[go: up one dir, main page]

TWI703241B - Electrode frame for electrolytic polishing and electrolytic polishing device including the same - Google Patents

Electrode frame for electrolytic polishing and electrolytic polishing device including the same Download PDF

Info

Publication number
TWI703241B
TWI703241B TW107134547A TW107134547A TWI703241B TW I703241 B TWI703241 B TW I703241B TW 107134547 A TW107134547 A TW 107134547A TW 107134547 A TW107134547 A TW 107134547A TW I703241 B TWI703241 B TW I703241B
Authority
TW
Taiwan
Prior art keywords
electrode
electrolytic polishing
frame
electrolytic
negative
Prior art date
Application number
TW107134547A
Other languages
Chinese (zh)
Other versions
TW201915226A (en
Inventor
黃在祥
Original Assignee
南韓商奧森里德股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from KR1020170125739A external-priority patent/KR101848264B1/en
Priority claimed from KR1020170125737A external-priority patent/KR101848251B1/en
Application filed by 南韓商奧森里德股份有限公司 filed Critical 南韓商奧森里德股份有限公司
Publication of TW201915226A publication Critical patent/TW201915226A/en
Application granted granted Critical
Publication of TWI703241B publication Critical patent/TWI703241B/en

Links

Images

Classifications

    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25FPROCESSES FOR THE ELECTROLYTIC REMOVAL OF MATERIALS FROM OBJECTS; APPARATUS THEREFOR
    • C25F3/00Electrolytic etching or polishing
    • C25F3/16Polishing
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25FPROCESSES FOR THE ELECTROLYTIC REMOVAL OF MATERIALS FROM OBJECTS; APPARATUS THEREFOR
    • C25F7/00Constructional parts, or assemblies thereof, of cells for electrolytic removal of material from objects; Servicing or operating

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)

Abstract

本發明涉及電解研磨用電極框架及包括其的電解研磨裝置。電解研磨用電極框架作為在內部配備有容納電解研磨物件和電解液的容納空間的電解槽中使用的電極框架,可以包括:電極放置構件,其結合於所述電解研磨物件的至少一個以上的凸出部;及第一負極框架,其以格子結構形成,至少一個以上的一側與所述電極放置構件結合,與電解研磨物件的研磨面隔開既定間隔配置。電極放置構件可以包括與電解研磨物件的凸出部結合的第一面、與第一負極框架結合的第二面。電極放置構件即使不利用放出口,也可以與電解研磨物件的凸出部結合。The present invention relates to an electrode frame for electrolytic polishing and an electrolytic polishing device including the electrode frame. The electrode frame for electrolytic polishing, as an electrode frame used in an electrolytic cell equipped with a storage space for accommodating an electrolytic polishing object and an electrolyte solution, may include: an electrode placement member coupled to at least one protrusion of the electrolytic polishing object And a first negative electrode frame, which is formed in a lattice structure, at least one side is combined with the electrode placement member, and is arranged at a predetermined interval from the polishing surface of the electrolytic polishing object. The electrode placement member may include a first surface combined with the protrusion of the electrolytic polishing object and a second surface combined with the first negative electrode frame. Even if the electrode placement member does not use the discharge port, it can be combined with the protrusion of the electrolytic polishing object.

Description

電解研磨用電極框架及包括其的電解研磨裝置Electrode frame for electrolytic polishing and electrolytic polishing device including the same

涉及電解研磨用電極框架及包括其的電解研磨裝置,涉及一種用於提高電解研磨物件的研磨品質的電解研磨裝置。It relates to an electrode frame for electrolytic polishing and an electrolytic polishing device including the same, and relates to an electrolytic polishing device for improving the polishing quality of an electrolytic polishing object.

一般而言,電解研磨(Electro polishing)是一種將溶解於電解液的金屬製品用作正極(Anode)、將在電解液中不溶性的金屬用作負極(Cathode),通過向所述正極與負極之間施加電壓,在作為電解研磨物件的金屬製品的表面引起電解來研磨金屬製品表面的方法。Generally speaking, electro-polishing is a method of using metal products dissolved in the electrolyte as the positive electrode (Anode), and using the metal insoluble in the electrolyte as the negative electrode (Cathode). A method of polishing the surface of a metal product by applying a voltage while causing electrolysis on the surface of a metal product that is an electrolytic polishing object.

為了利用電解研磨來研磨金屬,在電解槽中填充電解液,將要研磨的金屬安裝為正極,將不溶解於電解液的金屬安裝為負極,然後向正極和負極施加直流。In order to grind metals by electrolytic grinding, an electrolytic bath is filled with electrolyte, the metal to be ground is installed as a positive electrode, and the metal that is not dissolved in the electrolyte is installed as a negative electrode, and then direct current is applied to the positive and negative electrodes.

進行電解研磨後,大量含有從正極溶解的金屬離子的高黏度液體層(黏性層)包圍正極。在因金屬離子而飽和的液體層中,金屬不再溶解,形成高正極電位,因而與氧活躍地結合而形成氧化物皮膜。此時,溶解的金屬離子主要累積於金屬表面的凹陷部分,在凹陷部分,金屬離子的移動和擴散小,電性導通不暢,因而金屬不溶解。相反,在金屬表面的凸出部分,金屬離子層形成得薄,因而電流集中,容易使金屬表面溶解,整體而言,金屬表面變得平滑。After electrolytic polishing, a high-viscosity liquid layer (viscous layer) containing a large amount of metal ions dissolved from the positive electrode surrounds the positive electrode. In the liquid layer saturated with metal ions, the metal no longer dissolves and forms a high positive electrode potential, and thus actively combines with oxygen to form an oxide film. At this time, the dissolved metal ions mainly accumulate in the concave part of the metal surface. In the concave part, the movement and diffusion of the metal ions are small, and the electrical conduction is not smooth, so the metal is not dissolved. On the contrary, in the protruding part of the metal surface, the metal ion layer is formed thinly, so the current concentrates and it is easy to dissolve the metal surface. On the whole, the metal surface becomes smooth.

電解研磨通過電解研磨裝置實施,以往技術的電解研磨裝置在電解槽內配置具有正極電位的電解研磨物件,使負極板隔開地配置於所述電解研磨物件的研磨面而構成。負極板應根據電解研磨物件的形狀而變更,因而根據電解研磨物件的形狀組裝後,安裝於電解槽內。The electrolytic polishing is performed by an electrolytic polishing device. The conventional electrolytic polishing device is configured by arranging an electrolytic polishing object having a positive electrode potential in an electrolytic tank, and arranging the negative electrode plate on the polishing surface of the electrolytic polishing object while being spaced apart. The negative plate should be changed according to the shape of the electrolytic grinding object, so it is assembled according to the shape of the electrolytic grinding object and installed in the electrolytic cell.

如上所述組裝的負極板應以不與電解研磨物件接觸的方式安裝於電解槽內。可是,負極板只有與電解研磨物件接近地保持既定距離並配置,才能實現均一研磨,提高電解研磨品質。The negative plate assembled as described above should be installed in the electrolytic cell in such a way that it does not contact the electrolytic grinding object. However, only when the negative electrode plate is kept close to the electrolytic grinding object and arranged at a predetermined distance, can uniform grinding be realized and the quality of electrolytic grinding can be improved.

但是在以往技術中,實際上無法將負極板以與電解研磨物件接近地保持既定距離的方式堅固地配置。However, in the prior art, it is actually impossible to firmly arrange the negative electrode plate so as to maintain a predetermined distance close to the electrolytic polishing object.

另一方面,本件申請的發明人研發了在電解研磨物件上形成的放出口使用負極托架而在使負極板接近電解研磨物件一側的同時均一地固定的發明,並獲專利授權(參照韓國授權專利10-1183218號)。On the other hand, the inventor of the present application developed an invention in which the negative electrode bracket is used on the discharge port formed on the electrolytically polished object to make the negative electrode plate close to the side of the electrolytically polished object while uniformly fixing the invention, and obtained a patent (refer to Korea Authorized patent No. 10-1183218).

但是,電解研磨物件由於其形狀多種多樣,因而發生在電解研磨物件上沒有諸如放出口的放置區域的情形。因此,碰到了無法使負極板在接近電解研磨物件的同時均一地安裝的技術問題。However, due to the various shapes of the electrolytic polishing object, there is no place area such as a discharge port on the electrolytic polishing object. Therefore, a technical problem was encountered that the negative plate cannot be installed uniformly while being close to the electrolytic polishing object.

現在,作為原有領域技術,將負極棒垂掛於電解槽,或以負極網形態形成大網後,將其垂掛於電解槽而大致地進行電解研磨,但卻是電解研磨品質或工序效率非常低的狀態。At present, as the original technology, the negative electrode rod is hung in the electrolytic tank, or after forming a large net in the form of the negative electrode net, the electrolytic polishing is roughly performed by hanging it in the electrolytic tank, but the quality of electrolytic polishing or process efficiency is very low status.

另外,當電解研磨物件無諸如放出口的放置區域時,根據電解研磨物件的形狀,發生需每次獨立地設置負極板的放置區域的麻煩。因此,設置放置區域直到執行電解研磨所需的時間相當長,發生組裝費用上升的問題。特別是當電解研磨物件的形狀為相當複雜的結構時,發生無法將負極框架設置於電解研磨物件一側的情形。In addition, when the electrolytic polishing object does not have a placement area such as a discharge port, depending on the shape of the electrolytic polishing object, the trouble of separately setting the placement area of the negative electrode plate each time occurs. Therefore, the time required for the placement area to be set until the electrolytic polishing is performed is quite long, causing a problem of increased assembly costs. In particular, when the shape of the electrolytic polishing object has a relatively complicated structure, it may not be possible to arrange the negative electrode frame on the side of the electrolytic polishing object.

現在,作為原有領域的技術,負極框架設置不觸及研磨物件構件程度的距離而將負極棒垂掛於電解槽,或以負極網形態形成大網後,將其垂掛於電解槽,大致進行電解研磨,但負極棒或負極網無法與研磨物件構件均一且接近地固定,因而實際上電解研磨品質或工序效率很低。Now, as a technology in the original field, the negative frame is set at a distance that does not touch the grinding object and the negative rod is hung in the electrolytic tank, or after a large net is formed in the form of a negative net, it is hung in the electrolytic tank to roughly perform electrolytic grinding. However, the negative electrode rod or the negative electrode mesh cannot be uniformly and closely fixed to the polishing object member, so the electrolytic polishing quality or process efficiency is actually very low.

另一方面,以往技術的負極板借助於於作為另外的支撐構件的夾具而支撐,但負極板與電解研磨物件之間的距離非常接近地配置,因而難以在負極板與電解研磨物件之間的狹小空間安裝夾具。即,由於夾具以導電性材質形成,因此,如果夾具與正極的電解研磨物件接觸,則與具有負極的負極板發生電性短路。On the other hand, the negative electrode plate of the prior art is supported by a jig as another supporting member. However, the distance between the negative electrode plate and the electrolytic polishing object is very close, and it is difficult to locate the negative electrode plate and the electrolytic polishing object. Install fixtures in small spaces. That is, since the jig is formed of a conductive material, if the jig comes into contact with the electrolytically polished object of the positive electrode, it will be electrically short-circuited with the negative electrode plate having the negative electrode.

(要解決的技術問題)(Technical problem to be solved)

在一實施例中,提供一種用於即使在沒有另外的放出口的區域,也將負極框架接近並均一地安裝於電解研磨物件一側的電解研磨用電極框架及包括其的電解研磨裝置。In one embodiment, there is provided an electrode frame for electrolytic polishing and an electrolytic polishing device including the anode frame for mounting the negative electrode frame close to and uniformly on the side of the electrolytic polishing object even in a region where there is no additional discharge port.

另外,在又一實施例中,提供一種用於防止因夾具而在負極板與電解研磨物件之間的電性短路的電解研磨裝置。In addition, in another embodiment, an electrolytic polishing device for preventing electrical short-circuit between the negative electrode plate and the electrolytic polishing object due to a clamp is provided.

另外,在一實施例中,提供一種用於在沒有另外的托架的電解研磨物件一側有效設置負極框架的電解研磨裝置。In addition, in one embodiment, there is provided an electrolytic polishing device for effectively setting a negative electrode frame on the side of an electrolytic polishing object without an additional bracket.

另外,在又一實施例中,提供一種用於防止因夾具而發生負極板與電解研磨物件之間的電性短路的電解研磨裝置。In addition, in another embodiment, there is provided an electrolytic polishing device for preventing electrical short circuit between the negative electrode plate and the electrolytic polishing object due to a clamp.

(解決問題的手段)(Means to solve the problem)

在一實施例中,電解研磨用電極框架作為在內部配備有容納電解研磨物件和電解液的容納空間的電解槽中使用的電極框架,可以包括:電極放置構件,其結合於所述電解研磨物件的至少一個以上的凸出部;及第一負極框架,其以格子結構形成,至少一個以上的格子結構的一側與所述電極放置構件結合,與所述電解研磨物件的研磨面隔開既定間隔配置。In an embodiment, the electrode frame for electrolytic polishing, as an electrode frame used in an electrolytic cell equipped with a storage space for accommodating electrolytic polishing objects and electrolyte solution, may include: an electrode placement member, which is combined with the electrolytic polishing object And the first negative electrode frame, which is formed in a lattice structure, at least one side of the lattice structure is combined with the electrode placement member, and is separated from the polishing surface of the electrolytic polishing object Interval configuration.

所述電極放置構件可以包括與所述電解研磨物件的凸出部結合的第一面、與所述第一負極框架結合的第二面。The electrode placement member may include a first surface coupled with the protrusion of the electrolytic polishing object, and a second surface coupled with the first negative electrode frame.

所述電極放置構件即使不利用放出口,也可以與所述電解研磨物件的凸出部結合。Even if the electrode placement member does not use the discharge port, it can be combined with the protrusion of the electrolytic polishing object.

另外,在一實施例中,電解研磨用電極框架作為在內部配備有容納電解研磨物件和電解液的容納空間的電解槽使用的電極框架,可以包括:負極框架,其配置於所述電解研磨物件的研磨面的一側;及電極隔開構件,其結合於所述負極框架,使所述負極框架從所述電解研磨物件的底面隔開。In addition, in one embodiment, the electrode frame for electrolytic polishing is used as an electrode frame for an electrolytic cell equipped with a storage space for accommodating electrolytic polishing objects and electrolyte solution, and may include: a negative electrode frame disposed on the electrolytic polishing object One side of the polishing surface; and an electrode partition member, which is combined with the negative electrode frame to separate the negative electrode frame from the bottom surface of the electrolytic polishing object.

所述電極隔開構件可以包括接合於所述電解研磨物件的底面並支撐所述負極框架的第一電極隔開構件。The electrode partition member may include a first electrode partition member joined to the bottom surface of the electrolytic polishing article and supporting the negative electrode frame.

所述第一電極隔開構件即使不利用放出口,也可以支撐所述負極框架。The first electrode partition member can support the negative electrode frame even if the discharge port is not used.

在一實施例中,電解研磨裝置可以包括所述電極框架。In an embodiment, the electrolytic polishing device may include the electrode frame.

(發明的效果)(The effect of the invention)

在一實施例中,通過對可以利用在電解研磨物件上形成的凸出部來支撐負極框架的電極放置構件進行配置,從而具有即使在沒有放出口的區域的電解研磨物件上,也可以有效安裝負極框架的效果。In one embodiment, by arranging the electrode placement member that can support the negative electrode frame by using the protrusion formed on the electrolytic polishing object, it can be effectively installed even on the electrolytic polishing object in the area where there is no discharge port. The effect of the negative frame.

另外,在一實施例中,在對相同的製品進行電解研磨時,可以將已經組裝的負極框架組裝於電極放置構件進行研磨,因而具有可以縮短負極框架安裝及拆卸所需時間及研磨時間的效果。In addition, in one embodiment, when the same product is electrolytically polished, the assembled negative electrode frame can be assembled to the electrode placement member for polishing, which has the effect of shortening the time required for installation and removal of the negative electrode frame and the polishing time. .

另外,在一實施例中,具有的效果是,即使電解研磨物件的底部或側壁部中某一者沒有凸出部,也可以在電解研磨物件的全體研磨面容易地安裝負極框架。In addition, in one embodiment, there is an effect that even if one of the bottom or side wall of the electrolytic polishing object has no protrusions, the negative electrode frame can be easily attached to the entire polishing surface of the electrolytic polishing object.

另外,在一實施例中,通過在電極放置構件上配置負極框架托架,從而具有可以提高負極框架的結合位置的自由度、有效安裝電極框架的效果。In addition, in one embodiment, by arranging the negative frame bracket on the electrode placement member, it is possible to increase the degree of freedom of the coupling position of the negative frame and to effectively mount the electrode frame.

另外,在一實施例中,夾具還形成絕緣部,從而具有可以在負極框架與電解研磨物件之間的狹小空間可以容易地安裝的效果。In addition, in an embodiment, the jig further forms an insulating part, thereby having the effect that it can be easily installed in a narrow space between the negative electrode frame and the electrolytic polishing object.

另外,在一實施例中,通過在負極框架一側配置電極隔開構件,使負極框架配置於電解研磨物件上,從而可以將負極框架有效地配置於沒有另外的托架的電解研磨物件的內部或外部,因而可以將負極框架迅速配置於電解研磨物件,可以在提高電解研磨的工序效率的同時接近且均一地配置,電解研磨的品質可以顯著提高。In addition, in one embodiment, by arranging the electrode partition member on the side of the negative electrode frame, the negative electrode frame is arranged on the electrolytic polishing object, so that the negative electrode frame can be effectively arranged inside the electrolytic polishing object without a separate bracket Or externally, the negative electrode frame can be quickly arranged on the electrolytic polishing object, and the process efficiency of the electrolytic polishing can be improved while being arranged close and uniformly, and the quality of electrolytic polishing can be significantly improved.

另外,在一實施例中,逐漸減小地形成電極隔開構件的下部寬度,插入結合於在電解研磨物件的底部形成的槽或孔,從而具有能夠更有效地固定負極框架的效果。In addition, in one embodiment, the lower width of the electrode partition member is gradually reduced, and inserted into the groove or hole formed at the bottom of the electrolytic polishing object, thereby having the effect of more effectively fixing the negative electrode frame.

在一實施例中,通過使電極隔開構件配置於電解研磨物件的側壁部上部,從而具有在使負極框架從電解研磨物件的底部隔開的同時可以穩定地支撐負極框架的效果。In one embodiment, by arranging the electrode partition member on the upper part of the side wall of the electrolytic polishing object, it has an effect of stably supporting the negative electrode frame while separating the negative electrode frame from the bottom of the electrolytic polishing object.

另外,在一實施例中,通過使電極隔開構件不與電解研磨物件的底部接觸地配置,從而具有能夠防止因電極隔開構件與電解研磨物件接觸導致的損傷的效果。In addition, in one embodiment, by disposing the electrode partition member so as not to contact the bottom of the electrolytic polishing object, there is an effect of preventing damage caused by contact between the electrode partition member and the electrolytic polishing object.

另外,在一實施例中,通過利用支架,從而具有可以將負極框架有效安裝於電解研磨物件的內側及外側的效果。In addition, in one embodiment, by using the bracket, there is an effect that the negative electrode frame can be effectively mounted on the inside and outside of the electrolytic polishing object.

下面參閱圖式,詳細說明實施例。The embodiments are described in detail below with reference to the drawings.

圖1是顯示第一實施例的電解研磨裝置的分解立體圖,圖2是顯示第一實施例的電解研磨裝置的結合立體圖,圖3是顯示第一實施例的電解研磨裝置的電極框架結合的狀態的結合立體圖,圖4a及圖4b分別是顯示第一實施例的電解研磨裝置的夾具的立體圖,圖5是顯示第一實施例的電解研磨裝置的負極框架的變形例的立體圖。FIG. 1 is an exploded perspective view showing the electrolytic polishing apparatus of the first embodiment, FIG. 2 is a combined perspective view showing the electrolytic polishing apparatus of the first embodiment, and FIG. 3 is a state where the electrode frames of the electrolytic polishing apparatus of the first embodiment are combined Fig. 4a and Fig. 4b are respectively a perspective view showing the jig of the electrolytic polishing apparatus of the first embodiment, and Fig. 5 is a perspective view showing a modification of the negative electrode frame of the electrolytic polishing apparatus of the first embodiment.

在實施例中,電極框架可以包括負極框架,但並非限定於此。In an embodiment, the electrode frame may include a negative electrode frame, but it is not limited thereto.

