TW201329419A - Shape measurement device, structure manufacturing system, shape measurement method, structure manufacturing method, shape measurement program, and computer-readable recording medium - Google Patents

Abstract

An objective of the present invention is to assess whether blurring is present in a captured image for measuring a subject shape to be measured. A shape measurement device comprises: an image capture unit which generates a captured image which captures the subject to be measured; an illumination unit which shines upon the subject to be measured an illumination light which has a prescribed intensity distribution from a direction different form the direction which the image capture unit captures the image such that the image which is captured by the image capture unit is captured as an image in which a lattice pattern is projected upon the subject to be measured; a feature value computation unit which computes a feature value from the captured image which denotes the degree of blurring which is present in the captured image; and an assessment unit which assesses whether blurring is present in the captured image on the basis of the feature value.

Description

Shape measuring device, structure manufacturing system, shape measuring method, structure manufacturing method, shape measuring program product, computer readable recording medium

The present invention relates to a shape measuring device, a structure manufacturing system, a shape measuring method, a structure manufacturing method, a shape measuring program product, and a computer readable recording medium.

As a method of measuring the surface shape (three-dimensional shape) of the measurement target by a non-contact method, for example, a pattern projection type shape measuring device of the phase shift method is known (for example, see Patent Document 1). In the shape measuring device, a lattice pattern having a sinusoidal intensity distribution is projected onto the object to be measured, and the phase of the lattice pattern is changed at a constant pitch, and the object to be measured is repeatedly photographed. By substituting a plurality of photographic images (brightness change data) obtained thereby by a predetermined calculation formula, a phase distribution (phase image) of a lattice pattern corresponding to a change in the surface shape of the measurement target is obtained, and the phase image is reconstructed (phase After the connection, it is converted into the height distribution (height image) of the measurement object.

Patent Document 1: Japanese Laid-Open Patent Publication No. 2009-180689

However, according to the idea of the inventor of the present application, if a plurality of photographic images in which lattice patterns having different phases are projected are generated, it is considered that an error occurs in the measured value of the three-dimensional shape. Therefore, it is preferable to determine whether or not the photographic image is shaken.

The present invention is constructed in view of the above circumstances, and provides a determination to be used. A shape measuring device, a structure manufacturing system, a shape measuring method, a structure manufacturing method, and a shape measuring program for measuring whether or not the photographic image of the shape of the measurement object is shaken.

In order to solve the problem, the shape measuring apparatus according to the present invention includes: an imaging unit that generates a captured image after the measurement target is irradiated; and an illumination unit that irradiates the measurement target with illumination light having a predetermined intensity distribution from a direction different from a direction in which the imaging unit is photographed. The image obtained by the photographing unit is captured as an image in which the grid pattern is projected on the measurement target; the feature amount calculation unit calculates a feature amount indicating the degree of shaking of the imaged image from the captured image; and the determination unit The feature amount determines whether there is a shake in the photographic image.

Further, the structure manufacturing system of the present invention includes: a design device that creates design information on the shape of the structure; a molding device that creates a structure based on the design information; and the shape measuring device that measures the structure produced based on the photographic image. Shape; and inspection device to compare the shape information and design information obtained by the measurement.

Further, the shape measuring method of the present invention includes an imaging unit that generates a captured image after the measurement target, and irradiates the measurement target with illumination light having a predetermined intensity distribution in a direction different from the direction in which the imaging unit is photographed, so that the imaging unit a shape measuring device that captures an image of the image of the image in which the measurement target has been projected, and includes a step of calculating a feature amount indicating the degree of shaking of the imaged image from the captured image; and determining the feature amount based on the feature amount The step of shaking the photographic image.

Moreover, the method for producing a structure according to the present invention includes: an action of creating design information on a shape of a structure; and a structure based on design information The operation of measuring the shape of the structure produced by the photographic image generated by the above-described shape measuring method; and the operation of comparing the measured shape information and design information.

Further, the shape measurement program product of the present invention is configured such that an imaging unit that generates a captured image after the measurement target is irradiated with illumination light having a predetermined intensity distribution from the measurement target in a direction different from the direction in which the imaging unit is photographed is used. The computer that has taken the image captured by the photographing unit as the shape measuring device of the illuminating unit that has projected the image of the plaid pattern is subjected to the following steps: calculating the characteristic amount indicating the degree of swaying of the photographic image from the photographic image. a step of determining whether there is a shake in the photographic image based on the feature amount.

As described above, according to the present invention, it is possible to determine whether or not the photographic image for measuring the shape of the measurement target is shaken.

Hereinafter, an embodiment of the present invention will be described with reference to the drawings.

(First Embodiment: Comparing similarities between a plurality of images of the same initial phase)

Fig. 1 is a block diagram showing the configuration of a shape measuring apparatus 10 according to a first embodiment of the present invention. The shape measuring device 10 includes an operation input unit 11, a display unit 12, an imaging unit 13, an irradiation unit 14, a storage unit 15, a feature amount calculation unit 16, a determination unit 17, and a point group calculation unit 18, and includes a phase shift method. A computer terminal that measures the three-dimensional shape of the object A. The shape measuring device 10 detects a plurality of photographic images after phase shifting by phase shifting Measure whether there is sway in the photographic image. The cause of the swaying is, for example, the sway of the measurement of the movement of the object during photographing, or the shaking of the case where the shape measuring device 10 of the portable type is not fixed to a tripod or the like, and is photographed by the user. Further, the sway which affects the measurement result is considered to be the sway of the photographic range between the plurality of photographic images and the sway caused by the movement of the object or the occurrence of the jitter in the exposure time of one photographic image. Alternatively, it can be considered to cause such shaking at the same time.

