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TW201915226A - Electrode frame for electropolishing and electropolishing apparatus comprising same - Google Patents

Electrode frame for electropolishing and electropolishing apparatus comprising same Download PDF

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Publication number
TW201915226A
TW201915226A TW107134547A TW107134547A TW201915226A TW 201915226 A TW201915226 A TW 201915226A TW 107134547 A TW107134547 A TW 107134547A TW 107134547 A TW107134547 A TW 107134547A TW 201915226 A TW201915226 A TW 201915226A
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negative electrode
electrolytic
electrode frame
frame
abrasive article
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TW107134547A
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Chinese (zh)
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TWI703241B (en
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黃在祥
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南韓商奧森里德股份有限公司
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Priority claimed from KR1020170125737A external-priority patent/KR101848251B1/en
Priority claimed from KR1020170125739A external-priority patent/KR101848264B1/en
Application filed by 南韓商奧森里德股份有限公司 filed Critical 南韓商奧森里德股份有限公司
Publication of TW201915226A publication Critical patent/TW201915226A/en
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    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25FPROCESSES FOR THE ELECTROLYTIC REMOVAL OF MATERIALS FROM OBJECTS; APPARATUS THEREFOR
    • C25F3/00Electrolytic etching or polishing
    • C25F3/16Polishing
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25FPROCESSES FOR THE ELECTROLYTIC REMOVAL OF MATERIALS FROM OBJECTS; APPARATUS THEREFOR
    • C25F7/00Constructional parts, or assemblies thereof, of cells for electrolytic removal of material from objects; Servicing or operating

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)

Abstract

The present invention relates to an electrode frame for electrolytic polishing having a mounting member and an electrolytic polishing apparatus having the same. The electrode frame for electrolytic polishing according to an embodiment of the present invention is an electrode frame used in an electrolytic bath in which an electrolytic polishing object and an accommodation space for containing an electrolytic solution therein are provided. The present invention comprises: an electrode mounting member coupled to at least one protrusion of an electrolytic polishing object; and a first negative electrode frame which is formed in a lattice structure and at least one side thereof which is engaged with the electrode mounting member and spaced apart from the polishing surface of the electrolytic polishing object by predetermined distance.

Description

電解研磨用電極框架及包括其的電解研磨裝置Electrode frame for electrolytic polishing and electrolytic polishing device therewith

涉及電解研磨用電極框架及包括其的電解研磨裝置,涉及一種用於提高電解研磨物件的研磨品質的電解研磨裝置。An electrode frame for electrolytic polishing and an electrolytic polishing device therewith are related to an electrolytic polishing device for improving the polishing quality of an electrolytically polished article.

一般而言,電解研磨(Electro polishing)是一種將溶解於電解液的金屬製品用作正極(Anode)、將在電解液中不溶性的金屬用作負極(Cathode),通過向所述正極與負極之間施加電壓,在作為電解研磨物件的金屬製品的表面引起電解來研磨金屬製品表面的方法。In general, electrolytic polishing is a method in which a metal product dissolved in an electrolytic solution is used as a positive electrode (Anode), and a metal insoluble in an electrolytic solution is used as a negative electrode (Cathode), and the positive electrode and the negative electrode are used. A method of applying a voltage to cause electrolysis to polish the surface of the metal article on the surface of the metal article as the electrolytically polished article.

為了利用電解研磨來研磨金屬,在電解槽中填充電解液,將要研磨的金屬安裝為正極,將不溶解於電解液的金屬安裝為負極,然後向正極和負極施加直流。In order to grind the metal by electrolytic polishing, the electrolytic solution is filled with an electrolytic solution, the metal to be polished is mounted as a positive electrode, the metal not dissolved in the electrolytic solution is mounted as a negative electrode, and then a direct current is applied to the positive electrode and the negative electrode.

進行電解研磨後,大量含有從正極溶解的金屬離子的高黏度液體層(黏性層)包圍正極。在因金屬離子而飽和的液體層中,金屬不再溶解,形成高正極電位,因而與氧活躍地結合而形成氧化物皮膜。此時,溶解的金屬離子主要累積於金屬表面的凹陷部分,在凹陷部分,金屬離子的移動和擴散小,電性導通不暢,因而金屬不溶解。相反,在金屬表面的凸出部分,金屬離子層形成得薄,因而電流集中,容易使金屬表面溶解,整體而言,金屬表面變得平滑。After electrolytic polishing, a high-viscosity liquid layer (viscous layer) containing a large amount of metal ions dissolved from the positive electrode surrounds the positive electrode. In the liquid layer saturated with metal ions, the metal is no longer dissolved, forming a high positive electrode potential, and thus actively bonds with oxygen to form an oxide film. At this time, the dissolved metal ions mainly accumulate in the depressed portion of the metal surface, and in the depressed portion, the movement and diffusion of the metal ions are small, the electrical conduction is not smooth, and the metal is not dissolved. On the contrary, in the convex portion of the metal surface, the metal ion layer is formed thin, and thus the current is concentrated, and the metal surface is easily dissolved, and as a whole, the metal surface becomes smooth.

電解研磨通過電解研磨裝置實施,以往技術的電解研磨裝置在電解槽內配置具有正極電位的電解研磨物件,使負極板隔開地配置於所述電解研磨物件的研磨面而構成。負極板應根據電解研磨物件的形狀而變更,因而根據電解研磨物件的形狀組裝後,安裝於電解槽內。Electrolytic polishing is carried out by an electrolytic polishing apparatus. In the electrolytic polishing apparatus of the prior art, an electrolytically polished article having a positive electrode potential is placed in an electrolytic cell, and the negative electrode plate is disposed apart from the polished surface of the electrolytically polished article. The negative electrode plate should be changed according to the shape of the electrolytically polished article, and thus assembled in the electrolytic cell after being assembled according to the shape of the electrolytically polished article.

如上所述組裝的負極板應以不與電解研磨物件接觸的方式安裝於電解槽內。可是,負極板只有與電解研磨物件接近地保持既定距離並配置,才能實現均一研磨,提高電解研磨品質。The negative electrode plate assembled as described above should be installed in the electrolytic cell in such a manner as not to be in contact with the electrolytically polished article. However, the negative electrode plate can only maintain a predetermined distance and be disposed close to the electrolytically polished object, so that uniform polishing can be achieved and the electrolytic polishing quality can be improved.

但是在以往技術中,實際上無法將負極板以與電解研磨物件接近地保持既定距離的方式堅固地配置。However, in the prior art, it is practically impossible to arrange the negative electrode plate so as to maintain a predetermined distance close to the electrolytically polished article.

另一方面,本件申請的發明人研發了在電解研磨物件上形成的放出口使用負極托架而在使負極板接近電解研磨物件一側的同時均一地固定的發明,並獲專利授權(參照韓國授權專利10-1183218號)。On the other hand, the inventor of the present application has developed an invention in which a discharge port formed on an electrolytically polished article is uniformly fixed while using a negative electrode holder while bringing the negative electrode plate close to the side of the electrolytically polished article, and is patent-authorized (refer to Korea Authorized patent 10-1183218).

但是,電解研磨物件由於其形狀多種多樣,因而發生在電解研磨物件上沒有諸如放出口的放置區域的情形。因此,碰到了無法使負極板在接近電解研磨物件的同時均一地安裝的技術問題。However, electrolytically ground articles have a variety of shapes, and thus occur in the case where there is no placement area such as a discharge port on the electrolytically polished article. Therefore, there has been a technical problem that the negative electrode plate cannot be uniformly mounted while being close to the electrolytically polished article.

現在,作為原有領域技術,將負極棒垂掛於電解槽,或以負極網形態形成大網後,將其垂掛於電解槽而大致地進行電解研磨,但卻是電解研磨品質或工序效率非常低的狀態。Now, as a technique in the prior art, the negative electrode rod is suspended in an electrolytic cell, or a large mesh is formed in the form of a negative electrode mesh, and is suspended in an electrolytic cell to perform electrolytic polishing substantially, but the electrolytic polishing quality or the process efficiency is very low. status.

另外,當電解研磨物件無諸如放出口的放置區域時,根據電解研磨物件的形狀,發生需每次獨立地設置負極板的放置區域的麻煩。因此,設置放置區域直到執行電解研磨所需的時間相當長,發生組裝費用上升的問題。特別是當電解研磨物件的形狀為相當複雜的結構時,發生無法將負極框架設置於電解研磨物件一側的情形。In addition, when the electroabrasive article has no placement area such as a discharge port, depending on the shape of the electroabrasive article, troubles arise in that the placement area of the negative electrode plate is required to be independently provided each time. Therefore, the time required to set the placement area until electrolytic polishing is performed is quite long, and the problem of an increase in assembly cost occurs. In particular, when the shape of the electrolytically polished article is a relatively complicated structure, the case where the negative electrode frame cannot be disposed on the side of the electrolytically polished article occurs.

現在,作為原有領域的技術,負極框架設置不觸及研磨物件構件程度的距離而將負極棒垂掛於電解槽,或以負極網形態形成大網後,將其垂掛於電解槽,大致進行電解研磨,但負極棒或負極網無法與研磨物件構件均一且接近地固定,因而實際上電解研磨品質或工序效率很低。Now, as a technique in the prior art, the negative electrode frame is provided with a distance from the object to be polished, and the negative electrode rod is suspended from the electrolytic cell, or a large mesh is formed in the form of a negative electrode mesh, and then suspended in an electrolytic cell to perform electrolytic polishing. However, the negative electrode or the negative electrode mesh cannot be uniformly and closely fixed to the abrasive article member, so that the electrolytic polishing quality or the process efficiency is actually low.

另一方面,以往技術的負極板借助於於作為另外的支撐構件的夾具而支撐,但負極板與電解研磨物件之間的距離非常接近地配置,因而難以在負極板與電解研磨物件之間的狹小空間安裝夾具。即,由於夾具以導電性材質形成,因此,如果夾具與正極的電解研磨物件接觸,則與具有負極的負極板發生電性短路。On the other hand, the negative electrode plate of the prior art is supported by a jig as another supporting member, but the distance between the negative electrode plate and the electrolytically polished article is very close to each other, and thus it is difficult to be between the negative electrode plate and the electrolytically polished object. Install fixtures in tight spaces. That is, since the jig is formed of a conductive material, if the jig is in contact with the electrolytically polished article of the positive electrode, it is electrically short-circuited with the negative electrode plate having the negative electrode.

(要解決的技術問題)(Technical problem to be solved)

在一實施例中,提供一種用於即使在沒有另外的放出口的區域,也將負極框架接近並均一地安裝於電解研磨物件一側的電解研磨用電極框架及包括其的電解研磨裝置。In one embodiment, there is provided an electrode frame for electrolytic polishing in which a negative electrode frame is closely and uniformly attached to one side of an electrolytic polishing article, and an electrolytic polishing device including the same, in an area where there is no additional discharge port.

另外,在又一實施例中,提供一種用於防止因夾具而在負極板與電解研磨物件之間的電性短路的電解研磨裝置。Further, in still another embodiment, an electrolytic polishing apparatus for preventing an electrical short circuit between a negative electrode plate and an electrolytically polished article due to a jig is provided.

另外,在一實施例中,提供一種用於在沒有另外的托架的電解研磨物件一側有效設置負極框架的電解研磨裝置。Further, in an embodiment, an electrolytic polishing apparatus for effectively providing a negative electrode frame on the side of an electrolytically polished article without an additional bracket is provided.

另外,在又一實施例中,提供一種用於防止因夾具而發生負極板與電解研磨物件之間的電性短路的電解研磨裝置。Further, in still another embodiment, an electrolytic polishing apparatus for preventing an electrical short circuit between a negative electrode plate and an electrolytically polished article due to a jig is provided.

(解決問題的手段)(means to solve the problem)

在一實施例中,電解研磨用電極框架作為在內部配備有容納電解研磨物件和電解液的容納空間的電解槽中使用的電極框架,可以包括:電極放置構件,其結合於所述電解研磨物件的至少一個以上的凸出部;及第一負極框架,其以格子結構形成,至少一個以上的格子結構的一側與所述電極放置構件結合,與所述電解研磨物件的研磨面隔開既定間隔配置。In an embodiment, the electrode frame for electrolytic polishing is used as an electrode frame for use in an electrolytic cell equipped with an accommodation space for accommodating an electrolytic abrasive article and an electrolyte, and may include: an electrode placement member coupled to the electrolytic abrasive article At least one or more protrusions; and a first negative electrode frame formed in a lattice structure, one side of at least one of the lattice structures being combined with the electrode placement member, and being spaced apart from the polishing surface of the electrolytic abrasive article Interval configuration.

所述電極放置構件可以包括與所述電解研磨物件的凸出部結合的第一面、與所述第一負極框架結合的第二面。The electrode placement member may include a first face combined with a projection of the electrolytic abrasive article and a second face joined to the first negative electrode frame.

所述電極放置構件即使不利用放出口,也可以與所述電解研磨物件的凸出部結合。The electrode placement member may be coupled to the projection of the electrolytically polished article even without using a discharge port.

另外,在一實施例中,電解研磨用電極框架作為在內部配備有容納電解研磨物件和電解液的容納空間的電解槽使用的電極框架,可以包括:負極框架,其配置於所述電解研磨物件的研磨面的一側;及電極隔開構件,其結合於所述負極框架,使所述負極框架從所述電解研磨物件的底面隔開。In addition, in an embodiment, the electrode frame for electrolytic polishing is used as an electrode frame for an electrolytic cell equipped with an accommodating space for accommodating the electrolytic abrasive article and the electrolytic solution, and may include: a negative electrode frame disposed on the electrolytic abrasive article One side of the abrasive surface; and an electrode partitioning member coupled to the negative electrode frame to separate the negative electrode frame from the bottom surface of the electrolytic abrasive article.

所述電極隔開構件可以包括接合於所述電解研磨物件的底面並支撐所述負極框架的第一電極隔開構件。The electrode spacing member may include a first electrode spacing member joined to a bottom surface of the electrolytic abrasive article and supporting the negative electrode frame.

所述第一電極隔開構件即使不利用放出口,也可以支撐所述負極框架。The first electrode partitioning member may support the negative electrode frame even without using a discharge port.

在一實施例中,電解研磨裝置可以包括所述電極框架。In an embodiment, the electrolytic polishing apparatus may include the electrode frame.

(發明的效果)(Effect of the invention)

在一實施例中,通過對可以利用在電解研磨物件上形成的凸出部來支撐負極框架的電極放置構件進行配置,從而具有即使在沒有放出口的區域的電解研磨物件上,也可以有效安裝負極框架的效果。In an embodiment, the electrode placement member that supports the negative electrode frame can be configured by using the projection formed on the electrolytically polished article, thereby having an effective installation even on the electrolytic abrasive article in the region where the discharge port is not provided. The effect of the negative frame.

另外,在一實施例中,在對相同的製品進行電解研磨時,可以將已經組裝的負極框架組裝於電極放置構件進行研磨,因而具有可以縮短負極框架安裝及拆卸所需時間及研磨時間的效果。In addition, in an embodiment, when the same product is subjected to electrolytic polishing, the assembled negative electrode frame can be assembled to the electrode placement member for polishing, thereby having the effect of shortening the time required for mounting and dismounting the negative electrode frame and the polishing time. .

另外,在一實施例中,具有的效果是,即使電解研磨物件的底部或側壁部中某一者沒有凸出部,也可以在電解研磨物件的全體研磨面容易地安裝負極框架。Further, in one embodiment, there is an effect that the negative electrode frame can be easily attached to the entire polished surface of the electrolytically polished article even if one of the bottom portion or the side wall portion of the electrolytically polished article has no projection.

另外,在一實施例中,通過在電極放置構件上配置負極框架托架,從而具有可以提高負極框架的結合位置的自由度、有效安裝電極框架的效果。Further, in one embodiment, by arranging the negative electrode frame holder on the electrode placing member, there is an effect that the degree of freedom of the bonding position of the negative electrode frame can be improved and the electrode frame can be efficiently mounted.

另外,在一實施例中,夾具還形成絕緣部,從而具有可以在負極框架與電解研磨物件之間的狹小空間可以容易地安裝的效果。Further, in an embodiment, the jig further forms an insulating portion so as to have an effect that a narrow space between the negative electrode frame and the electroabrasive article can be easily mounted.

另外,在一實施例中,通過在負極框架一側配置電極隔開構件,使負極框架配置於電解研磨物件上,從而可以將負極框架有效地配置於沒有另外的托架的電解研磨物件的內部或外部,因而可以將負極框架迅速配置於電解研磨物件,可以在提高電解研磨的工序效率的同時接近且均一地配置,電解研磨的品質可以顯著提高。Further, in an embodiment, by disposing the electrode partitioning member on the negative electrode frame side and arranging the negative electrode frame on the electrolytically polished article, the negative electrode frame can be efficiently disposed inside the electrolytically polished article without the additional bracket. Alternatively, the negative electrode frame can be quickly disposed on the electrolytically polished article, and the efficiency of the electrolytic polishing process can be improved and uniformly arranged, and the quality of the electrolytic polishing can be remarkably improved.

另外,在一實施例中,逐漸減小地形成電極隔開構件的下部寬度,插入結合於在電解研磨物件的底部形成的槽或孔,從而具有能夠更有效地固定負極框架的效果。Further, in an embodiment, the lower width of the electrode partitioning member is gradually reduced, and the groove or the hole formed in the bottom of the electrolytically polished article is inserted, thereby having an effect of being able to more effectively fix the negative electrode frame.

在一實施例中,通過使電極隔開構件配置於電解研磨物件的側壁部上部,從而具有在使負極框架從電解研磨物件的底部隔開的同時可以穩定地支撐負極框架的效果。In one embodiment, by disposing the electrode partitioning member on the upper portion of the side wall portion of the electroabrasive article, there is an effect that the negative electrode frame can be stably supported while being spaced from the bottom of the electroabrasive article.

另外,在一實施例中,通過使電極隔開構件不與電解研磨物件的底部接觸地配置,從而具有能夠防止因電極隔開構件與電解研磨物件接觸導致的損傷的效果。Further, in an embodiment, by arranging the electrode separating member not in contact with the bottom of the electrolytic abrasive article, there is an effect that damage due to contact of the electrode separating member with the electrolytic abrasive article can be prevented.

另外,在一實施例中,通過利用支架,從而具有可以將負極框架有效安裝於電解研磨物件的內側及外側的效果。Further, in one embodiment, by using the bracket, there is an effect that the negative electrode frame can be efficiently attached to the inner side and the outer side of the electrolytically polished article.

下面參閱圖式,詳細說明實施例。The embodiments will be described in detail below with reference to the drawings.

圖1是顯示第一實施例的電解研磨裝置的分解立體圖,圖2是顯示第一實施例的電解研磨裝置的結合立體圖,圖3是顯示第一實施例的電解研磨裝置的電極框架結合的狀態的結合立體圖,圖4a及圖4b分別是顯示第一實施例的電解研磨裝置的夾具的立體圖,圖5是顯示第一實施例的電解研磨裝置的負極框架的變形例的立體圖。1 is an exploded perspective view showing the electrolytic polishing apparatus of the first embodiment, FIG. 2 is a perspective view showing the electrolytic polishing apparatus of the first embodiment, and FIG. 3 is a view showing the state of electrode frame bonding of the electrolytic polishing apparatus of the first embodiment. 4a and 4b are respectively a perspective view showing a jig of the electrolytic polishing apparatus of the first embodiment, and Fig. 5 is a perspective view showing a modification of the negative electrode frame of the electrolytic polishing apparatus of the first embodiment.

