1228383 玫、發明說明： 【發明所屬之技術領域】 本發明是有關於一種發光裝置的製造方法，特別是指 一種有機電激發光裝置的製造方法。 【先前技術】 如圖1所示，一般有機電激發光裝置的製造過程，大 致如下： 一、 先在一由玻璃或透明材質製成的基板Η上濺錢被 覆層透明之導電材料’並經由黃光製程與钱刻等技術將鲁 10 15 不必之部份去除，而餘留複數縱向間隔排列被覆在該基板 11頂面的條狀陽極12。 、接者配a汽光製程與姓刻技術，在兩兩相鄰陽極 12間自被覆上一條狀之絕緣區塊15，並讓每一絕緣區塊η 兩側邊緣部分重疊於所對應兩相鄰陽極12頂面。 二、 以物理蒸錢方式’在每一陽極12頂面間隔被覆複 數長方片狀之有機發光體13。 .四、在各列橫向排列之發光體13 了頁面皆被覆—條狀陰# 20 别述該等陽極 (Indium Tin Oxide， 鋁膜（A1)。 12通常是採用透明電極，例#氧化銦锡 縮略1TO)，而該等陰極14通常為金屬 刖述在兩兩相鄰陽極12 栘P給γK 破後條狀之絕緣區塊15，並 使、%緣區塊15兩側邊緣部分 並 主要是為避免該等陽極 ；广極12頂面的作用， 過程所產生的金屬殘留缺陷 5 1228383 與發先體13表面㈣過程❹之遮罩（圖未示）所存在的對 心差，以及遮罩製造時的誤差等因素，造成蒸鍵在該等 ==3頂面上的陰極14與下方之陽極12出現短路現象 5 10 15 ，¥致有機電激發光裝置的不良率提高。 雖然此方法可有效避免因蒸鑛製程使用之遮單的事造 誤差或基板U與鮮㈣位精準度_素，所造成有機電 激發光裝置的製造良率降低的問題，但因纽極121228383 Description of the invention: [Technical field to which the invention belongs] The present invention relates to a method for manufacturing a light-emitting device, and more particularly to a method for manufacturing an organic electro-optical device. [Previous technology] As shown in FIG. 1, the manufacturing process of a general organic electroluminescent device is roughly as follows: First, a transparent conductive material is sputtered on a substrate Η made of glass or a transparent material and passed through Techniques such as the yellow light process and money carving remove unnecessary portions of Lu 10 15, and a plurality of strip-shaped anodes 12 coated on the top surface of the substrate 11 are arranged at a plurality of longitudinal intervals. 1. The receiver is equipped with a steam-light process and surname engraving technology. A strip of insulating blocks 15 is self-coated between two adjacent anodes 12 and the edges of each side of each insulating block η overlap with the corresponding two phases. Adjacent to the anode 12 top surface. Second, a plurality of rectangular organic light-emitting bodies 13 are covered on the top surface of each anode 12 in a physical steaming manner '. Fourth, the luminous bodies arranged laterally in each column 13 are covered by the page-strip-shaped cathode # 20 In addition to these anodes (Indium Tin Oxide, aluminum film (A1). 12 is usually a transparent electrode, such as # indium tin oxide 1TO), and these cathodes 14 are usually metal, described in two adjacent anodes 12 栘 P to γK broken strip-shaped insulating blocks 15, and the edge parts of both sides of It is to avoid such anodes; the role of the top surface of Guangji 12, the residual metal defects 5 1228383 generated during the process and the mask (not shown) on the surface of the precursor 13 (not shown), the misalignment, and the shielding Factors such as errors in the manufacture of the cover cause the short circuit phenomenon between the cathode 14 on the top surface of the steam bond and the anode 12 below the 5 = 15, which increases the failure rate of the organic electroluminescent device. Although this method can effectively avoid the problem of the manufacturing yield of organic electroluminescent devices caused by the error of the cover sheet used in the steaming process or the accuracy of the substrate U and the freshness position, the Inductive 12
