TW201724227A - Sheet peeling device and peeling method - Google Patents

Abstract

The present invention relates to a sheet peeling apparatus (10) comprising: a attaching means (20) for attaching a peeling tape (PT) to a subsequent sheet (AS), and attaching the sheet In the peeling tape (PT) of the sheet (AS), the stretching means (WF) is applied to the sheet (AS), and the stretching means (30) of the sheet (AS) is peeled off, and the predetermined passage means (30). Then, the sheet (AS) is peeled off, and the body (WF) is moved to the movement regulating means (40) in the peeling direction of the sheet (AS), and the succeeding sheet (AS) which is peeled off from the object (WF). The pressing means (50) pressed in the direction of the object (WF) is selectively pressed by the movement regulating means (40) and the pressing means (50) to peel off one sheet of the sheet (AS).

Description

Sheet peeling device and peeling method

The present invention relates to a sheet peeling device and a peeling method.

In the past, a sheet peeling device which is peeled off by a tape for peeling and attached to a sheet to be attached to a subject is known (for example, Document 1: Japanese Patent Laid-Open Publication No. 2010-219265, No. 2: Japanese Patent Application No. 2010-- Bulletin 103220).

However, in the conventional sheet peeling apparatus described in Document 1, the sheet member is pressed and the sheet is folded back and peeled off from the object, and then the peeling start of the sheet is easily formed, but it is easy to be formed. The situation in which the load on the body becomes larger. On the other hand, in the conventional sheet peeling apparatus described in the document 2, the succeeding sheet peeled from the object is peeled off by the first roller and pressed in the direction of the object, and is placed on the sheet. The load of the body can be reduced, but it is difficult to form the peeling start of the subsequent sheet.

The object of the present invention is to provide a sheet which can be peeled off reliably and then Peeling device and peeling method.

In order to achieve the above object, the sheet peeling device of the present invention is a sheet peeling device which is peeled off and attached to a sheet of a subject, and is provided with a attaching means for attaching a peeling tape to the succeeding sheet, and The peeling tape attached to the succeeding sheet is stretched, and the stretching means is peeled off from the object, and the stretching means for peeling off the sheet is removed, and the peeling of the sheet is performed before the stretching means. The movement means to move the predetermined means for moving the peeling direction of the sheet, and the pressing means for pressing the succeeding sheet peeled off from the object to be pressed in the direction of the object to be held; and selectively using the movement regulating means and the The pressing means peels off the configuration of the succeeding sheet of one sheet.

In the sheet peeling device of the present invention, it is preferable that the movement regulating means is used only for the peeling of the end portion of the peeling start side of the sheet.

Further, in the sheet peeling apparatus of the present invention, it is preferable that the pressing means is used for peeling off the sheet from the peeling start side end portion of the movement regulating means.

On the other hand, the sheet peeling method of the present invention is a sheet peeling method which is peeled off and attached to the succeeding sheet of the object, and is provided with an attaching work for attaching the peeling tape to the succeeding sheet, and The peeling tape attached to the succeeding sheet is stretched and stretched from the object to be stretched, and the stretching process of the succeeding sheet is peeled off. In the stretching process, the peeling of the succeeding sheet is selectively performed. The above-mentioned object is moved to the movement regulation process of the peeling direction of the sheet, and The subsequent sheet peeled off from the object is pressed in the pressing direction of the object to be pressed, and the configuration of the sheet of the sheet is peeled off.

According to the present invention as described above, the movement of the predetermined means (movement regulation) and the pressing means (pressing process) are selectively used (selectively) to peel off one of the subsequent sheets, and the subsequent sheets can be reliably peeled off. .

At this time, when the movement predetermined means is used for peeling only at the end portion of the peeling start side of the sheet, the peeling start end of the succeeding sheet is easily formed.

In addition, when the peeling means is peeled off from the peeling start side end portion by the movement regulating means, the peeling force is applied to the object to be placed when peeling off the succeeding sheet.

