TW201505137A - Electronic package module and manufacturing method thereof - Google Patents
Electronic package module and manufacturing method thereof Download PDFInfo
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- TW201505137A TW201505137A TW103105827A TW103105827A TW201505137A TW 201505137 A TW201505137 A TW 201505137A TW 103105827 A TW103105827 A TW 103105827A TW 103105827 A TW103105827 A TW 103105827A TW 201505137 A TW201505137 A TW 201505137A
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
- H10F39/80—Constructional details of image sensors
- H10F39/804—Containers or encapsulations
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/10—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
- H05K3/18—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using precipitation techniques to apply the conductive material
- H05K3/181—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using precipitation techniques to apply the conductive material by electroless plating
- H05K3/182—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using precipitation techniques to apply the conductive material by electroless plating characterised by the patterning method
- H05K3/184—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using precipitation techniques to apply the conductive material by electroless plating characterised by the patterning method using masks
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/22—Secondary treatment of printed circuits
- H05K3/28—Applying non-metallic protective coatings
- H05K3/284—Applying non-metallic protective coatings for encapsulating mounted components
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- H10W42/20—
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- H10W42/276—
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/02—Details
- H05K1/0213—Electrical arrangements not otherwise provided for
- H05K1/0216—Reduction of cross-talk, noise or electromagnetic interference
- H05K1/0218—Reduction of cross-talk, noise or electromagnetic interference by printed shielding conductors, ground planes or power plane
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
- H05K2203/02—Details related to mechanical or acoustic processing, e.g. drilling, punching, cutting, using ultrasound
- H05K2203/0264—Peeling insulating layer, e.g. foil, or separating mask
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
- H05K2203/13—Moulding and encapsulation; Deposition techniques; Protective layers
- H05K2203/1305—Moulding and encapsulation
- H05K2203/1322—Encapsulation comprising more than one layer
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
- H05K2203/13—Moulding and encapsulation; Deposition techniques; Protective layers
- H05K2203/1305—Moulding and encapsulation
- H05K2203/1327—Moulding over PCB locally or completely
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
- H05K2203/13—Moulding and encapsulation; Deposition techniques; Protective layers
- H05K2203/1377—Protective layers
- H05K2203/1383—Temporary protective insulating layer
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- H10W70/657—
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- H10W74/10—
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- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Structures Or Materials For Encapsulating Or Coating Semiconductor Devices Or Solid State Devices (AREA)
- Shielding Devices Or Components To Electric Or Magnetic Fields (AREA)
- Encapsulation Of And Coatings For Semiconductor Or Solid State Devices (AREA)
- Non-Metallic Protective Coatings For Printed Circuits (AREA)
Abstract
本發明提供一種電子封裝模組及其製造方法,先將膠帶黏貼於線路基板上的預定區域內,並於預定區域外設置電子元件,再形成模封塊覆蓋整個線路基板,之後將膠帶連同其上的模封塊移除以完成選擇性模封,之後於模封塊上形成電磁遮蔽層並將光電元件設置於預定區域內,以防護電子元件受到電磁干擾並避免光電元件受到模封塊的包覆而影響運作。 The invention provides an electronic package module and a manufacturing method thereof. First, a tape is adhered to a predetermined area on a circuit substrate, and electronic components are disposed outside the predetermined area, and then a molding block is formed to cover the entire circuit substrate, and then the tape is combined with the same. The upper mold block is removed to complete selective sealing, and then an electromagnetic shielding layer is formed on the mold block and the photovoltaic element is disposed in a predetermined area to protect the electronic component from electromagnetic interference and to prevent the photoelectric element from being subjected to the molded block. Covering affects operation.
Description
本發明係關於一種電子封裝模組及其製造方法,特別係指一種選擇性電子封裝模組與其製造方法。 The invention relates to an electronic package module and a manufacturing method thereof, in particular to a selective electronic package module and a manufacturing method thereof.
目前電子封裝模組通常包括一電路板與多個裝設在電路板上的電子元件(electronic component)。這些電子元件例如是晶片封裝體(chip package)或被動元件(passive component)等。此外,大多數的電子封裝模組通常更包括模封塊(molding compound),其用以包覆(encapsulating)上述電子元件,以保護電子元件。 At present, an electronic package module generally includes a circuit board and a plurality of electronic components mounted on the circuit board. These electronic components are, for example, a chip package or a passive component. In addition, most electronic packaging modules generally include a molding compound for encapsulating the above electronic components to protect the electronic components.
然而,有的電子元件,特別是光電元件,例如互補式金屬氧化物半導體影像感測器(CMOS Image Sensor,CIS,以下簡稱CMOS影像感測器)、電荷耦合元件(Charge-Coupled Device,CCD)等影像感測元件或是發光二極體(Light Emitting Diode,LED)等發光元件,不宜被模封塊所包覆,以避免光電元件受到模封塊的包覆而影響運作,為了兼顧兩者的需求,因而發展出一種「部分模封」的技術。 However, some electronic components, particularly photovoltaic components, such as a complementary metal oxide semiconductor image sensor (CMOS Image Sensor, CIS, hereinafter referred to as CMOS image sensor), charge coupled device (Charge-Coupled Device, CCD) The image sensing component or the light emitting component such as a light emitting diode (LED) should not be covered by the molding block to prevent the photoelectric component from being affected by the coating of the molding block, so as to balance the two The need to develop a "partially sealed" technology.
