1288864 ' * 九、發明說明： *【發明所屬之技術領域】 本發明係與一種可變焦透鏡模組有關，更詳而言之， 係利用流體之體積變化，以改變PDMS薄膜之變形程度，藉 以達到焦距變化之可變焦透鏡模組之製造方法。 【先前技術】 按’在許多光學應用方面，若所要觀察之物體不是在 固定位置時，其鏡頭就須具有可變化之焦距，是以，可變 _焦透鏡在醫學顯微鏡、電訊通訊或光學資料儲存應用上， 具有多功能之重要性。 ¥知可受焦透鏡之驅動方式’係分為壓力變化驅動及 利用電濕潤等方式，以壓力變化驅動方式之製作技術係有 以下三種，第一種製作技術係為Nikolas Chronis¥人利用 微影技術製作出微流體系統之可調式液體微透鏡陣列，由 調節微流體系統内之壓力來完成彈性體透鏡陣列之焦距控 鲁制’第二種製作技術係為jackieChen等人利用？隨8製作包 含3D凸透鏡的薄膜、矽基材蝕刻出腔體以及微流道所構成 的微透鏡，第三種製作技術係為MAgarwal等人利用微影技 —術和1cp蝕刻做出多層結構，接合後做出腔體，在腔體上面 w與下面覆蓋PDMS薄膜，再利用壓力完成可變焦透鏡。 【發明内容】 惟，習知以壓力變化驅動方式之可變焦透鏡，第一種 製作技術係將PDMS與玻璃用氧電漿接合完成結構，其缺點 係接合繁雜及玻璃易碎等問題，第二種製作技術之缺點係 1288864 ^需要繁雜的結合，在薄膜透鏡與矽基材以及下層流道和矽 " 基材腔體不易對準結合，也必須小心石夕基材易碎和石夕基材 蝕刻時間繁長等問題，第三種製作技術之缺點係製程繁雜 ，需要多層結構接合而成，必須多方小心接合液漏等問題。 本發明提供一種可變焦透鏡模組之製造方法，係先以 微影製程製作出一矽晶圓基板上所需之結構，再利用PMS 翻模，翻模後係完成一PDM結構層，其係形成一流道及一儲 存液體之腔體，另，再製作一 PDMS塊材，將該PDMS結構層 φ 與PDMS塊材互相接合，係利用一液狀PDMS經由高溫烘烤以 達到接合之目的，是以，待兩片PDMS黏結密封後，裁切適 當之部分以作為變焦透鏡之主體，並黏貼一致動壓電片以 驅動薄膜，係利用流體之體積變化，以改變PDMS薄膜之變 形程度，以達到所要求之焦距變化，俾使具有可變焦透鏡 模組之功效者。 本發明所提供之可變焦透鏡模組之製造方法，其結構 係均為PDMS所構成，可降低材料之不適應性，且因PDMS之 ® 彈性特點，而減少類似脆性材料之破裂，造成鄰近裝置元 件之毀損污染，其結構係為一次結合，以減少縫隙之發生， - 俾使避免液漏現象之產生，其係利用PDMS溶液作為黏著劑 . ，因此不必使用氧電漿等昂貴設備來做接合，其係利用黏 貼壓電致動片驅動腔體薄膜，俾使可有效達成系統整合之 目的。 【實施方式】 請參閱第一圖，本發明係提供一種可變焦透鏡模組之 1288864 製造方法之較佳實施例，係包括有下列步驟： (一）預備步驟1 : 二'三圖所示’準備—圖案為圓形及流道腔 ，-㈣2罩1Q ’以便製作出透鏡及流道腔體之形狀 第二道光罩U，係為製作出蓄積液體 (二）微影成型步驟2 ·· 1、 一次微影成型步驟2 a : •請參閱第四至八圖所示’使用一石夕晶圓基板2〇作為 將其放置於—旋轉塗佈機3 ◦上方，該旋轉塗佈機 〇係设有一抽真空之管柱3 i，俾使旋轉塗佈時，該管 柱3 1可吸住該石夕晶圓基板2 〇，以避免因旋轉而掉落之 現象發生，該旋轉塗佈機3 〇以兩段轉速分別為15〇聊 、10秒與40〇rpm、10秒旋轉，將一光阻2 i均勻塗佈於該 、夕日日圓基板2 〇上，該光阻2 1係一種jSR ( THB—12〇N)之 _光阻材料，當塗佈完後，該石夕晶圓基板2 〇上方之光阻2 1平均膜厚約50//m，再放置於一烤箱4 〇内，以10(rc軟 烤7刀鉍，兀成軟烤後，將該第一道光罩1 〇對準放置於該 •矽晶圓基板2 0之上，以一近紫外光（波長為35〇11111〜4〇() nm) ^之叭曝光機5 〇進行曝光，其曝光劑量約為2〇〇〇mj，進行 10〜15分鐘顯影，即可形成一第一層結構2 2，該第一層結 構2 2係形成有圓柱及流道腔體之形狀，另，該矽晶圓基 板2 0亦可替換為PMMA或PC板材質所構成者； 2、 二次微影成型步驟2 b : 1288864 t纪 ^ 明芩閱第九至十三圖所示，接著重複以上步驟，於第 層…構2 2上旋轉塗佈一光阻2 1，再利用第二道光罩 1 1，對準第一層結構2 2之圓柱，係於第一層結構2 2 之圓柱上方，再做一層圓柱以作為腔體，完成後置入烤箱 4 0，以120C硬烤5分鐘，即可形成一第二層結構2 3， 該第二層結構2 3係形成有蓄積液體腔體之形狀，其製作 兩層之目的係為了將透鏡及流道部份作區隔，也可減少透 鏡腔體部分的崎變； 丨 （三）PDMS翻模步驟3 : 明參閱第十四至十五圖所示，於完成一次與二次微影 成型步驟之結構上，利用具光學性質之一液狀pMS 6 〇將 之填入’待固化後翻模，該液狀PDMS6 〇必須完全覆蓋突 起之第一層結構2 3上，但不能覆蓋過多，以免不能在腔 體部分形成薄膜’以造成未來灌入流體時所產生的問題， 因PDMS固化芩數為i2〇°c、烘烤2〇分鐘，將其置入該烤箱4 .0内，以120°C烘烤20分鐘，待硬化後，將PDMS小心拔起， 即完成一PDMS結構層6 1，其係形成一流道6 1 1及一儲 存液體之腔體6 1 2 ; (四） 製作PDMS塊材步驟4 : 請參閱第十六至十七圖所示，將該液狀PDMS 6 〇倒入 一擒板1 2内，以12〇°c、烘烤20分鐘固化後，將PDMS小心 拔起’係完成一厚度約1〜2nm之PDMS塊材6 2 ; (五） 結構接合步驟5 : 請參閱第十八至二十一圖所示，在該PDMS塊材6 2上 1288864 ’以旋轉塗佈機3 〇塗佈一液狀PDMS6 〇，以轉速為3000 rpm、30秒旋轉，旋轉完後，該pDMS塊材6 2上所形成之膜 厚约m，接著將該PDMS結構層6 1放置於其土，施以一 適當壓力後，置入該烤箱4 〇 #1〇(rc、烘烤3〇分鐘，以達 到將PDMS結構層6 1與PDMS塊材6 2緊密接合之狀態。 (六）後續步驟6 : 請參閱第二十二至二十四圖所示，將結合好的結構施 以適當的裁切，即完成變焦透鏡的主體，其中，該變焦透 籲鏡之尺寸為2mm，後續再利用一致動壓電片6 3驅動該腔體 6 1 2之薄膜，使得透明之PDMS透鏡部份經由壓力變化， 進而膨脹即可達到變焦效果，而焦距的改變係由該致動壓 電片63之變形量來完成。 再者，將本發明之優點及功效歸納如下： 1、 本發明之可變焦透鏡模組之製造方法，其結構係 完全為有彈性之PDMS所構成，因此不會有像脆性材料產生 籲破裂，而損害污染其他鄰近元件裝置之疑慮。 2、 本發明之可變焦透鏡模組之製造方法，其製程穩 定’可以穩定控制該透鏡直徑之尺寸。 . 3、本發明之可變焦透鏡模組之製造方法，無需複雜、 '昂貴之可程式控制裝置或生產設備，且於成形之變焦透鏡 結構上以一具光學性質之液狀PDMS，將之填入固化後即可 翻模，為量產製造之方法，俾以達到大量生產與生產設備 成本低之功效。 