In the present embodiment, a plurality of lattice patterns having different initial phases based on the N-bucket method are imaged and projected onto the measurement target image, and the shape of the measurement target is measured based on the luminance values of the same pixels in the respective images. Generally, the shape is measured from the fringe images having different initial phases. However, in the present embodiment, the grid pattern of the initial phase which is the same as the lattice pattern of at least one initial phase is further projected, and the image after the shooting is compared. An image of a grid pattern that is the same as the initial phase. In the above manner, the degree of similarity of two or more photographic images having different photographic timings after the plaid pattern of the same initial phase is captured is calculated. Here, if the degree of similarity is equal to or greater than the threshold value, it can be determined that there is no sway between the shooting timings, and if the similarity is not equal to or greater than the threshold value, it can be determined that there is sway between the shooting timings. The shape measuring device 10 determines whether or not such shaking occurs during shooting, and warns when a rattling occurs. Thereby, for example, it is possible to perform photography again in the case where shaking occurs.

The operation input unit 11 accepts an operation input from the user. For example, the operation input unit 11 includes an operation member for switching a power button for turning on and off the main power source, and a shutter switch button for receiving an instruction to start the photographing process. Moreover, the operation input unit 11 can also accept the input of the touch panel.

The display unit 12 is a display that displays various kinds of information. For example, the display unit 12 determines that the warning image is present after the swaying of the captured image, which will be described later. Further, the display unit 12 displays, for example, point group data indicating the three-dimensional shape of the measurement target calculated by the point group calculation unit 18.

The photographing unit 13 generates a photographed image after the subject is photographed, and performs photographing processing for storing the generated photographed image in the storage unit 15. The imaging unit 13 operates in conjunction with the irradiation unit 14 and performs imaging processing in accordance with the timing at which the illumination unit 14 projects the illumination light to the measurement target. In the present embodiment, the imaging unit 13 generates a plurality of photographs in which a plurality of gradation patterns having different initial phases based on the N-barrel method are projected onto the image of the measurement target by the irradiation unit 14 in the initial phase imaging. image. Further, the photographing unit 13 determines that there is a possibility that the photographed image is shaken after the photographing image is shaken, and warns the user that there is a possibility of shaking. Based on the warning, the user can cause the shape measuring device 10 to obtain an image in which a plurality of lattice patterns having different initial phases based on the N-bar method are projected onto the measurement target. In the above manner, if the shooting is continued until the warning that there is a possibility of shaking is not issued, the shape measurement in which the influence of the shaking is reduced can be performed.

Further, the shape measuring device 10 automatically continues to image an image in which a plurality of lattice patterns having different initial phases based on the N-bar method are projected onto the measurement target until the determination of the sloshing is not performed. In the above manner, the measurement target irradiated with the illumination light is imaged again, and a photographic image is generated.

When the imaging unit 13 captures the measurement target, the illumination unit 14 irradiates the measurement target with illumination light having a predetermined intensity distribution from the direction of the imaging unit 13 to capture the image of the measurement target. Here, The illuminating unit 14 illuminates the illumination light so that the imaging unit 13 can sequentially capture an image of the measurement target by sequentially capturing a plurality of gradation patterns having a spatial frequency of a certain period and having an initial phase of 90 degrees according to the N-bar method. For example, as shown in FIG. 2, the illuminating unit 14 has a light source 1 and converts the light intensity distribution such that the light from the light source 1 has a linear intensity distribution having a longitudinal direction in a direction orthogonal to the irradiation direction of the light. The collimating mirror 2 and the cylindrical lens 3 are provided. Further, a scanning mirror 4 (MEMS (Micro Electro Mechanical Systems) mirror) is provided which causes a light beam having a linear light intensity distribution to cause a linear light intensity distribution with respect to a longitudinal direction of the light beam to cause the light source 1 The light scans the measurement object in the vertical direction.

Further, the light source 1 is provided with a light source control unit 5 for controlling the intensity of light emitted from the light source 1, and the light source control unit 5 modulates the intensity of the laser light while scanning the scanning mirror to sequentially change the deflection direction of the laser light. The image obtained by the imaging unit 13 can be obtained by the same image as when the measurement target has projected the stripe pattern.

That is, the laser light irradiated from the light source 1 is shaped to have a linear light intensity distribution in a direction perpendicular to the optical axis direction, so that the light intensity distribution in the direction of the optical axis and the line is made. The direction perpendicular to both sides of the long-side direction has a linear intensity distribution of light intensity changes and is simultaneously scanned. Here, pattern light having a sinusoidal brightness change stripe pattern (sinusoidal lattice) is formed in one direction. Further, the intensity of the mirror by using the MEMS technology is changed to a sinusoidal wave while the light of the light source is shifted in the direction perpendicular to the optical axis direction. In the above manner, the illumination light of the lattice pattern is projected onto the measurement target. Here, although it is exemplified to project laser light using MEMS technology, However, projection illumination such as a liquid crystal projector can also be used.