頂面被《之各絕緣區塊15遮蔽，使得各發光體13盘: 對應之陽極12的接觸面積縮減，造成開孔率下降，同時導( 致相鄰發光體15之有效發光區域間的間距變大，進而〕 該有機電激發光裝置的整體解析度相對下降。 < 【發明内容】 因此，本發明之目的，《名 即在楗供一種可以提高開孔率 舁解析度的有機電激發光裝置製造方法。 於是’本發明有機電激發光裝置之製造方法包含： 在-基板頂面被覆複數間隔之陽極。⑻在 極頂面被覆-絕緣層。（C)磨除位於該等陽極頂面之 ，使該絕緣層覆蓋於該等陽極之側面及該基板頂面。（D): Γ陽極頂面被覆—發光體。及⑻在每—發光體頂面被 :-陰極。此製造方法使每—發光體可與所對應陽極頂面完 全接觸，而提南開孔率及解析度。 【實施方式】 有關本發明之前述及其他技術内容、特點與功效 以下配合參考圖式之-較佳實施例的詳細說明中，將可清 20 1228383 楚的明白。 本I明有機電激發光裝置之製造方法的較佳實施 下： ' 美（A)濺鍍（sputter)陽極：如圖2所示，在一透明玻璃 土板2頂面被覆複數縱向間隔平行排列之長條狀透明陽極3 被覆絕緣材料：如圖3所示，利用表面錢膜以絕 、'、、材料在.亥等陽極3頂面與該基板2裸露之頂面，被覆形 10 15 、€厚度均勻的絕緣層4。在本實施例中該絕緣層4所使 用/絕緣材料可為_、Si3N4、pGly imide或pQlymer。該 巴緣層4之被覆方式在實施時不以表面鍍膜為限，例如亦 可採用塗佈方式。 (C)磨除絕緣層之局部區域：湘化學機械研磨技術（ C— Machine Polishing，縮略為cMp)，將覆蓋於該等 陽極3頂面之絕緣層4完全去除，形成如圖4所示狀態， 保留絕緣層4中多數S，丨| ^ β 後1於各陽極3兩側面之側面部 41 ’及多數覆蓋於該基板2 τ頁面並連接於兩兩相鄰側面部 41間之頂面部42，使得各陽極3頂面可完全裸露。經由步 驟⑻、（C)的實施結果，如同使絕緣層4所餘留下來之側面 部41與頂面部42提供的絕緣作用，獲得自動對準的效果 ，精由此一自動對準效果使各陽極3與基板2所欲絕緣的 部位精準地被絕緣材料覆蓋，完全不會發生偏移。 (D)蒸鍍發光體：如圖5所V，以遮Vw 則sk，圖未不）及蒸鍍方式在每—陽極3頂面被覆複數間 20 1228383 隔排列之長方片狀有機發光體5，並使全部發光體5的排列 方式呈一矩陣型態。又設計上，更使每一發光體5左右側 突伸出所對應陽極3頂面而略微重疊於該陽極3兩側之絕 緣層4的側面部41頂面上，此重疊比例可預先設計為相當 於遮罩對位誤差率與遮罩製造時之誤差率絕對值的和，以 ί保母务光體5的左右側在遮罩造成之誤差範圍内都能 夠元王覆蓋住所在位置之陽極3頂面的左右邊緣。 (Ε)被覆陰極：如圖6所示，最後再配合遮罩與表面 ίο 15 鍍膜，以鋁膜製作出複數橫向間隔排列之長條狀陰極6，使 母陰極6跨越各陽極3上同列橫向對應之發光體5。 依據本實施例上述製造步驟所製成之有機電機發光裝 置具有以下之優點： 、 Ο)透過步驟（C)對絕緣層4的研磨製程，使每一陽極 3頂面可S全裸露出’而以全部寬度供其相對應之各發光體 5完全接觸，且絕緣層4之側面部41與頂面部仏仍保有所 需的絕緣功能，因此本實施狀各發光體5的開 顯提升。 ⑺每-發光體5之邊緣略重疊於所對應陽極3之免 緣層4的側面部41頂面，使其在考慮遮罩誤差率之因素下 ，仍能確保每一陽極3盥陰極 破所對應發光體5完全隔 離，也就疋能確保陰極6不會鱼 之製造良率。 不…㈣3短路，而確保甚佳 ⑺本實施例中由於每一陽極3頂面是 露而供發光體5完全接觸1此相鄰發光體5之有效^光 20 1228383 區域間的距離，便明顯比前述習知製造方法的距離縮小， 2實施例所製成之有機電激發光裝置的整體解析度相對 提咼。 歸納上述，本發明有機電激發光製置之製造方法，除 了可避免陽極3姓刻過程所產生之缺陷及遮罩對位、製造 的誤差對製程良率的影響，更可提高各發光體5的開5 ，並使所製成之有機電激發光裝置的解析度相對提高，故 確實能達到本發明之目的。 ίο 惟以上所述者，僅為本發明之一較佳實施例而已，當 不能以此限定本發明實施之範圍，即大凡依本發明申請: 利範圍及發明說明書内容所作之簡單的等效變化與修飾， 皆應仍屬本發明專利涵蓋之範圍内。 【圖式簡單說明】 15 圖1是一種習知製造方法所製成之有機電激發光裝置 的正視剖面示意圖； 圖2是一正視剖面示意圖，說明本發明有機電激發光 裝置之製造方法的較佳實施例在步驟（A)的情況； 圖3是類似圖2的視圖，說明該較佳實_在㈣⑻ 的情況； 圖4是類似圖3的視圖，說明該較 的情況； “爛在步驟(c) 圖5是類似圖4的視圖說明該較祛每 1土具靶例在步驟（D)的 情況；及 圖6是類似圖5的視圖，說明該康 _ 佳貫施例在步驟（E) 20 1228383 的情況。The top surface is shielded by each of the insulating blocks 15 so that each luminous body 13 plate: the contact area of the corresponding anode 12 is reduced, which results in a reduction in the porosity and at the same time (causes the distance between the effective luminous areas of adjacent luminous bodies 15) Becomes larger, and further] the overall resolution of the organic electro-optical excitation device is relatively decreased. [Summary of the Invention] Therefore, the purpose of the present invention is to provide an organic electro-excitation which can improve the aperture ratio and resolution. A method for manufacturing an optical device. Thus, a method for manufacturing an organic electro-optical device according to the present invention includes: coating a plurality of anodes on a substrate top surface; coating the insulating layer on the electrode top surface; (C) grinding away the top surfaces of the anodes That is, the insulating layer is covered on the sides of the anodes and the top surface of the substrate. (D): The top surface of the anode is covered with illuminants; and the top surface of each illuminant is covered with: -cathode. This manufacturing method makes Each-the luminous body can be completely in contact with the corresponding anode top surface, and the opening rate and resolution of the south are improved. [Embodiment] The foregoing and other technical contents, features, and