TW201605001A - Method of manufacturing electronic package module and electronic package module manufactured by the same - Google Patents
Method of manufacturing electronic package module and electronic package module manufactured by the same Download PDFInfo
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- TW201605001A TW201605001A TW103126024A TW103126024A TW201605001A TW 201605001 A TW201605001 A TW 201605001A TW 103126024 A TW103126024 A TW 103126024A TW 103126024 A TW103126024 A TW 103126024A TW 201605001 A TW201605001 A TW 201605001A
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- 238000004519 manufacturing process Methods 0.000 title claims abstract description 19
- 239000002184 metal Substances 0.000 claims abstract description 71
- 238000000034 method Methods 0.000 claims abstract description 35
- 239000000758 substrate Substances 0.000 claims description 34
- 238000000465 moulding Methods 0.000 claims description 32
- 239000003292 glue Substances 0.000 claims description 17
- 239000000853 adhesive Substances 0.000 claims description 10
- 230000001070 adhesive effect Effects 0.000 claims description 10
- 238000005507 spraying Methods 0.000 claims description 7
- 150000001875 compounds Chemical class 0.000 claims description 6
- 239000007788 liquid Substances 0.000 claims description 6
- 238000007789 sealing Methods 0.000 claims description 5
- 238000007639 printing Methods 0.000 claims description 4
- 239000011347 resin Substances 0.000 claims description 4
- 229920005989 resin Polymers 0.000 claims description 4
- 230000001678 irradiating effect Effects 0.000 claims description 3
- 239000002923 metal particle Substances 0.000 claims description 2
- 238000005498 polishing Methods 0.000 claims description 2
- 238000000576 coating method Methods 0.000 abstract description 5
- 239000011248 coating agent Substances 0.000 abstract description 3
- 238000005429 filling process Methods 0.000 abstract 1
- 238000005520 cutting process Methods 0.000 description 6
- 230000004888 barrier function Effects 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 3
- 239000012778 molding material Substances 0.000 description 3
- 239000000243 solution Substances 0.000 description 3
- 238000004544 sputter deposition Methods 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 2
- 238000000227 grinding Methods 0.000 description 2
- 238000001746 injection moulding Methods 0.000 description 2
- 238000003698 laser cutting Methods 0.000 description 2
- 230000007257 malfunction Effects 0.000 description 2
- 230000000873 masking effect Effects 0.000 description 2
- 239000007769 metal material Substances 0.000 description 2
- 239000002861 polymer material Substances 0.000 description 2
- 239000007921 spray Substances 0.000 description 2
- 238000010146 3D printing Methods 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000007772 electroless plating Methods 0.000 description 1
- 238000004100 electronic packaging Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 229920005588 metal-containing polymer Polymers 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 229920001187 thermosetting polymer Polymers 0.000 description 1
Landscapes
- Encapsulation Of And Coatings For Semiconductor Or Solid State Devices (AREA)
- Shielding Devices Or Components To Electric Or Magnetic Fields (AREA)
- Structures Or Materials For Encapsulating Or Coating Semiconductor Devices Or Solid State Devices (AREA)
Abstract
Description
本發明係關於一種電子封裝模組之製造方法及其結構,特別係指一種利用固化光固性膠形成欄壩以進行局部性選擇模封的電子封裝模組製造方法及其結構。 The invention relates to a method for manufacturing an electronic package module and a structure thereof, in particular to a method for manufacturing an electronic package module and a structure thereof for forming a column dam by using a cured photo-curable glue for local selective sealing.
目前電子封裝模組通常會使用塑封材(molding compound)包覆(encapsulating)模組內的電子元件,以保護電子元件不受水氣等影響。然而,有的電子元件,特別是光電元件、電荷耦合元件、發光元件或是連接器元件,皆不宜被模封材所包覆,以避免電子元件受到模封材的包覆而影響運作或甚至無法運作。 At present, electronic packaging modules usually encapsulate electronic components in a module by using a molding compound to protect the electronic components from moisture and the like. However, some electronic components, especially photoelectric components, charge-coupled components, light-emitting components, or connector components, should not be covered by the molding material to prevent the electronic components from being coated by the molding material to affect the operation or even Can't work.
另一方面,隨著電子封裝模組內整合元件的密度提高,元件間的電磁交互干擾可能導致模組的效能失常或甚至錯誤作動,例如射頻元件對高頻的電磁波很敏感,容易被高頻元件或高速數位元件干擾。此部份現階段解決對策是使用金屬濺鍍或噴塗製程以產生電磁屏蔽金屬層,然而此法適合全面性的形成金屬遮蔽,無法針對不同電子元件之間產生金屬隔間,若是利用模封材料挖空再填入金屬做為隔間則耗時費工。 On the other hand, as the density of integrated components in the electronic package module increases, electromagnetic interaction between components may cause malfunction or even malfunction of the module. For example, the RF component is sensitive to high frequency electromagnetic waves and is easily HF. Component or high-speed digital components interfere. At this stage, the solution is to use a metal sputtering or spraying process to produce an electromagnetic shielding metal layer. However, this method is suitable for comprehensive metal shielding, and it is not possible to create a metal compartment between different electronic components, if a molding material is used. It takes time and labor to hollow out and refill the metal as a compartment.
