TWI270923B - Suction unit assembly for panel treatment system - Google Patents

Abstract

A suction unit assembly for a panel treatment system includes a pressure fluid generating unit, a fluid supply unit having a supply passage communicating with the pressure fluid generating unit and an exhaust chamber, a guide unit guiding the pressure fluid supplied from the supply passage to the exhaust chamber, and a suction unit having a suction passage communicating with the guide passage and forming negative pressure in accordance with the flow of the pressure fluid.

Description

1270923 IX. INSTRUCTIONS OF THE INVENTION: TECHNICAL FIELD OF THE INVENTION The present invention relates to a suction unit assembly for a sheet processing system: and, more particularly, to a suction unit assembly, which may have . The sheet & spear, such as a + Φ display panel, is more than a fluid such as a cleaning agent or other foreign object. [Prior Art] In other words, 'such as a flat panel display, a semiconductor wafer, a 'nightingale' and a reticle glass, are passed through a continuous a & 'like The steps of deposition, silver engraving, demolding, cleaning and cleaning are processed. The cleaning step is for removing chemical agents on the surface of the sheet according to a predetermined pressure, and the chemical agent attached to the surface of the sheet and the foreign matter system are removed. Residual foreign objects, such as detergents, may remain on the sheet as it passes through the cleaning step. The residual foreign object may contain an excess of processing agent for treating the sheet. Therefore, if the excess treatment agent is not removed directly after the cleaning step, there may be stains on the sheet, or the quality of the sheet treatment may be degraded by chemical action. In order to remove residual foreign objects remaining on the sheets that have passed through the cleaning step, a forced suction unit using a vacuum is used. Such a suction unit can be installed in the cleaning rinse for the cleaning step, and is attached to 1270923, or λ is set in a separate zone-domain between the cleaning step and the drying step. A conventional suction unit is designed to have a plurality of suction nozzles connected to a single main suction passage. When suction is generated in the suction nozzle, the residual foreign matter system on the sheet is removed by adsorption through the nozzle. However, because the plurality of suction nozzles are connected to a single suction passage, and the suction force of the suction nozzle is generated in the suction passage Φ by a driving device, sufficient suction cannot be obtained. Further, the suction nozzles have different suction forces from each other depending on the position connected to the main suction passage. That is, the suction force closer to the suction nozzle to which the main suction passage is connected is greater than the suction force of the suction nozzle connected to the main suction passage. Therefore, it is impossible to perform uniform suction on the entire surface and the surface of the sheet, thereby degrading the processing quality of the sheet. This problem is more serious when the size of the plate increases. That is to say, when the size of the plate is increased, the main body of the unit is also increased, and the length of the suction passage is elongated, and the change in suction becomes more serious, thereby reducing work efficiency and work coordination. . Since the passage of the suction nozzle is formed substantially in an annular shape, the suction region defined by the annularly connected suction nozzle is formed when the residual foreign matter system is removed. The annular nozzle structure does not provide uniform drainage and acts on the area between the nozzles, thus reducing removal efficiency. SUMMARY OF THE INVENTION 6 1270923 Accordingly, the present invention has been made in an effort to solve the above problems. SUMMARY OF THE INVENTION It is an object of the present invention to provide a suction unit assembly which is capable of efficiently removing foreign objects from the surface of a sheet by utilizing a unidirectional flow of a pressure flow such as a gas to generate suction. Another object of the present invention is to provide a uniform, smear, and early sputum component, which can apply a uniform suction force to the entire surface of the slab, and the burial rate and the treatment product can improve the removal effect of the foreign object. In order to achieve the above object, the present invention provides a suction unit assembly for a sheet processing system, comprising: a AA, a 匕3. a suction early, which faces a surface of a plate. The suction unit is provided with a plurality of suction passages for sucking foreign objects attached to the sheets; and a guiding unit, # facing the suction unit, and provided with a plurality of material passages, the material-pressure fluid Flowing to form a suction that adsorbs the foreign object in the suction channel. According to another aspect of the present invention, a suction unit assembly for a sheet processing system includes: a pressure fluid generating unit; a claw body feeding unit having a supply passage, the supply passage Connected with the pressure fluid generating unit and a