TWI714245B - Probe card for electrical test and probe head for probe card - Google Patents

Abstract

The invention provides a probe head for fixing a plurality of probes in contact with a device to be inspected on a circuit board assembly connected to an inspection device in a conductive manner. The probe head includes a first plate, a second plate, a nut member, and a first bolt member. The first board and the second board hold a plurality of probes. The second board is arranged below the first board. The nut member is coupled to the second plate. The first bolt member is screwed to the nut member at the first position and the second position by the circuit board assembly. The first bolt member is screwed to the nut member at the first position so that the first plate and the second plate are in close contact. The first bolt member is screwed to the nut member at the second position so that the second plate is separated from the first plate.

Description

Probe card for electrical inspection and probe head of probe card

The present invention relates to a probe card used for electrical inspection of inspected devices and a probe head of the probe card.

In order to electrically inspect the inspected device, the inspection device is provided with a connector that electrically connects the inspected device and the inspection device. The inspected device is in contact with the connector, and the connector transmits the electrical test signal of the inspecting device to the inspected device, and transmits the response signal of the inspected device to the inspecting device. As an example of such a connector, a probe card having a plurality of probes in the shape of a needle is used in order to electrically inspect the semiconductor element of the semiconductor wafer.

The probe is in contact with the terminal of the semiconductor element. The probe is fixed to the probe card by the probe head and inserted into the probe head. As an example, the probe head may have an upper plate, a middle plate with a quadrangular opening in the center, and a lower plate. The probe can be inserted into the upper plate, middle plate and lower plate and held by the probe head.

As an example of fixing the probe to the probe card by the probe head, it is proposed in Korean Patent Publication No. 10-2018-0059867 that the probe is completely inserted into the upper plate, the middle plate and the lower plate to be combined with the probe card .

As another example of fixing the probe to the probe card by the probe head, when the upper and lower ends of the probe are offset, use the guide film arranged on the middle plate to first assemble the lower plate and the middle plate, and then Insert the probe through the guide film.

As described above, the probe is fixed to the probe card by the probe head in a way that the probe head is fully inserted into the probe card. In particular, when the upper board, the middle board and the lower board are all assembled, the probe must be completely inserted into the probe head. Therefore, the process of inserting the probe into the probe head is very precise and complicated, and manual operations are required depending on the situation.

In the case where the thickness of the middle plate is large in order to realize a longer probe, the distance between the upper plate and the lower plate becomes larger. Therefore, it is very difficult to insert the probe and the insertion time increases. The probe head that needs to assemble the upper board, the middle board and the lower board can only be used for probes with a specific length. When a part of the probe is worn out or a part of the probe is replaced, the probe head needs to be disassembled from each board after being separated from the probe card.

As described above, the probe head exemplified above is disadvantageous in easily and quickly inserting the probe, easily replacing the probe, and applying to various probes. [Prior Technical Literature] [Patent Literature]

Korean Open Patent Publication No. 10-2018-0059867

[The problem to be solved by the invention]

An embodiment of the present invention provides a probe head that can easily and quickly insert a probe. An embodiment of the present invention provides a probe head with a variable probe holding position. An embodiment of the present invention provides a probe head applicable to probes of various lengths. An embodiment of the present invention provides a probe head that can easily deal with probe wear, probe damage, or probe replacement. An embodiment of the present invention provides a probe card with the above-mentioned probe head. [Technical means to solve the problem]

One aspect of the embodiment of the present invention relates to a probe head that fixes a plurality of probes in contact with a device to be inspected on a circuit board assembly connected to an inspection device in a conductive manner. The probe head of an embodiment includes a first plate, a second plate, a nut member, and a first bolt member. The first board and the second board hold a plurality of probes. The second board is arranged below the first board. The nut member is coupled to the second plate. The first bolt member is screwed to the nut member at the first position and the second position by the circuit board assembly. The first bolt member is screwed to the nut member at the first position so that the first plate and the second plate are in close contact. The first bolt member is screwed to the nut member at the second position so that the second plate is separated from the first plate.

In one embodiment, the first plate and the second plate that are in close contact at the first position hold a plurality of probes, and the first plate and the second plate that are spaced apart at the second position hold a plurality of probes. The plurality of probes respectively have a first protrusion length protruding from the second plate at the first position of the first bolt member, and a first protrusion length shorter than the first protrusion length and protruding from the second plate at the second position of the first bolt member 2Protruding length.

In one embodiment, the nut member is coupled to the upper surface of the second plate and penetrates the first plate.

In one embodiment, the probe head includes a stopper for fixing the first bolt member at the second position. The stopper can be fixed to the circuit board assembly by contacting with the first bolt member at the second position.

In one embodiment, the probe head includes a second bolt member that is in contact with the first bolt member and is screwed to the nut member by the first bolt member. The rotation of the second bolt member moves the second plate relative to the first plate by the nut member.

In one embodiment, the nut member has a first thread screwed with the first bolt member and a second thread screwed with the second bolt member. The thread pitch of the second thread can be smaller than the thread pitch of the first thread.

In one embodiment, the nut member includes a nut body with a first thread formed on the outer peripheral surface and a second thread hollow on the inner peripheral surface. The first bolt member includes a bolt head supporting the hollow of the second bolt member, and a hollow bolt body having a female thread screwed with the first thread of the nut member on the inner peripheral surface.

In one embodiment, the second bolt member is screwed to the nut member at the second position of the first bolt member.

Another aspect of the embodiments of the present invention relates to a probe card used for electrical inspection of an inspected device. The probe card of an embodiment includes: a circuit board assembly, which is connected to the inspection device in a conductive manner; a plurality of probes, which are in contact with the inspected device; and a probe head, which is coupled to the circuit board assembly, Fix multiple probes. The probe head includes a first plate, a second plate, a nut member, and a first bolt member. The first board and the second board hold a plurality of probes. The second board is arranged below the first board. The nut member is coupled to the second plate. The first bolt member is screwed to the nut member at the first position and the second position by the circuit board assembly. The first bolt member is screwed to the nut member at the first position so that the first plate and the second plate are in close contact. The first bolt member is screwed to the nut member at the second position so that the second plate is separated from the first plate.

