JP2000084844A - Plate-like stripping method and apparatus - Google Patents

Abstract

(57) Abstract: A glass plate 14 can be automatically peeled off from a polishing table 20. A glass plate (14) is held by a flexible surface plate (28), and the entire surface of the glass plate (14) is held by a flexible means.
Is peeled off from the polishing table 18, and the platen 28 is retracted and moved from the polishing table 18 by retracting means.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method and an apparatus for peeling a plate-like body, and more particularly to a method for peeling a glass plate (plate-like body) that has been polished in a polishing step from a polishing table (adsorbing member). The present invention relates to a method and an apparatus for stripping a plate-like body.

[0002]

2. Description of the Related Art A glass plate polished by a continuous polishing apparatus is carried out of the polishing apparatus while being held by suction on a polishing table. Then, the glass plate is manually peeled off from the polishing table using a peeling jig such as a scraper, and then supplied to a cleaning device to be cleaned.

[0003]

However, the conventional method of peeling a glass plate is performed manually by an operator, so that the work efficiency is poor, and the peeling operation largely depends on the skill of the operator. Therefore, there was a disadvantage that it required experience. The present invention has been made in view of such circumstances, and an object of the present invention is to provide a method and an apparatus for peeling a plate-like body that can automate the peeling of the plate-like body from an adsorption member.

[0004]

In order to achieve the above object, the present invention provides a method for separating a plate-like body from a suction member, the plate-like body being sucked by the suction member. A direction in which the entire surface of the side opposite to the surface of the plate-like body being suctioned is held by a flexible holding member, and the holding member is retracted from the suction member toward the center from the edge of the holding member toward the center; The plate-like body is gradually deflected from the suction member toward the center from the edge of the plate-like body by the flexible means, and the central part of the holding member is sucked by the retracting means. It is characterized in that the entire plate-like body is separated from the attraction member by retreating from the suction member.

According to another aspect of the present invention, there is provided a plate-like body peeling device for peeling a plate-like body sucked by a suction member from the suction member, wherein the plate-like body is sucked by the suction member. A flexible holding member that can hold the entire surface on the opposite side of the plate-like body, and the holding member,
A flexible means capable of bending from the edge of the holding member toward the center in the direction of retreating from the suction member, and the center of the holding member can be moved in the direction of retreating from the suction member. And evacuation means.

According to the method and the apparatus for peeling a plate-shaped object of the present invention, first, the entire surface of the plate-shaped object sucked by the suction member is held by the holding member, and the whole surface is sucked by vacuum suction. Next, the holding member is gradually bent by the flexible means in a direction to withdraw from the suction member from the edge of the holding member toward the center. As a result, the plate is gradually peeled off from the adsorption member from the edge to the center of the plate. Next, the central part of the holding member is retracted from the suction member by the retracting means. Thereby, the whole plate-like body is peeled off from the adsorption member. Therefore, according to the present invention, the plate-like body can be automatically separated from the suction member.

Further, if water and / or compressed air is jetted from a nozzle into a gap between the plate-like body and the suction member, the suction force of the suction member is reduced by the water and / or compressed air. The plate can be peeled off smoothly.

[0008]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Preferred embodiments of a method and an apparatus for peeling a plate-like body according to the present invention will be described below in detail with reference to the accompanying drawings. FIG. 1 is an explanatory diagram showing the overall structure of a glass sheet peeling and transferring apparatus 12 including a glass sheet peeling apparatus 10 according to an embodiment of the present invention.

The glass plate peeling / transferring device 12 is a device for peeling a glass plate 14 polished by a continuous polishing device (not shown) from a polishing table and transferring the glass plate 14 to a washing machine. It comprises a peeling device 10 and a mounting table 16 of a glass plate cleaning device. First, the flow of the glass plate 14 in the separation transfer device 12 will be described. The glass plate 14 polished by the polishing apparatus is carried out one by one from the outlet of the polishing apparatus while being sucked on the suction pad 20 of the polishing table 18 as shown in FIG. It is supplied on the table 22 in units of four sheets.
The method of supplying the glass plate 14 includes a polishing apparatus and a peeling apparatus 1.
0 may be connected by a conveyor and supplied in-line, or supplied off-line. Further, the number of glass plates 14 supplied to the peeling device 10 is not limited to four, but may be one to three or five or more.

