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TW201811709A - Reinforced glass production method and reinforced glass production apparatus - Google Patents

Reinforced glass production method and reinforced glass production apparatus Download PDF

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TW201811709A
TW201811709A TW106120785A TW106120785A TW201811709A TW 201811709 A TW201811709 A TW 201811709A TW 106120785 A TW106120785 A TW 106120785A TW 106120785 A TW106120785 A TW 106120785A TW 201811709 A TW201811709 A TW 201811709A
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glass
ion
film
molten salt
ions
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TW106120785A
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梶岡利之
深田睦
木下清貴
川本浩佑
田中敦
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日商日本電氣硝子股份有限公司
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    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C3/00Glass compositions
    • C03C3/04Glass compositions containing silica
    • C03C3/076Glass compositions containing silica with 40% to 90% silica, by weight
    • C03C3/083Glass compositions containing silica with 40% to 90% silica, by weight containing aluminium oxide or an iron compound
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/22Surface treatment of glass, not in the form of fibres or filaments, by coating with other inorganic material
    • C03C17/23Oxides
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C21/00Treatment of glass, not in the form of fibres or filaments, by diffusing ions or metals in the surface
    • GPHYSICS
    • G06COMPUTING OR CALCULATING; COUNTING
    • G06FELECTRIC DIGITAL DATA PROCESSING
    • G06F3/00Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
    • G06F3/01Input arrangements or combined input and output arrangements for interaction between user and computer
    • G06F3/03Arrangements for converting the position or the displacement of a member into a coded form
    • G06F3/041Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means

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  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Materials Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Organic Chemistry (AREA)
  • General Engineering & Computer Science (AREA)
  • Theoretical Computer Science (AREA)
  • Human Computer Interaction (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Surface Treatment Of Glass (AREA)
  • Glass Compositions (AREA)

Abstract

Provided is a reinforced glass production method that exchanges ions in a glass surface layer, the method comprising: a step for forming, on at least a part of the surface of glass, an ion permeation-inhibiting film that inhibits ion permeation; a first ion-exchange step for exchanging ions by bringing a first molten salt into contact with the surface of the glass on which the ion permeation-inhibiting film has been formed; and a second ion-exchange step for, after the first ion-exchange step, exchanging ions by bringing a second molten salt into contact with the surface of the glass on which the ion permeation-inhibiting film has been formed, the method being characterized in that [alpha] < [beta] is satisfied where [alpha] is the hydrogen ion concentration index for an aqueous solution that is prepared by mixing the first molten salt with water and has a concentration of 20 mass%, and [beta] is the hydrogen ion concentration index for an aqueous solution that is prepared by mixing the second molten salt with water and has a concentration of 20 mass%.

Description

強化玻璃之製造方法及強化玻璃製造裝置    Method for manufacturing strengthened glass and device for manufacturing strengthened glass   

本發明係關於強化玻璃之製造方法及強化玻璃製造裝置,更具體而言係關於藉由離子交換法來進行玻璃板的化學強化之強化玻璃之製造方法及強化玻璃的裝置。 The present invention relates to a method for manufacturing a strengthened glass and a device for manufacturing a strengthened glass, and more specifically to a method for manufacturing a strengthened glass and a device for strengthening a glass by chemically strengthening a glass plate by an ion exchange method.

以往,在智慧型手機或平板PC等的電子機器所搭載的觸控式面板顯示器中,作為覆蓋玻璃(cover glass)係使用經化學強化的強化玻璃板。 Conventionally, in a touch panel display mounted on an electronic device such as a smart phone or a tablet PC, a chemically strengthened tempered glass plate has been used as a cover glass.

如此般的強化玻璃板,一般而言係藉由利用強化液對包含鹼金屬作為組成的玻璃板進行化學性處理,在表面形成壓縮應力層而製造。如此般的強化玻璃板,因為在主面具有壓縮應力層,故對主面的衝撃耐性為提升。另一方面,在如此般的強化玻璃板的內部,形成與主面的壓縮應力層為對應的拉伸應力層,但若該拉伸應力變得過大時,將變得容易產生起因於此而使端面的裂隙進展所導致的破損(所謂自發破壞)。又,為了減小如此般的拉伸應力,而形成整體性較淺的玻璃板表面的壓縮應力層時,具有在端面無法得到充分的耐衝撃性之類的問題。 Such a strengthened glass plate is generally manufactured by chemically treating a glass plate containing an alkali metal as a composition with a strengthening liquid, and forming a compressive stress layer on the surface. Since such a strengthened glass plate has a compressive stress layer on the main surface, the impact resistance to the main surface is improved. On the other hand, in such a strengthened glass sheet, a tensile stress layer corresponding to the compressive stress layer on the main surface is formed. However, if the tensile stress becomes excessively large, it will easily occur due to this. Breakage (so-called spontaneous failure) caused by progression of cracks on the end face. Further, in order to reduce such a tensile stress, when forming a compressive stress layer on the surface of a glass plate having a relatively low integrity, there is a problem that sufficient impact resistance cannot be obtained at the end surface.

為了解決如上述般的問題,正開發著適當地設定強化玻璃板的主面與端面的壓縮應力之平衡,而將內部拉伸應力減低到適當的範圍之技術。例如在專利文獻1中揭示著,藉由在主面預先形成抑制離子交換的膜,使得化學強化的進展較端面為受到抑制,在端面形成相對於主面為較深的壓縮應力層,從而提升端面中的強度之技術。 In order to solve the problems as described above, a technology is being developed to appropriately set the balance between the compressive stress of the main surface and the end surface of the strengthened glass plate and reduce the internal tensile stress to an appropriate range. For example, Patent Document 1 discloses that by forming a membrane that inhibits ion exchange in advance on the main surface, the progress of chemical strengthening is suppressed compared to the end surface, and a deep compressive stress layer is formed on the end surface relative to the main surface, thereby improving Technology of strength in the face.

[先前技術文獻]     [Prior technical literature]     [專利文獻]     [Patent Literature]    

[專利文獻1]日本特開2014-208570號公報 [Patent Document 1] Japanese Patent Laid-Open No. 2014-208570

強化玻璃的離子交換時所使用的熔融鹽,由於被重複使用而使液體性質緩慢地變化。因此,如引用文獻1之技術般,若形成抑制離子交換的膜時,由於離子交換時所使用的強化液的液體性質,使得在形成抑制離子交換的膜的部位中化學強化會被過度抑制,而在該部位中將有無法得到充分的壓縮應力層之情形。 The molten salt used for ion exchange of strengthened glass changes its liquid properties slowly due to repeated use. Therefore, as in the technique cited in Document 1, if a membrane that inhibits ion exchange is formed, the chemical strengthening of the site where the membrane that inhibits ion exchange is formed is excessively suppressed due to the liquid nature of the strengthening liquid used in the ion exchange. On the other hand, there may be cases where a sufficient compressive stress layer cannot be obtained.

另一方面,由於離子交換時所使用的強化液的液體性質,使得抑制離子交換的膜會被提早侵蝕,將有無法得到抑制離子交換之效果之情形。 On the other hand, due to the liquid nature of the strengthening liquid used in ion exchange, the membrane that inhibits ion exchange will be eroded early, and the effect of inhibiting ion exchange may not be obtained.

即,對於穩定地生產具有高強度的強化玻璃之方法仍有改良之餘地。 That is, there is still room for improvement in a method for stably producing tempered glass having high strength.

