TW201535050A - Black resin composition for light shielding film, substrate with light shielding film color filter and touch panel - Google Patents
Black resin composition for light shielding film, substrate with light shielding film color filter and touch panel Download PDFInfo
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- TW201535050A TW201535050A TW104107270A TW104107270A TW201535050A TW 201535050 A TW201535050 A TW 201535050A TW 104107270 A TW104107270 A TW 104107270A TW 104107270 A TW104107270 A TW 104107270A TW 201535050 A TW201535050 A TW 201535050A
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- Prior art keywords
- light
- black
- shielding film
- mass
- particles
- Prior art date
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- 239000000758 substrate Substances 0.000 title claims abstract description 62
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- 239000011347 resin Substances 0.000 claims abstract description 66
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Classifications
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08K—Use of inorganic or non-macromolecular organic substances as compounding ingredients
- C08K3/00—Use of inorganic substances as compounding ingredients
- C08K3/02—Elements
- C08K3/04—Carbon
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08K—Use of inorganic or non-macromolecular organic substances as compounding ingredients
- C08K3/00—Use of inorganic substances as compounding ingredients
- C08K3/34—Silicon-containing compounds
- C08K3/36—Silica
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/20—Filters
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/0005—Production of optical devices or components in so far as characterised by the lithographic processes or materials used therefor
- G03F7/0007—Filters, e.g. additive colour filters; Components for display devices
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- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/09—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers
- G03F7/105—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers having substances, e.g. indicators, for forming visible images
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Abstract
Description
本發明涉及一種遮光膜用黑色樹脂組成物、在玻璃等透明基板上包含使該組成物硬化而成的遮光膜的帶遮光膜的基板,以及以該帶遮光膜的基板為構成元件的液晶顯示器(Liquid Crystal Display,LCD)等的顯示器用彩色濾光片及顯示裝置用觸控面板。詳細而言涉及一種適於在透明基板上形成微細的遮光膜的由於光或熱而硬化的黑色樹脂組成物,及一種在選擇的位置上形成該遮光膜的帶遮光膜的基板。 The present invention relates to a black resin composition for a light-shielding film, a light-shielding substrate including a light-shielding film obtained by curing the composition on a transparent substrate such as glass, and a liquid crystal display having the light-shielding substrate as a constituent element. A color filter for a display such as a liquid crystal display (LCD) or a touch panel for a display device. More specifically, it relates to a black resin composition which is hardened by light or heat to form a fine light-shielding film on a transparent substrate, and a light-shielding substrate which forms the light-shielding film at a selected position.
在液晶電視、液晶顯示器、彩色液晶行動電話等各種領域中使用彩色液晶面板。彩色液晶面板成為如下的結構:經由密封材料將形成有彩色濾光片的基板與對向基板(薄膜電晶體(Thin Film Transistor,TFT)基板)貼合,在兩個基板之間填充液晶。其中,彩色濾光片的製造方法通常使用如下方法:在玻璃、塑膠片材等透明基板的表面,形成黑色矩陣(所述黑色矩陣起到藉由 抑制紅、綠、藍各色之間的混色而提高對比度的作用),繼而順次用條紋狀或馬賽克狀等彩色圖案形成起到表現出所有自然色的作用的紅、綠、藍的不同色相。而且,在觸控面板中,在前面玻璃上形成觸控面板電路的情況下,為了隱藏金屬等取出配線,採用在畫面的周邊部形成以邊框狀形成的遮光層的方法。 Color liquid crystal panels are used in various fields such as liquid crystal televisions, liquid crystal displays, and color liquid crystal mobile phones. The color liquid crystal panel has a structure in which a substrate on which a color filter is formed is bonded to a counter substrate (Thin Film Transistor (TFT) substrate) via a sealing material, and a liquid crystal is filled between the two substrates. Wherein, the method for manufacturing a color filter generally uses a method of forming a black matrix on a surface of a transparent substrate such as a glass or a plastic sheet (the black matrix is used by The color mixture between the red, green, and blue colors is suppressed to enhance the contrast. Then, a color pattern such as a stripe or a mosaic is sequentially used to form different hue of red, green, and blue which exhibit the function of all natural colors. Further, in the case where the touch panel circuit is formed on the front glass in the touch panel, in order to hide the wiring such as metal, a method of forming a light shielding layer formed in a frame shape at the peripheral portion of the screen is employed.
作為形成彩色濾光片的黑色矩陣或觸控面板的邊框的 遮光膜的遮光材料,主要使用遮光性高的碳黑。然而,產生如下的問題:碳黑的反射光通常並不成為並未著色的黑色、亦即無彩色的黑色,在多數情況下多少會著色為茶色系的色調,因此變得漏出該著色的光、亦即自無彩色偏離的光,因此在用彩色濾光片顯示黑色或亮度低的顏色的情況下,無法顯示所期望的顏色。而且,還存在如下問題:在電源關閉(OFF)時,與黑色嵌槽(液晶顯示裝置或觸控面板的顯示畫面的周圍的邊框部分)產生顏色偏差而造成設計性欠佳,在對設計性的要求多樣化中,調整黑色的色相的需求逐漸變高。另外,在碳黑以外的黑色遮光材料中,在多數情況下並不為無彩色的黑色,因此要求調整為無彩色的黑色的技術。近年來,為了使液晶面板的視認性提高及使其具有設計性,要求黑色矩陣為“中性黑”(並未著色的黑色:無彩色)。而且,在觸控面板中也存在需要使邊框部分與黑色嵌槽的色相一致的情況,在這種情況下,要求觸控面板邊框為中性黑。 As a black matrix or a touch panel border forming a color filter The light-shielding material of the light-shielding film mainly uses carbon black having high light-shielding property. However, there is a problem that the reflected light of the carbon black usually does not become black which is not colored, that is, achromatic black, and in many cases, it is colored to a brown color tone, and thus the colored light is leaked. That is, light that is deviated from achromatic color, so that when a color filter is used to display black or a low-luminance color, the desired color cannot be displayed. Moreover, there is a problem that when the power is turned off (OFF), color deviation occurs with the black recessed groove (the frame portion around the display screen of the liquid crystal display device or the touch panel), resulting in poor design, in design In the diversification of demand, the demand for adjusting the hue of black is gradually increasing. Further, in the black light-shielding material other than carbon black, in many cases, it is not an achromatic black color, and therefore a technique of adjusting to an achromatic black color is required. In recent years, in order to improve the visibility of a liquid crystal panel and design thereof, it is required that the black matrix be "neutral black" (black which is not colored: achromatic). Moreover, in the touch panel, there is also a case where the color of the frame portion and the black groove are required to be matched. In this case, the touch panel frame is required to be neutral black.
為了實現中性黑,在專利文獻1中記載了需要使C光源 或F10光源中的樹脂黑色矩陣的透射光及/或反射光的XYZ表色系 統中的色度坐標與光源的色度坐標一致。其中,具體記載的技術是使碳黑與有機顏料(相對於該碳黑帶自無彩色偏離的茶色系的色相而言,該有機顏料包含作為茶色系色相的補色的藍色系或紫色系的顏料)分散而調整色度的技術,需要加入較多的補色用顏料。然而,特別是在為了提高遮光性而使碳黑的含量在抗蝕劑中高的情況下,如果進一步大量加入補色用顏料,則有助於硬化性的黏合樹脂或硬化性單體成分等的調配比例相對變小,因此塗膜變得難以充分硬化,塗膜與玻璃基板的密接性降低,產生變得容易產生剝落等的問題,或者耐環境試驗後的電阻率、密接性降低等對可靠性特性的不良影響。而且,僅僅關於透射光的色度調整而加以記載,但關於反射光的色度調整,並未具體地表示。 In order to realize neutral black, Patent Document 1 describes that it is necessary to make a C light source Or the XYZ color system of the transmitted light and/or reflected light of the resin black matrix in the F10 light source The chromaticity coordinates in the system are consistent with the chromaticity coordinates of the source. Among them, the specifically described technique is to make carbon black and an organic pigment (the hue of the brown color which is deviated from the achromatic color with respect to the carbon black band, and the organic pigment contains a blue or purple color which is a complementary color of the brown color hue. The technique of dispersing and adjusting the chromaticity of the pigment requires the addition of more pigments for complementary colors. However, in particular, when the content of carbon black is high in the resist in order to improve the light-shielding property, if a pigment for a complementary color is further added in a large amount, it contributes to the formulation of a curable adhesive resin or a curable monomer component. When the ratio is relatively small, the coating film becomes difficult to be sufficiently cured, and the adhesion between the coating film and the glass substrate is lowered, and there is a problem that peeling or the like is likely to occur, or the electrical resistivity and adhesion after the environmental test are lowered. Adverse effects of the characteristics. Further, only the chromaticity adjustment of the transmitted light is described, but the chromaticity adjustment of the reflected light is not specifically shown.
而且,作為使反射色為中性黑的方法,揭示了在作為遮光材料的碳黑或氮化鈦中添加著色顏料的紅色顏料或黃色顏料而進行調色的技術(專利文獻2及專利文獻3),但並未提及關於所使用的遮光材料與著色顏料的分散狀態,對於可確實地調整為目標的中性黑或具有優選的傾向的自中性黑稍許變藍的反射色的技術的要求變高。 In addition, as a method of making the reflected color neutral black, a technique of performing coloring by adding a red pigment or a yellow pigment of a coloring pigment to carbon black or titanium nitride as a light-shielding material is disclosed (Patent Document 2 and Patent Document 3) However, there is no mention of the state of dispersion of the light-shielding material and the coloring pigment used, and the technique of being able to positively adjust to the target neutral black or to have a preferred tendency to slightly change the color of the blue from the neutral black. The request is getting higher.
[專利文獻1]WO95/35525號說明書 [Patent Document 1] WO95/35525 Specification
[專利文獻2]日本專利特開2011-227467號公報 [Patent Document 2] Japanese Patent Laid-Open Publication No. 2011-227467
[專利文獻3]日本專利特開2014-119640號公報 [Patent Document 3] Japanese Patent Laid-Open Publication No. 2014-119640
本發明是鑒於該技術的諸多缺點而發明,其目的在於提供遮光膜及帶遮光膜的基板,所述遮光膜是遮光性高的黑色的遮光膜,且是反射光被調整為無彩色的黑色或稍許帶藍色調的黑色的色度的彩色濾光片用黑色矩陣等的遮光膜。亦即,其中一個目的是使用使遮光材料分散於樹脂中而成的特定的遮光膜用黑色樹脂組成物,獲得反射光的L*a*b*表色系統中的色度坐標(a*,b*)≒(0.0,0.0)的遮光膜,於實用上而言,重要的是可進行用以使色度與黑色嵌槽一致的色度調整,因此目的在於獲得對a*、b*進行色度調整為-側(負側)而使其與黑色嵌槽等的色相吻合的遮光膜。 The present invention has been made in view of many disadvantages of the present invention, and an object thereof is to provide a light-shielding film which is a black light-shielding film having high light-shielding property and a black light whose color is adjusted to be achromatic, and a light-shielding film. Or a black chromatic color filter with a blue tint is a light-shielding film such as a black matrix. That is, one of the purposes is to obtain a chromaticity coordinate (a * , in the L * a * b * color system of the reflected light using a specific black light resin composition for dispersing the light-shielding material in the resin. b * ) 遮光 (0.0, 0.0) of the light-shielding film, practically, it is important to perform chromaticity adjustment for matching the chromaticity with the black groove, so that the purpose is to obtain a * , b * A light-shielding film whose chromaticity is adjusted to the - side (negative side) to match the hue of a black groove or the like.
本發明者等人為了解決所述現有技術的問題點而進行了努力研究,結果發現藉由除了碳黑、鈦黑等黑色遮光性粒子、及硬化性樹脂或硬化性單體以外,使用特定的顏色調整用粒子而製成黑色樹脂組成物,可將遮光膜的色度調整為無彩色化或帶藍色調的黑色。而且,發現在該黑色樹脂組成物中,通過將黑色遮光性粒子的平均二次粒徑與顏色調整用粒子的平均二次粒徑的比設為特定的範圍,且將黑色遮光性粒子的質量與顏色調整用粒子的質量的質量比設為特定的範圍,可確實地實現色度的調整。此 時,作為顏色調整粒子的色相,發現在碳黑為自無彩色偏離為茶色系的色相的情況下,並不調配與該偏離的色相處於補色(相反色)的關係的藍色或紫色的顏料,相反地含有少量的與偏離的色相為同系色的黃色或橙色的顏料,由此可維持硬化後的膜特性或可靠性,且將遮光膜的色度調整為無彩色化或帶藍色調的黑色,從而完成本發明。 In order to solve the problems of the prior art, the inventors of the present invention have conducted intensive studies, and as a result, it has been found that a specific one is used in addition to black light-blocking particles such as carbon black and titanium black, and a curable resin or a curable monomer. The color adjustment particles are used to form a black resin composition, and the chromaticity of the light-shielding film can be adjusted to be achromatic or blue-black. Further, in the black resin composition, the ratio of the average secondary particle diameter of the black light-shielding particles to the average secondary particle diameter of the color-adjusting particles is set to a specific range, and the quality of the black light-shielding particles is obtained. The mass ratio of the mass of the particles for color adjustment is set to a specific range, and the adjustment of the chromaticity can be surely achieved. this In the case of the hue of the color-adjusting particles, it is found that when the carbon black is a hue which is deviated from the achromatic color to the brown color, the blue or purple pigment which is in a complementary color (opposite color) relationship with the discolored hue is not disposed. Conversely, it contains a small amount of yellow or orange pigment in the same color as the deviated hue, thereby maintaining film properties or reliability after hardening, and adjusting the chromaticity of the light-shielding film to achromatic or bluish-toned Black to complete the present invention.
亦即,本發明的主旨如下所示。亦即, That is, the gist of the present invention is as follows. that is,
(1)本發明是一種遮光膜用黑色樹脂組成物,其包含如下成分作為必須成分:(A)利用光或熱的硬化性樹脂、及/或利用光或熱的硬化性單體、(B)在分散介質中分散黑色遮光性粒子而成的含有黑色遮光性粒子的分散液、及(C)在分散介質中分散顏色調整用粒子而成的含有顏色調整用粒子的分散液。 (1) The present invention relates to a black resin composition for a light-shielding film comprising the following components as an essential component: (A) a curable resin using light or heat, and/or a curable monomer using light or heat, (B) A dispersion liquid containing black light-blocking particles obtained by dispersing black light-shielding particles in a dispersion medium, and (C) a dispersion liquid containing color adjustment particles obtained by dispersing color adjustment particles in a dispersion medium.
(2)本發明還是根據(1)的遮光膜用黑色樹脂組成物,其中(C)成分中的顏色調整用粒子的平均二次粒徑DC與(B)成分中的黑色遮光性粒子的平均二次粒徑DB的比DC/DB為0.2~1.2的範圍,且(C)成分中所含的顏色調整用粒子的質量mC與(B)成分中所含的黑色遮光性粒子的質量mB的比mC/mB為0.03~0.2的範圍。 (2) The black resin composition for a light-shielding film according to (1), wherein the average secondary particle diameter D C of the color-adjusting particles in the component (C) and the black light-shielding particles in the component (B) The ratio D C /D B of the average secondary particle diameter D B is in the range of 0.2 to 1.2, and the color m C of the color-adjusting particles contained in the component (C) and the black light-shielding property contained in the component (B) The ratio m C /m B of the mass m B of the particles is in the range of 0.03 to 0.2.
(3)本發明還是根據(1)或(2)的遮光膜用黑色樹脂組成物,其中所述黑色遮光性粒子是碳黑粒子。 (3) The black resin composition for a light-shielding film according to (1) or (2), wherein the black light-shielding particles are carbon black particles.
(4)本發明還是根據(1)~(3)中任一項的遮光膜用黑色樹脂組成物,其中所述顏色調整用粒子是作為黃色顏料的C.I.顏料 黃139及/或作為橙色顏料的C.I.顏料橙61。 (4) The black resin composition for a light-shielding film according to any one of (1) to (3), wherein the color-adjusting particles are C.I. pigments as yellow pigments Yellow 139 and/or C.I. Pigment Orange 61 as an orange pigment.
(5)本發明還是一種遮光膜用黑色樹脂組成物,其特 徵在於:所述遮光膜用黑色樹脂組成物是使用含有聚合性不飽和基的鹼可溶性樹脂與具有乙烯性不飽和雙鍵的聚合性單體作為(A)成分,且進一步含有(D)溶劑及(E)光聚合引發劑的根據(1)~(4)中任一項所述的遮光膜用黑色樹脂組成物,且在包含光硬化後成為固形的聚合性單體的固體成分中,含有聚合性不飽和基的鹼可溶性樹脂為10質量%~60質量%,相對於含有聚合性不飽和基的鹼可溶性樹脂100質量份而言,具有乙烯性不飽和雙鍵的聚合性單體為10質量份~60質量份,相對於含有聚合性不飽和基的鹼可溶性樹脂與具有乙烯性不飽和雙鍵的聚合性單體的合計量100質量份而言,(E)為2質量份~50質量份,進一步在固體成分中,(B)成分中的黑色遮光性粒子為30質量%~60質量%,在固體成分中(C)成分中的顏色調整用粒子為1質量%~15質量%。 (5) The present invention is also a black resin composition for a light-shielding film, which is characterized by In the black resin composition for a light-shielding film, an alkali-soluble resin containing a polymerizable unsaturated group and a polymerizable monomer having an ethylenically unsaturated double bond are used as the component (A), and further contains (D) a solvent. And (E) a black resin composition for a light-shielding film according to any one of (1) to (4), and a solid component of a polymerizable monomer which is solid after being photocured, The alkali-soluble resin containing a polymerizable unsaturated group is 10% by mass to 60% by mass, and the polymerizable monomer having an ethylenically unsaturated double bond is 100 parts by mass of the alkali-soluble resin containing a polymerizable unsaturated group. 10 parts by mass to 60 parts by mass, and (E) is 2 parts by mass based on 100 parts by mass of the total of the alkali-soluble resin containing a polymerizable unsaturated group and a polymerizable monomer having an ethylenically unsaturated double bond. 50 parts by mass, further, the black light-shielding particles in the component (B) are 30% by mass to 60% by mass, and the color-adjusting particles in the solid component (C) are 1% by mass to 15% by mass. %.
