TW201801808A - Cleaning device - Google Patents

Abstract

Even if it is a warped plate, it has a simple structure. Rinse the plate thoroughly.

The cleaning device (1) is configured as follows: There are: holding means (10) for holding the plate-like object (W) in the outer periphery and rotating it in the circumferential direction; washing means (20) for washing the plate-like object while it is rotating; and The cleaning liquid spraying means for spraying the cleaning liquid on each of the upper surface (Wa) and the lower surface (Wb) of the object has a cleaning member (a cleaning member for abutting the upper surface of the plate to clean the plate) 23); a swinging part (21) that swings the cleaning member in the radial direction of the plate; and the cleaning member follows the upper surface of the plate by the cleaning member abutting on the curved plate The following mechanism (22) abuts on the upper surface of the plate-shaped object held by the holding means, and cleans the upper surface of the plate-shaped object along the upper surface of the plate-shaped object by washing the member.

Description

Washing device

The present invention relates to a cleaning device for cleaning wafers.

Since plate materials such as wafers processed by a processing device adhere to processing debris such as dirt, the plate objects are cleaned by a cleaning device such as a spinner device. For such a cleaning device, there is known a method of cleaning an upper surface and a lower surface of a plate-like object in a non-contact manner while holding the outer periphery of the plate-like object (see, for example, Patent Document 1). In the cleaning device described in Patent Document 1, in a state where the outer periphery of the plate-like object is held at three places by the holding jig, the washing liquid is sprayed onto the upper surface of the plate-like object from an upper nozzle, and the washing is performed. The liquid is sprayed from the nozzle below to the bottom of the plate, and the top and bottom of the plate are simultaneously washed.

In addition, as a cleaning device, in order to compensate for the insufficient cleaning power caused by the spray of the cleaning liquid by a nozzle, a cleaning device that scrubs and cleans the upper surface of a plate with a sponge or the like is known (see, for example, a patent) Reference 2). In the cleaning device described in Patent Document 2, the plate-like object on the washing platform is sprayed with a washing liquid from an upper nozzle, and a cylindrical sponge roller is rotated to abut against the upper surface of the plate-like object, thereby washing the plate-like object. The top of the net plate. At this time, use a sponge roller with a diameter larger than the plate shape. Relative movement allows the sponge roller to abut the entire upper surface of the plate.

[Prior technical literature] [Patent Literature]

[Patent Document 1] Japanese Patent Laid-Open No. 11-031643

[Patent Document 2] Japanese Patent Laid-Open No. 2014-110270

However, if the cleaning device using a sponge roller is used to clean the outer peripheral edge of the plate-like object, the plate-like object having a large warpage cannot be cleaned well with the sponge roller. That is, if the warpage of the plate-like object is severe, the sponge roller and the plate-like object only partially come into contact with each other, and it is difficult to scrub and wash the entire surface of the plate-like object with the sponge roller. It is also considered to provide a mechanism for moving the sponge roller up and down in a vertical direction in accordance with the warpage of the plate. However, there is a problem that the device configuration of the cleaning device becomes complicated and the cost increases.

The present invention has been made in view of this situation, and an object thereof is to provide a cleaning device that can be easily constructed even if a plate-like object with severe warpage can be cleaned, and the plate-like object can be thoroughly and thoroughly cleaned.

The cleaning device of the present invention includes: a holding means for holding the plate-like object on the outer periphery and rotating the plate-like object in the circumferential direction; and a cleaning means for washing the rotating plate-like object held by the holding means. ;and The cleaning device for spraying the cleaning liquid onto each of the upper and lower surfaces of the plate-shaped object held by the holding means is characterized in that the cleaning device is provided with: abutting against the plate-shaped object A cleaning member that cleans the plate-like object; and swings the cleaning member in the radial direction of the plate-like object and follows a swinging portion of the upper surface of the curved plate-like object to abut against being held at In the upper surface of the plate-like object of the holding means, the cleaning member cleans the upper surface of the plate-like object along the upper surface of the plate-like object.

