1262036 九、發明說明： 【發明所屬之技術領域】 本發明係有關於一種可撓式有 方法及其顯示模組，尤其是可應用一二0 :光面板之製作 製程之-種可撓式有機電激發光面板電激發光面板 模組。 衣乍方法及其顯示 【先前技術】 近年來平面顯不器（Fiat Panel Displ _ 產紐術已趨成熟，如液晶顯示器⑽）^FPD) J示:，)、電漿顯示器(PDP)、場發射顯示= 光 寻，在市場蓬勃發展的帶動之下，不少 。CFED) =入下:世代顯示器的開發。軟性顯示器 由#及可撓曲之特性，因此開啟顯示器新的熱門應用二 又因為以塑膠製作之基板具便宜、易加工、，/、 ”曲等優點，其製作之重量為玻璃基板的二半”可 丨生有機電激發光顯示器（Flexible 〇LFT)、: 研發已慢慢形成一股熱潮。然，有機電激發:::: 隹7氧非常敏感，而一般的塑膠基板於室溫下對 ζ 7約為每平方公尺每天0.1〜100八牙t 二〇〇〜1〇，—@25。〇)，無法完全阻隔水汽 連續^會加速㈣顯示元件的老化，導致製成的元件苴 水=作時間達不到—萬小時的商#標準。為了達到阻P ，必須在塑膠基板和無機導電層之間塗覆^ ㈣t料以阻隔防止水氧的滲透及擴散，且因為有機及 才貝之間界面的問題，因此阻隔層材料的選取必項在 5 1262036 塗覆過程中能無缺陷地均勻成膜（Defect-Free)、不會產 生針孔（Pin Holes)、高透光性及避免對可見光的吸二， 以多層膜的製程方式來達成F0LED基板機能需求。此| 由於塑膠基板具有易彎曲的特性，並不適合使用於現 激發光顯示器）的量產機台上來做生產，且塑膠 材枓之膨脹係數大，於黃光或蒸鍍製程時將因 = 2原因而影響到塑膠基板的平坦性，如内應力 =翹曲或皺折等，在圖形的定義上將降低 先罩對位曝光的精準度。 欠〃 ，參^灣專利公Μ 59侧號所揭露之_種可挽 广板之W作方法，其步驟包括於玻璃基 二 件’再轉貼於塑膠基板上，並配合研磨、==關： 而使面板達到輕薄與可撓之特性；^，此^程^ ^上兩歷經多次轉印步驟，步驟繁 ^ 切割、—等步驟強調精準it更加I; 之運:疋提》明二有感上述缺失，乃潛心研究並配合學理 本種設計合理且廣泛且有效改善上述缺失之 【發明内容】 本發明提供一種可择々古德杂、a 及其顯示模組，係可湘歸基光面板之製作方法 之載板上，俾使其總厚度轉& : +成型於—堅硬平坦 璃基板相當’毋需於製程中更動硬士顯示= 6 1262036 二私參數、艾動衫響人員重新訓練、面板規格重新制定 同-生產線内欲製作不同規格之面板時的參數調整，是 乂此技術4寸欲有利於提高製程效率與降低生產成本。 發：提供—種可撓式有機電激發光面板之製作方法 ”U ’係可利用歸基板預先成型於―堅硬基板 膠美板基板上製作相關元件，不但克服於軟性塑 =板衣作相關70件之穩定性與平坦性問題，且可省略 夕次轉印步驟，進一步提高製程效率。 ，發明提供—種可撓式有機電激發光面板之製作方法 係可利用一可雙面黏著之非固化膠膜貼附 11^ 以與軟性封蓋對位貼合，避免因使用固化膠 敏折固化〜發生體積收縮，產生應力而影響塑膠基板產生 明提供_種可撓式有機電激發光面才反之製作方 ^ 加包括： 置備堅硬平坦載板； 美成型塑膠基板於該堅硬平坦載板上，其中，該塑膠 基板係至少與該餘共同形成—财厚度； ^ 沉積至少一保護層於該塑膠基板上； 層上·衣作有機電激發光元件陣列於該塑膠基板之該保護 P提供一軟性封蓋，且整面式貼附可雙面黏著之非固 乡膜於該塑膠基板與該軟性封蓋之間；以及 剝離該載板； 藉此，該預定厚度係相當於習用製程之玻璃基板厚 7 1262036 俾讓上述步驟能於不變旻羽 本發明提供一種可撓式之機台完成。 括： 有钱電激發光顯示模組，係包 塑膠基板； 、 :一保濩層’係;冗積於該塑膠基板上； 有^電激發光元件_，係設置於該保護層上. =_蓋:係安膠基板之上方；以/ 板與該軟者之非固化膠膜，係整面式貼合該塑膠基 括：本發明提供一種可挽式有機電激發光顯示模組，係包 塑膠基板； 至夕保瘦層’係沉積於該塑膠基板上· =發光，，係設置於該保護層上； w j凰，係女1於該塑膠基板之上方； 板與該著之非固化膠膜，係整面式貼合該塑膠基 =動模組’係設置於該塑膠基板上；以及 性封蓋。’氧膜係、化子氣相沈積覆蓋該塑膠基板及其軟 技術ίΓ吏更進-步瞭解本發明之特徵及 载内容僅提;本發^ 者。 可/、兄月用亚非用來對本發明加以限制 8 1262036 【實施方式] 利用電激發光面板之製作方法係 塑膠基板能夠===_板之•俾使 亦彎曲的崎糊身 上，再提供一可譬面對荽々、刃风生於忒塑恥基板 基板與-軟性封芸對㈣人_固化膠膜整面式貼附該塑膠 模組^士成可梏=士 、〇，並於剝離該載板、貼附驅動 撓式有機電激發光顯示模組;此外，更可Ϊ 二步式有機電激發光顯示模組上進 = ==完全覆蓋該塑膠基板及該軟性封蓋，乍為 w 的 m (PassivatlQnFUm)，以阻絕 = 撓式有機電激發光面板 i 1第“ i /法係包括..（a)置備堅硬平坦載板 之性質，可不^因平坦載板1係具有耐高溫、抗酸驗 、貝 不口、酿度或酸鹼變化而變形，其可由石夕ίςι·) 或二氧化矽（Si〇2)材料製作而成，如 並利用化學_清洗魏板丨，叫除乡制綠板， ⑻可轉_娜氣層2於該她1上 成型娜基板3之平坦化、以騎止水氧 % :T ··該阻氣層2係可為欽氧化物 製^：)、㈣化物（論）或錢化物（8咖）等枋料所 氡層之該阻 丁一取販1作為該塑膠基板3之 9 12620361262036 IX. Description of the invention: [Technical field of the invention] The present invention relates to a flexible method and a display module thereof, in particular, a flexible process for manufacturing a process Electromechanical excitation light panel electroluminescent panel module. Clothing method and its display [Prior Art] In recent years, the flat display device (Fiat Panel Displ _ production technology has matured, such as liquid crystal display (10)) ^ FPD) J shows:,), plasma display (PDP), field Launch display = light search, driven by the booming market, quite a lot. CFED) = Next: Development of generational displays. The flexible display is characterized by # and flexible, so it opens up the new popular application of the display. Secondly, because the substrate made of plastic is cheap, easy to process, and/or "curvy", the weight of the display is two halves of the glass substrate. "Flexible 〇LFT" can be produced, and R&D has gradually formed a boom. However, organic electricity excitation:::: 隹7 oxygen is very sensitive, and the general plastic substrate at room temperature is about ζ7 about 0.1~100 八 tooth per square meter per day t〇〇~1〇, —@25 . 〇), can not completely block the water vapor continuous ^ will accelerate (four) display component aging, resulting in the production of components 苴 water = time is less than - 10,000 hours of the commercial # standard. In order to achieve the resistance P, it is necessary to coat the (four) material between the plastic substrate and the inorganic conductive layer to prevent the penetration and diffusion of water and oxygen, and because of the interface between the organic and the octopus, the material of the barrier layer must be selected. 5 1262036 Uniform film formation (Defect-Free), no pinholes, high light transmission and avoidance of visible light absorption during coating, F0LED can be achieved by multi-layer film process Substrate function requirements. This | Due to the flexible nature of the plastic substrate, it is not suitable for production on the mass production machine of the current excitation light display, and the expansion coefficient of the plastic material is large, and will be caused by the yellow light or the evaporation process = 2 The reason is that the flatness of the plastic substrate, such as internal stress = warpage or wrinkles, is reduced, and the accuracy of the first cover alignment exposure is reduced in the definition of the pattern. 〃 〃 , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , And the panel is made light and flexible; ^, this ^ ^ ^ ^ two times through the multiple transfer steps, steps 繁 ^ ^ cutting, - and other steps to emphasize the precision it is more I; the operation: 疋 mention" Ming two have Having the above-mentioned deficiencies, it is a research and coordination with the theory that the design is reasonable and widely and effectively improves the above-mentioned defects. [Invention] The present invention provides a selectable 々古德杂, a and its display module, which can be Xiang Xiangguang The manufacturing method of the panel is made on the carrier board, and the total thickness is turned to &: + formed on the hard flat glass substrate. 'It is necessary to change the hard display in the process. = 6 1262036 Two private parameters, Ai 衫 响 人员 re The training and panel specifications have been re-defined. The parameter adjustments in the production line to produce panels of different specifications are based on the fact that the 4-inch technology is beneficial to improve process efficiency and reduce production costs. Hair: Providing a method for manufacturing a flexible organic electroluminescence