TW202138820A - Probe head and probe card - Google Patents

Abstract

A probe head includes an upper guide plate, a lower guide plate and multiple probes. The upper guide plate has a bump, an upper surface, lower surface and multiple probe holes penetrate through the upper surface and the lower surface. The bump is provided with a supporting surface. In the first direction, the upper surface is located between the supporting surface and the lower surface. The lower guide plate is disposed on the upper guide plate and located on a side of the lower surface. The probes are disposed in the probe holes and surround the bump. In the first direction, an end portion of a probe tail of each probe is located between the supporting surface and the upper surface. The probe tail of each probe cannot penetrate the probe holes and is kept on the side of the upper guide plate. A height of the bump in the first direction is greater than a length of the probe tail of each probe.

Description

Probe head and probe card

The embodiment of the present invention is related to the probe head and the probe card.

Semiconductor integrated circuit chips usually use probe cards for electrical testing. The probe card includes a printed circuit board, a space transformer (Space Transformer, ST), and a probe head (Probe Head, PH). The probe head mainly includes an upper guide plate, a lower guide plate and a plurality of probes. Each probe includes a needle tail, a needle body, and a needle tip that are connected in sequence. The probe passes through the upper guide plate and the lower guide plate, the needle tail of the probe passes through the upper guide plate to contact the space converter to form an electrical connection, and the tip of the probe passes through the lower guide plate to contact the object to be measured. Form an electrical connection.

As the application area of the probe head becomes larger and larger, the parallelism of the upper guide plate of the probe head is also different. Therefore, when the probe head is set in the space converter, due to the difference in the parallelism of the upper guide plate, the pressure between the needle tail of each probe and the space converter also changes, and some probes may be assembled during the assembly process. Overpressured. When the probe is subjected to overpressure, it may cause cracks where the probe passes through the upper guide plate, and even cause each probe to sink into the upper guide plate to form a pin stuck condition. All of this will cause the probe card to produce a test yield that is not as good as expected in the subsequent use.

This case discloses a probe head, which includes an upper guide plate, a lower guide plate and a plurality of probes. The upper guide plate includes protrusions, and the upper guide plate has opposite upper surfaces, lower surfaces, and a plurality of pinholes perpendicularly penetrating the upper surface and the lower surface along the first direction. The protrusions are arranged on the upper surface, and the protrusions have a supporting surface. In the first direction, the upper surface is located between the supporting surface and the lower surface. The lower guide plate is arranged on the upper guide plate and located on one side of the lower surface. The probe has a needle tail, a needle body and a needle tip that are connected in sequence. The probe is arranged in the pinhole and surrounds the bumps or is arranged in an array in the range surrounded by the bumps, and in the first direction, the end of the needle tail is located on the supporting surface And the upper surface.

This case also discloses a probe card, which includes a circuit board, a space converter, and the aforementioned probe head. The space converter has a plurality of electrical contact points and is arranged on the circuit board. The probe head is arranged on the space converter, the needle tails of the probes of the probe head respectively face the electrical contact points, the supporting surface abuts on the space converter, and the electrical contact point and the end of the needle tail have a gap in the first direction.

Referring to FIG. 1, FIG. 1 is a schematic diagram of an embodiment of the probe card of the present invention. The probe card in this embodiment is a vertical probe card. The probe card shown in the embodiment of FIG. 1 is assembled by a circuit board PCB, a space transformer ST (Space Transformer), and a probe head PH (Probe Head). In this way, the probe head PH can be electrically connected to the device under test for electrical testing. Among them, the circuit board PCB and the space converter ST are reflowed by solder balls (not shown), or anisotropic conductive glue, elastic contact elements, etc. (not shown) are used as the circuit board PCB and space conversion The intermediate conductor of the device ST electrically connects the internal circuit of the circuit board PCB with the internal circuit of the space converter ST.