4、本發明之可變焦透鏡模組之製造方法，其製造過1288864 ' * IX. Description of the invention: * [Technical field to which the invention pertains] The present invention relates to a variable focus lens module, and more specifically, utilizes a volume change of a fluid to change the degree of deformation of the PDMS film. A method of manufacturing a variable focus lens module that achieves a change in focal length. [Prior Art] According to 'in many optical applications, if the object to be observed is not in a fixed position, the lens must have a variable focal length, so that the variable-focus lens is in a medical microscope, telecommunications, or optical data. The importance of versatility in storage applications. ¥Knowledge lens drive mode is divided into pressure change drive and electric humidification. There are three kinds of production techniques for pressure change drive. The first production technology is Nikolas Chronis ¥ people use lithography The technology produces a microfluidic system of adjustable liquid microlens arrays, which adjusts the focal length of the elastomeric lens array by adjusting the pressure in the microfluidic system. The second production technology is used by jackieChen et al. A film comprising a 3D lenticular lens, a ruthenium substrate etched cavity and a microchannel formed by a microchannel is produced, and a third fabrication technique is used by MAgarwal et al. to make a multilayer structure using lithography and 1 cp etching. After the bonding, a cavity is formed, and the PDMS film is covered on the upper surface w and the lower surface of the cavity, and the variable focus lens is completed by using pressure. SUMMARY OF THE INVENTION However, a zoom lens that is driven by a pressure change method is known. The first manufacturing technique is to bond a PDMS and a glass with oxygen plasma to complete the structure, and the disadvantages are complicated bonding and fragile glass, and the second. The shortcomings of the production technology are 1288864 ^Requires a complicated combination, in the film lens and the enamel substrate and the lower flow channel and the 基材" substrate cavity is not easy to align and combine, must also be careful that the Shixi substrate is fragile and Shi Xiji The problem of long etching time, etc., the shortcomings of the third manufacturing technology are complicated, and the multi-layer structure needs to be joined. It is necessary to carefully engage the liquid leakage and other problems. The invention provides a method for manufacturing a variable-focus lens module, which is to first fabricate a structure required on a wafer substrate by using a lithography process, and then use a PMS to overturn a mold to complete a PDM structural layer after the mold is turned over. Forming a first-class channel and a cavity for storing liquid, and further fabricating a PDMS block, and bonding the PDMS structural layer φ and the PDMS block to each other by using a liquid PDMS to achieve bonding by high temperature baking, After the two pieces of PDMS are bonded and sealed, the appropriate part is cut to be the main body of the zoom lens, and the