如圖1及圖2所示,第一實施例的電解研磨用電極框架作為在內部配備有容納電解研磨物件200和電解液的容納空間的電解槽100中使用的電解研磨用電極框架,可以包括:多個電極放置構件400,其結合於所述電解研磨物件200的至少一個以上的凸出部210;負極框架300,其以格子結構形成,至少一個以上的一側與所述多個電極放置構件400結合,與所述電解研磨物件200的研磨面隔開既定間隔配置。As shown in FIGS. 1 and 2, the electrode frame for electrolytic polishing of the first embodiment is used as an electrode frame for electrolytic polishing used in an electrolytic cell 100 equipped with a storage space for accommodating an electrolytic polishing object 200 and an electrolyte solution. : A plurality of electrode placement members 400, which are coupled to at least one or more protrusions 210 of the electrolytic polishing object 200; a negative electrode frame 300, which is formed in a lattice structure, and at least one side is placed on the plurality of electrodes The member 400 is combined and arranged at a predetermined interval from the polishing surface of the electrolytic polishing object 200.

另外,第一實施例的電解研磨裝置可以包括:電解槽100,其在內部配備有容納在研磨面形成有既定形狀的凸出部210的電解研磨物件200和電解液的容納空間;多個電極放置構件400,其結合於所述電解研磨物件200的至少一個以上的凸出部;負極框架300,其以格子結構形成,至少一個以上的格子結構的一側與所述多個電極放置構件400結合,與所述電解研磨物件200的研磨面隔開既定間隔配置。In addition, the electrolytic polishing apparatus of the first embodiment may include: an electrolytic cell 100 equipped with an electrolytic polishing object 200 formed with a protrusion 210 of a predetermined shape on the polishing surface and an electrolytic solution accommodation space therein; a plurality of electrodes The placement member 400 is coupled to at least one protrusion of the electrolytic polishing object 200; the negative electrode frame 300 is formed in a lattice structure, and at least one side of the lattice structure is connected to the plurality of electrode placement members 400 In combination, they are arranged at a predetermined interval from the polishing surface of the electrolytic polishing object 200.

在圖1中,圖示了凸出部210在電解研磨物件200的上側形成的示例,但並非限定於此,也可以在電解研磨物件200的側面或下面形成。In FIG. 1, an example in which the protrusion 210 is formed on the upper side of the electrolytically polished object 200 is illustrated, but it is not limited to this, and may be formed on the side or underside of the electrolytically polished object 200.

電解槽100可以以在內部配備有容納空間的箱形狀形成。電解槽100可以包括圓筒形、多邊箱或環形狀,但其形狀並不限定。The electrolytic cell 100 may be formed in a box shape equipped with an accommodation space inside. The electrolytic cell 100 may include a cylindrical shape, a polygonal box or a ring shape, but its shape is not limited.

在電解槽100的內部可以填充有電解液。作為電解液,可以將從由蒸餾水(H2 O)、硫酸(H2 SO4 )類、磷酸(H3 PO4 )類、鉻酸類、硝酸鈉(NaNO3 )、氯化鈉(NaCl)、甘油類構成的組中選擇的至少一種物質混合構成,但並不限定於此。The inside of the electrolytic cell 100 may be filled with electrolyte. As the electrolyte, it can be made from distilled water (H 2 O), sulfuric acid (H 2 SO 4 ), phosphoric acid (H 3 PO 4 ), chromic acid, sodium nitrate (NaNO 3 ), sodium chloride (NaCl), At least one selected from the group consisting of glycerin is mixed, but it is not limited to this.

電解液可以在填充於電解槽100的狀態下,在結束電解研磨物件200的電解研磨後更換。不同於此,電解液可以借助於在電解槽100的一側獨立地形成的泵而流入、流出。在電解槽100與泵之間,可以形成有電解液流入管、電解液流出管,可以還包括電解液流量調節部、篩檢程式。篩檢程式可以過濾電解液中包含的加工物渣滓及異物質。The electrolytic solution can be replaced after the electrolytic polishing of the electrolytic polishing object 200 is completed while being filled in the electrolytic cell 100. Unlike this, the electrolyte can flow in and out by means of a pump formed independently on one side of the electrolytic cell 100. An electrolyte inflow pipe and an electrolyte outflow pipe may be formed between the electrolytic cell 100 and the pump, and may further include an electrolyte flow regulator and a screening program. The screening program can filter the processed residue and foreign substances contained in the electrolyte.

在電解槽100的內部可以容納電解研磨物件200。電解槽100的大小可以大於電解研磨物件200地形成。電解研磨物件200可以為多邊形的板狀,但並不限定於此。電解研磨物件200可以為多邊形或圓筒形的腔室或箱子。電解研磨物件200可以是用於OLED製造的腔室。另一方面,在電解研磨物件200為OLED用腔室或LED用MOCVD腔室等的情況下,也存在其重量為數百kg到數千kg(數噸)的巨大的情形。The electrolytic grinding object 200 can be contained in the electrolytic tank 100. The size of the electrolytic tank 100 may be larger than the electrolytic polishing object 200. The electrolytic polishing object 200 may have a polygonal plate shape, but is not limited thereto. The electrolytic polishing object 200 may be a polygonal or cylindrical cavity or box. The electrolytic polishing object 200 may be a chamber for OLED manufacturing. On the other hand, when the electrolytic polishing object 200 is a chamber for OLED, a MOCVD chamber for LED, or the like, it may weigh several hundred kg to several thousand kg (several tons).

另外,電解研磨物件200也可以是OLED腔室的一部分構成部件。電解研磨物件200可以為板、箱形狀或上下貫通形成的環形狀。In addition, the electrolytic polishing object 200 may also be a part of the OLED chamber. The electrolytic polishing object 200 may be in the shape of a plate, a box, or a ring formed through up and down.

電解研磨物件200並不限定於此,可以將所有金屬材質製品指定為電解研磨物件。電解研磨物件200浸於電解液110內。電解研磨物件200的研磨面可以包括電解研磨物件200的所有表面。The electrolytic polishing object 200 is not limited to this, and all metal products can be designated as the electrolytic polishing object. The electrolytic polishing object 200 is immersed in the electrolyte 110. The polishing surface of the electrolytic polishing object 200 may include all surfaces of the electrolytic polishing object 200.

在電解槽100的一側可以還配置有整流器。整流器可以向電解研磨物件200接入正極(+)電壓,可以向負極框架300接入負極(-)電壓。整流器借助於電線等而可以向電解研磨物件200接入電。A rectifier may be further arranged on one side of the electrolytic cell 100. The rectifier can connect a positive (+) voltage to the electrolytic grinding object 200, and can connect a negative (-) voltage to the negative frame 300. The rectifier can connect electricity to the electrolytic polishing object 200 by means of a wire or the like.

負極框架300可以配置於電解研磨物件200的研磨面的一側。負極框架300可以與電解研磨物件200的研磨面隔開既定間隔均一地配置。例如,負極框架300與電解研磨物件200按50mm±20mm距離均一地隔開配置,因而電解研磨效率提高,電解研磨品質非常優秀。The negative frame 300 may be disposed on one side of the polishing surface of the electrolytic polishing object 200. The negative frame 300 may be uniformly arranged with a predetermined interval from the polishing surface of the electrolytic polishing object 200. For example, the negative electrode frame 300 and the electrolytic polishing object 200 are uniformly spaced apart and arranged at a distance of 50 mm±20 mm, so the electrolytic polishing efficiency is improved, and the electrolytic polishing quality is excellent.

負極框架300可以包括格子結構的板形狀。負極框架300也可是導電率及耐酸性卓越的不銹鋼材料,但並不限定於此。負極框架300可以為條(bar)形狀、L字形狀、角形狀、棒形狀、圓形狀、線網形狀、孔板形狀的板。The negative electrode frame 300 may include a plate shape of a lattice structure. The negative electrode frame 300 may be a stainless steel material excellent in conductivity and acid resistance, but it is not limited to this. The negative electrode frame 300 may be a plate in a bar shape, an L shape, a corner shape, a bar shape, a circular shape, a wire mesh shape, or an orifice shape.

負極框架300可以包括第一負極板310和第二負極板330。第一負極板310和第二負極板330可以配置得構成格子結構。第一負極板310可以以條(bar)形狀、L字形狀、角形狀、棒形狀、圓形狀、線網形狀、孔板金屬形狀形成,但並不限定於此。第一負極板310可以由多個板構成,構成得相互隔開配置。The negative electrode frame 300 may include a first negative electrode plate 310 and a second negative electrode plate 330. The first negative electrode plate 310 and the second negative electrode plate 330 may be configured to form a lattice structure. The first negative electrode plate 310 may be formed in a bar shape, an L shape, a corner shape, a bar shape, a circular shape, a wire mesh shape, or a metal shape of a perforated plate, but is not limited thereto. The first negative plate 310 may be composed of a plurality of plates, which are configured to be spaced apart from each other.

第二負極板330可以與第一負極板310的形狀相同地形成,但並不限定於此。第二負極板330可以由多個板構成,配置得相互隔開。第一負極板310和第二負極板330可以配置得構成90度,但並不限定於此。The second negative electrode plate 330 may be formed in the same shape as the first negative electrode plate 310, but is not limited thereto. The second negative electrode plate 330 may be composed of a plurality of plates, which are arranged to be separated from each other. The first negative electrode plate 310 and the second negative electrode plate 330 may be arranged to form 90 degrees, but are not limited to this.

第一負極板310與第二負極板330交叉的區域,可以通過包括鉚釘(Rivet)、螺栓(Bolt)或焊接等的通常的組裝裝置而結合。不同於此,第一負極板310與第二負極板330交叉的區域,也可以借助於C型夾具而固定。The area where the first negative electrode plate 310 and the second negative electrode plate 330 intersect may be joined by a usual assembly device including rivets, bolts, or welding. Different from this, the area where the first negative electrode plate 310 and the second negative electrode plate 330 intersect can also be fixed by means of a C-shaped clamp.

上面對負極框架300具有固定長度的結構進行了說明,但可以使用使負極框架300大小隨著電解研磨物件200增大而可變的可變結構的負極框架300。The structure in which the negative electrode frame 300 has a fixed length is described above, but a variable structure of the negative electrode frame 300 in which the size of the negative electrode frame 300 is changed as the electrolytic polishing object 200 increases can be used.

如圖5所示,負極框架300可以包括第一負極板310和第二負極板330。第一負極板310和第二負極板330可以配置得構成格子結構。As shown in FIG. 5, the negative electrode frame 300 may include a first negative electrode plate 310 and a second negative electrode plate 330. The first negative electrode plate 310 and the second negative electrode plate 330 may be configured to form a lattice structure.

第一負極板310可以由多個支架構成,可以以其長度能夠變長或減小的方式構成。第二負極板330的結構可以與第一負極板310的結構相同。下面,以第一負極板310的結構為中心進行說明。The first negative electrode plate 310 may be constituted by a plurality of brackets, and may be constituted in such a manner that the length thereof can be increased or decreased. The structure of the second negative electrode plate 330 may be the same as the structure of the first negative electrode plate 310. Hereinafter, the description will be focused on the structure of the first negative electrode plate 310.

第一負極板310可以構成得使多個支架連接。第一負極板310可以一部分重疊地配置,向相互遠離或靠近的方向移動。第一負極板310可以由3個以上支架構成,但出於說明的便利,以第一負極板310由第一支架312和與所述第一支架312連接的第二支架314構成的結構為中心進行說明。The first negative plate 310 may be configured to connect a plurality of brackets. The first negative electrode plates 310 may be partially overlapped and arranged to move in directions away from or close to each other. The first negative plate 310 can be composed of more than three brackets, but for the convenience of description, the first negative plate 310 is composed of a first bracket 312 and a second bracket 314 connected to the first bracket 312 as the center. Be explained.

第一支架312可以為L字形狀,但並不限定於此。第一支架312的一部分區域可以與第二支架314的一部分區域重疊形成。第一支架312與第二支架314的重疊的區域可以借助於C型夾具500而支撐,在這種重疊的區域配置的C型夾具500可以稱為第三夾具。The first bracket 312 may be L-shaped, but it is not limited thereto. A part of the first bracket 312 may be formed to overlap with a part of the second bracket 314. The overlapping area of the first bracket 312 and the second bracket 314 may be supported by the C-shaped clamp 500, and the C-shaped clamp 500 arranged in this overlapped area may be referred to as a third clamp.

第一支架312與第二支架314可以沿相互遠離或靠近的方向移動。C型夾具500可以以第一支架312與第二支架314可以相互移動的程度的力,支撐第一支架312和第二支架314。不同於此,C型夾具400可以在使第一支架312和第二支架314移動後,進一步施加固定力,支撐第一支架312和第二支架314。The first bracket 312 and the second bracket 314 can move in directions away from or close to each other. The C-shaped clamp 500 can support the first support 312 and the second support 314 with a force such that the first support 312 and the second support 314 can move with each other. Different from this, the C-shaped clamp 400 can further apply a fixing force after moving the first bracket 312 and the second bracket 314 to support the first bracket 312 and the second bracket 314.

第二負極板330可以與第一負極板310相同地包括第一支架332和第二支架334。第二負極板330可以桿形狀的板形成,但並不限定於此。第二負極板330的第一支架332可以沿從第二支架334遠離或靠近的方向移動。The second negative plate 330 may include a first bracket 332 and a second bracket 334 the same as the first negative plate 310. The second negative electrode plate 330 may be formed of a rod-shaped plate, but is not limited thereto. The first support 332 of the second negative electrode plate 330 may move in a direction away from or close to the second support 334.

第二負極板330的第一支架332和第二支架334可以一部分重疊地配置。第二負極板330的第一支架332與第二支架334的重疊的區域,可以借助於C型夾具500而支撐。因此,第二負極板330長度可變。The first bracket 332 and the second bracket 334 of the second negative electrode plate 330 may be partially overlapped. The overlapping area of the first bracket 332 and the second bracket 334 of the second negative electrode plate 330 may be supported by the C-shaped clamp 500. Therefore, the length of the second negative plate 330 is variable.

返回圖1,負極框架300如果與正極的電解研磨物件200接觸,則發生短路。為了防止這種情況,負極框架300應構成得與電解研磨物件200的研磨面隔開。Returning to FIG. 1, if the negative electrode frame 300 is in contact with the electrolytic polishing object 200 of the positive electrode, a short circuit occurs. To prevent this, the negative frame 300 should be configured to be separated from the polishing surface of the electrolytic polishing object 200.

以往,使負極框架300固定於在電解研磨物件200上形成的放出口,但在本實施例中,當在電解研磨物件200上無放出口時,為了安裝負極框架300而可以配備有電極放置構件400。In the past, the negative electrode frame 300 was fixed to a discharge port formed on the electrolytic polishing object 200, but in this embodiment, when there is no discharge port on the electrolytic polishing object 200, an electrode placement member may be provided to install the negative electrode frame 300 400.

電極放置構件400可以包括L字形狀、條(bar)形狀、角形狀、棒形狀,但並不限定於此。The electrode placement member 400 may include an L shape, a bar shape, a corner shape, and a bar shape, but is not limited thereto.

電極放置構件400可以結合於電解研磨物件200的一側。例如,電極放置構件400可以結合於在電解研磨物件200上形成的加強肋(Rib)而形成。電極放置構件400可以配置有多個。通常而言,在電解研磨物件200上,可以形成有諸如加強肋、邊緣等的凸出部210。在本實施例中,提出了利用在電解研磨物件200上形成的凸出部210來安裝負極框架300的結構。The electrode placement member 400 may be coupled to one side of the electrolytic polishing object 200. For example, the electrode placement member 400 may be formed by being combined with a reinforcing rib (Rib) formed on the electrolytic polishing object 200. The electrode placement member 400 may be configured in plurality. Generally speaking, protruding parts 210 such as reinforcing ribs and edges may be formed on the electrolytic polishing object 200. In this embodiment, a structure in which the negative electrode frame 300 is mounted using the protrusion 210 formed on the electrolytic polishing object 200 is proposed.

如圖3所示,電極放置構件400可以與電解研磨物件200的研磨面垂直地配置。在電極放置構件400的一側結合有負極框架300,負極框架300可以與電解研磨物件200的研磨面隔開配置。As shown in FIG. 3, the electrode placement member 400 may be arranged perpendicular to the polishing surface of the electrolytic polishing object 200. A negative electrode frame 300 is combined on one side of the electrode placement member 400, and the negative electrode frame 300 can be arranged separately from the polishing surface of the electrolytic polishing object 200.

電極放置構件400可以以導電性物質形成。電極放置構件400可以為耐酸性強的鋼板、鋁或不銹鋼材料。電極放置構件400由於固定於正極的電解研磨物件200的凸出部2100,因而可以帶正極電荷。因此,如果具有負極的負極框架300結合於電極放置構件400的一側,則會在電極放置構件400與負極框架300之間發生電性短路。The electrode placement member 400 may be formed of a conductive substance. The electrode placement member 400 may be a steel plate, aluminum or stainless steel with strong acid resistance. Since the electrode placement member 400 is fixed to the protruding portion 2100 of the electrolytic polishing object 200 of the positive electrode, it can be positively charged. Therefore, if the negative electrode frame 300 having the negative electrode is coupled to one side of the electrode placing member 400, an electrical short circuit occurs between the electrode placing member 400 and the negative electrode frame 300.

為了防止這種情況,在電極放置構件400與負極框架300之間,可以還配置有絕緣構件700。絕緣構件700可以包括PVC、橡膠、聚氨酯橡膠、電木中某一者。絕緣構件700可以大於負極框架300寬度地形成,但並不限定於此。To prevent this, an insulating member 700 may be further arranged between the electrode placing member 400 and the negative electrode frame 300. The insulating member 700 may include any one of PVC, rubber, urethane rubber, and bakelite. The insulating member 700 may be formed larger than the width of the negative electrode frame 300, but is not limited thereto.

另一方面,電極放置構件400可以由絕緣物質形成。如果以絕緣物質形成電極放置構件400,則在電極放置構件400與負極框架300之間配置的絕緣構件700可以去除。On the other hand, the electrode placement member 400 may be formed of an insulating substance. If the electrode placing member 400 is formed of an insulating material, the insulating member 700 arranged between the electrode placing member 400 and the negative electrode frame 300 may be removed.

電極放置構件400可以包括第一面410和第二面430。電極放置構件400的第二面430可以從電極放置構件400的第一面410折彎既定角度形成。在本實施例中,電極放置構件400的第一面410與電極放置構件400的第二面430構成的角度θ1可以包括90度,但並不限定於此。The electrode placement member 400 may include a first face 410 and a second face 430. The second surface 430 of the electrode placing member 400 may be formed by bending the first surface 410 of the electrode placing member 400 at a predetermined angle. In this embodiment, the angle θ1 formed by the first surface 410 of the electrode placing member 400 and the second surface 430 of the electrode placing member 400 may include 90 degrees, but is not limited thereto.

電極放置構件400的第一面410可以與電解研磨物件200的凸出部210的一側結合。電極放置構件400的第一面410可以在重疊配置於電解研磨物件的凸出部210的狀態下,借助於C型夾具500而固定。配置於所述第一面410的C型夾具500可以稱為第一夾具,配置於所述第二面430的C型夾具500可以稱為第二夾具。The first surface 410 of the electrode placement member 400 may be combined with one side of the protrusion 210 of the electrolytic polishing object 200. The first surface 410 of the electrode placement member 400 may be fixed by the C-shaped clamp 500 in a state where it is overlapped and arranged on the protrusion 210 of the electrolytic polishing object. The C-shaped clamp 500 arranged on the first surface 410 may be called a first clamp, and the C-shaped clamp 500 arranged on the second surface 430 may be called a second clamp.

