1295196 ^ · 九、發明說明： 【發明所屬之技術領域】 、本發明係關於塗覆裝置，更特定言之，係關於從噴嘴 將液柱狀態的塗覆液吐出至載物台（stage)上載置的基板以 進行塗覆之塗覆裝置。 【先前技術】 以往，有各種將塗覆液塗覆至基板等的被處理體之塗 覆褒置被開發出來。例如，日本特開2〇〇3 ·3丄46(H虎公報（以 下°己為專利文獻1}所揭示的，為了回收將塗覆液塗覆至基 板之際塗覆至基板外的塗覆液或不需要的塗覆液，而在基 板外緣部設置接液部者。上述專利文獻i所揭示之接液 部’係以可回收更多的顯像液之方式沿著基板外緣而設置。 、、此外，亦有一邊從噴嘴吐出塗覆液一邊以連續的一筆 ^晝的方式將塗覆液塗覆至基板之塗覆裝置被開發出來。 歹^在製造有機電場發光顯示裝置（有機el顯示裝置） ^ Ϊ中，用喷嘴以取的圖案（卿㈣形狀將有機EL材 錄ς设至载置在載物台上的玻璃基板等基板的主面者。此 設^板^贺嘴移動到基板外時承接塗覆液之接液部係配 有.載所不’有機⑪顯示裝置之製造裝置係具備 啕·戰置要接堂红、蛑η # 基板Ρ之载物Α、101·、、、^ 機EL材料之塗覆的玻璃 喷嘴此吐出\色的;1紅色的有機則才料之紅色用的 吐出藍色的有機EL #料材料之綠色用的嘴嘴103 ; 卞+之監色用的喷嘴104 ;以及回收吐 317516 5 1295196 出到基板p之外的有機EL材料之接液部ι〇5。红 色有機EL材料，係接用且古& — # ^ 、、不& 1 狀、兽“彼 在基板？上形成的條⑽ipe) 溝U擴展流動程度_性之有機性的 …預定购及流量將有機= 呈 ^線棒狀(以下記為液柱狀態)吐出，以塗覆至基板p上。 接液部105係上面開口而酎Μ A | 圖僅顯示一側)。 …板p的兩邊外側(第n 賀：：02至104係由保持構件(未圖示)支持成並設的 恶制^保持構件及载物台⑻係藉由有機扯顯示裝 ^衣k衣置的各驅動機構而動作。驅動機構係橫 :;的預定方向(基板p上形成的條狀溝槽的方向，亦 碩F方向）使支持喷嘴1〇2幻〇4的保持構件往 ^ Ί驅動機構敍上述保持構件從配設於基板p的一邊外 - 側之接液部10 5的上部办門γ# 、真 0上$工間杈断基板ρ到配設於基板Ρ的 =! 部105的上部空間而往復移動。而且， 鲁驅動機構係在上述保持構件配置於接液部1〇5的上部*門 物台/01在與上述喷嘴往復移動方向垂直的預 紙面之方向）移動預定的節距（pitch)。I如 的動作同時從噴嘴102至1〇4將有機EL、材 科以液柱狀態吐出，即可佶 ..^ _ 在各條狀的溝槽以紅、终及齡色=及監色的有機EL材料 P上形成條形配列。 1色的順序配列，亦即在基板 、夜邻H =液柱狀態的塗覆液吐出至設在基板p外的接 之…有如下所述的問題。使喷嘴102至104 317516 6 ^95196 =妾液部H)5的距離hl+h2變長，原本為液柱狀態的 ί即會因表面張力而液滴化。例如，從喷嘴⑽至⑽的 ::部到基板ρ上面的距離hl雖可設定成〇 25至〇 5〇_ U可保證液柱狀態的距離，但距離hi+h2為編m程 2: 1:皁憑吐出愿力、流量的調整難以防止液滴化。 i、穿侉貝觜1〇2至1〇4朝圖不F方向高速移動的情況，依 定’液滴化的塗覆液會更加分裂成微細霧狀。而 ^速移動的喷嘴脱至⑽背後的空間形成負壓 2狀的塗覆液會向上飛到喷嘴1〇2至1〇4的附近。結果， 土板P外產生之霧狀的塗覆液會落到基板p上而附著在 基板P的上面，成為塗覆不良的原因。 -即使在上述有機EL顯示裝置之製造裝置採用 土反附近之上述專利文獻丨的接液，合 了儘可能多回收涂舜、、六二从、 L曰U局马 主设液而使接液部的上面開放、或將接液 口 κ大’而在接液部的内部產生同樣的液滴化及霧化，而 發生同樣的問題。 【發明内容】 因此，本發明之目的在於提供一種在將液柱狀態的塗 覆液塗覆至某姑夕砍 t 之IV、，吐出至基板外的塗覆液不會對該基 板造成影響之塗覆裝置。 ί 了 =成上述目的，本發明具有以下所述之特徵。 2心I，係將呈垂直向下的直線棒狀之液柱狀態的 土復攻吐出至基板上而塗覆該塗覆液之塗覆 置係具備有喷嘴、载物台、喷嘴移動機構⑽ 317516 7 1295196 嘴係從其前端部將塗覆液以液柱狀態吐出。載物台係將美 板載置在其上面。喷嘴移動機構係在載物台上的空間使$ 嘴在橫斷該載物台面的方向往復移動。接液部係在噴嘴= 動機構使喷嘴沿著橫斷方向移動至從載物台上離開的位^ 之際，接受從言亥喷嘴吐出至載物台外的塗覆液。接液部的 上面，在沿著橫斷方向配置於從載物台上離開的位置之噴 嘴的前端部的垂直下方的位置形成有與該橫斷方向平行: 狹縫狀的開π ’以通過該開口回收噴嘴所吐出之液柱狀離 的塗覆液。 Ί /第二態樣，係在上述第-態樣中，形成於接液部 口係在贺嘴所吐出之塗覆液從液柱狀態開始 •靠該喷嘴侧形成。 <回度的 -A #三態樣，係在上述第_態樣中，接液部係設於载物 口側面附近。形成於接液部的開σ係形成於载物 的至少下方。 w •帛四態樣，係在上述第三態樣中，基板係以覆蓋到妒 的接液部的上面的一部份的上方之方式載置於载 第五態樣，係在上述第一態樣中，塗覆裝置且 =喷嘴移動機構係使複數個喷嘴-體地錢^ ^ /形成於接液部的上面之開口，係在沿著橫斷方 垂:ί::::台上離開的位置之複數個喷嘴的前端部的 複數與該横斷方向平行之狹縫狀，且可讓 、斤17出的所有液柱狀態的塗覆液同時通過之形 317516 8 1295196 狀形成。 八f "、悲^ ’係在上述第一態樣中，塗覆裝置係具備有 刀另1在载物台之相對的兩個側面附近沿著橫斷方向而設的 兩個接液邱。# ° 载物台係可在與橫斷方向垂直之水平方向移 動。 曰）依〜上述第—態樣，由於接液部的上面並不是開放而 口 / 有σ以液柱狀態吐出之塗覆液可通過之狹縫狀的開 藝的_ 口此可防止吐出至接液部内之塗覆液再向上飛到外部 二二:。因而’不會有吐出至載物台外的塗覆液落下並附 置於δ亥载物台的基板上之情形，可防止塗覆不良。 验、二,知上述第二態樣，由於可用設在載物台外的接液部 != 爾柱的狀態回收，因此不會有塗覆液液滴化或 产形、^形，可防止液滴化或霧化的塗覆液飛到基板上之 依知上述弟三態樣’可確實回收吐出至載物台外的塗 ►復液’同時防止載置於載物台上的基板與接液部之干涉。 依照上述第四態樣’由於基板载置成與接液部之上面 的一部份重疊，因此可確實回收吐出至基板外的塗覆液。 :照上述第五態樣，即使在使用複數個喷嘴 覆至基板之裝置中，亦可防止吐出至接液部内 麵部的情形。因而，不叫 外的皇极液洛下亚附者於载置於該載物台的基板 形，可防止塗覆不良。 『月 依照上述第六態樣，重複使吐出塗覆液的喷嘴在横斷 317516 9 1295196 削:台的方向移動至一侧的接液部上後，使載物台移動預 疋置，再使吐出塗覆液的喷嘴在橫斷載物台的方向移動至 另一侧的接液部上，即可對於基板面以條狀塗覆塗覆液。 本發明之上述及其他的目的、特徵、態樣、效果，… 對照添附圖式之以下的詳細說明將變得更加清楚。攸 【實施方式】 以下 、 圖式說明本發明一實施形態之塗覆裝置。 為使說明具體化，㈣該塗覆裝置應用於製造有機肛龜 示裝置的裝置之例子進行以下的說明。製造有機el顯： 裝置的裝置，係在載置於載物台上的玻璃基板上將有機豇 =料塗覆成預定的圖案形狀以製造有機EL顯示裝置者。 第1圖係顯示有機EL顯示裝置的製造裝置的要部概羞 成之平面圖及正面圖。 第1圖中，有機EL顯示裝置的製造裝置丨係大致具 備有基板載置裝置2以及有機肛塗覆機構5。有機= 覆機構5具有喷嘴移動機構部51、嘴嘴單元52、及接液；1295196 ^ · IX. DESCRIPTION OF THE INVENTION: TECHNICAL FIELD OF THE INVENTION The present invention relates to a coating apparatus, and more particularly, to discharging a coating liquid in a liquid column state from a nozzle to a stage. The substrate is placed to coat the coating device. [Prior Art] Conventionally, various coating apparatuses for applying a coating liquid to a substrate to be processed, etc., have been developed. For example, Japanese Patent Laid-Open Publication No. Hei. No. 2 (hereinafter referred to as Patent Document 1) discloses a coating applied to the outside of a substrate in order to recover a coating liquid applied to a substrate. a liquid or an unnecessary coating liquid, and a liquid receiving portion is provided on the outer edge portion of the substrate. The liquid receiving portion disclosed in the above Patent Document i is along the outer edge of the substrate in such a manner that more developing liquid can be recovered. In addition, there is also a coating apparatus which applies a coating liquid to a substrate in a continuous manner while discharging a coating liquid from a nozzle. 歹^In the manufacture of an organic electric field light-emitting display device ( Organic El Display Device) ^ In the middle, the organic EL material is recorded in the shape of the nozzle (the shape of the fourth (4) to the main surface of the substrate such as the glass substrate placed on the stage. When the nozzle moves outside the substrate, the liquid-contacting portion that receives the coating liquid is equipped with a carrier device that is not equipped with an organic 11 display device, and is provided with a carrier, a carrier, a substrate, and a substrate. 101·,,、^ The coated glass nozzle of the EL material is spit out\color; 1 red organic only Red for the blue organic EL ## material green nozzle 103; 卞+ for the color of the nozzle 104; and recycling 317516 5 1295196 to the substrate p outside the organic EL material of the wetted parts Ι〇5. Red organic EL material, attached and ancient & - # ^,, not & 1 shape, beast "the strip formed on the substrate (10) ipe) groove U expands the degree of fluidity _ sexual organic ...the predetermined purchase and flow rate will be organically discharged in a rod shape (hereinafter referred to as a liquid column state) to be applied onto the substrate p. The liquid contact portion 105 is opened on the upper surface and the 酎Μ A | figure shows only one side). The outer sides of the two sides of the plate p (nth:: 02 to 104 are supported by a holding member (not shown) and the holding member and the stage (8) are supported by the organic pull display. The driving mechanism is operated by a predetermined direction (the direction of the