Continuing to refer to FIG. 1, the probe head PH mainly includes an upper guide plate 10, a lower guide plate 20 and a plurality of probes 30. The probe 30 has a needle tail 31, a needle body 32 and a needle tip 33. The probe 30 passes through the upper guide plate 10 and the lower guide plate 20, the needle tail 31 of the probe 30 is located on one side of the upper guide plate 10, and the needle tip 33 passes through the lower guide plate 20. The probe head PH is suitable to be assembled on the space converter ST or the circuit board PCB, so that the probe head PH is arranged on the space converter ST. The probe head PH of the present invention is arranged after the space converter ST. The end of the needle tail 31 can maintain a gap F (or floating gap, Floating Gap) between the end of the needle tail 31 and the space converter ST. During the needle measurement process, the probe 30 of the probe head PH and the space converter ST When pressing, the needle tail 31 of the probe 30 can be prevented from abnormally sinking into the pinhole 13 of the upper guide plate 10 or causing the pinhole 13 to be cracked.

Further, since the probe 30 moves in the direction of the space converter ST during the needle measurement process, in this embodiment, the needle body 32 of the probe 30 is bucking, so that the probe 30 The area capable of bending deformation, that is, the tail 31 and the tip 33 of the probe 30 are not located in the same linear extension direction. In addition, the direction of bending deformation of each probe 30 can be controlled.

In order to maintain the gap F after the probe head PH is installed in the space converter ST, it can be achieved through the following specific embodiments.

Referring to FIG. 1, in one embodiment, the upper guide plate 10 of the probe head PH shown in FIG. 1 includes a bump B. Here, the upper guide plate 10 has a plate-like structure and has an upper surface 11 and a lower surface 12 opposite to each other in parallel. In addition, the upper guide plate 10 perpendicularly penetrates the upper surface 11 and the lower surface 12 along the first direction D1 to have a plurality of pinholes 13, and the bump B has a supporting surface S1 and is disposed on the upper surface 11. In the first direction D1, the upper surface 11 is located between the supporting surface S1 and the lower surface 12. Here, the lower guide plate 20 is disposed on the upper guide plate 10 and located on one side of the lower surface 12.

Continuing to refer to FIG. 1 and in conjunction with FIG. 2, in this embodiment, the pinholes 13 of the upper guide plate 10 are arranged around the bump B, so that when the probe 30 is disposed in the pinhole 13, it is also arranged around the bump B state. In a specific implementation aspect, for example, when the bump B is a solid rectangular block, the probes 30 can be arranged in a rectangular shape along the rectangular outer contour of the bump B in a peripheral manner. However, the arrangement of the probe 30 is not limited to this, and can be determined in accordance with the arrangement shape or position of the test contact of the test object.

In addition, in the first direction D1, the end of the needle tail 31 of each probe 30 is located between the supporting surface S1 and the upper surface 11, that is, the height of the bump B in the first direction D1 is greater than that of each probe 30 The length of the needle tail 31. Here, the end of the needle tail 31 of each probe 30 is the end of the pointer tail 31 away from the needle tip 33. Thereby, when each probe 30 is set on the upper guide plate 10, the end of the needle tail 31 of each probe 30 does not protrude from the bump B. In other words, when the guide plate 10 above the probe head PH is disposed on the space converter ST, it can be ensured that the probe head PH can contact the space converter ST with the guide plate 10 above, and avoid unintended contact with the space converter during the assembly process. The needle tail 31 of the probe 30 prevents the needle tail 31 of each probe 30 from being excessively pressed into the needle hole 13 or causing cracks in the needle hole 13.

Further, continuing to refer to FIG. 1, in one embodiment, since the space transformer ST has an electrical contact point P on the side facing the probe 30 to form an electrical connection with the probe 30 during the probing process, therefore, The end of the needle tail 31 of each probe 30 can maintain a gap F between the end of the needle tail 31 and the space transformer ST. The distance between the upper surface 11 of the probe head PH and the supporting surface S1 of the bump B in the first direction D1 is greater than the sum of the length of the end of the needle tail 31 and the electrical contact point P in the first direction D1. Thereby, when the probe head PH is set on the space transformer ST and the probe work has not been performed, the space transformer ST can still keep close to the supporting surface S1 of each bump B, and the electrical contact point of the space transformer ST P and the end of the needle tail 31 of the probe 30 have a gap F in the first direction D1. Each electrical contact point P is connected to the internal circuit of the space transformer ST.