在實施例中,電極框架可以包括負極框架,但並非限定於此。In an embodiment, the electrode frame may include a negative electrode frame, but is not limited thereto.

如圖1及圖2所示,第一實施例的電解研磨用電極框架作為在內部配備有容納電解研磨物件200和電解液的容納空間的電解槽100中使用的電解研磨用電極框架,可以包括:多個電極放置構件400,其結合於所述電解研磨物件200的至少一個以上的凸出部210;負極框架300,其以格子結構形成,至少一個以上的一側與所述多個電極放置構件400結合,與所述電解研磨物件200的研磨面隔開既定間隔配置。As shown in FIG. 1 and FIG. 2, the electrode frame for electrolytic polishing of the first embodiment can be included as an electrode frame for electrolytic polishing used in the electrolytic cell 100 equipped with an accommodation space for accommodating the electrolytic abrasive article 200 and the electrolytic solution. a plurality of electrode placement members 400 coupled to at least one of the protrusions 210 of the electrolytic abrasive article 200; a negative electrode frame 300 formed in a lattice structure with at least one side and the plurality of electrodes placed The members 400 are coupled to each other at a predetermined interval from the polishing surface of the electrolytic abrasive article 200.

另外,第一實施例的電解研磨裝置可以包括:電解槽100,其在內部配備有容納在研磨面形成有既定形狀的凸出部210的電解研磨物件200和電解液的容納空間;多個電極放置構件400,其結合於所述電解研磨物件200的至少一個以上的凸出部;負極框架300,其以格子結構形成,至少一個以上的格子結構的一側與所述多個電極放置構件400結合,與所述電解研磨物件200的研磨面隔開既定間隔配置。In addition, the electrolytic polishing apparatus of the first embodiment may include an electrolytic cell 100 equipped internally with an accommodating space for the electrolytic abrasive article 200 and the electrolytic solution that accommodates the projections 210 having a predetermined shape formed on the polishing surface; a placement member 400 coupled to at least one of the protrusions of the electrolytic abrasive article 200; a negative electrode frame 300 formed in a lattice structure, one side of the at least one lattice structure and the plurality of electrode placement members 400 The bonding is arranged at a predetermined interval from the polishing surface of the electrolytic abrasive article 200.

在圖1中,圖示了凸出部210在電解研磨物件200的上側形成的示例,但並非限定於此,也可以在電解研磨物件200的側面或下面形成。In FIG. 1, an example in which the protruding portion 210 is formed on the upper side of the electrolytically polished article 200 is illustrated, but the invention is not limited thereto, and may be formed on the side surface or the lower surface of the electrolytically polished article 200.

電解槽100可以以在內部配備有容納空間的箱形狀形成。電解槽100可以包括圓筒形、多邊箱或環形狀,但其形狀並不限定。The electrolytic cell 100 may be formed in a box shape in which an accommodation space is provided inside. The electrolytic cell 100 may include a cylindrical shape, a polygonal box or a ring shape, but its shape is not limited.

在電解槽100的內部可以填充有電解液。作為電解液,可以將從由蒸餾水(H2 O)、硫酸(H2 SO4 )類、磷酸(H3 PO4 )類、鉻酸類、硝酸鈉(NaNO3 )、氯化鈉(NaCl)、甘油類構成的組中選擇的至少一種物質混合構成,但並不限定於此。An electrolyte may be filled inside the electrolytic cell 100. As the electrolyte, it may be distilled water (H 2 O), sulfuric acid (H 2 SO 4 ), phosphoric acid (H 3 PO 4 ), chromic acid, sodium nitrate (NaNO 3 ), sodium chloride (NaCl), At least one selected from the group consisting of glycerol is mixed, but is not limited thereto.

電解液可以在填充於電解槽100的狀態下,在結束電解研磨物件200的電解研磨後更換。不同於此,電解液可以借助於在電解槽100的一側獨立地形成的泵而流入、流出。在電解槽100與泵之間,可以形成有電解液流入管、電解液流出管,可以還包括電解液流量調節部、篩檢程式。篩檢程式可以過濾電解液中包含的加工物渣滓及異物質。The electrolytic solution can be replaced after the electrolytic polishing of the electrolytically polished article 200 is completed in a state of being filled in the electrolytic cell 100. Unlike this, the electrolyte can flow in and out by means of a pump that is independently formed on one side of the electrolytic cell 100. An electrolyte inflow pipe and an electrolyte outflow pipe may be formed between the electrolytic cell 100 and the pump, and may further include an electrolyte flow rate adjusting unit and a screening program. The screening program filters the residue and foreign matter contained in the electrolyte.

在電解槽100的內部可以容納電解研磨物件200。電解槽100的大小可以大於電解研磨物件200地形成。電解研磨物件200可以為多邊形的板狀,但並不限定於此。電解研磨物件200可以為多邊形或圓筒形的腔室或箱子。電解研磨物件200可以是用於OLED製造的腔室。另一方面,在電解研磨物件200為OLED用腔室或LED用MOCVD腔室等的情況下,也存在其重量為數百kg到數千kg(數噸)的巨大的情形。The electrolytic abrasive article 200 can be housed inside the electrolytic cell 100. The electrolytic cell 100 may be sized larger than the electrolytically polished article 200. The electrolytically polished article 200 may have a polygonal plate shape, but is not limited thereto. The electroabrasive article 200 can be a polygonal or cylindrical chamber or box. Electrolytic abrasive article 200 can be a chamber for OLED fabrication. On the other hand, in the case where the electrolytically polished article 200 is a chamber for an OLED or an MOCVD chamber for an LED or the like, there is also a case where the weight is in the range of several hundred kg to several thousand kg (several tons).

另外,電解研磨物件200也可以是OLED腔室的一部分構成部件。電解研磨物件200可以為板、箱形狀或上下貫通形成的環形狀。In addition, the electrolytically polished article 200 may also be part of a component of the OLED chamber. The electrolytically polished article 200 may have a ring shape formed by a plate, a box shape, or a top and bottom.

電解研磨物件200並不限定於此,可以將所有金屬材質製品指定為電解研磨物件。電解研磨物件200浸於電解液110內。電解研磨物件200的研磨面可以包括電解研磨物件200的所有表面。The electrolytically polished article 200 is not limited thereto, and all metal materials can be designated as electrolytically polished articles. The electrolytically polished article 200 is immersed in the electrolyte 110. The abrasive surface of the electrolithically abrasive article 200 can include all surfaces of the electroabrasive article 200.

在電解槽100的一側可以還配置有整流器。整流器可以向電解研磨物件200接入正極(+)電壓,可以向負極框架300接入負極(-)電壓。整流器借助於電線等而可以向電解研磨物件200接入電。A rectifier may also be disposed on one side of the electrolytic cell 100. The rectifier can be connected to the positive (+) voltage to the electrolytically polished article 200, and the negative (-) voltage can be applied to the negative electrode frame 300. The rectifier can be electrically connected to the electro-grinding article 200 by means of a wire or the like.

負極框架300可以配置於電解研磨物件200的研磨面的一側。負極框架300可以與電解研磨物件200的研磨面隔開既定間隔均一地配置。例如,負極框架300與電解研磨物件200按50mm±20mm距離均一地隔開配置,因而電解研磨效率提高,電解研磨品質非常優秀。The negative electrode frame 300 may be disposed on one side of the polished surface of the electrolytically polished article 200. The negative electrode frame 300 may be disposed uniformly spaced apart from the polishing surface of the electrolytic abrasive article 200 at a predetermined interval. For example, the negative electrode frame 300 and the electrolytically polished article 200 are uniformly spaced apart by a distance of 50 mm ± 20 mm, so that the electrolytic polishing efficiency is improved, and the electrolytic polishing quality is excellent.

負極框架300可以包括格子結構的板形狀。負極框架300也可是導電率及耐酸性卓越的不銹鋼材料,但並不限定於此。負極框架300可以為條(bar)形狀、L字形狀、角形狀、棒形狀、圓形狀、線網形狀、孔板形狀的板。The negative electrode frame 300 may include a plate shape of a lattice structure. The negative electrode frame 300 may be a stainless steel material excellent in electrical conductivity and acid resistance, but is not limited thereto. The negative electrode frame 300 may be a bar shape, an L shape, an angular shape, a rod shape, a circular shape, a wire mesh shape, or an orifice plate shape.

負極框架300可以包括第一負極板310和第二負極板330。第一負極板310和第二負極板330可以配置得構成格子結構。第一負極板310可以以條(bar)形狀、L字形狀、角形狀、棒形狀、圓形狀、線網形狀、孔板金屬形狀形成,但並不限定於此。第一負極板310可以由多個板構成,構成得相互隔開配置。The negative electrode frame 300 may include a first negative electrode plate 310 and a second negative electrode plate 330. The first negative electrode plate 310 and the second negative electrode plate 330 may be configured to constitute a lattice structure. The first negative electrode plate 310 may be formed in a bar shape, an L shape, an angular shape, a rod shape, a circular shape, a wire mesh shape, or an orifice metal shape, but is not limited thereto. The first negative electrode plate 310 may be composed of a plurality of plates and configured to be spaced apart from each other.

第二負極板330可以與第一負極板310的形狀相同地形成,但並不限定於此。第二負極板330可以由多個板構成,配置得相互隔開。第一負極板310和第二負極板330可以配置得構成90度,但並不限定於此。The second negative electrode plate 330 may be formed in the same shape as the first negative electrode plate 310, but is not limited thereto. The second negative electrode plate 330 may be composed of a plurality of plates and arranged to be spaced apart from each other. The first negative electrode plate 310 and the second negative electrode plate 330 may be disposed to form 90 degrees, but are not limited thereto.

第一負極板310與第二負極板330交叉的區域,可以通過包括鉚釘(Rivet)、螺栓(Bolt)或焊接等的通常的組裝裝置而結合。不同於此,第一負極板310與第二負極板330交叉的區域,也可以借助於C型夾具而固定。The region where the first negative electrode plate 310 and the second negative electrode plate 330 intersect may be combined by a general assembly device including a rivet (Rivet), a bolt (Bolt), or welding. Unlike this, the region where the first negative electrode plate 310 and the second negative electrode plate 330 intersect may be fixed by means of a C-shaped jig.

上面對負極框架300具有固定長度的結構進行了說明,但可以使用使負極框架300大小隨著電解研磨物件200增大而可變的可變結構的負極框架300。Although the structure in which the negative electrode frame 300 has a fixed length has been described above, a negative electrode frame 300 having a variable structure in which the size of the negative electrode frame 300 is increased as the electrolytically polished article 200 is increased may be used.

如圖5所示,負極框架300可以包括第一負極板310和第二負極板330。第一負極板310和第二負極板330可以配置得構成格子結構。As shown in FIG. 5, the negative electrode frame 300 may include a first negative electrode plate 310 and a second negative electrode plate 330. The first negative electrode plate 310 and the second negative electrode plate 330 may be configured to constitute a lattice structure.

第一負極板310可以由多個支架構成,可以以其長度能夠變長或減小的方式構成。第二負極板330的結構可以與第一負極板310的結構相同。下面,以第一負極板310的結構為中心進行說明。The first negative electrode plate 310 may be composed of a plurality of brackets, and may be configured in such a manner that its length can be lengthened or reduced. The structure of the second negative electrode plate 330 may be the same as that of the first negative electrode plate 310. Hereinafter, description will be given focusing on the structure of the first negative electrode plate 310.

第一負極板310可以構成得使多個支架連接。第一負極板310可以一部分重疊地配置,向相互遠離或靠近的方向移動。第一負極板310可以由3個以上支架構成,但出於說明的便利,以第一負極板310由第一支架312和與所述第一支架312連接的第二支架314構成的結構為中心進行說明。The first negative electrode plate 310 may be configured to connect a plurality of brackets. The first negative electrode plates 310 may be partially overlapped and moved in directions away from or close to each other. The first negative electrode plate 310 may be composed of three or more brackets, but for the convenience of explanation, the structure in which the first negative electrode plate 310 is constituted by the first bracket 312 and the second bracket 314 connected to the first bracket 312 is centered Be explained.

第一支架312可以為L字形狀,但並不限定於此。第一支架312的一部分區域可以與第二支架314的一部分區域重疊形成。第一支架312與第二支架314的重疊的區域可以借助於C型夾具500而支撐,在這種重疊的區域配置的C型夾具500可以稱為第三夾具。The first bracket 312 may have an L shape, but is not limited thereto. A portion of the first bracket 312 may be formed to overlap a portion of the second bracket 314. The overlapping area of the first bracket 312 and the second bracket 314 may be supported by means of the C-clamp 500, and the C-clamp 500 disposed in such overlapping regions may be referred to as a third jig.

第一支架312與第二支架314可以沿相互遠離或靠近的方向移動。C型夾具500可以以第一支架312與第二支架314可以相互移動的程度的力,支撐第一支架312和第二支架314。不同於此,C型夾具400可以在使第一支架312和第二支架314移動後,進一步施加固定力,支撐第一支架312和第二支架314。The first bracket 312 and the second bracket 314 can move in a direction away from or close to each other. The C-clamp 500 can support the first bracket 312 and the second bracket 314 with a force to which the first bracket 312 and the second bracket 314 can move relative to each other. Unlike this, the C-clamp 400 may further apply a fixing force to support the first bracket 312 and the second bracket 314 after moving the first bracket 312 and the second bracket 314.

第二負極板330可以與第一負極板310相同地包括第一支架332和第二支架334。第二負極板330可以桿形狀的板形成,但並不限定於此。第二負極板330的第一支架332可以沿從第二支架334遠離或靠近的方向移動。The second negative electrode plate 330 may include the first bracket 332 and the second bracket 334 as the first negative electrode plate 310. The second negative electrode plate 330 may be formed of a rod-shaped plate, but is not limited thereto. The first bracket 332 of the second negative plate 330 may move in a direction away from or close to the second bracket 334.

第二負極板330的第一支架332和第二支架334可以一部分重疊地配置。第二負極板330的第一支架332與第二支架334的重疊的區域,可以借助於C型夾具500而支撐。因此,第二負極板330長度可變。The first bracket 332 and the second bracket 334 of the second negative plate 330 may be partially overlapped. The overlapping area of the first bracket 332 and the second bracket 334 of the second negative plate 330 can be supported by means of the C-clamp 500. Therefore, the second negative electrode plate 330 has a variable length.

返回圖1,負極框架300如果與正極的電解研磨物件200接觸,則發生短路。為了防止這種情況,負極框架300應構成得與電解研磨物件200的研磨面隔開。Returning to Fig. 1, when the negative electrode frame 300 comes into contact with the electrolytically polished article 200 of the positive electrode, a short circuit occurs. In order to prevent this, the negative electrode frame 300 should be configured to be spaced apart from the abrasive surface of the electrolytic abrasive article 200.

以往,使負極框架300固定於在電解研磨物件200上形成的放出口,但在本實施例中,當在電解研磨物件200上無放出口時,為了安裝負極框架300而可以配備有電極放置構件400。Conventionally, the negative electrode frame 300 is fixed to a discharge port formed on the electrolytically polished article 200. However, in the present embodiment, when there is no discharge port on the electrolytically polished article 200, an electrode placement member may be provided for mounting the negative electrode frame 300. 400.

電極放置構件400可以包括L字形狀、條(bar)形狀、角形狀、棒形狀,但並不限定於此。The electrode placement member 400 may include an L shape, a bar shape, an angular shape, and a rod shape, but is not limited thereto.

電極放置構件400可以結合於電解研磨物件200的一側。例如,電極放置構件400可以結合於在電解研磨物件200上形成的加強肋(Rib)而形成。電極放置構件400可以配置有多個。通常而言,在電解研磨物件200上,可以形成有諸如加強肋、邊緣等的凸出部210。在本實施例中,提出了利用在電解研磨物件200上形成的凸出部210來安裝負極框架300的結構。The electrode placement member 400 may be coupled to one side of the electrolytic abrasive article 200. For example, the electrode placement member 400 may be formed in combination with a reinforcing rib (Rib) formed on the electrolytic abrasive article 200. The electrode placement member 400 may be configured in plurality. Generally, on the electro-grinding article 200, protrusions 210 such as reinforcing ribs, edges, and the like may be formed. In the present embodiment, a structure in which the negative electrode frame 300 is mounted by the projection 210 formed on the electrolytically polished article 200 is proposed.

如圖3所示,電極放置構件400可以與電解研磨物件200的研磨面垂直地配置。在電極放置構件400的一側結合有負極框架300,負極框架300可以與電解研磨物件200的研磨面隔開配置。As shown in FIG. 3, the electrode placement member 400 may be disposed perpendicular to the polishing surface of the electrolytic abrasive article 200. A negative electrode frame 300 is coupled to one side of the electrode placement member 400, and the negative electrode frame 300 may be disposed apart from the polishing surface of the electrolytic abrasive article 200.

電極放置構件400可以以導電性物質形成。電極放置構件400可以為耐酸性強的鋼板、鋁或不銹鋼材料。電極放置構件400由於固定於正極的電解研磨物件200的凸出部2100,因而可以帶正極電荷。因此,如果具有負極的負極框架300結合於電極放置構件400的一側,則會在電極放置構件400與負極框架300之間發生電性短路。The electrode placement member 400 may be formed of a conductive substance. The electrode placement member 400 may be an acid resistant steel plate, aluminum or stainless steel material. The electrode placement member 400 can be positively charged by the projection 2100 of the electrolytically polished article 200 fixed to the positive electrode. Therefore, if the negative electrode frame 300 having the negative electrode is bonded to one side of the electrode placement member 400, an electrical short circuit occurs between the electrode placement member 400 and the negative electrode frame 300.

為了防止這種情況,在電極放置構件400與負極框架300之間,可以還配置有絕緣構件700。絕緣構件700可以包括PVC、橡膠、聚氨酯橡膠、電木中某一者。絕緣構件700可以大於負極框架300寬度地形成,但並不限定於此。In order to prevent this, an insulating member 700 may be further disposed between the electrode placement member 400 and the negative electrode frame 300. The insulating member 700 may include any one of PVC, rubber, urethane rubber, and bakelite. The insulating member 700 may be formed wider than the negative electrode frame 300, but is not limited thereto.

另一方面,電極放置構件400可以由絕緣物質形成。如果以絕緣物質形成電極放置構件400,則在電極放置構件400與負極框架300之間配置的絕緣構件700可以去除。On the other hand, the electrode placement member 400 may be formed of an insulating material. If the electrode placement member 400 is formed of an insulating substance, the insulating member 700 disposed between the electrode placement member 400 and the negative electrode frame 300 can be removed.

電極放置構件400可以包括第一面410和第二面430。電極放置構件400的第二面430可以從電極放置構件400的第一面410折彎既定角度形成。在本實施例中,電極放置構件400的第一面410與電極放置構件400的第二面430構成的角度θ1可以包括90度,但並不限定於此。The electrode placement member 400 can include a first face 410 and a second face 430. The second face 430 of the electrode placement member 400 may be formed by bending a first face 410 of the electrode placement member 400 at a predetermined angle. In the present embodiment, the angle θ1 formed by the first face 410 of the electrode placement member 400 and the second face 430 of the electrode placement member 400 may include 90 degrees, but is not limited thereto.

