TW201806839A - Apparatus and method for sorting double substrates - Google Patents

Abstract

The invention discloses a device and a method for selecting dual substrates. The dual substrate selecting device includes a substrate conveying device, a substrate guide width adjusting device, a substrate holder and a substrate holder conveying device. The dual-substrate selection method includes the following steps: moving the dual-substrate selection device to a position where a box is configured; changing the substrate guide member to correspond to the size of the substrate stored in the box so as to adjust the width; adjusting the clamping The width of the component; moving forward to clamp the substrate by the clamping members; moving to provide the substrate for a cassette configured at a different position; and releasing the clamping state of the clamping member.

Description

Device and method for selecting dual substrates

Cross Reference to Related Applications This application claims Korean Patent Application No. 10-2016-0104434, filed with the Korean Intellectual Property Office on August 17, 2016, the disclosure of which is incorporated herein by reference.

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a device and method for selecting dual substrates, and more particularly to a device and method for selecting dual substrates arranged in a cassette.

2. Description of Related Technology Generally, a semiconductor manufacturing system is configured by an automatic conveying device in a stocker for storing a plurality of cassettes for storing a plurality of substrates and a unit for performing unit processing of the substrates. The cassettes are transported between unit processing units. The automatic conveying device can sequentially convey a plurality of cassettes between the stocker and the unit processing device according to a preset program.

Korean Patent No. 10-1467523 (Patent Document 1) discloses a device for conveying a substrate, which includes a shuttle unit that conveys at least a pair of substrates at the same height from one side to the other in parallel with each other A buffer unit for arranging the substrates conveyed through the shuttle unit from one side to the other in parallel; a selector having a plurality of shelves arranged in the height direction to support the And other substrates, so that the substrates are placed on each shelf and loaded toward the height direction; a positioning unit, which stacks the substrates in a vertical direction when conveying at least one pair of substrates arranged parallel to each other to the selector; The substrates are on the shelves; and a control unit for storing the substrates loaded on the shelves of the selector. In Patent Document 1, the shuttle unit 110 that transports and places the inspected substrates on the buffer unit 120 includes a first track 112, a first slider 114, and a picker 116. In addition, the selector 160 of Patent Document 1 for loading a substrate conveyed by the positioning unit 130 has a plurality of shelves provided in the height direction. Since the substrates are arranged one by one toward the height direction and loaded on the shelves, the positioning unit is stacked in the vertical direction and the substrates arranged in parallel are loaded on the selector. However, since the picker 116 of the shuttle unit 110 is fixed, Patent Document 1 has a disadvantage that it cannot cope with various substrates. In addition, since the pick-up state of one of the substrates cannot be checked, Patent Document 1 has a defect that cannot be avoided when the substrates are sucked.

Related Technical Literature Patent Literature

Patent Document 1: Korean Patent No. 10-1467523 approved on November 25, 2014

SUMMARY OF THE INVENTION Accordingly, the present invention has been made in view of the above-mentioned problems occurring in the conventional technology, and an object of the present invention is to provide a device and method for selecting dual substrates, which can freely place a plurality of substrates. The cassettes are in multiple cassettes and the substrates are removed from the cassettes.

Another object of the present invention is to provide a device and method for selecting dual substrates, which can place a plurality of substrates in a plurality of cassettes and a The substrates are taken out of the cassettes, thereby increasing work efficiency.

In order to achieve the above object, according to the present invention, a device for selecting dual substrates is provided, which is arranged on one side of a Z-axis conveying unit disposed on a Y-axis conveying unit and moves laterally and is clamped and arranged on A plurality of substrates in a box for inserting and removing the substrates. The dual-substrate selection device includes: a substrate-guided conveying device including: an upper plate having first sections configured to be separated from each other by a predetermined distance; A linear motion track; a support plate disposed below the upper plate and having a second linear motion track configured to be separated from each other by a predetermined distance; a plurality of moving plates each connected to the support plate by a vertical frame and having A first linear motion guide connected to the first linear motion track; a connecting plate connected to the moving plates and having one side configured with a ball screw; a first driving source having the ball screw connected to the connecting plate A connected side; and a plurality of substrate guide members arranged below the support plate and moving back and forth with the support plate according to one of the support plates; a substrate guide width adjustment It includes: a plurality of substrate guide members arranged below the support plate and moving sideways with the support plate along the second linear motion tracks of the support plate; and a plurality of links configured On the adjustment plates connected to the substrate guide members; a rotating plate whose two sides are respectively connected to the connecting rods; and a second driving source which is connected to the rotating plate; a substrate clip A holder includes: a lower plate disposed below the upper plate and having a third linear motion track configured to be separated from each other by a predetermined distance; a plurality of moving blocks each having a lower portion disposed below the moving block and connected to the lower plate; A third linear motion guide combined with each third linear motion track of the board and a fourth linear motion track arranged above the moving block; a plurality of support blocks each having the fourth linear motion with the moving block A fourth linear motion guide connected by the track; a plurality of gripper cylinders which are separately connected to the support blocks; and a plurality of gripping members which are separately connected with the gripper cylinders to hold the And other substrates; and a substrate holder The conveying device includes: a pair of first and second pulleys, which are arranged outside the third linear motion tracks arranged on the lower plate and separated from each other by a predetermined distance; a plurality of belts which are fitted in the Between the first and second pulleys; and a plurality of third driving sources respectively connected to the first pulleys.

