TWI341555B - Re-peelable pressure-sensitive adhesive sheet - Google Patents
Re-peelable pressure-sensitive adhesive sheetInfo
- Publication number
- TWI341555B TWI341555B TW093122889A TW93122889A TWI341555B TW I341555 B TWI341555 B TW I341555B TW 093122889 A TW093122889 A TW 093122889A TW 93122889 A TW93122889 A TW 93122889A TW I341555 B TWI341555 B TW I341555B
- Authority
- TW
- Taiwan
- Prior art keywords
- sensitive adhesive
- adhesive sheet
- peelable pressure
- peelable
- pressure
- Prior art date
Links
- 239000004820 Pressure-sensitive adhesive Substances 0.000 title 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
- C09J7/00—Adhesives in the form of films or foils
- C09J7/20—Adhesives in the form of films or foils characterised by their carriers
- C09J7/29—Laminated material
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
- C09J7/00—Adhesives in the form of films or foils
- C09J7/30—Adhesives in the form of films or foils characterised by the adhesive composition
- C09J7/38—Pressure-sensitive adhesives [PSA]
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
- C09J7/00—Adhesives in the form of films or foils
- C09J7/40—Adhesives in the form of films or foils characterised by release liners
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
- C09J2203/00—Applications of adhesives in processes or use of adhesives in the form of films or foils
- C09J2203/326—Applications of adhesives in processes or use of adhesives in the form of films or foils for bonding electronic components such as wafers, chips or semiconductors
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
- C09J2301/00—Additional features of adhesives in the form of films or foils
- C09J2301/10—Additional features of adhesives in the form of films or foils characterized by the structural features of the adhesive tape or sheet
- C09J2301/16—Additional features of adhesives in the form of films or foils characterized by the structural features of the adhesive tape or sheet by the structure of the carrier layer
- C09J2301/162—Additional features of adhesives in the form of films or foils characterized by the structural features of the adhesive tape or sheet by the structure of the carrier layer the carrier being a laminate constituted by plastic layers only
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T156/00—Adhesive bonding and miscellaneous chemical manufacture
- Y10T156/10—Methods of surface bonding and/or assembly therefor
- Y10T156/1052—Methods of surface bonding and/or assembly therefor with cutting, punching, tearing or severing
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/14—Layer or component removable to expose adhesive
- Y10T428/1471—Protective layer
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/14—Layer or component removable to expose adhesive
- Y10T428/1476—Release layer
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/28—Web or sheet containing structurally defined element or component and having an adhesive outermost layer
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/28—Web or sheet containing structurally defined element or component and having an adhesive outermost layer
- Y10T428/2848—Three or more layers
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Adhesive Tapes (AREA)
- Adhesives Or Adhesive Processes (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