本發明提供一種電子封裝模組之製造方法,利用固化光固性膠形成欄壩以進行局部模封。製造方法包含以下步驟:提供線路基板,該線路基板具有組裝平面、至少一接地墊;設置至少一電 子元件於該組裝平面上;形成至少一欄壩結構於該組裝平面上,其中該欄壩結構形成一模封區域,且至少一該些電子元件其中之一位於該模封區域;利用該欄壩結構形成至少一模封塊於該模封區域上方;以及形成金屬屏蔽層於該模封塊上。其中形成欄壩結構的方法包含利用列印噴頭噴出光固性膠,同時利用紫外光照射噴出之光固性膠。 The invention provides a method for manufacturing an electronic package module, which uses a cured photo-curable adhesive to form a dam to perform partial molding. The manufacturing method comprises the steps of: providing a circuit substrate having an assembly plane, at least one ground pad; and setting at least one electricity a sub-element on the assembly plane; forming at least one dam structure on the assembly plane, wherein the dam structure forms a die-bonding region, and at least one of the electronic components is located in the molding region; The dam structure forms at least one mold block over the mold sealing region; and forms a metal shielding layer on the mold block. The method for forming the structure of the dam includes spraying the photo-curable adhesive with a printing nozzle, and irradiating the photo-curable adhesive with ultraviolet light.
藉由上述方法,本發明進一步提供一種電子封裝模組,其具有上述製造方法所製成之局部模封的結構。或者,進一步更具有金屬隔間的結構,其係利用固化金屬膠或者具導電性的欄壩結構所構成。 According to the above method, the present invention further provides an electronic package module having a partially molded structure made by the above manufacturing method. Alternatively, there is a structure further having a metal compartment which is formed by a solidified metal paste or a conductive dam structure.
本發明之製造方法及其結構以光固性膠建立欄壩以對電子元件進行模封並產生隔間,之後進行金屬塗佈(metal coating),對電子元件產生金屬隔間屏蔽,防護電子元件免於受到電磁干擾(electromagnetic interference,EMI)。 The manufacturing method of the present invention and the structure thereof establish a column dam with a photo-curable glue to mold the electronic component and generate a compartment, and then perform metal coating to form a metal compartment shield for the electronic component, and protect the electronic component Free from electromagnetic interference (EMI).
為了能更進一步瞭解本發明所採取之技術、方法及功效,請參閱以下有關本發明之詳細說明、圖式,相信本發明的特徵與特點,當可由此得以深入且具體之瞭解,然而所附圖式與附件僅提供參考與說明用,並非用來對本發明加以限制者。 For a better understanding of the techniques, methods and efficacies of the present invention, reference should be made to the detailed description and drawings of the invention, The drawings and the annexed drawings are for the purpose of illustration and description only
11、21、31‧‧‧線路基板 11, 21, 31‧‧‧ circuit substrate
12、22、32‧‧‧欄壩 12, 22, 32‧‧‧ bar dam
13、23、33‧‧‧模封塊 13, 23, ‧ ‧ die block
14、34‧‧‧油墨層 14, 34‧‧‧ ink layer
15、25、35‧‧‧金屬屏蔽層 15, 25, 35‧‧‧ metal shield
36‧‧‧金屬膠 36‧‧‧Metal glue
17、27、37‧‧‧接地墊 17, 27, 37‧‧‧ grounding mat
18、28、38、19、29、39‧‧‧電子元件 18, 28, 38, 19, 29, 39‧‧‧ Electronic components
F‧‧‧治具 F‧‧‧ fixture
C1、C2‧‧‧切割線 C1, C2‧‧‧ cutting line
圖1A-1F為本發明電子封裝模組結構之第一實施例在製造過程中之側視圖;圖2為本發明電子封裝模組結構之第二實施例之側視圖;圖3A-3F為本發明電子封裝模組結構之第三實施例在製造過程中之側視圖;圖4為本發明電子封裝模組結構之第四實施例在製造過程中之上視圖。 1A-1F are side views of a first embodiment of an electronic package module structure according to the present invention; FIG. 2 is a side view of a second embodiment of the electronic package module structure of the present invention; FIG. A side view of a third embodiment of the electronic package module structure in the manufacturing process; FIG. 4 is a top view of the fourth embodiment of the electronic package module structure of the present invention in a manufacturing process.