Another aspect of the present invention provides a method for sorting dual substrates, which includes the following steps: (S10) moving a dual substrate sorting device to a position configured with a box; (S20) operating a substrate guide width The adjustment device corresponds to the size of the substrate stored in the cassette so as to adjust the width by changing the substrate guide members; (S30) When the adjustment of the width by changing the substrate guide members is completed, the substrate is operated by The material guide conveying device moves the substrate guide members forward; (S40) When the forward movement of the substrate guide members is completed, the holder members of the substrate holder are moved forward; (S50) ) The substrates stored in the box are clamped by the clamping members; (S60) The clamping members are moved backward in the state of clamping the substrates; (S70) When the When the holding member is moved backward, the substrate guide members are moved backward; (S80) the dual substrate selection device is moved to another position configured with a cassette; (S90) by operating the substrate guide conveying device, The substrate guide members move forward; (S100) When the substrate guide is completed When the component moves forward, the holding members holding the substrate S are moved forward; (S110) the holding members holding the substrate are arranged at a plurality of different positions. The plurality of cassettes provide a plurality of substrates and release the clamping state of the clamping members; (S120) when the clamping state of the clamping members is released, the clamping members are moved backward; and ( S130) When the backward movement of the clamping members is completed, the substrate guide members are moved backward.

As described above, the apparatus and method for selecting dual substrates according to the preferred embodiments of the present invention can continuously insert at least one or more substrates into and remove the substrates from the cassettes. To increase work efficiency.

In addition, even if it is a single device, since it can cope with various substrates arranged on various cassettes, that is, substrates having different sizes, a device for selecting dual substrates according to a preferred embodiment of the present invention And methods can still implement various functions, thereby reducing manufacturing costs.

DETAILED DESCRIPTION Hereinafter, an exemplary embodiment of an apparatus for selecting a dual substrate according to the present invention will be described with reference to the accompanying drawings.

As shown in FIGS. 4 to 6, the dual substrate selection device 300 includes a substrate guide conveying device 350, a substrate guide width adjusting device 380, a substrate holder 450 and a substrate holder conveying device 460. .

As shown in FIGS. 1 to 3, the dual substrate sorting device 300 is disposed on one side of a Z-axis conveying unit 200 disposed on a Y-axis conveying unit 100 and can move laterally, and has clamping and insertion And the function of taking out a substrate S arranged in a box M. As shown in FIG. 4, the dual substrate selection device 300 further includes a substrate condition detecting device 400 disposed on a side of a lower plate 402 disposed below an upper plate 302 to detect the state of the substrate S. It can be understood that the substrate state detection device 400 is a detection device each having a camera and a lighting unit.

As shown in FIG. 2, the Y-axis conveying unit 100 includes a substrate 104, a moving plate 108, a ball screw 110, a servo motor 112, and a pair of sensors 114. The linear motion rails 102 are disposed on the substrate 104 and separated from each other by a predetermined distance, and are movably combined with the linear motion guides 106, and the linear motion guides 106 are disposed below the moving plate 108 and separated from each other by a predetermined distance. The ball screw 110 is disposed between the linear motion rails 102 of the substrate 104, and has one side connected to the moving plate 108 and the other side connected to the servo motor 112, and the servo motor 112 is a driving source. In addition, a pair of sensors 114 are disposed on two sides of the linear motion tracks 102 and are separated from each other, and the linear motion tracks 102 are disposed on the substrate 104.

The sensors 114 are used to sense and check the movement status of one of the moving boards 108.

As shown in FIG. 3, the Z-axis conveying unit 200 includes a connection plate 201, a base plate 204, a moving plate 208, a ball screw 210, a servo motor 212, and a pair of sensors 214.

The connecting plate 2-1 is disposed on the moving plate 108 of the Y-axis conveying unit 100, so that the Z-axis conveying unit 200 can move according to the movement of the Y-axis conveying unit 100. The vertical substrate 204 is vertically disposed on the connecting plate 201, and the linear motion rails 202 are disposed to be separated from each other by a predetermined distance. The moving plate 208 is disposed on the upper portion of the vertical substrate 204 and includes linear motion guides 206 respectively connected to the linear motion rails 202. A supporting member 205 for accommodating one of the dual substrate selecting devices 300 is disposed on the moving plate 208. The ball screw 210 is disposed between the linear motion rails 202 of the vertical substrate 204, and the ball screw 210 has one side connected to the moving plate 208 and the other side connected to the servo motor 212, and the servo motor 212 A drive source. In addition, a pair of sensors 214 are disposed on two sides of the linear motion track 202 and are separated from each other, and the linear motion tracks 202 are disposed on the substrate 204. The sensors 214 are used to sense and check the movement status of one of the moving boards 208. That is, the sensor 214 senses and checks the moving state of the dual-substrate selection device 300, and the dual-substrate selection device 300 is connected to the moving plate 208 and is disposed on the supporting member 205.

