TW201823166A - Hydrogen peroxide removal method and apparatus - Google Patents

Abstract

In a method and apparatus for degrading and removing hydrogen peroxide by passing hydrogen peroxide-containing water through platinum catalyst-filled columns 21-25, hydrogen peroxide removal performance is restored by stopping water passage through one column at a specified time. During said specified time, nitrogen gas or water with dissolved hydrogen can be flushed through said column in which water passage has been stopped and the volume of water passed through the other columns can be increased.

Description

Method and device for removing hydrogen peroxide

[0001] The present invention relates to a method and an apparatus for removing hydrogen peroxide from water in a pure water production process. In the present invention, pure water includes ultrapure water.

[0002] Ultra-pure water for cleaning semiconductors and electronic materials is made of raw water (Ultra-pure water) by ultra-pure water production equipment consisting of a pretreatment device, a primary pure water production device, and a secondary pure water production device (sub-system). Industrial water, municipal water, well water, etc.). [0003] In a pretreatment device formed by an agglutination, pressure floating (precipitation), filtration (membrane filtration) device, and the like, removal of suspended substances and sol substances in raw water is performed. In addition, polymer organic substances, hydrophobic organic substances, etc. can be removed in this process. [0004] In a primary pure water production apparatus including a reverse osmosis membrane separation device, a degassing device, and an ion exchange device (such as a mixed bed type or a four-bed five-tower type), ions and organic components in raw water are removed. In the reverse osmosis membrane separation device, salts are removed, and ionic and sol-based TOC are removed. The ion exchange device removes salts and removes TOC components adsorbed or ion-exchanged by an ion-exchange resin. The degassing device removes inorganic carbon (IC) and dissolved oxygen. [0005] The primary pure water from the primary pure water manufacturing device is processed in a sub-system by an ultraviolet (UV) irradiation device, an ion exchange device, and an external filtration (UF) membrane separation device, so that ultrapure water is manufactured. In a UV oxidation apparatus, by UV irradiation by a UV 185nm lamp will be an organic acid TOC, CO ₂ is further decomposed. The organic matter and CO ₂ generated by the decomposition are removed by an ion exchange device (usually a mixed-bed ion exchange device) in the subsequent stage. In the UF membrane separation device, fine particles are removed, and fragments of the ion exchange resin flowing out of the ion exchange device are also removed. The ultrapure water thus obtained is supplied to the point of use. [0006] By an oxidation treatment by ultraviolet irradiation in an ultraviolet oxidizing device, organic substances (TOC components) in water are decomposed to generate organic acids and carbonic acid. The oxidative decomposition mechanism of the TOC component in this ultraviolet oxidizing device is to oxidize and decompose water to generate OH radicals, thereby oxidizing and decomposing the TOC components by the OH radicals, and the amount of ultraviolet radiation can fully oxidize and decompose TOC in water Excessive exposure. [0007] In such a case where there is a large amount of ultraviolet radiation, since OH radicals generated by the decomposition of water become excessive, the excess OH radicals are combined to generate hydrogen peroxide. The generated hydrogen peroxide is in contact with the anion exchange resin of the mixed-bed ion exchange device in the subsequent stage and decomposes, and at this time, the ion exchange resin is deteriorated. With this decomposition, dissolved oxygen also increases. In addition, the TOC component derived from the ion exchange resin is regenerated by the decomposition of the ion exchange resin, and the quality of the ultrapure water obtained is degraded. In addition, the hydrogen peroxide remaining in the mixed-bed ion exchange device after passing water may deteriorate the degassing device and the UF membrane in the later stage of the mixed-bed ion exchange device. [0008] In Patent Document 1, a method for removing hydrogen peroxide in ultrapure water is to treat water containing hydrogen peroxide discharged from an ultraviolet oxidation treatment device of an ultrapure water production device, and A method in which metal nanosol particles are supported on an anion exchange resin carrier by a hydrogen peroxide decomposition catalyst, and the hydrogen peroxide in the treated water is decomposed to 1 ppb or less. [0009] In Patent Document 2, in order to suppress degradation of a platinum-based catalyst, a method for producing pure water in which treated water is subjected to ultraviolet oxidation treatment by an ultraviolet oxidation device and then subjected to hydrogen peroxide removal treatment using a platinum-based catalyst is described. The TOC of the feed water to the ultraviolet oxidizer is 5 ppb or less. [0010] [Patent Document 1] Japanese Patent Laid-Open No. 2007-185587 [Patent Document 2] Japanese Patent Laid-Open No. 2015-93226 [0011] As described above, the platinum catalyst represented by Pt has been conventionally used for oxidizing Decomposition of matter, etc. In the ultrapure water production system, the removal of hydrogen peroxide generated as a by-product in the ultraviolet oxidation process for the purpose of decomposing trace amounts of organic matter in water has become a problem in recent years. Decomposition treatment of hydrogen peroxide generated by sol-supported ion exchange resin, Pd-supported resin, and the like. [0012] Through this hydrogen peroxide decomposition treatment, although the hydrogen peroxide concentration in the water to be treated can be reduced below a target concentration (for example, 1 ppb), the performance of the catalyst gradually decreases with long-term use.