strip-shaped groove formed on the substrate p, also in the F direction), so that the holding member supporting the nozzle 1 〇 2 〇 4 is ^ In the drive mechanism, the holding member is disposed from the upper portion of the liquid contact portion 10 5 disposed on the outer side of the substrate p, and the door is γ# The substrate ρ is reciprocally moved to the upper space of the =! portion 105 of the substrate 。. Further, the slaving mechanism is disposed on the upper portion of the liquid receiving portion 1〇5 of the holding member. The direction of the pre-paper surface perpendicular to the reciprocating direction is moved by a predetermined pitch. If the action of I is from the nozzles 102 to 1〇4, the organic EL and the material are discharged in the liquid column state, that is, 佶.. _ A strip arrangement is formed on each of the strip-shaped grooves in the red, final and aged color= and color-adjusting organic EL material P. The order of the one color is arranged, that is, the coating on the substrate, the night adjacent H = liquid column state The liquid is discharged to the outside of the substrate p. There are problems as described below. The distance hl+h2 of the nozzles 102 to 104 317516 6 ^ 95196 = the sump portion H) 5 is made longer, and the ί which is originally in the liquid column state is dropletized by the surface tension. For example, the distance hl from the :: portion of the nozzles (10) to (10) to the substrate ρ can be set to 〇25 to 〇5〇_ U to ensure the distance of the liquid column state, but the distance hi+h2 is programmed to 2: 1 : It is difficult to prevent droplets from being adjusted by the force of the spit and the adjustment of the flow rate. i. When the shellfish 觜1〇2 to 1〇4 are moved at a high speed in the F direction, the coating liquid which is determined to be dropletized is more split into a fine mist. The coating liquid which is moved to the space behind the (10) to form a negative pressure 2 will fly upward to the vicinity of the nozzles 1〇2 to 1〇4. As a result, the mist-like coating liquid generated outside the earth plate P falls on the substrate p and adheres to the upper surface of the substrate P, which causes a coating failure. - Even if the above-mentioned organic EL display device manufacturing apparatus employs the liquid contact of the above-mentioned patent document in the vicinity of the soil, it is possible to collect as much as possible of the coating liquid, the six-two, and the L-U The same problem occurs when the upper portion of the portion is opened or the liquid inlet κ is large, and the same droplet formation and atomization occur inside the liquid receiving portion. SUMMARY OF THE INVENTION Accordingly, it is an object of the present invention to provide a coating liquid in a liquid column state to be applied to a certain IV coating, and the coating liquid discharged to the outside of the substrate does not affect the substrate. Coating device. ί = For the above purposes, the present invention has the features described below. 2 core I is a soil-recovering liquid in a state of a straight-line straight rod-shaped liquid column, which is discharged onto a substrate, and the coating system coated with the coating liquid is provided with a nozzle, a stage, and a nozzle moving mechanism (10) 317516 7 1295196 The nozzle discharges the coating liquid from the front end portion in a liquid column state. The stage mounts the US board on it. The space in which the nozzle moving mechanism is attached to the stage causes the nozzle to reciprocate in a direction transverse to the stage. The liquid receiving portion receives the coating liquid discharged from the Yanhai nozzle to the outside of the stage when the nozzle = moving mechanism moves the nozzle in the transverse direction to the position away from the stage. The upper surface of the liquid contact portion is formed at a position vertically below the front end portion of the nozzle disposed at a position apart from the stage in the transverse direction, and is parallel to the transverse direction: a slit-shaped opening π 'to pass The opening recovers the liquid-column coating liquid discharged from the nozzle. In the second aspect, in the first aspect, the coating liquid formed in the liquid contact portion and discharged from the mouthpiece starts from the liquid column state and is formed on the nozzle side. <The -A # three-state of the degree of return, in the above-described _th aspect, the liquid contact portion is provided near the side of the load port. The open σ formed in the liquid contact portion is formed at least below the load. w • 帛 four-state, in the third aspect described above, the substrate is placed on top of the upper portion of the liquid-receiving portion of the crucible, and is placed on the fifth aspect, In the aspect, the coating device and the nozzle moving mechanism cause a plurality of nozzles to be formed on the upper surface of the liquid receiving portion, and are hanged along the transverse line: ί:::: The plurality of nozzles at the position of the exit are formed in a slit shape parallel to the transverse direction, and the coating liquid in the liquid column state of the plurality of nozzles can be simultaneously formed into a shape of 317516 8 1295196. In the first aspect described above, the coating device is provided with two liquid-contacting liquids provided in the transverse direction near the opposite sides of the opposite sides of the stage. . # ° The stage system can be moved horizontally perpendicular to the transverse direction.曰) According to the above-mentioned first aspect, since the upper surface of the liquid-contacting portion is not open, the coating liquid which is spouted by the liquid/sludge in the state of the liquid column can pass through the slit-shaped opening _ mouth to prevent the discharge to The coating liquid in the liquid receiving portion then flies up to the outside. Therefore, there is no case where the coating liquid discharged to the outside of the stage is dropped and attached to the substrate of the ?