positively-acting piezoelectric piece is pasted to drive the film, and the volume change of the fluid is used to change the deformation degree of the PDMS film to achieve the deformation degree of the PDMS film. The required focal length variation is such that it has the function of a variable focus lens module. The manufacturing method of the variable focus lens module provided by the invention is composed of PDMS, which can reduce the incompatibility of the material, and reduce the cracking of the brittle material like the PDMS, thereby causing adjacent devices. The damage of the components is characterized by a single bond to reduce the occurrence of gaps. - To prevent the occurrence of liquid leakage, the PDMS solution is used as an adhesive. Therefore, it is not necessary to use expensive equipment such as oxygen plasma for bonding. The utility model uses the adhesive piezoelectric actuator to drive the cavity film, so that the system integration can be effectively achieved. [Embodiment] Referring to the first figure, the present invention provides a preferred embodiment of the manufacturing method of the zoom lens module 1288864, which comprises the following steps: (1) preliminary step 1: two 'three figures' Preparation—the pattern is a circular and flow channel cavity,-(4) 2 cover 1Q 'to make the lens and the shape of the flow channel cavity. The second mask U is used to make the accumulated liquid. (2) Micro-shaping step 2 ·· 1 , a lithography molding step 2 a : • Please refer to the 4th to 8th drawings of 'using a lithographic wafer substrate 2 〇 as placed on the top of the spin coater 3 ,, the spin coater 〇 When there is a vacuum tube 3 i, when the spin coating is applied, the column 3 1 can suck the silicon wafer substrate 2 〇 to avoid the phenomenon of falling due to rotation, and the spin coater 3 〇After two rotation speeds of 15 、, 10 seconds and 40 rpm, 10 seconds rotation, a photoresist 2 i is evenly coated on the day and night circle substrate 2 ,, the photoresist 2 1 is a kind of jSR ( THB—12〇N) _ photoresist material, when coated, the average resistance of the photoresist above the 夕 晶圆 wafer substrate 2 The film thickness is about 50//m, and then placed in an oven 4 ,, with 10 (rc soft-baked 7 knives, simmered into soft bake, the first reticle 1 〇 is placed in the 矽 矽Above the circular substrate 20, exposure is performed with a near-ultraviolet light (wavelength of 35〇11111~4〇() nm)^, and the exposure dose is about 2〇〇〇mj for 10~15 After a minute development, a first layer structure 2 2 is formed, and the first layer structure 2 2 is formed into a shape of a cylinder and a flow channel cavity. Alternatively, the germanium wafer substrate 20 can be replaced with a PMMA or a PC board. The material is composed of; 2, the second lithography molding step 2 b: 1288864 t 纪 ^ 芩 第九 第九 第九 第九 第九 第九 第九 第九 第九 第九 第九 第九 第九 第九 第九 第九 第九 第九 第九 第九 第九 第九 第九 第九 第九 第九 第九 第九Resistor 2 1, and then use the second mask 1 1 to align the cylinder of the first layer structure 2 2 , above the cylinder