TW201400700A - Power generator and power generation module - Google Patents

Abstract

A power generating apparatus (1) is provided with: a frame-shaped supporting section (11); a cantilever section (12) slidably supported by the supporting section (11); and a section (14), which is provided on one surface (121) side of the cantilever section (12), and which generates an alternating current voltage corresponding to sliding of the cantilever section (12). The power generating apparatus (1) is provided with a flow channel (15), which is provided between the supporting section (11) and the cantilever section (12), and which has a fluid passing through in the thickness direction of the supporting section (11). The power generating apparatus (1) has a leading end portion (12a) of the cantilever section (12) shifted in the direction to be away from the supporting section (11) from a base end portion (12b) of the cantilever section (12).

Description

Power generation unit and power generation module

The invention relates to a power generation device and a power generation module.

In recent years, power generation devices that convert vibration energy into electric energy have attracted attention in fields such as energy harvesting.

As such a power generating device, for example, a power generating element having the configuration shown in FIG. 9 is proposed in Japanese Patent Application Laid-Open No. 2011-91319.

The power generating element includes a cantilever forming substrate 120 having a frame portion (support portion) 125 and a cantilever portion 126 that rotatably supports the frame portion 125, and a piezoelectric conversion portion 124 that responds to the vibration of the cantilever portion 126. Generate an AC voltage. The piezoelectric conversion portion 124 is formed in the cantilever portion 126 on one surface side of the cantilever forming substrate 120. Further, the cantilever forming substrate 120 is integrally provided with a weight portion 123 at a front end portion of the cantilever portion 126.

The frame portion 125, the cantilever portion 126, and the weight portion 123 are formed using the element forming substrate 120a. As the element forming substrate 120a, a single crystal germanium substrate, a polycrystalline germanium substrate, an SOI (Silicon on Insulator) substrate, a metal substrate, or the like is described.

The piezoelectric conversion portion 124 is configured by a lower electrode 124a and a piezoelectric layer 124b. The side of the lower electrode 124a opposite to the side of the cantilever portion 126; and the upper electrode 124c are formed on the side of the piezoelectric layer 124b opposite to the side of the lower electrode 124a.

Further, on the one surface side of the cantilever forming substrate 120, the lower electrode pad 127a and the upper electrode pad 127c are electrically connected to the lower electrode 124a and the upper electrode 124c via the connection wirings 126a and 126c, respectively.

In the case of the inventors of the present invention, it is considered that the power generating element is generated by a fluid. In other words, the inventors of the present invention have investigated that the power generating element is disposed in a flow path of a fluid, and the power generating element is generated by a fluid without external vibration.

However, in the above-described power generating element, it is difficult to generate electricity using a fluid.

In view of the above, an object of the present invention is to provide a power generating device and a power generating module that can generate electricity by using a fluid.

The power generating device (1) of the present invention includes: a frame-shaped support portion (11); the cantilever portion (12) is rotatably supported by the support portion (11); and the power generating portion (14) is provided One side (121) side of the cantilever portion (12) is responsive to vibration of the cantilever portion (12) to generate an alternating voltage; and a flow path (15) is disposed between the support portion (11) and the cantilever portion (12) The fluid (F) is allowed to pass along the thickness direction of the support portion (11); and the front end portion (12a) of the cantilever portion (12) is closer to the base end portion of the cantilever portion (12) (12b) ) is further shifted away from the direction of the support portion (12a).

In one embodiment of the present invention, the power generating unit (14) includes a first electrode (14a) provided on one side (121) side of the cantilever portion (12) in the thickness direction, and a second electrode (14c) disposed on the second electrode (14c) The other surface (122) side of the cantilever portion (12); and a piezoelectric film (14b) disposed between the first electrode (14a) and the second electrode (14c); by the piezoelectric film (14b) Inside The stress is such that the front end portion (12a) of the cantilever portion (12) is more offset from the base portion (12b) in a direction away from the support portion (11).

In one embodiment of the present invention, the power generating unit (14) includes a first electrode (14a) provided on one side (121) side of the cantilever portion (12) in the thickness direction, and a second electrode (14c) disposed on the second electrode (14c) The other surface (122) side of the cantilever portion (12); and the piezoelectric film (14b) are disposed between the first electrode (14a) and the second electrode (14c); and are disposed on the cantilever portion ( 12) The stress control film (19) on the one side (121) side shifts the front end portion (12a) of the cantilever portion away from the support portion (11) from the base end portion (12b) It is better.

In an embodiment of the present invention, the cantilever portion (12) is disposed obliquely to the support portion (11), and the front end portion (12a) of the cantilever portion is further moved toward the base end portion (12b) The direction shift away from the support portion (11) is preferred.

In an embodiment of the present invention, the support portion (11) is preferably formed such that a cross-sectional area of the flow path (15) is widened in the thickness direction of both sides of the support portion in the thickness direction.

A power generator (1) according to an embodiment of the present invention includes a power generating element (1a) and a housing member (1b). The power generating element (1a) includes the support portion (11), the cantilever portion (12), the power generating portion (14), and the flow path. The storage member (1b) is formed to accommodate the power generating element (1a). The storage member (1b) includes an inflow port (1ba) into which the fluid (F) flows, and an outflow port (1bb) through which the fluid (F) flows. The power generating element (1a) is disposed between the inflow port (1ba) and the outflow port (1bb). The storage member (1b) is formed such that the opening area becomes smaller as the power generating element (1a) approaches from the inflow port (1b), and the power generating element (1a) approaches the outlet (1bb). The shape in which the opening area becomes large is preferable.

In an embodiment of the present invention, the power generation module (A1) preferably includes: the power generation device (1); and a fluid control unit (3) disposed outside the power generation device (1) and capable of controlling the flow of the fluid In order to increase the flow rate of the fluid (F) flowing through the flow path.

In the power generator of the present invention, the front end portion of the cantilever portion is shifted from the base end portion of the cantilever portion away from the support portion, so that the fluid can be used for power generation.

In the power generation module of the present invention, power generation can be performed using a fluid.