C型夾具500可以包括相向配置的固定部510。固定部510可以配置於重疊配置的電極放置構件400的一側與凸出部210的另一側,使電極放置構件400穩定地固定於凸出部210。C型夾具500可以以耐酸性優秀的不銹鋼材料形成。不同於此,C型夾具500可以以絕緣部520形成固定部510一側。C型夾具500由於不使負極框架300與電極放置構件400永久地固定,因而如果使用C型夾具500,則使得可以容易地安裝及分離負極框架300與電極放置構件400。即,電極放置構件400的安裝位置會因電解研磨物件200的形狀而異,因而C型夾具500可以容易地變更結合於負極框架300的電極放置構件400的安裝位置。The C-type clamp 500 may include fixing parts 510 arranged opposite to each other. The fixing portion 510 may be arranged on one side of the electrode placement member 400 and the other side of the protrusion 210 that are overlapped, so that the electrode placement member 400 is stably fixed to the protrusion 210. The C-type clamp 500 may be formed of a stainless steel material excellent in acid resistance. Different from this, the C-shaped clamp 500 may use the insulating part 520 to form one side of the fixing part 510. Since the C-shaped clamp 500 does not permanently fix the negative electrode frame 300 and the electrode placing member 400, if the C-shaped clamp 500 is used, the negative electrode frame 300 and the electrode placing member 400 can be easily installed and separated. That is, the installation position of the electrode placement member 400 may vary depending on the shape of the electrolytic polishing object 200, so the C-shaped jig 500 can easily change the installation position of the electrode placement member 400 coupled to the negative frame 300.

另一方面,C型夾具500以導電性材質形成,因而安裝於負極框架300與電解研磨物件200之間窄小空間的C型夾具500與電解研磨物件200接觸,在負極框架300與電解研磨物件200之間會發生電性短路。On the other hand, the C-shaped jig 500 is formed of a conductive material, so the C-shaped jig 500 installed in the narrow space between the negative frame 300 and the electrolytic polishing object 200 is in contact with the electrolytic polishing object 200, and the negative frame 300 is in contact with the electrolytic polishing object. An electrical short circuit will occur between 200.

為了防止這種情況,如圖4a及圖4b所示,在固定負極框架300與電極放置構件400的固定部510的一側,可以還形成有絕緣部520。其中,固定部510可以分別配置於第一主體540和第二主體550的一側。第二主體550可以以C字形狀形成,與第一主體540結合。第一主體540可以結合於第二主體550並上下移動。因此,相向配置於第一主體540與第二主體550的固定部510,可以沿相互靠近方向或遠離方向移動。To prevent this, as shown in FIGS. 4a and 4b, an insulating portion 520 may be further formed on the side of the fixing portion 510 that fixes the negative frame 300 and the electrode placement member 400. Wherein, the fixing part 510 may be respectively disposed on one side of the first body 540 and the second body 550. The second body 550 may be formed in a C-shape and combined with the first body 540. The first body 540 may be coupled to the second body 550 and move up and down. Therefore, the fixing parts 510 disposed opposite to the first body 540 and the second body 550 can move in a direction toward or away from each other.

絕緣部520可以在固定部510的一側形成,與負極框架300及電極放置構件400接觸。因此,C型夾具500即使與電解研磨物件200的一側接觸,也可以在電解研磨物件200與負極框架300之間防止電性短路。絕緣部520可以包括具有彈性的材質。絕緣部520可以包括PVC、橡膠、聚氨酯橡膠、電木等,但並不限定於此。The insulating part 520 may be formed on one side of the fixing part 510 to be in contact with the negative electrode frame 300 and the electrode placement member 400. Therefore, even if the C-shaped jig 500 is in contact with one side of the electrolytic polishing object 200, an electrical short circuit can be prevented between the electrolytic polishing object 200 and the negative electrode frame 300. The insulating portion 520 may include an elastic material. The insulating part 520 may include PVC, rubber, urethane rubber, bakelite, etc., but is not limited thereto.

另外,C字形狀的第二主體550的一部分可以與電解研磨物件200或負極板的一側接觸。為了防止這種情況,可以在第二主體550的表面還包括絕緣膜550b。第二主體550的內部為了保持剛性而可以由導電性物質550a構成,可以在第二主體550的外側面塗布形成有絕緣膜550b。In addition, a part of the C-shaped second body 550 may be in contact with one side of the electrolytic polishing object 200 or the negative electrode plate. In order to prevent this, an insulating film 550b may be further included on the surface of the second body 550. In order to maintain rigidity, the inside of the second body 550 may be made of a conductive material 550a, and the outer surface of the second body 550 may be coated with an insulating film 550b.

另外,在C型夾具500上,為了使相互結合的框架的固定力最大化,還可以形成有凸部530。凸部530具有能夠防止C型夾具500例如從負極框架300打滑、防止C型夾具500從負極框架300脫離的效果。In addition, the C-shaped clamp 500 may be formed with a convex portion 530 in order to maximize the fixing force of the mutually coupled frames. The convex portion 530 has the effect of preventing the C-shaped clip 500 from slipping from the negative electrode frame 300, and preventing the C-shaped clip 500 from being separated from the negative electrode frame 300.

上面雖然是在C型夾具500的固定部510的一側形成絕緣部520,但可以以絕緣材質形成固定部520,去除絕緣部520。Although the insulating portion 520 is formed on one side of the fixing portion 510 of the C-shaped clamp 500 in the above, the fixing portion 520 may be formed of an insulating material, and the insulating portion 520 may be removed.

返回圖3,電極放置構件400的第二面430可以與第一負極板310的一側結合。第一負極板310可以與電極放置構件400垂直地結合。第一負極板310可以與電解研磨物件200的研磨面水準地配置。其中,第一負極板310可以包括第一面312和第二面314。第一負極板310的第二面314可以從第一面312折彎形成。第一負極板310的第一面312與第二面314之間的角度θ2可以為90度,但並不限定於此。電極放置構件410的第二面430可以固定於第一負極板310的第一面312。電極放置構件400的第二面430可以在與第一負極板310的第一面312重疊的狀態下,借助於C型夾具500而固定。Returning to FIG. 3, the second surface 430 of the electrode placement member 400 may be combined with one side of the first negative electrode plate 310. The first negative electrode plate 310 may be vertically combined with the electrode placing member 400. The first negative electrode plate 310 may be arranged horizontally with the polishing surface of the electrolytic polishing object 200. The first negative plate 310 may include a first surface 312 and a second surface 314. The second surface 314 of the first negative electrode plate 310 may be formed by bending from the first surface 312. The angle θ2 between the first surface 312 and the second surface 314 of the first negative electrode plate 310 may be 90 degrees, but is not limited to this. The second surface 430 of the electrode placement member 410 may be fixed to the first surface 312 of the first negative electrode plate 310. The second surface 430 of the electrode placement member 400 may be fixed by means of the C-shaped clamp 500 in a state of overlapping with the first surface 312 of the first negative electrode plate 310.

電極放置構件400包括與凸出部210結合的第一面410和與第一負極板310結合的第二面430,從而具有能夠使凸出部210與負極框架300在窄小空間中有效結合的效果。The electrode placement member 400 includes a first surface 410 combined with the protrusion 210 and a second surface 430 combined with the first negative plate 310, so as to have an effective combination of the protrusion 210 and the negative frame 300 in a narrow space. effect.

第一實施例的電解研磨用電極框架及包括其的電解研磨裝置通過利用在電解研磨物件200上形成的凸出部210,從而具有可以將負極框架300有效安裝於沒有放置區域的電解研磨物件200的效果。The electrode frame for electrolytic polishing and the electrolytic polishing apparatus including the electrode frame of the first embodiment utilize the protrusions 210 formed on the electrolytic polishing object 200, so that the negative electrode frame 300 can be effectively installed on the electrolytic polishing object 200 without a placement area. Effect.

請再參閱圖1及圖2,分別提供電解研磨物件200的電解研磨過程,首先,可以利用C型夾具500,將電極放置構件400安裝於在電解研磨物件200一側形成的凸出部210。此時,電極放置構件400可以以能夠均衡地支撐負極框架300的方式安裝於多個凸出部210。Please refer to FIG. 1 and FIG. 2 to respectively provide the electrolytic polishing process of the electrolytic polishing object 200. First, the electrode placement member 400 can be mounted on the protrusion 210 formed on the side of the electrolytic polishing object 200 by using the C-shaped fixture 500. At this time, the electrode placement member 400 may be installed on the plurality of protrusions 210 in a manner capable of supporting the negative electrode frame 300 in a balanced manner.

接著,可以在電極放置構件400的一側安裝負極框架300。負極框架300可以在與電極放置構件400的一側結合的狀態下,安裝成格子形狀。不同於此,如果具有針對相同的製品執行電解研磨的經驗,已經是負極框架300組裝成格子形狀的狀態,則可以將格子形狀的負極框架300輕鬆地放置於電極放置構件400的一側。Next, the negative electrode frame 300 may be installed on one side of the electrode placing member 400. The negative electrode frame 300 may be installed in a lattice shape in a state of being coupled to one side of the electrode placement member 400. Unlike this, if you have experience in performing electrolytic polishing for the same product, and the negative frame 300 is already assembled into a grid shape, the grid-shaped negative frame 300 can be easily placed on one side of the electrode placement member 400.

結束電解研磨物件200的研磨面的電解研磨後,將C型夾具500分離,可以將負極框架300從電極放置構件400去除。接著,如果使電極放置構件400從電解研磨物件200分離,則可以結束電解研磨的所有步驟。After the electrolytic polishing of the polishing surface of the electrolytic polishing object 200 is completed, the C-shaped jig 500 is separated, and the negative electrode frame 300 can be removed from the electrode placing member 400. Next, if the electrode placement member 400 is separated from the electrolytic polishing object 200, all steps of the electrolytic polishing can be ended.

然後,如果對相同的製品進行電解研磨,則按與前面說明順序的倒序進行組裝,負極安裝在短時間結束,具有可以縮短組裝時間及研磨時間的效果。Then, if the same product is electrolytically polished, the assembly is performed in the reverse order of the previous description, and the negative electrode assembly is completed in a short time, which has the effect of shortening the assembly time and polishing time.

圖6是顯示第一實施例的變形例的電解研磨裝置的立體圖。Fig. 6 is a perspective view showing an electrolytic polishing apparatus according to a modification of the first embodiment.

如圖6所示,第一實施例的電解研磨裝置可以包括:電解槽100,其在內部配備有容納形成有既定形狀的凸出部210的電解研磨物件200和電解液的容納空間;多個電極放置構件400,其結合於所述電解研磨物件200的至少一個以上的凸出部210;負極框架300,其以格子結構形成,至少一個以上的格子架構的一側與所述多個電極放置構件400結合,與所述電解研磨物件200的研磨面隔開既定間隔配置。As shown in FIG. 6, the electrolytic polishing apparatus of the first embodiment may include: an electrolytic cell 100 equipped with an electrolytic polishing object 200 formed with a protrusion 210 of a predetermined shape and an electrolytic solution containing space therein; The electrode placement member 400 is coupled to at least one protrusion 210 of the electrolytic polishing object 200; the negative electrode frame 300 is formed in a lattice structure, and at least one side of the lattice structure is placed on the plurality of electrodes The member 400 is combined and arranged at a predetermined interval from the polishing surface of the electrolytic polishing object 200.

電解槽100可以以在內部配備有容納空間的箱形狀形成。在電解槽100的內部可以填充有電解液。在電解槽100的內部可以容納電解研磨物件200。The electrolytic cell 100 may be formed in a box shape equipped with an accommodation space inside. The inside of the electrolytic cell 100 may be filled with electrolyte. The electrolytic grinding object 200 can be contained in the electrolytic tank 100.

電解研磨物件200可以包括底部200a和側壁部200b。在圖式中雖然圖示了形成有1個側壁部200b的情形,但並不限定於此,可以沿著底部200a的側面而形成有多個側壁部200b。因此,電解研磨物件200可以包括箱形狀。The electrolytic polishing article 200 may include a bottom portion 200a and a sidewall portion 200b. Although the figure shows a case where one side wall part 200b is formed, it is not limited to this, and a plurality of side wall parts 200b may be formed along the side surface of the bottom part 200a. Therefore, the electrolytic polishing article 200 may include a box shape.

負極框架300可以包括格子結構的板形狀。負極框架300也可是導電率及耐酸性卓越的不銹鋼材料,但並不限定於此。負極框架300可以是條(bar)形狀、L字形狀、角形狀、棒形狀、圓形狀、線網、孔板形狀的板。負極框架300可以包括第一負極框架300a和第二負極框架300b。The negative electrode frame 300 may include a plate shape of a lattice structure. The negative electrode frame 300 may be a stainless steel material excellent in conductivity and acid resistance, but it is not limited to this. The negative electrode frame 300 may be a plate in a bar shape, an L shape, a corner shape, a bar shape, a round shape, a wire mesh, or a hole plate shape. The negative electrode frame 300 may include a first negative electrode frame 300a and a second negative electrode frame 300b.

第一負極框架300a可以對電解研磨物件200的底部進行電解研磨。第一負極框架300a可以與電解研磨物件200的底面隔開配置。第二負極框架300b可以對電解研磨物件200的側壁部進行電解研磨。第二負極框架300b可以與電解研磨物件200的內側面隔開配置。The first negative electrode frame 300a may perform electrolytic polishing on the bottom of the electrolytic polishing object 200. The first negative electrode frame 300 a may be arranged separately from the bottom surface of the electrolytic polishing object 200. The second negative electrode frame 300b can perform electrolytic polishing on the side wall of the electrolytic polishing object 200. The second negative electrode frame 300b may be separated from the inner surface of the electrolytic polishing object 200.

第一負極框架300a可以包括多個第一負極板310a和多個第二負極板330a。第一負極板310a與第二負極板330a可以配置得構成格子結構。第一負極板310a與第二負極板330a可以配備得構成90度,但並不限定於此。第二負極框架300b的構成與第一負極框架300a的構成相同,因而省略其說明。The first negative electrode frame 300a may include a plurality of first negative electrode plates 310a and a plurality of second negative electrode plates 330a. The first negative electrode plate 310a and the second negative electrode plate 330a may be arranged to form a lattice structure. The first negative electrode plate 310a and the second negative electrode plate 330a can be arranged to form 90 degrees, but they are not limited to this. The configuration of the second negative electrode frame 300b is the same as that of the first negative electrode frame 300a, and thus the description thereof is omitted.

負極框架300如果與正極的電解研磨物件200接觸,則發生短路。為了防止這種情況,負極框架300應構成得與電解研磨物件200的研磨面隔開。If the negative electrode frame 300 comes into contact with the electrolytic polishing object 200 of the positive electrode, a short circuit occurs. To prevent this, the negative frame 300 should be configured to be separated from the polishing surface of the electrolytic polishing object 200.

以往,使負極框架300固定於在電解研磨物件200上形成的放出口,但在本實施例中,當在電解研磨物件200上無放出口時,為了安裝負極框架300而可以配備有電極放置構件400。In the past, the negative electrode frame 300 was fixed to a discharge port formed on the electrolytic polishing object 200, but in this embodiment, when there is no discharge port on the electrolytic polishing object 200, an electrode placement member may be provided to install the negative electrode frame 300 400.

在第二實施例中,電極放置構件400可以只安裝於電解研磨物件200的底部210。當在電解研磨物件200的底部200a和側壁部200b全部形成有凸出部210時,可以在電解研磨物件200的底部200a和側壁部200b均形成電極放置構件400,安裝負極框架300,但在第二實施例中,對只在電解研磨物件200的底部200a形成有凸出部210、在電解研磨物件200的側壁部200b不形成凸出部的情形進行說明。In the second embodiment, the electrode placement member 400 may only be installed on the bottom 210 of the electrolytic polishing object 200. When the protrusions 210 are formed on the bottom 200a and the side wall 200b of the electrolytic polishing object 200, the electrode placement member 400 can be formed on both the bottom 200a and the side wall 200b of the electrolytic polishing object 200, and the negative electrode frame 300 is installed. In the second embodiment, the case where the protrusion 210 is formed only on the bottom 200a of the electrolytically polished object 200 and the protrusions are not formed on the sidewall portion 200b of the electrolytically polished object 200 will be described.

電極放置構件400的一側可以與電解研磨物件200的凸出部210的一側結合。電極放置構件400可以與電解研磨物件200的凸出部210中配置於邊緣區域的凸出部210的一側結合。One side of the electrode placement member 400 may be combined with one side of the protrusion 210 of the electrolytic polishing object 200. The electrode placement member 400 may be combined with one side of the protrusion 210 disposed in the edge area of the protrusion 210 of the electrolytic polishing object 200.

電極放置構件400可以包括第一面410和第二面430。電極放置構件400的第二面430可以從電極放置構件400的第一面410折彎即定角度形成。在本實施例中,電極放置構件400的第一面410與電極放置構件400的第二面430構成的角度θ1可以包括90度,但並不限定於此。The electrode placement member 400 may include a first face 410 and a second face 430. The second surface 430 of the electrode placement member 400 may be bent from the first surface 410 of the electrode placement member 400, that is, formed at a fixed angle. In this embodiment, the angle θ1 formed by the first surface 410 of the electrode placing member 400 and the second surface 430 of the electrode placing member 400 may include 90 degrees, but is not limited thereto.

電極放置構件400的另一側可以與第一負極框架300a結合。當電極放置構件400以導電性物質形成時,在電極放置構件400與第一負極框架300之間,為了防止兩者間的電性短路,可以配置有絕緣構件700。電極放置構件400與第一負極框架300a可以利用C型夾具500進行固定。C型夾具500以導電性材質形成,因而可以在C型夾具500與第一負極框架300a之間還配備有絕緣構件700。The other side of the electrode placement member 400 may be combined with the first negative electrode frame 300a. When the electrode placement member 400 is formed of a conductive material, an insulating member 700 may be placed between the electrode placement member 400 and the first negative electrode frame 300 in order to prevent electrical shorts between the two. The electrode placement member 400 and the first negative electrode frame 300a may be fixed by a C-shaped clamp 500. The C-shaped clamp 500 is formed of a conductive material, so an insulating member 700 may be further provided between the C-shaped clamp 500 and the first negative electrode frame 300a.

上面對以L字形狀形成電極放置構件400的結構進行了說明,但並不限定於此,可以為條(bar)形狀、角形狀、棒形狀、圓形狀的板。The structure in which the electrode placement member 400 is formed in the L-shape has been described above, but it is not limited to this, and it may be a bar shape, an angular shape, a rod shape, or a circular plate.

與電解研磨物件200的側壁部200b鄰接的電極放置構件400a,可以以與電解研磨物件200的側壁部200b高度對應的方式長長地形成。與電解研磨物件200的側壁部200b鄰接的電極放置構件400a,可以與電解研磨物件200的側壁部200b的研磨面隔開配置。The electrode placement member 400 a adjacent to the side wall 200 b of the electrolytic polishing object 200 may be formed in a long length corresponding to the height of the side wall 200 b of the electrolytic polishing object 200. The electrode placement member 400a adjacent to the side wall portion 200b of the electrolytic polishing object 200 may be arranged apart from the polishing surface of the side wall portion 200b of the electrolytic polishing object 200.

第二負極框架300b可以配置於與電解研磨物件200的側壁部200b鄰接的電極放置構件210a之間。第二負極框架300b的一側可以借助於C型夾具500而固定於電極放置構件400a。其中,在電極放置構件400與第二負極框架300b之間、第二負極框架300b與C型夾具500之間,可以還配置有絕緣構件700。因此,第二負極框架300b可以地對電解研磨物件200的側壁研磨面有效地進行電解研磨。The second negative electrode frame 300b may be disposed between the electrode placement members 210a adjacent to the side wall portion 200b of the electrolytic polishing object 200. One side of the second negative electrode frame 300b may be fixed to the electrode placement member 400a by means of a C-shaped clamp 500. Wherein, between the electrode placement member 400 and the second negative electrode frame 300b, and between the second negative electrode frame 300b and the C-shaped clamp 500, an insulating member 700 may be further arranged. Therefore, the second negative electrode frame 300b can effectively perform electrolytic polishing on the sidewall polishing surface of the electrolytic polishing object 200.

第二實施例的電解研磨用電極框架及包括其的電解研磨裝置具有的效果是,即使在電解研磨物件200的底部200a或側壁部200b中某一者沒有凸出部210,也可以將負極框架300容易地安裝於電解研磨物件200的研磨面。The electrode frame for electrolytic polishing of the second embodiment and the electrolytic polishing apparatus including the same have the effect that even if there is no protrusion 210 on the bottom 200a or the side wall 200b of the electrolytic polishing object 200, the negative electrode frame can be 300 is easily installed on the polishing surface of the electrolytic polishing object 200.

圖7是顯示第一實施例另一變形例的電解研磨裝置的分解立體圖,圖8是顯示第一實施例另一變形例的電解研磨裝置的結合立體圖。7 is an exploded perspective view showing the electrolytic polishing apparatus of another modification of the first embodiment, and FIG. 8 is a combined perspective view showing the electrolytic polishing apparatus of another modification of the first embodiment.

