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TWI287075B - Gate valve and vacuum gate valve - Google Patents

Gate valve and vacuum gate valve Download PDF

Info

Publication number
TWI287075B
TWI287075B TW094113438A TW94113438A TWI287075B TW I287075 B TWI287075 B TW I287075B TW 094113438 A TW094113438 A TW 094113438A TW 94113438 A TW94113438 A TW 94113438A TW I287075 B TWI287075 B TW I287075B
Authority
TW
Taiwan
Prior art keywords
valve
opening
closing
sealing surface
box
Prior art date
Application number
TW094113438A
Other languages
English (en)
Chinese (zh)
Other versions
TW200604457A (en
Inventor
Yasukazu Ugawa
Masayuki Haga
Original Assignee
Ohno Bellows Industry Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ohno Bellows Industry Co Ltd filed Critical Ohno Bellows Industry Co Ltd
Publication of TW200604457A publication Critical patent/TW200604457A/zh
Application granted granted Critical
Publication of TWI287075B publication Critical patent/TWI287075B/zh

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J3/00—Processes of utilising sub-atmospheric or super-atmospheric pressure to effect chemical or physical change of matter; Apparatus therefor
    • B01J3/02—Feed or outlet devices therefor
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K27/00—Construction of housing; Use of materials therefor
    • F16K27/04—Construction of housing; Use of materials therefor of sliding valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
    • F16K3/0254—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor being operated by particular means
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
    • F16K3/16—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/30—Details
    • F16K3/314—Forms or constructions of slides; Attachment of the slide to the spindle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K51/00—Other details not peculiar to particular types of valves or cut-off apparatus
    • F16K51/02—Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Details Of Valves (AREA)
  • Sliding Valves (AREA)
TW094113438A 2004-07-28 2005-04-27 Gate valve and vacuum gate valve TWI287075B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004219658A JP2006038121A (ja) 2004-07-28 2004-07-28 ゲート弁及び真空ゲート弁

Publications (2)

Publication Number Publication Date
TW200604457A TW200604457A (en) 2006-02-01
TWI287075B true TWI287075B (en) 2007-09-21

Family

ID=35903320

Family Applications (1)

Application Number Title Priority Date Filing Date
TW094113438A TWI287075B (en) 2004-07-28 2005-04-27 Gate valve and vacuum gate valve

Country Status (3)

Country Link
JP (1) JP2006038121A (ja)
KR (1) KR100666894B1 (ja)
TW (1) TWI287075B (ja)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI385329B (zh) * 2008-11-21 2013-02-11 V Tex Corp Vacuum gate valve and its opening and closing method
US8672293B2 (en) 2008-09-29 2014-03-18 Vat Holding Ag Vacuum valve
TWI500080B (zh) * 2009-05-07 2015-09-11 應用材料股份有限公司 活動遮蔽之閘閥

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI381470B (zh) * 2007-05-08 2013-01-01 Tokyo Electron Ltd And a treatment device provided with the valve
KR101065127B1 (ko) * 2009-02-12 2011-09-16 지에스칼텍스 주식회사 분리탑 및 분리탑 구동 제어 방법
KR101123299B1 (ko) * 2010-02-04 2012-03-20 (주)엘티엘 진공 차단장치 및 이를 포함하는 영상표시장치 제조설비
TWI448635B (zh) * 2010-04-14 2014-08-11 Wue Shyang Machinery Co Ltd 雙向控制閥
KR101270652B1 (ko) * 2010-04-16 2013-06-03 주식회사 아바코 밸브, 밸브 구동 방법 및 진공 처리장치
EP2913573A1 (de) * 2014-02-26 2015-09-02 VAT Holding AG Vakuumventil
CN106907497A (zh) * 2017-05-09 2017-06-30 凯阀控股集团有限公司 一种陶瓷闸阀
CN107575641B (zh) * 2017-10-10 2023-12-29 深圳市大成精密设备股份有限公司 一种先导式真空阀门
KR102206551B1 (ko) * 2019-03-25 2021-01-25 주식회사 에이씨엔 기판 처리 장치

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8672293B2 (en) 2008-09-29 2014-03-18 Vat Holding Ag Vacuum valve
TWI385329B (zh) * 2008-11-21 2013-02-11 V Tex Corp Vacuum gate valve and its opening and closing method
TWI500080B (zh) * 2009-05-07 2015-09-11 應用材料股份有限公司 活動遮蔽之閘閥

Also Published As

Publication number Publication date
TW200604457A (en) 2006-02-01
KR20060046137A (ko) 2006-05-17
JP2006038121A (ja) 2006-02-09
KR100666894B1 (ko) 2007-01-10

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Legal Events

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MK4A Expiration of patent term of an invention patent