TW201810501A - Handler and inspection apparatus - Google Patents

Abstract

A handler of the present invention includes: a basic unit; a first support unit fixed on the basic unit; a suction nozzle supported by the first support unit; a first transferring unit which can be moved in the Y-direction from the first support unit; another suction nozzle supported by the first transferring unit; a second support unit which can move in the X-direction from the basic unit; another suction nozzle supported by the second support unit; a second transferring unit which can move in the Y-direction from the second support unit; another suction nozzle supported by the second transferring unit; a Y-direction transferring device which integrally moves the first and second transferring units in the Y-direction to change the distance between the suction nozzles; and a X-direction transferring device which can change the distance between the first and second support units.

Description

processor

The invention relates to a processor and an inspection device.

There has been known an inspection device for inspecting the electrical characteristics of electronic parts such as IC (Integrated Circuit) components since previously. Such an inspection device is a method of supplying electronic parts from a supply tray to an inspection unit, inspecting the electrical characteristics of the electronic parts supplied to the inspection unit, and recovering the electronic parts from the inspection unit to a recovery tray after the inspection is completed. Make up. In addition, the electronic parts stored in the supply tray are temporarily transferred to the shuttle, and then transferred to the vicinity of the inspection section through the shuttle. The shuttle is provided with a tray formed with a pocket, and electronic parts are stored in the pocket. The electronic parts are transferred from the supply tray to the tray by a supply robot. The supply robot has a plurality of suction nozzles, and each of the suction nozzles sucks and holds the electronic parts in the pockets of the supply tray. After the held electronic parts are transferred into the pockets of the tray, the electronic parts are released, thereby self-feeding the tray. Transfer electronic parts to the tray. As such a supply robot, for example, a supply robot described in Patent Document 1 is known. However, a general supply robot has the following problems because the arrangement distance (positional relationship) between the plurality of suction nozzles is fixed. That is, the arrangement pitch of the plurality of recesses provided on the supply tray is not necessarily equal to the arrangement pitch of the plurality of recesses provided on the tray. If the arrangement pitch of the plurality of recesses provided on the supply tray is different from the arrangement pitch of the plurality of recesses provided on the tray, the electronic parts held on the suction nozzles cannot be uniformly arranged. It is released in the cavity on the tray, so it is necessary to sequentially align the position relative to the cavity and release the electronic parts in the cavity for each suction nozzle one by one. In this method, there is a problem that it takes too much time to transfer the electronic parts from the supply tray to the tray, and a smooth inspection cannot be performed. In order to solve such a problem, a robot that can change the arrangement pitch of the suction nozzle is also known, as in Patent Document 1, but in this configuration, there is a problem in that the part must be corrected because the part holding part rotates In general, the rotation mechanism of the gripping part increases the number of parts, which sometimes leads to a larger robot. [Prior Art Document] [Patent Document] [Patent Document 1] Japanese Patent Laid-Open No. 2006-17575

[Problems to be Solved by the Invention] An object of the present invention is to provide a processor and an inspection device having a small number of parts in the processor, which can change the arrangement pitch of the part holding portion. [Technical means for solving the problem] The present invention has been completed in order to solve at least a part of the problems described above, and can be implemented as the following forms or application examples. Such an object is achieved by the present invention described below. The processor of the present invention is characterized in that when three mutually orthogonal directions are set as a first direction, a second direction, and a third direction, the processor includes: a base portion; a first support portion fixed to the base portion; And the relative position with respect to the base portion does not change during operation; the first part holding portion is supported on the first support portion and is provided in a manner capable of moving in the third direction relative to the first support portion And holding parts; a first moving part supported on the first supporting part and movable in the second direction relative to the first supporting part; a second part holding part supporting the first moving part It is provided in such a way that it is located in the second direction with respect to the first part holding part and is movable in the third direction with respect to the first moving part, and holds the part; a second support part that supports the The base portion is located in the first direction relative to the first support portion and is movable in the first direction relative to the base portion; a third component holding portion is supported on the second support portion so that Relative to the above 2 The supporting portion is provided in a manner of moving in the third direction and holds parts; the second moving portion is supported on the second supporting portion and can move in the second direction relative to the second supporting portion; the fourth The component holding portion is supported by the second moving portion, is provided in a manner to be positioned in the second direction with respect to the third component holding portion, and is movable in the third direction with respect to the second moving portion, And a holding part; a first moving mechanism that integrally moves the first moving part and the second moving part in the second direction, and makes the first part holding part and the second part holding part different from the second part The separation distance in the direction and the separation distance between the third component holding portion and the fourth component holding portion in the second direction are changed together; and a second moving mechanism that moves the second support portion in the first direction, The distance between the first support portion and the second support portion in the first direction is changed. With such a configuration, a processor with a small number of parts can be formed. In the processor of the present invention, it is preferable that at least a part of the first moving mechanism is supported on the base. Thereby, the structure of the device becomes simple. In the processor of the present invention, it is preferable that the first moving mechanism includes: a first guide wheel for the first moving mechanism and a second guide wheel for the first moving mechanism, which are equal to the distance in the second direction; the first movement A first annular driving cable for the mechanism is erected between the first guide wheel for the first moving mechanism and the second guide wheel for the first moving mechanism; and a driving source for the first moving mechanism for moving the first At least one of the first guide wheel for the mechanism and the second guide wheel for the first movement mechanism rotates to rotate the first annular drive cable for the first movement mechanism; and at least the first guide wheel for the first movement mechanism and The second guide wheels for the first moving mechanism are rotatably supported on the base. Thereby, the configuration of the first moving mechanism is simplified. In addition, since the number of parts of the first moving mechanism can be reduced, miniaturization can be achieved with it. In the processor of the present invention, it is preferable that the first moving section and the second moving section are directly or indirectly connected to the first ring drive cable for the first moving mechanism, and follow the first moving mechanism. By the rotation of the first endless driving cable, the first moving portion moves in the second direction relative to the first support portion, and the second moving portion moves in the second direction relative to the second support portion. Accordingly, the second component holding portion fixed to the first moving portion and the fourth component holding portion fixed to the second moving portion can be easily and surely moved in the second direction. In the processor of the present invention, it is preferable that the first moving mechanism further includes a third guide wheel for the first moving mechanism and a fourth guide wheel for the first moving mechanism, which are rotatably fixed to the first support. Above, and separated in the second direction; the second ring drive cable for the first moving mechanism is bridged between the third guide wheel for the first moving mechanism and the fourth guide wheel for the first moving mechanism; The transmission unit connects the first guide wheel for the first movement mechanism and the third guide wheel for the first movement mechanism, and transmits the rotation of the first guide wheel for the first movement mechanism to the first movement mechanism. A third guide wheel; and a connecting portion that connects the first annular driving cable for the first moving mechanism and the second annular driving cable for the first moving mechanism; and the first moving portion and the second moving portion are connected separately On the connection section. Thereby, the first moving part and the second moving part can be moved in the second direction with good balance. In the processor of the present invention, it is preferable that the drive source for the first moving mechanism is supported on the base. Thereby, the structure of the device becomes simple. In the processor of the present invention, it is preferable that at least a part of the second moving mechanism is supported on the base. Thereby, the structure of the device becomes simple. In the processor of the present invention, it is preferable that the second moving mechanism includes: a first guide wheel for the second moving mechanism and a second guide wheel for the second moving mechanism, which are equal to the distance in the first direction; the second movement An annular driving cable for the mechanism is provided between the first guide wheel for the second movement mechanism and the second guide wheel for the second movement mechanism; and a drive source for the second movement mechanism for the second movement mechanism. At least one of the first guide wheel and the second guide wheel for the second moving mechanism rotates to rotate the ring drive cable for the second movement mechanism; and at least the first guide wheel for the second moving mechanism and the second movement The second guide wheels for the mechanism are rotatably supported on the base. Thereby, the configuration of the second moving mechanism is simplified. In the processor of the present invention, it is preferable that the first support portion and the second support portion are formed in a plate shape having a widening in both the second direction and the third direction, respectively. This makes it possible to reduce the size of the device. In the processor of the present invention, it is preferable that each of the first component holding portion, the second component holding portion, the third component holding portion, and the fourth component holding portion has a suction nozzle that holds an object by suction. . Thereby, a holding object can be constituted simply. The processor of the present invention is characterized in that when two directions orthogonal to each other are set as a first direction and a second direction, the processor includes: a first part holding part which holds a part; a second part holding part, It is located in the second direction with respect to the first part holding part and holds the part; and 3rd part holding part is in the first direction with respect to the first part holding part and holds the part; fourth The component holding portion is located in the second direction with respect to the third component holding portion and holds the component; and the third component holding portion and the fourth component holding portion are integrally formed with the first component holding portion and The second component holding portion moves in the first direction, and the second component holding portion and the fourth component holding portion move integrally with respect to the first component holding portion and the third component holding portion in the second direction. With such a configuration, a processor with a small number of parts can be formed. The inspection device of the present invention is characterized by comprising the processor of the present invention and an inspection section for inspecting an object, and the inspection device is configured to transport the object to the inspection section by the processor. Thereby, an inspection device with a small number of parts can be obtained. The inspection device of the present invention is characterized in that when three mutually orthogonal directions are set as a first direction, a second direction, and a third direction, the inspection device includes: a base portion; a first support portion fixed to the base portion; And the relative position with respect to the base portion does not change during operation; the first part holding portion is supported on the first support portion and is provided in a manner capable of moving in the third direction relative to the first support portion And holding parts; a first moving part supported on the first supporting part and movable in the second direction relative to the first supporting part; a second part holding part supporting the first moving part It is provided in such a way that it is located in the second direction with respect to the first part holding part and is movable in the third direction with respect to the first moving part, and holds the part; a second support part that supports the The base portion is located in the first direction relative to the first support portion and is movable in the first direction relative to the base portion; a third component holding portion is supported on the second support portion so that Relative to The second support portion is provided in a manner of moving in the third direction and holds parts; the second moving portion is supported on the second support portion and is movable in the second direction relative to the second support portion; The fourth component holding portion is supported by the second moving portion, is located in the second direction with respect to the third component holding portion, and is movable in the third direction with respect to the second moving portion. Install and hold parts; a first moving mechanism that moves the first moving part and the second moving part integrally to the second direction, and moves the first part holding part and the second part holding part; The separation distance in the second direction and the separation distance in the second direction between the third component holding portion and the fourth component holding portion change together; a second moving mechanism that moves the second support portion in the first direction, Changing the distance between the first support portion and the second support portion in the first direction; and an inspection portion that holds the first support portion, the second component hold portion, and the third component hold portion And above Each of the parts on the fourth part holding section is inspected. Thereby, an inspection device with a small number of parts can be obtained.

