 2004-03-19 2010-04-14 大日本スクリーン製造株式会社 Nozzle cleaning apparatus and substrate processing apparatus
JP4489480B2 (en) * 2004-03-25 2010-06-23 東京応化工業株式会社 Slit nozzle cleaning device
JP4792787B2 (en) * 2005-03-31 2011-10-12 凸版印刷株式会社 Coating device with cleaning device

Also Published As

Publication number Publication date
CN101362123B (en) 2011-10-12
TW200914155A (en) 2009-04-01
CN101362123A (en) 2009-02-11
KR100893670B1 (en) 2009-04-20

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