TWI276105B - P channel non-volatile memory and operating method thereof - Google Patents
P channel non-volatile memory and operating method thereof Download PDFInfo
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1276105 17870twf.doc/r 九、發明說明: 【發明所屬之技術領域】 本發明是有關於一種兄憶體及其操作方法,且特別是 有關於一種P型通道非揮發性記憶體及其操作方法。 【先前技術】1276105 17870twf.doc/r IX. Description of the Invention: [Technical Field] The present invention relates to a brother and a method of operating the same, and particularly to a P-channel non-volatile memory and method of operating the same . [Prior Art]
非揮發性記憶體中之可電抹除且可程式化唯讀記憶體 (EEPROM)可進行多次資料之存入、讀取、抹除等動作, 且存入之資料在斷電後也不會消失之功能,並兼具有存取 速度快、質輕容量大、存取裝置體積小等優點,所以已成 為個人電腦和電子設備所廣泛採用的一種記憶體元件。 典型的可電抹除且可程式化唯讀記憶體係以摻雜多晶 矽(polysilicon)製作浮置間極(fl〇ating gate)與控制閘極 (control gate)。之後,為了避免典型的可電抹除且可程式化 唯讀記憶體在抹除時,出現過度抹除的縣,而導致資料 之誤判的問題。故而在控制閘極與浮置_侧壁、基底上 方另設-個以摻雜多晶石夕製作的選擇閘極㈣⑽职⑹,即 在控制閘極與浮置關侧壁之—側設置_個選擇電晶體。 習知技射,亦有採用電荷儲存結構(ctoge trapping layer)取代多晶料置閘極,此電荷儲存結構之材質例如是 氮化石夕;這種氮切電荷儲存結構上下通常各有-層氧化 石夕’而形成氧化石夕/氮化石夕/氧化石夕(〇秦咖咖·^ 稱ΟΝΟ)#夂5層。此種元件通稱為石夕/氧化 矽/矽(S0N0S)元件。 ^ 。而:lx SQNQS記憶體元件多屬於N型通道非揮 1276105 17870twf.doc/r 記憶體的通道電流小,能源利用率很差, 個電子,才有1個電子注入。因此,在低耗 Γ子產品領域中,此種_通道非揮發性 二;=;受到相當地限制。此外,若於記憶胞之中 元“22晶體’則勢必會增加元件的尺寸,而阻礙 件朝尚積集度(mtegrity)方向發展 【發明内容】 7㈣ ^概,本發明的目的就是在提供—種 揮發性記憶體及其操作方法, ^ ^ ^ 快,且树難度高的魅/、魏_耗、操作速度 體及Ρ型通道非揮發性記憶 件過度抹除的問題。 ^擇w’即可避免疋 =明提出-種P型通道非揮發性記憶體, 己憶胞與第二記憶胞馳成。絲上設置有N二并 =’ ^第-記憶胞與第二記憶胞皆設置於Ν型井3 ’第-記憶胞包括了第-閑極、第一電荷儲存結 2 :摻雜區與-第二摻雜區。第_閘極設置於基底上…昂 =荷儲存結構設置於第1極與基底之間;第_接=了 弟-摻雜區’設置於第一閛極兩側之基底中。第二::刼 包括第二酶、第二電荷儲存結構、第三摻雜區與敏思胞 ^准區。第二閘減置於基底上;第二電荷儲存結構^摻 f二閉極與基底之間;第三摻雜區與第二摻雜區,j於 第-閑極兩側之基底中,其中第二記憶胞與第—記情胞= 1276105 17870twf.doc/r 用第二摻雜區。 T照本發_實施綱叙P型料_ 月豆,上述第一電荷儲存結構與第二 X ° k' 括氮切。 %_存結構的材質包 依照树_實施綱叙P _軸抑 脰’上述p型通道非揮發性記憶體包括設置於第二= 存結構與基底之_第—?隧介電層,以及 =— 荷儲存結構與基底之間的第二穿隧介電層。 、弟一电 依照本發明的實施綱叙p型通道非揮 體,上述第一穿隧介雷声盘笫-穿隧人 ^ ^ 氧化石夕。1私層具乐一牙陡介電層的材質例如是 依照本發明的實施例所述之p型通道非揮發性 體」上,記憶體更可以於第-閘極與第—電荷儲^結構: 間設置第一阻擋介電層。 依照本發明的實施例所述之P型通道非揮發性記憶 體,上述記憶體更包括一層第二阻播介電層,設置於二 閘極與第二電荷儲存結構之間。 依照本發明的實施例所述之P型通道非揮發性記憔 體,上述第一摻雜區耦接至一位元線,第三摻雜i耦接^ 另一位元線。 依照本發明的實施例所述之P型通道非揮發性記情 體’上述第-閘極⑽妾至一字元線,第二閘極如妾至另二 字元線。 上述P型通道非揮發性記憶體具有低電壓、低功率耗 1276105 17870twf.doc/r 才貝,且刼作速度快等優點。此外,無須另外設置一個無法 儲存資料的MOS電晶體作為選擇電晶體,因此可以大幅 縮減記憶胞的尺寸,提高元件的積集度。 本發明提出一種P型通道非揮發性記憶體的操作方 法,P型通道非揮發性記憶體包括基底、設置於基底中之 N型井區,以及设置於N型井區上串接的第一記憶胞與第 二記憶胞,其中第一記憶胞的汲極連接至第二記憶胞的源 • 極。各記憶胞包括:設置於基底上之閘極,設置於基底與 閘極之間的電荷儲存結構,以及分別設置於閘極兩侧之基 底中的源極與汲極;此操作方法包括: 程式化P型通道非揮發性記憶體之第一記憶胞時,於 - 第一記憶胞之源極施加第一電壓,於第一記憶胞之閘極施 . 加第二電壓,於第二記憶胞之閘極施加第三電壓,打開第 二記憶胞下方的通道,於第二記憶胞之汲極施加第四電 壓’於N型井區施加第五電壓,第四電壓大於第一電壓, 第四電壓大於第二電壓,以利用通道熱電洞誘發熱電子注 | 入效應程式化第一記憶胞。 依照本發明的實施例所述之P型通道非揮發性記憶體 的操作方法,上述操作方法更包括程式化P型非揮發性記 憶體之第二記憶胞時,於第一記憶胞之源極施加第四電 壓,於第一記憶胞之閘極施加第三電壓,打開第一記憶胞 下方的通道,於第二記憶胞之閘極施加第二電壓,於第二 記憶胞之汲極施加第一電壓,於N型井區施加第五電壓, 以利用通道熱電洞誘發熱電子注入機制程式化第二記憶 1276105 17870twf.doc/r 胞。 依照本發明的實施例所述之p型通道非揮發性記憶體 的操作方法,上述操作方法更包括在抹除P型通道非揮發 性圯憶體時,於第一記憶胞之閘極施加第六電壓,於N型 井區施加第七電壓,其中第七電壓大於第六電壓而足以引 奄F-N牙隧效應穿隧效應,抹除第一記憶胞。 。依照本發明的實施綱狀p型通道非揮發性記憶體The electrically erasable and programmable read-only memory (EEPROM) in non-volatile memory can perform multiple data storage, reading, erasing, etc., and the stored data is not after power-off. The function that will disappear, and the advantages of fast access speed, high light weight capacity, small access device size, etc., has become a memory component widely used in personal computers and electronic devices. A typical electrically erasable and programmable read-only memory system fabricates a floating gate and a control gate with doped polysilicon. Later, in order to avoid the typical erasable and programmable read-only memory, when erasing, the over-erased county appears, leading to misjudgment of data. Therefore, in the control gate and floating _ sidewall, the base is additionally provided with a selective gate (4) (10) (3) made of doped polycrystalline stone, that is, the side of the control gate and the floating side wall are set _ Select the