Hereinafter, the inspection device (inspection device of the present invention) to which the processor of the present invention is applied will be described in detail based on the embodiment shown in the drawings. <First Embodiment> Fig. 1 is a schematic plan view showing a first embodiment of the inspection device of the present invention, and Fig. 2 is a perspective view of a hand unit supplied to a robot having the inspection value shown in Fig. 1, and Fig. 3 is a diagram A plan view of a hand unit for a robot provided with the inspection value shown in FIG. 1 is a plan view of a first support portion provided in the hand unit shown in FIG. 2, and FIG. 5 is a view provided in the hand unit shown in FIG. 2. FIG. 6 is a plan view of the third support portion of the hand unit shown in FIG. 2, and FIG. 7 is a plan view of the fourth support portion of the hand unit shown in FIG. 2. 2 are plan views showing the X-direction moving mechanism of the hand unit shown in FIG. 2, and FIGS. 9 and 10 are plan views showing the Y-direction moving mechanism of the hand unit shown in FIG. 2, and FIG. 11 is shown in FIG. 1. A perspective view of a hand unit of the inspection robot included in the inspection device. FIGS. 12 to 20 are plan views illustrating the inspection sequence of the electronic parts of the inspection device shown in FIG. 1. In the following, for convenience of explanation, as shown in FIG. 1, the three axes orthogonal to each other are X axis (first axis), Y axis (second axis), and Z axis (third axis). The direction parallel to the X axis is referred to as "X direction (first direction)", the direction parallel to the Y axis is referred to as "Y direction (second direction)", and the direction parallel to the Z axis is referred to as " Z direction. " In each of the X direction, the Y direction, and the Z direction, the front end side of the arrow is referred to as "+", and the end side of the arrow is referred to as "-". The inspection device 1 shown in FIG. 1 is used to test parts (electronic parts) such as IC elements (IC chips), LCD (Liquid Crystal Display), and CIS (Contact Image Sensor). It is a device for checking and testing the electrical characteristics of 100. In the following, for convenience of explanation, a case where an IC element is used as a test part will be described as a representative. The inspection device 1 includes a supply tray 2, a recovery tray 3, a first shuttle 4, a second shuttle 5, an inspection socket (inspection section) 6, a supply robot 7, a recovery robot 8, an inspection robot 9, a first camera 600, and a first 2 a camera 500, and a control device 10 that controls the various parts. In such an inspection device 1, a configuration is formed in which the inspection socket 6 is removed from each of these parts, that is, a supply tray 2, a recovery tray 3, a first shuttle 4, a second shuttle 5, a supply robot 7, and a recovery robot 8. The inspection robot 9, the first camera 600, the second camera 500, and the control device 10 constitute a processor (the processor of the present invention) that executes the transfer of the IC element 100. Furthermore, the configuration of the processor is not limited to this, and at least one of these sections may be omitted as needed, or other configurations (for example, a hot plate or a chamber) may be added. In addition, the inspection device 1 includes a base 11 on which the above-mentioned parts are mounted, and a safety cover (not shown) which is covered on the base 11 so as to accommodate the above-mentioned parts, and is inside the safety cover (hereinafter referred to as "area S") The first shuttle 4, the second shuttle 5, the inspection socket 6, the supply robot 7, the recovery robot 8, the inspection robot 9, the first camera 600 and the second camera 500 are arranged, and can be moved inside and outside the area S In one aspect, the supply tray 2 and the collection tray 3 are arranged. Hereinafter, these units will be described in detail in order. 1. Supply Tray The supply tray 2 is a tray for transferring the IC components 100 to be inspected from outside the area S to the inside of the area S. As shown in FIG. 1, the supply tray 2 is formed in a plate shape, and a plurality of recesses 21 are formed on the upper surface of the supply tray 2 in a matrix form along the X direction and the Y direction for mounting the IC device 100. Such a supply tray 2 is placed on a platform (not shown) moving on a track 23 extending in the Y direction so as to span the inside and outside of the area S. In addition, the supply tray 2 can be moved back and forth in the ± Y direction along the rail 23 by moving the above-mentioned platform by a driving device (not shown) using, for example, a linear motor as a driving source. Therefore, the following operations can be repeated: placing the supply tray 2 containing the IC components 100 on a platform outside the area S, moving the supply tray 2 and the platform into the area S together, and unloading from the supply tray 2 After removing all the IC components 100, the supply tray 2 is moved again outside the area S together with the platform. 2. Recycling Tray The recycling tray 3 is a tray for accommodating the IC device 100 after the inspection and transferring it from the area S to the area outside the area S. As shown in FIG. 1, the recovery tray 3 is formed in a plate shape, and a plurality of recesses 31 are formed on the upper surface thereof in a matrix shape along the X direction and the Y direction for mounting the IC device 100. Such a recovery tray 3 is placed on a platform (not shown) moving on the rail 33 extending in the Y direction so as to span the inside and outside of the area S. Further, the recovery tray 3 can be moved back and forth in the ± Y direction along the rail 33 by moving the above-mentioned platform by a driving device (not shown) using, for example, a linear motor as a driving source. Therefore, in the area S, the following operations can be repeated: store the IC component 100 that has completed the inspection in the recovery tray 3, move the recovery tray 3 outside the area S, replace the recovery tray 3 on the platform with an empty tray, and then The collection tray 3 is moved into the area S again. Such a recovery tray 3 is provided apart from the supply tray 2 in the + X direction, and a first shuttle 4, a second shuttle 5, and an inspection socket 6 are arranged between the supply tray 2 and the recovery tray 3. 3. The first shuttle and the first shuttle 4 will be transported to the IC component 100 in the area S by the supply tray 2 and then to the vicinity of the inspection socket 6. Therefore, it is further used to inspect the inspection using the inspection socket 6 The completed IC device 100 is transported to the vicinity of the collection tray 3. As shown in FIG. 1, the first shuttle 4 includes a base member 41 and two trays 42 and 43 fixed to the base member 41. The two trays 42 and 43 are arranged along the X direction. In addition, eight recesses 421 and 431 are formed on the trays 42 and 43 in a matrix shape to arrange four in the X direction and two in the Y direction. . Among the trays 42 and 43, the tray 42 on the supply tray 2 side is used to transfer and store the IC components 100 stored in the supply tray 2, and the tray 43 on the recovery tray 3 side is used to store the used inspection. The tray of the IC device 100 whose electrical characteristics are checked by using the socket 6. That is, the tray 42 is a tray for storing the IC components 100 that have not been inspected, and the tray 43 is a tray for storing the IC components 100 that have been inspected. The first shuttle 4 series base member 41 is supported on a rail 44 extending in the X direction, and a drive device (not shown) using, for example, a linear motor as a driving source can move back and forth in the ± X direction along the rail 44. Moreover, the following two states can be formed: first, the first shuttle 4 is moved to the -X direction side, the tray 42 is aligned on the + Y direction side with respect to the supply tray 2, and the tray 43 is aligned on the + Y direction with respect to the inspection socket 6 The second state is that the first shuttle 4 is moved to the + X direction side, the tray 43 is aligned on the + Y direction side with respect to the recovery tray 3, and the tray 42 is aligned on the + Y direction side with respect to the inspection socket 6. 4. Second shuttle The second shuttle 5 has the same function and configuration as the first shuttle 4 described above. That is, the second shuttle 5 is transported to the IC component 100 in the area S by the supply tray 2 and further to the vicinity of the inspection socket 6. Therefore, it is further used to inspect the inspection performed by the inspection socket 6. The completed IC device 100 is transported to the vicinity of the collection tray 3. As shown in FIG. 1, the second shuttle 5 includes a base member 51 and two trays 52 and 53 fixed to the base member 51. The two trays 52 and 53 are arranged along the X direction. In addition, eight recesses 521 and 531 are formed on the trays 52 and 53 in a matrix form to arrange four in the X direction and two in the Y direction, respectively. Among the trays 52 and 53, the tray 52 on the supply tray 2 side is a tray for transferring and storing the IC components 100 stored in the supply tray 2, and the tray 43 on the recovery tray 3 side is for storing the used inspection socket. 6 Pallet of IC component 100 that has completed inspection of electrical characteristics. That is, the tray 52 is a tray for storing the IC component 100 that has not been inspected, and the tray 53 is a tray for storing the IC component 100 that has been inspected. This second shuttle 5 series base member 51 is supported on the rail 54 extending in the X direction, and can be moved back and forth along the rail 54 in the ± X direction by a driving device (not shown) using, for example, a linear motor as a driving source. Thereby, the following two states can be formed: first, the second shuttle 5 moves to the -X direction side, the tray 52 is aligned on the + Y direction side with respect to the supply tray 2, and the tray 53 is aligned on -Y with respect to the inspection socket 6 The second side is a state in which the second shuttle 5 moves to the + X direction side, the tray 53 is aligned on the + Y direction side with respect to the recovery tray 3, and the tray 52 is aligned on the -Y direction side with respect to the inspection socket 6. In addition, the second shuttle 5 is provided apart from the first shuttle 4 in the -Y direction, and an inspection socket 6 is disposed between the first shuttle 4 and the second shuttle 5. 5. Inspection socket Inspection socket (inspection section) 6 is a socket for inspecting the electrical characteristics of the IC component 100. Such an inspection socket 6 includes eight inspection individual sockets 61 for arranging the IC component 100, and the eight inspection individual sockets 61 are provided in such a manner that four are arranged in the X direction and two are arranged in the Y direction. In addition, the arrangement pitch of the eight individual inspection sockets 61 is substantially equal to the arrangement pitch of the eight recesses formed in each of the trays 42, 43, 52, and 53. This makes it possible to smoothly carry the IC device 100 between the trays 42, 43, 52, and 53 and the inspection individual socket 61. Although not shown, a plurality of probes protruding from the bottom of each of the individual inspection sockets 61 are provided. The plurality of probes are energized upward by springs or the like, respectively. When the IC element 100 is arranged in the inspection individual socket 61, a plurality of probes are brought into contact with external terminals of the IC element 100. As a result, a state where the IC element 100 and the control device 10 (the inspection control unit 101 described below) are electrically connected via a probe is formed, that is, a state in which the electrical characteristics of the IC element 100 can be inspected (tested). The inspection socket 6 is detachably fixed to the base 11. Therefore, the inspection socket 6 can be easily refitted in accordance with the target inspection (test), or the inspection socket 6 can be refitted according to the size or shape of the IC component 100. 6. First camera The first camera 600 is provided between the first shuttle 4 and the inspection socket 6. As described below, when the first hand unit 92 holding the unchecked IC element 100 passes above, the first camera 600 photographs the component mark 941 included in the IC element 100 and the first hand unit 92. 7. Second camera The second camera 500 has the same function as the first camera 600 described above. Such a second camera 500 is provided between the second shuttle 5 and the inspection socket 6. As described below, when the second camera unit 500 holding the unchecked IC device 100 passes above, the second camera 500 photographs the component marks of the IC device 100 and the second hand unit 93. 8. Supply Robot The supply robot 7 is a robot that transfers the IC components 100 stored in the supply tray 2 to the trays 42 and 52. As shown in FIG. 1, the supply robot 7 includes: a support frame 7 a that is supported on the base 11; a moving frame 7 b that is supported on the support frame 7 a and can move back and forth in the ± Y direction relative to the support frame 7 a; The hand unit 7c is supported on the moving frame 7b, and can move back and forth in the ± X axis direction relative to the moving frame 7b. A track extending in the Y direction is formed on the support frame 7a, and the moving frame 7b moves back and forth in the Y direction along the track. Further, a track extending in the X direction is formed on the moving frame 7b, and the hand unit 7c moves back and forth in the X direction along the track. The movement of the moving frame 7b with respect to the supporting frame 7a and the movement of the hand unit 7c with respect to the moving frame 7b are performed by a driving device (not shown) using, for example, a linear motor as a driving source. Hereinafter, the opponent unit 7 c will be described in detail based on FIGS. 2 to 10. In addition, in each of FIGS. 2 to 10, for convenience of explanation, a part of the configuration is not shown. As shown in FIGS. 2 and 3, the hand unit 7 c has a base portion 75, and the base portion 75 is supported to be movable in the X direction with respect to the moving frame 7 b. The "base portion" refers to a portion that supports other members (for example, the first to fourth support portions 71 to 74 described below) and brings them together, and forms the basis of the hand unit 7c. Such a base portion 75 includes: a first base 751 formed in a plate shape having a widening on the XY plane and a thickness in the Z direction; and a second base 752 from the -X direction side of the first base 751 The end portion extends downward (-Z direction), has a widening in the ZY plane, and has a thickness in the X direction. That is, the base portion 75 is formed in an L-shaped outer shape that is bent halfway. Among the two bases 751 and 752, at least a part of the parts constituting the following X-direction moving mechanism 76 is fixed to the first base 751, and on the second base 752, the following Y-direction moving mechanism 77 is fixed. At least part of a part. The hand unit 7 c includes four support sections supported on the base section 75, and specifically includes a first support section 71, a second support section 72, a third support section 73, and a fourth support section 74. The four support sections are arranged in the order of the third support section 73, the second support section 72, the first support section 71, and the fourth support section 74 from the −X direction to the + X direction. In addition, the above-mentioned "support" refers to being connected in a state of being prevented from falling from the base portion 75. A first support portion 71 of the four support portions 71 to 74 is fixed to the first base 751. The “fixed” means that the relative position of the first support portion 71 with respect to the base portion 75 does not change during operation. The other second, third, and fourth support portions 72, 73, and 74 are movable in the X direction with respect to the first base 751, respectively. In this embodiment, a track 753 extending in the X direction is formed on the lower surface of the first base 751, and three guides 754, 755, and 756 that can move on the track 753 are arranged on the track 753. A second support portion 72 is fixed to the guide 754, a third support portion 73 is fixed to the guide 755, and a fourth support portion 74 is fixed to the guide 756. With this configuration, the second, third, and fourth support portions 72, 73, and 74 can move in the X direction relative to the base portion 75. The first, second, third, and fourth support portions 71, 72, 73, and 74 are formed in a plate shape having a widening on the YZ plane and a thickness in the X direction. In this way, by forming each support portion 71 to 74 in a plate shape having a widening on the YZ plane, the support portions 71 to 74 can be arranged side by side in the X direction with a narrower pitch. Therefore, the miniaturization of the hand unit 7c can be achieved, and a plurality of suction nozzles described below can be arranged at a narrow pitch in the X direction. Hereinafter, the first, second, third, and fourth support sections 71, 72, 73, and 74 will be described in detail. Each of the support sections 71 to 74 has the same configuration. 8-1. First Supporting Section As shown in FIG. 4, a first component holding mechanism 711 is provided on the first supporting section 71. The first parts holding mechanism 711 has a function of holding the IC 100 conveyed from the supply tray 2 to the trays 42 and 52. Such a first part holding mechanism 711 includes: a shaft 712 supported on the first support portion 71 and capable of moving back and forth in the ± Z direction relative to the first support portion 71; a suction nozzle (first part holding portion) 713, It is provided at the front end portion (lower end portion) of the shaft 712, and the drive mechanism 714 moves the suction nozzle 713 in the ± Z direction relative to the first support portion 71 via the shaft 712. The first component holding mechanism 711 having such a structure lowers the suction nozzle 713 through the shaft 712 by the driving mechanism 714, and sucks the IC element 100 by the suction nozzle 713, thereby holding the IC element 100. In this way, the IC element 100 is held by suction, whereby stress applied to the IC element 100 can be suppressed, and damage to the IC element 100 can be prevented. Moreover, the IC element 100 can be held in a simple structure and reliably. In addition, the above-mentioned "holding" means that the IC 100 is continuously adsorbed to such an extent that the IC element 100 does not fall. The configuration of the drive mechanism 714 is not particularly limited as long as the shaft 712 can be moved back and forth in the Z direction relative to the first support portion 71. In this embodiment, it includes a pair of pulleys (guide wheels) 714a, 714b, A belt (an endless drive cable) 714c that is set between a pair of pulleys 714a and 714b, and a motor (drive source) 714d that rotates the pulley 714a. The pulleys 714a and 714b are rotatably supported on a main surface of the first support portion 71 via a shaft (not shown). In addition, the pulleys 714a and 714b are provided apart from each other in the Z direction. Therefore, the belt 714c has a region extending in the Z-axis direction, and the shaft 712 is fixed in this region via the fixing portion 714e. When the pulley 714a is rotated by the motor 714d, the pulley 714b and the belt 714c rotate accordingly, and the shaft 712 (suction nozzle 713) fixed to the belt 714c moves in the Z-axis direction with respect to the first support portion 71. By selecting the rotation direction of the motor 714d, the suction nozzle 713 can be raised or lowered relative to the first support portion 71. In addition, as long as the driving as described above can be realized, the configuration of the guide wheel, the ring-shaped driving cable, and the driving source is not particularly limited. For example, a sprocket may be used instead of the pulleys 714a and 714b as a pair of guide wheels, and a chain may be used instead of the belt 714c as the endless driving cable. Alternatively, instead of the motor 714d, a piezoelectric actuator may be used as a drive source. The first support portion 71 is provided with a first moving portion 715 capable of moving back and forth in the Y direction with respect to the first support portion 71. A rail (guide portion) extending in the Y direction is provided on the first support portion 71, and the first moving portion 715 is movable along the rail. Furthermore, as long as the first moving part 715 can be guided in the Y direction, a groove or a slot extending in the Y direction may be used instead of the above-mentioned track. A second component holding mechanism 716 is provided on the first support portion 71. The second part holding mechanism 716 has a function of holding the IC 100 that is carried from the supply tray 2 to the trays 42 and 52 in the same manner as the first part holding mechanism 711. Such a second part holding mechanism 716 includes a shaft 717 supported on the first moving part 715 and capable of moving back and forth in the Z direction relative to the first moving part 715, and a suction nozzle (second part holding part) 718, which It is provided at the front end of the shaft 717, and a drive mechanism 719 moves the suction nozzle 718 in the Z direction with respect to the first moving portion 715 via the shaft 717. The second component holding mechanism 716 having such a configuration lowers the suction nozzle 718 through the shaft 717 by the driving mechanism 719, and sucks the IC element 100 by the suction nozzle 718, thereby holding the IC element 100. The configuration of the driving mechanism 719 is not particularly limited as long as the shaft 717 can be moved back and forth in the ± Z direction, but in this embodiment, it has the same configuration as the driving mechanism 714 described above. That is, the drive mechanism 719 includes a pair of pulleys 719a and 719b, a belt 719c stretched between the pair of pulleys 719a and 719b, and a motor 719d that rotates the pulley 719a. The pulleys 719a and 719b are rotatably supported on a main surface of the first support portion 71 via a shaft (not shown). In addition, the pulleys 719a and 719b are provided apart from each other in the Z direction. Therefore, the belt 719c has a region extending in the Z-axis direction, and the shaft 717 is fixed in this region via the fixing portion 719e. When the pulley 719a is rotated by the motor 719d, the pulley 719b and the belt 719c rotate accordingly, so that the shaft 717 (suction nozzle 718) fixed to the belt 719c moves in the Z-axis direction relative to the first support portion 71. By selecting the rotation direction of the motor 719d, the suction nozzle 718 can be raised or lowered relative to the first support portion 71. In addition, the fixed portion 719e expands and contracts freely in the Y direction, and expands or contracts with the movement of the first moving portion 715 in the Y direction with respect to the first support portion 71. Therefore, the Y-direction movement of the first moving portion 715 relative to the first support portion 71 is not hindered. Further, each part (a pair of pulleys 719a and 719b, a belt 719c, and a motor 719d) constituting the driving mechanism 719 may be provided on the first moving part 715. With such a configuration, it is not necessary to make the fixing portion 719e a flexible configuration. 