TWI277591B - Substrate cassette, substrate transporting apparatus, substrate storage and transporting apparatus, and substrate transporting and insertion/transporting and removal system - Google Patents

Abstract

This substrate transporting apparatus is provided with a substrate cassette (1) in which a plurality of glass substrates (4) are housed horizontally in stages in a vertical direction, a substrate conveying means that is inserted and removed in the substrate cassette (1) by reciprocation in a direction perpendicular to the conveying direction, and a cassette elevating mechanism that lifts and lowers the substrate cassette (1). The substrate conveying means is provided with a plurality of pairs of conveying rollers (24) that respectively support the opposite side edges (4a and 4b) on the bottom surface of the glass substrates (4) and a hand (26) that is longer than the conveying rollers (24) in a direction perpendicular to the direction along which the glass substrates (4) are conveyed. The top surface (26A) of this hand (26) has air holes (27a) that can supply air from an air blower to enable support of the glass substrates (4) in a non-contact state.

Description

1277591 IX. OBJECTS OF THE INVENTION The present invention relates to a substrate provided on a transport line of a thin plate substrate such as a glass for liquid crystal, a substrate transfer device, and a substrate storage device having the substrate or the substrate transfer device. A device, a substrate loading system including the substrate storage and transport device, a substrate unloading system, and a substrate loading/unloading system. [Prior Art] This application is directed to Japanese Invention Application No. 2003-392708, filed on Nov. 21, 2003, and Japanese Patent Application No. 2003-392709, filed on August 21, 2004. Priority is claimed on Japanese Patent Application No. 2004-247394, filed on Jan. 26, 2011, the entire disclosure of which is incorporated herein. = The type of substrate storage and transport device is known as a multi-joint robot (rc) bQt) or a horizontal reciprocating robot hand for operating a substrate, and the disc can be combined with a plurality of sections of the substrate for storage. A device that arbitrarily moves the substrate into and out of the system. 4 In addition, there is also a combination of a liftable E-shaped rack and a fixed conveyor belt, and a device that sequentially moves the substrate from the upper side of the pallet - the substrate is sequentially carried out from the lower section (for example, Patent No. 2002-289678, and Japanese Patent No. 4, No. 41 (4). However, in the technique of using the above-described multi-joint robot, the US plate is carried in and out of an arbitrary plate frame, but to avoid occurrence with the robot; = 316503 5 1277591 It is necessary to enlarge the substrate accommodation interval of the board, and it is difficult to increase the number of substrates to be accommodated. In addition, there is also a combination of a robot and a rack, and a large space is provided. (c!ean ^(10)... It is particularly remarkable when it is used. In the technique of raising and lowering the slab-shaped slabs, there is no problem of just 4: 'But there is a limit that the substrate cannot be carried in and out of an arbitrary rack. In order to solve the above problems, the present invention provides a substrate transfer device in order to solve the above problems. a substrate carrying and unloading means for pulling out/inserting the substrate n' which is accommodated in a plurality of stages in a horizontal direction in a plurality of stages in a horizontal direction by pulling back/inserting in a direction perpendicular to the direction in which the substrate is conveyed, The substrate carrying and unloading means has a plurality of pairs of transporting rollers, respectively. In the substrate transporting device, the substrate loading/unloading means has a hand which can be a non-contact type (four) front wire plate. The material portion may be longer than the transport roller in a direction perpendicular to the base transport direction. In the substrate transport device, the substrate support surface of the hand may be provided with a blow hole for supplying air from the air supply source. The present invention provides a substrate storage and transporting device: a substrate carrying and unloading means configured by stacking a plurality of substrates in a horizontal posture in a vertical direction; and a substrate 316503 1277591 plate relative to the substrate In order to solve the above problems, the present invention provides a substrate carrying system and a system for lifting and lowering the moving and lowering mechanism. The substrate storage and transport device provided on the substrate carrying path; the substrate is placed upstream of the substrate storage and transport device, and the substrate in the substrate supplied from the outside is supplied to the substrate of the substrate storage and transport device. The supply device: and a transfer device that supplies the substrate delivered from the substrate storage and transport device on the transport path to the processing device. To solve the above problems, the present invention provides a substrate carry-out system including a carry-out path provided on the substrate In the above-described substrate storage and transport device, a substrate supply device that is disposed in the substrate downstream of the substrate security transfer device and that stores the substrate supplied from the substrate storage and transport device in the substrate cassette, and discharges the self-processing device In order to solve the above problems, the present invention provides a substrate loading/unloading system including the substrate storage and transport device that is provided on a loading path of a substrate and a transport path; The substrate storage and transport device is provided on the transfer path The substrate supplied from the externally supplied substrate is supplied to the first substrate supply device of the substrate storage and transport device, and the substrate is transported downstream of the substrate storage and transport device, and the substrate is transported from the substrate. The substrate to be supplied is accommodated in the second substrate supply device in the substrate, and the substrate delivered from the substrate storage and transport device on the loading path is supplied to the processing device, and the substrate discharged from the processing device is supplied to the removal path. The transfer device of the substrate storage and transport device. In order to solve the above problems, the present invention provides a substrate in which a plurality of substrates are accommodated in a plurality of stages in a vertical direction in a horizontal posture, and the central portion of the lower surface of the substrate is non-contacted when the substrate is loaded and unloaded. Supported substrate support. In the substrate stack, a blowing hole that can be supplied from a gas supply source may be opened on the substrate supporting surface of the substrate supporting portion. In order to solve the problem, the present invention provides a substrate storage and transport device including: the substrate 匣; a substrate 7 that is pulled back/moved in the substrate 7 in a direction perpendicular to the substrate transfer direction; And an elevating mechanism that relatively moves the substrate 升降 relative to the substrate loading/unloading means. In the above-described substrate storage and conveyance device, each of the substrate supporting portions may have a coupler that is detachably attached or detached from the substrate loading/unloading means, and is intermittently supplied from the air supply source to the blowing holes. In order to solve the above problems, the present invention provides a substrate carrying system. In addition, the substrate storage and transport device on the board and the substrate is placed upstream of the substrate storage and transport device, and the substrate in the substrate 11 supplied from the outside is supplied to the substrate storage transport device# The plate supply device and the transfer device that supplies the substrate from the substrate on the transfer path to the processing device. In order to solve the above problems, the present invention provides a substrate unloading system including: the substrate storage and transport device provided on a substrate carrying-out path, which is disposed downstream of the substrate storage and transport device, and is provided from the foregoing A substrate supply device for storing the substrate supplied from the substrate storage and transport device in the substrate g 316503 1277591; and a transfer device for supplying the substrate discharged from the processing device to the substrate storage and