1224074 玖、發明說明 【發明所屬之技術領域】 本發明係關於在跨過複數個樓面而構成製造線的製造 工廠中，進行半製品的樓面內/樓面間搬送的搬送系統，尤 其是關於具備進行樓面間搬送的升降機、進行樓面內搬送 的搬送車及對於升降機作裝載/卸載用的中轉堆料機的搬 送系統之控制裝置。 【先前技術】 在半導體製造線或電子印刷電路板製造線內，有著搬送 屬半製品之半導體晶圓或印刷板的各式各樣的系統。此種 形態的製造線亦有構成爲跨過複數個樓面的情況。在如此 之情況下，屬於垂直方向的樓面間搬送及屬於水平方向的 樓面內搬送係混合存在。 曰本特開平1 1 -67 870號公報中，揭示有包含緩衝堆料 機、環形搬送線、升降機及移載機之半導體晶圓搬送裝置。 該文獻所揭示之半導體晶圓搬送裝置，係由設置著半導體 製造裝置的無塵室；提供用途予半導體製造裝置用的設置 於無塵室地板上，用以暫時保管半導體晶圓的堆料機；設 置於無塵室天花板部，並在堆料機間搬送半導體晶圓的環 形搬送線；在環形搬送線間移載半導體晶圓用的移載裝 置；在設置於樓面間的堆料機之間搬送半導體晶圓的升降 機；及在每一半導體處理步驟保管由半導體裝置的處理能 力所決定的最小單位的半導體晶圓的小型堆料機所構成。 該小型堆料機保管從藉由全半導體處理步驟所需要的生產 5 312/發明說明書(補件)/92-06/92107867 1224074 期間與每曰的對於半導體生產線的投 成品數減去小型堆料機的全保管數的 根據曰本特開平i丨_ 6 7 8 7 〇號公報月 搬送裝置，使用環形搬送線、移載裝 體處理步驟所必需的半導體晶圓數， 上的緩衝堆料機供給設於無麈室內每 小型堆料機。完成半導體處理的半導 相反的操作步驟從小型堆料機存放於 藉由將設於無塵室內的堆料機的設置 半導體裝置的台數，即可獲得半導體 升。 曰本特開平7-3 09407號公報揭示窄 刷電路板的料盤堆料機。其所揭示之 部保持著複數片電子印刷電路板的料 狀移動料盤的傳輸帶，且於其兩端部 的一端向著另一端升降的升降部的循 於傳輸帶的中間，在與隨著傳輸帶的 的方向使料盤分歧的分歧移載部；從 接受:料盤，而相對於隨著傳輸帶的料 動的前後移載部；相對於隨著傳輸帶 行移動的載置移載部所構成的工作台 的電梯；將電梯立設於台座上的升降 降移載部的台座上，面向著工作台的 藉由工作台的載置移載機而移載料盤 312/發明說明書(補件)/92-06/92107867 放量所決定的生產半 半導體晶圓數。 〒揭示之半導體晶圓 置及升降機，將半導 從設置於無塵室地板 一半導體處理步驟的 體晶圓，以與供給時 緩衝堆料機。據此， 面積設爲最小以增加 生產線的生產性的提 『存放複數片電子印 料盤堆料機具備：內 盤；上下持有以直線 具有將料盤從傳輸帶 環式料盤堆料機；設 料盤的移動方向垂直 傳輸帶的分歧移載部 盤的移動方向垂直移 的料盤的移動方向平 ;使工作台上下移動 移載部；及乘載於升 移動範圍而配置，且 並予以收存的齒條箱 6 1224074 櫃部。 根據日本特開平7 - 3 0 9 4 0 7號公報所揭示的料盤堆料 機，藉由於一直線狀存放料盤的傳輸帶上設置分歧移載 部，設置前後左右移動乘載料盤的工作台的前後移載部、 載置移載部、由上下移動的電梯組成的升降移載部及收存 料盤的齒條箱櫃部，在與傳輸帶垂直的方向使料盤滯留， 可增加料盤堆料機的料盤滯留量。也就是說，利用從傳輸 帶的一方向上使料盤的流動分歧，且使料盤在垂直於傳輸 帶‘且高度方向上滯留，即可增加料盤堆料機的料盤滯留 量。藉此，可縮小各步驟間的能力差。 【發明內容】 (發明所欲解決之問題） 但是’若根據上述日本特開平11-67870號公報所揭示之 半導體晶圓搬送裝置’係爲將設於無塵室內的堆料機的設 置面積最小化以增加半導體製造裝置的台數者，而並不是 對應於製造步驟內的搬送負載，使構成堆料機、環形搬送 線、移載裝置、升降機及小型堆料機等搬送裝置的各裝置 有效運作者。若根據上述日本特開平7 - 3 0 9 4 0 7號公報所揭 示的料盤堆料機，則係爲省空間且不需要多餘的設備費用 者’而並不是對應於製造步驟內的搬送負載，使料盤堆料 機有效運作者。 也就是說，上述日本特開平11-67870號公報及特開平 7-3 09407號公報，並非爲在跨過複數個樓面所構成的製造 線上，實現屬於垂直方向的樓面間搬送及屬於水平方向的 7 312/發明說明書(補件)/92-〇6/921 〇7867 1224074 樓面內搬送混合存在的情況之有效率的設備運用。 本發明正是用於解決上述問題而提出的發明，其提供一 控制裝置，可效率良好地運用包括進行複數個樓面間搬送 的升降機、進行設於各樓面的樓面內搬送的搬送車及對於 設於各樓面的升降機作裝載/卸載用的中轉堆料機的搬送 系統。 (解決問題之手段） 本發明之搬送控制裝置，係控制分散於複數個樓面的製 造步驟的搬送系統。該搬送系統包括：進行複數個樓面間搬 送的複數台升降機、設於各樓面進行樓面內搬送的複數台 搬送車及設於各樓面而對於升降機作裝載/卸載用的複數 台中轉堆料機。搬送控制裝置包括：計算製造步驟之搬送 對象物的量用的計算機構；及根據計算出的搬送對象物的 量，用以決定在複數個升降機中使用的升降機的決定機構。 又，本發明之搬送控制裝置亦可包括··計算製造步驟之 搬送對象物的量用的計算機構；及根據計算出的搬送對象 物的量，用以決定在複數個中轉堆料機中使用的中轉堆料 機的決定機構。 【實施方式】 以下’參照圖式說明本發明之實施形態。以下之說明 中，對於相同的構件則賦予相同的元件符號。此等名稱及 其功能也相同。因此也並不重複此等的詳細說明。 (第1實施形態） 參照圖1及圖2，說明本實施形態之搬送裝置控制之搬 8 312/發明說明書(補件)/92-06/92107867 1224074 送系統的全體構成。該搬送系統係被使 製造工廠中。在半導體製品之製造工廠 置數個小室（以下，稱爲隔間）。於各隔^ 台的處理裝置。爲了進行各隔間之間的 OHS(Over Head Shuttle，頂式接駁機）。 樓面間的無塵室以進行樓面間搬送，備 料機。 如圖1及圖2所示，以下之說明中係 構成的半導體製造步驟進行說明。如圖 樓設有OHS之搬送軌100、102、200、 還設置著進行1樓與2樓之樓面間搬送 進行1樓、2樓與3樓間之搬送的升降機 在升降機1 000的附近，於1樓設置著 於2樓設置著中轉堆料機2 3 0。在升降榜 1樓設置著中轉堆料機1 3 2，於2樓設置 2 3 2，於3樓設置著中轉堆料機3 3 〇。在 近，於1樓設置著中轉堆料機1 3 4，於： 料機2 3 4，於3樓設置著中轉堆料機3 3 : 的附近，於1樓設置著中轉堆料機i 3 6 轉堆料機2 3 6，於3樓設置著中轉堆料機 料機係爲了各自的升降機與〇 H S的移載 OHS 之行走軌 1〇〇、102、200、202、 於各個隔間的各個堆料機1 1 〇〜i 24、2 i 連接於中轉堆料機1 3 0〜1 3 6、2 3 0〜2 3 6 312/發明說明書(補件)/92-06/92107867 用在半導體製品之 中，於無塵室內設 圍分別配置著複數 搬送，備有 此外，爲了連接各 有升降機與中轉堆 針對跨設3樓層而 1及圖2所示，各 202 、 300 、 302 ° 的升降機1000 ;及 2000、3 000、4000° :中轉堆料機1 3 0， | 2 0 0 0的附近，於 ΐ著中轉堆料機 升降機3 000的附 2樓設置著中轉堆 2。在升降機4 0 0 0 ，於2樓設置著中 丨3 3 4。各個中轉堆 而設置。 3 00、3 02，係從設 0〜224、310〜322 、3 3 0〜3 3 4 °半導 9 1224074 體晶圓係當複數片被收納於1個閘盒而由設於隔間的處理 裝置完成前步驟時，被收納於設於該隔間的堆料機。所收 納之閘盒，係從堆料機藉由OHS軌上的台車被自堆料機搬 送至中轉堆料機上。從中轉堆料機透過樓面間搬送用升降 機’被搬送至同一升降機之其他樓的中轉堆料機上。藉由 OHS台車從中轉堆料機搬送至設於無塵室的各隔間的堆料 機上。藉由反覆此步驟，即可將收納於閘盒的半導體晶圓， 從各樓面間的隔間搬送至其他樓面間的隔間。 若以實際動作例表示，在從1樓的無塵室內的堆料機1 i 6 將閘盒搬送至3樓的無塵室內的堆料機3 1 2的情況下，藉 由設於1樓的OHS搬送軌100的OHS台車將閘盒從堆料 機1 1 6搬送到中轉堆料機1 3 6。從中轉堆料機1 3 6藉由樓 面間搬送升降機4 0 0 0，搬送至3樓的無塵室內的升降機 4〇〇〇的中轉堆料機334。藉由3樓的OHS台車從3樓的中 轉堆料機3 3 4搬送至設於搬送目的地的隔間之堆料機3丨2。 進行如此動作，1樓與2樓、2樓與3樓、1樓與3樓間 的搬送，也同樣藉由各個樓面內的OHS台車、中轉堆料機 及樓面間搬送升降機來執行半導體晶圓的搬送。 參照圖3，說明本實施形態之搬送系統的控制裝置的全 體構成圖。圖3所示主機電腦5 000係本實施形態之搬送控 制裝置。主機電腦5 000連接於各樓每一樓的OHS控制器 5 100及升降機控制器5 200，中轉堆料機控制器5 3 00及堆 料機控制器5 400。 OHS控制器5100於各樓每一樓控制OHS台車5110。升 10 312/發明說明書(補件)/92-06/92107867 1224074 降機控制器5 20 0分別控制升降機1 000、2000、3 000、4000。 又’在此，將此等升降機統一標示爲升降機5 2 1 〇。 中轉堆料機控制器5 3 00控制中轉堆料機13〇〜136、23() 〜2 3 6、3 3 0〜3 3 4。又，在此’將中轉堆料機統一標示爲中 轉堆料機5 3 1 0。 堆料機控制器5 400控制設於各個隔間的堆料機110〜 1 2 4、2 1 〇〜2 2 4、3 1 0〜3 2 2。又，在此，將堆料機統一標示 爲堆料機5 4 1 0。 如圖3所示，主機電腦5 000，連接於OHS控制器5100、 升降機控制器5 2 0 0、中轉堆料機控制器5 3 0 0及堆料機控 制器5 400，可收集於OHS台車5110的搬送實績、於升降 機5 2 1 〇的搬送實績、中轉堆料機5 3 1 0的工作比率及堆料 機5 4 1 0的工作比率。此外，於主機電腦5 0 0 0輸入該半導 體製造步驟之半導體晶圓的投放量及在半成品加工量。 參照圖4，說明由屬本實施形態之搬送控制裝置之主機 電腦5 000所執行的程式的控制構造。 在步驟（以下將步驟簡稱爲S) 100，主機電腦5 000計算 出製造步驟內的搬送負載。此時，主機電腦5 000基於製造 步驟內的半導體晶圓的半成品加工量、將平均加工日數乘 上半導體晶圓的投放量所得數値、OH S台車5 1 1 0的搬送 實績數、升降機5 2 1 0的搬送實績數、中轉堆料機5 3 1 0的 工作比率、Ο H S台車5 4 1 0的工作台數、升降機5 2 1 0的工 作台數及中轉堆料機5 3 1 0的工作台數等，計算出與搬送對 象物的量關聯性深的製造步驟內的搬送負載。 11 312/發明說明書(補件)/92-06/92107867 在S 102，主機電腦5 000判斷所計算的搬送負載是否較 負載臨限値（1 )小。在搬送負載較負載臨限値（1)小的情況 下（在S102爲YES)，則處理移向S104。反之（在S102爲 NO)則結束該處理。 在S 104，主機電腦5 000判斷所計算的搬送負載是否較 負載臨限値（2)大。在搬送負載較負載臨限値（2)大的情況 下（在S104爲YES)，則處理移向S106。反之（在S104爲 NO)則處理移向S108。又，負載臨限値（2)較負載臨限値（1) 小0 在S 106，主機電腦5000使1台升降機及1台中轉堆料 機停止工作。此後處理結束。 在S 108，主機電腦5 0 00判斷搬送負載是否較負載臨限 値（3)大。在搬送負載較負載臨限値（3)大的情況下（在S 108 爲YES)，則處理移向SU0。反之（在S108爲NO)則處理 移向S1 12。又，負載臨限値（3)較負載臨限値（2)小。 在S1 10，主機電腦5 000使2台升降機及2台中轉堆料 機停止工作。此後處理結束。 在S1 12，主機電腦5 0 00判斷搬送負載是否較負載臨限 値（4)大。在搬送負載較負載臨限値（4)大的情況下（在S 112 爲Y E S )，則處理移向S 1 1 4。反之（在S 1 1 2爲Ν Ο)則處理移 向S1 16。又，負載臨限値（4)較負載臨限値（3)小。 在S 11 4，主機電腦5 〇 〇 〇使3台升降機及3台中轉堆料 機停止工作。此後處理結束。 在S1 16，主機電腦5〇〇〇使4台升降機及4台中轉堆料 12 312/發明說明書(補件)/92-06/92107867 1224074 機停止工作。 基於如上的構成及流程，說明屬本實施形態之搬送控制 裝置之主機電腦5 000的動作。 主機電腦5 0 0 0從Ο H S台車5 1 1 0取得工作中的Ο H S的 台數及OHS台車51 10的搬送實績。主機電腦5 000從升降 機控制器5 2 0 0取得工作中的升降機5 2 1 0的台數及升降機 52 10的搬送實績。