TW201738189A - Dip head unit - Google Patents

Abstract

To increase the durability of the diamond tip of a scribing tool in a situation where the scribing tool is used to scribe a substrate made of brittle material. To apply pressure to a solid lubricant along a predetermined scribe line while moving the solid lubricant so as to apply the lubricant on the brittle material substrate. After the lubricant is applied, the scribing tool having a diamond tip is used to scribe along the predetermined scribe line. Consequently, the lubricating effect of the lubricant greatly increases the durability of the scribing tool. This invention further provides a scribing head unit, comprising a scribing tool having a tip using 1 or a plurality diamonds; a tool holding and fixing device, which is disposed in the scribing head unit for securing the scribing tool; a lubricant holding and fixing unit disposed in the scribing head unit and capable of freely moving upward and downward; a lubricant coating component composed of a solid lubricant and disposed on the bottom end of the lubricant holding and fixing unit for applying the lubricant on the predetermined scribe line; and a pressing mechanism for pressing the lubricant holding and fixing unit onto the brittle material substrate.

Description

Dip head unit

The present invention relates to a scribing head unit for scribing a brittle material substrate such as a glass substrate or a crucible wafer by a diamond tip.

Previously, in order to scribe a glass substrate or a tantalum wafer, a scribing wheel or a scribing tool using a diamond tip of a single crystal diamond was used. Conventionally, for the glass substrate, a scribing wheel that rotates with respect to the substrate is mainly used. However, the strength of the substrate after scribing is improved, and the use of a fixed edge, that is, a diamond tip, has been studied. Patent Documents 1 and 2 propose a sharp edge cutter for scribing a substrate having a high hardness such as a sapphire wafer or an alumina wafer. In these patent documents, a tool having a sharp edge on a ridgeline of a pyramid or a tool having a tapered front end is used. [Prior Art Document] [Patent Document 1] Japanese Laid-Open Patent Publication No. 2003-183040 (Patent Document 1) Japanese Patent Laid-Open Publication No. 2005-079529

[Problems to be Solved by the Invention] When a glass substrate is scribed by using a scribing tool of a diamond tip as a tool, the life of the diamond tip is short, and there are stages after the scribe line is tens of meters. The problem of damage. The present invention has been made to solve the above problems, and an object thereof is to provide a scribing head unit which can improve durability, extend life, and reduce replacement frequency of a scribing tool using a diamond tip when breaking a brittle material substrate. [Means for Solving the Problems] In order to solve the problem, the scribing head unit of the present invention performs scribing by pressing the tip end of the scribing tool against a brittle material substrate with a specific load and relatively moving it, and a scribing tool having one or a plurality of tips using a diamond; a tool holder attached to the scribing head unit to fix the scribing tool; and a lubricant retainer mounted on the upper and lower sides a scribing head unit; a lubricant coating member comprising a solid lubricant, being attached to a lower end of the lubricant holder, applying a lubricant to a predetermined line of scribing; and a pressing mechanism for the lubricant retainer Pressing on the above-mentioned brittle material substrate. Here, the lubricant application member may be a cylindrical fixed fixed lubrication wheel having a shaft core. Here, the scribing head unit may have a foreign matter removing mechanism that removes foreign matter of the brittle material substrate along a predetermined line of the scribe line. Here, the foreign matter removing mechanism may further include: a foreign matter removing holder attached to the scribing head; and a foreign matter removing member attached to a lower end of the foreign matter removing holder. Here, the pressing mechanism may be used as an air pressurizing unit that presses the lubricant holder against the brittle material substrate. Here, the pressing mechanism may be a spring press unit that presses the lubricant holder against the brittle material substrate. [Effect of the Invention] According to the present invention having such a feature, first, a lubricant is applied to a predetermined line of scribe line of a brittle material substrate, and a scribe line having a diamond tip is used for scribing. Therefore, the tip of the diamond is less likely to be worn, and the effect of greatly improving the durability is obtained. In particular, since a solid lubricant is used as the lubricant, the lubricant can be applied accurately only in the vicinity of the predetermined line of the scribe line. Thereby, it is possible to prevent the lubricant from adhering to an unnecessary portion on the substrate, and it is easy to remove the lubricant in the subsequent step and the like. Further, when the predetermined line is cut before the application of the lubricant, the foreign matter originally attached to the substrate of the brittle material or the foreign matter generated during the scribing process is not caught in the substrate of the brittle material and the scribing tool, and the obtained To reduce the effects of tip damage.