[0013] An object of the present invention is to provide a method and a device for removing hydrogen peroxide, which can suppress the degradation of the performance of a platinum-based catalyst, or restore it, and can maintain a state with sufficient catalyst activity for a long time. [0014] Generally, the decrease in the performance of platinum-based catalysts is suppressed by reducing the concentration of organic substances flowing into the treated water of the platinum-based catalyst device. However, the inventors focused on the results of overlapping studies to further suppress the performance degradation. It was found that the performance of the platinum-based catalyst is reduced, and the oxidation of the catalyst surface is also a cause. By suppressing the oxidation of the catalyst surface, the performance of the platinum-based catalyst can be suppressed. [0015] The present invention has been completed based on such knowledge. [0016] The method for removing hydrogen peroxide according to the present invention is a method for removing hydrogen peroxide by passing hydrogen peroxide-containing water through water to a hydrogen peroxide removal device having a platinum catalyst filling container arranged in parallel. Then, the operation of restoring hydrogen peroxide removal performance to stop the passage of hydrogen peroxide-containing water toward a part of the container for a predetermined period of time is performed. [0017] In one aspect of the present invention, a non-oxidizing gas such as a nitrogen gas is supplied to the container at the predetermined time. [0018] In one aspect of the present invention, the catalyst is removed from the container and refilled at the predetermined time. [0019] In one aspect of the present invention, hydrogen-dissolved water is passed through the container at the predetermined time. [0020] In one aspect of the present invention, the hydrogen peroxide removing device is installed in an ultrapure water producing device, and increases a water flow amount to a platinum-based catalyst filling container other than the part at the predetermined time. [0021] A hydrogen peroxide removing device of the present invention includes a platinum catalyst filling container arranged in parallel, a hydrogen peroxide-containing water passing means for passing hydrogen peroxide-containing water to each container, and a Supply means for supplying non-oxidizing gas or hydrogen-dissolved water to each container, and switching means for switching supply of hydrogen peroxide-containing water and non-oxidizing gas or hydrogen-dissolved water to each container. [Effect of the invention] [0022] The catalyst is not a change in itself, but a barrier to reduce any chemical reaction to promote the function, but by long-term exposure to oxidation conditions, the surface will oxidize, which will cause performance decline. [0023] Platinum-based catalysts are irreversible oxides if they are strongly oxidized, but in the stage of reversible surface oxidation, they return to their original properties by continuously opening from the oxidized state. In the present invention, the platinum-based catalyst is continuously opened from the oxidized state by stopping the water flow to restore the performance of the catalyst. During this stoppage of water flow, aerate N ₂ gas, and remove the platinum catalyst from the container and fill it. After the stoppage of water flow, hydrogen peroxide dissolves water to pass through the water to further restore the hydrogen peroxide decomposition performance. . [0024] The cause of the catalyst deterioration is contamination caused by impurities such as organic substances contained in the water to be treated, in addition to the deterioration caused by the surface oxidation of the platinum group catalyst itself. In addition, there is also degradation of the substrate, that is, the carrier (for example, an ion exchange resin) itself. Therefore, when the impurities in the water to be treated are reduced and the hydrogen peroxide concentration is relatively high, the present invention is particularly effective because oxidation is the main cause of performance degradation. [0025] According to the present invention, there is no need to exchange platinum catalysts for new products, and the validity period of platinum catalysts can be extended. [0026] A plurality of platinum-type catalyst filling containers are arranged in parallel, and performance recovery processing is performed during a part of the container implementation. By sequentially increasing the water flow switching operation to other containers, the desired water flow can be changed. The long-term hydrogen peroxide decomposition treatment is performed while maintaining the quality and quantity of the treated water.