As shown in FIGS. 4 and 5, the substrate guiding and conveying device 350 includes an upper plate 302, a supporting plate 306, a moving plate 310, a connecting plate 312, a first driving source 330 and a substrate guiding member 332.

A rectangular opening (not shown) is formed in the middle of the upper plate 302, and the first linear motion track 304 is disposed on both sides of the opening and separated from each other by a predetermined distance. The support plate 306 is disposed below the upper plate 302 and has second linear motion tracks 324 configured to be separated from each other by a predetermined distance.

The moving plates 310 are respectively connected to the support plate 306 through a vertical frame 307 and include first linear motion guides 308 respectively connected to the first linear motion rails 304 disposed on the upper plate. The connecting plate 312 is connected to the moving plates 310 and the ball screw 314 is disposed on one side of the connecting plate 312. The ball screw 314 is rotatably fitted into a bracket 317 through a connecting portion 315 disposed in the middle of the connecting plate 312. Because one side of the ball screw 314 is connected to the first driving source 330 and the other side is fitted in the bracket 317, when the first driving source 330 is operated, the connection plate 312 is along the ball screw 314 Move, and the moving plate 310 moves according to the movement of the connecting plate 312. The first driving source 330 is a servo motor that moves the substrate guiding members forward or backward.

The substrate guide members 332 are disposed below the support plate 306 and move together with the support plate 306 when the support plate 306 moves forward or backward. That is, the substrate guide members 332 are respectively coupled to the adjustment plates 320, and each adjustment plate 320 has a second linear motion guide 328, and the second linear motion guide 328 is fitted in the support In the second linear motion track 324 under the plate 306.

When the first driving source 330 is operated, the connecting plate 312 moves along the ball screw 314. When the moving plates 310 connected to the connecting plate 312 move along the first linear motion rails 304, because the moving plates 310 are connected to the support plate 306 through the vertical frames 307, the moving plates When 310 moves, the support plate 306 also moves. In addition, since the adjustment plates 320 are connected to the support plate 306 and the substrate guide members 332 are integrally connected to the adjustment plates 320, the substrate guide members 332 can be used to guide the substrates S.

As shown in FIGS. 4 to 6, the substrate guide width adjusting device 380 includes the substrate guide members 332, a connecting rod 334, a rotating plate 335, and a second driving source 340.

As shown in FIGS. 4 and 5, the substrate guiding members 332 are disposed below the support plate 306 and are assembled to move laterally along a second linear movement track 324 of the support plate 306. That is, the substrate guide members 332 are separately connected to the adjustment plates 320 and move with the adjustment plates 320 in accordance with the movement of the adjustment plates 320, and the adjustment plates 320 have a second linear motion with the second linear motion. The rails 324 are respectively connected to the second linear motion guides 328, and the second linear motion rails 324 are separated from each other under the support plate 306.

As shown in FIG. 8, the connecting rods 334 are disposed on the adjustment plates 320 connected to the substrate guide members 332. Two sides of the rotating plates 335 are respectively connected to the connecting rods 334, and the rotating plate 335 is connected to a shaft (not shown) of the second driving source 340 to rotate together with the connecting rods 334. The second driving source 340 is a servo motor for adjusting the width of the substrate guiding members 332 according to the type of the substrates S.

In the case of the substrate guide width adjusting device 380, when the second driving source 340 is operated, as shown in FIG. 8, the rotating plate 335 is rotated, and in this case, the rotating plate 335 is connected to the rotating plate 335. The connecting rod 334 also rotates. Since the width of the adjustment plates 320 is adjusted by the rotation of the links 334, the width of the substrate guide members 332 connected to the adjustment plates 320 can be adjusted.

As shown in FIGS. 4 and 6, the substrate holder 450 includes a lower plate 402, a moving block 410, a support block 420, a holder cylinder 430 and a holding member 440.

The lower plate 402 has a third linear motion track 404, and the third linear motion tracks 404 are connected to each other under the upper plate 302 by a plurality of frames 401 and are arranged to be separated from each other by a predetermined distance. The third linear motion guides 406 which are respectively engaged with the third linear motion track 404 of the lower plate 402 are respectively disposed under the moving blocks 410, and the fourth linear motion track 414 are respectively disposed under the moving blocks 410. The upper parts are separated from each other by a predetermined distance. The support blocks 420 include fourth linear motion guides 416 respectively connected to the fourth linear motion track 414 of the moving blocks 410. The holder cylinders 430 are respectively connected to the support blocks 420, and the holding members 440 are separately connected to the holder cylinders 430 so as to hold the substrates S.