transistor. Conventional technology also uses a ctoge trapping layer instead of a polycrystalline material to place a gate. The material of the charge storage structure is, for example, a nitride nitride; the nitrogen-cut charge storage structure usually has a layer-oxidation Shi Xi' and the formation of oxidized stone eve / nitrite eve / oxidized stone eve (〇秦咖咖·^ ΟΝΟ) #夂5 layer. Such components are commonly referred to as Shi Xi/Oxide/Strontium (S0N0S) components. ^. And: lx SQNQS memory components are mostly N-channel non-wing 1276105 17870twf.doc / r Memory channel current is small, energy utilization is very poor, only one electron, only one electron injection. Therefore, in the field of low-consumption tweezers, such _channel non-volatile two; =; is quite limited. In addition, if the element "22 crystal" in the memory cell is bound to increase the size of the component, and the obstacle is developed toward the mtegragrity [invention] 7 (four) ^, the purpose of the present invention is to provide - Volatile memory and its operation method, ^ ^ ^ fast, and the difficulty of tree height, Wei _ consumption, operating speed body and Ρ type channel non-volatile memory over-wipe problem. It can be avoided that the P=明 proposed-type P-type channel non-volatile memory, the memory and the second memory cell are formed. The silk is provided with N two and = ^ ^ the first memory cell and the second memory cell are set in The '-type well 3 'the first memory cell includes a first-idle pole, a first charge storage junction 2: a doped region and a second doped region. The _th gate is disposed on the substrate... Between the first pole and the substrate; the first mate = the doped region is disposed in the substrate on both sides of the first drain. The second:: 刼 includes the second enzyme, the second charge storage structure, and the third doping The second region is placed on the substrate; the second charge storage structure is mixed with the second closed electrode and the substrate; The doped region and the second doped region are in the substrate on both sides of the first-idle pole, wherein the second memory cell and the first-sense cell = 1276105 17870 twf.doc/r use the second doped region. _ implementation of the introduction of P-type material _ moon beans, the above first charge storage structure and the second X ° k ' nitrogen cut. %_ storage structure of the material package according to the tree _ implementation outline P _ axis suppression 上述 above p The non-volatile memory of the type channel includes a dielectric layer disposed on the second/storage structure and the substrate, and a second tunneling dielectric layer between the storage structure and the substrate. According to the embodiment of the present invention, the p-type channel is non-swept, and the material of the first tunneling thunder-sounding disk-tunneling device is used, for example, according to the material of the transparent layer. In the p-type channel non-volatile body according to the embodiment of the present invention, the memory may further be provided with a first blocking dielectric layer between the first gate and the first charge storage structure. According to the P-channel non-volatile memory of the embodiment of the invention, the memory further includes a second blocking dielectric layer disposed between the second gate and the second charge storage structure. According to the P-channel non-volatile memory of the embodiment of the invention, the first doping region is coupled to a bit line, and the third doping i is coupled to another bit line. In accordance with an embodiment of the present invention, the P-channel non-volatile stimuli 'the first-gate (10) 妾 to a word line, and the second gate such as 妾 to the other two-character line. The above-mentioned P-type channel