10‧‧‧Sheet stripping device

20‧‧‧ Attachment means

22‧‧‧Advance means

21A‧‧‧Rotary axis

21B‧‧‧Rotating arm

22A‧‧‧Rotary motor

22B‧‧‧Advance roller

23, 23C‧‧‧ means of keeping

24‧‧‧Maintenance means

24A‧‧‧Direct drive motor

24B‧‧‧ Output shaft

25‧‧‧Measure means

25B‧‧‧Sliding parts

25C‧‧‧ Pressing head

25D‧‧‧heating means

30‧‧‧ stretching means

31‧‧‧Mobile means

31A‧‧‧Linear motor

31B‧‧‧Sliding parts

31C‧‧‧Support surface

31D‧‧‧ platform

32‧‧‧Induction means

32A‧‧·linear motor

32B‧‧‧Sliding parts

32C‧‧‧Induction Roller

40‧‧‧Mobile regulations

41‧‧‧Linear motor

41A‧‧‧Sliding parts

43‧‧‧Mobile Provisioning Board

50‧‧‧Measure means

51‧‧‧Linear motor

52‧‧‧Rotating motor

53‧‧‧Pressing roller

60‧‧‧clamping means

61‧‧‧Direct drive motor

61A‧‧‧ Output shaft

62‧‧‧pressure wheel

70‧‧‧cutting means

71‧‧‧Linear motor

71A‧‧‧Sliding parts

72‧‧‧ cutting blade

80‧‧‧Folding means

81‧‧‧ pressing means

81A‧‧‧Rotary motor

81B‧‧‧ drive pulley

81C‧‧‧Sliding pulley

81D‧‧‧ Endless belt

81F‧‧‧ bracket

81G‧‧‧ drive pulley

81H‧‧‧Sliding pulley

82‧‧‧Send means

82A‧‧‧Rotary motor

82B‧‧‧ drive pulley

82C‧‧‧Sliding pulley

82D‧‧‧ Endless belt

90‧‧‧Recycling means

91‧‧‧Recycling bin

92‧‧‧Multi-joint robot

92A‧‧‧Working arm

93‧‧‧Retention means

AS‧‧‧ followed by thin slices

PT‧‧‧ peeling tape

BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a side view showing a sheet peeling apparatus according to an embodiment of the present invention.

Fig. 2A is an explanatory view of the operation of the sheet peeling device.

Fig. 2B is an explanatory view of the operation of the sheet peeling device.

Fig. 2C is an explanatory view of the operation of the sheet peeling device.

Fig. 2D is an explanatory view of the operation of the sheet peeling device.

Fig. 2E is an explanatory view of the operation of the sheet peeling device.

Fig. 2F is an explanatory view of the operation of the sheet peeling device.

Hereinafter, an embodiment of the present invention will be described based on the drawings.

However, in the present embodiment, the X-axis, the Y-axis, and the Z-axis are orthogonal to each other, the X-axis and the Y-axis are axes in a specific plane, and the Z-axis is an axis orthogonal to the specific plane. Further, in the present embodiment, the case where the direction is displayed from the front side direction in FIG. 1 parallel to the Y-axis is used as the reference, and the "up" is the arrow direction of the Z-axis, and the "down" is the "down". In the opposite direction, "Left" is the direction of the arrow of the X-axis, "Right" is the opposite direction, "Front" is the front direction of Figure 1 parallel to the Y-axis, and "Rear" is the opposite direction.

In FIG. 1, the sheet peeling apparatus 10 is detached and attached to the subsequent sheet AS as a semiconductor wafer (hereinafter referred to as "wafer") WF, and is provided with The peeling tape PT is attached to the attaching means 20 of the succeeding sheet AS, and the stretching means 30 for applying the tension to the peeling tape PT attached to the succeeding sheet AS, and peeling off the sheet AS from the wafer WF, and prescribed The movement regulating means 40 for moving the wafer WF to the peeling direction of the sheet AS by the peeling of the sheet AS of the stretching means 30, and the pressing sheet AS peeled from the wafer WF are pressed against the wafer WF direction. The means 50, the cutting means 60 for inserting the peeling tape PT by the pressing means 50, and the cutting means 70 for cutting the peeling tape PT; and selectively using the movement regulating means 40 and the pressing means 50, peeling off 1 The composition of the sheet following the sheet AS.

The attaching means 20 includes a tape supporting means 21 that rotatably supports the peeling tape PT that is wound back, and the tape supporting means 21 The peeling tape PT supported by the tape supporting means 21 is interposed, the pushing means 22 for supplying the pushing force to the peeling tape PT, and the holding means 23 for holding the leading end portion of the peeling tape PT, and the auxiliary holding means 23 are provided. The holding aid 24 for holding the peeling tape PT and the peeling tape PT held by the holding means 23 are pressed against the pressing means 25 attached to the sheet AS.