1‧‧‧Power generation unit

1a‧‧‧Power generation components

1b‧‧‧ storage components

1ba‧‧‧flow entrance

1bb‧‧‧Exit

3‧‧‧ Fluid Control Department

3a‧‧‧Inhalation

3b‧‧‧ blowing out

4‧‧‧ catheter

10‧‧‧Substrate

10a‧‧‧矽 substrate

10b‧‧‧embedded oxide film

10c‧‧‧ layer

10d‧‧‧slit

10f‧‧‧ space

11‧‧‧Support Department

11a‧‧‧ Opening

11b‧‧‧1st end

11f‧‧‧2nd end

12‧‧‧Cantilever

12a‧‧‧ front end

12b‧‧‧ base end

14‧‧‧Power Generation Department

14a‧‧‧1st electrode

14b‧‧‧Piezoelectric film

14c‧‧‧2nd electrode

15‧‧‧Flow

16a‧‧‧1st pad

16c‧‧‧2nd pad

17a‧‧‧1st wiring department

17c‧‧‧2nd wiring department

18a‧‧‧1st insulating film

18aa‧‧‧1st side

18b‧‧‧2nd insulating film

18bb‧‧‧ face on the 2nd side

19‧‧‧ Stress Control Film

20‧‧‧beam components

21‧‧‧Installation Department

21a‧‧‧Sloping surface

101, 111, 121, 141‧ ‧ first side

102, 112, 122, 142‧‧‧ second side

120‧‧‧Cantilever forming substrate

120a‧‧‧Component forming substrate

125‧‧‧ Frame Department

126‧‧‧Cantilever

123‧‧‧Hammer

124‧‧‧Cantilever

124a‧‧‧lower electrode

124b‧‧‧Piezoelectric layer

124c‧‧‧ upper electrode

126a, 126c‧‧‧ connection wiring

127a‧‧‧Tider for lower electrode

127c‧‧‧Upper electrode pads

A1‧‧‧Power Module

F‧‧‧ fluid

R‧‧‧ area

T‧‧‧

Fig. 1A is a schematic plan view of a power generating device according to a first embodiment.

Fig. 1B is a schematic cross-sectional view taken along line A-A' of Fig. 1A.

Fig. 1C is a schematic cross-sectional view taken along line B-B' of Fig. 1A.

Fig. 1D is a cross-sectional view of an essential part of the power generating apparatus of Fig. 1A.

Fig. 2A is a schematic plan view of a power generating device according to a second embodiment.

Fig. 2B is a schematic cross-sectional view taken along line A-A' of Fig. 2A.

Fig. 2C is a schematic cross-sectional view taken along line B-B' of Fig. 2A.

Fig. 2D is a cross-sectional view of an essential part of the power generating device of Fig. 2A.

Fig. 3 is a schematic cross-sectional view showing a power generator of the third embodiment.

Fig. 4A is a schematic plan view of the power generating device of the fourth embodiment.

Fig. 4B is a schematic cross-sectional view taken along line A-A' of Fig. 4A.

Fig. 4C is a schematic cross-sectional view taken along line B-B' of Fig. 4A.

Fig. 4D is a cross-sectional view of an essential part of the power generating apparatus of Fig. 4A.

Fig. 5A is a schematic cross-sectional view showing a power generator of a fifth embodiment.

Fig. 5B is another schematic cross-sectional view of the power generating device of the fifth embodiment.

Fig. 6A is a schematic cross-sectional view showing a power generator of a sixth embodiment.

Fig. 6B is another schematic cross-sectional view of the power generating device of the sixth embodiment.

Fig. 7 is an explanatory view showing a usage mode of the power generating module of the seventh embodiment.

Fig. 8 is an explanatory view showing a usage mode of the power module of the eighth embodiment.

Fig. 9A is a schematic plan view of a power generating element of a conventional example.

Fig. 9B is a schematic cross-sectional view taken along line A-A' of Fig. 9A.

[Best Mode for Carrying Out the Invention]

Hereinafter, a power generating device of this embodiment will be described with reference to Figs. 1A to 1D.

The power generator 1 includes a frame-shaped support portion 11; the cantilever portion 12 is rotatably supported by the support portion 11; and the piezoelectric transducer portion 14 is provided in the cantilever portion 12, and is generated in response to the vibration of the cantilever portion 12. AC voltage. Further, the power generator 1 includes a flow path 15 which is provided between the support portion 11 and the cantilever portion 12 to allow fluid to pass through the thickness direction of the support portion 11 (vertical direction in FIGS. 1B and C). Further, in the power generating device 1, the front end portion 12a of the cantilever portion 12 is shifted from the base end portion 12b of the cantilever portion 12 away from the support portion 11.

In other words, the support portion 11 has a predetermined thickness in the first direction D1 (thickness direction). Further, the support portion 11 extends in the second direction D2 (for example, the horizontal direction in FIG. 1C) perpendicular to the first direction D1, and has an opening 11a. The support portion 11 has a first end portion 11b and a second end portion 11f on the first and second sides in the second direction D2. In the example of Fig. 1A, the support portion 11 is formed in a rectangular shape. Further, the support portion 11 has one surface (first surface) 111 and another surface (second surface) 112 on the first and second sides in the first direction D1. The cantilever portion 12 has one surface (first surface) 121 and another surface (second surface) 122 on the first and second sides in the first direction D1. Further, the cantilever portion 12 has a base end portion 12b (supported end) and a distal end portion 12a (free end) on the first and second sides in the first direction D1, respectively, and is formed in a rectangular shape in the example of FIG. 1A. Further, the supported end 12b is supported by the first end portion 11b such that the first surface 121 of the supported end 12b communicates with the first surface 111 of the first end portion 11b. Thereby, the cantilever portion 12 and the support portion 11 are integrally formed. Further, the free end 12a of the cantilever portion 12 is warped from the first surface 111 of the second end portion 11f toward the first side (upper side in FIG. 1C) of the first direction D1.

Next, each component of the power generating device 1 will be described in detail.

The power generating element 1 is manufactured by a manufacturing technique of MEMS (micro electro mechanical systems).

In the power generating device 1, the support portion 11 and the cantilever portion 12 are formed from the substrate 10. In the power generator 1 , the substrate 10 has one surface (first surface) 101 and another surface (second surface) 102 in the first direction D1 . The cantilever portion 12 is formed on the first surface 101 side of the substrate 10.