With this configuration, while the outer peripheral edge of the plate-like object is held, the cleaning liquid is sprayed onto the upper and lower surfaces of the plate-like object, and the cleaning member abuts the upper surface of the plate-like object, and the plate-like object is then Wash and wash. At this time, in a state where the plate-like object is rotated in the circumferential direction, the cleaning member is swung in the radial direction of the plate-like object while following the curvature of the upper surface of the plate-like object. Therefore, the cleaning member can be brought into contact with the plate-like object. Above all things. In addition, the cleaning member is in contact with the upper surface of the plate, and the movement of the cleaning member is followed along the upper surface of the plate. Therefore, there is no need to have a mechanism for moving the cleaning member in the up and down direction, and there is no device configuration. The situation becomes complicated. As shown above, even if it is a plate-like object with severe warpage, it can be simply constructed, and the plate-like object can be cleaned well and completely.

In the cleaning device of the present invention, the swinging unit is provided with a vertical guide which is arranged at a front end of the swing and guides the cleaning member in a vertical direction; the cleaning member is held and guided to the vertical A retainer of the guide; and a spring fixed to the front end of the swinging portion in a state where the retainer is guided to the vertical guide, the spring expands and contracts along the vertical guide, and the holding And the cleaning member swing up and down and follow the curve Curved plate.

The cleaning device of the present invention includes: a piston member that is disposed at the front end of the swinging portion and extends vertically downward; and a cylinder member that is engaged with a recessed portion of the piston member and can be driven in the vertical direction; An air injection port for injecting compressed air vertically downward in the recess of the cylinder member; and the cleaning member disposed on a lower side of the cylinder member, and the compressed air is injected from the air injection port of the piston member. In a state where there is space in the recess and the recess has a space, the cleaning member abuts against the plate, and swings up and down along the piston member, the cylinder member, and the cleaning member to follow the curved plate. Above.

According to the present invention, since the cleaning member is pressed onto the upper surface of the curved plate-like object, the action of the cleaning member follows the upper surface of the plate-like object. The plate was thoroughly washed thoroughly.

1‧‧‧washing device

10‧‧‧ Means of retention

11‧‧‧ Clamp Arm

12‧‧‧ rotating platform

13‧‧‧platform surface

14‧‧‧ spraying port (washing liquid spraying means)

15‧‧‧ spray nozzle (washing liquid spray means)

16, 17‧‧‧ supply source (washing liquid spraying means)

20, 40, 60 ‧ ‧ ‧ washing means

21, 41, 61‧‧‧Swing section

22, 42, 62‧‧‧ followers

23, 43, 63‧‧‧washing components

25‧‧‧Guide Board

26, 46, 52, 66, 76‧‧‧ vertical plate department

27, 47, 53, 67, 77‧‧‧ horizontal plate department

28‧‧‧ vertical guide

29, 49, 64‧‧‧ Swing arm

31, 51, 75‧‧‧ holder plate (holder)

32‧‧‧ Slider

33, 69, 78‧‧‧ opening

35, 55‧‧‧ Spring

36, 56, 81‧‧‧ member holders (holders)

37, 57‧‧‧ Upper holder

38, 58‧‧‧ Lower holder

45, 65‧‧‧L plate

48, 68‧‧‧ extension board

71‧‧‧Piston member

72‧‧‧ Connector

73‧‧‧air jet

81‧‧‧component holder

82‧‧‧ Recess of component holder

83‧‧‧ Upper holder (cylinder member)

84‧‧‧ Lower holder

90‧‧‧washing means

91‧‧‧washing components

W‧‧‧ Plate

The top of Wa‧‧‧ plate

Wb‧‧‧ Under the plate

FIG. 1 is a schematic diagram of a cleaning device according to this embodiment.