Next, an embodiment of the present invention will be described. First, Fig. 1 is a plan view and a side view showing an example of a multi-tip diamond tool (hereinafter simply referred to as a diamond tool) 10 which is a scribing tool of a tool holder held by a scribing head unit of the present embodiment. The diamond tool 10 is a pedestal having a polygonal column formed of a certain thickness and having an arbitrary number of sides of rotational symmetry. In the present embodiment, the quadrangular prism base 11 having a constant thickness is formed of a single crystal diamond, and has a through hole 12 at the center thereof. On the susceptor 11, the ridge lines 13a to 13d which are parallel to the axis passing through the through hole 12 (the axis perpendicular to the plane of the paper in Fig. 1(a)) are equally formed on the outer peripheral surface of the square. In the present embodiment, as shown in FIG. 1, the susceptor 11 is polished so that the ridge lines intersecting the outer peripheral surfaces from the bottom surfaces of the square corners of the square corner portions are chamfered. That is, as shown in Fig. 1(b), the four corners of the right bottom surface of the susceptor 11 are polished toward the ridge line of the susceptor 11, and the inclined faces 14a to 14d are formed. At this time, the edge of the ridge line sandwiching the bottom surface of the susceptor 11 is equal to the angle formed by the inclined surface, that is, the inclined surface is polished such that the one end of the ridge line is an apex of the isosceles triangle. Such inclined faces can be easily formed by laser processing or machining. In addition, mechanical polishing can be further performed after laser processing to become a more precise polished surface. As described above, the intersection of each of the ridge lines 13a to 13d and the first inclined surfaces 14a to 14d is a vertex, and as shown in FIG. 1(b), four tips P1 to P4 can be formed on the right side in the side view of the susceptor. At this time, the inclined faces 14a to 14d of the susceptor 11 become the top faces. Here, the term "top surface" refers to a surface that is in contact with two outer peripheral surfaces forming a ridge line and shares one end of the ridge line. Next, the other bottom surface of the susceptor 11 is similarly polished toward the outer periphery of the susceptor 11, and the second inclined surfaces 15a to 15d are formed. In this case, the ridge line is left between the first inclined surface and the second inclined surface, and the polishing is performed so that the total of the polishing ranges of the first inclined surface and the second inclined surface does not exceed the thickness of the susceptor. As described above, the intersection of each of the ridge lines 13a to 13d and the second inclined surfaces 15a to 15d serves as a tip end, and as shown in FIG. 1(b), four tips P5 to P8 can be formed on the left side in the side view of the susceptor. In this manner, the both ends of the ridge lines 13a to 13d are used as the tips P1 to P8, whereby the tip end of the diamond tool 10 having the square shape can be formed at eight points on the outer circumference. Next, the tool holder will be described. Figure 2 is a perspective view showing the assembly of the tool holder. As shown in FIG. 2, the tool holder main body 21 constituting a main portion of the tool holder 20 is a rectangular parallelepiped holder holding portion 22a, and a tool mounting portion 22b having a shape in which the front end has a cuboid upper half cut away. And constitute. As shown in FIG. 2, the holder holding portion 22a is provided with attachment through holes 23a, 23b and 24a, 24b for fixing the tool holder to the scribing head unit. Further, the tool attachment portion 22b has a thickness adjustment groove 25 which is cut away from the holder holding portion 22a and which is perpendicular to the longitudinal direction. As shown in Fig. 2, the front end portion has inclined surfaces 26a and 26b which are cut away from the right and left, and an inclined surface 26c which is cut away from the bottom. Further, a screw groove 27 perpendicular to the central axis is provided at a substantially central portion of the tool attachment portion 22b. On the surface of the tool mounting portion 22b, a retaining groove 28 having a certain depth along the central axis of the longitudinal direction of the tool holder body 21 is formed by the screw groove 27, and at the front end portion, the tool holding groove 28 is formed at an outer side by about 90°. The angle is open. In other words, the width of the tool holding groove 28 becomes larger as it goes toward the front end, and the extension line of the inner wall of the groove intersects at an angle of 90°. The thickness adjustment groove 25 has the same depth as the tool holding groove 28. Here, the area in which the tool holding groove 28 is opened at 90° is a holding area for holding the above-described square diamond tool 10 and projecting its front end portion to the outside. Further, a holder fastener 30 is attached to the upper portion of the tool mounting portion 22b. The holder fastener 30 is substantially rectangular parallelepiped and is attached to the recess of the tool mounting portion 22b to constitute a rectangular parallelepiped tool holder 20. The inclined surfaces 31a and 31b corresponding to the inclined surfaces 