The holding members 440 are disposed on the support blocks 420 and the support blocks 420 having the fourth linear motion guide 416 are moved along a fourth linear motion track 414 disposed on the moving blocks 410, The width of the clamping members 440 can be adjusted. In addition, as shown in FIG. 7, in order to avoid interference with each other when the substrates S are clamped, the clamping members 440 are disposed at mutually different heights so as to individually or simultaneously clamp the substrates S. That is, when the holding members 440 hold the substrate S, only one of the two holding members 400 may be individually moved or all the holding members 440 may be moved simultaneously.

The substrate holder 450 is assembled so that the support blocks 420 provided with the holding members 440 and the holder cylinders 430 can move along the third linear movement track 404 and the fourth The linear motion track 414 moves in a back-and-forth direction and a side direction. The holding members 440 simultaneously operate the holder cylinders 430 to hold the substrates S. In other words, when the holder cylinders 430 are operated in a state where the holding members 440 are separated from each other, a distance between the holding members 440 is reduced so that the holding members 440 can hold the bases.材 S. After the substrates S are moved to a predetermined position where the cassette M is set, when the operation of the holder cylinders 430 is stopped, the holding members 440 return to their initial states.

At the same time, the ball bushings 422 respectively arranged on the upper part of the support block 420 of the substrate holder 450 are respectively fitted to the connection members 342 which are separately and integrally connected to the bottom side of the substrate guide members 332. Long hole 344, so when adjusting the width of the substrate guide members 332, the support blocks 420 also move along the fourth linear movement track 414 toward the side (width direction), so that the clamping The width of the member 440 can also be adjusted.

As shown in FIGS. 4 and 6, the substrate holder conveying device 460 includes a pair of first and second pulleys 452 and 454, a belt 456, and a third driving source 458.

The first and second pulleys 452 and 454 are respectively disposed outside the third linear motion track 404 disposed on the lower plate 402 and spaced apart from each other. The belts 456 are fitted between the first and second pulleys 452 and 454, respectively. The third driving sources 458 are respectively connected to the first pulley 452.

The substrate holder conveying device 460 is configured so that when the third driving sources 458 are operated, the first pulleys 452 connected to a shaft (not shown) of the third driving sources 458 are operated. . In this case, the second pulleys 454 connected to each other by the first pulleys 452 and the belts 456 also rotate. Thereby, the moving blocks 410 move in the vertical direction (toward the back and forth direction) along the third linear movement track 404. That is, since the holding members 440 of the supporting blocks 420 arranged on the moving blocks 410 move in a vertical direction, the holding members 440 may face the substrates arranged in the cassette M at a predetermined position. S moves forward, and moves backward after clamping the substrates S, and removes the substrates S.

Hereinafter, the operation relationship of the dual-substrate selection device according to the preferred embodiment of the present invention will be described.

As shown in FIGS. 1 to 4, the dual substrate selecting apparatus according to the preferred embodiment of the present invention uses the Y-axis conveying unit 100 and the Z-axis conveying unit 200 to move to a predetermined position where the cassette M is arranged.

When the dual substrate selection device 300 is moved to the predetermined position, it operates the first driving source 330 of the substrate guide conveying device 350. When the first driving source 330 is operated, the connecting plate 312 moves along the ball screw 14, and then the moving plate 310 connected to the connecting plate 312 moves along the first linear motion rails 304. In addition, since the moving plate 310 is connected to the supporting plate 306 through the vertical frame 307, when the moving plate 310 moves, the supporting plate 306 also moves. Since the adjustment plates 320 are connected to the support plate 306 and the substrate guide members 332 are integrally connected to the adjustment plates 320, the substrate guide members 332 move forward to guide the substrates S.

The first drive source 330 of the substrate guide conveying device 350 is operated, and the second drive source 340 of the substrate guide width adjusting device 380 is operated at the same time or after a predetermined time interval. When the second driving source 340 is operated, the rotating plates 335 rotate, and in this case, the connecting rods 34 connected to the rotating plate 335 on one side also rotate. Since the width of the adjustment plates 320 can be adjusted by the rotation of the links 34, the width of the substrate guide members 332 connected to the adjustment plates 320 can also be adjusted.

At the same time, because the substrate holder 450 is assembled so that the supporting blocks 420 provided with the holding members 440 and the holder cylinders 430 can move along the third linear movement track 404 and the The fourth linear motion track 414 moves toward the back and forth direction and the side direction, so the clamping members 440 can clamp the substrate S by operating the clamper cylinders 430.

This is because the full bushes 422 that are separately arranged on the upper part of the support block 420 of the substrate holder 450 are fitted to the connection members 342 that are separately and integrally connected to the lower part of the substrate guide members 332. In the long hole 344, as soon as the width of the substrate guide members 332 is adjusted, the support blocks 420 move along the fourth linear movement track 414 toward the side (width direction), so that the clamps The width of the member 440 can also be adjusted.

When the third driving sources 458 are operated, the first pulleys 452 connected to a shaft (not shown) of the third driving sources 458 are also operated. In this case, the second pulleys 454 connected to each other by the first pulleys 452 and the belts 456 are also operated, and then the moving blocks 410 are moved along the third linear movement track 404 toward the vertical Direction (toward the back and forth direction).

