TW201345817A - Raising and conveying structure - Google Patents

Abstract

Subject of the invention is to provide a raising structure which can suppress complexity of overall configuration of the structure. A raising and conveying unit (10) comprises cases (40A to 40C) which are plurally assembled, top walls (42) thereof are set to be continuous thereby configuring a raising and conveying surface (36), and hollow spaces are formed inside the cases; plural air blown-out holes (54) which are formed at the top walls (42) and communicate with the hollow spaces; connection parts (62) which are provided at sides of the cases (40A to 40C), connect the cases to each other, and enable air inside the hollow spaces to be distributed; and a first air supply box (88) and a second air supply box (100) which are provided at the cases that are located at both ends of the raising and conveying surface (36), and supply air sent from a tube (34) to the hollow spaces.

Description

Floating transport unit Field of invention

The present invention relates to a floating transport unit.

Background of the invention

In the above-mentioned Japanese Patent Laid-Open Publication No. 2008-7319, a plurality of floating transport units that are individually connected to the air supply tank are arranged in the transport direction of the workpiece, and the whole is configured as a floating transport unit.

Summary of invention

However, in the above configuration, the number of the floating transport units (housings) is several, and it is necessary to provide a few air supply tanks (i.e., gas supply mechanisms), so that the overall configuration is complicated.

The present invention has been made in view of the above circumstances, and it is an object of the invention to provide a floating transport unit that can suppress the overall configuration.

A floating transport unit according to a first aspect of the present invention includes a casing, a plurality of which are assembled, and a continuous floating transport path formed by a top wall. a surface having a cavity therein; a plurality of gas ejection holes formed in the top wall and communicating with the cavity; and a connection mechanism provided on a side of the housing to connect the housings And the gas supply means is provided in at least one of the adjacent housings, and the gas supplied from the gas supply means is supplied to the cavity.

According to this configuration, when the gas is supplied from the gas supply device to At least one of the gas supply mechanisms is supplied to the hollow portion of each of the casings through the connection mechanism gas. Therefore, the gas is ejected from the gas discharge holes of the top walls of the continuous floating conveyance road surface, and the work can be performed. The pieces are lifted and transported. Thereby, it is not necessary to provide the gas supply mechanism in accordance with the number of the casings, and it is possible to suppress the complication of the entire configuration.

In the floating transport unit according to the second aspect of the present invention, the first state is In the example, the connecting mechanism has a lower joint extending downward from one of the side portions of the casing, and having a lower engaging groove extending toward the width direction of the casing and opening upward; and an upper joint And extending from the other side of the casing and having an upper engagement groove extending toward the width direction of the casing and opening downward, and the upper joint is engaged with the lower engagement groove. The lower joint is engaged with the upper engaging groove.

In addition, the "width direction of the casing" means a direction intersecting the conveying direction of the workpiece (the continuous direction of the floating conveyance road surface).

According to this configuration, the lower engagement groove that is open upward in the lower side joint extending from the lower side of the one side of the casing follows the adjacent The upper side of the other side of the casing extends from the upper engaging groove which is open downward in the upper joint, and can be connected between the casings. Therefore, when connecting between the casings, the position in which the conveying direction of the workpiece and the height direction of the casing are restricted can be accurately specified.

The floating transport unit according to the third aspect of the present invention is in the second aspect The connecting mechanism has a tab extending from a side of the one side of the housing to a direction intersecting the lower engaging groove, and a recess recessed over the other side of the housing For the aforementioned tabs.

According to this configuration, the direction of the intersection with the lower engagement groove is The tab projecting in the conveying direction of the workpiece engages with the recess to thereby connect the housings. Therefore, when connecting between the housings, the position in the width direction of the housing can be accurately defined.

In the floating transport unit of the fourth aspect of the present invention, it is the first In any of the aspects to the third aspect, the plurality of the aforementioned casings include a casing having a shape or a size different from that of the other casings.

According to this configuration, the track or size of the floating conveyance road surface can be freely adjusted in accordance with the arrangement of the factory.

In the floating transport unit according to the fifth aspect of the present invention, in any one of the first aspect to the fourth aspect, the plurality of the casings include a ladder shape in plan view, and the ladder is connected A housing that is assembled with the other sides of the bottom and bottom sides of the shape.

According to this configuration, by changing the number of the casings in a plan view, the trajectory of the floating conveyance road surface can be more freely adjusted.

The floating transport unit according to the sixth aspect of the present invention is in the first aspect~ In any one of the fifth aspects, the pedestal on which the housing is placed is provided, and the extension piece extends from a side portion of the housing different from a side portion on which the connection mechanism is provided, and Fixed to the aforementioned pedestal.