以下將透過實施例來解釋本發明之一種電子封裝模組之製 造方法。需說明者,本發明之實施例並非用以限制本發明需在如下所述之任何特定之環境、應用或特殊方式方能實施。因此,關於實施例之說明僅為達到闡釋本發明之目的,而非用以限制本發明。 Hereinafter, an embodiment of an electronic package module of the present invention will be explained through an embodiment. Method of making. It should be noted that the embodiments of the present invention are not intended to limit the invention to any specific environment, application or special mode as described below. Therefore, the description of the embodiments is only for the purpose of illustrating the invention and is not intended to limit the invention.
請參考圖1A-1F,為本發明電子封裝模組結構第一實施例在製造過程中對應之側視圖。於此一實施例中,先參考圖1A,準備一線路基板11,線路基板11具有接地墊17,接地墊17的尺寸、形狀及範圍等沒有特別限制,主要是依設計需求而設置,做為後續形成的金屬屏蔽層15、欄壩結構12等電性連接用。 Please refer to FIG. 1A-1F , which are side views corresponding to the first embodiment of the electronic package module structure in the manufacturing process of the present invention. In this embodiment, referring to FIG. 1A, a circuit substrate 11 is prepared. The circuit substrate 11 has a ground pad 17. The size, shape and range of the ground pad 17 are not particularly limited, and are mainly set according to design requirements. The subsequently formed metal shield layer 15 and the dam structure 12 are electrically connected.
接著,將電子元件18裝設於線路基板11的組裝平面(例如上表面)上,其組裝方式可利用表面粘著技術(Surface Mount Technology,SMT)進行,但不以此為限。 Next, the electronic component 18 is mounted on the assembly plane (for example, the upper surface) of the circuit substrate 11. The assembly method can be performed by using Surface Mount Technology (SMT), but not limited thereto.
再來參考圖1B,於線路基板11的該組裝平面上形成欄壩結構12,其中,欄壩結構12沒有接觸接地墊17。欄壩結構12由光固性膠所形成,光固性膠成分例如為含有紫外感應之高分子材料。欄壩結構12形成方法可利用一般PCB板文字列印機(圖未示出),一邊噴塗該光固性膠,一邊以紫外線光照射該光固性膠使之固化,並藉由往復噴塗,以形成具有一定高度的欄壩結構12,如圖1B。可同時參考圖1B與圖4,圖1B顯示在線路基板11上方部份欄壩結構12及模封區域。欄壩結構12可為導電或不導電,若為導電,可選擇導電性良好的光固性膠,例如其成份包含金屬微粒以及光固性樹脂。 Referring again to FIG. 1B, a dam structure 12 is formed on the assembly plane of the circuit substrate 11, wherein the dam structure 12 does not contact the ground pad 17. The dam structure 12 is formed of a photo-curable adhesive, and the photo-curable adhesive component is, for example, a polymer material containing ultraviolet sensing. The method for forming the dam structure 12 can use a general PCB board text printer (not shown) to spray the photo-curable glue while curing the photo-curable glue with ultraviolet light, and by reciprocating spraying, To form a dam structure 12 having a certain height, as shown in FIG. 1B. Referring to FIG. 1B and FIG. 4 simultaneously, FIG. 1B shows a portion of the dam structure 12 and the molding area above the circuit substrate 11. The dam structure 12 can be electrically conductive or non-conductive. If it is electrically conductive, a photoconductive adhesive having good conductivity can be selected, for example, the composition includes metal particles and a photo-curable resin.
接著,於該模封區域內形成模封塊13並包覆電子元件18,形成模封塊13的方法可採用一般轉注成型或是壓注成型的方式,但不以此為限,較佳地,可利用欄壩結構12的阻隔性能,於欄壩結構12所形成的該模封區域內,噴入或灌入液態模封化合物至高度蓋過電子元件18,待模封塊13固化。於一較佳實施例中,可在填入液態模封化合物之後,將線路基板整體移置一般 真空爐(圖未示出)中進行脫泡,以防模封塊13中混有空氣;之後再加溫使液態模封化合物熟化(cured)與固化。另外,於一較佳實施例中,同時參考圖4,可一併利用邊框治具F與欄壩結構12的阻隔性能,於邊框治具F與欄壩結構12所圍繞起的該模封區域內形成模封塊13,其中邊框治具F是暫時性地裝設於線路基板11之最外圍,並包圍線路基板11。在此須特別說明的是,本實施例以利用邊框治具F配合欄壩結構12所圍繞起的模封區域進行模封,在其它實際運用上,也可以透過欄壩結構12整體的設計而省略邊框治具F,例如於形成模封塊13的預定區段上形成整個圈圍起來的欄壩結構12。 Then, the mold block 13 is formed in the mold sealing region and the electronic component 18 is covered. The method of forming the mold block 13 can be generally formed by injection molding or injection molding, but not limited thereto. The barrier properties of the dam structure 12 can be utilized to inject or fill the liquid molding compound to the height of the electronic component 18 in the molding region formed by the dam structure 12, and the molding block 13 is cured. In a preferred embodiment, the entire circuit substrate can be displaced after filling the liquid molding compound. Defoaming is carried out in a vacuum furnace (not shown) to prevent air from being mixed in the mold block 13; thereafter, the liquid molding compound is cured and cured by heating. In addition, in a preferred embodiment, referring to FIG. 4 at the same time, the barrier property of the frame fixture F and the dam structure 12 can be utilized together, and the molding region surrounded by the frame fixture F and the dam structure 12 can be used. The mold block 13 is formed therein, wherein the frame jig F is temporarily mounted on the outermost periphery of the circuit substrate 11 and surrounds the circuit substrate 11. It should be particularly noted that the present embodiment is molded by using the frame fixture F to match the molding area surrounded by the dam structure 12, and in other practical applications, the overall design of the dam structure 12 can also be adopted. The frame fixture F is omitted, for example, forming a fenced structure 12 that is entirely enclosed on a predetermined section forming the mold block 13.