non-volatile memory has the advantages of low voltage, low power consumption, 1276105 17870 twf.doc/r, and high speed. In addition, there is no need to additionally provide a MOS transistor that cannot store data as a selection transistor, so that the size of the memory cell can be greatly reduced, and the integration of components can be improved. The invention provides a method for operating a P-type channel non-volatile memory. The P-type channel non-volatile memory comprises a substrate, an N-type well region disposed in the substrate, and a first connection in the N-type well region. The memory cell and the second memory cell, wherein the drain of the first memory cell is connected to the source electrode of the second memory cell. Each of the memory cells includes: a gate disposed on the substrate, a charge storage structure disposed between the substrate and the gate, and a source and a drain respectively disposed in the substrate on both sides of the gate; the operation method includes: When the first memory cell of the P-type channel non-volatile memory is used, a first voltage is applied to the source of the first memory cell, and a gate voltage is applied to the gate of the first memory cell. The second voltage is applied to the second memory cell. Applying a third voltage to the gate, opening a channel below the second memory cell, applying a fourth voltage to the drain of the second memory cell, and applying a fifth voltage to the N-type well region, the fourth voltage being greater than the first voltage, fourth The voltage is greater than the second voltage to induce a thermoelectric injection into the first memory cell using a channel thermoelectric hole. According to the method for operating a P-channel non-volatile memory according to an embodiment of the invention, the method further includes: when the second memory cell of the P-type non-volatile memory is programmed, the source of the first memory cell Applying a fourth voltage, applying a third voltage to the gate of the first memory cell, opening a channel below the first memory cell, applying a second voltage to the gate of the second memory cell, and applying a second voltage to the drain of the second memory cell A voltage is applied to the N-well region to apply a fifth voltage to program the second memory 1276105 17870twf.doc/r using a channel thermoelectron-induced hot electron injection mechanism. According to the method for operating a p-type channel non-volatile memory according to an embodiment of the invention, the method further includes applying a first gate of the first memory cell when erasing the P-channel non-volatile memory. The sixth voltage is applied to the N-type well region, wherein the seventh voltage is greater than the sixth voltage and is sufficient to induce the tunneling effect of the FN tunneling effect to erase the first memory cell. . Embodiment p-channel non-volatile memory according to the embodiment of the present invention
的知作方法,上述操作方法更包括抹除p型通道非揮發性 記憶體時,第二記憶胞之閘極施加第人電壓,於n^井Known method, the above operation method further comprises erasing the p-channel non-volatile memory, the gate of the second memory cell applies the first person voltage, in the n^ well
區施加第七電壓,其中第七電壓大於第八電壓而足以引發 F_N穿隧效應,抹除第二記憶胞。 X 實施例所述之P型通道非揮發性記憶體 /tl乍2 ’上述操作方法更包括於第—記憶胞_極施 加弟九$«是浮置第―記憶胞的源極 沒極施加料電駐是浮置第二記憶胞之 糾品=,_實施例所述之p型通道非揮發性記憶體 ’上錢作方法更包括魏P型通道非揮發性 ϊΐΊΓ 時’於第—記憶胞之源極施加第十一 5己憶胞之雜施加第十二電壓,於第二記憶 四第十嚷,於第二記憶胞之汲極施加第十 广’於Ν餅區施加第十五麵 如是大於第十一電壓。 、甲財四仏⑺ 的操 !2761〇5 37870twf.doc/r ⑽體的第二記憶胞時 電壓,於第-記憶胞之閘極第之源極施加第十四 胞之間極施加第十二電心力第,於第二記憶 -電壓,於N型井區施加第十;;,_施加第十 上述P型通道非揮發性記憶體的操作方 = = t —記憶單元,操作其中-個記 以個讀胞作為選擇電晶體,控制其通道下方: 夕’:付以避免所操作的記憶胞產生過度抹除的現象。此 ’由於程式化操作係通道熱電洞誘發蓺電子機制, =除=係藉由F_N穿_應來進行,更可以加強此 通運非揮發性記憶體之操作效率。 、本發明提出之P型通道非揮發性記憶體及其操作方 法,具有低電壓、低功率消耗以及快速寫入的優點/,、且無 須另行設置選擇電晶體,即可達到防止過度抹除的功效了 除此之外,單層多晶矽的結構還可與目前系統級晶片 (system on chip, SOC)之CMOS製程相互整合。 