習知的「部分模封」技術大多是利用模具來達成,例如先使用類似遮罩的模具蓋住光電元件,再注上模料待其形成模封塊,然而,受流體黏滯性的影響,灌入的模料在模穴內或電路板元件間的間隙處容易形成氣孔或空孔(Void),氣孔或空孔內會蓄積水氣,水氣在後續的熱製程中可能會引起爆米花(popcorn)的問題,降低產品良率;再者,使用模具完成模封後,必須移開模具,而 通常為了移開模具,模具設計須預留拔模角度(draft angle),模封體與電路板的拔模夾角通常約為70度;這將使得PCB板利用降低,再者,每當遇到不同的模封形狀,不但模具必須重新設計,若所需形狀為不規則時,更大幅增加模具開發的難度與成本。 Conventional "partially encapsulated" techniques are mostly achieved by using a mold, such as first covering a photovoltaic element with a mask-like mold, and then injecting the mold to form a mold block, however, affected by fluid viscosity. The filled molding material is likely to form pores or voids in the cavity or between the components of the circuit board. Vapours may be accumulated in the pores or pores, and the moisture may cause explosion in the subsequent hot process. The problem of popcorn (reduced product yield); in addition, after the mold is used to complete the mold, the mold must be removed, and Usually in order to remove the mold, the mold design must reserve a draft angle. The angle between the mold and the board is usually about 70 degrees; this will make the PCB board use lower, and again, whenever encountered Different mold shapes, not only must the mold be redesigned, but if the required shape is irregular, the difficulty and cost of mold development will be greatly increased.
因此,業界亟需一種簡單方便且可因應不同形狀需求的模組封裝方法,同時並能應用於局部或選擇塑封(partial or selective molding)的新技術。 Therefore, there is a need in the industry for a module packaging method that is simple and convenient and can be adapted to different shape requirements, and can be applied to new technologies of partial or selective molding.
本發明提供一種電子封裝模組及其製造方法,能選擇性地模封電子元件。 The invention provides an electronic package module and a manufacturing method thereof, which can selectively mold electronic components.
本發明電子封裝模組之製造方法包含:提供線路基板,其包含組裝平面、接地墊以及預定區域,其中預定區域位於組裝平面且接地墊鄰近預定區域;於預定區域內黏貼膠帶;將非光電類的電子元件設置於線路基板上預定區域以外處;於組裝平面上形成模封塊,其中模封塊覆蓋膠帶以及電子元件;移除預定區域處及接地墊上方的膠帶與模封塊。 The manufacturing method of the electronic package module of the present invention comprises: providing a circuit substrate comprising an assembly plane, a ground pad, and a predetermined area, wherein the predetermined area is located on the assembly plane and the ground pad is adjacent to the predetermined area; the tape is adhered in the predetermined area; The electronic component is disposed outside the predetermined area on the circuit substrate; a molding block is formed on the assembly plane, wherein the molding block covers the tape and the electronic component; and the tape and the molding block at the predetermined area and above the grounding pad are removed.
根據本發明之一較佳實施例,於預定區域內黏貼膠帶的方式,可以先將一完整膠帶黏貼於整個線路基板上,再利用雷射開槽位於接地墊上方的完整膠帶,接著再移除位於預定區域以外的完整膠帶,即可達到於預定區域內黏貼膠帶的目的。 According to a preferred embodiment of the present invention, in a predetermined area, a complete tape can be adhered to the entire circuit substrate, and then the complete tape above the ground pad is removed by using a laser slot, and then removed. The complete tape outside the predetermined area can be used to adhere the tape to the predetermined area.
根據本發明之一較佳實施例,其中移除該模封塊的方法可包括利用雷射開槽模封塊於線路基板上環繞預定區域周圍的接地墊。 In accordance with a preferred embodiment of the present invention, a method of removing the mold block can include utilizing a laser slotted mold block to surround a ground pad around a predetermined area on a circuit substrate.
根據本發明之一較佳實施例,其中移除該模封塊的方法可包括利用雷射修整預定區域處上方之模封塊。 In accordance with a preferred embodiment of the present invention, the method of removing the mold block can include trimming the mold block above the predetermined area with a laser.
根據本發明之一較佳實施例,於移除預定區域上之膠帶一步驟中,可利用加熱使膠帶脫落。 According to a preferred embodiment of the present invention, in the step of removing the tape on the predetermined area, the tape may be peeled off by heating.
根據本發明之一較佳實施例,該膠帶可為光解膠膜(UV tape),且於移除預定區域上之膠帶一步驟中,可利用紫外線照射使膠帶脫落。 According to a preferred embodiment of the present invention, the adhesive tape can be a photo-degradable film (UV) Tape), and in the step of removing the tape on the predetermined area, the tape can be detached by ultraviolet irradiation.
本發明電子封裝模組之製造方法可更包括將光電元件設置於預定區域內,根據一實施例,可於移除膠帶之後,形成遮罩層於預定區域內,再整面性形成電磁遮蔽層,並與接地墊電性連接,而後移除遮罩層,再將光電元件設置於預定區域內;根據另一實施例,可於利用雷射開槽位於接地墊上方的模封塊後,整面性形成電磁遮蔽層,使電磁遮蔽層與接地墊電性連接,再移除預定區域內的膠帶,而後將光電元件設置於預定區域內。 The manufacturing method of the electronic package module of the present invention may further comprise disposing the photovoltaic element in a predetermined area. According to an embodiment, after the tape is removed, the mask layer is formed in a predetermined area, and the entire surface is formed into an electromagnetic shielding layer. And electrically connecting with the ground pad, and then removing the mask layer, and then arranging the photovoltaic element in a predetermined area; according to another embodiment, after using the laser to form a mold block located above the ground pad, The surface layer forms an electromagnetic shielding layer, electrically connects the electromagnetic shielding layer to the ground pad, removes the tape in the predetermined area, and then sets the photoelectric element in the predetermined area.
根據本發明之一較佳實施例,可更包含側接地墊,其中電磁遮蔽層與側接地墊電性連接。 According to a preferred embodiment of the present invention, the side ground pad may be further included, wherein the electromagnetic shielding layer is electrically connected to the side ground pad.