The tape supporting means 21 is provided with a support roller 21C that supports the peeling tape PT that is wound back on the free end side of the pivoting arm 21B at the center of the rotatable rotating shaft 21A, and that is capable of energizing the turning arm 21B. The spring 21D of the energizing means in the direction of the means 22.

The propulsion means 22 includes a propulsion roller 22B that is driven via a rotation motor 22A as a drive machine.

The holding means 23 is provided in a housing means 23C supported by the output shaft 23B of the direct drive motor 23A as a driving device, and is held by the suction hole 23E formed in the adsorption surface 23D on the bottom surface of the housing means 23C. A suction means 23F such as a decompression pump or a vacuum aspirator of the tape PT is peeled off.

The holding assisting means 24 is provided with an auxiliary roller 24C that is supported by the output shaft 24B of the direct drive motor 24A as a drive device, and the peeling tape PT is joined to the suction surface 23D.

The pressing means 25 includes a pressing head 25C supported by a slider 25B of a linear motor 25A as a driving device housed in the housing means 23C, and a pressing head 25C which is provided from the bottom surface of the housing means 23C, and a coil heater or Heating means 25D on the heating side of the heat pipe.

The stretching means 30 includes a moving means 31 for relatively moving the peeling tape PT and the wafer WF, and a peeling tape PT for peeling off the sheet AS is positioned in the vicinity of the cutting means 70 to induce Induction means 32.

The moving means 31 is provided by a slider 31B which is a linear motor 31A as a driving device, and has a decompression means (not shown) such as a decompression pump or a vacuum aspirator, and has a susceptibility to hold the wafer WF. The platform 31D of the surface 31C is supported.

The induction means 32 includes an induction roller 32C supported by a slider 32B of a linear motor 32A as a drive device.

The movement regulation means 40 includes a rotation motor 42 as a drive machine supported by a slider 41A as a drive motor linear motor 41, and a movement regulation plate 43 supported by an output shaft 42A of the rotation motor 42. It is used for the peeling of the edge part of the peeling start side of the sheet AS only.

The pressing means 50 is provided with a rotating motor 52 as a driving device supported by a slider 51A of a linear motor 51 as a driving device, and a pressing roller 53 supported by an output shaft (not shown) of the turning motor 52, On the other hand, after the peeling start side end portion of the movement regulating means 40 is peeled off, it is used for the peeling of the sheet AS.

The sandwiching means 60 is provided by the output shaft 61A of the direct drive motor 61 as a drive device, and the pressure roller 62 is sandwiched between the peeling tape PT and the sheet AS by the pressing roller 53.

The cutting means 70 is provided to be housed in the storage means 23C. The cutting blade 72 is provided by the slider 71A of the linear motor 71 of the driving machine, and the cutting blade 72 is provided to be protruded from the bottom surface of the housing means 23C.

In the above-described sheet peeling device 10, the step of peeling and attaching to the succeeding sheet AS of the wafer WF will be described.

First, the operator puts the peeling tape PT, and after placing it as shown by the solid line in Fig. 1, each member is borrowed from the sheet peeling device 10 shown by the solid line in Fig. 1 which stands by at the initial position. A signal for starting the automatic operation is input by an operation means such as an operation panel or a personal computer (not shown). In this manner, the attaching means 20 drives the suction means 23F to adsorb and hold the peeling tape PT on the adsorption surface 23D. Further, when the wafer WF is placed on the support surface 31C in a state where the sheet AS is placed upward by a conveyance means (not shown) such as a human hand or a multi-joint robot arm or a belt conveyor, the stretching means 30 The decompression means (not shown) is driven to start the adsorption holding of the wafer WF. Thereafter, the stretching means 30 drives the linear motor 31A to move the stage 31D to the left direction. As shown by the two-point chain line in Fig. 1, the left end portion of the succeeding sheet AS is placed directly below the pressing head 25C.