曰曰 為讓本發明之上述和其他目的、特徵和優點能更明顯 易懂,下文特舉實施例,並配合所附圖式,作詳細文 下。 、、… α 【實施方式】 圖1係緣示本發明的實施例之一種Ρ型通道非揮發性 記憶體的結構剖面圖。請參照圖1,本發明之Ρ型通^非 揮發性記憶體例如是由基底100、井區101、記憶胞 與記憶胞105所構成的。基底1〇〇例如是Ρ型基底。井區The seventh voltage is applied to the region, wherein the seventh voltage is greater than the eighth voltage sufficient to induce an F_N tunneling effect to erase the second memory cell. The P-channel non-volatile memory/tl乍2 described in the X embodiment is further included in the first-memory cell _ pole-applying the younger $$« is the floating ―-memory cell source immersed material The electric station is the entangled product of the floating second memory cell =, the p-channel non-volatile memory described in the embodiment is a method of adding money to the P-channel non-volatile ϊΐΊΓ The source applies the eleventh five-remembered cell to apply the twelfth voltage, and the second memory is the tenth tenth, and the tenth of the second memory cell applies the tenth wideth. If it is greater than the eleventh voltage. , the operation of the four treasures (7)! 2761〇5 37870twf.doc/r (10) The second memory cell voltage of the body, the tenth between the fourteenth cell of the first source of the first memory cell The second electric heart force, in the second memory-voltage, the tenth is applied in the N-type well region;;, _ the operation unit of the tenth P-channel non-volatile memory is applied == t-memory unit, and one of them is operated Record a cell as the selection transistor, and control the channel below it: 夕': pay to avoid excessive erasure of the memory cells being operated. This is because the stylized operation channel channel thermoelectric hole induces the 蓺 electron mechanism, = division = by F_N wear _ should be carried out, and can enhance the operational efficiency of this non-volatile memory. The P-type channel non-volatile memory and the operation method thereof provided by the invention have the advantages of low voltage, low power consumption and fast writing/, and can be prevented from being excessively erased without separately selecting a selection transistor. In addition, the structure of the single-layer polysilicon can be integrated with the current system-on-chip (SOC) CMOS process. The above and other objects, features, and advantages of the present invention will become more apparent from the aspects of the invention. [Embodiment] Fig. 1 is a cross-sectional view showing the structure of a 通道-type channel non-volatile memory according to an embodiment of the present invention. Referring to Fig. 1, the Ρ type non-volatile memory of the present invention is composed of, for example, a substrate 100, a well region 101, a memory cell and a memory cell 105. The substrate 1 is, for example, a crucible substrate. Well area
11 1276105 17870twf.doc/r 101例如是N型井區,設置於基底100中。記憶胞1〇3、 記憶胞105例如是設置於井區101上,且兩記憶胞1〇3、 105例如是串接在一起。 記憶胞1〇3包括穿隧介電層丨10a、電荷儲存結構 110b、阻擋介電層110c、閘極120、摻雜區i5〇b (記憶胞 103的源極)與摻雜區150c (記憶胞103的汲極)。其中, 穿隧介電層ll〇a、電荷儲存結構ii〇b、阻擋介電層n〇c 與閘極120例如是由下而上依序設置於基底1〇〇上。換雜 區150b (記憶胞103的源極)與摻雜區i5〇c (記憶胞 的汲極)例如是設置於閘極120兩側的基底1〇〇中。 穿隧介電層ll〇a與阻擋介電層丨丨此的材質例如是氧 化矽。電荷儲存結構ll〇b的材質例如是可以使電荷陷入於 其中的材料,如氮化石夕、氮氧化石夕、麵氧化物、鈦酸錄物 與铪氧化物等。閘極120的材質例如是摻雜多晶矽、金屬 或金屬氧化物等導體材料。摻雜區15〇b、摻雜區15以例 如是含有硼等P型摻質之p型摻雜區。 值杈注意的是’上述阻擋介電層11〇〇可以視元件的設 e十而選擇性地设置。在一實施例中,閘極與基底刚 之間例如是僅設置穿隨介電層11〇a與電荷儲存結構聰。 記憶胞1〇5包括穿隨介電層130a、電荷儲存結構 130b、阻擋介電層13〇e、間極14()、摻雜區15加(記情胞 105的源極)與摻雜區15〇b(記憶胞⑽的沒極)。並;, 穿隧介電層130a、電荷儲存結構請b、阻擋介電層、】歎 與閉極140例如是由下而上依序設置於基底⑽上。