FIG. 3 is a view showing an example in which the irradiation unit 14 shifts the initial phase by 90 degrees and projects the irradiation light. Here, A is shown in which the initial phase is 0 degrees, B from the initial phase of A is shifted by 90 degrees, C from the initial phase of A is shifted by 180 degrees, and D from the initial phase of A is shifted by 270 degrees. For example, in the case of the 5-barrel method, five photographic images of A to E after the initial phase is shifted by an angle are generated, and in the case of the 7-bucket sub-method, A to G are generated after the initial phase is shifted by an angle. 7 photographic images. Here, the order of photographing is not necessarily in the order of A, B, C, D, and E. For example, shooting may be performed in the order of A, E, B, C, and D. However, in the present embodiment, A, B, and C are used. The mode of D, E makes the initial phase shift sequentially and simultaneously performs photographic processing. In other words, the photographing unit 13 captures a grid pattern of another initial phase (for example, B, C, and a plurality of photographing timings in which the grid patterns (for example, A and E) having the same initial phase are projected to the image of the measurement target. D) Image that has been projected onto the measurement target. As described above, the photographing timings for photographing the grid pattern of the same initial phase are separated in time, and the photographing image between the photographing timings where the possibility of jitter is generated can be compared, and the accuracy of the shake detection can be improved.

The photographic unit 15 generates a photographic image generated by the imaging unit 13 or a point group data calculated by the point group calculation unit 18.

The feature amount calculation unit 16 calculates a feature amount indicating the degree of sway of the captured image from the captured image generated by the imaging unit 13. In the present embodiment, the feature amount calculation unit 16 calculates the similarity between the plurality of photographic images after the gradation pattern in which the initial phase is the same is projected onto the image of the measurement target as the feature amount. The degree of similarity can be calculated, for example, by the following formula (1).

Here, the feature amount calculation unit 16 calculates the degree of similarity between one of the group of captured images in which the grid pattern having the same initial phase is projected to the image of the measurement target, and calculates the similarity between the complex image images. It is also possible for the feature quantity. For example, by the 9-barrel method, the case where 9 pieces of photographic images whose initial phase is shifted by 90 degrees are successively generated, only the first photographic image whose initial phase is 0 degrees is calculated and the initial phase is 360 degrees (also That is, the similarity of the fifth photographic image of 0 degree) may also be, as shown in FIG. 3, calculate a complex array of photographic images at the same angles as A, E, B, and F, C and G, D and H. The similarity can also be. As described above, by calculating the similarity between the complex array photographic images to determine the sway, the sway can be detected with higher precision.

The determination unit 17 determines whether or not the captured image is shaken based on the feature amount calculated by the feature amount calculation unit 16. For example, the determination unit 17 stores the predetermined threshold value of the similarity degree in its own memory area, and compares the similarity between the calculated feature amount calculation unit 16 and the threshold value similar to the memory area stored in itself. When the determination unit 17 determines that the degree of similarity calculated by the feature amount calculation unit 16 is equal to or greater than the threshold value of the predetermined similarity degree, the determination unit 17 determines that the sway does not exist, and determines that the similarity degree calculated by the feature amount calculation unit 16 is not greater than the threshold value of the similarity degree. Then, it is determined that the shaking exists.

The point group calculation unit 18 performs point group calculation processing such as phase calculation and phase connection based on a plurality of pieces of captured images generated by the imaging unit 13, and calculates point group data, and stores the point group data in the memory unit 15.

Next, an operation example of the shape measuring apparatus 10 of the present embodiment will be described with reference to the drawings. 4 is a view showing the shape measuring device 10 performing shape measurement processing. Flow chart of the action example.

When the user inputs the photographing instruction to the operation input unit 11 (step S1), the photographing unit 13 starts the photographing process of the measurement target, and the irradiation unit 14 starts the projection processing of the irradiation light to be measured (step S2). The photographing unit 13 stores, for example, five photographed images taken at the time of initial stripe projection of 0, 90, 180, 270, and 360 degrees in the storage unit 15 (step S3). The feature amount calculation unit 16 reads a plurality of photographic images of the same initial phase (for example, 0 degrees and 360 degrees) stored in the plurality of photographic images of the storage unit 15 to calculate the similarity between the read photographic images (step S4). .

The determination unit 17 compares the similarity calculated by the feature amount calculation unit 16 with a predetermined threshold (step S5). When the determination unit 17 determines that the similarity degree calculated by the feature amount calculation unit 16 is equal to or greater than the predetermined threshold value (step S5: NO), the display unit 12 displays a warning indicating that the captured image is shaken (step S6). Here, although there is a possibility of a jitter, it is acceptable to input the input from the user as to whether or not to continue the calculation of the point group data. When an instruction to not continue processing is input to the operation input unit 11 (step S7: NO), the process returns to step S1. When an instruction to continue the processing is input to the operation input unit 11 (step S7: YES), the process proceeds to step S8.

When the determination unit 17 determines that the degree of similarity calculated by the feature amount calculation unit 16 is equal to or greater than a predetermined threshold value (step S5: YES), the point group calculation unit 18 calculates the point group data based on the captured image stored in the storage unit 15, It is stored in the memory unit 15 (step S8). Next, the display unit 12 displays the calculated point group data (step S9).