panel "U' can be pre-formed on a "hard substrate" substrate to make related components, not only overcoming soft plastic = board clothing. The stability and flatness of the piece, and the evening transfer step can be omitted to further improve the process efficiency. The invention provides a flexible organic electroluminescent panel manufacturing method which can utilize a double-sided adhesive non-curing Adhesive film attached 11^ to fit the soft cover in the opposite direction, avoiding the curing by the use of curing adhesive. ~ Volume shrinkage occurs, stress is generated and the plastic substrate is affected. The flexible organic electroluminescent surface is reversed. The manufacturing method includes: providing a hard flat carrier plate; forming a plastic substrate on the rigid flat carrier plate, wherein the plastic substrate is formed at least with the remainder; and depositing at least one protective layer on the plastic substrate The upper layer of the organic electroluminescent device array provides a soft cover for the protection P of the plastic substrate, and the entire surface is attached to the non-seal film which can be double-sidedly adhered Between the plastic substrate and the flexible cover; and peeling off the carrier; thereby, the predetermined thickness is equivalent to the thickness of the glass substrate of the conventional process 7 1262036, so that the above steps can be used to provide the same The flexing machine is completed. Includes: a rich electric excitation display module, a plastic substrate; a: a protective layer'; redundant on the plastic substrate; On the protective layer. =_ cover: above the epoxy substrate; the / plate and the soft non-curing film, the whole surface is attached to the plastic substrate: the present invention provides a portable organic battery The excitation light display module is a plastic substrate; the cherished thin layer is deposited on the plastic substrate, and is lighted, and is disposed on the protective layer; wj phoenix, the female 1 is above the plastic substrate; The plate and the non-curing film are integrally laminated to the plastic base=moving module' is disposed on the plastic substrate; and the cover is sealed. 'Oxygen film system, chemical vapor deposition covers the plastic Substrate and its soft technology. Further understanding of the features and contents of the present invention The present invention can be used, and the brother and wife can use the Asian and African to limit the invention. 8 1262036 [Embodiment] The manufacturing method using the electroluminescent panel is a plastic substrate capable of ===_板•俾使亦The sloppy body, and then provide a 譬 譬 face, blade wind born in 忒 忒 基板 基板 基板 基板 基板 基板 基板 基板 基板 基板 ( ( ( ( 四 四 四 四 四 四 四 四 四 四 四 四 四 四 _ _ _ _ _ _ _ _ _ =士,〇, and peeling off the carrier, attaching the driving flexible organic electroluminescent display module; in addition, the two-step organic electroluminescent display module is mounted on === completely covering the plastic substrate And the soft cover, m (PassivatlQnFUm), to block = flexible organic electroluminescent panel i 1 "i / legal system includes: (a) the nature of the provision of a hard flat carrier, may not The flat carrier plate 1 is deformed by high temperature resistance, acid resistance test, shelling, brewing degree or acid-base change, and can be made of stone material, or cerium oxide (Si〇2) material, such as Chemistry _ cleaning Wei board 丨, called the green plate of the township, (8) can turn _ _ gas layer 2 on the 1 she formed the base of the substrate 3 、, to stop the water oxygen % : T · · The gas barrier layer 2 can be made of sputum oxide ^:, (four) compound (on) or money (8 coffee) and other layers of the sputum A vendor 1 as the plastic substrate 3 9 1262036
支撐，使该塑膠基板3在成膜時，能得到均勻的成膜品質 (包含有機與無機成膜）、與能夠精確地控制黃光微影與蝕 刻製程的條件與規格，該塑膠基板3至少與該載板1 (及 該阻氣層2)係共同形成一預定厚度h，該預定厚度h係相 當於習用製程之該玻璃基板之厚度，俾讓後續製程能於不 變更習用製程參數之機台完成之。其中，該塑膠基板3係 可利用捲軸式或噴灑式塗佈或射出技術，進以貼附或沉積 具有耐溫、透a月及不透氣性質之該塑膠基板3於該載板i 上；該塑膠基板3係可以聚對苯二曱酸乙二醇醋 (Polyethylene Terephthalate，PET )、聚碳酸酯 (Polcarbonate，PC)、聚_ (p〇iythersuphone，PES)、 聚亞醯胺（Polyimide，PI)等高分子材料製作而成，當塗 佈或射出該塑膠基板3時，須控制該塑膠基板3之膜厚以 與該載板1 (及該阻氣層2)形成該預定厚度h、以及其他 如平坦度與孔隙等規格。 〃 (d)選擇性佈設阻氣層4於該塑膠基板3上，如第一 D圖，該阻氣層4係防止水氧進入，其可為鈦氧化物 (TiOx)、鋁氧化物（ΑΙΟχ)或矽氧化物（Si〇x)等材料所 製成。 、沉積至少一保護層5於該塑膠基板3 (之該阻 層上，如第一 E圖所示，其可利用物理氣相沉積（PVD 化孥氣相沉積（CVD)、或旋塗式玻璃成膜技術（s〇G)沉 ，有，緻密性與高透光度性質之該保護層5;該保護層 :从虱化矽、氮化矽、或氮氧化矽等材料形成，且無缺 =成膜（Defect-Free)、不會產生針孔（PinH〇les: /、有鬲透光性與避免對可見光的吸收，且具有絕佳的平 10 1262036 度以利後縯沉積透明電極的製作。 ⑴製作有機電激發Μ件陣列6柯 之該保1 5上，其至少包括下列步、ς :: 第一透明電極61於該塑膠基板3之該保護層5== 一 F圖，（u)微影蝕刻該第一透明電極61 極陣列62，以及佈設絕緣層63於該第—透明 中作為隔絕，如第一 G圖；（111)佈設具$二車= 有機電，發光構造64於該第_透明電極陣列^構= (IV)没置至少一第二透明電極陣 谨捽fU上，牛鲈r · · ·、r ·、 jb5於該有機電激發光 構仏64上步驟（111)、（lv)請參閱第一 η直 該第一與第二透明電極矩陣62、R 回，/、 (ΙΤ0)^«@# (ΙΖ0) (IW〇)^^ 其中广有機電激發光元件陣列心為 f動式ΐ(Actlve Matrlx)或被動式矩陣（Passlve Matrix)。疋以，利用此平坦、堅 e 11 1262036 (Passivati〇n Flln])9^|t^ 再以該軟性封蓋7透過該非 陣歹，U上， f其純化膜9。如第-r圖，係於提丄膠基被3 月”先設置一吸氣劑（getter) G於該^人'績盖炎题之 再以該軟性封芸了透Mi 車人十封盍γ ^ 及纽化膜9其中透過=:膜8貼合該_基:3 高可塑性之非導電材料°所穿成·8係為具低吸渴性、 ，數K祕，如可為全密係可包 微開口散佈1上。;ί為，可進-步包括至少1 與該軟性封蓋7可8對位貼合該塑膠基板3 膠膜8於該軟性封蓋7 方，，（1)貝占附該非固化 化膠膜8於伸如^ 1圖、（11)貼附該非固 上，如宾^ 及其有機電激發光元件陣列6 膠芙板3 m ( 111)貼附該非固化膠膜8於該塑 膜土9之上，於該丨有機電激魏元件陣列6上之該鈍化 使用該非㈤!^ w;再進行對位密實貼合。是以， 外，避务、料恥膜.8之封裴結構，除了不會傷害相關元件 士 M六、、固化膠材或紫外光固化膠材於固化（Curing) 生體積收縮（Shrillkage)會將上下之該塑膠基板3 人性封蓋7互相拉扯而造成面板的不平整或皺折；更 /、/、低吸漁性，可阻擋水氣侵入；此外，利用此平坦、 ^硬’耐溫載板1作為該塑膠基板3之支撐；使封裝製程 月匕夠平坦的進行，不因外在因素的變形而阻礙其製作。 (h)、,剝離該載板1，如第一 L圖；其中於剝離該載板 步驟之W或之後，包括裁切該載板1及其塑膠基板3。 (1)於裁切或剝離該載板1步驟之後，包括貼附驅動 12 1262036 模組Μ於該塑膠基拓 Μ可為捲帶軟被ί 如第一 Μ圖，其中該驅動模組 帶式薄膜封壯/衣（Tape Carrier Package，TCP)、捲 (ch1p〇T^(Chlp^ ,兀成可撓式有機電激發光顯示模組。 基板3^—封^化7學及\相沈積有抗水氧膜F覆蓋該塑膠 該抗水氧膜…驅動模組M，如第一付圖；其中 製作而成；外【夕、氧化氮與聚氯對苯二甲等材料 (Passion ^ 膠基板3，或甚至從該軟|封%雲水乳軟性封蓋7、該塑 該驅動模組Μ與該_ /。該塑膠基板3之間、 以，完成可撓式“電i發光=隙(Gap)入侵;是 法及==供物電激發光面板之製作方 器之玻璃基板相當，母;:二j度與傳統有機電激發光顯示 如傳動軸（C0騰y〇r)、"或機;更動硬體參數的設定， 避免因製程參數變動影變…手# (robot)的位置等， 定、及同-生產線内欲0制貝重新训練、面板規格重新制 整，是以，此技術特徵^利於不=格之面板時的參數調 本。 於棱回製程效率與降低生產成 本發明所提供之該可 法及其顯示模組，由於剎二:俨電激發光面板之製作方 板上’再於該塑縣板上先成型於 一堅硬基 膠基板上製作相關元件相關元件，可克服於軟性塑 本發明所提供之該可與平坦性問題。 