-stage stage, and the coating failure can be prevented. Inspection and second, knowing that the second aspect described above can be recovered by using the state of the liquid contact portion provided outside the stage! = the column, so that there is no droplet formation or formation of the coating liquid, which prevents it from being formed. The dropletized or atomized coating liquid flies onto the substrate. According to the above-mentioned three-dimensional pattern, it is possible to surely recover the coating and coating liquid discharged to the outside of the stage while preventing the substrate and the substrate placed on the stage. Interference of the wetted parts. According to the fourth aspect described above, since the substrate is placed to overlap with a portion of the upper surface of the liquid contact portion, the coating liquid discharged to the outside of the substrate can be surely recovered. According to the fifth aspect described above, even in a device in which a plurality of nozzles are applied to the substrate, it is possible to prevent the discharge to the face inside the liquid receiving portion. Therefore, the non-external Emperor's liquid is attached to the substrate of the stage to prevent coating failure. 『In accordance with the above sixth aspect, the nozzle for discharging the coating liquid is repeatedly moved to the liquid contact portion on one side in the direction of the 317516 9 1295196 traverse: the stage is moved, and then the stage is moved and pre-positioned. The nozzle for discharging the coating liquid is moved to the liquid contact portion on the other side in the direction across the stage, so that the coating liquid can be applied to the substrate surface in stripes. The above and other objects, features, aspects and advantages of the present invention will become more apparent from EMBODIMENT Hereinafter, a coating apparatus according to an embodiment of the present invention will be described with reference to the drawings. In order to clarify the description, (4) an example in which the coating apparatus is applied to an apparatus for manufacturing an organic anal tortoise device will be described below. The apparatus for manufacturing an organic EL display device is a method of manufacturing an organic EL display device by coating an organic ruthenium material into a predetermined pattern shape on a glass substrate placed on a stage. Fig. 1 is a plan view and a front view showing the main parts of the manufacturing apparatus of the organic EL display device. In the first embodiment, the manufacturing apparatus of the organic EL display device has substantially the substrate mounting device 2 and the organic anal coating mechanism 5. The organic = covering mechanism 5 has a nozzle moving mechanism portion 51, a nozzle unit 52, and a liquid connection;
53。嘴嘴移動機構部51具有導引構件511延設於圖示X 軸方向，使喷嘴單元52沿著導引構件511在圖示χ軸方 向移動。喷嘴料52係以使分別吐出紅、綠及藍色的 队材料的喷嘴521至523並設的狀態保持嘴嘴切至 523。紅、綠及藍色的有機EL材料從各供給部（參照第 圖）供給至各喷嘴521至523。 基板載置臬置2具有載物台2卜迴旋部22、 台23、接受導引部24、及導引構 干订&動 于7丨偁仟25。載物台21將作為 317516 10 1295196 破塗覆體之玻璃基板等的基板P載置於其上面。載物a u 的下部由迴旋部22所支持，職載物纟21可藉由4 的旋轉動作而在圖示Θ方向轉動之構成。此外，载物△ 的内部設有用以在載物台面上對塗覆有有機EL材料： 基板P進行預備加熱處理之加熱機構。 導引構件25以通過有機EI^塗覆機構5的下方 延設並固定於與上述X軸方向垂直之圖示γ抽方向二 Ζ動台U的下面固設有與導引構件25抵接 ： 25上滑動之接受導引部W。另外，平行移動台⑽= :Π=22。因此’平行移動台23可接受來自例如 、指馬達（未圖示）的驅動力而在沿著導引構件Μ ^方向移動，迴旋部22所支持的載物台21亦因而=移 在載物。21上载置有基板j>，且平行移動△ 2 至有機EL塗覆機構5的 口夕 ⑼至523接受°亥基板ρ即到達從喷嘴 又' 、、亲及監色的有機材料的塗覆之位 使喷:Γ單元空參照第2圖)控制噴嘴移動機構部51以 料。另外，在噴嘴521至:土出預定流量的有機虹材 出載物台2!所载置的 、X轴方向吐出位置中，超 嘴移動機構部51係使喷嘴接液部饥及训。喷 吏貧早兀52從配設於基板p的一邊 317516 11 1295196 =接液。卩53的上部空間橫斷基板p到配設於基板p ^另^外側之接液部53的上部空間而往復移動。此外， 動。23在貝嘴單元52配置於接液部53的上部空間 一使載物口 21在與喷嘴往復移動方向垂直的預定方向 二Υ軸方向)移動預定的節距。與如此之喷嘴移動機構 :1及平行移動台23的動作同時從噴嘴52…23以液 ==出有機EL材料，即在基板ρ上形成紅、綠及藍 h、、機#EL材料在形成於基板Ρ的各個條狀的溝槽以 、’工、W、監色的順序配列之所謂的條狀配列。 之二著’參照第2圖說明有機EL顯示裝置的製造裝置1 的概略構成。第2圖係顯示有機EL顯示裝置 的衣造裝置1的控制機能之方塊圖。 第2圖中，有機EL顯示裝置的製造裝置1係上 述：構成部之外，還具備有控制部3、第i供給部54a、第53. The nozzle movement mechanism portion 51 has a guide member 511 extending in the X-axis direction shown in the drawing, and moves the nozzle unit 52 along the guide member 511 in the direction of the axis of the drawing. The nozzle material 52 holds the nozzles 523 in a state in which the nozzles 521 to 523 of the team materials for discharging red, green, and blue are respectively discharged. Red, green, and blue organic EL materials are supplied to the respective nozzles 521 to 523 from the respective supply portions (see the drawings). The substrate placing unit 2 has a stage 2, a turning portion 22, a table 23, a receiving guide portion 24, and a guide structure & The stage 21 is placed on the substrate P as a glass substrate of the 317516 10 1295196 coated body. The lower portion of the load a u is supported by the turning portion 22, and the load member 21 can be rotated in the direction of the figure by the rotation of 4. Further, inside the load Δ, a heating mechanism for performing preliminary heat treatment on the substrate surface with the organic EL material: substrate P is provided. The guide member 25 is fixed to the lower surface of the organic EI coating mechanism 5 and fixed to the lower surface of the yoke-drawing second turret U perpendicular to the X-axis direction, and is fixed to the guide member 25: The receiving guide W is slid on the 25th. In addition, the parallel mobile station (10) = : Π = 22. Therefore, the 'parallel moving stage 23 can receive the driving force from, for example, a motor (not shown), and moves along the guiding member , ^ direction, and the stage 21 supported by the turning portion 22 is thus shifted to the carrying object. . 