FIG. 2 is an explanatory diagram of a cleaning operation performed by a cleaning method of a comparative example.

Fig. 3 is a perspective view and a side schematic view of a cleaning means according to this embodiment.

FIG. 4 is a diagram showing an example of a washing operation performed by the washing means of the present embodiment.

Fig. 5 is a perspective view of a washing means according to a first modification.

Fig. 6 is a perspective view of a washing means according to a second modification.

Hereinafter, the cleaning device according to this embodiment will be described with reference to the accompanying drawings. FIG. 1 is a schematic diagram of a cleaning device according to this embodiment. However, the cleaning device shown below is an example and is not limited to this structure.

As shown in FIG. 1, the cleaning device 1 is a so-called edge-clamp-type cleaning device, and is configured to hold the outer periphery of the processed plate-shaped object W on the platform surface 13 of the holding means 10 by holding the processed plate-shaped object W. Rinse while floating. In the cleaning device 1, the plate-like object W is cleaned in a non-contact manner with respect to the platform surface 13. Therefore, it is difficult for processing debris such as dirt to adhere to the lower surface Wb of the plate-like object W. Among them, the plate-like object W may be a subject to be cleaned, and may be, for example, semiconductor substrates such as silicon and gallium arsenide, inorganic material substrates such as sapphire, silicon carbide, and various ceramic substrates used for electronic parts.

The holding means 10 of the cleaning device 1 holds the outer periphery of the plate-shaped object W by a plurality of (four in this embodiment) clamp arms 11, and the plate-shaped object is made by a rotating platform 12 on which each clamp arm 11 is mounted. W rotates in the circumferential direction. Each clamp arm 11 is swingably connected to the outer peripheral portion of the rotary table 12 and is operated by an opening and closing mechanism made of a spring, an air cylinder, or the like. The front end side of each clamp arm 11 is inclined toward the inside of the rotating platform 12 and has a plate shape. The outer peripheral edge of the object W is held, and the front end side of each clamp arm 11 is inclined toward the outside of the rotation platform 12, and the outer peripheral edge of the plate-shaped object W is released.

A drive motor (not shown) is connected to the lower portion of the rotary platform 12, and the rotary platform 12 is rotated about a vertical axis by the drive motor. The center of the platform surface 13 of the rotary platform 12 is formed with a spray port 14 for spraying the cleaning liquid on the lower surface Wb of the plate-like object W. An injection nozzle 15 for injecting a cleaning liquid onto the upper surface Wa of the plate-shaped object W is positioned above the rotating platform 12. The spray ports 14 and the spray nozzles 15 are connected to supply sources 16 and 17 of the cleaning liquid, and the spray ports 14, the spray nozzles 15, and the supply sources 16 and 17 constitute a cleaning liquid spraying means. In addition, the washing device 1 is provided with a washing means 20 for washing the plate-like object W held by the holding means 10 while being rotated.

However, as shown in the comparative example of FIG. 2, the general washing means 90 is premised on that it is configured to perform brush washing in a horizontal direction, and the plate-like object W is held in a horizontal posture relative to the holding means 10 (see FIG. 1). Therefore, if warpage occurs in the plate-like object W, the cleaning member 91 cannot uniformly abut the entire surface of the plate-like object W. That is, in the high position and the low position of the plate-like object W, the collision condition of the cleaning member 91 or the squeezing condition of the sponge part is changed, and the plate-like object W cannot be washed and washed under uniform conditions. Therefore, there is a possibility that processed products such as dirt remain on the surface of the plate-like object W.

At this time, it is also considered to provide a mechanism for moving the cleaning means 90 up and down in the vertical direction in accordance with the warpage of the plate-like object W. However, there is a problem that the structure of the cleaning means 90 becomes complicated due to electrical control. In addition, metal parts are generally used in consideration of strength in mechanical structures, but there are Increased weight and corrosion due to chemicals used in cleaning solutions. Therefore, in this embodiment, when the cleaning member 23 is in contact with the plate-like object W, the operation of the cleaning member 23 is caused to follow the upper surface Wa of the plate-like object W. In addition, a washing material 20 is formed using a lightweight and highly resistant resin material.