接雜11 1276105 17870twf.doc/r 101 is, for example, an N-type well region disposed in the substrate 100. The memory cell 1〇3, the memory cell 105 is disposed, for example, on the well region 101, and the two memory cells 1〇3, 105 are, for example, connected in series. The memory cell 1〇3 includes a tunneling dielectric layer 10a, a charge storage structure 110b, a blocking dielectric layer 110c, a gate 120, a doping region i5〇b (a source of the memory cell 103), and a doping region 150c (memory) The bungee of the cell 103). The tunneling dielectric layer 11a, the charge storage structure ii〇b, the blocking dielectric layer n〇c and the gate 120 are sequentially disposed on the substrate 1 from bottom to top. The impurity-changing region 150b (the source of the memory cell 103) and the doping region i5〇c (the drain of the memory cell) are, for example, disposed in the substrate 1〇〇 on both sides of the gate 120. The material for tunneling the dielectric layer 11a and the blocking dielectric layer is, for example, cerium oxide. The material of the charge storage structure 11b is, for example, a material in which charges can be trapped, such as nitrite, oxynitride, surface oxide, titanate, and lanthanum oxide. The material of the gate 120 is, for example, a conductive material such as doped polysilicon, metal or metal oxide. The doped region 15〇b and the doped region 15 are, for example, p-type doped regions containing a P-type dopant such as boron. It is to be noted that the above-mentioned blocking dielectric layer 11 can be selectively disposed depending on the setting of the element. In one embodiment, the gate and the substrate are, for example, only disposed through the dielectric layer 11A and the charge storage structure. The memory cell 1〇5 includes a pass-through dielectric layer 130a, a charge storage structure 130b, a blocking dielectric layer 13〇e, an inter-pole 14(), a doped region 15 plus a source of the sigmoid 105, and a doped region. 15〇b (the memory cell (10) is not very good). And, the tunneling dielectric layer 130a, the charge storage structure b, the blocking dielectric layer, and the sigh and the closing electrode 140 are sequentially disposed on the substrate (10) from bottom to top. Mixed
12 1276105 17870twf.doc/r 區150a (記憶胞l〇5的源極)與摻雜區15此(記憶胞 的汲極)例如是設置於閘極140兩侧的基底1〇〇中。記憶 胞105與記憶胞1〇3共用摻雜區150b,兩記憶胞串接在二 起。 穿隧介電層13〇a、電荷儲存結構13〇b、阻擋介電層 130c與閘極140例如是與上述穿隧介電層11〇a、電荷儲存 結構11 Ob、阻擋介電層110c與閘極120具有相同的材質。 同樣地,阻擋介電層130c也可以視需要而選擇性地設置。 閘極120、140兩側例如是還設置有間隙壁145,間隙 壁145的材質例如是氧化矽。間隙壁145下方之基底1〇〇 中例如是設置有淺掺雜區160,以減輕短通道效應。 在一實施例中,摻雜區150a (記憶胞105的源極)例 如是耦接至一條位元線,摻雜區150c(記憶胞103的汲極) 例如是耦接至另一條位元線;記憶胞105的閘極140例如 是耦接至一條字元線,記憶胞1〇3的閘極120例如是麵接 至另一條字元線。在操作此p型通道非揮發性記憶體時, 例如是將串接之記憶胞103、記憶胞105當作一個記憶單 元。於記憶胞103寫入資料時,利用記憶胞105作為選擇 電晶體;於記憶胞105寫入資料時,則以記憶胞1〇3為選 擇電晶體,藉以避免寫入、讀取及抹除操作時發生資料誤 判或過度抹除等問題。 值得一提的是,本實施例雖是以P型基底1〇〇搭配有 N型井區1〇1之p型通道非揮發性記憶體為例作說明,惟 本發明提出之記憶體當然也可以是未設置N型井區,而是 13 1276105 17870twf.doc/r 通逼非揮發性記憶體。 105構成一個記卜,兩個串接的記憶胞103、 時,便以另一個=二2式化、讀取其中一個記憶胞 另外設置-個無法館^次^擇電晶體。也就是說,無須 體,因此可以大幅縮減貝I4的M0S電晶體作為選擇電晶 再者,由tit 胞的尺寸,提高元件的積集度。 具有單料乡晶記憶體僅 (SOQ上:與CMOS之邏輯製程相=目爾、統級晶片 圖2^1上料揮發性記憶體的操作方法,圖2A至 化、心二J型通這非揮發性記憶體的記憶胞之程式 化、=取與抹除操作模式示意圖。 道非!是,在本發明中,。型通 1fK ^ U版的紅作杈式係以串接的兩記憶胞103、 偏‘對記憶胞105寫入資料時,利用記 "L ”、、選擇電晶體;對記憶胞103寫入資料時,則 J j10!為選擇電晶體,藉以避免寫入、讀取及抹除 木打叙生貢料誤判或過度抹除等問題。 口月繼績麥照圖2A,程式化記憶單元之記憶胞1〇5時, 於記憶胞1G5的源極施加電壓、,其例如是Q伏特左右; 105 ^ Vgp^^H〇^ 5 ; 二:己f:胞103的閘極施加電壓&其例如是〇伏特左右; ;。己U胞103的汲極施加電壓Vdp,其例如是6伏特左右;12 1276105 17870twf.doc/r The area 150a (the source of the memory cell 〇5) and the doped region 15 (the drain of the memory cell) are, for example, disposed in the substrate 1 两侧 on both sides of the gate 140. The memory cell 105 shares the doped region 150b with the memory cell 1〇3, and the two memory cells are connected in series. The tunneling dielectric layer 13A, the charge storage structure 13B, the blocking dielectric layer 130c and the gate 140 are, for example, the tunneling dielectric layer 11A, the charge storage structure 11 Ob, and the blocking dielectric layer 110c. The gate 120 has the same material. Likewise, the blocking dielectric layer 130c can also be selectively disposed as needed. For example, spacers 145 are further provided on both sides of the gates 