8-2. Second Supporting Section As shown in FIG. 5, a third component holding mechanism 721 is provided on the second supporting section 72. The third component holding mechanism 721 has a function of holding the IC 100 conveyed from the supply tray 2 to the trays 42 and 52 in the same manner as the first component holding mechanism 711 described above. The configuration of the third component holding mechanism 721 is the same as that of the first component holding mechanism 711 described above. That is, the third component holding mechanism 721 includes a shaft 722 supported on the second support portion 72 and movable back and forth in the Z direction with respect to the second support portion 72, and a suction nozzle (third component holding portion) 723, which It is provided at the front end portion of the shaft 722; and a drive mechanism 724 that moves the suction nozzle 723 in the ± Z direction relative to the second support portion 72 via the shaft 722. The third component holding mechanism 721 having such a structure lowers the suction nozzle 723 through the shaft 722 by the driving mechanism 724, and sucks the IC element 100 by the suction nozzle 723, thereby holding the IC element 100. The driving mechanism 724 includes a pair of pulleys 724a and 724b, a belt 724c stretched between the pair of pulleys 724a and 724b, and a motor 724d that rotates the pulley 724a. The pulleys 724a and 724b are rotatably supported on a main surface of the second support portion 72 via a shaft (not shown). In addition, the pulleys 724a and 724b are provided apart from each other in the Z direction. Therefore, the belt 724c has a region extending in the Z-axis direction, and the shaft 722 is fixed in this region via the fixing portion 724e. When the pulley 724a is rotated by the motor 724d, the shaft 722 (suction nozzle 723) fixed to the belt 724c moves in the Z-axis direction with respect to the second support portion 72. A second moving portion 725 is provided on the second support portion 72 so as to be able to move back and forth in the Y direction with respect to the second support portion 72. A rail extending in the Y direction is provided on the second support portion 72, and the second moving portion 725 is movably provided along the rail. With this configuration, it is possible to simply and surely restrict the movement other than the Y direction of the second moving portion 725. A fourth component holding mechanism 726 is provided on the second support portion 72. The fourth component holding mechanism 726 has a function of holding the IC 100 conveyed from the supply tray 2 to the trays 42 and 52 in the same manner as the second component holding mechanism 716 described above. The configuration of the fourth component holding mechanism 726 is the same as that of the second component holding mechanism 716 described above. That is, the fourth component holding mechanism 726 includes: a shaft 727 supported on the second moving portion 725 and movable back and forth in the ± Z direction with respect to the second moving portion 725; a suction nozzle (fourth component holding portion) 728, It is provided at the front end portion of the shaft 727; and a drive mechanism 729 moves the suction nozzle 728 in the Z direction with respect to the second moving portion 725 via the shaft 727. The fourth component holding mechanism 726 having the above-mentioned structure lowers the suction nozzle 728 through the shaft 727 by the driving mechanism 729, and sucks the IC element 100 by the suction nozzle 728, thereby holding the IC element 100. In addition, the driving mechanism 729 includes a pair of pulleys 729a and 729b, a belt 729c stretched between the pair of pulleys 729a and 729b, and a motor 729d that rotates the pulley 729a. The pulleys 729a and 729b are rotatably supported on a main surface of the second support portion 72 via a shaft (not shown). In addition, the pulleys 729a and 729b are provided apart from each other in the Z direction. Therefore, the belt 729c has a region extending in the Z-axis direction, and the shaft 727 is fixed in this region via the fixing portion 729e. When the pulley 729a is rotated by the motor 729d, the shaft 727 (suction nozzle 728) fixed to the belt 729c moves in the Z-axis direction with respect to the second support portion 72. In addition, the fixed portion 729e expands and contracts freely in the Y direction, and expands or contracts with the movement of the second moving portion 725 in the Y direction of the second support portion 72. Therefore, the Y-direction movement of the second moving portion 725 relative to the second support portion 72 is not hindered. 8-3. Third Support Section As shown in FIG. 6, a fifth component holding mechanism 731 is provided on the third support section 73. The fifth component holding mechanism 731 has a function of holding the IC 100 conveyed from the supply tray 2 to the trays 42 and 52 in the same manner as the first component holding mechanism 711 described above. The structure of the fifth component holding mechanism 731 is the same as that of the first component holding mechanism 711 described above. That is, the fifth component holding mechanism 731 includes a shaft 732 supported on the third support portion 73 and movable back and forth in the Z direction with respect to the third support portion 73, and a suction nozzle (fifth component holding portion) 733, which It is provided in the front end part of the shaft 732, and the drive mechanism 734 moves the suction nozzle 733 in the Z direction with respect to the 3rd support part 73 via the shaft 732. The fifth component holding mechanism 731 having such a configuration lowers the suction nozzle 733 through the shaft 732 through the drive mechanism 734, and sucks the IC element 100 through the suction nozzle 733, thereby holding the IC element 100. The drive mechanism 734 includes a pair of pulleys 734a and 734b, a belt 734c stretched between the pair of pulleys 734a and 734b, and a motor 734d that rotates the pulley 734a. The pulleys 734a and 734b are rotatably supported on a main surface of the third support portion 73 via an axis (not shown). In addition, the pulleys 734a and 734b are provided apart from each other in the Z direction. Therefore, the belt 734c has a region extending in the Z-axis direction, and the shaft 732 is fixed in this region via the fixing portion 734e. When the pulley 734a is rotated by the motor 734d, the shaft 732 (suction nozzle 733) fixed to the belt 734c moves in the Z-axis direction with respect to the third support portion 73. A third moving portion 735 is provided on the third support portion 73 so as to be able to move back and forth in the Y direction with respect to the third support portion 73. A rail extending in the Y direction is provided on the third support portion 73, and the third moving portion 735 is movably provided along the rail. With such a configuration, movement in the third moving portion 735 other than the Y direction can be easily and reliably restricted. A sixth component holding mechanism 736 is provided on the third support portion 73. The sixth component holding mechanism 736 has a function of holding the IC 100 conveyed from the supply tray 2 to the trays 42 and 52 in the same manner as the second component holding mechanism 716 described above. The configuration of the sixth component holding mechanism 736 is the same as that of the second component holding mechanism 716 described above. That is, the sixth part holding mechanism 736 includes a shaft 737 supported on the third moving part 735 and capable of moving back and forth in the Z direction relative to the third moving part 735, and a suction nozzle (sixth part holding part) 738, which It is provided at the front end portion of the shaft 737; and a drive mechanism 739 that moves the suction nozzle 738 in the Z direction with respect to the third moving portion 735 via the shaft 737. The sixth component holding mechanism 736 having the above-mentioned structure lowers the suction nozzle 738 through the shaft 737 through the drive mechanism 739, and sucks the IC element 100 through the suction nozzle 738, thereby holding the IC element 100. The drive mechanism 739 includes a pair of pulleys 739a and 739b, a belt 739c stretched between the pair of pulleys 739a and 739b, and a motor 739d that rotates the pulley 739a. The pulleys 739a and 739b are rotatably supported on a main surface of the third support portion 73 via a shaft (not shown). In addition, the pulleys 739a and 739b are provided apart from each other in the Z direction. Therefore, the belt 739c has a region extending in the Z-axis direction, and the shaft 737 is fixed in this region via the fixing portion 739e. When the pulley 739a is rotated by the motor 739d, the shaft 737 (suction nozzle 738) fixed to the belt 739c moves in the Z-axis direction relative to the third support portion 73. In addition, the fixed portion 739e expands and contracts freely in the Y direction, and expands or contracts with the movement of the third moving portion 735 in the Y direction of the third support portion 73. Therefore, the Y-direction movement of the third moving portion 735 relative to the third support portion 73 is not hindered. 8-4. Fourth Support Section As shown in FIG. 7, a seventh component holding mechanism 741 is provided on the fourth support section 74. The seventh parts holding mechanism 741 has a function of holding the IC 100 conveyed from the supply tray 2 to the trays 42 and 52 similarly to the first parts holding mechanism 711 described above. The configuration of the seventh component holding mechanism 741 is the same as that of the first component holding mechanism 711 described above. That is, the seventh component holding mechanism 741 includes a shaft 742 supported on the fourth support portion 74 and movable back and forth in the Z direction with respect to the fourth support portion 74, and a suction nozzle (seventh component holding portion) 743, which It is provided at the front end portion of the shaft 742; and a drive mechanism 744 moves the suction nozzle 743 in the Z direction relative to the fourth support portion 74 via the shaft 742. The seventh component holding mechanism 741 having such a structure lowers the suction nozzle 743 through the shaft 742 by the driving mechanism 744, and sucks the IC element 100 by the suction nozzle 743, thereby holding the IC element 100. The drive mechanism 744 includes a pair of pulleys 744a and 744b, a belt 744c stretched between the pair of pulleys 744a and 744b, and a motor 744d that rotates the pulley 744a. The pulleys 744a and 744b are rotatably supported on a main surface of the fourth support portion 74 via a shaft (not shown). The pulleys 744a and 744b are provided apart from each other in the Z direction. Therefore, the belt 744c has a region extending in the Z-axis direction, and the shaft 742 is fixed in this region via the fixing portion 744e. When the pulley 744a is rotated by the motor 744d, the shaft 742 (suction nozzle 743) fixed to the belt 744c moves in the Z-axis direction with respect to the third support portion 73. A fourth moving portion 745 is provided on the fourth supporting portion 74 so as to be able to move back and forth in the Y direction with respect to the fourth supporting portion 74. A rail extending in the Y direction is provided on the fourth support portion 74, and a fourth moving portion 745 is movably provided along the rail. With such a configuration, movement in the fourth moving portion 745 other than the Y direction can be easily and reliably restricted. An eighth component holding mechanism 746 is provided on the fourth support portion 74. The eighth parts holding mechanism 746 has a function of holding the IC 100 conveyed from the supply tray 2 to the trays 42 and 52 similarly to the second parts holding mechanism 716 described above. The configuration of the eighth component holding mechanism 746 is the same as that of the second component holding mechanism 716 described above. That is, the eighth part holding mechanism 746 includes a shaft 747 that is supported on the fourth moving part 745 and can move back and forth in the Z direction with respect to the fourth moving part 745, and a suction nozzle (eighth part holding part) 748, which It is provided at the front end portion of the shaft 747; and a drive mechanism 749 moves the suction nozzle 748 in the Z direction relative to the fourth moving portion 745 via the shaft 747. The eighth component holding mechanism 746 having such a structure lowers the suction nozzle 748 through the shaft 747 by the driving mechanism 749, and sucks the IC element 100 by the suction nozzle 748, thereby holding the IC element 100. The driving mechanism 739 includes a pair of pulleys 749a and 749b, a belt 749c stretched between the pair of pulleys 749a and 749b, and a motor 749d that rotates the pulley 749a. The pulleys 749a and 749b are rotatably supported on a main surface of the fourth support portion 74 via a shaft (not shown). In addition, the pulleys 749a and 749b are provided apart from each other in the Z direction. Therefore, the belt 749c has a region extending in the Z-axis direction, and the shaft 747 is fixed in this region via the fixing portion 749e. When the pulley 749a is rotated by the motor 749d, the shaft 747 (suction nozzle 748) fixed to the belt 749c moves in the Z-axis direction with respect to the fourth support portion 74. In addition, the fixed portion 749e can expand and contract freely in the Y direction, and can be extended or contracted together with the movement of the fourth moving portion 745 in the Y direction with respect to the fourth support portion 74. Therefore, the Y-direction movement of the fourth moving portion 745 relative to the fourth support portion 74 is not hindered. The configuration of each of the support sections 71, 72, 73, and 74 has been described in detail above. Here, the suction nozzles 733, 723, 713, and 743 are sequentially arranged in the X direction, and are arranged at equal intervals. That is, the distance between the suction nozzle 733 and the suction nozzle 723, the distance between the suction nozzle 723 and the suction nozzle 713, and the distance between the suction nozzle 713 and the suction nozzle 743 are substantially equal to each other. In addition, the suction nozzle 718 is arranged along the Y direction with respect to the suction nozzle 713. Similarly, the suction nozzle 728 is arranged along the Y direction with respect to the suction nozzle 723, and the suction nozzle 738 is arranged along the Y direction with respect to the suction nozzle 733. In addition, the suction nozzles 748 are arranged along the Y direction with respect to the suction nozzles 743. The distance between the suction nozzles 718, 713, the distance between the suction nozzles 728, 723, the distance between the suction nozzles 738, 733, and the distance between the suction nozzles 748, 743 are substantially equal to each other. That is, the suction nozzles 738, 728, 718, and 748 are also arranged sequentially in the X direction, and are arranged at equal intervals. The hand unit 7c further includes an X-direction moving mechanism (a second moving mechanism) 76 that moves the second, third, and fourth support portions 72, 73, and 74 in the X direction relative to the base portion 75 (the first support portion 71). And a Y-direction moving mechanism (first moving mechanism) 77 that moves each of the moving portions 715, 725, 735, and 745 in the Y direction with respect to the base portion 75. 8-5.  X-direction movement mechanism X-direction movement mechanism 76 moves the second, third, and fourth support portions 72, 73, and 74 in the X direction relative to the first support portion 71 to move the suction nozzle 733 (738 ) The distance from the suction nozzle 723 (728), the distance between the suction nozzle 723 (728) and the suction nozzle 713 (718), and the distance between the suction nozzle 713 (718) and the suction nozzle 743 (748) are kept equal to each other. , While changing the way of these separation distances. As shown in FIG. 8, the X-direction moving mechanism 76 includes a pair of two-stage pulleys (the first guide wheel for the second moving mechanism and the second guide wheel for the second moving mechanism) 761, 762, and a pair of two-stage pulleys 761. Two belts between 762 and 762 (the first endless driving cable for the second moving mechanism, the second endless driving cable for the second moving mechanism) 763, 764, and a motor (for the second moving mechanism) that rotates the second stage pulley 761 Drive source) 765. Among these, the second-stage pulleys 761, 762, and the motor 765 are supported on the first base 751, respectively. The two-stage pulleys 761 and 762 can rotate on the upper surface of the first base 751 about an axis extending in the Y direction. Further, the two-stage pulleys 761 and 762 are spaced apart from each other in the X direction. The second-stage pulley 761 includes: a small-diameter pulley 761a having a small outer diameter; and a large-diameter pulley 761b having approximately twice the outer diameter of the small-diameter pulley 761a; these are arranged along the Y direction and formed concentrically. Similarly, the second-stage pulley 762 includes: a small-diameter pulley 762a having a smaller outer diameter; and a large-diameter pulley 762b having approximately twice the outer diameter of the small-diameter pulley 762a; these are arranged along the Y direction and formed as concentric. Moreover, the outer diameters of the small-diameter pulleys 761a and 762a are equal to each other, and the outer shapes of the large-diameter pulleys 761b and 762b are also equal to each other. A belt 763 is set between the small-path pulleys 761a and 762a. The belt 763 has two areas 763a and 763b extending in the X direction between the small-diameter pulleys 761a and 762a. A second support portion 72 is fixed in one area 763a, and a fourth support portion 74 is fixed in the other area 763b. When the second-stage pulley 761 rotates, the belt 763 is fed to one side in the X direction in the area 763a, and the belt 763 is fed to the other side in the X direction in the area 763b. Therefore, the second and fourth support portions 72 and 74 face each other. It moves on the opposite side of the X direction at approximately the same distance. On the other hand, a belt 764 is set between the large-diameter pulleys 761b and 762b. The belt 764 is provided between the large-diameter pulleys 761b and 762b and has two regions 764a and 764b extending in the X direction. Among the two areas 764a and 764b, a third support portion 73 is fixed in an area 764a that is fed in the same direction as the area 763a of the belt 763 when the second-stage pulley 761 rotates. When the belt 763 rotates, the belts 763 are fed to the same side in the X direction in the areas 763a and 764a, and the second and third support portions 72 and 73 move to the same side in the X direction. In addition, as described above, the large-diameter pulleys 761b and 762b have twice the outer diameter of the small-diameter pulleys 761a and 762a. Therefore, the moving distance of the third supporting portion 73 is approximately twice the moving distance of the second supporting portion 72. According to this configuration, when the second-stage pulley 761 is rotated by the motor 765, the second and fourth support portions 72 and 74 are moved substantially equal to each other in the direction opposite to the X direction, and the third support portion 73 is moved toward the second side. The support part 72 moves in the same direction and twice as much as the second support part 72. Therefore, according to the X-direction moving mechanism 76, as described above, the distance between the suction nozzle 733 (738) and the suction nozzle 723 (728), the distance between the suction nozzle 723 (728) and the suction nozzle 713 (718), The separation distance between the suction nozzles 713 (718) and 743 (748) is maintained to be equal to each other, and the separation distances are changed on the one hand. By having the structure as described above, the structure of the X-direction moving mechanism 76 can be simplified, and the miniaturization and weight reduction achieved therewith can also be achieved. Therefore, it contributes to miniaturization and weight reduction of the hand unit 7c, and improves the operability of the hand unit 7c. In addition, by the rotation of the two-stage pulley 761, all movements of the second, third, and fourth support portions 72, 73, and 74 can be uniformly controlled, so that the above functions can be more reliably performed. In addition, as long as the driving as described above can be realized, the configuration of the guide wheel, the endless driving cable, and the driving source is not particularly limited. For example, a sprocket may be used instead of a pulley as a pair of guide wheels, and a chain (metal chain, rubber chain, etc.) may be used instead of a belt as an endless driving cable. Alternatively, a piezoelectric actuator may be used instead of a motor as a drive source. In addition, the small-diameter pulley 761a (762a) and the large-diameter pulley 761b (762b) can also be formed separately. In this case, a motor for rotating the small-diameter pulley 761a and a large-diameter pulley can be separately provided. Motor for rotating the pulley 761b. 8-6.  