It can be seen that when the probe head PH is installed on the space transformer ST, the support surface S1 of the bump B on the large-area upper guide plate 10 is in contact with the space transformer ST. As a result, the probe head PH The contact area between the upper guide plate 10 and the space converter ST is increased, and the possibility of deformation of the upper guide plate 10 can be reduced during the assembly process. In this way, in addition to ensuring the parallelism of the space converter ST after the probe head PH is installed, it can also ensure that the needle tail 31 of each probe 30 is not compressed and damaged due to the deformation of the upper guide plate 10. In addition, there is a gap F between the tail 31 of the probe 30 of the probe head PH, which can prevent the probe 30 of the probe head PH from colliding with the space converter ST during assembly or needle testing. And damaged.

Further, referring to FIG. 4, in one embodiment, in order to avoid random displacement of each probe 30 toward the lower guide plate 20 in the first direction D1, the needle tail 31 of each probe 30 is limited to the upper guide plate 10 On one side of the lower guide plate 20. Here, the cross-sectional shape of the needle tail 31 of each probe 30 is non-circular, and the cross-sectional shape of the needle body 32 of each probe 30 is circular. As a result, when each probe 30 is set on the upper guide plate 10, each probe 30 The needle tail 31 of the needle 30 cannot pass through the needle hole 13 and is held on one side of the upper guide plate 10. In this state, the needle tail 31 of each probe 30 becomes a stopper that can restrict the displacement of the probe 30 in the first direction D1 (Stopper), the stopper formed by the needle tail 31 can prevent the probe 30 from falling out of the probe head PH from the needle hole 13 of the upper guide plate 10 and the needle hole of the lower guide plate 20. Specifically, the needle tail 31 of each probe 30 can be, but is not limited to, formed by pressing and deforming one end of the needle body 32 protruding from the upper guide plate 10, so that the needle tail 31 becomes wider than the outer diameter of the needle hole 13 Flat shape.

In some embodiments, the upper guide plate 10 may be made of a single material, different materials, integrally formed or combined separately. Referring to FIGS. 1 and 2, the embodiments of FIGS. 1 and 2 illustrate that the upper guide plate 10 and the bump B are integrally formed from a single material. In this embodiment, the upper guide plate 10 and the bump B are integrally formed of ceramic materials.

Furthermore, in order to avoid the problem of interference of the probes 30 caused by the rotation of the probes 30 on the upper guide plate 10, the probe head PH further includes a rotation stop structure A, which has a plurality of non-circular holes H1 , Each non-circular hole H1 communicates with each pin hole 13 respectively. Here, the cross section of the needle tail 31 of the probe 30 is non-circular, and the needle tail 31 of the probe 30 is respectively accommodated in the non-circular hole H1, and the needle tail 31 and the non-circular hole H1 interfere with each other. The hole H1 can restrict the probe 30 from rotating relative to the upper guide plate 10, that is, the probe 30 will not rotate relative to the upper guide plate 10 and the lower guide plate 20.

Further, referring to FIG. 3, the embodiment in FIG. 3 is based on the structural foundation of the embodiment in FIG. 2 and is further provided with a rotation stop structure A. Here, the upper guide plate 10 and the bump B are integrally formed from a single material, and the upper guide plate 10 includes a rotation preventing structure A. In addition, in this embodiment, the anti-rotation structure A and the protrusion B on the upper guide plate 10 are an integrally formed anti-rotation block 14. The anti-rotation block 14 is provided with a plurality of non-circular holes H1 to limit the probe 30. Rotation. Here, the cross-sectional shape of the needle tail 31 of the probe 30 is non-circular. When the needle tail 31 of the probe 30 is accommodated in the non-circular hole H1, the rotational momentum of the needle tail 31 of the probe 30 will be absorbed by the non-circular hole H1. Limit and stop the rotation. For example, the cross section of the needle tail 31 of the probe 30 can be but not limited to a square circle, that is, two corresponding sides are flat with each other and the other two corresponding sides are arc-shaped, and the non-circular hole H1 is a rectangular hole, then the needle tail 31 is accommodated The non-circular hole H1 can be prevented from rotating by the non-circular hole H1. In other embodiments, the cross-sectional shape of the needle tail 31 of the probe 30 is a square circle, and the non-circular hole H1 can be a square circular hole or an elliptical hole. The shape is not particularly limited, as long as the size is properly configured (for example, the non-circular hole H1 should not be too large compared to the needle tail 31). When the needle tail 31 of the probe 30 is accommodated in the non-circular hole H1, the needle tail 31 of the probe 30 is It can be stopped by the non-circular hole H1.