根據上述方法,本發明電子封裝模組可包含線路基板,其包含組裝平面、接地墊以及預定區域,其中預定區域與接地墊位於組裝平面上;電子元件,設置於預定區域以外的組裝平面上;模封塊,包覆電子元件且每一模封塊面對預定區域的那面側壁與組裝平面所形成的夾角可介於85度至90度之間;電磁遮蔽層,覆蓋於模封塊上並與接地墊電性連接;光電元件,設置於預定區域內的組裝平面上;側接地墊,位於線路基板的側邊,其中電磁遮蔽層與側接地墊電性連接。 According to the above method, the electronic package module of the present invention may comprise a circuit substrate comprising an assembly plane, a ground pad and a predetermined area, wherein the predetermined area and the ground pad are located on the assembly plane; and the electronic component is disposed on the assembly plane outside the predetermined area; The mold block, the surface of the side surface of each of the mold blocks facing the predetermined area and the assembly plane may be between 85 degrees and 90 degrees; the electromagnetic shielding layer covers the mold block And electrically connected to the ground pad; the photoelectric element is disposed on the assembly plane in the predetermined area; the side ground pad is located on the side of the circuit substrate, wherein the electromagnetic shielding layer is electrically connected to the side ground pad.
藉由上述配置,本發明電子封裝模組之製造方法可在不開設複雜模具或繁瑣步驟的前提下,進行選擇性模封,僅針對需要模封的區域形成模封塊以及金屬包覆(metal coating),以便同時兼顧防護電磁干擾(electromagnetic disturbance,EMI)與避免光電元件受到模封塊的包覆而影響運作。 With the above configuration, the manufacturing method of the electronic package module of the present invention can be selectively molded without the complicated mold or complicated steps, and the mold block and the metal coating are formed only for the area to be molded. Coating) in order to simultaneously protect against electromagnetic interference (EMI) and to prevent the optoelectronic components from being coated by the molding block to affect the operation.
為了能更進一步瞭解本發明所採取之技術、方法及功效,請參閱以下有關本發明之詳細說明、圖式,相信本發明的特徵與特點,當可由此得以深入且具體之瞭解,然而所附圖式與附件僅提供參考與說明用,並非用來對本發明加以限制者。 For a better understanding of the techniques, methods and efficacies of the present invention, reference should be made to the detailed description and drawings of the invention, The drawings and the annexed drawings are for the purpose of illustration and description only
101、102‧‧‧預定區域 101, 102‧‧‧Predetermined area
11、31‧‧‧線路基板 11, 31‧‧‧ circuit substrate
111、311、511‧‧‧接地墊 111, 311, 511‧‧‧ grounding mat
112、312‧‧‧側接地墊 112, 312‧‧‧ side grounding mat
12‧‧‧組裝平面 12‧‧‧ Assembly plane
13、33、53‧‧‧膠帶 13, 33, 53‧ ‧ tape
15、35、55‧‧‧模封塊 15, 35, 55‧ ‧ die block
18‧‧‧遮罩層 18‧‧‧ mask layer
19、39、59‧‧‧電磁遮蔽層 19, 39, 59‧‧ ‧ electromagnetic shielding
21、41、61‧‧‧電子元件 21, 41, 61‧‧‧ Electronic components
22、42、62‧‧‧光電元件 22, 42, 62‧‧‧Optoelectronic components
37、57‧‧‧油墨 37, 57‧‧‧ ink
α‧‧‧夾角 ‧‧‧‧ angle
圖1A-1E為本發明一實施例之電子封裝模組製造方法之詳細步驟分解圖;圖2為本發明一實施例之電子封裝模組製造方法應用於不規則預定區域之示意圖;圖3A-3E為於預定區域內形成光電元件之一實施例之詳細步驟剖面圖;圖4A-4D為於預定區域內形成光電元件之另一實施例之詳細步驟剖面圖;圖5為本發明電子封裝模組製造方法包含側接地墊之實施例之剖面圖;圖6A-6I為本發明電子封裝模組製造方法應用於兩面基板封裝之一實施例之詳細步驟剖面圖。 1A-1E are detailed exploded views of a method for fabricating an electronic package module according to an embodiment of the present invention; and FIG. 2 is a schematic diagram of an electronic package module manufacturing method applied to an irregular predetermined area according to an embodiment of the present invention; 3E is a detailed step sectional view of one embodiment of forming a photovoltaic element in a predetermined region; FIGS. 4A-4D are detailed step sectional views of another embodiment of forming a photovoltaic element in a predetermined region; FIG. 5 is an electronic package mold of the present invention; The group manufacturing method includes a cross-sectional view of an embodiment of a side ground pad; and FIGS. 6A-6I are detailed cross-sectional views of an embodiment of the method for manufacturing the electronic package module of the present invention applied to a two-sided substrate package.
請參考圖1A-1E,其中圖1A、1C與1E為此一實施例之電子封裝模組的製造過程的結構剖面圖。圖1B與1D為此一實施例電子封裝模組的製造過程的結構俯視圖。 Please refer to FIGS. 1A-1E, wherein FIGS. 1A, 1C and 1E are structural cross-sectional views showing a manufacturing process of the electronic package module of the embodiment. 1B and 1D are top plan views showing the manufacturing process of the electronic package module of this embodiment.
於此一實施例中,可先參考圖1A與1B。本發明之電子封裝模組製造方法可先準備線路基板11,其上具有組裝平面12、位於組裝平面12的預定區域101,以及接地墊111。本實施例以接地墊111環繞於預定區域101周圍為例進行說明,且於一較佳實施例中,接地墊111的寬度可為200μm,但不以此為限,接地墊111的位置與形狀、尺寸可依設計需求做不同的設計。 In this embodiment, reference may be made first to FIGS. 1A and 1B. The electronic package module manufacturing method of the present invention can first prepare a circuit substrate 11 having an assembly plane 12, a predetermined area 101 at the assembly plane 12, and a ground pad 111. This embodiment is described by taking the ground pad 111 around the predetermined area 101 as an example. In a preferred embodiment, the width of the ground pad 111 may be 200 μm, but not limited thereto, the position and shape of the ground pad 111. The size can be designed according to the design requirements.