Y-direction moving mechanism Y-direction moving mechanism 77 2nd, 3rd 4th moving part 715, 725, 735, 745 relative to the first, 2nd, 3rd 4th support section 71, 72, 73, 74 in one piece (specifically, Simultaneously and equidistantly) in the Y direction, And the suction nozzle 713, Distance between 718, Suction nozzle 723, Distance of 728, Suction nozzle 733, Distance between 738, And suction nozzle 743, The separation distances of 748 are kept equal to each other, One way is to change the way of these separation distances.  As shown in Figures 9 and 10, The Y-direction moving mechanism 77 includes: The first unit 77a and the motor (the driving source for the first moving mechanism) 777, It is disposed on the base 75; Unit 2 77b, It is disposed on the first support portion 71; Transmission shaft (transmission part) 778 and connection shaft (connection part) 779, It takes the first, Unit 2 77a, 77b link mode is set.  The first unit 77a includes a pair of pulleys (a first guide wheel for a first moving mechanism, 2nd guide wheel for 1st moving mechanism) 771, 772, And erected on a pair of pulleys 771, A belt between 772 (the first endless driving cable for the first moving mechanism) 773. Pulley 771, 772 is rotatably supported on one of the main surfaces of the second base 752 (right side in the figure) around an axis extending in the X direction. also, Pulley 771, The 772 is disposed at intervals in the Y direction. and, On these pulleys 771, A belt 773 is set up between 772. Belt 773 on pulley 771, There are two areas 773a extending along the Y direction between 772, 773b.  The motor 777 is a driving source for rotating the pulley 771, It is provided on the other (left side in the figure) main surface of the second base 752.  The second unit 77b includes a pair of pulleys (the third guide wheel for the first moving mechanism, (4th guide wheel for the first moving mechanism) 774, 775, And erected on a pair of pulleys 774, A belt between 775 (a second endless drive cable for the first moving mechanism) 776. Pulley 774, 775 is rotatably supported on the main surface of one of the first support portions 71 (right side in the figure) around an axis extending in the X direction. also, Pulley 774, 775 is set apart in the Y direction. and, On these pulleys 774, A belt 776 is set up between 775. Belt 776 on pulley 774, Between 775 there are two regions extending along the Y direction 776a, 776b.  in this way, By arranging the second unit 77b on the first support portion 71 whose position relative to the second base 752 is unchanged, The Y-direction moving mechanism 77 can be driven more stably.  The transmission shaft 778 is a shaft for transmitting the driving force of the motor 777 to the second unit 77b. This transmission shaft 778 is provided extending in the X direction, Turn pulley 771, The axis of 774 is connected to each other. therefore, The driving force of the motor 777 is transmitted to the second unit 77b via the transmission shaft 778, Thus pulley 771, 774 rotates integrally.  also, The transmission shaft 778 penetrates the second and second portions located between the second base 752 and the first support portion 71 3rd support department 72, 73 (see FIGS. 5 and 6). in particular, The transmission shaft 778 is formed in the second and the second passages. 3rd support department 72, 73 through the through hole on the pulley 771, 774 links. By setting the transmission shaft 778 to this configuration, It can suppress the exposure of the transmission shaft 778 from the support portions 71 to 74, Therefore, miniaturization of the hand unit 7c can be achieved. also, Transmission shaft 778 also plays as the 2nd 3rd support department 72, 73 The function of the guide when moving in the X direction, Therefore, the second and second steps can be performed more surely and smoothly. 3rd support department 72, 73 of the move.  The connecting shaft 779 is formed in a linear shape, And extend along the X direction. also, The connecting shaft 779 is at two places along the way. The area 773a where the belt 773 is fixed via a fixture, And the area 776a of the belt 776. If the belt 773, 776 rotations, Then in area 773a, Within 776a, Belt 773, 776 feeds to the same side in the Y direction, So with it, The connection shaft 779 moves directly in the Y direction while maintaining the posture.  On the outer periphery of this connecting shaft 779, Three linear bushes 779b, 779c, 779d. The linear bushings 779b, 779c, 779d alone (in a state where the movement is not restricted by other components), Moves freely in the axial direction relative to the connecting shaft 779, And rotate freely in the circumferential direction.  Among the linear bushings 779b ~ 779d, The linear bush 779b is fixed to the second moving part 725, The linear bush 779c is fixed to the third moving part 735, The linear bush 779d is fixed to the fourth moving portion 745. Furthermore, The first moving part 715 is supported on the first supporting part 71 fixed on the first base 751, Therefore, it does not move in the Y-axis direction with respect to the connecting shaft 779. therefore, On the first moving part 715, Unlike other moving parts 725 ~ 745, The connecting shaft 779 is directly fixed without a linear bush. in this way, By fixing the connecting shaft 779 to the first moving portion 715, Unintentional displacement of the axial direction (Y direction) of the connecting shaft 779 can be prevented.  By forming this structure, If the connecting shaft 779 uses a belt 773, 776 rotation to move in the Y direction, Each moving part 715, 725, 735, 745 for each support section 71, 72, 73, 74 moves integrally and at equal distances in the Y direction. thereby, According to this structure of the Y-direction moving mechanism 77, The suction nozzle 713, Distance between 718, Suction nozzle 723, Distance of 728, Suction nozzle 733, Distance between 738, And suction nozzle 743, The separation distances of 748 are kept equal to each other, Change these separations on one side.  Furthermore, As mentioned above, The linear bushings 779b ~ 779d move freely along the axial direction (X direction) with respect to the connecting shaft 779 Therefore, the Y-direction moving mechanism 77 does not hinder the second and second 3rd 4th support section 72, 73, 74 is moved in the X direction by the X-direction moving mechanism 76.  also, In the Y-direction moving mechanism 77, The first unit 77a is provided on the second base 752, And a second unit 77b is provided on the first support portion 71, The connecting shaft 779 is supported at two places in the axial direction. Therefore, the connecting shaft 779 can be moved smoothly and reliably in the Y direction by a certain distance. Especially by making the 2nd 3rd support department 72, 73 is located between the second base 752 and the first support portion 71, The distance between the second base 752 and the first support portion 71 can be sufficiently ensured. Therefore, the coupling shaft 779 can be supported more stably.  Furthermore, In the Y-direction moving mechanism 77 of this embodiment, First 2nd, 3rd 4th moving part 715, 725, 735, 745 is connected to the belt 773 via a connecting shaft 779 (that is, indirectly), On 776, But not limited to this, E.g, The connecting shaft 779 can also be omitted, While the first, 2nd, 3rd 4th moving part 715, 725, 735, 745 are directly connected to the belt 773, 776 on.  the above, The configuration of the opponent unit 7c is specifically described. According to such a hand unit 7c, By controlling each motor 765 independently, 777 drive (open / close and rotation direction), Freely change the suction nozzle 713, 718, 723, 728, 733, 738, 743, 748 is equipped with spacing. therefore, E.g, That is, when it is convenient for the arrangement pitch of the plurality of recesses 21 formed on the supply tray 2 to be different from the arrangement pitch of the plurality of recesses 421 (521) formed on the tray 42 (52), Also as follows, The IC device 100 is smoothly transferred from the supply tray 2 to the tray 42 (52).  Furthermore, The hand unit 7c of this embodiment has eight suction nozzles, However, the number of suction nozzles may be 4 or more. It is not particularly limited. E.g, When there are four suction nozzles, Just make the 3rd, 4th support section 73, 74 omit suction nozzles 733, 738, 743, 748. also, E.g, When there are 10 suction nozzles, E.g, As long as it is on the + X direction side of the fourth support portion 74, A fifth support portion provided with the same structure as the fourth support portion 74 and having two suction nozzles and then, The fifth support portion may be fixed in the region 764b of the belt 764. in this way, According to the hand unit 7c, The number of nozzles can be easily changed (and, Add to, delete). The same applies to the hand unit 8c.  Secondly, The driving of the supply robot 7 will be described.  First of all, So that the hand unit 7c is positioned on the supply tray 2, Moving the moving frame 7b in the Y direction relative to the supporting frame 7a, The base portion 75 is moved in the X direction with respect to the moving frame 7b. Secondly, Each of the X-direction moving mechanism 76 and the Y-direction moving mechanism 77 is driven as needed, Make the suction nozzle 713, 718, 723, 728, 733, 738, 743, The arrangement interval of 748 is consistent with the arrangement interval of the cavity 21. Furthermore, The driving of the X-direction moving mechanism 76 and the Y-direction moving mechanism 77 may also be performed while the hand unit 7c is moving.  Secondly, Make each suction nozzle 713, 718, 723, 728, 733, 738, 743, 748 drops, With each suction nozzle 713, 718, 723, 728, 733, 738, 743, 748 while holding the IC element 100. Since then, Make the suction nozzle 713, 718, 723, 728, 733, 738, 743, 748 rises, Eight IC components 100 are taken out of the cavity 21.  Secondly, With the hand unit 7c on the tray 42, Moving the moving frame 7b in the Y direction relative to the supporting frame 7a, The base portion 75 is moved in the X direction with respect to the moving frame 7b. Since the arrangement pitch of the recesses 21 of the supply tray 2 and the arrangement pitch of the recesses 421 of the tray 42 are different in the X direction and the Y direction, Therefore, the X-direction moving mechanism 76 and the Y-direction moving mechanism 77 are driven separately, Make the suction nozzle 713, 718, 723, 728, 733, 738, 743, The arrangement pitch of 748 is the same as that of the recess 421. Furthermore, The driving of the X-direction moving mechanism 76 and the Y-direction moving mechanism 77 may also be performed while the hand unit 7c is moving.  Secondly, Make each suction nozzle 713, 718, 723, 728, 733, 738, 743, 748 drops, Will be held in each nozzle 713, 718, 723, 728, 733, 738, 743, The IC device 100 on the 748 is placed in the recess 421. then, After the adsorption state of the IC device 100 is released, Make the suction nozzle 713, 718, 723, 728, 733, 738, 743, 748 rises, Each IC element 100 is retained on the recess 421.  Furthermore, In the above form, The arrangement pitch of the recesses 21 of the supply tray 2 and the arrangement pitch of the recesses 421 of the tray 42 are different in the X direction and the Y direction. But not limited to this, The arrangement pitch may be different only in the X direction. In that case, As long as the mechanism 77 is moved by the Y direction, Adjust the suction nozzle 713, 718, 723, 728, 733, 738, 743, The spacing in the Y direction of 748, Since then, Driving only the X-direction moving mechanism 76, Make the suction nozzle 713, 718, 723, 728, 733, 738, 743, The configuration pitch of X direction of 748 can be changed.  Instead, The arrangement pitch may be different only in the Y direction. In that case, As long as the mechanism 76 is moved in the X direction, Adjust the suction nozzle 713, 718, 723, 728, 733, 738, 743, 748 in the X direction, Since then, Only drives the Y-direction moving mechanism 77, Make the suction nozzle 713, 718, 723, 728, 733, 738, 743, The configuration pitch of Y direction of 748 can be changed.  also, The arrangement pitch may be equal in both the X direction and the Y direction. In that case, As long as the mechanism 77 is moved by the Y direction, Adjust the suction nozzle 713, 718, 723, 728, 733, 738, 743, The spacing in the Y direction of 748, With the X-direction moving mechanism 76, Adjust the suction nozzle 713, 718, 723, 728, 733, 738, 743, 748 in the X direction, After that, the arrangement spacing will not be changed. It is only necessary to carry out the transportation of the IC device 100 described above.  The same applies to the transfer of the IC components 100 from the supply tray 2 to the tray 52.  (Inspection robot) The inspection robot 9 is housed in a tray 42, The IC component 100 in 52 is transported to the inspection socket 6, It will be placed in the inspection socket 6, IC component 100 having completed inspection of electrical characteristics 53 transported robot.  also, Inspection robot 9 is on pallet 42, When the IC component 100 is transferred to the inspection socket 6 at 52, Positioning of the IC component 100 with respect to the inspection socket 6 (inspection individual socket 61) is possible, and then, When the IC element 100 is placed in the inspection socket 6 and the electrical characteristics are inspected, The IC element 100 can be pressed on the probe, A specific inspection pressure is applied to the IC device 100.  As shown in Figure 1, The inspection robot 9 includes: Box 1 911, It is fixedly disposed with respect to the base 11; Box 2 912, It is supported on Box 911, And can move back and forth in the Y direction relative to the first frame 911; First-hand unit support unit 913 and second-hand unit support unit 914, It is supported on box 2 912, And can be raised and lowered in the Z direction relative to the second frame 912; 8 first-hand units 92, It is supported on the first-hand unit support section 913; And 8 second-hand units 93, It is supported on the second-hand unit support section 914.  First Second hand unit support 913, 914 is supported on frame 2 912, Therefore, it can be moved integrally in the X direction and the Y direction, Instead, they move independently in the Z direction. The movement of the second frame 912 relative to the first frame 911, Support unit for each hand 913, The movement of 914 from the second frame 912 is performed by a driving device (not shown) using, for example, a linear motor as a driving source.  Eight first-hand units 92 are arranged in four in the X direction, The two are arranged in the Y direction in a matrix form below the first-hand unit support portion 913. also, The arrangement pitch of the eight first-hand units 92 is formed on the tray 42, 8 of 43 recesses 421, The arrangement pitches of 431 and eight inspection individual sockets 61 provided in the inspection socket 6 are substantially equal. therefore, Allows smoother tray 42, The IC device 100 is transported between 43 and the inspection socket 6.  Similarly, Eight second-hand units 93 are attached to each tray 52 of the second shuttle 5, Device for transferring IC component 100 between 53 and inspection socket 6. also, It is also a device for positioning the IC component 100 relative to the inspection socket 6 when the unchecked IC component 100 is transferred from the tray 52 to the inspection socket 6.  Eight second-hand units 93 are arranged in four in the X direction, Two of them are arranged in the Y direction and arranged in a matrix form below the second-hand unit support portion 914. also, The arrangement pitch of the eight second-hand units 93 is the same as that of the eight first-hand units 92 described above. And formed on the tray 42, 8 of 43 recesses 421, The arrangement pitches of 431 and eight inspection individual sockets 61 provided in the inspection socket 6 are substantially equal. therefore, Smoother tray 52, The IC component 100 is transported between 53 and the inspection socket 6.  the following, The structures of the eight first-hand units 92 and the eight second-hand units 93 will be described. But each hand unit 92, 93 is the same structure as each other, Therefore the following, The description will be made using one first-hand unit 92 as a representative. For other first-hand units 92 and second-hand units 93, The description is omitted.  As shown in Figure 11, The first-hand unit 92 includes: Support Department 94, Its support, Fixed on the first-hand unit support 913; First moving section 95, It is supported on the support section 94, And can move back and forth in the ± X direction relative to the support portion 94; Second moving section 96, It is supported on the first moving part 95, It can move back and forth in the ± Y direction relative to the first moving part 95; 转 部 97 ， The rotation part 97, It is supported on the second moving part 96, And can rotate around the Z axis with respect to the second moving portion 96; And holding section 98, It is supported on the rotating portion 97. On support 94, A component mark 941 is provided to perform positioning of the held IC component 100 with respect to the individual socket 61 for inspection. also, The holding portion 98 is composed of, for example, a suction nozzle, The IC device 100 can be held by being held.  also, The first-hand unit 92 includes: The first driving device (not shown), It makes the first moving part 95 move back and forth in the ± X direction relative to the support part 94; The second driving device (not shown) It moves the second moving part 96 back and forth in the ± Y direction relative to the first moving part 95; And the third drive mechanism, This rotates the rotation portion 97 about the Z axis with respect to the second moving portion 96. Of the first, 2nd, The third driving mechanism is formed so that, for example, a linear motor can be used as a driving source, In addition, racks that convert the rotary motion of the motor into linear motion are added as needed, The structure of the pinion and the like.  This first-hand unit 92 is as follows, The positioning (visual alignment) of the held IC device 100 is performed. The unchecked IC component 100 stored in the tray 42 is held on the holding portion 98, On the way that the first-hand unit 92 moves from directly above the tray 42 to directly above the inspection socket 6, The first hand unit 92 passes directly above the first camera 600. When the first camera 600 passes directly above the first hand unit 92, The image is captured so that the IC device 100 and the device mark 941 held on the first hand unit 92 are captured. The obtained image data is sent to the control device 10, Image recognition processing is performed by the control device 10.  in particular, In the image recognition process, Perform specific processing on the image data obtained from the first camera 600, A relative position and a relative angle between the component mark 941 and the IC component 100 are calculated. then, Compare the calculated relative position and angle with a reference position and reference angle indicating a proper positional relationship between the component mark 941 and the IC component 100 Calculate the "offset position" between the relative position and the reference position, And the "offset angle" between the relative angle and the reference angle. Furthermore, The "reference position" and the "reference angle" described above refer to when the first-hand unit 92 is disposed at a preset inspection origin position, The external terminal of the IC component 100 is preferably connected to a position of a probe of the individual socket 61 for inspection.  then, The control device 10 is based on the obtained "offset position amount" and "offset angle amount", Drive 1st as needed 2nd, 3rd drive device, In such a way that the relative position and the relative angle are consistent with the reference position and the reference angle, Correct the position and posture (angle) of the IC device 100. With this control, The IC component 100 held by the holding portion 98 can be positioned.  The control device 10 is configured so as to independently control the driving of the eight first hand units 92, Therefore, the positioning (position correction) of the eight IC components 100 held on each of the first hand units 92 can be performed independently.  The positioning of the IC component 100 using the second hand unit 93 is in addition to using the second camera 500 instead of the first camera 600. The other conditions are the same as those of the first-hand unit 92, Therefore, its description is omitted.  (Recycling robot) The recycling robot 8 is used for storing in the tray 43, The IC component 100 whose inspection is completed in 53 is transferred to the robot of the collection tray 3.  