Specifically, the anti-rotation block 14 is disposed on the upper surface 11. In one embodiment, the anti-rotation structure A further has a step surface S2, and the step surface S2 and the supporting surface S1 are not coplanar and become a stepped shape. In this embodiment, the anti-rotation block 14 has a step surface S2 which is adjacent to the non-circular hole H1 and the bump B. In the first direction, the step surface S2 is located between the supporting surface S1 and the upper surface 11. Thereby, the arrangement of the step surface S2 can be more suitable for the arrangement of the bump B and the pinhole 13 with various relative positions.

In this embodiment, when each probe 30 passes from the upper guide plate 10 to the lower guide plate 20, the needle tip 33 of each probe 30 can pass through the non-circular hole H1 and the needle hole 13 and then pass through the lower guide plate 20. The needle body 32 of each probe 30 passes through the non-circular hole H1 and the pinhole 13 and can be accommodated in the pinhole 13 and the accommodating space between the upper guide plate 10 and the lower guide plate 20, and each probe 30 The tail 31 of the needle is accommodated in the non-circular hole H1, whereby the needle tail 31 of each probe 30 can be restricted by the non-circular hole H1 to restrict the rotation of the probe 30.

In the embodiment where the rotation-stop structure A is provided to restrict the rotation of the probe 30, it may also be a split structure configuration using different materials. Specifically, referring to FIG. 5, the embodiment in FIG. 5 is also based on the structural foundation of the embodiment in FIG. In this embodiment, the upper guide plate 10 and the bump B are integrally made of ceramic material, and the rotation stop structure A is a rotation stop member 40 that can be separated from the upper guide plate 10 and the bump B. Here, the anti-rotation member 40 may be a film material provided on the upper guide plate 10, and the anti-rotation member 40 is provided with a plurality of non-circular holes H1. In this embodiment, the rotation stopper 40 is disposed on the upper surface 11, and the non-circular hole H1 of the rotation stopper 40 communicates with the pinhole 13 of the upper guide plate 10. In this way, when each probe 30 passes through the upper guide plate 10 to the lower guide plate 20, the needle tip 33 of each probe 30 can pass through the non-circular hole H1 and the needle hole 13 and then pass through the lower guide plate 20, and each probe The needle body 32 of the needle 30 passes through the non-circular hole H1 and the needle hole 13 and can be accommodated in the needle hole 13, and the needle tail 31 of each probe 30 is accommodated in the non-circular hole H1, whereby each The needle tail 31 of the probe 30 can be restricted by the non-circular hole H1 to restrict the rotation of the probe 30. In an embodiment, the anti-rotation member 40 may also have a step surface S2, and the step surface S2 is adjacent to the non-circular hole H1 and the bump B.

Further, in some embodiments, the anti-rotation member 40 may be a single piece of film material. Also referring to FIG. 5, the anti-rotation member 40 has a step surface S2 and a non-circular hole H1, and the anti-rotation member 40 corresponds to The projection B on the upper guide plate 10 is provided with a perforation H2 in the configuration position, and the shape of the perforation H2 corresponds to the outer contour shape of the projection B. Here, the position arrangement of the non-circular hole H1 relative to the through hole H2 corresponds to the position arrangement of the probe 30 relative to the bump B. In this embodiment, the through hole H2 surrounds the non-circular hole H1. In this way, the anti-rotation member 40 is disposed on the upper surface 11 of the upper guide plate 10, and the perforation H2 passes through the protrusion B, and the non-circular hole H1 communicates with the pinhole 13, that is, the protrusion formed by the anti-rotation member 40 B is set on the perforation H2 and placed on the upper surface 11 of the upper guide plate 10. Here, each probe 30 first passes through the rotation stopper 40 and then passes through the upper guide plate 10, and the needle tail 31 of the probe 30 can be accommodated in the non-circular hole H1 of the rotation stopper 40 and received by the non-circular hole H1. Stop rotation. The anti-rotation member 40 can cut a plurality of pattern structures on the film and arrange the plurality of pattern structures on the upper surface 11 of the upper guide plate 10 in a collage manner, and accordingly provide a rotation stopper for each probe 30 Function.