transfer device. In order to solve the above problems, the present invention provides a substrate loading/unloading system including a substrate storage and transport device that is disposed on a loading path of a substrate and a transport path, and is disposed on the substrate in a loading path. The upstream of the apparatus; and the substrate in the substrate g supplied from the outside is supplied to the substrate storage and transport! The second substrate supply device is disposed on the lower side of the substrate storage and conveyance device, and the substrate supplied from the substrate storage and conveyance device is housed in the substrate 2: the substrate supply device and the self-loading device In the substrate storage and transport device on the path, the substrate to be delivered is supplied to the processing device, and the substrate discharged from the processing device is supplied to the transfer device of the substrate storage and transport device on the carry-out path. According to the present invention, the substrate loading/unloading means can be removed and inserted in a section in which the substrate loading/unloading means is to be carried out, and the height of the substrate 匣 and the f-plate loading/unloading means is adjusted by using the elevating mechanism, and then the substrate is carried in and out. = Pulling/inserting in the horizontal direction to the inside and outside of the substrate, even if the multi-joint robot is not used, the substrate can be arbitrarily carried in and out with respect to the substrate accommodating the substrate having a small interval. In addition, since the contact with the substrate at the time of loading and unloading is only the lower side edge portions directly supported by the transport roller, the substrate contamination can be reduced. In particular, the substrate is supported not only by the transport roller but also by a contact that is longer than the hand, so that the length of the transport roller that directly contacts the substrate can be minimized, and substrate contamination can be minimized. In the case of the loading and unloading, the central portion of the lower surface of the substrate, for example, 316503 9 1277591, is floated from the substrate supporting portion, and is supported by the non-contact method. Therefore, the contact with the substrate is only the lower two of the inserting and unloading means. The side edge portion can achieve the minimization of substrate contamination. In addition, with the insertion operation of the substrate 对 for the substrate loading/unloading means, the substrate support portion corresponding to the segment to be carried in and out of the substrate is surely rotated by the compressed air to support the non-contact support of the substrate, and only corresponds to the The substrate support portion that is to be moved in and out is transported with compressed air, so that the entire device can be miniaturized. [Embodiment] BEST MODE FOR CARRYING OUT THE INVENTION Hereinafter, an embodiment will be described with reference to Figs. 1 to 15 . The substrate storage and conveyance device of the present embodiment is applied to, for example, a glass substrate for a liquid crystal display panel (LCD) or an electropolymer display panel (pDp), and is large and thin, and is used for preventing contamination or the like. The two sides of the conveyance are supported, and the conveyance required for the conveyance is carried out. As shown in Fig. 2 and Fig. 2, the following configuration is adopted: a substrate 匡丨; a transfer roller plate loading/unloading means) 24 and a hand The conveying roller unit of the portion 26 is a lifting mechanism (lifting mechanism) 3. ^ Substrate £1 is formed in the substrate transport direction (the front side and the rear side in the figure are the box shape of the glass substrate 4, and the inner space is facing the sergeant: mouth: underheat I In the lower direction of the mountain, a plurality of plate segments for escaping and receiving the glass substrate 4 are formed. The substrate supporting portion 12 constituting each of the plate segments is 'X° vertical direction (ie, the substrate width direction). Horizontally extending the direction of the sleeve plate; water + extension, for example, consisting of a line (wlre) 316503 10 1277591, etc., and each plate section is disposed in a plurality of predetermined intervals along the substrate transport direction (5 in the present embodiment) According to the above configuration, the substrate substrate 12 can be held in a horizontal posture by the substrate supporting portion 12, and can be accommodated in a plurality of stages in the vertical direction. The substrate 匣 1 is any one in which the glass substrate 4 is carried into the substrate. The plate frame section and the glass plate 4 are carried out from any of the plates and the frame segments in the substrate g, and the conveying rollers are supported to be supported at a fixed position in the up and down direction. The 24 and the hand 26 can be moved up and down relative to each other. For lifting and lowering The mechanism 3 is configured to support the bottom plate of the substrate, the truss 31 of the 卩11c, and the ball screw 32 for moving the bracket 31 up and down by servo drive (Fig. 3); the guide bracket 31. The guide portion 33 for moving up and down; and the sensor for detecting the position of the substrate 匣丨 in the up and down direction. In the third drawing, the illustration of the transport roller unit 2 is omitted. The transport roller unit 2 has The second direction of the glass substrate* as the conveyed material, in other words, in the direction perpendicular to the direction in which the glass substrate is conveyed, the spacer phase is set to be one of the susceptors 2, and the substrate is placed in the direction in which the susceptors 21 are placed. In the present embodiment, a plurality of frames 22 are fixed in the present embodiment. The carrier frame 22 is rotatably supported by the bearing holder 22 and supports the conveying roller 24 while supporting the direction perpendicular to the substrate conveying direction ( The substrate width direction is a long-plate-shaped hand portion 6 that is longer than the plane of the transport rollers 24, and each of the transport frames 22 is arranged in parallel with each other at intervals in the substrate transport direction (in this embodiment, 6) transport roller 24. hand 26 is 316503 11 1277591 ί The transfer roller 24 has a slightly lower value so that it can be held by the transfer frame 22 in a single cantilever shape. The heart insertion transfer roller 24 and the hand 26 are pulled out into the substrate 〒1. The pedestal of the body-receiving frame 22 is returned to the moving mechanism (not shown), and the roller is moved forward and backward. The conveying roller 24 includes: a cylinder minus a roller 24h^, a Fen's person/knife Further, the front substrate portion and the base end portion of the substrate transfer portion/wheel drive gear 25 are inserted, and the rotary motor power from the drive motor (not shown) is transmitted to the transfer roller 24 via the roller drive gear 25. < The substrate transporting force is generated by the frictional force between the substrate carrying portion 24b and the glass substrate 4 generated when the transport roller 24 is rotated, so that the substrate transporting portion is selected to have a predetermined friction with respect to the glass substrate 4 The material of force. Further, the substrate conveyance portion 24b is not limited to the cylindrical shape shown in Fig. 4, and as shown in Fig. 5, for example, an elastic body 24c such as an O-ring which is disposed at an interval in the axial direction may be used. As shown in Figs. 1 and 4, a plurality of blowing holes 27a opened in the upper surface (substrate supporting surface) 26A and air passages 27b communicating with the blowing holes 27a are formed in the hand portion 26. The blown hole is formed at a plurality of intervals over substantially the entire length of the upper surface 26A (the direction perpendicular to the substrate transport direction), and the blown hole group in one row along the longitudinal direction is in the width direction of the upper surface 26A (substrate transfer) The direction) has a plurality of columns side by side (in this embodiment, five columns). At the base end of the hand portion 26, a connection path to a blower or a compressor (air supply source) is connected by a coupling means 316503 1277591 such as a coupler. And g, when the air blower is running, the compressed air that is supplied to each hand through the pipeline and the transfer is blown upward through the blow hole 2 7 a; the spray body 2 is supported and moved in a non-contact manner. The bottom edge of the bottom surface of the substrate 4 is known as 4b, which is the part supported by