TW202303155A - Core of carrier for electronic component processing device, carrier, and method for removing core which is capable of reducing the costs of the carrier - Google Patents

Abstract

The object of this invention is to provide a core which can reduce the costs of the carrier. The solution is that a core (730) of the carrier (710) that holds the device under test (90) and transports it in the electronic component processing device is disposed at the core body (731) and the bottom of the core body (731). The core body (731) has an opening (733) capable of inserting the device under test (90); the core (730) comprises a holding portion (734) for retaining the device under test (90) inserted through the opening (733), and a hook (732) extending upward from the core body (731); the hook (732) comprises a hook body (735 ) connected with the core body (731), and an engaging part (736) connected to the front end of the hook body (735 ). The hook body (735) is inclined toward the outer side of the core body (731) along with the front part (735a) close to the hook body (735).

Description

Core of carrier for electronic component processing device, carrier, and method for removing core

The present invention relates to a core of a carrier transported in an electronic component processing device used for testing electronic components under test (hereinafter also referred to simply as "Device Under Test" (DUT)) such as semiconductor integrated circuit components. , and a carrier including the carrier, and a method of removing a core from the carrier.

As a carrier for electronic component processing apparatuses, there is known an insert in which an insertion body and a guide core are detachably configured (for example, refer to Patent Document 1). [Prior Art Literature] [Patent Document]

[Patent Document 1] International Publication No. 03/075024

[Problem to be solved by the invention]

In the above insert, the insert main body includes a hook mechanism composed of a core clip, a torsion spring, and a spindle, as a mechanism for detaching the guide core from the insert main body. Therefore, there is a problem that the number of components constituting the insert is large, resulting in high cost of the insert.

The problem to be solved by the present invention is to provide a cost-effective core that can achieve an insert, a carrier including the core, and a method for removing the core from the carrier. [means to solve the problem]

[1] The core according to the present invention is a core of a carrier that holds a device under test and is conveyed in an electronic component processing apparatus, and includes a core body, a holding portion, and a hook. The core body has a first opening into which the aforementioned device under test can be inserted. The holding part is disposed on the bottom of the core body and holds the device under test inserted through the first opening. The hook extends upward from the core body, and includes a hook body connected to the core body and an engaging portion connected to the front end of the hook body. The hook body is inclined toward the outside of the core body as it approaches the front end of the hook body.

[2] In the above invention, the engaging portion may protrude from the front end portion of the hook body to the outside of the core body, the engaging portion includes a front end surface and connects the front end portion of the hook body to the front end. A lower surface connected by planes, the lower surface is inclined to rise as the front end approaches from the front end to the front end of the hook body.

[3] In the above invention, the front end surface of the engaging portion may extend in a direction substantially parallel to a planar direction of a holding surface defined by the holding portion.

[4] In the above invention, the holding portion may be a holding piece that protrudes toward the inside of the first opening in plan view, and the holding piece is integrally formed with the core body.

[5] In the above invention, the aforementioned holding portion may be a film mounted on the aforementioned bottom portion of the aforementioned core body so as to cover the aforementioned first opening.

[6] In the above invention, the hook may be integrally formed with the core body.

[7] In the above invention, the core body may have a plurality of the first openings, and the core may include a plurality of holding portions respectively provided on the bottom of the core body to correspond to the plurality of first openings.

[8] According to the carrier of the present invention, it may be a carrier that holds the device under test and is transported in the electronic component processing device, and includes the above-mentioned core and a carrier body that detachably holds the core, and the carrier body includes The second opening through which the device under test can be inserted and communicated with the first opening, and the hook receiving portion capable of engaging with the engaging portion of the hook.

[9] In the above invention, the hook receiving portion may include a contact surface with which the front end surface of the engaging portion contacts, and a protruding portion, the protruding portion being in contact with an end portion inside the core body of the contact surface. , and protrude upwards more than the aforementioned contact surface.

[10] In the above invention, in the protruding portion, the facing surface facing the lower surface of the engaging portion may be inclined so as to rise toward the inner side of the core body.

[11] In the above invention, the following formula (1) may be satisfied, θ1 ≥ θ2 ... (1) However, in the above formula (1), θ1 is an inclination angle of the lower surface of the engaging portion with respect to the contact surface, and θ2 is an inclination angle of the opposing surface of the protruding portion with respect to the contact surface.

[12] In the above invention, the aforementioned contact surface may be connected to the inner surface of the aforementioned carrier body defining the aforementioned second opening, and the aforementioned hook is in the state of being engaged with the aforementioned hook receiving portion, and the aforementioned hook body moves from the aforementioned The protruding portion is separated, and the engaging portion is separated from the inner surface of the carrier body.

[13] In the above invention, the extension direction of the front end surface of the engaging portion is substantially parallel to the extension direction of the contact surface of the hook receiving portion.

[14] The method for removing a core according to the present invention is a method for removing a core from the carrier body of the carrier described above by removing the aforementioned core engaged with the aforementioned carrier body, comprising preparing a The first step of removing the jig of the hook pressing portion of the hook body of the core is to install the removing jig on the core so that the hook pressing portion abuts against the hook body from below the core The second step is to bend the hook body to the inside of the first opening by pushing the removal jig upward in the state where the hook pressing portion is in contact with the hook body. The third step, and the fourth step of moving the removal jig downward and removing the core from the carrier body. [Effect of the invention]

According to the present invention, the core constituting the carrier for the electronic component testing device includes a hook extending upward from the core body, and as the hook body of the hook approaches the front end of the hook body, it inclines to the outside of the core body . According to the present invention, since the hook body of the core is inclined to the outside of the core body, the core can be engaged with the carrier body by using the deflection of the hook body, and the removal jig can be used by flexing the hook body to remove the core from the carrier body.