In other embodiments, please refer to FIG. 6. The embodiment of FIG. 6 is also based on the structure of the embodiment of FIG. 2, that is, the embodiment of FIG. 6 is also the structure of the bump B on the upper guide plate 10. In this embodiment, the upper guide plate 10 is a three-piece split structure made of different materials. Specifically, the protrusion B of the upper guide plate 10 can be separated from the upper guide plate 10, and the protrusion B can be divided into two separable parts. In this embodiment, the bump B includes an anti-rotation structure A and a height setting layer B2, and the anti-rotation structure A is an anti-rotation layer B1 that can be separated from the height setting layer B2. In this embodiment, the anti-rotation layer B1 is arranged on the upper surface 11 and has an intermediate interface S3 and a plurality of non-circular holes H1, and the height setting layer B2 is arranged on a part of the intermediate interface S3 and has a supporting surface S1, in the first direction The upper middle interface S3 of D1 is located between the supporting surface S1 and the upper surface 11. Here, since the height setting layer B2 is provided on a part of the interface surface S3, the rest of the interface surface S3 is exposed, so that the anti-rotation layer B1 and the height setting layer B2 have a stepped structure, and the rest of the aforementioned interface surface S3 (The exposed part of the interface S3) becomes the step surface S2 equivalent to the previous embodiments.

Similarly, in this embodiment, the non-circular hole H1 of the anti-rotation layer B1 communicates with the pin hole 13. When each probe 30 passes through the upper guide plate 10 to the lower guide plate 20, the needle tip 33 of each probe 30 can pass through the non-circular hole H1 and the needle hole 13 and then pass through the lower guide plate 20, and the needle of each probe 30 The body 32 passes through the non-circular hole H1 and the pinhole 13 and can be accommodated in the pinhole 13, and the needle tail 31 of each probe 30 is accommodated in the non-circular hole H1, whereby the The needle tail 31 can be restricted by the non-circular hole H1 to restrict the rotation of the probe 30.

In this embodiment, the anti-rotation layer B1 and the height setting layer B2 can be made of ceramic material or thin film material, respectively. Here, the upper guide plate 10, the anti-rotation layer B1, and the height setting layer B2 are a three-piece split structure, which means that the three-piece structure is in the processing stage. Once the upper guide plate 10, the anti-rotation layer B1 and the height setting layer B2 is combined into an inseparable single structure after being processed separately. Since the upper guide plate 10, the anti-rotation layer B1, and the height setting layer B2 are a three-piece split structure in the processing stage, the upper guide plate 10, the anti-rotation layer B1, and the height setting layer B2 can be processed simultaneously in different places. This reduces the time required for processing. In addition, because the upper guide plate 10, the anti-rotation layer B1, and the height setting layer B2 are separately processed and then combined, when the probe 30 of the probe head PH has a different form, it is based on the needle body of the probe 30 32 or the needle tail 31 has a difference in size and shape. This embodiment can change the pinhole 13 form of the upper guide plate 10 and the rotation stop layer B1 during the processing of the upper guide plate 10, the anti-rotation layer B1, and the height setting layer B2. After the non-circular hole H1 form is combined, it can be more convenient to apply different probe 30 forms.