the moving body ^^^ + " I Tianda roller 24 is closer to the substrate: the central part 4c. Further, any of the plurality of hand portions 26 may be provided with a coupling device such as a light clutch, and the other hand 26 may distribute the compressed air from the air supply blower through a distribution pipe extending from the coupler. In the substrate storage and conveyance device having the above configuration, the glass substrate 4 is transported to any of the (four) stages of the substrate. The 6A® and the (10)th (4th) indicate the state before the surface substrate 4 is moved to the substrate 匡i. The substrate E i is located at the most elevated position, and the transfer roller 24 and the hand 26 are located at positions outside the substrate. In this state, the crucible lifting mechanism 3 is first driven, and the substrate is lifted and lowered so that the plate frame to be carried into the glass substrate 4 (hereinafter, γ, wood, only the following % of the predetermined loading section) is placed before the conveying roller 24 and the hand 26 Turning the sun, — n , ” is even more exciting (Figure 7). At this time, the substrate supporting the predetermined loading section supports Qiu 9 in +, and the sighing chair 12 is positioned slightly lower than the conveying roller 24. Then, as shown in Fig. 8A and » δΒ图*, driving the roller to and from the weight-receiving mechanism' causes the transport roller 24 and the gamma 6 to be inserted into the substrate g丄, and then the self-supplying air blower through the pipeline and the clutch Compressed empty! 316503 】 3 1277591 When the air is supplied to the hand 26, the compressed air is ejected upward from the blowing hole 27a opened in the upper surface 26A of the hand 26. Thereby, an air floating upper layer is formed between the loaded glass substrate 4 and the upper surface 26A of the hand portion 26, and the loaded glass substrate 4 is supported closer to the center of the substrate than the lower side edge portion 4a of the conveying roller 24. The portion 4C is supported in a non-contact manner through the air floating upper layer. Then, the drive motor is driven to transmit the rotational driving force to the transport roller 2.4 through the roller drive gear 25, and the transport roller % is rotated about its axis. Then, as shown in FIGS. 9A and 9B, the film is transferred to the upper side of the substrate 匣i, and the glass substrate 4 is produced by contact with the lower side edge portions 4&; The frictional force is applied to the transfer direction of the slanting direction (the direction of the white arrow in Fig. 9A) in the direction of the diaper transfer, and is carried into the substrate 匣丄. / At this time, the lower side edges of the glass substrate 4, such as the transfer roller 24, are directly supported by the transfer roller 24 in contact with the rotary table* from below. On the other hand, the portion 4e which is closer to the center of the substrate than the conveying roller 24 and the lower side edge portion and the core contact portion is ejected from the blowing hole 27a by the compressed air supplied to the hand portion, and is formed by the transmission. The air is superposed on the upper portion of the ferrule portion of the transfer shallow wheel 24 and the gap formed between the upper portion of the hand shank 26 at a position lower than the position thereof, and is held in a non-contact manner. The field breaks the substrate 4兀 and completely breaks into the substrate. The inside of the substrate is the first (the ι〇 map), the soil = the lifting mechanism 3, so that the base seam i rises, and the glass substrate 4 that can be moved can be stored on the base of the base The portion 12 simultaneously shields the air supply from the air supply blast phase 316503 14 1277591 to the hand portion 26. Further, when the glass substrate 4 is detached from the transport roller 24, that is, when the glass substrate 4 is completely stored in the substrate supporting portion 12, as shown in FIGS. 11a and 11b, the roller reciprocating mechanism is driven to transport the roller and Hand. 26 retreats and pulls out from the substrate. The above is an example of the loading operation. Next, an operation sequence of carrying out the glass substrate 4 of any of the plate segments stored in the substrate stack will be described. First, the crucible lifting mechanism 3 is driven to raise and lower the substrate 匣1 so that the pallet portion (hereinafter referred to as a predetermined unloading portion) for storing the glass substrate 4 to be pre-loaded is placed before the transport roller 24 and the hand 26 are moved. At this time, the substrate supporting portion 12 corresponding to the predetermined carrying-out section is positioned slightly higher than the conveying roller 24. Secondly, the roller is moved to and from the moving mechanism to advance the conveying roller 24 and the hand 26 and insert into the substrate (Fig. 12) to start air supply, and drive the E lifting mechanism 3' to lower the substrate. The lower side edge portions 4a and the lower sides of the glass substrate 4 which are carried out are placed on the transport roller 24 (n-th diagram). The self-supplying air blower supplies the compressed air to the hand %' via the Camp Change @知人势八工田S路 and the coupled state. The compressed air is ejected upward from the blow hole 27a which is opened above the hand (4). Thereby, between the glass substrate 4 carried out and the upper surface of the hand 26 6 6 A, the upper layer of the emulsion is formed between the hexagram and the &L & The side edges of the two sides are also close to the central portion of the substrate 4 (which is supported in a non-contact manner by floating the upper layer of air 5 hrs. After that, the driving roller is driven to rotate the conveying roller 24 about its axis 3] 6503 1277591 J The glass substrate 4 which is pre-loaded in the A substrate is not given by the frictional force generated by the contact with the transporting 2 4 with respect to the lower side edges 4a, 4b of the lower side thereof. Moving toward the front of the transport direction

The transporting force of the white arrow direction of the wide image is carried out by the substrate U. The lower side edges 4a and 4b of the glass substrate 4 are directly supported from below by the transport roller 24 that is in contact with the 盥苴疋1. However, the contact portion between the lower side of the transfer roller and the lower side edge portion 4a'4b is also close to the center of the substrate by 2 minutes and 4c, and the compressed air supplied to the hand portion 26 is sprayed from the blow hole, and the air is blasted through the upper layer. Supported in a contactless manner. When the glass substrate 4 is completely carried out of the substrate ® 1, it is shielded from the air blower to the air, and at the same time, as shown in Fig. 15A and the first;; no, the roller is moved back and forth to move the roller 24 and the hand back. Pull out from the substrate 匣1. An example of a moving out action. As described above, according to the substrate storage and conveyance device of the present embodiment, the E-elevating mechanism 3 can be used to adjust the substrate PCT so that the transport roller Μ and the hand 26 can be pulled out/inserted in the frame section of the glass substrate 4 to be loaded and unloaded. } After the height position of the conveyance roller 24 is removed, the conveyance roller 24 is pulled out/inserted in the horizontal direction inside and outside the substrate, and the multi-joint robot is not required to be used, and the glass substrate 4 can be arbitrarily carried into and out of the substrate. The substrate 匣1. In addition, during the loading and unloading, the portion 26c of the glass substrate 4 near the center of the substrate is always floated by the hand 26 to be supported in a non-contact manner, so that the contact with the glass substrate 4 is only inserted under the transfer roller 24. Both sides 4a, 4b. Further, the glass substrate 4 can pass through the transport roller 24, and the 316503 16 1277591 can also reduce the length of the transport roller 24 directly contacting the glass substrate 4 in a non-contact manner with the hand 26 that is longer than the long distance. Minimize substrate contamination. The present invention is not limited to the above embodiment, and various modifications can be made without departing from the scope of the invention. The outer drive device of the (7) moving mechanism may be a clip for holding the side edges of the glazed plate 4 and a moving mechanism for moving the clip to the substrate. Replace the roller Μ device. The 丨 丨 ’ 】 另 另 另 另 另 另 另 另 另 另 另 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 [Additional Technical Matters] The photo-loading/removing system using the above-described substrate-conserving and conveying device will be described in the first and second drawings of Mai Zhao. In the following description, the same constituent elements as those already described will be denoted by the same reference numerals. Fig. 16 is a system configuration diagram of the substrate loading/unloading system. This substrate loading/unloading system is configured on the AGV (Aut(10)ateci Guided