主機電腦5 0 00從中轉堆料機控制器5 3 0 0 取得工作中的中轉堆料機5 3 1 0的台數及中轉堆料機5 3 1 0 的工作比率。主機電腦5 000取得投入該半導體製造步驟的 投放量及半成品加工量。 主機電腦5 000係基於所取得的各種資訊計算出製造步 驟內的搬送負載（S 100)。在搬送負載較負載臨限値（1)小的 情況下（在S 102爲YES)，判斷搬送負載是否較負載臨限値 (2)大。在搬送負載較負載臨限値（1)小且較負載臨限値（2) 大的情況下（在S 104爲YES)，使1台升降機及1台中轉堆 料機停止工作（S106)。 在搬送負載爲負載臨限値（2)以下且較負載臨限値（3)大 的情況下（在S 108爲YES)，使2台升降機及2台中轉堆料 機停止工作（S 110)。在搬送負載爲負載臨限値（3)以下且較 負載臨限値（4)大的情況下（在S 112爲YES)，使3台升降 機及3台中轉堆料機停止工作（S 114)。在搬送負載爲負載 臨限値（4)以下的情況下（在S 112爲NO)，使4台升降機及 4台中轉堆料機停止工作。 經過如上之步驟後，根據本實施形態之主機電腦，基於 13 312/發明說明書(補件V92-06/92107867 1224074 從OHS控制器、升降機控制器及中轉堆料機控制器等 得的資訊以及製造步驟內的半成品加工量及投放量， 出製造步驟內的搬送負載，並基於該搬送負載可決定 機及中轉堆料機的停止台數。因爲可對應搬送負載政 降機或中轉堆料機的台數，因此，可減低升降機或中 料機的消耗電力。 (第2實施形態） 以下，說明本發明之第2實施形態之搬送控制裝置 本實施形態之搬送系統與上述第1實施形態之搬送系 相同。因此，在此並不重複詳細說明此等。 參照圖5，說明由屬本實施形態之搬送控制裝置之 電腦5 000所執行的程式的控制構造。 在S 2 0 0，主機電腦5 0 0 0計算出製造步驟內的搬送] 因爲該S200之處理與前述S100之處理相同，在此不 詳細說明。在S 202，主機電腦5000計算出製造步驟 搬送負載之相對於搬送能力的比率。 在S 204，主機電腦5 000判斷所計算出的比率是否 80%。當比率未滿80%時（在S204爲YES)，則處理® S 2 0 6。反之（在S 2 0 4爲Ν Ο )則該處理結束。 在S 2 0 6，主機電腦5 0 0 〇判斷比率是否較6 0 %大。 率大於60%時（在S 206爲YES)，則處理移向S 20 8。反 S206爲NO)則該處理移向S210。 在S 2 0 8，主機電腦5 0 0 0使1台升降機及1台中轉 機停止工作。此後處理結束。 312/發明說明書(補件)/92-06/92107867 ;所取 計算 :升降 :變升 4專堆 。又， :統係 主機 ft載。 :重複 內的 未滿 ;向 當比 之（在 堆料 14 1224074 在S 2 1 0，主機電腦5 0 0 0判斷比率是否較4 0 %大。當比 率大於40%時（在S210爲YES)，則處理移向S2 12。反之（在 S210爲NO)則該處理移向S214。 在S212，主機電腦5 000使2台升降機及2台中轉堆料 機停止工作。此後處理結束。 在S 2 1 4，主機電腦5 0 0 0判斷比率是否較2 0 %大。當比 率大於20%時（在S214爲YES)，則處理移向S216。反之（在 S214爲NO)則該處理移向S218。 在S 2 1 6，主機電腦5 0 0 0使3台升降機及3台中轉堆料 機停止工作。 在S 2 1 8，主機電腦5 0 0 0使4台升降機及4台中轉堆料 機停止工作。 基於如上的構成及流程，說明屬本實施形態之搬送控制 裝置之主機電腦5 0 0 0的動作。 計算出製造步驟內的搬送負載（S 200)，針對該製造步驟 內的搬送負載，計算出對於搬送能力的負載的比率（S 202 )。 在該比率較6 0 %大且在8 0 %以下的情況，（在S 2 0 4爲 YES、在S2 06爲YES)，則使1台升降機及1台中轉堆料 機停止工作（s 2 0 8 )。在該比率較4 0 %大且在6 0 %以下的情 況，（在S206爲NO、在S210爲YES)’則使2台升降機及 2台中轉堆料機停止工作（S 2 1 2 )。在該比率較2 〇 %大且在 40%以下的情況，（在S210爲NO、在S214爲YES) ’則使 3台升降機及3台中轉堆料機停止工作（S 21 6)。在該比率 爲20%以下的情況，（在S214爲NO)，則使4台升降機及 15 312/發明說明書(補件)/92-〇6/92丨〇7867 1224074 4台中轉堆料機停止工作（S 218)。 經過如上之步驟後，根據本實施形態之主機電腦5 00 0， 計算出製造步驟內的搬送負載，並基於對於該搬送能力的 搬送負載的比率，可決定升降機及中轉堆料機的停止台數。 (第3實施形態） 以下，說明本發明之第3實施形態之搬送控制裝置。又， 本實施形態之搬送系統與上述第1實施形態之搬送系統係 相同。據此，在此並不重複詳細說明該等。 參照圖6，說明由屬本實施形態之搬送控制裝置之主機 電腦5 000所執行的程式的控制構造。 在S 3 00，主機電腦5 000計算出全升降機的工作比率。 此時，主機電腦5 000係基於從連接於主機電腦5 0 00的升 降機控制器5 200所接收的資訊，計算出全升降機的工作比 率。 在S 3 02，判斷是否具有工作比率未滿50%的升降機。在 具有工作比率未滿50%的升降機的情況下（在S 3 02爲 YES)，貝[j處理移向S304。反之（在S302爲NO)貝(1該處理返 回 S300 ° 在S 3 04,主機電腦5 000使該升降機停止工作。在S 3 06， 主機電腦5 0 0 0計算出其他之升降機的工作比率。此時，於 S 3 04計算出執行升降機的停止處理後的工作比率。 在S 3 0 8，主機電腦5 000判斷在其他之升降機中是否具 有工作比率爲70 %以上的升降機。若其他之升降機中具有 工作比率高於70%的升降機時（在S 3 0 8爲YES)，則處理移 16 312/發明說明書(補件)/92-06/921〇7867 1224074 向S310。反之（在S308爲NO)則該處理返回S300。 在S 3 1 0，主機電腦5 0 0 0使已停止工作之升降機再度工 作。此後處理返回S 3 0 0。 基於如上的構成及流程，說明屬本實施形態之搬送控制 裝置之主機電腦5000的動作。 主機電腦5 000，係基於從升降機控制器5 2 00接收的資 訊，計算出全升降機的工作比率（S 3 00)。當具有工作比率 未滿50%的升降機時（在S 3 02爲YES)，使該升降機停止工 作（S 3 04)。在使該升降機停止工作的狀態，計算出其他之 升降機的工作比率（S 3 06)，當其他之升降機中沒有工作比 率爲70%以上的升降機時（在3308爲1^0)，使在3304已停 止工作之升降機就此仍成爲停止狀態。另一方面，當其他 之升降機中具有工作比率爲70%以上的升降機時（在S3 08 爲YES)，使已停止工作之升降機再度工作（S3 10)。 經過如上之步驟，則根據本實施形態之主機電腦5 0 0 0， 計算出所有升降機之工作比率，使工作比率未滿5 0 %的升 降機停止工作。在使該升降機停止工作的狀態，計算出其 他升降機之工作比率，當其他之升降機中出現工作比率爲 7 0 %以上的升降機時，使已停止工作之升降機再度工作。 藉此，在某一升降機停止工作的狀態，當其他之升降機之 工作比率例如成爲70 %以上時，使停止工作的升降機再度 工作而可提升搬送能力。尤其是，藉由預先將再度工作條 件降低設爲7 0 %〜8 0 %的程度，即可較快地使升降機再度 工作，而可減少延遲時間的影響。 17 312/發明說明書(補件)/92-06/92107867 1224074 (第4實施形態） 以下，說明本發明之第4實施形態之搬送控制裝置。又， 本實施形態之搬送系統與上述第1實施形態之搬送系統係 相同。因此，在此並不重複詳細說明該等。 參照圖7，說明由屬本實施形態之搬送控制裝置之主機 電腦5 0 0 0所執行的程式的控制構造。 在S 400，主機電腦5 000計算出全升降機的工作比率。 在S 402，主機電腦5 000判斷是否有工作比率未滿50% 的升降機。在具有工作比率未滿50%的升降機時（在S4 02 爲YES)，則處理移向S404。反之（在S402爲NO)則該處 理結束。 在S404，主機電腦5 000使該升降機停止工作。在S406， 主機電腦5 00 0利用S404之處理中使升降機停止工作的狀 態計算搬送路徑。在S408，主機電腦5 000判斷搬送路徑 是否超過預定的距離。當搬送路徑超過預定的距離時（在 S408爲YES)，則處理移向S410。反之（在S408爲NO)則 該處理結束。 在S410，主機電腦5 000使已停止工作之升降機再度工 作，並使其他之升降機停止工作。此後處理返回S 4 0 6，再 度計算搬送路徑，直至搬送路徑沒有超過預定的距離爲止 而反覆執行演算。 基於如上的構成及流程，說明屬本實施形態之搬送控制 裝置之主機電腦5 0 00的動作。 主機電腦5 000，係基於從連接於主機電腦5 0 0 0之升降 18 31W發明說明書(補件)/92-06/92107867 1224074 機控制器5 2 0 0所收集的資訊，計算出全升降機的工作比率 (S 4 0 0 )。當具有工作比率未滿5 0 %的升降機時（在s 4 0 2爲 YES)，使該升降機停止工作（S404)。在使該升降機停止工 作的狀態計算搬送路徑（S406)，當搬送路徑超過預定的距 離時（在S408爲YES)，使已停止工作之升降機再度工作’ 並使其他之升降機停止工作（410)。 經過如上之步驟後，根據本實施形態之主機電腦5 0 0 0， 使升降機暫時停止工作，並計算該狀態下之搬送路徑。當 搬送路徑超過預定的距離時，亦即，當由於停止該升降機 而使得搬送路徑變爲非常長時，使停止工作中之升降機再 度工作，並使其他之升降機停止工作。反覆進行如此之搬 送路徑的計算，可以搬送路徑不致超過預定的距離的方式 來停止升降機。 (發明之效果） 根據本發明之搬送控制裝置，對應於由演算機構所計算 出的搬送對象物的量，來決定複數台升降機中的使用的升 降機。因此，當搬送對象物減少時，在工作中的複數台升 降機中，使對應於搬送對象物變少的台數的升降機停止工 作。藉此’對應搬送對象物的變動，可控制升降機的工作 與ί宁止。其結果爲，當搬送對象物的量減少時使升降機停 止工作，可達到節省能源的目的。 又’根據本發明之搬送控制裝置，對應於由演算機構所 S十算出的搬送對象物的量’來決定複數台中轉堆料機中的 使用的中轉堆料機。因此，當搬送對象物減少時，在工作 312/發明說明補件)/92-06/92107867 19 1224074 中的複數台中轉堆料機中，使對應於搬送對象物變少的台 數的中轉堆料機停止工作。藉此，對應搬送對象物的變動， 可控制中轉堆料機的工作與停止。其結果爲，當搬送對象 物的量減少時使中轉堆料機停止工作，可達到節省能源的 目的。 又’上述實施形態中，分別說明了升降機及中轉堆料 機’但是本發明並不僅限於此。也可將升降機及中轉堆料 機構成爲一定。 本次所揭示之實施形態，可以認爲在各個方面均爲例 示’而並非以此爲限制者。本發明之範圍並非由上述說明 而是由申請專利範圍所揭示，其意味著包含與申請專利範 圍均等的意味及範圍內的所有變化者。 【圖式簡單說明】 圖1爲顯示本發明之實施形態之搬送控制裝置控制之搬 送系統的平視圖。 圖2爲顯示本發明之實施形態之搬送控制裝置控制之搬 送系統的側視圖。 圖3爲本發明之實施形態之搬送控制裝置的全體構成 圖。 圖4爲由本發明之第1實施形態之搬送控制裝置所執行 的程式的流程圖。 圖5爲由本發明之第2實施形態之搬送控制裝置所執行 的程式的流程圖。 圖6爲由本發明之第3實施形態之搬送控制裝置所執行 20 312/發明說明書(補件)/92-06/92107867 1224074 的程式的流程圖。 