Hereinafter, a method for selecting dual substrates according to a preferred embodiment of the present invention will be described.

As shown in FIGS. 9 and 10, the dual substrate selection method includes the following steps: (S10) moving the dual substrate selection device 300 to a position where the cassette M is arranged; (S20) operating the substrate guide width adjustment The device 380 corresponds to the size of the substrate S stored in the cassette M so as to adjust the width by changing the substrate guide members 332; (S30) When the adjustment of the width by changing the substrate guide members 332 is completed , By moving the substrate guide conveying device 350 to move the substrate guide members 332 forward; (S40) When the forward movement of the substrate guide members 332 is completed, the substrate holder 450 is moved. The clamping members 440 are moved forward; (S50) The substrates S stored in the cassette M are clamped by the clamping members 440; (S60) In a state of clamping the substrates S Move the clamping members 440 backward; (S70) When the backward movement of the clamping members 440 is completed, move the substrate guide member 332 backward; (S80) Move the dual substrate selection device 300 to One position of a box M is arranged; (S90) the substrate guide members 332 are advanced by operating the substrate guide conveying device 350 Move; (S100) when the forward movement of the substrate guide members 332 is completed, the holding members 440 holding the substrate S are moved forward; (S110) by holding the substrates The clamping members 440 of the material S to provide a plurality of substrates S for the cassettes M arranged at a plurality of different positions and release the clamping state of the clamping members 440; (S120) when the clamping is released When the clamping state of the members 440 is made, the clamping members 440 are moved backward; and (S130) When the backward movement of the clamping members 440 is completed, the substrate guide members 332 are moved backward.

As shown in FIG. 11, the step (S10) of moving the dual-substrate selection device 300 to a position where the cassette M is disposed includes the following steps: (S12) moving the dual-substrate selection device 300 along the Y axis A Y-axis of the transport unit 100; and (S14) moving the dual substrate sorting device 300 to a Z-axis of the Z-axis transport unit 200.

In the step (S12) of moving the dual substrate sorting device 300 to the Y axis of the Y axis conveying unit 100, the moving plate 108 connected to the connection plate 201 disposed at the lower portion of the Z axis conveying unit 200 Movement, and the sensors 114 disposed on both sides of the substrate 104 sense the movement of the moving plate 108.

In the step (S14) of moving the dual-substrate selection device 300 to the Z-axis along the Z-axis conveying unit 200, the dual-substrate selection device 300 is disposed on a support member 205 connected to the moving plate 208, And in a state where the dual-substrate selection device 300 is disposed on the supporting member 205, the moving plate 208 moves along the linear movement tracks 202. Here, when the servo motor 212 is operated, the moving plate 208 moves according to the movement of the ball screw 210.

As shown in FIG. 12, the step of operating the substrate guide width adjusting device 380 to correspond to the size of the substrates S stored in the cassette M so as to adjust the width by changing the substrate guide members 332 (S20) It further includes the following steps: (S22) operating the second driving source 340 to operate the rotating plate 336 and the links 334 connected to the second driving source 340; and (S24) by operating the links 334 to The substrate guide members 332 connected to the adjustment plates 320 are operated.

In the step (S22) of operating the second driving source 340 to operate the rotating plate 336 and the links 334 connected to the second driving source 340, when the second driving source 340 is operated, the second driving source 340 is connected to the second driving source 340. The rotating plate 336 connected to a shaft (not shown) of the driving source 340 rotates, and then the connecting rods 334 connected to the rotating plate 336 also rotate. In the step (S24) of operating the substrate guide members 332 connected to the adjustment plates 320 by operating the links 334, the state of the links 334 is caused by the rotation of the rotary plate 336 A linear state is changed to an inclined state, so that the widths of the substrate guiding members 332 with the adjusting plates 320 can be adjusted.

As shown in FIGS. 9 and 10, the dual substrate selection method further includes the following steps: (S25) The substrate guide width adjusting device 380 is implemented to correspond to the sizes of the substrates S stored in the cassette M so that After the step (S20) of adjusting the width by changing the base material guide members 332, according to the base material guide member 332 having an adjusted width corresponding to the size of the base material S, the arrangement of the holding members 440 is changed. The supporting blocks 420 are waited for adjusting the width of the clamping members 440. That is, when the second driving source 340 is operated, the substrate guide width adjusting device 380 of the dual substrate selecting device according to the present invention makes the rotating plates 335 and the two sides disposed on the adjusting plates 320 and the rotating plate 335 The connected links 334 rotate, thereby adjusting the width of the substrate guide members 332 for the first time. In addition, since the ball bushings 422 of the support blocks 420 are fitted in the long holes 344 of the connection members 342 disposed below the substrate guide members 332, the substrate guide members 332 are adjusted The width of the supporting blocks 420 moves along the fourth linear movement track 414 toward the side (width direction), so that the width of the clamping members 440 is adjusted for the second time.