Here, the first surface 101 of the substrate 10 may correspond to the first surface 111 of the support portion 11 and the first surface 121 of the cantilever portion 12.

Further, in the power generation device 1, the power generation unit 14 is formed in a single piece on the substrate 10. In other words, the power generation unit 14 is located on the side of the base end portion 12b of the cantilever portion 12, and is formed on the first surface 121 side of the cantilever portion 12.

The power generation unit 14 is formed on the first surface 121 side of the cantilever portion 12 (on the side of the first surface 101 of the substrate 10). The power generation unit 14 has a first electrode (lower electrode) 14a, a piezoelectric layer 14b, and a second electrode (upper electrode) 14c in this order from the side of the cantilever portion 12. The first electrode 14a is formed on the first surface 121 side of the cantilever portion 12. The piezoelectric layer 14b is formed on the first electrode 14a. The second electrode 14c is formed on the piezoelectric layer 14b. In short, the power generation unit 14 includes a piezoelectric layer 14b and first and second electrodes 14a and 14c that face each other with the piezoelectric layer 14b interposed therebetween in the thickness direction.

As the substrate 10, an SOI substrate in which a tantalum layer 10c is formed on an embedded oxide film 10b made of a tantalum oxide film on a tantalum substrate 10a is used. Although the first surface 101 of the substrate 10 has a (100) plane, the present invention is not limited thereto, and may be, for example, a (110) plane.

The support portion 11 is formed of a tantalum substrate 10a, an embedded oxide film 10b, and a tantalum layer 10c in the SOI substrate. On the other hand, the cantilever portion 12 is formed of the embedded oxide film 10b and the ruthenium layer 10c in the SOI substrate, and is thinner than the support portion 11, and has flexibility. This cantilever portion 12 has elasticity.

The power generation device 1 electrically insulates the substrate 10 from the power generation portion 14 by the first insulating film 18a formed of a hafnium oxide film formed on the first surface 101 side of the substrate 10. In other words, the first insulating film 18a is formed on the first surface 101 side of the substrate 10 so that the substrate 10 and the power generating portion 14 are electrically insulated. As the first insulating film 18a, an insulating film made of a hafnium oxide film or the like is exemplified. In addition, In the power generating device 1, the second insulating film 18b is formed on the second surface 102 side of the substrate 10. As the second insulating film 18b, an insulating film made of a hafnium oxide film or the like is exemplified. The first insulating film 18a and the second insulating film 18b described above are formed by a thermal oxidation method. The method of forming the first insulating film 18a and the second insulating film 18b is not limited to a thermal oxidation method, and may be a CVD (Chemical Vapor Deposition) method. When the first insulating film 18a and the second insulating film 18b are formed as described above, the first surface 18aa of the first insulating film 18a in the first direction D1 corresponds to the first surface 111 of the support portion 11, and the second insulating film The second surface 18bb of the first direction D1 of 18b corresponds to the second surface 112 of the support portion 11. However, the second insulating film 18b is selectively provided and need not be provided. As described above, when the second insulating film 18b is not provided on the second surface 102 side of the substrate 10, the second surface 102 of the substrate 10 corresponds to the second surface 112 of the support portion 11.

The substrate 10 is not limited to the SOI substrate, and a single crystal germanium substrate, a polycrystalline germanium substrate, a magnesium oxide (MgO) substrate, a metal substrate, a glass substrate, a polymer substrate, or the like may be used. When an insulating substrate such as a MgO substrate, a glass substrate, or a polymer substrate is used as the substrate 10, the first insulating film 18a and the second insulating film 18b are selectively provided, and need not be provided. In this manner, when the first insulating film 18a is not provided on the first surface 101 side of the substrate 10, and the second insulating film 18b is not provided on the second surface 102 side of the substrate 10, the first surface 101 and the second surface of the substrate 10 are not provided. The faces 102 correspond to the first surface 111 and the second surface 112 of the support portion 11, respectively.

The support portion 11 has a frame shape, and a rectangular frame shape is preferable. Therefore, when the power generation device 1 is manufactured, when the following manufacturing method is employed, the operability of the dicing step can be improved: the wafer (here, the SOI wafer) which is the basis of the support portion 11 and the cantilever portion 12 is prepared, and A wafer forms a previous step of the majority of the power generating device 1, and is separated into the respective power generating devices 1 in the subsequent step.

Further, the support portion 11 preferably has a rectangular outer shape, but the inner circumferential shape is not limited to a rectangular shape, and may be, for example, a polygonal shape, a circular shape, or an elliptical shape other than a rectangular shape. Further, the outer peripheral shape of the support portion 11 may be a shape other than a rectangle.

In the power generating device 1, the cantilever portion 12 is disposed inside the support portion 11 in plan view. In the power generating device 1, the cantilever portion is formed by forming a slit 10d in a U-shape surrounding the cantilever portion 12 on the substrate 10. The portion other than the portion connected to the support portion 11 in 12 is spatially separated from the support portion 11. Thereby, the cantilever portion 12 is formed into a rectangular shape in plan view. In the power generating device 1, the slit 10d constitutes the flow path 15.

That is, the cantilever portion 12 is formed in a rectangular plate shape. In the cantilever portion 12, the distal end portion 12a is arbitrarily swingable at the second end portion 11f of the support portion 11. Further, the base end portion 12b of the cantilever portion 12 and the first end portion 11b of the support portion 11 are integrally supported so that the first surface 121 of the cantilever portion 12 communicates with the first surface 111 of the support portion 11. Further, a gap (flow path 15) is formed between the second end portion 11f and the tip end portion 12a. Therefore, the opening amount (opening area) of the gap (outlet) changes in response to the swing of the cantilever portion 12.

As described above, the first surface 121 of the proximal end portion 12b and the first surface 111 of the first end portion 11b are flush with each other, and the cantilever portion 12 and the support portion 11 are integrally formed, and the first surface 121 of the cantilever portion 12 is formed. It is continuous with the first surface 111 of the support unit 11 without any difference.

Therefore, in the power generating device 1, the piezoelectric layer 14b of the power generating portion 14 receives the stress by the vibration of the cantilever portion 12, and the second electrode 14c and the first electrode 14a are displaced from each other, and an alternating voltage is generated in the power generating portion 14. In short, the power generation device 1 is a vibration type power generation element in which the power generation unit 14 generates electric power by the piezoelectric effect of the piezoelectric material.