In one embodiment, the first plate and the second plate that are in close contact at the first position hold a plurality of probes, and the first plate and the second plate that are spaced apart at the second position hold a plurality of probes.

In one embodiment, the nut member is coupled to the upper surface of the second plate and penetrates the first plate.

In one embodiment, the probe head includes a stopper that contacts the first bolt member, is coupled to the circuit board assembly, and fixes the first bolt member at the second position.

In one embodiment, the probe head includes a second bolt member that is in contact with the first bolt member and is screwed to the nut member by the first bolt member. The rotation of the second bolt member moves the second plate relative to the first plate by the nut member.

In one embodiment, the nut member includes a hollow nut body formed with a first thread screwed with the first bolt member on the outer circumferential surface and a second thread screwed with the second bolt member on the inner circumferential surface. The first bolt member includes a bolt head supporting the hollow of the second bolt member, and a hollow bolt body having a female thread screwed with the first thread of the nut member on the inner peripheral surface. The thread pitch of the second thread can be smaller than the thread pitch of the first thread.

In one embodiment, the circuit board assembly includes: a first circuit board assembly that is electrically conductively connected to the inspection device; and a second circuit board assembly that is electrically conductively coupled to the first circuit board For the assembly, the terminal pitch between the terminals of the first circuit board assembly is adjusted to the probe pitch between a plurality of probes. [Effects of Invention]

An embodiment of the present invention can provide a probe head having a first plate and a second plate which are closely connected and separated while keeping the probe. The probe head of this embodiment can easily insert the probe, easily hold the probe, realize simple and simple assembly, and handle probes of various lengths. Furthermore, according to the probe head of an embodiment, the probe can be replaced without using a repair jig at the inspection site of the inspected device. The probe head of an embodiment of the present invention can deal with the worn probe by keeping the state of the probe relative to the second plate moving relative to the first plate without separating and disassembling the probe head, thereby increasing the size of the probe Card life. The probe head of an embodiment of the present invention can accurately adjust the insertion state of the probe and the interval between the first plate and the second plate by combining the first bolt member and the second bolt member of a nut member Larger range and smaller range. In the probe head according to an embodiment of the present invention, after the probe is inserted into the closely connected first and second plates, the first and second plates are separated to ensure that the probe is fully inserted. Thereby, the probe head of an embodiment can realize the development of an automatic probe insertion device.

The embodiments of the present invention are illustrated for the purpose of explaining the technical idea of the present invention. The scope of rights of the present invention is not limited to the following embodiments or specific descriptions of these embodiments.

As long as there is no other definition, all technical terms and scientific terms used in the present invention have the meanings commonly understood by those with common sense in the technical field to which the present invention belongs. All the terms used in the present invention are selected for the purpose of describing the present invention more clearly, not for limiting the scope of rights of the present invention.

The expression system used in the present invention such as "include", "have", "have", etc., as long as other meanings are not mentioned in the sentence or sentence containing the corresponding expression, it should be understood as having the possibility of including other embodiments The open-ended terms (open-ended terms).

As long as no other meanings are mentioned, the singular expression described in the present invention may include the plural meaning, and this situation is equally applicable to the singular expression described in the scope of the invention application.

The expressions such as "first" and "second" used in the present invention are used to distinguish plural constituent elements from each other, and do not limit the order or importance of corresponding constituent elements.

In the present invention, when it is described that a certain component is “connected” or “connected” to another component, it should be understood that the certain component can be directly connected or connected to the other component, or can be Connect or link with another new component as a medium.

The direction indicator of "above" used in the present invention is based on the direction in which the probe head is positioned relative to the inspected device, and the direction indicator of "below" refers to the opposite direction of the upper. The direction indicator of "vertical direction" used in the present invention includes an upper direction and a lower direction, but it should be understood as not referring to a specific one of the upper direction and the lower direction.

Hereinafter, embodiments will be described with reference to the accompanying drawings. In the accompanying drawings, the same or corresponding components are given the same reference signs. In addition, in the description of the following embodiments, repeated description of the same or corresponding components may be omitted. However, even if the description of the constituent elements is omitted, it does not mean that such constituent elements are not included in a certain embodiment.

The embodiments described below and the examples shown in the accompanying drawings relate to a probe card for electrical inspection of a device under inspection and a probe head for the probe card. As an example, the probe card and probe head of the embodiment can be used to electrically inspect the inspected device during the manufacturing process of the inspected device.

Fig. 1 shows a probe card with one embodiment of the probe head of one embodiment. In FIG. 1, in order to describe an embodiment, the shapes of the probe card, the probe head, the inspected device, and the inspection apparatus are schematically shown.

The probe card 100 of an embodiment may be configured in the inspection apparatus 20 for the purpose of electrically inspecting the inspected device 10. As an example, the inspection device 20 may include a prober 21 and a testing machine 22. The probe card 100 can be configured in the prober 21 in a replaceable manner. The testing machine 22 can be electrically connected to the probe card 100. A transport device 23 for supporting and transporting the inspected device 10 can be provided inside the prober 21. The inspected device 10 may be arranged on the upper surface of the conveying device 23.

The inspected device 10 may be a plurality of semiconductor elements formed on a semiconductor wafer, but is not limited to this. Furthermore, the aforementioned semiconductor device may be a memory device or a non-memory device. Therefore, the probe card 100 can be used for the following inspection: before cutting a plurality of semiconductor elements formed on the semiconductor wafer from the semiconductor wafer, inspect the electrical functions and performance of the semiconductor element, and confirm the defects of the semiconductor element.