Hereinafter, the cleaning means of this embodiment will be described in detail with reference to FIG. 3. Fig. 3 is a perspective view and a side schematic view of a cleaning means according to this embodiment. 3A is a perspective view of the cleaning means, and FIG. 3B is a schematic side view of the cleaning means.

As shown in FIGS. 3A and 3B, the washing means 20 is configured such that the plate member W is rotated in the circumferential direction by the holding means 10 (see FIG. 1), and the washing member 23 is made by the swinging portion 21. The plate-shaped object W is swung in the radial direction, the cleaning member 23 is brought into contact with the upper surface Wa of the plate-shaped object W, and the upper surface Wa of the plate-shaped object W is washed. The swing arm 29 of the swing section 21 is a swing shaft (not shown) formed in a long shape by a resin material and rotatably supported on the base end side. The swinging portion 21 is provided with a curved following mechanism 22 that causes the cleaning member 23 to follow the upper surface Wa of the plate-like object W. Further, a cleaning member 23 housed in the member holder 36 is attached to the swinging portion 21 through the following mechanism 22.

The following mechanism 22 is configured by connecting a guide plate 25 fixed to the front end side of the swing arm 29 and a holder plate (holder) 31 holding the cleaning member 23 with a spring 35. The guide plate 25 is formed by a vertical plate portion 26 and a horizontal plate portion 27 made of a resin material, and is formed in an inverted L shape on the side. A front surface of the vertical plate portion 26 of the guide plate 25 is provided at a horizontal direction with an interval therebetween to pass the holder plate 31 to guide the cleaning member 23 in the vertical direction. A pair of vertical guides 28. An upper end of a spring 35 made of a resin material is connected to a lower surface of the horizontal plate portion 27 of the guide plate 25.

The holder plate 31 is formed of a resin material and has an elongated shape extending in the extending direction of the swing portion 21. A slider 32 that is guided in the vertical direction by a pair of vertical guides 28 is erected on the base end side of the holder plate 31, and the lower end of the spring 35 is connected to the upper surface of the slider 32. An opening 33 to which a member holder (holder) 36 can be attached is formed on the front end side of the holder plate 31. The member holder 36 is composed of an upper holder 37 and a lower holder 38 which are formed in a cylindrical shape from a resin material, and is screwed to the holder plate 31 through a flange portion on the upper end side of each holder.

The upper holder 37 and the lower holder 38 are combined so that the cylindrical portion of the upper holder 37 enters the inside of the cylindrical portion of the lower holder 38, and the lower end of the cylindrical portion of the upper holder 37 and the lower holder are combined. A cleaning member 23 is mounted between the bottom wall portions of 38. An opening 39 is formed in a bottom wall portion of the lower holder 38, and the cleaning member 23 projects downward from the lower holder 38 through the opening 39. The cleaning member 23 is formed into a sponge shape by PVA (Polyvinyl Alcohol, polyvinyl alcohol). The cylindrical portion of the upper holder 37 and the bottom wall portion of the lower holder 38 are sandwiched and fixed to the member holder 36.

In the cleaning means 20, the upper surface Wa of the plate-shaped object W is pressed into the cleaning member 23, and the cleaning member 23 follows the curvature of the upper surface Wa of the plate-shaped object W. That is, when the cleaning member 23 abuts on the upper surface Wa of the curved plate-like object W, the spring 35 expands and contracts according to the bending of the plate-like object W, thereby holding the fixture plate 31 along the pair of vertical guides 28, member The holder 36 and the washing member 23 are vertically swung integrally. Thereby, in a state where the plate-like object W is rotated in the circumferential direction, the washing member 23 swings in the radial direction of the plate-like object W while following the curvature of the upper surface Wa of the plate-like object W, so the washing member 23 resists. It is connected to the entire upper surface of the plate-like object W. Among them, an appropriate spring constant is used as the spring 35 according to the type of the plate-like object W.