Between the substrate transfer device such as a vehicle and an unmanned vehicle, and the processing device that applies a predetermined process to the glass substrate 4, the substrate 匣1 is transferred to the substrate transfer device (substrate transfer) processing device, and the self-processing device The recovered substrate 匣 1 is delivered to the substrate transfer device. As shown in Fig. 16, the substrate loading/unloading system is a crane K; a first-in and second-out device FI, F2 (substrate supply device); a substrate storage and transport device {π, H2; 17 316503 1277591 and a transfer device p Composition. Among these components, the first-in and second-out device π and the substrate storage and transport device H1 are provided on the substrate transfer path, and the first-in and second-out I-out F2 and the substrate-storage transport device H2 are provided on the substrate transfer path. The crane K supplies the substrate g i taken out from the substrate transfer device to the device F1 after the first entry, and at the same time, the substrate 2 is fed to the substrate transfer device. In the crane Κ / ί common to the first in and out: the substrate 匣 1 of the clothing F1 accommodates the glass substrate 4 before the process, and the other side, the substrate 匡 1 received and repaired after the crane first enters the device F2 The treated glass substrate 4 is processed. The F1 system is placed in the plurality of glass substrates 4 of the substrate 匣1, and the glass substrate 4 which has been hoisted is first transferred to the substrate storage/transport device H1. On the other hand, the substrate storage/transport device H1 serves as a random access buffer (R) for delivering the glass substrate 4 to the transfer device p, and the glass substrate supplied from the device η before and after the device η The substrate is placed on the substrate 1 of the substrate, and the glass substrate 4 is placed in the plurality of glass substrates 4 of the substrate 匣1, and the glass substrate 4 is fed to the transfer device p in accordance with the requirements of the transfer device p. The transfer device p is a transfer device that transfers the glass substrate 4 by moving the handle, and transfers the glass substrate 4 supplied from the substrate storage transfer device (1 (before processing) to the processing device, and the glass substrate 4 is recovered from the processing device. (Processing completed), and delivered to the first-in and second-out device F2, the substrate storage and transport device 2 as a random access buffer user who delivers the glass substrate 4 to the first-in and second-out device F2, and the self-transfer device ρ supplies 316503 1277591. The glass substrate 4 (completed in processing) is sequentially accommodated in the substrate 1 of the substrate, and is housed in a plurality of glass substrates 4 of the substrate 1 and delivered to any of the glass substrates 4 required by the advanced device F2. Exit device F2. The first-in and second-out device F2 sequentially stores the glass substrate 4 supplied from the substrate storage and transport device in its own substrate 1. Fig. 17 is an explanatory view showing a substrate loading flow of the substrate loading/unloading system as described above. As shown in the above section (1), the plurality of glass substrates 4 accommodated in the substrate 匣1 in the first-in and second-out devices are taken out from the rear-mounted glass substrate 4, and are temporarily buffered (accommodated) on the substrate. Inside the substrate 匣1 of the device H1. Then, according to the request of the transfer device p or the processing device, any glass substrate 4 accommodated in the substrate 1 of the substrate storage and transport device H1 is supplied to the processing device through the transfer device p. In the first-in and second-out device f?1, after all the glass substrates 4 in the substrate 匣1 are supplied to the substrate storage and transport device H1, if the middle portion (11) does not, the substrate that is first in the empty state of the device F1 The 匣} is removed by the crane K, and is exchanged for the substrate on which the glass substrate 4 is housed. During this replacement, the substrate storage/transport device H1 continues to supply the glass substrate 4 buffered in its own substrate 1 to the processing device. Then, as shown in the following section (ill), when the next substrate 匣丨 is transferred to the first-in and second-out F1 by the crane κ, the first-in and second-out device F1 restarts the supply of the glass substrate to the substrate storage/transfer device H1. 4. In other words, even if the substrate storage and transport device H1 is present, even if the glass substrate 4 is supplied from the first-in-first-out device η, the glass substrate 4 is continuously supplied to the processing device without interruption. Fig. 18 is an explanatory view showing the flow of the substrate transfer 316503 19 1277591 of the above-described substrate loading/unloading system. First, the substrate carry-out flow (1) on the left side will be described. When the substrate is carried out, as shown in the above paragraph (1), the processed glass substrate 4 ίτ is sequentially stored in the substrate 邑丨 of the substrate storage and transport unit 2 by the transfer device p. Further, the substrate storage and transport unit 2 supplies its own substrate [the glass substrate 4 in the first order to the first-in and second-out device F2. Here, the substrate 匣1 of the first-in and second-out-out device F2 is filled with the glass substrate 4 The substrate 匣1 is removed by the crane , and replaced with the substrate 匣1 in the empty state, but during the replacement, the substrate storage and transport device H2 continues to receive the glass substrate recovered from the processing device. 4' Therefore, the glass substrate 4 can be continuously recovered from the processing apparatus without interruption. Next, the substrate carry-out flow (2) on the right side will be described. The glass substrate 4 which is collected from the processing apparatus (for example, the inspection apparatus) and stored in the substrate 匣j of the substrate storage illuminator H2 has good and defective products. The defective # is discharged from the processing clothes at an arbitrary timing, so that the substrate 保管i on the substrate storage and transport Η2 contains the good and defective products in an orderly manner. Here, since the f-plate storage and conveyance device is arbitrarily assigned to any of the glass substrates 4, the above-mentioned (port) is not provided, and only the good product is supplied to the first-in and second-out device F2, and the port is temporarily read on the substrate. It is similar to the storage and transport device. Then, if the delivery of the good product in the middle section :: (1) is completed, the defective product is collected and the device F2 is supplied. Then, the following paragraph. (1), when the first (more) F2 is filled with the base (4) 1 and the substrate is removed by the crane ^, the substrate storage and transport device HZ, and the feast are good and not good. Good product. 316503 20 1277591 According to the above-described substrate loading/unloading system, the substrate storage/transporting devices H1 and H2 serve as a random access buffer for temporarily storing the glass substrate 4 while arbitrarily storing the glass substrate 4 therein. Achieve glass