21 is placed on the substrate j>, and the parallel movement Δ 2 to the organic EL coating mechanism 5 (9) to 523 is received by the substrate ρ, that is, the coating of the organic material from the nozzle and the color is controlled. The position of the nozzle: Γ unit empty reference to Fig. 2) controls the nozzle moving mechanism portion 51 to feed. Further, in the X-axis direction discharge position where the nozzle 521 to the organic rainbow material output stage 2! at which the predetermined flow rate of the soil is placed, the nozzle moving mechanism portion 51 hung the nozzle liquid contact portion. The sputum is poorly cooled from the side of the substrate p 317516 11 1295196 = liquid. The upper space of the crucible 53 crosses the substrate p to the upper space of the liquid contact portion 53 disposed outside the substrate p^, and reciprocates. In addition, move. 23, the beak nozzle unit 52 is disposed in the upper space of the liquid contact portion 53, and moves the predetermined pitch by the carrier port 21 in a predetermined direction perpendicular to the direction in which the nozzle reciprocates. With the action of the nozzle moving mechanism: 1 and the parallel moving table 23, the organic EL material is discharged from the nozzles 52...23 with the liquid ==, that is, red, green and blue h are formed on the substrate ρ, and the machine #EL material is formed. The respective strip-shaped grooves of the substrate 配 are arranged in a so-called strip arrangement in the order of 'work, W, and color. Second, the schematic configuration of the manufacturing apparatus 1 of the organic EL display device will be described with reference to Fig. 2 . Fig. 2 is a block diagram showing the control function of the clothes making device 1 of the organic EL display device. In the second aspect of the invention, the manufacturing apparatus 1 of the organic EL display device includes the control unit 3, the i-th supply unit 54a, and the
色H^54b以及I 3供給部％。第1供給部54&係將紅 I色的有機EL材料供給至紅色用的喷嘴52ι。帛W 州係將綠色的有機虹材料供給至綠色用:第 弟1 U 54a具備有：紅色的有機EL材料之供 =5仏、用以從供給源5仏取出紅色的有機EL材料^ 韦浦542a、檢測紅色的有機EL材料的流量之泣旦 54=以及用以除去紅色的有機EL材料中的異物:二 P供給部糾具備有：綠色的有機EL材料I 供給源遍、用以從供給源541b取出綠色的 317516 12 1295196 · 之幫浦542b、檢測綠色的有機此材料 呈 543b、以及用以除去綠色的 爪里之机里叶 器顺。第3供給部54c具^有EL/才料中的異物之過濾 供給源池、用以從供給源54lc取出藍色 才:之 之幫一檢測藍色的有心 ⑷c、以及用以除去藍色的有機 === 器544c。而控制部3則控 ，物之過遽 迴旋部22、平行移動△ 23 弟3么、給部54a至54c、 構件的動作。 3' Μ喷嘴移動機構㈣等各 要接受紅、綠及藍色的有機&材 & 的表面，形成有複數條要塗覆 =之基板Ρ 定的圖案一之並設的條狀溝 材料，係採用例如具有 ρ : 用口色之雨刀子類型的有機扯材料知 成可繞著預定的支持輛轉動自如、早^被支持 使嘴嘴單元52繞該支持軸轉之控制 間隔。另外，喷嘴521至 了兩正Q色之塗覆節距 孔徑為比形成於基板P之溝;:出:：扯材料之 大小，例如H)至7〇Am。）是们、之數十㈣程度之 控制部3根據载置於载物台Μ之基 向來调整迴旋部22 Μ & 、 置、方 向朝向上相於之溝槽的方 ⑽叫，亦即在形成於°且异出塗覆的開始點（start 、土板P之溝槽的一端部侧開始進行 317516 13 1295196 塗覆之塗覆開始位置。此塗覆開始位置即在一侧的接液部 —^上°卩'^間。然後，控制部3以如上所述的方式驅動平 们'移動台23及喷嘴移動機構部51。 在上述塗覆開始位置，控制部3指示各幫浦至 立要開始攸各贺嘴521至523吐出有機EL·材料。此時，Color H^54b and I3 supply part%. The first supply unit 54 & supplies the organic EL material of red I color to the nozzle 52ι for red.帛W State Department supplies green organic rainbow material to green: The first brother 1 U 54a has: red organic EL material supply = 5 仏, used to extract red organic EL material from the supply source 5 ^ Weipu 542a, detecting the flow rate of the red organic EL material, and the foreign matter in the organic EL material for removing red: the second P supply unit is provided with: a green organic EL material I is supplied to the source, and is supplied from the source The source 541b takes out the green 317516 12 1295196 · the pump 542b, detects the green organic material 543b, and removes the green claws in the machine. The third supply unit 54c has a filter supply source pool for foreign matter in the EL/material, and is used for taking out the blue color from the supply source 54lc: a blue heart (4)c, and a blue color removal. Organic === 544c. On the other hand, the control unit 3 controls the movement of the object, the turning portion 22, the parallel movement Δ23, the feeding portions 54a to 54c, and the members. 3' Μ nozzle moving mechanism (4), etc. The surface of each of the organic, ampere-and-blue materials to be red, green, and blue is formed, and a strip-shaped groove material is formed by a plurality of patterns to be coated with the substrate. For example, it is known that the organic tear material having the type of ρ: a rain knife of the mouth color is rotatable around a predetermined support vehicle, and is supported by a control interval for the nozzle unit 52 to rotate around the support shaft. Further, the nozzle pitch of the nozzle 521 to the two positive Q colors is larger than that of the groove formed on the substrate P; the size of the material: e.g., H) to 7 〇 Am. The control unit 3 of the tens of degrees (fourth) is adjusted according to the base direction placed on the stage Μ, and the side (10) of the groove is oriented toward the upper phase, that is, Formed at ° and the start point of the coating (start, the one end side of the groove of the soil plate P starts the coating start position of 317516 13 1295196 coating. This coating start position is the liquid contact portion on one side. Then, the control unit 3 drives the "mobile station 23 and the nozzle moving mechanism portion 51" as described above. At the above-described coating start position, the control unit 3 instructs each pump to stand. To start the organic EL materials in the mouthpieces 521 to 523. At this time,
# 係依恥贺嘴521至523的移動速度而控制有機EL t二设里，且從流量計543&至543C回授得到流量資 ，：仃控制’以使有機EL材料在條狀溝槽之各點的塗 = 以及使有機EL材料以液柱狀態吐出。然後， i = 、材㈣入基板P上的溝槽内，控制部3以 使有機扯材料邊沿著基板p上的^^進订控制，以 藉由此動作，使以液柱狀態 内。#系控制 The organic EL t2 setting in accordance with the moving speed of the shame mouths 521 to 523, and the flow rate is obtained from the flow meters 543 & 543C to: 仃 control 'to make the organic EL material in the strip groove Coating at each point = and discharging the organic EL material in a liquid column state. Then, i = , material (4) enters the groove in the substrate P, and the control portion 3 controls the edge of the organic material along the substrate p to perform the operation in the liquid column state.
