TW201441627A - Probe card device - Google Patents

Abstract

A probe card device that can be modularly assembled to or disassembled from a circuit board comprises a space transformer, a fixture, and a probe head. The space transformer has a first surface that electrically connects to the circuit board and a second surface opposite to the first surface. The fixture, which can be assembled to or disassembled from the circuit board, has a plurality of XY-axis positioning components and a receiving space for receiving the space transformer. The probe head can be attached to the fixture and include a plurality of probes that electrically connect to the second surface of the space transformer.

Description

Probe device

The present invention relates to a probe device, and more particularly to a modular probe device.

Figure 1 shows a conventional vertical probe card 1. The vertical probe card 1 includes components such as a printed circuit board 10, a conductive film 11, a lower frame plate 12, an electrical connection plate 13, an upper frame plate 14, and a probe 15. The conductive film 11 is electrically connected to the printed circuit board 10. The lower frame 12 is locked to the printed circuit board 10 after being aligned, and the electrical connection board 13 is electrically connected to the conductive film 11. The upper frame 14 is also locked after being aligned. In the printed circuit board 10, the probe 15 has a plurality of upright probes, and the probes are regularly arranged in an addressable array to electrically connect the electrical connection plates 13. The assembly of the probe card 1 sequentially assembles the conductive film 11, the lower frame plate 12, the electrical connection plate 13, the upper frame plate 14 and the probe 15 on the printed circuit board 10, and the components are sequentially arranged. The one-piece alignment and the assembled design will make the vertical probe card 1 require a longer settling time, so the long assembly time is likely to cause the vertical probe card 1 to be shipped out.

In addition, since the vertical probe card 1 is assembled on the printed circuit board 10 in sequence, there is no fixed relationship between the components only in the alignment relationship, so when the vertical probe card 1 is to be disassembled The above components must also be disassembled in one piece, so it takes a long time to disassemble. Furthermore, the tester cannot repair the vertical probe card 1 by itself, and the vertical probe card 1 must be sent back to the probe card supplier for repair, which also wastes a lot of maintenance time. Finally, the vertical probe card 1 cannot be easily disassembled by the test factory, so the same printed circuit board 10 cannot be easily shared. Therefore, the conventional vertical probe card 1 causes problems such as long assembly and disassembly time, inconvenient disassembly, difficulty in replacing components, and difficulty in maintenance.

To solve the problems of the prior art, the present invention provides a probe device that can be modularly assembled on or detached from a carrier, the probe device including a space transformer, a holder, and a probe head . The space transformer has a corresponding first surface and a second surface, and the first surface of the space transformer is electrically connected to the carrier. The holding member has a plurality of XY axis positioning members and an accommodating space, the XY axis positioning member is disposed on the holding member, and the XY axis positioning member extends from the holding member, and the extension length of the XY axis positioning member is adjustable, thereby being able to abut The side of the space transformer is used to adjust the relative position of the XY axis of the space transformer in the holding member. After the adjustment, the XY axis positioning member can further fix the space converter in the holding member; the holding member can be fixed on the carrier plate. Remove it from or on the carrier board. The probe head includes a plurality of probes, and the probe head is fixed to the holder, and the plurality of probes are electrically connected to the second surface of the space transformer.

Accordingly, it is a primary object of the present invention to provide a probe device that includes components such as a space transformer, a holder, and a probe head, since the components are not required to be assembled in one piece on the carrier or sequentially Disassembly, thus reducing the assembly or disassembly time and easy disassembly.

Another object of the present invention is to provide a probe device comprising a space transformer, a holder and a probe head, etc., which can be easily replaced because the components are not required to be assembled or disassembled one by one. The benefits of components, cost savings and ease of maintenance.