The probe card 100 may include a circuit board assembly 101, a plurality of probes 102, and a probe head 200 as an embodiment of fixing the plurality of probes 102 to the circuit board assembly 101. The circuit board assembly 101 may be the body of the probe card 100. The circuit board assembly 101 is connected to the inspection device 20 in a conductive manner. In detail, the circuit board assembly 101 is exchangeably arranged on the prober 21, so that it can be connected to the tester 22 in a conductive manner, so as to transmit the electrical test signal from the tester 22 to the device under inspection. 10 and transmit the response signal from the inspected device 10 to the testing machine 22.

The probe head 200 holds a plurality of probes 102 and is attached to the circuit board assembly 101. Therefore, the plurality of probes 102 are fixed to the circuit board assembly 101 by the probe head 200. The plurality of probes 102 are in contact with the terminals of the circuit board assembly 101 at the upper end. In addition, the plurality of probes 102 are in contact with the device 10 to be inspected, specifically, the terminal 11 of the device 10 to be inspected, at the lower end. The probe head 200 includes a first plate 210 and a second plate 220, and the first plate 210 and the second plate 220 hold a plurality of probes 102 in a vertical direction. The second plate 220 is arranged below the first plate 210. The probe head 200 of an embodiment is configured to adjust the distance between the first board 210 and the second board 220.

1, the device 10 to be inspected may be mounted on the conveying device 23 to be in close contact with the probe card 100. In the state where the probe card 100 and the inspected device 10 are in close contact along the vertical direction, the tester 22 can output electrical test signals to the inspected device 10 by the probe 102 contacting the inspected device 10, from the inspected device 10 The response signal of 10 can be transmitted to the testing machine 22 through the probe 102 and the circuit board assembly 101. In this way, the probe card 100 can be used to perform electrical inspections on the electrical characteristics, functional characteristics, and operating speeds of the inspected device 10.

Referring to the examples shown in FIGS. 2 to 11, the probe card of an embodiment and the probe head of an embodiment will be described.

Fig. 2 is a bottom perspective view of a probe card of an embodiment. FIG. 3 is an exploded perspective view from above of the probe card of an embodiment, and FIG. 4 is an exploded perspective view from below of the probe card of an embodiment. Figure 5 shows the cross-sectional shape taken along line 5-5 of Figure 2;

2 and 3, in one embodiment, the circuit board assembly 101 of the probe card 100 includes a first circuit board assembly 110 and a second circuit board assembly 120. The first circuit board assembly 110 can be electrically connected to an inspection device (for example, the tester 22 of the inspection device 20 shown in FIG. 1 ). The second circuit board assembly 120 is attached to the first circuit board assembly 110 along the vertical direction VD, and is connected to the first circuit board assembly 110 in an electrically conductive manner. The second circuit board assembly 120 can adjust the terminal pitch between the terminals of the first circuit board assembly 110 to the probe pitch between the plurality of probes 102. Such a second circuit board assembly 120 can be referred to as a space transformer. In another embodiment, the circuit board assembly 101 of the probe card 100 may only include the first circuit board assembly 110. The probe card 100 of this example can be used for electrical inspection of inspected devices such as memory components.

3, the first circuit board assembly 110 may include a circular printed circuit board 111, a first stiffener 112 attached to the upper surface of the printed circuit board 111, and a printed circuit formed along the first stiffener 112 The second reinforcement 113 on the upper surface of the substrate 111 and the plurality of connectors 114 attached to the upper surface of the printed circuit substrate 111.

A plurality of signal lines (not shown) through which power supply inspection signals and response signals pass can be mounted on the lower surface of the printed circuit board 111. The first reinforcement 112 is located in the second reinforcement 113 and is attached to the upper surface of the printed circuit board 111. The second reinforcing member 113 has a ring shape and can perform a function of connecting the probe card 100 and the inspection device. That is, the probe card 100 can be connected to the inspection device (for example, a part of the probe instrument 21 shown in FIG. 1) via the second reinforcement 113. For this reason, the second reinforcing member 113 has a butting portion for butting on its upper surface. The plurality of connectors 114 are arranged radially and attached to the upper surface of the printed circuit board 111. The connector 114 can be combined with a corresponding connector (not shown) provided in the inspection device. As an example, a zero insertion force connector can be used as the connector 114.

4, the second circuit board assembly 120 can be attached to the lower surface of the first circuit board assembly 110 by bolts 125. The second circuit board assembly 120 may include a multilayer organic circuit board 121, a third reinforcement 122 disposed between the printed circuit board 111 and the multilayer organic circuit board 121, and a third reinforcement 122 inserted in the third reinforcement 122 and the multilayer An interposer 123 to which the organic circuit substrate 121 contacts, and a circuit substrate cover 124 disposed under the multilayer organic circuit substrate 121.

The probe 102 of the probe card 100 can contact the terminal of the multilayer organic circuit board 121 at its upper end. An opening 126 for inserting the interposer 123 is formed in the third reinforcement 122. The interposer 123 is in contact with the lower surface of the printed circuit board 111 and the upper surface of the multilayer organic circuit board 121 to connect the printed circuit board 111 and the multilayer organic circuit board 121 in a conductive manner. The interposer 123 may include a conductive sheet having a plurality of conductive parts aligned in a vertical direction and an insulating part that insulates and separates the conductive parts in a horizontal direction, and includes a silicone rubber material. The circuit board cover 124 is in contact with the lower surface of the multilayer organic circuit board 121, and the probe head accommodating portion 127 of the probe head 200 is formed to penetrate the circuit board cover 124 in an opening shape. The probe head 200 is inserted into the probe head accommodating part 127. The bolt 125 is fastened to the second circuit board assembly 120 by the printed circuit board 111 to fix the second circuit board assembly 120 to the printed circuit board 111.