如圖7及圖8所示,第一實施例變形例的電解研磨裝置可以包括:電解槽100,其在內部配備有容納形成有既定形狀的凸出部210的電解研磨物件200和電解液的容納空間;多個電極放置構件400,其結合於所述電解研磨物件200的至少一個以上的凸出部210;負極框架300,其與所述電極放置構件400的一側結合;負極框架300,其以格子結構形成,至少一個以上格子結構的一側與所述多個負極框架托架600結合,與所述電解研磨物件200的研磨面隔開既定間隔配置。As shown in FIGS. 7 and 8, the electrolytic polishing apparatus of the modification of the first embodiment may include: an electrolytic cell 100 equipped with an electrolytic polishing object 200 formed with a protrusion 210 of a predetermined shape and an electrolyte Containing space; a plurality of electrode placement members 400, which are combined with at least one or more protrusions 210 of the electrolytic polishing object 200; a negative frame 300, which is combined with one side of the electrode placement member 400; a negative frame 300, It is formed in a lattice structure, and one side of at least one lattice structure is combined with the plurality of negative electrode frame brackets 600, and is arranged at a predetermined interval from the polishing surface of the electrolytic polishing object 200.

電解槽100可以以在內部配備有容納空間的箱形狀形成。在電解槽100的內部可以填充有電解液。在電解槽100的內部可以容納電解研磨物件200。The electrolytic cell 100 may be formed in a box shape equipped with an accommodation space inside. The inside of the electrolytic cell 100 may be filled with electrolyte. The electrolytic grinding object 200 can be contained in the electrolytic tank 100.

電解研磨物件200可以為多邊形的板狀,但並不限定於此。可以將所有電解研磨物件200的金屬材質製品指定為電解研磨物件。在電解研磨物件200上可以形成有諸如加強肋、邊緣等的凸出部210。The electrolytic polishing object 200 may have a polygonal plate shape, but is not limited thereto. All the metal products of the electrolytic polishing object 200 can be designated as the electrolytic polishing object. Protrusions 210 such as reinforcing ribs and edges may be formed on the electrolytic polishing object 200.

負極框架300可以包括格子結構的板形狀。負極框架300也可是導電率及耐酸性卓越的不銹鋼材料,但並不限定於此。負極框架300可以是條(bar)形狀、L字形狀、角形狀、棒形狀、圓形狀、線網、孔板形狀的板。The negative electrode frame 300 may include a plate shape of a lattice structure. The negative electrode frame 300 may be a stainless steel material excellent in conductivity and acid resistance, but it is not limited to this. The negative electrode frame 300 may be a plate in a bar shape, an L shape, a corner shape, a bar shape, a round shape, a wire mesh, or a hole plate shape.

負極框架300可以包括多個第一負極板310和多個第二負極板330。第一負極板310與第二負極板330可以配置得構成格子結構。第一負極板310和第二負極板330可以配置得構成90度,但並不限定於此。The negative frame 300 may include a plurality of first negative plates 310 and a plurality of second negative plates 330. The first negative electrode plate 310 and the second negative electrode plate 330 may be configured to form a lattice structure. The first negative electrode plate 310 and the second negative electrode plate 330 may be arranged to form 90 degrees, but are not limited to this.

負極框架300如果與正極的電解研磨物件200接觸,則發生短路。為了防止這種情況,負極框架300應構成得與電解研磨物件200的研磨面隔開。If the negative electrode frame 300 comes into contact with the electrolytic polishing object 200 of the positive electrode, a short circuit occurs. To prevent this, the negative frame 300 should be configured to be separated from the polishing surface of the electrolytic polishing object 200.

以往,使負極框架300固定於在電解研磨物件200上形成的放出口,但在本實施例中,當電解研磨物件200沒有放出口時,為了安裝負極框架300,可以配備有電極放置構件400及負極框架托架600。In the past, the negative electrode frame 300 was fixed to a discharge port formed on the electrolytic polishing object 200, but in this embodiment, when the electrolytic polishing object 200 has no discharge port, in order to install the negative electrode frame 300, an electrode placement member 400 and Negative frame bracket 600.

電極放置構件400可以與電解研磨物件200的凸出部210的一側結合。電極放置構件400可以包括第一面和第二面。電極放置構件400的第二面可以從電極放置構件400的第一面410折彎即定角度形成。電極放置構件400的第一面410與電極放置構件400的第二面430構成的角度θ1可以包括90度,但並不限定於此。電極放置構件400可以向上部凸出形成。電極放置構件400可以與凸出部210垂直地配置,但並不限定於此。The electrode placement member 400 may be combined with one side of the protrusion 210 of the electrolytic polishing object 200. The electrode placement member 400 may include a first face and a second face. The second surface of the electrode placement member 400 may be bent from the first surface 410 of the electrode placement member 400, that is, formed at a fixed angle. The angle θ1 formed by the first surface 410 of the electrode placing member 400 and the second surface 430 of the electrode placing member 400 may include 90 degrees, but is not limited thereto. The electrode placement member 400 may be formed to protrude upward. The electrode placement member 400 may be arranged perpendicular to the protrusion 210, but is not limited to this.

上面對以L字形狀形成電極放置構件400的結構進行了說明,但並不限定於此,可以為條(bar)形狀、角形狀、棒形狀、圓形狀的板。The structure in which the electrode placement member 400 is formed in the L-shape has been described above, but it is not limited to this, and it may be a bar shape, an angular shape, a rod shape, or a circular plate.

負極框架托架600可以結合於電極放置構件400的一側。負極框架托架600可以以金屬材質形成。當負極框架托架600以金屬材質形成時,在電極放置構件400與負極框架托架600之間,可以還配置有諸如絕緣板的絕緣構件700。絕緣構件700可以配置於電極放置構件400與負極框架托架600之間、負極框架托架600與C型夾具500之間。The negative frame bracket 600 may be coupled to one side of the electrode placing member 400. The negative frame bracket 600 may be formed of a metal material. When the negative frame bracket 600 is formed of a metal material, an insulating member 700 such as an insulating plate may be further disposed between the electrode placing member 400 and the negative frame bracket 600. The insulating member 700 may be disposed between the electrode placement member 400 and the negative frame bracket 600 and between the negative frame bracket 600 and the C-shaped clamp 500.

負極框架托架600可以以絕緣構件700為介質,與電極放置構件400的第二面430結合,但並不限定於此。負極框架托架600可以以與負極框架300對應的形狀形成。負極框架托架600可以與電極放置構件400垂直地配置,但並不限定於此。The negative frame bracket 600 may use the insulating member 700 as a medium to be combined with the second surface 430 of the electrode placement member 400, but it is not limited thereto. The negative electrode frame bracket 600 may be formed in a shape corresponding to the negative electrode frame 300. The negative frame bracket 600 may be arranged perpendicular to the electrode placement member 400, but is not limited to this.

負極框架托架600可以與電解研磨物件200的研磨面保持水準,以便負極框架300能夠與電解研磨物件200的研磨面保持水準。負極框架托架600可以支撐負極框架300的末端。不同於此,負極框架托架600可以支撐負極框架300的某一部分。The negative frame bracket 600 can maintain a level with the polishing surface of the electrolytic polishing object 200 so that the negative frame 300 can maintain a level with the polishing surface of the electrolytic polishing object 200. The negative frame bracket 600 may support the end of the negative frame 300. Unlike this, the negative frame bracket 600 may support a certain part of the negative frame 300.

負極框架托架600可以以L字形狀形成。負極框架托架600可以構成得包括第一面和第二面。負極框架托架600除L字形狀之外,可以包括條(bar)形狀、角形狀、棒形狀、圓形狀、線網、孔板的板。負極框架托架600可以借助於C型夾具500而與負極框架300固定。負極框架托架600在與負極框架310的一側重疊的狀態下,可以借助於C型夾具而固定。The negative frame bracket 600 may be formed in an L-shape. The negative frame bracket 600 may be configured to include a first surface and a second surface. In addition to the L-shape, the negative frame bracket 600 may include a bar shape, an angular shape, a rod shape, a circular shape, a wire mesh, and a plate of a perforated plate. The negative frame bracket 600 may be fixed to the negative frame 300 by means of a C-shaped clamp 500. The negative electrode frame bracket 600 can be fixed by means of a C-shaped clamp in a state of overlapping with one side of the negative electrode frame 310.

負極框架托架600以與負極框架300相同的形狀形成,與負極框架300接觸的面積加寬,具有可以進一步提高負極框架托架600與負極框架300的結合力的效果。The negative electrode frame bracket 600 is formed in the same shape as the negative electrode frame 300, and the area in contact with the negative electrode frame 300 is widened, which has the effect of further improving the bonding force of the negative electrode frame bracket 600 and the negative electrode frame 300.

另外,如果負極框架托架600與負極框架300的接觸面積加寬,則導電性進一步提高,電解研磨物件200的電解研磨效率變好,具有可以縮短電解研磨工序需要的時間的效果。In addition, if the contact area between the negative electrode frame bracket 600 and the negative electrode frame 300 is widened, the conductivity is further improved, the electrolytic polishing efficiency of the electrolytic polishing object 200 becomes better, and there is an effect that the time required for the electrolytic polishing process can be shortened.

負極框架托架600可以與電極放置構件400構成既定角度地配置。負極框架托架600根據負極框架300的形狀,可以與電極放置構件400構成既定角度地配置,使負極框架300有效結合於電極放置構件400。即,電極放置構件400根據電解研磨物件200的凸出部210的結構及位置,會不容易結合負極框架300。此時,如果使負極框架托架600配置於電極放置構件400,則具有可以提高負極框架300的結合位置自由度、有效安裝負極框架300的效果。The negative frame bracket 600 may be arranged to form a predetermined angle with the electrode placement member 400. The negative frame bracket 600 can be arranged at a predetermined angle with the electrode placement member 400 according to the shape of the negative frame 300 so that the negative frame 300 is effectively coupled to the electrode placement member 400. That is, depending on the structure and position of the protruding portion 210 of the electrolytic polishing object 200, the electrode placement member 400 may not be easily combined with the negative electrode frame 300. At this time, if the negative electrode frame bracket 600 is arranged on the electrode placing member 400, the degree of freedom of the coupling position of the negative electrode frame 300 can be increased, and the negative electrode frame 300 can be effectively mounted.

在此實施例中,通過對可以利用在電解研磨物件200上形成的凸出部210來支撐負極框架300的電極放置構件400進行配置,從而具有即使在沒有放出口的區域的電解研磨物件200上,也可以有效安裝負極框架300的效果。In this embodiment, by arranging the electrode placement member 400 that can support the negative electrode frame 300 by using the protrusion 210 formed on the electrolytic polishing object 200, the electrode placement member 400 can be used even on the electrolytic polishing object 200 in the area where there is no discharge port. , The effect of the negative frame 300 can also be effectively installed.

另外,在此實施例中,在對相同的製品進行電解研磨時,可以將已經組裝的負極框架300組裝於電極放置構件400進行研磨,因而具有可以縮短負極框架300安裝及拆卸所需時間及研磨時間的效果。In addition, in this embodiment, when the same product is electrolytically polished, the assembled negative frame 300 can be assembled to the electrode placement member 400 for polishing, so the time required for installation and removal of the negative frame 300 and polishing can be shortened. The effect of time.

另外,在此實施例中,具有的效果是,即使電解研磨物件200的底部200a或側壁部200b中某一者沒有凸出部210,也可以在電解研磨物件200的全體研磨面容易地安裝負極框架300。In addition, in this embodiment, there is an effect that even if one of the bottom 200a or the side wall 200b of the electrolytic polishing object 200 does not have the protruding portion 210, the negative electrode can be easily installed on the entire polishing surface of the electrolytic polishing object 200 Frame 300.

另外,在此實施例中,通過在電極放置構件400上配置負極框架托架600,從而具有可以提高負極框架300的結合位置的自由度、有效安裝電極框架的效果。In addition, in this embodiment, by arranging the negative frame bracket 600 on the electrode placing member 400, the degree of freedom of the coupling position of the negative frame 300 can be increased, and the electrode frame can be effectively installed.

然後,圖9是顯示第二實施例的電解研磨裝置的剖面圖,圖10是顯示圖9的電極隔開構件的立體圖,圖11是顯示圖9的電極隔開構件固定於電解研磨物件的狀態的概略立體圖。9 is a cross-sectional view showing the electrolytic polishing apparatus of the second embodiment, FIG. 10 is a perspective view showing the electrode partition member of FIG. 9, and FIG. 11 is a state in which the electrode partition member of FIG. 9 is fixed to the electrolytic polishing object Schematic perspective view.

圖12至圖14分別是顯示第二實施例的電極隔開構件的多樣結構的立體圖,圖15是顯示圖9的負極框架的變形例的立體圖。12 to 14 are respectively perspective views showing various structures of the electrode partition member of the second embodiment, and FIG. 15 is a perspective view showing a modification of the negative electrode frame of FIG. 9.

如圖9所示,在此實施例中,電極框架作為在內部配備有容納電解研磨物件和電解液的容納空間的電解槽使用的電極框架,可以包括:負極框架3000,其配置於所述電解研磨物件2000的研磨面的一側;及電極隔開構件4000,其配置於所述負極框架的一側,使所述負極框架從所述電解研磨物件的側面或底面隔開。As shown in FIG. 9, in this embodiment, the electrode frame is used as an electrode frame for an electrolytic cell equipped with an electrolytic grinding object and an electrolytic solution containing space inside, and may include: a negative electrode frame 3000, which is disposed in the electrolytic cell One side of the polishing surface of the polishing object 2000; and the electrode separating member 4000, which is disposed on one side of the negative electrode frame, so that the negative electrode frame is separated from the side or bottom surface of the electrolytic polishing object.

另外,第二實施例的電解研磨裝置可以包括:電解槽1000,其在內部配備有容納電解研磨物件2000和電解液1100的容納空間;負極框架3000,其配置於所述電解研磨物件2000的研磨面的一側;電極隔開構件4000,其配置於所述負極框架3000的一側,使所述負極框架3000從所述電解研磨物件2000的底面隔開。In addition, the electrolytic polishing apparatus of the second embodiment may include: an electrolytic cell 1000, which is equipped with a storage space for accommodating an electrolytic polishing object 2000 and an electrolyte 1100; a negative electrode frame 3000, which is configured in the polishing of the electrolytic polishing object 2000 One side of the surface; electrode partition member 4000, which is arranged on one side of the negative frame 3000, so that the negative frame 3000 is separated from the bottom surface of the electrolytic polishing object 2000.

電解槽1000可以以在內部配備有容納空間的箱形狀形成。電解槽1000可以包括圓筒形、多邊箱或環形狀,但其形狀並不限定。The electrolytic cell 1000 may be formed in a box shape equipped with a storage space inside. The electrolytic cell 1000 may include a cylindrical shape, a polygonal box or a ring shape, but its shape is not limited.

在電解槽1000的內部可以填充有電解液1100。作為電解液1100,可以將從由蒸餾水(H2 O)、硫酸(H2 SO4 )類、磷酸(H3 PO4 )類、鉻酸類、硝酸鈉(NaNO3 )、氯化鈉(NaCl)、甘油類構成的組中選擇的至少一種物質混合構成,但並不限定於此。The inside of the electrolytic cell 1000 may be filled with an electrolytic solution 1100. As the electrolyte solution 1100, it can be prepared from distilled water (H 2 O), sulfuric acid (H 2 SO 4 ), phosphoric acid (H 3 PO 4 ), chromic acid, sodium nitrate (NaNO 3 ), sodium chloride (NaCl) A mixture of at least one selected from the group consisting of glycerols, but it is not limited to this.

電解液1100在填充於電解槽1000的狀態下結束電解研磨物件2000的電解研磨後,可以更換。不同於此,電解液1100可以借助於在電解槽1000的一側獨立地形成的泵而流入、流出。在電解槽1000與泵之間,可以形成有電解液流入管、電解液流出管,可以還包括電解液流量調節部、篩檢程式。篩檢程式可以過濾電解液中包含的加工物渣滓及異物質。The electrolytic solution 1100 can be replaced after the electrolytic polishing of the electrolytic polishing object 2000 is completed in a state of being filled in the electrolytic tank 1000. Unlike this, the electrolyte 1100 can flow in and out by means of a pump formed independently on one side of the electrolytic cell 1000. Between the electrolytic tank 1000 and the pump, an electrolyte inflow pipe and an electrolyte outflow pipe may be formed, and may further include an electrolyte flow adjustment part and a screening program. The screening program can filter the processed residue and foreign substances contained in the electrolyte.

在電解槽1000的內部可以容納電解研磨物件2000。電解槽1000的大小可以大於電解研磨物件2000地形成。電解研磨物件2000可以為多邊形或圓筒形的腔室或箱子。電解研磨物件2000可以是用於OLED製造的腔室。另外,電解研磨物件2000也可以是OLED腔室的一部分構成部件。電解研磨物件2000可以為板、箱形狀或上下貫通形成的環形狀。電解研磨物件2000並不限定於此,可以將所有金屬材質製品指定為電解研磨物件。電解研磨物件2000浸於電解液1100內。The electrolytic grinding object 2000 can be accommodated inside the electrolytic tank 1000. The size of the electrolytic tank 1000 may be larger than the electrolytic polishing object 2000. The electrolytic grinding object 2000 may be a polygonal or cylindrical cavity or box. The electrolytic polishing object 2000 may be a chamber for OLED manufacturing. In addition, the electrolytic polishing object 2000 may also be a part of the OLED chamber. The electrolytic polishing object 2000 may be in the shape of a plate, a box, or a ring formed through up and down. The electrolytic polishing object 2000 is not limited to this, and all metal products can be designated as the electrolytic polishing object. The electrolytic polishing object 2000 is immersed in the electrolyte 1100.

電解研磨物件2000由於其重量相當大,因此,例如可以在利用起重機等吊起的狀態下,容納於電解槽1000的容納空間。例如,在電解研磨物件2000為OLED用腔室或LED用MOCVD腔室等的情況下,也存在其重量為數百kg至數千kg(數噸)的巨大的情形。Since the electrolytic polishing object 2000 is quite heavy, it can be accommodated in the accommodation space of the electrolytic cell 1000 in a state of being lifted by a crane or the like, for example. For example, when the electrolytic polishing object 2000 is a chamber for OLED, a MOCVD chamber for LED, or the like, it may weigh several hundred kg to several thousand kg (several tons).

電解研磨物件2000的研磨面可以包括電解研磨物件2000的外側、內側、底面等。The polishing surface of the electrolytic polishing object 2000 may include the outer side, the inner side, and the bottom surface of the electrolytic polishing object 2000.

在電解槽2000的一側可以還配置有整流器。整流器可以向電解研磨物件接入正極(+)的電壓,可以向負極框架3000接入負極(-)的電壓。整流器可以借助於電線等而與電解研磨物件2000電性連接。A rectifier may be further arranged on one side of the electrolytic cell 2000. The rectifier can connect the positive (+) voltage to the electrolytic grinding object, and can connect the negative (-) voltage to the negative frame 3000. The rectifier can be electrically connected to the electrolytic polishing object 2000 by means of wires or the like.

負極框架3000可以配置於電解研磨物件2000的內部及/或外部。負極框架3000可以與電解研磨物件2000的研磨面隔開既定間隔配置。例如,負極框架3000與電解研磨物件2000按50mm±20mm距離均一地隔開配置,因而電解研磨效率提高,電解研磨品質非常優秀。The negative frame 3000 may be disposed inside and/or outside the electrolytic polishing object 2000. The negative frame 3000 may be arranged at a predetermined interval from the polishing surface of the electrolytic polishing object 2000. For example, the negative frame 3000 and the electrolytic polishing object 2000 are uniformly spaced apart and arranged at a distance of 50 mm ± 20 mm, so the electrolytic polishing efficiency is improved, and the electrolytic polishing quality is excellent.

負極框架3000可以選擇性地研磨作為電解研磨物件2000研磨面的內側、外側或底面,或可以同時研磨所有面。在本實施例中,為了說明的便利,對負極框架3000配置於電解研磨物件2000的內側的結構進行說明。The negative electrode frame 3000 can selectively grind the inner, outer or bottom surface of the grinding surface of the electrolytic grinding object 2000, or it can grind all surfaces at the same time. In this embodiment, for the convenience of description, the structure in which the negative electrode frame 3000 is disposed inside the electrolytic polishing object 2000 is described.