According to this configuration, since the casing is fixed to the table through the extension piece Therefore, the displacement of the casing when the connections between the casings are suppressed can be suppressed, and the casings can be easily connected.

In the floating transport unit according to the seventh aspect of the present invention, the second In any one of the aspects to the sixth aspect, the gas supply mechanism is a hollow member that is engaged with the lower joint or the upper joint, and the hollow member is provided with a gas to be supplied to the hollow portion. a gas supply port and a communication port that communicates the cavity portion of the casing with the hollow portion.

According to this configuration, due to the hollow member and the lower joint or the upper side Since the joint is engaged, the hollow member can be disposed at both end portions of the continuous floating conveyance road surface. Thereby, the gas can be discharged from the both end portions of the floating conveyance road surface to the hollow portion of the casing at the center portion, and the amount of gas discharged from the gas discharge hole at any end portion or the center portion of the floating conveyance road surface can be suppressed. reduce.

The floating transport unit according to the eighth aspect of the present invention is in the first to seventh aspects In any one of the aspects, the connecting means is a connecting pipe that is formed to be adjacent to a connecting port formed on the side of the adjacent casing and that connects the adjacent hollow portion.

According to this configuration, since only the connection pipe and the connection port of the adjacent casing side portions are respectively fitted, the casing can be easily manufactured.

Since the present invention has the above configuration, it is possible to provide a suppression The whole constitutes a complicated floating transport unit.

10‧‧‧Floating transport unit

12‧‧‧Floating conveyor

14‧‧‧ Track

16‧‧‧ horizontal timber

18‧‧‧ Assembly frame

20‧‧ ‧ column

22‧‧‧Basic Framework

24‧‧‧ casters

26‧‧‧ brake

28‧‧‧Support board

30‧‧‧Compressor

32‧‧‧ pedestal

34‧‧‧ tube

36‧‧‧Floating and transporting pavement

38‧‧‧Transporting device

39‧‧‧Sucker

40A, 40B, 40C‧‧‧ housing

42‧‧‧ top wall

44‧‧‧The Ministry of the Cavity

46‧‧‧ Cover

48‧‧‧ screw holes

50‧‧‧ screw holes

52‧‧‧ screws

54‧‧‧ gas ejection hole

56A‧‧‧ side

56B‧‧‧ side

58‧‧‧ fitting holes

60‧‧‧ fitting tube

61‧‧‧O-ring

62‧‧‧Connecting mechanism

64‧‧‧Under the card

66‧‧‧Bottom joint

68‧‧‧Upper card

70‧‧‧Upper joint

72‧‧‧ 片片

74‧‧‧ recess

76‧‧‧ screw holes

78‧‧‧ screw holes

80‧‧‧ screws

82‧‧‧Extension

84‧‧‧ screw holes

86‧‧‧ screws

88‧‧‧1st air supply box

88A‧‧‧ Hollow

90‧‧‧ screw holes

94‧‧‧ gas supply port

96‧‧‧ fitting tube

98‧‧‧ recess

100‧‧‧2nd air supply box

100A‧‧‧ Hollow

102‧‧‧ screw holes

104‧‧‧ gas supply port

106‧‧‧ fitting holes

108‧‧‧1 piece

110‧‧‧Floating transport unit

112‧‧‧Shell

112A‧‧‧ bottom wall

112B‧‧‧ gas supply port

114‧‧‧ top wall

116‧‧‧The Department of Cavity

118‧‧‧ gas ejection hole

119‧‧‧ Orifice

120‧‧‧ side panels

122‧‧‧Connecting port

124‧‧‧Connecting tube

126‧‧‧ convex

128‧‧‧ Sealing members

130‧‧‧Shell

132‧‧‧Connected

134‧‧‧Depression

136‧‧‧Connecting plate

138‧‧‧ screw holes

140‧‧‧ screw holes

142‧‧‧ screws

150‧‧‧shell

151‧‧‧Connected

152‧‧‧Protruding

154‧‧‧Depression

156‧‧‧Depression

158‧‧‧Connecting plate

160‧‧‧ screw holes

162‧‧‧ screw holes

170‧‧‧Shell

172‧‧‧Cylinder

174‧‧‧ openings

178‧‧‧Shell

182‧‧‧Connecting port

D‧‧‧Transfer direction

P‧‧‧glass substrate

Fig. 1 is a perspective view showing a floating transport apparatus in which the floating transport unit according to the first embodiment is incorporated.

Fig. 2 is a side view showing the floating transport apparatus in which the floating transport unit of the first embodiment is incorporated.

Fig. 3 is a plan view showing the floating transport apparatus in which the floating transport unit according to the first embodiment is incorporated.

Fig. 4 is a perspective view of the entire floating transport unit according to the first embodiment.

Fig. 5 is a side sectional view showing a part of the floating transport unit according to the first embodiment.