首先,為了於預定區域內黏貼膠帶,可以直接於預定區域101內黏貼適當大小的膠帶,也可以先將一大片完整膠帶整面性的黏貼於線路基板11上,再用雷射將膠帶開槽於預定區域邊緣,之後將預定區域101以外的膠帶移除,以達到於預定區域101內黏貼膠帶13的目的。 First, in order to adhere the tape to the predetermined area, an appropriate size tape may be directly adhered to the predetermined area 101, or a large piece of the entire tape may be adhered to the circuit substrate 11 first, and then the tape may be slotted by the laser. At the edge of the predetermined area, the tape outside the predetermined area 101 is removed later to achieve the purpose of adhering the tape 13 in the predetermined area 101.
將電子元件21裝設於組裝平面12上且位於預定區域101以外的區域,其組裝方式可利用表面黏著技術(Surface Mount Technology,SMT)進行,而電子元件21可為光電元件以外的元件,例如各種主、被動元件,然不以此為限,本文所述光電元件泛指各種不適合被模封塊包覆住的元件,例如CMOS影像感測器與CCD等影像感測元件以及發光二極體等發光元件,甚至一些亦不適於被模封塊包覆住的其他元件,例如連接器、插孔、接頭等也可應用本發明的概念而設置於預定區域;另外,可適於被模封塊包覆者則稱為電子元件。 The electronic component 21 is mounted on the assembly plane 12 and located outside the predetermined area 101, and the assembly method can be performed by Surface Mount Technology (SMT), and the electronic component 21 can be an element other than the photovoltaic component, for example, Various main and passive components are not limited thereto. The photoelectric components described herein generally refer to various components that are not suitable for being covered by the mold block, such as image sensing components such as CMOS image sensors and CCDs, and light-emitting diodes. Other illuminating elements, even other elements that are also unsuitable for being covered by the mold block, such as connectors, sockets, joints, etc., can also be placed in predetermined areas using the concepts of the present invention; in addition, can be adapted to be molded The block wrapper is called an electronic component.
此外,請參考圖2,係本發明電子封裝模組製造方法的其中一實施例,其中圖2所示的預定區域102為不規則預定區域,即此處預定區域102為不規則形狀,因此所謂預定區域沒有數量、面積大小跟形狀上的限制,圖式舉例之形狀僅為闡釋本發明,並不在此限。預定區域主要是依後續製程中不宜被模封塊15所覆蓋的光電元件位置進行框定。因此,須說明者,於此之後所述的詳細實施內容,皆可適用於預定區域101與102。 In addition, referring to FIG. 2, it is an embodiment of the manufacturing method of the electronic package module of the present invention, wherein the predetermined area 102 shown in FIG. 2 is an irregular predetermined area, that is, the predetermined area 102 is an irregular shape, so the so-called The predetermined area has no limitation on the number, the size of the area, and the shape. The shapes of the drawings are merely illustrative of the present invention and are not limited thereto. The predetermined area is mainly framed according to the position of the photoelectric element which is not suitable to be covered by the mold block 15 in the subsequent process. Therefore, it should be noted that the detailed implementations described hereinafter can be applied to the predetermined areas 101 and 102.
請參考圖1A與1B,於完成前述步驟後,於整個線路基板11上形成模封塊15,其中模封塊15連同膠帶13一起覆蓋於線路基板11上,且模封塊15更覆蓋位在預定區域101以外的電子元件21與接地墊111。模封塊15的形成可採用一般轉注成型或是壓注成型的方式,而膠帶13的貼附範圍可以部份覆蓋接地墊111或者緊鄰接地墊111而不覆蓋,但不以此為限。 Referring to FIGS. 1A and 1B, after the foregoing steps are completed, a mold block 15 is formed on the entire circuit substrate 11, wherein the mold block 15 is covered on the circuit substrate 11 together with the tape 13, and the mold block 15 is further covered. The electronic component 21 other than the predetermined area 101 and the ground pad 111. The mold block 15 can be formed by a general transfer molding or a press molding method, and the adhesive tape 13 can be partially covered or not adjacent to the ground pad 111, but is not limited thereto.
接著請參考1C與1D,在形成模封塊15後,可利用雷射將預定區域101周圍的模封塊15開槽,亦即沿著接地墊111的範圍切割出溝槽,於一較佳實施例中,溝槽寬約為100μm。接地墊111為金屬層,而模封塊15的主要材料通常包含樹脂,因此可利用接地墊111與模封塊15對雷射吸收程度的不同而使接地墊111作為雷射切割終止端,但本發明不限於此一概念,只要能夠達到 僅切割模封塊15而保留線路基板11的手段即可,例如也可利用外型切割來對模封塊15開槽。須強調,本發明採用雷射切割,模封塊並不需要預留拔模角(例如約20度),因此開槽後模封塊15面對預定區域101的那一面側壁與組裝平面12所形成的夾角α可介於85度至90度之間,相較傳統塑封的拔模角更接近90度。 Referring to 1C and 1D, after the molding block 15 is formed, the molding block 15 around the predetermined area 101 can be slotted by laser, that is, the groove is cut along the range of the ground pad 111. In the embodiment, the groove width is about 100 μm. The ground pad 111 is a metal layer, and the main material of the mold block 15 usually contains a resin. Therefore, the ground pad 111 can be used as the laser cutting end end by using the ground pad 111 and the mold block 15 to different degrees of laser absorption. The invention is not limited to this concept as long as it can be achieved It is only necessary to cut the mold block 15 while leaving the circuit substrate 11. For example, the mold block 15 may be grooved by external cutting. It should be emphasized that the present invention adopts laser cutting, and the mold block does not need to reserve a draft angle (for example, about 20 degrees), so that the side wall of the mold block 15 facing the predetermined area 101 and the assembly plane 12 after the slotting is performed. The angle α formed may be between 85 and 90 degrees, which is closer to 90 degrees than the draft angle of a conventional plastic seal.