(6)本發明還是根據(5)的遮光膜用黑色樹脂組成物,其中含有聚合性不飽和基的鹼可溶性樹脂使用使(a)二羧酸或三羧酸或其酸酐、及(b)四羧酸或其酸二酐和由雙酚類所衍生的具有2個縮水甘油醚基的環氧化合物與含有不飽和基的單羧酸的反應物進行反應而所得的含有聚合性不飽和基的鹼可溶性樹脂。 (6) The black resin composition for a light-shielding film according to (5), wherein the alkali-soluble resin containing a polymerizable unsaturated group is used to (a) a dicarboxylic acid or a tricarboxylic acid or an anhydride thereof, and (b) A polymerizable unsaturated group obtained by reacting a tetracarboxylic acid or an acid dianhydride thereof with a reaction product of an epoxy compound having two glycidyl ether groups derived from a bisphenol and a monocarboxylic acid containing an unsaturated group Alkali soluble resin.
(7)本發明還是一種帶遮光膜的基板,其特徵在於:所述帶遮光膜的基板是將根據(1)~(6)中任一項所述的遮光 膜用黑色樹脂組成物塗布於透明基板上的單面上,使其硬化而所得的帶遮光膜的基板,自所述透明基板的塗布有遮光膜的面的相反面側所測定的CIE Lab色彩空間表示系統中的帶遮光膜的基板的b*值滿足-1.0<b*<+0.2。 (7) The substrate with a light-shielding film, wherein the light-shielding film is coated with a black resin composition according to any one of (1) to (6) a light-shielding film obtained by curing a single surface on a transparent substrate, and a light-shielding film in a CIE Lab color space system measured from the opposite side of the surface of the transparent substrate on which the light-shielding film is applied The b * value of the substrate satisfies -1.0 <b * <+0.2.
(8)本發明還是一種彩色濾光片,其特徵在於:包含根據(7)的帶遮光膜的基板。 (8) The present invention is also a color filter comprising the substrate with a light shielding film according to (7).
(9)本發明還是一種觸控面板,其特徵在於:包含根據(7)的帶遮光膜的基板。 (9) The present invention is also a touch panel characterized by comprising the substrate with a light shielding film according to (7).
藉由使用本發明的黑色樹脂組成物,可在透明基板上形成將反射色控制為無彩色的黑色或自無彩色起帶藍色調的黑色的色相的黑色硬化膜(遮光膜),可將形成有該遮光膜的帶遮光膜的透明基板應用於顯示裝置用彩色濾光片或觸控面板中。亦即,藉由本發明,可設計即使在顯示畫面未點亮時,設計性也優異的彩色濾光片或觸控面板。 By using the black resin composition of the present invention, a black cured film (light-shielding film) which controls the color of the reflection color to be achromatic black or the color of the black color with a blue tone from achromatic color can be formed on the transparent substrate, and can be formed. The transparent substrate with a light shielding film having the light shielding film is applied to a color filter or a touch panel for a display device. That is, according to the present invention, it is possible to design a color filter or a touch panel which is excellent in design even when the display screen is not lit.
以下,對本發明加以詳細說明。 Hereinafter, the present invention will be described in detail.
本發明的黑色樹脂組成物中的作為(A)成分的利用光或熱的 硬化性樹脂、及/或利用光或熱的硬化性單體如果是在分子內具有至少1個以上由於熱或光而產生硬化反應的官能基(例如(甲基)丙烯醯基、乙烯基等具有乙烯性不飽和雙鍵的基,或環氧基、氧雜環丁烷基等環狀反應性基)的樹脂或單體,則可使用。 The use of light or heat as the component (A) in the black resin composition of the present invention The curable resin and/or the curable monomer which utilizes light or heat is a functional group (for example, (meth) acrylonitrile group, vinyl group, etc. which have at least one or more hardening reaction by heat or light in a molecule. A resin or a monomer having a group having an ethylenically unsaturated double bond or a cyclic reactive group such as an epoxy group or an oxetanyl group can be used.
作為(A)成分的具有乙烯性不飽和雙鍵的化合物存在 有(A-1)具有乙烯性不飽和雙鍵的樹脂與(A-2)具有乙烯性不飽和雙鍵的聚合性單體,考慮塗敷等處理條件、由於光或熱而使其硬化的條件、硬化物的物性等,可以單獨使用(A-1)或(A-2),還可以以任意比例加以混合而使用。 a compound having an ethylenically unsaturated double bond as the component (A) (A-1) a resin having an ethylenically unsaturated double bond and (A-2) a polymerizable monomer having an ethylenically unsaturated double bond, which is hardened by light or heat in consideration of processing conditions such as coating. The conditions, the physical properties of the cured product, and the like may be used alone (A-1) or (A-2), or may be used in combination at any ratio.
(A-1)成分例如可列舉使用包含1種以上具有羧基的 單體的3種~5種聚合性單體(所述單體選自丙烯酸、甲基丙烯酸、丙烯酸甲酯、甲基丙烯酸甲酯、丙烯酸乙酯、甲基丙烯酸乙酯、丙烯酸丁酯、甲基丙烯酸丁酯等丙烯酸烷基酯或甲基丙烯酸烷基酯(以下,有時將這些化合物匯總記載為“(甲基)丙烯酸烷基酯”等)、環狀的(甲基)丙烯酸環己酯、(甲基)丙烯酸羥基乙酯及苯乙烯等)而合成的共聚物的羧基,與具有環氧基或異氰酸酯基和至少1個以上乙烯性不飽和雙鍵的甲基丙烯酸縮水甘油酯、異氰酸酯基乙基丙烯酸酯或甲基丙烯醯基異氰酸酯等反應而所得的由於光或熱而硬化的具有不飽和雙鍵的硬化性樹脂。自耐熱性、顯影性的方面考慮,具有此種結構的硬化性樹脂優選使用重量平均分子量為5000~100000、酸值為50~150的硬化性樹脂。 The component (A-1) is, for example, one or more having a carboxyl group. 3 to 5 kinds of polymerizable monomers of monomers (the monomers are selected from the group consisting of acrylic acid, methacrylic acid, methyl acrylate, methyl methacrylate, ethyl acrylate, ethyl methacrylate, butyl acrylate, and A An alkyl acrylate or an alkyl methacrylate such as butyl acrylate (hereinafter, these compounds may be collectively described as "alkyl (meth) acrylate"), and a cyclic (meth) acrylate ring a carboxyl group of a copolymer synthesized by an ester, hydroxyethyl (meth)acrylate, styrene or the like, and a glycidyl methacrylate having an epoxy group or an isocyanate group and at least one or more ethylenically unsaturated double bonds; A curable resin having an unsaturated double bond which is cured by light or heat obtained by reaction of isocyanate ethyl acrylate or methacryl oxime isocyanate. From the viewpoint of heat resistance and developability, a curable resin having such a structure is preferably a curable resin having a weight average molecular weight of 5,000 to 100,000 and an acid value of 50 to 150.
而且,(A-1)成分的其它例可列舉雙酚A型環氧樹脂、 雙酚F型環氧樹脂、酚醛清漆型環氧樹脂、多羧酸縮水甘油酯、多元醇聚縮水甘油酯、脂肪族或脂環式環氧樹脂、胺型環氧樹脂、三苯酚甲烷型環氧樹脂或二羥基苯型環氧樹脂等環氧樹脂與(甲基)丙烯酸反應而所得的環氧(甲基)丙烯酸酯型硬化性樹脂。該環氧(甲基)丙烯酸酯型硬化性樹脂進一步與酸單酐及酸二酐反應而所得的環氧(甲基)丙烯酸酯酸加成物可以在製成用光微影法進行鹼性顯影的可形成圖案的樹脂組成物的情況下適宜地使用。這種情況下適宜的重量平均分子量是2000~20000,酸值是50~150。 Further, as another example of the component (A-1), a bisphenol A type epoxy resin may be mentioned. Bisphenol F type epoxy resin, novolac type epoxy resin, polycarboxylic acid glycidyl ester, polyol polyglycidyl ester, aliphatic or alicyclic epoxy resin, amine epoxy resin, trisphenol methane ring An epoxy (meth) acrylate type curable resin obtained by reacting an epoxy resin such as an oxygen resin or a dihydroxybenzene type epoxy resin with (meth)acrylic acid. The epoxy (meth) acrylate acid addition product obtained by further reacting the epoxy (meth) acrylate type curable resin with an acid monoanhydride and an acid dianhydride can be made alkaline by photolithography. A case where the developed pattern-forming resin composition is suitably used. In this case, a suitable weight average molecular weight is from 2,000 to 20,000, and an acid value of from 50 to 150.
作為在光微影法中使用本發明的情況下的優選例子的 使所述環氧(甲基)丙烯酸酯型硬化性樹脂進一步與酸單酐及酸二酐反應而所得的環氧(甲基)丙烯酸酯酸加成物,是使(a)二羧酸或三羧酸或其酸酐、及(b)四羧酸或其酸二酐和由雙酚類所衍生的具有2個縮水甘油醚基的環氧化合物與含有不飽和基的單羧酸的反應物進行反應而所得的鹼可溶性樹脂。此處,(a)/(b)的莫耳比優選為0.01~10。 As a preferred example in the case where the present invention is used in the photolithography method An epoxy (meth) acrylate acid adduct obtained by further reacting the epoxy (meth) acrylate type curable resin with an acid monoanhydride and an acid dianhydride to make (a) a dicarboxylic acid or Reaction of a tricarboxylic acid or an anhydride thereof, and (b) a tetracarboxylic acid or an acid dianhydride thereof, and an epoxy compound having two glycidyl ether groups derived from a bisphenol and a monocarboxylic acid containing an unsaturated group An alkali-soluble resin obtained by carrying out the reaction. Here, the molar ratio of (a)/(b) is preferably 0.01 to 10.
成為該環氧(甲基)丙烯酸酯酸加成物的原料的雙酚類的 例子可列舉雙(4-羥基苯基)酮、雙(4-羥基-3,5-二甲基苯基)酮、雙(4-羥基-3,5-二氯苯基)酮、雙(4-羥基苯基)碸、雙(4-羥基-3,5-二甲基苯基)碸、雙(4-羥基-3,5-二氯苯基)碸、雙(4-羥基苯基)六氟丙烷、雙(4-羥基-3,5-二甲基苯基)六氟丙烷、雙(4-羥基-3,5-二氯苯基)六氟丙烷、雙(4-羥基苯基)二甲基矽烷、雙(4-羥基-3,5-二甲基苯基)二甲基矽烷、雙(4-羥基-3,5-二氯苯基)二甲基矽烷、雙(4-羥基苯基) 甲烷、雙(4-羥基-3,5-二氯苯基)甲烷、雙(4-羥基-3,5-二溴苯基)甲烷、2,2-雙(4-羥基苯基)丙烷、2,2-雙(4-羥基-3,5-二甲基苯基)丙烷、2,2-雙(4-羥基-3,5-二氯苯基)丙烷、2,2-雙(4-羥基-3-甲基苯基)丙烷、2,2-雙(4-羥基-3-氯苯基)丙烷、雙(4-羥基苯基)醚、雙(4-羥基-3,5-二甲基苯基)醚、雙(4-羥基-3,5-二氯苯基)醚、9,9-雙(4-羥基苯基)芴、9,9-雙(4-羥基-3-甲基苯基)芴、9,9-雙(4-羥基-3-氯苯基)芴、9,9-雙(4-羥基-3-溴苯基)芴、9,9-雙(4-羥基-3-氟苯基)芴、9,9-雙(4-羥基-3,5-二甲基苯基)芴、9,9-雙(4-羥基-3,5-二氯苯基)芴、9,9-雙(4-羥基-3,5-二溴苯基)芴、4,4'-聯苯酚、3,3'-聯苯酚等及這些的衍生物。這些中特別適宜地利用具有芴-9,9-二基的化合物。 a bisphenol which is a raw material of the epoxy (meth) acrylate acid adduct Examples include bis(4-hydroxyphenyl) ketone, bis(4-hydroxy-3,5-dimethylphenyl) ketone, bis(4-hydroxy-3,5-dichlorophenyl) ketone, and bis ( 4-hydroxyphenyl)indole, bis(4-hydroxy-3,5-dimethylphenyl)anthracene, bis(4-hydroxy-3,5-dichlorophenyl)anthracene, bis(4-hydroxyphenyl) Hexafluoropropane, bis(4-hydroxy-3,5-dimethylphenyl)hexafluoropropane, bis(4-hydroxy-3,5-dichlorophenyl)hexafluoropropane, bis(4-hydroxybenzene) Dimethyl decane, bis(4-hydroxy-3,5-dimethylphenyl)dimethyl decane, bis(4-hydroxy-3,5-dichlorophenyl)dimethyl decane, bis ( 4-hydroxyphenyl) Methane, bis(4-hydroxy-3,5-dichlorophenyl)methane, bis(4-hydroxy-3,5-dibromophenyl)methane, 2,2-bis(4-hydroxyphenyl)propane, 2,2-bis(4-hydroxy-3,5-dimethylphenyl)propane, 2,2-bis(4-hydroxy-3,5-dichlorophenyl)propane, 2,2-dual (4 -hydroxy-3-methylphenyl)propane, 2,2-bis(4-hydroxy-3-chlorophenyl)propane, bis(4-hydroxyphenyl)ether, bis(4-hydroxy-3,5- Dimethylphenyl)ether, bis(4-hydroxy-3,5-dichlorophenyl)ether, 9,9-bis(4-hydroxyphenyl)anthracene, 9,9-bis(4-hydroxy-3) -Methylphenyl)anthracene, 9,9-bis(4-hydroxy-3-chlorophenyl)anthracene, 9,9-bis(4-hydroxy-3-bromophenyl)anthracene, 9,9-bis ( 4-hydroxy-3-fluorophenyl)indole, 9,9-bis(4-hydroxy-3,5-dimethylphenyl)anthracene, 9,9-bis(4-hydroxy-3,5-dichloro Phenyl) ruthenium, 9,9-bis(4-hydroxy-3,5-dibromophenyl)anthracene, 4,4'-biphenol, 3,3'-biphenol, and the like, and derivatives thereof. Among these, a compound having a fluoren-9,9-diyl group is particularly suitably used.
其次,使所述雙酚類與表氯醇反應而獲得具有2個縮水 甘油醚基的環氧化合物。在該反應時,一般伴隨有二縮水甘油醚化合物的寡聚物化,因此獲得下述通式(I)的環氧化合物。 Secondly, the bisphenols are reacted with epichlorohydrin to obtain two shrinkages. A glyceryl ether based epoxy compound. At the time of this reaction, oligomerization of the diglycidyl ether compound is generally accompanied, and thus an epoxy compound of the following formula (I) is obtained.
在通式(I)式中,R1、R2、R3及R4分別獨立地表示氫原子、碳數為1~5的烷基、鹵素原子或苯基,A表示-CO-、-SO2-、-C(CF3)2-、-Si(CH3)2-、-CH2-、-C(CH3)2-、-O-、芴-9,9-二基或直 接鍵結。l是0~10的數。優選的R1、R2、R3及R4是氫原子,優選的A是芴-9,9-二基。而且,l通常多個值混合存在,因此成為平均值0~10(並不限於整數),優選的l的平均值是0~3。若l的值超過上限值,在製成使用鹼可溶性樹脂(所述鹼可溶性樹脂使用該環氧化合物而合成)的黑色樹脂組成物時,該組成物的黏度過於變大而變得不能很好地進行塗布,無法充分地賦予鹼可溶性,鹼性顯影性變得非常差。 In the formula (I), R 1 , R 2 , R 3 and R 4 each independently represent a hydrogen atom, an alkyl group having 1 to 5 carbon atoms, a halogen atom or a phenyl group, and A represents -CO-, - SO 2 -, -C(CF 3 ) 2 -, -Si(CH 3 ) 2 -, -CH 2 -, -C(CH 3 ) 2 -, -O-, 芴-9,9-diyl or directly Bonding. l is a number from 0 to 10. Preferred R 1 , R 2 , R 3 and R 4 are a hydrogen atom, and preferred A is a fluoren-9,9-diyl group. Further, since l usually has a plurality of values mixed, the average value is 0 to 10 (not limited to an integer), and the average value of the preferred l is 0 to 3. When the value of l exceeds the upper limit, when the black resin composition using an alkali-soluble resin (the alkali-soluble resin is synthesized using the epoxy compound) is used, the viscosity of the composition becomes too large and becomes too large. When the coating is performed well, the alkali solubility is not sufficiently provided, and the alkali developability is extremely poor.
其次,使通式(I)的化合物與作為含有不飽和基的單 羧酸的丙烯酸或甲基丙烯酸或這些兩種化合物反應而所得的具有羥基的反應物,與(a)二羧酸或三羧酸或其酸酐、及(b)四羧酸或其酸二酐在優選(a)/(b)的莫耳比成為0.01~10的範圍中進行反應,獲得具有下述通式(II)所表示的環氧(甲基)丙烯酸酯酸加成物結構的含有聚合性不飽和基的鹼可溶性樹脂。 Secondly, the compound of the formula (I) is used as a single group containing an unsaturated group. Acrylic acid or methacrylic acid of a carboxylic acid or a reactant having a hydroxyl group obtained by reacting these two compounds with (a) a dicarboxylic acid or a tricarboxylic acid or an anhydride thereof, and (b) a tetracarboxylic acid or an acid dianhydride thereof The reaction is carried out in a range in which the molar ratio of (a)/(b) is preferably 0.01 to 10, and a structure having an epoxy (meth) acrylate acid adduct structure represented by the following formula (II) is obtained. A polymer-soluble unsaturated alkali-soluble resin.
