TW201828406A - Holder for substrates - Google Patents

Abstract

A holder configured to be attached to a carrier body for holding a substrate is described. The holder includes a front portion arranged to face a material source or a mask; a rear portion arranged to face away from a material source, wherein the rear portion includes a beveled portion with an inclined surface; and a groove for receiving a substrate provided between the front portion and the rear portion.

Description

Substrate holder

Embodiments of the present disclosure relate to a holder for holding a substrate during processing (eg, for layer deposition). Embodiments of the present disclosure are particularly related to a holder configured to be attached to a carrier body of a carrier for holding a substrate during vacuum layer deposition. Specifically, embodiments of the present disclosure relate to a holder configured to be attached to a carrier body for holding a substrate for a substrate, a holder for holding one or more substrates, and a device for Method for fixing a substrate in a carrier having a carrier body.

Several methods are known for depositing materials on a substrate. For example, the substrate may be coated by a physical vapor deposition (PVD) process, a chemical vapor deposition (CVD) process, a plasma enhanced chemical vapor deposition (PECVD) process, or the like. Usually, the processing is performed in a processing equipment or processing chamber, where the substrate to be coated is located. A deposition material is provided in the apparatus. A variety of materials and their oxides, nitrides, or carbides can be used for deposition on a substrate. In addition, other processing operations such as etching, structuring, and annealing can be performed in the processing chamber.

Coating materials can be used in several applications and in several technical fields. For example, it is used in the field of microelectronics, such as generating semiconductor elements. In addition, substrates for displays are usually coated by a physical vapor deposition (PVD) process. Other applications include insulating plates, organic light emitting diode (OLED) panels, substrates with thin film transistors (TFTs), color filters, and more.

Generally, the glass substrate may be supported on a carrier during its processing. The carrier supports the glass or substrate and is driven by a processing machine. That is, the carrier drives glass or a substrate. The carrier usually forms a frame or a plate that supports the substrate along the periphery of the substrate, or in the latter case, the surface of the substrate.

In order to fix the substrate in the carrier, there are different holding devices, such as a glass holder. Due to increased particle requirements, for example for thin-film transistor (TFT) applications, avoiding particle generation becomes even more important. Sides are deposited on carriers and holders, such as clamps, and glass movements within the holder, such as glass clamps, are the main particle generators near the glass surface.

In view of the foregoing, it would be beneficial to provide a holder, particularly a holder configured to be attached to a carrier for holding a substrate, which overcomes at least some of the problems in the art.

In view of the above, there are provided a holder configured to be attached to a carrier body for holding a substrate, a carrier, and a method for fixing a substrate in the carrier. Other aspects, advantages, and features of the disclosure are apparent from the appended claims, the description, and the drawings.

According to one embodiment, a holder configured to be attached to a carrier body for holding a substrate is provided. The holder includes a front portion configured to face the source of material or a shield, and a rear portion configured to face away from the source of material, wherein the rear portion includes an inclined portion having an inclined surface and a substrate for receiving between the front portion and the rear portion. A groove.

According to another aspect, a carrier including at least one holder is provided. The at least one retaining member includes a front portion configured to face the source of material or a mask, and a rear portion configured to face away from the source of material, wherein the rear portion includes a sloped portion having an inclined surface and is configured to receive a portion disposed between the front and rear A groove in the substrate.

According to yet another aspect, a method for fixing a substrate in a carrier having a carrier body is provided. The method includes loading a substrate on a carrier; moving at least one holder toward the substrate relative to the carrier body, the at least one holder including an inclined surface portion; and using the inclined surface portion to guide the substrate in a first portion of the groove.

In order to be able to understand the manner of the above features of the present disclosure in detail, a more specific description of the above disclosure may be provided by referring to the embodiments. The attached drawings are related to the embodiments of the present disclosure and are described as follows:

Reference will now be made in detail to various embodiments of the present disclosure, one or more examples of which are illustrated in the drawings. In the following description of the drawings, the same element symbols indicate the same components. Generally, only the differences with respect to the various embodiments are described. Each example is provided by way of explanation of this disclosure and is not meant to be a limitation on this disclosure. In addition, features illustrated or described as part of one embodiment can be used on or in conjunction with other embodiments to yield yet another embodiment. This means that the description includes such modifications and changes.