當選用的膠帶是薄膜,例如厚度在20~50微米(Micrometer,μm),此時只要將膠帶13移除,即可達到僅將模封塊15保留在線路基板11上預定區域以外的位置。膠帶13可為熱解膠帶或是光解膠膜(UV tape),熱解膠帶可利用加熱的方式來移除,於一較佳實施例中,可將環境加熱至約175℃,再利用任何吸取裝置即可將膠帶移除,而光解膠膜則可使用紫外光照射來移除,但本發明不以此兩種膠帶為限。 When the selected tape is a film, for example, a thickness of 20 to 50 micrometers (micrometer, μm), at this time, as long as the tape 13 is removed, it is possible to leave only the mold block 15 at a position other than a predetermined area on the circuit substrate 11. The tape 13 can be a pyrolytic tape or a UV tape. The pyrolyzed tape can be removed by heating. In a preferred embodiment, the environment can be heated to about 175 ° C, and any The tape can be removed by the suction device, and the photo-degradable film can be removed by ultraviolet light irradiation, but the present invention is not limited to the two tapes.
而於本發明另一實例中,當選用的膠帶是厚膜,例如厚度在0.2毫米(mm),此時在完成利用雷射將預定區域上方的模封塊15開槽之後,可利用雷射將預定區域101上的模封塊15(亦即膠帶13上的模封塊15)進行進一步的修整,也就是去除預定區域101上的模封塊15,之後再進行膠帶13的移除,以達到僅將模封塊15保留在線路基板11上預定區域101以外的位置。 In another example of the present invention, when the selected tape is a thick film, for example, having a thickness of 0.2 millimeters (mm), the laser can be utilized after the completion of the use of the laser to sew the mold block 15 above the predetermined area. The molding block 15 on the predetermined area 101 (i.e., the molding block 15 on the tape 13) is further trimmed, that is, the molding block 15 on the predetermined area 101 is removed, and then the tape 13 is removed. It is achieved that only the mold block 15 remains at a position other than the predetermined area 101 on the circuit substrate 11.
於本發明另一實例中,將進一步針對預定區域101以外的模封塊15覆蓋電磁遮蔽層19並使其與接地墊111電性連接,以及於預定區域101內設置光電元件22的製程。 In another example of the present invention, the electromagnetic shielding layer 19 is further covered and electrically connected to the ground pad 111 for the molding block 15 other than the predetermined region 101, and the process of the photovoltaic element 22 is disposed in the predetermined region 101.
請參考圖3A-3E,為本發明於預定區域101內形成光電元件22的一種實施例的流程圖與剖面圖。於本實施例中,可接續在前述實施例移除膠帶13之後(如圖3A),於預定區域101內的組裝平面12上設置一遮罩層18(如圖3B),遮蔽層18的材質沒有特別限制,只要能夠方便後續移除即可,接著可整面性的形成一層電磁遮蔽層19(如圖3C),金屬遮蔽層19可採用金屬噴塗(spray coating)、無電鍍製程(electroless plating)或濺鍍(Sputtering)等方式,然不以此為限,只要電磁遮蔽層19與接地墊111保持電性連接即可,如此一來,只要移除遮罩層18,即可達到針對預定區域101以外的模封塊15覆蓋電磁遮蔽層19並使其與接地墊111電性連接的目的(如圖3D),進而使對電子元件21產生金屬屏蔽效應,之後將光電元件22設置於預定區域101內(如圖3E),光電元件22可以表面黏著技術(SMT)進行設置,亦不以此為限,據此,可使光電元件22不被模封塊包覆,又可使電子元件21免於電磁干擾(electromagnetic disturbance,EMI)。 3A-3E, a flow chart and a cross-sectional view of one embodiment of forming a photovoltaic element 22 in a predetermined region 101 in accordance with the present invention. In this embodiment, after the tape 13 is removed in the foregoing embodiment (as shown in FIG. 3A), a mask layer 18 (FIG. 3B) is disposed on the assembly plane 12 in the predetermined area 101, and the material of the mask layer 18 is provided. There is no particular limitation as long as the subsequent removal can be facilitated, and then an electromagnetic shielding layer 19 (see FIG. 3C) can be formed over the entire surface, and the metal shielding layer 19 can be sprayed with metal (spray). Coating, electroless plating, or sputtering, but not limited thereto, as long as the electromagnetic shielding layer 19 and the ground pad 111 are electrically connected, so as long as the cover is removed The cover layer 18 can achieve the purpose of covering the electromagnetic shielding layer 19 and electrically connecting the ground shielding pad 19 to the molding block 15 other than the predetermined area 101 ( FIG. 3D ), thereby generating a metal shielding effect on the electronic component 21 . Then, the photovoltaic element 22 is disposed in the predetermined region 101 (as shown in FIG. 3E), and the photovoltaic element 22 can be disposed by the surface adhesion technology (SMT), and not limited thereto, according to which the photovoltaic element 22 can be not molded. The block coating further protects the electronic component 21 from electromagnetic disturbance (EMI).