[0028] Hereinafter, the present invention will be described in further detail. [0029] The method and device for removing hydrogen peroxide according to the present invention are optimally used in the manufacturing process of ultrapure water. In the ultrapure water manufacturing process, as described above, the primary pure water from the primary pure water manufacturing device is processed by the sub-system so that the ultrapure water is manufactured. In the sub-system, once the pure water is processed by the ultraviolet oxidation device, the hydrogen peroxide is removed by the hydrogen peroxide removal device with a platinum catalyst, and then the non-renewable ion exchange device, membrane degassing device, and UF are processed. Membrane device is water-permeable. [0030] The TOC component is oxidized and decomposed by the ultraviolet oxidation treatment in the ultraviolet oxidation device to generate organic acid and carbonic acid, and hydrogen peroxide is generated. In the present invention, the effluent water from the ultraviolet oxidation device is passed to a hydrogen peroxide removal device to remove hydrogen peroxide. This hydrogen peroxide removal device uses a platinum catalyst to fill a container. Platinum-based catalysts are sol particles of platinum-based metals, especially those in which nano-sol particles are carried on a carrier. [0031] Platinum-based metals include ruthenium, rhodium, palladium, osmium, iridium, and platinum. These platinum group metals can be used singly or in combination of two or more kinds. They can also be used as two or more kinds of alloys, or the refined products of naturally produced mixtures are not separated into monomers. You can use it. Among these, platinum, palladium, and a platinum / palladium alloy alone or a mixture of two or more of these are particularly preferred because of their strong catalyst activity. [0032] The method for producing nanosol particles of platinum-based metal is not particularly limited, and examples thereof include a metal salt reduction reaction method and a combustion method. Among these, the metal salt reduction reaction method is easy to manufacture and can be used optimally because metal nanosol particles of stable quality can be obtained. [0033] The average particle diameter of the nanosol particles of the platinum-based metal is preferably 1 to 50 nm, more preferably 1.2 to 20 nm, and still more preferably 1.4 to 5 nm. This particle diameter is a value obtained from an electron microscope image. [0034] Examples of the carrier for supporting the platinum-based metal nanosol particles include, for example, magnesium oxide, titanium dioxide, aluminum oxide, silica-alumina, zirconia, activated carbon, zeolite, diatomaceous earth, and ions. Exchange resin, etc. Among these, anion exchange resins can be particularly preferably used. Platinum metal nanosol particles have an electric double layer and are negatively charged, so they are stably supported on an anion exchange resin and are not easily peeled off. Platinum metal nanosol particles supported on an anion exchange resin show strong catalytic activity for the decomposition and removal of hydrogen peroxide. The exchange group of the anion exchange resin is preferably OH. OH-type anion exchange resin is used to make the resin surface alkaline and promote the decomposition of hydrogen peroxide. [0035] The supporting amount of the platinum-based metal nanosol particles toward the anion exchange resin is preferably 0.01 to 0.2% by weight, and more preferably 0.04 to 0.1% by weight. [0036] Hydrogen peroxide in water is a hydrogen peroxide decomposition catalyst supporting platinum-based metal nanosol particles on a carrier by contacting hydrogen peroxide-containing water, and 2H ₂ O ₂ → 2H ₂ O + O ₂ is decomposed by reaction. [0037] The water passing through the velocity toward the platinum-containing catalyst based aqueous hydrogen peroxide filled container, the space velocity is preferably SV100 ~ 2,000h ^-1, 300 ~ 1,500h ^-1 better. Platinum catalysts, because the decomposition rate of hydrogen peroxide is very fast, even if the SV is 100h ^-1 or more, the hydrogen peroxide can be fully decomposed. However, if the SV exceeds 2,000 h ^-1 , the pressure loss due to water flow is too large, and the decomposition and removal of hydrogen peroxide may become insufficient. [0038] Specific examples of the method and apparatus for removing hydrogen peroxide according to the present invention will be described with reference to FIGS. 1 and 2. [0039] In FIG. 1, a plurality of columns 21 to 25 in which platinum-based catalysts are filled are arranged in parallel (five in the figure). The hydrogen peroxide-containing water such as the outflow water of the ultraviolet irradiation device passes through the valves 11 to 15 through the pipes 1 and passes through the cylinders 21 to 25. The outflow water from the cylinders 21 to 25 is taken out through the valves 31 to 35 and the collecting pipe 2. [0040] Treatment is carried out by the method of passing water in parallel to five columns 21 to 25. At the time when the signs of the deterioration of the treated water were recognized, the water flow to a cylinder as shown in Fig. 1 (b) (the cylinder 21 in Fig. 1 (b)) was closed by closing the valves 11, 31 Stop, and increase the water flow of the four remaining cylinders 22 to 25 by 25% each to perform parallel operation to ensure the amount of treated water. [0041] With respect to the cylinder 21 that stops water flow, by applying: (1) standing still for a certain period of time. (2) The atmosphere in the cylinder is replaced with a non-oxidizing gas such as N ₂ gas. (3) Once the platinum-based catalyst is pulled out, it is preferably immersed in ultrapure water for a predetermined