(式中,R1、R2、R3、R4及A為與通式(I)相同的定義,R5表示氫原子或甲基,X表示4價的羧酸殘基,Y1及Y2分別獨立地 表示氫原子或-OC-Z-(COOH)m(其中,Z表示2價或3價的羧酸殘基,m表示1~2的數),n表示1~20的數) (wherein R 1 , R 2 , R 3 , R 4 and A are the same definitions as in the formula (I), R 5 represents a hydrogen atom or a methyl group, and X represents a tetravalent carboxylic acid residue, Y 1 and Y 2 independently represents a hydrogen atom or -OC-Z-(COOH) m (wherein Z represents a divalent or trivalent carboxylic acid residue, m represents a number of 1 to 2), and n represents a number of 1 to 20 )
該環氧(甲基)丙烯酸酯酸加成物(II)是同時具有乙烯性不飽和雙鍵與羧基的含有聚合性不飽和基的鹼可溶性樹脂,因此作為在鹼性顯影型的光微影法中使用本發明的黑色樹脂組成物的情況下的(A-1)而賦予優異的光硬化性、良好的顯影性、圖案化特性,獲得良好的圖案形狀。 The epoxy (meth) acrylate acid adduct (II) is an alkali-soluble resin containing a polymerizable unsaturated group having both an ethylenically unsaturated double bond and a carboxyl group, and thus is used as an alkaline development type photo lithography. In the case of using the black resin composition of the present invention, (A-1), excellent photocurability, good developability, and patterning properties are imparted, and a favorable pattern shape is obtained.
通式(II)的環氧(甲基)丙烯酸酯酸加成物中所利用的(a)二羧酸或三羧酸或其酸酐使用鏈式烴二羧酸或三羧酸或其酸酐或者脂環式二羧酸或三羧酸或其酸酐、芳香族二羧酸或三羧酸或其酸酐。此處,鏈式烴二羧酸或三羧酸或其酸酐例如存在有琥珀酸、乙醯基琥珀酸、馬來酸、己二酸、衣康酸、壬二酸、順式蘋果酸、丙二酸、戊二酸、檸檬酸、酒石酸、氧代戊二酸、庚二酸、癸二酸、辛二酸、二甘醇酸等化合物,還可以是進一步導入有任意取代基的二羧酸或三羧酸或其酸酐。而且,脂環式二羧酸或三羧酸或其酸酐例如存在有環丁烷二羧酸、環戊烷二羧酸、六氫鄰苯二甲酸、四氫鄰苯二甲酸、降冰片烷二羧酸等化合物,還可以是進一步導入有任意取代基的二羧酸或三羧酸或其酸酐。進一步而言,芳香族二羧酸或三羧酸或其酸酐例如存在有鄰苯二甲酸、間苯二甲酸、偏苯三甲酸等化合物,還可以是進一步導入有任意取代基的二羧酸或三羧酸或其酸酐。 The (a) dicarboxylic acid or tricarboxylic acid or an anhydride thereof used in the epoxy (meth) acrylate acid adduct of the formula (II) uses a chain hydrocarbon dicarboxylic acid or a tricarboxylic acid or an anhydride thereof or An alicyclic dicarboxylic acid or a tricarboxylic acid or an anhydride thereof, an aromatic dicarboxylic acid or a tricarboxylic acid or an anhydride thereof. Here, the chain hydrocarbon dicarboxylic acid or the tricarboxylic acid or its anhydride is, for example, succinic acid, acetyl succinic acid, maleic acid, adipic acid, itaconic acid, sebacic acid, cis malic acid, and c. a compound such as diacid, glutaric acid, citric acid, tartaric acid, oxoglutaric acid, pimelic acid, sebacic acid, suberic acid or diglycolic acid, or a dicarboxylic acid further introduced with any substituent Or a tricarboxylic acid or an anhydride thereof. Further, the alicyclic dicarboxylic acid or the tricarboxylic acid or an anhydride thereof is, for example, a cyclobutanedicarboxylic acid, a cyclopentanedicarboxylic acid, a hexahydrophthalic acid, a tetrahydrophthalic acid, a norbornane II. The compound such as a carboxylic acid may be a dicarboxylic acid or a tricarboxylic acid or an anhydride thereof to which an optional substituent is further introduced. Further, the aromatic dicarboxylic acid or the tricarboxylic acid or an acid anhydride thereof may be, for example, a compound such as phthalic acid, isophthalic acid or trimellitic acid, or a dicarboxylic acid or further substituted with an optional substituent. Tricarboxylic acid or its anhydride.
而且,通式(II)的環氧(甲基)丙烯酸酯酸加成物中所 利用的(b)四羧酸或其酸二酐可使用鏈式烴四羧酸或其酸二酐或脂環式四羧酸或其酸二酐、或者芳香族多元羧酸或其酸二酐。此處,鏈式烴四羧酸或其酸二酐例如存在有丁烷四羧酸、戊烷四羧酸、己烷四羧酸等,還可以是進一步導入有取代基的四羧酸或其酸二酐。而且,脂環式四羧酸或其酸二酐例如存在有環丁烷四羧酸、環戊烷四甲酸、環己烷四羧酸、環庚烷四羧酸、降冰片烷四羧酸等,還可以是進一步導入有取代基的四羧酸或其酸二酐。另外,芳香族四羧酸或其酸二酐例如可列舉均苯四甲酸、二苯甲酮四羧酸、聯苯四羧酸、二苯醚四羧酸或其酸二酐,還可以是進一步導入有取代基的四羧酸或其酸二酐。 Further, in the epoxy (meth) acrylate acid addition of the formula (II) The (b) tetracarboxylic acid or its acid dianhydride may be a chain hydrocarbon tetracarboxylic acid or an acid dianhydride or an alicyclic tetracarboxylic acid or an acid dianhydride thereof, or an aromatic polycarboxylic acid or an acid dianhydride thereof. . Here, the chain hydrocarbon tetracarboxylic acid or its acid dianhydride may be, for example, butanetetracarboxylic acid, pentanetetracarboxylic acid, hexanetetracarboxylic acid, or the like, or may be a tetracarboxylic acid or a further substituted group thereof. Acid dianhydride. Further, the alicyclic tetracarboxylic acid or the acid dianhydride thereof is, for example, cyclobutanetetracarboxylic acid, cyclopentanetetracarboxylic acid, cyclohexanetetracarboxylic acid, cycloheptanetetracarboxylic acid, norbornanetetracarboxylic acid, or the like. Further, it may be a tetracarboxylic acid or an acid dianhydride thereof to which a substituent is further introduced. Further, examples of the aromatic tetracarboxylic acid or the acid dianhydride thereof include pyromellitic acid, benzophenone tetracarboxylic acid, biphenyltetracarboxylic acid, diphenyl ether tetracarboxylic acid or acid dianhydride thereof, and further may be further A tetracarboxylic acid having a substituent or an acid dianhydride thereof is introduced.
通式(II)的環氧(甲基)丙烯酸酯酸加成物中所使用的 (a)二羧酸或三羧酸或其酸酐與(b)四羧酸或其酸二酐的莫耳比(a)/(b)優選為0.01~10,更優選成為0.1~3.0的範圍。如果莫耳比(a)/(b)偏離所述範圍則不能獲得最適宜的分子量,在作為(A-1)而使用的黑色樹脂組成物中,鹼性顯影性、耐熱性、耐溶劑性、圖案形狀等劣化,因此並不優選。另外,莫耳比(a)/(b)越小則分子量越大,存在鹼溶解性惡化的傾向。 Used in the epoxy (meth) acrylate acid addition of the formula (II) The molar ratio (a)/(b) of (a) the dicarboxylic acid or the tricarboxylic acid or its anhydride to (b) the tetracarboxylic acid or the acid dianhydride thereof is preferably 0.01 to 10, more preferably 0.1 to 3.0. . If the molar ratio (a)/(b) deviates from the above range, an optimum molecular weight cannot be obtained, and in the black resin composition used as (A-1), alkali developability, heat resistance, solvent resistance Since the pattern shape or the like is deteriorated, it is not preferable. Further, as the molar ratio (a)/(b) is smaller, the molecular weight is larger, and the alkali solubility tends to be deteriorated.
而且,通式(II)的環氧(甲基)丙烯酸酯酸加成物的重 量平均分子量(Mw)優選為2000~10000之間,特別優選為3000~7000之間。如果重量平均分子量(Mw)不滿2000,那麼作為(A-1)而使用的黑色樹脂組成物在顯影時無法維持圖案的密接性,產生圖案剝落,而且如果重量平均分子量(Mw)超過10000, 則變得容易殘留顯影殘渣或未曝光部的殘膜。另外,理想的是其酸值處於30mgKOH/g~200mgKOH/g的範圍。如果該值小於30mgKOH/g,則有作為(A-1)而使用的黑色樹脂組成物的鹼性顯影惡化的傾向,因此需要強鹼等特殊的顯影條件。另一方面,如果超過200mgKOH/g,則鹼性顯影液在作為(A-1)而使用的黑色樹脂組成物中的滲透變得過快,產生剝離顯影,因此均不優選。 Moreover, the weight of the epoxy (meth) acrylate acid adduct of the formula (II) The amount average molecular weight (Mw) is preferably between 2,000 and 10,000, particularly preferably between 3,000 and 7,000. If the weight average molecular weight (Mw) is less than 2,000, the black resin composition used as (A-1) cannot maintain the pattern adhesion during development, causing pattern peeling, and if the weight average molecular weight (Mw) exceeds 10,000, Then, it becomes easy to leave a development residue or a residual film of an unexposed part. Further, it is desirable that the acid value thereof is in the range of 30 mgKOH/g to 200 mgKOH/g. When the value is less than 30 mgKOH/g, the alkali development of the black resin composition used as (A-1) tends to be deteriorated, and therefore special development conditions such as a strong alkali are required. On the other hand, when it exceeds 200 mgKOH/g, the penetration of the alkaline developing solution into the black resin composition used as (A-1) becomes too fast, and peeling development occurs, which is not preferable.
本發明中所利用的通式(II)的環氧(甲基)丙烯酸酯酸 加成物可藉由所述步驟,利用已知的方法(例如日本專利特開平8-278629號公報或日本專利特開2008-9401號公報等中所記載的方法)而製造。首先,使含有不飽和基的單羧酸與通式(I)的環氧化合物反應的方法例如存在有:將與環氧化合物的環氧基等莫耳的含有不飽和基的單羧酸添加於溶劑中,在催化劑(三乙基苄基氯化銨、2,6-二異丁基苯酚等)的存在下,一面吹入空氣一面在90℃~120℃下進行加熱、攪拌而使其反應的方法。其次,作為使酸酐與反應產物環氧丙烯酸酯化合物的羥基反應的方法存在有:將環氧丙烯酸酯化合物與酸二酐及酸單酐的規定量添加於溶劑中,在催化劑(四乙基溴化銨、三苯基膦等)的存在下,在90℃~130℃下進行加熱、攪拌而使其反應的方法。 Epoxy (meth) acrylate acid of the formula (II) utilized in the present invention The adduct can be produced by the known method (for example, the method described in JP-A-H08-278629 or JP-A-2008-9401). First, a method of reacting an unsaturated group-containing monocarboxylic acid with an epoxy compound of the formula (I) is, for example, a method of adding a monocarboxylic acid containing an unsaturated group such as an epoxy group of an epoxy compound. In a solvent, in the presence of a catalyst (such as triethylbenzylammonium chloride or 2,6-diisobutylphenol), the mixture is heated and stirred at 90 to 120 ° C while being blown into the air. The method of reaction. Next, as a method of reacting an acid anhydride with a hydroxyl group of a reaction product epoxy acrylate compound, a predetermined amount of an epoxy acrylate compound and an acid dianhydride and an acid monoanhydride is added to a solvent in a catalyst (tetraethyl bromide). A method of heating and stirring at 90 ° C to 130 ° C in the presence of ammonium chloride or triphenylphosphine to cause a reaction.
而且,(A-2)具有乙烯性不飽和雙鍵的聚合性單體(光或熱聚合性單體)例如可列舉:(甲基)丙烯酸-2-羥基乙酯、(甲基)丙烯酸-2-羥基丙酯、(甲基)丙烯酸-2-羥基己酯等具有羥基的(甲基)丙烯酸酯類,或乙二醇二(甲基)丙烯酸酯、二乙二醇二(甲基)丙烯 酸酯、三乙二醇二(甲基)丙烯酸酯、四乙二醇二(甲基)丙烯酸酯、丁二醇二(甲基)丙烯酸酯、三羥甲基丙烷三(甲基)丙烯酸酯、三羥甲基乙烷三(甲基)丙烯酸酯、季戊四醇二(甲基)丙烯酸酯、季戊四醇三(甲基)丙烯酸酯、季戊四醇四(甲基)丙烯酸酯、二季戊四醇四(甲基)丙烯酸酯、甘油(甲基)丙烯酸酯、山梨糖醇五(甲基)丙烯酸酯、二季戊四醇五(甲基)丙烯酸酯、或二季戊四醇六(甲基)丙烯酸酯、山梨糖醇六(甲基)丙烯酸酯、膦腈的環氧烷改性六(甲基)丙烯酸酯、己內酯改性二季戊四醇六(甲基)丙烯酸酯等(甲基)丙烯酸酯類,(A-2)成分可使用這些的1種或2種以上。而且,該具有乙烯性不飽和雙鍵的聚合性單體優選使用具有3個以上聚合性基而可使光或熱硬化性樹脂(在光微影法中使用的情況下為含有聚合性不飽和基的鹼可溶性樹脂)的分子彼此交聯的單體。另外,在將(A-2)具有乙烯性不飽和雙鍵的聚合性單體製成在光微影法中使用的黑色樹脂組成物的情況下,使用並不具有游離的羧基的化合物。 Further, (A-2) a polymerizable monomer (photopolymer or photopolymerizable monomer) having an ethylenically unsaturated double bond may, for example, be 2-hydroxyethyl (meth)acrylate or (meth)acrylic acid- a (meth) acrylate having a hydroxyl group such as 2-hydroxypropyl ester or 2-hydroxyhexyl (meth)acrylate, or ethylene glycol di(meth)acrylate or diethylene glycol di(methyl) Propylene Acid ester, triethylene glycol di(meth)acrylate, tetraethylene glycol di(meth)acrylate, butanediol di(meth)acrylate, trimethylolpropane tri(meth)acrylate , trimethylolethane tri(meth)acrylate, pentaerythritol di(meth)acrylate, pentaerythritol tri(meth)acrylate, pentaerythritol tetra(meth)acrylate, dipentaerythritol tetra(meth)acrylic acid Ester, glycerol (meth) acrylate, sorbitol penta (meth) acrylate, dipentaerythritol penta (meth) acrylate, or dipentaerythritol hexa (meth) acrylate, sorbitol hexa (methyl) (meth)acrylates such as alkylene oxide modified hexa(meth)acrylate of acrylate and phosphazene, and dipentaerythritol hexa(meth)acrylate modified by caprolactone, (A-2) can be used. One or two or more of these. Further, it is preferable that the polymerizable monomer having an ethylenically unsaturated double bond has three or more polymerizable groups and can be used as a light or thermosetting resin (in the case of photolithography, it contains a polymerizable unsaturated group). A monomer in which molecules of the base-based alkali-soluble resin are cross-linked to each other. Further, when the (A-2) polymerizable monomer having an ethylenically unsaturated double bond is used as a black resin composition used in the photolithography method, a compound which does not have a free carboxyl group is used.
而且,(A)成分可列舉(A-3)在分子內具有至少1個 以上環氧基、氧雜環丁烷基等環狀反應性基的化合物。其具體例可列舉:雙酚A型環氧化合物、雙酚F型環氧化合物、雙酚芴型環氧化合物、苯酚酚醛清漆型環氧化合物、甲酚酚醛清漆型環氧化合物、多元醇的縮水甘油醚、多元羧酸的縮水甘油酯、包含(甲基)丙烯酸縮水甘油酯作為單元的聚合物、以3,4-環氧環己烷羧酸-(3',4'-環氧基環己基)甲酯為代表的脂環式環氧化合物、具有二環 戊二烯骨架的多官能環氧化合物(例如迪愛生(DIC)公司製造的HP7200系列)、2,2-雙(羥基甲基)-1-丁醇的1,2-環氧-4-(2-氧雜環丙基)環己烷加成物(例如大賽璐(DAICEL)公司製造的“EHPE3150”)、環氧化聚丁二烯(例如日本曹達公司製造的“尼索(NISSO)-PB.JP-100”)、具有矽酮骨架的環氧化合物等。 Further, the component (A) may be exemplified by (A-3) having at least one molecule in the molecule. A compound having a cyclic reactive group such as an epoxy group or an oxetanyl group. Specific examples thereof include a bisphenol A type epoxy compound, a bisphenol F type epoxy compound, a bisphenol oxime type epoxy compound, a phenol novolac type epoxy compound, a cresol novolak type epoxy compound, and a polyhydric alcohol. Glycidyl ether, glycidyl ester of polycarboxylic acid, polymer containing glycidyl (meth)acrylate as a unit, 3,4-epoxycyclohexanecarboxylic acid-(3',4'-epoxy group An alicyclic epoxy compound represented by cyclohexyl)methyl ester, having a bicyclic ring A polyfunctional epoxy compound having a pentadiene skeleton (for example, HP7200 series manufactured by Dixon Co., Ltd.), 1,2-epoxy-4-(2,2-bis(hydroxymethyl)-1-butanol) 2-oxopropyl)cyclohexane adduct (for example, "EHPE 3150" manufactured by DAICEL Co., Ltd.), epoxidized polybutadiene (for example, Nisso (NISSO)-PB manufactured by Japan Soda Corporation) .JP-100"), an epoxy compound having an anthracene skeleton, and the like.
(A)成分可使用如(A-1)及(A-2)這樣的具有乙烯 性不飽和雙鍵的化合物、(A-3)具有環狀反應性基的化合物的僅僅一種,也可以將兩種化合物混合使用。 (A) component may have ethylene such as (A-1) and (A-2) The compound of the unsaturated double bond and (A-3) one of the compounds having a cyclic reactive group may be used in combination.