The planar shape of the piezoelectric layer 14b is formed to be slightly smaller than the planar shape of the first electrode 14a and slightly larger than the planar shape of the second electrode 14c. Here, in the power generating device 1, the first electrode 14a, the piezoelectric layer 14b, and the second electrode 14c are formed in the second direction D2 (for example, the horizontal direction in FIG. 1A) in the direction in which the support portion 11 and the cantilever portion 12 are connected. The end T of the overlapping region R on the support portion 11 side (the base end portion 12b side) is aligned with the boundary between the support portion 11 and the cantilever portion 12. When the cantilever portion 12 vibrates, the stress on the cantilever portion 12 is concentrated on the boundary between the cantilever portion 12 and the support portion 11 (first end portion 11b). Therefore, the power generation unit 1 can generate a power generation unit that is higher in stress when the boom portion 12 vibrates than when the end T on the side of the support portion 11 of the region R is closer to the side of the cantilever portion 12 than the boundary R. The area of 14 is increased to increase power generation efficiency.

The AC voltage generated by the power generation unit 14 is a sinusoidal AC voltage that responds to the vibration of the piezoelectric layer 14b. Here, it is assumed that the power generation unit 14 of the power generation device 1 generates power by self-excited vibration generated by flowing a fluid through the flow path 15 . The resonance frequency of the power generation device 1 is determined by the structural parameters and materials of the movable portion including the cantilever portion 12 and the power generation portion 14. Examples of the fluid flowing through the flow path 15 include air, a gas, a mixed gas of air and gas, a liquid, and the like.

The power generating device 1 is provided in the support portion 11 such that the first pad 16a is electrically connected to the first electrode 14a via the first wiring portion 17a, and the second pad 16c is provided via the second wiring portion 17c and the second electrode 14c. Electrical connection. As the material of the first wiring portion 17a, the second wiring portion 17c, the first bonding pad 16a, and the second bonding pad 16c, Au may be used. However, the present invention is not limited thereto, and may be, for example, Mo, Al, Pt, Ir, or the like. . Further, the materials of the first wiring portion 17a, the second wiring portion 17c, the first pad 16a, and the second pad 16c are not limited to the same material, and different materials may be used. In addition, the first wiring portion 17a, the second wiring portion 17c, the first bonding pad 16a, and the second bonding pad 16c are not limited to a single layer structure, and may have a multilayer structure of two or more layers.

In the power generation device 1, an insulating layer (not shown) that prevents short-circuiting between the second wiring portion 17c and the first electrode 14a is provided between the second wiring portion 17c and the first electrode 14a. Although the insulating layer is formed of a hafnium oxide film, it is not limited to the hafnium oxide film, and may be formed, for example, by a tantalum nitride film. Further, the power generating device 1 may be provided with a suitable insulating film in accordance with the material of the substrate 10.

The piezoelectric material of the piezoelectric layer 14b is PZT (Pb(Zr, Ti)O ₃ ), but is not limited thereto, and may be, for example, PZT-PMN (Pb(Mn, Nb)O ₃ ) or added. PZT of other impurities. In addition, the piezoelectric material may be AlN, ZnO, KNN (K _0.5 Na _0.5 NbO ₃ ), or added impurities (for example, Li, Nb, Ta, Sb, Cu) to KN (KNbO ₃ ), NN (NaNbO ₃ ), and KNN. Piezoelectric materials, etc.). Further, in the power generating device 1 of the present embodiment, the piezoelectric layer 14b is formed of a piezoelectric film.

Although Pt is used as the material of the first electrode 14a, it is not limited thereto, and may be, for example, Au, Al, Ir or the like. Further, although Au may be used as the material of the second electrode 14c, it is not limited thereto, and may be, for example, Mo, Al, Pt, Ir or the like.

In the power generating device 1, the thickness of the first electrode 14a is set to 500 nm, the thickness of the piezoelectric layer 14b is set to 3000 nm, and the thickness of the second electrode 14c is set to 500 nm. However, these values are merely examples, and are not particularly limited. .

The power generating element 1 may have a structure in which a buffer layer is provided between the substrate 10 and the first electrode 14a. The material of the buffer layer may be appropriately selected according to the piezoelectric material of the piezoelectric layer 14b. When the piezoelectric material of the piezoelectric layer 14b is PZT, for example, SrRuO ₃ , (Pb, La)TiO ₃ , PbTiO ₃ , MgO, LaNiO ₃ and the like. Further, the buffer layer may be composed of, for example, a laminated film of a Pt film and a SrRuO ₃ film. Further, by providing the buffer layer, the crystallinity of the piezoelectric layer 14b can be improved.

In addition, the configuration of the power generation device 1 is not limited to the above-described example. For example, the size of the power generation unit 14 in the third direction D3 (for example, the vertical direction of FIG. 1A) in the width direction of the cantilever portion 12 can be reduced. In the first surface 121 side of the one cantilever portion 12, a plurality of power generating portions 14 are arranged side by side along the third direction D3. In this case, one end (first connection end) and the other end (second connection end) of the series circuit of the plurality of power generation units 14 are electrically connected to the first pad 16a and the second pad 16c, respectively. connection.

Next, an example of a method of manufacturing the power generator 1 will be briefly described.

When the power generating device 1 is manufactured, first, the substrate 10 made of an SOI substrate is prepared, and then an insulating film forming step is performed. In the insulating film forming step, the first insulating film 18a and the second insulating film 18b made of a hafnium oxide film are formed on the first surface 101 side and the second surface 102 side of the substrate 10 by a thermal oxidation method or the like. In the insulating film forming step, a thermal oxidation method is employed as the method of forming the first insulating film 18a and the second insulating film 18b. However, the present invention is not limited thereto, and a CVD method or the like may be employed.

After the insulating film forming step, a first conductive layer forming step of forming the first conductive layer which is the basis of the first electrode 14a and the first wiring portion 17a is performed on the entire surface of the first surface 101 side of the substrate 10, and then A piezoelectric material layer forming step of forming a piezoelectric material layer which is the basis of the piezoelectric layer 14b is applied. As a method of forming the first conductive layer in the first conductive layer forming step, Although the sputtering method is employed, the present invention is not limited thereto, and for example, a CVD method, a vapor deposition method, or the like may be employed. Further, the method of forming the piezoelectric material layer in the piezoelectric material layer forming step is not limited thereto, and a CVD method or a sol-gel method may be employed.