再來參考圖1C,在建立電磁防護用的金屬屏蔽層15之前,可選擇性地將模封塊13與欄壩結構12上表面拋光,例如利用磨床或是雷射等方式拋光,但不以此為限。接著,在線路基板11組裝平面上的預留區形成一層油墨層14。油墨層14可使用由感光固化性樹酯或熱固化性樹酯組成的油墨,例如液態感光型油墨,並且可於後續製程之後簡單移除。如圖1C,預留區例如用於後續電性連接其它電子元件,油墨層14沒有覆蓋模封塊13,也沒有覆蓋接地墊17。 Referring to FIG. 1C, before the metal shielding layer 15 for electromagnetic shielding is established, the upper surface of the molding block 13 and the dam structure 12 may be selectively polished, for example, by a grinding machine or a laser, but not by This is limited. Next, an ink layer 14 is formed on the reserved area on the assembly plane of the circuit substrate 11. The ink layer 14 may use an ink composed of a photosensitive curable resin or a thermosetting resin, such as a liquid photosensitive ink, and can be simply removed after a subsequent process. As shown in FIG. 1C, the reserved area is used, for example, for subsequent electrical connection to other electronic components, and the ink layer 14 does not cover the mold block 13 nor covers the ground pad 17.
之後請參考圖1D,整面性地鍍上金屬屏蔽層15,金屬屏蔽層15完整覆蓋模封塊13並且與組裝平面上的接地墊17電性連接。再者,金屬屏蔽層15可覆蓋線路基板11的側面,與線路基板11側邊的金屬接墊17形成電性連接。形成金屬遮蔽層15的製程可採用例如金屬噴塗(Spray coating)、無電鍍製程(electroless plating)或濺鍍製程(Sputtering)等常見的金屬塗佈製程,也可採用黏貼導電膠帶等方式,但不以此為限。 Referring to FIG. 1D, the metal shield layer 15 is entirely coated on the entire surface, and the metal shield layer 15 completely covers the mold block 13 and is electrically connected to the ground pad 17 on the assembly plane. Furthermore, the metal shield layer 15 can cover the side surface of the circuit substrate 11 and be electrically connected to the metal pads 17 on the side of the circuit substrate 11. The metal masking layer 15 can be formed by a common metal coating process such as a spray coating, an electroless plating or a sputtering process, or a conductive tape, but not This is limited to this.
接著,請參考圖1E,將油墨層14移除。上述使用油墨層14形成於預留區,接著全面形成金屬屏蔽層15、再移除油墨層14的方法,也可以選擇其它方式形成金屬屏蔽層15於模封塊13上 方並電性連接接地墊17,例如採用具有圖案的遮罩(mask)再搭配金屬噴塗(Spray coating)或濺鍍製程(Sputtering)等金屬塗佈製程。 Next, referring to FIG. 1E, the ink layer 14 is removed. The above-mentioned method of using the ink layer 14 is formed in the reserved area, and then the metal shielding layer 15 is completely formed, and then the ink layer 14 is removed. Alternatively, the metal shielding layer 15 may be formed on the molding block 13 in other manners. The ground pad 17 is electrically connected, for example, with a patterned mask and a metal coating process such as a spray coating or a sputtering process.
上述流程適用於欄壩結構12具導電性或不具導電性,假如欄壩結構12不具導電性,金屬屏蔽層15除了覆蓋模封塊13與欄壩結構12上表面之外,金屬屏蔽層15需進一步延伸覆蓋欄壩結構12之側壁以及接地墊17,並且,此接地墊17不與欄壩結構12重疊或連接,借此讓金屬屏蔽層15與接地墊17接觸面積最大,以增大接地效果。假如欄壩結構12具導電性,金屬屏蔽層15可以僅覆蓋模封塊13與欄壩結構12上表面而不覆蓋欄壩結構12之側壁,此時接地墊17則需與欄壩結構12至少部份重疊以作電性連接,如後所舉實施例。 The above procedure is applicable to the structure of the dam structure 12 being electrically conductive or non-conducting. If the dam structure 12 is not electrically conductive, the metal shielding layer 15 needs to cover the upper surface of the molding block 13 and the dam structure 12, and the metal shielding layer 15 is required. Further extending the sidewall of the fence dam structure 12 and the grounding pad 17, and the grounding pad 17 is not overlapped or connected with the dam structure 12, thereby maximizing the contact area between the metal shielding layer 15 and the grounding pad 17 to increase the grounding effect. . If the dam structure 12 is electrically conductive, the metal shielding layer 15 may cover only the upper surface of the molding block 13 and the dam structure 12 without covering the side wall of the dam structure 12. At this time, the grounding pad 17 needs to be at least with the dam structure 12. Partially overlapping for electrical connection, as exemplified below.