The washing operation performed by the washing means will be described with reference to FIG. 4. FIG. 4 is a diagram showing an example of a washing operation performed by the washing means of the present embodiment. 4A shows a washing state on the outer peripheral side of the plate, and FIG. 4B shows a washing state on the center of the plate.

As shown in FIG. 4A, the outer periphery of the plate-shaped object W is held by the plurality of clamping arms 11 of the holding means 10, and the plate-shaped object W held by the plurality of clamping arms 11 is rotated in the circumferential direction by the rotating platform 12. In addition, the cleaning liquid is sprayed toward the lower surface Wb of the plate W from the spray port 14 of the rotary platform 12, and the cleaning liquid is sprayed toward the upper surface Wa of the plate W from the spray nozzle 15 above the rotary platform 12. Next, the swinging part 21 swings the cleaning member 23 between the center of the rotating plate-like object W and the outer periphery, and abuts the cleaning member 23 while following the bending of the plate-like object W by the following mechanism 22 The entire upper surface of the plate-like object W.

At this time, the plate-like object W is warped to become higher from the center toward the outer peripheral side. Therefore, when the cleaning member 23 is positioned on the outer-peripheral side of the plate-like object W, the cleaning member 23 passes through the upper surface of the plate-like object W. Wa is pushed upward. Thereby, the slider 32 of the holder plate 31 moves up while being guided by the pair of vertical guides 28 of the guide plate 25, and moves the guide plate 25 and the holder The spring 35 connected to the plate 31 is contracted. As shown above, at a high position of the upper surface Wa of the plate-shaped object W, the washing member 23 is moved upward against the reaction force of the spring 35, thereby causing the cleaning member 23 to follow the bending of the upper surface Wa of the plate-shaped object W.

On the other hand, when the cleaning member 23 is positioned on the center side of the plate-like object W, the cleaning member 23 is slightly pressed down by the reaction force of the spring 35. Thereby, the slider 32 of the holder plate 31 moves down while being guided by the pair of vertical guides 28 of the guide plate 25, and the spring 35 connecting the guide plate 25 and the holder plate 31 is extended. . As shown above, at the low position of the upper surface Wa of the plate-like object W, the cleaning member 23 is moved downward by the reaction force of the spring 35 to move the cleaning member 23 down, thereby causing the washing The net member 23 follows the curvature of the upper surface Wa of the plate-like object W.

As described above, the cleaning member 23 follows the curvature of the upper surface Wa of the plate-shaped object W, thereby bringing the cleaning member 23 into contact with the entire upper surface of the plate-shaped object W. Therefore, in the high position and the low position of the plate-like object W, the collision condition of the cleaning member 23 or the pressing condition of the sponge part is substantially the same, and the plate-like object W can be scrubbed and washed under substantially uniform conditions. In addition, since a highly resistant resin material is used to form the entire cleaning means 20, even when the cleaning solution contains a drug, the cleaning means 20 does not corrode due to the drug like a metal, and Compared with metal, it can achieve more weight reduction.

As described above, in the cleaning device 1 of this embodiment, the cleaning liquid is sprayed while the outer periphery of the plate-like object W is held. To the upper surface Wa and lower surface Wb of the plate-like object W, the cleaning member 23 is brought into contact with the upper surface Wa of the plate-like object W, and the plate-like object W is washed and washed. At this time, in a state where the plate-like object W is rotated in the circumferential direction, the washing member 23 is swung in the radial direction of the plate-like object W while following the curvature of the upper surface Wa of the plate-like object W, so that the washing member 23 can be made. The entire upper surface of the plate-shaped object W abuts. In addition, the cleaning member 23 is in contact with the upper surface Wa of the plate-like object W, and follows the operation of the cleaning member 23 along the upper surface Wa of the plate-like object W. Therefore, there is no need for a mechanism for moving the cleaning member 23 in the vertical direction. , There is no case where the device configuration becomes complicated. As described above, even if the plate-like object W is severely warped, the plate-like object W can be easily cleaned with a simple structure.