In addition, in the foregoing embodiments, the larger the proportion of the area of the support surface S1 to the cross-sectional area of the upper guide plate 10 in the direction perpendicular to the first direction D1, the better. In this embodiment, the area of the supporting surface S1 accounts for more than 50% of the cross-sectional area of the upper guide plate 10 in the second direction D2. This ensures that when the probe head PH is set on the space transformer ST, the upper guide plate 10 can be stably supported by the space transformer ST without being deformed, and the parallel between the upper guide plate 10 and the space transformer ST can be maintained. Therefore, it can further ensure that the probes 30 will not fall into the pinhole 13 abnormally or cause the pinhole 13 to be cracked.

In another embodiment, please refer to FIGS. 7 and 8 together. FIGS. 7 and 8 show the structure of the upper guide plate 10 including the groove 15. In this embodiment, the groove 15 is recessed by the upper surface 11, and the groove 15 has a groove bottom surface 151. In the first direction D1, the groove bottom surface 151 is located between the upper surface 11 and the lower surface 12. In this embodiment, the probes 30 are arranged in the groove 15, and the probes 30 may be, but not limited to, be arranged in an array or circumferentially in the groove 15. When each probe 30 is set in the groove 15, in the first direction D1, the end of the needle tail 31 of each probe 30 is located between the bottom surface 151 of the groove and the upper surface 11, and the length of the needle tail 31 is less than that of the groove 15. high.

Further, in this embodiment, the arrangement of the probes 30 in the groove 15 may be different depending on the shape of the groove 15. In an embodiment, the groove 15 of the upper guide plate 10 may be, but not limited to, a rectangle or a circle (not shown in the figure). Here, based on the shape of the groove 15 of the upper guide plate 10, the groove bottom surface 151 is a flat plane, so the probes 30 can be arranged in the groove 15 in a matrix. For example, when the shape of the groove 15 of the upper guide plate 10 is rectangular, the probes 30 may be arranged in the groove 15 in a matrix.

In an embodiment, referring to FIG. 7, the groove 15 of the upper guide plate 10 may also be grid-shaped. Here, since the shape of the groove 15 is a grid shape, the groove bottom surface 151 is also a grid shape correspondingly. In this way, the probes 30 can be arranged along the grid-shaped grooves 15 to become a peripheral arrangement.

Further, referring to FIG. 9, the embodiment of FIG. 9 is the same as the embodiments of FIGS. 7 and 8 in that the upper guide plate 10 is provided with grooves 15 and the probes 30 are arranged around the same structural basis. In this embodiment, the probe 30 is disposed in the groove 15, and the upper guide plate 10 further includes a rotation preventing structure A. And in this embodiment, the anti-rotation structure A is an anti-rotation block 14 made of the same material as the upper guide plate 10. The structure of the anti-rotation block 14 is the same as that of the previous embodiment and has a connecting pinhole 13 The hole H1 is non-circular and may have a step surface S2. The difference is that the rotation stop block 14 of this embodiment is disposed on the groove bottom surface 151 of the groove 15. Therefore, in this embodiment, the step surface S2 of the anti-rotation block 14 is adjacent to the non-circular hole H1 and the upper guide plate 10, and the step surface S2 of the anti-rotation block 14 is not coplanar with the upper surface 11 and becomes a step The step surface S2 is located between the upper surface 11 and the bottom surface 151 of the groove. The needle tail 31 of the probe 30 can also be accommodated in the non-circular hole H1 and is prevented from rotating by the non-circular hole H1.

In addition, referring to FIG. 10, the embodiment of FIG. 10 is the same as the embodiments of FIG. 7 and FIG. In this embodiment, an anti-rotation structure A is further provided on the upper guide plate 10, and the anti-rotation structure A is a non-rotating member 40. In this embodiment, the anti-rotation member 40 is disposed on the bottom surface 151 of the groove. In addition, when the probes 30 in the groove 15 are arranged in an array, a rotation stopper 40 without perforation H2 is provided. When the groove 15 is in a grid shape, a rotation stopper 40 with perforations H2 is provided, and the perforation H2 of the rotation stopper 40 is passed through the protrusions between the grooves 15 in the grid shape.