The glass substrate 4 can be continuously carried in and out, and the good products can be discharged separately. 〇D In addition, if necessary, only one of the substrate storage and transport devices may be provided. Further, in the substrate loading/removing system, the first-in-after-out device Fb is used as the substrate supply device, but the substrate supply device is not limited to the first-in-after-out devices F1 and F2. The same device as the substrate storage and transport devices hi and h2 may be used as the substrate supply device. / Next, another embodiment of the present invention will be described with reference to Figs. 19 to 21 . The substrate storage and conveyance device of the present embodiment is applied to, for example, a glass substrate such as a liquid crystal display panel (LCD) or a plasma display panel (PDp), and is large and thin, and supports the conveyance while preventing contamination or the like. As shown in Fig. 19 and Fig. 2, the two side edges are configured to have a substrate PCT 1 〇 1 and a transfer roller (substrate loading/unloading means) 124. The transport roller unit 1〇2: and the g elevating mechanism (elevating mechanism) 1〇3. The substrate 匣101 is formed in a substrate transport direction (the white arrow direction in FIG. 9). The front side and the rear side are box-shaped shapes of the entrance port lila and the carry-out port 11b of the glass substrate 104, and the inner space portion is formed in the vertical direction. The plate frame segments for loading and unloading and accommodating the glass substrate 104 in a horizontal posture. The substrate supporting portion 112 constituting each of the plate frame segments is formed to be horizontally extending in a direction perpendicular to the direction in which the substrate transfer 316503 1277591 is fed (ie, the 'substrate width direction), and the per-plate frame portion faces the substrate. The transport direction is set at a predetermined interval (five in this embodiment). According to the above configuration, the substrate E 1Q1 holds the glass substrate 104 in a horizontal posture with the substrate supporting portion ΐ 2, and can be accommodated in a plurality of stages in the vertical direction. The inside of the substrate supporting portion 112 is formed with a blowing hole 114 provided on the upper surface (substrate supporting surface) 112. The blowing hole 114 is formed over the entire length of the upper core (the direction perpendicular to the substrate conveying direction). 2, a plurality of spacers are formed at the same time, and the hole group is blown along the i-row in the longitudinal direction, and is arranged on the substrate transfer side, the front side, and the rear side. The two ends of the support portion 112 are located at the center of the substrate transfer direction # U2a. There is a coupler 115. The coupler ία can be connected to the blowing hole 114 of the substrate supporting portion 112, and the air supply to the air supply source). The air supply air blower or the compressor is supplied to the air supply and air supply. The transport roller unit 1〇2 of the plurality of transport rollers 124 and the nozzle (not shown) installed at the tip end of the pipeline. When the transport 124 is inserted into the substrate cassette 101, the nozzle coupler is inserted along with the insertion operation. The one end side of the 115 can be supplied to the respective substrates by the air blower. The air is supplied to the substrate 112. When the take-up roller 124 is pulled out of the substrate 匣101, the nozzle will be detached from the light clutch 115. Self-supply The fan supplies air to each of the substrate supporting portions 112. The coupling portion 11 is connected with a distribution pipe 116 extending toward the front side and the rear side of the substrate conveying direction 316503 1277591. The distribution pipe 116 is connected to the substrate supporting portion (1) connected by 115, respectively. The end of the substrate support portion 112. The compressed air supplied by the L-Sir fan is distributed to the substrates, and then, when the air blower is driven, it is supplied to each substrate via a pipe, a nozzle, a light-cry and a distribution pipe 116. The compressed air of the part (1) is sprayed upward, so that the central portion (10) of the lower surface of the glass substrate 104 carried in and out of the substrate 1 is supported in a non-contact manner. The substrate H10H is placed on the substrate gi in a glass substrate (4). The segment in the 〇i and the glass plate are carried out from any of the plate segments in the substrate E1〇1, and the method of forming the traveling roller 124 supported at a fixed position in the vertical direction can be relatively moved up and down. The E-elevating mechanism 103 for moving up and down is provided with a bracket 1 31 constituting a bottom portion (1) c for supporting the substrate gi 〇j, and a ball screw for moving up and down the carriage 131 by the feeding machine a guiding portion 132 for guiding the bracket i3i to move up and down; and a sensor for detecting the value of the upper and lower directions of the substrate s 101. The carrying A transporting wheel unit 102 has: a glass substrate i as a conveying object In the width direction, in other words, the pair of bases m are disposed opposite to each other in a direction perpendicular to the direction in which the glass substrate is conveyed, and the plurality of pedestals i2i are fixed to the substrate in the direction of the substrate. The transmission frame 122 of the four transmission frames 122 is rotatably supported by the transmission frame 122 through the bearing equiax support 123. 316503 23 1277591 Each of the transmission frames 1 22 is arranged side by side in the direction in which the substrate is conveyed. A plurality of (six in this embodiment) transport roller 丨24. A roller drive gear 125 is provided at the base end of the transport roller 124, and a rotational driving force from a drive motor (not shown) is transmitted to the transport roller 124 through the roller drive gear 125. In addition, the removal/insertion of the transfer roller 124 in the substrate E 101 is performed by integrally fixing each other: the susceptor 121 of the transfer frame 122 is oriented in the horizontal direction, and the roller is moved forward and backward in a direction perpendicular to the substrate transport direction. The organization (not shown) was implemented. Next, an operation sequence in the case where the glass substrate 104 is carried into any of the plate segments of the substrate g 101 in the substrate storage and conveyance device having the above configuration will be described. First, the crucible lifting mechanism 103 is driven to raise and lower the substrate 匣1〇1 so that the pallet section to be carried into the glass substrate 104 (hereinafter referred to as the predetermined loading section) is moved before the transporting roller 124. At this time, the upper surface 112A of the substrate supporting portion 112 corresponding to the predetermined loading section is positioned slightly lower than the conveying roller 124. Then, the roller is driven to and from the moving mechanism to advance the transport roller 124 and insert into the substrate 匣ιοί. At this time, the nozzle fixed to the transmission frame 122 is coupled to the switching boundary 115 corresponding to the substrate supporting portion 1 1 of the predetermined loading section. Further, when the air blower supplies the compressed air to the coupler 115 via the pipe and the nozzle, the compressed air is distributed to the other substrate support portion 112 through the substrate support portion 112 & and the distribution pipe 116, and corresponds to the predetermined carry-in 1 316503 The blowing hole 114 of the substrate supporting portion 112 of 24 1277591 is ejected upward. Thus, an air floating upper layer is formed between the loaded glass substrate 1〇4 and the upper surface 112A of the substrate supporting portion U2, and the lower central portion 1〇4c of the loaded glass substrate 104, that is, the support is removed. Portions of the lower side edges 1 〇 4a, 1 〇 4b of the lower side of the transport roller 124 are supported in a non-contact manner through the air floating upper layer. The drive motor is driven to and/or after, and the rotational driving force is transmitted to the transport rollers 12 and 4 through the roller drive w wheel 125 to rotate the transport roller 124 about its axis. In the case of the second substrate, the glass substrate 104 transferred to the upstream side of the substrate cassette 101 is imparted with a frictional force due to contact with the transfer rollers with respect to the lower edge portions 104a, 104b of the lower surface thereof. The conveyance force in the forward direction is carried into the substrate E 101. At this time, the underside of the glass substrate 104 - side, 彖.卩l〇4a, l〇4b are directly supported from below by the transfer roller 124 in rotational contact therewith. On the other hand, the lower surface of the glass substrate 1〇4 from which the contact portion between the transfer roller 124 and the lower side edge portions 1〇4a and lti4b is removed is ejected from the blow-out hole 114 to the substrate support by the transmission recombiner 115; The air-floating layer formed by the gap formed between the top of the transport roller 24 and the upper surface (10) of the substrate supporting portion 112 located at a position lower than the position of the transport roller 24 is supported in a non-contact manner. . As described above, when the substrate is loaded into the substrate H 101, the lower central portion 104c of the glass base f 104 is always floated from the substrate supporting portion 112, so that the contact with the glass (five) substrate 104 is only relative to the lower side edges. , 1 〇 316503 1277591 transport roller 1 24, and the substrate contamination can be minimized. When the glass substrate 104 is carried into the substrate {£1 〇1, the air supply from the air supply blower to the substrate support portion 112 is shielded, and the 匣 lifting mechanism 103' is driven to raise the substrate ,ιοί, and the lower portion of the lower glass substrate is placed. 