圖7爲由本發明之第4實施形態之搬送控制裝置所執行 的程式的流 ，程圖 〇 (元件 符號說明 ) 1 00 搬 送 軌 1 02 搬 送 軌 1 1 0〜 1 24 堆 料 機 13 0 中 轉 堆 料 機 1 32 中 轉 堆 料 機 134 中 轉 堆 料 機 13 6 中 轉 堆 料 機 200 搬 送 軌 202 搬 送 軌 2 1 0〜 224 堆 料 機 230 中 轉 堆 料 機 23 2 中 轉 堆 料 機 234 中 轉 堆 料 機 23 6 中 轉 堆 料 機 3 00 搬 送 軌 302 搬 送 軌 3 1 0〜 3 22 堆 料 機 3 3 0 中 轉 堆 料 機 334 中 轉 堆 料 機 1000 升 降 機 312/發明說明書(補件)/92-06/921078671224074 发明 Description of the invention [Technical field to which the invention belongs] The present invention relates to a conveying system for conveying semi-products in and between floors in a manufacturing plant that constitutes a manufacturing line across a plurality of floors, and more particularly A control device for a conveyance system including an elevator for transferring between floors, a transfer vehicle for transferring within floors, and a transfer stocker for loading / unloading the elevator. [Prior Art] There are various systems for transferring semi-finished semiconductor wafers or printed boards in semiconductor manufacturing lines or electronic printed circuit board manufacturing lines. This type of manufacturing line may be configured to span multiple floors. In this case, the floor-to-floor transportation belonging to the vertical direction and the floor-to-floor transportation belonging to the horizontal direction are mixed. Japanese Patent Application Laid-Open No. 1 1-67 870 discloses a semiconductor wafer transfer device including a buffer stocker, a circular transfer line, an elevator, and a transfer machine. The semiconductor wafer transfer device disclosed in the document is a clean room provided with a semiconductor manufacturing device; a stacker provided on the floor of the clean room for use in the semiconductor manufacturing device and temporarily storing the semiconductor wafer ; A circular transfer line installed on the ceiling of a clean room and transferring semiconductor wafers between stackers; a transfer device for transferring semiconductor wafers between circular transfer lines; a stacker installed on the floor A lifter that transports semiconductor wafers between them; and a small stacker that stores semiconductor wafers in the smallest unit determined by the processing capacity of the semiconductor device at each semiconductor processing step. This small stacker keeps the small stacks minus the number of productions for the semiconductor production line during the production period 5 312 / Invention Specification (Supplement) / 92-06 / 92107867 1224074 required for the full semiconductor processing step The total storage number of the machine is based on the Japanese Patent Publication No. 6-7 8 7 month transport device, using a circular transfer line, the number of semiconductor wafers necessary for the processing step of the carrier, the buffer stacker Supply each small stacker located in the ballastless room. To complete the semiconducting semiconductor processing, the reverse operation steps are stored from a small stacker. By setting the number of semiconductor devices in the stacker installed in a clean room, semiconductor liters can be obtained. Japanese Patent Application Laid-Open No. 7-3 09407 discloses a tray stacker for narrow-brush circuit boards. The disclosed part holds the conveying belt of the material-like moving tray of a plurality of electronic printed circuit boards, and the elevating part which is raised and lowered at one end of the two end portions toward the other end follows the middle of the conveying belt, The direction of the conveyor belt divides the divergent transfer portion of the tray; from the receiving: the tray, and relative to the forward and backward transfer portion with the movement of the conveyor belt; relative to the placement with the conveyor belt moving Elevator of the worktable constituted by the Ministry; the elevator is erected on the pedestal of the lifting and lowering and moving part of the pedestal, and the tray 312 / invention of the invention is transferred to the worktable by the loading machine of the worktable (Supplement) The number of semi-semiconductor wafers produced by the volume of / 92-06 / 92107867. 〒Revealed semiconductor wafer placement and lifter, the semiconductor is placed on the clean room floor, a semiconductor processing step of the bulk wafer, and the buffer stocker during supply. According to this, the area is set to the minimum to increase the productivity of the production line. "The storage of multiple electronic printing tray stackers includes: an inner tray; holding up and down in a straight line has the tray from the conveyor belt ring tray stacker; Set the moving direction of the tray to the vertical transfer belt. The moving direction of the tray. The moving direction of the tray to move vertically is flat; move the table up and down to move the loading section; and arrange it in the lifting range. Stored rack box 6 1224074 Cabinet section. According to the tray stacker disclosed in Japanese Patent Application Laid-Open No. 7-3 0 9 4 0 7, because the branch transfer section is provided on the conveyor belt that stores the trays in a straight line, the work of moving the trays back and forth and left and right is provided. The front and rear transfer parts of the table, the placement transfer part, the lifting transfer part consisting of the elevator moving up and down, and the rack cabinet part of the storage tray can hold the tray in a direction perpendicular to the conveyor belt, which can increase Tray retention of the tray stacker. That is to say, by diverting the flow of the tray from one side of the conveyor belt, and allowing the tray to stay in a direction perpendicular to the conveyor belt's height, the tray retention amount of the tray stacker can be increased. This can reduce the difference in capability between steps. [Summary of the Invention] (Problems to be Solved by the Invention) However, if the semiconductor wafer transfer device disclosed in Japanese Patent Application Laid-Open No. 11-67870 