電極放置構件400的第一面410可以與電解研磨物件200的凸出部210的一側結合。電極放置構件400的第一面410可以在重疊配置於電解研磨物件的凸出部210的狀態下,借助於C型夾具500而固定。配置於所述第一面410的C型夾具500可以稱為第一夾具,配置於所述第二面430的C型夾具500可以稱為第二夾具。The first face 410 of the electrode placement member 400 may be coupled to one side of the projection 210 of the electrolytic abrasive article 200. The first surface 410 of the electrode placement member 400 may be fixed by means of the C-clamp 500 in a state of being overlapped and disposed on the projection 210 of the electrolytically polished article. The C-clamp 500 disposed on the first face 410 may be referred to as a first jig, and the C-clamp 500 disposed on the second face 430 may be referred to as a second jig.

C型夾具500可以包括相向配置的固定部510。固定部510可以配置於重疊配置的電極放置構件400的一側與凸出部210的另一側,使電極放置構件400穩定地固定於凸出部210。C型夾具500可以以耐酸性優秀的不銹鋼材料形成。不同於此,C型夾具500可以以絕緣部520形成固定部510一側。C型夾具500由於不使負極框架300與電極放置構件400永久地固定,因而如果使用C型夾具500,則使得可以容易地安裝及分離負極框架300與電極放置構件400。即,電極放置構件400的安裝位置會因電解研磨物件200的形狀而異,因而C型夾具500可以容易地變更結合於負極框架300的電極放置構件400的安裝位置。The C-clamp 500 may include a fixing portion 510 that is disposed opposite to each other. The fixing portion 510 may be disposed on one side of the electrode placement member 400 that is disposed to overlap and the other side of the protrusion portion 210, and the electrode placement member 400 is stably fixed to the protrusion portion 210. The C-clamp 500 can be formed of a stainless steel material excellent in acid resistance. Unlike the C-shaped jig 500, the fixing portion 510 side may be formed by the insulating portion 520. Since the C-type jig 500 does not permanently fix the negative electrode frame 300 and the electrode placement member 400, if the C-type jig 500 is used, the negative electrode frame 300 and the electrode placement member 400 can be easily mounted and separated. That is, since the mounting position of the electrode placement member 400 differs depending on the shape of the electrolytic abrasive article 200, the C-clamp 500 can easily change the mounting position of the electrode placement member 400 bonded to the negative electrode frame 300.

另一方面,C型夾具500以導電性材質形成,因而安裝於負極框架300與電解研磨物件200之間窄小空間的C型夾具500與電解研磨物件200接觸,在負極框架300與電解研磨物件200之間會發生電性短路。On the other hand, since the C-clamp 500 is formed of a conductive material, the C-clamp 500 attached to the narrow space between the negative electrode frame 300 and the electrolytically polished article 200 is in contact with the electro-grinding object 200, and the negative electrode frame 300 and the electro-polished object are electropolished. An electrical short circuit will occur between 200s.

為了防止這種情況,如圖4a及圖4b所示,在固定負極框架300與電極放置構件400的固定部510的一側,可以還形成有絕緣部520。其中,固定部510可以分別配置於第一主體540和第二主體550的一側。第二主體550可以以C字形狀形成,與第一主體540結合。第一主體540可以結合於第二主體550並上下移動。因此,相向配置於第一主體540與第二主體550的固定部510,可以沿相互靠近方向或遠離方向移動。In order to prevent this, as shown in FIGS. 4a and 4b, an insulating portion 520 may be further formed on one side of the fixing portion 510 where the negative electrode frame 300 and the electrode placing member 400 are fixed. The fixing portions 510 may be disposed on one side of the first body 540 and the second body 550, respectively. The second body 550 may be formed in a C shape in combination with the first body 540. The first body 540 can be coupled to the second body 550 and moved up and down. Therefore, the fixing portions 510 disposed to face the first body 540 and the second body 550 may be moved in a direction close to each other or away from each other.

絕緣部520可以在固定部510的一側形成,與負極框架300及電極放置構件400接觸。因此,C型夾具500即使與電解研磨物件200的一側接觸,也可以在電解研磨物件200與負極框架300之間防止電性短路。絕緣部520可以包括具有彈性的材質。絕緣部520可以包括PVC、橡膠、聚氨酯橡膠、電木等,但並不限定於此。The insulating portion 520 may be formed on one side of the fixing portion 510 and in contact with the negative electrode frame 300 and the electrode placement member 400. Therefore, even if the C-type jig 500 is in contact with one side of the electrolytically polished article 200, an electrical short can be prevented between the electrolytically polished article 200 and the negative electrode frame 300. The insulating portion 520 may include a material having elasticity. The insulating portion 520 may include PVC, rubber, urethane rubber, bakelite, or the like, but is not limited thereto.

另外,C字形狀的第二主體550的一部分可以與電解研磨物件200或負極板的一側接觸。為了防止這種情況,可以在第二主體550的表面還包括絕緣膜550b。第二主體550的內部為了保持剛性而可以由導電性物質550a構成,可以在第二主體550的外側面塗布形成有絕緣膜550b。In addition, a portion of the C-shaped second body 550 may be in contact with one side of the electrolytically polished article 200 or the negative electrode plate. In order to prevent this, an insulating film 550b may be further included on the surface of the second body 550. The inside of the second body 550 may be made of a conductive material 550a in order to maintain rigidity, and an insulating film 550b may be formed on the outer surface of the second body 550.

另外,在C型夾具500上,為了使相互結合的框架的固定力最大化,還可以形成有凸部530。凸部530具有能夠防止C型夾具500例如從負極框架300打滑、防止C型夾具500從負極框架300脫離的效果。Further, on the C-clamp 500, a convex portion 530 may be formed in order to maximize the fixing force of the frames joined to each other. The convex portion 530 has an effect of preventing the C-clamp 500 from slipping from the negative electrode frame 300, for example, and preventing the C-clamp 500 from being detached from the negative electrode frame 300.

上面雖然是在C型夾具500的固定部510的一側形成絕緣部520,但可以以絕緣材質形成固定部520,去除絕緣部520。Although the insulating portion 520 is formed on one side of the fixing portion 510 of the C-shaped jig 500, the fixing portion 520 may be formed of an insulating material to remove the insulating portion 520.

返回圖3,電極放置構件400的第二面430可以與第一負極板310的一側結合。第一負極板310可以與電極放置構件400垂直地結合。第一負極板310可以與電解研磨物件200的研磨面水準地配置。其中,第一負極板310可以包括第一面312和第二面314。第一負極板310的第二面314可以從第一面312折彎形成。第一負極板310的第一面312與第二面314之間的角度θ2可以為90度,但並不限定於此。電極放置構件410的第二面430可以固定於第一負極板310的第一面312。電極放置構件400的第二面430可以在與第一負極板310的第一面312重疊的狀態下,借助於C型夾具500而固定。Returning to FIG. 3, the second face 430 of the electrode placement member 400 may be coupled to one side of the first negative electrode plate 310. The first negative electrode plate 310 may be vertically coupled to the electrode placement member 400. The first negative electrode plate 310 may be disposed at a level with the polishing surface of the electrolytic abrasive article 200. The first negative plate 310 may include a first surface 312 and a second surface 314. The second face 314 of the first negative plate 310 may be formed by being bent from the first face 312. The angle θ2 between the first surface 312 and the second surface 314 of the first negative electrode plate 310 may be 90 degrees, but is not limited thereto. The second face 430 of the electrode placement member 410 may be fixed to the first face 312 of the first negative plate 310. The second face 430 of the electrode placement member 400 may be fixed by means of the C-type jig 500 in a state of being overlapped with the first face 312 of the first negative electrode plate 310.

電極放置構件400包括與凸出部210結合的第一面410和與第一負極板310結合的第二面430,從而具有能夠使凸出部210與負極框架300在窄小空間中有效結合的效果。The electrode placement member 400 includes a first face 410 coupled to the projection 210 and a second face 430 coupled to the first negative plate 310 to have an effective combination of the projection 210 and the negative electrode frame 300 in a narrow space. effect.

第一實施例的電解研磨用電極框架及包括其的電解研磨裝置通過利用在電解研磨物件200上形成的凸出部210,從而具有可以將負極框架300有效安裝於沒有放置區域的電解研磨物件200的效果。The electrode frame for electrolytic polishing of the first embodiment and the electrolytic polishing apparatus including the same have the use of the projection 210 formed on the electrolytically polished article 200, thereby having the electrolytic abrasive article 200 in which the negative electrode frame 300 can be efficiently mounted to the unplaced region. Effect.

請再參閱圖1及圖2,分別提供電解研磨物件200的電解研磨過程,首先,可以利用C型夾具500,將電極放置構件400安裝於在電解研磨物件200一側形成的凸出部210。此時,電極放置構件400可以以能夠均衡地支撐負極框架300的方式安裝於多個凸出部210。Referring to FIGS. 1 and 2, respectively, an electrolytic polishing process of the electrolytically polished article 200 is provided. First, the electrode placement member 400 can be attached to the projection 210 formed on the side of the electrolytically polished article 200 by the C-clamp 500. At this time, the electrode placement member 400 may be attached to the plurality of protrusions 210 in such a manner as to support the negative electrode frame 300 in a balanced manner.

接著,可以在電極放置構件400的一側安裝負極框架300。負極框架300可以在與電極放置構件400的一側結合的狀態下,安裝成格子形狀。不同於此,如果具有針對相同的製品執行電解研磨的經驗,已經是負極框架300組裝成格子形狀的狀態,則可以將格子形狀的負極框架300輕鬆地放置於電極放置構件400的一側。Next, the negative electrode frame 300 may be attached to one side of the electrode placement member 400. The negative electrode frame 300 may be mounted in a lattice shape in a state of being coupled to one side of the electrode placement member 400. Unlike this, if the experience of performing electrolytic polishing for the same product has already been in a state in which the negative electrode frame 300 is assembled into a lattice shape, the lattice-shaped negative electrode frame 300 can be easily placed on one side of the electrode placement member 400.

結束電解研磨物件200的研磨面的電解研磨後,將C型夾具500分離,可以將負極框架300從電極放置構件400去除。接著,如果使電極放置構件400從電解研磨物件200分離,則可以結束電解研磨的所有步驟。After the electrolytic polishing of the polished surface of the electrolytically polished article 200 is completed, the C-clamp 500 is separated, and the negative electrode frame 300 can be removed from the electrode placement member 400. Next, if the electrode placement member 400 is separated from the electrolytic abrasive article 200, all the steps of the electrolytic polishing can be ended.

然後,如果對相同的製品進行電解研磨,則按與前面說明順序的倒序進行組裝,負極安裝在短時間結束,具有可以縮短組裝時間及研磨時間的效果。Then, if the same product is subjected to electrolytic polishing, it is assembled in reverse order from the above-described order, and the negative electrode is mounted in a short time, which has an effect of shortening the assembly time and the polishing time.

圖6是顯示第一實施例的變形例的電解研磨裝置的立體圖。Fig. 6 is a perspective view showing an electrolytic polishing apparatus according to a modification of the first embodiment.

如圖6所示,第一實施例的電解研磨裝置可以包括:電解槽100,其在內部配備有容納形成有既定形狀的凸出部210的電解研磨物件200和電解液的容納空間;多個電極放置構件400,其結合於所述電解研磨物件200的至少一個以上的凸出部210;負極框架300,其以格子結構形成,至少一個以上的格子架構的一側與所述多個電極放置構件400結合,與所述電解研磨物件200的研磨面隔開既定間隔配置。As shown in FIG. 6, the electrolytic polishing apparatus of the first embodiment may include an electrolytic cell 100 which is internally provided with an accommodating space for accommodating the electrolytic abrasive article 200 and the electrolytic solution in which the projections 210 having a predetermined shape are formed; An electrode placement member 400 coupled to at least one of the protrusions 210 of the electrolytic abrasive article 200; a negative electrode frame 300 formed in a lattice structure with one side of the at least one lattice structure and the plurality of electrodes placed The members 400 are coupled to each other at a predetermined interval from the polishing surface of the electrolytic abrasive article 200.

電解槽100可以以在內部配備有容納空間的箱形狀形成。在電解槽100的內部可以填充有電解液。在電解槽100的內部可以容納電解研磨物件200。The electrolytic cell 100 may be formed in a box shape in which an accommodation space is provided inside. An electrolyte may be filled inside the electrolytic cell 100. The electrolytic abrasive article 200 can be housed inside the electrolytic cell 100.

電解研磨物件200可以包括底部200a和側壁部200b。在圖式中雖然圖示了形成有1個側壁部200b的情形,但並不限定於此,可以沿著底部200a的側面而形成有多個側壁部200b。因此,電解研磨物件200可以包括箱形狀。The electroabrasive article 200 can include a bottom portion 200a and a sidewall portion 200b. In the drawings, the case where one side wall portion 200b is formed is illustrated, but the present invention is not limited thereto, and a plurality of side wall portions 200b may be formed along the side surface of the bottom portion 200a. Therefore, the electrolytic abrasive article 200 may include a box shape.

負極框架300可以包括格子結構的板形狀。負極框架300也可是導電率及耐酸性卓越的不銹鋼材料,但並不限定於此。負極框架300可以是條(bar)形狀、L字形狀、角形狀、棒形狀、圓形狀、線網、孔板形狀的板。負極框架300可以包括第一負極框架300a和第二負極框架300b。The negative electrode frame 300 may include a plate shape of a lattice structure. The negative electrode frame 300 may be a stainless steel material excellent in electrical conductivity and acid resistance, but is not limited thereto. The negative electrode frame 300 may be a bar shape, an L shape, an angular shape, a rod shape, a circular shape, a wire mesh, or an orifice plate shape. The negative electrode frame 300 may include a first negative electrode frame 300a and a second negative electrode frame 300b.

第一負極框架300a可以對電解研磨物件200的底部進行電解研磨。第一負極框架300a可以與電解研磨物件200的底面隔開配置。第二負極框架300b可以對電解研磨物件200的側壁部進行電解研磨。第二負極框架300b可以與電解研磨物件200的內側面隔開配置。The first negative electrode frame 300a may perform electrolytic polishing of the bottom of the electrolytic abrasive article 200. The first negative electrode frame 300a may be disposed apart from the bottom surface of the electrolytic abrasive article 200. The second negative electrode frame 300b can perform electrolytic polishing on the side wall portion of the electrolytic abrasive article 200. The second negative electrode frame 300b may be disposed apart from the inner side surface of the electrolytic abrasive article 200.

第一負極框架300a可以包括多個第一負極板310a和多個第二負極板330a。第一負極板310a與第二負極板330a可以配置得構成格子結構。第一負極板310a與第二負極板330a可以配備得構成90度,但並不限定於此。第二負極框架300b的構成與第一負極框架300a的構成相同,因而省略其說明。The first negative electrode frame 300a may include a plurality of first negative electrode plates 310a and a plurality of second negative electrode plates 330a. The first negative electrode plate 310a and the second negative electrode plate 330a may be disposed to form a lattice structure. The first negative electrode plate 310a and the second negative electrode plate 330a may be provided to constitute 90 degrees, but are not limited thereto. The configuration of the second negative electrode frame 300b is the same as that of the first negative electrode frame 300a, and thus the description thereof will be omitted.

負極框架300如果與正極的電解研磨物件200接觸,則發生短路。為了防止這種情況,負極框架300應構成得與電解研磨物件200的研磨面隔開。When the negative electrode frame 300 comes into contact with the electrolytically polished article 200 of the positive electrode, a short circuit occurs. In order to prevent this, the negative electrode frame 300 should be configured to be spaced apart from the abrasive surface of the electrolytic abrasive article 200.

以往,使負極框架300固定於在電解研磨物件200上形成的放出口,但在本實施例中,當在電解研磨物件200上無放出口時,為了安裝負極框架300而可以配備有電極放置構件400。Conventionally, the negative electrode frame 300 is fixed to a discharge port formed on the electrolytically polished article 200. However, in the present embodiment, when there is no discharge port on the electrolytically polished article 200, an electrode placement member may be provided for mounting the negative electrode frame 300. 400.

在第二實施例中,電極放置構件400可以只安裝於電解研磨物件200的底部210。當在電解研磨物件200的底部200a和側壁部200b全部形成有凸出部210時,可以在電解研磨物件200的底部200a和側壁部200b均形成電極放置構件400,安裝負極框架300,但在第二實施例中,對只在電解研磨物件200的底部200a形成有凸出部210、在電解研磨物件200的側壁部200b不形成凸出部的情形進行說明。In the second embodiment, the electrode placement member 400 may be mounted only to the bottom portion 210 of the electroabrasive article 200. When the projections 210 are formed on the bottom portion 200a and the side wall portion 200b of the electrolytically polished article 200, the electrode placement member 400 may be formed on both the bottom portion 200a and the side wall portion 200b of the electrolytic abrasive article 200, and the negative electrode frame 300 may be mounted, but in the In the second embodiment, a case where the protruding portion 210 is formed only on the bottom portion 200a of the electrolytically polished article 200 and the protruding portion is not formed in the side wall portion 200b of the electrolytically polished article 200 will be described.

電極放置構件400的一側可以與電解研磨物件200的凸出部210的一側結合。電極放置構件400可以與電解研磨物件200的凸出部210中配置於邊緣區域的凸出部210的一側結合。One side of the electrode placement member 400 may be coupled to one side of the projection 210 of the electrolytic abrasive article 200. The electrode placement member 400 may be coupled to one side of the projection 210 disposed in the edge region of the projection 210 of the electrolytic abrasive article 200.

電極放置構件400可以包括第一面410和第二面430。電極放置構件400的第二面430可以從電極放置構件400的第一面410折彎即定角度形成。在本實施例中,電極放置構件400的第一面410與電極放置構件400的第二面430構成的角度θ1可以包括90度,但並不限定於此。The electrode placement member 400 can include a first face 410 and a second face 430. The second face 430 of the electrode placement member 400 may be formed by being bent at a fixed angle from the first face 410 of the electrode placement member 400. In the present embodiment, the angle θ1 formed by the first face 410 of the electrode placement member 400 and the second face 430 of the electrode placement member 400 may include 90 degrees, but is not limited thereto.

電極放置構件400的另一側可以與第一負極框架300a結合。當電極放置構件400以導電性物質形成時,在電極放置構件400與第一負極框架300之間,為了防止兩者間的電性短路,可以配置有絕緣構件700。電極放置構件400與第一負極框架300a可以利用C型夾具500進行固定。C型夾具500以導電性材質形成,因而可以在C型夾具500與第一負極框架300a之間還配備有絕緣構件700。The other side of the electrode placement member 400 may be combined with the first negative electrode frame 300a. When the electrode placement member 400 is formed of a conductive material, an insulating member 700 may be disposed between the electrode placement member 400 and the first negative electrode frame 300 in order to prevent electrical short between the two. The electrode placement member 400 and the first negative electrode frame 300a can be fixed by the C-type jig 500. Since the C-clamp 500 is formed of a conductive material, the insulating member 700 may be further provided between the C-clamp 500 and the first negative electrode frame 300a.