The collection robot 8 has the same configuration as the supply robot 7. which is, The recycling robot 8 includes: Support box 8a, It is supported on the base 11; Move frame 8b, It is supported on the support frame 8a, And can move back and forth in the Y direction relative to the support frame 8a; And hand unit 8c, It is supported on the moving frame 8b, And it can move back and forth in the X direction with respect to the moving frame 8b. The configuration of these sections is the same as that of the corresponding sections of the supply robot 7, Therefore, its description is omitted. also, The drive of the recovery robot 8 is also the same as the drive of the supply robot 7, Therefore, its description is omitted.  Here, The following situations exist: Among the IC components 100 stored in the tray 43 (53) after the inspection is completed, There are defective products that cannot exhibit specific electrical characteristics. therefore, E.g, Can also prepare 2 collection trays 3, Use one of them as a tray for storing good products that meet specific electrical characteristics, The other is used as a tray for collecting the defective products. also, When using one collection tray 3, It is also possible to use the specific recess 31 as a recess for accommodating the above-mentioned defective products. With this, Can clearly distinguish between good and bad products.  (Control Device) The control device 10 includes a drive control section 102, And inspection control unit 101. The drive control unit 102 applies, for example, to the supply tray 2. Recycling tray 3, The movement of shuttle 1 and shuttle 5, Or supply robot 7, Recycling robot 8. Inspection robot 9. Mounting state detection device 200, The first camera 600 and the second camera 500 are controlled by mechanical driving. An inspection control unit 101 is based on a program stored in an unillustrated memory, The inspection of the electrical characteristics of the IC device 100 arranged in the inspection socket 6 is performed.  the above, The configuration of the inspection device 1 has been described.  [Inspection method of inspection device] Second, The method for inspecting the IC device 100 by the inspection device 1 will be described. Furthermore, The inspection method described below, especially the transfer order of the IC component 100, is only an example. It is not limited to this.  (Step 1) First, As shown in Figure 12, The supply tray 2 in which the IC components 100 are stored in each of the pockets 21 is transported into the area S And make the first, 2nd shuttle 4, 5Move to the -X direction side, And form a tray 42, 52 are respectively arranged in the + Y direction side with respect to the supply tray 2.  (Step 2) Second, As shown in Figure 13, By supplying the robot 7, Transfer the IC components 100 stored in the supply tray 2 to the tray 42, 52 on, And store the IC component 100 in the tray 42, 52 of each recess 421, 521 in.  Secondly, By mounting the state detection device 200, Detection and storage in the tray 42, 52 of each recess 421, The mounting state of the IC element 100 in 521. That is, when it is convenient to detect only one abnormally placed IC device 100, The drive control unit 102 also temporarily stops the drive of each unit, Correct abnormal loading conditions, After confirming that all the IC components 100 are in a normal mounting state, Start the drive of each department again.  (Step 3) Second, As shown in Figure 14, Will the first, 2nd shuttle 4, 5 are all moved to the + X direction side, The forming tray 42 is arranged on the + Y direction side with respect to the inspection socket 6, The tray 52 is in a state aligned with the -Y direction side with respect to the inspection socket 6.  Secondly, As shown in Figure 15, Make the first Second hand unit support 913, 914 moves to the + Y direction side as a whole, A state where the first-hand unit support portion 913 is positioned directly above the tray 42 and the second-hand unit support portion 914 is positioned directly above the inspection socket 6 is formed. Since then, The IC components 100 stored in the tray 42 are held by the first hand units 92.  (Step 5) Second, As shown in Figure 16, Make the first Second hand unit support 913, 914 moves to the -Y direction side, A state where the first-hand unit support portion 913 is located directly above the inspection socket 6 (the origin position for inspection) and the second-hand unit support portion 914 is located directly above the tray 52 is formed. During the movement, Based on the image data obtained by the first camera 600, The positioning (visual alignment) of each IC element 100 is performed independently.  With this first, Second hand unit support 913, The movement of 914 and the positioning of IC component 100 are simultaneously, The following operations were also performed. First of all, Move the first shuttle 4 to the -X direction side, The tray 43 is formed in a state of being aligned with the inspection socket 6 in the + Y direction, In addition, the trays 42 are aligned in the + Y direction with respect to the supply tray 2. Secondly, By supplying the robot 7, Transfer the IC components 100 stored in the supply tray 2 to the tray 42, The IC device 100 is stored in each recess 421 of the tray 42. then, As above, By mounting the state detection device 200, The mounting state of the IC device 100 stored in each of the pockets 421 is detected.  (Step 6) Second, Lowering the first-hand unit support section 913, The IC element 100 held by each first-hand unit 92 is arranged in each inspection individual socket 61 of the inspection socket 6. at this time, Each of the first hand units 92 presses the IC element 100 against the inspection-use individual socket 61 with a specific inspection pressure (pressure). With this, The external terminals of the IC component 100 are electrically connected to the probes provided in the individual sockets 61 for inspection. In this state, The inspection control unit 101 of the control device 10 inspects the electrical characteristics of the IC element 100 in each inspection individual socket 61. If the check is over, Then raise the first-hand unit support section 913, The IC component 100 held by each of the first hand units 92 is taken out from the individual socket 61 for inspection.  Simultaneously with such operations (inspection of the IC device 100), Each second-hand unit 93 supported on the second-hand unit supporting portion 914 holds the IC component 100 stored in the tray 52, The IC component 100 is taken out of the tray 52 again.  (Step 7) Second, As shown in Figure 17, Make the first Second hand unit support 913, 914 moves to the + Y direction side, A state where the first-hand unit support portion 913 is located directly above the tray 43 of the first shuttle 4 and the second-hand unit support portion 914 is located directly above the inspection socket 6 (position of the inspection origin) is formed. During the movement, Based on image data captured by the second camera 500, The positioning (visual alignment) of each IC element 100 is performed independently.  With this first, Second hand unit support 913, 914 moves simultaneously, The following operations were also performed. First of all, Move the second shuttle 5 to the -X direction side, The tray 53 is formed in a state aligned with the inspection socket 6 in the -Y direction, Then, the tray 52 is arranged in a + Y direction with respect to the supply tray 2. Secondly, By supplying the robot 7, Transfer the IC components 100 stored in the supply tray 2 to the tray 52, The IC device 100 is stored in each recess 521 of the tray 52. then, As above, By mounting the state detection device 200, The mounting state of the IC device 100 stored in each of the recesses 521 is detected.  (Step 8) Second, As shown in Figure 18, Lowering the second-hand unit support section 914, The IC device 100 held by each second-hand unit 93 is arranged in each inspection individual socket 61 of the inspection socket 6. then, With the inspection control section 101, An inspection of the electrical characteristics of the IC element 100 in each inspection individual socket 61 is performed. If the check is over, The second-hand unit support portion 914 is raised, The IC device 100 held by the second hand unit 93 is taken out from the individual socket 61 for inspection.  The following operations are performed simultaneously with such operations. First of all, The IC device 100 having completed the inspection held by each of the first-hand units 92 is stored in each of the recesses 431 of the tray 43. Secondly, Move the first shuttle 4 to the + X direction side, The tray 42 is formed in a state of being aligned in the + Y direction with respect to the inspection socket 6 and directly below each of the first hand units 92, In addition, a state in which the tray 43 is aligned with the recovery tray 3 in the + Y direction is formed. Secondly, Each first-hand unit 92 holds the IC component 100 stored in the tray 42, And by recycling the robot 8, The IC components 100 stored in the tray 43 that have been inspected are transferred to the collection tray 3.  (Step 9) Second, As shown in Figure 19, Make the first Second hand unit support 913, 914 moves to the -Y direction side, A state where the first-hand unit support portion 913 is located directly above the inspection socket 6 (the origin position for inspection) and the second-hand unit support portion 914 is located directly above the tray 52 is formed. at this time, Also in the same manner as in step 5 above, The positioning of the IC device 100 held on the first hand unit 92 is performed.  With this first, Second hand unit support 913, 914 moves simultaneously, The following operations were also performed. First of all, Move the first shuttle 4 to the -X direction side, The tray 43 is formed in a state of being aligned with the inspection socket 6 in the + Y direction, In addition, the trays 42 are aligned in the + Y direction with respect to the supply tray 2. Secondly, By supplying the robot 7, Transfer the IC components 100 stored in the supply tray 2 to the tray 42, The IC device 100 is stored in each recess 421 of the tray 42. then, As above, By mounting the state detection device 200, The mounting state of the IC device 100 stored in each of the pockets 421 is detected.  (Step 10) Second, As shown in Figure 20, Lowering the first-hand unit support section 913, The IC element 100 held by each first-hand unit 92 is arranged in each inspection individual socket 61 of the inspection socket 6. then, With the inspection control section 101, An inspection of the electrical characteristics of the IC element 100 in each inspection individual socket 61 is performed. If the check is over, Then raise the first-hand unit support section 913, The IC component 100 held by each of the first hand units 92 is taken out from the individual socket 61 for inspection.  The following operations are performed simultaneously with such operations. First of all, The IC device 100 having completed the inspection held by each second-hand unit 93 is stored in each of the recesses 531 of the tray 53. Secondly, Move the second shuttle 5 to the + X direction side, The tray 52 is formed in a state of being aligned in the -Y direction with respect to the inspection socket 6 and directly below the second hand unit 93. In addition, a state in which the tray 53 is aligned with the recovery tray 3 in the + Y direction is formed. Secondly, Each second-hand unit 93 holds the IC component 100 stored in the tray 52, And by recycling the robot 8, The IC components 100 that have been inspected and stored in the tray 53 are transferred to the collection tray 3.  (Step 11) Since then, Repeat steps 7 to 10 above. Furthermore, On the way back, If all the IC components 100 stored in the supply tray 2 have been moved to the first shuttle 4, Then, the supply tray 2 moves outside the area S. then, For supplying new IC components 100 to the supply tray 2, Or after having been exchanged with another supply tray 2 containing the IC component 100, The supply tray 2 moves into the area S again. Similarly, On the way back, If the IC component 100 has been stored in all the recesses 31 of the recycling tray 3, Then, the collection tray 3 moves outside the area S. then, Remove the IC component 100 stored in the recovery tray 3, Or replace the recycling tray 3 with another empty recycling tray 3, After that, the collection tray 3 moves again into the area S.  According to this method, The inspection of the IC device 100 can be performed with better efficiency. in particular, The inspection robot 9 includes a first hand unit 92 and a second hand unit 93, E.g, While the IC device 100 held by the first-hand unit 92 (the same applies to the second-hand unit 93) is inspected using the inspection socket 6, The second-hand unit 93 simultaneously stores the IC component 100 that has been inspected in the tray 53. And wait for the next IC component 100 to be inspected. in this way, Can use 2 hand units, To perform different tasks simultaneously, This can reduce unnecessary time, The inspection of the IC device 100 is performed efficiently.  <Second Embodiment> Next, A second embodiment of the inspection device of the present invention will be described.  FIG. 21 is a plan view showing a hand unit for supplying a robot included in the inspection apparatus according to the second embodiment of the present invention. FIG. 22 is a plan view of a supporting portion provided in the hand unit shown in FIG. 21.  the following, Focusing on the differences from the above embodiment, The inspection device of the second embodiment will be described. Regarding the same thing, The description is omitted.  The inspection device according to the second embodiment of the present invention is different from the configuration of the Y-direction moving mechanism in the hand unit of the supply robot and the recovery robot. The other parts are the same as those of the first embodiment. Furthermore, For the same structure as the first embodiment, Annotate the same symbols. also, In this embodiment, The hand units of the supply robot and the hand units of the recovery robot have the same configuration, Therefore the following, As an example, the hand unit of the supply robot will be described. Regarding the hand unit of the recycling robot, The description is omitted.  As shown in Figure 21, The Y-direction moving mechanism 77 'included in the hand unit 7c of this embodiment includes: The first support unit 1100, It is disposed on the first support portion 71; The second support unit 1200, It is provided on the second support portion 72; 3rd support unit 1300, It is provided on the third support portion 73; The fourth support unit 1400, It is provided on the fourth support portion 74; And driving mechanism 1500, It drives each unit 1100, 1200, 1300, 1400.  The driving mechanism 1500 includes: A pair of pulleys (the first guide wheel for the first moving mechanism, (2nd guide wheel for 1st moving mechanism) 1508, 1509, It is disposed on the second substrate 752; Belt (the first endless drive cable for the first moving mechanism) 1510, It is erected on a pair of pulleys 1508, Between 1509 Spline shaft (power transmission shaft) 1501, It is coaxially fixed on the pulley 1509, And extends along the X direction; 4 spline nuts 1502 1503, 1504, 1505, It is set on the periphery of the spline shaft 1501; And motor 1507, It causes the pulley 1508 to rotate.  The motor 1507 is fixed to the second base 752. If driving motor 1507, Its driving force is transmitted to the pulley 1509 via the belt 1510, Instead, the spline shaft 1501 is rotated around its axis. In this way, By fixing the motor 1507 to the base 75, Can make the motor 1507 drive stably, Furthermore, it is possible to prevent the weight of the first to fourth support portions 71 to 74 from increasing.  4 spline nuts 1502 1503, 1504, 1505 moves freely in the axial direction relative to the spline shaft 1501, However, rotation around its axis is limited. which is, If the spline shaft 1501 is rotated by the motor 1507, Spline Nut 1502 1503, 1504, 1505 also rotates separately.  also, Spline Nut 1502 1503, 1504, Among 1505, The spline nut 1502 is rotatably supported on the first support portion 71, The spline nut 1503 is rotatably supported on the second support portion 72, The spline nut 1504 is rotatably supported on the third support portion 73, The spline nut 1505 is rotatably supported on the fourth support portion 74.  Furthermore, As mentioned above, Spline Nut 1503, 1504, 1505 moves freely in the axial direction (X direction) relative to the spline shaft 1501, Therefore, the Y-direction moving mechanism 77 'does not hinder the second and second 3rd 4th support section 72, 73, 74 is moved in the X direction by the X-direction moving mechanism 76.  As shown in Figure 22, The first support unit 1100 includes a pair of pulleys (a third guide wheel for a first moving mechanism, (4th guide wheel for the first moving mechanism) 1101 1102, And erected on a pair of pulleys 1101 The belt between 1102 (the second endless drive cable for the first moving mechanism) 1103. among them, The pulley 1101 is coaxially fixed on the spline nut 1502, Together with the spline nut 1502, it rotates around the axis of the spline shaft 1501. also, The pulley 1102 is separated from the pulley 1101 in the Y direction. The first support portion 71 is rotatably supported. and, On these pulleys 1101 A belt 1103 is set up between 1102. Belt 1103 on pulley 1101 1102 has two regions 1103a extending in the Y direction, 1104b, The first moving portion 715 is fixed to the belt 1103 in the area 1103a. Furthermore, The spline nut 1503 can also double as the pulley 1101.  The configuration of the second support unit 1200 is the same as the configuration of the first support unit 1100 described above. The second support unit 1200 includes a pair of pulleys (the fifth guide wheel for the first moving mechanism, (6th guide wheel for the first moving mechanism) 1201 1202 And erected on a pair of pulleys 1201 The belt between 1202 (the third endless drive cable for the first moving mechanism) 1203. among them, The pulley 1201 is coaxially fixed on the spline nut 1503. Together with the spline nut 1503, it rotates around the spline shaft 1501. also, The pulley 1202 is separated from the pulley 1201 in the Y direction. The second support portion 72 is rotatably supported. and, On these pulleys 1201 A belt 1203 is set up between 1202. Belt 1203 on pulley 1201 1202 has two regions 1203a extending in the Y direction, 1204b, The second moving portion 725 is fixed to the belt 1203 in the area 1203a.  The configuration of the third support unit 1300 is also the same as the configuration of the first support unit 1100 described above. The third support unit 1300 includes a pair of pulleys (seventh guide wheel for the first moving mechanism, (8th guide wheel for the first moving mechanism) 1301, 1302, And erected on a pair of pulleys 1301 The belt between 1302 (the fourth endless drive cable for the first moving mechanism) 1303. among them, The pulley 1301 is coaxially fixed on the spline nut 1504. Together with the spline nut 1504, it rotates around the spline shaft 1501. also, The pulley 1302 is separated from the pulley 1301 in the Y direction. The third support portion 73 is rotatably supported. and, On these pulleys 1301 A belt 1303 is set up between 1302. Belt 1303 on pulley 1301 Between 1302, there are two regions 1303a extending along the Y direction. 1304b, The third moving portion 735 is fixed to the belt 1303 in the area 1303a.  The configuration of the fourth support unit 1400 is also the same as the configuration of the first support unit 1100 described above. The fourth support unit 1400 includes a pair of pulleys (the ninth guide wheel for the first moving mechanism, (10th guide wheel for 1st moving mechanism) 1401 1402 And erected on a pair of pulleys 1401 The belt between 1402 (the fifth endless driving cable for the first moving mechanism) 1403. among them, The pulley 1401 is coaxially fixed on the spline nut 1505. And rotate with the spline nut 1505 about the spline shaft 1501. also, The pulley 1402 is separated from the pulley 1401 in the Y direction. The fourth support portion 74 is rotatably supported. and, On these pulleys 1401 A belt 1403 is set up between 1402. Belt 1403 on pulley 1401 Between 1402, there are two regions 1403a extending in the Y direction, 1404b, The fourth moving portion 745 in the area 1403a is fixed to the belt 1403.  Furthermore, Pulley 1101 1102, 1201 1202 1301, 1302, 1401, 1402 each has an equal outer diameter.  In the Y-direction moving mechanism 77 'having such a structure, If the spline shaft 1501 is rotated by the motor 1507, And transmit its rotational force to each pulley 1101 1201 1301, 1401, Make each belt 1103, 1203, 1303, 1403 rotation, Then in area 1103a, 1203a, 1303a, In 1403a, Belt 1103, 1203, 1303, 1403 Feeds at the same speed to the same side in the Y direction. thereby, If the belt 1103, 1203, 1303, 1403 rotation, Each moving part 715, 725, 735, 745 for each support section 71, 72, 73, 74 moves integrally and at equal distances in the Y direction.  According to this structure of the Y-direction moving mechanism 77, The suction nozzle 713, Distance between 718, Suction nozzle 723, Distance of 728, Suction nozzle 733, Distance between 738, And suction nozzle 743, The separation distances of 748 are kept equal to each other, Change these separations on one side. also, In the Y-direction moving mechanism 77, Each support section 71 ~ 74 is provided with a dedicated unit, Therefore, each of the moving parts 715 to 745 can be moved more surely in the Y direction.  In this second embodiment, The same effects as those of the first embodiment can be exhibited.  Furthermore, In the driving mechanism 1500, Formed by combining the spline shaft 1501 and the spline nuts 1502 ~ 1505, But as long as they can perform the same functions as these, The configuration of the driving mechanism 1500 is not particularly limited.  the above, Based on the illustrated embodiment, The processor and inspection device of the present invention have been described, However, the present invention is not limited to this, The configuration of each part can be replaced with any configuration having the same function. also, In the present invention, Other arbitrary components may be added. also, The respective embodiments may be appropriately combined.