Therefore, according to the present invention, since other components such as a spring for detaching the core from the device under test carrier body are not required, the number of components of the carrier can be reduced and the cost of the carrier can be reduced.

Hereinafter, the implementation method of this invention is demonstrated based on drawing. 1 is a schematic cross-sectional view showing an electronic component testing device using a carrier according to this embodiment, FIG. 2 is a perspective view showing the electronic component testing device in FIG. 1 , and FIG. Conceptual diagram of the transfer of pallets in the test setup.

In the electronic component testing device shown in FIG. 1 and FIG. 2 , a high-temperature or low-temperature thermal stress is applied to the device under test 90 (refer to FIG. 12 ), and it is tested (inspected) using the test head 5 and the tester 6 in this state. Whether or not the device under test 90 operates normally. Then, the electronic component testing device classifies the device under test 90 based on the test result. As a specific example of the device under test 90, for example, a memory-type device can be exemplified.

In the electronic component testing device, a large number of devices under test 90 as test objects are mounted on a custom tray KST (see FIG. 5 ). Also, the test tray TST (see FIG. 6 ) circulates in the handler 1 of the electronic component device. The device under test 90 is transferred from the customized tray KST to the test tray TST and tested. The processor 1 of this embodiment corresponds to an example of the "electronic component processing apparatus" of this invention.

As shown in FIG. 1 , a space 8 is provided under the handler 1 , and a test head 5 is disposed in the space 8 . The test head 5 is provided with a socket 50 , and the socket 50 is connected to the tester 6 through the cable 7 .

In this electronic component testing device, the device under test 90 loaded on the test tray TST is electrically connected to the socket 50 on the test head 5, and electrical signals and the like are provided to the device under test 90 in this state. 6 The output signal is used to test (inspect) the device under test 90 . In addition, when changing the type of the device under test 90 , the receptacle 50 and core 730 described later are replaced with receptacle 50 and core 730 suitable for the shape, number of pins, and the like of the device under test 90 .

As shown in FIGS. 2 and 3 , the processor 1 includes a storage unit 200 , a loading unit 300 , a testing unit 100 , and an unloading unit 400 . The storage unit 200 stores the device under test 90 before the test and after the test. The loading unit 300 transfers the device under test 90 transferred from the storage unit 200 to the testing unit 100 . The test unit 100 is configured such that the socket 50 of the test head 5 faces inwardly. The unloading unit 400 classifies the tested devices 90 that have been tested by the testing unit 100 .

4 is an exploded perspective view showing an integrated circuit memory used in the above-mentioned electronic component testing device, and FIG. 5 is a perspective view showing a customized tray used in the above-mentioned electronic component testing device.

As shown in FIG. 4 , the storage unit 200 includes a pre-test storage 201 and a test completion storage 202 . The pre-test storage 201 stores custom trays KST that store the pre-test devices 90 . The test completed storage 202 stores custom trays KST that store the devices under test 90 sorted according to the test results. The pre-test storage 201 and the test completion storage 202 include a frame-shaped tray support frame 203 and an elevator 204 that enters from the lower portion of the tray support frame 203 and moves upward. A plurality of customized trays KST are stacked on the tray support frame 203 . These stacked customized trays KST are moved up and down by the elevator 204 .

As shown in FIG. 5 , this customized tray KST includes a plurality of concave-shaped housing portions for housing the device under test 90 . These plural storage units are arranged in plural rows and plural columns (for example, 14 rows and 13 columns). In addition, the pre-test storage 201 and the test completion storage 202 have the same structure.

As shown in FIGS. 2 and 3 , the pre-test stocker 201 is provided with two stockers STK-B and two empty tray stockers STK-E. Two stockers STK-B are adjacent to each other, and next to these two stockers STK-B, two empty tray stockers STK-E are adjacent to each other. In the empty tray stocker STK-E, empty custom-made trays KST to be transferred to the unloading section 400 are stacked.

Next to the pre-test storage 201, a test completion storage 202 is provided. Here, the test completion storage 202 is provided with eight storages STK-1, STK-2, . . . , STK-8. The test completion storage 202 is configured such that the test-completed devices 90 can be classified and stored in up to eight categories corresponding to the test results. For example, the tested devices 90 that have been tested can be classified into good products and unqualified products in the test completion memory 202, and can be classified into good products with a high operating speed, good products with a medium operating speed, and low-speed operating speed products. Goods that pass, or can be classified as defectives that require retesting and defectives that do not require retesting.

As shown in FIG. 2 , the storage unit 200 further includes a tray transfer arm 205 . The tray transfer arm 205 is provided between the storage unit 200 and the device base 101 . This tray transfer arm 205 transfers the customized tray KST from the lower side of the apparatus base 101 to the loader 300 . A pair of window parts 370 are formed at positions corresponding to the loading part 300 in the device 101 .

The loading unit 300 includes a device transport device 310 . The device transfer device 310 includes two rails 311 , a movable arm 312 , and a movable head 320 . Two rails 311 are erected on the device base 101 . The movable arm 312 reciprocates along the two rails 311 between the test tray TST and the customized tray KST. In addition, the moving direction of the movable arm 312 is called a Y direction. The movable head 320 is supported by the movable arm 312 and moves in the X direction. A plurality of suction pads (not shown) are fitted downward on the movable head 320 .