According to embodiments described herein, a carrier is provided that includes at least one holder. The at least one holding member is configured to hold or clamp the substrate. The holder includes a chamfered portion to form a part of a groove of the guide substrate in another groove portion having a small gap (for example, a gap of 0.5 mm or less, for example, about 0.1 mm).

According to some embodiments that may be combined with other embodiments described herein, the substrate thickness may be 0.1 to 1.8 mm, and the holder may be suitable for such a substrate thickness. This may be particularly advantageous when the substrate thickness is about 0.9 mm or less, such as 0.7 mm or 0.5 mm or 0.3 mm, and the holder is particularly suitable for such a substrate thickness. The holder can also be adapted for smaller or larger substrate thicknesses. According to some embodiments that may be combined with other embodiments described herein, a holder or carrier including at least one holder may be adapted for a particular glass thickness. A glass substrate having a smaller thickness than a specific glass thickness may also be supported by a holder or a carrier including the holder.

According to some embodiments that may be combined with other embodiments described herein, the large-area substrate may have a size of at least 0.174 m ² . The size can be from about 1.375m ² to about 10m ² , more usually from about 2m ² to about 11m ² or even up to 12m ² . Generally, a rectangular substrate that provides a mask structure, apparatus, and method according to embodiments described herein is a large area substrate as described herein. For example, a large-area substrate may be the fifth generation corresponding to a substrate of about 1.4m ² (1.1m × 1.3m), the seventh generation corresponding to a substrate of about 4.39m ² (1.95m × 2.25m), and the corresponding generation of 8.5 ^On the substrate of about 5.5m ² (2.2m × 2.5m), even the 10th generation substrate corresponding to about 8.7m ² (2.85m × 3.05m). Even larger generations such as the 11th and 12th generations and corresponding substrate areas can be similarly implemented. However, those of ordinary skill in the art will understand that the holder can be used for any substrate size, that is, even smaller or larger substrate sizes than outlined above.

Generally, the substrate can be made of any material suitable for material deposition. For example, the substrate may be selected from glass (e.g., soda lime glass, borosilicate glass, etc.), metal, polymer, ceramic, composite material, carbon fiber material, or any other material or material that may be coated by a deposition process The combination.

FIG. 1 illustrates a carrier 100 according to an embodiment described herein and has at least one holder 200. The carrier 100 is configured to support the substrate 101. As shown in FIG. 1, the substrate 101 is disposed at a position in the carrier 100, particularly when processing is performed in a processing chamber. The carrier 100 includes a frame or a carrier body 160. For example, the vehicle body may define a window or an opening. According to a typical embodiment, the carrier body 160 provides a substrate receiving surface.

FIG. 1 further illustrates a guide rod 162 that can be disposed at the lower portion of the carrier 100, such as a rod member. During operation, the guide bar 162 may be disposed below the carrier body 160. The guide can be configured to contact a transfer system, such as a roller device. The carrier 100 may further include an upper guide 164. The upper guide 164 may be configured to support the position of the carrier 100 and the upper portion of the transport system.

According to further embodiments, the vehicle may be configured for non-contact transmission, such as using a magnetic levitation system. The device for a contactless transmission vehicle may have a magnetic element on the upper portion of the vehicle, the magnetic element being configured to interact with a magnetic levitation system. The lower part of the vehicle may be configured for lateral stability of the vehicle, or the vehicle body 160 may be suspended in a non-contact transmission device.

According to some embodiments that may be combined with other embodiments described herein, the plurality of holders 200 may be movable, and in particular may be moved in a direction perpendicular to or substantially perpendicular to an edge of the carrier body. For example, the edge of the vehicle may be the edge of an opening formed by the vehicle. The holders can be moved in a direction perpendicular to or substantially perpendicular to the respective edges of the substrate supported by the holders. In FIG. 1, the movement of the holder is indicated by an arrow 201. According to some embodiments, the holder 200 on one side (left or right) of the vehicle body and the holder 200 on the top or bottom side of the vehicle body, particularly on the top of the vehicle as shown in FIG. 1 Side can be moved. The carrier body 160 includes a first side, a second side, a third side, and a fourth side. Here, at least eight holding members may be provided on each of the first side, the second side, the third side, and the fourth side, in particular at least 24 holding members, At least two corresponding holders are installed. At least two corresponding holders of the holder are movably mounted on two adjacent positions of the first side, the second side, the third side, and the fourth side.