When the substrate guide members 332 are changed and the width adjustment is completed, as shown in FIG. 13, the step (S30) of moving the substrate guide members 332 forward by operating the substrate guide conveying device 350 includes the following: Steps: (S32) operating the first driving source 330 so as to operate the ball screw 314 connected to the first driving source 330 and move the connection plate 312 and the moving plate 310 connected to the connection plate 312; and (S34) The support plate 306 connected to the moving plate 310 through the vertical frame 307 and the substrate guide members 332 connected to the support plate 306 are moved.

In the step (S32) of operating the first driving source 330 to operate the ball screw 314 connected to the first driving source 330 and moving the connection plate 312 and the moving plate 310 connected to the connection plate 312, when operating When the first driving source 330, the connecting plate 312 moves along the ball screw 314, and then the moving plates 310 connected to the connecting plate 312 move along the first linear motion track 304.

In the step (S34) of moving the support plate 306 connected to the moving plate 310 through the vertical frame 307 and the substrate guide members 332 connected to the support plate 306, the moving plate 310 passes through the vertical frame 307 is connected to the supporting board 306, so when the moving board 310 moves, the supporting board 306 also moves. Because the adjustment plates 320 are connected to the support plate 306 and the substrate guide members 332 are integrally connected with the adjustment plates 320, the substrate guide members 332 are moved forward to guide the substrates S.

As shown in FIG. 14, when the forward movement of the substrate guide members 332 is completed, the step of moving the holding members 440 of the substrate holder 450 forward (S40) includes the following steps: (S42 ) Decide whether to move one or all of the holding members 440 forward; and (S44) operate the third driving source 458 to move the moving block 410 to one of the cassettes M position.

In a step (S42) of deciding whether to move one or all of the clamping members 440 forward, a control unit (not shown) decides whether to make one or all of the clamping members 440 The holding member moves forward.

As shown in FIG. 15, the step (S50) of holding the substrates S stored in the cassette M by the holding members 440 includes the following steps: (S52) operating the holder cylinders 430 to borrow The substrates S are clamped by the clamping members 440; and (S54) when the substrates S are clamped by the clamping members 440, the substrates S are inspected by the substrate state detecting device 400 Its clamping state.

Because the step (S52) of holding the base material S by the holding members 440 and the step (S54) of checking the holding state of the base material S are similar to the operation relationship of the dual base material selection device 300, Therefore, its detailed description is omitted.

As described above, the dual substrate selection method according to the preferred embodiment of the present invention can perform various operations by a single device because it can adjust the width of the substrate guide members and adjust the The width of the clamping member. In addition, because the holding members are arranged at different heights to avoid mutual interference, the holding members can hold the substrates individually or simultaneously.

The device and method for sorting dual substrates according to the present invention can be widely used in the field for manufacturing semiconductors, such as semiconductor devices inserted into and removed from multiple cases.

100‧‧‧Y-axis conveying unit
102,202‧‧‧Straight motion track
104,204‧‧‧ substrate
106,206‧‧‧ Linear Motion Guide
108,208,310‧‧‧Mobile board
110,210,314‧‧‧ball screw
112,212‧‧‧Servo motor
114,214‧‧‧ sensors
200‧‧‧Z axis conveying unit
201,312‧‧‧Connecting plate
205‧‧‧Support components
300‧‧‧Dual substrate selection device
302‧‧‧on board
304‧‧‧The first linear motion track
306‧‧‧Support board
307‧‧‧Vertical Frame
308‧‧‧The first linear motion guide
315‧‧‧Connection Department
317‧‧‧carriage
320‧‧‧ Adjustment board
324‧‧‧Second linear motion track
328‧‧‧Second linear motion guide
330‧‧‧first drive source
332‧‧‧ substrate guide member
334‧‧‧ connecting rod
335,336‧‧‧Rotating plate
340‧‧‧Second drive source
342‧‧‧Connecting components
344‧‧‧long hole
350‧‧‧ substrate guide conveying device
380‧‧‧ substrate guide width adjustment device
400‧‧‧ substrate condition detection device
401‧‧‧Frame
402‧‧‧Lower plate
404‧‧‧The third linear motion track
406‧‧‧The third linear motion guide
410‧‧‧moving block
414‧‧‧Fourth linear motion track
416‧‧‧Fourth linear motion guide
420‧‧‧ support block
422‧‧‧ball bush
430‧‧‧ gripper cylinder
440‧‧‧Clamping member
450‧‧‧ substrate holder
452‧‧‧The first pulley
454‧‧‧second pulley
456‧‧‧Belt
458‧‧‧third drive source
460‧‧‧ substrate holder conveying device
M‧‧‧ box
S‧‧‧ substrate
S10, S12, S14, S20, S22, S24, S25, S30, S32, S34, S40, S42, S44, S50, S52, S54, S60, S70, S80, S90, S100, S110, S120, S130 step

Brief Description of the Drawings The above and other objects, features and advantages of the present invention can be understood from the following detailed description of the preferred embodiments of the present invention in conjunction with the drawings, wherein:

FIG. 1 is a perspective view briefly showing a device for selecting dual substrates according to a preferred embodiment of the present invention; FIG.