上面對以L字形狀形成電極放置構件400的結構進行了說明,但並不限定於此,可以為條(bar)形狀、角形狀、棒形狀、圓形狀的板。Although the structure in which the electrode placement member 400 is formed in an L shape has been described above, the present invention is not limited thereto, and may be a bar shape, an angular shape, a rod shape, or a circular plate.

與電解研磨物件200的側壁部200b鄰接的電極放置構件400a,可以以與電解研磨物件200的側壁部200b高度對應的方式長長地形成。與電解研磨物件200的側壁部200b鄰接的電極放置構件400a,可以與電解研磨物件200的側壁部200b的研磨面隔開配置。The electrode placement member 400a adjacent to the side wall portion 200b of the electrolytically polished article 200 can be formed long in a manner corresponding to the height of the side wall portion 200b of the electrolytically polished article 200. The electrode placement member 400a adjacent to the side wall portion 200b of the electrolytically polished article 200 may be disposed apart from the polishing surface of the side wall portion 200b of the electrolytic abrasive article 200.

第二負極框架300b可以配置於與電解研磨物件200的側壁部200b鄰接的電極放置構件210a之間。第二負極框架300b的一側可以借助於C型夾具500而固定於電極放置構件400a。其中,在電極放置構件400與第二負極框架300b之間、第二負極框架300b與C型夾具500之間,可以還配置有絕緣構件700。因此,第二負極框架300b可以地對電解研磨物件200的側壁研磨面有效地進行電解研磨。The second negative electrode frame 300b may be disposed between the electrode placement members 210a adjacent to the side wall portion 200b of the electrolytically polished article 200. One side of the second negative electrode frame 300b may be fixed to the electrode placement member 400a by means of a C-type jig 500. Here, the insulating member 700 may be further disposed between the electrode placement member 400 and the second negative electrode frame 300b, and between the second negative electrode frame 300b and the C-type jig 500. Therefore, the second negative electrode frame 300b can effectively perform electrolytic polishing on the side wall polishing surface of the electrolytic abrasive article 200.

第二實施例的電解研磨用電極框架及包括其的電解研磨裝置具有的效果是,即使在電解研磨物件200的底部200a或側壁部200b中某一者沒有凸出部210,也可以將負極框架300容易地安裝於電解研磨物件200的研磨面。The electrode frame for electrolytic polishing of the second embodiment and the electrolytic polishing apparatus including the same have an effect that the negative electrode frame can be used even if one of the bottom portion 200a or the side wall portion 200b of the electrolytic abrasive article 200 does not have the protruding portion 210 300 is easily mounted on the polished surface of the electrolytically polished article 200.

圖7是顯示第一實施例另一變形例的電解研磨裝置的分解立體圖,圖8是顯示第一實施例另一變形例的電解研磨裝置的結合立體圖。Fig. 7 is an exploded perspective view showing an electrolytic polishing apparatus according to another modification of the first embodiment, and Fig. 8 is a perspective view showing the electrolytic polishing apparatus according to another modification of the first embodiment.

如圖7及圖8所示,第一實施例變形例的電解研磨裝置可以包括:電解槽100,其在內部配備有容納形成有既定形狀的凸出部210的電解研磨物件200和電解液的容納空間;多個電極放置構件400,其結合於所述電解研磨物件200的至少一個以上的凸出部210;負極框架300,其與所述電極放置構件400的一側結合;負極框架300,其以格子結構形成,至少一個以上格子結構的一側與所述多個負極框架托架600結合,與所述電解研磨物件200的研磨面隔開既定間隔配置。As shown in FIGS. 7 and 8, the electrolytic polishing apparatus according to the modification of the first embodiment may include an electrolytic cell 100 equipped with an electrolytic abrasive article 200 and an electrolytic solution for accommodating the projection 210 having a predetermined shape. a receiving space; a plurality of electrode placement members 400 coupled to at least one of the protrusions 210 of the electrolytic abrasive article 200; a negative electrode frame 300 coupled to one side of the electrode placement member 400; a negative electrode frame 300, It is formed in a lattice structure, and one side of at least one or more lattice structures is coupled to the plurality of negative electrode frame brackets 600, and is disposed at a predetermined interval from the polishing surface of the electrolytic abrasive article 200.

電解槽100可以以在內部配備有容納空間的箱形狀形成。在電解槽100的內部可以填充有電解液。在電解槽100的內部可以容納電解研磨物件200。The electrolytic cell 100 may be formed in a box shape in which an accommodation space is provided inside. An electrolyte may be filled inside the electrolytic cell 100. The electrolytic abrasive article 200 can be housed inside the electrolytic cell 100.

電解研磨物件200可以為多邊形的板狀,但並不限定於此。可以將所有電解研磨物件200的金屬材質製品指定為電解研磨物件。在電解研磨物件200上可以形成有諸如加強肋、邊緣等的凸出部210。The electrolytically polished article 200 may have a polygonal plate shape, but is not limited thereto. All of the metal articles of the electrolytically polished article 200 can be designated as electrolytically polished articles. A projection 210 such as a reinforcing rib, an edge, or the like may be formed on the electrolytic abrasive article 200.

負極框架300可以包括格子結構的板形狀。負極框架300也可是導電率及耐酸性卓越的不銹鋼材料,但並不限定於此。負極框架300可以是條(bar)形狀、L字形狀、角形狀、棒形狀、圓形狀、線網、孔板形狀的板。The negative electrode frame 300 may include a plate shape of a lattice structure. The negative electrode frame 300 may be a stainless steel material excellent in electrical conductivity and acid resistance, but is not limited thereto. The negative electrode frame 300 may be a bar shape, an L shape, an angular shape, a rod shape, a circular shape, a wire mesh, or an orifice plate shape.

負極框架300可以包括多個第一負極板310和多個第二負極板330。第一負極板310與第二負極板330可以配置得構成格子結構。第一負極板310和第二負極板330可以配置得構成90度,但並不限定於此。The negative electrode frame 300 may include a plurality of first negative electrode plates 310 and a plurality of second negative electrode plates 330. The first negative electrode plate 310 and the second negative electrode plate 330 may be disposed to form a lattice structure. The first negative electrode plate 310 and the second negative electrode plate 330 may be disposed to form 90 degrees, but are not limited thereto.

負極框架300如果與正極的電解研磨物件200接觸,則發生短路。為了防止這種情況,負極框架300應構成得與電解研磨物件200的研磨面隔開。When the negative electrode frame 300 comes into contact with the electrolytically polished article 200 of the positive electrode, a short circuit occurs. In order to prevent this, the negative electrode frame 300 should be configured to be spaced apart from the abrasive surface of the electrolytic abrasive article 200.

以往,使負極框架300固定於在電解研磨物件200上形成的放出口,但在本實施例中,當電解研磨物件200沒有放出口時,為了安裝負極框架300,可以配備有電極放置構件400及負極框架托架600。Conventionally, the negative electrode frame 300 is fixed to a discharge port formed on the electrolytically polished article 200. However, in the present embodiment, when the electrolytically polished article 200 has no discharge port, the electrode placement member 400 may be provided for mounting the negative electrode frame 300 and Negative frame bracket 600.

電極放置構件400可以與電解研磨物件200的凸出部210的一側結合。電極放置構件400可以包括第一面和第二面。電極放置構件400的第二面可以從電極放置構件400的第一面410折彎即定角度形成。電極放置構件400的第一面410與電極放置構件400的第二面430構成的角度θ1可以包括90度,但並不限定於此。電極放置構件400可以向上部凸出形成。電極放置構件400可以與凸出部210垂直地配置,但並不限定於此。The electrode placement member 400 may be coupled to one side of the projection 210 of the electrolytic abrasive article 200. The electrode placement member 400 may include a first face and a second face. The second face of the electrode placement member 400 may be formed by being bent at a predetermined angle from the first face 410 of the electrode placement member 400. The angle θ1 of the first face 410 of the electrode placement member 400 and the second face 430 of the electrode placement member 400 may include 90 degrees, but is not limited thereto. The electrode placement member 400 may be formed to protrude upward. The electrode placement member 400 may be disposed perpendicular to the protrusion 210, but is not limited thereto.

上面對以L字形狀形成電極放置構件400的結構進行了說明,但並不限定於此,可以為條(bar)形狀、角形狀、棒形狀、圓形狀的板。Although the structure in which the electrode placement member 400 is formed in an L shape has been described above, the present invention is not limited thereto, and may be a bar shape, an angular shape, a rod shape, or a circular plate.

負極框架托架600可以結合於電極放置構件400的一側。負極框架托架600可以以金屬材質形成。當負極框架托架600以金屬材質形成時,在電極放置構件400與負極框架托架600之間,可以還配置有諸如絕緣板的絕緣構件700。絕緣構件700可以配置於電極放置構件400與負極框架托架600之間、負極框架托架600與C型夾具500之間。The negative electrode frame bracket 600 may be coupled to one side of the electrode placement member 400. The negative electrode frame bracket 600 may be formed of a metal material. When the negative electrode frame bracket 600 is formed of a metal material, an insulating member 700 such as an insulating plate may be further disposed between the electrode placing member 400 and the negative electrode frame bracket 600. The insulating member 700 may be disposed between the electrode placement member 400 and the negative electrode frame bracket 600, between the negative electrode frame bracket 600 and the C-type clamp 500.

負極框架托架600可以以絕緣構件700為介質,與電極放置構件400的第二面430結合,但並不限定於此。負極框架托架600可以以與負極框架300對應的形狀形成。負極框架托架600可以與電極放置構件400垂直地配置,但並不限定於此。The negative electrode frame bracket 600 may be coupled to the second surface 430 of the electrode placement member 400 with the insulating member 700 as a medium, but is not limited thereto. The negative electrode frame bracket 600 may be formed in a shape corresponding to the negative electrode frame 300. The negative electrode frame bracket 600 may be disposed perpendicular to the electrode placement member 400, but is not limited thereto.

負極框架托架600可以與電解研磨物件200的研磨面保持水準,以便負極框架300能夠與電解研磨物件200的研磨面保持水準。負極框架托架600可以支撐負極框架300的末端。不同於此,負極框架托架600可以支撐負極框架300的某一部分。The negative electrode frame bracket 600 can be level with the abrasive surface of the electrolytic abrasive article 200 so that the negative electrode frame 300 can maintain a level with the abrasive surface of the electrolytic abrasive article 200. The negative electrode frame bracket 600 can support the end of the negative electrode frame 300. Unlike this, the negative electrode frame bracket 600 may support a certain portion of the negative electrode frame 300.

負極框架托架600可以以L字形狀形成。負極框架托架600可以構成得包括第一面和第二面。負極框架托架600除L字形狀之外,可以包括條(bar)形狀、角形狀、棒形狀、圓形狀、線網、孔板的板。負極框架托架600可以借助於C型夾具500而與負極框架300固定。負極框架托架600在與負極框架310的一側重疊的狀態下,可以借助於C型夾具而固定。The negative electrode frame bracket 600 may be formed in an L shape. The negative electrode frame bracket 600 may be configured to include a first side and a second side. The negative electrode frame bracket 600 may include a bar shape, an angular shape, a rod shape, a circular shape, a wire mesh, and an orifice plate in addition to the L shape. The negative electrode frame bracket 600 can be fixed to the negative electrode frame 300 by means of the C-type jig 500. The negative electrode frame bracket 600 can be fixed by means of a C-shaped jig in a state of being overlapped with one side of the negative electrode frame 310.

負極框架托架600以與負極框架300相同的形狀形成,與負極框架300接觸的面積加寬,具有可以進一步提高負極框架托架600與負極框架300的結合力的效果。The negative electrode frame bracket 600 is formed in the same shape as the negative electrode frame 300, and the area in contact with the negative electrode frame 300 is widened, and the effect of further improving the bonding force between the negative electrode frame bracket 600 and the negative electrode frame 300 is obtained.

另外,如果負極框架托架600與負極框架300的接觸面積加寬,則導電性進一步提高,電解研磨物件200的電解研磨效率變好,具有可以縮短電解研磨工序需要的時間的效果。Further, when the contact area between the negative electrode frame holder 600 and the negative electrode frame 300 is widened, the conductivity is further improved, and the electrolytic polishing efficiency of the electrolytically polished article 200 is improved, and the time required for the electrolytic polishing step can be shortened.

負極框架托架600可以與電極放置構件400構成既定角度地配置。負極框架托架600根據負極框架300的形狀,可以與電極放置構件400構成既定角度地配置,使負極框架300有效結合於電極放置構件400。即,電極放置構件400根據電解研磨物件200的凸出部210的結構及位置,會不容易結合負極框架300。此時,如果使負極框架托架600配置於電極放置構件400,則具有可以提高負極框架300的結合位置自由度、有效安裝負極框架300的效果。The negative electrode frame bracket 600 may be disposed at a predetermined angle with the electrode placement member 400. The negative electrode frame bracket 600 can be disposed at a predetermined angle with the electrode placement member 400 according to the shape of the negative electrode frame 300, and the negative electrode frame 300 can be effectively coupled to the electrode placement member 400. That is, the electrode placement member 400 does not easily bond the negative electrode frame 300 in accordance with the structure and position of the projection 210 of the electrolytically polished article 200. At this time, if the negative electrode frame holder 600 is disposed on the electrode placement member 400, there is an effect that the degree of freedom of the bonding position of the negative electrode frame 300 can be improved and the negative electrode frame 300 can be efficiently mounted.

在此實施例中,通過對可以利用在電解研磨物件200上形成的凸出部210來支撐負極框架300的電極放置構件400進行配置,從而具有即使在沒有放出口的區域的電解研磨物件200上,也可以有效安裝負極框架300的效果。In this embodiment, the electrode placement member 400 that supports the negative electrode frame 300 can be configured by using the projection 210 formed on the electrolytically polished article 200, thereby having the electrolithically polished article 200 even in a region where there is no discharge port. The effect of the negative electrode frame 300 can also be effectively installed.

另外,在此實施例中,在對相同的製品進行電解研磨時,可以將已經組裝的負極框架300組裝於電極放置構件400進行研磨,因而具有可以縮短負極框架300安裝及拆卸所需時間及研磨時間的效果。Further, in this embodiment, when the same product is subjected to electrolytic polishing, the assembled negative electrode frame 300 can be assembled to the electrode placement member 400 for polishing, thereby having a time required for shortening the mounting and dismounting of the negative electrode frame 300 and grinding. The effect of time.

另外,在此實施例中,具有的效果是,即使電解研磨物件200的底部200a或側壁部200b中某一者沒有凸出部210,也可以在電解研磨物件200的全體研磨面容易地安裝負極框架300。Further, in this embodiment, there is an effect that even if one of the bottom portion 200a or the side wall portion 200b of the electrolytically polished article 200 does not have the protruding portion 210, the negative electrode can be easily mounted on the entire polishing surface of the electrolytically polished article 200. Frame 300.

另外,在此實施例中,通過在電極放置構件400上配置負極框架托架600,從而具有可以提高負極框架300的結合位置的自由度、有效安裝電極框架的效果。Further, in this embodiment, by disposing the negative electrode frame bracket 600 on the electrode placement member 400, there is an effect that the degree of freedom of the bonding position of the negative electrode frame 300 can be improved and the electrode frame can be efficiently mounted.

然後,圖9是顯示第二實施例的電解研磨裝置的剖面圖,圖10是顯示圖9的電極隔開構件的立體圖,圖11是顯示圖9的電極隔開構件固定於電解研磨物件的狀態的概略立體圖。9 is a cross-sectional view showing the electrolytic polishing apparatus of the second embodiment, FIG. 10 is a perspective view showing the electrode partitioning member of FIG. 9, and FIG. 11 is a view showing the state in which the electrode partitioning member of FIG. 9 is fixed to the electrolytically polished object. A schematic perspective view of the.

圖12至圖14分別是顯示第二實施例的電極隔開構件的多樣結構的立體圖,圖15是顯示圖9的負極框架的變形例的立體圖。12 to 14 are perspective views showing various structures of the electrode partitioning member of the second embodiment, and Fig. 15 is a perspective view showing a modification of the negative electrode frame of Fig. 9.

如圖9所示,在此實施例中,電極框架作為在內部配備有容納電解研磨物件和電解液的容納空間的電解槽使用的電極框架,可以包括:負極框架3000,其配置於所述電解研磨物件2000的研磨面的一側;及電極隔開構件4000,其配置於所述負極框架的一側,使所述負極框架從所述電解研磨物件的側面或底面隔開。As shown in FIG. 9, in this embodiment, the electrode frame is used as an electrode frame which is equipped with an electrolytic cell having an accommodation space for accommodating the electrolytic abrasive article and the electrolytic solution, and may include: a negative electrode frame 3000 disposed in the electrolysis One side of the polished surface of the abrasive article 2000; and an electrode partitioning member 4000 disposed on one side of the negative electrode frame to separate the negative electrode frame from a side surface or a bottom surface of the electrolytic abrasive article.

另外,第二實施例的電解研磨裝置可以包括:電解槽1000,其在內部配備有容納電解研磨物件2000和電解液1100的容納空間;負極框架3000,其配置於所述電解研磨物件2000的研磨面的一側;電極隔開構件4000,其配置於所述負極框架3000的一側,使所述負極框架3000從所述電解研磨物件2000的底面隔開。In addition, the electrolytic polishing apparatus of the second embodiment may include an electrolytic cell 1000 equipped with an accommodation space for accommodating the electrolytic abrasive article 2000 and the electrolytic solution 1100, and a negative electrode frame 3000 disposed on the polishing of the electrolytic abrasive article 2000. One side of the surface; an electrode partitioning member 4000 disposed on one side of the negative electrode frame 3000 to separate the negative electrode frame 3000 from the bottom surface of the electrolytic abrasive article 2000.

電解槽1000可以以在內部配備有容納空間的箱形狀形成。電解槽1000可以包括圓筒形、多邊箱或環形狀,但其形狀並不限定。The electrolytic cell 1000 may be formed in a box shape in which an accommodation space is provided inside. The electrolytic cell 1000 may include a cylindrical shape, a polygonal box or a ring shape, but the shape thereof is not limited.

在電解槽1000的內部可以填充有電解液1100。作為電解液1100,可以將從由蒸餾水(H2 O)、硫酸(H2 SO4 )類、磷酸(H3 PO4 )類、鉻酸類、硝酸鈉(NaNO3 )、氯化鈉(NaCl)、甘油類構成的組中選擇的至少一種物質混合構成,但並不限定於此。The inside of the electrolytic cell 1000 may be filled with an electrolytic solution 1100. As the electrolytic solution 1100, it may be distilled water (H 2 O), sulfuric acid (H 2 SO 4 ), phosphoric acid (H 3 PO 4 ), chromic acid, sodium nitrate (NaNO 3 ), sodium chloride (NaCl). The at least one selected from the group consisting of glycerol is mixed, but is not limited thereto.

電解液1100在填充於電解槽1000的狀態下結束電解研磨物件2000的電解研磨後,可以更換。不同於此,電解液1100可以借助於在電解槽1000的一側獨立地形成的泵而流入、流出。在電解槽1000與泵之間,可以形成有電解液流入管、電解液流出管,可以還包括電解液流量調節部、篩檢程式。篩檢程式可以過濾電解液中包含的加工物渣滓及異物質。The electrolytic solution 1100 can be replaced after the electrolytic polishing of the electrolytically polished article 2000 is completed in a state of being filled in the electrolytic cell 1000. Unlike this, the electrolyte 1100 can flow in and out by means of a pump that is independently formed on one side of the electrolytic cell 1000. An electrolyte inflow pipe and an electrolyte outflow pipe may be formed between the electrolytic cell 1000 and the pump, and may further include an electrolyte flow rate adjusting unit and a screening program. The screening program filters the residue and foreign matter contained in the electrolyte.