1‧‧‧Vertical probe card

10‧‧‧Printed circuit board

11‧‧‧Conductive film

12‧‧‧ Lower frame board

13‧‧‧Electrical connection plate

14‧‧‧Upper board

15‧‧‧ probe

100‧‧‧ probe device

21‧‧‧ Carrier Board

22‧‧‧ Unidirectional conductive layer

221‧‧‧through hole

23‧‧‧Retaining parts

231‧‧‧First holding parts

2311‧‧‧through hole

232‧‧‧second holder

2321‧‧‧through hole

233‧‧‧ feet

24‧‧‧ probe head

25‧‧‧ Space Converter

251‧‧‧ first surface

252‧‧‧ second surface

253‧‧‧Multilayer ceramic structure

254‧‧‧Multilayer organic structure

2, 3, 4‧‧‧ fixing parts

5‧‧‧XY axis positioning parts

6, 7, 8‧ ‧ shims

S‧‧‧ accommodating space

S1‧‧‧First accommodation space

S2‧‧‧Second accommodating space

Figure 1 shows a conventional probe card.

2 is a partially exploded perspective view of a probe device in accordance with an embodiment of the present invention.

3 is an exploded perspective view of a probe device according to an embodiment of the present invention.

4 is a schematic view of a first holding member according to an embodiment of the present invention.

FIG. 5 is a schematic diagram of a combination of a holding member, a space transformer and a unidirectional conductive layer according to an embodiment of the invention.

6A-6C illustrate an accommodating space in a holder having an XY-axis fixing member according to an embodiment of the present invention; A cross-sectional view of the converter.

Since the present invention discloses a probe device for testing semiconductors or optoelectronics, the related manufacturing, using principles and basic functions of the probe card and the probe used therefor are well known to those skilled in the relevant art. It is clear that the description below will not be fully described. At the same time, the drawings referred to in the following texts express the structural schematics related to the features of the present invention, and do not need to be completely drawn according to the actual size, which will be described first.

Referring first to FIGS. 2 and 3, the probe device 100 includes a holder 23, a probe head 24, and a space transformer 25, wherein the probe device 100 can be modularly assembled on a carrier 21 or from a carrier. The board 21 is detached, wherein the carrier board 21 may include a printed circuit board or a probe interface board. With continued reference to FIG. 3, the space transformer 25 has a first surface 251 and a corresponding second surface 252 having a plurality of pads (not shown) thereon, and The contacts on the first surface 251 of the space transformer 25 are electrically connected to contacts (not shown) on the carrier 21, while the contacts on the second surface 252 of the space transformer 25 are connected to the probes. A plurality of probes (not shown) of the head 24 are electrically connected. The probe head 24 includes a plurality of probes, and the probe head 24 is fixed to the holder 23.

Referring to FIG. 3 , the holder 23 includes a first holding member 231 and a second holding member 232 . Referring to FIG. 4 and FIG. 6A, the holding member 23 has a plurality of XY axis positioning members 5 and an accommodating space S (FIG. 6A). The plurality of XY axis positioning members 5 are disposed on the holding member 23, and when space is converted When the device 25 is received in the accommodating space S, the plurality of XY axis positioning members 5 can extend from the holding member 23 and can abut against the side of the space transformer 25, and can be used to adjust the space converter 25 The relative positions of the XY axes in the holder 23, after being adjusted, the plurality of XY axis positioning members 5 described above can further fix the space transformer 25 in the holder 23. Referring to FIG. 2, the holding member 23 has a plurality of through holes 2321 through which the plurality of fixing members 2 can fix the holding member 23 to the carrier 21. In an embodiment, the fixing member 2 includes screws or screws, but the invention is not limited thereto, and other suitable methods for fixing can also be applied to the invention. Therefore, the holder 23 of the space transformer 25 is accommodated (including the first holding member 231 and the second holding) The component 232) can be attached to the carrier 21 or detached from the carrier 21.

In actual operation, before the supplier of the carrier 21 is served on the carrier 21 corresponding to the space converter 25 described above, the assembly factory can complete the assembly of the above-mentioned holder 23 accommodating the space converter 25 in advance. Once the carrier board 21 is delivered, the assembly can be completed. Therefore, unlike the prior art, it is not necessary to assemble or disassemble one by one, so that the assembly time, the disassembly time, and the ease of disassembly can be achieved.

It should be particularly noted that the plurality of XY axis positioning members 5 are a plurality of adjusting fixing screws, and at least two fixing adjusting screws are disposed on each side of the holding member 23, so that the space converter can be conveniently adjusted. The relative position of the XY axis in the holder 23 can further secure the space transformer 25 to the holder 23. The present invention is not limited to the above-described exemplified adjustment fixing screws, and other embodiments which can be used for adjustment, positioning or holding are also applicable to the present invention.