2 is a cross-sectional view showing a Y-axis conveying unit of a dual substrate selecting device according to a preferred embodiment of the present invention;

3 is a cross-sectional view showing a Z-axis conveying unit of a dual substrate selecting device according to a preferred embodiment of the present invention;

4 is a perspective view showing a device for selecting dual substrates according to a preferred embodiment of the present invention;

5 is a perspective view showing a substrate guide conveying device and a substrate guide width adjusting device of a dual substrate selection device according to a preferred embodiment of the present invention;

6 is a perspective view showing a substrate holder and a substrate holder conveying device of a dual substrate selection device according to a preferred embodiment of the present invention;

7 is a cross-sectional view showing a substrate holding member of a dual substrate selection device according to a preferred embodiment of the present invention;

8 is a cross-sectional view showing an operation relationship between a rotating plate and a plurality of links of the substrate guide width adjusting device of the dual substrate selecting device;

9 and 10 are flowcharts showing a method for selecting dual substrates according to a preferred embodiment of the present invention;

11 is a flowchart showing the steps of moving the dual-substrate selection device to a position where one of the cassettes is arranged;

12 is a flowchart showing the operation of the substrate guide width adjusting device to correspond to the size of the substrate stored in the cassette so as to adjust the width by changing the substrate guide member;

13 is a flowchart showing the steps of moving the substrate guide members forward by operating the substrate guide conveying device when adjusting the width by changing the substrate guide members;

14 is a flowchart showing the steps of moving the holding members of the substrate holder forward when the forward movement of the substrate guide members is completed; and

FIG. 15 is a flowchart showing the steps of holding the substrates stored in the cassette by the holding members.

100‧‧‧Y-axis conveying unit

200‧‧‧Z axis conveying unit

300‧‧‧Dual substrate selection device

M‧‧‧ box

S‧‧‧ substrate

Claims (16)