104c is registered in the substrate supporting portion 112. Then, when the glass substrate 104 is floated from the transport roller 124, that is, when the glass substrate is completely stored in the substrate supporting portion 112, the roller reciprocating mechanism is driven to retract the transport roller 124, and the transport roller 124 is moved from the substrate.匣 1 pulled out. As described above, the carry-in operation is completed. Next, an operation sequence of one of the glass substrates 1 〇 4 of any of the plate segments stored in the substrate stack will be described. First, the crucible lifting mechanism 103 is driven, and the substrate is lifted and lowered to make the pallet section (hereinafter referred to as the predetermined unloading section) of the glass substrate 104 stored and unloaded before the conveyance roller 124 moves. At this time, the upper surface 112A of the substrate supporting portion 112 corresponding to the predetermined unloading portion is positioned slightly higher than the conveying roller 124. Then, the roller reciprocating mechanism is driven to advance the transfer roller 丨 24 to be inserted into the substrate 匣 101, and then the 匣 lifting mechanism 1 〇 3 is driven to lower the substrate 匣 101, and the lower two of the predetermined glass substrates 1 〇 4 are removed. The side portions l4a and 4b are registered in the transport roller 124. - At this time, the nozzle fixed to the transmission frame 122 is coupled to the substrate support portion corresponding to the 疋 carry-out section! Coupler 1 i 5 of j 2a. Therefore, when the J ^ fan supplies compressed air to the clutch 115 via the pipe and the nozzle, the air is distributed through the substrate support center and the distribution f 116 to the other base 316503 26 1277591 plate support portion 112, The ejection holes 114 corresponding to the respective substrate supporting portions 112 of the predetermined unloading section are ejected upward. Thereby, the central portion of the lower surface of the glass substrate 1〇4 to be carried out is floated from the upper surface U2a of the substrate supporting portion 112, and is supported by the substrate supporting portion 112 in a non-contact manner. Then, when the drive motor is driven to rotate the transport roller 124 about its axis 2, the predetermined glass substrate 1〇4 stored in the substrate cassette 101 is caused by the opposite side edges 104a with respect to the lower side thereof. The frictional force generated by the contact of the transport roller 124 is imparted to the transport force in the forward direction of the transport and transport, and is carried out of the substrate 匣101. In this case, the lower side edges 1〇4a and 1〇4b of the glass substrate 104 are directly supported from below by the transfer roller 124 in rotational contact therewith, but the lower central portion of the glass substrate 1Q4 from which the contact portion is removed transmits air. The upper layer is floated and supported in a non-contact manner. As described above, when the substrate is carried out from the substrate cassette 101, the lower central portion 1G4c of the glass substrate 104 is always floated from the substrate supporting portion 112, so that the contact with the substrate 104 is only the transport roller 124 with respect to the lower sides. The substrate contamination can be minimized. As described above, according to the substrate storage and conveyance device of the present embodiment, the transfer roller 124 can be pulled out/inserted in the plate frame section of the glass substrate 1 to be loaded and unloaded, and the substrate g ι is adjusted by using the lifting and lowering mechanism 1〇3. ι and the transfer roller = 124 south position, 'by pulling the transfer roller to the inside and outside of the substrate, horizontally pulling out/inserting, without having to use a multi-joint robot, or base money for a small substrate storage pitch 1 〇1 Anyone moving out of the broken glass 316503 27 1277591 Substrate 10 4. Further, during the loading and unloading, the lower surface portion 104c of the glass substrate 1〇4 is always floated from the substrate supporting portion 112 and held non-contact, so that the contact with the glass substrate 104 is only the insertion of the conveying roller 124. Both sides of the face are 1G4a and 1G4b, and the contamination of the substrate can be minimized. In addition, with the insertion operation of the substrate roller 124 on the substrate 匣1G1, the substrate support 胄"2 surely = ill 钿2 gas corresponding to the plate frame segment to be carried in and out, and the non-contact support of the glass substrate 1 can be realized. At the same time, since the compressed air is supplied only to the substrate supporting portion corresponding to the plate frame segment to be carried in and out, the entire device can be miniaturized. Further, the present invention is not limited to the above embodiments, and various changes can be made without departing from the subject matter. For example, the substrate loading/unloading means may be an external driving device having a clip for holding both side edges of the glass base t 104 and a sliding mechanism for moving the clip to the substrate, instead of the conveying roller 1 Transmission device. Further, the splicing device 115 may be provided in the substrate supporting portion 112 which is juxtaposed to two or more plate segments. At this time, the coupler 1丨5 can be arranged at an appropriate pitch in accordance with the distance between the horizontal direction and the vertical direction between the size of the coupler 11 5 and each of the substrate supporting portions Π2. For example, Fig. 21 is a schematic view showing an example of the arrangement of the mouth of the lighter 115 with respect to the substrate supporting portion 11 2, and as shown in the figure, the substrate is supported every other in the k-flat direction and the vertical direction. The unit 112 may be provided with one coupler 115. 316503 1277591 [Additional Technical Matters] The smiles are also known. Figures 22 and 24 show the substrate loading/unloading system using the above-mentioned substrate. In the following description, the same constituent elements as those already described will be denoted by the same reference numerals. The figure 22 is a system configuration diagram of the substrate loading/unloading system. The substrate loading/unloading system is disposed between a substrate transfer device such as Κν and a processing device that applies a predetermined process to the glass substrate 104, and delivers the substrate 匣1〇1 (substrate carry-in) processing device that is transported by the substrate transfer device. The substrate g 101 recovered from the processing device is transferred to the substrate (the substrate is carried out) to transport the substrate. As shown in Fig. 2, the substrate loading/unloading system is constituted by a crane K2, a first-in and second-out device Fu, F12 (substrate supply device), a substrate-contained transport device H11 and H12, and a transfer device P2. Among these constituent elements, the first-in and second-out device F11 and the substrate storage/transport device H11 are placed on the substrate loading path, and the first-in and second-out device F12 and the substrate storage/transport device H12 are provided on the substrate carrying-out path. The crane K2 supplies the substrate 匣1 〇 1 taken out from the substrate transfer device to the first-in and second-out device F11, and delivers the substrate 匣1 01 recovered from the first-in-first-out device F丨2 to the substrate transfer device. The substrate E 101 of the crane K2 supplied to the first-in and second-out device F11 houses the glass before the process is disposed away from the plate 104, and on the other hand, the crane K2 is housed in the substrate 101 taken out from the first-in and second-out devices F12. The glass substrate 104. The first-in and second-out device F11 is housed in a plurality of glass substrates 104 of the substrate 匣1〇1, and the glass substrate 104 that is then accommodated is first transferred to the base 彳 316 503 Ϊ 277 591 591 奴 送 。 。 。 