6(A) and 6(B) are perspective views showing an example of a connection structure between the casings constituting the floating transport unit of the first embodiment.

7(A) and 7(B) are perspective views showing other examples of the connection structure between the casings constituting the floating transport unit of the first embodiment.

Fig. 8 is a side sectional view showing a part of the floating transport unit of the second embodiment.

9(A) and 9(B) are views showing a modification of the floating transport unit according to the first embodiment.

Figs. 10(A) and (B) are views showing another modification of the floating transport unit according to the first embodiment.

Form for implementing the invention

Hereinafter, the floating transport unit according to the embodiment of the present invention will be specifically described with reference to the drawings. In the drawings, members (components) having the same or corresponding functions are denoted by the same reference numerals, and the description is omitted. Bright.

<First embodiment>

Fig. 1 to Fig. 3 show the floating transport device 12 in which the floating transport unit 10 of the present embodiment is incorporated.

The floating conveyance device 12 is provided with an assembly frame 18 which is formed in a long frame shape by two rails 14 having a curved shape at the intermediate portion and two horizontal members 16 between the end portions of the tie rails 14. The assembly frame 18 is supported by the column 20 above the frame-shaped base frame 22. In the lower portion of the base frame 22, the casters 24 and the brakes 26 are attached, so that the floating conveyance device 12 can be moved and moved in the work area.

Further, a support plate 28 is placed between the two rails 14. A compressor 30 is disposed below each of the end portions of the support plate 28 in the direction of the horizontal member 16 . On the other hand, on the support plate 28, a plurality of pedestals 32 are fixed along the rail 14. Further, on each of the pedestals 32, three rows of the floating transport unit 10 of the first embodiment are placed along the rails 14. The floating transport unit 10 will be described in detail later, and the floating transport unit 10 supplies a positive pressure gas from the compressor 30 through the pipe 34, and transports the gas from the floating transport unit 10 to the floating transport unit 10 . The road surface 36 is ejected upward to float the glass substrate P. Further, the gas supplied from the compressor 30 is not limited to air, and may be an inert gas such as nitrogen, argon or helium, or a gas such as carbon dioxide.

Further, a linear transport device 38 is mounted on the rail 14 of one of the two rails 14. The conveying device 38 is provided with a plurality of vacuum type suction cups 39, and is configured to be sandwiched between the lower surface of the glass substrate P that floats on the floating conveyance road surface 36, and is conveyed in the arrow direction D (hereinafter, the arrow is placed) No. The direction D is referred to as the transport direction D). The glass substrate P that has been lifted and transported is maintained in a floating state above each of the floating transport units 10, and is exposed by an exposure mechanism (not shown) to form a predetermined circuit pattern.

Next, a specific configuration of the floating transport unit 10 of the first embodiment will be described.

As shown in FIG. 4, each of the floating transport units 10 includes a plurality of types of casings 40A, 40B, and 40C having different shapes or sizes. The casing 40A has a square shape in plan view, and the casing 40B has a rectangular shape in plan view, and the casing 40C has a trapezoidal shape in a plan view. Further, in the present embodiment, the upper and lower bases have an arc shape in the trapezoidal shape, and the casing 40C has a fan shape in plan view.

The various housings 40A to 40C are assembled with the same or different types of housings, and the top wall 42 of the various housings 40A to 40C constitutes a continuous floating conveyance path 36. At this time, the casing 40C is attached to the side of the upper and lower bottoms of the connected ladder shape (sector shape), and is assembled with any of the other casings 40A to 40C, and can be transported to the track of the road surface 36. Change to a right or left bend. In addition, the assembly of the casings is not particularly limited, but the floating conveyance road surface 36 shown in the uppermost portion of FIG. 3 starts from the side in the conveyance direction D (the continuous direction of the floating conveyance road surface 36). The housings are assembled in the order of the housings 40A, 40B, 40B, 40C, 40C, 40B, 40C, 40C, 40C, 40C, 40B.

As shown in FIG. 5, the various housings 40A to 40C have a hollow portion 44 therein. The bottom walls of the various casings 40A to 40C constituting the cavity portion 44 are opened, and are closed by a flat cover 46. Specifically, screw holes 48 are formed around the bottom walls of the various housings 40A to 40C constituting the cavity portion 44, A screw hole 50 is also formed in the cover 46 opposed to the screw hole 48, and the screw 52 is drilled into the screw holes 48, 50 from below, whereby the cover 46 can form various housings 40A constituting the cavity portion 44. The bottom wall of the ~40C is closed.

The top wall of the various housings 40A-40C opposite the cover 46 A plurality of gas ejection holes 54 communicating with the cavity portion 44 are formed. Each of the gas ejection holes 54 has a cylindrical shape and is uniformly disposed on the entire top wall 42.