請參考圖1F,後續即可將電子元件19設置於線路基板11沒有模封塊的區域上,電子元件19例如為不宜被模封塊包覆的光電元件,例如CMOS影像感測器、CCD、發光二極體或連接器等,其組裝方式可利用表面黏著技術進行,然不以此為限。 Referring to FIG. 1F, the electronic component 19 can be disposed on the circuit substrate 11 without the molding block. The electronic component 19 is, for example, a photovoltaic component that is not covered by the molding block, such as a CMOS image sensor, a CCD, or the like. Light-emitting diodes or connectors, etc., can be assembled by using surface adhesion technology, but not limited thereto.
接下來請參考圖2,為本發明電子封裝模組結構第二實施例之側視圖。於此一實施例中,大部分製程皆與第一實施例類似,例如電子元件的粘著方式、模封塊形成方式、金屬屏蔽層形成方式、欄壩結構的材料及形成方式等,於第二實施例中將不再贅述其細節。此第二實施例與第一實施例最主要的差異為,於第一實施例中(圖1E、圖1F),欄壩結構12可於線路基板11的組裝平面上形成多個模封塊,例如,第一實施例中的兩個模封塊分別位於組裝平面的不同邊;於第二實施例中,欄壩結構22可於組裝平面上僅形成一個模封塊。然而,欄壩結構12、22的個別尺寸、形狀及範圍沒有一定限制,可依需求做不同的設計,例如,在模封區域上,欄壩結構22可進一步同時存在於各別電子元件之間,以圖2為例,圖中三個電子元件28之間分別存在欄壩結構22,即可形成三個模封塊。 Next, please refer to FIG. 2, which is a side view of a second embodiment of the electronic package module structure of the present invention. In this embodiment, most of the processes are similar to the first embodiment, such as the adhesion mode of the electronic component, the formation mode of the die block, the formation mode of the metal shield layer, the material of the bar dam structure, and the formation manner, etc. The details will not be described again in the second embodiment. The main difference between this second embodiment and the first embodiment is that in the first embodiment (FIG. 1E, FIG. 1F), the dam structure 12 can form a plurality of mold blocks on the assembly plane of the circuit substrate 11. For example, the two mold blocks in the first embodiment are respectively located on different sides of the assembly plane; in the second embodiment, the column dam structure 22 can form only one mold block on the assembly plane. However, the individual sizes, shapes, and ranges of the dam structures 12, 22 are not limited, and may be designed differently according to requirements. For example, in the molded area, the dam structure 22 may be further present between the respective electronic components. Taking FIG. 2 as an example, the bar dam structure 22 exists between the three electronic components 28 in the figure, so that three mold blocks can be formed.
接下來請參考圖3A-3F,圖3A-3F為本發明電子封裝模組結構之第三實施例在製造過程中之側視圖。於此一實施例中,大部分製程皆與第一、第二實施例類似,例如電子元件的粘著方式、模封塊形成方式及金屬屏蔽層形成方式等,於第三實施例中將不再贅述其細節。此第三實施例與第一、第二實施例最主要的差異為,欄壩結構32具有導電性,例如是以導電膠固化後所形成,且欄壩結構32與接地墊37電性連接,而金屬屏蔽層35電性連接欄壩結構32。 3A-3F, FIG. 3A-3F are side views of a third embodiment of the electronic package module structure of the present invention in a manufacturing process. In this embodiment, most of the processes are similar to the first and second embodiments, such as the manner in which the electronic components are adhered, the manner in which the mold blocks are formed, and the manner in which the metal shield is formed, etc., which will not be in the third embodiment. Let us repeat the details. The most important difference between the third embodiment and the first and second embodiments is that the dam structure 32 has electrical conductivity, for example, formed by curing with a conductive paste, and the dam structure 32 is electrically connected to the ground pad 37. The metal shield layer 35 is electrically connected to the column dam structure 32.
詳細而言,請先參考圖3A,準備一線路基板31,線路基板31具有接地墊37,接地墊37的尺寸、形狀及範圍等沒有特別限制,主要是依設計需求而設置,並使後續形成的欄壩結構32可以與接地墊37電性連接。 In detail, referring to FIG. 3A, a circuit substrate 31 is prepared. The circuit substrate 31 has a ground pad 37. The size, shape, and range of the ground pad 37 are not particularly limited, and are mainly set according to design requirements, and are subsequently formed. The dam structure 32 can be electrically connected to the ground pad 37.