。. On the other hand, the substrate storage/conveying device η 11 is used as a check-off, and the random access buffer for delivering the glass substrate 1 〇 4 to the transfer device Ρ 2 is used, and the glass substrate 104 supplied from the first-in and second-out devices is sequentially At the same time, the substrate 匣1〇1 is placed in the substrate 匣101=the last glass substrate 104, and the substrate 104 is transferred to the transfer device ρ2 according to the requirements of the transfer device Ρ2. The transfer device ρ2 is a transfer device that transfers the glass substrate 1〇4 by moving on the way, and transfers the glass substrate 1〇4 supplied from the substrate maintenance transfer device Η11 to the processing device, and collects the glass from the processing device. The substrate 1〇4 (process completion) is delivered to the first-in and second-out device F12. The substrate storage/transport device 12 is a random access buffer user who delivers the glass substrate 1〇4 to the first-in and second-out device F12, and sequentially receives the glass substrate 1〇4 (process completed) supplied from the transfer device P2. At the same time, the substrate 匣1 is placed in a plurality of glass substrates 104 accommodated in the substrate 匣1〇1, and any glass substrate 104 required by the FIFO 2 is delivered to the first-in and second-out device F12. The first-in and second-out devices n2 sequentially store the glass substrates 1 to 4 supplied from the substrate storage and transport unit H12 on their own substrates 匣1 to 〇1. Fig. 23 is an explanatory view showing the flow of the substrate carrying in the substrate loading/unloading system as described above. As shown in the above section (1), the plurality of glass substrates 1 to 4 accommodated in the substrate 101 in the first-in and last-out devices are taken out from the rear-mounted glass substrate m, and temporarily buffered (accommodated) on the substrate for storage and transportation. The substrate of the device fm is within £1()1. Then, according to the request of the transfer device p2 or the processing device, the substrate storage and transport device 316503 30 1277591 104 is passed through the transfer device. 2 Any glass substrate in the substrate E 101 is supplied to the processing apparatus. Here, when the first in and out are placed, the F11 will be placed in the substrate of the own film: 101. When the glass substrate 104 is supplied to the substrate storage and transport device Hn, if it is removed, it is removed by the crane K2 and replaced with The substrate on which the glass substrate is housed is ιοί, but during the replacement, the substrate storage and transport device continues to supply the glass substrate 1 buffered in its own substrate to the processing device 1, as described in the following section (111). When the lower-substrate £1〇1# is carried by the crane Κ2 to the first-in and second-out-out device F11, the first and second-out F11 systems are restarted to supply the glass substrate 1〇4 to the substrate storage and transport I to H11. In other words, since the substrate storage conveyance device ,1, that is, the supply of the glass substrate 1〇4 from the first-in-first-out device F11 is interrupted, the glass substrate 1 is supplied to the processing device without interruption. Fig. 24 is a view showing the state in which the substrate of the present substrate loading/unloading system is carried out extremely privately. First, the substrate carry-out flow (丨) on the left side will be described. When the substrate is carried out, as shown in the above paragraph, the processed glass substrate ι4 is sequentially stored in the substrate E101 of the substrate storage/transport device H12 by the transfer device P2. Then, the substrate storage and transport unit H12 sequentially supplies the glass substrates 1 to 4 in the substrate 匣1〇1 to the first-in and second-out device F12. When the substrate 匣1 of the F12 is filled in first and then the glass substrate 104 is filled, the substrate 匣101 is removed by the crane K2 and replaced with the substrate 匣101, which is in an empty state, as shown in the following section (ii). However, in the case of the change 31 316503 1277591, the substrate storage transfer device 12 continues to receive the glass substrate 104 recovered from the processing device, so that the recovery of the glass substrate 1〇4 from the processing device is continuously performed without interruption. Next, the substrate carry-out flow (2) on the right side will be described. And the glass substrate 1 〇 4 胄 与 与 自 自 自 自 自 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 The defective product is discharged by the processing device at any timing. Therefore, the substrate of the storage and transport device H12 is stored in a non-ordered manner. Here, since the substrate storage conveyance device H12 can dispense an arbitrary glass base plate 104, as shown in the above section (1), only the good product is selected and supplied to the first-in and second-out #F12, and the defective product is temporarily held in the substrate storage and conveyance. Device committed. Then, as shown in the middle section ((1), after the delivery of the good product is completed, the defective product is supplied to the first-in and second-out device F12. Then, as shown in the following paragraph ^(111), the device is filled in 2 after the first-in and second-out devices. When the substrate is hidden and replaced, the substrate storage and transport device Η continues to contain good and defective products as shown in the following section (lii). According to the substrate transfer as described above, m is transferred to the spring device Hl i H12 is used as a random access buffer for accommodating the glass substrate 104 at the same time as the glass substrate i 〇4, so that the glass substrate 104 can be continuously carried in and out, and good or not In addition, if necessary, only one of the substrate storage conveyance device and the crucible may be provided. Further, in the substrate loading/unloading system, the pre-entry garments Fn and F12 are used as the substrate supply device, but the substrate is used. The supply device 316503 32 1277591 is not limited to the first-in and last-out devices FI 1 and F12. The same devices as the substrate storage and transport devices Η11 and Η12 may be used as the substrate supply device. The present invention is not limited to the embodiments described above, and the present invention is not limited to the embodiments described above. Various modifications, omissions, substitutions, and other changes may be made without departing from the spirit and scope of the invention. [Brief Description of the Drawings] Fig. 1 is a plan view showing a main part of a substrate storage and conveyance device according to an embodiment of the present invention. Fig. 2 is a view showing a substrate storage and transportation shown in Fig. 1. Front view of the device. Fig. 4 is a side view of the substrate storage and transport device shown in Fig. 4. Fig. 4 is an enlarged cross-sectional view showing the main part of the embodiment of the transfer roller shown in Fig. 5. Fig. 5 is a view The main part of the transfer roller shown in Fig. 1 is an enlarged cross-sectional view. The plan view of the substrate shown in Fig. 1 is a plan view showing the state in which the glass substrate is carried into the substrate shown in Fig. 1. Fig. 7 is a front view showing the same state. In the substrate loading operation, the state in which the third lifting device is lowered is a front view. The figure shows that the seven-port wheel and the hand shown in Fig. 1 are inserted during the substrate moving operation. The main part of the substrate in the state of the substrate is enlarged and cross-sectional view. (10) ^The figure 9 shows the top view of the scorpion-like scorpion shown in Fig. 1 η Β Β Β 316 316 316 316 316 316 316 316 316 316 316 316 316 316 316 316 316 316 316 316 316 316 316 316 316 316 316 316 316 316 316 316 316 316 316 316 316 316 316 316 316 316 316 316 316 316 316 316 316 316 316 316 316 316 316 In the state shown in the figure, the top view of the state in which the transport roller and the hand are pulled out from the substrate ,, the f RB diagram is the same as the front view. Fig. 12 shows the transport roller shown in Fig. 1 during the substrate unloading operation. And an enlarged cross-sectional view of the main part of the state in which the hand is inserted into the substrate. Fig. 13 is an enlarged cross-sectional view showing the main part of the state in which the substrate is lowered as shown in Fig. 12. Fig. 14 is a plan view showing a state in which the glass substrate is carried out from the substrate 所示 shown in Fig. 。. Fig. 15A is a plan view showing a state in which the transport roller and the hand are pulled out from the substrate g after the glass substrate is carried out from the substrate shown in Fig. 1, and Fig. 15B is a front view in the same state. Fig. 16 is a system configuration diagram of a substrate loading/unloading system according to an embodiment of the present invention. Fig. 17 is an explanatory view showing a substrate carrying-in process of the substrate loading/unloading system. Fig. 18 is an explanatory view showing a substrate unloading process of the substrate loading/unloading system. Fig. 19 is a plan view showing the main part of the substrate storage and conveyance device according to another embodiment of the present invention. Fig. 20 is a front view of the substrate storage and transport device shown in Fig. 19. 