在電解槽1000的內部可以容納電解研磨物件2000。電解槽1000的大小可以大於電解研磨物件2000地形成。電解研磨物件2000可以為多邊形或圓筒形的腔室或箱子。電解研磨物件2000可以是用於OLED製造的腔室。另外,電解研磨物件2000也可以是OLED腔室的一部分構成部件。電解研磨物件2000可以為板、箱形狀或上下貫通形成的環形狀。電解研磨物件2000並不限定於此,可以將所有金屬材質製品指定為電解研磨物件。電解研磨物件2000浸於電解液1100內。An electrolytic abrasive article 2000 can be housed inside the electrolytic cell 1000. The electrolytic cell 1000 can be formed to be larger than the electrolytically polished article 2000. The electroabrasive article 2000 can be a polygonal or cylindrical chamber or box. Electrolytic abrasive article 2000 can be a chamber for OLED fabrication. In addition, the electrolytically polished article 2000 may also be part of a component of the OLED chamber. The electrolytically polished article 2000 may have a ring shape formed by a plate, a box shape, or a top and bottom. The electrolytically polished article 2000 is not limited thereto, and all metal materials can be designated as electrolytically polished articles. The electrolytically polished article 2000 is immersed in the electrolyte 1100.

電解研磨物件2000由於其重量相當大,因此,例如可以在利用起重機等吊起的狀態下,容納於電解槽1000的容納空間。例如,在電解研磨物件2000為OLED用腔室或LED用MOCVD腔室等的情況下,也存在其重量為數百kg至數千kg(數噸)的巨大的情形。Since the electrolytically polished article 2000 has a relatively large weight, it can be accommodated in the accommodation space of the electrolytic cell 1000, for example, in a state of being lifted by a crane or the like. For example, in the case where the electrolytically polished article 2000 is a chamber for an OLED or an MOCVD chamber for an LED or the like, there is also a case where the weight is in the range of several hundred kg to several thousand kg (several tons).

電解研磨物件2000的研磨面可以包括電解研磨物件2000的外側、內側、底面等。The abrasive surface of the electrolytically polished article 2000 may include the outer side, the inner side, the bottom surface, and the like of the electrolytically polished article 2000.

在電解槽2000的一側可以還配置有整流器。整流器可以向電解研磨物件接入正極(+)的電壓,可以向負極框架3000接入負極(-)的電壓。整流器可以借助於電線等而與電解研磨物件2000電性連接。A rectifier may also be disposed on one side of the electrolytic cell 2000. The rectifier can connect the voltage of the positive electrode (+) to the electrolytically polished object, and can input the voltage of the negative electrode (-) to the negative electrode frame 3000. The rectifier can be electrically connected to the electrolytic abrasive article 2000 by means of a wire or the like.

負極框架3000可以配置於電解研磨物件2000的內部及/或外部。負極框架3000可以與電解研磨物件2000的研磨面隔開既定間隔配置。例如,負極框架3000與電解研磨物件2000按50mm±20mm距離均一地隔開配置,因而電解研磨效率提高,電解研磨品質非常優秀。The negative electrode frame 3000 may be disposed inside and/or outside the electrolytic abrasive article 2000. The negative electrode frame 3000 may be disposed at a predetermined interval from the polishing surface of the electrolytic abrasive article 2000. For example, the negative electrode frame 3000 and the electrolytically polished article 2000 are uniformly spaced apart by a distance of 50 mm ± 20 mm, so that the electrolytic polishing efficiency is improved, and the electrolytic polishing quality is excellent.

負極框架3000可以選擇性地研磨作為電解研磨物件2000研磨面的內側、外側或底面,或可以同時研磨所有面。在本實施例中,為了說明的便利,對負極框架3000配置於電解研磨物件2000的內側的結構進行說明。The negative electrode frame 3000 may selectively grind the inner side, the outer side, or the bottom surface of the abrasive surface of the electroabrasive article 2000, or may grind all the faces simultaneously. In the present embodiment, a configuration in which the negative electrode frame 3000 is disposed inside the electrolytically polished article 2000 will be described for convenience of explanation.

負極框架3000可以包括格子結構的板形狀。負極框架3000可以為導電率、耐酸性卓越的不銹鋼材料,但並不限定於此。負極框架3000可以為條(bar)形狀、L字形狀、角形狀、棒形狀、線網、孔板金屬、圓形狀的板。The negative electrode frame 3000 may include a plate shape of a lattice structure. The negative electrode frame 3000 may be a stainless steel material excellent in electrical conductivity and acid resistance, but is not limited thereto. The negative electrode frame 3000 may be a bar shape, an L shape, an angular shape, a rod shape, a wire mesh, an orifice metal, or a circular plate.

負極框架3000沿著電解研磨物件2000的研磨面配置,因而當電解研磨物件2000以上部開放的四邊箱形狀形成時,與此對應,多個負極框架3000可以以四邊箱形狀形成。The negative electrode frame 3000 is disposed along the polishing surface of the electrolytically polished article 2000. Therefore, when the shape of the four-sided box in which the upper portion of the electrolytic abrasive article 2000 is opened is formed, the plurality of negative electrode frames 3000 may be formed in a four-sided box shape.

負極框架3000可以包括第一負極板3100和第二負極板3300。第一負極板3100和第二負極板3300可以配置得構成格子結構。第一負極板3100可以以長桿形狀形成。第一負極板3100可以由多個板構成,構成得上下隔開地配置。The negative electrode frame 3000 may include a first negative electrode plate 3100 and a second negative electrode plate 3300. The first negative electrode plate 3100 and the second negative electrode plate 3300 may be disposed to constitute a lattice structure. The first negative electrode plate 3100 may be formed in a long rod shape. The first negative electrode plate 3100 may be composed of a plurality of plates and configured to be vertically spaced apart.

第二負極板3300可以以長桿形狀形成。第二負極板3300可以由多個板構成,左右隔開地配置。第一負極板3100和第二負極板3300可以配置得構成90度,但並不限定於此。The second negative electrode plate 3300 may be formed in a long rod shape. The second negative electrode plate 3300 may be composed of a plurality of plates and arranged side by side. The first negative electrode plate 3100 and the second negative electrode plate 3300 may be disposed to form 90 degrees, but are not limited thereto.

第一負極板3100與第二負極板3300交叉的區域可以借助於螺絲等而鉚合。不同於此,第一負極板3100與第二負極板3300交叉的區域,也可以借助於C型夾具而固定。The region where the first negative electrode plate 3100 and the second negative electrode plate 3300 intersect may be riveted by means of screws or the like. Unlike this, the region where the first negative electrode plate 3100 and the second negative electrode plate 3300 intersect may be fixed by means of a C-shaped jig.

上面對負極框架3000具有固定長度的結構進行了說明,但可以使用使負極框架3000大小隨著電解研磨物件2000增大而可變的可變結構的負極框架3000。Although the structure in which the negative electrode frame 3000 has a fixed length has been described above, a negative electrode frame 3000 having a variable structure in which the size of the negative electrode frame 3000 is increased as the electrolytic abrasive article 2000 is increased can be used.

如圖15所示,負極框架3000可以包括第一負極板3100和第二負極板3300。第一負極板3100和第二負極板3300可以配置得構成格子結構。As shown in FIG. 15, the negative electrode frame 3000 may include a first negative electrode plate 3100 and a second negative electrode plate 3300. The first negative electrode plate 3100 and the second negative electrode plate 3300 may be disposed to constitute a lattice structure.

第一負極板3100可以由多個支架構成,可以以其長度能夠變長或減小的方式構成。第二負極板3300的結構可以與第一負極板3100的結構相同。下面,以第一負極板3100的結構為中心進行說明。The first negative electrode plate 3100 may be composed of a plurality of brackets, and may be configured in such a manner that its length can be lengthened or reduced. The structure of the second negative electrode plate 3300 may be the same as that of the first negative electrode plate 3100. Hereinafter, description will be given focusing on the structure of the first negative electrode plate 3100.

第一負極板3100可以構成得使多個支架連接。第一負極板3100可以一部分重疊地配置,向相互遠離或靠近的方向移動。第一負極板3100可以由多個支架構成,出於說明的便利,以第一負極板3100由第一支架3120和與所述第一支架3120連接的第二支架3140構成的結構為中心進行說明。The first negative electrode plate 3100 may be configured to connect a plurality of brackets. The first negative electrode plates 3100 may be partially overlapped and moved in a direction away from or close to each other. The first negative electrode plate 3100 may be composed of a plurality of brackets, and for convenience of description, a structure in which the first negative electrode plate 3100 is constituted by the first bracket 3120 and the second bracket 3140 connected to the first bracket 3120 will be mainly described. .

第一支架3120可以為L字形狀,但並不限定於此。第一支架3120的一部分區域可以與第二支架3140的一部分區域重疊形成。第一支架3120與第二支架3140的重疊的區域可以借助於C型夾具500而支撐。支撐所述第一支架3120與所述第二支架3140的重疊區域的C型夾具500可以稱為第二夾具。The first bracket 3120 may have an L shape, but is not limited thereto. A portion of the first bracket 3120 may be formed to overlap with a portion of the second bracket 3140. The overlapping area of the first bracket 3120 and the second bracket 3140 can be supported by means of the C-clamp 500. The C-clamp 500 supporting the overlapping area of the first bracket 3120 and the second bracket 3140 may be referred to as a second jig.

第一支架3120與第二支架3140可以沿相互遠離或靠近的方向移動。C型夾具500可以以第一支架3120與第二支架3140可以相互移動的程度的力,支撐第一支架3120和第二支架3140。不同於此,C型夾具500可以在使第一支架3120和第二支架3140移動後,進一步施加固定力,支撐第一支架3120和第二支架3140。The first bracket 3120 and the second bracket 3140 can move in a direction away from or close to each other. The C-clamp 500 can support the first bracket 3120 and the second bracket 3140 with a force to which the first bracket 3120 and the second bracket 3140 can move relative to each other. Unlike this, the C-clamp 500 may further apply a fixing force to support the first bracket 3120 and the second bracket 3140 after moving the first bracket 3120 and the second bracket 3140.

第二負極板3300可以與第一負極板3100相同地包括第一支架3320和第二支架3340。第二負極板3300可以桿形狀的板形成,但並不限定於此。第二負極板3300的第一支架3320可以沿從第二支架3340遠離或靠近的方向移動。The second negative electrode plate 3300 may include the first bracket 3320 and the second bracket 3340 similarly to the first negative electrode plate 3100. The second negative electrode plate 3300 may be formed of a rod-shaped plate, but is not limited thereto. The first bracket 3320 of the second negative plate 3300 can move in a direction away from or close to the second bracket 3340.

第二負極板3300的第一支架3320和第二支架3340可以一部分重疊地配置。第二負極板3300的第一支架3320與第二支架3340的重疊的區域,可以借助於C型夾具500而支撐。因此,第二負極板3300長度可變。The first bracket 3320 and the second bracket 3340 of the second negative plate 3300 may be partially overlapped. The overlapping area of the first bracket 3320 and the second bracket 3340 of the second negative plate 3300 can be supported by means of the C-clamp 500. Therefore, the second negative electrode plate 3300 has a variable length.

請再參閱圖9,負極框架3000如果與正極的電解研磨物件2000接觸,則發生短路。為了防止這種情況,負極框架3000應構成得與電解研磨物件2000的底面及側面隔開。Referring to FIG. 9 again, if the negative electrode frame 3000 comes into contact with the electrolytically polished article 2000 of the positive electrode, a short circuit occurs. In order to prevent this, the negative electrode frame 3000 should be formed to be spaced apart from the bottom surface and the side surface of the electrolytic abrasive article 2000.

在本實施例中,可以配備有電極隔開構件4000,以便使負極框架3000從電解研磨物件2000的底面及側面隔開。In the present embodiment, the electrode partitioning member 4000 may be provided to separate the negative electrode frame 3000 from the bottom surface and the side surface of the electrolytic abrasive article 2000.

電極隔開構件4000可以結合於負極框架3000的一側。電極隔開構件4000可以結合於位於最下方的第一負極板3100的一側。電極隔開構件4000以從第一負極板3100向下部凸出的方式結合於第一負極板3100的一側。因此,電極隔開構件4000可以與電解研磨物件2000的底面接觸。The electrode partitioning member 4000 may be coupled to one side of the negative electrode frame 3000. The electrode partitioning member 4000 may be coupled to one side of the lowermost first negative electrode plate 3100. The electrode partitioning member 4000 is bonded to one side of the first negative electrode plate 3100 in such a manner as to protrude downward from the first negative electrode plate 3100. Therefore, the electrode partitioning member 4000 can be in contact with the bottom surface of the electrolytic abrasive article 2000.

電極隔開構件4000可以以從第一負極板3100向側面凸出的方式結合於第一負極板3100的一側。因此,電極隔開構件4000可以與電解研磨物件2000的側面接觸。The electrode partitioning member 4000 may be coupled to one side of the first negative electrode plate 3100 in such a manner as to protrude laterally from the first negative electrode plate 3100. Therefore, the electrode partitioning member 4000 can be in contact with the side surface of the electrolytic abrasive article 2000.

為了借助於電極隔開構件4000而防止負極框架3000與電解研磨物件2000短路,電極隔開構件4000可以以絕緣材質形成。電極隔開構件4000可以以能夠承受負極框架3000重量且耐酸性強的材質形成。電極隔開構件4000可能包括PVC、橡膠、聚氨酯橡膠、電木中某一者。負極框架3000及電極隔開構件4000可以借助於C型夾具500而結合。結合所述負極框架3000與所述電極隔開構件4000的C型夾具500可以稱為第一夾具。In order to prevent the negative electrode frame 3000 from being short-circuited with the electrolytic abrasive article 2000 by means of the electrode partitioning member 4000, the electrode spacing member 4000 may be formed of an insulating material. The electrode partition member 4000 may be formed of a material that can withstand the weight of the negative electrode frame 3000 and is highly resistant to acid. The electrode spacing member 4000 may include one of PVC, rubber, urethane rubber, bakelite. The negative electrode frame 3000 and the electrode partitioning member 4000 may be joined by means of a C-type jig 500. The C-clamp 500 incorporating the negative electrode frame 3000 and the electrode partitioning member 4000 may be referred to as a first jig.

C型夾具500不使負極框架3000與電極隔開構件4000永久地固定,因而如果使用C型夾具500,則可以容易地進行負極框架3000與電極隔開構件4000的安裝及分離。即,電極隔開構件4000的安裝位置會因電解研磨物件2000的形狀而異,因而C型夾具500可以容易地變更結合於負極框架3000的電極隔開構件4000的安裝位置。C型夾具500可以採用圖4a及圖4b的結構。Since the C-clamp 500 does not permanently fix the negative electrode frame 3000 and the electrode partitioning member 4000, if the C-clamp 500 is used, the mounting and separation of the negative electrode frame 3000 and the electrode partitioning member 4000 can be easily performed. That is, since the mounting position of the electrode partitioning member 4000 differs depending on the shape of the electrolytic abrasive article 2000, the C-clamp 500 can easily change the mounting position of the electrode partitioning member 4000 bonded to the negative electrode frame 3000. The C-clamp 500 can adopt the structure of Figs. 4a and 4b.

電極隔開構件4000可以隔開地配置於在最下方配置的第一負極板3100的一側及另一側。電極隔開構件4000可以保持均衡地進行支撐,以便負極框架3000的重量不偏向一個方向。電極隔開構件4000的安裝個數不限定,可以以3個以上形成。電極隔開構件4000可以在與電解研磨物件2000內側的另一研磨面隔開配置的多個負極框架3000下部形成。The electrode partitioning members 4000 may be disposed apart from one side and the other side of the first negative electrode plate 3100 disposed at the lowermost side. The electrode partitioning member 4000 can be supported in a balanced manner so that the weight of the negative electrode frame 3000 is not biased in one direction. The number of the electrode partition members 4000 to be mounted is not limited, and may be formed in three or more. The electrode partitioning member 4000 may be formed at a lower portion of the plurality of negative electrode frames 3000 that are disposed apart from the other polishing surface inside the electrolytically polished article 2000.

另外,固定於電解研磨物件2000的底部及側面的隔開構件4000如果安裝於負極框架3000的角部,則可以掌握負極框架3000的中心,更堅固地安裝負極框架3000。Further, if the partition member 4000 fixed to the bottom and the side surface of the electrolytically polished article 2000 is attached to the corner portion of the negative electrode frame 3000, the center of the negative electrode frame 3000 can be grasped, and the negative electrode frame 3000 can be attached more firmly.

電極隔開構件4000可以以L字形狀、條(bar)形狀、角形狀、棒形狀形成,但並不限定於此。下面對電極隔開構件4000的形狀為前面言及的形狀中某一者進行說明。但是,電極隔開構件4000的形狀並不限定於以下說明的形狀。The electrode partition member 4000 may be formed in an L shape, a bar shape, an angular shape, or a rod shape, but is not limited thereto. Next, the shape of the electrode partition member 4000 will be described as one of the shapes mentioned above. However, the shape of the electrode partitioning member 4000 is not limited to the shape described below.

如圖10所示,電極隔開構件4000可以形成得下部寬度變小。由此,可以使電極隔開構件4000與電解研磨物件2000相接的區域最小化,保持電解研磨物件2000的整體均勻的電解研磨品質。As shown in FIG. 10, the electrode partitioning member 4000 may be formed such that the lower width becomes smaller. Thereby, the area where the electrode partitioning member 4000 is in contact with the electrolytic abrasive article 2000 can be minimized, and the overall uniform electrolytic polishing quality of the electrolytic abrasive article 2000 can be maintained.

電極隔開構件4000的長度L可以形成得大於電極隔開構件4000的寬度W。電極隔開構件4000的長度L可以形成得大於第一負極板3100的寬度。因此,電極隔開構件4000可以配置得向第一負極板3100的下部凸出。The length L of the electrode partitioning member 4000 may be formed larger than the width W of the electrode partitioning member 4000. The length L of the electrode partitioning member 4000 may be formed to be larger than the width of the first negative electrode plate 3100. Therefore, the electrode partitioning member 4000 may be disposed to protrude toward the lower portion of the first negative electrode plate 3100.

作為一個示例,電極隔開構件4000的長度L可以包括8cm至12cm。電極隔開構件4000的寬度W可以包括2cm至7cm。電極隔開構件4000的厚度T可以包括2nm至7nm。電極隔開構件4000的長度L、寬度W及厚度T並不限定於此。As an example, the length L of the electrode partitioning member 4000 may include 8 cm to 12 cm. The width W of the electrode partitioning member 4000 may include 2 cm to 7 cm. The thickness T of the electrode spacing member 4000 may include 2 nm to 7 nm. The length L, the width W, and the thickness T of the electrode partition member 4000 are not limited thereto.