本發明另一實例,請參考圖4A-4D,為本發明於預定區域101內形成光電元件22的另一種實施例的流程圖與剖面圖。於本實施例中,可在前述實施例利用雷射將預定區域101周圍的模封塊15開槽之後(如圖4A),直接整面性的形成一層電磁遮蔽層19(如圖4B),金屬遮蔽層19形成方法如同前述舉例,於此不再贅述,只要電磁遮蔽層19與接地墊111保持電性連接即可,接著只要移除膠帶13,即可達到針對預定區域101以外的模封塊15覆蓋電磁遮蔽層19並使其與接地墊111電性連接的目的(如圖4C),進而使對電子元件21產生金屬屏蔽效應,之後將光電元件22設置於預定區域101內(如圖4D),光電元件22設置方法亦如同前述舉例,據此,相較前述實施例,本實施例在製程上可節省更多步驟、時間與原料等成本。但需注意,圖4A-4B之實施例直接形成電磁遮蔽層19,在實際應用上,假如各模封塊15之間的距離以及模封塊15本身高度的影響,造成金屬遮蔽層19未與接地墊111電性連接,則可於移除膠帶13之後再進行光電元件22的設置與電子元件21電磁干擾的防護,如圖3A-3E所示流程。 Another example of the present invention, please refer to FIGS. 4A-4D, which are a flow chart and a cross-sectional view of another embodiment of forming a photovoltaic element 22 in a predetermined region 101 of the present invention. In this embodiment, after the foregoing embodiment uses the laser to slot the molding block 15 around the predetermined area 101 (as shown in FIG. 4A), a layer of electromagnetic shielding layer 19 is formed directly (FIG. 4B). The metal shielding layer 19 is formed in the same manner as the foregoing example, and the electromagnetic shielding layer 19 is electrically connected to the grounding pad 111. Then, as long as the tape 13 is removed, the molding for the predetermined area 101 can be achieved. The block 15 covers the electromagnetic shielding layer 19 and electrically connects it to the ground pad 111 (as shown in FIG. 4C), thereby generating a metal shielding effect on the electronic component 21, and then disposing the photovoltaic element 22 in the predetermined region 101 (as shown in FIG. 4D), the photovoltaic element 22 is disposed in the same manner as the foregoing example, and accordingly, the present embodiment can save more steps, time, and raw materials in the process than the foregoing embodiment. It should be noted that the embodiment of FIGS. 4A-4B directly forms the electromagnetic shielding layer 19. In practical applications, if the distance between the molding blocks 15 and the height of the molding block 15 itself are affected, the metal shielding layer 19 is not The grounding pad 111 is electrically connected to protect the electromagnetic component 22 from the electromagnetic interference of the electronic component 21 after the tape 13 is removed, as shown in FIGS. 3A-3E.
另外,為了進一步增加防護電磁干擾的功效,請參考圖5,為本發明電子封裝模組製造方法包含側接地墊112之實施例之剖面圖。本發明的前述所有實施例,均可更包含側接地墊112,位 於該線路基板11的側邊,形成的時間點與數量沒有特別限制,只要電磁遮蔽層19亦與側接地墊112電性連接即可。 In addition, in order to further increase the effectiveness of shielding electromagnetic interference, please refer to FIG. 5 , which is a cross-sectional view of an embodiment of a method for manufacturing an electronic package module including a side ground pad 112 according to the present invention. All of the foregoing embodiments of the present invention may further include a side ground pad 112. The time point and the number of formations on the side of the circuit substrate 11 are not particularly limited as long as the electromagnetic shielding layer 19 is also electrically connected to the side ground pad 112.
應用以上製程,本發明可提供一種用於雙面的電子封裝模組製造方法之實施例,其中大多數步驟的細節皆可參考前述製程。請參考圖6A-6I,圖6A中,電子元件41已設置於線路基板31第一表面的預定區域外,膠帶33則貼於預定區域內,接地墊311環繞於預定區域,且基板31的側邊形成有側接地墊312,其中電子元件41屬於高度較低者,因此黏貼於線路基板31第一表面的膠帶33可採用較厚的膠帶,其厚度可略高於電子元件41。 Applying the above process, the present invention can provide an embodiment of a method for manufacturing a double-sided electronic package module, and the details of most of the steps can be referred to the foregoing process. Referring to FIGS. 6A-6I, in FIG. 6A, the electronic component 41 is disposed outside a predetermined area of the first surface of the circuit substrate 31, the tape 33 is attached to the predetermined area, the ground pad 311 is surrounded by the predetermined area, and the side of the substrate 31 is A side ground pad 312 is formed, wherein the electronic component 41 belongs to a lower height, and thus the tape 33 adhered to the first surface of the circuit substrate 31 can be made thicker than the electronic component 41.
接著於線路基板31第一表面形成模封塊35。由於膠帶33較厚,因此模封塊35高度可以剛好與膠帶33切齊,讓模封塊35能完整覆蓋電子元件41,如圖6B所示。此外,亦由於模封塊35高度剛好與膠帶33切齊,後續欲形成電磁遮蔽層39時,可省去將膠帶上模封塊移除的步驟而直接進行濺鍍。 Next, a mold block 35 is formed on the first surface of the wiring substrate 31. Since the tape 33 is thick, the height of the mold block 35 can be just aligned with the tape 33, so that the mold block 35 can completely cover the electronic component 41, as shown in Fig. 6B. Further, since the height of the mold block 35 is exactly the same as that of the tape 33, when the electromagnetic shielding layer 39 is to be formed later, the step of removing the mold block on the tape can be omitted and the sputtering can be directly performed.
接著,對形成於線路基板31第一表面的模封塊35進行開槽,如圖6C所示,而為了後續形成電磁遮蔽層39方便,此處可將槽開寬一點,使濺鍍容易。 Next, the mold block 35 formed on the first surface of the circuit substrate 31 is grooved as shown in FIG. 6C, and in order to facilitate the subsequent formation of the electromagnetic shielding layer 39, the groove can be opened wider to facilitate sputtering.