Referring to FIG. 2, the probe head 200 of an embodiment fixes a plurality of probes 102 to the circuit board assembly 101. 3 and 4, the probe head 200 includes a first plate 210 and a second plate 220 that hold the probe 102. The probe head 200 can be combined with the circuit board assembly 101 in a replaceable manner. In the example shown in FIGS. 3 and 4, the probe head 200 can be arranged in the second circuit board assembly 120 so as to be inserted into the probe head accommodating portion 127 of the circuit board cover 124. The first board 210 of the probe head 200 can be fixed to the second circuit board assembly 120 of the circuit board assembly. As an example, the first circuit board assembly 110 and the second circuit board assembly 120 may be provided with a plurality of through holes along the vertical direction, and the first board 210 may be provided with screw holes or corresponding to these through holes along the edge. Screw slot. Screws are fastened to the screw holes or screw grooves by the through holes of the first circuit board assembly 110 and the second circuit board assembly 120, so that the first board 210 can be fixed to the second circuit board assembly 120. The second plate 220 of the probe head 200 can move relative to the first plate 210 in the vertical direction VD.

3 and 4, the first plate 210 and the second plate 220 may have a four-sided flat plate shape with the same size. A plurality of first probe holes 211 into which the probes 102 are respectively inserted are penetrated in the first plate 210 along the vertical direction VD. The probe 102 can be fixed to the first plate 210 at the upper end. As an example, a locking part that can be engaged with the first probe hole 211 is provided at the upper end of the probe 102, so that the probe 102 and the first plate 210 can be fixed. The second plate 220 is arranged below the first plate 210. The second plate 220 has second probe holes 221 that respectively insert the probes 102 and correspond to the first probe holes 211 along the vertical direction VD.

In one embodiment, the first board 210 and the second board 220 can hold the probe 102 and be in close contact with each other. In addition, the first plate 210 and the second plate 220 can hold the probe 102 with a predetermined interval (for example, the interval C shown in FIG. 1) between them in the vertical direction VD to be separated in the vertical direction VD. In the state where the first plate 210 and the second plate 220 are in close contact, the probe 102 can be initially inserted into the first plate 210 and the second plate 220 in the downward direction LD. When the probe 102 is initially inserted, the first plate 210 and the second plate 220 can hold the upper part of the probe 102 at the same time. In a state where the first plate 210 and the second plate 220 are separated by the predetermined distance, the first plate 210 and the second plate 220 can hold the upper part and the lower part of the probe 102, respectively.

The probe head 200 includes a fixing device for fixing the first plate 210 and the second plate 220 holding the probe 102 to the circuit board assembly 101. In one embodiment, the probe head 200 includes a nut member 230 coupled to the second plate 220 and a first bolt member 240 screwed to the nut member 230 by the circuit board assembly 101 as the fixing device.

In one embodiment, the nut member 230 can be coupled to the upper surface of the second plate 220 and can penetrate the first plate 210 in the vertical direction VD. The nut member 230 may be bonded to the upper surface of the second plate 220 by bonding using an adhesive or soldering using a metal material. 3 and 4 show the state where four nut members 230 are coupled to the second plate 220, but these are only examples. The probe head 200 can use at least two nut members 230.

3 and 4, the nut member 230 may include a nut head 231 combined with the second plate 220, and a sleeve-shaped nut body 232 extending from the nut head 231 in the upward direction UD. The first bolt member 240 is screwed to the nut member 230 by the first circuit board assembly 110 and the second circuit board assembly 120. The probe head 200 uses the same number of first bolt members 240 as the number of nut members 230. The first bolt member 240 may include a bolt head 241 and a bolt main body 242 extending vertically downward from the bolt head 241.

3 and 4, the first reinforcing member 112 of the first circuit board assembly is formed with a plurality of grooves 115 recessed from the upper surface and substantially in the shape of a rectangular rectangle. Each corner of the groove 115 is cut into a circular arc shape to have a relief. The alignment hole 116 is located in the center of the groove 115, and the alignment hole 116 penetrates the first reinforcement 112 in the vertical direction. In addition, a bolt head seat 117 is formed along the periphery of the alignment hole 116 to be recessed from the bottom surface of the groove 115. The printed circuit board 111 of the first circuit board assembly has an alignment hole 118 corresponding to the alignment hole 116 penetrating in the vertical direction. An alignment hole 128 and an alignment hole 129 corresponding to the alignment holes 116 and 118 are respectively penetrated in the third reinforcement 122 and the multilayer organic circuit substrate 121 of the second circuit board assembly in the vertical direction. The alignment holes 116, 118, 128, and 129 have diameters that can be inserted into the nut body 232 and the bolt body 242. The nut body 232 penetrates through the alignment hole 129 of the multilayer organic circuit board 121, the alignment hole 128 of the third reinforcement 122, and the alignment hole 118 of the printed circuit board 111, and its upper end can be positioned to the height of the upper surface of the printed circuit board 111 . The bolt body 242 penetrates the alignment hole 116 of the first reinforcement 112 and the alignment hole 118 of the printed circuit board 111, and its lower end can be located in the middle of the alignment hole 118 of the printed circuit board 111. The first bolt member 240 is in contact with the bolt head 241 and the upper surface of the first reinforcement 112 (specifically, the bolt head seat 117), and can restrict the position of the first bolt member. The bolt head 241 can contact the bolt head seat 117 on its lower surface.

The nut body 232 may be in the shape of a hollow sleeve. The bolt body 242 may be in the shape of a hollow sleeve. In an embodiment, the nut body 232 can be inserted into the bolt body 242, and the first bolt member 240 is screwed to the nut member 230. In relation to this, the first thread 233 of a male thread can be formed on the outer peripheral surface of the nut main body 232, and the female thread 243 that is screwed with the first thread 233 can be formed on the inner peripheral surface of the bolt main body 242. In another embodiment, a female thread may be formed on the inner peripheral surface of the nut main body 232 and a male thread may be formed on the outer peripheral surface of the bolt main body 242 to insert the bolt main body into the inside of the nut main body.

In one embodiment, the first bolt member 240 can be screwed to the nut member 230 at the first position and the second position. The first bolt member 240 may be screwed to the nut member 230 at the first position described above so that the first plate 210 and the second plate 220 are in close contact with each other. The first bolt member 240 may be screwed to the nut member 230 at the second position described above so that the second plate 220 is separated from the first plate 210 in the vertical direction. The second position is a position away from the first position in the upward direction UD, and ensures that the position of the probe 102 is completely maintained by the first plate 210 and the second plate 220. That is, the second position may be a position in which the first bolt member 240 is screwed to the nut member 230 so that the first plate 210 and the second plate 220 are not in close contact with each other and the predetermined interval is formed between them.