34 316 503 1277591 2i is a schematic enlarged view of a main part of a substrate storage and conveyance device according to another embodiment of the present invention. Fig. 22 is a system configuration diagram of a substrate loading/unloading system according to an embodiment of the present invention. Fig. 23 is an explanatory view showing a substrate carrying in process of the substrate loading/unloading system. Fig. 24 is an explanatory view showing the aforementioned substrate process. [Description of main component symbols] Substrate unloading and unloading system of the loading/unloading system 101 Substrate E 2 > 102 3 ^ 103 ® Lifting mechanism (lifting mechanism) 4, 104 Glass substrates 4a, 4b, 1 0 4 a, 1 〇 4 b The lower side edge portions 4c convey the roller unit sin near the center of the substrate 11a, 111a. The inlets 11 c, 111 c the bottom 21, 121 the base 23, 123 24, 124 24a 24c 26 26A 27a 11 b, 111 b the outlet 12 112 substrate support portions 22, 122 transfer frame shaft support transport rollers (substrate loading/unloading means) substrate transfer portion roller drive] ^ roller body 24b elastic body 25, 125 hand 112A upper surface (substrate support surface) air passage 114 blown hole 2 air passages 316503 35 1277591 31, 131 brackets 33, 132 104c lower central portion 115 11δ distribution pipe Κ, Κ 2

Fi, F2, F11, F12 first-in and last-out devices HI, H2, H11, H12 substrate storage and transport devices P, P2 transfer devices Guides Couplers Cranes 36 316503

Claims (1)

1277591 X. Patent application scope: 1. A substrate transfer device having a substrate 匣(1)' that is carried in a plurality of stages in a vertical direction with respect to a plurality of substrates (4), and which is transported toward and away from the substrate (4) The substrate loading/unloading means (24) for extracting/inserting the reciprocating movement in the vertical direction of the advancing and retracting direction, and the substrate loading/unloading means (24) respectively supporting the lower side edges of the substrate (4) The plurality of pairs (4a, 4b) are transporting the rollers (24). The substrate transfer device according to the first aspect of the invention, wherein the base plate loading/unloading means (24) has a hand (26) for supporting the substrate (4) in a non-contact manner, and the core hand ( 26) is longer than the transport roller (24) in a direction perpendicular to the advancing and retracting direction of the substrate (4). 3. The substrate transfer apparatus according to the second aspect of the invention, wherein the substrate supporting surface (26A) of the hand (26) is provided with a blowing hole (27a) for supplying air from the air supply source. 4. The substrate storage and transport device (H1, H2) includes: Φ A substrate 匣 (1) that is loaded and carried out in a horizontal posture in a horizontal posture and stored in a plurality of stages in the vertical direction; Patent Application No. 1 The substrate loading/unloading means (24) and the elevating mechanism (3) for moving the substrate M(1) up and down relative to the substrate loading/unloading means (24). The substrate loading system includes: 316503 1277591 a substrate storage and transport device (H1) of the application scope of the substrate (4), and a substrate g (1) provided on the loading path upstream of the substrate storage and transport device and supplied from the outside The substrate (4) is supplied to the substrate supply device (F1) of the substrate storage and transport device (H1), and the substrate (4) from which the substrate storage and transport device (Μ) on the path is loaded is supplied to the substrate. The device transfer device (p). The substrate transfer system includes: a substrate storage transfer device (Η2) of the fourth application patent scope provided on the substrate (4) carry-out path; The substrate supply device (ρ 2) provided in the substrate 匣 (1) and disposed downstream of the substrate storage and transport device (Η), and the substrate (4) supplied from the substrate storage and transport device (Η2) And a substrate (4) for discharging the substrate (4) discharged from the processing device to the substrate transfer device (Η2). The substrate loading/unloading system includes: a substrate (4) The substrate storage and transport device (11丨, Η2) of the fourth application of the patent application scope on the loading path and the unloading path; the loading path is provided upstream of the substrate storage and transport device (Ηι), and is supplied from the outside The substrate (4) in the substrate (1) is supplied to the first substrate supply device (F1) of the substrate storage and transport device (Η1), and is disposed on the substrate storage and transport device in the first-out route control. a second substrate supply device (F2) that houses the substrate (4) supplied from the substrate storage and transport device (H2) in the substrate cassette (1) downstream of the 316503 38 1277591; and the substrate on the loading path Storage and transport device (H丨The substrate (4) to be delivered is supplied to the processing device, and the substrate (4) discharged from the processing device is supplied to the transfer device (p) of the substrate storage and transport device (H2) on the carry-out path. (101) A plurality of substrates (1〇4) are carried in and out in a horizontal posture, and are accommodated in a plurality of stages in the vertical direction, wherein the substrate (1〇4) is carried when the substrate (104) is carried in and out. The lower central portion (104c) supports the substrate supporting portion (112) in a non-contact manner. 9. The substrate cartridge (101) of claim 8, wherein the substrate supporting surface (11212) of the substrate supporting portion (112) is provided with a blowing hole (Π4) for supplying air from the air supply source. 10. The substrate storage and transport device (Hii, H12) includes a substrate 匣 (1 〇 1) of the eighth application patent scope; and a direction perpendicular to the advancing and retracting direction of the substrate (104) a substrate loading/unloading means (124) for pulling out/inserting into the substrate 匣 (1〇1), and lifting and lowering the substrate g (101) relative to the substrate loading/unloading means (124) Institution (1〇3). 11. The substrate storage and transport device (H11, H12) according to the first aspect of the invention, wherein each of the substrate supporting portions (n2) has a device for inserting/inserting the substrate loading/unloading means (12 4) And loading and unloading, the air is supplied from the air supply source to the blow-out hole (114) intermittently. 316503 39 1277591 12. The substrate loading and unloading system includes: a substrate storage and transport device (Hli) according to the first application of the substrate loading path; and a substrate storage and transport device on the loading path The substrate (丨(10)) in the substrate 匣(1〇1) supplied from the outside is supplied to the substrate supply device (F11) of the substrate storage and transport device (H11) upstream of (Hu); The substrate (104) delivered by the substrate storage and transport device (the above) is supplied to the transfer device (p2) of the processing device. 13. The substrate carrying-out system includes: a substrate storage and transport device (H12) according to the first aspect of the invention, which is provided on a substrate carrying-out path; and a soil storage and transport device (H12) Downstream, the substrate supply device (104) supplied from the substrate storage and transport device (H12) is housed in the substrate supply device (Fi2)| and the substrate (1) discharged from the processing device (1) 〇4) The transfer device (P2) supplied to the substrate storage and transport device (H12). 14. The substrate loading/unloading system includes: a substrate storage and transport device (1111, Hi2) which is provided on the substrate loading path and the carry-out path, and is provided on the loading path. The substrate in the substrate 匣 (1〇1) supplied from the outside is supplied to the substrate supply 316503 40 1277591 (F11) of the substrate storage and transport device (Η11) upstream of the substrate storage and transport device (Hu). In the carry-out path, the substrate is placed downstream of the substrate storage and transport device (H12), and the substrate (104) supplied from the substrate storage and transport device (Η12) is placed in the second substrate of the substrate g (ioi). (F12); and a ------- mouth-to-heart garment, ili = substrate (1G4) is supplied to the processing device, and the substrate (104) is supplied to the 屮//L clothing row The substrate θ of the device ) 2) is stored and transported by the substrate (Ρ2). ; 316503 4]