電極隔開構件4000可以包括第一支撐部4100、第二支撐部4300。第一支撐部4100可以以四邊板狀形成,但並不限定於此。第二支撐部4300可以形成得其寬度向下部越來越小。作為一個示例,第二支撐部4300可以以在下部具有頂點的倒三角形形狀形成,但並不限定於此。在電解研磨物件2000的底面,第一支撐部4100的側面中某一者的面或第二支撐部4300的側面中某一者的面可以實現面接觸。The electrode partitioning member 4000 may include a first support portion 4100 and a second support portion 4300. The first support portion 4100 may be formed in a quadrangular plate shape, but is not limited thereto. The second support portion 4300 may be formed such that its width becomes smaller toward the lower portion. As an example, the second support portion 4300 may be formed in an inverted triangular shape having a vertex at the lower portion, but is not limited thereto. On the bottom surface of the electrolytically polished article 2000, the surface of one of the side faces of the first support portion 4100 or the face of one of the side faces of the second support portion 4300 can be in surface contact.

如圖11所示,第二支撐部4300的頂點可以與電解研磨物件2000的底面或側面接觸。電解研磨物件2000可以根據其形狀而在底面形成有槽或孔。電極隔開構件4000的一部分可以插入於在電解研磨物件2000上形成的槽或孔2100。在電解研磨物件2000上形成的槽或孔2100中,電極隔開構件4000的第二支撐部4300的頂點區域可以插入結合。第二支撐部4300下部寬度狹窄地形成,因而第二支撐部4300的一部分可以與槽或孔2100大小無關地插入、結合。因此,當電解研磨物件2000的底部存在槽或孔2100時,具有可以利用槽或孔2100更有效地使負極框架4000固定的效果。As shown in FIG. 11, the apex of the second support portion 4300 may be in contact with the bottom surface or side surface of the electrolytic abrasive article 2000. The electrolytically polished article 2000 may be formed with grooves or holes in the bottom surface depending on its shape. A portion of the electrode spacing member 4000 can be inserted into a slot or aperture 2100 formed in the electrolithically abrasive article 2000. In the groove or hole 2100 formed in the electrolytic abrasive article 2000, the apex region of the second support portion 4300 of the electrode partitioning member 4000 may be inserted and joined. The lower portion of the second support portion 4300 is formed to have a narrow width, and thus a part of the second support portion 4300 can be inserted and coupled regardless of the size of the groove or the hole 2100. Therefore, when the groove or the hole 2100 is present at the bottom of the electrolytically polished article 2000, there is an effect that the negative electrode frame 4000 can be more effectively fixed by the groove or the hole 2100.

即使在電解研磨物件2000上未形成槽或孔2100,由於隔開構件4000接觸電解研磨物件2000的底面和側面並固定,因而具有負極框架3000可以更堅固地安裝的效果。Even if the groove or hole 2100 is not formed on the electrolytic abrasive article 2000, since the partition member 4000 contacts and fixes the bottom surface and the side surface of the electrolytic abrasive article 2000, there is an effect that the negative electrode frame 3000 can be mounted more firmly.

前面說明的電極隔開構件4000可以以多樣形狀形成。電極隔開構件400可以如圖12至圖14所示形成。The electrode partitioning member 4000 described above may be formed in various shapes. The electrode partitioning member 400 may be formed as shown in FIGS. 12 to 14.

如圖12所示,電極隔開構件4000可以包括內側支撐構件4500、所述外側支撐構件4600。內側支撐構件4500可以包括具有堅硬強度的混凝土用脹塞或鐵片,但並不限定於此。內側支撐構件4500可以提高電極隔開構件4000的硬度。外側支撐構件4600可以在內側支撐構件4500的表面形成。外側支撐構件4600可以包括絕緣材質的材料。外側支撐構件4600可以包括諸如塑膠的絕緣材料,但並不限定於此。As shown in FIG. 12, the electrode partitioning member 4000 may include an inner side support member 4500 and the outer side support member 4600. The inner side support member 4500 may include a bulge or iron piece for concrete having a hard strength, but is not limited thereto. The inner support member 4500 can increase the hardness of the electrode partition member 4000. The outer support member 4600 may be formed on the surface of the inner support member 4500. The outer support member 4600 can comprise a material of an insulating material. The outer support member 4600 may include an insulating material such as plastic, but is not limited thereto.

如圖13所示,電極隔開構件4000可以包括第一支撐部4100、第二支撐部4300。第一支撐部4100可以以四邊板狀形成,但並不限定於此。第二支撐部4300可以形成得其寬度向下部越來越小。As shown in FIG. 13, the electrode partitioning member 4000 may include a first support portion 4100 and a second support portion 4300. The first support portion 4100 may be formed in a quadrangular plate shape, but is not limited thereto. The second support portion 4300 may be formed such that its width becomes smaller toward the lower portion.

第二支撐部4300可以是下部面寬度小於上部面寬度的梯形形狀。第二支撐部4300的下部面可以與電解研磨物件的底面接觸。第二支撐部4300的下部面與棱角尖銳的電極隔開構件相比,與電解研磨物件2000的接觸面積寬,因而具有可以更有效支撐負極框架3000的效果。當在電解研磨物件2000的底部形成有槽或孔時,第二支撐部4300的一部分可以插入於電解研磨物件2000的槽或孔。The second support portion 4300 may have a trapezoidal shape in which the width of the lower surface is smaller than the width of the upper surface. The lower surface of the second support portion 4300 may be in contact with the bottom surface of the electrolytically polished article. The lower surface of the second support portion 4300 has a wider contact area with the electro-grinding object 2000 than the sharp-edged electrode partition member, and thus has an effect of more effectively supporting the negative electrode frame 3000. When a groove or a hole is formed at the bottom of the electrolytic abrasive article 2000, a portion of the second support portion 4300 may be inserted into a groove or hole of the electrolytic abrasive article 2000.

如圖14所示,電極隔開構件4000可以包括第一支撐部4100、第二支撐部4300。第一支撐部4100可以以四邊板狀形成,但並不限定於此。第二支撐部4300可以形成得其寬度向下部越來越小。As shown in FIG. 14, the electrode partitioning member 4000 may include a first support portion 4100 and a second support portion 4300. The first support portion 4100 may be formed in a quadrangular plate shape, but is not limited thereto. The second support portion 4300 may be formed such that its width becomes smaller toward the lower portion.

第二支撐部4300可以形成得下部具有圓棱角。第二支撐部4300的下部面可以與電解研磨物件2000的底面接觸。第二支撐部4300的下部面具有在與電解研磨物件2000接觸時,可以防止在電解研磨物件出現疤痕的效果。當在電解研磨物件2000的底部形成有槽或孔時,第二支撐部4300的一部分可以插入於電解研磨物件2000的槽或孔。The second support portion 4300 may be formed such that the lower portion has a rounded corner. The lower surface of the second support portion 4300 may be in contact with the bottom surface of the electrolytic abrasive article 2000. The lower surface of the second support portion 4300 has an effect of preventing scarring in the electroabrasive article when it comes into contact with the electroabrasive article 2000. When a groove or a hole is formed at the bottom of the electrolytic abrasive article 2000, a portion of the second support portion 4300 may be inserted into a groove or hole of the electrolytic abrasive article 2000.

第二實施例的電極隔開構件4000配置於負極框架3000下部,從而可以將負極框架3000有效配置於沒有另外的托架的電解研磨物件2000。The electrode partitioning member 4000 of the second embodiment is disposed at a lower portion of the negative electrode frame 3000, so that the negative electrode frame 3000 can be efficiently disposed to the electrolytic abrasive article 2000 without the additional bracket.

當電解研磨物件2000為諸如門的板形狀時,在借助於電極隔開構件4000而支撐負極框架3000的狀態下,配置於電解研磨物件2000的上部後,可以執行電解研磨。接著,在去除負極框架3000的狀態下,倒轉配置電解研磨物件2000,可以將負極框架3000重新配置於電解研磨物件的上部。接著,如果對電解研磨物件2000執行電解研磨,則具有可以縮短安裝及電解研磨所需的時間的效果。When the electroabrasive article 2000 is in the shape of a plate such as a door, electrolytic polishing can be performed after being disposed on the upper portion of the electroabrasive article 2000 in a state where the negative electrode frame 3000 is supported by the electrode partitioning member 4000. Next, in a state where the negative electrode frame 3000 is removed, the electrolytic polishing article 2000 is placed upside down, and the negative electrode frame 3000 can be rearranged on the upper portion of the electrolytically polished article. Next, if electrolytic polishing is performed on the electrolytically polished article 2000, there is an effect that the time required for mounting and electrolytic polishing can be shortened.

上面說明了電極隔開構件4000與電解研磨物件2000的底部接觸的結構,但不同於此,可以以與電解研磨物件2000的側壁部接觸的結構形成電極隔開構件4000,使負極框架3000從電解研磨物件2000的研磨面隔開。The structure in which the electrode partitioning member 4000 is in contact with the bottom of the electroabrasive article 2000 has been described above, but differently, the electrode separating member 4000 may be formed in a structure in contact with the side wall portion of the electroabrasive article 2000, so that the negative electrode frame 3000 is electrolyzed. The abrasive surfaces of the abrasive article 2000 are spaced apart.

下面請參閱圖16至圖19,分別提供多樣實施例的電解研磨裝置的結構。Referring now to Figures 16 through 19, the construction of the electrolytic polishing apparatus of various embodiments is provided.

圖16是顯示第二實施例的電解研磨裝置的變形例的剖面圖。Fig. 16 is a cross-sectional view showing a modification of the electrolytic polishing apparatus of the second embodiment.

如圖16所示,電解研磨裝置可以包括:電解槽1000,其在內部配備有容納電解研磨物件2000和電解液的容納空間;負極框架3000,其配置於所述電解研磨物件2000的研磨面的一側;電極隔開構件4000,其配置於所述負極框架3000的一側,使所述負極框架3000從所述電解研磨物件2000的底面隔開。As shown in FIG. 16, the electrolytic polishing apparatus may include an electrolytic cell 1000 equipped with an accommodating space for accommodating the electrolytic abrasive article 2000 and the electrolyte, and a negative electrode frame 3000 disposed on the polished surface of the electrolytic abrasive article 2000. One side; an electrode partitioning member 4000 disposed on one side of the negative electrode frame 3000 to separate the negative electrode frame 3000 from the bottom surface of the electrolytic abrasive article 2000.

電解槽1000可以以在內部配備有容納空間的箱形狀形成。電解槽1000可以包括圓筒形、多邊箱或環形狀,但其形狀並不限定。在電解槽1000的內部可以填充有電解液1100。作為電解液1100,可以將從由蒸餾水(H2 O)、硫酸(H2 SO4 )類、磷酸(H3 PO4 )類、鉻酸類、硝酸鈉(NaNO3 )、氯化鈉(NaCl)、甘油類構成的組中選擇的至少一種物質混合構成,但並不限定於此。The electrolytic cell 1000 may be formed in a box shape in which an accommodation space is provided inside. The electrolytic cell 1000 may include a cylindrical shape, a polygonal box or a ring shape, but the shape thereof is not limited. The inside of the electrolytic cell 1000 may be filled with an electrolytic solution 1100. As the electrolytic solution 1100, it may be distilled water (H 2 O), sulfuric acid (H 2 SO 4 ), phosphoric acid (H 3 PO 4 ), chromic acid, sodium nitrate (NaNO 3 ), sodium chloride (NaCl). The at least one selected from the group consisting of glycerol is mixed, but is not limited thereto.

在電解槽1000的內部可以容納電解研磨物件2000。電解研磨物件2000浸於電解液1100內。電解研磨物件2000的研磨面可以包括電解研磨物件的外側、內側、底面等。在電解槽2000的外側還可以配置有整流器。整流器可以向電解研磨物件接入正極(+)的電壓,可以向負極框架3000接入負極(-)的電壓。整流器可以借助於電線等而與電解研磨物件2000電性連接。An electrolytic abrasive article 2000 can be housed inside the electrolytic cell 1000. The electrolytically polished article 2000 is immersed in the electrolyte 1100. The abrasive surface of the electrolytically polished article 2000 may include the outer side, the inner side, the bottom surface, and the like of the electroabrasive article. A rectifier may also be disposed outside the electrolytic cell 2000. The rectifier can connect the voltage of the positive electrode (+) to the electrolytically polished object, and can input the voltage of the negative electrode (-) to the negative electrode frame 3000. The rectifier can be electrically connected to the electrolytic abrasive article 2000 by means of a wire or the like.

負極框架3000可以配置於電解研磨物件2000的內部及外部。負極框架3000可以與電解研磨物件2000的研磨面隔開既定間隔配置。負極框架3000可以選擇性地研磨作為電解研磨物件2000研磨面的內側、外側或底面,或者研磨所有面。在本實施例中,為了說明的便利,對負極框架3000配置於電解研磨物件2000的內側的結構進行說明。The negative electrode frame 3000 may be disposed inside and outside the electrolytically polished article 2000. The negative electrode frame 3000 may be disposed at a predetermined interval from the polishing surface of the electrolytic abrasive article 2000. The negative electrode frame 3000 can selectively grind the inner side, the outer side or the bottom surface of the abrasive surface of the electroabrasive article 2000, or grind all the faces. In the present embodiment, a configuration in which the negative electrode frame 3000 is disposed inside the electrolytically polished article 2000 will be described for convenience of explanation.

負極框架3000可以包括格子結構的板形狀。負極框架3000可以為導電率卓越的不銹鋼材料,但並不限定於此。負極框架3000可以為條(bar)形狀、L字形狀、角形狀、棒形狀、線網、孔板金屬、圓形狀的板。The negative electrode frame 3000 may include a plate shape of a lattice structure. The negative electrode frame 3000 may be a stainless steel material having excellent electrical conductivity, but is not limited thereto. The negative electrode frame 3000 may be a bar shape, an L shape, an angular shape, a rod shape, a wire mesh, an orifice metal, or a circular plate.

負極框架3000沿著電解研磨物件2000的研磨面配置,因而當電解研磨物件2000以上部開放的四邊箱形狀形成時,與此對應,多個負極框架3000可以以四邊箱形狀形成。The negative electrode frame 3000 is disposed along the polishing surface of the electrolytically polished article 2000. Therefore, when the shape of the four-sided box in which the upper portion of the electrolytic abrasive article 2000 is opened is formed, the plurality of negative electrode frames 3000 may be formed in a four-sided box shape.

負極框架3000可以包括第一負極板3100和第二負極板3300。第一負極板3100與第二負極板3300以格子結構形成。第一負極板3100可以以長桿形狀形成。第一負極板3100可以由多個板構成,構成得上下隔開地配置。The negative electrode frame 3000 may include a first negative electrode plate 3100 and a second negative electrode plate 3300. The first negative electrode plate 3100 and the second negative electrode plate 3300 are formed in a lattice structure. The first negative electrode plate 3100 may be formed in a long rod shape. The first negative electrode plate 3100 may be composed of a plurality of plates and configured to be vertically spaced apart.

第二負極板3300可以以長桿形狀形成。第二負極板3300可以由多個板構成,構成得左右隔開配置。第一負極板3100和第二負極板3300可以配置得構成90度,但並不限定於此。The second negative electrode plate 3300 may be formed in a long rod shape. The second negative electrode plate 3300 may be composed of a plurality of plates and configured to be spaced apart from each other. The first negative electrode plate 3100 and the second negative electrode plate 3300 may be disposed to form 90 degrees, but are not limited thereto.

第一負極板3100與第二負極板3300交叉的區域可以借助於螺絲等而鉚合。第一負極板3100與第二負極板3300交叉的區域也可以借助於C型夾具而固定。The region where the first negative electrode plate 3100 and the second negative electrode plate 3300 intersect may be riveted by means of screws or the like. The region where the first negative electrode plate 3100 and the second negative electrode plate 3300 intersect may also be fixed by means of a C-shaped jig.

負極框架3000如果與電解研磨物件2000接觸,則發生短路。為了防止這種情況,負極框架3000應構成得與電解研磨物件2000的側面及底面隔開。電解研磨物件2000的側面可以調節負極框架3000的第一負極板3100的長度,從電解研磨物件2000隔開配置。When the negative electrode frame 3000 comes into contact with the electrolytic abrasive article 2000, a short circuit occurs. In order to prevent this, the negative electrode frame 3000 should be formed to be spaced apart from the side and bottom surfaces of the electrolytically polished article 2000. The side of the electrolytic abrasive article 2000 can adjust the length of the first negative electrode plate 3100 of the negative electrode frame 3000, and is disposed apart from the electrolytic abrasive article 2000.

在本實施例中,可以配備有電極隔開構件4000,以便使負極框架3000從電解研磨物件2000的底面隔開。In the present embodiment, the electrode partitioning member 4000 may be provided to separate the negative electrode frame 3000 from the bottom surface of the electrolytic abrasive article 2000.

電極隔開構件4000可以以絕緣材質形成。電極隔開構件4000可以以能夠承受負極框架3000重量且耐酸性強的材質形成。電極隔開構件4000可能包括PVC、橡膠、聚氨酯橡膠、電木中某一者。電極隔開構件4000以絕緣材質形成,從而可能防止負極框架3000與作為正極的電解對象物2000短路。電極隔開構件4000的形狀可能具有寬度向下部越來越窄的形狀,但並不限定於此。The electrode partitioning member 4000 may be formed of an insulating material. The electrode partition member 4000 may be formed of a material that can withstand the weight of the negative electrode frame 3000 and is highly resistant to acid. The electrode spacing member 4000 may include one of PVC, rubber, urethane rubber, bakelite. The electrode partition member 4000 is formed of an insulating material, so that it is possible to prevent the negative electrode frame 3000 from being short-circuited with the electrolysis object 2000 as a positive electrode. The shape of the electrode partitioning member 4000 may have a shape in which the width is narrower toward the lower portion, but is not limited thereto.

電極隔開構件4000可以結合於負極框架300的一側。電極隔開構件4000可以結合於在最上方配置的第一負極板3100的一側。電極隔開構件4000可以與在最上方配置的第一負極板3100重疊配置。電極隔開構件4000可以借助於C型夾具500而固定於在最上方配置的第一負極板3100。The electrode partitioning member 4000 may be coupled to one side of the negative electrode frame 300. The electrode partitioning member 4000 may be coupled to one side of the first negative electrode plate 3100 disposed at the uppermost portion. The electrode partitioning member 4000 may be disposed to overlap the first negative electrode plate 3100 disposed at the uppermost portion. The electrode partitioning member 4000 may be fixed to the first negative electrode plate 3100 disposed at the uppermost side by means of the C-type jig 500.

其中,在最上方配置的第一負極板3100的長度可以形成得長於其他第一負極板3100的長度。在最上方配置的第一負極板3100可以配置於電解研磨物件2000的側壁部的上部。電極隔開構件4000可以與電解研磨物件2000的側壁部上部接觸。電極隔開構件4000可以沿電解研磨物件2000的側壁部的上部面配置多個。The length of the first negative electrode plate 3100 disposed at the uppermost portion may be formed longer than the length of the other first negative electrode plates 3100. The first negative electrode plate 3100 disposed at the uppermost portion may be disposed at an upper portion of the side wall portion of the electrolytically polished article 2000. The electrode partitioning member 4000 may be in contact with an upper portion of a side wall portion of the electrolytic abrasive article 2000. The electrode partitioning member 4000 may be disposed in plurality along the upper surface of the side wall portion of the electrolytically polished article 2000.