of the first layer structure 2 2 , and then make a layer of cylinder as a cavity, and then put it into the oven. 40, hard baking at 120C for 5 minutes, can form a second layer structure 2 3, the second layer structure 2 3 is formed with a shape of a liquid chamber, and the purpose of making two layers is to The mirror and the flow channel are partially separated, which can also reduce the surface change of the lens cavity; 丨 (3) PDMS overmolding step 3: See the fourteenth to fifteenth figures, after completing the first and second micro The structure of the shadow forming step is filled with a liquid pMS 6 具 having a liquid property, which is to be cured, and the liquid PDMS6 〇 must completely cover the first layer structure of the protrusion 2 3 , but cannot be covered. Too much, so as not to form a film in the cavity portion to cause problems in the future when the fluid is poured, because the PDMS curing number is i2 〇 ° c, baking for 2 〇 minutes, put it into the oven 4.0 After baking at 120 ° C for 20 minutes, after hardening, PDMS is carefully pulled up, that is, a PDMS structural layer 161 is completed, which is formed into a first-class channel 61 1 and a liquid storage chamber 6 1 2 ; ) Making a PDMS Block Step 4: Please refer to Figures 16 to 17 to pour the liquid PDMS 6 into a slab 1 2 and cure at 12 ° C for 20 minutes. The PDMS is carefully pulled up to complete a PDMS block 6 2 having a thickness of about 1 to 2 nm; (5) Structural bonding step 5: Please refer to the eighteenth to twenty As shown in the figure, on the PDMS block 62, 1288864' is coated with a liquid PDMS6 crucible by a spin coater 3, and rotated at 3000 rpm for 30 seconds. After the rotation, the pDMS block 6 2 The film formed thereon is about m thick, and then the PDMS structural layer 61 is placed in the soil, and after applying a suitable pressure, it is placed in the oven 4 〇 #1 〇 (rc, baked for 3 minutes to reach The state in which the PDMS structural layer 61 is in close contact with the PDMS bulk material 62. (6) Subsequent Step 6: Please refer to the 22nd to 24th drawings, and apply the proper cutting to the combined structure, that is, complete the main body of the zoom lens, wherein the size of the zoom lens is 2mm, the subsequent use of the movable piezoelectric piece 63 drives the film of the cavity 6 1 2, so that the transparent PDMS lens portion is expanded by pressure, and then expanded to achieve the zooming effect, and the focal length is changed by the actuation. The amount of deformation of the piezoelectric piece 63 is completed. Furthermore, the advantages and effects of the present invention are summarized as follows: 1. The manufacturing method of the variable focus lens module of the present invention is constructed by a fully elastic PDMS, so that there is no cracking like a brittle material. And the doubts that damage other adjacent component devices. 2. The method of manufacturing the variable focus lens module of the present invention, wherein the process stability is stable to control the size of the lens diameter. 