After the piezoelectric material layer forming step, a piezoelectric material layer patterning step of patterning the piezoelectric material layer into a predetermined shape of the piezoelectric layer is performed, and then the first conductive layer is patterned into the first electrode 14a and the first electrode layer A first conductive layer patterning step of a predetermined shape of the wiring portion 17a. The piezoelectric material layer is patterned by patterning the piezoelectric material layer using lithography and etching techniques. Further, in the first conductive layer patterning step, the first conductive layer is patterned by a lithography technique and an etching technique.

After the first conductive layer patterning step, an insulating layer forming step of forming the insulating layer 18a on the first surface 101 side of the substrate 10 is performed. After that, the second conductive layer, which is the basis of the second electrode 14c and the second wiring portion 17c, is formed on the entire surface of the first surface 101 side of the substrate 10, and then the second conductive layer is applied. The layer is patterned into a second conductive layer patterning step of a predetermined shape of the second electrode 14c and the second wiring portion 17c. Although the sputtering method is used as the method of forming the second conductive layer in the second conductive layer forming step, the sputtering method is not limited thereto, and for example, a CVD method, a vapor deposition method, or the like may be employed. Further, in the second conductive layer patterning step, the second conductive layer is patterned by a lithography technique and an etching technique.

After the second conductive layer patterning step described above, the third conductive layer that is the basis of the first pad 16a and the second pad 16c is applied to the entire surface of the substrate 10 on the first surface 101 side. 3. The conductive layer forming step, and then the third conductive layer patterning step of patterning the third conductive layer into a predetermined shape of the first pad 16a and the second pad 16c.

Then, from the side of the first surface 101 of the substrate 10, the support portion 11 and the portion other than the cantilever portion 12 (predetermined region for forming the slit 10d) are etched to have a thickness corresponding to the thickness of the cantilever portion 12 to form a groove. Ditch formation step. Then, a cantilever portion forming step of forming the cantilever portion 12 together with the support portion 11 from the side of the second surface 102 of the substrate 10 by the etching support portion 11 is performed to obtain the power generating device 1. In the groove forming step, the groove is formed by a lithography technique, an etching technique, or the like. Further, the above-described cantilever portion forming step utilizes a lithography technique, an etching technique, or the like, The cantilever portion 12 is formed together with the support portion 11. Each etching of the groove forming step and the cantilever portion forming step is dry etching using a vertically deep inductively coupled plasma type dry etching device. Further, in this cantilever forming step, the slit 10d is formed.

When the power generation device 1 is manufactured, the wafer level is applied until the end of the cantilever portion forming step, and then the respective power generating elements 1 are divided by performing a cutting step.

As described above, the power generating device 1 includes the flow path 15 which is provided between the support portion 11 and the cantilever portion 12 so as to allow the fluid to pass in the thickness direction of the support portion 11; the front end portion 12a of the cantilever portion 12 is higher than the cantilever portion 12 The base end portion 12b is further displaced away from the support portion 11. Here, the initial offset G1 (refer to FIG. 1B) is preferably 200 μm or more. In FIG. 1B, the intersection of the intermediate surface of the cantilever portion 12 and the front end surface of the cantilever portion 12 in the thickness direction of the support portion 11 is the initial offset G1.

In the initial state in which the external vibration and the fluid are not applied, the cantilever portion 12 has the front end portion 12a of the cantilever portion 12 further away from the support portion 11 than the base end portion 12b of the cantilever portion 12 as shown in Figs. 1B and 1C. Offset. Here, the cantilever portion 12 is curved such that the first surface 121 side has a concave curved surface and the second surface 122 side has a convex curved surface. In the power generating device 1 of the present embodiment, the front end portion 12a of the cantilever portion 12 is shifted from the base end portion 12b away from the support portion 11 by the internal stress of the piezoelectric film constituting the piezoelectric layer 14b. When the piezoelectric film is formed into a film by, for example, a sputtering method or a CVD method, the internal stress of the piezoelectric film can be adjusted by appropriately setting process conditions such as gas pressure and temperature.

Here, the operation of the power generating device 1 of the present embodiment will be described.

In the power generating device 1 of the present embodiment, the flow direction of the fluid coincides with the thickness direction of the support portion 11, so that the first surface 101 side of the substrate 10 becomes the upstream side of the fluid, and the second surface 102 side of the substrate 10 becomes the fluid. The downstream side is configured to use. In the power generating device 1, since the flow velocity of the fluid flowing from the upstream side toward the power generating device 1 through the flow path 15 is increased, the space surrounded by the second surface 122 side of the cantilever portion 12 and the inner side surface of the support portion 11 10f pressure drop, cantilever The front end portion 12a of the portion 12 is shifted toward the direction of the support portion 11 (the side of the space 10f). Then, in the power generating device 1, the first surface 121 of the cantilever portion 12 and the first surface 111 of the support portion 11 are flush with each other, and the first surface 121 side of the cantilever portion 12 and the first surface 122 side are The pressure difference disappears. Therefore, the front end portion 12a of the cantilever portion 12 is shifted in the direction of returning to the original position by the elastic force of the cantilever portion 12. In the power generating device 1, the cantilever portion 12 is self-excited by repeating these operations, so that the power generating portion 14 generates electric power.

The power generating device 1 of the present embodiment includes the flow path 15 as described above, and is provided between the support portion 11 and the cantilever portion 12 so that the fluid can pass through the thickness direction of the support portion 11. Further, in the power generating device 1 of the present embodiment, the front end portion 12a of the cantilever portion 12 is shifted from the base end portion 12b of the cantilever portion 12 away from the support portion 11. Thereby, the power generating device 1 can have a pressure difference between the first surface 121 side and the second surface 122 side of the cantilever portion 12 by the flow (air flow) of the fluid passing through the flow path 15, and the cantilever portion 12 The elasticity produces self-excited vibration, so fluid can be used to generate electricity.

Further, the fluid passing through the flow path 15 may be air, a gas, a mixed gas of air and gas, a liquid, or the like.