effects of the present invention are described below with reference to the drawings. In the detailed description of the embodiment, it will be clear from 20 1228383. The following is a preferred implementation of the method for manufacturing an organic electro-optical excitation device: '' US (A) sputtering anode: as shown in FIG. 2 A transparent glass soil plate 2 is covered with a plurality of strip-shaped transparent anodes 3 which are arranged in parallel at a longitudinal interval in parallel and covered with an insulating material: as shown in FIG. The top surface and the exposed top surface of the substrate 2 are covered with an insulating layer 4 having a uniform thickness of 10 15 and €. In this embodiment, the insulating layer 4 can be made of _, Si3N4, pGly imide, or pQlymer. The The coating method of the rim layer 4 is not limited to the surface coating during the implementation, and for example, a coating method can also be used. (C) Abrasion of a part of the insulating layer: C-Machine Polishing Technology (abbreviated to cMp) ), The insulating layer 4 covering the top surfaces of the anodes 3 is completely removed to form a state shown in FIG. 4, and most of the S in the insulating layer 4 is retained, and the side portions 41 on both sides of each anode 3 are retained. 'And most cover 2 τ pages on this substrate and are connected to each other The top surface portion 42 between the adjacent side surface portions 41 allows the top surfaces of the anodes 3 to be completely exposed. The implementation results of steps (i) and (C) are as if the side surface portions 41 and the top surface portion 42 left by the insulating layer 4 are provided. Insulation effect, the effect of automatic alignment is obtained, and this automatic alignment effect enables each anode 3 and the substrate 2 to be accurately covered by the insulating material without any deviation. (D) Evaporation light Body: as shown in Figure 5, V, covering the Vw with sk, not shown in the figure) and evaporation method, covering the top surface of each anode 3 with a plurality of rectangular plate-shaped organic light-emitting bodies 5 arranged in an interval of 20 1228383, and making all light The arrangement of the bodies 5 is a matrix type. In terms of design, the left and right sides of each light-emitting body 5 protrude from the top surface of the corresponding anode 3 and slightly overlap the top surface of the side portion 41 of the insulating layer 4 on both sides of the anode 3. This overlap ratio can be designed in advance to be equivalent. Based on the sum of the mask registration error rate and the absolute value of the error rate during the manufacture of the mask, the right and left sides of the maternity light body 5 can cover the anode 3 at the position within the error range caused by the mask. The left and right edges of the face. (E) Covered cathode: As shown in FIG. 6, finally, the mask and the surface are coated with 15 coatings, and aluminum cathodes are used to make a plurality of strip-shaped cathodes 6 arranged laterally at intervals, so that the mother cathode 6 spans the same row across each anode 3 Corresponding light-emitting body 5. The organic motor light-emitting device manufactured according to the above