The device transfer device 310 moves the movable head 320 , which absorbs a plurality of devices 90 under test with a plurality of suction pads, from the customized tray KST to a precisionr 360 . Thus, the device under test 90 is transferred from the customized tray KST to the precision instrument 360 . Then, the device transfer device 310 corrects the mutual positional relationship of the device under test 90 through the movable arm 312 and the movable head 320 in the precision instrument 360 . Thereafter, the device transfer device 310 transfers the device under test 90 to the test tray TST stopped at the loading unit 300 . Thus, the device under test 90 is transferred from the customized tray KST to the test tray TST.

As shown in FIGS. 2 and 3 , the testing unit 100 includes a soaking chamber 110 , a testing chamber 120 , and a non-immersing chamber 130 . The immersion chamber 110 applies a targeted high temperature or low temperature thermal stress to the device under test 90 mounted on the test tray TST. The test chamber 120 presses the device under test 90 subjected to thermal stress in the immersion chamber 110 against the test head 5 . The non-soak chamber 130 removes thermal stress from the device under test 90 tested in the test chamber 120 .

In the case where a high temperature is applied to the device under test 90 in the immersion chamber 110 , the device under test 90 is cooled to room temperature by blowing air in the non-immersion chamber 130 . On the other hand, when a low temperature is applied to the device under test 90 in the immersion chamber 110, the device under test 90 is heated in the non-immersion chamber 130 to a temperature at which dew condensation does not occur with warm air or a heater. .

As shown in FIG. 2 , the soaking chamber 110 and the non-immersing chamber 130 protrude above the testing chamber 120 . Also, as shown conceptually in FIG. 3 , a vertical transfer device is provided in the soaking chamber 110, and while the previous test tray TST exists in the test chamber 120, the subsequent plurality of test trays TST are supported by the vertical transfer device. down standby. The devices under test 90 mounted on the subsequent plurality of test trays TST are subjected to high-temperature or low-temperature thermal stress during the standby period.

The test head 5 is arranged in the center of the test chamber 120 . A test tray TST is moved over this test head 5 . In the center of the test chamber 120, the terminal 91 (refer to FIG. 12 ) of the device under test 90 mounted on the test tray TST is in contact with the contact point 51 of the socket 50 (refer to FIG. 12 ) on the test head 5 to test the device under test 90 . test. The test tray TST on which the tested device 90 is mounted is transferred to the non-immersion chamber 130 . In the non-immersion chamber 130, the device under test 90 after the test is cooled to room temperature. The test tray TST on which the device under test 90 has been dissipated is carried out to the unloading unit 400 .

In the upper part of the soaking chamber 110, an entrance for carrying the test tray TST from the device base 101 into the soaking chamber 110 is formed. On the other hand, an outlet for carrying out the test tray TST from the non-soaking chamber 130 to the device base 101 is formed in the upper part of the non-soaking chamber 130 .

As shown in FIG. 2 , the tray transport device 102 is installed on the device base 101 . This tray transfer device 102 carries the test tray TST from the device base 101 to the soaking chamber 110 and unloads the test tray TST from the non-soaking chamber 130 to the device base 101 . This tray transport device 102 is constituted by, for example, a rotating roller or the like.

After the test tray TST is carried out from the non-immersion chamber 130 to the device base 101 by the tray transfer device 102, all the devices under test 90 mounted on the test tray TST are transferred to the device corresponding to the device transfer device 410 (described later). Custom pallet KST for test results. Thereafter, the test tray TST is transferred to the soaking chamber 110 via the unloading unit 400 and the loading unit 300 .

As shown in FIG. 2 , two device transfer devices 410 are provided in the unloading unit 400 . This device transfer device 410 has the same structure as the device transfer device 310 installed in the loading unit 300 . The two device transfer devices 410 transfer the test-completed device under test 90 from the test tray TST present on the device base 101 to the customized tray KST corresponding to the test result.

Two pairs of window portions 470 are formed on the device base 101 . These two pairs of window parts 470 are arranged so that the customized tray KST transferred to the unloading part 400 faces the upper surface of the device base 101 . The lower sides of the two pairs of window portions 470 and the above-mentioned window portion 370 are provided with a lifting platform (not shown). This elevating table lowers the customized tray KST on which the tested device 90 has been tested, and transfers it to the tray transfer arm 205 .

Hereinafter, the configuration of the test tray TST including the insert capable of holding the device under test 90 will be described.

FIG. 6 is a perspective view showing the test tray TST, and FIG. 7 is an exploded perspective view showing the insert of this embodiment. As shown in FIG. 6 , the test tray TST includes a frame 700 and a plurality of inserts (device carriers) 710 . The frame 700 includes a rectangular outer frame 701 and a grid-shaped inner frame 702 arranged inside the outer frame 701 . A plurality of rectangular openings 703 are formed in the frame 700 and separated by the outer frame 701 and the inner frame 702 . In the frame 700 , a plurality of through holes 704 are formed at intersections between the outer frame 701 and the inner frame 702 and each intersection of the inner frame 702 . As shown in FIG. 7 , a fixing member 705 is inserted into the through hole 704 . The insert 710 in this embodiment corresponds to an example of the "carrier" in the present invention.

Each insert 710 is provided corresponding to one opening 703 . In other words, the plurality of inserts 710 are configured to form a matrix of plural rows/plural columns within the frame 700 of the test tray TST.