Next, the attaching means 20 drives the direct drive motor 24A, and the auxiliary roller 24C is driven away from the lower side of the receiving means 23C as shown by the two-point chain line in Fig. 1, and the rotary motor 22A and the direct drive motor 23A are driven. At the same time as the peeling tape PT is advanced, the receiving means 23C is lowered to a specific position immediately above the sheet AS. Thereafter, the attaching means 20 drives the linear motor 25A, and as shown in FIG. 2A, the pressing head 25C is lowered, and the peeling tape PT is pressed and attached to the left end portion of the succeeding sheet AS. this In this case, the attaching means 20 drives the heating means 25D and heats the peeling tape PT. When the attachment of the peeling tape PT to the sheet AS is completed, the attaching means 20 stops the driving of the suction means 23F, drives the linear motor 25A and the direct drive motor 23A, and returns the pressing head 25C and the housing means 23C to the initial stage. position.

Thereafter, the sandwiching means 60 drives the direct drive motor 61, and after the pressure roller 62 and the pressing roller 53, sandwich the peeling tape PT with a specific pressing force, the stretching means 30 drives the linear motor 31A to follow the sheet. The left end of the AS is located directly below the lowermost portion of the pressing roller 53. Next, the movement regulation means 40 drives the linear motor 41 and the rotation motor 42, and as shown in FIG. 2B, the left end portion of the subsequent sheet AS is pressed by the peeling tape PT at the left end portion of the movement regulation plate 43. Next, the stretching means 30 and the pressing means 50 drive the linear motor 31A and the turning motor 52 to move the pressing plate 53 in the counterclockwise direction while moving the stage 31D in the left direction. As a result, the sheet AS is peeled off from the wafer WF while maintaining the posture of the left end portion of the movement regulating plate 43 and folding back as shown by the two-point chain line in FIG. 2B. However, the peeling medium stretching means 30 of the sheet AS drives the linear motor 32A to bring the induction roller 32C into contact with the peeling tape PT or the sheet AS which is pushed by the pressure roller 62 and the pressing roller 53, giving the specific roller 32C a specific The tension is such that the peeling tape PT or the subsequent sheet AS is induced to be folded in two folds (the same is true thereafter).

Further, when the left end portion of the wafer WF is peeled off, the sheet AS of a specific length is peeled off, by an optical sensor or a photographing means not shown. When the detection means is detected, the stretching means 30 and the pressing means 50 stop the driving of the linear motors 31A, 32A and the turning motor 52. Next, the movement regulation means 40 drives the linear motor 41 and the rotation motor 42 to return the movement regulation plate 43 to the initial position, and the pressing means 50 drives the linear motor 51, as shown in Fig. 2C, at the lowermost portion of the pressing roller 53. Pressing the curved portion of the sheet AS. However, after the movement of the pressing roller 53, the pressing force of the peeling tape PT or the subsequent sheet AS via the pressure roller 62 and the pressing roller 53 is continuously sandwiched.

Next, the stretching means 30 and the pressing means 50 drive the linear motors 31A, 32A and the turning motor 52 to move the pressing plate 53 in the counterclockwise direction while moving the stage 31D in the left direction. As a result, the sheet AS is continuously peeled off from the wafer WF while continuing to press the bent portion at the lowermost portion of the pressing roller 53 as shown in FIG. 2D. According to such a configuration, it is also possible to restrict the peeling of the succeeding sheet AS by the stretching means 30, and the wafer WF is moved to the peeling direction of the sheet AS. Then, as shown in FIG. 2E, when the peeling of the sheet AS is completed, the stretching means 30 and the pressing means 50 stop the linear motors 31A, 32A, the driving means (not shown) and the driving of the turning motor 52.

Next, the attaching means 20 drives the direct drive motor 24A and the suction means 23F, and as shown in FIG. 2F, the auxiliary roller 24C is returned to the initial position, and the peeling tape PT is adsorbed and held on the adsorption surface 23D. Thereafter, the cutting means 70 drives the linear motor 71, lowers the cutting edge 72, cuts the peeling tape PT, and collects the succeeding sheet AS by a hand or a transfer means (not shown). However, it overlaps with the cutting action of the peeling tape PT, and After the wafer WF on the stage 31D is transported to the next project by a hand or a transport means (not shown), the stretching means 30 drives the linear motor 31A to return the stage 31D to the initial position. Further, the stretching means 30, the pressing means 50, and the sandwiching means 60 drive the linear motors 32A, 51 and the direct drive motor 61 to return the induction roller 32C, the pressing roller 53 and the pressing wheel 62 to the initial position, and then repeat the same. Actions.

According to the above-described embodiment, when the sheet AS is peeled off from the wafer WF, the sheet is peeled off by the movement regulating means 40 and the pressing means 50, and the sheet is reliably peeled off. .