discharge chamber; a guide sheet $ for guiding the pressure fluid supplied from the supply passage to the discharge chamber; and a suction unit having a connection to the guide passage The through suction passage, and the negative pressure is formed according to the flow of the pressure fluid. [Embodiment] A preferred embodiment of the present invention will now be described in detail, and examples thereof are not included in the accompanying drawings. In any case, the same elements in all figures will be used to represent the same or similar elements. First, referring to the first to third figures, the suction unit assembly of the present invention comprises a suction unit 2 provided with a plurality of suction channels Η 1 and a guiding unit 4, which suctions the residue The residual liquid W on a plate G, the guiding unit 4 is positioned corresponding to the suction channel Η 1 to guide a pressure fluid A which forms a low pressure environment for pumping the residual liquid. In this embodiment, as shown in the first figure, the suction unit assembly corresponds to the sheet transport section mounting defined along a conventional sheet transport apparatus. The suction unit 2 is designed such that when a negative pressure system is applied to the suction passage Η 1 , it draws residual liquid w from the sheet G, and the suction unit 2 is connected to a passage through which the pressure fluid Α flows. The pressure fluid is guided by the direction in which the guiding unit 4 is guided to reduce the pressure of the passage. The suction unit 2 can be configured to form a suction region that traverses the direction in which the sheet G moves along the sheet transport section as shown in the first figure. The suction unit 2 can be formed, for example, of SUS-based metal, engineering plastic, synthetic resin, and the like. The suction passage η 1 formed on the suction unit 2 can be formed in a variety of configurations for sucking the residual liquid W adhering to the sheet. In this embodiment, as shown in the second figure, each of the suction passages 包含 1 includes a horizontal passage section 6 b and a vertical passage section 6 a communicating with the horizontal passage section. The horizontal channel section 6b corresponds to the bow guide channel H2 formed above the guiding unit 4 1270923, and the vertical channel section 6a is used to directly absorb the residual liquid w. As shown in the second and fourth figures, the suction passages are [lined in the longitudinal direction of the suction unit 2 and spaced apart from each other. As shown in the fifth figure, the separation distance between the suction channels Η 1 is defined between a range in which a rectangular suction region is formed in a direction across the sheet G, and uniform suction The action is carried out by carrying out the entire surface area of the sheet G. As shown in the fourth figure, the suction unit 2 is provided with a common passage section 8 by which the vertical passage sections 6a communicate with each other on their suction side. By the common passage section 8, the suction force is uniformly applied to the area defined between the suction passages 1 when the residual liquid w is sucked by the suction force applied through the suction passage Η 1 The residual liquid W can be uniformly removed from the entire surface of the sheet G when sucked. The guiding unit 4 is arranged to guide the flow of the pressure fluid enthalpy, thereby inducing the suction action of removing the residual liquid W via the suction passage η 1 of the suction unit 2. That is, as shown in the second figure, the guiding unit 4 includes a plurality of thin plates 1 〇 which divide a space into a plurality of segments. The divided sections are connected to each other by a guide passage 2 that guides the pressure fluid ( (refer to the third figure). The pressurized fluid helium can be formed from a pure gas without any foreign objects or clean dry air for cleaning the sheet G. The pressure fluid a can be supplied via a gas supply early element 1 2, the gas supply unit 1 2 1270923 is a kite..., the guiding unit 4 in the first figure is located on the opposite side of the suction unit 2 The supply unit 12 is formed in a rectangular box shape corresponding to the guide unit 4, and is provided on the inner side with a supply passage Η 3 along which the pressure fluid raft flows. The supply passage η 3 is connected to the outside (to the official residence 1 to receive the pressure fluid from the outer supply pipe ρ 1 ), the pressure fluid received by the supply pipe Ρ 1 is forced through the supply 3, uniformly supplied to the guiding passage η 2. The head is not in the second figure, the guiding unit 4 is provided with a channel groove 1 and a guiding channel η 2 guiding the pressure fluid A. As shown in the figure In the second figure, > , 'Because the channel groove 14 is formed facing the individual suction channel Η 1 , # „ 乂 can be expected to have an efficient suction effect. α Ί "Channel groove 1 4, by allowing the pressure fluid to flow in a direction connecting the segments opened by the sheet 10 for eight days e, - 77, thereby generating suction. In this embodiment, one, s, #^ In the second picture of Yu Di, the transport groove 1 1 formed at the top of the thin plate 1 〇