26a and 26b of the tool mounting portion 22b are provided on the left and right ends of the retainer fastener 30, and the inclined surface 31c corresponding to the inclined surface 26c is provided on the upper surface. Further, a through hole 32 is provided in the center portion. In the case where the diamond tool 10 is to be held by the tool holder 20, first, a thickness adjusting pin 33 having the same diameter as that of the diamond tool 10 as a thickness adjusting member is inserted into the thickness adjusting groove 25, and then, the diamond tool 10 is used. The inserting tool 28 holds the groove 28 in a state where it protrudes, and the fastener 30 is fixed by the fastening screw 34. Thus, the lower surface of the holder fastener 30 is always in parallel with the surface of the tool mounting portion 22b. Therefore, it is possible to fix the diamond tool 10 at the front end. Fig. 3 is a front view and a side view showing a state in which the tool holder 20 having the diamond tool 10 is attached to the scribing head unit. The scribing head unit 40A is configured such that the plate-shaped top plate 41 itself is vertically moved up and down by a sliding mechanism (not shown). Further, the cylinder 41 for the scribing load is fixed to the top plate 41. At the lower end of the cylinder 42, the rod 42a is telescopically protruded. Next, as shown in FIG. 3(b), the guide mechanism 43 and the sliding portion 44 are provided below the rod 42a of the top plate 41, and the sliding portion 44 is pressed downward with a specific load. The guiding mechanism 43 is configured to hold the sliding portion 44 in a movable manner up and down. An L-shaped plate 45 is provided on the sliding portion 44. The plate member 45 moves up and down together with the sliding portion 44, but the lower limit is restricted by the stopper 46. Further, in the plate member 45, the screws 47a and 47b are passed through the through holes 23b and 24b, and the tool holder 20 is fixed in the oblique direction. Then, by scribing the scribing head unit 40A in the direction of the arrow A, scribing can be performed. At the right end of the top plate 41, a foreign matter removing holder 51 is provided on the support plate 50. As shown in Fig. 3 (b), the plate-shaped support plate 50 is protruded from the top plate 41 in the left direction so as to be viewed from the side, and the foreign matter removing holder 51 and the diamond tool are at the same position. The foreign matter removing holder 51 is also in the shape of a rectangular parallelepiped and is fixed in parallel with the top plate 41, and a sponge 52 is attached to the front end. The sponge 52 is a foreign matter removing member that removes foreign matter adhering to a predetermined line of the scribe line when the scribing head unit 40A is moved in the direction of the arrow A, in contact with the substrate immediately before the scribing. Here, the foreign matter removing holder 51 and the sponge 52 which is a soft foreign matter removing member at the tip end thereof constitute a foreign matter removing mechanism attached to the scribing head unit 40A. Next, a lubricant holder adjacent to the foreign matter removing holder 51 will be described. Figure 4 is a side elevational view showing only the lubricant retainer and its peripheral portion. The cylinder 42, the sliding portion 44, the plate member 45, and the diamond tool 10, and the support plate 50, the foreign matter removing holder 51, and the like are omitted. Then, as shown in FIG. 4, similarly to the support plate 50, the support plate 53 is attached to the top plate 41 so as to protrude. A guide mechanism 53a is formed at the left end of the support plate 53, and the scribe line portion 54 and the L-shaped block 55 attached thereto are vertically movable along the guide mechanism 53a. The lubricant holder 56 is screwed and mounted below the L-shaped block 55. The lubricant holder 56 has a rectangular parallelepiped shape similar to the foreign matter removing holder 51, and a solid lubricating wheel 57 is attached to the lower end. The solid lubricating wheel 57 is a cylindrical lubricant-coated member whose shaft core is rotatably held by the lubricant holder 56, rotated by the movement of the scribing direction, and coated on the predetermined line of the scribing line immediately before the scribing line. Cloth lubricant. Further, as shown in Fig. 4, the support plate 58 is provided to the top plate 41 so as to protrude laterally, and a lower end stop 59 is provided at the front end thereof. The lower end stop 59 is abutted against one end of the L-shaped block 55, and the L-shaped block 55 is restricted from being excessively lowered. Further, on the top plate 41, a support plate 60 is provided above the L-shaped block 55, and an air press unit 61 is provided on the upper portion thereof. The air press unit 61 presses the solid lubricating wheel 57 under the lubricant holder 56 against the brittle material substrate by pressing the L-shaped block 55 downward by the protruding portion of the tip end. The air press unit 61 held by the support plate 60 constitutes a pressing mechanism that presses the lubricant holder 56. As the solid lubricant constituting the solid lubricating wheel 57, a lubricant such as wax (paraffin) or petroleum-based hydrocarbon which is solid at normal temperature is used. Alternatively, it may be a mixture of a solid