One side of the conveying direction D in the various housings 40A to 40C In the 56A, two fitting holes 58 that communicate with the cavity portion 44 are formed (one is not shown in Fig. 5). Further, in the various casings 40A to 40C, the other side portion 56B of the conveying direction D (more specifically, the side portion of the upper side joint 70 to be described later) is formed, and two adjacent housings 40A to 40C are formed. The fitting hole 60 in which the fitting hole 58 is fitted and communicates with the cavity portion 44 (one is not shown in FIG. 5). Further, an O-ring 61 having a diameter slightly smaller than the outer diameter of the fitting tube 60 is provided in the wall of the fitting hole 58 so that the gas does not fit from the fitting tube 60 and the fitting hole 58. Leaked out.

In addition, two of the transport directions D are carried out in the various housings 40A to 40C. The side portions 56A, 56B are formed with a connecting mechanism 62 which is connected to the housings, and the fitting tube 60 is fitted into the fitting holes 58, whereby the gas in the adjacent hollow portions 44 can be made Circulation.

Specifically, the connection mechanism 62 is as shown in FIG. 6(A) and FIG. 6(B). 7(A) and 7(B), the lower joint 66 is provided, and the lower joint 66 extends from below the side portion 56A of one of the various housings 40A to 40C, and has various directions. The lower engagement grooves 64 of the casings 40A to 40C extending in the width direction (the direction orthogonal to the conveyance direction D) and open upward. Again The joint mechanism 62 is provided with an upper joint 70 extending from the other side portion 56B of the various casings 40A to 40C and having a width direction extending toward the respective casings 40A to 40C and opening downward. The upper card fits the groove 68.

Further, for example, the front end of the fitting tube 60 is brought into contact with the fitting hole 58 from the obliquely upward direction, and is pressed in the fitting direction while being pressed downward, and the upper joint 70 and the lower engaging groove 64 are engaged with each other. The side joint 66 is engaged with the upper engagement groove 68, whereby the various housings 40A to 40C are connected.

Moreover, the connecting mechanism 62 is provided with: a tab 72, which is a variety of shells The upper central portion of one of the bodies 40A to 40C protrudes in a direction intersecting the lower engagement groove 64 (transport direction D); and the recess 74 is recessed in the other housings 40A to 40C. The upper central portion of the side portion 56B is engaged with the tab 72.

Further, on both sides of the recess 74 in the upper joint 70, there are formed The screw hole 76 that penetrates the upper joint 70 up and down forms a screw hole 78 in the lower joint 66 that faces the screw hole 76, and the screw 80 is drilled into the screw holes 76 and 78 from above, thereby fixing the screws case.

Also, unlike the side portions 56A, 56B provided with the connection mechanism 62 The side portions of the various housings 40A to 40C in the width direction are provided with an extending piece 82 extending from the side portion. A screw hole 84 penetrating vertically is formed in the extending piece 82, and a screw hole (not shown) is formed in the pedestal 32 on which the housings 40A to 40C are placed, as opposed to the screw hole 84. The screw holes are drilled from above, and the extension piece 82 can be fixed to the pedestal 32.

As shown in FIG. 6A and FIG. 6B, it is located in the floating conveyance road surface 36. The casing 40A at one end of the conveying direction D is provided with a first air supply tank 88 that supplies a positive pressure gas supplied from the compressor 30 through the pipe 34 to the hollow portion of the casing 40A. 44.

The first air supply tank 88 is connected to the lower side of the casing 40A. The shape in which the engaging groove 64 is fitted and connected under the head 66 is formed with a hollow portion 88A inside. In the first air supply tank 88, a screw hole 90 that penetrates the first air supply tank 88 up and down is formed at a position facing the screw hole 78 of the lower side joint 66 of the casing 40A. Further, the first air supply tank 88 and the casing 40A can be connected and fixed by screwing the screws 92 into the screw holes 78 and 90 from above.

Further, in the side portion of the first air supply tank 88 in the width direction, A gas supply port 94 that is connected to the tube 34 and supplies the gas to the hollow portion 88A is formed. Further, in the side portion of the first air supply tank 88 on the side of the casing 40A, two fitting pipes 96 are formed, and the fitting pipes 96 are fitted to the fitting holes 58 of the casing 40A, and The cavity portion 44 of the housing 40A is connected. A recess 98 is recessed between the fitting tubes 96 and the upper center portion of the first air supply tank 88. The recess 98 is fitted when the fitting tube 96 is fitted into the fitting hole 58. The tabs 72 of the housing 40A are engaged.