A device for selecting dual substrates, which is arranged on one side of a Z-axis conveying unit arranged on a Y-axis conveying unit to move laterally and clamps a plurality of substrates arranged in a box for insertion And taking out the substrates, the dual substrate selection device includes: a substrate guide conveying device comprising: an upper plate having first linear motion tracks configured to be separated from each other by a predetermined distance; a support plate having a configuration Below the upper plate, there is a second linear motion track configured to be separated from each other by a predetermined distance; a plurality of moving plates, each connected to the support plate by a vertical frame, and having a first linear motion connected to the first linear motion track A guide; a connecting plate connected to the moving plates and having a side configured with a ball screw; a first driving source having a side connected to the ball screw of the connecting plate; and a plurality of substrates A guide member is disposed below the support plate and moves back and forth with the support plate according to one of the support plates. A substrate guide width adjusting device includes a plurality of substrate guide structures. Components, which are arranged below the support plate and move along with the support plate along the second linear motion tracks of the support plate; a plurality of connecting rods which are arranged in connection with the substrate guide members The adjusting plates; a rotating plate whose two sides are respectively connected with the connecting rods; and a second driving source which is connected to the rotating plate; a substrate holder comprising: a lower plate which A third linear motion track arranged below the upper plate and having a predetermined distance from each other; a plurality of moving blocks each having a third linear motion track arranged below the moving block and combined with each third linear motion track of the lower plate A third linear motion guide and a fourth linear motion track arranged above the moving block; a plurality of support blocks each having a fourth linear motion guide connected to the fourth linear motion track of the moving block A plurality of holder cylinders which are separately connected to the support blocks; and a plurality of holder members which are separately connected to the holder cylinders to hold the substrates; and a substrate holder Device, including: a pair A first and a second pulley, which are arranged outside the third linear motion tracks arranged on the lower plate and separated from each other by a predetermined distance; a plurality of belts which are fitted between the first and second pulleys; And a plurality of third driving sources respectively connected to the first pulleys. For example, the dual-substrate selection device of claim 1, wherein the Y-axis conveying unit includes: a substrate, the linear motion rails are arranged on the substrate and separated from each other; a moving plate, which is arranged above the substrate and has a distance from the substrate. A plurality of linear motion guides connected by an equal linear motion track; a ball screw arranged between the linear motion tracks of the substrate and having one side connected to the moving plate; a servo motor connected with the ball screw Connection; and a pair of sensors, which are arranged on both sides of the linear motion tracks arranged on the substrate and separated from each other by a predetermined distance. For example, the dual substrate selection device of claim 1, wherein the Z-axis conveying unit includes: a connecting plate arranged on the moving plate of the Y-axis conveying unit; a vertical substrate arranged vertically on the connecting plate And has a plurality of linear motion tracks separated by a predetermined distance from each other; a moving plate arranged on the upper part of the vertical substrate and having a plurality of linear motion guides connected to the linear motion tracks; a ball screw configured Between the linear motion tracks of the vertical substrate and one side connected to the moving plate; a servo motor connected to the ball screw; and a pair of sensors arranged on the vertical substrate These linear motion tracks are on both sides and separated from each other. For example, the dual-substrate selection device of claim 1 further includes: a substrate condition detection device, which is disposed on a side of the lower plate disposed below the upper plate and used to detect the status of the substrates. For example, the dual substrate selection device of claim 1, wherein the first driving source of the substrate guide conveying device is a servo motor for moving the substrate guide members forward and backward, and the substrate guide width The second driving source of the adjusting device is used to adjust the width of the substrate guide members corresponding to the type of the substrate. For example, the dual substrate selection device of claim 1, wherein the substrate guide members of the substrate guide conveying device are separately connected to the adjustment plates having a plurality of second linear motion guides, and according to the adjustment plates of the adjustment plates, Move along with the adjustment plates, and the second linear motion guides are respectively connected with the second linear motion tracks separated from each other under the support plate. If the dual substrate selection device of claim 1, wherein the substrate guide members of the substrate guide width adjusting device move together according to the movement of the rotary plate and the connecting rods arranged on the adjustment plates, and Both sides of the connecting rods are connected to the rotating plate. For example, the dual-substrate selecting device of claim 1, wherein the holding members of the substrate holder are arranged on the supporting blocks, and because the supporting blocks having the fourth linear motion guide follow The fourth linear motion orbits arranged on the moving blocks move, so the width of the clamping members can be adjusted. For example, the dual-substrate selection device of claim 1, in which the holding members of the substrate holder are arranged at different heights to individually or simultaneously in order to avoid mutual interference when holding the substrates. Hold these substrates. A method for sorting dual substrates, comprising the following steps: (S10) moving a dual substrate selection device to a position where there is a box; (S20) operating a substrate guide width adjusting device to correspondingly store in the box The size of the substrate in order to adjust the width by changing the substrate guide member; (S30) When the adjustment of the width by changing the substrate guide member is completed, the substrate guide conveying device is operated to make the substrate The material guide member moves forward; (S40) When the forward movement of the substrate guide members is completed, the holding members of the substrate holder are moved forward; (S50) by the holding The member clamps the substrates stored in the box; (S60) moves the clamping members backwards while holding the substrates; (S70) when the backward movement of the clamping members is completed , The substrate guide members are moved backward; (S80) the dual substrate selection device is moved to another position with a box; (S90) the substrate guide members are moved by operating the substrate guide conveying device Move forward; (S100) when the direction of the substrate guide member is completed When moving forward, the holding members holding the base material are moved forward; (S110) The holding members holding the base material are used to provide multiple boxes for the cassettes arranged at different positions. A substrate and release the clamping state of the clamping members; (S120) when the clamping state of the clamping members is released, the clamping members are moved backward; and (S130) when the clamping is completed When the holding member is moved backward, the substrate guide members are moved backward. For example, the dual substrate selection method of item 10, wherein the step (S10) of moving the dual substrate selection device to a position configured with a box includes the following steps: (S12) moving the dual substrate selection device to a A Y-axis of a Y-axis transport unit; and (S14) moving the dual substrate sorting device to a Z-axis of a Z-axis transport unit. As in the dual substrate selection method of claim 10, a step of operating a substrate guide width adjusting device to correspond to the sizes of the substrates stored in the cassette so as to adjust the width by changing the substrate guide member (S20 ) Includes the following steps: (S22) operating a second driving source to operate a rotating plate and a plurality of links connected to the second driving source; and (S24) operating and adjusting by operating the links The substrate guide members connected to the board. For example, the dual substrate selection method of claim 10 further includes the following steps: (S25) A substrate guide width adjustment device is implemented to correspond to the size of the substrate stored in the cassette so as to change the substrate guide member to After this step of adjusting the width (S20), according to the substrate guide members having the adjusted width corresponding to the size of the substrate, the supporting blocks configured with the clamping members are changed in order to adjust the clamping members. width. The dual substrate selection method of claim 10, wherein when the width adjustment by changing the substrate guide members is completed, the step of moving the substrate guide members forward by operating the substrate guide conveying device is completed (S30) includes the following steps: (S32) operating the first drive source to operate a ball screw connected to the first drive source and move a connection plate and a moving plate connected to the connection plate; and (S34) A supporting board connected to the moving board through a vertical frame and the substrate guiding members connected to the supporting board are moved. If the dual substrate selection method of claim 10 is used, the step (S40) of moving the holding members of the substrate holder forward when the forward movement of the substrate guiding members is completed includes the following: Steps: (S42) decide whether to move one or all of the clamping members forward; and (S44) operate a plurality of third driving sources to move the moving blocks to one of the cassettes position. For example, the method for selecting a dual substrate of item 10, wherein the step (S50) of clamping the substrates stored in the cassette by the clamping members includes the following steps: (S52) operating a plurality of holders To clamp the substrate by the clamping members; and (S54) when the substrate is clamped by the clamping members, inspect the clamping of the substrate by a substrate state detecting device Hold state.