As described above, according to the present embodiment, the N barrel method is used to calculate the shooting. The degree of similarity between the photographic images of the same initial phase in a plurality of photographic images having different initial phases is determined based on the degree of similarity to determine whether there is sway. Thereby, the process of re-photographing and re-measurement can be performed in the case of occurrence of shaking. Here, the point group calculation processing by the point group calculation unit 18 based on the photographed image is a process in which the load is high, and it takes a few seconds (for example, 5 seconds) until the processing is completed. Therefore, in the present embodiment, the similarity determination and the shake determination processing are performed before the point group calculation processing of the point group calculation unit 18 is started after the image processing of the image pickup unit 13 is performed, and the warning is displayed when the shake is present. Thereby, the user can know that the photographed image is shaken before the point group calculation process with a high load, and an instruction to perform the photographing again can be input. In other words, it is known that the sway is generated at the time when the point group data is displayed on the display unit 12 after the lapse of the time period of the dot group calculation processing, and the sloshing can be known before the point group calculation processing is performed. Produced. Thereby, it is possible to reduce the waiting time which is not required for the re-measurement of the shape of the measurement target, and further, the measurement process can be efficiently performed without consuming unnecessary power.

(Second embodiment: sway determination based on the sharpness of the photographic image)

In the first embodiment, it is determined whether or not the photographic image is shaken based on the similarity of a plurality of photographic images generated by the N-bar method, but it is determined by other methods whether or not there is sway. Hereinafter, a second embodiment of the present invention will be described. The shape measuring device 10 of the present embodiment has the same configuration as that of the first embodiment shown in Fig. 1 . In the first embodiment, although the blurring of the imaging range between the plurality of photographic images is detected, in the present embodiment, the measurement target is detected during the exposure time of one photographic image. Movement or jitter caused by shaking.

The feature amount calculation unit 16 of the present embodiment calculates the sharpness (fuzziness) of the captured image generated by the imaging unit 13 as the feature amount. The determination unit 17 stores a threshold value for determining whether or not the sharpness of the sway is generated in advance, and compares the threshold values of the sharpness and the sharpness calculated by the feature amount calculation unit 16. When the determination unit 17 determines that the sharpness calculated by the feature amount calculation unit 16 is equal to or greater than the set threshold value, it is determined that there is no sway in the captured image, and it is determined that the sharpness is not greater than the set threshold value calculated by the feature amount calculation unit 16 The image is shaking.

The sharpness of the image can be calculated by a predetermined equation, but can be calculated, for example, based on the distribution of spatial frequencies. For example, as shown in FIGS. 5 and 6, the degree distribution curve A1 of the spatial frequency in the image data of the unscreaked image after the same measurement object and the power distribution curve B1 of the spatial frequency in the image data of the sloshing are taken into consideration. Comparing the degree distribution curve A1 of the spatial frequency in the image data without sloshing with the degree distribution curve B1 of the spatial frequency in the image data of the sloshing, the degree distribution curve A1, the center of gravity of the graph surrounded by the degree distribution curve exists on the high spatial frequency side . In addition, in FIGS. 5 and 6, the frequency corresponding to the position of the broken line is the spatial frequency of the projected stripe.

Therefore, in order to determine whether or not the sway is generated in accordance with the measurement target, the spatial frequency corresponding to the position of the center of gravity of the region surrounded by the power distribution curve of the spatial frequency is detected, and based on the detected spatial frequency, the threshold value of the spatial frequency set in advance is performed. By comparison, it can be determined whether or not the photographic image is shaken.

In addition, focusing on the spatial frequency of the stripe pattern rewritten to the image data, a fine pattern on the surface of the measurement object, focusing on the fine image The case is also possible. That is, by detecting whether or not the spatial frequency of the pattern is low, it is possible to determine whether or not the photographic image is shaken.

In this case, the feature amount calculation unit 16 performs a Fourier transform of the captured image generated by the imaging unit 13 and stored in the storage unit 15, and calculates the spatial frequency corresponding to the position of the center of gravity obtained as described above as the sharpness (feature amount). ). The determination unit 17 compares the feature amount calculated by the feature amount calculation unit 16 with the sharpness as a reference, and determines whether or not the threshold value is equal to or greater than a predetermined threshold value, thereby determining whether or not the captured image is shaken.

Here, both the sway determination of each of the photographic images of the present embodiment and the sway determination based on the similarity between the plurality of photographic images shown in the first embodiment can be performed more efficiently and higher. Perform sway detection with precision. For example, the photographing unit 13 performs the shake determination based on the sharpness when generating the photographed image having the different initial phases, and can warn when the sharpness is not higher than the threshold. Thereby, it is possible to prevent the unnecessary photographic processing from being performed and to prevent the calculation processing of the point group data that is unnecessary.

FIG. 7 is a flow chart showing an operation example of the shape measuring apparatus 10 described above. When the user inputs the photographing instruction to the operation input unit 11 (step S10), the photographing unit 13 starts the photographing process of the measurement target, and the irradiation unit 14 starts the projection processing of the irradiation light to be measured (step S11). The photographing unit 13 stores the photographed image generated when the grid pattern having the initial phase is different from each other by the irradiation unit 14 is stored in the storage unit 15 (step S12). The feature amount calculation unit 16 reads the captured image stored in the storage unit 15 and performs Fourier transform on the read captured image to obtain a spatial frequency distribution, thereby obtaining sharpness (step S13).