The holder can be moved on two adjacent sides of the carrier, such as the right side and the top side in FIG. 1. Moving the holder allows the holder 200 to be retracted. The holder 200 can be retracted to load or unload the glass substrate into the carrier body. By retracting the holder as shown by arrow 201 in FIG. 1, the openings formed by the carrier body or the holder 200 are increased, respectively. The increased opening size provides sufficient space for loading or unloading the glass substrate.

According to some embodiments that may be combined with other embodiments described herein, the carrier body 160 may be made of aluminum, aluminum alloy, titanium, titanium aluminum alloy, stainless steel, or the like. For relatively small large-area substrates, such as the fifth generation or below, the carrier body 160 may be made of a single piece, that is, the frame is integrally formed. However, according to some embodiments that may be combined with other embodiments described herein, the carrier body 160 may include two or more elements, such as a top post, a side post, and a bottom post. Especially for very large area substrates, the carrier or carrier body can be manufactured with multiple parts. These parts of the carrier body are assembled to provide a carrier body 160 for supporting the substrate 101. The carrier body 160 is a substrate 101 specifically configured to receive a substrate region. The substrate region is, for example, an opening of a carrier.

FIG. 2 shows the holding member 20, which can be compared with a general jig. The holder or jig has a substrate receiving portion or groove 30 having a rectangular cross-section, that is, a rectangular groove. The holder 20 has a rear portion 216, a front portion, and a middle portion 212. The middle portion 212 connects the front portion 214 and the rear portion 216. The front portion 214 faces the deposited material or material source. The direction of material deposition is indicated by arrow 25. The rear portion 216 is remote from the deposition material so that a substrate 101 is provided between the deposition material and the rear portion 216.

For a holder or jig having a rectangular substrate receiving portion 30, there may be a relatively large gap between the holder or the jig and the glass so that the glass can easily enter the holder or the jig. For example, FIG. 2 illustrates a rear gap 21 between the rear portion 216 and the glass of the substrate 101 and a front gap 23 between the front portion 214 and the glass of the substrate 101. This gap allows the course to move within the groove of the holder, which is the scope of the patent application.

As shown in FIG. 2, the material deposited on the substrate 101 in the direction indicated by the arrow 25 may cause side deposition 50, that is, undesired material deposition on the holder 20. The lateral deposits 50 can particularly spread into the front gap 23. Friction between the substrate 101 and the holder may cause particles to be generated. The gap 26 between the glass masks is provided by, for example, the front gap 23, the width of the holder at the front portion 214, and the gap 27 between the mask holders. Due to the uncertain glass position inside the fixture, the gap 26 between the glass masks may be relatively large, such as leading to a larger front gap 23. The front gap 23 is provided between the holder and the glass with respect to the holder. The holders or clamps may be provided separately from each other, thereby creating, for example, a gap 27 between the mask holders between the holder and the mask 70. Since the holder or holder cannot be properly covered at an indeterminate distance from the mask 70 (such as a de-edge mask), a considerable amount of side deposits accumulate on the holder or clamp. As shown in FIG. 2, it is possible that the side is deposited into the groove of the jig, that is, the gap between the front portion 214 and the substrate 101. The glass movement inside the holder loosens the side deposits, which further increases the generation of particles.

FIG. 3 illustrates a holder 200 according to an embodiment described herein. The holder 200 includes a front portion 214 and a rear portion 216. The groove 300 that can be configured for inserting the substrate 101 into the holder 200 includes an inclined surface portion 220 having an inclined surface. The beveled portion 220 provides a half-V-shaped holder or clamp, that is, one side of the groove for the substrate is V-shaped. The other side of the groove for the substrate may not be V-shaped, that is, it may be straight. The half-V fixture design addresses some or all of the disadvantages already described above. The middle portion 212 may connect the front and rear portions.

In one aspect, the loading or feeding of the substrate is placed on the rear side of the rear glass through a large holder opening. On the other hand, glass movement inside the holder is limited by a small gap of, for example, 0.1 mm. A groove portion having a small gap forms a first portion of the groove. A groove portion having a large holder opening, that is, an inclined portion or a half-V-shaped portion forms a second portion of the groove. According to the embodiment of the present disclosure, a holder having a first groove portion and a second groove portion having different shapes may be provided.

According to some embodiments, the holder or fixture can be customized according to the thickness of the glass used to have all or most of the benefits of a small gap. Alternatively, several glass thicknesses can be used in the processing system without changing the holder of the carrier, where holders or clamps for the thickest glass to be processed in the processing system can be used, even for thinner glass.