120 and 140, and the material of the spacers 145 is, for example, ruthenium oxide. A shallow doped region 160 is provided, for example, in the substrate 1 下方 below the spacer 145 to mitigate the short channel effect. In one embodiment, the doped region 150a (the source of the memory cell 105) is coupled to, for example, a bit line, and the doped region 150c (the drain of the memory cell 103) is coupled to another bit line, for example. The gate 140 of the memory cell 105 is, for example, coupled to a word line, and the gate 120 of the memory cell 1〇3 is, for example, surfaced to another word line. When operating the p-type channel non-volatile memory, for example, the serially connected memory cell 103 and the memory cell 105 are regarded as one memory cell. When the memory cell 103 writes data, the memory cell 105 is used as the selection transistor; when the memory cell 105 writes the data, the memory cell 1〇3 is selected as the selection transistor to avoid writing, reading and erasing operations. Problems such as misjudgment or over-erasing of data occur. It is worth mentioning that, although the P-type substrate 1〇〇 is matched with the p-type channel non-volatile memory of the N-type well region 1〇1 as an example, the memory proposed by the present invention is of course also It can be that the N-type well region is not set, but 13 1276105 17870twf.doc/r is forced to non-volatile memory. 105 constitutes a note, two memory cells 103 connected in series, then another = two 2, read one of the memory cells, another set - can not be used to select the transistor. That is to say, there is no need for a body, so that the M0S transistor of the Bay I4 can be greatly reduced as the selection of the crystal, and the size of the bit cell is increased to increase the degree of integration of the element. It has a single-material crystal memory only (SOQ: Logic process with CMOS = MW, system-level wafer Figure 2 ^ 1 loading volatile memory operation method, Figure 2A to Hua, Xinji J-type pass this Schematic diagram of the stylization, = fetching and erasing operation modes of non-volatile memory cells. Daofei! Yes, in the present invention, the type 1fK ^ U version of the red-handed system is connected in series by two memories. When the cell 103, the partial 'write data to the memory cell 105, use the record "L", select the transistor; when writing data to the memory cell 103, then J j10! is to select the transistor, to avoid writing, reading Take the problem of misjudgment or over-erasing of the wooden narration material. The monthly success of the maiden picture 2A, when the memory cell of the stylized memory unit is 1〇5, the voltage is applied to the source of the memory cell 1G5, It is, for example, about Q volts; 105 ^ Vgp^^H〇^ 5 ; 2: hex f: the gate applied voltage of the cell 103 & it is, for example, about volts volts; , for example, about 6 volts;
14 1276105 17870twf.doc/r =型井區施加電壓Viip,其例如是6伏特左右。其中, 是作_擇電晶體之用’於記憶胞103的閘極 下方的通道打開;記憶胞103 ⑽的广堡'dp大於記憶胞105的源極電壓Vsp,記憶胞 、、、及極電壓vdp大於記憶胞1〇5的閘極電壓Vgp,以 用通道熱電洞誘發熱電子注人效應,程式化記憶胞105, 於記憶胞105中寫入資料。 另方面,程式化記憶單元的另一個記憶胞1〇3時, 地式化記憶胞105日寺,原施加於記憶胞1〇5 "、β、电壓VSp,改成施加於記憶胞1〇3的 ^^胞他閘極的轉^改成施加於記憶;^ 、巧極,將原施加於記憶胞103汲極的電壓Vdp,改成施 2於屺fe、胞105的源極;將原施加於記憶胞1〇3閘極的電 I Vgp改成施加於記憶胞1〇5的閘極,打該記憶胞1〇5 下方的通逼,並且利用記憶胞105的源極與記憶胞1〇3的 己憶胞1G3的閘極之間的壓差,引發通道熱電洞誘 人效應,程式化記憶胞1G3,於記憶胞103中 睛翏照圖2B,讀取記憶胞1〇5時,於記憶胞1〇5的源 ,施加電壓%,其例如是1·5伏特左右;於記憶胞105的 閑極施加電壓%,其例如是3.3伏特左右;於記憶胞1〇3 勺甲]極知加電壓V0,其例如是〇伏特左右;於記憶胞仞3 的及=施加電壓V&,其例如是3·3伏特左右丨於N型井區 把加電壓Vnr,其例如是3·3伏特左右。