接著,將電子元件38裝設於線路基板31上。再來,形成欄壩結構32於線路基板31的接地墊37上,欄壩結構32是由導電的光固性金屬膠所形成,其成分為含有金屬的高分子材料,可利用一般PCB板文字列印機(圖未示出),一邊噴塗該光固性金屬膠,一邊以紫外線光照射該光固性金屬膠使之固化,並藉由往復噴塗,以形成具有一定高度的欄壩結構32。之後,於欄壩結構32所圍繞起的區域內形成模封塊33並包覆電子元件38。 Next, the electronic component 38 is mounted on the wiring substrate 31. Then, the dam structure 32 is formed on the ground pad 37 of the circuit substrate 31, and the dam structure 32 is formed of a conductive photo-curable metal glue, and the component thereof is a metal-containing polymer material, and the general PCB board text can be utilized. A printing machine (not shown) sprays the photo-curable metal glue while irradiating the photo-curable metal glue with ultraviolet light to cure it, and re-spraying to form a dam structure 32 having a certain height. . Thereafter, a mold block 33 is formed in the region surrounded by the dam structure 32 and covers the electronic component 38.
此實施例與前述實施例的另一差異是,為了針對某些電子元件進一步形成金屬隔間以屏蔽與相鄰電子元件間的電磁干擾,此目的可以透過兩種技術方案達成,一為此金屬隔間為欄壩結構32的一部份,另一為利用雷射開孔或開槽,並填入金屬材料以形成金屬隔間。利用雷射開孔或開槽,並填入金屬材料形成金屬隔間的方法詳如下述。請先參考圖3B,利用欄壩結構32形成模封塊33並修整上表面後,接著於線路基板31的局部區域以及模封塊33上覆蓋一層油墨層34,以保護表面不受後續製程所產生的髒污黏附。接著,為了對某些電子元件38形成各別的金屬隔間屏 蔽,可在需要處利用雷射直接對模封塊33開槽,於此可利用接地墊37與模封塊33對雷射吸收程度的不同而使接地墊37作為雷射切割終止端,但本發明不限於此一概念,只要能夠達到僅切割模封塊33而保留線路基板31的手段即可,例如也可利用外型切割(routing)來對模封塊33開槽。 Another difference between this embodiment and the foregoing embodiment is that in order to further form a metal compartment for certain electronic components to shield electromagnetic interference with adjacent electronic components, the object can be achieved by two technical solutions, one for the metal The compartment is part of the dam structure 32 and the other is to use a laser to open or slot and fill the metal material to form a metal compartment. A method of forming a metal compartment by using a laser to open or grooving and filling a metal material is as follows. Referring to FIG. 3B, after the molding block 33 is formed by the dam structure 32 and the upper surface is finished, a portion of the circuit substrate 31 and the molding block 33 are covered with an ink layer 34 to protect the surface from subsequent processes. The resulting dirt adheres. Next, in order to form a separate metal compartment screen for certain electronic components 38 The masking block 33 can be directly slotted by laser using a laser, and the grounding pad 37 can be used as the laser cutting end end by using the grounding pad 37 and the sealing block 33 to different degrees of laser absorption. The present invention is not limited to this concept as long as it can achieve the means of cutting only the mold block 33 while leaving the circuit substrate 31. For example, the mold block 33 can also be grooved by external routing.
開槽後,可於槽中注入金屬膠36並將金屬膠36固化,如圖3C所示。此處金屬膠36可使用一般習知金屬膠,較佳可使用熱固化性的金屬膠,但不以此為限,只要能因應上述雷射所開之槽較細且深的特性,使填入之金屬膠完全固化即可。 After the grooving, the metal glue 36 can be injected into the groove and the metal glue 36 can be solidified as shown in Fig. 3C. Here, the metal glue 36 can use a conventional metal glue, and it is preferable to use a heat-curable metal glue, but it is not limited thereto, as long as it can meet the finer and deeper characteristics of the groove opened by the above laser. The metal glue can be completely cured.
接著,移除模封塊33上方的油墨層34,如圖3D所示。詳細而言,全面移除油墨層34之後,再搭配具有圖案化設計的遮罩再將油墨層34部份形成於未模封區上。在實作上,若對上表面平整度有所要求,則可進行一拋光或研磨步驟將模封塊33及欄壩結構32上表面磨平,此時,則可省去上述全面移除油墨層34再將油墨層34部份形成於未模封區上的製程。如此一來,即可達成對選定電子元件38形成各別金屬隔間的目的,例如射頻元件與高頻元件間的互相干擾,以此方法即可以簡單的製程對電子元件之間形成完整的電磁防護。 Next, the ink layer 34 over the mold block 33 is removed, as shown in Figure 3D. In detail, after the ink layer 34 is completely removed, the ink layer 34 is partially formed on the unmolded area by a mask having a patterned design. In practice, if the upper surface flatness is required, a polishing or grinding step may be performed to smooth the upper surface of the mold block 33 and the dam structure 32. In this case, the above comprehensive removal of the ink may be omitted. Layer 34 then forms portions of ink layer 34 on the unmolded regions. In this way, the purpose of forming the respective metal compartments for the selected electronic components 38 can be achieved, for example, mutual interference between the radio frequency components and the high-frequency components, so that a complete electromagnetic process can be formed between the electronic components by a simple process. Protection.