1‧‧‧Inspection device
2‧‧‧ supply tray
3‧‧‧Recycling tray
4‧‧‧ the first shuttle
5‧‧‧ 2nd shuttle
6‧‧‧ Inspection socket
7‧‧‧ supply robot
7a‧‧‧ Support Box
7b‧‧‧moving frame
7c‧‧‧hand unit
8‧‧‧Recycling robot
8a‧‧‧Support box
8b‧‧‧moving frame
8c‧‧‧hand unit
9‧‧‧ Inspection robot
10‧‧‧Control device
11‧‧‧ base
21‧‧‧Dent
23‧‧‧ track
31‧‧‧Dent
33‧‧‧ track
41‧‧‧ base member
42‧‧‧tray
43‧‧‧tray
44‧‧‧ track
51‧‧‧ base member
52‧‧‧tray
53‧‧‧tray
54‧‧‧ track
61‧‧‧Inspection socket
62‧‧‧ Probe
71‧‧‧The first support department
72‧‧‧ 2nd support department
73‧‧‧ 3rd support department
74‧‧‧ 4th support department
75‧‧‧ base
76‧‧‧X-direction moving mechanism
77‧‧‧Y-direction moving mechanism
77a‧‧‧Unit 1
77b‧‧‧Unit 2
92‧‧‧hand unit
93‧‧‧hand unit
94‧‧‧Support Department
95‧‧‧ the first mobile unit
96‧‧‧The second mobile unit
97‧‧‧Rotating part
98‧‧‧holding department
100‧‧‧IC components
101‧‧‧ Inspection Control Department
102‧‧‧Drive Control Department
200‧‧‧ Mounted state detection device
421‧‧‧Dent
431‧‧‧Dent
500‧‧‧Second camera
521‧‧‧Dent
531‧‧‧Dent
600‧‧‧The first camera
611‧‧‧ side
613‧‧‧ bottom
711‧‧‧1st part holding mechanism
712‧‧‧axis
713‧‧‧ Nozzle
714‧‧‧1st drive mechanism
714a‧‧‧ pulley
714b‧‧‧ pulley
714c‧‧‧belt
714d‧‧‧motor
714e‧‧‧Fixed section
715‧‧‧The first mobile unit
716‧‧‧Second part holding mechanism
717‧‧‧axis
718‧‧‧ Nozzle
719‧‧‧Drive mechanism
719a‧‧‧ pulley
719b‧‧‧ pulley
719c‧‧‧Belt
719d‧‧‧motor
719e‧‧‧Fixed section
721‧‧‧3rd part holding mechanism
722‧‧‧axis
723‧‧‧Nozzle
724‧‧‧Drive mechanism
724a‧‧‧ pulley
724b‧‧‧ pulley
724c‧‧‧Belt
724d‧‧‧motor
724e‧‧‧Fixed section
725‧‧‧The second mobile unit
726‧‧‧4th part holding mechanism
727‧‧‧axis
728‧‧‧ Nozzle
729‧‧‧Drive mechanism
729a‧‧‧ pulley
729b‧‧‧ pulley
729c‧‧‧Belt
729d‧‧‧motor
729e‧‧‧Fixed
731‧‧‧5th part holding mechanism
732‧‧‧axis
733‧‧‧ Nozzle
734‧‧‧Drive mechanism
734a‧‧‧ pulley
734b‧‧‧ pulley
734c‧‧‧belt
734d‧‧‧motor
734e‧‧‧Fixed
735‧‧‧The third mobile unit
736‧‧‧6th part holding mechanism
737‧‧‧axis
738‧‧‧ Nozzle
739‧‧‧Drive mechanism
739a‧‧‧ pulley
739b‧‧‧ pulley
739c‧‧‧belt
739d‧‧‧motor
739e‧‧‧Fixed section
741‧‧‧7th part holding mechanism
742‧‧‧axis
743‧‧‧ Nozzle
744‧‧‧Drive mechanism
744a‧‧‧ pulley
744b‧‧‧ pulley
744c‧‧‧belt
744d‧‧‧motor
744e‧‧‧Fixed section
745‧‧‧The fourth mobile unit
746‧‧‧8th part holding mechanism
747‧‧‧axis
748‧‧‧ Nozzle
749‧‧‧Drive mechanism
749a‧‧‧ pulley
749b‧‧‧ pulley
749c‧‧‧belt
749d‧‧‧motor
749e‧‧‧Fixed section
751‧‧‧1st base
752‧‧‧ 2nd base
753‧‧‧track
754‧‧‧Director
755‧‧‧Director
756‧‧‧Director
761‧‧‧secondary pulley
761a‧‧‧ Trail pulley
761b‧‧‧large diameter pulley
762‧‧‧secondary pulley
762a‧‧‧ Trail pulley
762b‧‧‧large diameter pulley
763‧‧‧Belt
763a‧‧‧area
763b‧‧‧area
764‧‧‧Belt
764a‧‧‧area
764b‧‧‧area
765‧‧‧Motor
771‧‧‧ pulley
772‧‧‧ pulley
773‧‧‧Belt
773a‧‧‧area
773b‧‧‧area
774‧‧‧ pulley
775‧‧‧ pulley
776‧‧‧Belt
776a‧‧‧area
776b‧‧‧area
777‧‧‧Motor
778‧‧‧Transmission shaft
779‧‧‧Connecting shaft
779b‧‧‧ Linear Bushing
779c‧‧‧ Linear Bushing
779d‧‧‧ Linear Bushing
911‧‧‧box
911a‧‧‧track
912‧‧‧box
912a‧‧‧track
912b‧‧‧track
913‧‧‧Hand Unit Support Department
914‧‧‧Hand Unit Support Department
941‧‧‧component marking
1100‧‧‧ 1st support unit
1101‧‧‧ pulley
1102‧‧‧Pulley
1103‧‧‧Belt
1103a‧‧‧area
1103b‧‧‧area
1200‧‧‧ 2nd support unit
1201‧‧‧ pulley
1202‧‧‧ pulley
1203‧‧‧Belt
1203a‧‧‧area
1203b‧‧‧area
1300‧‧‧3rd support unit
1301‧‧‧ pulley
1302‧‧‧ pulley
1303‧‧‧Belt
1303a‧‧‧area
1303b‧‧‧area
1400‧‧‧4th support unit
1401‧‧‧ pulley
1402‧‧‧ pulley
1403‧‧‧Belt
1403a‧‧‧area
1403b‧‧‧area
1500‧‧‧Drive mechanism
1501‧‧‧Splined shaft
1502‧‧‧spline nut
1503‧‧‧spline nut
1504‧‧‧Spline Nut
1505‧‧‧Spline Nut
1507‧‧‧Motor
1508‧‧‧ pulley
1509‧‧‧ pulley
1510‧‧‧Belt
S‧‧‧ area
X‧‧‧ direction
Y‧‧‧ direction
Z‧‧‧ direction