The pressure fluid A is formed in a circular shape via the channel groove 1 4 ^ τ n , and is formed on the other thin plate 1 located at the lower side of the upper thin plate IQ The channel groove 14 on 0 is configured to define a bow guide section corresponding to the suction passage H1 of the suction unit 2 by the opening of #M$. ϋ 通道 channel groove 1 4 can be formed. Because of the note, the thin plate 1 形成 is formed. By way of example, the I-cut step can be formed by a metal material suitable for the etching step, as shown in the

The channel groove 4 may have a concave shape in the central portion of the 12 1270923. This shape of the channel groove 14 increases the flow rate of the pressure fluid A toward the right side of the figure. As a result, when the pressure fluid A passes through the guide passage Η 2, the suction of the suction unit 2 can further increase the force. The thin plate 1 of the guide unit 4 can be fixed between the fluid supply unit 12 and the suction unit 2, and is also coupled to the guide pin 16 (please refer to the third figure). For example, it can be noted from the brother's picture and the second figure that the channel groove 14 formed on the lowermost plate #1 is shorter than the other channel grooves formed on the other plate 1〇. . Thereby, as shown in the third figure, the channel groove 14 formed on the lowermost sheet 10 does not face the vertical channel section 6a of the suction unit 2, but is located in the horizontal channel section. 6 b y is thereby prevented from flowing the pressure fluid A towards the vertical channel section 6 a. As shown in the fourth figure, the suction passage Η 1 is formed in the lateral direction corresponding to the sheet G. The flow of the pressure fluid enthalpy is guided in a direction in which the guiding unit (guide passage Η 2 ) is guided, and the suction passage H 1 is designed to uniformly receive the suction force. Therefore, as shown in the first figure, when the sheet G passes through the cleaning section to remove the residual liquid W attached to the sheet G, since uniformity corresponding to the rectangular area covering the entire width of the sheet G is formed The removal efficiency of the residual liquid W can be significantly improved in the suction zone as shown in the fifth figure. It is further provided for sucking through the guide passages Η 2 π 1270923 and the outlet side of the suction passage Η 1 and discharging the suction passage Η 1 of the _, 印田 β suction early element 2 The mechanism of residual liquid w. For example, as shown in the third figure, the suction unit 2 and the fluid supply unit 12 are separately extending the extensions 2a and ! 2 a is defined by the extension 2...2 a ' to define an opening having an opening. The opening is covered by the cover 2 Q to selectively open or close. As shown in the third and sixth figures, gas and liquid discharge pipes p 2 and p 3 are installed in the discharge chamber i 8 to separate the pressure fluid eight and the liquid W sucked from the plate G. That is, the pressurized fluid A is reused or discharged into the air via a purge filter while being simultaneously vented by the gas discharge pipe p 2 #. The sucked liquid w is collected into a liquid reservoir by the liquid discharge pipe p 3 . The operation of the suction unit assembly of the present invention described above will be explained below. After the sheet G is cleaned by the cleaning zone, as shown in the figure, it is conveyed to a suction section where the residual liquid W attached to the sheet is removed. That is, the residual liquid W is removed as the sheet G passes through the suction section. In more detail, when the pressure fluid A is supplied to the fluid supply unit 12 via the fluid supply pipe P 2, the pressure fluid A passes through the supply passage Η 3 along the guide passage Η 2 of the guiding unit 4 Flow, as shown in the third figure. At this moment, when the pressure fluid Α passes through the guide passage Η 2, a 12 1270923 low pressure air pressure is formed in the suction passage of the suction unit 2 communicating with the guide passage Η 2 by the flow of the pressure fluid A. The horizontal channel section 6 b of η 1 . With the low pressure air pressure, the suction force for sucking the residual liquid W attached to the surface of the sheet G acts in a direction on the vertical passage section 6a connected to the horizontal passage section 6b as shown in In the third and sixth figures. Thereby, the residual liquid W is sucked through the suction passage η 1 and moves together with the pressure fluid a of the guide passage Η 2 to the side discharge chamber 18. The residual liquid w and the pressure fluid A are separated by the gas discharge pipe P 2 and the liquid discharge pipe p 3 in the discharge chamber 18, and are then discharged. As described above, by the flow of the pressure fluid A along the guide passage Η 2 of the guide unit 4, suction is generated on the suction unit 2 to effectively remove the residual liquid attached to the sheet G. . In particular, since the guiding unit 4 is provided with a guiding passage Η 2 facing the suction passage Η 1 of the suction unit 2, and the guiding passage Η 2 is connected to the Φ, it is connected to the fluid supply unit 1 The single fluid supply passage Η 3 on 2, as shown in the fifth figure, forms a uniform suction region with respect to the surface of the sheet G, and the suction force is enhanced, thereby significantly improving the residual liquid W. Removal efficiency. In the above-described embodiment, the suction unit 2 is formed in a single unit' and the sections of the suction passage η 1 formed on the suction unit 2 are integrally connected to each other. However, the invention is not limited to this example. For example, the suction unit 2 can be designed to have a channel structure facing the guide sheet 13 1270923 70 4 . That is, the passage for sucking the residual liquid w can be separately formed by a plurality of sheets. In this case, the suction unit 2 can be manufactured more simply and can have improved durability corresponding to physical impact. In particular, since the suction passage Η 1 can be formed in different shapes by separate sheets, work coordination, manufacturing efficiency, and maintenance efficiency can be improved. In addition to this, corresponding to the sheet, only one of its suction unit is provided in the cleaning section to remove the residual liquid W attached to the sheet G, and the present invention is not limited to this example. For example, two suction unit assemblies can be mounted corresponding to the transfer section of the sheet G, as shown in the seventh diagram. In addition to this, more than two suction unit assemblies can be installed depending on the environment in which the residual liquid can be removed. Further, the unit may be mounted corresponding to the opposite surface of the sheet to simultaneously remove residual liquid adhering to the opposite surface of the sheet G. According to the present invention, by the flow of the pressurized fluid through the guiding unit passage, a uniform suction force is formed on the suction unit unit corresponding to the surface of the sheet, so any residue attached to the sheet passing through the cleaning section Liquids, such as detergents or wastewater, can be removed efficiently. Further, since the suction of the suction passage for sucking the residual liquid adhering to the sheet is generated by the guide passage of the guide unit, it produces a uniform suction region irrespective of the size of the sheet. In particular, the suction unit assembly of the present invention can more efficiently remove residual liquid adhering to a large-sized sheet. It will be appreciated by those of ordinary skill in the art that 14 1270923 the invention is modified with different , and 7 芸 + 七 七. Therefore, it is intended that the present invention and (f) 请 in the accompanying patents, and that they are equivalent. The nucleus and modification of the present invention in the 35th material is a simple description of the drawing, and the drawing of the system is used to provide an understanding of the progress of the present invention. The material, the example, and the sputum, the sputum, the sputum, the syllabus, the syllabus, the syllabus, the syllabus, the syllabus, the syllabus级-图图's large exploded perspective view of a suction unit assembly according to an embodiment of the present invention;