described above is used, the installation area of the stacker installed in a clean room is minimized. In order to increase the number of semiconductor manufacturing equipment, it does not correspond to the transfer load in the manufacturing process, and each device constituting a transfer device such as a stocker, a circular transfer line, a transfer device, an elevator, and a small stacker is effective Operator. According to the tray stacker disclosed in Japanese Patent Application Laid-Open No. 7-3 0 9 4 0 7 described above, it is a space-saving and unnecessary extra equipment cost ', and does not correspond to the carrying load in the manufacturing step. To make the tray stacker effective. In other words, the aforementioned Japanese Unexamined Patent Publication No. 11-67870 and Japanese Unexamined Patent Publication No. 7-3 09407 are not intended to realize vertical floor-to-floor transportation and horizontal belonging to a manufacturing line formed by a plurality of floors. Direction 7 312 / Invention Manual (Supplement) / 92-〇6 / 921 〇7867 1224074 Effective use of equipment in the case of mixed transportation in the floor. The present invention is an invention proposed to solve the above-mentioned problems. It provides a control device that can efficiently use a lift including a plurality of floors to move between floors, and a transport vehicle provided on each floor to move within floors. And the transfer system of the intermediate stacker for loading / unloading of the elevators installed on each floor. (Means for Solving the Problems) The conveyance control device of the present invention is a conveyance system that controls the manufacturing steps dispersed in a plurality of floors. The transfer system includes a plurality of lifts for transferring between floors, a plurality of transfer cars provided on each floor for transferring within floors, and a plurality of transfers provided on each floor for loading / unloading elevators. Stacker. The conveyance control device includes a calculation mechanism for calculating the quantity of the conveyed object in the manufacturing step, and a determination mechanism for determining the elevator to be used in the plurality of elevators based on the calculated quantity of the conveyed object. In addition, the transfer control device of the present invention may also include a calculation mechanism for calculating the amount of the transfer target in the manufacturing step, and determining the number of transfer stackers based on the calculated amount of the transfer target. The decision-making mechanism of the relay stocker used. [Embodiment] Hereinafter, an embodiment of the present invention will be described with reference to the drawings. In the following description, the same components are assigned the same component symbols. These names and their functions are also the same. Therefore, these detailed descriptions are not repeated. (First Embodiment) The overall configuration of the conveying system controlled by the conveying device of this embodiment will be described with reference to Figs. 1 and 2 8 312 / Invention Specification (Supplement) / 92-06 / 92107867 1224074. This transfer system is used in a manufacturing plant. There are several cells (hereinafter referred to as compartments) in a semiconductor manufacturing plant. A processing device at each stage. For OHS (Over Head Shuttle) between compartments. Clean room between floors for floor-to-floor transfer and stocker. As shown in FIG. 1 and FIG. 2, the semiconductor manufacturing steps of the system structure in the following description will be described. As shown in the figure, there are OHS transport rails 100, 102, and 200. There are also elevators for the first floor and the second floor to move between the first, second, and third floors. On the first floor, a relay stacker 2 3 0 is installed on the second floor. On the first floor, there is a relay stacker 1 2 3, on the second floor 2 3 2 and on the third floor a relay stacker 3 3 0. Nearly, a relay stacker 1 3 4 is installed on the first floor, and: A feeder 2 3 4 is located near the relay stacker 3 3: on the third floor, and a relay stacker is installed on the first floor. I 3 6 transfer stacker 2 3 6 is set on the 3rd floor. The transfer stacker feeder is designed for the respective lifts and the OHS travel rails of the OHS 100, 102, 200, 202, and Each stacker 1 1 〇 ～ i 24, 2 i in each compartment is connected to the intermediate stacker 1 3 0 ～ 1 3 6, 2 3 0 ～ 2 3 6 312 / Invention Specification (Supplement) / 92- 06/92107867 It is used in semiconductor products, and multiple conveyances are arranged around the clean room. In addition, in order to connect each elevator and the transfer stack, it is shown in Figures 1 and 2 for 3 floors. , 300, 302 ° lift 1000; and 2000, 3 000, 4000 °: near the transfer stacker 1 3 0, | 2 0 0, in the second floor of the transfer stacker lift 3 000 Set up the relay stack 2. On the elevator 4 0 0, a middle floor is installed on the second floor 丨 3 3 4. Each relay is set. 3 00, 3 02 are set from 0 to 224, 310 to 322, 3 3 0 to 3 3 4 ° Semiconductor 9 1224074 The bulk wafer is stored in a gate box and a plurality of When the processing device completes the previous steps, it is stored in a stocker located in the compartment. The received gate box is transferred from the stacker to the transfer stacker by the trolley on the OHS rail. From the transfer stocker through the floor-to-floor lifter ', it is transferred to the transfer