I式有機電激發光面板之製作方 13 1262036 法及其顯示模組.，使用可雙面黏著之非固化膠膜貼附該塑 膠基板以與軟性封蓋對位貼合，避免因使用固化膠材於固 化時發生體積收縮，產生應力而影響塑膠基板產生皺折。 惟以上所述僅為本發明之較佳可行實施例，非因此即 拘限本發明之專利範圍，故舉凡應用本發明說明書或圖式 内容所為之等效結構變化，均同理皆包含於本發明之範圍 内，以保障發明者之權益，於此陳明。 【圖式簡單說明】 第一 A圖至第一 N圖所示，係為本發明可撓式有機電激發 光面板之製作方法之示意圖；以及 第二圖所示，係為本發明可撓式有機電激發光面板之製作 方法及其顯示模組之流程示意圖。 【主要元件符號說明】 本發明所提供之可撓式有機電激發光顯示模組 載板 1 阻氣層 2、4 塑膠基板 3 保護層 5 第一透明電極 61 第一透明電極陣列 62 絕緣層 63 有機電激發光構造 64 第二透明電極陣列 65 軟性封蓋 7 可雙面黏著之非固化膠膜8 14 1262036 鈍化膜 9 驅動模組 Μ 抗水氧膜 F 吸氣劑 G 預定厚度 h 15Supporting, when the plastic substrate 3 is formed, uniform film forming quality (including organic and inorganic film formation), and conditions and specifications capable of accurately controlling yellow lithography and etching processes, the plastic substrate 3 at least The carrier 1 (and the gas barrier layer 2) together form a predetermined thickness h, which is equivalent to the thickness of the glass substrate of the conventional process, so that the subsequent process can be completed without changing the parameters of the conventional process parameters. It. Wherein, the plastic substrate 3 can be attached or deposited on the carrier board i by using a roll-type or spray coating or injection technique to adhere or deposit the plastic substrate 3 having temperature resistance, a month penetration and gas barrier properties; The plastic substrate 3 can be polyethylene terephthalate (PET), polycarbonate (Plcarbonate, PC), poly (p〇iythersuphone, PES), polyimide (PI). When the plastic substrate 3 is coated or shot, the film thickness of the plastic substrate 3 must be controlled to form the predetermined thickness h with the carrier 1 (and the gas barrier layer 2), and other Specifications such as flatness and porosity. 〃 (d) selectively disposing the gas barrier layer 4 on the plastic substrate 3, as in the first D diagram, the gas barrier layer 4 prevents entry of water oxygen, which may be titanium oxide (TiOx), aluminum oxide (ΑΙΟχ Or made of materials such as bismuth oxide (Si〇x). Depositing at least one protective layer 5 on the plastic substrate 3 (the resist layer, as shown in FIG. E, which can be formed by physical vapor deposition (PVD, vapor deposition (CVD), or spin-on glass) The film forming technology (s〇G) sinks, has the dense layer and high transparency property of the protective layer 5; the protective layer: is formed from a material such as antimony telluride, tantalum nitride, or niobium oxynitride, and is indispensable = Film-forming (Defect-Free), no pinholes (PinH〇les: /, 鬲 light transmissivity and avoidance of absorption of visible light, and excellent flat 10 1262036 degrees to facilitate the deposition of transparent electrodes (1) fabricating an organic electro-active device array 6 which has at least the following steps, ς :: the first transparent electrode 61 on the plastic substrate 3 of the protective layer 5 == a F map, (u The first transparent electrode 61 pole array 62 is lithographically etched, and