The four glass plates 14 supplied to the peeling device 10 are separated from each other by four peeling and suction units 24 of the peeling device 10.
24 separates from the suction pad 20 of the polishing table 18. Then, the separated glass plates 14, 14,...
Are supplied to the mounting table 16 of the cleaning device by the tact transfer device 26 of the peeling device 10 while being sucked and held by the peeling and sucking units 24, 24. Then, the glass plates 14, 14,...
After the spin cleaning, the wafer is transported to the next step (not shown).

The remaining four polishing tables 18, 18... In the peeling device 10
Until it is supplied to 0, it is collected by a collecting device (not shown) or an operator. The flow of the glass plate 14 in the peeling transfer device 12 has been described above. As shown in FIG. 2, the peeling suction unit 24 of the peeling device 10 includes a surface plate (holding member) 28, a flexible cylinder device (flexible means) 30A,
30B, 30C, and 30D, and a retraction cylinder device (retraction means) 30E.

The platen 28 shown in FIG. 3 is made of a plastic such as a vinyl chloride resin, an acrylic resin or a polyacetal resin, or a material which can be easily bent such as rubber. On the lower surface of the surface plate 28, a suction pad 32 for holding the entire surface of the glass plate 14 by vacuum suction is attached.

The cylinder devices 30A to 30E shown in FIG.
Is fixed to the lower surface of a support plate 34 installed above the surface plate 28, and each of the rods 31 </ b> A to 31 </ b> E is fixed to the upper surface of the surface plate 28. The support plate 34 is provided on the surface plate 28.
Made of harder material. Therefore, when the rods 31A to 31E of the cylinder devices 30A to 30E expand and contract, the platen 28 is pushed and pulled by the rods 31A to 31E to bend.

The flexible cylinder devices 30A to 30D
As shown in FIG. 3, are mounted at symmetrical positions about the retraction cylinder device 30E arranged at the center of the support plate. That is, two flexible cylinder devices 30A are provided at the left corner of the support plate 34,
D is provided at the right corner. Also, two flexible cylinder devices 30B are arranged close to each other at a position inside the flexible cylinder device 30A.
Two OCs are arranged close to each other at a position inside the flexible cylinder device 30A.

Therefore, the flexible cylinder device 30A,
When the rods 31A and 31D of 30D are contracted, the platen 2
8, as shown in FIG. 4, the edge is bent in a shape warped upward. As a result, the edge of the platen 28 is
Evacuate from Further, in conjunction with the contraction operation of the rods 31A, 31D, the flexible cylinder devices 30B, 30C
When the rods 31B and 31C are contracted, the platen 28 is further bent. As a result, the platen 28 retreats from the polishing table 18 from the edge to the center. Note that the number and mounting positions of the cylinder devices 30A to 30E are not limited to those in the embodiment of FIG. 2 is a connecting member for connecting the support plate 34 to the tact transfer device 26 of FIG.

Next, the operation of the peeling and adsorbing unit 24 configured as described above will be described. First, as shown in FIG. 2, the glass plate 1 is
4 is vacuum-adsorbed and held on the entire upper surface of the substrate. Next, the flexible cylinder devices 30A and 30D are driven, and the rods 31A and
31D is gradually contracted (FIG. 4, top). This allows
The edge of the platen 28 bends upward as shown in FIG.
Then, the glass plate 1 sucked and held on the platen 28
The edge 14A of the fourth is gradually peeled off from the polishing table 18.

Next, in conjunction with the contraction operation of the rods 31A, 31D, the flexible cylinder devices 30B, 30C
When the rods 31B and 31C are contracted (FIG. 4),
The platen 28 gradually bends from the edge to the center,
Along with this, the glass plate 14 also gradually peels off from the polishing table 18 from the edge 14A to the center. At this time, a plurality of nozzles 58, 58,...
Spray water on 0. As a result, the suction force of the suction pad 20 is reduced by water, so that the glass plate 14 is smoothly separated from the polishing table 18. Note that compressed air may be injected instead of water, or similar effects can be obtained by injecting water and compressed air together.

When only the central portion of the glass plate 14 is attracted to the polishing table 18, the rod 31
A, stop the contraction operation of 31D, and
B, 31C and rod 31E of retraction cylinder device 30E
Is contracted (FIG. 4, top). Thereby, the glass plate 14
Is separated from the polishing table 18 so that the entire glass plate 14 is separated from the polishing table 18.