In an embodiment, the probe head 200 may include a stopper 250 for fixing the first bolt member 240 screwed with the nut member 230 to the second position. The stopper 250 can restrain the movement of the first bolt member 240 in the upper direction UD and hold the second plate 220 in a state where the second plate 220 is separated from the first plate 210.

3 and 4, the stopper 250 can be formed so as to cover the first bolt member 240. The stopper 250 can contact the upper end of the bolt head 241 to fix the first bolt member 240 at the above-mentioned second position. The stopper 250 has a size to be inserted into the groove 115. The stopper 250 can be accurately inserted into the groove 115 due to the protrusions provided in the corners of the groove 115. As shown in FIG. 3, a pair of through holes 251 are formed in the stopper 250, and a pair of screw holes 119 are formed in the groove 115 from the bottom surface of the groove 115 downward. The clamp bolt 252 penetrates the stopper 250 and is fastened to the screw hole 119 so that the stopper 250 can contact the bolt head 241 of the first bolt member 240 and be fixed to the first reinforcement 112 of the first circuit board assembly. That is, the stopper 250 can be fixed to the circuit board assembly 101 by contacting the first bolt member 240 at the second position of the first bolt member 240.

As described above, the first bolt member 240 is screwed to the nut member 230 at the second position, so the second plate 220 can hold a part of the probe 102 and separate from the first plate 210. Therefore, the upper part and the lower part of the probe 102 can be held by the separated first plate 210 and the second plate 220, respectively.

In one embodiment, the probe head 200 can accurately adjust the predetermined interval between the first board 210 and the second board 220. In relation to this, the probe head 200 may include a second bolt member 260 screwed to the nut member 230 by the first bolt member 240. The second bolt member 260 screwed to the nut member 230 can rotate forward or backward relative to the nut member 230. Such rotation of the second bolt member 260 can slightly move the second plate 220 upward or downward with respect to the first plate 210 by the nut member 230. Therefore, the distance between the first plate 210 and the second plate 220 can be accurately adjusted, and the position of the second plate 220 holding the probe 102 can be changed. The second bolt member 260 can be screwed to the nut member 230 at the second position of the first bolt member 240.

In one embodiment, the first bolt member 240 can be formed such that the second bolt member 260 penetrates the first bolt member 240 in the vertical direction. Referring to FIG. 3, the bolt head 241 of the first bolt member 240 has a hexagonal recessed bolt head seat 244, and a through hole 245 is formed in the bolt body 242 from the bottom surface of the bolt head seat 244 in a vertical direction. The second bolt member 260 has a bolt head 261 formed with a hexagonal wrench hole, and a cylindrical bolt body 262 extending from the bolt head 261. The bolt main body 262 can be inserted into the first bolt member 240 through the through hole 245. The lower surface of the bolt head 261 is in contact with the bottom surface of the bolt head seat 244 so that the second bolt member 260 can contact the first bolt member 240. Therefore, the bolt head 241 of the first bolt member 240 can support the second bolt member 260.

In one embodiment, the nut member 230 may have a first thread 233 screwed with the first bolt member 240 and a second thread 234 screwed with the second bolt member 260 and having a diameter smaller than the first thread 233. As an example, the first thread 233 and the second thread 234 can be provided to the nut member 230 so as to be formed on the outer peripheral surface and the inner peripheral surface of the nut main body 232 in a sleeve shape, respectively. As another example, the first thread 233 and the second thread 234 may be formed on the outer peripheral surface of the cylindrical nut body. As another example, the first thread 233 and the second thread 234 may be formed on the inner peripheral surface of the nut body in a sleeve shape.

Fig. 6 is a cross-sectional view showing a state in which the first bolt member is screwed to the nut member and the second bolt member is screwed to the nut member. In one embodiment, referring to FIG. 6, a first thread 233 of a male thread screwed with the female thread 243 of the first bolt member 240 is formed on the outer peripheral surface of the nut main body 232 of the nut member 230, and is formed on the inner periphery of the nut main body 232 The surface forms a second thread 234 of a female thread screwed with the male thread 263 of the second bolt member 260.

In one embodiment, the thread pitch TP2 of the second thread 234 is smaller than the thread pitch TP1 of the first thread 233. In the case where the thread pitch TP2 of the second thread is smaller than the thread pitch TP1 of the first thread, the thread pitch TP1 and the thread pitch TP1 of the first thread 233 can be set in such a way that the distance between the first plate 210 and the second plate 220 can be adjusted minutely. The ratio between the thread pitches TP2 of the second thread 234. In addition, the thread pitch of the male thread 263 of the second bolt member 260 is smaller than the thread pitch of the female thread 243 of the first bolt member 240. Referring to FIGS. 3, 5 and 6, the bolt head 261 of the second bolt member 260 contacts the bolt head seat 244 to restrict the movement of the second bolt member 260 in the vertical direction VD, and the nut member 230 is fixed to the second plate 220. Therefore, as the second bolt member 260 rotates forward or backward with respect to the nut member 230, the nut member 230 can move slightly upward or downward by the screw movement caused by this rotation, and the first plate 210 and the first plate 210 can be adjusted. Space between the second plate 220.

Referring to FIGS. 7 to 11, an example in which the probe head of an embodiment is assembled on the probe card will be described.