本發明係考量如此般的情事而完成之發明,本發明之課題在於提供一種可穩定地製造具有高強度的強化玻璃板之強化玻璃之製造方法及強化玻璃製造裝置。 The present invention is an invention completed in consideration of such circumstances, and an object of the present invention is to provide a method and a device for manufacturing a strengthened glass that can stably manufacture a strengthened glass plate having a high strength.

本發明之強化玻璃之製造方法,其係將玻璃表層的離子進行交換的強化玻璃之製造方法,其特徵為,具備下述步驟:將可抑制離子之穿透的離子穿透抑制膜成膜於玻璃之表面之至少一部分之步驟;將第一熔融鹽接觸於成膜有離子穿透抑制膜的玻璃之表面來交換離子之第一離子交換步驟;與在第一離子交換步驟後,將第二熔融鹽接觸於成膜有離子穿透抑制膜的玻璃之表面來交換離子之第二離子交換步驟,將第一熔融鹽與水混合並製成濃度20質量%的水溶液時的氫離子濃度指數設為α,將第二熔融鹽與水混合並製成濃度20質量%的水溶液時的氫離子濃度指數設為β,此時α<β。 The manufacturing method of the strengthened glass of the present invention is a method of manufacturing strengthened glass that exchanges ions on the surface of the glass, and is characterized by comprising the following steps: forming an ion penetration inhibiting film that can inhibit the penetration of ions into a film; A step of at least a part of a surface of glass; a first ion-exchange step of contacting a first molten salt with a surface of a glass formed with an ion penetration inhibiting film to exchange ions; and after the first ion-exchange step, The second ion-exchange step in which a molten salt contacts the surface of the glass on which the ion penetration suppression film is formed to exchange ions, the hydrogen ion concentration index when the first molten salt is mixed with water to make an aqueous solution having a concentration of 20% by mass is set to α, the hydrogen ion concentration index when the second molten salt was mixed with water to make an aqueous solution having a concentration of 20% by mass was set to β, and at this time α <β.

本發明之強化玻璃之製造方法中,較佳為α≦10.5。 In the method for producing a strengthened glass of the present invention, α ≦ 10.5 is preferred.

本發明之強化玻璃之製造方法中,較佳為9≦β≦12。 In the method for manufacturing a strengthened glass of the present invention, it is preferably 9 ≦ β ≦ 12.

本發明之強化玻璃之製造方法中,較佳為:將玻璃在第一離子交換步驟浸漬於350~500℃的第一熔融鹽中0.1~150小時後,在第二離子交換步驟浸漬於350~500℃的第二熔融鹽中0.1~72小時,第一離子交換步驟中 的浸漬時間長於第二離子交換步驟中的浸漬時間。 In the method for manufacturing a strengthened glass of the present invention, it is preferable that the glass is immersed in the first molten salt at 350 to 500 ° C for 0.1 to 150 hours in the first ion exchange step, and then immersed in 350 to 500 in the second ion exchange step. In the second molten salt at 500 ° C. for 0.1 to 72 hours, the immersion time in the first ion exchange step is longer than the immersion time in the second ion exchange step.

本發明之強化玻璃之製造方法中,較佳為:玻璃表層的離子為鈉離子,第一熔融鹽及第二熔融鹽皆包含鉀離子,離子穿透抑制膜僅成膜於玻璃之主面,離子穿透抑制膜係具有以質量%計含有70%以上的SiO2之組成,離子穿透抑制膜之膜厚為10~1000nm。 In the method of manufacturing the strengthened glass of the present invention, it is preferable that the ions on the surface of the glass are sodium ions, the first molten salt and the second molten salt both contain potassium ions, and the ion penetration suppression film is formed only on the main surface of the glass. The ion penetration suppression film has a composition containing 70% or more of SiO 2 in terms of mass%, and the film thickness of the ion penetration suppression film is 10 to 1000 nm.

本發明之強化玻璃之製造方法中,較佳為進而具備下述步驟:在第二離子交換步驟後將離子穿透抑制膜除去之步驟。 In the method for producing a strengthened glass of the present invention, it is preferable to further include the step of removing the ion penetration suppression film after the second ion exchange step.

本發明之強化玻璃之製造方法中,較佳為:玻璃係玻璃板,該玻璃板中作為玻璃組成以質量%計含有SiO2 45~75%、Al2O3 1~30%、Na2O 0~20%、K2O 0~20%。 In the method for manufacturing the strengthened glass of the present invention, it is preferred that the glass-based glass plate contains SiO 2 45 to 75%, Al 2 O 3 1 to 30%, and Na 2 O as a glass composition. 0 ~ 20%, K 2 O 0 ~ 20%.

本發明之強化玻璃製造裝置,其特徵為具備:將用於交換玻璃表層的離子的第一熔融鹽收納之第一鹽浴槽;與將用於交換玻璃表層的離子的第二熔融鹽收納之第二鹽浴槽,將第一熔融鹽與水混合並製成濃度20質量%的水溶液時的氫離子濃度指數設為α,將第二熔融鹽與水混合並製成濃度20質量%的水溶液時的氫離子濃度指數設為β,此時α<β。 The tempered glass manufacturing apparatus of the present invention includes a first salt bath for storing a first molten salt for exchanging ions of a glass surface layer, and a first salt bath for receiving a second molten salt for exchanging ions of a glass surface layer. A two-salt bath, the hydrogen ion concentration index when mixing the first molten salt with water to make an aqueous solution with a concentration of 20% by mass is α, and the hydrogen ion when mixing the second molten salt with water to make an aqueous solution with a concentration of 20% by mass The concentration index is set to β, where α <β.

依據本發明,因藉由使用液體性質不同的多種熔融鹽來進行多次的離子交換,即使是已成膜的部位亦 可充分地進行離子交換,從而可得到高的壓縮應力。又,藉由適當地調整在各步驟中使用的熔融鹽的液體性質,來防止離子穿透抑制膜之急劇的侵蝕,從而可適當地抑制離子交換。因此,將可穩定地製造具有高強度的強化玻璃板。 According to the present invention, since a plurality of types of molten salts having different liquid properties are used for ion exchange a plurality of times, ion exchange can be sufficiently performed even in a portion where a film has been formed, and a high compressive stress can be obtained. In addition, by appropriately adjusting the liquid properties of the molten salt used in each step, the rapid erosion of the ion penetration suppression membrane can be prevented, and ion exchange can be appropriately suppressed. Therefore, it is possible to stably manufacture a strengthened glass plate having high strength.

G1‧‧‧原玻璃 G1‧‧‧Original glass

G2‧‧‧附有膜之玻璃 G2‧‧‧ Glass with film

G3、G4‧‧‧附有膜之強化玻璃 G3, G4 ‧‧‧ Tempered Glass with Film

G5‧‧‧強化玻璃 G5‧‧‧Tempered glass

M‧‧‧離子穿透抑制膜 M‧‧‧Ion penetration suppression membrane

T1‧‧‧第一熔融鹽 T1‧‧‧The first molten salt

T2‧‧‧第二熔融鹽 T2‧‧‧Second Molten Salt

X1‧‧‧第一鹽浴槽 X1‧‧‧The first salt bath

X2‧‧‧第二鹽浴槽 X2‧‧‧Second Salt Bath

[圖1A]表示本發明之強化玻璃之製造方法之一例中所包含之步驟的圖。 [Fig. 1A] A diagram showing steps included in an example of a method for producing a strengthened glass of the present invention.

[圖1B]表示本發明之強化玻璃之製造方法之一例中所包含之步驟的圖。 [Fig. 1B] A diagram showing steps included in an example of a method for producing a strengthened glass of the present invention.