However, the present invention is not limited to the above-mentioned embodiment, and various modifications can be implemented. In the above-mentioned embodiment, the size, shape, and the like shown in the drawings are not limited to this, and may be appropriately changed within a range in which the effects of the present invention are exhibited. In addition, as long as it does not deviate from the scope of the object of the present invention, it can be appropriately modified and implemented.

For example, in this embodiment, the cleaning means 20 is formed by the expansion and contraction of the spring 35 to swing the holder plate 31 up and down, and the cleaning member 23 fixed to the front end of the holder plate 31 follows the plate. The curved configuration of the object W is not limited to this configuration. The cleaning means 20 may be provided with a follower mechanism 22 that follows the upper surface of the plate-shaped object W by abutting on the upper surface of the curved plate-shaped object W. Hereinafter, a modification of the washing means will be described with reference to FIGS. 5 and 6. Among them, in the cleaning method of the modification, the same configuration as the present embodiment is omitted. Slightly explained.

As shown in FIG. 5, in the cleaning method 40 of the first modification, the follower mechanism 42 of the swinging portion 41 is attached to the front end side of the swinging arm 49 through an L-shaped plate 45 to which an extension plate 48 is attached. The holder 56 is constituted by a plurality of (three in this embodiment) springs 55 connected to each other. The L-shaped plate 45 is formed by a vertical plate portion 46 and a horizontal plate portion 47 made of a resin material, and is formed in a side view of an inverted L shape. An extension plate 48 made of a resin material is fixed to the horizontal plate portion 47 of the L-shaped plate 45, and an upper end of a plurality of springs 55 made of a resin material is connected to the lower surface of the extension plate 48.

The vertical plate portion 46 of the L-shaped plate 45 is fixed to the vertical plate portion 52 of the L-shaped holder plate 51, and the horizontal plate portion 53 of the holder plate 51 is formed with an opening for guiding the member holder 56 in the vertical direction. (Not shown). The cylindrical portion of the component holder 56 enters the opening of the holder plate 51, and the flange portion of the component holder 56 is supported on the holder plate 51 so as to be stopped. As described above, the holder plate 51 of the first modification is not a swing member that swings integrally with the member holder 56 like the holder plate 31 (see FIG. 3) of the present embodiment described above, but serves as a member holder 56. The vertical guide functions.

The member holder 56 is composed of the upper holder 57 and the lower holder 58 as described above, and the lower end of the plurality of springs 55 is connected to the upper surface of the upper holder 57. The plurality of springs 55 are arranged at regular intervals in the circumferential direction of the member holder 56 so that the member holder 56 receives a uniform force. At this time, since the plurality of springs 55 are located directly above the contact position between the cleaning member 43 and the upper surface Wa of the plate-like object W, the plurality of springs 55 are aligned by the contact position. The spring 55 directly transmits the reaction force at the time of contact. As described above, in the cleaning means 40 according to the first modification, since the reaction force at the time of the abutment acts directly on the spring 55, the cleaning can be performed in a state in which the displacement of the member holder 56 during swinging is suppressed. The movement of the member 43 follows the upper surface Wa of the curved plate-shaped object W.

As shown in FIG. 6A and FIG. 6B, in the cleaning means 60 of the second modification, the follower mechanism 62 of the swinging portion 61 is provided with an extension plate 68 through the L-shaped plate 65 at the front end side of the swing arm 64, and the extension plate The piston member 71 of 68 and the recess 82 of the member holder 81 constitute an air spring. The L-shaped plate 65 is formed by a vertical plate portion 66 and a horizontal plate portion 67 made of a resin material, and is formed in a side view of an inverted L shape. An extension plate 68 made of a resin material is fixed to the horizontal plate portion 67 of the L-shaped plate 65, and an opening 69 is formed in the extension plate 68 to attach a piston member 71 made of a resin material.