Referring to FIG. 7, the second circuit board assembly 120 is attached to the first circuit board assembly 110. Referring to FIG. 8, in a state where the second circuit board assembly 120 is assembled in the first circuit board assembly 110, the probe head 200 is mounted on the second circuit board assembly 120. In detail, the probe head 200 is mounted on the multilayer organic circuit by the probe head accommodating portion 127 of the circuit substrate cover 124 so that the first board 210 of the probe head 200 faces the lower surface of the multilayer organic circuit substrate 121 The bottom surface of the substrate 121. In the example shown in FIG. 8, the first plate 210 and the second plate 220 are in close contact with each other. As shown in FIG. 9, in the state where the first plate 210 and the second plate 220 are in close contact, the probe 102 can be initially inserted into the first plate 210 and the second plate 220. As an example, in a state where the probe 102 is initially inserted, the upper end of the probe 102 can be coupled to the first probe hole 211 by engagement, and the upper end of the probe 102 can pass through the second probe hole 221.

10 and 11, the first board 210 and the second board 220 in which the probe 102 is inserted and are in close contact with each other are mounted on the second circuit board assembly 120. The first board 210 can be fixed to the second circuit board assembly 120 by screws penetrating the first circuit board assembly 110 and the second circuit board assembly 120 and screwed to the first board 210. After the first plate 210 is fixed to the second circuit board assembly 120, the first bolt member 240 may be screwed to the nut member 230, and the second bolt member 260 may be screwed to the nut member 230. After the second bolt member 260 is screwed to the nut member 230, the stopper 250 can be coupled to the first circuit board assembly 110 by the clamping bolt 252.

As shown in FIG. 11, when the first board 210 and the second board 220 that are in close contact are mounted on the multilayer organic circuit board 121 of the second circuit board assembly, the nut member 230 penetrates the alignment hole 129 and the alignment hole 128. The first bolt member 240 penetrates the alignment hole 116 and the alignment hole 118 and is screwed to the nut member 230. The first bolt member 240 is screwed to the nut member 230 and held at the above-mentioned first position until the lower surface of the bolt head 241 contacts the bolt head seat 117. Therefore, the first bolt member 240 is screwed to the nut member 230 at the first position, and the first plate 210 and the second plate 220 are in close contact with each other in the vertical direction VD.

As shown in FIG. 9, the probe holes 211, 221 of each of the first plate 210 and the second plate 220 that are closely connected are aligned in the vertical direction VD, and the probe 102 is inserted into the first plate 210 and the second plate 220 in sequence . Therefore, when the probe 102 is first inserted into the probe head 200, the probe 102 can be easily inserted by the first plate 210 and the second plate 220 that are closely connected. The probe 102 is first inserted into the first plate 210 in the downward direction LD, and its upper end is fixed to the first plate 210 by the above-mentioned engagement. Therefore, the upper end of the inserted probe 102 can be at the same level, which can ensure stable contact between the probe 102 and the circuit board assembly.

12 to 16 show examples of holding probes on the probe card by the probe head of an embodiment. FIGS. 12 to 16 side by side show an example of holding the probe by the first plate and the second plate, and an example of the relative position between the nut member and the first bolt member.

Fig. 12 shows a state where the probe is initially inserted into the probe head and held by the probe head. In addition, FIG. 12 shows a state below the state shown in FIG. 11. As shown in FIG. 12, the first bolt member 240 can be screwed to the nut member 230 at the first position P1. The first plate 210 and the second plate 220 are in close contact with each other in the vertical direction VD at the first position P1 of the first bolt member 240, and the probe 102 is held by the close contact of the first plate 210 and the second plate 220. At the first position P1 of the first bolt member 240, the upper portion of the probe 102 is held by the first plate 210 and the second plate 220, and the probe 102 has a first protrusion length L1 protruding from the second plate 220.

Fig. 13 is a drawing similar to Fig. 12, showing a state where the first bolt member is loosened from the nut member and is coupled to the nut member at the second position. 13, the first bolt member 240 is threadedly engaged with the nut member 230 at the second position P2 separated from the first position P1 in the upward direction UD. The height difference between the first position P1 and the second position P2 can be appropriately selected according to the length of the probe 102. Since the first bolt member 240 is loosened from the nut member 230, a space is formed between the lower surface of the bolt head 241 and the bolt head seat 117. Thereby, the first bolt member 240 can move downward together with the nut member 230 until the lower surface of the bolt head 241 contacts the bolt head seat 117. Moreover, as the first bolt member 240 moves downward, the second plate 220 can be separated from the first plate 210.

Fig. 14 shows another example of holding the probe by the probe head, and shows the situation where the second plate is separated from the first plate. 13 and 14, the first bolt member 240 is screwed to the nut member 230 at the second position P2. As the first bolt member 240 moves in the downward direction LD, the second plate 220 is separated from the first plate 210 in the downward direction LD. As the second plate 220 moves downward, the upper part of the probe 102 is held by the first plate 210 and the lower part of the probe 102 is held by the second plate 220. Therefore, the probe 102 is held by the separated first plate 210 and the second plate 220 at the second position P2 of the first bolt member 240. Moreover, at the second position P2 of the first bolt member 240 shown in FIG. 14, the probe 102 has a second protruding length L2 protruding from the second plate 220. The second protrusion length L2 is shorter than the first protrusion length L1.

As shown in FIG. 14, the second plate 220 is separated from the first plate 210, and the upper part and the lower part of the probe 102 are held by the first plate 210 and the second plate 220. Therefore, the probe 102 can be easily assembled to the probe head 200 by separating the second plate 220 from the first plate 210. In addition, the second plate 220 can be moved by adjusting the first bolt member 240. Therefore, the probe head of the embodiment can be maintained by adjusting the interval C between the first plate 210 and the second plate 220 without additional equipment. Probes of various lengths.

According to the embodiment, the setting of the probe head 200 and the probe 102 can also be completed at the position of the first board 210 and the second board 220 shown in FIG. 14 and the state where the probe 102 is inserted. In this embodiment, the stopper 250 (refer to FIGS. 3 and 4) is in contact with the bolt head 241 and is coupled to the first reinforcement 112, thereby fixing the first bolt member 240 at the second position P2. The stopper restrains the upper movement of the first bolt member 240, so that the movement of the second plate 220 can be restrained in a state where the second plate 220 is separated from the first plate 210 and the probe 102 is fully inserted.