[圖1C]表示本發明之強化玻璃之製造方法之一例中所包含之步驟的圖。 [FIG. 1C] A diagram showing steps included in an example of a method for producing a strengthened glass of the present invention.

[圖1D]表示本發明之強化玻璃之製造方法之一例中所包含之步驟的圖。 [Fig. 1D] A diagram showing steps included in an example of a method for producing a strengthened glass of the present invention.

[圖1E]表示本發明之強化玻璃之製造方法之一例中所包含之步驟的圖。 [Fig. 1E] A diagram showing steps included in an example of a method for producing a strengthened glass of the present invention.

[實施發明之最佳形態]     [Best Mode for Implementing Invention]    

以下,對於本發明之實施形態之強化玻璃之製造方法來進行說明。圖1係表示本發明之強化玻璃之製造方法之一例的圖。 Hereinafter, the manufacturing method of the tempered glass which concerns on embodiment of this invention is demonstrated. FIG. 1 is a diagram showing an example of a method for producing a strengthened glass of the present invention.

首先,實施圖1A所表示的準備步驟之處理。準備步驟係準備原玻璃G1之步驟。原玻璃G1係使用離子交換法而成為可強化的板狀的玻璃。 First, the processing of the preparation steps shown in FIG. 1A is performed. The preparation step is a step of preparing the original glass G1. The original glass G1 is a sheet-shaped glass that can be strengthened using an ion exchange method.

原玻璃G1係作為玻璃組成以質量%計含有SiO2 45~75%、Al2O3 1~30%、Na2O 0~20%、K2O 0~20%為較佳。若如上述般規定玻璃組成範圍時,將易以高水準來兼具離子交換性能與耐失透性。 The original glass G1 is preferably a glass composition containing 45 to 75% of SiO 2 , Al 2 O 3 1 to 30%, Na 2 O 0 to 20%, and K 2 O 0 to 20%. When the glass composition range is specified as described above, it is easy to achieve both ion exchange performance and devitrification resistance at a high level.

原玻璃G1的板厚係例如為1.5mm以下,較佳為1.3mm以下、1.1mm以下、1.0mm以下、0.8mm以下、0.7mm以下、0.6mm以下、0.5mm以下、0.4mm以下、0.3mm以下、0.2mm以下,特別是0.1mm以下。強化玻璃基板的板厚越小,則可使強化玻璃基板輕量化,作為結果可實現裝置的薄型化、輕量化。尚,若考量生產性等時,原玻璃G1的板厚係以0.01mm以上為較佳。 The thickness of the original glass G1 is, for example, 1.5 mm or less, preferably 1.3 mm or less, 1.1 mm or less, 1.0 mm or less, 0.8 mm or less, 0.7 mm or less, 0.6 mm or less, 0.5 mm or less, 0.4 mm or less, and 0.3 mm or less. It is less than or equal to 0.2 mm, particularly less than or equal to 0.1 mm. The smaller the thickness of the strengthened glass substrate, the lighter the strengthened glass substrate can be. As a result, the device can be made thinner and lighter. In consideration of productivity and the like, the thickness of the original glass G1 is preferably 0.01 mm or more.

原玻璃G1的主面的尺寸係例如為480×320mm~3350×3950mm。於此,所謂主面係意味與板厚方向為相對的表面。 The dimensions of the main surface of the original glass G1 are, for example, 480 × 320 mm to 3350 × 3950 mm. Here, the term "main surface" means a surface opposed to the thickness direction of the plate.

原玻璃G1係以使用溢流下引法來成形,其主面S未被研磨者為較佳。只要是如此般所成形的原玻璃G1即可得到低成本且具有高的表面品質之強化玻璃板。尚,原玻璃G1之成形方法或加工狀態係亦可任意地選擇。例如原玻璃G1係可使用浮法來成形,且主面S及端面E亦可以是被研磨加工者。 The original glass G1 is formed by using an overflow down-draw method, and its main surface S is preferably not ground. As long as the original glass G1 formed in this manner, a strengthened glass plate having low cost and high surface quality can be obtained. The forming method or processing state of the original glass G1 can also be arbitrarily selected. For example, the original glass G1 can be formed by a float method, and the main surface S and the end surface E can also be ground.

接下來,在上述準備步驟後,實施圖1B所表 示的成膜步驟之處理。成膜步驟係使離子穿透抑制膜M形成於原玻璃G1之表面之至少一部分,並得到附有膜之玻璃G2之步驟。在後述之強化步驟中,離子穿透抑制膜M係於進行原玻璃G1表層的離子交換時抑制離子之穿透之膜層。本實施形態中,附有膜之玻璃G2係僅在正主面和背主面的S形成離子穿透抑制膜M,端面E呈現露出之狀態。 Next, after the above-mentioned preparation step, the processing of the film formation step shown in FIG. 1B is performed. The film forming step is a step of forming the ion penetration suppression film M on at least a part of the surface of the original glass G1 and obtaining the film-attached glass G2. In the strengthening step described later, the ion penetration suppressing film M is a film layer that suppresses the penetration of ions when performing ion exchange on the surface layer of the original glass G1. In this embodiment, the glass G2 with the film is formed with the ion penetration suppression film M only on the front main surface and the back main surface S, and the end surface E is exposed.

作為離子穿透抑制膜M的材質,只要可抑制進行離子交換之離子之穿透即可,可使用任意的材質。若被交換的離子為鹼金屬離子時,離子穿透抑制膜M係以例如金屬氧化物、金屬氮化物、金屬碳化物、金屬氮氧化物、金屬碳氮化物、金屬碳氮化物等的膜為較佳。更詳細而言,作為離子穿透抑制膜M的材質係可包含由例如SiO2、Al2O3、SiN、SiC、Al2O3、AlN、ZrO2、TiO2、Ta2O5、Nb2O5、HfO2、SnO2之中的1種類以上來製成膜。 As a material of the ion penetration suppression film M, any material can be used as long as it can suppress the penetration of ions undergoing ion exchange. When the ions to be exchanged are alkali metal ions, the ion penetration suppressing film M is made of, for example, a film of a metal oxide, a metal nitride, a metal carbide, a metal oxynitride, a metal carbonitride, or a metal carbonitride. Better. More specifically, the material system of the ion penetration suppression film M may include, for example, SiO 2 , Al 2 O 3 , SiN, SiC, Al 2 O 3 , AlN, ZrO 2 , TiO 2 , Ta 2 O 5 , Nb. One or more types of 2 O 5 , HfO 2 , and SnO 2 are used to form a film.

特別是將SiO2作為離子穿透抑制膜M的主成分時,由於便宜且可容易地形成離子穿透抑制膜M、且也能夠作為抗反射膜來發揮功能,故為較佳。離子穿透抑制膜M係可以是僅由SiO2所成之膜。具體而言,離子穿透抑制膜M係可以是具有以質量%計含有99%以上的SiO2之組成。 In particular, when SiO 2 is used as the main component of the ion penetration suppression film M, it is preferable because the ion penetration suppression film M can be formed inexpensively and easily, and can also function as an antireflection film. The ion penetration suppression film M may be a film made of only SiO 2 . Specifically, the ion penetration suppression film M may have a composition containing 99% or more of SiO 2 by mass%.

離子穿透抑制膜M的厚度較佳為5~300nm,又較佳為20~200nm,更佳為20~150nm、40~120nm,最佳為80~100nm。藉由將離子穿透抑制膜M的厚度設為上述範圍,從而未有離子穿透、或離子過於遮斷之情形,故 可適合地來進行離子交換。 The thickness of the ion penetration suppression film M is preferably 5 to 300 nm, more preferably 20 to 200 nm, more preferably 20 to 150 nm, 40 to 120 nm, and most preferably 80 to 100 nm. By setting the thickness of the ion penetration suppression film M to the above-mentioned range, there is no case where the ion penetrates or the ions are blocked too much, so that ion exchange can be suitably performed.