接下來於線路基板31第一表面開槽完的膜封塊35上進行濺鍍,接著再覆蓋一層油墨(ink)37,如圖6D所示。油墨37在製程中主要用於保護其所覆蓋處的清潔,避免粉塵等雜質的汙染,油墨37可用化學溶劑清洗掉,以一併帶走油墨表面所沾上的物質,留下乾淨的所覆蓋面。 Next, sputtering is performed on the film block 35 which is grooved on the first surface of the circuit substrate 31, and then covered with an ink layer 37 as shown in Fig. 6D. Ink 37 is mainly used to protect the cleaning of the covered area in the process, to avoid the contamination of dust and other impurities. The ink 37 can be washed away with a chemical solvent to take away the material on the surface of the ink, leaving a clean covered surface. .
再來請參考圖6E,將線路基板31翻面,開始對線路基板31的第二表面進行封裝。先將膠帶53黏貼於預定區域內,此側的預定區域與第一表面相反,外圍為預定區域,中心部分為非預定區域,因此接地墊511是被預定區域圍繞在內側,且此側的電子元件61高度較高,因此採用較薄的膠帶53即可。須說明者,本實施例是以線路基板31兩側的不同處為例來充分敘述所有較佳 的可應用層面,並非用以限制本發明,電子元件的高低與預定區域的內外位置並沒有依附關係,而電子元件的高低與膠帶厚薄的搭配使用亦為製程方便之考量,均可視情況需要而改變。 Referring to FIG. 6E again, the circuit substrate 31 is turned over to start packaging the second surface of the circuit substrate 31. First, the tape 53 is adhered to a predetermined area, the predetermined area of the side is opposite to the first surface, the periphery is a predetermined area, and the central portion is an unscheduled area, so the ground pad 511 is surrounded by the predetermined area on the inner side, and the side of the electron The element 61 has a high height, so a thinner tape 53 can be used. It should be noted that, in this embodiment, all the differences on both sides of the circuit substrate 31 are taken as an example to fully describe all the preferred ones. The applicable level is not intended to limit the present invention. The height of the electronic component is not related to the inner and outer positions of the predetermined area, and the combination of the height of the electronic component and the thickness of the tape is also convenient for the process, and may be required according to the situation. change.
於線路基板第二表面的預定範圍外設置好電子元件61後,即可形成模封塊55,如圖6F所示。接著將膠帶53連同其上的模封塊55移除,並於第二表面的預定區域上另外形成油墨57,如圖6G所示。再來,可選擇對整塊線路基板進行濺鍍或者先進行切割以形成個別的單一模組之後再進行濺鍍,以使個別模組的頂外表面形成電磁遮蔽層59,如圖6H所示。 After the electronic component 61 is disposed outside the predetermined range of the second surface of the circuit substrate, the mold block 55 can be formed as shown in FIG. 6F. The tape 53 is then removed along with the mold block 55 thereon, and an ink 57 is additionally formed on a predetermined area of the second surface, as shown in Fig. 6G. Then, the entire circuit substrate may be sputtered or first cut to form an individual single module and then sputtered so that the top outer surface of the individual module forms an electromagnetic shielding layer 59, as shown in FIG. 6H. .
接下來,將油墨37、57洗掉,再把膠帶33移除,即可得到基板兩面均已進行選擇性模封且兩面各自具有完整電磁遮蔽層39、59的線路基板31。之後只要將光電元件42與62設置於預定區域處,即可完成封裝,如圖6I所示。 Next, the inks 37, 57 are washed away, and the tape 33 is removed, and the circuit substrate 31 on which both sides of the substrate have been selectively molded and each of which has a complete electromagnetic shielding layer 39, 59 is obtained. Then, as long as the photovoltaic elements 42 and 62 are disposed at predetermined regions, the package can be completed, as shown in FIG. 6I.
需強調,此一兩面封裝的實施例非用以限制本發明,若兩面的預定區域均在中心處,也可以兩面直接形成一完整的電磁遮蔽層即可,亦即不需要額外形成油墨37與電磁遮蔽層59,可直接將基板兩面分別進行至如圖6C的步驟後,直接全面性形成電磁遮蔽層39,以節省製程。 It should be emphasized that the embodiment of the two-sided package is not intended to limit the present invention. If the predetermined areas of both sides are at the center, a complete electromagnetic shielding layer may be directly formed on both sides, that is, no additional ink 37 is required. The electromagnetic shielding layer 59 can directly form both sides of the substrate to the electromagnetic shielding layer 39 directly after the steps of FIG. 6C to save the process.
綜上所述,本發明可提供一種電子封裝模組製造方法,利用先黏貼膠帶於線路基板及線路上,以移除後來形成於其上的模封塊,達到在線路基板上局部形成模封塊的目的,其中此方法形成之局部模封塊,其與基板之間的夾角可更接近直角。之後,可將不宜被模封塊包覆的光電元件設置於無模封塊的預定區域上,以及在此模封塊上形成電磁遮蔽層,以進一步兼顧防護電磁干擾與避免光電元件受到模封塊的包覆而影響運作,更可以將本發明應用到對兩面電子模組均進行選擇性封裝,以低廉的成本與精簡的製程完成兩面性的電子模組選擇性封裝。 In summary, the present invention can provide a method for manufacturing an electronic package module, which uses a first adhesive tape on a circuit substrate and a line to remove a mold block formed thereon, thereby forming a partial mold on the circuit substrate. The purpose of the block, wherein the method forms a partial mold block whose angle with the substrate can be closer to a right angle. Thereafter, the photovoltaic element not covered by the mold block may be disposed on a predetermined area of the moldless block, and an electromagnetic shielding layer is formed on the mold block to further protect the electromagnetic interference and prevent the photoelectric element from being molded. The coating of the block affects the operation, and the invention can be applied to the selective encapsulation of the two-sided electronic module, and the dual-sided electronic module selective packaging is completed at a low cost and a compact process.