According to an embodiment of the present disclosure that may be combined with other embodiments described herein, the groove 300 may have a first portion, such as a lower portion in FIG. 3. The first portion of the groove may have substantially parallel surfaces, such as the inner surface of the front portion 214 and the inner surface of the rear portion 216. The first part may be a parallel part. For example, the first portion may have a first angle of 5 ° or less, especially 0 °, between the opposing surfaces of the front and rear portions. Due to the beveled portion 220, the groove 300 has a second portion having a second angle greater than the first angle between the opposing surfaces. The second angle may be set between the inclined surface of the beveled portion 220 and the inner surface of the front portion. The second angle may be 10 ° or more, such as about 15 °. The inner surface of the front portion 214 forming the first angle and the inner surface of the front portion 214 forming the second angle may be the same inner surface, that is, one flat surface.

According to the embodiment of the present disclosure, particularly at the first portion, such as the bottom of the groove 300 (ie, at the groove portion adjacent to the middle portion 212), the small gap may further lead to a better or flatter substrate 101 Glass edges. This also results in a small gap between the glass surface of the substrate 101 and the mask 70 (such as a de-edge mask). The smaller gap between the glass and the mask increases uniformity and reduces lateral deposition on the holder or fixture. In addition, by limiting the glass position inside the fixture, the inside of the fixture better prevents side deposition. The gap 326 between the glass masks is provided by, for example, a small front gap, the width of the holder at the front portion 214, and the gap 27 between the mask holders. Due to the position of the glass within the fixture, the gap 326 between the glass masks can be reduced, resulting in a small front gap, for example. In FIG. 3, the side deposition 250 from the material deposited along the arrow 25 is reduced compared to the side deposition 50 in FIG. 2. FIG. 3 further illustrates that the cathode 330 can be rotated or rotated during sputtering of the target material during material deposition as indicated by arrow 335. According to other embodiments, a planar cathode or other source for material deposition may be used.

4A to 5B illustrate another embodiment of the holder 200. 4A and 5A illustrate side views from the side of the front portion 214. Figures 4B and 5B show side views similar to Figures 2 and 3. 4A and 4B illustrate a holder 200 according to an example, which can be used to illustrate modifications that can be combined with the embodiments of the present disclosure. The holder has a rear portion 216. For example, the rear portion may have a height of 20 to 40 mm, such as about 30 mm. The front portion 214 extends along the length of the holder 200. According to some embodiments, the length (the left-to-right size shown in Figure 4A) may be 30 to 60 mm, such as about 40 mm. The middle portion 212 may have a width of 5 mm to 15 mm (the left-to-right size shown in FIG. 4B), for example, about 7 mm. The groove 300 has a width at the first portion 412, for example, the bottoms in FIGS. 4A to 5B, at the groove 300, that is, at the groove portion facing the middle portion 212. In the case where the holder is mounted on the top side of the carrier, the bottom in FIGS. 4A to 5B may be the top of the groove. The width of the first portion 412 corresponds to the thickness of the substrate. Generally, the width of the first portion 412 may be 0.05 to 0.2 mm larger than the thickness of the substrate. For example, the width of the first portion may be 0.6 mm, 0.7 mm, 0.8 mm, or 1 mm. According to an embodiment that can be combined with other embodiments described herein, the beveled portion 220 may have an inclined angle of 10 ° to 25 °, such as about 13 ° or about 15 °. According to some embodiments that may be combined with other embodiments described herein, the height of the beveled portion 220 or the inclined surface may be such that the width of the beveled portion is 1.5 mm to 5 mm, such as about 3 mm. The width of the beveled portion increases corresponding to the width of the groove at the second portion of the groove.

In addition, the holder shown in FIG. 4A includes an opening 416. The opening 416 is configured to mount the holder 200 to the carrier. For example, the opening 416 may include threads for receiving a screw or the like. The opening 416 is configured to mount the holder 200 to the carrier. The holder can be pivotably mounted to the holder as shown by arrow 417. The pivotal mounting of the holder has the advantage that the holder can be rotated, for example, 25 ° or less, so that the glass makes full contact with the first portion 412 of the groove. Full contact of the glass along the edge of the glass can be provided on the floor of the groove. This reduces stress on the glass edges. According to some embodiments, the first portion 412 of the groove 300 may be bent at its side. This may be beneficial for gently loading the substrate into the holder 200. The curved curve may have a radius of 2 mm or more.