其中,記憶胞⑽ 1276105 17870twf.d〇c/r14 1276105 17870twf.doc / r = type well application voltage Viip, which is for example about 6 volts. Among them, it is used for the selection of the transistor to open the channel below the gate of the memory cell 103; the Guangbao 'dp of the memory cell 103 (10) is greater than the source voltage Vsp of the memory cell 105, the memory cell, the, and the extreme voltage The vdp is larger than the gate voltage Vgp of the memory cell 1〇5, in order to induce the hot electron injection effect by the channel thermoelectric hole, stylize the memory cell 105, and write data in the memory cell 105. On the other hand, when another memory cell of the stylized memory unit is 1〇3, the localized memory cell 105th temple is originally applied to the memory cell 1〇5 ", β, voltage VSp, and is applied to the memory cell 1〇 The ^^ cell gate of the ^^ is changed to be applied to the memory; ^, Qiaoji, the voltage Vdp originally applied to the drain of the memory cell 103 is changed to the source of the 2fe, cell 105; The electric I Vgp originally applied to the gate of the memory cell 1〇3 is changed to the gate applied to the memory cell 1〇5, and the underside of the memory cell 1〇5 is used, and the source and the memory cell of the memory cell 105 are utilized. The pressure difference between the gates of the 1G3 cell of 1〇3 induces the attractive effect of the channel thermoelectric hole, stylized memory cell 1G3, and in the memory cell 103, the lens is read in Figure 2B, and the memory cell is read at 1〇5 In the source of the memory cell 1〇5, the voltage is applied, which is, for example, about 1.5 volts; the voltage applied to the idle electrode of the memory cell 105 is, for example, about 3.3 volts; in the memory cell, 1 〇 3 scoops] It is known to apply a voltage V0, which is, for example, about volts; in the memory cell 3 and = applied voltage V&, for example, about 3 volts 丨 in the N-well region, the voltage is applied Vnr For example, it is about 3.3 volts. Among them, memory cells (10) 1276105 17870twf.d〇c/r
St晶體之用,於記憶跑⑽的間極施加電屋 tMV;^3For the use of St crystals, apply electricity house tMV to the interpole of memory running (10); ^3
Vnr相同'且纪;:1:的:及,壓九與N型井區的電壓 源極電壓v \ = 電壓4大於記憶胞m的 道心士 乂 κ而,错由雜跑奶下方之通道開關/通 ι〇5 1〇5 記㈣103 m 的電屢Vsr ’改成施加於 。己u〇 1〇3的沒極;原施加於記憶胞ι〇5間極 , 改成施加於纟己憶胞1〇3的間搞·馬 土 gr 的電壓vdr,改成施加於記憶胞1〇广口:^胞103汲極 憶胞103閘極的電壓v ’,改成於力於、:亟,原施加於記 L 的通逼。利用記憶胞103下方之诵 道開關/解仏大錢判_存於此記 位資訊是「1」還是「〇」。 τ的數 請爹=2C ’抹除記憶單元的記憶胞105、103時, ’或^記憶胞105的源“加 電壓Vse,具例如是6牲户士 · 士人』w , 兩厭V ,其例如是6处工,於㈣胞105的閘極施加 甘,1 _伏特左右;於記憶胞1〇3的閘極施 =壓二=:伏特左右;將記憶_的; 汙 ^ ; ^ 3的汲極施加電壓V ,其例如是 伏特左右;::型井區施加電壓Vne,其例 右。其中,里井區的電壓Vne例如是大於記憶胞1〇心 16 Ϊ276105 17870twf.doc/r ge轉記憶胞103的閘極電壓vg,e,利用^^型另 胞105、1()3 1的㈣差,於N型井區與記搞 士 產生F_N穿隧效應,將儲存於記憶胞1〇5、 中3子拉出’以抹除記憶胞105及103。 揮發型基底搭配有_井區之P型通道非 型并作說明,惟本發明亦可適用於未設置N 若是_㈣道轉發性記紐。當然, 屢,便會改施:於^=上則“施加於Ν型井區的電 接的= 編刪方法,以相鄰串 時,利用記憶單元為中二於操,申一個記憶胞 ,制其通道下方之開關,而得以避 ==晶 產生過度抹除的現象。此外,由== 乍的极胞 進行,更™陶隨效應來 綜上所述,本發明^^出1軍己憶體之操作效率。 及其操作方法,以相鄰串 m通逼非揮發性記億體 操作i Φ—b 4串接的兩個記憶胞為—記情罝* 小元件尺寸,進而提高:件體的步驟,也可以縮 此外,本發明赶田η ^ 有操作速度快、低功率損非揮發性記憶體,其具 泛的可攜式電子產品,符人產相當適合目前應用盾 式化操作係利用通道熱電:由於程 、私卞钱制,抹除操作係Vnr is the same 'and Ji;; 1:: and, the pressure source voltage of the nine and N wells v \ = voltage 4 is greater than the memory cell m of the Taoist 乂 κ, the wrong channel Switch / pass 〇 〇 5 1 〇 5 remember (four) 103 m of electric repeatedly Vsr ' changed to apply. The immersion of 〇u〇1〇3; originally applied to the memory cell 〇5 pole, changed to the voltage vdr applied to the 马 忆 忆1〇3, and changed to the memory cell 1 〇Guangkou: ^ cell 103 汲 忆 胞 103 103 103 103 103 103 103 103 103 103 103 103 103 103 103 103 103 103 103 103 103 103 103 103 103 103 103 103 103 103 103 103 103 Use the channel switch under the memory cell 103 to determine whether the information is "1" or "〇". If the number of τ is 爹=2C 'When the memory cells 105, 103 of the memory cell are erased, 'or the source of the memory cell 105' is applied with a voltage Vse, for example, 6 aristocrats and scholars w, two disgusting V, For example, it is 6 jobs, and the gate of the (4) cell 105 is applied with a sweetness of about 1 volt; the gate of the memory cell 1〇3 is applied