材料同時流入各構槽。 出…、彔及監色的有機EL 況下，使由材料的吐出繼續的情 使由貝“夕動機構部51所帶動之 =藉由如此之-次的移動，完成對於3列份的 之有钱EL·材料的塗覆。 J 1刀的/冓才曰 接著，控制部3使平行移動台23 列溝槽份㈣距，以進行對於下3 =向移動3The material flows into the various grooves at the same time. In the case of an organic EL in which the sputum and the smear are carried out, the spurt of the material is continued. The coating of the rich EL material. The J 1 knife/曰, then, the control unit 3 causes the parallel moving table 23 to divide the groove (four) to perform the movement for the lower 3 = direction 3
材料的塗覆。然後，控制部3在喷 之有機EL 接液部53的上部空間朝# a ^彳心该另一侧的 _反方向橫斷基板p的上方後位 317516 14 1295196 於該一側的接液部53 f太士 EU料的吐出繼續情^贺° 521至523之有機 帶動之喷嘴單元52之移 動，完成對於下3列严二糟由如此之第二次的移 ^ μ&、+、 歹]伤的溝槽之有機EL材料的塗覆。 稷如上所述的動作，使各 ltL , ep ^ , , 7 5俄材科流入各溝槽。 溝槽以红V':及藍色的有機EL材料在各個條狀的 拉从r、監色的順序配列之所謂的條狀配列。 者，茶照第3至7圖說明接液部53。 接液部53的構造之拉相回一 罘3圖係頭不 部份從B方以- 4圖係針對接液部53的- :=圖:；弟3圖的斷面“所見之斷面圖。第5圖 ,、 Θ 方向所見之接液部53的側面概要圖。第6 圖係顯示喷嘴521至523所吐出之有機EL材料與接^6 53的位置關係之斜視圖。第7圖係顯示噴嘴521至523移 動之際之與接液部53的位置_之斜視圖。由於位在载: 台21的兩側之接液部53L及观（參照第！圖）都具有對稱 於載物口 21的相同構造’因此第3圖及第$至7圖係以其 中一個作為接液部53而顯示。 第3圖中，接液部53具備有下段接受部531、上段盒 口 I5 532、狹縫（sht)部533、上段支持構件534、以及局部排 氣部535。 下’又接％部53 1係例如連結至喷嘴移動機構部51，且 口 "又成與喷鳴移動機構部5 1的位置關係恆為固定。下段接 文部531具有上面開放之盒子形狀，且配置成有一部份伸 到載物台21的下部。吐出至下段接受部53丨内部的有機 317516 1295196 由從下段接受部531的最下方位置“的流 路(未圖不)流出而後在排液槽(未圖示)回收。此 受部531内部設有吸引载物台21側面附近空: 部排氣部奶，下段接受部531的上端面固支 盒部532之上段支持構件534。 矛半又 上段盒部532係由上段支持構件534所支持，而固設 Γ下f接受部531的上部空間。上段盒部532具有上面開 之i子形狀’且以覆蓋該上面的方式設有狹縫部切而 封閉該上面。狹縫部533形成有以圖示X轴方向作為並長 縫開口方向之細寬度（例如i至3 m m)的狹縫開口部5 3 3 a。 .如第4圖所示，狹縫部533係如同上段倉部532的罢付 -安裝，且以可從上段盒部532取出之方式丧入。而:，狹又 -縫部533安裝於上段盒部532時，狹縫開口部5仏係發揮 .=為上段盒部532的内部空間與外部空間之間的開孔之 機月匕it匕外’吐出至上段盒部532内部的有機π材料， #係，由從上段盒部532的最下方位置流出的流路（未圖示） 而流至下段接受部531的内部。 狹縫部533的上面係設成與載物台21的上面在約略相 同的向度（參照第5圖之高度幻。上段盒部说以及狹缝部 533之載物台21側前端部係設成在該载物台21的附近盘 遠載物纟成預定的間隙（參照第5圖之間㈣。此外， 狹縫部切係配置成其上面的一部份與在載物台21上載置 成邛伤攸載物台21的側面朝圖示X軸方向突出（參照第 5圖之長度b)之基板p相重疊（參照第5圖之重疊長度c)。 317516 16 I295196 第5圖中，上段盒部532以及狹縫部5%之 側前端部係設成與載物台21例 载物口 為了使载物台22與上段盒部53 &係 物台朝圖示533不會因為载 轉動作相干涉而設，且她4動作或迴旋部22之旋 物A ” 、、 為例如4mm。而且，基板P係在载 σ 21上载置成相對於載物△ 出 _ 戰物口 21的知面朝接液部53侧突 重賴定成使狹縫部533的上面與基板Ρ c — 因此b…C’例如長度b = 5_，重疊長度 c〜lmm。狹縫部533的上 τ又 的端邱弁 為了防止塗復液從基板Ρ 。下沒漏，以設成與载物台21的上面相同高产 佺，惟如上所述载置於载 /又’、、、 韩私m lL '口 之基板P會平行移動及 :、牛’口 b必須防止基板？的下面與狹縫部533的上面之 ^此，狹縫部533的上面係設成比载物台21的上面 ，了…，例如高度d = 〇·5至2 〇酿 疋成使得狹縫部533的上☆认w +此 门覆d 3又 ^右播ft ^ 從贺嘴521至523吐出的 ►有械EL材料的液柱狀態 到本發明之效果。 力衣之间度的上方，即可得 卜、、雖針對為了防止基板Ρ的下面與狹縫部533的 之干涉’而將狹縫部533的上 & 的上面叹成比载物台21的上 Π 的一個例子作了說明，不過若效果不如預 度亦可。Si: 在載物台21的上面以上的高 Λ、、、、口P 533的上面設得至少比喷嘴521至523 的則端部低，即可得財發明之效果。 接著，參照第6圖說明喷嘴521纟523與接液部53 317516 17 -的位置關係。第6圖係主要針對嘴嘴521至切、接液部 .53、以及基板p而顯示，其他的部位則省略圖示。如上所 =對基板P塗覆有機EL材料之際，在塗覆開始及終了 時點、或X軸方向折返時點等，喷嘴521至523係配置在 f液部5 3的上部空間。此時，噴嘴5 2 i至5 2 3係'向著接液 邛53的上面吐出液柱狀態的有機材料。 接液部53係設成：喷嘴521 1 523移動至接液部53 =上部空間時’從該喷嘴521至523吐出的有機虹材料 冒通過狹縫開口部533a而落到上段盒部532的内部。亦 即’接液部53所形成的狹縫開口部5仏係涵蓋喷嘴切 ‘至523朝X軸方向移動到基板p外之際所有該喷嘴切至 23之鈾鳊# (吐出口）的正下方位置。因而，喷嘴521至 _ 523的私動方向（χ軸方向）與狹縫開口部切&的長縫形成 .f向（X軸方向）平行，且在相對於喷嘴521至523的前端 邛之Z軸下方向形成狹缝開口部533a。此處，喷嘴52丨至 • 523係為了同時向在X軸方向並列之3列份的溝槽塗覆有 機EL材料而配置成在圖# γ車由方向作若干偏置（例如 〇.36mm)t。狹縫開口部533a係具有讓從喷嘴521至523以 液柱狀心、吐出之有機EL材料全部通過之寬度，而以例如1 至3mm的寬度形成。Coating of materials. Then, the control unit 3 traverses the upper side of the substrate p in the upper space of the organic EL liquid contact portion 53 which is sprayed toward the other side, and the upper portion of the substrate 317516 14 1295196 is connected to the liquid receiving portion on the one side. 53 f ethiopia EU material spit out continues to love ^ ° ° 521 to 523 organically driven nozzle unit 52 movement, complete for the next three columns of strict second such shift ^ μ &, +, 歹] Coating of the organic EL material of the damaged trench.稷The action described above causes each ltL, ep ^ , , 7 5 Russian material to flow into each groove. The groove is a so-called strip-like arrangement in which the red V': and the blue organic EL material are arranged in the order of each strip from the order of r and color. The liquid contact portion 53 will be described with reference to Figs. 3 to 7 of the tea. The structure of the liquid-repellent portion 53 is pulled back to the bottom of the figure. The head of the system is not partially from the B side. The -4 figure is directed to the liquid-contacting portion 53 - := Figure: Fig. 5 is a schematic side view showing the liquid contact portion 53 as seen in the Θ direction. Fig. 6 is a perspective view showing the positional relationship between the organic EL material discharged from the nozzles 521 to 523 and the connector 65. Fig. 7 The oblique view of the position of the liquid contact portion 53 when the nozzles 521 to 523 are moved is displayed. Since the liquid contact portions 53L and the view (refer to the Fig!) positioned on both sides of the stage 21 are symmetrically loaded The same structure of the object opening 21 is shown in Fig. 3 and Fig. 7 to Fig. 7 as one of the liquid receiving portions 53. In Fig. 3, the liquid receiving portion 53 is provided with a lower receiving portion 531 and an upper opening I5 532. a slit portion 533, an upper support member 534, and a partial exhaust portion 535. The lower '% connected portion 53 1 is connected to, for example, the nozzle moving mechanism portion 51, and the mouth is further connected to the squirting moving mechanism. The positional relationship of the portion 51 is constant. The lower portion 531 has a box shape that is open on the upper side, and is disposed to have a portion extending to the lower portion of the stage 21. 