lubricant and a lubricant which is liquid at normal temperature, a powdery solid lubricant or other ingredients. As the powdery solid lubricant, for example, graphite, molybdenum disulfide, tungsten disulfide or the like is preferably used. Next, a method of dividing the glass substrate which is a brittle material substrate by using the scribing head unit 40A of the present embodiment will be described using a plan view of the glass substrate of FIG. 5 and a plan view of the glass substrate of FIG. First, a glass substrate 70 having a flat surface SF is prepared in step S1. When the glass substrate 70 is scribed, the tip end P1 of the diamond tool 10 of the tool holder 20 that is obliquely mounted is fixed to the glass substrate 70 so that the scribe head unit 40A faces the one side 70a of the glass substrate 70. It is pressed down in the vicinity and moved in the direction of the arrow A shown in the figure, and is slid to the position close to the other side 70b of the predetermined line. As described above, when the scribing head unit 40A is moved, the foreign matter on the predetermined line is removed by the sponge 52 attached to the foreign matter removing holder 51. That is, as shown in step S2 of Fig. 5, cleaning is performed along a predetermined line of scribe lines. At this time, as shown in the enlarged view of the scribe line SIL1 in FIG. 7(a), the line of the specific width is cleaned so that the center includes the scribe line SIL1. Thus, by cleaning the predetermined line of the scribe line, foreign matter is not caught between the glass substrate 70 and the blade edge during the scribing process, and the damage of the tip end of the diamond tool can be reduced. Next, as shown in FIG. 7(b), the solid lubricating wheel 57 of the lubricant holder 56 is again brought into contact with the glass surface in the portion where the predetermined line SIL1 has been cleaned, to be pressurized from the upper portion by the air press unit 61. The load is moved while the load is applied, whereby the solid lubricating wheel 57 is rotated, and the lubricant is applied in a thin layer (step S3). Then, by scribing with the diamond tool held by the scribing head of the holder 20, as shown in Fig. 6, the groove line TL1 is formed along the scribe line SIL1 (step S4). At this time, the diamond tool 10 does not rotate and is scored with the same tip. Actually, the scribing head unit 40A is moved, and steps S2 to S4 are performed substantially simultaneously. In this way, the lubricating effect of the lubricant can be utilized to greatly reduce the wear of the tip of the diamond tool and prolong the life. For example, if the tip of a diamond tool is not coated with a lubricant, it will be worn for tens of meters, but if it is coated with a lubricant, it can last for thousands of meters to maintain durability. Further, since the lubricant is applied by the rotation of the solid lubricating wheel 57, the lubricant can be applied accurately only to the predetermined line of the scribe line and its vicinity. Thereby, it is possible to suppress the adhesion of the lubricant to a portion other than the predetermined line on the substrate, and it is easy to remove the lubricant in the subsequent step. The groove line, as shown in Fig. 8(a) showing a cross section of the circular portion of Fig. 6(b), means that only grooves formed by plastic deformation are formed on the surface SF of the glass substrate 70 by scribing. A line that does not cause cracks in the thickness direction. Therefore, the line for forming the groove line can be formed under a more loose scribing condition such as a lower load than in the case where the general scribing of the crack is formed. . Further, in the present embodiment, the side 70a is the upstream side of the scribe line, and the side 70b is the downstream side. Similarly, the scribing head unit 40A is moved from left to right along the predetermined line SIL2 to SIL6 of the surface SF of the glass substrate 70. Thereby, the foreign matter of the predetermined line is removed by the sponge 52 of the foreign matter removing holder 51, the lubricant is applied by the solid lubricating wheel 57 of the lubricant holder 56, and the scribing is performed by the diamond tool 10. In this manner, five groove lines TL2 to TL6 are further formed in parallel with the groove line T1. Next, as shown in FIG. 9, the auxiliary line AL1 is formed so as to intersect with each groove line. The auxiliary line AL1 is preferably formed on the downstream side of each groove line, that is, near the side 70b. As shown in Fig. 1, the auxiliary line AL1 can be formed using a scribing tool having a diamond tip, or can be formed by rotating the scribing wheel. In the present embodiment, the auxiliary line is a crack line in which a crack is formed. The auxiliary line AL1 is formed in this manner, and the glass substrate 70 is divided along the auxiliary line AL1. As shown in FIG. 8(b), at this time, cracks occur at the positions where the groove lines TL1 to TL6 which have been formed intersect with the auxiliary line AL1, and the cracks extend to the upstream side of each of the groove lines TL1 to TL6 (step S5). Therefore, the groove lines TL1 to TL6 change below the crack lines CL1 to CL6 accompanying the crack. Thereafter, in step S6 of FIG. 5, the glass substrate 70 is separated along the crack lines CL1 to CL6, whereby the glass