manufacturing steps of this embodiment has the following advantages: (1) Through the grinding process of the insulating layer 4 through the step (C), the top surface of each anode 3 can be fully exposed ' The entire width is such that the corresponding illuminants 5 are completely in contact with each other, and the side surface portion 41 and the top surface portion of the insulating layer 4 still maintain the required insulation function. Therefore, the development of each illuminant 5 in this embodiment is improved. ⑺The edge of each-luminous body 5 slightly overlaps the top surface of the side portion 41 of the edge-free layer 4 of the corresponding anode 3, so that it can still ensure that the anode and cathode of each anode 3 are broken, taking into account the mask error rate. The corresponding light-emitting body 5 is completely isolated, so that the cathode 6 can not ensure the production yield of fish. No ... ㈣3 is short-circuited, but it is very good. In this embodiment, because the top surface of each anode 3 is exposed, the luminous body 5 is completely in contact with the adjacent luminous body 5 effectively. The distance between the regions of light 20 1228383 is obvious. Compared with the conventional manufacturing method, the distance is reduced, and the overall resolution of the organic electroluminescent device manufactured in the second embodiment is relatively improved. To sum up, the manufacturing method of the organic electro-excitation light manufacturing method of the present invention can avoid the defects of the anode 3 last engraving process and the effects of mask alignment and manufacturing errors on the yield of the process, and can also improve the luminous body 5 Since the resolution of the organic electroluminescent device is relatively improved, the purpose of the present invention can be certainly achieved. ίο However, the above is only one preferred embodiment of the present invention. When the scope of implementation of the present invention cannot be limited by this, that is, a simple equivalent change made according to the scope of the invention and the content of the invention specification And modifications should still fall within the scope of the invention patent. [Brief description of the drawings] 15 FIG. 1 is a schematic front sectional view of an organic electroluminescent device made by a conventional manufacturing method; FIG. 2 is a schematic front sectional view illustrating a comparative method of manufacturing the organic electroluminescent device according to the present invention. The situation of the preferred embodiment in step (A); FIG. 3 is a view similar to FIG. 2 illustrating the case of the preferred embodiment; FIG. 4 is a view similar to FIG. 3 illustrating the comparison case; (c) FIG. 5 is a view similar to FIG. 4 illustrating the situation of the target example in step (D); and FIG. 6 is a view similar to FIG. 5 illustrating the Kang_Jiaguan embodiment at step ( E) 20 1228383.
10 1228383 【圖式之主要元件代表符號說明】 2 ♦………基板 42 * 3 *…陽極 5… 4…”…μ絕緣層 6…* 41 *…μ"側面部 …頂面部 …發光體 …陰極 1110 1228383 [Description of the main symbols of the drawings] 2 ♦ ……… Substrate 42 * 3 *… Anode 5… 4… ”… μ Insulating layer 6… * 41 *… μ " Side surface… Top surface… Luminous body… Cathode 11