Similar to the first air supply tank 88 described above, the floating transport path As shown in FIGS. 4 and 7, the casing 40B located at the other end of the conveying direction D in the surface 36 is provided with a second air supply tank 100 that passes through the pipe 34 from the compressor 30. The supplied positive pressure gas is supplied to the cavity portion 44 of the casing 40B.

The second air supply tank 100 is connected to the upper side of the casing 40B. 70 above the engagement groove 68 is embedded and connected to the shape (specifically, has a lower snap The groove 64 and the lower joint 66) are formed with a hollow portion 100A therein. In the second air supply tank 100, a screw hole 102 is formed in a position facing the screw hole 76 of the upper side joint 70 of the casing 40B. Further, by inserting the screws 80 into the screw holes 76 and 102 from above, the second air supply tank 100 and the casing 40B can be connected and fixed.

Further, a gas supply port 104 is formed in a side portion in the width direction of the second air supply tank 100, and the gas supply port 104 is connected to the tube 34 and supplies the gas to the hollow portion 100A of the second air supply tank 100. By. Further, in the second air supply tank 100, two fitting holes 106 are formed in the side portion on the side of the casing 40B, and the fitting holes 106 are fitted to the fitting pipe 60 of the casing 40B, and The cavity portion 44 of the casing 40B is connected to each other. A tab 108 is protruded from the upper center portion of the second air supply case 100 between the fitting holes 106, and the tab 108 is oriented in a direction intersecting the lower engagement groove 64 (transport direction D). When the fitting tube 60 is fitted into the fitting hole 106, it is engaged with the recess 74 of the housing 40B.

Next, the operation of the floating transport unit 10 according to the first embodiment of the present invention will be described.

A positive pressure gas (for example, 0.1 to 400 kPa) is supplied from the two compressors 30 to the first air supply tank 88 and the hollow portions 88A and 100A of the second air supply tank 100.

The gas supplied to the hollow portion 88A of the first air supply tank 88 passes through the fitting pipe 96 to the hollow portion 44 of the casing 40A, and sequentially passes through the connecting mechanism 62 (the upper fitting pipe 60) to the various shells. The cavity portion 44 of the body 40B to 40C is passed over. Similarly, it is supplied to the hollow portion of the second air supply tank 100. The gas of 100A passes through the fitting hole 106 of the second air supply tank 100 to the cavity portion 44 of the casing 40B, and sequentially passes through the connecting mechanism 62 (the upper fitting pipe 60) toward the various casings 40A to 40C. The hollow portion 44 passes over. Thereby, the gas passes through the hollow portions 44 of the various casings 40A to 40C, and is ejected upward from the gas discharge holes 54 of the various casings 40A to 40C. In other words, since the gas is ejected substantially completely from the floating conveyance road surface 36, the glass substrate P can be floated without being warped, and can be conveyed without contact with the floating conveyance road surface 36 (the top wall 42). The floating glass substrate P is sandwiched by the suction cup 39 and conveyed by the conveying device 38 in the conveying direction D.

As described above, the floating transport unit according to the first embodiment of the present invention When the gas is supplied from the compressor 30 to the two first air supply tanks 88 and the second air supply tank 100, the gas can be supplied to the hollow portions 44 of the various casings 40A to 40C through the connection mechanism 62. The gas can be ejected from the gas ejection holes 54 of the respective top walls 42 of the continuous floating conveyance path 36, and the glass substrate P can be floated and conveyed. Thereby, it is not necessary to provide the compressor 30 or the air supply tanks 88 and 100 of the number of the various housings 40A-40C, and the complication of the whole structure can be suppressed.

Moreover, when connecting between the various housings 40A to 40C, The side joint 70 is engaged with the lower engagement groove 64, and the lower joint 66 is engaged with the upper engagement groove 68. Therefore, the positions of the conveyance direction D can be accurately defined in the various casings 40A to 40C.

Further, when the respective pieces 40A to 40C are connected to each other, since the fins 72 are engaged with the concave portions 74, the positions in the width direction of the various casings 40A to 40C that intersect the conveyance direction D can be accurately defined.

Also, due to the plurality of types of housings 40A having different shapes or sizes Since the top wall 42 of the ~40C constitutes the floating conveyance road surface 36 of the glass substrate P, the track or size of the floating conveyance road surface 36 can be adjusted in response to the arrangement of the factory.

In addition, since the plurality of types of the housings 40A to 40C include the housing 40C assembled in a trapezoidal shape in a plan view and assembled to the other housings 40A to 40C on the sides connecting the top and bottom of the ladder shape, the housing is changed by The number of 40C allows the track of the floating conveyance road surface 36 to be more freely adjusted. Specifically, when the angle between the sides connecting the upper bottom and the lower bottom is, for example, 22.5 degrees, as shown in FIG. 3, when the two housings 40C are continuously connected, the floating conveyance of the road surface 36 can be performed. The track is changed by 45 degrees, and when the four casings 40C are continuously connected, the track of the floating conveyance road surface 36 can be changed by 90 degrees.