另外,在使用具有乙烯性不飽和雙鍵的化合物作為(A) 成分的情況下,優選使由於紫外線或熱而產生自由基、陽離子、陰離子等的光聚合引發劑、熱聚合引發劑等共存而使用。而且,在使用(A-3)具有環狀反應基的化合物的情況下,優選使由於光或熱而與環狀反應基反應的化合物(例如具有羧基、胺基、羥基、硫醇基的化合物等)作為硬化劑共存而使用。 In addition, a compound having an ethylenically unsaturated double bond is used as (A) In the case of a component, a photopolymerization initiator, a thermal polymerization initiator, or the like which generates radicals, cations, anions or the like due to ultraviolet rays or heat is preferably used. Further, in the case of using (A-3) a compound having a cyclic reactive group, a compound which reacts with a cyclic reactive group due to light or heat (for example, a compound having a carboxyl group, an amine group, a hydroxyl group, or a thiol group) is preferably used. Etc.) used as a hardener.
優選選定所例示的(A)成分的硬化物的折射率處於1.48~1.6的範圍的化合物。例如在丙烯酸樹脂系硬化物的情況下,折射率為1.49~1.55,通過與在化學結構中具有芳香族基的苯乙烯單體等的共聚而調整。如果是環氧樹脂系,則折射率為1.50~1.60,如果使用雙酚系環氧樹脂或芳香族酸酐硬化劑,則折射率變高;如果使用脂肪族環氧樹脂、脂環式環氧樹脂或脂環式酸酐硬化劑,則折射率變得比較低。 It is preferred to select a compound having a refractive index of the cured product of the component (A) which is in the range of 1.48 to 1.6. For example, in the case of an acrylic resin-based cured product, the refractive index is 1.49 to 1.55, and is adjusted by copolymerization with a styrene monomer or the like having an aromatic group in a chemical structure. In the case of an epoxy resin, the refractive index is 1.50 to 1.60. If a bisphenol epoxy resin or an aromatic anhydride hardener is used, the refractive index becomes high; if an aliphatic epoxy resin or an alicyclic epoxy resin is used; Or an alicyclic acid anhydride hardener, the refractive index becomes relatively low.
另外,關於(A)成分的含量,只要在除溶劑成分外的 黑色樹脂組成物的固體成分(包含硬化後成為固體成分的硬化性單體成分)中為25質量%~60質量%的範圍即可,優選為35質量%~55質量%的範圍。 In addition, as for the content of the component (A), it is only necessary to remove the solvent component. The solid content of the black resin composition (including the curable monomer component which becomes a solid component after hardening) may be in the range of 25% by mass to 60% by mass, and preferably in the range of 35% by mass to 55% by mass.
作為(B)成分中所含的黑色遮光性粒子,可並無特別 限制地使用黑色有機顏料或無機系顏料等。黑色有機顏料例如可列舉苝黑、花青黑、苯胺黑、內醯胺黑等。無機系顏料可列舉碳黑、氧化鉻、氧化鐵、鈦黑、氮氧化鈦、氮化鈦等。這些黑色遮光性粒子可單獨使用1種,也可以適宜選擇2種以上而使用。自目標薄膜的遮光率及遮光膜用組成物的保存穩定性的觀點考慮,主要使用其折射率超過1.6且吸收可見光的黑色顏料。本發明中所使用的黑色遮光性粒子優選為碳黑。碳黑可使用燈黑、乙炔黑、熱碳黑、槽法碳黑、爐法碳黑等任意者。另外,為了調整遮光性,可以使用黑色染料等其它遮光成分的1種或者將多種混合而使用,優選黑色遮光性粒子為遮光成分中的60%以上。例如如果較多地使用准黑色有機顏料系或染料系的遮光成分,則遮光率降低,變得難以獲得所期望的遮光率(OD)。 As the black light-shielding particles contained in the component (B), there is no special Black organic pigments, inorganic pigments, and the like are used in a limited manner. Examples of the black organic pigment include black, cyanine black, nigrosine, and mesaconamine. Examples of the inorganic pigments include carbon black, chromium oxide, iron oxide, titanium black, titanium oxynitride, and titanium nitride. These black light-shielding particles may be used alone or in combination of two or more. From the viewpoint of the light blocking ratio of the target film and the storage stability of the composition for a light shielding film, a black pigment having a refractive index of more than 1.6 and absorbing visible light is mainly used. The black light-blocking particles used in the present invention are preferably carbon black. As the carbon black, any of lamp black, acetylene black, hot carbon black, channel black, and furnace black can be used. Further, in order to adjust the light-shielding property, one type of other light-shielding components such as a black dye or a plurality of kinds of light-shielding components may be used, and it is preferable that the black light-shielding particles are 60% or more of the light-shielding component. For example, when a light-shielding component of a quasi-black organic pigment system or a dye system is used in a large amount, the light-shielding ratio is lowered, and it becomes difficult to obtain a desired light-shielding ratio (OD).
將這些黑色遮光性粒子或其它遮光成分與包含高分子 分散劑等分散劑及溶劑的分散介質一同在珠磨機中進行分散,製成含有黑色遮光性粒子的分散液(含有黑色遮光性粒子的分散液),將其與(A)成分及後述的(C)成分加以混合,由此可製備本發明的遮光膜用黑色樹脂組成物。將該分散液中所分散的黑色遮光性粒子的平均二次粒徑DB製備為60nm~150nm、優選製備 為80nm~120nm。另外,在本發明中,所謂“平均二次粒徑”是指用分散溶劑或相當的溶劑加以稀釋,用動態光散射法進行測定,利用累積法而求出的平均粒徑的值。另外,黑色遮光性粒子如果是例如碳黑那樣微小的一次粒子連接為一串葡萄狀的形態,該形態中的粒徑(平均二次粒徑)表現出物性,因此重要;而且即便並不連接為一串葡萄狀,越是微小粒徑(平均一次粒徑)的粒子,越容易在分散液中凝聚,該凝聚狀態下的粒徑(平均二次粒徑)變重要。因此,在本發明中,將分散液中的粒徑設為平均二次粒徑。 These black light-shielding particles or other light-shielding components are dispersed in a bead mill together with a dispersion medium containing a dispersant such as a polymer dispersant and a solvent to prepare a dispersion liquid containing black light-shielding particles (including black light-shielding particles). The dispersion liquid) is mixed with the component (A) and the component (C) described later to prepare a black resin composition for a light-shielding film of the present invention. The average secondary particle diameter D B of the black light-shielding particles dispersed in the dispersion is prepared to be 60 nm to 150 nm, preferably 80 nm to 120 nm. In the present invention, the "average secondary particle diameter" refers to a value obtained by a dynamic light scattering method and diluted by a dispersion solvent or a corresponding solvent, and the average particle diameter determined by the accumulation method. Further, the black light-shielding particles are in a form of a cluster of fine primary particles such as carbon black, and the particle diameter (average secondary particle diameter) in this form exhibits physical properties, and therefore is important; and even if it is not connected In the case of a cluster of grapes, the particles having a fine particle diameter (average primary particle diameter) are more likely to aggregate in the dispersion, and the particle diameter (average secondary particle diameter) in the aggregated state becomes important. Therefore, in the present invention, the particle diameter in the dispersion liquid is set to the average secondary particle diameter.
例如如果是碳黑則是在丙二醇單甲醚乙酸酯溶劑中為 0.1質量%粒子濃度下所測定的值。如果平均二次粒徑DB不足60nm,則為了達成高遮光率而需要添加提高黑色遮光性粒子的濃度而所需的高分子分散劑,而且在保存時容易產生黏度增加。如果平均二次粒徑DB超過150nm,則所形成的遮光膜的表面平滑性並不優選,而且損及在用光微影而形成時的圖案邊緣的直線性。 For example, in the case of carbon black, it is a value measured at a particle concentration of 0.1% by mass in a propylene glycol monomethyl ether acetate solvent. When the average secondary particle diameter D B is less than 60 nm, it is necessary to add a polymer dispersing agent which is required to increase the concentration of the black light-blocking particles in order to achieve a high light-shielding ratio, and it is likely to cause an increase in viscosity during storage. When the average secondary particle diameter D B exceeds 150 nm, the surface smoothness of the formed light-shielding film is not preferable, and the linearity of the pattern edge when formed by photolithography is impaired.
亦即,觸控面板用遮光膜及彩色濾光片用黑色矩陣中的 遮光度(OD=-log[透射度])要求OD4以上,另一方面要求膜厚為3μm以下、優選為2μm以下的薄膜化。其理由是:在觸控面板中,用以在將觸控面板遮光膜上的金屬配線與觸控面板上的導電膜連接時防止斷線,在黑色矩陣中,用以彩色濾光片的平坦化。 為了即使在此種薄的遮光膜中也獲得高的遮光度,例如優選相對於組成物中的所有固體成分而言,將碳黑系黑色遮光性粒子設為 35質量%以上、70質量%以下。 That is, the light-shielding film for the touch panel and the color filter are used in the black matrix. The opacity (OD=-log [transmission]) is required to be OD4 or more, and on the other hand, a film thickness of 3 μm or less, preferably 2 μm or less is required. The reason is: in the touch panel, the wire is prevented from being broken when the metal wire on the light shielding film of the touch panel is connected with the conductive film on the touch panel, and the color filter is flat in the black matrix. Chemical. In order to obtain a high degree of opacity even in such a thin light-shielding film, for example, it is preferable to set the carbon black-based black light-shielding particles with respect to all the solid components in the composition. 35 mass% or more and 70 mass% or less.
(C)成分中所含的顏色調整用粒子中所可使用的黃色顏料及橙色顏料例如可列舉:C.I.顏料黃(PY)20、C.I.顏料黃(PY)24、C.I.顏料黃(PY)31、C.I.顏料黃(PY)53、C.I.顏料黃(PY)83、C.I.顏料黃(PY)86、C.I.顏料黃(PY)93、C.I.顏料黃(PY)94、C.I.顏料黃(PY)109、C.I.顏料黃(PY)110、C.I.顏料黃(PY)117、C.I.顏料黃(PY)125、C.I.顏料黃(PY)137、C.I.顏料黃(PY)138、C.I.顏料黃(PY)139、C.I.顏料黃(PY)147、C.I.顏料黃(PY)148、C.I.顏料黃(PY)150、C.I.顏料黃(PY)153、C.I.顏料黃(PY)154、C.I.顏料黃(PY)166及C.I.顏料黃(PY)173等;C.I.顏料橙(PO)36、C.I.顏料橙(PO)43、C.I.顏料橙(PO)51、C.I.顏料橙(PO)55、C.I.顏料橙(PO)59、C.I.顏料橙(PO)61、C.I.顏料橙(PO)71、C.I.顏料橙(PO)73等;其中,C.I.顏料黃可將OD值保持為4.0以上,且可效率良好地使b*值變負因而優選。而且,可特別優選地用作顏色調整用粒子的具體例子可列舉PY139或PO61。 Examples of the yellow pigment and the orange pigment which can be used for the color-adjusting particles contained in the component (C) include CI Pigment Yellow (PY) 20, CI Pigment Yellow (PY) 24, and CI Pigment Yellow (PY) 31. CI Pigment Yellow (PY) 53, CI Pigment Yellow (PY) 83, CI Pigment Yellow (PY) 86, CI Pigment Yellow (PY) 93, CI Pigment Yellow (PY) 94, CI Pigment Yellow (PY) 109, CI Pigment Yellow (PY) 110, CI Pigment Yellow (PY) 117, CI Pigment Yellow (PY) 125, CI Pigment Yellow (PY) 137, CI Pigment Yellow (PY) 138, CI Pigment Yellow (PY) 139, CI Pigment Yellow ( PY) 147, CI Pigment Yellow (PY) 148, CI Pigment Yellow (PY) 150, CI Pigment Yellow (PY) 153, CI Pigment Yellow (PY) 154, CI Pigment Yellow (PY) 166, and CI Pigment Yellow (PY) 173, etc.; CI Pigment Orange (PO) 36, CI Pigment Orange (PO) 43, CI Pigment Orange (PO) 51, CI Pigment Orange (PO) 55, CI Pigment Orange (PO) 59, CI Pigment Orange (PO) 61 CI Pigment Orange (PO) 71, CI Pigment Orange (PO) 73, etc.; among them, CI Pigment Yellow can maintain the OD value at 4.0 or more, and can efficiently make the b * value negative, which is preferable. Further, a specific example of the particles for color adjustment which can be particularly preferably used is PY139 or PO61.
例如在將碳黑用作黑色遮光性粒子的情況下,碳黑通常具有茶色系的反射色,因此優選同系色顏料的PY139、PY150。如果是該同系色則在黑色遮光性粒子為自無彩色偏離的色相.色度的情況下,顯示與偏離的色相.色度的同系色。例如,如果黑色遮光性粒子是向茶色系偏離的色相.色度,則在色相環上處於相同位置 的橙、黃色系的色相.色度為同系色。亦即,如果是遮光材的相反色,則在黑色遮光性粒子為自無彩色偏離的色相.色度的情況下,顯示與偏離的色相.色度的相反色。例如,如果遮光材是向茶色系偏離的色相.色度,則在色相環上位於對角線附近的藍、紫色系的色相.色度為相反色。亦即,黑色遮光性粒子之一的碳黑是自無彩色向茶色系偏離的色相,相對於此,以往考慮調配與該偏離的色相為補色(相反色)的顏料/染料的“藍色顏料/染料”或“紫色顏料/染料”。 For example, when carbon black is used as the black light-shielding particles, the carbon black usually has a reflection color of a brown color, and therefore PY139 and PY150 of the same color pigment are preferable. If it is the same color, the black light-shielding particles are the hue from the achromatic color. In the case of chromaticity, the hue of the deviation is displayed. The color of the same color of chromaticity. For example, if the black shading particles are the hue that deviates from the brown color. Chroma, in the same position on the hue ring Orange, yellow hue. The chromaticity is the same color. That is, if it is the opposite color of the light-shielding material, the black light-shielding particles are the hue from the achromatic color. In the case of chromaticity, the hue of the deviation is displayed. The opposite color of chromaticity. For example, if the shading material is a hue that deviates from the brown color. Chromaticity, the blue and purple hue near the diagonal on the hue circle. The chromaticity is the opposite color. That is, the carbon black which is one of the black light-shielding particles is a hue which is deviated from the achromatic color to the brown color. On the other hand, it has been conventionally considered that the blue pigment of the pigment/dye which is complementary color (the opposite color) to the shifted hue is considered. / Dyes" or "Purple Pigments / Dyes".
將這些顏色調整用粒子與包含高分子分散劑等分散劑 及溶劑的分散介質一同在珠磨機中進行分散,製成含有顏色調整用粒子的分散液(含有顏色調整用粒子的分散液),將其與(A)成分及(B)成分加以混合,由此可製備本發明的遮光膜用黑色樹脂組成物。另外,關於該(C)成分中所分散的顏色調整用粒子的平均二次粒徑DC,使其與所述(B)成分中的黑色遮光性粒子的平均二次粒徑DB的比DC/DB成為0.2~1.2的範圍。該平均二次粒徑DC是用分散溶劑或相當的溶劑加以稀釋,用動態光散射法進行測定,利用累積法而求出的平均粒徑的值。 These color adjustment particles are dispersed in a bead mill together with a dispersion medium containing a dispersant such as a polymer dispersant and a solvent to prepare a dispersion liquid (dispersion liquid containing particles for color adjustment) containing particles for color adjustment. The black resin composition for a light-shielding film of the present invention can be prepared by mixing the component (A) and the component (B). Further, with respect to the component (C) dispersed in the color adjusting average secondary particle diameter D C of the particles, than the average secondary particle diameter D B is reacted with the component (B), the light-shielding black particles D C /D B becomes a range of 0.2 to 1.2. The average secondary particle diameter D C is a value obtained by a dynamic light scattering method and diluted by a dispersion solvent or a corresponding solvent, and the average particle diameter determined by the accumulation method.
例如,如果是黃色顏料粒子,則是其分散液為0.1質量%~1.0質量%粒子濃度的測定值。如果平均二次粒徑的比DC/DB超過1.2,則變得實質上未發現使b*值變負的效果。而且,如果平均二次粒徑的比DC/DB低於0.2,則組成物中的分散穩定性降低。遮光膜用途中所使用的含有碳黑的分散液的平均二次粒徑DB為 60nm~150nm,因此難以製備DC為30nm以下的含有黃色顏料的分散液。DC的優選的平均二次粒徑是60nm~150nm,更優選為80nm~120nm。 For example, in the case of yellow pigment particles, the dispersion is a measured value of a particle concentration of 0.1% by mass to 1.0% by mass. If the ratio of the average secondary particle diameter D C /D B exceeds 1.2, the effect of making the b * value negative is substantially not found. Further, if the ratio of the average secondary particle diameter D C /D B is less than 0.2, the dispersion stability in the composition is lowered. Since the carbon black-containing dispersion liquid used in the use of the light-shielding film has an average secondary particle diameter D B of 60 nm to 150 nm, it is difficult to prepare a dispersion containing a yellow pigment having a D C of 30 nm or less. The preferred average secondary particle diameter of D C is from 60 nm to 150 nm, and more preferably from 80 nm to 120 nm.
而且,在本發明中,在所述組成物中,使(C)成分中 所含的顏色調整用粒子(固體成分)的質量mC與(B)成分中所含的黑色遮光性粒子(固體成分)的質量mB的質量比mC/mB成為0.03~0.2的範圍。如果該mC/mB低於0.03,則未能發現b*的減低效果;如果超過0.2,則遮光率(OD/μm)降低。 Furthermore, in the present invention, the mass m C of the color-adjusting particles (solid content) contained in the component (C) and the black light-shielding particles (solid) contained in the component (B) are contained in the composition. The mass ratio m C /m B of the mass m B of the component is in the range of 0.03 to 0.2. If the m C /m B is less than 0.03, the effect of reducing b * is not found; if it exceeds 0.2, the light blocking ratio (OD/μm) is lowered.
