TWD236821S

TWD236821S - Ceramic heater parts

Info

Publication number: TWD236821S
Application number: TW111302615F
Authority: TW
Inventors: 山名啓太; 曻和宏; 阿部哲久; 横田元一
Original assignee: 日商日本碍子股份有限公司 (日本); 日商日本碍子股份有限公司
Priority date: 2021-12-02
Filing date: 2022-05-31
Publication date: 2025-03-11
Also published as: USD1077876S1; JP1755440S

Abstract

【物品用途】;本物品是用於支撐並加熱半導體晶圓等的陶瓷加熱器之部分。如「說明使用狀態的參考剖面圖」所示，本物品為輔助構件，輔助構件之用途為接合載置有半導體晶圓等的平板與支撐平板的軸，具有輔助平板與軸之間的接合性的功能。又，「說明使用狀態的參考剖面圖」中所示的陶瓷加熱器的剖面圖相當於「省略內部機構的前視圖的中央縱剖面圖」。;【設計說明】;後視圖、左側視圖以及右側視圖與前視圖相同，因而省略。虛線部分係為本案不主張設計的部分。實線表示的部分，也就是輔助構件的周邊側面為本案主張設計的部分。特別是「省略內部機構的A-A剖面圖」以及「省略內部機構的前視圖的中央縱剖面圖」清楚表現本案主張設計的部分。此外，輔助構件為深灰色。[Purpose of the article]; This article is a part of a ceramic heater used to support and heat semiconductor wafers, etc. As shown in the "reference cross-sectional view for explaining the use status", this article is an auxiliary component. The purpose of the auxiliary component is to join the plate on which the semiconductor wafer, etc. is placed and the shaft that supports the plate, and it has the function of assisting the bonding between the plate and the shaft. In addition, the cross-sectional view of the ceramic heater shown in the "reference cross-sectional view for explaining the use status" is equivalent to the "central longitudinal cross-sectional view of the front view with the internal mechanism omitted". ;[Design description]; The rear view, left side view, and right side view are the same as the front view and are therefore omitted. The dotted line portion is the portion that is not claimed for design in this case. The portion represented by the solid line, that is, the peripheral side of the auxiliary component is the portion that is claimed for design in this case. In particular, the "A-A section view without internal mechanisms" and the "central longitudinal section view without internal mechanisms" clearly show the design focus of this case. In addition, auxiliary components are dark gray.

Description

Ceramic heater parts

本物品是用於支撐並加熱半導體晶圓等的陶瓷加熱器之部分。如「說明使用狀態的參考剖面圖」所示，本物品為輔助構件，輔助構件之用途為接合載置有半導體晶圓等的平板與支撐平板的軸，具有輔助平板與軸之間的接合性的功能。又，「說明使用狀態的參考剖面圖」中所示的陶瓷加熱器的剖面圖相當於「省略內部機構的前視圖的中央縱剖面圖」。This article is a part of a ceramic heater used to support and heat semiconductor wafers, etc. As shown in the "reference cross-sectional view for explaining the state of use", this article is an auxiliary member, and the purpose of the auxiliary member is to join the plate on which the semiconductor wafer is placed and the shaft supporting the plate, and it has the function of assisting the bonding between the plate and the shaft. In addition, the cross-sectional view of the ceramic heater shown in the "reference cross-sectional view for explaining the state of use" is equivalent to the "central longitudinal cross-sectional view of the front view with the internal mechanism omitted".

後視圖、左側視圖以及右側視圖與前視圖相同，因而省略。虛線部分係為本案不主張設計的部分。實線表示的部分，也就是輔助構件的周邊側面為本案主張設計的部分。特別是「省略內部機構的A-A剖面圖」以及「省略內部機構的前視圖的中央縱剖面圖」清楚表現本案主張設計的部分。此外，輔助構件為深灰色。The rear view, left side view and right side view are the same as the front view and are therefore omitted. The dotted line portion is the portion that is not advocated by this case. The solid line portion, that is, the peripheral side of the auxiliary component is the portion advocated by this case. In particular, the "A-A section view omitting the internal mechanism" and the "central longitudinal section view of the front view omitting the internal mechanism" clearly show the portion advocated by this case. In addition, the auxiliary components are dark gray.