Fig. 1 is a schematic plan view showing a first embodiment of the inspection apparatus of the present invention. FIG. 2 is a perspective view of a hand unit supplied to a robot, which is provided with the inspection value shown in FIG. 1. FIG. 3 is a plan view of a hand unit supplied to the robot with the inspection value shown in FIG. 1. FIG. FIG. 4 is a plan view of a first support portion provided in the hand unit shown in FIG. 2. Fig. 5 is a plan view of a second support portion provided in the hand unit shown in Fig. 2. Fig. 6 is a plan view of a third support portion provided in the hand unit shown in Fig. 2. Fig. 7 is a plan view of a fourth support portion provided in the hand unit shown in Fig. 2. FIG. 8 is a plan view showing an X-direction moving mechanism provided in the hand unit shown in FIG. 2. FIG. 9 is a plan view of a Y-direction moving mechanism provided in the hand unit shown in FIG. 2. 10 (a) and 10 (b) are plan views showing the Y-direction moving mechanism of the hand unit shown in FIG. 11 is a perspective view of a hand unit of an inspection robot included in the inspection apparatus shown in FIG. 1. FIG. 12 is a plan view illustrating an electronic component inspection procedure of the inspection apparatus shown in FIG. 1. FIG. FIG. 13 is a plan view illustrating an electronic component inspection procedure of the inspection apparatus shown in FIG. 1. FIG. 14 is a plan view illustrating an electronic component inspection procedure of the inspection apparatus shown in FIG. 1. FIG. 15 is a plan view illustrating an electronic component inspection procedure of the inspection apparatus shown in FIG. 1. FIG. FIG. 16 is a plan view illustrating an electronic component inspection procedure of the inspection apparatus shown in FIG. 1. FIG. 17 is a plan view illustrating an electronic component inspection procedure of the inspection apparatus shown in FIG. 1. FIG. FIG. 18 is a plan view illustrating an electronic component inspection procedure of the inspection apparatus shown in FIG. 1. FIG. FIG. 19 is a plan view illustrating an electronic component inspection procedure of the inspection apparatus shown in FIG. 1. FIG. FIG. 20 is a plan view illustrating an electronic component inspection procedure of the inspection apparatus shown in FIG. 1. FIG. FIG. 21 is a plan view showing a hand unit for supplying a robot included in an inspection apparatus according to a second embodiment of the present invention. FIG. 22 is a plan view of a supporting portion provided in the hand unit shown in FIG. 21.