(Embodiment 2)

Hereinafter, the power generating device 1 of the present embodiment will be described with reference to Figs. 2A to 2D. In the power generating device 1 of the present embodiment, the front end portion 12a of the cantilever portion 12 is further away from the support portion 11 than the base end portion 12b by the stress control film 19 provided on the first surface 121 side of the cantilever portion 12. Offset. In other words, the stress control film 19 is provided on the first surface 121 side of the cantilever portion 12, and the front end portion 12a of the cantilever portion 12 is warped from the first surface 111 of the support portion 11 by the stress control film 19. The same components as those in the first embodiment are denoted by the same reference numerals and will not be described.

The stress control film 19 is formed on the side opposite to the piezoelectric layer 14b side of the second electrode 14c. The stress control film 19 is formed of a SiO ₂ film, but is not limited thereto, and is formed of, for example, a Si ₃ N ₄ film or the like. Further, the stress control film 19 can be formed between the cantilever portion 12 and the first electrode 14a. Further, the stress control film 19 may be formed on the second surface 122 side of the cantilever portion 12. Further, as shown in FIG. 2C, the stress control film 19 is formed so as to cover the entire surface of the piezoelectric conversion portion 14 on the first surface 121 side of the cantilever portion 12. However, the stress control film 19 may cover only the piezoelectric conversion portion. The formation of one of the 14 parts.

In the power generating device 1 of the present embodiment, as in the first embodiment, the pressure difference between the first surface 121 side and the second surface 122 side of the cantilever portion 12 caused by the flow of the fluid passing through the flow path 15 can be obtained. And the elasticity of the cantilever portion 12 generates self-excited vibration, so that fluid can be used for power generation.

Further, in the power generator 1 of the present embodiment, the stress acting on the cantilever portion 12 due to the stress control film 19 and the internal stress of the piezoelectric layer 14b of the piezoelectric thin film can be used to make the front end of the cantilever portion 12 The portion 12a is shifted from the base end portion 12b away from the first surface 111 of the support portion 11.

(Embodiment 3)

Hereinafter, the power generating device 1 of the present embodiment will be described with reference to Fig. 3 . In the power generating device 1 of the present embodiment, the cantilever portion 12 is disposed obliquely to the first surface 111 of the support portion 11, so that the front end portion 12a of the cantilever portion 12 is further away from the support portion 11 than the base end portion 12b. shift. In other words, in the power generator 1 of the present embodiment, the cantilever portion 12 is inclined to the first surface 111 (the top surface in FIG. 3) of the support portion 11 perpendicular to the thickness direction of the support portion 11.

In other words, the power generator 1 of the present embodiment includes the frame-shaped support portion 11 having the opening 11a and the cantilever portion 12. The cantilever portion 12 is provided at a predetermined interval, and is disposed on the first side of the first direction D1 from the first surface 111 of the support portion 11. In the present embodiment, the cantilever portion 12 is supported by the support portion 11 (first end portion 11b) so as to face the opening 11a (the first surface 111 of the support portion 11). The cantilever portion 12 has a base end portion 12b and a front end portion 12a. The cantilever portion 12 is inclined to the first surface 111 of the support portion 11, and the distal end portion 12a side is further away from the first surface 111 of the support portion 11 than the proximal end portion 12b side. Further, by supporting the proximal end portion 12b on the first surface 111 side of the support portion 11, the front end portion 12a of the cantilever portion 12 can be arbitrarily oscillated.

The same components as those in the first embodiment are denoted by the same reference numerals and will not be described.

The power generating device 1 of the first embodiment shown in FIG. 1A to FIG. 1D is a thin film type piezoelectric vibration power generating device manufactured by the MEMS manufacturing technique, and the first electrode 14a, the piezoelectric layer 14b, and the second electrode 14c. Each consists of a first metal thin film, a piezoelectric thin film, and a second metal thin film.

On the other hand, as shown in Fig. 3, the power generator 1 of the present embodiment is a base type piezoelectric vibration power generator, and the base is used as the piezoelectric layer 14b, and the other surface in the thickness direction of the piezoelectric layer 14b is used. The first electrode 14a made of a metal film is formed on the (second surface) 142 side, and the beam member 20 of the second electrode 14c made of a metal film is formed on one surface (first surface) 141 side, and the support portion 11 is inclined. Configuration. In other words, the power generation unit 14 includes the piezoelectric layer 14b, the first electrode 14a, and the second electrode 14c. The piezoelectric layer 14b has a first surface 141 and a second surface 142 on the first and second sides in the first direction D1. The second electrode 14c is formed on the first surface 141 side of the piezoelectric layer 14b, and the first electrode 14a is formed on the second surface 142 side of the piezoelectric layer 14b. Each of the first electrode 14a and the second electrode 14c is formed of a metal film. The power generation unit 14 is formed in the beam member 20 and is disposed to be inclined to the first surface 111 of the support portion 11.

The mounting base portion 21 having a desired angle is provided on the first surface 111 side of the support portion 11. This mounting base portion 21 has an inclined surface 21a. The inclined surface 21a is fixed to the second surface 142 side of the beam member 20. Specifically, the beam member 20 may be fixed to the mounting base portion 21 provided on the first surface 111 of the support portion 11 by, for example, an adhesive. The mounting table portion 21 has an inclined surface 21a for arranging the beam member 20 at a desired angle. Further, in the power generating device 1 of the present embodiment, the piezoelectric layer 14b also serves as the cantilever portion 12. Further, the mounting portion 21 may be fixed to the support portion 11 by, for example, an adhesive or the like.

The support portion 11 may be formed by, for example, machining a metal plate, or may be formed of a resin molded article, or may be formed by processing the substrate 10 by MEMS manufacturing techniques or the like in the same manner as in the first embodiment. By.

The power generating device 1 of the present embodiment can pass through the flow path 15 as in the first embodiment. The pressure difference between the first surface 121 side and the second surface 122 side of the cantilever portion 12 caused by the flow of the fluid and the elasticity of the cantilever portion 12 generate self-excited vibration, so that the fluid can be used for power generation.

(Embodiment 4)

Hereinafter, the power generating device 1 of the present embodiment will be described with reference to Figs. 4A to 4D. In the power generating device 1 of the present embodiment, the shape of the inner side surface of the support portion 11 is different from that of the power generating device 1 of the first embodiment. The same components as those in the first embodiment are denoted by the same reference numerals and will not be described.