負極框架3000可以包括格子結構的板形狀。負極框架3000可以為導電率、耐酸性卓越的不銹鋼材料,但並不限定於此。負極框架3000可以為條(bar)形狀、L字形狀、角形狀、棒形狀、線網、孔板金屬、圓形狀的板。The negative electrode frame 3000 may include a plate shape of a lattice structure. The negative electrode frame 3000 may be a stainless steel material excellent in conductivity and acid resistance, but it is not limited to this. The negative electrode frame 3000 may be a bar shape, an L shape, a corner shape, a bar shape, a wire mesh, a perforated metal, or a circular plate.

負極框架3000沿著電解研磨物件2000的研磨面配置,因而當電解研磨物件2000以上部開放的四邊箱形狀形成時,與此對應,多個負極框架3000可以以四邊箱形狀形成。The negative electrode frame 3000 is arranged along the polishing surface of the electrolytic polishing object 2000. Therefore, when the electrolytic polishing object 2000 is formed in a quadrangular box shape with the upper part open, correspondingly, a plurality of negative electrode frames 3000 may be formed in a quadrangular box shape.

負極框架3000可以包括第一負極板3100和第二負極板3300。第一負極板3100和第二負極板3300可以配置得構成格子結構。第一負極板3100可以以長桿形狀形成。第一負極板3100可以由多個板構成,構成得上下隔開地配置。The negative electrode frame 3000 may include a first negative electrode plate 3100 and a second negative electrode plate 3300. The first negative electrode plate 3100 and the second negative electrode plate 3300 may be arranged to form a lattice structure. The first negative electrode plate 3100 may be formed in a long rod shape. The first negative electrode plate 3100 may be composed of a plurality of plates, which are configured to be arranged vertically apart.

第二負極板3300可以以長桿形狀形成。第二負極板3300可以由多個板構成,左右隔開地配置。第一負極板3100和第二負極板3300可以配置得構成90度,但並不限定於此。The second negative electrode plate 3300 may be formed in a long rod shape. The second negative electrode plate 3300 may be composed of a plurality of plates, which are arranged in a spaced-apart manner. The first negative plate 3100 and the second negative plate 3300 may be arranged to form 90 degrees, but they are not limited to this.

第一負極板3100與第二負極板3300交叉的區域可以借助於螺絲等而鉚合。不同於此,第一負極板3100與第二負極板3300交叉的區域,也可以借助於C型夾具而固定。The area where the first negative plate 3100 and the second negative plate 3300 intersect may be riveted by means of screws or the like. Different from this, the area where the first negative electrode plate 3100 and the second negative electrode plate 3300 intersect can also be fixed by means of a C-type clamp.

上面對負極框架3000具有固定長度的結構進行了說明,但可以使用使負極框架3000大小隨著電解研磨物件2000增大而可變的可變結構的負極框架3000。The structure in which the negative electrode frame 3000 has a fixed length is described above, but a variable structure of the negative electrode frame 3000 in which the size of the negative electrode frame 3000 changes as the electrolytic polishing object 2000 increases can be used.

如圖15所示,負極框架3000可以包括第一負極板3100和第二負極板3300。第一負極板3100和第二負極板3300可以配置得構成格子結構。As shown in FIG. 15, the negative electrode frame 3000 may include a first negative electrode plate 3100 and a second negative electrode plate 3300. The first negative electrode plate 3100 and the second negative electrode plate 3300 may be arranged to form a lattice structure.

第一負極板3100可以由多個支架構成,可以以其長度能夠變長或減小的方式構成。第二負極板3300的結構可以與第一負極板3100的結構相同。下面,以第一負極板3100的結構為中心進行說明。The first negative plate 3100 may be composed of a plurality of brackets, and may be configured in such a way that the length thereof can be increased or reduced. The structure of the second negative plate 3300 may be the same as that of the first negative plate 3100. Hereinafter, the description will be focused on the structure of the first negative electrode plate 3100.

第一負極板3100可以構成得使多個支架連接。第一負極板3100可以一部分重疊地配置,向相互遠離或靠近的方向移動。第一負極板3100可以由多個支架構成,出於說明的便利,以第一負極板3100由第一支架3120和與所述第一支架3120連接的第二支架3140構成的結構為中心進行說明。The first negative plate 3100 may be configured to connect a plurality of brackets. The first negative plates 3100 may be partially overlapped and arranged to move in directions away from or close to each other. The first negative plate 3100 may be composed of multiple supports. For the convenience of description, the description is centered on the structure of the first negative plate 3100 consisting of the first support 3120 and the second support 3140 connected to the first support 3120. .

第一支架3120可以為L字形狀,但並不限定於此。第一支架3120的一部分區域可以與第二支架3140的一部分區域重疊形成。第一支架3120與第二支架3140的重疊的區域可以借助於C型夾具500而支撐。支撐所述第一支架3120與所述第二支架3140的重疊區域的C型夾具500可以稱為第二夾具。The first bracket 3120 may have an L-shape, but it is not limited thereto. A part of the first bracket 3120 may be formed to overlap with a part of the second bracket 3140. The overlapping area of the first bracket 3120 and the second bracket 3140 may be supported by the C-shaped clamp 500. The C-shaped clamp 500 supporting the overlapping area of the first bracket 3120 and the second bracket 3140 may be referred to as a second clamp.

第一支架3120與第二支架3140可以沿相互遠離或靠近的方向移動。C型夾具500可以以第一支架3120與第二支架3140可以相互移動的程度的力,支撐第一支架3120和第二支架3140。不同於此,C型夾具500可以在使第一支架3120和第二支架3140移動後,進一步施加固定力,支撐第一支架3120和第二支架3140。The first bracket 3120 and the second bracket 3140 can move in directions away from or close to each other. The C-shaped clamp 500 can support the first bracket 3120 and the second bracket 3140 with a force to the extent that the first bracket 3120 and the second bracket 3140 can move mutually. Unlike this, the C-shaped clamp 500 can further apply a fixing force after moving the first bracket 3120 and the second bracket 3140 to support the first bracket 3120 and the second bracket 3140.

第二負極板3300可以與第一負極板3100相同地包括第一支架3320和第二支架3340。第二負極板3300可以桿形狀的板形成,但並不限定於此。第二負極板3300的第一支架3320可以沿從第二支架3340遠離或靠近的方向移動。The second negative plate 3300 may include a first bracket 3320 and a second bracket 3340 the same as the first negative plate 3100. The second negative electrode plate 3300 may be formed of a rod-shaped plate, but is not limited to this. The first support 3320 of the second negative plate 3300 may move in a direction away from or close to the second support 3340.

第二負極板3300的第一支架3320和第二支架3340可以一部分重疊地配置。第二負極板3300的第一支架3320與第二支架3340的重疊的區域,可以借助於C型夾具500而支撐。因此,第二負極板3300長度可變。The first support 3320 and the second support 3340 of the second negative electrode plate 3300 may be partially overlapped. The overlapping area of the first support 3320 and the second support 3340 of the second negative electrode plate 3300 can be supported by the C-shaped clamp 500. Therefore, the length of the second negative plate 3300 is variable.

請再參閱圖9,負極框架3000如果與正極的電解研磨物件2000接觸,則發生短路。為了防止這種情況,負極框架3000應構成得與電解研磨物件2000的底面及側面隔開。Please refer to FIG. 9 again. If the negative frame 3000 is in contact with the electrolytic polishing object 2000 of the positive electrode, a short circuit occurs. In order to prevent this, the negative frame 3000 should be configured to be separated from the bottom and side surfaces of the electrolytic polishing object 2000.

在本實施例中,可以配備有電極隔開構件4000,以便使負極框架3000從電解研磨物件2000的底面及側面隔開。In this embodiment, an electrode partition member 4000 may be provided to separate the negative electrode frame 3000 from the bottom surface and the side surface of the electrolytic polishing object 2000.

電極隔開構件4000可以結合於負極框架3000的一側。電極隔開構件4000可以結合於位於最下方的第一負極板3100的一側。電極隔開構件4000以從第一負極板3100向下部凸出的方式結合於第一負極板3100的一側。因此,電極隔開構件4000可以與電解研磨物件2000的底面接觸。The electrode partition member 4000 may be coupled to one side of the negative electrode frame 3000. The electrode partition member 4000 may be coupled to one side of the first negative electrode plate 3100 located at the bottom. The electrode partition member 4000 is coupled to one side of the first negative plate 3100 in a manner of protruding downward from the first negative plate 3100. Therefore, the electrode partition member 4000 can contact the bottom surface of the electrolytic polishing object 2000.

電極隔開構件4000可以以從第一負極板3100向側面凸出的方式結合於第一負極板3100的一側。因此,電極隔開構件4000可以與電解研磨物件2000的側面接觸。The electrode partition member 4000 may be coupled to one side of the first negative plate 3100 in a manner of protruding from the first negative plate 3100 to the side. Therefore, the electrode partition member 4000 can contact the side surface of the electrolytic polishing object 2000.

為了借助於電極隔開構件4000而防止負極框架3000與電解研磨物件2000短路,電極隔開構件4000可以以絕緣材質形成。電極隔開構件4000可以以能夠承受負極框架3000重量且耐酸性強的材質形成。電極隔開構件4000可能包括PVC、橡膠、聚氨酯橡膠、電木中某一者。負極框架3000及電極隔開構件4000可以借助於C型夾具500而結合。結合所述負極框架3000與所述電極隔開構件4000的C型夾具500可以稱為第一夾具。In order to prevent a short circuit between the negative electrode frame 3000 and the electrolytic polishing object 2000 by means of the electrode partition member 4000, the electrode partition member 4000 may be formed of an insulating material. The electrode partition member 4000 may be formed of a material that can bear the weight of the negative electrode frame 3000 and has strong acid resistance. The electrode separating member 4000 may include any one of PVC, rubber, urethane rubber, and bakelite. The negative electrode frame 3000 and the electrode partition member 4000 may be combined by means of a C-shaped clamp 500. The C-shaped jig 500 that combines the negative electrode frame 3000 and the electrode partition member 4000 may be referred to as a first jig.

C型夾具500不使負極框架3000與電極隔開構件4000永久地固定,因而如果使用C型夾具500,則可以容易地進行負極框架3000與電極隔開構件4000的安裝及分離。即,電極隔開構件4000的安裝位置會因電解研磨物件2000的形狀而異,因而C型夾具500可以容易地變更結合於負極框架3000的電極隔開構件4000的安裝位置。C型夾具500可以採用圖4a及圖4b的結構。The C-type clamp 500 does not permanently fix the negative electrode frame 3000 and the electrode partition member 4000. Therefore, if the C-type clamp 500 is used, the negative electrode frame 3000 and the electrode partition member 4000 can be easily installed and separated. That is, the installation position of the electrode partition member 4000 may vary depending on the shape of the electrolytic polishing object 2000, so the C-shaped jig 500 can easily change the installation position of the electrode partition member 4000 coupled to the negative frame 3000. The C-type clamp 500 can adopt the structure of FIG. 4a and FIG. 4b.

電極隔開構件4000可以隔開地配置於在最下方配置的第一負極板3100的一側及另一側。電極隔開構件4000可以保持均衡地進行支撐,以便負極框架3000的重量不偏向一個方向。電極隔開構件4000的安裝個數不限定,可以以3個以上形成。電極隔開構件4000可以在與電解研磨物件2000內側的另一研磨面隔開配置的多個負極框架3000下部形成。The electrode partition member 4000 may be spaced apart on one side and the other side of the first negative plate 3100 arranged at the bottom. The electrode partition member 4000 may maintain a balanced support so that the weight of the negative electrode frame 3000 does not deviate in one direction. The number of electrode partition members 4000 to be installed is not limited, and may be formed in three or more. The electrode partition member 4000 may be formed at the lower part of a plurality of negative electrode frames 3000 arranged apart from the other polishing surface inside the electrolytic polishing object 2000.

另外,固定於電解研磨物件2000的底部及側面的隔開構件4000如果安裝於負極框架3000的角部,則可以掌握負極框架3000的中心,更堅固地安裝負極框架3000。In addition, if the partition members 4000 fixed to the bottom and side surfaces of the electrolytic polishing article 2000 are installed at the corners of the negative electrode frame 3000, the center of the negative electrode frame 3000 can be grasped and the negative electrode frame 3000 can be installed more firmly.

電極隔開構件4000可以以L字形狀、條(bar)形狀、角形狀、棒形狀形成,但並不限定於此。下面對電極隔開構件4000的形狀為前面言及的形狀中某一者進行說明。但是,電極隔開構件4000的形狀並不限定於以下說明的形狀。The electrode partition member 4000 may be formed in an L-shape, a bar shape, a corner shape, or a rod shape, but is not limited to this. Next, the shape of the electrode partition member 4000 will be described as one of the aforementioned shapes. However, the shape of the electrode partition member 4000 is not limited to the shape described below.

如圖10所示,電極隔開構件4000可以形成得下部寬度變小。由此,可以使電極隔開構件4000與電解研磨物件2000相接的區域最小化,保持電解研磨物件2000的整體均勻的電解研磨品質。As shown in FIG. 10, the electrode partition member 4000 may be formed so that the width of the lower portion becomes smaller. Thus, the area where the electrode partition member 4000 and the electrolytic polishing object 2000 are in contact can be minimized, and the uniform electrolytic polishing quality of the electrolytic polishing object 2000 can be maintained.

電極隔開構件4000的長度L可以形成得大於電極隔開構件4000的寬度W。電極隔開構件4000的長度L可以形成得大於第一負極板3100的寬度。因此,電極隔開構件4000可以配置得向第一負極板3100的下部凸出。The length L of the electrode partition member 4000 may be formed to be greater than the width W of the electrode partition member 4000. The length L of the electrode partition member 4000 may be formed to be greater than the width of the first negative plate 3100. Therefore, the electrode partition member 4000 may be configured to protrude toward the lower portion of the first negative electrode plate 3100.

作為一個示例,電極隔開構件4000的長度L可以包括8cm至12cm。電極隔開構件4000的寬度W可以包括2cm至7cm。電極隔開構件4000的厚度T可以包括2nm至7nm。電極隔開構件4000的長度L、寬度W及厚度T並不限定於此。As an example, the length L of the electrode partition member 4000 may include 8 cm to 12 cm. The width W of the electrode partition member 4000 may include 2 cm to 7 cm. The thickness T of the electrode partition member 4000 may include 2 nm to 7 nm. The length L, width W, and thickness T of the electrode partition member 4000 are not limited to these.

電極隔開構件4000可以包括第一支撐部4100、第二支撐部4300。第一支撐部4100可以以四邊板狀形成,但並不限定於此。第二支撐部4300可以形成得其寬度向下部越來越小。作為一個示例,第二支撐部4300可以以在下部具有頂點的倒三角形形狀形成,但並不限定於此。在電解研磨物件2000的底面,第一支撐部4100的側面中某一者的面或第二支撐部4300的側面中某一者的面可以實現面接觸。The electrode partition member 4000 may include a first support part 4100 and a second support part 4300. The first support portion 4100 may be formed in a four-sided plate shape, but is not limited to this. The second support part 4300 may be formed such that its width becomes smaller and smaller toward the lower part. As an example, the second supporting portion 4300 may be formed in an inverted triangle shape having an apex at the lower part, but it is not limited thereto. On the bottom surface of the electrolytic polishing object 2000, one of the side surfaces of the first support portion 4100 or the side surface of the second support portion 4300 may be in surface contact.

如圖11所示,第二支撐部4300的頂點可以與電解研磨物件2000的底面或側面接觸。電解研磨物件2000可以根據其形狀而在底面形成有槽或孔。電極隔開構件4000的一部分可以插入於在電解研磨物件2000上形成的槽或孔2100。在電解研磨物件2000上形成的槽或孔2100中,電極隔開構件4000的第二支撐部4300的頂點區域可以插入結合。第二支撐部4300下部寬度狹窄地形成,因而第二支撐部4300的一部分可以與槽或孔2100大小無關地插入、結合。因此,當電解研磨物件2000的底部存在槽或孔2100時,具有可以利用槽或孔2100更有效地使負極框架4000固定的效果。As shown in FIG. 11, the apex of the second supporting portion 4300 may be in contact with the bottom surface or the side surface of the electrolytic polishing object 2000. The electrolytic polishing article 2000 may have grooves or holes formed on the bottom surface according to its shape. A part of the electrode partition member 4000 may be inserted into the groove or hole 2100 formed on the electrolytic polishing object 2000. In the groove or hole 2100 formed on the electrolytic polishing object 2000, the apex area of the second support portion 4300 of the electrode partition member 4000 can be inserted and joined. The lower part of the second support part 4300 is formed with a narrow width, so a part of the second support part 4300 can be inserted and combined regardless of the size of the slot or hole 2100. Therefore, when there is a groove or hole 2100 at the bottom of the electrolytic polishing object 2000, the groove or hole 2100 can be used to more effectively fix the negative electrode frame 4000.

即使在電解研磨物件2000上未形成槽或孔2100,由於隔開構件4000接觸電解研磨物件2000的底面和側面並固定,因而具有負極框架3000可以更堅固地安裝的效果。Even if the groove or hole 2100 is not formed in the electrolytic polishing object 2000, since the partition member 4000 contacts the bottom surface and the side surface of the electrolytic polishing object 2000 and is fixed, the negative electrode frame 3000 can be installed more firmly.

前面說明的電極隔開構件4000可以以多樣形狀形成。電極隔開構件400可以如圖12至圖14所示形成。The electrode partition member 4000 described above may be formed in various shapes. The electrode partition member 400 may be formed as shown in FIGS. 12 to 14.

如圖12所示,電極隔開構件4000可以包括內側支撐構件4500、所述外側支撐構件4600。內側支撐構件4500可以包括具有堅硬強度的混凝土用脹塞或鐵片,但並不限定於此。內側支撐構件4500可以提高電極隔開構件4000的硬度。外側支撐構件4600可以在內側支撐構件4500的表面形成。外側支撐構件4600可以包括絕緣材質的材料。外側支撐構件4600可以包括諸如塑膠的絕緣材料,但並不限定於此。As shown in FIG. 12, the electrode partition member 4000 may include an inner support member 4500 and the outer support member 4600. The inner support member 4500 may include a concrete expansion plug or iron sheet having a rigid strength, but is not limited to this. The inner support member 4500 can increase the hardness of the electrode partition member 4000. The outer support member 4600 may be formed on the surface of the inner support member 4500. The outer support member 4600 may include an insulating material. The outer support member 4600 may include an insulating material such as plastic, but is not limited thereto.

如圖13所示,電極隔開構件4000可以包括第一支撐部4100、第二支撐部4300。第一支撐部4100可以以四邊板狀形成,但並不限定於此。第二支撐部4300可以形成得其寬度向下部越來越小。As shown in FIG. 13, the electrode partition member 4000 may include a first support part 4100 and a second support part 4300. The first support portion 4100 may be formed in a four-sided plate shape, but is not limited to this. The second support part 4300 may be formed such that its width becomes smaller and smaller toward the lower part.

第二支撐部4300可以是下部面寬度小於上部面寬度的梯形形狀。第二支撐部4300的下部面可以與電解研磨物件的底面接觸。第二支撐部4300的下部面與棱角尖銳的電極隔開構件相比,與電解研磨物件2000的接觸面積寬,因而具有可以更有效支撐負極框架3000的效果。當在電解研磨物件2000的底部形成有槽或孔時,第二支撐部4300的一部分可以插入於電解研磨物件2000的槽或孔。The second support part 4300 may have a trapezoidal shape with a lower face width smaller than an upper face width. The lower surface of the second supporting portion 4300 may be in contact with the bottom surface of the electrolytic polishing object. Compared with the sharp-edged electrode partition member, the lower surface of the second support 4300 has a wider contact area with the electrolytic polishing object 2000, and thus has the effect of supporting the negative electrode frame 3000 more effectively. When a groove or hole is formed at the bottom of the electrolytic polishing object 2000, a part of the second supporting portion 4300 may be inserted into the groove or hole of the electrolytic polishing object 2000.

如圖14所示,電極隔開構件4000可以包括第一支撐部4100、第二支撐部4300。第一支撐部4100可以以四邊板狀形成,但並不限定於此。第二支撐部4300可以形成得其寬度向下部越來越小。As shown in FIG. 14, the electrode partition member 4000 may include a first support part 4100 and a second support part 4300. The first support portion 4100 may be formed in a four-sided plate shape, but is not limited to this. The second support part 4300 may be formed such that its width becomes smaller and smaller toward the lower part.