The determination unit 17 compares the sharpness calculated by the feature amount calculation unit 16 with the threshold value of the predetermined sharpness (step S14). When the determination unit 17 determines that the sharpness degree calculated by the feature amount calculation unit 16 is not more than the predetermined threshold value (step S14: NO), the display unit 12 displays a warning indicating that the captured image is shaken (step S15). When an instruction to not continue processing is input to the operation input unit 11 (step S16: NO), the process returns to step S10. When an instruction to continue the processing is input to the operation input unit 11 (step S16: YES), the process proceeds to step S17.

In step S14, the determination unit 17 compares the sharpness calculated by the feature amount calculation unit 16 with the sharpness of the reference, and if it is determined that the threshold value is equal to or greater than the predetermined threshold value (YES in step S14), the determination unit 17 determines whether or not a predetermined number of sheets or more has occurred. The photographic image (step S17). The number of sheets is set, for example, five sheets for photographing in the five-barrel method and seven sheets for photographing in the seven-barrel method. When the determination unit 17 determines that a predetermined number of shots or more has not been generated (NO in step S17), the determination unit 17 returns to step S11. When the determination unit 17 determines that a predetermined number of images have been generated (step S17: YES), the process proceeds to step S18, and performs the same processing as steps S4 to S9 shown in the first embodiment (steps S18 to S23). ).

As described above, according to the present embodiment, the feature amount calculation unit 16 calculates the sharpness of each of the captured images, and the determination unit 17 performs the shake determination, and determines that the sharpness of all of the plurality of captured images is equal to or greater than a predetermined threshold value. In other cases, the feature amount calculation unit 16 calculates the similarity between the plurality of photographic images. Thereby, before the photographic processing of all the patterns based on the plurality of initial phases is performed, the sway determination is performed on each of the photographic images corresponding to the initial phase, and the warning can be outputted when the sway is detected. Therefore, it is possible to prevent the unnecessary photographic processing or the calculation processing of the point group data, and to efficiently measure the shape of the object to be measured. Determination.

(Third Embodiment: Comparing a composite image of a plurality of photographic images having different initial phases with an image obtained by shooting the same intensity distribution)

The shape measuring apparatus 10 of the present embodiment is the same as that of the first embodiment. However, the irradiation unit 14 of the shape measuring apparatus 10 of the present embodiment performs imaging processing at the imaging unit 13 in addition to the irradiation processing similar to that of the first embodiment. The illumination light is irradiated to capture an image of illumination light having the same intensity distribution projected on the measurement object. The feature amount calculation unit 16 calculates the similarity between the composite image obtained by combining the plurality of captured images having the initial phases different in the initial phase and the captured image of the measurement target irradiated with the same illumination light, as the feature amount, in the same manner as in the first embodiment. . Thereby, it is determined whether or not there is a shake in the photographed image.

That is, as shown in FIG. 8, four different photographic images (A, B, C, and D) after the initial phase shift imaging are combined, and the average of the spatial frequency distribution is calculated, for example. In addition, the image X of FIG. 8 is an image obtained by combining four photographic images. Moreover, the image Y of FIG. 8 is an image which is imaged when the measurement target is illuminated with uniform illumination. The image obtained by combining the four photographic images with the image obtained without the intensity of the laser light and scanning the light of the linear pattern is the same image if no sway occurs between the plurality of photographic images. In other words, as the feature amount, the degree of similarity between the image obtained by combining the four photographic images and the image after the measurement target is not modulo-intensified is detected, and the presence or absence of the sway may be detected.

Further, according to the idea of the inventor, the spatial frequency of the composite image of the different photographic images after the initial phase shift is captured and the photographic image after the image of the illumination light having the same intensity distribution is projected on the measurement target. The distribution of rates is roughly the same. Therefore, as another method, the feature amount calculation unit 16 can compare the spatial frequency distribution of the synthesized image of the photographic image having the different initial phases and the spatial frequency distribution of the image after the same as the intensity distribution, and calculate the similarity. When the degree of similarity calculated is a certain level or more, the determination unit 17 determines that there is no sway, and if it is not more than a certain degree, it determines that there is sway.

(Fourth embodiment: comparison with template image)

The shape measuring device 10 of the present embodiment is the same as the first embodiment. However, in the memory unit 15 of the shape measuring device 10 of the present embodiment, a template image which is a captured image in which the captured lattice pattern has been projected onto the image of the measurement target is stored in advance. For example, as shown in FIG. 9, in the memory unit 15, A' (initial phase 0 degrees), B' (initial phase 90 degrees), C' (initial phase: 180 degrees), and A' (initial phase: 90 degrees), which are captured in advance in the initial phase, are stored in advance. Template image of D' (initial phase 270 degrees). The feature amount calculation unit 16 reads the template image stored in the storage unit 15 and calculates the similarity between the read template image and the captured image generated by the imaging unit 13 for each initial phase. When the degree of similarity calculated by the feature amount calculation unit 16 is equal to or greater than a predetermined threshold value, the determination unit 17 determines that there is no sway, and if it is not equal to or greater than the threshold value, it is determined that there is sway.