5A and 5B illustrate a holder 200 according to an example, which can be used to illustrate modifications that can be combined with the embodiments of the present disclosure. Compared to the holder 200 shown in FIGS. 4A and 4B, the example holder 200 in FIGS. 5A and 5B may have a rear portion 216 having a height reduction of, for example, 7 mm to 15 mm. According to additional or alternative modifications, the front portion 214 may be a front portion assembly having two front portion segments. There may be a gap between the two front section segments so that the beveled portion 220 is exposed when viewed from one side of the front (ie, the material deposition side). Considering that the height of the rear portion 216 is reduced instead of being opened, a blind hole 516 is provided to mount the holder 200 to the vehicle or the vehicle body.

FIG. 6 illustrates the carrier 100 during a loading operation of a loading arm 602 (eg, a robot arm). As shown in FIG. 6, the holders 200 on the first and second sides of the four sides of the carrier body 160 are moved to the retracted positions. Exemplarily, the holders on the top and right sides in FIG. 6 are shown in the retracted position. The retracted position is provided due to the movement of the holder, as indicated by arrow 201 in FIG. 1. For example, the movement into and out of the retracted position may be perpendicular to the edge of the rectangular substrate 101 supported by the holder.

With the retracted positions of the holder 200 on the top and right sides, the loading arm 602 can move the substrate 101 in the area between the holders because the substrate receiving area between the holders is enlarged. The substrate can be moved as shown by an arrow 603, and is further supported by, for example, the lower and left holders 200 in FIG. 6. According to some embodiments that can be combined with other embodiments described herein, the holders 200 on two adjacent sides of the carrier body may be fixed, and the holders on the remaining two sides of the four sides of the carrier body may be fixed. The pieces can be removable. The remaining two sides may also be adjacent sides of the vehicle body.

As described above, the groove in the holder may have a first portion for the substrate, and the first portion has a relatively small gap. The first part is adjacent to the middle part of the holder. For example, the first portion may be a bottom portion of the groove of the holder on the bottom side of the carrier body 160, and may be a top portion of the groove of the holder on the top side of the carrier body 160. Further, the groove in the holder may have a second portion including a beveled portion. The beveled portion increases the size of the holder opening to the rear side of the holder, ie, for example, the side away from the source of material during the deposition of material on the substrate.

To load the substrate 101 into the carrier 100, the substrate is moved as shown by an arrow 603. A second portion of the groove including the beveled portion guides the substrate into the groove. The increased thickness of the groove at the second part allows the substrate to be smoothly inserted into the holder. After moving along arrow 603, the substrate 101 is supported in the first portion of the trench, where the first portion provides the substrate with a smaller gap compared to the gap in the second portion. The reduced gap for holding the substrate in the final position reduces lateral deposition at the holder, provides stability to the glass substrate in the support position, and / or allows for reductions such as masking with de-edge masking Distance between the substrate and the mask. The reduced substrate-to-mask distance further reduces side deposition. Reduced side deposition and increased ability reduce particle generation during substrate processing.

After the substrate is moved along the arrow 603, the top and right holders 200 in FIG. 6 may be moved from the retracted position to the unretracted position along the arrow 603. And during the movement of the holder, the second part of the groove of the holder guides the substrate to the correct position, and the first part of the groove of the holder provides increased stability and reduces side deposition in the final position of the holder .

According to various embodiments, the carrier 100 may be used in a physical vapor deposition process, a chemical vapor deposition process, a structured edging of a substrate, heating (eg, annealing), or any type of substrate processing. Embodiments of the carrier as described herein and methods of using such carriers are particularly useful for stationary, ie discontinuous substrate processing. Generally, a carrier is a large-area glass substrate provided for processing a vertical direction.

FIG. 7 illustrates a flowchart of a method 80 for fixing a substrate 101 in a carrier 100 having a carrier body 160 according to an embodiment described herein. In block 81, the substrate 101 is loaded on the carrier 100. In block 82, at least one holder 200 is moved relative to the carrier body 160 toward the loaded substrate 101. At least one holder 200 includes a beveled portion 220, such as a beveled portion of the second portion of the groove 300 of the holder. In block 83, the substrate 101 is guided in a portion of a groove having a beveled portion (ie, an inclined surface of a second portion of the groove).