substrate 70 can be divided into a desired shape. On the other hand, the solid lubricating wheel 57 is gradually worn when the lubricant is applied, so that the diameter thereof becomes small, but since the L-shaped block 55 moves up and down freely, and the L-shaped block is pressed from the upper portion by the air pressurizing unit 61, the solid is solid. The lubricating wheel 57 can always be pressed against the glass surface with a specific load and coated with a lubricant. In the present embodiment, the auxiliary line is formed and separated along the auxiliary line to cause cracking, but the step of not separating the auxiliary line may be employed. At this time, a crack is formed along the groove line when the auxiliary line is formed. Further, the step of forming a crack by sliding the diamond tool in the opposite direction at the end of the groove line without forming the auxiliary line, or extending the groove line to pass the diamond tool through the end portion of the substrate, or the like may be performed. The groove line creates a crack. When the tip end P1 that is in contact with the substrate is deteriorated by abrasion, the tip P5 can be used by removing the tool holder from the scribe head unit and rotating it 180 degrees before and after the change. Alternatively, the diamond tool 10 is temporarily detached from the tool holder 20, rotated at 90°, and then fixed to the tool holder 20 again, so that other tips such as the tip P2 are in contact with the glass substrate 70, and the line of the scribe line is similarly cleaned. , lubricant coating and scribing. Next, another embodiment of the scribing head unit having the function of removing foreign matter or applying a lubricant will be described. Fig. 10 is a view showing a scribing head unit according to a second embodiment, and the same portions as those in the first embodiment are denoted by the same reference numerals. As shown in FIG. 10, in the scribing head unit 40B of the second embodiment, a spring pressing unit 62 using a spring is provided in the supporting holder 60 instead of the air press unit 61. The spring press unit unit 62 is a pressing mechanism that presses the L-shaped block 55 downward from above. In this case, the solid lubricating wheel 57 can also be pressed against the glass surface, and even if the solid lubricating wheel 57 is gradually worn by the spring, the wheel can be pressed at the same pressure and the lubricant can be applied to the glass surface. In this case, the same effect can be obtained with a simpler configuration than the air press unit. Further, in each of the above-described embodiments, as shown in FIG. 1, a scribing tool having a plurality of tips is used, but it is also possible to perform grinding from the thickness direction or the outer circumferential direction and form plural numbers on the outer periphery of the polygon. A cutting-edge marking tool, in addition, can also use a quadrangular frustum or conical shape marking tool. Here, as shown in FIG. 5, the auxiliary line is formed after the groove line is formed, but the step of forming the groove line and then removing the lubricant applied to the predetermined line of the scribe line by wiping or the like may be included. Alternatively, the tip end of the diamond tool can be cleaned after the end of a certain distance. In the cleaning, the tip end portion of the blade can be blown with air, and the air can be sucked from the tip end portion. In addition, the tip portion can be cleaned by ultrasonic waves, and the lubricant or foreign matter can be wiped off by a sponge or the like. In the case of removing the lubricant, a spacer may be provided at the end of the substrate, and the scribe tool is used to clean the spacer. In each of the above embodiments, a sponge is used as the foreign matter removing member, but a soft member such as felt or the like which achieves the same function as that of the sponge may be used. Further, in the above embodiment, the lubricant is applied as the lubricant application member before the scribing, but the lubricant application member is not limited to the wheel as long as it is a solid lubricant. Any shape such as a cylinder or a corner post, a cone or a pyramid. In the case of a non-wheel shape, the lubricant is applied by sliding the lubricant application member on the substrate. Further, in each of the above embodiments, the substrate is scribed by moving the scribe head unit, but the substrate may be moved by the fixed scribe unit to perform foreign matter removal, lubricant application, and scribing. . Further, in the above-described embodiment, the tool holder, the foreign matter removing mechanism, and the lubricant applying mechanism are provided in one of the scribing head units 40A, but the foreign matter removing mechanism or the lubricant applying mechanism may be provided and provided. The scribing head unit of the tool holder has different scribing head units. Further, in the above-described embodiment, steps S2 to S4 are performed substantially simultaneously by moving the scribing head unit 40A, but steps S2 to S4 may be performed stepwise on the predetermined line of scribing. [Industrial Applicability] In the case where the brittle material substrate is scribed by a scribing tool having a diamond tip, the wear of the diamond tip can be minimized, and the diamond tip can be effectively used. Line device.