然而,在將本組成物構成為硬化膜的帶遮光膜的基板 中,顏色調整用粒子表現出使b*減低的功能的機制可如下所述地設想。亦即,在帶遮光膜的基板中,自透明基板側入射的光的一部分主要被透明基板界面與其近旁的遮光膜內所分散的粒子反射及散射,自透明基板側射出。微粒子的散射在其粒徑低於光的波長的情況下產生,特別是在瑞利散射(Rayleigh scattering)區域中,相對於光入射至微粒子的方向的背向散射的波長相依性變顯著。由與碳黑粒子的粒徑為同等程度或其以下的黃色顏料或橙色顏料所引起的背向散射將處於其補色關係的藍色區域的光更多地散射至後方。 However, in the substrate with a light-shielding film in which the composition is a cured film, the mechanism by which the color-adjusting particles exhibit a function of reducing b * can be considered as follows. In other words, in the substrate with a light-shielding film, a part of the light incident from the transparent substrate side is mainly reflected and scattered by the particles dispersed in the light-shielding film at the interface between the transparent substrate and the transparent substrate, and is emitted from the transparent substrate side. The scattering of the microparticles occurs when the particle diameter thereof is lower than the wavelength of the light, and particularly in the Rayleigh scattering region, the wavelength dependence of the backscattering with respect to the direction in which the light is incident on the microparticles becomes remarkable. The backscattering caused by the yellow pigment or the orange pigment which is equal to or less than the particle diameter of the carbon black particles scatters more light in the blue region in the complementary color relationship to the rear.
為了有效地發揮以上遮光膜的顏色調整(將b*調整至負 側)的機制,需要使黑色遮光性粒子以及顏色調整用粒子在組成物中及透明基板上所塗布的膜內均不自身凝聚地穩定地分散。因此,用珠磨機將本發明的黑色遮光性粒子及顏色調整用粒子在有 機溶劑中與高分子分散劑一同加以分散,且以分散液的形式進行供給。 In order to effectively exhibit the color adjustment of the above light-shielding film (the b * is adjusted to the negative side), it is necessary that the black light-shielding particles and the color-adjusting particles do not condense themselves in the film coated on the composition and the transparent substrate. The ground is stably dispersed. Therefore, the black light-shielding particles and the color-adjusting particles of the present invention are dispersed together with the polymer dispersant in an organic solvent by a bead mill, and supplied as a dispersion liquid.
在本發明的遮光膜用黑色樹脂組成物中,為了溶解利用 光或熱的硬化性樹脂等、及使黑色遮光性粒子或顏色調整粒子等分散,可含有1種或多種(D)溶劑,並無特別限定。例如可列舉甲醇、乙醇、正丙醇、異丙醇、乙二醇、丙二醇等醇類,α-松油醇或β-松油醇等萜烯類等,丙酮、甲基乙基酮、環己酮、N-甲基-2-吡咯烷酮等酮類,甲苯、二甲苯、四甲基苯等芳香族烴類,溶纖劑、甲基溶纖劑、乙基溶纖劑、卡必醇、甲基卡必醇、乙基卡必醇、丁基卡必醇、丙二醇單甲醚、丙二醇單乙醚、二丙二醇單甲醚、二丙二醇單乙醚、三乙二醇單甲醚、三乙二醇單乙醚、二乙二醇二甲醚、二乙二醇乙基甲基醚、二乙二醇二乙醚等二醇醚類,乙酸乙酯、乙酸丁酯、溶纖劑乙酸酯、乙基溶纖劑乙酸酯、丁基溶纖劑乙酸酯、丙二醇單甲醚乙酸酯、丙二醇單乙醚乙酸酯等乙酸酯類,藉由使用數種這些溶劑進行溶解、混合,可製成使黑色遮光性粒子或顏色調整用粒子等穩定地分散的均一的組成物。 In the black resin composition for a light-shielding film of the present invention, it is used for dissolution. The light-curable resin or the like and the black light-shielding particles or the color-adjusting particles are dispersed, and one or more types of (D) solvents may be contained, and are not particularly limited. Examples thereof include alcohols such as methanol, ethanol, n-propanol, isopropanol, ethylene glycol, and propylene glycol, and terpenes such as α-terpineol or β-terpineol, acetone, methyl ethyl ketone, and ring. Ketones such as ketone and N-methyl-2-pyrrolidone; aromatic hydrocarbons such as toluene, xylene and tetramethylbenzene; cellosolve, methyl cellosolve, ethyl cellosolve, carbitol, Methyl carbitol, ethyl carbitol, butyl carbitol, propylene glycol monomethyl ether, propylene glycol monoethyl ether, dipropylene glycol monomethyl ether, dipropylene glycol monoethyl ether, triethylene glycol monomethyl ether, triethylene glycol Glycol ethers such as diethyl ether, diethylene glycol dimethyl ether, diethylene glycol ethyl methyl ether, diethylene glycol diethyl ether, ethyl acetate, butyl acetate, cellosolve acetate, ethyl Acetate such as cellosolve acetate, butyl cellosolve acetate, propylene glycol monomethyl ether acetate, propylene glycol monoethyl ether acetate, etc., can be prepared by dissolving and mixing using several kinds of these solvents. A uniform composition in which the light-shielding particles or the color-adjusting particles are stably dispersed.
關於此種溶劑的含量,只要相對於黑色樹脂組成物100 質量份而言為5質量份~2000質量份的範圍即可,優選為50質量份~1000質量份,可出於根據在透明基板上塗布的方法而調整為適當的固體成分、溶液黏度等目的而使用。 The content of such a solvent is as long as it is relative to the black resin composition 100. The mass portion may be in the range of 5 parts by mass to 2000 parts by mass, preferably 50 parts by mass to 1000 parts by mass, and may be adjusted to an appropriate solid content and solution viscosity according to a method of coating on a transparent substrate. And use.
將本發明的黑色樹脂組成物作為光硬化性組成物(黑色 感光性樹脂組成物)而應用於光微影法等中的情況下,需要含有(E)光聚合引發劑。該(E)光聚合引發劑例如可列舉苯乙酮、2,2-二乙氧基苯乙酮、對二甲基苯乙酮、對二甲基胺基苯丙酮、二氯苯乙酮、三氯苯乙酮、對叔丁基苯乙酮等苯乙酮類,二苯甲酮、2-氯二苯甲酮、p,p'-雙二甲基胺基二苯甲酮等二苯甲酮類,苯偶醯、安息香、安息香甲醚、安息香異丙醚、安息香異丁醚等安息香醚類,2-(鄰氯苯基)-4,5-苯基聯咪唑、2-(鄰氯苯基)-4,5-二(間甲氧基苯基)聯咪唑、2-(鄰氟苯基)-4,5-二苯基聯咪唑、2-(鄰甲氧基苯基)-4,5-二苯基聯咪唑、2,4,5-三芳基聯咪唑等聯咪唑系化合物類,2-三氯甲基-5-苯乙烯基-1,3,4-噁二唑、2-三氯甲基-5-(對氰基苯乙烯基)-1,3,4-噁二唑、2-三氯甲基-5-(對甲氧基苯乙烯基)-1,3,4-噁二唑等鹵代甲基噻唑化合物類,2,4,6-三(三氯甲基)-1,3,5-三嗪、2-甲基-4,6-雙(三氯甲基)-1,3,5-三嗪、2-苯基-4,6-雙(三氯甲基)-1,3,5-三嗪、2-(4-氯苯基)-4,6-雙(三氯甲基)-1,3,5-三嗪、2-(4-甲氧基苯基)-4,6-雙(三氯甲基)-1,3,5-三嗪、2-(4-甲氧基萘基)-4,6-雙(三氯甲基)-1,3,5-三嗪、2-(4-甲氧基苯乙烯基)-4,6-雙(三氯甲基)-1,3,5-三嗪、2-(3,4,5-三甲氧基苯乙烯基)-4,6-雙(三氯甲基)-1,3,5-三嗪、2-(4-甲硫基苯乙烯基)-4,6-雙(三氯甲基)-1,3,5-三嗪等鹵代甲基-均三嗪系化合物類,1,2-辛二酮,1-[4-(苯硫基)苯基]-,2-(O-苯甲醯肟)、1-(4-苯硫基苯基)丁烷-1,2-二酮-2-肟-O-苯甲酸酯、1-(4-甲硫基苯基)丁烷-1,2-二酮-2-肟-O-乙酸酯、1-(4-甲硫基苯基)丁烷-1-酮肟-O-乙酸酯等O-醯基肟系化合物類,苯偶醯二 甲基縮酮、噻噸酮、2-氯噻噸酮、2,4-二乙基噻噸酮、2-甲基噻噸酮、2-異丙基噻噸酮等硫化合物,2-乙基蒽醌、八甲基蒽醌、1,2-苯并蒽醌、2,3-二苯基蒽醌等蒽醌類,偶氮雙異丁基腈、過氧化苯甲醯、過氧化枯烯等有機過氧化物,2-巰基苯并咪唑、2-巰基苯并噁唑、2-巰基苯并噻唑等硫醇化合物,三乙醇胺、三乙胺等叔胺等。其中,自容易獲得高感度的黑色感光性樹脂組成物的觀點考慮,優選使用O-醯基肟系化合物類。而且,還可以使用2種以上這些光聚合引發劑。另外,本發明中所謂的光聚合引發劑,以包含增感劑的含義而使用。 The black resin composition of the present invention is used as a photocurable composition (black When the photosensitive resin composition is applied to a photolithography method or the like, it is necessary to contain (E) a photopolymerization initiator. Examples of the (E) photopolymerization initiator include acetophenone, 2,2-diethoxyacetophenone, p-dimethylacetophenone, p-dimethylaminopropiophenone, and dichloroacetophenone. Acetophenones such as trichloroacetophenone and p-tert-butylacetophenone, diphenyls such as benzophenone, 2-chlorobenzophenone, and p,p'-bisdimethylaminobenzophenone Ketones, benzoin, benzoin, benzoin methyl ether, benzoin isopropyl ether, benzoin isobutyl ether and other benzoin ethers, 2-(o-chlorophenyl)-4,5-phenylbiimidazole, 2-(ortho Chlorophenyl)-4,5-di(m-methoxyphenyl)biimidazole, 2-(o-fluorophenyl)-4,5-diphenylbiimidazole, 2-(o-methoxyphenyl) -4,5-diphenylbiimidazole, 2,4,5-triarylbiimidazole and other biimidazole compounds, 2-trichloromethyl-5-styryl-1,3,4-oxadiazole , 2-trichloromethyl-5-(p-cyanostyryl)-1,3,4-oxadiazole, 2-trichloromethyl-5-(p-methoxystyryl)-1, Halogenated methylthiazole compounds such as 3,4-oxadiazole, 2,4,6-tris(trichloromethyl)-1,3,5-triazine, 2-methyl-4,6-bis ( Trichloromethyl)-1,3,5-triazine, 2-phenyl-4,6-bis(trichloromethyl)-1,3,5-triazine, 2-(4-chlorophenyl) -4,6-double (three Chloromethyl)-1,3,5-triazine, 2-(4-methoxyphenyl)-4,6-bis(trichloromethyl)-1,3,5-triazine, 2-( 4-methoxynaphthyl)-4,6-bis(trichloromethyl)-1,3,5-triazine, 2-(4-methoxystyryl)-4,6-bis (three Chloromethyl)-1,3,5-triazine, 2-(3,4,5-trimethoxystyryl)-4,6-bis(trichloromethyl)-1,3,5-three Halogenated methyl-s-triazine-based compounds such as azine, 2-(4-methylthiostyryl)-4,6-bis(trichloromethyl)-1,3,5-triazine, 1, 2-octanedione, 1-[4-(phenylthio)phenyl]-, 2-(O-benzhydrazide), 1-(4-phenylthiophenyl)butane-1,2- Diketo-2-indole-O-benzoate, 1-(4-methylthiophenyl)butane-1,2-dione-2-indole-O-acetate, 1-(4- O-mercapto lanthanide compounds such as methylthiophenyl)butan-1-one oxime-O-acetate, benzophenanthrene Sulfur compounds such as methyl ketal, thioxanthone, 2-chlorothioxanthone, 2,4-diethylthioxanthone, 2-methylthioxanthone, 2-isopropylthioxanthone, 2-B Anthraquinones such as guanidine, octamethylguanidine, 1,2-benzopyrene, 2,3-diphenylanthracene, azobisisobutylnitrile, benzammonium peroxide, peroxidation An organic peroxide such as an alkene, a thiol compound such as 2-mercaptobenzimidazole, 2-mercaptobenzoxazole or 2-mercaptobenzothiazole; a tertiary amine such as triethanolamine or triethylamine. Among them, from the viewpoint of easily obtaining a high sensitivity black photosensitive resin composition, it is preferred to use an O-fluorenyl compound. Further, two or more kinds of these photopolymerization initiators can also be used. Further, the photopolymerization initiator in the present invention is used in the sense of containing a sensitizer.
而且,在本發明的遮光膜用黑色樹脂組成物中,可以視 需要調配硬化促進劑、熱聚合抑制劑、抗氧化劑、增塑劑、填充材料、流平劑、消泡劑、偶合劑、界面活性劑等添加劑。熱聚合抑制劑可列舉對苯二酚、對苯二酚單甲醚、鄰苯三酚、叔丁基兒茶酚、啡噻嗪等,抗氧化劑可列舉受阻酚系化合物等,增塑劑可列舉鄰苯二甲酸二丁酯、鄰苯二甲酸二辛酯、磷酸三甲苯酯等,填充材料可列舉玻璃纖維、二氧化矽、雲母、氧化鋁等,消泡劑或流平劑可列舉矽酮系、氟系、丙烯酸系化合物。而且,界面活性劑可列舉氟系界面活性劑、矽酮系界面活性劑等。 Further, in the black resin composition for a light-shielding film of the present invention, Additives such as a hardening accelerator, a thermal polymerization inhibitor, an antioxidant, a plasticizer, a filler, a leveling agent, an antifoaming agent, a coupling agent, and a surfactant are required. Examples of the thermal polymerization inhibitor include hydroquinone, hydroquinone monomethyl ether, pyrogallol, t-butyl catechol, and phenothiazine. Examples of the antioxidant include hindered phenol compounds, and plasticizers. Examples of dibutyl phthalate, dioctyl phthalate, and tricresyl phosphate include glass fibers, cerium oxide, mica, and alumina. Examples of antifoaming agents or leveling agents include hydrazine. A ketone system, a fluorine system or an acrylic compound. Further, examples of the surfactant include a fluorine-based surfactant, an anthrone-based surfactant, and the like.
而且,在要求自無彩色起帶藍色調的黑色的設計性的 LCD、觸控面板等顯示裝置的遮光膜等中,還存在藉由使該遮光膜的反射率為適當的範圍,增加設計性的要求。為了該目的,在本發明的組成物中可使用二氧化矽等無機粒子作為添加劑。 In addition, it is black design which is blue with blue color In a light-shielding film or the like of a display device such as an LCD or a touch panel, there is a demand for increasing the design property by setting the reflectance of the light-shielding film to an appropriate range. For this purpose, inorganic particles such as cerium oxide can be used as an additive in the composition of the present invention.
將遮光膜用黑色樹脂組成物塗布於透明基板上的方法 除了公知的溶液浸漬法、噴霧法以外,還可以採用使用噴墨機、輥塗機、砂塗機、狹縫塗布機或旋轉機的方法等任意方法。利用溶劑而調整為用以獲得良好的塗布膜的適當的黏度,通過這些方法而塗布為所期望的厚度後,在加熱或減壓下將溶劑除去(預烘烤),形成乾燥塗膜。繼而藉由光及/或熱進行硬化,由此而製備作為目標的帶遮光膜的基板。 Method for coating a light-shielding film with a black resin composition on a transparent substrate In addition to the known solution dipping method and spraying method, any method such as an ink jet machine, a roll coater, a sand coater, a slit coater or a rotary machine can be employed. The solvent is adjusted to obtain a suitable viscosity of a favorable coating film, and after coating to a desired thickness by these methods, the solvent is removed (prebaked) under heating or reduced pressure to form a dried coating film. Then, it is hardened by light and/or heat, thereby preparing a target substrate with a light-shielding film.
在透明基板上形成遮光膜圖案的印刷方法存在有光微 影法,亦即經由光罩對將本組成物塗布於透明基板上進行乾燥而成的塗膜照射紫外線,用顯影液將未曝光部分除去,進一步進行加熱處理。而且,存在有絲網印刷法、凹版印刷、凹板印刷法等使用轉印版而進行印刷的方法等,另外在近年來,噴墨印刷法作為無需罩幕或印刷版的數位印刷方法而受到關注。本發明的遮光膜用黑色樹脂組成物可應用於任意的圖案形成方法或印刷方法中,為了製成具有適合各印刷法的黏度、表面張力的樹脂組成物,選定所述硬化性樹脂/硬化性單體或溶劑或界面活性劑等添加劑。 而且,根據遮光膜圖案的印刷精度或解析度等而選定印刷機。 A printing method for forming a light shielding film pattern on a transparent substrate exists in a light micro In the shadow method, the coating film obtained by applying the composition onto a transparent substrate and drying it is irradiated with ultraviolet rays, and the unexposed portion is removed by a developing solution, and further heat treatment is performed. Further, there are a method of printing using a transfer printing plate, such as a screen printing method, a gravure printing method, a gravure printing method, etc., and in recent years, the inkjet printing method has been received as a digital printing method without a mask or a printing plate. attention. The black resin composition for a light-shielding film of the present invention can be applied to any pattern forming method or printing method, and the curable resin/curability is selected in order to obtain a resin composition having a viscosity and a surface tension suitable for each printing method. Additives such as monomers or solvents or surfactants. Further, the printing machine is selected in accordance with the printing accuracy, resolution, and the like of the light shielding film pattern.