stocker in another building of the same lift. The OHS trolley is used to transfer the materials from the transfer stacker to the stacker in each compartment of the clean room. By repeating this step, the semiconductor wafers stored in the gate box can be transferred from the compartments on each floor to the compartments on the other floor. As an example of actual operation, when the gate box is transported from the stacker 1 i 6 in the clean room on the first floor to the stacker 3 1 2 in the clean room on the third floor, it is installed on the first floor. The OHS trolley of the OHS transfer rail 100 transfers the brake box from the stocker 1 1 6 to the transfer stocker 1 3 6. The intermediate stacker 334 is transferred from the intermediate stacker 1 36 to the elevator 40,000 in the clean room on the third floor by the floor elevator 4,000. The OHS trolley on the third floor is used to transfer from the intermediate stacker 3 3 4 on the third floor to the stacker 3 丨 2 located in the compartment of the transfer destination. In this way, the first floor and the second floor, the second floor and the third floor, and the first floor and the third floor are also moved by the OHS trolleys, transit stackers and floor lifts Transfer of semiconductor wafers. With reference to Fig. 3, an overall configuration diagram of a control device of the transfer system according to this embodiment will be described. The host computer 5,000 shown in Fig. 3 is a transport control device of this embodiment. The host computer 5,000 is connected to the OHS controller 5 100 and the elevator controller 5 200, the transfer stacker controller 5 3 00 and the stacker controller 5 400 on each floor of each building. OHS controller 5100 controls OHS trolley 5110 on each floor of each building. Lift 10 312 / Invention Manual (Supplement) / 92-06 / 92107867 1224074 Lowering controller 5 20 0 controls the elevators 1,000, 2000, 3,000, and 4000 respectively. Here, these elevators are collectively referred to as elevators 5 2 1 0. The relay stacker controller 5 3 00 controls the relay stacker 13〇 ~ 136, 23 () ~ 2 3 6, 3 3 0 ~ 3 3 4. Also, here, the relay stocker is collectively referred to as the relay stocker 5 3 1 0. The stacker controller 5 400 controls the stackers 110 to 1 2 4, 2 1 0 to 2 2 4, 3 1 0 to 3 2 2 provided in each compartment. Here, the stocker is collectively designated as a stocker 5 4 1 0. As shown in Figure 3, the host computer 5 000 is connected to the OHS controller 5100, the elevator controller 5 2 0 0, the relay stacker controller 5 3 0 0 and the stacker controller 5 400, which can be collected in the OHS Achievement of the transfer of the trolley 5110, a record of the transfer to the elevator 5 2 1 0, an operating ratio of the transfer stacker 5 3 1 0, and an operating ratio of the stacker 5 4 1 0. In addition, the host computer's 5000 input of the semiconductor wafer manufacturing steps and the amount of semi-finished product processing. Referring to Fig. 4, a control structure of a program executed by a host computer 5,000 of the transport control device according to this embodiment will be described. At step (hereinafter abbreviated as step S) 100, the host computer 5 000 calculates the transfer load in the manufacturing step. At this time, the host computer 5,000 is based on the amount of semi-finished semiconductor wafers processed in the manufacturing process, the average number of processing days multiplied by the amount of semiconductor wafers delivered, the number of OHS trolleys 5 1 10, and the number of lifts. 5 2 1 0 transfer performance, transfer stacker 5 3 1 0 work ratio, 〇 HS trolley 5 4 1 0 work platform, lift 5 2 1 0 work platform and transfer stocker 5 Calculate the transfer load in a manufacturing step that has a strong correlation with the amount of the object to be transferred, such as the number of 3 to 10 tables. 11 312 / Invention Specification (Supplement) / 92-06 / 92107867 In S 102, the host computer 5 000 determines whether the calculated transfer load is smaller than the load threshold 値 (1). When the transfer load is smaller than the load threshold 値 (1) (YES in S102), the process proceeds to S104. Otherwise (NO at S102), the process ends. At S104, the host computer 5 000 determines whether the calculated transfer load is greater than the load threshold 値 (2). When the transfer load is larger than the load threshold 値 (2) (YES in S104), the process proceeds to S106. Otherwise (NO in S104), the processing moves to S108. In addition, the load threshold (2) is smaller than the load threshold (1). At S 106, the host computer 5000 stops one elevator and one relay stacker. Processing then ends. At S 108, the host computer 5 00 determines whether the transfer load is greater than the load threshold 値 (3). When the transfer load is larger than the load threshold 値 (3) (YES at S 108), the processing moves to SU0. Otherwise (NO in S108), the process moves to S1 12. The load threshold 値 (3) is smaller than the load threshold 値 (2). At S1 10, the host computer 5,000 stopped two lifts and two relay stackers. Processing then ends. At S1 12, the host computer 5 00 judges whether the transfer load is larger than the load threshold 値 (4). When the load is larger than the load threshold 値 (4) (Y E S in S 112), the processing moves to S 1 1 4. Otherwise (NO in S 1 1 2), the processing moves to S 1 16. The load threshold 値 (4) is smaller than the load threshold 値 (3). At S 11 4, the host computer 5000 stops three elevators and three