(Fifth Embodiment: Swing determination based on spatial frequency distribution of a plurality of images)

The shape measuring device 10 of the present embodiment is the same as the first embodiment. However, the feature amount calculating unit 16 of the shape measuring device 10 of the present embodiment performs Fourier transform on each of a plurality of captured images captured by the imaging unit 13, and the spatial frequency is obtained. The distribution is calculated as the feature amount. The determination unit 17 determines the photographic image when the spatial frequency distribution between the plurality of photographic images is different. There is a sway between the two, and the distribution of the spatial frequencies between the plurality of photographic images is substantially the same, and it is determined that there is no sway between the photographic images. For example, in a case where only one of the plurality of photographic images having different initial phases is shaken, it is possible to consider that only the spatial frequency distribution of the photographic image is different from the spatial frequency distribution of the other photographic images. Therefore, in the case where the distribution of the spatial frequencies between the plurality of photographic images exceeds the setting conditions, it is determined that there is sway.

(Sixth embodiment: sway determination based on spatial code method)

The shape measuring device 10 of the present embodiment is the same as the first embodiment. However, the illuminating unit 14 of the shape measuring device 10 of the present embodiment irradiates the measurement target with a lattice pattern based on the spatial code method, and the feature amount calculating unit 16 plural The spatial codes of each of the photographic images are calculated as feature quantities. When the coordinate position based on the spatial code calculated for each of the plurality of captured images is different, it is determined that the captured image is shaken, and if the coordinate position is substantially the same, it is determined that there is no shake in the captured image.

Here, at least two of the determination processes in the first to sixth embodiments described above are combined and performed, and the determination process with higher precision can be performed. For example, the user may select at least one determination process in advance of the determination process of the determination processes of the first to sixth embodiments described above, and may perform determination processing (or a combination of determination processes) based on the selection.

In the above-described embodiment, the determination unit 17 determines that the display unit 12 displays a warning when the captured image is shaken. For example, the shape measuring device 10 includes a speaker that outputs a sound, and outputs a warning sound. Alternatively, the terminal connected to the shape determining device 10 is transmitted by a wired line or a wireless line. The notification unit 17 determines that there is a shake in the captured image.

(Seventh Embodiment: Structure Manufacturing System)

Next, a structure manufacturing system and a structure manufacturing method using the shape measuring device 10 of the present embodiment will be described.

Fig. 10 is a view showing the configuration of the structure manufacturing system 100 of the present embodiment. The structure manufacturing system 100 of the present embodiment includes the shape measuring device 10, the design device 20, the molding device 30, the control device (inspection device) 40, and the repairing device 50 described in the above embodiment. The control device 40 includes a coordinate storage unit 41 and an inspection unit 42.

The design device 20 creates design information about the shape of the structure, and transmits the created design information to the forming device 30. Further, the design device 20 stores the created design information in the coordinate storage unit 210 of the control device 40. The design information includes information showing the coordinates of each location of the structure.

The forming device 30 creates the above-described structure based on the design information input from the design device 20. The forming of the forming device 30 includes, for example, casting, forging, cutting, and the like. The shape measuring device 10 measures the coordinates of the created structure (measurement object), and transmits information (shape information) indicating the measured coordinates to the control device 40.

The coordinate storage unit 41 of the control device 40 stores design information. The inspection unit 42 of the control device 40 reads the design information from the coordinate storage unit 41. The inspection unit 42 compares the information (shape information) of the coordinates received from the shape measuring device 10 with the design information read from the coordinate storage unit 41. The inspection unit 42 determines whether or not the structure is shaped as design information based on the comparison result. That is, the inspection unit 42 determines whether or not the created structure is a good product. Inspection unit 42, in the structure When the design information is formed, it is determined whether the structure is repairable. When the structure is repairable, the inspection unit 42 calculates the defective portion and the amount of repair based on the comparison result, and transmits the information indicating the defective portion and the information indicating the repair amount to the repairing device 50.

The repairing device 50 processes the defective portion of the structure based on the information of the defective portion received from the control device 40 and the information indicating the amount of repair.

Fig. 11 is a flow chart showing a method of manufacturing the structure of the embodiment. In the present embodiment, each process of the structure manufacturing method shown in Fig. 11 is executed by each part of the structure manufacturing system 100.

In the structure manufacturing system 100, first, the designing device 20 creates design information on the shape of the structure (step S31). Next, the forming device 30 creates the above-described structure based on the design information (step S32). Next, the shape measuring device 10 measures the shape of the created structure (step S33). Next, the inspection unit 42 of the control device 40 compares the shape information obtained by the shape measuring device 10 with the design information, thereby checking whether the structure is created as design information (step S34).

Next, the inspection unit 42 of the control device 40 determines whether or not the created structure is a good product (step S35). In the structure manufacturing system 100, the inspection unit 42 determines that the created structure is a good product (step S35: YES), and ends the process. In addition, when the inspection unit 42 determines that the created structure is not good (step S35: NO), it is determined whether or not the created structure can be repaired (step S36).

In the structure manufacturing system 100, the inspection unit 42 determines that the created structure can be repaired (step S36: YES), and the repairing device 50 performs the reworking of the structure (step S37), and returns to the process of step S33. Structure manufacturing department In the system 100, the inspection unit 42 determines that the created structure cannot be repaired (step S36: NO), and ends the process.