離子穿透抑制膜M之成膜方法係可使用濺鍍法或真空蒸鍍法等的PVD法(物理氣相沈積法)、熱CVD法或等離子CVD法等的CVD法(化學氣相沈積法)、浸漬塗佈法或隙缝塗怖法等的濕式塗怖法。特別是以濺鍍法、浸漬塗佈法為較佳。若使用濺鍍法時,可容易均勻地形成離子穿透抑制膜M。離子穿透抑制膜M的成膜部位係可以任意的方法來做設定。例如在非成膜部位(本實施形態中為端面E)可以在預先施予遮罩的狀態下來進行成膜等。 The film formation method of the ion penetration suppression film M is a CVD method (chemical vapor deposition method) such as a PVD method (physical vapor deposition method) such as a sputtering method or a vacuum evaporation method, a thermal CVD method, or a plasma CVD method. ), A wet coating method such as a dip coating method or a slit coating method. In particular, a sputtering method and a dip coating method are preferred. When the sputtering method is used, the ion penetration suppression film M can be easily and uniformly formed. The film formation site of the ion penetration suppression film M can be set by any method. For example, film formation can be performed on a non-film-forming portion (the end face E in the present embodiment) in a state where a mask is applied in advance.

接下來,在上述成膜步驟後,實施圖1C所表示的第一離子交換步驟之處理。第一離子交換步驟係將附有膜之玻璃G2藉由離子交換法來進行化學強化,從而可得到附有膜之強化玻璃G3之步驟。具體而言,將附有膜之玻璃G2浸漬於包含鹼金屬離子的熔融鹽T1中來進行離子交換。本實施形態中之熔融鹽T1係例如硝酸鉀熔融鹽。 Next, after the above-mentioned film forming step, the processing of the first ion exchange step shown in FIG. 1C is performed. The first ion exchange step is a step of chemically strengthening the glass G2 with a membrane by an ion exchange method, so that a glass G3 with a membrane can be obtained. Specifically, the membrane-attached glass G2 is immersed in a molten salt T1 containing an alkali metal ion to perform ion exchange. The molten salt T1 in this embodiment is, for example, a potassium nitrate molten salt.

熔融鹽T1係將該熔融鹽T1與水混合並製成該熔融鹽的濃度為20質量%的水溶液時,該水溶液的氫離子濃度指數設為α時,以成為α≦10.5的鹽為較佳。尚,本發明中氫離子濃度指數係水溶液的溫度以在25℃的狀態下所測定之值。藉由如上述般地來調整α,從而抑制了離子穿透抑制膜M的損耗,可抑制在離子穿透抑制膜M已成膜的部位中之附有膜之玻璃G2的離子交換。又,與該膜已成膜的部位相比,在附有膜之玻璃G2的離子穿透抑制膜M未成膜的部位中,可從玻璃表面至內部更深入的區域來進行離 子交換。 When the molten salt T1 is mixed with water to form an aqueous solution having a concentration of 20% by mass of the molten salt, and when the hydrogen ion concentration index of the aqueous solution is α, a salt having α ≦ 10.5 is preferred. The hydrogen ion concentration index in the present invention is a value measured in a state of 25 ° C. By adjusting α as described above, the loss of the ion penetration suppression film M is suppressed, and the ion exchange of the glass G2 with the film in the portion where the ion penetration suppression film M has been formed can be suppressed. In addition, compared with the portion where the film has been formed, ion exchange can be performed from the glass surface to a deeper region in the portion where the ion penetration suppression film M of the glass G2 with the film has not been formed.

上述α係較佳為5~10,又較佳為5.5~9.5,更佳為6~9。α係例如將熔融鹽一旦冷卻固化、粉碎、並計量後,可藉由製成上述水溶液來進行測定。 The aforementioned α system is preferably 5 to 10, more preferably 5.5 to 9.5, and even more preferably 6 to 9. The α system can be measured by, for example, once the molten salt is cooled, solidified, pulverized, and measured, and then the aqueous solution can be prepared.

第一離子交換步驟中之熔融鹽T1的溫度係可任意地設定,例如為350~500℃,較佳為370~480℃,又較佳為380~450℃,更佳為380~400℃。特別是若熔融鹽T1的溫度為400℃以下時,將變得易於控制起因於溫度的α值的變動。又,將附有膜之玻璃G2浸漬於熔融鹽T1中的時間係可任意地設定,例如為0.1~150小時,較佳為0.3~100小時,又較佳為0.5~50小時。 The temperature of the molten salt T1 in the first ion exchange step can be arbitrarily set, for example, 350 to 500 ° C, preferably 370 to 480 ° C, still more preferably 380 to 450 ° C, and more preferably 380 to 400 ° C. In particular, when the temperature of the molten salt T1 is 400 ° C. or lower, it becomes easy to control the fluctuation of the α value due to the temperature. The time for immersing the glass G2 with the film in the molten salt T1 can be arbitrarily set, and is, for example, 0.1 to 150 hours, preferably 0.3 to 100 hours, and more preferably 0.5 to 50 hours.

上述第一離子交換步驟中,附有膜之玻璃G2的表面的鈉離子與熔融鹽T1中的鉀離子交換,可得到在表面具有壓縮應力層C的附有膜之強化玻璃G3。於此,附有膜之玻璃G2的表面之中,與原玻璃G1的表面露出的露出部E相比,設有離子穿透抑制膜M的部位(主面S)由於離子交換被抑制,故壓縮應力層的深度將變小。換言之,與設有離子穿透抑制膜M的部位相比,露出部E係離子交換容易發展,故壓縮應力層的深度將變大。如此般地與主面相比,附有膜之強化玻璃G3由於端面的壓縮應力層的深度變大,故與整面被強化的強化玻璃相比,內部的拉伸應力小且在端部中具有高的耐衝撃性。因此,可適宜地抑制從端部開始的裂隙的進展所導致的破損。 In the above-mentioned first ion exchange step, sodium ions on the surface of the glass G2 with the film are exchanged with potassium ions in the molten salt T1 to obtain a glass-reinforced glass G3 having a compressive stress layer C on the surface. Here, among the surfaces of the glass G2 with the film, compared with the exposed portion E exposed from the surface of the original glass G1, the portion (the main surface S) where the ion penetration suppression film M is provided is suppressed because of ion exchange. The depth of the compressive stress layer will become smaller. In other words, since the ion exchange in the exposed portion E is easier than that in the portion provided with the ion penetration suppressing film M, the depth of the compressive stress layer becomes larger. In this way, compared to the main surface, the strengthened glass G3 with a film has a larger depth of the compressive stress layer on the end surface. Therefore, compared with the strengthened glass that is strengthened on the entire surface, the internal tensile stress is smaller and it has High impact resistance. Therefore, it is possible to suitably suppress breakage due to the progress of cracks from the ends.

然而,僅只上述第一離子交換步驟之處理 時,因為離子穿透抑制膜M,反而在離子交換被抑制的部位中有無法得到充分的壓縮應力之情形。因此,接下來,上述在第一離子交換步驟後,實施以下所說明的第二離子交換步驟之處理,使在離子穿透抑制膜M的成膜部位中之壓縮應力增加。 However, when only the above-mentioned first ion exchange step is performed, because the ion penetration suppressing membrane M is used, a sufficient compressive stress may not be obtained in the portion where the ion exchange is suppressed. Therefore, next, after the above-mentioned first ion-exchange step, the processing of the second ion-exchange step described below is performed, so that the compressive stress in the film-forming portion of the ion penetration suppression film M is increased.