relay stackers. Processing then ends. At S1 16, the host computer 5000 has stopped four elevators and four relay stackers 12 312 / Invention Manual (Supplement) / 92-06 / 92107867 1224074 The machine stopped working. Based on the above-mentioned configuration and flow, the operation of the host computer 5,000 of the transport control device of this embodiment will be described. The host computer 5 0 0 0 obtains the number of 0 H S trucks in operation and the transport performance of OHS car 51 10 from 〇 H S truck 5 1 1 0. The host computer 5 000 obtains the number of elevators 5 2 1 0 in operation and the conveyance performance of elevators 52 10 from the elevator controller 5 2 0 0. The host computer 5 00 obtains the number of relay stackers 5 3 1 0 in operation and the working ratio of relay stacker 5 3 1 0 from the relay stacker controller 5 3 0 0. The host computer 5,000 obtains the amount of investment in semiconductor manufacturing steps and the amount of semi-finished product processing. The host computer 5,000 calculates the transfer load in the manufacturing process based on the obtained information (S 100). When the transfer load is smaller than the load threshold 値 (1) (YES at S 102), it is determined whether the transfer load is larger than the load threshold 値 (2). When the transfer load is smaller than the load threshold 値 (1) and larger than the load threshold 値 (2) (YES at S 104), one elevator and one relay stacker are stopped (S106). When the transfer load is below the load threshold (2) and is larger than the load threshold (3) (YES at S 108), stop the 2 lifts and the 2 transfer stackers (S 110) . When the transfer load is less than the load threshold (3) and greater than the load threshold (4) (YES at S 112), stop the 3 lifts and 3 relay stackers (S 114) . When the transfer load is less than the load threshold (4) (NO in S 112), stop the 4 lifts and 4 relay stackers. After the above steps, the host computer according to this embodiment is based on the information obtained from the OHS controller, elevator controller, and relay stacker controller based on 13 312 / Invention Specification (Supplement V92-06 / 92107867 1224074) and The amount of semi-finished products processed and put in the manufacturing step is the transport load in the manufacturing step. Based on the transport load, the number of stoppages of the machine and the transfer stacker can be determined. Because it can correspond to the transfer load or the transfer stacker The number of feeders can reduce the power consumption of the elevator or the intermediate feeder. (Second Embodiment) The following describes the transport control device according to the second embodiment of the present invention. The transport system of this embodiment and the first embodiment described above The conveyance system of the form is the same. Therefore, the detailed description is not repeated here. Referring to FIG. 5, the control structure of the program executed by the computer 5,000 of the conveyance control device of the present embodiment will be described. In S 2 0, The host computer 5 0 0 0 calculates the transport in the manufacturing step] Because the processing of the S200 is the same as the processing of the aforementioned S100, it will not be described in detail here. At S 202, the host computer 5000 counts The ratio of the conveying load to the conveying capacity at the manufacturing step. In S204, the host computer 5 000 judges whether the calculated ratio is 80%. When the ratio is less than 80% (YES in S204), it is processed ® S 2 0 6. Conversely (N 0 in S 2 0), the process ends. In S 2 06, the host computer 5 0 0 0 determines whether the ratio is greater than 60%. When the ratio is greater than 60% (in S 206 it is YES), the process moves to S 20 8. If S206 is NO, the process moves to S210. At S 2 0, the host computer 5 0 0 stopped one elevator and one relay. Processing then ends. 312 / Invention Specification (Supplement) / 92-06 / 92107867; Calculations taken: Lifting: 4 special piles. Also,: System is host ft. : Underfill within the repeat; Xiangdan ratio (in stockpile 14 1224074 in S 2 10, host computer 5 0 0 0 to determine whether the ratio is greater than 40%. When the ratio is greater than 40% (YES in S210)) , The process moves to S2 12. Otherwise (NO at S210), the process moves to S214. At S212, the host computer 5 000 stops the 2 lifts and the 2 transfer stackers. The process ends thereafter. At S 2 14, the host computer 5 0 0 0 determines whether the ratio is greater than 20%. When the ratio is greater than 20% (YES at S214), the process moves to S216. Otherwise (NO at S214), the process moves to S218 . At S 2 16, the host computer 5 0 0 stopped 3 lifts and 3 relay stackers. At S 2 18, the host computer 5 0 0 stopped 4 lifts and 4 relay stackers. Stop operation. Based on the above configuration and flow, the operation of the host computer 5 0 0 of the transfer control device of this embodiment will be described. The transfer load in the manufacturing step is calculated (S 200), and the transfer load in the manufacturing step is calculated. Calculate the ratio of the load to the carrying capacity (S 202). This ratio is larger than 60% and within 80% (YES in S 2 0 4 and YES in S 2 06), then stop one lift and one transfer stocker (s 2 0 8). The ratio is larger than 40% and the In the case of less than 60% (NO in S206 and YES in S210), 'the two elevators and two relay stackers stop working (S 2 1 2). The ratio is larger than 20% and the 40% or