the insulating layer 63 is disposed in the first transparent as an isolation, as in the first G diagram; the (111) layout has two cars = organic electricity, and the light emitting structure 64 is The first transparent electrode array structure = (IV) is not placed on at least one second transparent electrode array, on the fU, the calf r · · ·, r ·, jb5 Steps (111), (lv) of the electro-excitation light structure 64, refer to the first η straight first and second transparent electrode matrix 62, R back, /, (ΙΤ0)^«@# (ΙΖ0) (IW〇 ) ^^ The array of organic electro-optic excitation elements is an Actlve Matrlx or a Passlve Matrix. By using this flat, firm e 11 1262036 (Passivati〇n Flln]) 9^| Then, the soft cover 7 is passed through the non-ankle, U, and f to purify the film 9. As shown in the -r figure, the tether base is set to a getter G in March. The ^ person's performance cover inflammation is further sealed with the softness of the Mi car, ten 盍 γ ^ and the neodymium film 9 through which =: film 8 fits the _ base: 3 highly plastic non-conductive material ° The 8 series is made of low-thirsty, and the number K is secret. For example, it can be spread on the micro-opening of the full-density system; ί is, the step can include at least 1 and the soft cover 7 can be 8 pairs of the plastic substrate 3 film 8 is attached to the soft cover 7 side, (1) the uncured non-curable adhesive film 8 is attached to the non-solidified film, such as (1) Bin ^ and its organic electroluminescent device array 6 plywood 3 m ( 11 1) attaching the non-curing adhesive film 8 to the plastic film soil 9, and using the non-(5)! ^ w on the passivation on the 丨 organic electro-excitation device array 6; and then performing the alignment compact bonding. In addition, avoiding, shaving film.8 sealing structure, in addition to not hurting related components, M6, curing adhesive or UV curing adhesive in curing (Curing) volume shrinkage (Shrillkage) will be up and down The plastic substrate 3 is pulled by the human cover 7 to cause unevenness or wrinkles of the panel; more /, /, low suction, can block moisture intrusion; in addition, using this flat, ^ hard 'temperature resistant carrier 1 As the support of the plastic substrate 3, the packaging process is performed flat enough, and the production is not hindered by the deformation of external factors. (h), stripping the carrier 1, such as the first L; wherein, after or after stripping the carrier, the carrier 1 and its plastic substrate 3 are cut. (1) After the step of cutting or peeling off the carrier board 1 , including attaching the driver 12 1262036 module, the plastic base top can be a tape roll, such as the first image, wherein the drive module is Tape Carrier Package (TCP), roll (ch1p〇T^(Chlp^, 可成成式式电电光光光光光的模块. Substrate 3^-封化化化化化化化化化化化化化化化化化化化化化化化化化化化化化化化化化化化化化化化化化化化化化化化化化化The water-resistant oxygen film F covers the plastic water-resistant oxygen film... drive module M, such as the first picture; which is made; the