As described above, in order to carry out the best configuration of the present invention, methods and the like are disclosed in the above description, but the present invention is not limited thereto. That is, the present invention has been specifically described with respect to specific embodiments, but is not departing from the scope of the technical idea and object of the present invention, and in the above-described embodiments, in the shape, In terms of material, quantity, and other detailed composition, the manufacturer can add various deformers. In addition, the description of the shapes, materials, and the like described above is intended to be illustratively described in order to facilitate the understanding of the present invention, and is not limited to the present invention, and a part of the shape or the like is limited. The description of the names of all the defined members is included in the present invention.

For example, the propulsion means 22 functions as a cutting position changing means for changing the cutting position of the peeling tape PT, and the push roller 22B is rotated, and the peeling tape PT is wound around the supporting roller 21C. The cutting means 70 and the pair of peeling tape PT and the succeeding sheet AS Alternatively, the sheet AS may be cut only by the sheet AS. In this case, the cutting position changing means replaces or uses the advancing means 22, and uses a clamping means such as a mechanical chuck or a holding cylinder, Coulomb force, an adhesive. The adhesive tape, the magnetic force, the white nucleus adsorption, etc., may be held by the peeling tape PT and stretched in the winding direction.

The attaching means 20 is a structure in which the peeling tape for attaching the leaves is pressed to the subsequent sheet AS.

In the case where the tape supporting means 21 is not provided in the direction of the advancing means 22, the peeling tape PT may be supported. In this case, the pushing means 22 may be a pressure roller or the like in which the peeling tape PT is sandwiched by the turning motor 22A.

The holding means 23 can be used instead of or in combination with the suction means 23F, and the peeling tape PT can be held by a clamping means such as a mechanical chuck or a holding cylinder, a Coulomb force, an adhesive, an adhesive, a magnetic force, and a white Nuori adsorption. The composition.

In the holding assisting means 24, the reinforcing roller 24C can be used instead of or in combination with the auxiliary roller 24C, and the peeling tape PT is brought into contact with the adsorption surface 23D by a rod-shaped member, a plate-shaped member, and a gas jet.

The holding aid 24 can hold the peeling tape PT after the sheet AS is peeled off only by the holding means 23, but it is not possible.

The pressing means 25 can be used instead of or in combination with the pressing head 25C, and a pressing member such as a plate, a rubber, a resin, or a foam, or the like can be used, and the peeling tape PT is a pressure-sensitive adhesive sheet. The 25D system is optional.

At least one of the pressing means 25 and the cutting means 70 is not accommodated In the housing means 23C, the linear motors 25A and 71 may be supported by a bracket (not shown).

The energizing means can also replace or use the spring 21D instead of rubber or resin.

The stretching means 30 is peeled off by the driving means 22, and the sheet AS is peeled off, and the sheet AS is peeled off only by the driving of the turning motor 52.

The stretching means 30 is a fixed platform 31D, and the attachment means 20, the stretching means 30, the movement regulating means 40, the pressing means 50, the sandwiching means 60, and the like may be moved, and the means and the platform 31D may be moved. .

The moving means 31 may be configured to support the object by a clamping means such as a mechanical chuck or a holding cylinder, a Coulomb force, an adhesive, an adhesive, a magnetic force, and a Canulin suction.

The inducing means 32 is such that the surfaces on the opposite sides of the adjoining surface are folded in the opposite direction, and the subsequent sheet AS may be induced or not.

The inducing means 32 may be replaced by or in combination with the inducing roller 32C, and may be induced by a gas jet or the like and then the sheet AS may be formed into a two-folded shape by a gas jet or the like.

The movement regulation means 40 can also regulate the movement of the wafer WF by the movement of the roller member or the gas, instead of or in combination with the movement of the predetermined plate 43.

After the movement regulation plate 40 is peeled off from the left end side of the sheet AS by the movement regulation plate 43, the movement regulation plate 43 is not returned to the initial position, and the movement of the table 31D and the rotation of the pressing roller 53 are caused to cause the subsequent sheet AS. The peeling is also possible. In this case, peeling at the left end Before or after peeling, or before and after peeling, the pressing roller 53 may press the sheet AS or may not be pressed before and after peeling.

The movement regulating means 40 may press the peeling and succeeding sheet AS at any position such as the left end portion (the peeling start side end portion), the intermediate portion, and the right end portion (the peeling end side end portion) of the peeling sheet AS.