less (NO in S210 and YES in S214) 'then stop 3 lifts and 3 relay stackers (S 21 6). When the ratio is 20% or less, (in S214 is NO), then 4 lifts and 15 312 / Invention Manual (Supplement) / 92-〇6 / 92 丨 〇7867 1224074 4 relay stackers stop working (S 218). After the above steps, Based on the host computer 5000 of this embodiment, the transfer load in the manufacturing step is calculated, and the number of stops of the elevator and the transfer stocker can be determined based on the ratio of the transfer load to the transfer capacity. (Third implementation (Form) The following is a description of a conveying control device according to a third embodiment of the present invention. The conveying system of the present embodiment is similar to that of the first embodiment described above. The conveying system is the same. Accordingly, detailed descriptions are not repeated here. Referring to FIG. 6, the control structure of a program executed by the host computer 5,000 of the conveying control device of this embodiment will be described. In S 3 00, The host computer 5,000 calculates the working ratio of the full lift. At this time, the host computer 5 000 calculates the working ratio of the full elevator based on the information received from the elevator controller 5 200 connected to the host computer 5 00. In S 3 02, it is determined whether there is an elevator with an operating ratio of less than 50%. In the case where there is an elevator whose working ratio is less than 50% (YES in S302), the process is moved to S304. Conversely (NO in S302) (1, the process returns to S300 °. In S 3 04, the host computer 5,000 stops the elevator. At S 3 06, the host computer 5 0 0 calculates the working ratio of the other elevators. At this time, the working ratio after the elevator stop processing is calculated at S 3 04. At S 3 08, the host computer 5 000 judges whether there are elevators with an operating ratio of 70% or more in other elevators. If other elevators When there is an elevator with a working ratio higher than 70% (YES in S 3 0 8), the processing moves to 16310 / Invention Specification (Supplement) / 92-06 / 921〇7867 1224074 to S310. Otherwise (in S308 it is NO), the process returns to S300. At S 3 1 0, the host computer 5 0 0 restarts the lift that has stopped working. After that, the process returns to S 3 0 0. Based on the above structure and flow, the description is of this embodiment. The operation of the host computer 5000 for the transfer control device. The host computer 5,000 is based on the information received from the elevator controller 5 2 00 to calculate the operating ratio of the entire elevator (S 3 00). When the operating ratio is less than 50% For lifts (Y in S 3 02 ES) to stop the lift (S 3 04). In the state of stopping the lift, calculate the work ratio of other lifts (S 3 06). When there is no work rate of more than 70% in other lifts In the case of a lift (1 ^ 0 in 3308), the lift that has stopped working in 3304 is still stopped. On the other hand, when other lifts have a lift with a working ratio of 70% or more (YES in S3 08) ) To make the lift stopped working again (S3 10). After the above steps, according to the host computer 5 0 0 0 of this embodiment, calculate the working ratio of all lifts, so that the working ratio is less than 50% The elevator stops working. In the state where the elevator is stopped, the working ratio of other elevators is calculated. When an elevator with a working ratio of 70% or more appears in the other elevators, the elevator that has stopped working is made to work again. In a state where one elevator stops working, when the operating ratio of other elevators becomes, for example, 70% or more, the stopped elevator is made to work again and It can improve the carrying capacity. In particular, by reducing the re-working conditions to 70% ~ 80% in advance, the elevator can be re-operated quickly, and the influence of the delay time can be reduced. 17 312 / Invention Manual (Supplement) / 92-06 / 92107867 1224074 (Fourth Embodiment) The following describes the transport control device of the fourth embodiment of the present invention. The transport system of this embodiment and the transport system of the first embodiment described above Department is the same. Therefore, the details are not repeated here. Referring to Fig. 7, the control structure of a program executed by the host computer 500 of the transport control device according to this embodiment will be described. At S 400, the host computer calculates the working ratio of the full lift at 5,000. At S 402, the host computer 5 000 determines if there is a lift with an operating ratio less than 50%. When there is an elevator whose working ratio is less than 50% (YES at S4 02), the process moves to S404. Otherwise (NO at S402), the processing ends. At S404, the host computer 5,000 stops the lift. In S406, the host computer 5000 calculates the conveyance path by using the state in which the elevator is stopped during the processing of S404. In S408, the host computer 5 000 determines whether the transport path exceeds a predetermined distance. When the transport path exceeds a predetermined distance (YES in S408), the process moves to S410. Otherwise (NO at S408), the process ends. In S410, the host computer 5,000 restarts the lift that has stopped working and stops the other lifts. After that, the process returns to S 406, and the transport path is calculated again, and the calculation is repeatedly performed until the transport