3. The manufacturing method of the variable focus lens module of the present invention does not require complicated, 'expensive programmable control device or production equipment, and fills the formed zoom lens structure with an optical liquid PDMS. After curing, it can be turned over, which is a mass production method, which can achieve the low cost of mass production and production equipment. 4. A method of manufacturing a variable focus lens module of the present invention, which has been manufactured
1288864 程中’只需接合一次，可有效避免因接合所產生之縫隙， 而導致注入流體時造成液漏現象之疑慮，且利用液狀pMS 作為黏著劑，可不必使用氧電漿粗化處理之過程，以降低 設備成本。 敢後，值得再提的是，運用本發明之技術所形成之可 變焦透鏡模組更包含有下列產業利用性： 1、 運用此技術成形之可變焦透鏡模組具有生產設備 成本低與製程穩定之特性。 2、 可應用於手機通訊產業，將其置入照相手機之相 機鏡頭模組内，以達到變焦之效果。 3、 可應用於數位影像系統產業，將其置入（數位）相 機鏡頭及DV攝影機鏡頭模組内，可望取代傳統大型的變焦 透鏡組。 4、可應用於生醫檢測產 頭或各式樣顯微鏡頭上，可用來觀測活體細胞或病；：” 5、可應用於數位影像儲存媒體產業，將其應用於） ’、、取像，也可深入人體進行活體病毒追蹤觀測。 綜上所述，本發明在同類產品中實有其極佳之進步^ 亦未於^遍查國㈣關於此類結構之技術#料，文則 同的構造存在在先，是以，本發明實_ 考月專利要件，麦依法提出申請。 已，故兴：士：述者’僅係本發明之-較佳可行實施例而 稱欠化，理應包含在本發明之專利範圍内。 1288864 【圖式簡单說明】 ' 第一圖係本發明變焦透鏡結構之製作流程圖。 第二圖係本發明之第一道光罩示意圖。 第三圖係本發明之第二道光罩示意圖。 第四圖係本發明之一次光阻塗佈示意圖。 第五圖係本發明之一次光阻塗佈後示意圖。 第六圖係本發明之一次軟烤示意圖。 第七圖係本發明之一次曝光示意圖。 第八圖係本發明一次微影成型後之示意圖。 第九圖係本發明之二次光阻塗佈示意圖。 第十圖係本發明之二次光阻塗佈後示意圖。 第十一圖係本發明之二次曝光示意圖。 第十二圖係本發明之二次硬烤示意圖。 第十三圖係本發明二次微影成型後之示意圖。 第十四圖係本發明以PDMS翻模示意圖。 第十五圖係本發明翻模後成型之結構示意圖。 第十六圖係本發明製作PDMS塊材之結構示意圖。 第十七圖係本發明之PDMS塊材結構示意圖。 第十八圖係本發明之塗佈液狀PDMS示意圖。 第十九圖係本發明之液狀塗佈後示意圖。 第二十圖係本發明之結構接合示意圖。 第二十一圖係本發明以烘烤來固定結構之示意圖。 第二十二圖係本發明之變焦透鏡結構側視圖。 第二十三圖係本發明之驅動示意圖。 11 1288864 第二十四圖係本發明之驅動側視圖。 【主要元件符號說明】1288864 During the process, it only needs to be joined once, which can effectively avoid the gap caused by the joint, which leads to the liquid leakage phenomenon when the fluid is injected, and the liquid pMS can be used as the adhesive, without using the oxygen plasma roughening treatment. Process to reduce equipment costs. After the daring, it is worth mentioning that the zoom lens module formed by using the technology of the present invention further includes the following industrial utilization: 1. The zoom lens module formed by using the technology has low production equipment cost and stable process. Characteristics. 2. It can be applied to the mobile phone communication industry and put it into the camera lens module of the camera phone to achieve the zoom effect. 3. It can be applied to the digital imaging system industry and placed in the (digital) camera lens and DV camera lens module, which is expected to replace the traditional large zoom lens group. 4, can be applied to the biomedical test head or various types of microscope head, can be used to observe living cells or diseases;: 5, can be applied to the digital image storage media industry, apply it) ',, take image, can also Going deep into the human body for live virus tracking observations. In summary, the present invention has excellent progress in similar products. ^ It is not in the country (4) about the technology of such structures, the structure of the text is the same First, the invention is based on the patent requirements of the present invention, and the application is filed in accordance with the law. The reason for the present invention is that it is merely a preferred embodiment of the present invention, which is supposed to be included in the present invention. 