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TWD240921S - Pedestal for a substrate processing system - Google Patents

Pedestal for a substrate processing system

Info

Publication number
TWD240921S
TWD240921S TW111306076D01F TW111306076D01F TWD240921S TW D240921 S TWD240921 S TW D240921S TW 111306076D01 F TW111306076D01 F TW 111306076D01F TW 111306076D01 F TW111306076D01 F TW 111306076D01F TW D240921 S TWD240921 S TW D240921S
Authority
TW
Taiwan
Prior art keywords
view
design
platform
substrate processing
processing system
Prior art date
Application number
TW111306076D01F
Other languages
Chinese (zh)
Inventor
林德蓋瑞
蓋瑞 Ｂ 林德
愛普安德魯保羅
安德魯 保羅 愛普
Original Assignee
美商蘭姆研究公司 (美國)
美商蘭姆研究公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 美商蘭姆研究公司 (美國), 美商蘭姆研究公司 filed Critical 美商蘭姆研究公司 (美國)
Publication of TWD240921S publication Critical patent/TWD240921S/en

Links

Abstract

【設計說明】;立體圖係基板處理系統用台座之實施例的視圖；俯視圖1係立體圖所示之台座的視圖；橫剖面圖1係沿著俯視圖1中之線9-9之平面的台座之頂板的視圖；橫剖面圖2係沿著俯視圖1中之線10-10之平面的台座之頂板的視圖；局部放大俯視圖係俯視圖1之台座之頂板之一部分的視圖(細節11)。;使用包含虛線之斷線所顯示之元件僅為例示之目的，並且不構成所請設計的部分。包含虛線與點的斷線係用於表示剖面圖。圖式所揭露之虛線係表示所應用之物品，為本案不主張設計之部分。;如同顯示與說明，本設計係主張基板處理系統用台座的裝飾性設計。【Design Description】; The perspective view is an embodiment of the platform for the substrate processing system; Top view 1 is a view of the platform shown in the perspective view; Cross-sectional view 1 is a view of the top plate of the platform along the plane of line 9-9 in top view 1; Cross-sectional view 2 is a view of the top plate of the platform along the plane of line 10-10 in top view 1; A partially enlarged top view is a view of a portion of the top plate of the platform in top view 1 (detail 11).; Components shown using dashed lines are for illustrative purposes only and do not constitute part of the claimed design. Dashed lines containing dots are used to represent cross-sectional views. Dashed lines shown in the drawings represent applied items and are not part of the design claimed in this invention. As shown and explained, this design advocates for the decorative design of a base for a substrate processing system.

Description

基板處理系統用台座 Base for substrate processing system

立體圖係基板處理系統用台座之實施例的視圖；俯視圖1係立體圖所示之台座的視圖；橫剖面圖1係沿著俯視圖1中之線9-9之平面的台座之頂板的視圖；橫剖面圖2係沿著俯視圖1中之線10-10之平面的台座之頂板的視圖；局部放大俯視圖係俯視圖1之台座之頂板之一部分的視圖(細節11)。 The perspective view is a view of an embodiment of a pedestal for a substrate processing system; top view 1 is a view of the pedestal shown in the perspective view; cross-sectional view 1 is a view of the top plate of the pedestal taken along line 9-9 in top view 1; cross-sectional view 2 is a view of the top plate of the pedestal taken along line 10-10 in top view 1; and the partially enlarged top view is a view of a portion of the top plate of the pedestal shown in top view 1 (Detail 11).

使用包含虛線之斷線所顯示之元件僅為例示之目的，並且不構成所請設計的部分。包含虛線與點的斷線係用於表示剖面圖。圖式所揭露之虛線係表示所應用之物品，為本案不主張設計之部分。 Components depicted using dashed or dotted lines are for illustrative purposes only and do not constitute part of the claimed design. Dashed lines and dots are used to represent cross-sectional views. Dashed lines in the drawings represent items of application and are not part of the claimed design.

如同顯示與說明，本設計係主張基板處理系統用台座的裝飾性設計。As shown and explained, this design advocates the decorative design of the base for substrate processing systems.

TW111306076D01F 2021-04-12 2021-10-08 Pedestal for a substrate processing system TWD240921S (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US29/778,184 2021-04-12
US29/778,184 USD1057675S1 (en) 2021-04-12 2021-04-12 Pedestal for a substrate processing system

Publications (1)

Publication Number Publication Date
TWD240921S true TWD240921S (en) 2025-10-11

Family

ID=91333389

Family Applications (4)

Application Number Title Priority Date Filing Date
TW111306076F TWD240710S (en) 2021-04-12 2021-10-08 Pedestal for a substrate processing system
TW110305460D01F TWD232576S (en) 2021-04-12 2021-10-08 Pedestal for a substrate processing system
TW110305460F TWD230332S (en) 2021-04-12 2021-10-08 Pedestal for a substrate processing system
TW111306076D01F TWD240921S (en) 2021-04-12 2021-10-08 Pedestal for a substrate processing system

Family Applications Before (3)

Application Number Title Priority Date Filing Date
TW111306076F TWD240710S (en) 2021-04-12 2021-10-08 Pedestal for a substrate processing system
TW110305460D01F TWD232576S (en) 2021-04-12 2021-10-08 Pedestal for a substrate processing system
TW110305460F TWD230332S (en) 2021-04-12 2021-10-08 Pedestal for a substrate processing system

Country Status (2)

Country Link
US (1) USD1057675S1 (en)
TW (4) TWD240710S (en)

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USD1110288S1 (en) * 2024-03-20 2026-01-27 Kokusai Electric Corporation Heat insulation pedestal of a semiconductor manufacturing apparatus

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Publication number Priority date Publication date Assignee Title
TWD224468S (en) 2021-02-12 2023-04-01 美商應用材料股份有限公司 Portion of heater pedestal

Also Published As

Publication number Publication date
USD1057675S1 (en) 2025-01-14
TWD230332S (en) 2024-03-11
TWD232576S (en) 2024-08-01
TWD240710S (en) 2025-10-01

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