TWD237360S - Substrate calibration fixture - Google Patents
Substrate calibration fixture Download PDFInfo
- Publication number
- TWD237360S TWD237360S TW113303901F TW113303901F TWD237360S TW D237360 S TWD237360 S TW D237360S TW 113303901 F TW113303901 F TW 113303901F TW 113303901 F TW113303901 F TW 113303901F TW D237360 S TWD237360 S TW D237360S
- Authority
- TW
- Taiwan
- Prior art keywords
- enlarged view
- view
- design
- article
- calibration fixture
- Prior art date
Links
- 239000000758 substrate Substances 0.000 title abstract description 5
- 238000004519 manufacturing process Methods 0.000 abstract description 2
- 238000000034 method Methods 0.000 abstract description 2
- 239000004065 semiconductor Substances 0.000 abstract description 2
- 238000010586 diagram Methods 0.000 description 1
Abstract
【物品用途】;本設計物品關於一種用於校準半導體製造工具內之機器人之基板校準夾具。本設計物品在校準過程中取代實際的基板。;【設計說明】;「放大圖」係顯示「立體圖2」中之放大圖線段之放大圖。;「剖視圖」係顯示沿著「放大圖」中之線段10-10之剖視圖。;圖式所揭露之虛線部分，為本案不主張設計之部分。[Article Use];This design article is about a substrate calibration fixture for calibrating a robot in a semiconductor manufacturing tool. This design article replaces the actual substrate during the calibration process. ;[Design Description];The "enlarged view" is an enlarged view of the enlarged view line segment in the "stereoscopic view 2". ;The "cross-sectional view" is a cross-sectional view along the line segment 10-10 in the "enlarged view". ;The dotted line portion disclosed in the figure is the portion that this case does not claim to design.
Description
本設計物品關於一種用於校準半導體製造工具內之機器人之基板校準夾具。本設計物品在校準過程中取代實際的基板。 This design article relates to a substrate alignment fixture used to calibrate a robot within a semiconductor manufacturing tool. This design article replaces the actual substrate during the alignment process.
「放大圖」係顯示「立體圖2」中之放大圖線段之放大圖。 "Enlarged view" is an enlarged view of the enlarged view line segment in "3D view 2".
「剖視圖」係顯示沿著「放大圖」中之線段10-10之剖視圖。 The "Sectional View" shows the section view along the line 10-10 in the "Enlarged View".
圖式所揭露之虛線部分，為本案不主張設計之部分。 The dotted line part in the diagram is the part that this case does not advocate design.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US29/927,453 | 2024-02-05 | ||
| US29/927,453 USD1100698S1 (en) | 2024-02-05 | 2024-02-05 | Substrate calibration fixture |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| TWD237360S true TWD237360S (en) | 2025-04-01 |
Family
ID=94631199
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW113303901F TWD237360S (en) | 2024-02-05 | 2024-07-31 | Substrate calibration fixture |
Country Status (3)
| Country | Link |
|---|---|
| US (1) | USD1100698S1 (en) |
| JP (1) | JP1791688S (en) |
| TW (1) | TWD237360S (en) |
Family Cites Families (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| USD320361S (en) * | 1989-06-02 | 1991-10-01 | Tokyo Electron Limited | Wafer probe plate holder |
| US5820329A (en) * | 1997-04-10 | 1998-10-13 | Tokyo Electron Limited | Vacuum processing apparatus with low particle generating wafer clamp |
| US6932558B2 (en) * | 2002-07-03 | 2005-08-23 | Kung Chris Wu | Wafer aligner |
| US7256132B2 (en) * | 2002-07-31 | 2007-08-14 | Applied Materials, Inc. | Substrate centering apparatus and method |
| USD674759S1 (en) * | 2010-08-19 | 2013-01-22 | Epistar Corporation | Wafer carrier |
| US10186448B2 (en) * | 2015-12-11 | 2019-01-22 | Lam Research Corporation | Wafer support pedestal with wafer anti-slip and anti-rotation features |
| JP2018139284A (en) * | 2016-12-08 | 2018-09-06 | ウルトラテック インク | Wafer chuck apparatus for fixing a warped wafer having a shrinkable sealing device |
| USD858469S1 (en) * | 2018-03-26 | 2019-09-03 | Veeco Instruments Inc. | Chemical vapor deposition wafer carrier with thermal cover |
| US10796940B2 (en) * | 2018-11-05 | 2020-10-06 | Lam Research Corporation | Enhanced automatic wafer centering system and techniques for same |
| CN120663299A (en) * | 2019-07-26 | 2025-09-19 | 朗姆研究公司 | Integrated adaptive positioning system and routine for automated wafer handling robot teaching and health inspection |
| CN115485826A (en) * | 2020-03-06 | 2022-12-16 | 朗姆研究公司 | Ring structure with flexible centering fingers |
| JP2024054628A (en) * | 2022-10-05 | 2024-04-17 | 日本発條株式会社 | LAMINATED STRUCTURE AND METHOD FOR MANUFACTURING LAMINATED STRUCTURE |
| EP4489064A1 (en) * | 2023-07-03 | 2025-01-08 | Unity Semiconductor | Substrate dimension adapter |
| CN117855110B (en) * | 2024-03-08 | 2024-05-24 | 苏州智程半导体科技股份有限公司 | Semiconductor processing equipment |
-
2024
- 2024-02-05 US US29/927,453 patent/USD1100698S1/en active Active
- 2024-07-31 TW TW113303901F patent/TWD237360S/en unknown
- 2024-08-01 JP JP2024016001F patent/JP1791688S/en active Active
Also Published As
| Publication number | Publication date |
|---|---|
| USD1100698S1 (en) | 2025-11-04 |
| JP1791688S (en) | 2025-02-20 |
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