7 is an exploded perspective view showing the carrier of this embodiment, FIG. 8 is a cross-sectional view showing the state before the carrier body and the core of this embodiment are engaged, and FIG. 11 is a bottom view showing the core of this embodiment. As shown in FIG. 7 , the insert 710 includes a body 720 , a plurality of cores 730 , and a plurality of latches 740 . The main body 720 of this embodiment corresponds to an example of the "carrier body" of the present invention, and the core 730 of this embodiment corresponds to an example of the "core" of the present invention.

The main body 720 is a member for holding the insert 710 relatively to the frame 700 so as to be able to move slightly. Among the plurality of main bodies 720, the main body 720 corresponding to the opening 703 located at the outermost periphery of the frame 700 is configured such that a part of the outer peripheral portion 720a of the main body 720 overlaps the outer frame 701, and the other portion of the outer peripheral portion 720a overlaps the inner frame 702. . The other main body 720 is arranged such that the outer peripheral portion 720 a overlaps the inner frame 702 . A part of the outer peripheral portion 720a of the main body 720 is clamped by the outer frame 701 or the inner frame 702 and the fixing member 705, and the main body 720 is held in a state capable of moving slightly in the XY plane direction relative to the frame 700.

Also, the main body 720 is a member for assembling the core 730 and holding the core 730 . The main body 720 is a rectangular frame-shaped resin molded body having a shape corresponding to the opening 703 of the frame 700 . The main body 720 is formed with the same number (four in this embodiment) of rectangular openings 721 as the number of cores 730 . The plurality of openings 721 form a matrix of plural rows/columns in the main body 720 (two rows and two columns in this embodiment). The device under test 90 can be inserted into each opening 721 . In this embodiment, although four openings 721 are formed in the main body 720, the number of openings 721 is not particularly limited thereto.

Each opening 721 is formed to penetrate through the main body 720 in the Z direction in the drawing. With the core 730 fitted to the main body 720 , the opening 721 communicates with an opening 733 (described later) of the core 730 . The opening 721 in this embodiment corresponds to an example of the "second opening" of the present invention.

As shown in FIG. 8 , the main body 720 includes a plurality of hook receiving portions 722 . The hook receiving portion 722 is a portion for engaging with a hook 732 (described later) of the core 730 . A plurality of hook receiving portions 722 are formed inside each opening 721 . A plurality of hook receiving portions 722 are connected to the inner surface 720 b of the main body 720 defining the opening 721 and protrude toward the center of the opening 721 . In the present embodiment, the pair of hook receiving portions 722 are provided at symmetrical positions with respect to the YZ plane passing through the center of the opening 721 . In this implementation method, two pairs are provided for one opening 721 , that is, four hook receiving portions 722 are provided in total.

The hook receiving portion 722 has a contact surface 722a, a protruding portion 722b, and a guiding surface 722c. The contact surface 722a of this embodiment corresponds to an example of the "contact surface" of the present invention, and the protrusion 722b of this embodiment corresponds to an example of the "protrusion" of the present invention.

The contact surface 722 a is a surface that contacts a hook 732 (described later) of the core 730 . The contact surface 722 a is connected to the inner surface 720 b of the main body 720 and faces upward of the main body 720 . The contact surface 722a extends in a direction substantially parallel to the XY plane in the figure.

The protruding portion 722b is connected to an end portion of the contact surface 722a on the inner side of the main body 720 . The protruding portion 722b has a facing surface 722d (see FIG. 10 ). The opposing surface 722d is a surface opposing a lower surface 736b (described later) of the engaging portion 736 of the hook 732 when the main body 720 is engaged with the core 730 . This opposing surface 722d is inclined with respect to the contact surface 722a so as to rise in the Z direction in the figure as it goes from the end of the contact surface 722a toward the inside of the main body 720 . The opposing surface 722d in this embodiment corresponds to an example of the "opposing surface" in the present invention.

Returning to FIG. 8 , the guide surface 722 c is connected to the lower end of the side of the hook receiving portion 722 . The guide surface 722c is inclined with respect to the Z direction in the figure so as to face the direction outside the opening 721 as it goes downward.

In addition, in this embodiment, although the hook receiving portion 722 includes the protruding portion 722b, the present invention is not particularly limited thereto. The hook receiving portion 722 may not include the protruding portion 722b, and the contact surface 722a extends to an end of the hook receiving portion 722 .

Returning to FIG. 7 , the core 730 is a rectangular frame-shaped resin molded body, including a core body 731 and a plurality of hooks 732 . A plurality of openings 733 are formed in the core body 731 . The core body 731 of the device under test 90 in this embodiment corresponds to an example of the "core body" of the present invention, the hook 732 of the present embodiment corresponds to an example of the "hook" of the present invention, and the "opening 733" of the present embodiment corresponds to an example of the "hook" of the present invention. It corresponds to an example of the "first opening" in the present invention.

The core 730 is detachable from the main body 720 and can be replaced corresponding to the type of the device under test 90 . The shape of the core body 731 and the size of the opening 733 can be appropriately designed corresponding to the shape of the device under test 90 .

The opening 733 penetrates through the core body 731 in the Z direction in the figure. The opening 733 communicates with the opening 721 of the main body 720 by fitting the core 730 to the main body 720 . Accordingly, the device under test 90 inserted into the insert 710 through the opening 721 from above the main body 720 can be inserted into the core body 731 through the opening 733 and held by the core 730 .

In the present embodiment, two openings 733 are formed in one core body 731 , and the two openings 733 are aligned along the X direction in the figure. The two openings 733 respectively correspond to the two openings 721 arranged in the X direction in the figure in the main body 720 . That is, in the present embodiment, two cores 730 aligned in the Y direction in the figure are configured to engage with one main body 720 . In addition, the number of openings 733 is not particularly limited thereto, for example, only one opening 733 may be formed in the core body 731 . In this case, four cores 730 are snapped to one body 720 .