參圖3E,形成金屬屏蔽層35全面性覆蓋模封塊33頂部、欄壩結構32、接地墊37與油墨層34。如此一來,金屬屏蔽層35即可同時經由金屬屏蔽層35本身及欄壩結構32與接地墊37形成電性連接。 Referring to FIG. 3E, a metal shield layer 35 is formed to cover the top of the mold block 33, the dam structure 32, the ground pad 37, and the ink layer 34. In this way, the metal shield layer 35 can be electrically connected to the ground pad 37 via the metal shield layer 35 itself and the dam structure 32.
接著,如圖3F,將油墨層34移除,後續可將電子元件39設置於線路基板31無模封塊的區域上。電子元件39例如連接器、光學感測元件。 Next, as shown in FIG. 3F, the ink layer 34 is removed, and the electronic component 39 can be subsequently disposed on the area of the circuit substrate 31 without the mold block. The electronic component 39 is, for example, a connector or an optical sensing component.
接下來請參考圖4,圖4為本發明電子封裝模組結構之第四實施例在製造過程中之上視圖。於第四實施例中,多個電子封裝模組結構可同時完成,而圖1C可以僅代表如圖4之多個電子封裝 模組結構之中的單一一個電子封裝模組結構。 Next, please refer to FIG. 4. FIG. 4 is a top view of the fourth embodiment of the electronic package module structure of the present invention in a manufacturing process. In the fourth embodiment, a plurality of electronic package module structures can be simultaneously completed, and FIG. 1C can only represent a plurality of electronic packages as shown in FIG. A single electronic package module structure in the module structure.
進一步而言,多個電子封裝模組結構之圖1A-1C的步驟皆可於同一線路基板11上同時進行。在完成如圖1A-1C的步驟之後,即可沿圖4所示例切割線C1、C2進一步進行切割製程,以將各電子封裝模組以外型切割(routing)或雷射切割等方式切開,以形成多個獨立的電子封裝模組,即可接著進行如圖1D-1F的步驟,以得到多個具有完整金屬屏蔽的電子封裝模組。 Further, the steps of FIGS. 1A-1C of the plurality of electronic package module structures can be simultaneously performed on the same circuit substrate 11. After the steps of FIG. 1A-1C are completed, the cutting process can be further performed along the cutting lines C1 and C2 shown in FIG. 4 to cut out the electronic package modules by cutting or laser cutting. Forming a plurality of independent electronic package modules, the steps of FIGS. 1D-1F can be followed to obtain a plurality of electronic package modules having complete metal shields.
另外,上述各實施例也可選擇其它技術方案進行製程上的搭配或替換,如下所述。其一如光電元件預定區(即無模封塊區域)上的電子元件19、29、39可以跟其它電子元件18、28、38於同一製程設置於線路基板上;舉例如圖3F的電子元件39設置於線路基板31無模封塊區域上之步驟,可以合併在圖3A將電子元件38裝設於線路基板31上時,一起將電子元件39設置於線路基板31上,如此第三實施例中無模封塊區域上之油墨層34即可省略,後續例如形成油墨層34於模封塊33上方、形成金屬屏蔽層35等製程可依需要而使用治具遮罩此區域以使電子元件39不受影響。其二,當欄壩結構具導電性時,金屬屏蔽層只覆蓋模封塊上表面及欄壩結構頂部但不覆蓋欄壩結構的側壁,此時金屬屏蔽層透過欄壩結構電性連接接地墊。其三,例如是在形成模封塊之後進行切割製程以形成多個獨立的電子封裝模組,再進行金屬屏蔽層15、25、35覆蓋整個獨立的電子封裝模組的外表面,包括模封塊與欄壩結構的上表面、欄壩結構側壁、接地墊,乃至基板側邊接地墊。 In addition, the above embodiments may also select other technical solutions for collocation or replacement on the process, as described below. The electronic components 19, 29, 39 on the predetermined area of the photovoltaic element (ie, the moldless block area) can be disposed on the circuit substrate in the same process as the other electronic components 18, 28, 38; for example, the electronic component of FIG. 3F 39 is disposed on the circuit board 31 without the mold block region, and may be combined with the electronic component 39 disposed on the circuit substrate 31 when the electronic component 38 is mounted on the circuit substrate 31 in FIG. 3A. Thus, the third embodiment The ink layer 34 on the middle moldless block region can be omitted, and the process of forming the ink layer 34 over the mold block 33 and forming the metal shield layer 35 can be used to cover the region to make the electronic component. 39 is not affected. Second, when the dam structure is electrically conductive, the metal shielding layer covers only the upper surface of the molding block and the top of the dam structure but does not cover the side wall of the dam structure. At this time, the metal shielding layer is electrically connected to the grounding pad through the dam structure. . Thirdly, for example, after forming the mold block, a cutting process is performed to form a plurality of independent electronic package modules, and then the metal shielding layers 15, 25, 35 cover the outer surface of the entire independent electronic package module, including the mold seal. The upper surface of the block and dam structure, the side wall of the dam structure, the grounding pad, and even the grounding pad on the side of the substrate.