第二支撐部4300可以形成得下部具有圓棱角。第二支撐部4300的下部面可以與電解研磨物件2000的底面接觸。第二支撐部4300的下部面具有在與電解研磨物件2000接觸時,可以防止在電解研磨物件出現疤痕的效果。當在電解研磨物件2000的底部形成有槽或孔時,第二支撐部4300的一部分可以插入於電解研磨物件2000的槽或孔。The second supporting part 4300 may be formed such that the lower part has rounded corners. The lower surface of the second supporting portion 4300 may be in contact with the bottom surface of the electrolytic polishing object 2000. The lower surface of the second supporting portion 4300 has the effect of preventing scars from appearing on the electrolytic polishing object when it is in contact with the electrolytic polishing object 2000. When a groove or hole is formed at the bottom of the electrolytic polishing object 2000, a part of the second supporting portion 4300 may be inserted into the groove or hole of the electrolytic polishing object 2000.

第二實施例的電極隔開構件4000配置於負極框架3000下部,從而可以將負極框架3000有效配置於沒有另外的托架的電解研磨物件2000。The electrode partition member 4000 of the second embodiment is arranged at the lower part of the negative electrode frame 3000, so that the negative electrode frame 3000 can be effectively arranged on the electrolytic polishing object 2000 without an additional bracket.

當電解研磨物件2000為諸如門的板形狀時,在借助於電極隔開構件4000而支撐負極框架3000的狀態下,配置於電解研磨物件2000的上部後,可以執行電解研磨。接著,在去除負極框架3000的狀態下,倒轉配置電解研磨物件2000,可以將負極框架3000重新配置於電解研磨物件的上部。接著,如果對電解研磨物件2000執行電解研磨,則具有可以縮短安裝及電解研磨所需的時間的效果。When the electrolytic polishing object 2000 has a plate shape such as a door, the negative electrode frame 3000 is supported by the electrode partition member 4000, and after being arranged on the upper portion of the electrolytic polishing object 2000, electrolytic polishing can be performed. Next, with the negative electrode frame 3000 removed, the electrolytic polishing object 2000 is arranged upside down, and the negative electrode frame 3000 can be rearranged on the upper part of the electrolytic polishing object. Next, if electrolytic polishing is performed on the electrolytic polishing object 2000, there is an effect that the time required for installation and electrolytic polishing can be shortened.

上面說明了電極隔開構件4000與電解研磨物件2000的底部接觸的結構,但不同於此,可以以與電解研磨物件2000的側壁部接觸的結構形成電極隔開構件4000,使負極框架3000從電解研磨物件2000的研磨面隔開。The structure in which the electrode partition member 4000 is in contact with the bottom of the electrolytic polishing object 2000 is described above, but differently from this, the electrode partition member 4000 may be formed in a structure that contacts the side wall of the electrolytic polishing object 2000, so that the negative electrode frame 3000 is removed from the electrolysis The grinding surfaces of the grinding object 2000 are separated.

下面請參閱圖16至圖19,分別提供多樣實施例的電解研磨裝置的結構。Please refer to FIGS. 16 to 19 below to provide various embodiments of the electrolytic polishing device structure.

圖16是顯示第二實施例的電解研磨裝置的變形例的剖面圖。Fig. 16 is a cross-sectional view showing a modification of the electrolytic polishing apparatus of the second embodiment.

如圖16所示,電解研磨裝置可以包括:電解槽1000,其在內部配備有容納電解研磨物件2000和電解液的容納空間;負極框架3000,其配置於所述電解研磨物件2000的研磨面的一側;電極隔開構件4000,其配置於所述負極框架3000的一側,使所述負極框架3000從所述電解研磨物件2000的底面隔開。As shown in FIG. 16, the electrolytic polishing device may include: an electrolytic tank 1000, which is equipped with a storage space for accommodating an electrolytic polishing object 2000 and an electrolyte; a negative frame 3000, which is disposed on the polishing surface of the electrolytic polishing object 2000 One side; the electrode partition member 4000, which is arranged on one side of the negative frame 3000 to separate the negative frame 3000 from the bottom surface of the electrolytic polishing object 2000.

電解槽1000可以以在內部配備有容納空間的箱形狀形成。電解槽1000可以包括圓筒形、多邊箱或環形狀,但其形狀並不限定。在電解槽1000的內部可以填充有電解液1100。作為電解液1100,可以將從由蒸餾水(H2 O)、硫酸(H2 SO4 )類、磷酸(H3 PO4 )類、鉻酸類、硝酸鈉(NaNO3 )、氯化鈉(NaCl)、甘油類構成的組中選擇的至少一種物質混合構成,但並不限定於此。The electrolytic cell 1000 may be formed in a box shape equipped with a storage space inside. The electrolytic cell 1000 may include a cylindrical shape, a polygonal box or a ring shape, but its shape is not limited. The inside of the electrolytic cell 1000 may be filled with an electrolytic solution 1100. As the electrolyte solution 1100, it can be prepared from distilled water (H 2 O), sulfuric acid (H 2 SO 4 ), phosphoric acid (H 3 PO 4 ), chromic acid, sodium nitrate (NaNO 3 ), sodium chloride (NaCl) A mixture of at least one selected from the group consisting of glycerols, but it is not limited to this.

在電解槽1000的內部可以容納電解研磨物件2000。電解研磨物件2000浸於電解液1100內。電解研磨物件2000的研磨面可以包括電解研磨物件的外側、內側、底面等。在電解槽2000的外側還可以配置有整流器。整流器可以向電解研磨物件接入正極(+)的電壓,可以向負極框架3000接入負極(-)的電壓。整流器可以借助於電線等而與電解研磨物件2000電性連接。The electrolytic grinding object 2000 can be accommodated inside the electrolytic tank 1000. The electrolytic polishing object 2000 is immersed in the electrolyte 1100. The polishing surface of the electrolytic polishing object 2000 may include the outer side, the inner side, and the bottom surface of the electrolytic polishing object. A rectifier may also be arranged on the outside of the electrolytic cell 2000. The rectifier can connect the positive (+) voltage to the electrolytic grinding object, and can connect the negative (-) voltage to the negative frame 3000. The rectifier can be electrically connected to the electrolytic polishing object 2000 by means of wires or the like.

負極框架3000可以配置於電解研磨物件2000的內部及外部。負極框架3000可以與電解研磨物件2000的研磨面隔開既定間隔配置。負極框架3000可以選擇性地研磨作為電解研磨物件2000研磨面的內側、外側或底面,或者研磨所有面。在本實施例中,為了說明的便利,對負極框架3000配置於電解研磨物件2000的內側的結構進行說明。The negative frame 3000 can be disposed inside and outside the electrolytic polishing object 2000. The negative frame 3000 may be arranged at a predetermined interval from the polishing surface of the electrolytic polishing object 2000. The negative electrode frame 3000 can selectively grind the inner, outer, or bottom surface of the grinding surface of the electrolytic grinding object 2000, or grind all surfaces. In this embodiment, for the convenience of description, the structure in which the negative electrode frame 3000 is disposed inside the electrolytic polishing object 2000 is described.

負極框架3000可以包括格子結構的板形狀。負極框架3000可以為導電率卓越的不銹鋼材料,但並不限定於此。負極框架3000可以為條(bar)形狀、L字形狀、角形狀、棒形狀、線網、孔板金屬、圓形狀的板。The negative electrode frame 3000 may include a plate shape of a lattice structure. The negative electrode frame 3000 may be a stainless steel material with excellent conductivity, but it is not limited to this. The negative electrode frame 3000 may be a bar shape, an L shape, a corner shape, a bar shape, a wire mesh, a perforated metal, or a circular plate.

負極框架3000沿著電解研磨物件2000的研磨面配置,因而當電解研磨物件2000以上部開放的四邊箱形狀形成時,與此對應,多個負極框架3000可以以四邊箱形狀形成。The negative electrode frame 3000 is arranged along the polishing surface of the electrolytic polishing object 2000. Therefore, when the electrolytic polishing object 2000 is formed in a quadrangular box shape with the upper part open, correspondingly, a plurality of negative electrode frames 3000 may be formed in a quadrangular box shape.

負極框架3000可以包括第一負極板3100和第二負極板3300。第一負極板3100與第二負極板3300以格子結構形成。第一負極板3100可以以長桿形狀形成。第一負極板3100可以由多個板構成,構成得上下隔開地配置。The negative electrode frame 3000 may include a first negative electrode plate 3100 and a second negative electrode plate 3300. The first negative plate 3100 and the second negative plate 3300 are formed in a lattice structure. The first negative electrode plate 3100 may be formed in a long rod shape. The first negative electrode plate 3100 may be composed of a plurality of plates, which are configured to be arranged vertically apart.

第二負極板3300可以以長桿形狀形成。第二負極板3300可以由多個板構成,構成得左右隔開配置。第一負極板3100和第二負極板3300可以配置得構成90度,但並不限定於此。The second negative electrode plate 3300 may be formed in a long rod shape. The second negative plate 3300 may be composed of a plurality of plates, which are configured to be spaced apart from each other on the left and right. The first negative plate 3100 and the second negative plate 3300 may be arranged to form 90 degrees, but they are not limited to this.

第一負極板3100與第二負極板3300交叉的區域可以借助於螺絲等而鉚合。第一負極板3100與第二負極板3300交叉的區域也可以借助於C型夾具而固定。The area where the first negative plate 3100 and the second negative plate 3300 intersect may be riveted by means of screws or the like. The area where the first negative electrode plate 3100 and the second negative electrode plate 3300 intersect may also be fixed by means of a C-type clamp.

負極框架3000如果與電解研磨物件2000接觸,則發生短路。為了防止這種情況,負極框架3000應構成得與電解研磨物件2000的側面及底面隔開。電解研磨物件2000的側面可以調節負極框架3000的第一負極板3100的長度,從電解研磨物件2000隔開配置。If the negative electrode frame 3000 is in contact with the electrolytic polishing object 2000, a short circuit occurs. In order to prevent this, the negative frame 3000 should be configured to be separated from the side and bottom surfaces of the electrolytic polishing object 2000. The side surface of the electrolytic polishing object 2000 can adjust the length of the first negative plate 3100 of the negative frame 3000, and is arranged separately from the electrolytic polishing object 2000.

在本實施例中,可以配備有電極隔開構件4000,以便使負極框架3000從電解研磨物件2000的底面隔開。In this embodiment, an electrode partition member 4000 may be provided to partition the negative electrode frame 3000 from the bottom surface of the electrolytic polishing object 2000.

電極隔開構件4000可以以絕緣材質形成。電極隔開構件4000可以以能夠承受負極框架3000重量且耐酸性強的材質形成。電極隔開構件4000可能包括PVC、橡膠、聚氨酯橡膠、電木中某一者。電極隔開構件4000以絕緣材質形成,從而可能防止負極框架3000與作為正極的電解對象物2000短路。電極隔開構件4000的形狀可能具有寬度向下部越來越窄的形狀,但並不限定於此。The electrode partition member 4000 may be formed of an insulating material. The electrode partition member 4000 may be formed of a material that can bear the weight of the negative electrode frame 3000 and has strong acid resistance. The electrode separating member 4000 may include any one of PVC, rubber, urethane rubber, and bakelite. The electrode partition member 4000 is formed of an insulating material, so that it is possible to prevent the negative electrode frame 3000 from being short-circuited with the electrolysis target 2000 as the positive electrode. The shape of the electrode partition member 4000 may have a shape whose width becomes narrower and narrower to the lower part, but is not limited to this.

電極隔開構件4000可以結合於負極框架300的一側。電極隔開構件4000可以結合於在最上方配置的第一負極板3100的一側。電極隔開構件4000可以與在最上方配置的第一負極板3100重疊配置。電極隔開構件4000可以借助於C型夾具500而固定於在最上方配置的第一負極板3100。The electrode partition member 4000 may be coupled to one side of the negative electrode frame 300. The electrode partition member 4000 may be coupled to one side of the first negative electrode plate 3100 arranged at the top. The electrode partition member 4000 may be arranged to overlap with the first negative electrode plate 3100 arranged on the uppermost side. The electrode partition member 4000 may be fixed to the first negative electrode plate 3100 arranged on the uppermost side by the C-shaped clamp 500.

其中,在最上方配置的第一負極板3100的長度可以形成得長於其他第一負極板3100的長度。在最上方配置的第一負極板3100可以配置於電解研磨物件2000的側壁部的上部。電極隔開構件4000可以與電解研磨物件2000的側壁部上部接觸。電極隔開構件4000可以沿電解研磨物件2000的側壁部的上部面配置多個。Wherein, the length of the first negative electrode plate 3100 arranged at the top can be formed to be longer than the length of other first negative electrode plates 3100. The first negative electrode plate 3100 arranged at the top may be arranged on the upper part of the side wall of the electrolytic polishing object 2000. The electrode partition member 4000 may be in contact with the upper part of the side wall of the electrolytic polishing object 2000. The electrode partition member 4000 may be arranged in plurality along the upper surface of the side wall of the electrolytic polishing object 2000.

電極隔開構件4000具有在使負極框架3000從電解研磨物件2000的底部隔開的同時可以穩定地支撐負極框架3000的效果。The electrode partition member 4000 has the effect of stably supporting the negative electrode frame 3000 while partitioning the negative electrode frame 3000 from the bottom of the electrolytic polishing article 2000.

另外,第二實施例的電極隔開構件4000不與電解研磨物件2000的底部接觸,因而具有可以防止因電極隔開構件4000與電解研磨物件2000接觸導致的損傷的效果。In addition, the electrode partition member 4000 of the second embodiment does not contact the bottom of the electrolytic polishing object 2000, and thus has the effect of preventing damage caused by the electrode partition member 4000 contacting the electrolytic polishing object 2000.

圖17是顯示第二實施例的電解研磨裝置的另一變形例的剖面圖,圖18是顯示圖17的負極框架結合於支架的狀態的立體圖。FIG. 17 is a cross-sectional view showing another modified example of the electrolytic polishing apparatus of the second embodiment, and FIG. 18 is a perspective view showing a state where the negative electrode frame of FIG. 17 is coupled to the holder.

如圖17所示,第二實施例變形例的電解研磨裝置可以包括:電解槽1000,其在內部配備有容納電解研磨物件2000和電解液1100的容納空間;負極框架3000,其配置於所述電解研磨物件2000的研磨面的一側;支架7000,其結合於所述負極框架3000的一側;電極隔開構件4000,其結合於所述支架7000的一側,使所述負極框架3000從所述電解研磨物件的底面隔開。As shown in FIG. 17, the electrolytic polishing apparatus of the second embodiment modification may include: an electrolytic tank 1000, which is equipped with a storage space for accommodating an electrolytic polishing object 2000 and an electrolyte 1100; a negative electrode frame 3000, which is disposed in the One side of the grinding surface of the electrolytic grinding object 2000; a support 7000, which is coupled to one side of the negative frame 3000; an electrode separation member 4000, which is coupled to one side of the support 7000, so that the negative frame 3000 is removed from The bottom surfaces of the electrolytic polishing objects are separated.

電解槽1000可以以在內部配備有容納空間的箱形狀形成。電解槽1000可以包括圓筒形、多邊箱或環形狀,但其形狀並不限定。在電解槽1000的內部可以填充有電解液1100。作為電解液1100,可以將從由蒸餾水(H2 O)、硫酸(H2 SO4 )類、磷酸(H3 PO4 )類、鉻酸類、硝酸鈉(NaNO3 )、氯化鈉(NaCl)、甘油類構成的組中選擇的至少一種物質混合構成,但並不限定於此。The electrolytic cell 1000 may be formed in a box shape equipped with a storage space inside. The electrolytic cell 1000 may include a cylindrical shape, a polygonal box or a ring shape, but its shape is not limited. The inside of the electrolytic cell 1000 may be filled with an electrolytic solution 1100. As the electrolyte solution 1100, it can be prepared from distilled water (H 2 O), sulfuric acid (H 2 SO 4 ), phosphoric acid (H 3 PO 4 ), chromic acid, sodium nitrate (NaNO 3 ), sodium chloride (NaCl) A mixture of at least one selected from the group consisting of glycerols, but it is not limited to this.

在電解槽1000的內部可以容納電解研磨物件2000。電解研磨物件2000浸於電解液1100內。電解研磨物件2000的研磨面可以包括電解研磨物件2000的外側、內側、底面等。在電解槽1000的外側還可以配置有整流器。整流器可以向電解研磨物件接入正極(+)的電壓,可以向負極框架3000接入負極(-)的電壓。整流器可以借助於電線等而與電解研磨物件2000電性連接。The electrolytic grinding object 2000 can be accommodated inside the electrolytic tank 1000. The electrolytic polishing object 2000 is immersed in the electrolyte 1100. The polishing surface of the electrolytic polishing object 2000 may include the outer side, the inner side, and the bottom surface of the electrolytic polishing object 2000. A rectifier may also be arranged on the outside of the electrolytic cell 1000. The rectifier can connect the positive (+) voltage to the electrolytic grinding object, and can connect the negative (-) voltage to the negative frame 3000. The rectifier can be electrically connected to the electrolytic polishing object 2000 by means of wires or the like.

負極框架3000可以配置於電解研磨物件2000的內部及外部。負極框架3000可以與電解研磨物件2000的研磨面隔開既定間隔配置。負極框架3000可以選擇性地研磨作為電解研磨物件2000研磨面的內側、外側或底面,或者研磨所有面。在本實施例中,為了說明的便利,對負極框架3000配置於電解研磨物件2000的內側的結構進行說明。The negative frame 3000 can be disposed inside and outside the electrolytic polishing object 2000. The negative frame 3000 may be arranged at a predetermined interval from the polishing surface of the electrolytic polishing object 2000. The negative electrode frame 3000 can selectively grind the inner, outer, or bottom surface of the grinding surface of the electrolytic grinding object 2000, or grind all surfaces. In this embodiment, for the convenience of description, the structure in which the negative electrode frame 3000 is disposed inside the electrolytic polishing object 2000 is described.

負極框架3000可以包括格子結構的板形狀。負極框架3000可以為導電率卓越的不銹鋼材料,但並不限定於此。負極框架3000可以為條(bar)形狀、L字形狀、角形狀、棒形狀、線網、孔板金屬、圓形狀的板。The negative electrode frame 3000 may include a plate shape of a lattice structure. The negative electrode frame 3000 may be a stainless steel material with excellent conductivity, but it is not limited to this. The negative electrode frame 3000 may be a bar shape, an L shape, a corner shape, a bar shape, a wire mesh, a perforated metal, or a circular plate.

負極框架3000沿著電解研磨物件200的研磨面配置,因而當電解研磨物件2000以上部開放的四邊箱形狀形成時,與此對應,多個負極框架3000可以以四邊箱形狀形成。The negative electrode frame 3000 is arranged along the polishing surface of the electrolytic polishing object 200. Therefore, when the electrolytic polishing object 2000 is formed in a quadrangular box shape with an open upper portion, correspondingly, a plurality of negative electrode frames 3000 can be formed in a quadrangular box shape.

負極框架3000可以包括第一負極板3100和第二負極板3300。第一負極板3100與第二負極板3300以格子結構形成。第一負極板3100可以以長桿形狀形成。第一負極板3100可以由多個板構成,構成得上下隔開地配置。The negative electrode frame 3000 may include a first negative electrode plate 3100 and a second negative electrode plate 3300. The first negative plate 3100 and the second negative plate 3300 are formed in a lattice structure. The first negative electrode plate 3100 may be formed in a long rod shape. The first negative electrode plate 3100 may be composed of a plurality of plates, which are configured to be arranged vertically apart.

第二負極板3300可以以長桿形狀形成。第二負極板3300可以由多個板構成,構成得左右隔開配置。第一負極板3100和第二負極板3300可以配置得構成90度,但並不限定於此。The second negative electrode plate 3300 may be formed in a long rod shape. The second negative plate 3300 may be composed of a plurality of plates, which are configured to be spaced apart from each other on the left and right. The first negative plate 3100 and the second negative plate 3300 may be arranged to form 90 degrees, but they are not limited to this.

第一負極板3100與第二負極板3300交叉的區域可以借助於螺絲等而鉚合。第一負極板3100與第二負極板3300交叉的區域也可以借助於C型夾具而固定。The area where the first negative plate 3100 and the second negative plate 3300 intersect may be riveted by means of screws or the like. The area where the first negative electrode plate 3100 and the second negative electrode plate 3300 intersect may also be fixed by means of a C-type clamp.