1288864 [Simplified illustration of the drawings] 'The first figure is a flow chart of the structure of the zoom lens structure of the present invention. The second figure is a schematic view of the first light mask of the present invention. The third figure is the first embodiment of the present invention. The fourth diagram is a schematic diagram of the primary photoresist coating of the present invention. The fifth diagram is a schematic diagram of the primary photoresist coating of the present invention. The sixth diagram is a schematic diagram of a soft baking of the present invention. One exposure of the present invention Fig. 8 is a schematic view of a secondary photoresist coating of the present invention. The ninth drawing is a schematic diagram of the secondary photoresist coating of the present invention. The tenth is a schematic diagram of the secondary photoresist coating of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 12 is a schematic view showing the secondary hard baking of the present invention. Fig. 13 is a schematic view showing the secondary lithography of the present invention. Fig. 14 is a PDMS of the present invention. Fig. 15 is a schematic view showing the structure of the molded body after the overmolding of the present invention. Fig. 16 is a schematic view showing the structure of the PDMS block produced by the present invention. Fig. 17 is a schematic view showing the structure of the PDMS block of the present invention. Figure 8 is a schematic view of the coating liquid PDMS of the present invention. Fig. 19 is a schematic view of the liquid coating of the present invention. Fig. 20 is a schematic view showing the structure bonding of the present invention. Fig. 22 is a side view showing the structure of the zoom lens of the present invention. Fig. 23 is a schematic view showing the driving of the present invention. 11 1288864 The twenty-fourth drawing is a side view of the driving of the present invention. Main component Description]
1 預備步驟 2 微影成型步驟 2 a 一次微影成型步驟 2b 二次微影成型步驟 3 PDMS翻模步驟 4 製作PDMS塊材步驟 5 結構接合步驟 6 後績步驟 10 第一道光罩 1 1 第二道光罩 1 2 擋板 2 0 矽晶圓基板 2 1 光阻 2 2 第一層結構 2 3 第二層結構 3 0 旋轉塗佈機 3 1 管柱 4 0 烤箱 5 0 UV曝光機 6 0 液狀PDMS 6 1 PDMS結構層 6 11 流道 6 12 腔體 6 2 PDMS塊材 6 3 致動壓電片1 preliminary step 2 lithography step 2 a lithography step 2b secondary lithography step 3 PDMS modulo step 4 preparation of PDMS block step 5 structure bonding step 6 performance step 10 first reticle 1 1 Two reticle 1 2 baffle 2 0 矽 wafer substrate 2 1 photoresist 2 2 first layer structure 2 3 second layer structure 3 0 spin coater 3 1 column 4 0 oven 5 0 UV exposure machine 6 0 liquid PDMS 6 1 PDMS structural layer 6 11 flow path 6 12 cavity 6 2 PDMS block 6 3 actuated piezoelectric piece
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