The cylindrical portion of the piston member 71 extends vertically downward from the opening 69 of the extension plate 68, and the flange portion at the base end of the cylindrical portion is fixed to the extension plate 68. An air flow path is formed in the cylindrical portion of the piston member 71, and a compressor or the like is connected to the upper end side of the cylindrical portion through a connector 72. The cylindrical portion of the piston member 71 enters the recessed portion 82 of the member holder 81, and an air injection port 73 is formed at the lower end of the piston member 71 to inject compressed air vertically downward into the recessed portion 82. The pressure in the recessed portion 82 of the member holder 81 is adjusted by the injection of the compressed air from the air injection port 73.

The vertical plate portion 66 of the L-shaped plate 65 is fixed to the vertical plate portion 76 of the L-shaped holder plate 75, and the horizontal plate portion 77 of the holder plate 75 is An opening 78 is formed to guide the member holder 81 in the vertical direction. The cylindrical portion of the component holder 81 enters the opening 78 of the holder plate 75, and the flange portion of the component holder 81 is supported on the holder plate 75 in a stopable manner. As described above, the holder plate 75 of the second modification is not a swinging member that swings integrally with the member holder 81 like the holder plate 31 (see FIG. 3) of the present embodiment described above, but serves as a member holder 81. The vertical guide functions.

The component holder 81 is composed of the upper holder 83 and the lower holder 84 as described above, and the upper holder 83 is formed with the recessed portion 82 into which the cylindrical portion of the piston member 71 is inserted. As described above, in the second modification, the upper holder 83 of the member holder 81 functions as a cylinder member having a recessed portion 82 into which the piston member 71 enters. At this time, compressed air is injected into the recessed portion 82 from the air injection port 73 of the piston member 71, and the pressure in the space between the bottom surface of the recessed portion 82 and the lower surface of the piston member 71 is increased. Next, in a state having the space in the recessed portion 82, the cleaning member 63 abuts against the plate-like object W, thereby pressing the space in the recessed portion 82 along the piston member 71, and the cleaning member 63 together with the member holder 81 was swung up and down.

As described above, in the cleaning means 60 of the second modification, an air spring is used instead of a spring, and the operation of the cleaning member 43 can follow the upper surface Wa of the curved plate W without using a spring or the like. . In addition, since the member holder 81 swings in the up and down direction directly above the abutting position of the cleaning member 63 and the upper surface Wa of the plate-like object W, the deviation of the member holder 81 when it swings is suppressed. Among them, the pressure in the recess 82 The value is adjusted to an appropriate value depending on the type of the plate-like object W.

Among them, the washing means 20 is not only the washing means 40 and 60 of the above-mentioned first and second modified examples, but also other modified examples. For example, it may be a configuration in which the holder plate 51 is removed by the cleaning member 40 of the first modification, or a configuration in which the member holder 56 is connected to the extension plate 48 through a single spring 55.

Moreover, in this embodiment and each modification, although the washing means 20, 40, and 60 are preferably formed from the resin material with high chemical resistance, it is not limited to this structure. For example, it may be formed of a metal material having high chemical resistance, and if it is a cleaning solution that does not contain a drug, a material having low chemical resistance may also be used.

In addition, in this embodiment and each modification, although the holding means 10 hold | maintains the outer peripheral edge of the plate-shaped object W by the several clamp arm 11, it is not limited to this structure. The holding means 10 may be a configuration capable of holding the outer peripheral edge of the plate-like object W, and may be configured to hold the plural advance and retreat pins by contacting the outer peripheral edge of the plate-like object W, for example.