11‧‧‧線路基板 11‧‧‧Line substrate
111‧‧‧接地墊 111‧‧‧Grounding mat
12‧‧‧組裝平面 12‧‧‧ Assembly plane
15‧‧‧模封塊 15‧‧‧Mold block
19‧‧‧電磁遮蔽層 19‧‧‧Electromagnetic shielding
21‧‧‧電子元件 21‧‧‧Electronic components
22‧‧‧光電元件 22‧‧‧Optoelectronic components
Claims (10)
Priority Applications (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW103105827A TW201505137A (en) | 2013-07-31 | 2014-02-21 | Electronic package module and manufacturing method thereof |
| US14/332,970 US9881875B2 (en) | 2013-07-31 | 2014-07-16 | Electronic module and method of making the same |
| DE102014110301.7A DE102014110301A1 (en) | 2013-07-31 | 2014-07-22 | Electronic packaging module and its manufacturing process |
| FR1457388A FR3009476B1 (en) | 2013-07-31 | 2014-07-30 | ELECTRONIC MODULE AND METHOD OF MANUFACTURING THE SAME |
| JP2014156811A JP5844439B2 (en) | 2013-07-31 | 2014-07-31 | Manufacturing method of electronic component mounting module |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW102127507 | 2013-07-31 | ||
| TW103105827A TW201505137A (en) | 2013-07-31 | 2014-02-21 | Electronic package module and manufacturing method thereof |
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| TW201505137A true TW201505137A (en) | 2015-02-01 |
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| TW103105827A TW201505137A (en) | 2013-07-31 | 2014-02-21 | Electronic package module and manufacturing method thereof |
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| JP (1) | JP5844439B2 (en) |
| DE (1) | DE102014110301A1 (en) |
| FR (1) | FR3009476B1 (en) |
| TW (1) | TW201505137A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112654129A (en) * | 2019-10-10 | 2021-04-13 | 庆鼎精密电子(淮安)有限公司 | Anti-electromagnetic interference circuit board and manufacturing method thereof |
| US12283491B2 (en) | 2019-12-19 | 2025-04-22 | Ev Group E. Thallner Gmbh | Method for producing singulated encapsulated components |
Families Citing this family (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101670894B1 (en) | 2015-05-27 | 2016-10-31 | (주)파트론 | Manufacturing method of semiconductor package |
| KR101661919B1 (en) * | 2015-06-23 | 2016-10-04 | (주)파트론 | Manufacturing method of semiconductor package |
| US10236260B2 (en) * | 2016-06-30 | 2019-03-19 | Nxp Usa, Inc. | Shielded package with integrated antenna |
| WO2018030152A1 (en) * | 2016-08-08 | 2018-02-15 | 株式会社村田製作所 | Circuit module and method for manufacturing circuit module |
| KR102505198B1 (en) * | 2018-04-02 | 2023-03-02 | 삼성전기주식회사 | Electronic component module and manufacturing mehthod therof |
| US11251135B2 (en) | 2018-04-02 | 2022-02-15 | Samsung Electro-Mechanics Co., Ltd. | Electronic device module and method of manufacturing the same |
| US12272483B2 (en) * | 2021-04-28 | 2025-04-08 | Cyntec Co., Ltd. | Electronic module |
| CN115332093B (en) * | 2021-05-11 | 2025-02-14 | 江苏长电科技股份有限公司 | Manufacturing method of partitioned electromagnetic shielding packaging structure and packaging structure |
| WO2023119884A1 (en) * | 2021-12-24 | 2023-06-29 | 富士フイルム株式会社 | Manufacturing method for printed circuit board |
| CN115103583B (en) * | 2022-06-20 | 2024-12-24 | 环维电子(上海)有限公司 | A method for realizing local electromagnetic shielding, electronic packaging module and electronic equipment |
| US20250159319A1 (en) * | 2023-11-14 | 2025-05-15 | Meta Platforms Technologies, Llc | Electro-magnetic interference shielding for camera module |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4175351B2 (en) * | 2005-08-26 | 2008-11-05 | 松下電工株式会社 | Uneven multilayer circuit board module and manufacturing method thereof |
| JPWO2012023332A1 (en) * | 2010-08-18 | 2013-10-28 | 株式会社村田製作所 | Electronic component and manufacturing method thereof |
| JP2012159935A (en) * | 2011-01-31 | 2012-08-23 | Murata Mfg Co Ltd | Electronic component module, method for manufacturing electronic component module, and multifunctional card |
| TWI502733B (en) * | 2012-11-02 | 2015-10-01 | 環旭電子股份有限公司 | Electronic package module and method of manufacturing the same |
-
2014
- 2014-02-21 TW TW103105827A patent/TW201505137A/en unknown
- 2014-07-22 DE DE102014110301.7A patent/DE102014110301A1/en active Pending
- 2014-07-30 FR FR1457388A patent/FR3009476B1/en active Active
- 2014-07-31 JP JP2014156811A patent/JP5844439B2/en not_active Expired - Fee Related
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112654129A (en) * | 2019-10-10 | 2021-04-13 | 庆鼎精密电子(淮安)有限公司 | Anti-electromagnetic interference circuit board and manufacturing method thereof |
| CN112654129B (en) * | 2019-10-10 | 2021-11-16 | 庆鼎精密电子(淮安)有限公司 | Anti-electromagnetic interference circuit board and manufacturing method thereof |
| US12283491B2 (en) | 2019-12-19 | 2025-04-22 | Ev Group E. Thallner Gmbh | Method for producing singulated encapsulated components |
| TWI888426B (en) * | 2019-12-19 | 2025-07-01 | 奧地利商Ev集團E塔那有限公司 | Singulated encapsulated components, method and system for producing the same |
Also Published As
| Publication number | Publication date |
|---|---|
| FR3009476B1 (en) | 2018-02-16 |
| DE102014110301A1 (en) | 2015-02-05 |
| JP2015032834A (en) | 2015-02-16 |
| JP5844439B2 (en) | 2016-01-20 |
| FR3009476A1 (en) | 2015-02-06 |
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