第二離子交換步驟係如圖1D所表示般,將附有膜之玻璃G2藉由離子交換法來再次進行化學強化之步驟。具體而言,將附有膜之強化玻璃G3浸漬於包含鹼金屬離子的熔融鹽T2中來進行離子交換,從而可得到附有膜之強化玻璃G4。本實施形態中之熔融鹽T2係例如硝酸鉀熔融鹽。 As shown in FIG. 1D, the second ion exchange step is a step of chemically strengthening the glass G2 with the membrane by an ion exchange method. Specifically, the reinforced glass G3 with a film is immersed in a molten salt T2 containing an alkali metal ion to perform ion exchange, so that the reinforced glass G4 with a film can be obtained. The molten salt T2 in this embodiment is, for example, a potassium nitrate molten salt.

熔融鹽T2係將該熔融鹽T2與水混合並製成該熔融鹽的濃度為20質量%的水溶液時,該水溶液的氫離子濃度指數設為β時,成為α<β的鹽。藉由將β的值設為如此般的範圍,可在成膜部位中適度地進行離子交換,故將能使在成膜部位中之壓縮應力增加。 Molten salt T2 is a salt of α <β when the molten salt T2 is mixed with water to prepare an aqueous solution having a concentration of 20% by mass of the molten salt. When the hydrogen ion concentration index of the aqueous solution is β. By setting the value of β to such a range, since ion exchange can be performed moderately in the film formation site, the compressive stress in the film formation site can be increased.

尚,上述β係以9~12為較佳,又較佳為9.5~11.5,更佳為10~11。β的值係可與上述α以相同之方法來進行測定。若β的值為上述範圍內時,可抑制在第二離子交換步驟中玻璃表面的白濁等的不佳的變質。 However, the above-mentioned β series is preferably 9-12, more preferably 9.5-11.5, and even more preferably 10-11. The value of β can be measured in the same manner as the aforementioned α. When the value of β is within the above range, it is possible to suppress undesirable deterioration such as white turbidity on the glass surface in the second ion exchange step.

第二離子交換步驟中之熔融鹽T2的溫度係可任意地設定,例如為350~500℃,較佳為370~480℃,又較佳為380~450℃。若熔融鹽T2的溫度為450℃以下時,將變得易於控制起因於溫度的α值的變動。又,將附有膜 之強化玻璃G3浸漬於熔融鹽T2中的時間係可任意地設定,例如為0.1~72小時,較佳為0.3~50小時,又較佳為0.5~24小時。 The temperature of the molten salt T2 in the second ion exchange step can be arbitrarily set, for example, 350 to 500 ° C, preferably 370 to 480 ° C, and more preferably 380 to 450 ° C. When the temperature of the molten salt T2 is 450 ° C. or lower, it becomes easy to control the fluctuation of the α value due to the temperature. The time for immersing the reinforced glass G3 with a film in the molten salt T2 can be arbitrarily set, and is, for example, 0.1 to 72 hours, preferably 0.3 to 50 hours, and more preferably 0.5 to 24 hours.

上述第二離子交換步驟中,因為β值被設定高於α,故與第一離子交換步驟相比,在離子穿透抑制膜M的成膜部位中之離子交換將變得容易進行。因此,與處理前的附有膜之強化玻璃G3相比,經第二離子交換步驟之處理的附有膜之強化玻璃G4,在離子穿透抑制膜M的成膜部位中之壓縮應力將變大。又,與附有膜之強化玻璃G3相比,附有膜之強化玻璃G4在離子穿透抑制膜M的成膜部位中之壓縮應力層將變深。 In the above-mentioned second ion exchange step, since the β value is set higher than α, the ion exchange in the film formation site of the ion penetration suppression membrane M becomes easier than in the first ion exchange step. Therefore, compared with the strengthened glass G3 with a film before the treatment, the compressive stress in the film-forming site of the ion penetration suppression film M will be changed in the strengthened glass G4 with a film that has undergone the second ion exchange step. Big. Moreover, compared with the strengthened glass G3 with a film, the compressive stress layer of the strengthened glass G4 with a film in the film formation part of the ion penetration suppression film M becomes deeper.

本發明較佳為:在第一離子交換步驟及第二離子交換步驟各自的前步驟或後步驟中,來實施將α及β調整成上述範圍之調整步驟。調整步驟中係可藉由例如在熔融鹽T1或者T2中加入添加物來調整α及β。添加物係例如為鹼性物質。本發明中之鹼性物質係在與水混合時,氫離子指數(pH)成為大於7的物質。作為添加物,可使用例如KOH、NaOH等之單質或者組合。 In the present invention, it is preferable that the adjusting step of adjusting α and β to the above-mentioned range is performed in a previous step or a subsequent step of each of the first ion exchange step and the second ion exchange step. In the adjustment step, α and β can be adjusted by, for example, adding an additive to the molten salt T1 or T2. The additive system is, for example, an alkaline substance. The alkaline substance in the present invention is a substance having a hydrogen ion index (pH) of more than 7 when mixed with water. As the additive, a simple substance or a combination of, for example, KOH and NaOH can be used.

離子穿透抑制膜M亦可作為電子裝置的保護塗層或抗反射膜來發揮功能時,附有膜之強化玻璃G4係可直接作為製品來搭載於電子零件等來使用,但亦可因應用途來除去離子穿透抑制膜M。即,在第二離子交換步驟後,可實施從附有膜之強化玻璃G4來除去離子穿透抑制膜M之除去步驟。 When the ion transmission suppression film M can also function as a protective coating or an anti-reflection film for electronic devices, the reinforced glass G4 series with a film can be directly used as a product and mounted on electronic parts, but it can also be used according to the application. To remove the ion penetration inhibiting film M. That is, after the second ion exchange step, a removal step of removing the ion penetration suppression film M from the strengthened glass G4 with a film may be performed.

除去步驟中,如圖1E所表示般地從附有膜之強化玻璃G4來除去離子穿透抑制膜M,從而可得到強化玻璃G5。 In the removing step, as shown in FIG. 1E, the ion penetration suppression film M is removed from the strengthened glass G4 with a film, so that a strengthened glass G5 can be obtained.

具體而言,使附有膜之強化玻璃G4附著於蝕刻液來除去離子穿透抑制膜M。若離子穿透抑制膜M為含有SiO2的膜時,可使用例如包含氟、TMAH、EDP、KOH、NAOH等的溶液來作為蝕刻液,特別是以使用氟酸溶液來作為蝕刻液為較佳。尚,離子穿透抑制膜M之剝離方法並不限於上述,可使用周知的方法來作為將被設在玻璃板的膜除去之方法,可藉由例如研磨等的機械加工來除去離子穿透抑制膜M。 Specifically, the strengthened glass G4 with a film is attached to an etching solution to remove the ion penetration suppressing film M. When the ion penetration suppression film M is a film containing SiO 2 , for example, a solution containing fluorine, TMAH, EDP, KOH, NAOH, or the like can be used as an etching solution, and a hydrofluoric acid solution is preferably used as the etching solution. . The method for removing the ion penetration suppression film M is not limited to the above, and a known method can be used as a method for removing the film provided on the glass plate, and the ion penetration suppression can be removed by mechanical processing such as polishing. Film M.