As shown in FIG. 11 , a plurality of holding pieces 734 are disposed on the bottom of the core body 731 . A plurality of holding pieces 734 protrude from the frame-shaped bottom of the core body 731 toward the center of the opening 733 . A plurality of holding pieces 734 are integrally formed on the core body 731 . The core body 731 can hold the device under test 90 by contacting the holding pieces 734 with the peripheral portion of the device under test 90 inserted into the opening 733 from above the core 730 . In addition, the terminals 91 of the device under test 90 held by the plurality of holding pieces 734 are exposed downward from the opening 733 (see FIG. 12 ). The holding piece 734 of this embodiment corresponds to an example of the "holding part" of the present invention, and also corresponds to an example of the "holding piece" of the present invention.

Returning to FIG. 7 , the plurality of hooks 732 are members for engaging with the hook receiving portion 722 of the main body 720 and assembling the core 730 to the main body 720 . A plurality of hooks 732 extend upward (Z direction in the figure) from the core body 731 and are integrally formed with the core body 731 . When the core 730 is assembled to the main body 720 from below the main body 720 , a plurality of hooks 732 are provided at positions corresponding to the hook receiving portions 722 of the main body 720 . That is, in this embodiment, in the core body 731 , a pair of hooks 732 are provided at symmetrical positions with respect to the YZ plane passing through the center of the opening 733 . In this implementation method, two pairs of hooks 732 are provided relative to one opening 733 , that is, four hooks 732 .

As shown in FIG. 8 , the hook 732 includes a hook body 735 and a hook engaging portion 736 . The hook body 735 is connected to the core body 731 and is inclined toward the outside of the core body 731 as it approaches the front end 735 a of the hook body 735 . In other words, the hook body 735 is inclined only by an angle θ ₀ with respect to the direction perpendicular to the surface (hereinafter referred to as the bottom surface B) defined by the plurality of holding pieces 734 , that is, with respect to the Z direction in the figure. Although not particularly limited, the inclination angle θ ₀ of the hook body 735 is preferably in the range of 5∘ to 20∘. The bottom surface B in this embodiment is a holding surface for holding the device under test 90 in the core 730, and corresponds to an example of the "holding surface" in the present invention.

The engaging portion 736 protrudes from the front end portion 735 a of the hook body 735 to the outside of the core body 731 . A detailed configuration about the engaging portion 736 will be described later.

Returning to FIG. 7 , the plurality of latches 740 are members for assisting in holding the device under test 90 inserted into the core 730 . A plurality of latches 740 are disposed on the main body 720 corresponding to the opening 721 of the main body 720 . In this embodiment, two latches 740 are provided for one opening 721 , and eight latches 740 are provided for one main body 720 .

As shown in FIG. 7 , the latch 740 includes a body 741 , a rotation shaft 742 , an action portion 743 , a connection portion 744 , a connection member 745 , and a spring 746 . The latch 740 is connected to the main body 720 through a rotating shaft 742 provided on the main body 741 , and is rotatable within the opening 721 .

The acting portion 743 is located in the opening 733 of the core 730 and is contactable with the device under test 90 held in the core 730 of the device under test 90 . Since the action portion 743 is in contact with the device under test 90 , it is possible to suppress the device under test 90 from flying upward, and the insert 710 can hold the device under test 90 more stably.

The coupling member 745 is a member for rotating the latch 740 . The connection member 745 is connected to the connection part 744 provided on the main body 741 . The connecting member 745 is pressed downward by a spring 746 provided inside the connecting member 745 . By pushing the link 745 upward, the latch 740 is rotated, and the action part 743 can be retracted to the outside of the opening 733 of the core 730. Thus, the device under test 90 can be inserted into or removed from the insertion member 710 .

FIG. 9 is a cross-sectional view showing a state in which the main body of the insert and the core are engaged, and FIG. 10 is a cross-sectional view showing an enlarged X portion in FIG. 9 .

Attachment of the core 730 to the main body 720 will be described. First, as shown in FIGS. 7 and 8 , the core 730 is disposed under the main body 720 such that the openings 733 of the core body 731 correspond to the openings 721 of the main body 720 . Next, by moving the core 730 upward toward the main body 720 , the engaging portion 736 of each hook 732 is abutted against the lower portion of the guide surface 722 c of the hook receiving portion 722 .

When the core 730 is further moved upward, the hook 732 is bent inwardly of the core body 731 along the inclination of the guide surface 722c, and the hook 732 is pressed outward. Since the hook receiving portion 722 includes the guiding surface 722c, the hook 732 can be flexed more easily, and the core 730 can be assembled to the main body 720 more easily.

When the core 730 is further moved upward, the front end of the engaging portion 736 of the hook 732 reaches above the protruding portion 722b along the side of the hook receiving portion 722, and the deflection of the hook 732 is recovered. Thereby, as shown in FIG. 9 , the hook 732 is engaged with the hook receiving portion 722 of the main body 720 , and the core 730 is assembled to the main body 720 .

Here, as shown in FIG. 10 , the engaging portion 736 includes a front end surface 736 a and a lower surface 736 b. The engaging portion 736 has a sharp shape that becomes thinner toward the front end surface 736a. The engaging portion 736 engages with the hook receiving portion 722 via the front end surface 736 a contacting the contact surface 722 a of the hook receiving portion 722 . The front end surface 736a of this embodiment corresponds to an example of the "front end surface" of the present invention, and the lower surface 736b of this embodiment corresponds to an example of the "lower surface" of the present invention.