53 Shu into the internal lower receiving portion and then the organic 3175161295196 (not shown) is recovered from the lowermost position of the lower receiving portion 531 'of the outflow channel (not not) in the exhaust tank. The receiving portion 531 is provided with a portion near the side surface of the suction stage 21: a portion of the exhaust portion milk, and an upper end portion of the lower receiving portion 531 is fixed to the upper portion of the box portion 532. The upper half of the spear portion 532 is supported by the upper support member 534, and the upper space of the lower f receiving portion 531 is fixed. The upper box portion 532 has an i-sub-shape "opened thereon" and is provided with a slit portion to cover the upper surface. The slit portion 533 is formed with a slit opening portion 5 3 3 a having a thin width (for example, i to 3 m m) in the X-axis direction as the slit opening direction. As shown in Fig. 4, the slit portion 533 is disengaged as the upper portion of the upper portion 532, and is detached from the upper portion 532. On the other hand, when the narrow-seam portion 533 is attached to the upper box portion 532, the slit opening portion 5 functions as a function of opening the hole between the inner space and the outer space of the upper box portion 532. The organic π material that has been discharged to the inside of the upper casing portion 532, the # system, flows into the lower receiving portion 531 by a flow path (not shown) that flows out from the lowermost position of the upper casing portion 532. The upper surface of the slit portion 533 is approximately the same as the upper surface of the stage 21 (see the height of the fifth drawing). The upper portion of the box portion and the front end portion of the slit portion 533 on the stage 21 side are connected. In the vicinity of the stage 21, the disk is loaded with a predetermined gap (see Fig. 5 (4). Further, the slit portion is arranged such that a portion thereof is placed on the stage 21 and placed on the stage 21. The side surface of the scar stage 21 is superposed on the substrate p which protrudes in the X-axis direction (see the length b of Fig. 5) (see the overlap length c in Fig. 5). 317516 16 I295196 In Fig. 5, the upper box The portion 532 and the side end portion of the slit portion 5% are provided so as to be opposite to the carrier port of the stage 21, so that the stage 22 and the upper case portion 53 & Interference is provided, and the rotation A" of the motion of the fourth or the gyro 22 is, for example, 4 mm. Further, the substrate P is placed on the carrier σ 21 so as to face the object Δ out The liquid-receiving portion 53 side is slid so that the upper surface of the slit portion 533 and the substrate Ρ c - therefore b...C', for example, the length b = 5_, and the overlap length c l1 mm. In order to prevent the coating liquid from leaking from the substrate, the end portion of the upper portion τ of the slit portion 533 is set to be as high as the upper surface of the stage 21, but is placed on the carrier as described above. The base plate P of the Korean private m lL 'port will move in parallel and: the cow's mouth b must prevent the lower surface of the substrate from the upper surface of the slit portion 533, and the upper surface of the slit portion 533 is set to be larger than the stage 21 The upper part, ..., for example, the height d = 〇·5 to 2, the brewing 疋 使得 使得 狭缝 533 533 533 533 533 533 533 533 533 533 533 533 533 533 533 533 从 从 从 从 从 从 从 从 从 从 从 从 从The liquid column state of the mechanical EL material is the effect of the present invention. The upper portion of the force-coating degree can be obtained, and the upper portion of the slit portion 533 is formed to prevent the lower surface of the substrate 与 from interfering with the slit portion 533. The upper surface of the & sigh is described as an example of the upper cymbal of the stage 21, but the effect is not as good as the premise. Si: sorghum, s, and port P 533 above the upper surface of the stage 21. The upper surface is set to be at least lower than the end portions of the nozzles 521 to 523, so that the effect of the invention can be obtained. Next, the nozzle 52 will be described with reference to FIG. The positional relationship between the first 523 and the liquid receiving portion 53 317516 17 -. Fig. 6 is mainly displayed for the nozzle 521 to the cutting portion, the liquid contact portion .53, and the substrate p, and other portions are omitted. When the organic EL material is applied to the substrate P, the nozzles 521 to 523 are disposed in the upper space of the f liquid portion 53 at the point of the start and end of the coating or the point of returning in the X-axis direction. At this time, the nozzle 5 2 i The organic material in the state of the liquid column is discharged to the upper surface of the liquid helium crucible 53 to 5 2 3 . The liquid contact portion 53 is configured such that when the nozzles 521 1 523 move to the liquid contact portion 53 = the upper space, the organic rainbow material discharged from the nozzles 521 to 523 falls into the upper portion of the upper casing portion 532 through the slit opening portion 533a. . That is, the slit opening portion 5 formed by the liquid-receiving portion 53 covers all of the uranium 鳊# (discharge outlet) of the nozzle cut to 23 when the nozzle cuts to 523 in the X-axis direction and moves outside the substrate p. Below position. Therefore, the direction of the private movement of the nozzles 521 to 523 (the direction of the x-axis) and the slit formation of the slit opening portion are formed in parallel with the (X-axis direction), and are at the front end with respect to the nozzles 521 to 523. A slit opening portion 533a is formed in the Z-axis downward direction. Here, the nozzles 52A to 523 are arranged such that the organic EL material is applied to the grooves of the three rows in the X-axis direction at the same time, and is arranged to be offset (for example, 3636 mm) from the direction of the figure γ. t. The slit opening portion 533a has a width that allows all of the organic EL material to be discharged from the nozzles 521 to 523 as a liquid columnar core, and is formed to have a width of, for example, 1 to 3 mm.