path does not exceed a predetermined distance. Based on the above configuration and flow, the operation of the host computer 5000 of the transport control device according to this embodiment will be described. The host computer 5 000 is calculated based on the information collected from the elevator 18 31W invention manual (supply) / 92-06 / 92107867 1224074 machine controller 5 2 0 0 connected to the host computer 5 0 0. Working ratio (S 4 0 0). When there is an elevator whose working ratio is less than 50% (YES at s 402), the elevator is stopped (S404). The lift path is calculated while the lift is stopped (S406). When the lift path exceeds a predetermined distance (YES at S408), the lift that has stopped working is re-operated 'and the other lifts are stopped (410). After going through the above steps, according to the host computer 500 of this embodiment, the elevator is temporarily stopped from working, and the conveying path in this state is calculated. When the conveying path exceeds a predetermined distance, that is, when the conveying path becomes very long due to stopping the lift, the lift in the stopped state is made to work again, and the other lifts are stopped. Repeating the calculation of such a conveying path can stop the elevator in such a way that the conveying path does not exceed a predetermined distance. (Effects of the Invention) According to the conveyance control device of the present invention, the lifts used in the plurality of lifts are determined in accordance with the amount of the conveyed object calculated by the calculation mechanism. Therefore, when the number of objects to be transferred is reduced, among the plurality of lifts in operation, the number of elevators corresponding to the number of objects to be transferred is stopped. In this way, the operation of the elevator can be controlled in accordance with the change of the conveyed object. As a result, when the amount of the object to be transported is reduced, the elevator can be stopped and the purpose of saving energy can be achieved. Further, according to the transfer control device of the present invention, the relay stocker used in the plurality of relay stockers is determined in accordance with the amount of the transport target calculated by the calculation unit S10. Therefore, when the number of objects to be transferred is reduced, in the plurality of relay stockers in Job 312 / Invention Supplement) / 92-06 / 92107867 19 1224074, the number of relays corresponding to the number of objects to be transferred is reduced. The stacker stopped working. Thereby, the operation and stop of the relay stocker can be controlled in accordance with the change of the conveyed object. As a result, when the amount of the object to be transferred is reduced, the intermediate stacker is stopped to achieve the purpose of saving energy. In addition, in the above-mentioned embodiment, the lifter and the intermediate stacker have been described separately, but the present invention is not limited to this. It is also possible to make the elevator and the transfer stocking mechanism constant. The embodiment disclosed this time can be considered as an example in all aspects, and is not limited thereto. The scope of the present invention is not disclosed by the above description, but is disclosed by the scope of patent application, which is meant to include all meanings within the meaning and scope equivalent to the scope of patent application. [Brief Description of the Drawings] Fig. 1 is a plan view showing a transport system controlled by a transport control device according to an embodiment of the present invention. Fig. 2 is a side view showing a transfer system controlled by a transfer control device according to an embodiment of the present invention. Fig. 3 is an overall configuration diagram of a transport control device according to an embodiment of the present invention. Fig. 4 is a flowchart of a program executed by the conveyance control device according to the first embodiment of the present invention. Fig. 5 is a flowchart of a program executed by the transfer control device according to the second embodiment of the present invention. Fig. 6 is a flowchart of a program executed by the conveyance control device according to the third embodiment of the present invention. 20 312 / Invention Specification (Supplement) / 92-06 / 92107867 1224074. FIG. 7 is a flow of a program executed by the conveyance control device according to the fourth embodiment of the present invention. FIG. 0 (component symbol description) 1 00 conveying rail 1 02 conveying rail 1 1 0 to 1 24 stacker 13 0 relay Stacker 1 32 Relay stacker 134 Relay stacker 13 6 Relay stacker 200 Transfer rail 202 Transfer rail 2 1 0 ~ 224 Stacker 230 Relay stacker 23 2 Relay stacker 234 Relay stacker 23 6 Relay stacker 3 00 Transfer rail 302 Transfer rail 3 1 0 ~ 3 22 Stacker 3 3 0 Relay stacker 334 Relay stacker 1000 Lifter 312 / Invention specification ( Supplement) / 92-06 / 92107867
21 2000 升 降 機 3 0 0 0 升 降 機 4000 升 降 機 5 0 00 主 機 電 腦 5 100 OHS 控 制 器 5 110 OHS 台 車 5 2 00 升 降 機 控 制 器 5 2 10 升 降 機 5 3 00 中 轉 堆 料 機 控制器 5 3 10 中 轉 堆 料 機 5 400 堆 料 機 控 制 器 5 4 10 堆 料 機 1224074 312/發明說明書(補件)/92-06/9210786721 2000 Lift 3 0 0 0 Lift 4000 Lift 5 0 00 Host computer 5 100 OHS controller 5 110 OHS trolley 5 2 00 Lift controller 5 2 10 Lift 5 3 00 Relay stacker controller 5 3 10 Relay stack Feeder 5 400 Stacker Controller 5 4 10 Stacker 1224074 312 / Invention Manual (Supplement) / 92-06 / 92107867