- Dicing (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2003206670A JP4566527B2 (ja) | 2003-08-08 | 2003-08-08 | 再剥離型粘着シート |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW200511409A TW200511409A (en) | 2005-03-16 |
| TWI341555B true TWI341555B (en) | 2011-05-01 |
Family
ID=34113727
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW093122889A TWI341555B (en) | 2003-08-08 | 2004-07-30 | Re-peelable pressure-sensitive adhesive sheet |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US7514143B2 (zh) |
| JP (1) | JP4566527B2 (zh) |
| KR (1) | KR101109878B1 (zh) |
| CN (1) | CN100467561C (zh) |
| TW (1) | TWI341555B (zh) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI475090B (zh) * | 2011-12-26 | 2015-03-01 | 琳得科股份有限公司 | And a method for manufacturing a wafer and a wafer having a protective film forming layer |
| US9786541B2 (en) | 2011-09-30 | 2017-10-10 | Lintec Corporation | Dicing sheet with protective film forming layer and chip fabrication method |
Families Citing this family (71)
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|---|---|---|---|---|
| TWI293979B (en) * | 2003-03-17 | 2008-03-01 | Lintec Corp | Pressure-sensitive adhesive sheet for protecting surface and preparation thereof |
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| JP4568069B2 (ja) * | 2004-10-04 | 2010-10-27 | 出光ユニテック株式会社 | チャック及びチャック付き袋 |
| KR100670613B1 (ko) * | 2005-02-25 | 2007-01-17 | 에스케이씨 주식회사 | 광특성이 우수한 폴리에스터 필름 |
| WO2006104019A1 (en) | 2005-03-28 | 2006-10-05 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, manufacturing method thereof, and measuring method thereof |
| TW200706358A (en) * | 2005-05-10 | 2007-02-16 | Mitsubishi Plastics Inc | Laminated film for covering metal, laminated film for covering metal used for screen board |
| JP4800778B2 (ja) * | 2005-05-16 | 2011-10-26 | 日東電工株式会社 | ダイシング用粘着シート及びそれを用いた被加工物の加工方法 |
| KR100716304B1 (ko) * | 2005-06-30 | 2007-05-08 | 엘지.필립스 엘시디 주식회사 | 액정 표시 장치용 인쇄판 및 그의 제조 방법 |
| JP2007051271A (ja) * | 2005-07-21 | 2007-03-01 | Nitto Denko Corp | 粘着剤組成物、両面粘着テープ、接着方法及び携帯用電子機器 |
| JP4711777B2 (ja) * | 2005-08-11 | 2011-06-29 | 日東電工株式会社 | 粘着シートとその製造方法、及び、製品の加工方法 |
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| US20100297829A1 (en) * | 2006-07-05 | 2010-11-25 | The Arizona Board Of Regents, A Body Corporate Acting For And On Behalf Of Arizona State Unversit | Method of Temporarily Attaching a Rigid Carrier to a Substrate |
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| WO2008010547A1 (en) * | 2006-07-19 | 2008-01-24 | Sekisui Chemical Co., Ltd. | Dicing/die-bonding tape and method for manufacturing semiconductor chip |
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| KR101510719B1 (ko) * | 2013-05-29 | 2015-04-10 | (주)티엠에스 | 재접착성 다층 양면테이프 및 그의 제조방법 |
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| SG11201707829WA (en) * | 2015-03-24 | 2017-10-30 | Furukawa Electric Co Ltd | Semiconductor processing tape |
| JP7100957B2 (ja) * | 2015-12-15 | 2022-07-14 | 積水化学工業株式会社 | 半導体保護テープ |
| JP6301987B2 (ja) * | 2016-02-23 | 2018-03-28 | 古河電気工業株式会社 | ダイシング用粘着テープおよび半導体ウェハのフルカットダイシング方法 |
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| DE102018200957A1 (de) * | 2017-10-17 | 2019-04-18 | Tesa Se | Haftklebestreifen mit teilgeschäumter Selbstklebemasse |
| JP7010747B2 (ja) * | 2018-03-30 | 2022-01-26 | リンテック株式会社 | 半導体加工用シート |