此處，係將嘴嘴⑶至523的前端部到基板p上面的 距離設定成可保證液柱狀態的距離，以使得對於基板p之 有機E L材料的塗覆能保持液柱狀態而吐出至基板p。另一 方面如上所述狹縫部533的上面係設定得比載物台U 317516 18 1295196 的上面低右干，且基板p的上面與狹縫部別的上面 = ?常小。具體而言，基板P的厚度+高度“ 圖）即為雙方的高度差。因而，由於基板p與狹缝部 的上面的高度差極小’因此只要調整喷嘴521至切 的吐出壓力或流量，有機EL材料即可能以保持著液柱狀 恶的狀態通過狹縫開口部533a。亦即，能以在基板p 吐出的有機EL材料不會液滴化的狀態在狹縫部印及上 段盒部532回收。再者，上段盒部532的上面係以只有呈 土出之有機EL材料要通過的部份才 口之狹縫部533蓋住，因此吐出至上段盒部切内之有^ EL材枓便會不再向上飛到外部地往下部接受部別流動。 空二！二圖：示喷嘴521至523配置於接液部53的上部 貞521至523就朝屬於X軸方向之圖示C方 二〜移動（第7圖）。如第7圖所示，喷嘴5 5 21至5 2 3吐出之有應p 了 n水士古丨 柱狀態通過狹縫開口部533a、、而口 =至基板p上都以液 μ ' + °卩533a而回收至上段盒部532。 二二5…3朝圖示c方向高速移動的情況，有液 成：有機EL材料的話就會分裂成更微 成務狀的有機EL·材料會因產生於喷嘴521 又 負壓的影響而向上飛到喷嘴521至523的附、斤。2月後的 於吐出至基板P之外的有機 ^ 由 至上段金部532,因此不奋^ f王相液柱狀態回收 如上所、+、 , ^ θ毛生上述之向上飛起的情形。 所述，本貫施形態之塗覆褒置由於可用設在基板 317516 19 1295196 · 液滴：：：恥塗覆液以液柱的狀態回收，因此塗覆液不會 並附著1^ ^而，不會有吐出至基板外的塗覆液落下 w 土板上的情形，可防止塗覆不良。 此外’由於如第5圖所示在基板p的上面與狹縫部533 5 Μ 2間开乂成同度d之間隙’因此吐出至狹缝開口部 隙而的端面附近之有機EL材料有可能通過該間 二向：物台21的側面方向流出。然而，下段接受部531 二u吸引载物台21側面附近空間的氣 參照第3圖)，可吸引而回收如上述之無法： 上奴是部532之有機EL材料。 另外，上段盒部532白勺内部以可取出的方式嵌入有狭 縫W33,因此使用者將狹縫部533取出即可 段盒部切的内部。不過，為了自動化進行清掃等之^蔓 作業，亦可適當地使沖洗液從未圖示的流入通路流至 盒部532的内部。藉由如上述之使沖洗液流至上段盒部切 …勺内部’除了上述之自動洗淨效果外，還可得到:出至上 段盒部532内之有機EL材料與沖洗液混合後不 外部之效果。 第8圖係用以說明狹缝部533的另一個例子之從以 向看弟3圖之斷面A-A所見的斷面圖。如筮 一 , 吊δ圖所示，可 形成於狹縫部533之狹縫開口部533a形成向下的折入部 533b。藉此，可更加得到吐出至上段盒部532Here, the distance from the front end portion of the nozzles (3) to 523 to the substrate p is set to a distance that can secure the liquid column state, so that the coating of the organic EL material for the substrate p can be spouted to the substrate while maintaining the liquid column state. p. On the other hand, as described above, the upper surface of the slit portion 533 is set to be lower than the upper surface of the stage U 317516 18 1295196, and the upper surface of the substrate p and the upper surface of the slit portion are always small. Specifically, the thickness + height "figure" of the substrate P is the difference in height between the two. Therefore, since the height difference between the substrate p and the upper surface of the slit portion is extremely small, it is only necessary to adjust the nozzle 521 to the cutting discharge pressure or flow rate, and organic The EL material may pass through the slit opening portion 533a in a state in which the liquid columnar state is maintained. That is, the organic EL material discharged from the substrate p can be recovered in the slit portion and the upper cassette portion 532 without being dropletized. Furthermore, the upper portion of the upper box portion 532 is covered by the slit portion 533 of the portion of the upper portion of the organic EL material that is passed through, so that the EL material is discharged into the upper portion of the box portion. It is no longer flying upwards to the outside to the lower part receiving part. Empty 2! 2: The nozzles 521 to 523 are disposed at the upper portion 贞 521 to 523 of the liquid receiving portion 53 toward the X-axis direction. Move (Fig. 7). As shown in Fig. 7, the nozzles 5 5 21 to 5 2 3 are discharged, and the state of the water is passed through the slit opening portion 533a, and the mouth = to the substrate p. All are recovered to the upper box portion 532 by the liquid μ ' + ° 卩 533a. 22 2...3 toward the c direction In the case of rapid movement, there is a liquid: in the case of an organic EL material, the organic EL material which is split into a finer shape will fly upward to the nozzles 521 to 523 due to the negative pressure generated by the nozzle 521. After 2 months, the organic matter from the outside of the substrate P is discharged to the upper gold portion 532. Therefore, the state of the liquid phase column is not recovered, and the above-mentioned, +, , ^ θ hairs are raised upward. The coating device of the present embodiment is recovered in the state of the liquid column by using the liquid droplets provided on the substrate 317516 19 1295196. The coating liquid does not adhere to the surface. There is no possibility that the coating liquid discharged to the outside of the substrate falls on the w-soil plate, and the coating failure can be prevented. Further, since it is opened between the upper surface of the substrate p and the slit portion 533 5 Μ 2 as shown in Fig. 5 The gap of the degree of d is 'therefore, the organic EL material which is discharged to the vicinity of the end face of the slit opening gap may flow out through the direction of the side of the object table 21. However, the lower receiving portion 531 attracts the load. Refer to Figure 3 for the gas in the space near the side of the table 21, which can be attracted and recovered as described above. Method: The slave is the organic EL material of the part 532. Further, the inside of the upper box portion 532 is fitted with the slit W33 in a removable manner, so that the user can take out the slit portion 533 to cut the inside of the box portion. In order to automate the cleaning operation such as cleaning, the rinsing liquid may be appropriately flowed from the inflow passage (not shown) to the inside of the casing portion 532. The rinsing liquid is flowed to the upper casing portion as described above. In addition to the above-described automatic washing effect, it is also possible to obtain an effect that the organic EL material discharged into the upper box portion 532 is not externally mixed with the rinsing liquid. Fig. 8 is a view for explaining another example of the slit portion 533. The cross-sectional view seen from the section AA of the 3rd view of the brother. As shown in Fig. 1, the slit opening portion 533a formed in the slit portion 533 forms a downward folded portion 533b. Thereby, the spout can be further obtained to the upper box portion 532.