Fig. 15 shows a state where the second bolt member is screwed to the nut member by the first bolt member. The second bolt member 260 penetrates the first bolt member 240 at the second position P2 of the first bolt member 240 and is screwed to the nut member 230. The second bolt member 260 can be screwed to the nut member 230 until the bolt head 261 contacts the bolt head seat 244. The male thread of the second bolt member 260 is threaded with the second thread of the nut member 230, and the female thread of the first bolt member 240 is threaded with the first thread of the nut member 230. As described above, the thread pitch TP2 (refer to FIG. 6) of the second thread is smaller than the thread pitch TP1 (refer to FIG. 6) of the first thread. Therefore, if the second bolt member 260 is rotated forward or backward with respect to the nut member 230, the second plate 220 approaches the first plate in the upward direction UD due to the screw movement between the second bolt member 260 and the nut member 230 210, or further away from the first plate 210 in the downward direction LD. Thereby, the interval C between the first plate 210 and the second plate 220 secured at the second position P2 of the first bolt member 240 can be precisely adjusted. When the second bolt member 260 rotates, the first bolt member 240 rotates together with the second bolt member 260 in the rotation direction of the second bolt member 260, so that the nut member 230 and the second plate 220 can be moved accurately.

The interval C between the first plate 210 and the second plate 220 installed at the second position P2 of the first bolt member 240 can be adjusted minutely and accurately by the rotation of the second bolt member 260. For example, when the lower end of the probe 102 is worn and the length of the probe 102 becomes shorter, the second plate 220 can be moved so that the interval C is narrowed by the rotation of the second bolt member 260. That is, without disassembling the first plate 210 and the second plate 220, the interval C between the first plate 210 and the second plate 220 can be adjusted by using the second bolt member 260. In this way, the life of the probe card can be increased.

Fig. 16 shows a state where the first bolt member is fixed to the second position by the stopper. After the second bolt member 260 is screwed to the nut member 230, the stopper 250 can be fixed to the first circuit board assembly. For example, by fastening the clamp bolt 252 to the first reinforcement 112 by the stopper 250, the stopper 250 can be attached to the first reinforcement 112 in a state in which it is in contact with the first bolt member 240. The stopper 250 attached to the first reinforcement 112 restrains the first bolt member 240 so that the interval C between the first plate 210 and the second plate 220 can be maintained.

The nut member, the first bolt member, and the second bolt member may have different shapes and arrangements from those shown in the accompanying drawings. As an embodiment, the nut body may have a first portion forming a first thread, and a second portion having a diameter smaller than the diameter of the first portion and extending from the first portion to form a second thread on the outer peripheral surface. In this example, the bolt body of the second bolt member may have a hollow cylindrical shape, and its inner peripheral surface may have a female thread combined with the second thread of the male thread of the nut body. As an embodiment, the inner peripheral surface of the hollow nut body may have a first thread of the female thread and a second thread of the female thread smaller than the diameter of the first thread, and the bolt body of the first bolt member may have the same The male thread of the first thread screwing, and the bolt body of the second bolt member may have a male thread screwing with the second thread on the outer peripheral surface.

As an example, the probe card may include only the first circuit board assembly described above. In this example, the printed circuit board of the first circuit board assembly can be provided with a device capable of fixing the probe head to the printed circuit board.

In the above embodiments, the shape of the stopper and the position of the circuit board assembly where the stopper is installed are only examples. The stopper can have various shapes as long as it can fix the first bolt member to the second position, and can be mounted on a probe card or a probe head by various devices.

The shape of the probe shown in the figure is only an example. In one embodiment, the probe card can be a pogo pin probe or a needle probe. In another embodiment, the probe card may use probes with offset upper and lower ends.

Above, the technical idea of the present invention has been explained by some embodiments and examples shown in the accompanying drawings. However, it should be understood that the present invention can be understood by those with common sense in the technical field to which the present invention belongs. Various replacements, changes and changes are made within the scope of technical ideas and scope. Moreover, such replacements, changes and changes shall be deemed to fall within the scope of the attached invention application patent.

10: Device under inspection 11: Terminal 20: Check the device 21: Probe instrument 22: Test machine 23: Conveying device 100: Probe card 101: Circuit board assembly 102: Probe 110: The first circuit board assembly 111: Printed Circuit Board 112: The first reinforcement 113: The second reinforcement 114: Connector 115: Slot 116: Alignment hole 117: Bolt head seat 118: Alignment hole 119: screw hole 120: The second circuit board assembly 121: Multilayer organic circuit substrate 122: third reinforcement 123: Interpolator 124: Circuit board cover 125: Bolt 126: opening 127: Probe head receiving part 128: Alignment hole 129: Alignment hole 200: Probe head 210: first board 211: 1st probe hole 220: second board 221: 2nd probe hole 230: nut member 231: Nut head 232: Nut body 233: 1st thread 234: 2nd thread 240: The first bolt member 241: Bolt head 242: Bolt body 243: Female thread 244: Bolt Head Seat 245: Through hole 250: stop 251: Through hole 252: clamping bolt 260: The second bolt member 261: Bolt head 262: Bolt body 263: male thread C: interval L1: The first protrusion length L2: 2nd protrusion length LD: downward direction P1: 1st position P2: 2nd position TP1: Thread pitch of the first thread TP2: Thread pitch of the second thread UD: up direction VD: vertical direction

Fig. 1 schematically shows a probe card provided with an embodiment of a probe head. Fig. 2 is a bottom perspective view of a probe card of an embodiment. Fig. 3 is an exploded perspective view from above of the probe card of an embodiment. Fig. 4 is a bottom exploded perspective view of the probe card of an embodiment. Figure 5 is a cross-sectional view taken along line 5-5 of Figure 2; Fig. 6 is a cross-sectional view showing a nut member, a first bolt member, and a second bolt member. Fig. 7 is a perspective view showing an embodiment of a probe card without a probe head. Fig. 8 is a perspective view showing an assembly example of a probe card of an embodiment, which shows a circuit board assembly and a probe head. Fig. 9 shows an example in which the probe is initially inserted into the first and second plates that are in close contact with each other. Fig. 10 is a perspective view showing an assembly example of a probe card according to an embodiment, which shows a probe head mounted on a circuit board assembly. Fig. 11 shows the nut member and the first bolt member of the probe head mounted on the circuit board assembly. FIG. 12 shows an example of holding the probe by the probe head of an embodiment, and shows a situation where the first bolt member is coupled to the nut member at the first position. Fig. 13 is a view similar to Fig. 12, which shows a state where the first bolt member is coupled to the nut member at the second position. FIG. 14 shows another example of holding the probe by the probe head of an embodiment. Fig. 15 is a view similar to Fig. 14 and shows a state where the second bolt member is coupled to the nut member. Fig. 16 shows an embodiment of a probe head combined with a circuit board assembly.

