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TWD209927S - 光罩傳送盒之上蓋 - Google Patents

光罩傳送盒之上蓋 Download PDF

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Publication number
TWD209927S
TWD209927S TW108304629F TW108304629F TWD209927S TW D209927 S TWD209927 S TW D209927S TW 108304629 F TW108304629 F TW 108304629F TW 108304629 F TW108304629 F TW 108304629F TW D209927 S TWD209927 S TW D209927S
Authority
TW
Taiwan
Prior art keywords
transfer box
mask transfer
cover
designed
top cover
Prior art date
Application number
TW108304629F
Other languages
English (en)
Inventor
莊家和
薛新民
邱銘乾
Original Assignee
家登精密工業股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 家登精密工業股份有限公司 filed Critical 家登精密工業股份有限公司
Priority to TW108304629F priority Critical patent/TWD209927S/zh
Priority to US29/711,295 priority patent/USD964948S1/en
Publication of TWD209927S publication Critical patent/TWD209927S/zh

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Abstract

【物品用途】;本設計物品係為一種光罩傳送盒之上蓋,尤其是用於半導體製程中光罩傳送盒之上蓋,用於保護半導體晶片。;【設計說明】;本案創作光罩傳送盒之上蓋係為一新穎獨特之設計,藉由獨特地設計的光罩傳送盒之上蓋,可顯現出先前技藝未曾有過的視覺效果。;圖式所揭露之虛線部分,為本案不主張設計之部分。

Description

光罩傳送盒之上蓋
本設計物品係為一種光罩傳送盒之上蓋,尤其是用於半導體製程中光罩傳送盒之上蓋,用於保護半導體晶片。
本案創作光罩傳送盒之上蓋係為一新穎獨特之設計,藉由獨特地設計的光罩傳送盒之上蓋,可顯現出先前技藝未曾有過的視覺效果。
圖式所揭露之虛線部分,為本案不主張設計之部分。
TW108304629F 2019-08-02 2019-08-02 光罩傳送盒之上蓋 TWD209927S (zh)

Priority Applications (2)

Application Number Priority Date Filing Date Title
TW108304629F TWD209927S (zh) 2019-08-02 2019-08-02 光罩傳送盒之上蓋
US29/711,295 USD964948S1 (en) 2019-08-02 2019-10-30 Upper cover for an ultraviolet light reticle transfer box

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW108304629F TWD209927S (zh) 2019-08-02 2019-08-02 光罩傳送盒之上蓋

Publications (1)

Publication Number Publication Date
TWD209927S true TWD209927S (zh) 2021-02-21

Family

ID=83356748

Family Applications (1)

Application Number Title Priority Date Filing Date
TW108304629F TWD209927S (zh) 2019-08-02 2019-08-02 光罩傳送盒之上蓋

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US (1) USD964948S1 (zh)
TW (1) TWD209927S (zh)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD1020818S1 (en) * 2021-01-05 2024-04-02 Dn Solutions Co., Ltd. Machine center
TWD214306S (zh) * 2021-07-02 2021-09-21 家登精密工業股份有限公司 光罩盒下蓋支撐件
USD1066292S1 (en) * 2022-09-15 2025-03-11 Entegris, Inc. Spacer applied to reticle container
US12387958B2 (en) 2022-09-20 2025-08-12 Entegris, Inc. Perimeter frame for spacing reticle pods

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW201523126A (zh) 2013-10-31 2015-06-16 安堤格里斯公司 模塊化的光罩盒系統
TW201640219A (zh) 2015-03-18 2016-11-16 安堤格里斯公司 基板容器與用於光罩盒的密封構件、其門總成、及其門總成的組裝方法

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI319123B (en) * 2002-02-22 2010-01-01 Asml Holding Nv System and method for using a two part cover for protecting a reticle
USD473523S1 (en) * 2002-06-25 2003-04-22 Lyall Assemblies, Inc. Convoluted tubing with an overmolded end cap
US7477358B2 (en) * 2004-09-28 2009-01-13 Nikon Corporation EUV reticle handling system and method
JP4710308B2 (ja) * 2004-10-29 2011-06-29 株式会社ニコン レチクル搬送装置、露光装置、及びレチクルの搬送方法
US7607543B2 (en) * 2005-02-27 2009-10-27 Entegris, Inc. Reticle pod with isolation system
US8231005B2 (en) * 2005-09-27 2012-07-31 Entegris, Inc. Reticle pod
TWI411563B (zh) * 2009-09-25 2013-10-11 家登精密工業股份有限公司 光罩盒
USD712364S1 (en) * 2012-05-09 2014-09-02 Gudeng Precision Industrial Co., Ltd. EUV pod
USD732482S1 (en) * 2013-03-01 2015-06-23 Randl Industries, Inc. Plaster ring
USD807303S1 (en) * 2016-09-06 2018-01-09 S.J. Electro Systems, Inc. Panel enclosure
TWI579215B (zh) * 2016-10-07 2017-04-21 家登精密工業股份有限公司 垂直固定機構傳送盒及使用其之傳送方法
US11249392B2 (en) * 2017-01-25 2022-02-15 Gudeng Precision Industrial Co., Ltd EUV reticle pod
USD917402S1 (en) * 2017-08-22 2021-04-27 Foxconn Interconnect Technology Limited Protective cap
TWI690771B (zh) * 2018-01-11 2020-04-11 家登精密工業股份有限公司 光罩壓抵單元及應用其之極紫外光光罩容器
TWI693671B (zh) * 2019-04-16 2020-05-11 家登精密工業股份有限公司 光罩盒及其夾持件
CN112289718A (zh) * 2019-07-13 2021-01-29 家登精密工业股份有限公司 基板载具及其气体扩散模块
TWI705522B (zh) * 2019-07-30 2020-09-21 家登精密工業股份有限公司 基板容納裝置及其製造方法
US11442370B2 (en) * 2019-10-16 2022-09-13 Gudeng Precision Industrial Co., Ltd Reticle retaining system

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW201523126A (zh) 2013-10-31 2015-06-16 安堤格里斯公司 模塊化的光罩盒系統
TW201640219A (zh) 2015-03-18 2016-11-16 安堤格里斯公司 基板容器與用於光罩盒的密封構件、其門總成、及其門總成的組裝方法

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