10‧‧‧Multi-tip diamond tools
11‧‧‧Base
12‧‧‧through holes
13a～13d‧‧‧ ridgeline
14a～14d‧‧‧1st inclined surface
15a～15d‧‧‧2nd inclined surface
20‧‧‧Tool Holder
21‧‧‧Tool holder body
22a‧‧‧Retainer Holder
22b‧‧‧Tools Maintenance Department
23a, 23b, 24a, 24b‧‧‧through holes
25‧‧‧ thickness adjustment slot
26a, 26b, 26c, 31a, 31b, 31c‧‧‧ sloped surface
27‧‧‧ screw slot
28‧‧‧Tool holding slot
30‧‧‧Retainer fasteners
32‧‧‧through holes
33‧‧‧ thickness adjustment pin
34‧‧‧ screws
40A, 40B‧‧‧ scribe head unit
41‧‧‧ top board
42‧‧‧ cylinder
42a‧‧‧ pole
43‧‧‧Guiding agency
44‧‧‧Sliding section
45‧‧‧ plates
46‧‧‧stop
50, 53‧‧‧ support plate
51‧‧‧ Foreign object removal retainer
52‧‧‧Sponge
54‧‧‧Sliding section
55‧‧‧L-shaped block
56‧‧‧Lubricant Holder
57‧‧‧Solid lubrication wheel
58, 60‧‧‧ support plate
59‧‧‧Down end stop
61‧‧‧Air pressurizing unit
62‧‧‧Spring press unit
70‧‧‧ glass substrate
AL‧‧‧Auxiliary line
CL1～CL6‧‧‧ crack line
P1～P8‧‧‧ cutting-edge
SIL1～SIL6‧‧‧Lined line
TL1～TL6‧‧‧ trench line