Referring to FIG. 4 , the first holding component 231 may include a first accommodating space S1 , and the second holding component 232 may include a second accommodating space S2 (not illustrated). Specifically, the accommodating space S may be formed by the first accommodating space S1 of the first holding member 231 after the first holding member 231 and the second holding member 232 are combined. The second holding member 232 does not have any accommodating space, that is, S=S1; or is formed by the second accommodating space S2 of the second holding member 232, and the first holding member 231 does not have any accommodating space, that is, It is S=S2; of course, it can be formed by the first accommodating space S1 of the first holding member 231 and the second accommodating space S2 of the second holding member 232, that is, S=S1+S2, the actual operation Preferably, S=S1+S2 is used. Of course, the above selection may be determined according to actual needs.

Referring to FIG. 4 , in the embodiment, the first holding member 231 has a first accommodating space S1 , and a part of the space converter 25 can be accommodated in the first accommodating space S1 . Referring to FIG. 5 , the holder 23 of the space converter 25 is accommodated therein, and the space converter 25 is electrically connected to the unidirectional conductive layer 22 . Please refer to FIG. 6A to FIG. 6C , which are cross-sectional views taken along the line A-A in FIG. 5 . Referring to FIG. 6A and FIG. 6C , the plurality of XY axis positioning members 5 are extendable from the first holding member 231 , and the extension length of the XY axis positioning member 5 is adjustable relative to the first holding member 231 . The space converter 25 is adjusted to be displaced and fixed to the first holding member 231; similarly, please refer to FIG. 6B, or the plurality of XY axis positioning members 5 can be extended from the second holding member 232, and the XY axis The extension length of the positioning member 5 can be adjusted. The space transformer 25 is adjusted to be displaced and fixed to the second holding member 232 with respect to the second holding member 232. Of course, the plurality of XY axis positioning members 5 are extended from the first holding member 231 or extend from the second holding member 232, which may be determined according to actual needs.

Referring to FIG. 3 again, the first holding member 231 has a plurality of through holes 2311 through which the plurality of fixing members 3 can fix the first holding member 231 to the second holding member 232. In an embodiment, the fixing member 3 includes screws or screws, but the invention is not limited thereto, and other suitable methods for fixing can also be applied to the invention.

2 and FIG. 3, the probe device 100 of the present invention may further include a unidirectional conductive layer 22 disposed between the carrier 21 and the space transformer 25 to make space. The converter 25 and the carrier 21 are electrically connected in the thickness direction of the unidirectional conductive layer 22, wherein the unidirectional conductive layer 22 has a thickness direction from the space transformer 25 to the carrier 21. That is, the unidirectional conductive layer 22 can be disposed on the holder 23 and electrically connected to the first surface 251 of the space transformer. Therefore, when the probe device 100 (including the space transformer 25, the holding member 23, and the unidirectional conductive layer 22) is to be assembled on the carrier 21, the unidirectional conductive layer 22 will be respectively converted to the carrier 21 and the space. The first surface 251 of the device 25 is electrically connected to each other. It should be particularly noted that the unidirectional conductive layer 22 has a plurality of through holes 221 through which the plurality of fixing members 4 can pass the unidirectional conductive layer 22 toward the carrier 21 in the direction of the carrier 21 . The plurality of fixing members 4 can lock the unidirectional conductive layer 22 toward the space transformer 25 through the through hole 221, and can be locked together with the first holding member 231, which can be determined according to actual needs. In an embodiment, the fixing member 4 includes screws or screws, but the invention is not limited thereto, and other suitable methods for fixing can also be applied to the invention.

As described above, the unidirectional conductive layer 22 may be an anisotropic conductive film (ACF), or an intermediate insert 504 as disclosed in the Republic of China Patent No. 293938, or like the Republic of China patent number. The elastic member 32 disclosed in I266057, or the spring connector 214 (Spring Connectors) as disclosed in U.S. Patent No. US20120169367.