有 4幾 EL 材料不易再飛到外部之效果。 在上述的實施形態中，雖以有機EL_示裳置的製造 317516 20 1295196 * 行說明，不過只要是將液柱狀態的塗覆液塗覆 田土板々衣置，本發明亦適用於其他的裝置。例如，亦適 ^^ = (resist)液或s〇G(Spin 〇n g㈣液、正孔輸送 層k復至基板之襄置。 另外’在上述的實施形態中，雖檢測流至喷嘴521至 料的流量而進行將吐出的有機： ㈣力感測器等壓力檢測 吐出的有嘴一 部二=?實！例中：雖對應基板p的下面舆狹缝 535(參，昭第3⑴茶照第5圖)而設置局部排氣部 …弟3圖），不過亦可如第9 ⑽亦即，極力使局部排氣部部 d之間隙而配置。例如，在上段 T度 使局部排氣部535a的配管沿著上段盒二：，間 .側側面向上延言曼。藉此，即可確 。21 回收之有機EL材料。此處，如上:述、，法在上段倉部切 止載物台21朝圖示γ軸方而 a岽a係為了防 旋轉動作所引起的干涉而設，因此或迴旋部的 設於載物台21與上段盒部5 3 2的側面之^ f氣部5 3 5 a 部排氣部伽與载物台21的 況’係將局 要確保相同的重疊長度C的情況，上 设置局部排氣部灿所需的空間 又田一亦可將 又，對應基板。的下面=慮:來:上定面 的上面之間 21 1295196 . 的高度d而如第10圖所示構成局部排氣部535b。如第1〇 圖所示’將上段盒部532的載物台21侧底部及側部形成薄 肉狀，並沿著該薄肉狀的底部配設局部排氣部汕的配 管，以極力使局部排氣部535b的吸引開口靠近高度d之間 而配置。藉此’即可確實回收無法在上段盒部如回收 之有機EL材料。 此外，在上述的實施形態中，雖利用紅、綠及藍色用 之3個1組的喷嘴521 i 523使有機肛材料流入基板p 之各溝槽内，不過亦可設置複數組3個丨組的喷嘴521至 5口23來使有機EL材料流人基板p之各溝槽内。此種情況， 要刀別又置與各贺鳴組將朝χ轴方向動作的位置對應之 接液部53,即可縮短塗覆處理所需的時間，同時得到本發 明的效果。 本《明之塗覆裝置’可確實回收吐出至作為被塗覆體 之:板之外的塗覆液，作為對基板塗覆液柱狀態的塗覆液 之裝置等很有用。 :上，詳細說明了本發明’但前述說明的各點只不過 二明^的例不而已’並非用來限定本發明之範圍者。本 =明當然亦涵蓋不脫離本發明之範圍所做的各種改良及變 【圖式簡單說明】 弟1圖係顯示本發明_者 的势 X只施形恶之有機EL·顯示裴置 \衣 的要部概略構成之平面圖及正面圖。 弟2圖係顯示第1圖之有機EL顯示裝置的製造裝置j 317516 22 1295196 的控制機能之方塊圖。 =係顯示第1圖之接液部53的構造之斜視圖。 回係針對接液部53的一部份從B方向| g 1 的斷：A-A所見之斷面圖。……向看… 概要^圖係從第3圖的D方向所見之接液部μ的側面 吐出之有機 動之際之與 第6圖係顯示第1圖之喷嘴521至523所 肛材^與接液部53的位置關係之斜視圖。 第7圖係顯示第！圖之喷嘴521至5幻 接液部53的位置關係之斜視圖。 說明狹縫部533的另一個例子之從B方 A-A所見的斷面圖。 弟8圖係用以 向看第3圖之斷面 的另一個 的另一個 μ目係用纟顯示® 3圖之局部排氣部53 5 •列子之從D方向所見之侧面概要圖。 弟1〇圖係用來顯示第3圖之局部排氣部535 #例子之從D方向所見之側面概要圖。 置的製造裝置之 之側面概要圖。 +第11圖係顯示習知的有機EL·顯示裝 貝島102至104與接液部105的位置關係 【主要元件符號說明】 12 22 有機EL顯示裝置的製造裝置 基板载置裝f 3 控制部 有機EL塗覆機構2〗 載物台 迴旋部 接受導引部 23 平行移動台 導引構件 317516 25 23 24 1295196 · 51 喷嘴移動機構部 53,53L，53R 接液部 54b 第2供給部 101 載物台 105 接液部 521至523 喷嘴 532 上段盒部 533a 狹縫開口部 • 534上段支持構件 541a至541c 供給源 • 543a至543c 流置計 …P 基板 52 喷嘴單元 54a 第1供給部 54c 第3供給部 102至104 喷嘴 511 導引構件 531 下段接受部 533 狹缝部 533b 折入部 53 5,53 5a，535b 局部排氣部 542a至542c 幫浦 544a至544c 過濾器 24 317516There are 4 EL materials that are not easy to fly to the outside. In the above-described embodiment, the description is made in the manufacture of the organic EL_shower 317516 20 1295196*, but the present invention is also applicable to other materials as long as the coating liquid in the liquid column state is coated with the soil plate. Device. For example, it is also suitable for the liquid crystal or the s〇G (Spin 〇n g (four) liquid and the positive hole transport layer k to be placed on the substrate. In addition, in the above embodiment, the flow is detected to the nozzle 521 to In the case of the flow rate of the material, the liquid is discharged. (4) The pressure sensor such as the force sensor is used to detect the discharge of the nozzle. The second part is the same as the lower part of the substrate p. Fig. 5 is a partial exhaust unit (Fig. 3), but it is also possible to arrange the gap between the partial exhaust portions d as much as possible in the ninth (10). For example, in the upper section T, the piping of the partial exhaust portion 535a is extended upward along the upper side of the casing 2; By doing so, you can be sure. 21 Recycled organic EL materials. Here, as described above, in the upper stage, the stage 21 is cut by the stage 21 toward the γ-axis, and a岽a is provided for the interference caused by the anti-rotation operation. Therefore, the orbiting unit is provided on the stage. 21 and the side of the upper box portion 5 3 2, the gas portion 5 3 5 a portion of the exhaust portion and the state of the stage 21 are required to ensure the same overlapping length C, and local exhaust is provided. The space required by the department can be again and the corresponding substrate. The lower part = the following: The height d of the upper surface of the upper surface is 21 1295196. The partial exhaust portion 535b is formed as shown in Fig. 10. As shown in Fig. 1 'the bottom portion and the side portion of the upper stage portion 532 on the stage 21 side are formed into a thin flesh shape, and a pipe of a partial exhaust portion 配 is disposed along the thin fleshy bottom portion to make a partial discharge as much as possible. The suction opening of the gas portion 535b is disposed close to the height d. By this, it is possible to reliably recover the organic EL material which cannot be recovered in the upper box portion. Further, in the above-described embodiment, the organic anal material is caused to flow into the respective grooves of the substrate p by the three nozzles 521i 523 of the red, green, and blue colors, but a plurality of complex arrays may be provided. The nozzles 521 to 5 of the group 23 allow the organic EL material to flow into the respective grooves of the substrate p. In this case, the time required for the coating process can be shortened and the effect of the present invention can be obtained by setting the liquid contact portion 53 corresponding to the position at which the respective Heming groups move in the direction of the x-axis. The coating apparatus of the present invention can be used to reliably collect the coating liquid which is discharged to the outside of the plate as the object to be coated, and is useful as a means for applying a coating liquid in a state in which the substrate is coated with a liquid column. The present invention has been described in detail above, but the foregoing description is not intended to limit the scope of the invention. The present invention also includes various modifications and changes that do not depart from the scope of the present invention. [Simple description of the drawings] The first embodiment shows that the potential X of the present invention is only an organic EL display device. The plan and front view of the outline of the main part. Fig. 2 is a block diagram showing the control functions of the manufacturing apparatus j 317516 22 1295196 of the organic EL display device of Fig. 1. = is a perspective view showing the structure of the liquid contact portion 53 of Fig. 1. The traverse is a cross-sectional view of a portion of the wetted portion 53 from the B direction | g 1 : A-A. ...... Looking at the outline of the nozzles 521 to 523 of the first figure showing the organic matter when the liquid is discharged from the side of the liquid contact portion μ seen in the direction D of the third figure. An oblique view of the positional relationship of the liquid contact portion 53. Figure 7 shows the first! A perspective view showing the positional relationship of the nozzles 521 to 5 of the phantom portion 53. A cross-sectional view seen from the side A-A of another example of the slit portion 533 will be described. The figure 8 is used to look at the other of the cross-sections of Fig. 3, and the partial exhaust portion 53 5 of the Fig. 3 map is shown in the direction of the D direction. The figure 1 is used to display a side view of the example of the partial exhaust portion 535 of Fig. 3 as seen from the direction D. A side view of the manufacturing apparatus. + Fig. 11 shows the positional relationship between the conventional organic EL display bays 102 to 104 and the liquid receiving portion 105 [Description of main components] 12 22 Organic EL display device manufacturing device substrate mounting device f 3 Control unit organic EL coating mechanism 2] Stage turning portion receiving guide portion 23 Parallel moving table guiding member 317516 25 23 24 1295196 · 51 Nozzle moving mechanism portion 53, 53L, 53R Water receiving portion 54b Second feeding portion 101 Stage 105 liquid contact portions 521 to 523 nozzle 532 upper portion box portion 533a slit opening portion 534 upper stage support members 541a to 541c supply source 543a to 543c flow meter ... P substrate 52 nozzle unit 54a first supply portion 54c third supply portion 102 to 104 nozzle 511 guide member 531 lower section receiving portion 533 slit portion 533b folding portion 53 5, 53 5a, 535b partial exhaust portion 542a to 542c pump 544a to 544c filter 24 317516