In addition, in this embodiment and each modification, the cleaning liquid spraying means is configured by the spraying port 14 and the spraying nozzle 15 of the rotary table 12, but it is not limited to this configuration. The cleaning liquid spraying means may be configured so that the cleaning liquid can be sprayed on the upper surface Wa and the lower surface Wb of the plate-shaped object W, and for example, it may be configured by upper and lower spray nozzles provided above and below the plate-shaped object W.

In addition, in this embodiment and each modification, the washing structure The tool 23 is formed in a sponge shape, but is not limited to this configuration. The cleaning member 23 only needs to be capable of brushing and cleaning the plate-like object W, and may be formed into a brush shape, for example.

In addition, in the present embodiment and each modification, the configuration is such that the cleaning member 23 is rotated by the swinging portion 21 and the cleaning member 23 is swung in the radial direction of the plate-like object W, but it is not limited to this configuration. . The swinging portion 21 may be configured to swing the cleaning member 23 in the radial direction of the plate-like object W. For example, the cleaning member 23 may be moved linearly to make the cleaning member 23 in the radial direction of the plate-like object W. swing.

[Industrial availability]

As described above, the present invention has the effect of easily constructing a plate-like object even if it is a highly warped plate-like object, and it is particularly useful for a plate-like object that is subject to severe warpage. A washing device for washing.

10‧‧‧ Means of retention

11‧‧‧ Clamp Arm

12‧‧‧ rotating platform

13‧‧‧platform surface

14‧‧‧ spraying port (washing liquid spraying means)

15‧‧‧ spray nozzle (washing liquid spray means)

16, 17‧‧‧ supply source (washing liquid spraying means)

20‧‧‧washing means

21‧‧‧Swing section

22‧‧‧ followers

23‧‧‧washing components

25‧‧‧Guide Board

28‧‧‧ vertical guide

31‧‧‧Retainer plate (retainer)

32‧‧‧ Slider

35‧‧‧Spring

36‧‧‧ component holder (holder)

W‧‧‧ Plate

The top of Wa‧‧‧ plate

Wb‧‧‧ Under the plate

Claims (3)

A washing device comprising: a holding means for holding a plate-like object on its outer periphery and rotating the plate-like object in a circumferential direction; and a washing means for washing a rotating plate-like object held by the holding means and rotating. And a cleaning liquid spraying means for spraying a cleaning liquid on each of the upper and lower surfaces of the plate-shaped object held by the holding means, the cleaning device is characterized in that the cleaning means is provided with: abutting against the plate A cleaning member for cleaning the plate-like object on the upper surface of the object; and swinging the cleaning member in the radial direction of the plate-like object and following the swinging part of the upper surface of the curved plate-like object to abut the substrate The holding member is held on the upper surface of the plate-like object, and the cleaning member cleans the upper surface of the plate-like object along the upper surface of the plate-like object. For example, the cleaning device of the scope of application for a patent, wherein the swinging part is provided with: a vertical guide which is arranged at the front end of the swing and guides the cleaning member in a vertical direction; the cleaning member is held and the A retainer guided to the vertical guide; and a spring fixed to the front end of the swinging portion in a state where the retainer is guided to the vertical guide, is stretched and contracted by the spring along the vertical The guide, the holder and the cleaning member swing up and down to follow the upper surface of the curved plate. For example, the cleaning device of the scope of application for a patent includes: a piston member that is arranged at the front end of the swinging part and extends vertically downward; a recessed part that is engaged with the piston member and can be vertically oriented; A driven cylinder member; an air injection port that injects compressed air vertically downward in the recess of the cylinder member; and the cleaning member disposed on the lower side of the cylinder member and the air injection port of the piston member In a state where compressed air is sprayed into the recess and there is space in the recess, the cleaning member abuts a plate, and swings up and down along the piston member, the cylinder member and the cleaning member to follow The top of a curved plate.