Thereafter, the contraction amounts of the rods 31A to 31D are made equal, and the platen 28 is returned to a flat shape as shown in FIG. Thereafter, the tact transfer device 26 of FIG. 1 is driven to transfer the glass plate 14 held by the peeling and suction unit 24 to the mounting table 16 of the cleaning device. The above is the operation of the peeling suction unit 24. Thus, in the present embodiment,
Since the glass plate 14 is peeled by the peel suction unit 24, the glass plate 14 can be automatically peeled from the polishing table 18.

In contrast to the peeling method of the present invention, as another peeling method, the entire surface of the glass plate 14 is held by a holding means, and the holding means is moved in parallel in a direction to withdraw from the polishing table 18 (without bending). Move) the glass plate 14
Can be considered to be separated from the polishing table 18. However, in this peeling method, since the force for peeling the glass plate 14 acts on a portion other than the edge of the glass plate 14 in most cases, if the force acts on a portion other than the edge, the glass plate 14 is damaged. There is a disadvantage that it may be. On the other hand, in the peeling method of the present invention, since the force for peeling the glass plate 14 always acts on the edge of the glass plate first, the glass plate 14 can be smoothly peeled without being damaged.

In this embodiment, a cylinder device is exemplified as the peeling means and the retreating means. However, the present invention is not limited to this. The platen 28 and the supporting plate 34 are connected by a ball screw device, and the ball screw device is used. The platen 28 may be bent by the action of the device. Further, in the present embodiment, the glass plate 14 is exemplified as the plate-like body to be peeled, but the present invention is not limited to this, and a thin plate material such as a silicon wafer can also be exemplified.

[0022]

As described above, according to the method and the apparatus for peeling a plate-like body according to the present invention, the plate-like body is held by the holding member, and then the holding member is bent by the flexible means. The plate-like body was gradually peeled off from the suction member, and the central portion of the holding member was moved away from the suction member by the retreating means to peel the entire plate-like body from the suction member. Can be automatically peeled off.

Further, according to the present invention, since the nozzle for injecting water and / or compressed air is provided in the gap between the plate and the suction member, the plate can be smoothly separated from the suction member. .

[Brief description of the drawings]

FIG. 1 is an explanatory view of a glass sheet peeling and transferring apparatus including a glass sheet peeling apparatus of the present embodiment.

FIG. 2 is a side view showing a state in which a peeling suction unit of the glass plate peeling apparatus of FIG. 1 is sucked to a glass plate;

FIG. 3 is an explanatory diagram showing an arrangement position of a cylinder device.

FIG. 4 is a side view showing the operation of the peeling suction unit.

FIG. 5 is a side view showing a state in which the glass plate is peeled off from the polishing table by the peeling suction unit.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 10 ... Glass board peeling apparatus 14 ... Plate (glass plate) 18 ... Suction member (polishing table) 24 ... Peeling suction unit 28 ... Holding member (surface plate) 30A-30D ... Flexible means (flexible cylinder device) 30E: Evacuation means (evacuation cylinder device)

Claims (4)

[Claims] 1. A method for separating a plate-like body from a suction member, wherein the plate-like body sucked by the suction member is separated from the suction member. The plate-like body is held by a flexible holding member, and the holding member is gradually bent by a flexible means in a direction of retracting from the suction member from an edge portion of the holding member toward a center portion, so that the plate-shaped body is held. Is gradually peeled from the suction member toward the center from the edge of the plate, and the central portion of the holding member is moved away from the suction member by the evacuation means, so that the entire plate is moved from the suction member. A method for peeling a plate-like body, comprising peeling the plate-like body. 2. The method according to claim 1, wherein the plate is peeled while spraying water and / or compressed air into a gap between the plate and the adsorbing member. 3. A plate-like body peeling device for peeling a plate-like body sucked by a suction member from a suction member, wherein an entire side surface opposite to a surface of the plate-like body sucked by the suction member is held. A flexible holding member that is capable of bending the holding member from an edge portion of the holding member toward a central portion in a direction to retract from the suction member; and the holding member. A retreating means capable of moving a central portion of the plate-like member in a direction of retreating from the suction member. 4. An apparatus according to claim 3, further comprising a nozzle for injecting water and / or compressed air into a gap between said plate and said adsorbing member.