The extending direction of the front end surface 736 a is substantially parallel to the extending direction of the bottom surface B of the core body 731 . Moreover, the extension direction of the front end surface 736 a is substantially parallel to the extension direction of the contact surface 722 a of the hook receiving portion 722 . Thereby, the frictional resistance between the front end surface 736a and the contact surface 722a increases, and the assembled state of the core 730 and the main body 720 can be further stabilized.

As mentioned above, the contact surface 722 a of the hook receiving portion 722 extends in a direction substantially parallel to the XY plane. Here, in the case where the contact surface 722a is inclined toward the inside of the opening 721 in a rising direction, when the core 730 is removed from the main body 720, the engaging portion 736 of the hook 732 is caught on the upwardly inclined contact surface 722a, and The hook 732 becomes difficult to remove. Also, when the contact surface 722a is inclined toward the inside of the opening 721 in a downward direction, the hook 732 is likely to slide off the contact surface 722a and the core 730 is easily detached from the main body 720 . Therefore, in this embodiment, the core 730 can be easily removed from the main body 720 by the contact surface 722a of the hook receiving portion 722 extending in a direction substantially parallel to the XY plane, and the core 730 and the main body can be stabilized. 720 assembly state.

The lower surface 736b of the engaging portion 736 is only inclined by θ ₁ (θ ₁ >0∘) relative to the extending direction of the contact surface 722a of the hook receiving portion 722 , so that And in the Z direction in the figure it goes up. In the case where the lower surface 736b of the engaging portion 736 is not inclined (θ ₁ =0∘), and the hook receiving portion 722 does not have the protruding portion 722b, when the core body 731 applies a downward force, the hook receiving portion 722 The edge of the hook 732 that is in contact with the lower surface 736b of the engaging portion 736 acts as an axis, and the hook 732 exerts a force of inward rotation, so that the hook 732 is easily disengaged from the hook receiving portion 722 . In contrast, in this embodiment, the lower surface 736b of the engaging portion 736 is inclined relative to the extending direction of the contact surface 722a, so that the edge portion of the hook receiving portion 722 does not contact the lower surface 736b of the engaging portion 736. . Therefore, since the above-mentioned side does not exist, the inward rotation of the hook 732 can be suppressed, and the engaged state of the hook 732 and the hook receiving portion 722 can be stabilized.

In addition, in this embodiment, although the angle of the lower surface 736b of the engaging part 736 is fixed at _θ1 , it is not particularly limited as long as it includes a portion inclined so as to rise toward the front end part 753a. For example, the lower surface 736 b may have a portion inclined only by θ ₁ with respect to the contact surface 722 a and a portion extending substantially parallel to the contact surface 722 a and connected to the front end portion 753 .

As mentioned above, the opposite surface 722d of the hook receiving portion 722 is inclined relative to the contact surface 722a so as to rise toward the inside of the main body 720, and the inclination angle _θ2 of the opposite surface 722d is _θ1 or less ( _θ1 ≥θ ₂ ). Thus, even when the hook 732 is engaged with the hook receiving portion 722 , the protruding portion 722 b of the hook receiving portion 722 does not contact the lower surface 736 b of the hook 732 . Accordingly, the main body 720 can hold the core 730 in a state where it can move slightly in the XY plane direction in the drawing.

In addition, when the hook 732 is engaged with the hook receiving portion 722 , it is preferable that the engaging portion 736 is only separated from the inner surface 720 b of the main body 720 by a distance D ₁ . In addition, it is preferable that the engagement portion 736 is separated from the side of the opposing surface 722d on the side of the contact surface 722a by only a distance _D2 . Moreover, it is preferable that the hook body 735 is only separated from the hook receiving portion 722 by a distance _D3 . By maintaining the gap between the distances D ₁ to D ₃ , it is possible to prevent the hook 732 from interfering with the main body 720 and the hook 732 from being disengaged from the main body 720 unintentionally. In addition, by maintaining the above-mentioned gaps of the distances _D1 to _D3 , the core 730 can be assembled to the main body 720 in a state where the core 730 can move slightly in the direction of the XY plane in the figure.

In this embodiment, the test of the device under test 90 is performed using the above-mentioned insert 710 . 12 is a cross-sectional view showing a state in which the device under test is held by the inserter of the present embodiment and the device under test is tested.

As shown in FIG. 12 , the device under test 90 is inserted into the insert 710 from the opening 721 of the main body 720 , and the device under test 90 is held by a plurality of holding pieces 734 . The test tray TST holding a plurality of such inserts 710 is moved onto the test head 5 so that the contact points 51 of the socket 50 come into contact with the terminals 91 of the device under test 90 . Here, a driving device (not shown) that moves in the Z-axis direction is provided in the test chamber 120 . The driving device is lowered, and the device under test 90 is tested in a state where the device under test 90 is pressed against the socket 50 by the pusher 121 attached to the driving device. In addition, the contact point 51 of the socket 50 is not particularly limited, and examples thereof include an anisotropic conductive rubber sheet, a pogo pin, and the like.

Next, a method for removing the core 730 engaged with the main body 720 from the main body 720 of the insert 710 will be described with reference to FIGS. 13 to 15 . 13 to 15 are cross-sectional views (one of them) to (third of them) showing a method of removing a core in this embodiment.