例如,在用噴墨印刷法而形成遮光膜的情況下,本發明 的組成物所含有的遮光性黑色粒子或顏色調整用粒子等粒子再凝聚的現象少,因此間歇噴出時的噴墨噴嘴的閉塞少,且隨時間經過保存時的黏度穩定,因此有助於連續印刷時的圖案膜厚的穩定性。關於噴墨裝置,如果可以調整組成物的噴出液量,則並無特 別限制,在一般經常使用的壓電元件的噴墨頭中,穩定地形成液滴的墨水組成物的物性因噴頭的構成而異,在噴頭內部的溫度下,黏度為3mPa.sec~150mPa.sec即可,優選為4mPa.sec~30mPa.sec。如果黏度值變得比其大,則無法噴出液滴;相反地如果黏度值變得比其小,則液滴的噴出量並不穩定。而且,噴頭內部的溫度也因所使用的墨水組成物的穩定性而異,理想的是在20℃~45℃下使用。其中,為了使墨水組成物中的固體成分變多而使膜厚提高,為了設為可穩定進行噴出的黏度,一般採用35℃~40℃左右的溫度。 For example, in the case of forming a light-shielding film by an inkjet printing method, the present invention Since the particles such as the light-shielding black particles or the color-adjusting particles contained in the composition are less agglomerated, the ink jet nozzles during intermittent ejection are less occluded, and the viscosity at the time of storage is stable over time, thereby contributing to continuous The stability of the pattern film thickness at the time of printing. Regarding the ink jet device, if the amount of the liquid discharged from the composition can be adjusted, there is no special In addition, in the ink jet head of a piezoelectric element which is generally used frequently, the physical properties of the ink composition which stably forms droplets vary depending on the configuration of the head, and the viscosity is 3 mPa at the temperature inside the head. Sec~150mPa. Sec can be, preferably 4mPa. Sec~30mPa. Sec. If the viscosity value becomes larger than this, the liquid droplets cannot be ejected; conversely, if the viscosity value becomes smaller than this, the discharge amount of the liquid droplets is not stable. Further, the temperature inside the head is also different depending on the stability of the ink composition to be used, and it is preferably used at 20 ° C to 45 ° C. In order to increase the thickness of the solid content in the ink composition, the film thickness is increased, and in order to maintain the viscosity of the discharge stably, a temperature of about 35 ° C to 40 ° C is generally used.
如上所述的組成物的特性可主要藉由構成其的溶劑或 界面活性劑而調整,另外為了抑制連續印刷時的噴嘴部分的組成物的乾燥,溶劑以沸點為180℃以上的溶劑為主體,該沸點為180℃以上的溶劑能夠以在所有溶劑成分中為60%以上、優選為80%以上而單獨使用或使用多種。沸點為180℃以上的溶劑可使用乙二醇單甲醚乙酸酯等乙二醇單烷基醚乙酸酯類;二乙二醇單甲醚、二乙二醇單乙醚等二乙二醇單烷基醚類;二乙二醇單正丁醚乙酸酯等二乙二醇單烷基醚乙酸酯類;丙二醇單甲醚乙酸酯、丙二醇單乙醚乙酸酯等丙二醇單烷基醚乙酸酯類;二乙二醇二甲醚等其它醚類、γ-丁內酯等高沸點溶劑類等。 The characteristics of the composition as described above may be mainly by the solvent constituting the same or In order to suppress the drying of the composition of the nozzle portion during continuous printing, the solvent is mainly composed of a solvent having a boiling point of 180 ° C or higher, and the solvent having a boiling point of 180 ° C or higher can be 60 in all solvent components. % or more, preferably 80% or more, used alone or in combination. For the solvent having a boiling point of 180 ° C or higher, ethylene glycol monoalkyl ether acetate such as ethylene glycol monomethyl ether acetate; ethylene glycol monomethyl ether, diethylene glycol monoethyl ether or the like Dialkyl glycol monoalkyl ether acetates such as alkyl ethers; diethylene glycol mono-n-butyl ether acetate; propylene glycol monoalkyl ether acetate such as propylene glycol monomethyl ether acetate, propylene glycol monoethyl ether acetate Esters; other ethers such as diethylene glycol dimethyl ether; high-boiling solvents such as γ-butyrolactone.
如果表示在噴墨法中使用的情況下的本發明的黑色樹 脂組成物的固體成分的構成比率的例子,則只要為(A)硬化性樹脂及/或硬化性單體為25質量%~60質量%,(B)成分中的黑色遮 光性粒子為35質量%~70質量%,(C)成分中的顏色調整用粒子為1質量%~14質量%的範圍即可,更優選為(A)成分為35質量%~55質量%,(B)成分中的黑色遮光性粒子為40質量%~60質量%,(C)成分中的顏色調整用粒子為1質量%~12質量%。而且,例如在併用具有乙烯性不飽和雙鍵的樹脂(A-1)與具有乙烯性不飽和雙鍵的單體(A-2)作為(A)成分的情況下,(A-1)/(A-2)只要為10/90~90/10的範圍即可,優選為30/70~70/30的範圍。 而且,在併用(A-1)與(A-2)的情況下,也可進一步併用具有2個以上的環氧基的環氧樹脂而調整硬化物的表面硬度或機械物性等物性,在這樣的情況下,相對於[(A-1)+(A-2)]的100質量份,優選在1質量份~60質量份的範圍使用環氧樹脂,更優選10質量份~50質量份的範圍。 The black tree of the present invention if it is used in the inkjet method An example of the composition ratio of the solid content of the lipid composition is 25% by mass to 60% by mass of the (A) curable resin and/or curable monomer, and black shading in the component (B). The optical particles may be in a range of from 15% by mass to 14% by mass, and the component for color adjustment in the component (C) may be in the range of from 1% by mass to 14% by mass, and more preferably the component (A) is in an amount of from 35% by mass to 55% by mass. The black light-shielding particles in the component (B) are 40% by mass to 60% by mass, and the color-adjusting particles in the component (C) are 1% by mass to 12% by mass. Further, for example, when a resin (A-1) having an ethylenically unsaturated double bond and a monomer (A-2) having an ethylenically unsaturated double bond are used in combination as the component (A), (A-1)/ (A-2) may be in the range of 10/90 to 90/10, and preferably in the range of 30/70 to 70/30. Further, when (A-1) and (A-2) are used in combination, an epoxy resin having two or more epoxy groups may be further used in combination to adjust the physical properties such as surface hardness or mechanical properties of the cured product. In the case of 100 parts by mass of [(A-1)+(A-2)], it is preferred to use an epoxy resin in a range of from 1 part by mass to 60 parts by mass, more preferably from 10 parts by mass to 50 parts by mass. range.
另一方面,在光微影法中,(A)成分為光硬化性樹脂或 光硬化性單體,進一步混合用以使其溶解於鹼性顯影液中的鹼可溶性樹脂。而且,優選使用在分子內具有聚合性不飽和基與羧基等酸性基的含有不飽和基的鹼可溶性樹脂。例如,可使用以如下含有不飽和基的鹼可溶性樹脂為首的廣泛的樹脂,所述含有不飽和基的鹼可溶性樹脂是使如(甲基)丙烯酸縮水甘油酯這樣的在1分子中具有聚合性不飽和基與環氧基的化合物,和使(甲基)丙烯酸與(甲基)丙烯酸酯化合物進行自由基共聚而所得的樹脂的羧基的一部分反應而所得的樹脂。 On the other hand, in the photolithography method, the component (A) is a photocurable resin or The photocurable monomer is further mixed with an alkali-soluble resin which is dissolved in an alkaline developing solution. Further, an alkali-soluble resin containing an unsaturated group having an acidic group such as a polymerizable unsaturated group or a carboxyl group in the molecule is preferably used. For example, a wide range of resins including an alkali-soluble resin containing an unsaturated group which is polymerizable in one molecule such as glycidyl (meth)acrylate can be used. A resin obtained by reacting a compound having an unsaturated group and an epoxy group with a part of a carboxyl group of a resin obtained by radically copolymerizing (meth)acrylic acid with a (meth) acrylate compound.
形成在透明基板上的遮光膜的硬化方法以及硬化性樹 脂成分(A)以適合透明基板的耐熱性或所使用的環境、所要求的尺寸精度、可靠性的方式進行選定。 Hardening method of light-shielding film formed on transparent substrate and hardening tree The fat component (A) is selected so as to suit the heat resistance of the transparent substrate, the environment to be used, the required dimensional accuracy, and reliability.
關於如此所得的黑色硬化物(遮光膜)的色相、色度, 為了將黑色調整為無彩色或帶藍色調的黑色的目的,需要將CIE Lab色彩空間表示系統中的b*值調整為-1.0<b*<0.2,更優選為-1.0<b*<0.0。另外,作為本發明的這個b*值的測定方法,使用用於表示受日光照明的物體色彩的情況下的D65光源(JIS Z8720的日光標準光源(測色用的光))或C光源(JIS Z8720的日光輔助光源),自上述所得的帶遮光膜的基板中的塗布有遮光膜的面的相反面側,而為在視野角2°或10°下測定的值。 Regarding the hue and chromaticity of the black cured product (light-shielding film) thus obtained, in order to adjust black to achromatic or bluish-black, it is necessary to adjust the b * value in the CIE Lab color space representation system to -1.0. <b * < 0.2, more preferably -1.0 < b * <0.0. Further, as a method of measuring the b * value of the present invention, a D65 light source (a solar standard light source (light for color measurement) of JIS Z8720) or a C light source (JIS) for indicating the color of an object illuminated by sunlight is used. The daylight-assisted light source of Z8720 is a value measured from the opposite side of the surface on which the light-shielding film is applied to the light-shielding film obtained above, and is measured at a viewing angle of 2° or 10°.
關於在光微影法中使用本發明的遮光膜用黑色樹脂組 成物的情況下的黑色感光性樹脂組成物,若更具體地說明實施形態的例子,則該黑色感光性樹脂組成物含有上述(A)成分~(E)成分作為主成分。在該黑色感光性樹脂組成物中,優選在除(D)溶劑以外的固體成分(包含在光硬化後成為固體成分的聚合性單體成分)中,(A-1)含有聚合性不飽和基的鹼可溶性樹脂為10質量%~60質量%,相對於(A-1)100質量份而言,(A-2)光聚合性單體為10質量份~60質量份,相對於(A-1)與(A-2)的合計量100質量份而言,(E)光聚合引發劑為2質量份~50質量份。 更優選相對於(A-1)100質量份而言,(A-2)為15質量份~35質量份,相對於(A-1)與(A-2)的合計量100質量份而言,(E)為5質量份~30質量份。而且,關於(B)成分中的黑色遮光性 粒子,相對於除(D)溶劑以外的固體成分而言,其含量優選為30質量%~60質量%的範圍,更優選為40質量%~50質量%的範圍。而且,(C)成分中的顏色調整用粒子優選在除(D)溶劑以外的固體成分中為1質量%~15質量%,更優選為2質量%~7質量%的範圍。 Regarding the use of the black resin group for a light-shielding film of the present invention in photolithography In the case of the black photosensitive resin composition in the case of the product, the black photosensitive resin composition contains the components (A) to (E) as the main component. In the black photosensitive resin composition, (A-1) contains a polymerizable unsaturated group in a solid component other than the (D) solvent (including a polymerizable monomer component which becomes a solid component after photocuring). The alkali-soluble resin is 10% by mass to 60% by mass, and the (A-2) photopolymerizable monomer is 10 parts by mass to 60 parts by mass relative to (A-1) 100 parts by mass, relative to (A- 1) The (E) photopolymerization initiator is 2 parts by mass to 50 parts by mass, based on 100 parts by mass of the total amount of (A-2). More preferably, (A-2) is 15 parts by mass to 35 parts by mass, based on 100 parts by mass of (A-1), and is 100 parts by mass based on the total amount of (A-1) and (A-2). (E) is 5 parts by mass to 30 parts by mass. Moreover, regarding the black shading property in the component (B) The content of the particles is preferably in the range of 30% by mass to 60% by mass, and more preferably in the range of 40% by mass to 50% by mass based on the solid content other than the solvent (D). In addition, the color-adjusting particles in the component (C) are preferably in a range of 1% by mass to 15% by mass, and more preferably 2% by mass to 7% by mass, based on the solid content other than the (D) solvent.
使用本發明的黑色感光性樹脂組成物的硬化膜的形成 方法可列舉利用光微影法的方法。該形成方法可列舉如下的方法:首先,將黑色感光性樹脂組成物塗布於基板表面上,其次使溶劑乾燥(預烘烤)後,經由光罩對所得的塗膜照射紫外線而使曝光部硬化,進行使用鹼性水溶液使未曝光部溶出的顯影,由此而形成圖案,進一步進行熱硬化(後烘烤)。此處,塗布黑色感光性樹脂組成物的基板使用玻璃、透明膜(例如聚碳酸酯、聚對苯二甲酸乙二酯、聚醚碸等)等。 Formation of a cured film using the black photosensitive resin composition of the present invention The method can be exemplified by a method using photolithography. The formation method is as follows: First, a black photosensitive resin composition is applied onto the surface of the substrate, and then the solvent is dried (prebaked), and then the obtained coating film is irradiated with ultraviolet rays through a photomask to harden the exposed portion. The development is performed by using an alkaline aqueous solution to elute the unexposed portion, thereby forming a pattern and further performing thermal curing (post-baking). Here, as the substrate to which the black photosensitive resin composition is applied, glass, a transparent film (for example, polycarbonate, polyethylene terephthalate, polyether oxime, etc.) or the like is used.
將黑色感光性樹脂組成物塗布於基板上的方法除了公 知的溶液浸漬法、噴霧法以外,還可以採用使用輥塗機、砂塗機、狹縫塗布機或旋轉機的方法等任意方法。可藉由如下的方式而進行:利用這些方法,塗布為所期望的厚度後,將溶劑除去(預烘烤),由此而形成塗膜。在預烘烤後,在20Pa~100Pa下進行15秒~60秒的減壓乾燥(VCD),由此除去溶劑,其後用烘箱、加熱板等進行加熱。該預烘烤中的加熱溫度及加熱時間可根據所使用的溶劑而適宜選擇,例如在60℃~110℃的溫度下進行1分鐘~3分鐘。 A method of applying a black photosensitive resin composition onto a substrate In addition to the known solution dipping method and spraying method, any method such as a roll coater, a sand coater, a slit coater or a rotary machine may be employed. This can be carried out by applying these methods to a desired thickness, and then removing the solvent (prebaking) to form a coating film. After the prebaking, the solvent is removed by vacuum drying (VCD) at 20 Pa to 100 Pa for 15 seconds to 60 seconds, and then heated by an oven, a hot plate or the like. The heating temperature and the heating time in the prebaking can be appropriately selected depending on the solvent to be used, for example, at a temperature of 60 ° C to 110 ° C for 1 minute to 3 minutes.
預烘烤後所進行的曝光可用曝光機進行,經由光罩進行 曝光,由此使與圖案對應的部分的感光性樹脂及感光性單體感光。適宜選擇曝光機及其曝光照射條件,使用超高壓水銀燈、高壓水銀燈、金鹵燈、遠紫外線燈等光源而進行曝光。 The exposure after prebaking can be performed by an exposure machine, via a photomask Exposure is performed to thereby expose a portion of the photosensitive resin and the photosensitive monomer corresponding to the pattern. It is suitable to select an exposure machine and its exposure and irradiation conditions, and use an ultrahigh pressure mercury lamp, a high pressure mercury lamp, a metal halide lamp, a far ultraviolet lamp or the like to perform exposure.
曝光後的鹼性顯影是出於將未曝光的部分的塗膜除去 的目的而進行,利用該顯影而形成所期望的圖案。適於該鹼性顯影的顯影液例如可列舉鹼金屬或鹼土類金屬的碳酸鹽的水溶液、鹼金屬的氫氧化物的水溶液等,特別優選使用含有0.03質量%~1質量%碳酸鈉、碳酸鉀等碳酸鹽的弱鹼性水溶液,在23℃~27℃的溫度下進行顯影,可使用市售的顯影機或超音波清洗機等精密地形成微細的圖像。 Alkaline development after exposure is to remove the unexposed portion of the coating film For this purpose, the development is used to form a desired pattern. The developing solution suitable for the alkaline development includes, for example, an aqueous solution of an alkali metal or an alkaline earth metal carbonate, an aqueous solution of an alkali metal hydroxide, and the like, and it is particularly preferable to use 0.03 mass% to 1 mass% of sodium carbonate or potassium carbonate. The weakly alkaline aqueous solution of the carbonate is developed at a temperature of 23 ° C to 27 ° C, and a fine image can be precisely formed using a commercially available developing machine or an ultrasonic cleaner.
如上所述地進行顯影後,在200℃~240℃的溫度、20 分鐘~60分鐘的條件下進行熱處理(後烘烤)。以提高經圖案化的黑色膜與基板的密接性等目的而進行該後烘烤。其可藉由利用烘箱、加熱板等進行加熱而進行。而且,由此得到目標的帶遮光膜的基板。 After development as described above, at a temperature of 200 ° C to 240 ° C, 20 Heat treatment (post-baking) is carried out in a minute to 60 minutes. This post-baking is performed for the purpose of improving the adhesion between the patterned black film and the substrate. This can be carried out by heating using an oven, a hot plate or the like. Further, a target substrate with a light shielding film is thus obtained.
關於如此所得的黑色硬化物(遮光膜)的色相、色度, 為了將黑色調整為無彩色或帶藍色調的黑色的目的,需要將CIE Lab色彩空間表示系統中的b*值調整為-1.0<b*<0.2,更優選為-1.0<b*<0.0。另外,作為本發明的這個b*值的測定方法,使用用於表示受日光照明的物體色彩的情況下的D65光源(JIS Z8720的日光標準光源(測色用的光))或C光源(JIS Z8720的日光輔助 光源),自上述所得的帶遮光膜的基板中的塗布有遮光膜的面的相反面側,而測定的值。 Regarding the hue and chromaticity of the black cured product (light-shielding film) thus obtained, in order to adjust black to achromatic or bluish-black, it is necessary to adjust the b * value in the CIE Lab color space representation system to -1.0. <b * < 0.2, more preferably -1.0 < b * <0.0. Further, as a method of measuring the b * value of the present invention, a D65 light source (a solar standard light source (light for color measurement) of JIS Z8720) or a C light source (JIS) for indicating the color of an object illuminated by sunlight is used. The solar-assisted light source of Z8720) was measured from the opposite surface side of the surface on which the light-shielding film was applied to the light-shielding film obtained above.
以下,利用實施例對本發明加以更詳細的說明,但本發明並不限定於這些實施例。 Hereinafter, the present invention will be described in more detail by way of examples, but the invention is not limited thereto.