It must be noted that the wafer test is a precision test, and a small error in the size may affect the contact on the first surface 251 of the space transformer 25 and the contact on the carrier board 21 Accurate alignment. Furthermore, referring to FIG. 3, the contact between the first surface 251 of the space transformer 25 and the contact on the carrier 21 can be electrically connected by the unidirectional conductive layer 22, so that the XY axis positioning member 5 is required. To adjust the relative position of the space transformer 25 in the XY axis of the holder 23.

As described above, in actual operation, the probe device 100 of the present invention can be used for the CP test, the probe head of the conventional FT test can be used for the FT test, and the probe device 100 of the present invention can be used for the CP test. In the FT test, the probe device 100 of the present invention can be separated from the carrier 21 first, and then the probe head of the FT test can be assembled onto the carrier 21 to perform the FT test. The above method allows the test factory to share the carrier board 21 at the same time in the CP test and the FT test, and only needs to replace the probe device 100 of the present invention and the probe head of the FT test, so that the assembly and disassembly can be achieved and saved. The cost of the effect. Alternatively, if it is necessary to repair or replace the components in the future, the components may be the space transformer 25, the holder 23, the probe head 24 or the unidirectional conductive layer 22, and the like. The use of the present invention does not need to be detached from the carrier 21 in sequence, for example, the detachable probe device 100 is detached from the carrier 21; or only the detaching probe head 24 is detached from the holder 23. Etc., should not be limited to the description in the present invention. By means of replacement or repair, the use of the invention can achieve the effect of easy replacement of components and convenient maintenance.

In an embodiment, the further space transformer 25 may include a multilayer ceramic structure 253 (Multi-Layered Ceramic; MLC) and a multilayer organic structure 254 (Multi-Layered Organic; MLO). Referring to FIG. 6C, the surface of the multilayer ceramic structure 253 and the multilayer organic structure 254 are firstly pre-welded electrically connected, and the multilayer ceramic structure 253 is accommodated in the space accommodating S, and the XY axis positioning member 5 can extend from the first holding member 231 to abut the side of the multi-layer ceramic structure 253, and can be used to adjust the relative position of the XY axis of the multi-layer ceramic structure 253 in the first holding member 231. After the adjustment, the plurality of XYs are determined. The shaft locator 5 can further secure the space transformer 25 in the first holder 231, in this embodiment the second surface 252 of the multilayer organic structure 254 is electrically coupled to the probe head 24. Of course, in an embodiment, the XY axis positioning member 5 can extend from the second holding member 232 to abut the side of the multilayer ceramic structure 253. After the adjustment, the plurality of XY axis positioning members 5 can further The space transformer 25 is fixed in the second holder 232, depending on actual needs.

Referring to FIG. 3 and FIG. 5 , at least one spacer 6 may be disposed between the holder 23 and the probe head 24 for adjusting the level of the probe head 24 relative to the holder 23 or In addition, at least one spacer 7 may be disposed between the holding member 23 and the carrier 21, and the spacer 7 is used to adjust the level or height of the holding member 23 relative to the carrier 21, please continue to refer to FIG. The member 23 can include at least one foot 233. The spacer 7 can be placed under the foot 233 so as to be able to abut against the carrier 21, thereby adjusting the level or height of the holder 230 relative to the carrier 21; or, first At least one spacer 8 may be disposed between the holding member 231 and the second holding member 232 for adjusting the level or height between the first holding member 231 and the second holding member 232. The above-mentioned spacers 6, 7, 8 can be set according to actual needs. In one embodiment, the spacers 6, 7, 8 may be fixed by screws or other similar fixing members, but the invention is not limited thereto, and other suitable methods for fixing may also be applied to the invention.

The present invention discloses a method for assembling a probe card. The assembly process is such that the space transformer 25 is first placed on the first holding member 231 or the second holding member 232. Next, the plurality of XY axis positioning members 5 are abutted against the side of the space transformer 25, and at least one XY axis positioning member 5 on the first holding member 231 or the second holding member 232 is adjusted to position the space in the XY axis. Converter 25. Then, the first holding member 231 and the second holding member 232 are locked to each other to form the holding member 23, so that the holding member 23 forms an accommodating space S for accommodating the space converter 25. Then, the carrier 21, the probe head 24, and the holder 23 are assembled to form a probe card. It should be particularly noted that the probe card is used in the assembly process, and may be used to adjust the level or height of the holder 23 relative to the carrier 21, or to adjust the probe head 24 using a spacer, depending on actual needs. The level or height between the first holding member 231 and the second holding member 232 is adjusted with respect to the level or height of the holder 23 or by using a spacer.