Moreover, since the hollow portions 44 constituting the various housings 40A to 40C are formed Since the bottom wall is open and closed by the lid, it is only necessary to form the open cavity portion 44, so that it is easy to manufacture the various casings 40A to 40C.

In addition, since the various housings 40A-40C are transmitted through the extension piece 82 Further, since it is fixed to the pedestal 32, it is possible to suppress the displacement of the various housings 40A to 40C when the housings are connected, whereby the housings can be easily connected.

Further, since the first air supply tank 88 is engaged with the lower joint 66, Since the second air supply tank 100 is engaged with the upper joint 70, the first air supply tank 88 and the second air supply tank 100 can be disposed at both end portions of the continuous lifted road surface 36. Thereby, the gas can be passed from both end portions of the floating conveyance road surface 36 to the hollow portion 44 of the casings 40B and 40C located at the center portion, and it is possible to prevent the end portion or the center portion of the floating conveyance road surface 36 from coming from the floating portion Gas ejection hole The gas discharge amount of 54 is reduced.

<Second embodiment>

Next, the floating transport unit 110 according to the second embodiment of the present invention will be described.

As shown in FIG. 8, the floating transport unit 110 according to the second embodiment of the present invention differs from the first embodiment in the configuration of the casing 112 and the connection method between the casings 112.

Specifically, the floating transport unit 110 includes a plurality of housings 112 having the same shape and size, and the floating transport unit 110 is configured to assemble the housing 112 and form a continuous floating transport by the top wall 114 of each of the housings 112. Road surface 36. Each of the casings 112 is a rectangular flat-shaped casing having a hollow portion 116 therein, and the top wall 114 is constituted by an orifice plate 119 having a gas discharge hole 118.

Further, each of the casings 112 is fitted to the connection port 122 formed in the direction of the thickness of the side plate 120 of the adjacent casing 112, and is connected by a connecting pipe 124 that communicates with the adjacent hollow portion 116. A convex portion 126 is formed in an intermediate portion of the outer circumference of the connecting pipe 124. When the casing 112 is connected by the connecting pipe 124, each of the casings 112 abuts against the convex portion 126 to define a position restricting the conveying direction D. Further, a sealing member 128 is provided between the connecting pipe 124 and the connecting port 122 so that the gas does not run out of the gap.

Further, the side plate 120 of one of the casings 112 located at both end portions of the floating conveyance road surface 36 is not formed with the connection port 122 or closed by a cover or the like so that the gas does not escape from the outside. Alternatively, the connector 122 can be plugged. Further, the bottom wall 112A of the casing 112 located at both ends of the floating conveyance road surface 36 is formed with a pipe 34 connected thereto and supplied with gas to the cavity portion 116. Gas supply port 112B. Further, between the orifice plate 119 and the side plate 120, or between the bottom wall plate 112A and the side plate 120, it may be fixed by an adhesive or a screw. Alternatively, the orifice plate 119 and the bottom wall plate 112A may be integrally formed by drawing.

Further, similarly to the first embodiment, an extending piece (not shown) extending from the side portion is provided on a side portion in the width direction of the casing 112 different from the side plate 120 in which the connection port 122 is provided. A screw hole penetrating vertically is formed in the extending piece, and a screw hole is formed in the pedestal 32 (see FIG. 1) on which the housing is placed facing the screw hole, and the screw is drilled from above by the screw. A hole that secures the extension to the pedestal.

As described above, in the floating transport unit 110 according to the second embodiment of the present invention, the housing 112 is connected to the connection port 122 by the connection pipe 124 as in the first embodiment, so that the housing 112 can be defined. The position in the width direction or height direction. Further, by the convex portion 126 of the connection pipe 124, the position of the conveyance direction D in the casing 112 can be restricted. Further, since only the connection pipes 124 are fitted to the connection ports 122 of the side portions 120 of the adjacent casings 112, it is easy to manufacture the casing 112.

<Modification>

The present invention has been described in detail with respect to the specific embodiments. However, the present invention is not limited to the embodiments described above, and other embodiments may be implemented within the scope of the present invention, for example, The above embodiments of the plural numbers are combined and implemented as appropriate. Further, the following modifications may be combined as appropriate.

For example, in the first embodiment, each floating transport is described. The unit 10 includes a plurality of types of casings 40A, 40B, and 40C having different shapes or sizes. However, as in the second embodiment, the unit 10 may include a plurality of casings having the same shape or size.