102: Probe

111: Printed Circuit Board

112: The first reinforcement

116: Alignment hole

117: Bolt head seat

118: Alignment hole

119: screw hole

121: Multilayer organic circuit substrate

122: third reinforcement

124: Circuit board cover

128: Alignment hole

129: Alignment hole

210: first board

220: second board

230: nut member

231: Nut head

232: Nut body

240: The first bolt member

241: Bolt head

242: Bolt body

244: Bolt Head Seat

245: Through hole

250: stop

251: Through hole

252: clamping bolt

260: The second bolt member

261: Bolt head

262: Bolt body

C: interval

L2: 2nd protrusion length

LD: downward direction

P2: 2nd position

UD: up direction

VD: vertical direction

Claims (18)

A probe head which is connected to a circuit board assembly of an inspection device in a conductive manner to fix a plurality of probes in contact with a device to be inspected, comprising: a first board, which holds the plurality of probes A second plate, which holds the plurality of probes, and is arranged below the first plate; a nut member, which is coupled to the second plate; and a first bolt member, which is assembled by the circuit board The first position and the second position are screwed to the nut member, the nut member is screwed to the first position so that the first plate and the second plate are in close contact, and the nut member is screwed to the second position, So that the second plate is separated from the first plate, wherein the plurality of probes respectively have a first protruding length protruding from the second plate at the first position of the first bolt member and shorter than the first protruding length And a second protruding length protruding from the second plate at the second position of the first bolt member. The probe head of claim 1, wherein the first plate and the second plate that are in close contact at the first position hold the plurality of probes, and the first plate and the second plate are spaced apart at the second position Keep the multiple probes mentioned above. The probe head of claim 1, wherein the nut member is coupled to the upper surface of the second plate and penetrates the first plate. Such as the probe head of claim 1, which further includes fixing the first bolt member to the second position Set the stopper. The probe head of claim 4, wherein the stopper contacts the first bolt member at the second position to be fixed to the circuit board assembly. The probe head of claim 1, which further includes a second bolt member in contact with the first bolt member and screwed to the nut member by the first bolt member, and the second bolt member is rotated by the nut Member to move the second plate relative to the first plate. The probe head of claim 6, wherein the nut member has a first thread screwed with the first bolt member and a second thread screwed with the second bolt member. Such as the probe head of claim 7, wherein the thread pitch of the second thread is smaller than the thread pitch of the first thread. The probe head of claim 7, wherein the nut member includes a nut body having the first thread formed on the outer peripheral surface and the hollow of the second thread is formed on the inner peripheral surface, and the first bolt member includes supporting the second bolt A bolt head with a hollow in the member, and a bolt body with a hollow in the female thread screwed on the first thread of the nut member on the inner peripheral surface. The probe head of claim 6, wherein the second bolt member is screwed to the nut member at the second position of the first bolt member. A probe card, which is a probe card comprising the following components: a circuit substrate assembly, which is connected to an inspection device in an electrically conductive manner; a plurality of probes, which are in contact with the inspected device; and a probe head, which is connected to The circuit board assembly fixes the plurality of probes; and the probe head includes: a first plate that holds the plurality of probes; a second plate that holds the plurality of probes and is arranged on the first plate Below; a nut member, which is coupled to the second plate; and a first bolt member, which is screwed to the nut member at the first position and the second position by the circuit board assembly, and screwed in the first position On the nut member, the first plate and the second plate are in close contact, and the nut member is screwed to the nut member at the second position so that the second plate is separated from the first plate, wherein the plurality of probes are respectively provided on the The first protruding length of the first bolt member protruding from the second plate at the first position, and the second protruding length shorter than the first protruding length and protruding from the second plate at the second position of the first bolt member Protruding length. The probe card of claim 11, wherein the first board and the second board that are in close contact at the first position hold the plurality of probes, and the first board and the second board are spaced apart at the second position Keep the multiple probes mentioned above. The probe card of claim 11, wherein the nut member is coupled to the upper surface of the second plate and penetrates the first plate. The probe card of claim 11, wherein the probe head further includes a stopper that contacts the first bolt member, is coupled to the circuit board assembly, and fixes the first bolt member to the second position. The probe card of claim 11, wherein the probe head further includes a second bolt member in contact with the first bolt member and screwed to the nut member by the first bolt member, and rotation of the second bolt member The second plate is moved relative to the first plate by the nut member. The probe card of claim 15, wherein the nut member includes a first thread formed on the outer peripheral surface to be screwed with the first bolt member, and a second thread formed on the inner peripheral surface to be screwed with the second bolt member A hollow nut body, and the first bolt member includes a bolt head supporting the hollow of the second bolt member, and a bolt body having a hollow female thread on the inner peripheral surface that is screwed to the first thread of the nut member. Such as the probe card of claim 16, wherein the thread pitch of the second thread is smaller than the thread pitch of the first thread. The probe card of claim 11, wherein the circuit board assembly includes: a first circuit board assembly that is electrically conductively connected to the inspection device; and a second circuit board assembly that is electrically conductive It is coupled to the first circuit board assembly, and the terminal pitch between the terminals of the first circuit board assembly is adjusted to the probe pitch between the plurality of probes.

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