Fig. 1 (a) and (b) are a plan view and a side view showing an example of a scribing tool used in the tool holder of the embodiment of the present invention. Fig. 2 is a perspective view of the tool holder of the embodiment. 3(a) and 3(b) are a front view and a side view showing an example of the scribing head unit according to the first embodiment of the present invention. Fig. 4 is a side view showing a lubricant holder to which only a lubricant is applied and a peripheral portion thereof in the scribing head unit according to the first embodiment of the present invention. Fig. 5 is a flow chart showing a method of dividing a glass substrate according to an embodiment of the present invention. 6(a) and 6(b) are plan views of a glass substrate according to an embodiment of the present invention. 7(a) to 7(c) are enlarged views of a predetermined line of scribe line of a glass substrate according to an embodiment of the present invention. 8(a) and 8(b) are cross-sectional views showing groove lines and crack lines formed in the scribing method according to the embodiment of the present invention. Fig. 9 (a) and (b) are views showing a groove line and an auxiliary line of the glass substrate of the embodiment. Fig. 10 (a) and (b) are a front view and a side view showing a scribing head unit according to a second embodiment of the present invention.

10‧‧‧Multi-tip diamond tools

20‧‧‧Tool Holder

34‧‧‧ screws

40A‧‧‧Drawing head unit

41‧‧‧ top board

42‧‧‧ cylinder

42a‧‧‧ pole

43‧‧‧Guiding agency

44‧‧‧Sliding section

45‧‧‧ plates

46‧‧‧stop

47a, 47b‧‧‧ screws

50‧‧‧support plate

51‧‧‧ Foreign object removal retainer

52‧‧‧Sponge

55‧‧‧L-shaped block

56‧‧‧Lubricant Holder

57‧‧‧Solid lubrication wheel

58, 60‧‧‧ support plate

59‧‧‧Down end stop

61‧‧‧Air pressurizing unit

Claims (6)

A scribing head unit which performs scribing by pressing a tip end of a scribing tool against a brittle material substrate with a specific load and relatively moving it, and includes: a scribing tool having a diamond using 1 And a plurality of tips; a tool holder mounted on the scribing head unit to fix the scribing tool; a lubricant holder mounted to the scribing head unit in a movable manner up and down; a lubricant coating member; The solid lubricant is attached to the lower end of the lubricant holder, and the lubricant is applied to the predetermined line of the scribe line, and the pressing mechanism presses the lubricant holder against the substrate of the brittle material. The scribing head unit of claim 1, wherein the lubricant applying member is a cylindrical fixed lubricating wheel having a shaft core. The scribing head unit of claim 1, wherein the scribing head unit has: a foreign matter removing mechanism that performs foreign matter removal of the brittle material substrate along a predetermined line of scribing. The scribing head unit of claim 2, wherein the foreign matter removing mechanism includes: a foreign matter removing holder attached to the scribing head; and a foreign matter removing member provided at a lower end of the foreign matter removing holder. The scribing head unit according to any one of claims 1 to 3, wherein the pressing mechanism presses the lubricant holder against an air pressurizing unit of the brittle material substrate. The scribing head unit according to any one of claims 1 to 3, wherein the pressing mechanism presses the lubricant retainer against a spring pressurizing unit of the brittle material substrate.