by the pressure======================= The drain is applied with a voltage V, which is, for example, about volts;:: the well region is applied with a voltage Vne, which is an example of the right. The voltage Vne of the well region is, for example, larger than the memory cell 1 1616 Ϊ 276105 17870 twf.doc/r ge The gate voltage vg, e of the memory cell 103 is different from the (4) difference of the other cells 105, 1 () 3 1 , and the F_N tunneling effect is generated in the N-type well region and recorded in the memory cell 1 〇5, the middle 3 pulls out 'to erase the memory cells 105 and 103. The volatile base is matched with the P-type channel non-type of the well area, but the invention can also be applied to the unset N if _ (four) way Forwarding remarks. Of course, if it is repeated, it will be changed: on ^=, "the electrical connection applied to the 井-type well area = the editing method, when the adjacent string is used, the memory unit is used as the middle two." A memory cell, the bottom of which channel switching system, and to avoid excessive grain == erase phenomenon. In addition, it is carried out by the polar cells of == 乍, and the TM is the same as the effect. In summary, the present invention has the operational efficiency of the military. And the operation method thereof, the two memory cells which are connected by the adjacent string m to the non-volatile memory unit i Φ-b 4 are commensurate with the size of the small component, thereby improving the step of the body, In addition, the present invention has a fast operating speed and low power loss non-volatile memory, and has a portable electronic product, which is quite suitable for the current application of the shield operation system using channel thermoelectricity: Due to the process, private money system, erasing operation system
1276105 17870twf.doc/r 進行’更可以加強此。型通道非揮發 雖然本發明已以實施例揭露如上,然其並非 本發明,任何熟習此技藝者,在賴離本發 = ,内’當可作些許之更動與潤飾,因此本發日口乾 萄視後附之申請專利範圍所界定者為準。 保瘦軏圍 【圖式簡單說明】 圖1係繪示本發明一實施例之一種户 記憶體的結構剖面圖。 1通逼非揮發性 圖2A係繪示本發明一實施例之一種p 、, 性記憶體的程式化操作模式示意圖。 逼非揮發 圖2B係繪不本發明一實施例之一種$ 性記憶體的讀取操作模式示意圖。 逼非揮發 圖2C係繪示本發明一實施例之—種p 性記憶體的抹除操作模式示意圖。 孓通遑非揮發 【主要元件符號說明】 100 ·基底 101 : N型井區 103、105 :記憶胞 110a、130a ··穿隨介電層 110b、130b:電荷儲存結構 110c、130c :阻擋介電層 120、140 ·•閘極 145 :間隙壁 150a、150b、150c ··摻雜區 160 :淺摻雜區1276105 17870twf.doc/r Carrying out 'more can strengthen this. Type Channel Non-Volatile Although the present invention has been disclosed above by way of example, it is not the present invention, and anyone skilled in the art can make some changes and refinements in the present invention. The definition of the scope of the patent application attached to the review is subject to change. BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a cross-sectional view showing the structure of a household memory according to an embodiment of the present invention. 1 Passive Non-Volatile Figure 2A is a schematic diagram showing the stylized operation mode of a p, and memory according to an embodiment of the present invention. Non-volatile Non-volatile Figure 2B is a schematic diagram showing the read operation mode of a $-sex memory according to an embodiment of the present invention. FIG. 2C is a schematic diagram showing the erasing operation mode of a p-type memory according to an embodiment of the present invention.孓 遑 遑 遑 【 主要 主要 主要 主要 主要 主要 【 遑 100 100 100 100 100 100 100 100 100 100 100 100 100 100 100 100 100 100 100 100 100 100 100 100 100 100 100 100 100 100 100 100 100 100 100 100 100 100 100 100 100 100 100 100 100 100 100 100 100 100 100 100 100 100 100 100 100 100 100 100 100 100 100 100 100 100 100 100 100 100 100 100 100 100 100 100 100 100 100 100 100 100 100 100 100 100 100 100 Layers 120, 140 · Gate 145: spacers 150a, 150b, 150c · Doped region 160: shallow doped region
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