Furthermore, in each embodiment in which the probe 30 is arranged in the groove 15, as shown in FIGS. 7 to 10, since the rotation stop block 14 or the rotation stop member 40 is arranged on the groove bottom surface 151 lower than the upper surface 11, Therefore, the end of the tail 31 of the probe 30 is located between the upper surface 11 and the bottom surface 151 of the groove. That is, when the probe head PH is arranged after the space transformer ST, the probe head PH is the upper surface 11 of the upper guide plate 10 in contact with the space transformer ST. Therefore, in each embodiment in which the probe 30 is disposed in the groove 15, the larger the proportion of the area of the upper surface 11 to the cross-sectional area of the upper guide plate 10 in the second direction D2, the better. Here, the area of the upper surface 11 accounts for more than 50% of the cross-sectional area of the upper guide plate 10 in the second direction D2. In this way, in each embodiment in which the probe 30 is disposed in the groove 15, it can be ensured that when the probe head PH is disposed in the space transformer ST, the upper guide plate 10 can be stably supported by the space transformer ST without being deformed. The parallelism between the upper guide plate 10 and the space transformer ST can be maintained, and it is further possible to ensure that the probes 30 will not abnormally sink into the pinhole 13 or cause the pinhole 13 to be cracked.

Referring to FIG. 11, in one embodiment, the same as the embodiment in FIG. 1 is that the upper guide plate 10 also includes a bump B, and the end of the needle tail 31 of the probe 30 is also located between the supporting surface S1 and the upper surface 11. . The difference is that the probes 30 of this embodiment are arranged in an array in the area surrounded by the bump B. In a specific implementation aspect, the bump B on the upper guide plate 10 may, but is not limited to, a closed contour shape, such as a hollow square. In this way, after the probe head PH is set in the space transformer ST, the end of the needle tail 31 of the probe 30 and the space transformer ST can also maintain a gap F.

Of course, the same as the embodiment of FIG. 1 in which the upper guide plate 10 includes the protrusion B, the upper guide plate 10 can be integrally formed with the protrusion B and the rotation stop block 14 with the same material. It is also possible that the upper guide plate 10 and the bump B are integrally formed of the same material, and the rotation stopper 40 of different materials is separately provided. It is also possible that the upper guide plate 10 is made of a single material, and the bumps B including the anti-rotation layer B1 and the height setting layer B2 are made of different materials separately.

In summary, when the probe head PH of the foregoing embodiments of the present invention is set on the space transformer ST, the supporting surface S1 or the upper surface 11 can always be attached to the space transformer ST, thereby enabling the upper guide plate 10 to be supported. And reduce the deformation. Furthermore, based on the fact that the upper guide plate 10 can maintain a stable and undeformed state, the probes 30 provided on the upper guide plate 10 can maintain parallelism with the space transformer ST and maintain a gap F, thereby The probe 30 and the upper guide plate 10 can be prevented from being damaged during the needle test.

Although this disclosure has been disclosed in some embodiments as above, it is not intended to limit the disclosure. Anyone with ordinary knowledge in the relevant technical field can make some changes and modifications without departing from the spirit and scope of this disclosure. Therefore, the scope of patent protection of the present invention shall be determined by the scope of the patent application attached to this specification.

PH: probe head ST: Spatial converter PCB: circuit board 10: Upper guide plate 11: upper surface 12: Lower surface 13: pinhole 14: Stopping block 15: Groove 151: groove bottom 20: Lower guide plate 30: Probe 31: Needle tail 32: Needle body 33: Needle tip 40: stop piece A: Stop-rotation structure F: gap B: bump B1: anti-rotation layer B2: Height setting layer P: electrical contact point S1: Support surface S2: Step surface S3: Intermediary interface H1: Non-circular hole H2: Piercing D1: First direction D2: second direction