In the structure manufacturing system 100 of the first embodiment, since the shape measuring device 10 according to the first to sixth embodiments can accurately measure the coordinates of the structure, it is possible to determine whether or not the manufactured structure is a good product. Further, in the structure manufacturing system 100, when the structure is not good, the structure is reworked and repaired.

Further, in the present embodiment, the repairing step performed by the repairing device 50 may be replaced with the step of the forming device 30 performing the forming step again. At this time, the inspection unit 42 of the control device 40 determines that the repair is possible, and the molding device 30 performs the molding step (forging, cutting, etc.) again. Specifically, for example, the forming device 30 cuts a portion where the structure should be cut but not cut. Thereby, the structure manufacturing system 100 can correctly fabricate the structure.

Further, the program for realizing the function of the processing unit in the present invention is recorded on a computer-readable recording medium, and the computer system reads the program recorded on the recording medium and executes the process for performing the shake determination. In addition, the "computer system" here includes hardware such as an OS or a peripheral device. In addition, the "computer system" also includes a WWW system that provides an environment (or display environment) for the home page. Further, the "computer-readable recording medium" refers to a portable medium such as a floppy disk, a magneto-optical disk, a ROM, a CD-ROM, or the like, and a memory device such as a hard disk of a computer system. Furthermore, the "computer-readable recording medium" also includes a server that transmits a program via a communication line such as the Internet or a telephone line, or a volatile memory (RAM) inside the computer system as a client. ) Keep the programmer in a certain amount of time.

Further, the program may be transmitted from a computer system storing the program, such as a memory device, to another computer system via a transmission medium or a carrier wave in the transmission medium. Here, the "transmission medium" of the transmission program refers to a medium having a function of transmitting information like a network (communication network) such as the Internet or a communication line (communication line) such as a telephone line. Further, the above program may be used to implement one of the above functions. Furthermore, it is also possible to implement a so-called differential file (differential program) in combination with a program that has recorded the above functions in a computer system.

Further, the feature amount indicating the degree of swaying of the photographic image of the present invention is obtained by the similarity calculation of the image comparison or the spatial frequency distribution of the image. However, the present invention is not limited thereto, and it is only required for obtaining the measurement. The method of detecting whether the measurement target or the shape measuring device relatively moves during the period of the image is not limited.

The present invention can be applied to a structure manufacturing system capable of determining whether or not the manufactured structure is a good product. Thereby, the inspection accuracy of the manufactured structure can be improved, and the manufacturing efficiency of the structure can be improved.

1‧‧‧Light source

2,3‧‧ lens

4‧‧‧Scan mirror

10‧‧‧Shape measuring device

12‧‧‧ Display Department

13‧‧‧Photography Department

14‧‧‧ Department of Irradiation

15‧‧‧Memory Department

16‧‧‧Characteristics calculation unit

17‧‧‧Decision Department

20‧‧‧Design device

30‧‧‧Forming device

40‧‧‧Control device

42‧‧‧Inspection Department

Fig. 1 is a block diagram showing a configuration example of a shape measuring device according to a first embodiment of the present invention.

Fig. 2 is a schematic configuration diagram of an illuminating unit according to the first embodiment of the present invention.

Fig. 3 is a view showing an example of a captured image according to the first embodiment of the present invention.

Fig. 4 is a flow chart showing an operation example of the shape measuring apparatus according to the first embodiment of the present invention.

Figure 5 is a graph showing the power distribution curve of the spatial frequency in the image data without sloshing.

Figure 6 is a graph showing the power distribution curve of the spatial frequency in the image data of the sloshing.

Fig. 7 is a flow chart showing an operation example of the shape measuring apparatus according to the second embodiment of the present invention.

Fig. 8 is a view showing an example of a comparison image in the third embodiment of the present invention.

Fig. 9 is a view showing an example of a comparison image in the fourth embodiment of the present invention.

Fig. 10 is a block diagram showing a configuration example of a shape measuring device according to a seventh embodiment of the present invention.

Fig. 11 is a flow chart showing an operation example of the shape measuring apparatus according to the seventh embodiment of the present invention.

10‧‧‧Shape measuring device

11‧‧‧Operation Input Department

12‧‧‧ Display Department

13‧‧‧Photography Department

14‧‧‧ Department of Irradiation

15‧‧‧Memory Department

16‧‧‧Characteristics calculation unit

17‧‧‧Decision Department

18‧‧‧ Point Group Calculation Department

A‧‧‧Measurement object

Claims (23)