The pressing means 50 may press the roller 53 instead of or in combination with the pressing roller 53, and press the sheet AS in the direction of the wafer WF by spraying of a plate member or a gas.

The pressing means 50 presses the left end portion by pressing the roller 53 before the peeling of the left end portion of the sheet AS, and the sheet 31D is moved and the rotation of the pressing roller 53 is rotated to peel off the entire sheet AS. Next, before or after peeling of the left end portion of the sheet AS, the movement of the predetermined plate 43 may be performed by pressing the sheet AS, and before and after peeling, the sheet 13 may be moved without pressing the sheet.

When the pressing means 53 peels off the left end portion of the sheet AS by pressing the roller 53, the pressing roller 53 is returned to the initial position, and the movement regulating means 40 is pressed by the movement regulating plate 43 to press the sheet AS, and then The movement of the stage 31D and the rotation of the pressing roller 53 may complete the peeling of the succeeding sheet AS.

The pressing means 50 can also press the subsequent sheet AS at any position such as the left end portion, the intermediate portion, and the right end portion of the sheet AS.

The pressing means 50 may press the subsequent sheet AS that has been peeled off from the wafer WF to be pressed in contact with the subsequent sheet AS attached to the wafer WF, and may be pressed in a non-contact manner.

The pressing means 50 can also press the bent portion of the succeeding sheet AS at a position other than the lowermost portion of the pressing roller 53, and can be in any position as long as the roller 53 can be pressed and the bent portion of the sheet AS is pressed. Press it.

The sandwiching means 60 may be replaced by or in combination with the pressure roller 62, and the peeling tape PT or the like may be sandwiched by the pressing roller 53 by a plate member or a gas jet or the like.

The cutting means 70 may be replaced by or in combination with the cutting blade 72, and other members such as laser cutting, thermal cutting, gas cutting, and compressed water cutting may be employed.

The cutting means 70 is cut between the holding position of the self-peeling tape PT (the holding position via the support roller 21C and the advance roller 22B), and the attachment position to the subsequent sheet AS of the peeling tape PT. The peeling tape PT may be broken, and, for example, the conventional sheet peeling device described in the document 1 is cut between the holding position of the peeling tape PT and the supporting position of the peeling tape PT. This peeling tape PT is also possible.

When the peeling of the left end portion of the succeeding sheet AS using one of the movement regulating means 40 and the pressing means 50 is detected by the detecting means (not shown), the other side is used or the left end is used by both means. The stripping action of the department is also possible.

The material, the type, the shape, and the like of at least one of the body and the succeeding sheet may be automatically selected as the movement regulating means 40 or the pressing means 50, or may be manually selected.

Further, in the adhesive sheet AS of the present invention, the peeling tape PT and the material of the object to be placed, the type, the shape, and the like are not particularly limited. For example, the sheet AS and the peeling tape PT may have a polygonal shape such as a circular shape, an elliptical shape, a triangular shape, or a square shape, and other shapes may be formed by a pressure-adhesive property or a thermal deformation property. The attachment of the object to the structure in which the bonding form of the heat-sensitive adhesive or the like is applied is preferably a heating means such as a coil heating or a heat pipe which is provided with heating of the sheet AS or the peeling tape PT. The method can be followed. Further, the subsequent sheet AS and the peeling tape PT may be, for example, a single layer of only the adhesive layer, and have an intermediate layer between the base sheet and the adhesive layer, on the upper surface of the base sheet. There are three or more layers of a cap layer or the like, and a so-called two-sided sheet of a substrate which can be peeled off from the adhesive layer, and the two sides of the sheet may be an intermediate layer having a single layer or a plurality of layers. The composition, or the composition of a single layer or a multiple layer of the intermediate layer. In addition, as a system to be used, for example, a semiconductor wafer such as a food, a resin container, a semiconductor wafer or a compound semiconductor wafer, a circuit board, an optical recording board, or the like may be used as an information recording substrate, a glass substrate, a steel plate, a ceramic plate, or a wood board or A resin plate or the like, a member or an article of any form is targeted. However, the subsequent sheet AS is converted into a functional property, and the usability is understood. For example, the information recording label, the decorative label, the protective sheet, the dicing tape, the wafer attaching film, the wafer bonding tape, and the recording layer can be formed into a resin sheet. Any sheet, film, tape, or the like of any shape is attached to any of the above-mentioned subjects.