再者,於本發明另一未繪示的實施例中,線路基板的一表面上可具有多個導電或不導電的欄壩結構所圍成的兩個以上的隔間,這些欄壩結構之中的至少一個導電欄壩結構可為相鄰兩個金屬隔間屏蔽所共用。欄壩結構的個別尺寸、形狀,以及其所圍成的範圍可依需求做不同的設計,提供具有選擇性局部模封的產品 及其製程上的設計彈性。 Furthermore, in another embodiment of the present invention, one surface of the circuit substrate may have two or more compartments surrounded by a plurality of conductive or non-conductive bar dam structures. At least one of the conductive bar dam structures may be shared by two adjacent metal compartment shields. The individual dimensions, shapes, and extents of the dam structure can be designed differently according to requirements, providing products with selective partial molding. Design flexibility in its process.
又,於本發明另一未繪示的實施例中,欄壩結構的個別尺寸、形狀及範圍可針對線路基板上的多個模封區域而設計。具體來說,欄壩結構除了能將電子元件圍繞起來,同時也能將線路基板分隔成多個區域。接著,可依實際需求,選擇於這些由欄壩結構所圍繞、分隔的區域之中的至少一個區域內,形成模封塊並包覆這些區域內的電子元件。接著修整模封塊表面,之後再進行金屬屏蔽層製程,即可形成局部模封、局部屏蔽的金屬隔間屏蔽。 Moreover, in another embodiment of the invention not shown, the individual dimensions, shapes and ranges of the dam structure can be designed for a plurality of die areas on the circuit substrate. Specifically, the column dam structure can not only surround the electronic components, but also divide the circuit substrate into a plurality of regions. Then, according to actual needs, at least one of the regions surrounded and separated by the dam structure may be selected to form a molding block and cover the electronic components in the regions. Then, the surface of the mold block is trimmed, and then the metal shield process is performed to form a partially sealed, partially shielded metal compartment shield.
綜上所述,本發明電子封裝模組利用光固性膠,只要用一般的列印噴頭搭配紫外光就可以類似3D列印的概念建立欄壩結構,再利用欄壩結構的阻隔特性形成模封塊,搭配金屬塗佈即可以簡單的製程形成多個金屬隔間屏蔽,達到對電子元件防護電磁干擾的目的,不但可依需求完成任意形態的金屬隔間,更因以此方法所形成的金屬隔間側壁(亦即導墊的欄壩結構)厚度較薄,可增加空間的利用率與設計彈性。 In summary, the electronic package module of the present invention utilizes a photo-curable adhesive, and a bar-like structure can be established similar to the concept of 3D printing by using a general printing nozzle with ultraviolet light, and then the barrier property of the bar dam structure is used to form a mode. Blocking, with metal coating, can form a plurality of metal compartment shields in a simple process to achieve electromagnetic interference protection for electronic components. Not only can metal compartments of any shape be completed according to requirements, but also formed by this method. The thin side wall of the metal compartment (that is, the dam structure of the guide pad) is thinner, which can increase space utilization and design flexibility.
11‧‧‧線路基板 11‧‧‧Line substrate
12‧‧‧接地墊 12‧‧‧ Grounding mat
13‧‧‧欄壩 13‧‧‧ dam
15‧‧‧金屬屏蔽層 15‧‧‧Metal shield
17‧‧‧接地墊 17‧‧‧ Grounding mat
18‧‧‧電子元件 18‧‧‧Electronic components
19‧‧‧電子元件 19‧‧‧Electronic components
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| TWI732517B (en) * | 2020-04-09 | 2021-07-01 | 矽品精密工業股份有限公司 | Electronic package and manufacturing method thereof |
| CN113611688A (en) * | 2021-08-03 | 2021-11-05 | 东莞记忆存储科技有限公司 | Chip structure and processing method thereof |
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| TWI448224B (en) * | 2012-09-24 | 2014-08-01 | 環旭電子股份有限公司 | Electronic module and method of manufacturing same |
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| KR102690174B1 (en) * | 2021-09-30 | 2024-07-30 | 시바우라 메카트로닉스 가부시끼가이샤 | Film formation method, resin layer forming apparatus, film formation apparatus, and circuit board with electromagnetic wave shield |
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