Further, in the second embodiment, the plurality of housings 112 have been described. In the case of the same shape and size, a casing having a shape or a size different from that of the other casing may be included in the same manner as in the first embodiment. Further, the plurality of casings 112 may include, in the same manner as the first embodiment, a casing having a trapezoidal shape in plan view and being assembled to the other casings on the sides connecting the bottom and bottom of the ladder shape.

Moreover, the configuration of the casing is in addition to the first embodiment and the second embodiment. In addition to the configuration described in the embodiment, the casing 130 may be configured as shown in Fig. 9(A). Specifically, the casing 130 has a cavity portion 44 therein, and the gas is ejected from a gas ejection hole (not shown) that communicates with the cavity portion 44 and is formed in the top wall. A communication port 132 is provided in the casing 130, and when connected to the other casing 130, the gas in the adjacent cavity portion 44 can be circulated. Further, recessed portions 134 are provided in the top wall and the bottom wall of both end portions of the casing 130. Further, in the recessed portion 134 of the adjacent casing 130, there is a connecting plate 136, and the screw 142 is drilled into a pair of screw holes 138 formed in the connecting plate 136, and formed in a recess opposite to the screw holes 138. A pair of screw holes 140 of 134, whereby adjacent housings 130 can be connected.

Further, at least one of the casings 130 is provided, for example, in a casing 130 that is located at one end of the conveying conveyance path 36 in the conveying direction D (see FIG. 1), and is provided with an air supply tank (not shown). The gas of the positive pressure supplied through the tube 34 is supplied to the cavity portion 44 of the casing 130.

Further, the configuration of the casing may be the configuration of the casing 150 as shown in Fig. 9(B). Specifically, the casing 150 has a cavity portion 44 therein, and the gas is ejected from a gas ejection hole (not shown) that communicates with the cavity portion 44 and is formed in the top wall. A communication port 151 is provided in the casing 150, and when connected to the other casings 150, the gas in the adjacent cavity portions 44 can be circulated. Further, the casing 150 has a projection portion 152 which protrudes from the top wall portion of the side portion of the casing 150 toward the conveyance direction D side, and a recess portion 154 which is formed at the top wall portion of the other side portion. The protrusions 152 of the other adjacent housings 150 can be embedded. Further, a recessed portion 156 is provided in the bottom wall of both end portions of the casing 150. Further, in the recessed portion 156 of the adjacent casing 150, there is a connecting plate 158, and the screw 164 is drilled into a pair of screw holes 160 formed in the connecting plate 158, and is formed to be recessed opposite to the screw holes 160. A pair of screw holes 162 in the portion 156, whereby the adjacent housings 150 can be connected.

Further, in at least one of the casings 150, for example, an air supply tank (not shown) is provided in the casing 150 at one end (see FIG. 1) of the conveyance direction D in the floating conveyance road surface 36, and the casing can be compressed. The machine 30 is supplied to the cavity portion 44 of the casing 150 through the positive pressure gas supplied from the pipe 34.

Further, the configuration of the casing may be such that the casing 170 is as shown in Figs. 10(A) and 10(B). Specifically, the casing 170 has a cavity portion 44 therein, and the gas is ejected from a gas ejection hole (not shown) that communicates with the cavity portion 44 and is formed in the top wall. Further, the casing 170 has a cylindrical portion 172 provided at one side of the casing 170, and an opening portion 174 provided at the other side of the casing 170 and communicating with the cavity portion 44 adjacent to each other The cylindrical portion 172 of the other housing 170 can be embedded. Moreover, with the cylindrical parts The 172 is fitted to the opening 174, and the cavity portions 44 communicate with each other to allow gas to flow, and the adjacent casings 170 can be connected. Further, the cylindrical portion 172 is also fitted to the opening 174 of the casing 178 located at the end of the floating conveyance road surface 36, and is supplied to the cavity portion 44 through the connection port 182 of the casing 178 to which the pipe 34 is connected. It can be transmitted to the cavity portion 44 of each of the housings 170.

Further, in the first embodiment, the first air supply has been described. The supply tank 88 and the second air supply tank 100 are disposed at both end portions of the continuous floating conveyance road surface 36 (provided in the casings 40A and 40B at the both end portions), but the first air may be supplied. The tank 88 or the second air supply tank 100 is provided in at least one casing. For example, only the first air supply tank 88 may be disposed at one end of the continuous floating conveyance road surface 36, or only the first air supply tank 88 may be disposed at the intermediate portion of the floating conveyance road surface 36.

Moreover, it has been explained that the connecting mechanism 62 is formed in various housings 40A~ In the case of the both side portions 56A and 56B of the transport direction D in the 40C, it may be provided on both sides in the width direction of the various casings 40A to 40C. Specifically, the lower side joint 66 and the tab 72 may be provided on one side in the width direction of the various housings 40A to 40C, and on the other side in the width direction of the various housings 40A to 40C. The upper side joint 70 and the recess 74 are provided.