剝離步驟中,可僅只除去一方主面側的離子穿透抑制膜M,亦可除去兩方主面的離子穿透抑制膜M。又,在各主面中亦可部分地除去離子穿透抑制膜M,亦可以將離子穿透抑制膜M全部除去。 In the peeling step, only the ion penetration suppression film M on one main surface side may be removed, or the ion penetration suppression film M on both main surfaces may be removed. In addition, the ion penetration suppression film M may be partially removed on each main surface, and the ion penetration suppression film M may be entirely removed.

若將離子穿透抑制膜M以單面側或部分地除去時,可使用噴霧或輥、刷毛等來使蝕刻液部分地附著、或對附有膜之強化玻璃G4施予部分地遮蔽並使其浸漬於蝕刻液中,從而除去該膜。 When the ion penetration suppression film M is removed on one side or partly, a spray, roller, bristles, or the like can be used to partially attach the etching solution, or to partially shield the reinforced glass G4 with the film and make It is immersed in an etching solution, thereby removing the film.

若將離子穿透抑制膜M以全部除去時,將附有膜之強化玻璃G4整體浸漬於蝕刻液中為宜。如此般地若將附有膜之強化玻璃G4整體浸漬於蝕刻液中時,則將會得到使成為破損的原因的微裂隙減少,並進而提升強度的強化玻璃G5。 When the ion penetration suppressing film M is removed in its entirety, it is preferable that the entire tempered glass G4 with the film is immersed in an etching solution. When the whole reinforced glass G4 with a film is immersed in the etchant as described above, a strengthened glass G5 that reduces the micro-cracks that cause breakage and further increases the strength is obtained.

如以上所說明般,依據本發明之實施形態相關的強化玻璃之製造方法,可穩定且效率良好地製造來自端面的破損少的附有膜之強化玻璃G4、強化玻璃G5。 As described above, according to the method for manufacturing a strengthened glass according to an embodiment of the present invention, it is possible to stably and efficiently manufacture a strengthened glass G4 and a strengthened glass G5 with a film having less damage from an end surface.

尚,上述之離子穿透抑制膜M的材質係為一例,只要可在第一離子交換步驟中能抑制被交換的離子之穿透的膜即可,可使用任意的材質。 The material of the ion penetration suppression film M described above is an example, and any material may be used as long as it can suppress the penetration of the exchanged ions in the first ion exchange step.

又,附有膜之玻璃G2中之離子穿透抑制膜M的成膜部位係可任意地設定。例如原玻璃G1為預先被倒角加工時,可在除了做倒角面的主面來形成離子穿透抑制膜M。 In addition, the film formation site of the ion penetration suppression film M in the glass G2 with a film can be arbitrarily set. For example, when the original glass G1 is chamfered in advance, an ion penetration suppression film M may be formed on a main surface other than the chamfered surface.

又,在上述所表示的任意的步驟之前後,亦可設置實施切斷加工、端面加工、及開孔加工之任何的加工之加工步驟。又,在上述所表示的任意的步驟之前後,可對玻璃板適當進行洗淨及乾燥處理。 In addition, before or after any of the steps shown above, a processing step for performing any of cutting processing, end surface processing, and hole processing may be provided. In addition, before and after any of the steps shown above, the glass plate may be appropriately washed and dried.

又,上述實施形態中,以將硝酸鉀熔融鹽作為熔融鹽T1、T2之情形來進行說明,但並非被限於此,可替代玻璃的離子交換時所使用的周知的熔融鹽、或者組合來使用。例如熔融鹽T1、T2係亦可為硝酸鉀熔融鹽與硝酸鈉熔融鹽的混合鹽。 Moreover, in the said embodiment, although the case where the potassium nitrate molten salt was used as the molten salt T1, T2 is demonstrated, it is not limited to this, It can replace the well-known molten salt used for ion exchange of glass, or it can use it in combination . For example, the molten salts T1 and T2 may be a mixed salt of a potassium nitrate molten salt and a sodium nitrate molten salt.

又,上述實施形態中,雖示例著交換鈉離子與鉀離子來進行化學強化之情形,但亦可藉由任意的離子的交換來進行化學強化。例如亦可交換鋰離子與鈉離子、或交換鋰離子與鉀離子後再進行化學強化。此情形時,原玻璃G1係作為玻璃組成以質量%計含有LiO2 0.5~7.5%為 較佳,例如含有3.0%或者4.5%。 Moreover, in the said embodiment, although the case of performing chemical strengthening by exchanging sodium ion and potassium ion was illustrated, you may perform chemical strengthening by arbitrary ion exchange. For example, lithium ion and sodium ion may be exchanged, or lithium ion and potassium ion may be exchanged for chemical strengthening. In this case, the glass G1 is preferably a glass composition containing 0.5 to 7.5% of LiO 2 in terms of mass%, for example, 3.0% or 4.5%.

又,上述第一離子交換步驟及第二離子交換步驟中之處理溫度或浸漬時間等的處理條件,以因應附有膜之強化玻璃G4及強化玻璃G5所要求的特性來適當設定為宜。尚,上述處理條件係以附有膜之強化玻璃G4及強化玻璃G5的主面S的壓縮應力層的深度比露出部E的壓縮應力層的深度為小之方式來調整為較佳。 The processing conditions such as the processing temperature and the immersion time in the first ion exchange step and the second ion exchange step are appropriately set in accordance with the characteristics required for the strengthened glass G4 and strengthened glass G5 with a film. The above-mentioned processing conditions are preferably adjusted so that the depth of the compressive stress layer of the main surface S of the strengthened glass G4 and the strengthened glass G5 with the film is smaller than the depth of the compressive stress layer of the exposed portion E.

又,在上述第一離子交換步驟與第二離子交換步驟之間或在第二離子交換步驟之後,進而亦可將追加的強化步驟設置多道步驟。在第一離子交換步驟與第二離子交換步驟之間追加的強化步驟中,所使用的熔融鹽係將該熔融鹽與水混合並製成濃度20質量%的水溶液時的氫離子濃度指數設為γ,以成為γ<β的熔融鹽為較佳。 Further, a plurality of additional strengthening steps may be provided between the first ion exchange step and the second ion exchange step or after the second ion exchange step. In the strengthening step added between the first ion exchange step and the second ion exchange step, the molten salt used is a hydrogen ion concentration index when the molten salt is mixed with water to make an aqueous solution having a concentration of 20% by mass. It is preferable that the molten salt is γ <β.

