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TWI262961B - Film formation apparatus and film formation system using the same - Google Patents

Film formation apparatus and film formation system using the same

Info

Publication number
TWI262961B
TWI262961B TW094106005A TW94106005A TWI262961B TW I262961 B TWI262961 B TW I262961B TW 094106005 A TW094106005 A TW 094106005A TW 94106005 A TW94106005 A TW 94106005A TW I262961 B TWI262961 B TW I262961B
Authority
TW
Taiwan
Prior art keywords
film formation
seal member
same
opening seal
electrode
Prior art date
Application number
TW094106005A
Other languages
Chinese (zh)
Other versions
TW200538576A (en
Inventor
Dai Kitahara
Original Assignee
Shimadzu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Publication of TW200538576A publication Critical patent/TW200538576A/en
Application granted granted Critical
Publication of TWI262961B publication Critical patent/TWI262961B/en

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B66—HOISTING; LIFTING; HAULING
    • B66F—HOISTING, LIFTING, HAULING OR PUSHING, NOT OTHERWISE PROVIDED FOR, e.g. DEVICES WHICH APPLY A LIFTING OR PUSHING FORCE DIRECTLY TO THE SURFACE OF A LOAD
    • B66F7/00—Lifting frames, e.g. for lifting vehicles; Platform lifts
    • B66F7/28—Constructional details, e.g. end stops, pivoting supporting members, sliding runners adjustable to load dimensions
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B66—HOISTING; LIFTING; HAULING
    • B66F—HOISTING, LIFTING, HAULING OR PUSHING, NOT OTHERWISE PROVIDED FOR, e.g. DEVICES WHICH APPLY A LIFTING OR PUSHING FORCE DIRECTLY TO THE SURFACE OF A LOAD
    • B66F7/00—Lifting frames, e.g. for lifting vehicles; Platform lifts
    • B66F7/06—Lifting frames, e.g. for lifting vehicles; Platform lifts with platforms supported by levers for vertical movement
    • B66F7/065—Scissor linkages, i.e. X-configuration
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B66—HOISTING; LIFTING; HAULING
    • B66F—HOISTING, LIFTING, HAULING OR PUSHING, NOT OTHERWISE PROVIDED FOR, e.g. DEVICES WHICH APPLY A LIFTING OR PUSHING FORCE DIRECTLY TO THE SURFACE OF A LOAD
    • B66F7/00—Lifting frames, e.g. for lifting vehicles; Platform lifts
    • B66F7/06—Lifting frames, e.g. for lifting vehicles; Platform lifts with platforms supported by levers for vertical movement
    • B66F7/08—Lifting frames, e.g. for lifting vehicles; Platform lifts with platforms supported by levers for vertical movement hydraulically or pneumatically operated

Landscapes

  • Life Sciences & Earth Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Geology (AREA)
  • Mechanical Engineering (AREA)
  • Structural Engineering (AREA)
  • Chemical Vapour Deposition (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

A film formation apparatus and film formation system that can reduce the stop time for cleaning the electrode and peripheral part thereof and enhance the production efficiency of film formation process are provided. The opening seal member 101 of the plasma CVD apparatus 1 is removed by the exchange apparatus while the electrode 103 and peripheral part of the plasma CVD are cleaned. Then the exchange apparatus installs the new product or cleaned opening seal member 101 to replace the dismantled opening seal member 101.
TW094106005A 2004-05-31 2005-03-01 Film formation apparatus and film formation system using the same TWI262961B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2004160758A JP4403882B2 (en) 2004-05-31 2004-05-31 Deposition system

Publications (2)

Publication Number Publication Date
TW200538576A TW200538576A (en) 2005-12-01
TWI262961B true TWI262961B (en) 2006-10-01

Family

ID=35490476

Family Applications (1)

Application Number Title Priority Date Filing Date
TW094106005A TWI262961B (en) 2004-05-31 2005-03-01 Film formation apparatus and film formation system using the same

Country Status (4)

Country Link
JP (1) JP4403882B2 (en)
KR (1) KR100680239B1 (en)
CN (1) CN1757790A (en)
TW (1) TWI262961B (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI384091B (en) * 2010-05-10 2013-02-01 Asiatree Technology Co Ltd Detachable feeding/discharging structure and conductive film-forming device including the same

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPWO2008156031A1 (en) * 2007-06-19 2010-08-26 東京エレクトロン株式会社 Vacuum processing equipment
WO2009148087A1 (en) * 2008-06-06 2009-12-10 株式会社アルバック Apparatus for manufacturing thin film solar cell
JP5154491B2 (en) * 2009-03-30 2013-02-27 住友重機械工業株式会社 Chamber line
JP5560909B2 (en) * 2010-05-31 2014-07-30 東京エレクトロン株式会社 Lid holding jig
TWI415208B (en) * 2010-09-21 2013-11-11 Sumitomo Heavy Industries Chamber line
CN102433539B (en) * 2010-09-29 2014-07-09 住友重机械工业株式会社 Cavity series
JP6960830B2 (en) * 2017-11-17 2021-11-05 株式会社日立ハイテク Vacuum processing equipment and operation method of vacuum processing equipment

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3651977B2 (en) * 1995-08-28 2005-05-25 キヤノン株式会社 Roll-to-roll film forming apparatus and film forming method thereof
JP4010068B2 (en) * 1998-11-12 2007-11-21 日新電機株式会社 Vacuum processing apparatus and multi-chamber type vacuum processing apparatus
KR100428521B1 (en) * 1999-04-20 2004-04-29 도쿄 엘렉트론 가부시키가이샤 Method for single chamber processing of PECVD-Ti and CVD-TiN films in IC manufacturing

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI384091B (en) * 2010-05-10 2013-02-01 Asiatree Technology Co Ltd Detachable feeding/discharging structure and conductive film-forming device including the same

Also Published As

Publication number Publication date
KR20060047678A (en) 2006-05-18
JP2005336590A (en) 2005-12-08
TW200538576A (en) 2005-12-01
JP4403882B2 (en) 2010-01-27
CN1757790A (en) 2006-04-12
KR100680239B1 (en) 2007-02-07

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