負極框架3000如果與電解研磨物件2000接觸,則發生短路。為了防止這種情況,負極框架3000應構成得與電解研磨物件2000的側面及底面隔開。電解研磨物件2000的側面可以調節負極框架3000的第一負極板3100的長度,從電解研磨物件隔開配置。If the negative electrode frame 3000 is in contact with the electrolytic polishing object 2000, a short circuit occurs. In order to prevent this, the negative frame 3000 should be configured to be separated from the side and bottom surfaces of the electrolytic polishing object 2000. The side surface of the electrolytic grinding object 2000 can adjust the length of the first negative plate 3100 of the negative frame 3000, and is arranged separately from the electrolytic grinding object.

負極框架3000可以配備有本實施例的電極隔開構件4000,以便從電解研磨物件2000的底面隔開。The negative frame 3000 may be equipped with the electrode partition member 4000 of this embodiment so as to be partitioned from the bottom surface of the electrolytic polishing object 2000.

電極隔開構件4000可以以絕緣材質形成。電極隔開構件4000可以以能夠承受負極框架3000重量且耐酸性強的材質形成。電極隔開構件4000可能包括PVC、橡膠、聚氨酯橡膠、電木中某一者。電極隔開構件4000以絕緣材質形成,從而可以防止負極框架與作為正極的電解物件物短路。電極隔開構件4000的形狀可能具有寬度向下部越來越窄的形狀,但並不限定於此。The electrode partition member 4000 may be formed of an insulating material. The electrode partition member 4000 may be formed of a material that can bear the weight of the negative electrode frame 3000 and has strong acid resistance. The electrode separating member 4000 may include any one of PVC, rubber, urethane rubber, and bakelite. The electrode partition member 4000 is formed of an insulating material, so as to prevent a short circuit between the negative electrode frame and the electrolytic object as the positive electrode. The shape of the electrode partition member 4000 may have a shape whose width becomes narrower and narrower to the lower part, but is not limited to this.

電極隔開構件4000可以配置於電解研磨物件2000的側壁上部。在負極框架3000的一側,為了支撐負極框架3000而可以結合有支架7000。支架7000可以以條(bar)形狀、L字形狀、角形狀、棒形狀、線網、孔板金屬、圓形狀形成。支架7000可以與第一負極板3100平行地配置。支架7000可以與第二負極板3300的上部一側結合。支架7000可以與第二負極板3300的一部分或全體結合。支架7000可以以配置於電解研磨物件2000側壁上部的方式長長地形成。支架7000可以與電解研磨物件2000的一側連接。支架7000可以以金屬材質形成。支架7000可以是與電解研磨物件2000連接而用於傳遞正極的正極支架。The electrode partition member 4000 may be disposed on the upper part of the side wall of the electrolytic polishing object 2000. On one side of the negative electrode frame 3000, a bracket 7000 may be combined to support the negative electrode frame 3000. The bracket 7000 may be formed in a bar shape, an L shape, a corner shape, a bar shape, a wire mesh, a perforated metal, or a circular shape. The bracket 7000 may be arranged in parallel with the first negative plate 3100. The bracket 7000 may be combined with the upper side of the second negative plate 3300. The bracket 7000 may be combined with a part or the whole of the second negative plate 3300. The bracket 7000 may be formed in a long manner so as to be arranged on the upper part of the side wall of the electrolytic polishing object 2000. The bracket 7000 can be connected to one side of the electrolytic polishing object 2000. The bracket 7000 may be formed of a metal material. The support 7000 may be a positive electrode support connected to the electrolytic grinding object 2000 for transferring the positive electrode.

在支架7000與負極框架3000之間,可以還配置有絕緣板5000。負極框架3000、絕緣板5000及支架7000在重疊的狀態下,可以借助於C型夾具500而堅固固定。如果支架7000不與電解研磨物件2000連接,而是起到作為普通支架的作用,則負極框架3000與支架7000之間的絕緣板5000可以去除。另外,如果支架7000起到作為普通支架的作用,則可以由絕緣材質的材料形成。An insulating plate 5000 may be further arranged between the support 7000 and the negative frame 3000. The negative frame 3000, the insulating plate 5000, and the bracket 7000 can be firmly fixed with the aid of the C-shaped clamp 500 in the state of overlapping. If the support 7000 is not connected to the electrolytic grinding object 2000, but serves as a common support, the insulating plate 5000 between the negative frame 3000 and the support 7000 can be removed. In addition, if the bracket 7000 functions as a general bracket, it may be formed of an insulating material.

第二實施例變形例的電解研磨裝置具有的效果是,可以利用支架,將負極框架有效安裝於電解研磨物件的內側及外側。The electrolytic polishing apparatus according to the modification of the second embodiment has the effect that the negative electrode frame can be effectively mounted on the inside and outside of the electrolytic polishing object by using the bracket.

圖19是顯示第二實施例的電解研磨裝置另一變形例的剖面圖。電解研磨裝置以負極框架配置於電解研磨裝置外側的結構為中心進行說明。19 is a cross-sectional view showing another modification of the electrolytic polishing apparatus of the second embodiment. The electrolytic polishing apparatus will be mainly described with a structure in which the negative electrode frame is arranged outside the electrolytic polishing apparatus.

如圖19所示,第二實施例另一變形例的電解研磨裝置可以包括:電解槽1000,其在內部配備有容納電解研磨物件2000和電解液1100的容納空間;負極框架3000,其配置於所述電解研磨物件2000的研磨面的外側;支架7000,其結合於所述負極框架3000的一側;電極隔開構件4000,其結合於所述支架7000的一側,使所述負極框架3000從所述電解研磨物件的底面隔開。As shown in FIG. 19, the electrolytic polishing apparatus of another modification of the second embodiment may include: an electrolytic tank 1000, which is equipped with a storage space for accommodating an electrolytic polishing object 2000 and an electrolyte 1100; The outer side of the grinding surface of the electrolytic grinding object 2000; the bracket 7000, which is coupled to one side of the negative frame 3000; the electrode partition member 4000, which is coupled to one side of the frame 7000, so that the negative frame 3000 Separate from the bottom surface of the electrolytic polishing object.

電解槽1000可以以在內部配備有容納空間的箱形狀形成。電解槽1000可以包括圓筒形、多邊箱或環形狀,但其形狀並不限定。在電解槽1000的內部可以填充有電解液1100。作為電解液1100,可以將從由蒸餾水(H2 O)、硫酸(H2 SO4)類、磷酸(H3 PO4 )類、鉻酸類、硝酸鈉(NaNO3 )、氯化鈉(NaCl)、甘油類構成的組中選擇的至少一種物質混合構成,但並不限定於此。The electrolytic cell 1000 may be formed in a box shape equipped with a storage space inside. The electrolytic cell 1000 may include a cylindrical shape, a polygonal box or a ring shape, but its shape is not limited. The inside of the electrolytic cell 1000 may be filled with an electrolytic solution 1100. As the electrolyte 1100, it can be prepared from distilled water (H 2 O), sulfuric acid (H 2 SO4), phosphoric acid (H 3 PO 4 ), chromic acid, sodium nitrate (NaNO 3 ), sodium chloride (NaCl), At least one selected from the group consisting of glycerin is mixed, but it is not limited to this.

在電解槽1000的內部可以容納電解研磨物件2000。電解研磨物件2000浸於電解液1100內。電解研磨物件2000的研磨面可以包括電解研磨物件2000的外側、內側、底面等。在電解槽1000的外側還可以配置有整流器。整流器可以向電解研磨物件接入正極(+)的電壓,可以向負極框架3000接入負極(-)的電壓。整流器可以借助於電線等而與電解研磨物件2000電性連接。The electrolytic grinding object 2000 can be accommodated inside the electrolytic tank 1000. The electrolytic polishing object 2000 is immersed in the electrolyte 1100. The polishing surface of the electrolytic polishing object 2000 may include the outer side, the inner side, and the bottom surface of the electrolytic polishing object 2000. A rectifier may also be arranged on the outside of the electrolytic cell 1000. The rectifier can connect the positive (+) voltage to the electrolytic grinding object, and can connect the negative (-) voltage to the negative frame 3000. The rectifier can be electrically connected to the electrolytic polishing object 2000 by means of wires or the like.

負極框架3000可以配置於電解研磨物件2000的外部。負極框架3000可以與電解研磨物件2000外側的研磨面隔開既定間隔配置。The negative frame 3000 may be disposed outside the electrolytic polishing object 2000. The negative electrode frame 3000 may be arranged at a predetermined interval from the polishing surface outside the electrolytic polishing object 2000.

負極框架3000可以包括格子結構的板形狀。負極框架3000可以為導電率卓越的不銹鋼材料,但並不限定於此。負極框架3000可以為條(bar)形狀、L字形狀、角形狀、棒形狀、線網、孔板金屬、圓形狀的板。The negative electrode frame 3000 may include a plate shape of a lattice structure. The negative electrode frame 3000 may be a stainless steel material with excellent conductivity, but it is not limited to this. The negative electrode frame 3000 may be a bar shape, an L shape, a corner shape, a bar shape, a wire mesh, a perforated metal, or a circular plate.

負極框架3000沿著電解研磨物件2000的研磨面配置,因而當電解研磨物件2000以上部開放的四邊箱形狀形成時,與此對應,多個負極框架3000可以以四邊箱形狀形成。The negative electrode frame 3000 is arranged along the polishing surface of the electrolytic polishing object 2000. Therefore, when the electrolytic polishing object 2000 is formed in a quadrangular box shape with the upper part open, correspondingly, a plurality of negative electrode frames 3000 may be formed in a quadrangular box shape.

負極框架3000可以包括第一負極板3100和第二負極板3300。第一負極板3100與第二負極板3300以格子結構形成。第一負極板3100可以以長桿形狀形成。第一負極板3100可以由多個板構成,構成得上下隔開地配置。The negative electrode frame 3000 may include a first negative electrode plate 3100 and a second negative electrode plate 3300. The first negative plate 3100 and the second negative plate 3300 are formed in a lattice structure. The first negative electrode plate 3100 may be formed in a long rod shape. The first negative electrode plate 3100 may be composed of a plurality of plates, which are configured to be arranged vertically apart.

第二負極板3300可以以長桿形狀形成。第二負極板3300可以由多個板構成,構成得左右隔開配置。第一負極板3100和第二負極板3300可以配置得構成90度,但並不限定於此。The second negative electrode plate 3300 may be formed in a long rod shape. The second negative plate 3300 may be composed of a plurality of plates, which are configured to be spaced apart from each other on the left and right. The first negative plate 3100 and the second negative plate 3300 may be arranged to form 90 degrees, but they are not limited to this.

第一負極板3100與第二負極板3300交叉的區域可以借助於螺絲等而鉚合。第一負極板3100與第二負極板3300交叉的區域也可以借助於C型夾具而固定。The area where the first negative plate 3100 and the second negative plate 3300 intersect may be riveted by means of screws or the like. The area where the first negative electrode plate 3100 and the second negative electrode plate 3300 intersect may also be fixed by means of a C-type clamp.

電極隔開構件4000可以以絕緣材質形成。電極隔開構件4000可以以能夠承受負極框架3000重量且耐酸性強的材質形成。電極隔開構件4000可能包括PVC、橡膠、聚氨酯橡膠、電木中某一者。電極隔開構件4000以絕緣材質形成,從而可以防止負極框架3000與作為正極的電解物件物2000短路。電極隔開構件4000的形狀可能具有寬度向下部越來越窄的形狀,但並不限定於此。The electrode partition member 4000 may be formed of an insulating material. The electrode partition member 4000 may be formed of a material that can bear the weight of the negative electrode frame 3000 and has strong acid resistance. The electrode separating member 4000 may include any one of PVC, rubber, urethane rubber, and bakelite. The electrode partition member 4000 is formed of an insulating material, so as to prevent the negative electrode frame 3000 from being short-circuited with the electrolytic object 2000 as the positive electrode. The shape of the electrode partition member 4000 may have a shape whose width becomes narrower and narrower to the lower part, but is not limited to this.

電極隔開構件4000可以配置於電解研磨物件2000的側壁上部。在負極框架3000的一側,為了支撐負極框架3000而可以結合有支架7000。The electrode partition member 4000 may be disposed on the upper part of the side wall of the electrolytic polishing object 2000. On one side of the negative electrode frame 3000, a bracket 7000 may be combined to support the negative electrode frame 3000.

支架7000可以包括第一支架7100和第二支架7200。第一支架7100可能支撐在電解研磨物件2000內側配置的負極框架3000。第二支架7200可以與第一支架7100垂直地配置,但並不限定於此。第二支架7200可以以條(bar)形狀、L字形狀、角形狀、棒形狀、線網、孔板金屬、圓形狀形成。The bracket 7000 may include a first bracket 7100 and a second bracket 7200. The first support 7100 may support the negative electrode frame 3000 arranged inside the electrolytic polishing object 2000. The second bracket 7200 may be arranged perpendicular to the first bracket 7100, but is not limited to this. The second bracket 7200 may be formed in a bar shape, an L shape, a corner shape, a bar shape, a wire mesh, a perforated metal, or a round shape.

在第二支架7200,可以與配置於最外廓的第二負極板3300的上部一側結合。第二支架7200可以與第二負極板3300的一部分或全體結合。The second bracket 7200 can be combined with the upper side of the second negative electrode plate 3300 arranged on the outermost profile. The second bracket 7200 may be combined with a part or the whole of the second negative electrode plate 3300.

支架7000可以是與電解研磨物件2000連接而用於傳遞正極的正極支架。此時,在第二支架7200與第二負極板3300之間可以還配置有絕緣板。第二負極板3300、絕緣板及第二支架7200在重疊狀態下,可以借助於C型夾具500堅固地固定。如果支架7000不與電解研磨物件2000連接,而是起到作為普通支架的作用,則第二負極板3300與第二支架7200之間的絕緣板可以去除。另外,如果支架7000起到作為普通支架的作用,則可以由絕緣材質的材料形成。The support 7000 may be a positive electrode support connected to the electrolytic grinding object 2000 for transferring the positive electrode. At this time, an insulating plate may be further arranged between the second bracket 7200 and the second negative plate 3300. The second negative plate 3300, the insulating plate, and the second bracket 7200 can be firmly fixed by means of the C-shaped clamp 500 in the overlapping state. If the support 7000 is not connected to the electrolytic grinding object 2000, but serves as a common support, the insulating plate between the second negative plate 3300 and the second support 7200 can be removed. In addition, if the bracket 7000 functions as a general bracket, it may be formed of an insulating material.

第二實施例變形例的電解研磨裝置具有的效果是,可以利用支架,將負極框架3000有效安裝於電解研磨物件2000的內側及外側。The electrolytic polishing apparatus according to the modification of the second embodiment has the effect that the negative electrode frame 3000 can be effectively mounted on the inside and outside of the electrolytic polishing object 2000 by using a bracket.

經由一實施例通過在負極框架3000一側配置電極隔開構件4000,使負極框架3000配置於電解研磨物件2000上,從而可以將負極框架3000有效配置於沒有另外的托架的電解研磨物件2000的內部或外部,因而可以將負極框架3000迅速配置於電解研磨物件2000,可以在提高電解研磨工序效率的同時,接近而均一地配置,電解研磨品質可以顯著提高。According to an embodiment, by arranging the electrode partition member 4000 on the side of the negative electrode frame 3000, the negative electrode frame 3000 is arranged on the electrolytic grinding object 2000, so that the negative electrode frame 3000 can be effectively arranged on the electrolytic grinding object 2000 without another bracket. Internally or externally, the negative electrode frame 3000 can be quickly disposed on the electrolytic polishing object 2000, and the efficiency of the electrolytic polishing process can be improved, and the electrolytic polishing quality can be significantly improved.

另外,經由一實施例逐漸減小地形成電極隔開構件4000的下部寬度,插入結合於在電解研磨物件2000的底部形成的槽或孔,從而具有能夠更有效地固定負極框架3000的效果。In addition, through an embodiment, the lower width of the electrode partition member 4000 is gradually reduced, and the electrode partition member 4000 is inserted into a groove or hole formed at the bottom of the electrolytic polishing article 2000, thereby having the effect of more effectively fixing the negative electrode frame 3000.

經由一實施例通過使電極隔開構件4000配置於電解研磨物件2000的側壁部上部,從而具有在使負極框架3000從電解研磨物件2000的底部隔開的同時可以穩定地支撐負極框架3000的效果。According to an embodiment, by disposing the electrode partition member 4000 on the upper part of the side wall of the electrolytic polishing object 2000, the negative electrode frame 3000 can be separated from the bottom of the electrolytic polishing object 2000 while stably supporting the negative electrode frame 3000.

另外,經由一實施例通過使電極隔開構件4000不與電解研磨物件2000的底部接觸地配置,從而具有能夠防止因電極隔開構件4000與電解研磨物件2000接觸導致的損傷的效果。In addition, by disposing the electrode partition member 4000 so as not to contact the bottom of the electrolytic polishing object 2000 through an embodiment, there is an effect of preventing damage caused by contact between the electrode partition member 4000 and the electrolytic polishing object 2000.

另外,經由一實施例通過利用支架7000,從而具有可以將負極框架3000有效安裝於電解研磨物件2000的內側及外側的效果。In addition, through the use of the bracket 7000 through an embodiment, the negative electrode frame 3000 can be effectively installed on the inside and outside of the electrolytic polishing object 2000.

100‧‧‧電解槽1000‧‧‧電解槽1100‧‧‧電解液200‧‧‧電解研磨物件200a‧‧‧底部200b‧‧‧側壁部210‧‧‧凸出部2000‧‧‧電解研磨物件2100‧‧‧槽/孔300‧‧‧負極框架300a‧‧‧第一負極框架300b‧‧‧第二負極框架310‧‧‧第一負極板310a‧‧‧第一負極板312‧‧‧第一支架314‧‧‧第二支架330‧‧‧第二負極板330a‧‧‧第二負極板332‧‧‧第一支架334‧‧‧第二支架3000‧‧‧負極框架3100‧‧‧第一負極板3120‧‧‧第一支架3140‧‧‧第二支架3300‧‧‧第二負極板3320‧‧‧第一支架3340‧‧‧第二支架400‧‧‧電極放置構件400a‧‧‧電極放置構件410‧‧‧第一面430‧‧‧第二面4000‧‧‧電極隔開構件4100‧‧‧第一支撐部4300‧‧‧第二支撐部4500‧‧‧內側支撐構件4600‧‧‧外側支撐構件500‧‧‧夾具510‧‧‧固定部520‧‧‧絕緣件530‧‧‧凸部540‧‧‧第一主體550‧‧‧第二主體550a‧‧‧導電性物質550b‧‧‧絕緣膜5000‧‧‧絕緣板600‧‧‧托架700‧‧‧絕緣構件7000‧‧‧支架7100‧‧‧第一支架7200‧‧‧第二支架L‧‧‧長度T‧‧‧厚度W‧‧‧寬度100‧‧‧Electrolysis cell 1000‧‧‧Electrolysis cell 1100‧‧‧Electrolyte 200‧‧‧Electrolytic polishing object 200a‧‧‧Bottom 200b‧‧‧Side wall 210‧‧‧Protruding part 2000‧‧‧Electrolytic polishing object 2100‧‧‧Slot/hole 300‧‧‧Negative Frame 300a‧‧‧First Negative Frame 300b‧‧‧Second Negative Frame 310‧‧‧First Negative Plate 310a‧‧‧First Negative Plate 312‧‧‧ One support 314‧‧‧Second support 330‧‧‧Second negative plate 330a‧‧‧Second negative plate 332‧‧‧First support 334‧‧‧Second support 3000‧‧‧Negative frame 3100‧‧‧ One negative plate 3120‧‧‧First support 3140‧‧‧Second support 3300‧‧‧Second negative plate 3320‧‧‧First support 3340‧‧‧Second support 400‧‧‧Electrode placement member 400a‧‧‧ Electrode placement member 410‧‧‧First side 430‧‧‧Second side 4000‧‧‧Electrode separation member 4100‧‧‧First support part 4300‧‧‧Second support part 4500‧‧‧Inner support member 4600‧ ‧‧Outside support member 500‧‧‧Clamp 510‧‧‧Fixed part 520‧‧‧Insulator 530‧‧‧Protrusion 540‧‧‧First body 550‧‧‧Second body 550a‧‧‧Conductive substance 550b ‧‧‧Insulation film 5000‧‧‧Insulation plate 600‧‧‧Bracket 700‧‧‧Insulation member 7000‧‧‧Support 7100‧‧‧First support 7200‧‧‧Second support L‧‧‧Length T‧‧ ‧Thickness W‧‧‧Width

[圖1]是顯示第一實施例的電解研磨裝置的分解立體圖。 [圖2]是顯示第一實施例的電解研磨裝置的結合立體圖。 [圖3]是顯示第一實施例的電解研磨裝置的電極框架結合的狀態的結合立體圖。 [圖4a]-[圖4b]分別是顯示第一實施例的電解研磨裝置的夾具的立體圖。 [圖5]是顯示第一實施例的電解研磨裝置的負極框架的變形例的立體圖。 [圖6]-[圖8] 分別是顯示第一實施例的電解研磨裝置的變形例的立體圖。 [圖9]是顯示第二實施例的電解研磨裝置的剖面圖。 [圖10]是顯示圖9的電極隔開構件的立體圖。 [圖11]是顯示圖9的電極隔開構件固定於電解研磨物件的狀態的概略立體圖。 [圖12]-[圖14] 分別是顯示第二實施例的電極隔開構件的多樣結構的立體圖。 [圖15]是顯示圖9的負極框架的變形例的立體圖。 [圖16]-[圖17]分別是顯示第二實施例的電解研磨裝置的變形例的剖面圖。 [圖18]是顯示圖17的負極框架結合於支架的狀態的立體圖。 [圖19]是顯示第二實施例的電解研磨裝置另一變形例的剖面圖。[Fig. 1] is an exploded perspective view showing the electrolytic polishing apparatus of the first embodiment. [Fig. 2] is a combined perspective view showing the electrolytic polishing apparatus of the first embodiment. [Fig. 3] Fig. 3 is a combined perspective view showing a state where the electrode frames of the electrolytic polishing apparatus of the first embodiment are combined. [FIG. 4a]-[FIG. 4b] are perspective views showing the jig of the electrolytic polishing apparatus of the first embodiment, respectively. Fig. 5 is a perspective view showing a modification of the negative electrode frame of the electrolytic polishing apparatus of the first embodiment. [Fig. 6]-[Fig. 8] are perspective views showing modified examples of the electrolytic polishing apparatus of the first embodiment, respectively. [Fig. 9] is a cross-sectional view showing the electrolytic polishing apparatus of the second embodiment. [Fig. 10] is a perspective view showing the electrode partition member of Fig. 9. Fig. 11 is a schematic perspective view showing a state where the electrode partition member of Fig. 9 is fixed to an electrolytic polishing object. [Fig. 12]-[Fig. 14] are perspective views showing various structures of the electrode partition member of the second embodiment, respectively. Fig. 15 is a perspective view showing a modification of the negative electrode frame of Fig. 9. [Fig. 16]-[Fig. 17] are cross-sectional views showing modified examples of the electrolytic polishing apparatus of the second embodiment, respectively. [Fig. 18] is a perspective view showing a state in which the negative electrode frame of Fig. 17 is coupled to a holder. Fig. 19 is a sectional view showing another modification of the electrolytic polishing apparatus of the second embodiment.