1‧‧‧Inspection device

2‧‧‧ supply tray

3‧‧‧Recycling tray

4‧‧‧ the first shuttle

5‧‧‧ 2nd shuttle

6‧‧‧ Inspection socket

7‧‧‧ supply robot

7a‧‧‧ Support Box

7b‧‧‧moving frame

7c‧‧‧hand unit

8‧‧‧Recycling robot

8a‧‧‧Support box

8b‧‧‧moving frame

8c‧‧‧hand unit

9‧‧‧ Inspection robot

10‧‧‧Control device

21‧‧‧Dent

23‧‧‧ track

31‧‧‧Dent

33‧‧‧ track

41‧‧‧ base member

42‧‧‧tray

43‧‧‧tray

44‧‧‧ track

51‧‧‧ base member

52‧‧‧tray

53‧‧‧tray

54‧‧‧ track

61‧‧‧Inspection socket

92‧‧‧hand unit

93‧‧‧hand unit

100‧‧‧IC components

101‧‧‧ Inspection Control Department

102‧‧‧Drive Control Department

421‧‧‧Dent

431‧‧‧Dent

500‧‧‧Second camera

521‧‧‧Dent

531‧‧‧Dent

600‧‧‧The first camera

911‧‧‧box

912‧‧‧box

913‧‧‧Hand Unit Support Department

914‧‧‧Hand Unit Support Department

S‧‧‧ area

X‧‧‧ direction

Y‧‧‧ direction

Z‧‧‧ direction

Claims (11)

A processor, characterized in that when three mutually orthogonal directions are set as a first direction, a second direction, and a third direction, the processor includes: a base portion; a first support portion supported by the base portion; The second support portion is supported to be movable in the first direction relative to the base portion; the third support portion is supported to be movable in the first direction relative to the base portion, and is capable of being moved more than the first portion 2 The moving amount of the supporting part moves more. For example, the processor of item 1, wherein the movement amount of the third support section in the first direction is twice the movement amount of the second support section. If the processor of claim 1 or 2, further includes: a second moving mechanism that can move the second support portion in the first direction, and can cause the third support portion to move by the second support portion A movement amount that is twice the amount is moved in the first direction. The processor of claim 1 or 2, wherein the second moving mechanism includes: a first guide wheel for the second moving mechanism and a second guide wheel for the second moving mechanism spaced apart in the first direction; the second moving mechanism A ring drive cable is provided between the first guide wheel for the second moving mechanism and the second guide wheel for the second moving mechanism; and a drive source for the second moving mechanism, At least one of the first guide wheel and the second guide wheel for the second moving mechanism rotates to rotate the ring drive cable for the second movement mechanism; and at least the first guide wheel for the second moving mechanism and the second movement mechanism. The second guide wheels are rotatably supported on the base. For example, the processor of claim 4, wherein the first guide wheel for the second moving mechanism and the second guide wheel for the second moving mechanism include a small-diameter pulley and a large-diameter pulley having a diameter twice that of the small-diameter pulley; Each of the small-diameter pulley holders of the first guide wheel for the second moving mechanism and the second guide wheel for the second moving mechanism is provided with a first annular drive cable for a second moving mechanism; the first guide for the second moving mechanism Each of the large-diameter pulley racks of the wheels and the second guide wheels for the second moving mechanism is provided with a second endless driving cable for the second moving mechanism; the second support part is connected to the first endless driving cable for the second moving mechanism; The third support unit is connected to a second endless driving cable for a second moving mechanism. The processor according to claim 5, further comprising: a first part holding portion movably disposed on the first support portion, and provided to be movable in the third direction with respect to the base portion; a first moving portion , Which is movably disposed on the first support portion, and is movable in the second direction relative to the base portion; and the second part holding portion, which is movably disposed on the first movement portion, and is relatively The base portion moves in the third direction; the third component holding portion is movably disposed on the second support portion and is movable in the third direction with respect to the base portion; the second moving portion is movably It is provided on the second support portion and is movable in the second direction with respect to the base portion; and a fourth component holding portion is movably provided on the second moving portion and is movable along the first portion with respect to the base portion. 3 direction movement; 5th part holding part is movably provided on the 3rd support part and can be moved in the 3rd direction with respect to the base part; 3rd moving part is movably provided in the 3rd part Support, and Moves relative to the base portion along the second direction; 6 parts holding portion, which is movably disposed on the first movable section 3, and can move relative to the base portion along the third direction. The processor according to claim 6, further comprising: a first moving mechanism that enables the first moving portion and the second moving portion to move in the second direction. The processor of claim 7, wherein at least a part of the first moving mechanism is supported on the base. If the processor of claim 8, wherein the first moving mechanism includes: a first guide wheel for the first moving mechanism and a second guide wheel for the first moving mechanism spaced in the second direction, the first moving mechanism for the first moving mechanism; A ring drive cable, which is bridged between the first guide wheel for the first moving mechanism and the second guide wheel for the first moving mechanism; and a drive source for the first moving mechanism, which causes the first moving mechanism to At least one of the first guide wheel and the second guide wheel for the first moving mechanism rotates to rotate the first annular drive cable for the first movement mechanism; and at least the first guide wheel for the first moving mechanism and the first guide wheel The second guide wheels for the moving mechanism are rotatably supported on the base. For example, the processor of claim 9, wherein the first moving part and the second moving part are respectively directly or indirectly connected to the first ring drive cable for the first moving mechanism, and the first moving mechanism uses the first moving drive for the first moving mechanism. With the rotation of a ring drive cable, the first moving portion moves in the second direction relative to the first support portion, and the second moving portion moves in the second direction relative to the second support portion. The processor according to claim 10, wherein each of the first component holding portion, the second component holding portion, the third component holding portion, and the fourth component holding portion has a suction nozzle that holds an object by suction.