First, as shown in FIG. 13 , a removal jig 80 having a hook pressing portion 81 corresponding to the position of the hook body 735 is prepared, and the removal jig 80 is arranged below the core 730 so that the hook pressing portion 81 is positioned Below the hook body 735 . The hook pressing portion 81 is formed to be inserted vertically relative to the bottom surface B of the core body 731 , and when the removal jig 80 is disposed below the core 730 , the hook body 735 is positioned in the direction in which the hook pressing portion 81 extends. Extend the form on the way. The removal jig 80 of the present embodiment corresponds to an example of the "removal jig" of the present invention, and the hook pressing part 81 of the present embodiment corresponds to an example of the "hook pressing part" of the present invention.

Next, the removal jig 80 is moved upward, and the removal jig 80 is mounted on the core 730 so that the hook pressing portion 81 abuts against the hook body 735 . In addition, as shown in FIG. 14 , by moving the removal jig 80 upward, the hook body 735 is flexed by the hook pressing portion 81 and pushed toward the inside of the opening 733 . As a result, the engaging portion 736 of the hook 732 is disengaged from the hook receiving portion 722 , and the engagement between the main body 720 and the core 730 is released. At this time, the hook body 735 is bent, so that the engaging portion 736 is located inside the core body 731 than the hook receiving portion 722 . The hook body 735 is pushed to the outside of the core body 731 by being bent, and the core 730 is held by the removal jig 80 .

Next, as shown in FIG. 15 , by moving the removal jig 80 downward, the core 730 is moved downward together with the removal jig 80 and removed from the main body 720 .

As mentioned above, in the core 730 of this embodiment, the hook body 732 can be engaged with the main body by the deflection of the hook body 735 by the hook body 735 of the hook 732 being inclined to the outside of the core body 731. The hook receiving portion 722 of the body 720 , and the core 730 snapped to the main body 720 can be removed by using the removal jig 80 . Therefore, according to the core 730 of the present embodiment, the core 730 can be replaced according to the type of the device under test 90 , and other components for detaching the main body 720 and the core 730 are not required. Therefore, while the core 730 can be replaced in the insert 710, a reduction in the number of components of this insert 710 can be achieved, and a reduction in cost and a shortened lead time of this insert 710 can be achieved.

In addition, the implementation method demonstrated above was described for easy understanding of this invention, and it does not limit this invention. Therefore, it is intended that each element disclosed in the above-mentioned embodiment method includes all design changes and equivalents belonging to the technical scope of the present invention.

For example, as shown in FIG. 16 , the core 730 may include a thin film 737 attached to the bottom of the core body 731 instead of the retaining sheet 734 . The film 737 of this embodiment corresponds to an example of the "holding part" of the present invention, and also corresponds to an example of the "film" of the present invention. Fig. 15 is a bottom view showing a modified example of the core body of the present embodiment.

The film 737 is a rectangular resin film, and is attached to the frame-shaped bottom of the core body 731 by a plurality of caulking portions 738 . The film 737 is attached to cover one opening 733 of the core body 731 , and the core body 731 can hold the device under test 90 by placing the device under test 90 on the film 737 .

A plurality of small holes H are formed in the film 737 to correspond to terminals (not shown) provided on the bottom surface of the device under test 90 . The terminals 91 of the device under test 90 mounted on the film 737 protrude from the bottom of the core 730 through the small holes H, so as to be connected to the socket 50 on the test head 5 when the device under test 90 is tested.

An opening 739 is formed in the center of the film 737 . Whether or not the device under test 90 is held by the core 730 can be detected by passing light emitted from a photosensor (not shown) installed at a predetermined position of the test chamber 120 through this opening 739 .

In the method shown in FIG. 16 , one thin film 737 is installed with respect to one opening 733 , and two thin films are installed with respect to one core body 731 . Therefore, since the positional alignment of the film 737 relative to the opening 733 can be performed for each opening 733, the position of the film 737 can be adjusted more accurately than in the case of using one film 737 covering two openings 733.

1: Processor/Electronic Component Processing Unit 5: Test head 6: Tester 7: cable 8: space 50: socket 51: Touchpoint 80:Remove the fixture 81: hook pressing part 90: Device under test 91: terminal 100: Testing Department 101: device base 102: Pallet conveying device 110: soaking chamber 120:Test room 121: pusher 130: non-immersion chamber 200: storage department 201: Storage before test 202: Test complete storage 203: Pallet support frame 204: lift 205: Tray transfer arm 300: loading department 310,410: Device transfer device 311: track 312: movable arm 320: movable head 360: Precision 370,470: window 400: unloading department 700: frame 701: outer frame 702: inner frame 703,739: openings 704: through hole 705: fixed components 710: Insert/Vehicle 720: Main body/vehicle body 720a: peripheral part 720b: inner surface 721: opening/second opening 722: hook receiving part 722a: contact surface 722b: protrusion 722c: guide surface 722d: opposite surface 730: core 731: core body 732: hook 733: opening / first opening 734: holding piece/holding part 735: hook body 735a: front end 736: Engagement department 736a: front face 736b: lower surface 737:Film 738: riveting part 740:Latch 741: Ontology 742:Rotary axis 743: action department 744: link 745: Connecting components 746: spring B: Bottom/holding surface H: small hole D1, D2, D3: distance KST: Custom Tray TST: test tray STK-B, STK-1, STK-2, STK-3, STK-4, STK-5, STK-6, STK-7, STK-8: storage STK-E: Empty tray storage, θ0, θ1, θ2: tilt angle