以下的實施例中的各種評價若無特別說明則如下所示地進行。 The various evaluations in the following examples were carried out as follows unless otherwise specified.
將後述的合成例中所得的樹脂溶液1g含浸於玻璃過濾器[質量:W0(g)]中而進行稱量[W1(g)],根據在160℃下加熱2hr後的質量[W2(g)],由下式而求出。 1 g of the resin solution obtained in the synthesis example described later was impregnated into a glass filter [mass: W 0 (g)], and weighed [W 1 (g)], and the mass after heating at 160 ° C for 2 hr [W] 2 (g)], which is obtained by the following formula.
固體成分濃度(質量%)=100×(W2-W0)/(W1-W0)。 Solid content concentration (% by mass) = 100 × (W 2 - W 0 ) / (W 1 - W 0 ).
使樹脂溶液溶解於二噁烷中,使用電位滴定裝置[平沼產業股份有限公司製造、商品名COM-1600],用1/10N-KOH水溶液進行滴定而求出。 The resin solution was dissolved in dioxane, and titrated by a 1/10 N-KOH aqueous solution using a potentiometric titration apparatus [manufactured by Hiranuma Sangyo Co., Ltd., trade name: COM-1600].
用凝膠滲透色譜儀(gel permeation chromatography,GPC)[東曹(Tosoh)股份有限公司製造、商品名為HLC-8220GPC]、溶劑:四氫呋喃、管柱:TSKgelSuperH-2000(2根)+TSKgelSuperH-3000(1根)+TSKgelSuperH-4000(1根)+TSKgelSuper-H5000(1根) [東曹股份有限公司製造、溫度:40℃、速度:0.6ml/min]進行測定,設為標準聚苯乙烯[東曹股份有限公司製造、PS-寡聚物試劑盒]換算值而求出重量平均分子量(Mw)。 Gel permeation chromatography (GPC) [manufactured by Tosoh Co., Ltd., trade name HLC-8220GPC], solvent: tetrahydrofuran, column: TSKgel SuperH-2000 (2) + TSKgel SuperH-3000 (1) + TSKgel SuperH-4000 (1) + TSKgel Super-H5000 (1) [Measured by Tosoh Co., Ltd., Temperature: 40 ° C, Velocity: 0.6 ml/min], the standard polystyrene (made by Tosoh Corporation, PS-oligomer kit) was used to determine the value. Weight average molecular weight (Mw).
關於所得的含有黑色遮光性粒子的分散液或含有顏色調整用粒子的分散液,利用動態光散射法的粒度分佈計(大塚電子股份有限公司製造、粒徑分析儀FPAR-1000),分別測定利用累積法而求出的平均二次粒徑。以分散於丙二醇單甲醚乙酸酯中的粒子濃度成為0.1質量%~0.5質量%的方式對含有遮光性黑色粒子的分散液或含有顏色調整用粒子的分散液進行稀釋而製成測定用樣品。 The dispersion liquid containing the black light-shielding particles or the dispersion liquid containing the color-adjusting particles was measured and utilized by a particle size distribution meter (manufactured by Otsuka Electronics Co., Ltd., particle size analyzer FPAR-1000) by a dynamic light scattering method. The average secondary particle diameter obtained by the accumulation method. The dispersion liquid containing the light-shielding black particles or the dispersion liquid containing the color-adjusting particles is diluted to a sample for measurement so that the concentration of the particles dispersed in the propylene glycol monomethyl ether acetate is 0.1% by mass to 0.5% by mass. .
用E型黏度計(東機產業製造、RE80L),在23℃下測定遮光膜用黑色樹脂組成物的黏度。 The viscosity of the black resin composition for a light-shielding film was measured at 23 ° C using an E-type viscometer (manufactured by Toki Sangyo Co., Ltd., RE80L).
使用後烘烤後的帶遮光膜的玻璃基板,用大塚電子公司製造的OD計進行測定。 The glass substrate with a light-shielding film after post-baking was measured using the OD meter manufactured by Otsuka Electronics Co., Ltd.
使用觸針式膜厚計[科磊(Tencor)股份有限公司製造]對後烘烤後的帶遮光膜的玻璃基板進行測定。 The light-shielded glass substrate after post-baking was measured using a stylus type film thickness meter [manufactured by Tencor Co., Ltd.].
將遮光膜用黑色樹脂組成物裝入到柯尼卡美能達(Konica Minolta)IJ製造的壓電元件驅動型噴墨頭(14pL/滴;KM512M)中,實施沖洗、噴墨頭噴出面的清洗後,以30分鐘連續地用飛翔觀察照相機確認墨水組成物的噴出狀態,觀察是否存在不噴出液滴、飛翔軌道明顯地並不垂直等顯著的異常。進一步利用間歇噴出試驗(將噴墨頭噴出面清洗後靜置30分鐘,對再次噴出時的不噴出噴嘴的個數進行計數),觀察所有512個噴嘴中的不吐出噴嘴的個數是否為良好(10個以內)。 Insert the black mask with a black resin composition into Konica Minolta (Konica) In the piezoelectric element-driven inkjet head (14pL/drip; KM512M) manufactured by IJ, the rinsing and cleaning of the inkjet head ejection surface were carried out, and the ejection state of the ink composition was continuously observed by a flying observation camera for 30 minutes. Observe whether there are significant abnormalities such as not ejecting droplets, flying orbits are obviously not vertical. Further, the intermittent discharge test was carried out (the inkjet head ejection surface was washed and left to stand for 30 minutes, and the number of non-discharge nozzles when re-discharging was counted), and it was observed whether the number of non-discharge nozzles among all 512 nozzles was good. (within 10).
使用旋塗機,以後烘烤後的膜厚成為1.2μm的方式將遮光膜用黑色樹脂組成物塗布於125mm×125mm的玻璃基板上,在80℃下進行1分鐘的預烘烤。其後,將曝光間隙調整為80μm,在乾燥塗膜上覆蓋線/空間=20μm/20μm的負型光罩,用I射線照度為30mW/cm2的超高壓水銀燈照射100mJ/cm2的紫外線,進行感光部分的光硬化反應。其次,將該曝光後的塗板在0.05%氫氧化鉀水溶液中、23℃下進行壓力為1kgf/cm2噴淋顯影,將觀察到圖案的時間作為顯影脫落時間(BT秒),進一步進行20秒的顯影後,進行壓力為5kgf/cm2的噴霧水洗,將塗膜的未曝光部除去而在玻璃基板上形成像素圖案,其後使用熱風乾燥機而在230℃下進行30分鐘的後烘烤。各實施例、及比較例中所得的遮光膜的評價項目與方法如下所述。 The black resin composition of the light-shielding film was applied onto a glass substrate of 125 mm × 125 mm by a spin coater so that the film thickness after baking was 1.2 μm, and prebaking was performed at 80 ° C for 1 minute. Thereafter, the exposure gap was adjusted to 80 μm, a negative mask having a line/space of 20 μm/20 μm was coated on the dried coating film, and an ultraviolet ray of 100 mJ/cm 2 was irradiated with an ultrahigh pressure mercury lamp having an I illuminance of 30 mW/cm 2 . A photohardening reaction of the photosensitive portion is carried out. Next, the exposed coated plate was spray-developed at a pressure of 1 kgf/cm 2 in a 0.05% potassium hydroxide aqueous solution at 23 ° C, and the time when the pattern was observed was taken as the development off time (BT seconds), and further 20 seconds was performed. After the development, the spray was washed with a pressure of 5 kgf/cm 2 , the unexposed portion of the coating film was removed, and a pixel pattern was formed on the glass substrate, and then post-baking was performed at 230 ° C for 30 minutes using a hot air dryer. . The evaluation items and methods of the light-shielding films obtained in the respective examples and comparative examples are as follows.
圖案直線性及塗膜表面的平滑性:用顯微鏡以及掃描電子顯微鏡(Scanning Electron Microscope,SEM)觀察後烘烤後的20μ m的線,將觀測到鋸齒狀的情況判定為“不良”,將並無鋸齒狀的情況判定為“良好”。而且,在由於粗大粒子而造成在線膜厚上存在不均一的情況下,將平滑性判定為“不良”。 Straightness of the pattern and smoothness of the surface of the coating: 20μ after post-baking was observed with a microscope and a scanning electron microscope (SEM) The line of m was judged to be "poor" when the sawtooth shape was observed, and the case where it was not jagged was judged as "good". Further, when there is unevenness in the thickness of the line film due to the coarse particles, the smoothness is judged as "poor".
而且,合成例等中所使用的省略符號如下所示。 Further, the omission symbols used in the synthesis examples and the like are as follows.
BPFE:9,9-雙(4-羥基苯基)芴與氯甲基氧雜環丙烷的反應物。在通式(I)的化合物中,A為芴-9,9-二基、R1~R4為氫的化合物。 BPFE: a reaction of 9,9-bis(4-hydroxyphenyl)anthracene with chloromethyloxirane. In the compound of the formula (I), A is a compound of -9,9-diyl and R 1 to R 4 are hydrogen.
BPDA:3,3',4,4'-聯苯四羧酸二酐 BPDA: 3,3',4,4'-biphenyltetracarboxylic dianhydride
THPA:1,2,3,6-四氫鄰苯二甲酸酐 THPA: 1,2,3,6-tetrahydrophthalic anhydride
TPP:三苯基膦 TPP: triphenylphosphine
PGMEA:丙二醇單甲醚乙酸酯 PGMEA: propylene glycol monomethyl ether acetate
BDGAC:二乙二醇單丁醚乙酸酯 BDGAC: diethylene glycol monobutyl ether acetate
DPHA:二季戊四醇六丙烯酸酯與二季戊四醇五丙烯酸酯的混合物[日本化藥股份有限公司製造的商品名DPHA] DPHA: a mixture of dipentaerythritol hexaacrylate and dipentaerythritol pentaacrylate [trade name DPHA manufactured by Nippon Kayaku Co., Ltd.]
HDDA:1,6-己二醇二丙烯酸酯 HDDA: 1,6-hexanediol diacrylate
在帶回流冷凝器的500ml四口燒瓶中裝入BPFE 78.63g(0.17mol)、丙烯酸24.50g(0.34mol)、TPP 0.45g、及PGMEA 114g,在100℃~105℃的加熱下進行12hr的攪拌而獲得反應產物。 In a 500 ml four-necked flask equipped with a reflux condenser, 78.63 g (0.17 mol) of BPFE, 24.50 g (0.34 mol) of acrylic acid, 0.45 g of TPP, and 114 g of PGMEA were charged, and the mixture was heated at 100 ° C to 105 ° C for 12 hr. The reaction product was obtained by stirring.
其次,在所得的反應產物中裝入BPDA 25.01g(0.085mol)及THPA 12.93g(0.085mol),在120℃~125℃的加熱下進行6hr的攪拌,獲得含有聚合性不飽和基的鹼可溶性樹脂溶液(A-1)-1。所得的樹脂溶液的固體成分濃度為55.8wt%,酸值(固 體成分換算)為103mgKOH/g,利用GPC分析的Mw為2600。 Next, BPDA 25.01 g (0.085 mol) and THPA 12.93 g (0.085 mol) were placed in the obtained reaction product, and stirred under heating at 120 ° C to 125 ° C for 6 hr to obtain an alkali-soluble solution containing a polymerizable unsaturated group. Resin solution (A-1)-1. The solid content concentration of the obtained resin solution was 55.8 wt%, and the acid value (solid The body composition conversion was 103 mgKOH/g, and the Mw analyzed by GPC was 2,600.
製備以下的含有(A)成分的樹脂溶液A1及樹脂溶液A2。 The following resin solution A1 containing the component (A) and the resin solution A2 were prepared.
(1)樹脂溶液A1(噴墨印刷用:熱硬化型樹脂組成物) (1) Resin solution A1 (for inkjet printing: thermosetting resin composition)
將BDGAC 82.9質量份、含有聚合性不飽和基的鹼可溶性樹脂溶液(A-1)-1 6.3質量份、苯酚酚醛清漆型環氧樹脂[三菱化學股份有限公司製造、商品名為JER154、環氧當量為178、1分子中的平均官能基數為3.0]3.2質量份、DPHA 4.0質量份、日本畢克化學(BYK-Chemie Japan)股份有限公司製造的商品名BYK(注冊商標)-333的10% BDGAC稀釋溶液1.24質量份、3-脲基丙基三乙氧基矽烷[信越化學工業股份有限公司製造、商品名為KBE-585]2.95質量份加以混合而製備樹脂溶液A1。 82.9 parts by mass of BDDAC, an alkali-soluble resin solution (A-1)-1 containing 6.3 parts by mass of a polymerizable unsaturated group, and a phenol novolac type epoxy resin [manufactured by Mitsubishi Chemical Corporation, trade name: JER154, epoxy The equivalent number is 178, and the average number of functional groups in one molecule is 3.0] 3.2 parts by mass, DPHA is 4.0 parts by mass, and 10% of the trade name BYK (registered trademark)-333 manufactured by BYK-Chemie Japan Co., Ltd. A resin solution A1 was prepared by mixing 1.24 parts by mass of BDGAC diluted solution and 2.95 parts by mass of 3-ureidopropyltriethoxydecane [manufactured by Shin-Etsu Chemical Co., Ltd., trade name: KBE-585].
(2)樹脂溶液A2(光微影印刷用:曝光/熱硬化型樹脂組成物) (2) Resin solution A2 (for photolithography: exposure/thermosetting resin composition)
將PGMEA 78.7質量份、鹼可溶性樹脂溶液(A-1)-1 12.3質量份、DPHA 2.41質量份、光聚合引發劑OXE-02(巴斯夫(BASF)公司製造)0.81質量份、日本畢克化學股份有限公司製造的商品名BYK(注冊商標)-333的10% BDGAC稀釋溶液1.24質量份、3-脲基丙基三乙氧基矽烷[信越化學工業股份有限公司製造、商品名為KBE-585]2.95質量份加以混合而製備樹脂溶液A2。 78.7 parts by mass of PGMEA, 12.3 parts by mass of alkali-soluble resin solution (A-1)-1, 2.41 parts by mass of DPHA, 0.81 parts by mass of photopolymerization initiator OXE-02 (manufactured by BASF), and BYK Chemical Co., Ltd. 10% BDGAC diluted solution of the trade name BYK (registered trademark)-333 manufactured by the company, 1.24 parts by mass, 3-ureidopropyltriethoxydecane [manufactured by Shin-Etsu Chemical Co., Ltd., trade name KBE-585] 2.95 parts by mass was mixed to prepare a resin solution A2.
(1)含有黑色遮光性粒子的分散液B1(噴墨印刷用): 以在BDGAC中碳黑濃度成為25wt%、高分子分散劑成為10wt%的方式在珠磨機中進行分散,製成含有黑色遮光性粒子的分散液B1。所得的分散液中的碳黑的平均二次粒徑為96nm。 (1) Dispersion B1 containing black light-shielding particles (for inkjet printing): In the BIGAC, the carbon black concentration was 25 wt%, and the polymer dispersant was 10 wt%, and the dispersion was carried out in a bead mill to prepare a dispersion B1 containing black light-shielding particles. The average secondary particle diameter of the carbon black in the obtained dispersion was 96 nm.
(2)含有黑色遮光性粒子的分散液B2(光微影印刷用):以在PGMEA中碳黑濃度成為25重量%、高分子分散劑成為10wt%的方式在珠磨機中進行分散,製成含有黑色遮光性粒子的分散液B2。所得的分散液中的碳黑的平均二次粒徑為111nm。 (2) Dispersion B2 (for black lithography) containing black light-shielding particles: dispersed in a bead mill so that the carbon black concentration in PGMEA is 25% by weight and the polymer dispersant is 10% by weight. A dispersion B2 containing black light-shielding particles was formed. The average secondary particle diameter of the carbon black in the obtained dispersion was 111 nm.
使用珠磨機將C.I.顏料黃顏料PY139與高分子分散劑在PGMEA或BDGAC中製備含有顏色調整用粒子的分散液C1~含有顏色調整用粒子的分散液C4。將各分散液的組成與特性示於表1中。 A dispersion liquid C1 containing color-adjusting particles and a dispersion liquid C4 containing color-adjusting particles were prepared by using a bead mill using a C.I. pigment yellow pigment PY139 and a polymer dispersant in PGMEA or BDGAC. The composition and characteristics of each dispersion are shown in Table 1.
將樹脂溶液A1 12.8質量份、碳黑分散液B1 13.5質量份、PY139分散液C1 3.8質量份、以及二氧化矽分散液S1(畢克(BYK)公司製造的奈米畢克(NANOBYK)-3605)0.5質量份加以混合,用1μm深層過濾器進行加壓過濾,製備遮光膜用墨水(遮光膜用黑色樹脂組成物)。所製作的墨水的初始黏度(室溫)為10.3mPa.sec[23℃、用E型黏度計(東機產業)測定]。利用旋塗改變轉速而將該遮光膜用墨水塗布於無鹼玻璃上,將這些在90℃下進行5分鐘乾燥,進一步在230℃下進行30分鐘後烘烤而製成帶遮光膜的玻璃基板。分別將膜厚1.1μm作為實施例1的樣品,將膜厚1.4μm作為實施例2的樣品。於表2中表示各樣品的組成,於表3中表示各樣品的評價結果。 12.8 parts by mass of the resin solution A1, 13.5 parts by mass of the carbon black dispersion B1, 3.8 parts by mass of the PY139 dispersion C1, and the cerium oxide dispersion S1 (NANOBYK-3605 manufactured by BYK) 0.5 parts by mass was mixed and subjected to pressure filtration using a 1 μm depth filter to prepare an ink for a light-shielding film (black resin composition for a light-shielding film). The initial viscosity (room temperature) of the ink produced was 10.3 mPa. Sec [23 ° C, measured with an E-type viscometer (Dongji Industry)]. The light-shielding film was applied onto the alkali-free glass by spin coating to change the number of revolutions, and these were dried at 90 ° C for 5 minutes, and further baked at 230 ° C for 30 minutes to form a glass substrate with a light-shielding film. . A film thickness of 1.1 μm was used as the sample of Example 1, and a film thickness of 1.4 μm was used as the sample of Example 2. The composition of each sample is shown in Table 2, and the evaluation results of each sample are shown in Table 3.