上述之強化玻璃之製造方法係可使用具備有收納上述熔融鹽T1的鹽浴槽X1及收納上述熔融鹽T2的鹽浴槽X2的強化玻璃製造裝置來實施。鹽浴槽X1、X2係例如由上部為開口的金屬製殼體所成之槽、且具有被熔融鹽T充滿的內部空間。該強化玻璃製造裝置係以各自在鹽浴槽X1內可收納附有膜之玻璃G2、在鹽浴槽X2內可收納附有膜之強化玻璃G3的形狀及尺寸所構成,且進而以具備可支撐附有膜之玻璃G2的支撐裝置(未示圖)為宜。支撐裝置係藉由例如不鏽鋼等的金屬框架所構成的治具。使附有膜之玻璃G2被支撐裝置支撐的狀態下,藉由使其浸漬於鹽浴槽X1內的熔融鹽T1中,從而可實施上述第一離子交換步 驟之處理。又,使附有膜之強化玻璃G3被支撐裝置支撐的狀態下,藉由使其浸漬於鹽浴槽X2內的熔融鹽T2,從而可實施上述第二離子交換步驟之處理。尚,強化玻璃製造裝置,以進而具備有能實施上述成膜步驟之處理的成膜裝置(未示圖)的構成為宜。作為成膜裝置係可使用周知的濺鍍成膜裝置等。 The manufacturing method of the said tempered glass can be implemented using the tempered glass manufacturing apparatus provided with the salt bath X1 containing the said molten salt T1, and the salt bath X2 containing the said molten salt T2. The salt baths X1 and X2 are, for example, grooves formed of a metal case with an opened upper portion, and have an internal space filled with molten salt T. This tempered glass manufacturing device is formed in a shape and size that each can store a glass G2 with a film in the salt bath X1, and a glass G3 that can store a film with a film in the salt bath X2. A support device (not shown) of the glass G2 with a film is suitable. The supporting device is a jig composed of a metal frame such as stainless steel. In a state where the glass G2 with the membrane is supported by the supporting device, the treatment in the first ion exchange step can be performed by immersing the glass G2 in the salt bath X1 in the molten salt T1. In the state where the reinforced glass G3 with the membrane is supported by the supporting device, the treatment in the second ion exchange step can be performed by immersing the molten salt T2 in the salt bath X2. In addition, it is preferable that the tempered glass manufacturing apparatus further includes a film forming apparatus (not shown) capable of performing the processing of the film forming step described above. As a film-forming apparatus, a well-known sputtering film-forming apparatus etc. can be used.

於此,強化玻璃的應力特性係可使用例如折原製作所製的FSM-6000來進行測定。若鋁矽酸鹽系玻璃的壓縮應力層的深度超過100μm時,或進行鋰離子與鈉離子的離子交換時,強化玻璃的應力特性係可使用例如折原製作所製的SLP-1000來進行測定。切斷強化玻璃等來可製作截面樣品時,以使用例如Photonic-lattice公司製的WPA-micro或東京Instruments公司製的Abrio來觀測內部應力分布並確認應力深度為宜。 Here, the stress characteristics of tempered glass can be measured using, for example, FSM-6000 manufactured by Ohara Corporation. When the depth of the compressive stress layer of the aluminosilicate glass exceeds 100 μm, or when ion exchange between lithium ions and sodium ions is performed, the stress characteristics of the strengthened glass can be measured using, for example, SLP-1000 manufactured by Ohara Corporation. When the cross-section sample can be prepared by cutting tempered glass or the like, it is preferable to use WPA-micro manufactured by Photonic-lattice or Abrio manufactured by Tokyo Instruments to observe the internal stress distribution and confirm the stress depth.

[實施例]     [Example]    

以下,基於實施例詳細地說明本發明。 Hereinafter, the present invention will be described in detail based on examples.

表1中,No.1~3係表示本發明之實施例,No.4~7係表示比較例。 In Table 1, Nos. 1 to 3 represent examples of the present invention, and Nos. 4 to 7 represent comparative examples.

表1中之各樣品係依以下之方式來製作。首先,作為玻璃組成係以質量%含有SiO2 61.6%、Al2O3 19.6%、B2O3 0.8%、Na2O 16%、K2O 2%之方式將玻璃原料進行混合及熔融,使用溢流下引法(overflow down-draw method)成形為厚度0.8mm的板狀,藉由劃線割斷裁切出50×50mm尺寸的矩形狀並進行端面研削及研磨,從而可得到多個的原玻璃G1。接下來,使用濺鍍法將具有以質量%計含有SiO2100%的組成、且厚度200nm的離子穿透抑制膜M,成膜於上述所得到的原玻璃G1的正背的兩主面之整體,從而得到附有膜之玻璃G2(成膜步驟)。接下來,依表1中之條件藉由將所得到的附有膜之玻璃G2浸漬於硝酸鉀溶液中來進行化學強化,從而可得到附有膜之強化玻璃G3(第一離子交換步驟)。接下來,依表1中之條件藉由將所得到的附有膜之強化玻璃G3浸漬於硝酸鉀溶液中來進行化學強化,從而可得到附有膜之強化玻璃G4(第二離子交換步驟)。接下來,將所得到的附有膜之強化玻璃G4的表面洗淨後,進行研磨並除去離子穿透抑制膜,從而可得到 強化玻璃G5(除去步驟)。 Each sample in Table 1 was prepared in the following manner. First, as a glass composition system, glass raw materials are mixed and melted so that they contain SiO 2 61.6%, Al 2 O 3 19.6%, B 2 O 3 0.8%, Na 2 O 16%, and K 2 O 2%. The overflow down-draw method is used to form a plate with a thickness of 0.8 mm, and a 50 × 50 mm rectangular shape is cut by scribe cutting, and the end surface is ground and ground to obtain multiple original materials. Glass G1. Next, an ion penetration suppression film M having a composition containing 100% by mass of SiO 2 and having a thickness of 200 nm was formed on the two main surfaces of the front and back sides of the obtained original glass G1 by sputtering. As a whole, glass G2 with a film is obtained (film formation step). Next, the obtained film-added glass G2 was immersed in a potassium nitrate solution to perform chemical strengthening according to the conditions in Table 1, thereby obtaining a film-added strengthened glass G3 (first ion exchange step). Next, the obtained glass-reinforced glass G3 is immersed in a potassium nitrate solution to perform chemical strengthening according to the conditions in Table 1, thereby obtaining the glass-reinforced glass G4 (second ion exchange step). . Next, after the surface of the obtained reinforced glass G4 with a film is washed, it is polished to remove the ion penetration suppressing film, thereby obtaining a strengthened glass G5 (removal step).

尚,No.6、7中係省略第二離子交換步驟。 The second ion exchange step is omitted in Nos. 6 and 7.

對於以如上述般之方式所得到的各玻璃樣品,進行下述測定試驗。 For each glass sample obtained as described above, the following measurement test was performed.

將在強化玻璃G5的主面所形成的壓縮應力層的壓縮應力CS、該主面的壓縮應力層的深度DOL1、及端面的壓縮應力層的深度DOL2,使用應力計(折原製作所製的FSM-6000LE及FsmXP)來進行測定。又,將從DOL2減去DOL1的值求出作為△DOL。△DOL的值越大時,內部拉伸應力則越小,而不易自發破壞,且可稱為在端面具有高強度的玻璃。 The compressive stress CS of the compressive stress layer formed on the main surface of the tempered glass G5, the depth DOL1 of the compressive stress layer on the main surface, and the depth DOL2 of the compressive stress layer on the end face were measured using a stress gauge (FSM- 6000LE and FsmXP). The value obtained by subtracting DOL1 from DOL2 is determined as ΔDOL. The larger the value of ΔDOL, the smaller the internal tensile stress is, and it is not easy to spontaneously break, and it can be said to have glass with high strength at the end surface.

如表1所表示般,比較例之樣品No.4、5係因α的值大於β,故在第一離子交換步驟中離子交換抑制膜M為劇烈地損耗,而致使成膜部位的DOL變大,其結果,相較於實施例,△DOL的值為變小。又,比較例之樣品No.6、7係因未實施第二離子交換步驟且α的值相對為大,故在第一離子交換步驟中離子交換抑制膜M為劇烈地損耗,而致使在成膜部位中無法充分地抑制離子交換,其結果,相較於實施例,△DOL的值為變小。即,與實施例相比,比較例之樣品No.4~7皆為容易產生自發破壞的玻璃。 As shown in Table 1, Sample Nos. 4 and 5 of the comparative example had a value of α greater than β. Therefore, in the first ion-exchange step, the ion-exchange suppression membrane M was drastically depleted, and the DOL at the film-forming site was changed. As a result, the value of ΔDOL becomes smaller than that of the example. In addition, in Sample Nos. 6 and 7 of the comparative example, since the second ion-exchange step was not performed and the value of α was relatively large, the ion-exchange suppression membrane M was severely depleted in the first ion-exchange step. Ion exchange cannot be sufficiently suppressed in the membrane portion, and as a result, the value of ΔDOL becomes smaller than in the Examples. That is, compared with the examples, the samples Nos. 4 to 7 of the comparative examples are all glass which is liable to spontaneously break.