FIG. 1 is a schematic cross-sectional view showing an electronic component testing device using an interposer according to an embodiment of the present invention. Fig. 2 is a perspective view showing the electronic component testing device of Fig. 1 . Fig. 3 is a conceptual diagram for explaining transfer of trays in the electronic component testing apparatus of Figs. 1 and 2 . Fig. 4 is an exploded perspective view showing an integrated circuit memory used in the above-mentioned electronic component testing device. Fig. 5 is a perspective view showing a customized tray used in the electronic component testing device. Fig. 6 is a perspective view showing a test tray according to an embodiment of the present invention. Fig. 7 is an exploded perspective view showing the insert according to the embodiment of the present invention. 8 is a cross-sectional view showing a state before the main body of the insert and the core are engaged, according to the embodiment of the present invention. 9 is a cross-sectional view showing a state in which the main body of the insert and the core are engaged with each other according to the embodiment of the present invention. FIG. 10 is an enlarged cross-sectional view showing a portion X in FIG. 9 . Fig. 11 is a bottom view showing a core according to an embodiment of the present invention. 12 is a cross-sectional view showing a state in which a device under test is held by an interposer according to an embodiment of the present invention and a test of the device under test is performed. 13 is a cross-sectional view (one of them) showing a method of removing a core according to an embodiment of the present invention. 14 is a cross-sectional view (part 2 ) showing a method of removing a core according to the embodiment of the present invention. 15 is a cross-sectional view (Part 3 ) showing a core removal method according to the embodiment of the present invention. Fig. 16 is a bottom view showing a modified example of the core body in the embodiment of the present invention.

720: subject

720b: inner surface

722: hook receiving part

722a: contact surface

722b: protrusion

722c: guide surface

730: core

732: hook

733: opening

734: Hold sheet

735: hook body

735a: front end

736: Engagement department

B: Bottom

θ ₀ : tilt angle

Claims (14)

A core, which is a core of a carrier that holds a device under test and is transported within an electronic component handling device, comprising: The core body has a first opening that can be inserted into the aforementioned device under test; a holding portion disposed at the bottom of the core body and holding the device under test inserted through the first opening; and a hook extending upward from the aforementioned core body; The aforementioned hooks include: hook body, connected to the aforementioned core body; and The engaging part is connected to the front end of the aforementioned hook body, Wherein the hook body is inclined toward the outside of the core body as it approaches the front end of the hook body. The core according to claim 1, wherein the engaging portion protrudes from the front end of the hook body to the outside of the core body, Wherein the aforementioned engaging portion includes: the front face; and The lower surface connects the aforementioned front end of the aforementioned hook body to the aforementioned front end surface, Wherein the aforementioned lower surface is inclined to rise as the front end portion of the hook body approaches from the front end surface. The core according to claim 1 or 2, wherein the front end surface of the engaging portion extends in a direction substantially parallel to a plane direction of a holding surface defined by the holding portion. The core according to claim 1 or 2, wherein the holding portion is a holding piece protruding toward the inside of the first opening when viewed from above, Wherein the aforementioned holding piece is integrally formed on the aforementioned core body. The core according to claim 1 or 2, wherein the holding part is a film installed on the bottom of the core body to cover the first opening. The core according to claim 1 or 2, wherein the aforementioned hook is integrally formed with the aforementioned core body. The core according to claim 1 or 2, wherein the core body has a plurality of the first openings, The aforementioned core includes a plurality of aforementioned retaining portions respectively disposed on the aforementioned bottom of the aforementioned core body to correspond to the aforementioned plurality of first openings. A carrier is a carrier transported in an electronic component processing device for holding the device under test, including: A core as claimed in any one of claims 1 to 7; and a carrier body detachably holding the aforementioned core; Wherein the aforementioned carrier body includes: a second opening into which the aforementioned device under test can be inserted and communicated with the aforementioned first opening; and The hook receiving portion can be engaged with the aforementioned engaging portion of the aforementioned hook. The vehicle according to claim 8, wherein the hook receiving part includes: a contact surface, which is in contact with the front end surface of the engaging portion; and The protruding portion is in contact with an end portion inside the core body of the contact surface, and protrudes upward from the contact surface. The carrier according to claim 8 or 9, wherein in the protruding portion, the opposing surface opposite to the lower surface of the engaging portion is inclined so as to rise toward the inner side of the core body. The vehicle described in Claim 10 is a vehicle satisfying the following formula (1), θ ₁ ≥ θ ₂ ... (1) However, in the above formula (1), θ ₁ is the The angle of inclination of the lower surface relative to the contact surface, _θ2 is the angle of inclination of the opposing surface of the protruding portion relative to the contact surface. The carrier according to any one of claims 8 to 11, wherein the aforementioned contact surface is connected to the inner surface of the aforementioned carrier body defining the second opening, Wherein, when the hook is engaged with the hook receiving portion, the hook body is separated from the protruding portion, and the engaging portion is separated from the inner surface of the carrier body. The carrier according to claim 8 or 9, wherein the extending direction of the front end surface of the engaging portion is substantially parallel to the extending direction of the contacting surface of the hook receiving portion. A core removal method is a method for removing the core from the carrier body of the carrier described in any one of claims 8 to 13, comprising : A first step of preparing a removal jig having a hook pressing portion corresponding to a position of the aforementioned hook body of the aforementioned core; The second step is to install the aforementioned removal jig to the aforementioned core, so that the aforementioned hook pressing portion abuts against the aforementioned hook body from below the aforementioned core; The third step is to bend the hook body to the inner side of the first opening by pushing the removal jig upward in the state where the hook pressing portion is in contact with the hook body; and In the fourth step, the aforementioned removal jig is moved downward, and the aforementioned core is removed from the aforementioned carrier body.

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