The support portion 11 of the power generator 1 of the present embodiment is formed such that the cross-sectional area of the flow path 15 is larger than the cross-sectional area of the flow path 15 located in the thickness direction (the first direction D1) of the support portion 11 in the middle of the thickness direction. Widened shape.

In the power generation device 1 of the present embodiment, in the manufacturing method described in the first embodiment, the above-described support can be realized by performing the anisotropic etching by the alkali solution in each of the etching process of the groove forming step and the cantilever portion forming step. The shape of the portion 11 and the flow path 15.

In the power generating device 1 of the present embodiment, the support portion 11 has a shape in which the cross-sectional area of the flow path 15 is widened in the thickness direction of both sides of the support portion 11 in the thickness direction, thereby increasing the passage path. The flow of fluid of 15. Therefore, the power generation device 1 can increase the pressure difference between the first surface 121 side and the second surface 122 side of the cantilever portion 12 caused by the fluid passing through the flow path 15, and can generate electricity more efficiently.

Further, in other embodiments, the shapes of the support portion 11 and the flow path 15 of the present embodiment may be employed.

(Embodiment 5)

Hereinafter, the power generating device 1 of the present embodiment will be described with reference to Figs. 5A and 5B. The power generating device 1 of the present embodiment includes a power generating element 1a, and includes a support portion 11, a cantilever portion 12, a power generating portion 14, and a flow path 15, and a housing member 1b for housing the power generating element 1a. The same components as those in the first embodiment are denoted by the same reference numerals and will not be described.

The configuration of the power generating element 1a of the first embodiment is the same as that of the power generating device 1 of the first embodiment. Therefore, the same components as those of the first embodiment will be denoted by the same reference numerals and will not be described. The power generating element 1a is not limited to the power generating device 1 of the first embodiment, and may have the same configuration as the power generating device 1 of any of the second to fourth embodiments.

The power generating device 1 of the present embodiment includes a power generating element 1a, and includes a support portion 11, a cantilever portion 12, a power generating portion 14, and a flow path 15, and a housing member 1b for housing the power generating element 1a. The storage member 1b is provided with an inflow port 1ba into which the fluid F flows, and an outflow port 1bb through which the fluid flows out. The power generating element 1a is disposed between the inflow port 1ba and the outflow port 1bb. The accommodating member 1b has a shape in which the opening area is reduced as it approaches the power generating element 1a from the inflow port 1b, and the opening area is increased from the power generating element 1a as it approaches the outflow port 1bb.

The storage member 1b is provided with an inflow port 1ba into which the fluid F flows, and an outflow port 1bb through which the fluid F flows, and the power generating element 1a is disposed between the inflow port 1ba and the outflow port 1bb. In addition, the arrows in FIGS. 5A and 5B indicate the flow direction of the fluid F.

The accommodating member 1b has a shape in which the opening area is reduced as it approaches the power generating element 1a from the inflow port 1b, and the opening area is increased from the power generating element 1a as it approaches the outflow port 1bb.

The housing member 1b holds the peripheral portion of the support portion 11 of the power generating element 1a. The storage member 1b has a rectangular outer shape and a rectangular outer shape. When the storage member 1b is formed by joining two half-tubular members, for example, the power-generating element 1 can be easily housed and held.

The storage member 1b can be formed by forming a substrate or the like using a three-dimensional circuit. Further, the storage member 1b is provided with, for example, a power storage unit, a charging circuit that rectifies an AC voltage generated by the power generating element 1a, and charges the power storage unit.

As described above, the power generating device 1 of the present embodiment includes the housing member 1b that houses the power generating element 1a, and the housing member 1b can be formed to open from the power inlet 1b as it approaches the power generating element 1a. The port area is small, and the opening area is increased from the power generating element 1a as it approaches the outflow port 1bb. Thereby, the power generation device 1 can increase the flow rate of the fluid F passing through the flow path 15. Therefore, in the power generating device 1, the pressure difference between the one side of the cantilever portion 12 and the other surface side caused by the fluid F passing through the flow path 15 can be increased, and power generation can be performed more efficiently. Further, the power generating device 1 of the present embodiment has the advantage that the power absorbing element 1a can be protected by the accommodating member 1b by providing the accommodating member 1b, and it is easy to handle.

(Embodiment 6)

Hereinafter, the power generating device 1 of the present embodiment will be described with reference to Figs. 6A and 6B. In the power generating device 1 of the present embodiment, the shape of the housing member 1b is different from that of the power generating device 1 of the fifth embodiment. The same components as those in the fifth embodiment are denoted by the same reference numerals and will not be described.

In the power generating device 1 of the present embodiment, the housing member 1b is formed in a drum shape. As a result, in the power generating device 1 of the present embodiment, the opening area of each of the inflow port 1ba and the outflow port 1bb of the housing member 1b can be increased without changing the planar size of the power generating element 1a as compared with the fifth embodiment. Thereby, the power generation device 1 can increase the flow rate of the fluid F passing through the flow path 15. Therefore, in the power generation device 1, the pressure difference between the first surface 121 side and the second surface 122 side of the cantilever portion 12 caused by the fluid F passing through the flow path 15 can be further increased, and power generation can be further efficiently performed.

(Embodiment 7)

Hereinafter, the power generation module A1 of the present embodiment will be described with reference to Fig. 7 . The power generation module A1 of the present embodiment includes the power generation device 1 and the fluid control unit 3, and is provided outside the power generation device 1, and can control the flow of the fluid F to increase the flow rate of the fluid F passing through the flow path 15. In addition, the arrows in Fig. 7 indicate the flow direction of the fluid F.

The configuration of the power generating device 1 is the same as that of the power generating device 1 of the fifth embodiment. However, the present invention is not limited thereto, and may have the same configuration as the power generating device 1 of any of the first to fourth embodiments. Further, the power generation module A1 may include a plurality of power generation devices 1 for one fluid control unit 3.