The front portion of the holder with a straight inner surface allows reducing lateral deposition of the holder. The inclined surface of the beveled portion of the groove (ie, the second portion of the groove) allows the substrate to be smoothly inserted into the holder. The smaller gap of the substrate in the first part of the groove allows reduced particle generation compared to the second part of the groove. In particular, a semi-V shape, ie a single-sided V shape, allows a combination of such advantages.

FIG. 8 illustrates a schematic diagram of a deposition chamber 600 according to the embodiments described herein. The deposition chamber 600 is suitable for a deposition process, such as a physical vapor deposition (PVD) or a chemical vapor deposition (CVD) process. The substrate 101 is shown in or on the carrier 100 on the substrate transfer device 620. A material source 630 for depositing a material is disposed in the chamber 612 and faces the side of the substrate 101 to be coated. The material source 630 provides a deposition material to be deposited on the substrate 101.

In FIG. 8, the material source 630 may be a target with a deposition material thereon or any other configuration that allows the material to be released for deposition on the substrate 101. Generally, the material source 630 may be a rotatable target, ie, a rotating target. According to some embodiments, the source of material 630 may be movable in order to locate and / or replace the source. According to other embodiments, the material source may be a planar target.

According to some embodiments, the deposition material may be selected according to a later application of the deposition process and the coated substrate. For example, the source deposition material may be a material selected from the group consisting of a metal such as aluminum, molybdenum, titanium, copper, etc., silicon, indium tin oxide, and other transparent conductive oxides. Generally, an oxide, nitride, or carbide layer of a material may be included, which may be deposited by supplying the material from a source or by reactive deposition, i.e., the material from the source and the material from oxygen, nitride, or Carbon from a process gas.

Generally, the substrate 101 is disposed in or on the carrier 100. The vehicle or vehicle assembly can also be used as or include a de-edge mask, especially for non-stationary deposition processes. The dashed line 665 exemplarily illustrates the path of the deposition material during operation of the deposition chamber 600. According to other embodiments that may be combined with other embodiments described herein, the mask may be provided by a separate de-edge mask, and a vehicle according to embodiments described herein may be advantageous for stationary processing and non-static processing.

According to an embodiment that can be combined with other embodiments described herein, in order to draw a drawing more easily, the holder 200 is provided without a beveled portion, that is, a semi-V shape, and thereby firmly holds the edge of the substrate 101, especially During deposition. Embodiments can provide increased substrate stability and therefore reduce substrate cracking, especially in view of the fact that the length and height of the substrate become larger. In addition, the generation of particles, especially near the substrate, can be reduced.

According to embodiments described herein that can be combined with other embodiments described herein, the substrate and carrier can be provided in a vertical direction (ie, a substantially vertical direction) during the deposition process. When referring to the substrate direction, substantially vertical is understood to allow deviation from the vertical direction by 20 ° or less, such as 10 ° or less. This deviation can be provided, for example, because substrate support with some deviation from the vertical direction may result in a more stable substrate position. Alternatively, a deviation in the opposite direction (substrate facing down) may cause a reduction in the number of particles on the substrate.

Although the foregoing is directed to the embodiments of the present disclosure, other and further embodiments of the present disclosure can be designed without departing from the basic scope of the present disclosure, and its scope is determined by the scope of subsequent patent applications.