time (preferably more than 1 day, especially about 2 to 10 days), and then filled. (4) Pass hydrogen-dissolved water through the water. Any one or a combination of two or more of the above treatments restores the hydrogen peroxide decomposition performance. [0042] Thereafter, it is preferable to pass water to the cylinder 21 experimentally, and after confirming that the quality of the treated water is good, the valves 11 and 31 are opened to reopen the water to the cylinder 21. Thereafter, the performance recovery operation is performed on the other columns 22 to 25 in the same order in order to return the performance to a good state. [0043] After the reply processing for all of the five cylinders 21 to 25 is completed, the five parallel water flows of the original standard flow rate are returned. [0044] FIG. 2 shows that three-way valves 41 to 45 can be provided instead of valves 11 to 15, three-way valves 51 to 55 can be provided instead of valves 31 to 35, and N ₂ gas or hydrogen can be dissolved toward each of the columns 21 to 25. A hydrogen peroxide removal device that can supply water by switching operations of the three-way valves 31 to 35 and 51 to 55. [0045] The third ports of the three-way valves 41 to 45 are connected to pipes 61 to 65 branched from the pipe 60. The third ports of the three-way valves 51 to 55 are connected to the discharge pipe 70 through the branch pipes 71 to 75. N ₂ gas or hydrogen-dissolved water is supplied from the pipe 60 to any of the columns 21 to 25, and the outflow gas or hydrogen-dissolved water is discharged from the pipe 70. [0046] In the case where the standard SV is allowed to pass water at 400 / h equally to each of the columns 21 to 25 provided with the hydrogen peroxide removing device of the five columns 21 to 25 juxtaposed as shown in FIGS. In response to the treatment, four parallel water flows (for example, Fig. 1 (b)) will increase the SV of each cylinder to 500 / h. This is not good for maintaining the quality of treated water. However, the hydrogen peroxide decomposition life of platinum-based resin (when no recovery treatment is applied) is only a few years. For this reason, since the recovery treatment is a maximum of one week, a 25% increase in the load on each column is the longest. Degree in 4 weeks. Here, since the water flow of the cylindrical cylinders whose performance has been restored has been reopened, it is not difficult to maintain the overall water treatment capacity (SV500 / h) of the hydrogen peroxide removal device. [0047] In the first and second figures, five cylinders are arranged side by side, but six cylinders are arranged side by side, and one of them is stopped in order (performance recovery operation), and it is often possible to run the five cylinders through water. [0048] In this case, when the prescribed time (predetermined hydrogen peroxide load) is exceeded, one of them will be stopped, and one of the methods that will not be used at the same time to start the water flow will be 5/6 of the time of each container. Water, 1/6 of the time is the intermittent intermittent operation) According to the rotating merry-go-round application, you can run with plenty of room. [0049] Based on the experimental results of the present inventors, the following are considered. (1) If the water passing through the treated water into the platinum-type catalyst filling container is stopped after a predetermined period of time and the water passing is turned on again, the hydrogen peroxide decomposition performance can be restored. The longer the stop time, the higher the degree of recovery. (2) When the water flow to the platinum-type catalyst filling container from the treated water is stopped, and the operation of removing O ₂ from the container by N ₂ gas aeration is added, the hydrogen peroxide decomposition performance is better than (1) Reply shortly. (3) Once the water passing through the treated water to the platinum-based catalyst filling container is stopped, once the platinum-based catalyst is pulled out of the container, it will be refilled after being stored in ultrapure water for a predetermined period of time, and then re-opened with water. The hydrogen decomposition performance is recovered in a shorter time than the above (1) and (2). (4) After stopping the water flow from the treated water to the platinum catalyst filling container, and passing hydrogen-dissolved water through the water, the hydrogen peroxide decomposition performance is restored in a shorter time than the above (1) to (3). [0050] The above embodiment is an example of the present invention, and the present invention may be an embodiment other than the above. For example, the number of columns is not limited to five. [Example] [0051] [Reference Example] An ultrapure water production apparatus is prepared as shown in FIG. 3. This ultrapure water production device 81 is composed of a three-stage device of a pretreatment device 82, a primary pure water production device 83, and a secondary pure water production device (sub-system) 84. The pretreatment device 82 of this ultrapure water production device 81 is a pretreatment produced by filtration, agglomeration, and precision filtration of raw water W. [0052] The primary pure water production device 83 includes a tank 85 of pre-treated water W1, a reverse osmosis (RO) membrane device 86, an ultraviolet (UV) oxidation device 87, and a regenerative ion exchange device (mixed bed). Type or 4 bed 5 tower type, etc.) 88, and membrane type degassing device 89. [0053] The sub-system 84 includes a sub-tank bucket 91 that stores the primary pure water W2 produced by the primary pure water production device 83, and primary pure water that is distributed from the sub-tank bucket 91 through a pump (not shown). W2 treated ultraviolet oxidation device 92, platinum group metal catalyst resin tower 93, membrane degassing device 94, non-regenerating mixed bed type ion exchange device 95, and ultra-restricted filtration (UF) as a membrane filtration device The film 96 is formed. The ultrafine water W3 is produced by removing the fine particles by the ultra-limiting filtration (UF) membrane 96, and the ultrapure water W3 is supplied to the use point 97, and the unused ultrapure water is returned to the sub tank 91. [0054] Platinum nano sol particles having an average particle diameter of 3.5 nm were supported on a strongly basic gel (gel) type anion exchange resin with a supporting amount of 0.07 wt% to prepare a platinum-supported Anion exchange resins of metal nano particles serve as platinum group metal catalyst resins. [0055] In the ultrapure water production device 81 having the device configuration shown in FIG. 3, the platinum group metal catalyst resin 93 was used to manufacture the ultrapure water W3 using the platinum group metal catalyst resin described above, and the measurement The hydrogen peroxide concentration (initial stage) of the inlet water and the outlet water of the platinum group metal catalyst resin tower 93 of the system 84. The results are shown in Table 1. Then, the hydrogen peroxide concentration (last stage) of the outlet water of the platinum group metal catalyst resin tower 93 after the operation of this ultrapure water production device 81 was continued for a long time (30 days) was measured. The results are shown in Table 1. [0056] In order to measure the hydrogen peroxide concentration, 4.8 mg of phenolphthalein, 8 mg of copper sulfate (anhydrous) and 48 mg of sodium hydroxide were added with sodium sulfate (anhydrous) to 10 g, and a reagent for quantifying a small amount of hydrogen peroxide concentration was prepared. 0.5 g of the reagent was added to 10 mL of test water and dissolved. After standing at room temperature for 10 minutes, the absorbance at 552 nm was measured, and the hydrogen peroxide concentration was calculated based on the measured value. [Table 1] [0058] As apparent from Table 1, the increase in the hydrogen peroxide concentration of the ultrapure water W3 after a long-term operation is significant. [Comparative Example 1] In the reference example, the resin of the platinum group metal catalyst resin tower 93 after long-time operation was taken out, filled into a test cylinder, and a platinum group metal catalyst resin tower for testing was prepared. In addition, for comparison, a new platinum group metal catalyst resin was similarly filled into a test cylinder to form a platinum group metal catalyst resin tower. [0060] Adding 300 μg / L or 1000 μg / L of hydrogen peroxide to ultrapure water (less than 1 μg / L of hydrogen peroxide), the inlet water for the test was prepared, and the inlet water for the test was measured. The concentration of hydrogen peroxide in the outlet of the test cylinder after the water was passed from the flow velocity (SV) 300hr ^-1 to the circulating water. The results are shown in Table 2. [Table 2] [0062] It is clear from Table 2 that the concentration of hydrogen peroxide in Comparative Example 1 in which the resin of the platinum group metal catalyst resin tower 93 after a long-time operation was filled into the column was higher than that of the new product. From this, it can be seen that the decomposition energy of hydrogen peroxide decreases. [Example 1] In the reference example, the resin of the platinum group metal catalyst resin tower 93 after being operated for a long time was filled into a test cylinder to form a platinum group metal catalyst resin tower for the test. In addition, for comparison, a new platinum group metal catalyst resin was similarly filled into a test cylinder to form a platinum group metal catalyst resin tower. [0064] 30 μg / L of hydrogen peroxide was added to ultrapure water (less than 1 μg / L of hydrogen peroxide) to prepare inlet water, and the water passing velocity (SV) of the inlet water toward the test cylinder was measured. The concentration of hydrogen peroxide in the outlet water after flowing into the water at 400hr ^-1 . The results are shown in Table 3. [0065] In the load test, 400 μg / L of hydrogen peroxide was added to ultrapure water (less than 1 μg / L of hydrogen peroxide), and the inlet water for the test was prepared, and the inlet water for this test was passed through the water to the above-mentioned test cylinder. Velocity (SV) 6400hr ^{-1 After} 22 hours of flow to the circulating water, the operation was stopped, and 30 μg / L of hydrogen peroxide was added to the ultra pure water (with hydrogen peroxide 1 μg / L under). The hydrogen peroxide concentration of the outlet water after 5 minutes and 60 minutes. The results are shown in Table 3. [0066] The resin of the platinum group metal catalyst resin tower for each test was taken out, and after being stored for 2 weeks in ultrapure water (less than 1 μg / L of hydrogen peroxide), it was refilled, and measurements were made on The hydrogen peroxide is less than 1 μg / L) The hydrogen peroxide concentration of the outlet water when hydrogen peroxide is added to the inlet water at 30 μg / L. The results are shown in Table 3. [Table 3] [0068] As apparent from Table 3, the performance of the platinum group metal catalyst was restored by storage in ultrapure water for 2 weeks. [0069] Although the present invention has been described in detail using specific aspects, those skilled in the art can obviously make various changes without departing from the intention and scope of the present invention. This case refers to the entirety of Japanese Patent Application No. 2016-255445 filed on December 28, 2016.