A shape measuring device includes: a photographing unit that generates a photographed image after photographing a measurement target; and an irradiation unit that irradiates the measurement target with illumination light having a predetermined intensity distribution from a direction different from a direction in which the photographing unit photographs, so that the photographing unit The captured image is captured as an image in which a lattice pattern is projected on the measurement target; the feature amount calculation unit calculates a feature amount indicating the degree of sway existing in the captured image from the captured image; and a determination unit according to the feature amount It is determined whether or not there is sway in the photographic image. The shape measuring device according to claim 1, wherein the illuminating unit is capable of projecting a plurality of gradation patterns having a spatial frequency of a predetermined period and having different initial phases by the photographic portion to be projected onto the measurement target. The illumination unit illuminates the illumination light; the imaging unit generates a plurality of photographic images after the plurality of plaid patterns having different initial phases are projected onto the image of the measurement target. The shape measuring device according to claim 1 or 2, wherein the feature amount calculating unit calculates a similarity between the plurality of captured images as the feature amount. The shape measuring device according to any one of claims 1 to 3, wherein the illuminating unit irradiates the measurement target with a lattice pattern based on the N-bar method; the feature amount calculation unit calculates the same initial imaging phase The similarity between the plurality of photographic images after the grid pattern has been projected onto the image of the object to be measured As the feature amount. The shape measuring device according to the fourth aspect of the invention, wherein the image capturing unit projects a plurality of photographing timings in which the grid pattern having the same initial phase is projected onto the image of the measurement target, and the other image is projected onto the measurement target. Like. The shape measuring device according to claim 4, wherein the feature amount calculating unit calculates a similarity between the captured images of the complex array in which the grid pattern having the same initial phase is projected to the image of the measurement target, Feature amount. The shape measuring device according to any one of claims 1 to 6, further comprising a memory unit that stores in advance a template image that is a photographic image that has been projected onto the image of the measurement target, and the feature quantity is calculated. The unit calculates the similarity between the photographic image generated by the imaging unit and the template image. The shape measuring device according to any one of claims 1 to 7, wherein the feature amount calculating unit calculates the sharpness of the captured image as the feature amount. The shape measuring device according to claim 8, wherein the feature amount calculating unit calculates a spatial frequency distribution of the captured image, and calculates the sharpness based on a position of a center of gravity of the spatial frequency distribution. The shape measuring device according to the eighth aspect of the invention, wherein the determining unit determines the photographic image based on both the similarity between the plurality of photographic images calculated by the feature amount calculating unit and the sharpness of the photographic image. Whether there is shaking in the middle. The shape measuring device according to claim 10, wherein the feature amount calculating unit calculates a plurality of the image capturing images when the determining unit determines that the sharpness of all of the plurality of captured images is equal to or greater than a set threshold value. Similarity. The shape measuring device according to any one of claims 1 to 11, wherein the illuminating unit illuminates the illuminating light having the same intensity distribution and projected onto the image of the measuring object at the time of imaging. In the illumination light, the feature amount calculation unit calculates a similarity between the composite image obtained by combining the plurality of photographic images having different initial phases and the photographic image after the measurement target having the same illumination light is used as the feature amount. The shape measuring device according to any one of claims 1 to 12, wherein the feature amount calculating unit calculates a distribution of spatial frequencies of the plurality of captured images as the feature amount. The shape measuring device according to any one of claims 1 to 13, wherein the feature amount calculating unit calculates a spatial frequency component that is the highest among the spatial frequency components included in the captured image as the feature amount. The shape measuring device according to any one of claims 1 to 14, wherein the illuminating unit irradiates the measurement target with a lattice pattern based on a spatial code method; and the feature amount calculation unit calculates a plurality of the photographic images. Each spatial code is used as the feature amount. The shape measuring device according to any one of claims 1 to 15, wherein the determining unit determines that the image is shaken and outputs There is a warning part of the warning of the sway. The shape measuring device according to any one of claims 1 to 16, wherein the detecting unit determines that the measurement image is irradiated by the illumination light after the image capturing image is shaken, and generates the measurement target. Photography images. The shape measuring device according to any one of claims 1 to 17, wherein the illuminating portion has a light source, a light intensity modulation portion for modulating the intensity of light from the light source, and light from the light source a light intensity distribution conversion unit that converts the intensity distribution into a linear intensity distribution, and a scanning mirror for causing light from the light source to be in a direction relative to the longitudinal direction of the line and light from the light source, respectively The measurement target is scanned in the direction perpendicular to the projection direction and arranged. A structure manufacturing system comprising: a design device for making design information about a shape of a structure; a forming device for producing the structure according to the design information; and a shape measuring device according to any one of claims 1 to 18, The shape of the structure produced by the photographic image measurement; and an inspection device for comparing the shape information obtained by the measurement with the design information. A shape measuring method includes an image capturing unit that generates a captured image of a subject to be measured, and irradiates the measurement target with illumination light having a predetermined intensity distribution in a direction different from a direction in which the imaging unit is photographed, so that the photographing unit photographs the image The image measuring device is an image measuring device that is imaged as an irradiation portion of the image in which the measurement target has been projected with the lattice pattern, and includes: calculating, from the captured image, the degree of shaking in the image capturing image a step of characterizing the feature; and determining, based on the feature amount, a step of shaking the photographic image. A method for manufacturing a structure, comprising: an action of creating design information about a shape of a structure; and an action of fabricating the structure based on the design information; and producing a photographic image produced by using a shape measuring method of claim 20 The action of the shape of the structure; and the action of comparing the shape information obtained by the measurement with the design information. A shape measurement program product is provided with an imaging unit that generates a photographic image that is subjected to imaging measurement, and illuminates the measurement target with illumination light having a predetermined intensity distribution in a direction different from a direction in which the imaging unit is photographed. The computer that has captured the captured image as the shape measuring device of the illuminating unit that has projected the image of the plaid pattern has a step of calculating a feature amount indicating the degree of swaying of the photographic image from the captured image. a step of determining whether there is shaking in the photographic image based on the feature amount. A computer readable recording medium recording a shape measuring program product of claim 22 of the patent application.