The first R-picture is a side cross-sectional view showing the suction unit of each of the examples according to the present invention, and the internal structure of the member; the fourth figure is also a cross-sectional view showing The configuration of the suction channel formed by the suction unit 1 in the suction diagram of the first embodiment is shown in the third figure; the fifth figure is a plan view showing the pumping by the fourth figure The suction channel's #哄& and the suction region formed on one of the plates; the second, a partial cross-sectional perspective view of the drawing, showing the pumping of the sputum-sucking and early sputum assembly according to an embodiment of the present invention A suction effect; and a pi diagram is a perspective view of a suction unit assembly in accordance with another embodiment of the present invention. 'Main component symbol description】 Suction unit 15 2 1270923 Extension guide unit Vertical channel section Horizontal channel section Common channel section Thin plate gas supply unit Extension Channel groove Guide pin discharge chamber cover Pressure fluid plate suction Channel guide channel supply channel plate transport device outer supply tube 2 a 4 6 a 6 b 8 10 12 1 2 a φ 14 16 18 2 0

A

G

HI H 2 • H 3

M

PI P 2 gas discharge pipe P 3 liquid discharge pipe W residual liquid 16

Claims (1)

1270923 X. Patent application scope: 1 - Kind of sheet processing system _ , , ^ ^ ^ 7 pumping and early raking components, which contain ·· pumping and early 兀, which face one, the surface setting of the sheet, the sucking The single tether is provided with a plurality of suction passages for sucking foreign objects attached to the crucible and the μ plate; and a guiding unit facing the pumping and early setting, and a plurality of guiding channels are provided for guiding A pressure flows, the flow of the iL body forms a suction that adsorbs the foreign body into the suction channel. 2. If the scope of the patent is declared 帛! The suction unit assembly of the item, wherein the guide channel defines one or more guiding sections. 3. The suction unit assembly of claim 1, wherein the suction passage and the guide passage are configured to have a single section, wherein the suction passages of the suction passage and the guide passage are in communication with each other. 4. The suction unit assembly of claim 1, wherein the suction passage and the guide passage are formed in a direction across the sheet to define a rectangular suction region. 5. The suction unit assembly of claim 1, wherein the suction passage is in communication with an individual guide passage. 6. The suction unit assembly of claim 1, wherein the suction unit is provided with a common passage that communicates with the suction side of the suction passage. A suction unit assembly for a sheet processing system, comprising: a pressure fluid generating unit; a fluid supply unit having a supply passage, the supply passage and 17 1270923, the pressure helmet generating unit and a The discharge chamber is in communication; a guiding unit that guides the fluid from the supply channel to the discharge chamber; and a suction unit having a suction passage in communication with the guide passage, and according to The flow of the pressurized fluid creates a negative pressure. 8. The suction unit assembly of claim 7, wherein the guiding unit is formed by a plurality of sheets, each of which is provided with a channel groove. The suction unit assembly of claim 8, wherein the channel groove formed on the lowermost sheet is designed to have a channel groove smaller than a channel formed on the thin plate above the lowermost sheet length. 10. The suction unit assembly of claim 7, wherein the guiding unit is provided with a channel groove having a narrow intermediate portion. The suction unit assembly of claim 7, wherein the suction passage of the suction unit comprises a horizontal passage and a vertical passage. 1 2. The suction unit assembly of claim 11, wherein the # horizontal passage is in communication with a passage groove formed in the lowermost sheet. The suction unit assembly of claim 7, wherein the discharge chamber is provided with a unit for separating the pressure fluid and the adsorbed liquid from each other. XI, schema · as the next page 18