電極隔開構件4000具有在使負極框架3000從電解研磨物件2000的底部隔開的同時可以穩定地支撐負極框架3000的效果。The electrode partitioning member 4000 has an effect of stably supporting the negative electrode frame 3000 while separating the negative electrode frame 3000 from the bottom of the electrolytic abrasive article 2000.

另外,第二實施例的電極隔開構件4000不與電解研磨物件2000的底部接觸,因而具有可以防止因電極隔開構件4000與電解研磨物件2000接觸導致的損傷的效果。In addition, the electrode partitioning member 4000 of the second embodiment is not in contact with the bottom of the electrolytic abrasive article 2000, and thus has an effect of preventing damage due to contact of the electrode partitioning member 4000 with the electrolytic abrasive article 2000.

圖17是顯示第二實施例的電解研磨裝置的另一變形例的剖面圖,圖18是顯示圖17的負極框架結合於支架的狀態的立體圖。Fig. 17 is a cross-sectional view showing another modification of the electrolytic polishing apparatus of the second embodiment, and Fig. 18 is a perspective view showing a state in which the negative electrode frame of Fig. 17 is coupled to the holder.

如圖17所示,第二實施例變形例的電解研磨裝置可以包括:電解槽1000,其在內部配備有容納電解研磨物件2000和電解液1100的容納空間;負極框架3000,其配置於所述電解研磨物件2000的研磨面的一側;支架7000,其結合於所述負極框架3000的一側;電極隔開構件4000,其結合於所述支架7000的一側,使所述負極框架3000從所述電解研磨物件的底面隔開。As shown in FIG. 17, the electrolytic polishing apparatus according to the modification of the second embodiment may include an electrolytic cell 1000 equipped with an accommodation space for accommodating the electrolytic abrasive article 2000 and the electrolytic solution 1100, and a negative electrode frame 3000 disposed in the One side of the abrasive surface of the electrolytically polished article 2000; a bracket 7000 coupled to one side of the negative electrode frame 3000; and an electrode partitioning member 4000 coupled to one side of the bracket 7000 such that the negative electrode frame 3000 is The bottom surface of the electroabrasive article is spaced apart.

電解槽1000可以以在內部配備有容納空間的箱形狀形成。電解槽1000可以包括圓筒形、多邊箱或環形狀,但其形狀並不限定。在電解槽1000的內部可以填充有電解液1100。作為電解液1100,可以將從由蒸餾水(H2 O)、硫酸(H2 SO4 )類、磷酸(H3 PO4 )類、鉻酸類、硝酸鈉(NaNO3 )、氯化鈉(NaCl)、甘油類構成的組中選擇的至少一種物質混合構成,但並不限定於此。The electrolytic cell 1000 may be formed in a box shape in which an accommodation space is provided inside. The electrolytic cell 1000 may include a cylindrical shape, a polygonal box or a ring shape, but the shape thereof is not limited. The inside of the electrolytic cell 1000 may be filled with an electrolytic solution 1100. As the electrolytic solution 1100, it may be distilled water (H 2 O), sulfuric acid (H 2 SO 4 ), phosphoric acid (H 3 PO 4 ), chromic acid, sodium nitrate (NaNO 3 ), sodium chloride (NaCl). The at least one selected from the group consisting of glycerol is mixed, but is not limited thereto.

在電解槽1000的內部可以容納電解研磨物件2000。電解研磨物件2000浸於電解液1100內。電解研磨物件2000的研磨面可以包括電解研磨物件2000的外側、內側、底面等。在電解槽1000的外側還可以配置有整流器。整流器可以向電解研磨物件接入正極(+)的電壓,可以向負極框架3000接入負極(-)的電壓。整流器可以借助於電線等而與電解研磨物件2000電性連接。An electrolytic abrasive article 2000 can be housed inside the electrolytic cell 1000. The electrolytically polished article 2000 is immersed in the electrolyte 1100. The abrasive surface of the electrolytically polished article 2000 may include the outer side, the inner side, the bottom surface, and the like of the electrolytically polished article 2000. A rectifier may also be disposed outside the electrolytic cell 1000. The rectifier can connect the voltage of the positive electrode (+) to the electrolytically polished object, and can input the voltage of the negative electrode (-) to the negative electrode frame 3000. The rectifier can be electrically connected to the electrolytic abrasive article 2000 by means of a wire or the like.

負極框架3000可以配置於電解研磨物件2000的內部及外部。負極框架3000可以與電解研磨物件2000的研磨面隔開既定間隔配置。負極框架3000可以選擇性地研磨作為電解研磨物件2000研磨面的內側、外側或底面,或者研磨所有面。在本實施例中,為了說明的便利,對負極框架3000配置於電解研磨物件2000的內側的結構進行說明。The negative electrode frame 3000 may be disposed inside and outside the electrolytically polished article 2000. The negative electrode frame 3000 may be disposed at a predetermined interval from the polishing surface of the electrolytic abrasive article 2000. The negative electrode frame 3000 can selectively grind the inner side, the outer side or the bottom surface of the abrasive surface of the electroabrasive article 2000, or grind all the faces. In the present embodiment, a configuration in which the negative electrode frame 3000 is disposed inside the electrolytically polished article 2000 will be described for convenience of explanation.

負極框架3000可以包括格子結構的板形狀。負極框架3000可以為導電率卓越的不銹鋼材料,但並不限定於此。負極框架3000可以為條(bar)形狀、L字形狀、角形狀、棒形狀、線網、孔板金屬、圓形狀的板。The negative electrode frame 3000 may include a plate shape of a lattice structure. The negative electrode frame 3000 may be a stainless steel material having excellent electrical conductivity, but is not limited thereto. The negative electrode frame 3000 may be a bar shape, an L shape, an angular shape, a rod shape, a wire mesh, an orifice metal, or a circular plate.

負極框架3000沿著電解研磨物件200的研磨面配置,因而當電解研磨物件2000以上部開放的四邊箱形狀形成時,與此對應,多個負極框架3000可以以四邊箱形狀形成。The negative electrode frame 3000 is disposed along the polishing surface of the electrolytically polished article 200, and thus, when the shape of the four-sided box in which the upper portion of the electrolytic abrasive article 2000 is opened is formed, the plurality of negative electrode frames 3000 may be formed in a four-sided box shape.

負極框架3000可以包括第一負極板3100和第二負極板3300。第一負極板3100與第二負極板3300以格子結構形成。第一負極板3100可以以長桿形狀形成。第一負極板3100可以由多個板構成,構成得上下隔開地配置。The negative electrode frame 3000 may include a first negative electrode plate 3100 and a second negative electrode plate 3300. The first negative electrode plate 3100 and the second negative electrode plate 3300 are formed in a lattice structure. The first negative electrode plate 3100 may be formed in a long rod shape. The first negative electrode plate 3100 may be composed of a plurality of plates and configured to be vertically spaced apart.

第二負極板3300可以以長桿形狀形成。第二負極板3300可以由多個板構成,構成得左右隔開配置。第一負極板3100和第二負極板3300可以配置得構成90度,但並不限定於此。The second negative electrode plate 3300 may be formed in a long rod shape. The second negative electrode plate 3300 may be composed of a plurality of plates and configured to be spaced apart from each other. The first negative electrode plate 3100 and the second negative electrode plate 3300 may be disposed to form 90 degrees, but are not limited thereto.

第一負極板3100與第二負極板3300交叉的區域可以借助於螺絲等而鉚合。第一負極板3100與第二負極板3300交叉的區域也可以借助於C型夾具而固定。The region where the first negative electrode plate 3100 and the second negative electrode plate 3300 intersect may be riveted by means of screws or the like. The region where the first negative electrode plate 3100 and the second negative electrode plate 3300 intersect may also be fixed by means of a C-shaped jig.

負極框架3000如果與電解研磨物件2000接觸,則發生短路。為了防止這種情況,負極框架3000應構成得與電解研磨物件2000的側面及底面隔開。電解研磨物件2000的側面可以調節負極框架3000的第一負極板3100的長度,從電解研磨物件隔開配置。When the negative electrode frame 3000 comes into contact with the electrolytic abrasive article 2000, a short circuit occurs. In order to prevent this, the negative electrode frame 3000 should be formed to be spaced apart from the side and bottom surfaces of the electrolytically polished article 2000. The side of the electrolytically polished article 2000 can adjust the length of the first negative electrode plate 3100 of the negative electrode frame 3000 to be spaced apart from the electrolytically polished article.

負極框架3000可以配備有本實施例的電極隔開構件4000,以便從電解研磨物件2000的底面隔開。The negative electrode frame 3000 may be equipped with the electrode partitioning member 4000 of the present embodiment to be spaced apart from the bottom surface of the electrolytic abrasive article 2000.

電極隔開構件4000可以以絕緣材質形成。電極隔開構件4000可以以能夠承受負極框架3000重量且耐酸性強的材質形成。電極隔開構件4000可能包括PVC、橡膠、聚氨酯橡膠、電木中某一者。電極隔開構件4000以絕緣材質形成,從而可以防止負極框架與作為正極的電解物件物短路。電極隔開構件4000的形狀可能具有寬度向下部越來越窄的形狀,但並不限定於此。The electrode partitioning member 4000 may be formed of an insulating material. The electrode partition member 4000 may be formed of a material that can withstand the weight of the negative electrode frame 3000 and is highly resistant to acid. The electrode spacing member 4000 may include one of PVC, rubber, urethane rubber, bakelite. The electrode partitioning member 4000 is formed of an insulating material, so that the negative electrode frame can be prevented from being short-circuited with the electrolytic object as the positive electrode. The shape of the electrode partitioning member 4000 may have a shape in which the width is narrower toward the lower portion, but is not limited thereto.

電極隔開構件4000可以配置於電解研磨物件2000的側壁上部。在負極框架3000的一側,為了支撐負極框架3000而可以結合有支架7000。支架7000可以以條(bar)形狀、L字形狀、角形狀、棒形狀、線網、孔板金屬、圓形狀形成。支架7000可以與第一負極板3100平行地配置。支架7000可以與第二負極板3300的上部一側結合。支架7000可以與第二負極板3300的一部分或全體結合。支架7000可以以配置於電解研磨物件2000側壁上部的方式長長地形成。支架7000可以與電解研磨物件2000的一側連接。支架7000可以以金屬材質形成。支架7000可以是與電解研磨物件2000連接而用於傳遞正極的正極支架。The electrode partitioning member 4000 may be disposed on an upper portion of the side wall of the electroabrasive article 2000. On one side of the negative electrode frame 3000, a bracket 7000 may be coupled in order to support the negative electrode frame 3000. The bracket 7000 may be formed in a bar shape, an L shape, an angular shape, a rod shape, a wire mesh, an orifice metal, or a circular shape. The bracket 7000 may be disposed in parallel with the first negative electrode plate 3100. The bracket 7000 may be coupled to the upper side of the second negative plate 3300. The bracket 7000 may be combined with a part or the entirety of the second negative electrode plate 3300. The holder 7000 may be formed long in a manner disposed on the upper portion of the side wall of the electrolytically polished article 2000. The bracket 7000 can be coupled to one side of the electroabrasive article 2000. The bracket 7000 can be formed of a metal material. The holder 7000 may be a positive holder that is connected to the electroabrasive article 2000 for transferring the positive electrode.

在支架7000與負極框架3000之間,可以還配置有絕緣板5000。負極框架3000、絕緣板5000及支架7000在重疊的狀態下,可以借助於C型夾具500而堅固固定。如果支架7000不與電解研磨物件2000連接,而是起到作為普通支架的作用,則負極框架3000與支架7000之間的絕緣板5000可以去除。另外,如果支架7000起到作為普通支架的作用,則可以由絕緣材質的材料形成。An insulating plate 5000 may be further disposed between the bracket 7000 and the negative electrode frame 3000. The negative electrode frame 3000, the insulating plate 5000, and the bracket 7000 can be firmly fixed by the C-clamp 500 in a state of being overlapped. If the bracket 7000 is not connected to the electrolytic abrasive article 2000 but functions as a normal bracket, the insulating plate 5000 between the negative electrode frame 3000 and the bracket 7000 can be removed. In addition, if the bracket 7000 functions as a general bracket, it may be formed of a material of an insulating material.

第二實施例變形例的電解研磨裝置具有的效果是,可以利用支架,將負極框架有效安裝於電解研磨物件的內側及外側。The electrolytic polishing apparatus according to the modification of the second embodiment has an effect that the negative electrode frame can be efficiently attached to the inner side and the outer side of the electrolytically polished object by the bracket.

圖19是顯示第二實施例的電解研磨裝置另一變形例的剖面圖。電解研磨裝置以負極框架配置於電解研磨裝置外側的結構為中心進行說明。Fig. 19 is a cross-sectional view showing another modification of the electrolytic polishing apparatus of the second embodiment. The electrolytic polishing apparatus will be described focusing on a structure in which the negative electrode frame is disposed outside the electrolytic polishing apparatus.

如圖19所示,第二實施例另一變形例的電解研磨裝置可以包括:電解槽1000,其在內部配備有容納電解研磨物件2000和電解液1100的容納空間;負極框架3000,其配置於所述電解研磨物件2000的研磨面的外側;支架7000,其結合於所述負極框架3000的一側;電極隔開構件4000,其結合於所述支架7000的一側,使所述負極框架3000從所述電解研磨物件的底面隔開。As shown in FIG. 19, the electrolytic polishing apparatus according to another modification of the second embodiment may include: an electrolytic cell 1000 equipped with an accommodating space for accommodating the electrolytic abrasive article 2000 and the electrolytic solution 1100; and a negative electrode frame 3000 disposed at An outer side of the polishing surface of the electrolithically polished article 2000; a bracket 7000 coupled to one side of the negative electrode frame 3000; and an electrode partitioning member 4000 coupled to one side of the bracket 7000 to cause the negative electrode frame 3000 Separated from the bottom surface of the electroabrasive article.

電解槽1000可以以在內部配備有容納空間的箱形狀形成。電解槽1000可以包括圓筒形、多邊箱或環形狀,但其形狀並不限定。在電解槽1000的內部可以填充有電解液1100。作為電解液1100,可以將從由蒸餾水(H2 O)、硫酸(H2 SO4)類、磷酸(H3 PO4 )類、鉻酸類、硝酸鈉(NaNO3 )、氯化鈉(NaCl)、甘油類構成的組中選擇的至少一種物質混合構成,但並不限定於此。The electrolytic cell 1000 may be formed in a box shape in which an accommodation space is provided inside. The electrolytic cell 1000 may include a cylindrical shape, a polygonal box or a ring shape, but the shape thereof is not limited. The inside of the electrolytic cell 1000 may be filled with an electrolytic solution 1100. As the electrolytic solution 1100, it may be derived from distilled water (H 2 O), sulfuric acid (H 2 SO 4 ), phosphoric acid (H 3 PO 4 ), chromic acid, sodium nitrate (NaNO 3 ), sodium chloride (NaCl), At least one selected from the group consisting of glycerol is mixed, but is not limited thereto.

在電解槽1000的內部可以容納電解研磨物件2000。電解研磨物件2000浸於電解液1100內。電解研磨物件2000的研磨面可以包括電解研磨物件2000的外側、內側、底面等。在電解槽1000的外側還可以配置有整流器。整流器可以向電解研磨物件接入正極(+)的電壓,可以向負極框架3000接入負極(-)的電壓。整流器可以借助於電線等而與電解研磨物件2000電性連接。An electrolytic abrasive article 2000 can be housed inside the electrolytic cell 1000. The electrolytically polished article 2000 is immersed in the electrolyte 1100. The abrasive surface of the electrolytically polished article 2000 may include the outer side, the inner side, the bottom surface, and the like of the electrolytically polished article 2000. A rectifier may also be disposed outside the electrolytic cell 1000. The rectifier can connect the voltage of the positive electrode (+) to the electrolytically polished object, and can input the voltage of the negative electrode (-) to the negative electrode frame 3000. The rectifier can be electrically connected to the electrolytic abrasive article 2000 by means of a wire or the like.

負極框架3000可以配置於電解研磨物件2000的外部。負極框架3000可以與電解研磨物件2000外側的研磨面隔開既定間隔配置。The negative electrode frame 3000 may be disposed outside the electrolytic abrasive article 2000. The negative electrode frame 3000 may be disposed at a predetermined interval from the polishing surface on the outer side of the electrolytic abrasive article 2000.

負極框架3000可以包括格子結構的板形狀。負極框架3000可以為導電率卓越的不銹鋼材料,但並不限定於此。負極框架3000可以為條(bar)形狀、L字形狀、角形狀、棒形狀、線網、孔板金屬、圓形狀的板。The negative electrode frame 3000 may include a plate shape of a lattice structure. The negative electrode frame 3000 may be a stainless steel material having excellent electrical conductivity, but is not limited thereto. The negative electrode frame 3000 may be a bar shape, an L shape, an angular shape, a rod shape, a wire mesh, an orifice metal, or a circular plate.

負極框架3000沿著電解研磨物件2000的研磨面配置,因而當電解研磨物件2000以上部開放的四邊箱形狀形成時,與此對應,多個負極框架3000可以以四邊箱形狀形成。The negative electrode frame 3000 is disposed along the polishing surface of the electrolytically polished article 2000. Therefore, when the shape of the four-sided box in which the upper portion of the electrolytic abrasive article 2000 is opened is formed, the plurality of negative electrode frames 3000 may be formed in a four-sided box shape.

負極框架3000可以包括第一負極板3100和第二負極板3300。第一負極板3100與第二負極板3300以格子結構形成。第一負極板3100可以以長桿形狀形成。第一負極板3100可以由多個板構成,構成得上下隔開地配置。The negative electrode frame 3000 may include a first negative electrode plate 3100 and a second negative electrode plate 3300. The first negative electrode plate 3100 and the second negative electrode plate 3300 are formed in a lattice structure. The first negative electrode plate 3100 may be formed in a long rod shape. The first negative electrode plate 3100 may be composed of a plurality of plates and configured to be vertically spaced apart.

第二負極板3300可以以長桿形狀形成。第二負極板3300可以由多個板構成,構成得左右隔開配置。第一負極板3100和第二負極板3300可以配置得構成90度,但並不限定於此。The second negative electrode plate 3300 may be formed in a long rod shape. The second negative electrode plate 3300 may be composed of a plurality of plates and configured to be spaced apart from each other. The first negative electrode plate 3100 and the second negative electrode plate 3300 may be disposed to form 90 degrees, but are not limited thereto.

第一負極板3100與第二負極板3300交叉的區域可以借助於螺絲等而鉚合。第一負極板3100與第二負極板3300交叉的區域也可以借助於C型夾具而固定。The region where the first negative electrode plate 3100 and the second negative electrode plate 3300 intersect may be riveted by means of screws or the like. The region where the first negative electrode plate 3100 and the second negative electrode plate 3300 intersect may also be fixed by means of a C-shaped jig.