Further, in order to facilitate the connection of the connecting mechanism 62, the fitting tube 60 may be formed of an elastic body such as rubber.

Further, in the first embodiment, the floating transport unit 10 is incorporated in the floating transport device 12 including the exposure mechanism, but may be incorporated in the floating transport device 12 that does not include the exposure mechanism.

Further, in the first embodiment, the glass substrate P has been borrowed. Although the conveyed body conveyed by the floating conveyance unit 10 is described as an example, the present invention is not limited thereto, and for example, a conveyed body other than the glass substrate P such as a resin plate or a metal plate may be conveyed ( Work piece).

10‧‧‧Floating transport unit

34‧‧‧ tube

36‧‧‧Floating and transporting pavement

40A, 40B, 40C‧‧‧ housing

42‧‧‧ top wall

54‧‧‧ gas ejection hole

62‧‧‧Connecting mechanism

88‧‧‧1st air supply box

100‧‧‧2nd air supply box

D‧‧‧Transfer direction

Claims (16)

A floating transport unit includes a casing, a plurality of which are assembled, and a continuous floating conveyance road surface formed by a top wall and having a hollow portion therein; and a plurality of gas discharge holes are formed in the top wall, and a connection mechanism is provided at a side portion of the casing, connecting the casings, and allowing gas in the adjacent cavity portions to flow; and the gas supply mechanism is provided at least in one The casing supplies gas supplied from the gas supply device to the cavity portion. The floating transport unit of claim 1, wherein the connecting mechanism has a lower joint extending downward from a side of the casing and extending in a width direction of the casing and facing upward. An open lower engaging groove; and an upper joint extending upward from the other side of the casing and having an upper engaging groove extending in a width direction of the casing and opening downward, and the upper joint Engaged in the lower engagement groove, and the lower joint is engaged with the upper engagement groove. The floating transport unit of claim 2, wherein the connecting mechanism has: a tab from the upper side of the housing to the lower card The groove is extended in the direction of the intersection; and the recess is recessed above the other side of the casing for the aforementioned tab to be engaged. The floating transport unit according to any one of claims 1 to 3, wherein the casing includes a plurality of casings having different shapes or sizes. The floating transport unit according to any one of claims 1 to 3, wherein the plurality of the casings include a side view and a lower shell connected to the top and bottom of the ladder shape in a plan view. Body assembled housing. The floating transport unit according to any one of the first to third aspects of the present invention, comprising: a pedestal on which the casing is placed; and an extension piece that is different from a side portion that is different from a side portion on which the connection mechanism is provided The side portion extends and is fixed to the pedestal. The floating transport unit according to any one of claims 1 to 3, wherein the connecting mechanism has a connecting pipe that is respectively embedded with a connecting port formed at an adjacent side of the casing, and The adjacent hollow portions are connected to each other. The floating conveyance unit according to the second or third aspect of the invention, wherein the gas supply mechanism is a hollow member that is connected to the lower joint or the upper joint, and the hollow member is provided with a gas to be supplied to the hollow portion. a gas supply port and a communication port that communicates the cavity portion of the casing with the hollow portion. The floating conveyance unit according to claim 5, wherein the gas supply mechanism is a hollow member that is connected to the lower joint or the upper joint, and the hollow member is provided with a gas supplied thereto. a gas supply port of the empty portion and a communication port that communicates the hollow portion of the casing with the hollow portion. The floating conveyance unit of the seventh aspect of the invention, wherein the gas supply mechanism is a hollow member that is connected to the lower joint or the upper joint, and the hollow member is provided with a gas that supplies a gas to the hollow portion. a supply port and a communication port that communicates the hollow portion of the casing with the hollow portion. The floating transport unit of claim 5, wherein the connecting mechanism has a connecting pipe that is respectively embedded with a connecting port formed at an adjacent side of the casing, and the adjacent cavity is adjacent Connected. The floating transport unit of claim 8, wherein the connecting mechanism has a connecting pipe that is respectively embedded with a connecting port formed at an adjacent side of the casing, and the adjacent cavity is adjacent Connected. The floating transport unit of claim 7, wherein the housing comprises a plurality of housings having different shapes or sizes from each other. The floating transport unit of claim 8, wherein the housing comprises a plurality of housings having different shapes or sizes from each other. The floating transport unit according to claim 7 is characterized in that: a pedestal on which the casing is placed; and an extension piece extending from a side portion of the casing different from a side portion on which the connection mechanism is provided, And fixed to the aforementioned pedestal. The floating transport unit according to claim 8 is characterized in that: the pedestal on which the casing is placed; and the extending piece are different from the side opposite to the side where the connecting mechanism is provided The side of the housing extends and is fixed to the pedestal.