21‧‧‧ rear clearance

23‧‧‧Front clearance

25‧‧‧ Arrow

26, 326‧‧‧Gap between glass masks

27‧‧‧ Gap between mask holders

30‧‧‧ groove

50‧‧‧ lateral deposition

70‧‧‧Mask

80‧‧‧method

Boxes 81, 82, 83‧‧‧‧

100‧‧‧ Vehicle

101‧‧‧ substrate

160‧‧‧ Vehicle body

162‧‧‧Guide

164‧‧‧ Upper guide

200‧‧‧ holding parts

201‧‧‧ Arrow

212‧‧‧ middle section

214‧‧‧Front

216‧‧‧ rear

220‧‧‧ bevel

250‧‧‧ lateral deposition

300‧‧‧ groove

330‧‧‧Rotary cathode

335‧‧‧arrow

412‧‧‧Part I

416‧‧‧ opening

417‧‧‧arrow

600‧‧‧ Deposition chamber

602‧‧‧Loading arm

603‧‧‧arrow

665‧‧‧line

FIG. 1 shows a schematic diagram of a carrier according to embodiments described herein and having at least one holder. FIG. 2 is a schematic diagram illustrating an improved retaining member according to the embodiment of the present disclosure. FIG. 3 illustrates a schematic view of a holder according to the embodiments described herein. 4A and 4B illustrate different views of another holder according to the embodiments described herein. 5A and 5B illustrate different views of another holder according to embodiments described herein. FIG. 6 illustrates a carrier with a holder and a schematic diagram of loading with a robot arm according to an embodiment described herein. FIG. 7 shows a flowchart of a method for fixing a substrate in a carrier having a carrier body according to an embodiment described herein. FIG. 8 illustrates a schematic view of a deposition chamber according to embodiments described herein.

Claims (20)

A holder (200) configured to be attached to a carrier body (160) of a carrier for holding a substrate (101), the holder (200) comprising: a front portion (214) arranged to face one A source of material or a mask; a rear portion (216) arranged to face away from the source of material, wherein the rear portion includes a beveled portion having an inclined surface; and a groove for receiving the front portion and the rear portion Substrate. The holder of claim 1, wherein the groove has a first portion having a first angle of 5 ° or less between the first opposing surfaces, and the groove has a second opposing surface A second portion having a second angle of 10 ° or more in between. The holder according to item 2 of the patent application scope, wherein the second angle is set between the inclined surface and the front portion of the inclined portion. The holder according to item 2 of the patent application scope, wherein the first angle is 0 °. The holder according to item 3 of the patent application scope, wherein the first angle is 0 °. The holder according to item 2 of the patent application scope, wherein the first opposing surface is an inner surface of the front portion and an inner surface of the rear portion, and the second opposing surface is an inner surface of the front portion and the inclined portion . The holder of claim 3, wherein the first opposing surface is an inner surface of the front portion and an inner surface of the rear portion, and the second opposing surface is an inner surface of the front portion and the inclined portion . The holder according to item 4 of the patent application scope, wherein the first opposing surface is an inner surface of the front portion and an inner surface of the rear portion, and the second opposing surface is an inner surface of the front portion and the inclined portion . The holder according to item 5 of the patent application scope, wherein the first opposing surface is an inner surface of the front portion and an inner surface of the rear portion, and the second opposing surface is an inner surface of the front portion and the inclined portion . The holder according to item 6 of the patent application scope, wherein the groove includes a semi-V-shaped portion and a parallel portion. The holder according to any one of claims 1 to 10, wherein the front part is a front part assembly having at least two front part segments with a gap between the two front part segments. The retaining member according to any one of claims 1 to 10 of the patent application scope further includes: an opening or a blind hole for mounting the retaining member on the carrier body. A vehicle (100) includes at least one retaining member (200) according to any one of claims 1 to 10 of the scope of patent application. The vehicle according to item 13 of the scope of patent application, further comprising a vehicle body (160), the vehicle body (160) including a first side, a second side, a third side, and a fourth side, wherein the at least one The holder (200) is at least eight holders, and at least two of the at least eight holders are installed on each of the first side, the second side, the third side, and the fourth side. Corresponding holder. The vehicle according to item 14 of the scope of patent application, wherein the at least one holder (200) is at least 24 holders, and is on the first side, the second side, the third side, and the fourth side At least two corresponding retaining members of the at least 24 retaining members are installed on each side of the. The vehicle according to item 14 of the scope of patent application, wherein the at least two corresponding holders of the at least eight holders are movably mounted on the first side, the second side, and the third And two adjacent positions on the fourth side. The vehicle according to item 15 of the scope of patent application, wherein the at least two corresponding holders of the at least 24 holders are movably mounted on the first side, the second side, and the third And two adjacent positions on the fourth side. A method (80) for fixing a substrate (101) in a carrier (100) having a carrier body (160), comprising: loading the substrate (101) onto the carrier (100); The carrier body (160) moves (82) at least one holder (200) toward the substrate (101), the at least one holder (200) includes a beveled portion (210), and a first guide groove using the beveled portion. Part of the substrate. The method according to item 18 of the scope of patent application, further comprising: supporting the substrate in a second portion of the groove, wherein the second portion has a gap of 0.5 mm or less to the substrate. The method as described in claim 19, wherein the second part has a gap of 0.2 mm or less to the substrate.