In the means and engineering department of the present invention, as long as the means and The operation, function, or engineering described in the project are not limited, and are not completely limited to the components or engineers of the single embodiment shown in the above embodiments. For example, the attachment means is as long as the tape for peeling can be attached to the subsequent sheet, in contrast to the initial technical knowledge of the application, and is not limited to the technical scope of the application (for other means and engineering descriptions) Omitted).

Further, in the driving machine of the above embodiment, a rotary motor, a direct drive motor, a linear motor, a single-axis robot arm, a multi-joint robot arm, an electric motor, an air cylinder, a hydraulic cylinder, a rodless cylinder, and the like can be used. An air cylinder such as a rotary cylinder or the like may be combined directly or indirectly (also in a configuration overlapping with the embodiment exemplified in the embodiment).

10‧‧‧Sheet stripping device

20‧‧‧ Attachment means

21‧‧‧ Tape support means

21A‧‧‧Rotary axis

21B‧‧‧Rotating arm

21C‧‧‧Support wheel

21D‧‧‧ Spring

22‧‧‧Advance means

22A‧‧‧Rotary motor

22B‧‧‧Advance roller

23, 23C‧‧‧ means of keeping

23A‧‧‧Drive motor

23B‧‧‧ Output shaft

23D‧‧‧Adsorption surface

23E‧‧‧Attraction hole

23F‧‧‧ attraction

24‧‧‧Maintenance means

24A‧‧‧Direct drive motor

24B‧‧‧ Output shaft

24C‧‧‧Subsidy roller

25‧‧‧Measure means

25A‧‧‧linear motor

25B‧‧‧Sliding parts

25C‧‧‧ Pressing head

25D‧‧‧heating means

30‧‧‧ stretching means

31‧‧‧Mobile means

31A‧‧‧Linear motor

31B‧‧‧Sliding parts

31C‧‧‧Support surface

31D‧‧‧ platform

32‧‧‧Induction means

32A‧‧·linear motor

32B‧‧‧Sliding parts

32C‧‧‧Induction Roller

40‧‧‧Mobile regulations

41‧‧‧Linear motor

41A‧‧‧Sliding parts

42‧‧‧Rotating motor

42A‧‧‧ Output shaft

43‧‧‧Mobile Provisioning Board

50‧‧‧Measure means

51‧‧‧Linear motor

51A‧‧‧Sliding parts

52‧‧‧Rotating motor

53‧‧‧Pressing roller

60‧‧‧clamping means

61‧‧‧Direct drive motor

61A‧‧‧ Output shaft

62‧‧‧pressure wheel

70‧‧‧cutting means

71‧‧‧Linear motor

71A‧‧‧Sliding parts

72‧‧‧ cutting blade

AS‧‧‧ followed by thin slices

PT‧‧‧ peeling tape

WF‧‧‧ wafer

Claims (4)

A sheet peeling device which is a sheet peeling device which is peeled off and attached to a back sheet of a subject, and is characterized in that it comprises a attaching means for attaching a peeling tape to the succeeding sheet, and applying tension to the attached sheet The peeling tape for peeling the sheet, the stretching means for peeling the sheet from the object, and the peeling of the sheet by the stretching means, and the peeling direction of the sheet to the sheet a means for moving the movement in the case of moving, and a pressing means for pressing the succeeding sheet peeled off from the object to be pressed in the direction in which the object is to be placed; and selectively removing the one piece by the movement regulating means and the pressing means The aforementioned follower. The sheet peeling device according to the first aspect of the invention, wherein the movement regulating means is used for peeling off only the end portion of the peeling start side of the sheet. The sheet peeling device according to the second aspect of the invention, wherein the pressing means is used for peeling off the sheet after the peeling of the peeling start side end portion of the movement regulating means. A method for peeling a sheet, which is a method for peeling off a sheet to be attached to a sheet of a subject, and comprising: attaching a tape for peeling to the sheet to which the sheet is attached, and applying a tension to the sheet to be attached thereto The peeling tape for the sheet is peeled off from the front surface of the sheet; In the above-described stretching process, the movement of the above-mentioned succeeding sheet is selectively performed, and the movement of the object to be moved in the peeling direction of the sheet is selectively performed, and the peeling is performed from the object. Then, the sheet is pressed to the pressing work in the direction in which the object is to be pressed, and one of the subsequent sheets is peeled off.