電極隔開構件4000可以以絕緣材質形成。電極隔開構件4000可以以能夠承受負極框架3000重量且耐酸性強的材質形成。電極隔開構件4000可能包括PVC、橡膠、聚氨酯橡膠、電木中某一者。電極隔開構件4000以絕緣材質形成,從而可以防止負極框架3000與作為正極的電解物件物2000短路。電極隔開構件4000的形狀可能具有寬度向下部越來越窄的形狀,但並不限定於此。The electrode partitioning member 4000 may be formed of an insulating material. The electrode partition member 4000 may be formed of a material that can withstand the weight of the negative electrode frame 3000 and is highly resistant to acid. The electrode spacing member 4000 may include one of PVC, rubber, urethane rubber, bakelite. The electrode partitioning member 4000 is formed of an insulating material, so that the negative electrode frame 3000 can be prevented from being short-circuited with the electrolytic object 2000 as a positive electrode. The shape of the electrode partitioning member 4000 may have a shape in which the width is narrower toward the lower portion, but is not limited thereto.

電極隔開構件4000可以配置於電解研磨物件2000的側壁上部。在負極框架3000的一側,為了支撐負極框架3000而可以結合有支架7000。The electrode partitioning member 4000 may be disposed on an upper portion of the side wall of the electroabrasive article 2000. On one side of the negative electrode frame 3000, a bracket 7000 may be coupled in order to support the negative electrode frame 3000.

支架7000可以包括第一支架7100和第二支架7200。第一支架7100可能支撐在電解研磨物件2000內側配置的負極框架3000。第二支架7200可以與第一支架7100垂直地配置,但並不限定於此。第二支架7200可以以條(bar)形狀、L字形狀、角形狀、棒形狀、線網、孔板金屬、圓形狀形成。The bracket 7000 can include a first bracket 7100 and a second bracket 7200. The first bracket 7100 may support the negative electrode frame 3000 disposed inside the electrolytic abrasive article 2000. The second bracket 7200 may be disposed perpendicular to the first bracket 7100, but is not limited thereto. The second bracket 7200 may be formed in a bar shape, an L shape, an angular shape, a rod shape, a wire mesh, an orifice metal, or a circular shape.

在第二支架7200,可以與配置於最外廓的第二負極板3300的上部一側結合。第二支架7200可以與第二負極板3300的一部分或全體結合。The second holder 7200 can be coupled to the upper side of the second negative electrode plate 3300 disposed on the outermost side. The second bracket 7200 may be combined with a part or the whole of the second negative electrode plate 3300.

支架7000可以是與電解研磨物件2000連接而用於傳遞正極的正極支架。此時,在第二支架7200與第二負極板3300之間可以還配置有絕緣板。第二負極板3300、絕緣板及第二支架7200在重疊狀態下,可以借助於C型夾具500堅固地固定。如果支架7000不與電解研磨物件2000連接,而是起到作為普通支架的作用,則第二負極板3300與第二支架7200之間的絕緣板可以去除。另外,如果支架7000起到作為普通支架的作用,則可以由絕緣材質的材料形成。The holder 7000 may be a positive holder that is connected to the electroabrasive article 2000 for transferring the positive electrode. At this time, an insulating plate may be further disposed between the second holder 7200 and the second negative electrode plate 3300. The second negative electrode plate 3300, the insulating plate, and the second holder 7200 can be firmly fixed by the C-clamp 500 in an overlapped state. If the bracket 7000 is not connected to the electrolytic abrasive article 2000 but functions as a normal bracket, the insulating plate between the second negative electrode plate 3300 and the second bracket 7200 can be removed. In addition, if the bracket 7000 functions as a general bracket, it may be formed of a material of an insulating material.

第二實施例變形例的電解研磨裝置具有的效果是,可以利用支架,將負極框架3000有效安裝於電解研磨物件2000的內側及外側。The electrolytic polishing apparatus according to the modification of the second embodiment has an effect that the negative electrode frame 3000 can be efficiently attached to the inner side and the outer side of the electrolytic abrasive article 2000 by means of a bracket.

經由一實施例通過在負極框架3000一側配置電極隔開構件4000,使負極框架3000配置於電解研磨物件2000上,從而可以將負極框架3000有效配置於沒有另外的托架的電解研磨物件2000的內部或外部,因而可以將負極框架3000迅速配置於電解研磨物件2000,可以在提高電解研磨工序效率的同時,接近而均一地配置,電解研磨品質可以顯著提高。By arranging the electrode partitioning member 4000 on the side of the negative electrode frame 3000 via an embodiment, the negative electrode frame 3000 is disposed on the electrolytically polished article 2000, so that the negative electrode frame 3000 can be effectively disposed on the electrolytically polished article 2000 without the additional carrier. Internal or external, the negative electrode frame 3000 can be quickly disposed on the electrolytically polished article 2000, and the efficiency of the electrolytic polishing process can be improved while being uniformly and uniformly arranged, and the electrolytic polishing quality can be remarkably improved.

另外,經由一實施例逐漸減小地形成電極隔開構件4000的下部寬度,插入結合於在電解研磨物件2000的底部形成的槽或孔,從而具有能夠更有效地固定負極框架3000的效果。Further, the lower width of the electrode partitioning member 4000 is gradually reduced by an embodiment, and the groove or the hole formed in the bottom of the electrolytically polished article 2000 is inserted, thereby having an effect of being able to more effectively fix the negative electrode frame 3000.

經由一實施例通過使電極隔開構件4000配置於電解研磨物件2000的側壁部上部,從而具有在使負極框架3000從電解研磨物件2000的底部隔開的同時可以穩定地支撐負極框架3000的效果。By disposing the electrode partitioning member 4000 on the upper portion of the side wall portion of the electro-grinding article 2000, the effect of stably supporting the negative electrode frame 3000 while separating the negative electrode frame 3000 from the bottom of the electroabrasive article 2000 is provided.

另外,經由一實施例通過使電極隔開構件4000不與電解研磨物件2000的底部接觸地配置,從而具有能夠防止因電極隔開構件4000與電解研磨物件2000接觸導致的損傷的效果。In addition, by arranging the electrode partitioning member 4000 not in contact with the bottom of the electrolytic abrasive article 2000 via an embodiment, there is an effect that damage due to contact of the electrode partitioning member 4000 with the electrolytic abrasive article 2000 can be prevented.

另外,經由一實施例通過利用支架7000,從而具有可以將負極框架3000有效安裝於電解研磨物件2000的內側及外側的效果。Further, by using the bracket 7000 via an embodiment, there is an effect that the negative electrode frame 3000 can be efficiently attached to the inner side and the outer side of the electrolytically polished article 2000.

100‧‧‧電解槽100‧‧‧electrolyzer

1000‧‧‧電解槽1000‧‧‧electrolyzer

1100‧‧‧電解液1100‧‧‧ electrolyte

200‧‧‧電解研磨物件200‧‧‧Electrically ground objects

200a‧‧‧底部200a‧‧‧ bottom

200b‧‧‧側壁部200b‧‧‧ Sidewall

210‧‧‧凸出部210‧‧‧ protruding parts

2000‧‧‧電解研磨物件2000‧‧‧Electrically ground objects

2100‧‧‧槽/孔2100‧‧‧ slots/holes

300‧‧‧負極框架300‧‧‧negative frame

300a‧‧‧第一負極框架300a‧‧‧First negative frame

300b‧‧‧第二負極框架300b‧‧‧second negative frame

310‧‧‧第一負極板310‧‧‧First negative plate

310a‧‧‧第一負極板310a‧‧‧First negative plate

312‧‧‧第一支架312‧‧‧First bracket

314‧‧‧第二支架314‧‧‧second bracket

330‧‧‧第二負極板330‧‧‧Second negative plate

330a‧‧‧第二負極板330a‧‧‧Second negative plate

332‧‧‧第一支架332‧‧‧First bracket

334‧‧‧第二支架334‧‧‧second bracket

3000‧‧‧負極框架3000‧‧‧negative frame

3100‧‧‧第一負極板3100‧‧‧First negative plate

3120‧‧‧第一支架3120‧‧‧First bracket

3140‧‧‧第二支架3140‧‧‧second bracket

3300‧‧‧第二負極板3300‧‧‧Second negative plate

3320‧‧‧第一支架3320‧‧‧First bracket

3340‧‧‧第二支架3340‧‧‧second bracket

400‧‧‧電極放置構件400‧‧‧electrode placement member

400a‧‧‧電極放置構件400a‧‧‧electrode placement member

410‧‧‧第一面410‧‧‧ first side

430‧‧‧第二面430‧‧‧ second side

4000‧‧‧電極隔開構件4000‧‧‧electrode separating member

4100‧‧‧第一支撐部4100‧‧‧First support

4300‧‧‧第二支撐部4300‧‧‧second support

4500‧‧‧內側支撐構件4500‧‧‧Inside support member

4600‧‧‧外側支撐構件4600‧‧‧Outer support members

500‧‧‧夾具500‧‧‧ fixture

510‧‧‧固定部510‧‧‧Fixed Department

520‧‧‧絕緣件520‧‧‧Insulation

530‧‧‧凸部530‧‧‧ convex

540‧‧‧第一主體540‧‧‧ first subject

550‧‧‧第二主體550‧‧‧ second subject

550a‧‧‧導電性物質550a‧‧‧Electrically conductive substance

550b‧‧‧絕緣膜550b‧‧‧Insulation film

5000‧‧‧絕緣板5000‧‧‧Insulation board

600‧‧‧托架600‧‧‧ bracket

700‧‧‧絕緣構件700‧‧‧Insulating components

7000‧‧‧支架7000‧‧‧ bracket

7100‧‧‧第一支架7100‧‧‧First bracket

7200‧‧‧第二支架7200‧‧‧second bracket

L‧‧‧長度L‧‧‧ length

T‧‧‧厚度T‧‧‧ thickness

W‧‧‧寬度W‧‧‧Width

[圖1]是顯示第一實施例的電解研磨裝置的分解立體圖。 [圖2]是顯示第一實施例的電解研磨裝置的結合立體圖。 [圖3]是顯示第一實施例的電解研磨裝置的電極框架結合的狀態的結合立體圖。 [圖4a]-[圖4b]分別是顯示第一實施例的電解研磨裝置的夾具的立體圖。 [圖5]是顯示第一實施例的電解研磨裝置的負極框架的變形例的立體圖。 [圖6]-[圖8] 分別是顯示第一實施例的電解研磨裝置的變形例的立體圖。 [圖9]是顯示第二實施例的電解研磨裝置的剖面圖。 [圖10]是顯示圖9的電極隔開構件的立體圖。 [圖11]是顯示圖9的電極隔開構件固定於電解研磨物件的狀態的概略立體圖。 [圖12]-[圖14] 分別是顯示第二實施例的電極隔開構件的多樣結構的立體圖。 [圖15]是顯示圖9的負極框架的變形例的立體圖。 [圖16]-[圖17]分別是顯示第二實施例的電解研磨裝置的變形例的剖面圖。 [圖18]是顯示圖17的負極框架結合於支架的狀態的立體圖。 [圖19]是顯示第二實施例的電解研磨裝置另一變形例的剖面圖。Fig. 1 is an exploded perspective view showing the electrolytic polishing apparatus of the first embodiment. Fig. 2 is a perspective view showing the combination of the electrolytic polishing apparatus of the first embodiment. Fig. 3 is a combined perspective view showing a state in which an electrode frame of the electrolytic polishing apparatus of the first embodiment is joined. [Fig. 4a] - [Fig. 4b] are respectively perspective views showing the jig of the electrolytic polishing apparatus of the first embodiment. Fig. 5 is a perspective view showing a modification of the negative electrode frame of the electrolytic polishing apparatus of the first embodiment. 6] FIG. 8 is a perspective view showing a modification of the electrolytic polishing apparatus of the first embodiment. Fig. 9 is a cross-sectional view showing the electrolytic polishing apparatus of the second embodiment. FIG. 10 is a perspective view showing the electrode partitioning member of FIG. 9. FIG. Fig. 11 is a schematic perspective view showing a state in which the electrode partitioning member of Fig. 9 is fixed to an electrolytically polished article. [Fig. 12] - Fig. 14 are perspective views showing various structures of the electrode partitioning members of the second embodiment, respectively. Fig. 15 is a perspective view showing a modification of the negative electrode frame of Fig. 9 . [Fig. 16] Fig. 17 is a cross-sectional view showing a modification of the electrolytic polishing apparatus of the second embodiment. FIG. 18 is a perspective view showing a state in which the negative electrode frame of FIG. 17 is coupled to a holder. FIG. Fig. 19 is a cross-sectional view showing another modification of the electrolytic polishing apparatus of the second embodiment.

Claims (10)

一種電解研磨用電極框架,該電極框架在內部配備有一容納電解研磨物件和一電解液的容納空間的電解槽中使用,包括: 一電極放置構件,其結合於該電解研磨物件的至少一個以上的凸出部,包括: 與該電解研磨物件的該凸出部結合的一第一面; 與該第一負極框架結合的一第二面;及 該電極放置構件即使不利用一放出口,也與該電解研磨物件的該凸出部結合;及 一第一負極框架,其以複數格子結構形成,其中至少一個以上的該格子結構一側與該電極放置構件結合,與該電解研磨物件的一研磨面隔開既定間隔配置。An electrode frame for electrolytic polishing, the electrode frame being internally provided with an electrolytic cell for accommodating an electrolytic abrasive article and an electrolyte containing space, comprising: an electrode placement member coupled to at least one of the electrolytic abrasive article The protruding portion includes: a first surface coupled to the protruding portion of the electrolytic abrasive article; a second surface coupled to the first negative electrode frame; and the electrode placement member, even if a discharge port is not utilized The protruding portion of the electrolytic abrasive article is combined; and a first negative electrode frame formed by a plurality of lattice structures, wherein at least one of the lattice structure sides is combined with the electrode placement member, and a grinding of the electrolytic abrasive article The faces are separated by an established interval. 如請求項1所述的電解研磨用電極框架,其中該第二面與該第一面以一既定角度折彎形成,該第一面借助於該電解研磨物件的該凸出部和一第一夾具而固定,該電極放置構件的該第二面借助於該第一負極框架的一側和該第二夾具而固定。The electrode frame for electrolytic polishing according to claim 1, wherein the second surface is formed by bending at a predetermined angle with the first surface, and the first surface is formed by the protrusion of the electrolytically polished object and a first The second surface of the electrode placement member is fixed by means of a side of the first negative electrode frame and the second jig. 如請求項2所述的電解研磨用電極框架,其中該電解研磨物件包括形成有一下部凸出部的一底部、從該底部向側面折彎形成的一個以上的側壁部,還包括與該電解研磨物件的該側壁部相向配置的一第二負極框架;該電極放置構件從該電解研磨物件的該底部與側面隔開地延長形成,該第二負極框架固定於該電極放置構件。The electrode frame for electrolytic polishing according to claim 2, wherein the electrolytic abrasive article comprises a bottom portion formed with a lower projection portion, and one or more side wall portions formed by bending from the bottom portion to the side surface, further comprising the electrolytic polishing a second negative electrode frame is disposed opposite to the side wall portion of the object; the electrode placement member is formed to extend from the bottom and the side of the electrolytic abrasive article, and the second negative electrode frame is fixed to the electrode placement member. 如請求項2所述的電解研磨用電極框架,其中在該電極放置構件,還配置有用於放置該第一負極框架的一負極框架托架,該負極框架托架與該電極放置構件的該第二面結合,該第一負極框架與該負極框架托架重疊固定。The electrode frame for electrolytic polishing according to claim 2, wherein a negative electrode frame bracket for arranging the first negative electrode frame, the negative electrode frame carrier and the electrode placement member are further disposed on the electrode placement member The first negative electrode frame is overlapped and fixed with the negative electrode frame bracket. 如請求項1所述的電解研磨用電極框架,其中該第一負極框架包括沿一第一方向配置並由多個支架構成的一第一負極板、沿與該第一方向構成一既定角度的一第二方向配置並由多個支架構成的一第二負極板,該第一負極板包括一第一支架和一第二支架,該第一支架在一部分重疊於該第二支架的狀態下,沿從該第二支架遠離或靠近的方向移動。The electrode frame for electrolytic polishing according to claim 1, wherein the first negative electrode frame comprises a first negative electrode plate disposed along a first direction and composed of a plurality of brackets, and forming a predetermined angle along the first direction a second negative plate configured in a second direction and composed of a plurality of brackets, the first negative plate includes a first bracket and a second bracket, and the first bracket is partially overlapped with the second bracket, Moving in a direction away from or close to the second bracket. 一種電極框架,該電極框架用於在內部配備有一容納電解研磨物件和一電解液的容納空間的電解槽,包括: 一負極框架,其配置於該電解研磨物件的研磨面的一側;及 一電極隔開構件,其結合於該負極框架,使該負極框架從該電解研磨物件的底面隔開,該電極隔開構件包括接合於該電解研磨物件的一底面並支撐該負極框架的一第一電極隔開構件,該第一電極隔開構件即使不利用一放出口也支撐該負極框架。An electrode frame for internally arranging an electrolytic cell for accommodating an electrolytic abrasive article and an electrolyte receiving space, comprising: a negative electrode frame disposed on one side of the polishing surface of the electrolytic abrasive article; and An electrode separating member coupled to the negative electrode frame to partition the negative electrode frame from a bottom surface of the electrolytic abrasive article, the electrode separating member including a first surface joined to the bottom surface of the electrolytic abrasive article and supporting the negative electrode frame The electrode partitioning member that supports the negative electrode frame even without using a discharge port. 如請求項6所述的電極框架,其中在該電解研磨物件的該底部形成有一槽或一孔,該電極隔開構件還包括供下部一部分插入結合於該槽或孔的一第二電極隔開構件,該第二電極隔開構件的下部一部分的寬度逐漸減小。The electrode frame of claim 6, wherein a groove or a hole is formed in the bottom of the electrolytic abrasive article, the electrode spacing member further comprising a second electrode for the lower portion to be inserted and coupled to the groove or the hole. The member, the width of the lower portion of the second electrode spacing member is gradually reduced. 如請求項6所述的電極框架,其中該電極隔開構件包括一不銹鋼材料,在該電極隔開構件的表面塗布有一絕緣物質,該電極隔開構件與該負極框架重疊配置,借助於一第一夾具而固定,該電解研磨物件包括一側壁部,該電極隔開構件配置於該電解研磨物件的該側壁部的上部。The electrode frame according to claim 6, wherein the electrode separating member comprises a stainless steel material, and an insulating material is coated on a surface of the electrode separating member, and the electrode separating member is disposed to overlap the negative electrode frame by means of a first Fixed by a clamp, the electrolytic abrasive article includes a side wall portion, and the electrode partitioning member is disposed at an upper portion of the side wall portion of the electrolytic abrasive article. 如請求項6所述的電極框架,其中在該負極框架的上部還結合有一支架,在該支架的一側結合有該電極隔開構件,該電解研磨物件包括一側壁部,該電極隔開構件配置結合於該電解研磨物件的該側壁部的上部。The electrode frame according to claim 6, wherein a bracket is further coupled to an upper portion of the negative electrode frame, and the electrode separating member is coupled to one side of the bracket, the electrolytic abrasive article comprising a side wall portion, the electrode separating member An upper portion of the side wall portion coupled to the electrolytic abrasive article is disposed. 一種包括請求項1至9中任意一項的電極框架的電解研磨裝置。An electrolytic polishing apparatus comprising the electrode frame of any one of claims 1 to 9.
TW107134547A 2017-09-28 2018-09-28 Electrode frame for electrolytic polishing and electrolytic polishing device including the same TWI703241B (en)

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