The fluid control unit 3 and the power generating device 1 are arranged side by side in the flow direction of the fluid F in the duct 4 Set. In the power generation module A1, the fluid control unit 3 is disposed on the upstream side of the fluid F that flows in the duct 4, and the power generation device 1 is disposed on the downstream side of the fluid control unit 3. Further, the duct 4 may be provided inside or outside of various machines, and may be, for example, an air conditioner or the like as the machine. Further, the catheter 4 is not limited to a cylindrical body having the same opening area, and may be, for example, a bellows-like shape.

The fluid control unit 3 is configured by a nozzle so as to be close to the power generating device 1 side and to be the air outlet 3b, and to be disposed away from the power generating device 1 side as the suction port 3a. The opening area of the air outlet 3b is smaller than the opening area of the suction port 3a.

The power generation module A1 can be further increased by providing the power generation device 1 and the fluid control unit 3 provided outside the power generation device 1 and capable of controlling the flow of the fluid F to increase the flow rate of the fluid F passing through the flow path 15. The flow rate of the fluid F of the flow path 15 of the power generating device 1. Therefore, the power generation module can further increase the pressure difference between the first surface 121 side and the second surface 122 side of the cantilever portion 12 caused by the fluid F passing through the flow path 15 of the power generation device 1, and can be further efficiently performed. Power generation.

(Embodiment 8)

Hereinafter, the power generation module A1 of the present embodiment will be described with reference to Fig. 8 . In the power generation module A1 of the present embodiment, the configuration of the fluid control unit 3 is different from that of the power generation module of the seventh embodiment. The same components as those in the seventh embodiment are denoted by the same reference numerals and will not be described.

The fluid control unit 3 has a cylindrical shape, but is not limited thereto. For example, the fluid control unit 3 may have a triangular column shape or a spherical shape.

The power generation module according to the present embodiment includes the power generation device 1 and a fluid control unit that is disposed outside the power generation device 1 and that controls the flow of the fluid F to increase the flow rate of the fluid F passing through the flow path 15 as in the seventh embodiment. 3. Therefore, the power generation module can further increase the flow rate of the fluid F passing through the flow path 15 of the power generation device 1. Therefore, the power generation module can further increase the pressure difference between the first surface 121 side and the second surface 122 side of the cantilever portion 12 caused by the fluid F passing through the flow path 15 of the power generation device 1, and can be further efficiently performed. Power generation.

1‧‧‧Power generation unit

10‧‧‧Substrate

10a‧‧‧矽 substrate

10b‧‧‧embedded oxide film

10c‧‧‧ layer

10d‧‧‧slit

10f‧‧‧ space

11‧‧‧Support Department

11a‧‧‧ Opening

11b‧‧‧1st end

11f‧‧‧2nd end

12‧‧‧Cantilever

12a‧‧‧ front end

12b‧‧‧ base end

14‧‧‧Power Generation Department

15‧‧‧Flow

18a‧‧‧1st insulating film

18aa‧‧‧1st side

18b‧‧‧2nd insulating film

18bb‧‧‧ face on the 2nd side

101, 111, 121‧‧‧ first side

102, 112, 122‧‧‧2nd

Claims (11)

A power generating device includes: a frame-shaped support portion; the cantilever portion is rotatably supported by the support portion; and the power generation portion is provided on one side of the cantilever portion, and reacts to vibration of the cantilever portion to generate an AC voltage And a flow path disposed between the support portion and the cantilever portion to allow fluid to pass along the thickness direction of the support portion; wherein the front end portion of the cantilever portion is more than the base end portion of the cantilever portion Offset in a direction away from the support. The power generation device according to the first aspect of the invention, wherein the power generation unit includes: a first electrode disposed on one side of a thickness direction of the cantilever portion; and a second electrode disposed on the other surface side of the cantilever portion; And a piezoelectric film disposed between the first electrode and the second electrode; wherein the front end portion of the cantilever portion is further away from the support portion than the base end portion by internal stress of the piezoelectric film Offset. The power generation device according to the first aspect of the invention, wherein the power generation unit includes: a first electrode provided on one surface side in a thickness direction of the cantilever portion; and a second electrode provided on the other surface side of the cantilever portion; a piezoelectric film is disposed between the first electrode and the second electrode; and the front end portion of the cantilever portion is further away from the base end portion by a stress control film provided on the one side of the cantilever portion The direction of the support is offset. The power generating device of claim 1, wherein the cantilever portion is disposed obliquely to the support portion such that the front end portion of the cantilever portion is further away from the support portion than the base end portion shift. The power generating device according to any one of claims 1 to 4, wherein the support portion is formed such that a cross-sectional area of the flow path is widened on both sides in a thickness direction of the support portion in a middle of the thickness direction. shape. The power generation device according to any one of claims 1 to 4, further comprising: a power generation element and a storage member; the power generation element including the support portion, the cantilever portion, the power generation portion, and the flow path; and the storage member Forming the power generating element; the housing member includes an inflow port through which the fluid flows, and an outflow port through which the fluid flows out; The power generating element is disposed between the inflow port and the outflow port; the receiving member is formed such that the area closer to the power generating element from the inflow port becomes smaller, and the opening area is closer to the outflow port from the power generating element. The bigger the shape. The power generation device according to claim 5, comprising: a power generation element and a storage member; the power generation element including the support portion, the cantilever portion, the power generation portion, and the flow path; and the storage member to house the power generation element The storage member includes an inflow port through which the fluid flows in, and an outflow port through which the fluid flows out; the power generating element is disposed between the inflow port and the outflow port; the receiving member is formed from the inflow port The closer to the power generating element, the smaller the opening area is, and the larger the opening area is from the power generating element as it approaches the outlet. A power generation module, comprising: the power generation device according to any one of claims 1 to 4; and a fluid control unit disposed outside the power generation device and capable of controlling a flow of the fluid to pass the The flow rate of the fluid of the flow path increases. A power generation module characterized by comprising: a power generation device according to claim 5; and a fluid control unit disposed outside the power generation device and capable of controlling a flow of the fluid to flow a fluid passing through the flow path Increase. A power generation module characterized by comprising: a power generation device according to claim 6; and a fluid control unit disposed outside the power generation device and capable of controlling a flow of the fluid to flow a fluid passing through the flow path Increase. A power generation module characterized by comprising: a power generation device according to claim 7; and a fluid control unit disposed outside the power generation device and capable of controlling a flow of the fluid to flow a fluid passing through the flow path Increase.