100‧‧‧電解槽 100‧‧‧Electrolyzer

200‧‧‧電解研磨物件 200‧‧‧Electrolytic polishing objects

210‧‧‧凸出部 210‧‧‧Protrusion

300‧‧‧負極框架 300‧‧‧Negative Frame

310‧‧‧第一負極板 310‧‧‧First negative plate

330‧‧‧第二負極板 330‧‧‧Second negative plate

400‧‧‧電極放置構件 400‧‧‧Electrode placement component

500‧‧‧夾具 500‧‧‧Fixture

700‧‧‧絕緣構件 700‧‧‧Insulation member

Claims (10)

一種電解研磨用電極框架,該電極框架在內部配備有一容納電解研磨物件和一電解液的容納空間的電解槽中使用,該電解研磨物件具有至少一個以上的凸出部以及一研磨面,該電極框架包括:一電極放置構件,其用以結合於該電解研磨物件的該凸出部,包括:用以與該電解研磨物件的該凸出部結合的一第一面;及一第二面;其中,該電極放置構件即使不利用一放出口,也用以與該電解研磨物件的該凸出部直接結合;及一第一負極框架,其以複數格子結構形成並與該第二面結合,其中至少一個以上的該格子結構一側與該電極放置構件結合,與該電解研磨物件的該研磨面隔開既定間隔配置;其中,該電極放置構件的該第一面直接結合該電解研磨物件的該凸出部。 An electrode frame for electrolytic polishing. The electrode frame is used in an electrolytic tank equipped with an electrolytic polishing object and an electrolytic solution containing space. The electrolytic polishing object has at least one protrusion and a polishing surface. The electrode The frame includes: an electrode placement member for coupling with the protrusion of the electrolytic polishing object, including: a first surface for coupling with the protrusion of the electrolytic polishing object; and a second surface; Wherein, even if the electrode placement member does not use a discharge port, it is used to directly connect with the protruding part of the electrolytic polishing object; and a first negative electrode frame is formed in a plurality of lattice structures and is combined with the second surface, At least one side of the lattice structure is combined with the electrode placement member, and is arranged at a predetermined interval from the polishing surface of the electrolytic polishing object; wherein, the first surface of the electrode placement member directly combines with the electrolytic polishing object The protrusion. 如請求項1所述的電解研磨用電極框架,其中該第二面與該第一面以一既定角度折彎形成,該第一面借助於該電解研磨物件的該凸出部和一第一夾具而固定,該電極放置構件的該第二面借助於該第一負極框架的一側和該第二夾具而固定。 The electrode frame for electrolytic polishing according to claim 1, wherein the second surface and the first surface are bent at a predetermined angle, and the first surface is formed by means of the protrusion of the electrolytic polishing object and a first surface. The second surface of the electrode placement member is fixed by means of a side of the first negative electrode frame and the second clamp. 一種電解研磨用電極框架,該電極框架在內部配備有一容納電解研磨物件和一電解液的容納空間的電解槽中使用,包括:一電極放置構件,其結合於該電解研磨物件的至少一個以上的凸出部,包括:與該電解研磨物件的該凸出部結合的一第一面; 與該第一負極框架結合的一第二面;及該電極放置構件即使不利用一放出口,也與該電解研磨物件的該凸出部結合;及一第一負極框架,其以複數格子結構形成,其中至少一個以上的該格子結構一側與該電極放置構件結合,與該電解研磨物件的一研磨面隔開既定間隔配置;其中該電解研磨物件包括形成有一下部凸出部的一底部、從該底部向側面折彎形成的一個以上的側壁部,還包括與該電解研磨物件的該側壁部相向配置的一第二負極框架;該電極放置構件從該電解研磨物件的該底部與側面隔開地延長形成,該第二負極框架固定於該電極放置構件。 An electrode frame for electrolytic polishing. The electrode frame is used in an electrolytic tank equipped with an electrolytic polishing object and an electrolytic solution containing space. The electrode frame includes: an electrode placement member that is combined with at least one of the electrolytic polishing object The protruding part includes: a first surface combined with the protruding part of the electrolytic polishing object; A second surface combined with the first negative electrode frame; and the electrode placement member is combined with the protrusion of the electrolytic polishing object even if a discharge port is not used; and a first negative electrode frame having a plurality of lattice structures At least one side of the lattice structure is combined with the electrode placement member and is arranged at a predetermined interval from a polishing surface of the electrolytic polishing object; wherein the electrolytic polishing object includes a bottom formed with a lower protrusion, More than one side wall formed by bending from the bottom to the side, further includes a second negative electrode frame arranged opposite to the side wall of the electrolytic polishing object; the electrode placement member is separated from the bottom and the side of the electrolytic polishing object The second negative electrode frame is fixed to the electrode placing member. 一種電解研磨用電極框架,該電極框架在內部配備有一容納電解研磨物件和一電解液的容納空間的電解槽中使用,包括:一電極放置構件,其結合於該電解研磨物件的至少一個以上的凸出部,包括:與該電解研磨物件的該凸出部結合的一第一面;與該第一負極框架結合的一第二面;及該電極放置構件即使不利用一放出口,也與該電解研磨物件的該凸出部結合;及一第一負極框架,其以複數格子結構形成,其中至少一個以上的該格子結構一側與該電極放置構件結合,與該電解研磨物件的一研磨面隔開既定間隔配置; 其中在該電極放置構件,還配置有用於放置該第一負極框架的一負極框架托架,該負極框架托架與該電極放置構件的該第二面結合,該第一負極框架與該負極框架托架重疊固定。 An electrode frame for electrolytic polishing. The electrode frame is used in an electrolytic tank equipped with an electrolytic polishing object and an electrolytic solution containing space. The electrode frame includes: an electrode placement member that is combined with at least one of the electrolytic polishing object The protruding part includes: a first surface combined with the protruding part of the electrolytic polishing object; a second surface combined with the first negative electrode frame; and the electrode placement member even if a discharge port is not used, it The protruding part of the electrolytic grinding object is combined; and a first negative electrode frame is formed in a plurality of lattice structures, wherein at least one side of the lattice structure is combined with the electrode placement member, and a grinding of the electrolytic grinding object The faces are arranged at a predetermined interval; Wherein the electrode placement member is also provided with a negative frame bracket for placing the first negative frame, the negative frame bracket is combined with the second surface of the electrode placement member, the first negative frame and the negative frame The brackets are overlapped and fixed. 一種電解研磨用電極框架,該電極框架在內部配備有一容納電解研磨物件和一電解液的容納空間的電解槽中使用,包括:一電極放置構件,其結合於該電解研磨物件的至少一個以上的凸出部,包括:與該電解研磨物件的該凸出部結合的一第一面;與該第一負極框架結合的一第二面;及該電極放置構件即使不利用一放出口,也與該電解研磨物件的該凸出部結合;及一第一負極框架,其以複數格子結構形成,其中至少一個以上的該格子結構一側與該電極放置構件結合,與該電解研磨物件的一研磨面隔開既定間隔配置;其中該第一負極框架包括沿一第一方向配置並由多個支架構成的一第一負極板、沿與該第一方向構成一既定角度的一第二方向配置並由多個支架構成的一第二負極板,該第一負極板包括一第一支架和一第二支架,該第一支架在一部分重疊於該第二支架的狀態下,沿從該第二支架遠離或靠近的方向移動。 An electrode frame for electrolytic polishing. The electrode frame is used in an electrolytic tank equipped with an electrolytic polishing object and an electrolytic solution containing space. The electrode frame includes: an electrode placement member that is combined with at least one of the electrolytic polishing object The protruding part includes: a first surface combined with the protruding part of the electrolytic polishing object; a second surface combined with the first negative electrode frame; and the electrode placement member even if a discharge port is not used, it The protruding part of the electrolytic grinding object is combined; and a first negative electrode frame is formed in a plurality of lattice structures, wherein at least one side of the lattice structure is combined with the electrode placement member, and a grinding of the electrolytic grinding object The surfaces are arranged at a predetermined interval; wherein the first negative frame includes a first negative plate arranged along a first direction and composed of a plurality of brackets, and is arranged along a second direction that forms a predetermined angle with the first direction and A second negative plate is composed of a plurality of supports. The first negative plate includes a first support and a second support. The first support is partially overlapped with the second support. Move away or approach. 一種電極框架,該電極框架用於在內部配備有一容納電解研磨物件和一電解液的容納空間的電解槽,該電解研磨物件具有一研磨面、一底面以及一側面,該電極框架包括:一負極框架,其用以配置於該電解研磨物件的該研磨面的一側;及 一電極隔開構件,其結合於該負極框架,使該負極框架從該電解研磨物件的該底面隔開,該電極隔開構件包括用以接合於該電解研磨物件的該底面並支撐該負極框架的一第一電極隔開構件以及用以接合於該電解研磨物件的該側面的一第二電極隔開構件,該第一電極隔開構件即使不利用一放出口也用以支撐該負極框架;其中,該第一電極隔開構件用以直接接觸該電解研磨物件的該底面。 An electrode frame, which is used to equip an electrolytic cell containing an electrolytic grinding object and a containing space for an electrolyte solution inside. The electrolytic grinding object has a grinding surface, a bottom surface and a side surface. The electrode frame includes: a negative electrode The frame is used to be arranged on one side of the polishing surface of the electrolytic polishing object; and An electrode partition member coupled to the negative electrode frame to separate the negative electrode frame from the bottom surface of the electrolytic polishing object, and the electrode partition member includes for joining to the bottom surface of the electrolytic polishing object and supporting the negative electrode frame A first electrode partition member and a second electrode partition member for joining to the side surface of the electrolytic polishing object, the first electrode partition member is used to support the negative electrode frame even if a discharge port is not used; Wherein, the first electrode separating member is used for directly contacting the bottom surface of the electrolytic polishing object. 一種電極框架,該電極框架用於在內部配備有一容納電解研磨物件和一電解液的容納空間的電解槽,包括:一負極框架,其配置於該電解研磨物件的研磨面的一側;及一電極隔開構件,其結合於該負極框架,使該負極框架從該電解研磨物件的一底面隔開,該電極隔開構件包括接合於該電解研磨物件的該底面並支撐該負極框架的一第一電極隔開構件,該第一電極隔開構件即使不利用一放出口也支撐該負極框架;其中在該電解研磨物件的該底面形成有一槽或一孔,該電極隔開構件還包括供下部一部分插入結合於該槽或孔的一第二電極隔開構件,該第二電極隔開構件的下部一部分的寬度逐漸減小。 An electrode frame, which is used for an electrolytic cell equipped with a containing space for an electrolytic grinding object and an electrolyte solution inside, comprising: a negative electrode frame arranged on one side of the grinding surface of the electrolytic grinding object; and An electrode partition member, which is coupled to the negative electrode frame to separate the negative electrode frame from a bottom surface of the electrolytic polishing object, and the electrode partition member includes a second electrode that is joined to the bottom surface of the electrolytic polishing object and supports the negative electrode frame An electrode partition member, the first electrode partition member supports the negative electrode frame even if a discharge port is not used; wherein a groove or a hole is formed on the bottom surface of the electrolytic grinding object, the electrode partition member further includes a lower portion A part is inserted into a second electrode partition member coupled to the groove or hole, and the width of the lower part of the second electrode partition member gradually decreases. 如請求項6所述的電極框架,其中該電極隔開構件包括一不銹鋼材料,在該電極隔開構件的表面塗布有一絕緣物質,該電極隔開構件與該負極框架重疊配置,借助於一第一夾具而固定,該電解研磨物件包括一側壁部,該電極隔開構件配置於該電解研磨物件的該側壁部的上部。 The electrode frame according to claim 6, wherein the electrode partition member includes a stainless steel material, an insulating material is coated on the surface of the electrode partition member, and the electrode partition member is arranged to overlap the negative electrode frame by means of a first The electrolytic polishing object is fixed by a jig, the electrolytic polishing object includes a side wall portion, and the electrode separating member is disposed on the upper part of the side wall portion of the electrolytic polishing object. 如請求項6所述的電極框架,其中在該負極框架的上部還結合有一支架,在該支架的一側結合有該電極隔開構件,該電解研磨物件包括一側壁部,該電極隔開構件配置結合於該電解研磨物件的該側壁部的上部。 The electrode frame according to claim 6, wherein a bracket is also combined on the upper part of the negative electrode frame, and the electrode partition member is combined on one side of the bracket, the electrolytic polishing object includes a side wall, and the electrode partition member The upper part of the side wall part connected to the electrolytic polishing object is arranged. 一種包括請求項1至9中任意一項的電極框架的電解研磨裝置。 An electrolytic polishing device including the electrode frame of any one of claims 1 to 9.
TW107134547A 2017-09-28 2018-09-28 Electrode frame for electrolytic polishing and electrolytic polishing device including the same TWI703241B (en)

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
KR1020170125739A KR101848264B1 (en) 2017-09-28 2017-09-28 Electrode frame having electrode separating member for electro polishing and electro polishing apparatus including the same
??10-2017-0125737 2017-09-28
KR10-2017-0125737 2017-09-28
??10-2017-0125739 2017-09-28
KR10-2017-0125739 2017-09-28
KR1020170125737A KR101848251B1 (en) 2017-09-28 2017-09-28 Electrode frame having electrode supporting member for electro polishing and electro polishing apparatus including the same

Publications (2)

Publication Number Publication Date
TW201915226A TW201915226A (en) 2019-04-16
TWI703241B true TWI703241B (en) 2020-09-01

Family

ID=65902612

Family Applications (1)

Application Number Title Priority Date Filing Date
TW107134547A TWI703241B (en) 2017-09-28 2018-09-28 Electrode frame for electrolytic polishing and electrolytic polishing device including the same

Country Status (3)

Country Link
CN (1) CN111699285B (en)
TW (1) TWI703241B (en)
WO (1) WO2019066584A1 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2019066566A1 (en) * 2017-09-28 2019-04-04 주식회사 어썸리드 Electrode frame for electropolishing, variable electrode frame for electropolishing and electropolishing apparatus comprising same
CN120738742B (en) * 2025-09-04 2025-11-07 星奇(上海)半导体有限公司 An electropolishing fixture and an electropolishing hanger

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101769924B1 (en) * 2017-04-24 2017-08-21 황재상 Electrolytic polishing apparatus

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR950030405U (en) * 1994-04-04 1995-11-20 추교영 Aluminum Surface Clamp
SE519898C2 (en) * 2001-09-10 2003-04-22 Obducat Ab Ways to etch copper on card and device and electrolyte for carrying out the method
TW200724732A (en) * 2005-12-19 2007-07-01 Univ Yuan Ze Method and apparatus of a mini-complex processing combined of electrochemistry process and electrolytic polish
KR200430129Y1 (en) * 2006-08-04 2006-11-02 장관섭 Large Anodizing Jig
KR20080021362A (en) * 2006-09-04 2008-03-07 (주) 미래이피 Electropolishing apparatus and method inside the pipe
KR101183218B1 (en) * 2011-08-30 2012-09-14 (주)한국마루이 Electrolytic polishing apparatus
JP6231879B2 (en) * 2013-12-27 2017-11-15 マルイ鍍金工業株式会社 Partial polishing jig
CN104928649B (en) * 2015-04-20 2017-12-05 中国科学院上海微系统与信息技术研究所 The method that local prepares wafer level graphene monocrystalline for carbon device and local for carbon

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101769924B1 (en) * 2017-04-24 2017-08-21 황재상 Electrolytic polishing apparatus

Also Published As

Publication number Publication date
CN111699285B (en) 2023-01-06
CN111699285A (en) 2020-09-22
TW201915226A (en) 2019-04-16
WO2019066584A1 (en) 2019-04-04

Similar Documents

Publication Publication Date Title
CN108723528B (en) Electrolytic grinding device
KR101183218B1 (en) Electrolytic polishing apparatus
TWI703241B (en) Electrode frame for electrolytic polishing and electrolytic polishing device including the same
CN107750284B (en) Electrode assembly, electrode structure, and electrolyzer
KR20030079788A (en) Ion exchange membrane electrolytic cell
CN104254644A (en) Ion exchange membrane electrolyzer
JP2019065339A5 (en)
US7363110B2 (en) Gasket with curved configuration at peripheral edge
JP2013142169A (en) Holder for electroplating and electroplating apparatus using the holder
KR101848251B1 (en) Electrode frame having electrode supporting member for electro polishing and electro polishing apparatus including the same
KR102226831B1 (en) Electrode frame having electrode separating member for electro polishing and electro polishing apparatus including the same
KR102205852B1 (en) Electrode frame having electrode supporting member for electro polishing and electro polishing apparatus including the same
KR101848266B1 (en) Variable electrode frame for electro polishing, fixing member of electrode frame for electro polishing and electro polishing apparatus including the same
JP2022536258A (en) Electrode assembly for electrochemical processes
KR102025064B1 (en) Electrode Support Structures for Coaxial Electrolytic Cells
CN205954138U (en) Electroplate conducting structure and electroplate device
WO2017000408A1 (en) Electrolysis system and anode apparatus thereof
TWI687557B (en) Electrode polishing electrode frame, electrolytic polishing variable electrode frame, and electrolytic polishing device including the same
CN205011851U (en) Reaction vessel of electrochemical method preparation diameter cycle modulation microfilament
KR20190037064A (en) Electrode frame having electrode combining member for electro polishing
CN210052778U (en) Lithium ion battery cell fixing device
JP2020501025A5 (en)
CN105088285B (en) Electrochemical process prepares the reaction vessel of diameter periodic modulation microfilament
CN215925131U (en) Titanium blue and titanium blue assembly for film plating machine and film plating machine
JP2000144467A (en) Electrolytic cell