Fig. 1 is a schematic diagram of an embodiment of the probe card of the present invention. 2 is a schematic diagram of an embodiment in which the upper guide plate of the probe head of the present invention has bumps and the probes are arranged around. 3 is a schematic diagram of an embodiment in which the guide plate, the protrusion and the rotation stop block on the probe card of the present invention are integrally formed. Fig. 4 is a schematic diagram of a rotation stopper provided on the probe head of the present invention. FIG. 5 is a schematic diagram of an embodiment in which the guide plate and the protrusion on the probe card of the present invention are integrally formed with a rotation stopper. Fig. 6 is a schematic diagram of an embodiment in which the guide plate on the probe card of the present invention is a three-piece type. Fig. 7 is a schematic diagram of an embodiment in which the upper guide plate of the probe head of the present invention has grid-shaped grooves. Fig. 8 is a schematic diagram of an embodiment in which the upper guide plate of the probe head of the present invention has a groove. 9 is a schematic diagram of an embodiment in which the upper guide plate of the probe card of the present invention has a groove and a rotation stop block. 10 is a schematic diagram of an embodiment in which the upper guide plate of the probe card of the present invention has a groove and is additionally provided with a rotation stopper. 11 is a schematic diagram of an embodiment in which the probe card of the present invention has bumps and the probe array is arranged in the bumps.

PH: probe head

ST: Spatial converter

PCB: circuit board

10: Upper guide plate

11: upper surface

12: Lower surface

13: pinhole

15: Groove

151: groove bottom

20: Lower guide plate

30: Probe

31: Needle tail

32: Needle body

33: Needle tip

F: gap

P: electrical contact point

D1: First direction

D2: second direction

Claims (9)

A probe head that contains: An upper guide plate includes a protrusion, and the upper guide plate has an upper surface, a lower surface, and a plurality of pinholes perpendicularly penetrating the upper surface and the lower surface along a first direction. The protrusion is formed by the upper surface and the lower surface. The surface is convex, the bump has a supporting surface, and in the first direction, the upper surface is located between the supporting surface and the lower surface; The lower guide plate is arranged on the upper guide plate and located on one side of the lower surface; and A plurality of probes has a needle tail, a needle body and a needle tip that are connected in sequence, the plurality of probes are arranged in a peripheral or matrix manner, the plurality of probes are arranged in the plurality of pinholes and surround the bump, and In the first direction, the end of the needle tail is located between the supporting surface and the upper surface, the needle tail cannot pass through the needle hole of the upper guide plate and is held on the upper surface side of the upper guide plate, and The height of the bump in the first direction is greater than the length of the needle tail. The probe head according to claim 1, further comprising an anti-rotation structure, the anti-rotation structure is arranged on the upper surface and has a plurality of non-circular holes, each of the non-circular holes is connected with each of the pinholes, the plurality of The cross section of the needle tail of the probe is non-circular, and the needle tails of the plurality of probes are respectively accommodated in the non-circular holes and are prevented from rotating by the non-circular holes. The probe head according to claim 2, wherein the anti-rotation structure further includes a step surface, the step surface is adjacent to the plurality of non-circular holes and the bump, and the step surface and the supporting surface are not coplanar, In the first direction, the step surface is located between the supporting surface and the upper surface. The probe head according to claim 2 or 3, wherein the upper guide plate includes the anti-rotation structure, and the anti-rotation structure is integrally formed with the protrusion. The probe head according to claim 2 or 3, wherein the anti-rotation structure can be separated from the upper guide plate and the bump. The probe head according to claim 2 or 3, wherein the anti-rotation structure is a anti-rotation member separable from the upper guide plate and the protrusion, the anti-rotation member further has a perforation, and the plurality of non-circular The hole is located around the perforation, and the perforation passes through the bump. The probe head according to claim 3, wherein the bump includes the anti-rotation structure and a height setting layer, the anti-rotation structure is an anti-rotation layer separable from the height setting layer, and the anti-rotation layer further has An intermediate interface, the height setting layer is disposed on a part of the intermediate interface and has the supporting surface, and the rest of the intermediate interface becomes the step surface. The probe head according to claim 1, wherein the area of the supporting surface accounts for more than 50% of the cross-sectional area of the upper guide plate in a direction perpendicular to the first direction. A probe card, including: A circuit board; A space converter, arranged on the circuit board, the space converter having a plurality of electrical contact points; and The probe head according to any one of claims 1 to 8, which is provided in the space converter, the needle tails of the plurality of probes of the probe head face the plurality of electrical contact points respectively, and the support surface abuts against the In the space converter, the electrical contact point and the end of the needle tail have a gap in the first direction.

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