outer [Night, nitrogen oxide and polychlorinated para-xylene materials (Passion ^ plastic substrate 3, or even from the soft | seal% cloud water soft cover 7, the plastic drive module Μ and the _ /. The plastic substrate 3, to complete the flexible "electric i-light = gap (Gap ) Intrusion; is the method and == the glass substrate of the manufacturer of the electricity-exciting light panel is equivalent, the mother;: two degrees and the traditional organic electro-excitation light display such as the drive shaft (C0 ton y〇r), " or machine Change the setting of the hardware parameters, avoid the change of the process parameters... The position of the hand # (robot), etc., and the same - the production line wants 0 system retraining, panel specification re-production In addition, this technical feature is advantageous for the parameter adjustment of the panel without the grid. The efficiency of the process and the reduction of production cost of the invention are provided by the invention and the display module thereof. The production panel on the light panel is further formed on a rigid base substrate to form related component-related components, which can overcome the problem of flatness and flexibility provided by the soft plastic invention. The electromechanical excitation panel manufacturer 13 1262036 method and its display module. The plastic substrate is attached with a non-curable adhesive film which can be double-sidedly adhered to fit the soft cover to avoid curing by using the cured adhesive material. The volume shrinkage occurs, and the stress is generated to affect the wrinkles of the plastic substrate. However, the above description is only a preferred embodiment of the present invention, and thus the scope of the invention is not limited thereby, so that the specification or the drawing of the present invention is applied. The equivalent structural changes of the content are all included in the scope of the present invention to protect the rights and interests of the inventors, and the description thereof is as follows: [Simplified Schematic] The first A to the first N The schematic diagram of the manufacturing method of the flexible organic electroluminescent panel of the present invention; and the second diagram is a schematic diagram of the manufacturing method of the flexible organic electroluminescent panel and the display module thereof. The main component symbol description] The flexible organic electroluminescence display module carrier board 1 provided by the present invention, the gas barrier layer 2, the 4 plastic substrate 3, the protective layer 5, the first transparent electrode 61, the first transparent electrode array 62, the insulating layer 63 Electromechanical excitation light structure 64 Second transparent electrode array 65 Soft cover 7 Non-curable adhesive film that can be adhered on both sides 8 14 1262036 Passivation film 9 Drive module Μ Water-resistant oxygen film F Getter G predetermined thickness h 15