| EP3887467A2 (en) | 2018-11-27 | 2021-10-06 | Avery Dennison Corporation | Multilayer tape constructions for low-temperature vibration damping with tunable adhesion |
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| JP7374039B2 (ja) * | 2020-03-30 | 2023-11-06 | 三井化学東セロ株式会社 | 電子装置の製造方法 |
| JP7509581B2 (ja) * | 2020-06-02 | 2024-07-02 | 日東電工株式会社 | 半導体加工用粘着シート |
| JP2023169771A (ja) * | 2022-05-17 | 2023-11-30 | 日東電工株式会社 | 半導体加工用粘着テープ |
| KR20250158994A (ko) * | 2023-02-28 | 2025-11-07 | 후루카와 덴키 고교 가부시키가이샤 | 반도체 가공용 테이프 |
Family Cites Families (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5538771A (en) * | 1991-06-28 | 1996-07-23 | Furukawa Electric Co., Ltd. | Semiconductor wafer-securing adhesive tape |
| JP3288476B2 (ja) | 1993-05-07 | 2002-06-04 | 日東電工株式会社 | 再剥離型粘着剤及びその粘着部材 |
| CN1137028C (zh) | 1998-11-20 | 2004-02-04 | 琳得科株式会社 | 压敏粘合片及其使用方法 |
| JP4828009B2 (ja) * | 1998-11-20 | 2011-11-30 | リンテック株式会社 | 粘着シートおよびその使用方法 |
| JP5201768B2 (ja) | 1999-06-14 | 2013-06-05 | 日東電工株式会社 | 再剥離型粘着剤及び再剥離型粘着シート |
| JP3340979B2 (ja) * | 1999-09-06 | 2002-11-05 | 日東電工株式会社 | ダイシング用粘着シート |
| JP4947564B2 (ja) * | 2000-01-21 | 2012-06-06 | 日東電工株式会社 | 半導体ウエハ加工用粘着シート |
| JP4651799B2 (ja) * | 2000-10-18 | 2011-03-16 | 日東電工株式会社 | エネルギー線硬化型熱剥離性粘着シート、及びこれを用いた切断片の製造方法 |
| JP4703833B2 (ja) * | 2000-10-18 | 2011-06-15 | 日東電工株式会社 | エネルギー線硬化型熱剥離性粘着シート、及びこれを用いた切断片の製造方法 |
| JP2002141309A (ja) | 2000-11-02 | 2002-05-17 | Lintec Corp | ダイシングシートおよびその使用方法 |
| JP3594581B2 (ja) | 2000-12-12 | 2004-12-02 | 三井化学株式会社 | 半導体ウェハ保護方法及び該保護方法に用いる半導体ウェハ表面保護用粘着フィルム |
| JP2003007646A (ja) * | 2001-06-18 | 2003-01-10 | Nitto Denko Corp | ダイシング用粘着シートおよび切断片の製造方法 |
| US20030064579A1 (en) | 2001-09-27 | 2003-04-03 | Masafumi Miyakawa | Surface protecting adhesive film for semiconductor wafer and protecting method for semiconductor wafer using said adhesive film |
| JP4257061B2 (ja) * | 2002-01-22 | 2009-04-22 | 三井化学株式会社 | 半導体ウェハ表面保護用粘着フィルム及び該粘着フィルムを用いる半導体ウェハの保護方法 |
| KR101016081B1 (ko) * | 2002-07-26 | 2011-02-17 | 닛토덴코 가부시키가이샤 | 점착 시트와 그의 제조방법, 상기 점착 시트의 사용방법,및 상기 점착 시트에 사용되는 다층 시트와 그의 제조방법 |
-
2003
- 2003-08-08 JP JP2003206670A patent/JP4566527B2/ja not_active Expired - Fee Related
-
2004
- 2004-07-30 TW TW093122889A patent/TWI341555B/zh not_active IP Right Cessation
- 2004-08-05 KR KR1020040061746A patent/KR101109878B1/ko not_active Expired - Fee Related
- 2004-08-05 US US10/912,615 patent/US7514143B2/en not_active Expired - Fee Related
- 2004-08-09 CN CNB2004100564566A patent/CN100467561C/zh not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9786541B2 (en) | 2011-09-30 | 2017-10-10 | Lintec Corporation | Dicing sheet with protective film forming layer and chip fabrication method |
| TWI475090B (zh) * | 2011-12-26 | 2015-03-01 | 琳得科股份有限公司 | And a method for manufacturing a wafer and a wafer having a protective film forming layer |
Also Published As
| Publication number | Publication date |
|---|---|
| CN1580168A (zh) | 2005-02-16 |
| KR20050016168A (ko) | 2005-02-21 |
| JP2005053998A (ja) | 2005-03-03 |
| JP4566527B2 (ja) | 2010-10-20 |
| TW200511409A (en) | 2005-03-16 |
| KR101109878B1 (ko) | 2012-02-15 |
| CN100467561C (zh) | 2009-03-11 |
| US7514143B2 (en) | 2009-04-07 |
| US20050031861A1 (en) | 2005-02-10 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| MM4A | Annulment or lapse of patent due to non-payment of fees |