[0070]

W‧‧‧ raw water

W1‧‧‧ pre-treated water

W2‧‧‧Pure water

W3‧‧‧ ultra pure water

1‧‧‧Piping

2‧‧‧collection piping

11 ～ 15, 31 ～ 35‧‧‧valve

21 ～ 25‧‧‧Column

41 ～ 45、51 ～ 55‧‧‧Three-way valve

61 ～ 65‧‧‧Piping

70‧‧‧ discharge pipe

71 ～ 75‧‧‧ branch manifold

81‧‧‧Ultra-pure water manufacturing equipment

82‧‧‧Pre-treatment device

83‧‧‧Pure water manufacturing equipment

84‧‧‧ Subsystem

85‧‧‧ tank

86‧‧‧ membrane device

87‧‧‧oxidation device

89‧‧‧ degassing device

91‧‧‧ Deputy tank

92‧‧‧ultraviolet oxidation device

93‧‧‧Platinum metal catalyst resin tower

94‧‧‧ degassing device

95‧‧‧ ion exchange device

96‧‧‧External Filter (UF) Membrane

97‧‧‧points of use

[0027] [FIG. 1] An explanatory diagram of the method of the present invention. [Fig. 2] An explanatory diagram of an example of the device of the present invention.第 [Figure 3] System diagram of ultrapure water production equipment.

Claims (7)

A method for removing hydrogen peroxide is a method for removing hydrogen peroxide by passing hydrogen peroxide-containing water through water to a hydrogen peroxide removal device having a platinum-type catalyst filling container arranged in parallel, which is characterized by: The operation of restoring hydrogen peroxide removal performance to stop the passage of hydrogen peroxide-containing water toward a part of the container for a predetermined period of time is performed. For example, the method for removing hydrogen peroxide according to item 1 of the scope of patent application, wherein: (i) supplying non-oxidizing gas to the container at the aforementioned predetermined time. For example, the method for removing hydrogen peroxide according to item 2 of the patent application, wherein the non-oxidizing gas is nitrogen gas. For example, the method for removing hydrogen peroxide according to any one of claims 1 to 3, wherein, at a predetermined time, the catalyst is removed from the container and refilled. The method for removing hydrogen peroxide according to any one of claims 1 to 4 of the scope of patent application, wherein: passes hydrogen-dissolved water into the container at the predetermined time. For example, the hydrogen peroxide removal method according to any one of claims 1 to 5, wherein the aforementioned hydrogen peroxide removal device is provided in an ultrapure water production device, and at a predetermined time, the platinum The water flow of the catalyst filling container increased. A hydrogen peroxide removing device, comprising: (1) a platinum-type catalyst filling container arranged in parallel; and a hydrogen peroxide-containing water passing means for passing hydrogen peroxide-containing water toward each container; and a container directed toward each container Supply means for supplying non-oxidizing gas or hydrogen-dissolved water, and switching means for switching supply of hydrogen peroxide-containing water to each container, and supply of non-oxidizing gas or hydrogen-soluble water.