[產業利用性]     [Industrial availability]    

本發明之強化玻璃板及其製造方法係適合作 為用於觸控式面板顯示器等的玻璃基板及其製造方法等。 The tempered glass plate and the manufacturing method thereof of the present invention are suitable as a glass substrate for a touch panel display and the like, and a manufacturing method thereof.

Claims (8)

一種強化玻璃之製造方法,其係將玻璃表層的離子進行交換的強化玻璃之製造方法,其特徵為,具備下述步驟:將可抑制前述離子之穿透的離子穿透抑制膜成膜於前述玻璃之表面之至少一部分之步驟;將第一熔融鹽接觸於成膜有前述離子穿透抑制膜的前述玻璃之表面來交換前述離子之第一離子交換步驟;與在前述第一離子交換步驟後,將第二熔融鹽接觸於成膜有前述離子穿透抑制膜的前述玻璃之表面來交換前述離子之第二離子交換步驟,將前述第一熔融鹽與水混合並製成濃度20質量%的水溶液時的氫離子濃度指數設為α,將前述第二熔融鹽與水混合並製成濃度20質量%的水溶液時的氫離子濃度指數設為β,此時α<β。     A method for manufacturing strengthened glass, which is a method for manufacturing strengthened glass that exchanges ions on the surface of a glass, and is characterized by having the following steps: forming an ion penetration inhibiting film capable of inhibiting the penetration of the aforementioned ions into a film A step of at least a part of a surface of glass; a first ion-exchange step of contacting a first molten salt with a surface of the glass on which the aforementioned ion penetration suppression film is formed to exchange the ions; and after the first ion-exchange step A second ion exchange step in which a second molten salt is brought into contact with a surface of the glass on which the ion penetration suppression film is formed to exchange the ions, the first molten salt is mixed with water to make an aqueous solution with a concentration of 20% by mass The hydrogen ion concentration index at this time was set to α, and the hydrogen ion concentration index when the second molten salt was mixed with water to make an aqueous solution having a concentration of 20% by mass was set to β, and at this time α <β.     如請求項1之強化玻璃之製造方法,其中,α≦10.5。     The method for manufacturing a strengthened glass according to claim 1, wherein α ≦ 10.5.     如請求項1或2之強化玻璃之製造方法,其中,9≦β≦12。     The method for manufacturing tempered glass according to claim 1 or 2, wherein 9 ≦ β ≦ 12.     如請求項1~3中任一項之強化玻璃之製造方法,其中,將前述玻璃在前述第一離子交換步驟浸漬於350~500 ℃的前述第一熔融鹽中0.1~150小時後,在前述第二離子交換步驟浸漬於350~500℃的前述第二熔融鹽中0.1~72小時,前述第一離子交換步驟中的浸漬時間長於前述第二離子交換步驟中的浸漬時間。     The method for manufacturing a strengthened glass according to any one of claims 1 to 3, wherein the glass is immersed in the first molten salt at 350 to 500 ° C for 0.1 to 150 hours in the first ion exchange step, and then in the foregoing The second ion exchange step is immersed in the second molten salt at 350 to 500 ° C. for 0.1 to 72 hours. The immersion time in the first ion exchange step is longer than the immersion time in the second ion exchange step.     如請求項1~4中任一項之強化玻璃之製造方法,其中,前述玻璃表層的離子為鈉離子,前述第一熔融鹽及前述第二熔融鹽皆包含鉀離子,前述離子穿透抑制膜僅成膜於前述玻璃之主面,前述離子穿透抑制膜係具有以質量%計含有70%以上的SiO 2之組成,前述離子穿透抑制膜之膜厚為5~400nm。 The method for manufacturing strengthened glass according to any one of claims 1 to 4, wherein the ions of the glass surface layer are sodium ions, the first molten salt and the second molten salt both contain potassium ions, and the ion penetration suppression film The film is formed only on the main surface of the glass. The ion penetration suppression film has a composition containing 70% or more of SiO 2 by mass%. The film thickness of the ion penetration suppression film is 5 to 400 nm. 如請求項1~5中任一項之強化玻璃之製造方法,其中,進而具備下述步驟:在前述第二離子交換步驟後將前述離子穿透抑制膜除去之步驟。     The method for producing a strengthened glass according to any one of claims 1 to 5, further comprising the step of removing the ion penetration suppression film after the second ion exchange step.     如請求項1~6中任一項之強化玻璃之製造方法,其中,前述玻璃係玻璃板,該玻璃板中作為玻璃組成以質量%計含有SiO 2 45~75%、Al 2O 3 1~30%、Na 2O 0~20%、K 2O 0~20%。 The method for manufacturing a strengthened glass according to any one of claims 1 to 6, wherein the aforementioned glass-based glass plate contains SiO 2 45 to 75%, Al 2 O 3 1 to 1% by mass as a glass composition. 30%, Na 2 O 0-20%, K 2 O 0-20%. 一種強化玻璃製造裝置,其特徵為具備:將用於交換玻璃表層的離子的第一熔融鹽收納之第一鹽浴槽;與將用於交換玻璃表層的離子的第二熔融鹽收納之第二鹽浴槽,將前述第一熔融鹽與水混合並製成濃度20質量%的水溶液時的氫離子濃度指數設為α,將前述第二熔融鹽與水混合並製成濃度20質量%的水溶液時的氫離子濃度指數設為β,此時α<β。     A tempered glass manufacturing device, comprising: a first salt bath containing a first molten salt for exchanging ions of a glass surface layer; and a second salt containing a second molten salt for exchanging ions of a glass surface layer. A bath, wherein the hydrogen ion concentration index when the first molten salt is mixed with water to make an aqueous solution with a concentration of 20% by mass is α, and the hydrogen ion when the second molten salt is mixed with water to make an aqueous solution with a concentration of 20% by mass The concentration index is set to β, where α <β.    
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* Cited by examiner, † Cited by third party
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EP4021864A1 (en) 2019-08-29 2022-07-06 Corning Incorporated Foldable apparatus, foldable substrate, and methods of making
KR20220056860A (en) 2019-08-29 2022-05-06 코닝 인코포레이티드 Foldable device, ribbon, and manufacturing method thereof
KR102821257B1 (en) 2019-10-14 2025-06-17 코닝 인코포레이티드 Foldable device and its manufacturing method
CN112452687B (en) * 2020-11-18 2022-12-30 苏州鱼得水电气科技有限公司 Bendable light and thin tempered glass and preparation method thereof

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6911261B2 (en) * 2002-06-13 2005-06-28 International Business Machines Corporation pH adjustment of a melt for use in microetching glass substrates
KR101617071B1 (en) * 2011-03-16 2016-04-29 애플 인크. Controlled chemical strengthening of thin glass
JP5293908B1 (en) * 2011-12-16 2013-09-18 旭硝子株式会社 Cover glass for display and method of manufacturing cover glass for display
JP2014208570A (en) * 2013-03-25 2014-11-06 日本電気硝子株式会社 Tempered glass substrate and method of manufacturing the same

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI742731B (en) * 2020-06-19 2021-10-11 恆顥科技股份有限公司 Strengthened glass structure and manufacturing method thereof

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