In addition, it should be noted that the space converter 25 may also include a multi-layer ceramic structure 253 and a multi-layer organic structure 254, wherein the surface of the multi-layer ceramic structure 253 and the multi-layer organic structure 254 are firstly pre-welded electrically connected. And the multilayer organic structure 254 is electrically connected to the probe head 24. The remaining descriptions of the invention relating to the space converter 25, which can include both the multilayer ceramic structure 253 and the multilayer organic structure 254, have been disclosed in the above embodiment, and are not described herein.

The technical content and technical features of the present disclosure have been disclosed as above, and those skilled in the art can still make various substitutions and modifications without departing from the spirit and scope of the disclosure. Therefore, the scope of protection of the present disclosure should not be limited to those disclosed in the embodiment, but should be included. Various alternatives and modifications are intended to be included without departing from the scope of the invention.

2‧‧‧Fixed parts

4‧‧‧Fixed parts

21‧‧‧ Carrier Board

22‧‧‧ Unidirectional conductive layer

23‧‧‧Retaining parts

24‧‧‧ probe head

100‧‧‧ probe device

221‧‧‧through hole

2321‧‧‧through hole

Claims (10)

A probe device is modularly assembled on or detached from a carrier, the probe device comprising: a space converter having corresponding first and second surfaces, the space converter The first surface is electrically connected to the carrier plate; a holding member having a plurality of XY axis positioning members and an accommodating space, wherein the XY axis positioning members are disposed on the holding member, and the XY axes are positioned a member can abut the side of the space transformer to adjust a relative position of the space converter in the XY axis of the holder; the accommodating space accommodates the space converter, the holder can be fixed to the carrier or Disassembling from the carrier; and a probe head comprising a plurality of probes, the probe head being fixed to the holder, the probes being electrically connected to the second surface of the space transformer, respectively. The probe device of claim 1, wherein the XY axis positioning members are a plurality of adjusting fixing screws, wherein the at least two adjusting fixing screws are disposed on each side of the holding member. The probe device of claim 1, wherein the holding member comprises a first holding member and a second holding member, wherein the accommodating space is formed by the first holding member and the second holding member, The XY axis positioning member extends from the first holding member or the second holding member. The probe device of claim 1, further comprising a unidirectional conductive layer disposed between the carrier and the space transformer. The probe device of claim 4, wherein the unidirectional conductive layer is disposed on the holder, and the unidirectional conductive layer is electrically connected to the space converter The first surface, when the probe device is assembled on the carrier, the unidirectional conductive layer is electrically connected to the first surface of the space transformer and the carrier. According to the probe device of claim 1, the space converter further includes a multilayer ceramic structure and a multilayer organic structure, and the multilayer ceramic structure and the surface pre-return soldering electrical properties of the multilayer organic structure are connected. The XY axis positioning member can abut the side of the multilayer ceramic structure, the accommodating space accommodating the multilayer ceramic structure, and a second surface of the multilayer organic structure is electrically connected to the probe head. The probe device of claim 1, wherein the holder and the probe head, the holder and the carrier or the first holding member and the second holding member are provided with at least one spacer. A method for assembling a probe card, comprising the steps of: placing a space converter on a first holding member or a second holding member; adjusting a plurality of XY axis positioning members against a side of the space transformer, adjusting At least one XY axis positioning member on the first holding member or the second holding member to position the space transformer in an XY axial direction; and the first holding member and the second holding member are interlocked to each other to be combined a holder for forming the receiving member to receive the space converter; and assembling a carrier, a probe head and the holder to form the probe card. The assembly method of claim 8, wherein the space converter comprises a multilayer ceramic structure and a multilayer organic structure, the plurality of XY axis positioning members can abut the side of the multilayer ceramic structure, the receiving More space A layered ceramic structure, a second surface of the multilayer organic structure electrically connecting the probe head. The assembly method according to claim 9, wherein the multilayer ceramic structure and the surface of the multilayer organic structure are electrically connected by a pre-reflow.