另外,表3中的反射光學特性的測定是用以下的方式進行。 In addition, the measurement of the reflection optical characteristics in Table 3 was performed in the following manner.
使用後烘烤後的帶遮光膜的玻璃基板,自形成遮光膜的面的相反側的面側,使用柯尼卡美能達(Konica Minolta)製造的測色計CM2600d在D65光源、10°視野下進行測定。 After the post-baking glass substrate with a light-shielding film, a colorimeter CM2600d manufactured by Konica Minolta was used at a D65 light source, 10° field of view from the side of the opposite side of the surface on which the light-shielding film was formed. The measurement was carried out.
除了含有PY139的分散液以外,與實施例1同樣地進行,以表2中所示的質量份加以混合而製備遮光膜用墨水(遮光膜用黑色樹脂組成物)。將該遮光膜用墨水塗布於無鹼玻璃上,於90℃下進行5分鐘乾燥,進一步在230℃下進行30分鐘的後烘烤而製成帶遮光膜的玻璃基板。所作成的樣品膜厚是1.3μm。將樣品評價結果示於表3中。 In the same manner as in Example 1, except that the dispersion liquid containing PY139 was used, the light-shielding film ink (black resin composition for light-shielding film) was prepared by mixing the mass parts shown in Table 2. The light-shielding film was applied onto an alkali-free glass, dried at 90 ° C for 5 minutes, and further post-baked at 230 ° C for 30 minutes to prepare a glass substrate with a light-shielding film. The resulting film thickness was 1.3 μm. The sample evaluation results are shown in Table 3.
如表3所示,在實施例1~實施例2中,帶遮光膜的基板也顯示遮光度3以上,b*也為-0.08而接近零,相對於此,在比較例1中,b*超過0.2。 As shown in Table 3, in the first to second embodiments, the substrate with a light-shielding film also showed a light-shielding degree of 3 or more, and b * was also -0.08 and was close to zero. In contrast, in Comparative Example 1, b * More than 0.2.
改變含有顏色調整用粒子的分散液中的PY139的平均二次粒徑,以表2中所示的組成比,除此以外與實施例1同樣地製備遮光性墨水(遮光膜用黑色樹脂組成物),進一步與實施例1同樣地進行而在無鹼玻璃上形成遮光膜。將評價結果示於表3中。 A light-shielding ink (black resin composition for a light-shielding film) was prepared in the same manner as in Example 1 except that the average secondary particle diameter of PY139 in the dispersion liquid containing the color-adjusting particles was changed, and the composition ratio shown in Table 2 was changed. Further, in the same manner as in Example 1, a light-shielding film was formed on the alkali-free glass. The evaluation results are shown in Table 3.
在PY139的平均二次粒徑低於碳黑的平均二次粒徑96nm的情況下,為-1.0<b*<0.2,相對於此,在PY139的平均二次粒徑超過碳黑的平均二次粒徑的各比較例的情況下,為b*超過0.2的 結果。 When the average secondary particle diameter of PY139 is lower than the average secondary particle diameter of carbon black of 96 nm, it is -1.0 < b * < 0.2, whereas the average secondary particle diameter of PY139 exceeds the average of carbon black. In the case of each comparative example of the secondary particle diameter, the result of b * exceeding 0.2 was obtained.
相對於碳黑粒子的質量,改變含有顏色調整用粒子的分散液中的PY139的添加質量,以表2中所示的組成比,除此以外與實施例1同樣地進行而製備遮光性墨水(遮光膜用黑色樹脂組成物),進一步與實施例1同樣地進行而在無鹼玻璃上形成遮光膜。將評價結果示於表3中。在任意情況下,與並不共存PY139粒子的比較例1相比而言,b*向負側移動,顯示為-1.0<b*<0.2。 The light-shielding ink was prepared in the same manner as in Example 1 except that the additive mass of PY139 in the dispersion liquid containing the particles for color adjustment was changed with respect to the mass of the carbon black particles. Further, in the same manner as in Example 1, a black resin composition for a light-shielding film was formed to form a light-shielding film on the alkali-free glass. The evaluation results are shown in Table 3. In any case, b * was shifted to the negative side as compared with Comparative Example 1 in which PY139 particles were not coexistent, and it was shown to be -1.0 <b * <0.2.
使用光微影印刷用樹脂溶液(A2),用表2中所示的組成製備遮光用墨水(遮光膜用黑色樹脂組成物)。使用旋塗機,以後烘烤後的膜厚成為1.0μm~1.3μm的方式將遮光膜用黑色樹脂組成物塗布於125mm×125mm的玻璃基板上,在80℃下進行1分鐘的預烘烤。其後,將曝光間隙調整為80μm,在乾燥塗膜上覆蓋線/空間=20μm/20μm的負型光罩,用I射線照度為30mW/cm2的超高壓水銀燈照射100mJ/cm2的紫外線,進行感光部分的光硬化反應。其次,將該曝光後的塗板在0.05%氫氧化鉀水溶液中、23℃下進行壓力為1kgf/cm2噴淋顯影,將觀察到圖案的時間作為顯影脫落時間(BT秒),進一步進行20秒的顯影後,進行壓力為5kgf/cm2的噴霧水洗,將塗膜的未曝光部除去而在玻璃基板上形成像素圖案,其後使用熱風乾燥機而在230℃下進行30分鐘的後烘烤。 The light-shielding ink (black resin composition for light-shielding film) was prepared using the resin solution (A2) for photolithography printing using the composition shown in Table 2. The black resin composition of the light-shielding film was applied onto a glass substrate of 125 mm × 125 mm by a spin coater so that the film thickness after baking was 1.0 μm to 1.3 μm, and prebaking was performed at 80 ° C for 1 minute. Thereafter, the exposure gap was adjusted to 80 μm, a negative mask having a line/space of 20 μm/20 μm was coated on the dried coating film, and an ultraviolet ray of 100 mJ/cm 2 was irradiated with an ultrahigh pressure mercury lamp having an I illuminance of 30 mW/cm 2 . A photohardening reaction of the photosensitive portion is carried out. Next, the exposed coated plate was spray-developed at a pressure of 1 kgf/cm 2 in a 0.05% potassium hydroxide aqueous solution at 23 ° C, and the time when the pattern was observed was taken as the development off time (BT seconds), and further 20 seconds was performed. After the development, the spray was washed with a pressure of 5 kgf/cm 2 , the unexposed portion of the coating film was removed, and a pixel pattern was formed on the glass substrate, and then post-baking was performed at 230 ° C for 30 minutes using a hot air dryer. .
在含有PY139粒子的帶遮光膜的基板中,b*顯示-1.0<b*<0.2,相對於此,在不含PY139的帶遮光膜的基板中,為b*超過0.2的結果。 In the substrate with a light-shielding film containing PY139 particles, b * showed -1.0 <b * < 0.2, whereas in the substrate with a light-shielding film containing no PY139, b * exceeded 0.2.
將實施例1~實施例6中所製備的遮光膜用黑色樹脂組成物裝入到柯尼卡美能達(konicaminolta)IJ製造的壓電元件驅動型噴墨頭(14pL/滴;KM512M)中,實施沖洗、噴墨頭噴出面的清洗後,以30分鐘連續地用飛翔觀察照相機確認墨水組成物的噴出狀態,未觀察到不噴出液滴、飛翔軌道明顯地並不垂直等顯著的異常。進一步根據間歇噴出試驗(將噴墨頭噴出面清洗後靜置30分鐘,對再次噴出時的不噴出噴嘴的個數進行計數),所有512個噴嘴中的不吐出噴嘴的個數為2個以內,可知在噴墨噴出性上完全未發現問題。 The light-shielding film prepared in Example 1 to Example 6 was placed in a piezoelectric element-driven ink-jet head (14 pL/drip; KM512M) manufactured by Konica Minolta IJ. After the rinsing and the cleaning of the inkjet head ejection surface were carried out, the ejection state of the ink composition was continuously observed with a flying observation camera for 30 minutes, and no significant abnormality such as no droplets were ejected and the flying orbit was not substantially vertical. Further, according to the intermittent discharge test (the inkjet head discharge surface is washed and left to stand for 30 minutes, and the number of non-discharge nozzles when re-discharging is counted), the number of non-discharge nozzles among all the 512 nozzles is two or less. It was found that no problem was found in ink jet ejectability at all.
而且,關於實施例7~實施例9中所製備的遮光膜用黑色樹脂組成物,利用所述方法進行顯影特性(圖案直線性及塗膜表面的平滑性)的評價,結果確認直線性及平滑性均無問題。 Further, regarding the black resin composition for a light-shielding film prepared in Examples 7 to 9, the development characteristics (pattern linearity and smoothness of the surface of the coating film) were evaluated by the above method, and the results were confirmed to be linear and smooth. There is no problem with sex.
進一步,關於光微影法用遮光膜用黑色感光性樹脂組成物,一併表示其評價。 Further, the black photosensitive resin composition for a light-shielding film for photolithography is collectively shown for evaluation.
以表4所示的組成進行調配,製備實施例8~實施例10、及比較例5、比較例6的黑色感光性樹脂組成物。如下表示各組成中所使用的成分。 The black photosensitive resin compositions of Examples 8 to 10, Comparative Example 5, and Comparative Example 6 were prepared by blending the compositions shown in Table 4. The components used in each composition are shown below.
(A-1)鹼可溶性樹脂溶液:合成例1中所製備的含有聚合性不飽和基的鹼可溶性樹脂溶液(A-1)-1 (A-1) Alkali-soluble resin solution: the alkali-soluble resin solution (A-1)-1 containing a polymerizable unsaturated group prepared in Synthesis Example 1.
(A-2)光聚合性單體:DPHA (A-2) Photopolymerizable monomer: DPHA
(B)黑色遮光性粒子分散液:碳黑為25質量%、高分子分散劑為6質量%的PGMEA溶劑的碳黑分散體 (B) Black light-shielding particle dispersion liquid: carbon black dispersion of PGMEA solvent having a carbon black content of 25% by mass and a polymer dispersant of 6% by mass
(C)顏色調整用粒子分散液: (C) Particle dispersion liquid for color adjustment:
(C)-1:Y139(平均二次粒徑為108nm)為15質量%、高分子分散劑為9質量%的PGMEA溶劑的黃色顏料分散體 (C)-1: Yellow pigment dispersion of PGMEA solvent having Y139 (average secondary particle diameter of 108 nm) of 15% by mass and polymer dispersant of 9% by mass
(C)-2:Y139(平均二次粒徑為123nm)為15質量%、高分子分散劑為9質量%的PGMEA溶劑的黃色顏料分散體 (C)-2: Yellow pigment dispersion of PGMEA solvent in which Y139 (average secondary particle diameter: 123 nm) is 15% by mass and polymer dispersant is 9% by mass
(C)-3:Y139(平均二次粒徑為158nm)為15質量%、高分子分散劑為9質量%的PGMEA溶劑的黃色顏料分散體 (C)-3: Yellow pigment dispersion of PGMEA solvent in which Y139 (average secondary particle diameter: 158 nm) is 15% by mass and polymer dispersant is 9% by mass
(C)-4:溶劑藍45(藍色染料:粉體) (C)-4: Solvent Blue 45 (blue dye: powder)
(D)溶劑:PGMEA、環己酮的混合溶劑 (D) Solvent: a mixed solvent of PGMEA and cyclohexanone
(E)光聚合引發劑:1-[9-乙基-6-(2-甲基苯甲醯基)咔唑-3-基]乙酮=O-乙醯肟(巴斯夫公司製造、商品名豔佳固(Irgacure)OXE02) (E) Photopolymerization initiator: 1-[9-ethyl-6-(2-methylbenzhydryl)oxazol-3-yl]ethanone=O-acetamidine (manufactured by BASF Corporation, trade name Irgacure OXE02)
(F)界面活性劑:1%PGMEA溶液 (F) Surfactant: 1% PGMEA solution
(G)矽烷偶合劑 (G) decane coupling agent
將實施例8~實施例10、及比較例5、比較例6的黑色感光性樹脂組成物旋塗於玻璃板(5英寸見方)上,在90℃下用加熱板進行1分鐘乾燥後,在230℃下進行30分鐘的後烘烤。如上所述地進行而獲得厚度為1.45μm的黑色硬化物。 The black photosensitive resin compositions of Examples 8 to 10, Comparative Example 5, and Comparative Example 6 were spin-coated on a glass plate (5-inch square), and dried at 90 ° C for 1 minute with a hot plate. Post-baking was carried out at 230 ° C for 30 minutes. A black cured product having a thickness of 1.45 μm was obtained as described above.
使用該黑色硬化物的整體基板,用日立高新技術股份有限公司製造的UH-4100進行反射色測定。光源是C光源(2°視野)或D65光源(10°視野)。 The reflection color measurement was carried out using UH-4100 manufactured by Hitachi High-Technologies Co., Ltd. using the entire substrate of the black cured product. The light source is a C light source (2° field of view) or a D65 light source (10° field of view).
可知在比較例5中,顯示僅僅黑色遮光性粒子的反射色 的色度,但為了設為無彩色,存在使a*及b*接近0的必要性,特別是在反射色自無彩色起偏離若干的情況下,與茶色系相比而言,更加要求藍色系的色相,根據該狀況可知存在使b*為-的數值 的必要性。相對於此,可知在實施例8~實施例10中,藉由添加具有與黑色遮光性粒子為同系色的色度的黃色的顏色調整用粒子,可並不使反射色的a*大幅度變動地使b*向-側(負側)移動。 而且,可知為了使b*自黑色成為藍色系的色相,優選控制為-1.0<b*<0.2的範圍,在實施例8~實施例10中可藉由本發明而實現。另外,特別是為了使其為藍色系的色相,更優選調整為1.0<b*<0.0,可藉由控制黑色遮光性粒子與顏色調整用粒子的平均二次粒徑而控制。 In Comparative Example 5, the chromaticity of the reflection color of only the black light-shielding particles was shown. However, in order to make it achromatic, there is a need to make a * and b * close to 0, especially when the reflection color deviates from achromatic color. In some cases, a blue hue is more required than the brown color, and according to this, it is understood that there is a need to make b * a value of -. On the other hand, in the eighth to tenth embodiments, it is possible to prevent the a * of the reflected color from being largely changed by adding the yellow color adjusting particles having the chromaticity of the same color as the black light-shielding particles. The ground moves b * to the side (negative side). Further, it is understood that in order to make b * from a black color to a blue hue, it is preferable to control the range of -1.0 <b * <0.2, and it can be realized by the present invention in the eighth to tenth embodiments. Further, in order to make it a blue hue, it is more preferable to adjust it to 1.0 <b * <0.0, and it can control by controlling the average secondary particle diameter of the black light-shielding particle and the color adjustment particle.
另一方面,可知如果像比較例6那樣添加具有黑色遮光 性粒子的相反色的色度的藍染料(溶解於溶劑中,在組成物中並非粒子),則相反地b*的值變大而使反射色向無彩色的方向的相反方向移動,無法獲得所期望的無彩色或若干藍色系的色相。 On the other hand, when the blue dye having the opposite color chromaticity of the black light-shielding particles (dissolved in a solvent and not being a particle in the composition) is added as in Comparative Example 6, the value of b * is inversely increased. The reflected color is moved in the opposite direction to the achromatic direction, and the desired achromatic or a plurality of blue hue cannot be obtained.
因此,如本發明所示,可知僅僅藉由選定與黑色遮光性粒子為同系色的顏色調整用粒子並少量添加,即可將黑色硬化物的反射色調整為無彩色化或所期望的色相。 Therefore, as shown in the present invention, it is understood that the color of the black cured product can be adjusted to be achromatic or a desired hue by merely selecting the color adjusting particles which are the same color as the black light-shielding particles and adding them in a small amount.
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| TWI709818B (en) * | 2015-10-16 | 2020-11-11 | 日商日鐵化學材料股份有限公司 | Photosensitive resin composition for light-sielding film with the role of spacer, light-sielding film, liquid crystal display device, method for producing photosensitive resin composition for light-sielding film with the role of spacer, method for producing light-sielding film and method for producing liquid crystal display device |
| TWI711882B (en) * | 2015-12-24 | 2020-12-01 | 日商三菱化學股份有限公司 | Photosensitive coloring composition, cured product, coloring spacer, image display device |
| TWI795360B (en) * | 2016-05-31 | 2023-03-11 | 日商富士軟片股份有限公司 | Composition for fomring cured film, cured film, color filter, light-blocking film, solid-state imaging device and image display device |
| US12022687B2 (en) | 2018-11-09 | 2024-06-25 | Samsung Display Co., Ltd. | Display panel |
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| JP6713746B2 (en) * | 2015-10-08 | 2020-06-24 | 日鉄ケミカル&マテリアル株式会社 | Photosensitive resin composition for light-shielding film having spacer function, light-shielding film, liquid crystal display device, method for producing photosensitive resin composition for light-shielding film having spacer function, method for producing light-shielding film, and production of liquid crystal display device Method |
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| TWI744014B (en) | 2020-09-29 | 2021-10-21 | 新應材股份有限公司 | Black resin composition, cured film, and black filter |
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| TWI709818B (en) * | 2015-10-16 | 2020-11-11 | 日商日鐵化學材料股份有限公司 | Photosensitive resin composition for light-sielding film with the role of spacer, light-sielding film, liquid crystal display device, method for producing photosensitive resin composition for light-sielding film with the role of spacer, method for producing light-sielding film and method for producing liquid crystal display device |
| TWI711882B (en) * | 2015-12-24 | 2020-12-01 | 日商三菱化學股份有限公司 | Photosensitive coloring composition, cured product, coloring spacer, image display device |
| TWI795360B (en) * | 2016-05-31 | 2023-03-11 | 日商富士軟片股份有限公司 | Composition for fomring cured film, cured film, color filter, light-blocking film, solid-state imaging device and image display device |
| US12022687B2 (en) | 2018-11-09 | 2024-06-25 | Samsung Display Co., Ltd. | Display panel |
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